X-ray inspection device

Abstract

To provide an X-ray inspection device suitable for performing a visual inspection step after imaging an X-ray transmission image with a simple structure and control.SOLUTION: The X-ray inspection device includes an X-ray irradiation unit for irradiating an object to be inspected in an inspection area with X-rays, an X-ray detection unit for detecting X-rays that have passed through the object to be inspected, a conveying unit for conveying the object to be inspected and passing it through the inspection area, a display unit for displaying an X-ray transmission image of the object to be inspected, a control unit for generating the X-ray transmission image of the object to be inspected using the X-ray detection results from the X-ray detection unit to control the display unit to display the X-ray transmission image of the object to be inspected, an auxiliary information generation unit for generating auxiliary information, and a display control unit for displaying the X-ray image and the auxiliary information on the display unit. The auxiliary information includes at least first auxiliary information that assists in grasping relative positions within the object to be inspected.SELECTED DRAWING: Figure 6

Description

[Technical field]

[0001] The present invention relates to an X-ray inspection apparatus that inspects an object by irradiating the object with X-rays. [Background technology]

[0002] An X-ray inspection device is known in which an X-ray generating unit and an X-ray detecting unit are placed opposite each other, and the object to be inspected is transported between them on a transport device such as a conveyor, and an X-ray transmission image of the object to be inspected is constructed using X-ray transmission data obtained as the object to be inspected passes between the X-ray generating unit and the X-ray detecting unit, and the object to be inspected is then non-destructively inspected using the X-ray transmission image.

[0003] When such an X-ray inspection device is introduced into an automatic production line in various factories, etc., objects to be inspected are continuously supplied to the X-ray inspection device by a transport device such as a conveyor, and processing such as sorting is performed according to the inspection result (e.g., pass / fail) (see, for example, Patent Document 1). In this type of so-called in-line X-ray inspection device, a monitor that displays an X-ray transmission image of the object to be inspected is installed, and the X-ray transmission image displayed on the monitor may be configured to be updated one after another every time the object to be inspected passes the X-ray irradiation position. In such a configuration, when the automatic production line is operating normally, workers or managers do not check the X-ray transmission image one by one.

[0004] On the other hand, when a process is provided in which an operator visually inspects the X-ray transmission image displayed on a monitor after the X-ray inspection device captures the X-ray transmission image, the X-ray transmission image displayed on the monitor needs to be of the object being inspected that is in the operator's hand. To ensure this, an X-ray inspection device has been proposed that displays the X-ray transmission image of the object being inspected on a monitor as the object is discharged from the X-ray inspection device (see, for example, Patent Document 2). [Prior art documents] [Patent documents]

[0005] [Patent Document 1] JP 2009-128231 A [Patent Document 2] JP 2012-207987 A Summary of the Invention [Problem to be solved by the invention]

[0006] Here, if a foreign object is found in the inspection results of the X-ray inspection device, a visual inspection and corrective work are required in which the operator removes the foreign object from the object being inspected while checking the position of the foreign object in the X-ray transmission image displayed on the monitor. In this case, if the X-ray transmission image is simply displayed on the monitor as in the X-ray inspection device described in Patent Document 2, there is no mark indicating the position of the foreign object on the object being inspected in the operator's hand, so it may be difficult to identify the position of the foreign object in the object being inspected while looking at the X-ray transmission image on the monitor. In particular, when the foreign object is transparent, the object being inspected is large and flat, or the image of the object being inspected displayed on the monitor and the surface of the object being inspected in the operator's hand look different, there is a problem that it is difficult to identify the position of the foreign object, and it takes a long time to remove the foreign object.

[0007] In view of the above problems, an object of the present invention is to provide an X-ray inspection apparatus that can easily identify the position of a foreign object during visual inspection and corrective work after capturing an X-ray transmission image. [Means for solving the problem]

[0008] The X-ray inspection apparatus of the present invention comprises an X-ray irradiation unit which irradiates an object in an inspection area with X-rays, an X-ray detection unit which detects the X-rays that have passed through the object, a transport unit which transports the object to pass through the inspection area, a display unit which displays an X-ray transmission image of the object to be inspected, a control unit which generates an X-ray transmission image of the object to be inspected using the X-ray detection result by the X-ray detection unit and controls the X-ray transmission image of the object to be inspected to be displayed on the display unit, an auxiliary information generation unit which generates auxiliary information which assists in determining the position of a foreign object in the object to be inspected, and a display control unit which displays the X-ray transmission image and the auxiliary information on the display unit, wherein the auxiliary information includes at least first auxiliary information which assists in determining the relative position in the object to be inspected.

[0009] According to the present invention, the auxiliary information is displayed on the display unit together with the X-ray transmission image of the inspection object, so that in the visual inspection process and corrective work, the worker can easily identify the position of the foreign object by comparing the X-ray transmission image displayed on the display unit with the inspection object at hand. Therefore, the X-ray inspection device can improve the efficiency of the corrective work by the worker.

[0010] In this case, it is preferable that the X-ray inspection apparatus further includes an auxiliary information presentation unit that presents the auxiliary information generated by the auxiliary information generation unit in accordance with the inspection object that has passed through the inspection target area and been placed in a work area where an operator works.

[0011] According to this configuration, the auxiliary information is displayed on the actual object placed on the work table, so that the worker can easily identify the position of the foreign object by relying on the auxiliary information displayed on the actual object. Therefore, the X-ray inspection device can further improve the efficiency of the corrective work by the worker.

[0012] The X-ray inspection apparatus of the present invention is characterized by comprising an X-ray irradiation unit that irradiates an object in an inspection target area with X-rays, an X-ray detection unit that detects the X-rays that have passed through the object, a transport unit that transports the object to pass through the inspection target area, a control unit that generates an X-ray transmission image of the object to be inspected using the X-ray detection result by the X-ray detection unit, an auxiliary information generation unit that generates auxiliary information, and an auxiliary information presentation unit that presents the auxiliary information generated by the auxiliary information generation unit in accordance with the object to be inspected that has passed through the inspection target area and been placed in a work area where an operator works. The transport unit may transport the object to the work area where the operator works.

[0013] According to this configuration, the auxiliary information is presented on the actual object placed on the work table, so that the worker can easily identify the position of the foreign object by comparing the auxiliary information provided by the auxiliary information providing unit with the object during the visual inspection process and corrective work. Therefore, the X-ray inspection device can improve the efficiency of the corrective work by the worker.

[0014] In this case, the auxiliary information may further include second auxiliary information indicating the position of the foreign matter in the object to be inspected. For example, the first auxiliary information may be a grid line, and the second auxiliary information may be a predetermined figure.

[0015] According to this configuration, the operator can easily identify the position of the foreign matter in the inspection object using the first auxiliary information and the second auxiliary information. [Brief description of the drawings]

[0016] [Figure 1] 1 is a schematic diagram illustrating a processing and inspection line 1 having an X-ray inspection apparatus 10 according to a first embodiment of the present invention. [Diagram 2] An example of a tray T is shown with a workpiece W. [Diagram 3] 1 is a schematic explanatory diagram showing the internal configuration of a main body 100 of an X-ray inspection apparatus 10. FIG. [Figure 4] 2 is a diagram showing a schematic view of a tray being transported inside the main body 100. FIG. [Diagram 5]1 is a functional block diagram of an X-ray inspection apparatus 10 according to a first embodiment. [Figure 6] FIG. 13 is a diagram showing an example of a display on a display 180. [Figure 7] 13 is a diagram showing another example of the display on the display 180. FIG. [Figure 8] 13 is a diagram showing yet another example of a display on the display 180. FIG. [Figure 9] FIG. 11 is a functional block diagram of an X-ray inspection apparatus 10A according to a second embodiment. [Figure 10] 13 is a schematic diagram showing an example of realizing an auxiliary information presentation section 220 and an auxiliary imaging section 230 in the second embodiment. FIG. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0017] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the following description, the same members are designated by the same reference numerals, and the description of members that have already been described will be omitted as appropriate.

[0018] [First embodiment] FIG. 1 is a schematic diagram illustrating a processing and inspection line 1 having an X-ray inspection apparatus 10 according to an embodiment of the present invention. The processing and inspection line 1 is a line for removing foreign bodies and inspecting objects to be processed and inspected, such as fish and chicken (hereinafter referred to as objects to be inspected or workpieces W). The processing and inspection line 1 is composed of an upstream processing unit 1a where an operator removes foreign bodies E (e.g., bones and cartilage) from the workpieces W, an imaging unit 1b which takes an X-ray transmission image of the workpieces W processed in the upstream processing unit 1a, and a downstream processing unit 1c where an operator removes foreign bodies E remaining on the workpieces W that have passed through the imaging unit 1b from the workpieces W. The workpieces W are processed and inspected in the upstream processing unit 1a, imaging unit 1b, and downstream processing unit 1c while placed on a predetermined tray T.

[0019] The upstream processing section 1a and the downstream processing section 1c are each provided with a work table S. The work table S is an example of a work area in the present invention. The height of each work table S is set to be approximately the same height as a conveying surface of a conveying mechanism 110 described later, which makes it easy to supply the workpiece W from the upstream processing section 1a to the imaging section 1b and to remove the workpiece W from the imaging section 1b to the downstream processing section 1c.

[0020] The imaging unit 1b is composed of a main body 100 of the X-ray inspection device 10. The upstream processing unit 1a and the downstream processing unit 1c are equipped with a work table S on which an operator performs a foreign object removal process. The downstream processing unit 1c is provided with a display 180, which is a part of the X-ray inspection device 10 and is a display unit that displays an X-ray transmission image of the work W captured by the imaging unit 1b. The display 180 is an example of a display unit in the present invention. As shown in FIG. 1, the X-ray inspection device 10 is composed of a main body 100 that irradiates the work W with X-rays while transporting the work W, and obtains an X-ray transmission image of the work W, and a display 180 that displays the X-ray transmission image of the work W obtained by the main body 100.

[0021] FIG. 2 shows an example of a tray T together with a workpiece W. The tray T is a rectangular dish-shaped container, for example, 25 cm wide and 80 cm long, and is made of a material that transmits X-rays (for example, plastics such as polyethylene and polystyrene). The tray T is supplied to the X-ray inspection device 10 so that the longitudinal direction is the conveying direction. As shown in FIG. 2, multiple workpieces W may be placed on the tray T.

[0022] Fig. 3 is a schematic explanatory diagram showing the internal configuration of a main body 100 of the X-ray inspection apparatus 10. Figs. 4(a) to (e) are diagrams that typically show how a tray is transported within the main body 100. Fig. 5 is a functional block diagram of the X-ray inspection apparatus 10.

[0023] The main body 100 includes a transport mechanism 110 , an X-ray irradiation unit 120 , an X-ray detection unit 130 , a main body cover 140 , and an operation unit 150 .

[0024] The transport mechanism 110 includes a supply roller conveyor section 112, a drive conveyor section 114, and a discharge roller conveyor section 116, which are arranged in the above order from the upstream processing section 1a side to the downstream processing section 1c side of the processing / inspection line 1. The transport mechanism 110 is an example of a transport section in the present invention. The upper surfaces of the supply roller conveyor section 112, the drive conveyor section 114, and the discharge roller conveyor section 116 are transport surfaces on which the workpiece W is placed, and the workpiece W placed on the transport surface is transported in a transport direction from the upstream processing section 1a side to the downstream processing section 1c side of the operator. As described later, the transport mechanism 110 transports the workpiece W to pass through the inspection target area R1 and further transports it to the workbench S.

[0025] The supply-side roller conveyor section 112 is composed of multiple rollers arranged in the conveying direction. Each roller is rotatable about an axis that is substantially perpendicular to the conveying direction and faces a direction substantially parallel to the conveying surface (i.e., the width direction of the conveying path), and rotates with the movement of the workpiece W placed on the roller in the conveying direction, making it easy to move the workpiece W in the conveying direction with a small force.

[0026] The drive conveyor section 114 comprises a drive roller 114a rotated by a motor (not shown), a driven roller 114b to which no driving force is supplied from a motor, and an endless conveying belt 114c wound around these rollers, and moves objects placed on the upper surface of the conveying belt 114c in the conveying direction.

[0027] The discharge side roller conveyor section 116, like the supply side roller conveyor section 112, is composed of a plurality of rollers arranged side by side along the conveying direction, making it easy to move the workpiece W in the conveying direction with a small force.

[0028] The X-ray irradiator 120 is disposed above the center of the transport mechanism 110. The X-ray irradiator 120 irradiates X-rays toward the X-ray detector 130 disposed inside the belt of the drive conveyor 114. The X-rays irradiated from the X-ray irradiator 120 pass through a slit (not shown) and spread from the X-ray irradiator 120 in a substantially fan-shaped manner. The X-rays irradiated from the X-ray irradiator 120 spread on a plane that is substantially perpendicular to the transport surface of the drive conveyor 114 and substantially perpendicular to the transport direction, and spread in the width direction of the transport belt of the drive conveyor 114.

[0029] Of the substantially sector-shaped area through which the X-rays irradiated from the X-ray irradiator 120 pass, an area from the upper surface of the conveyor belt to a predetermined height is an inspection target area R1 of the X-ray inspection device 10. The X-ray inspection device 10 irradiates X-rays to the workpiece W passing through the inspection target area R1, and performs a foreign body inspection.

[0030] The X-ray detection unit 130 is composed of a line sensor in which many X-ray detection elements are arranged in a line, and detects X-rays that have passed through the workpiece W. The X-ray detection unit 130 is arranged inside the conveyor belt so that the X-ray detection elements that make up the line sensor are arranged in a direction that is approximately perpendicular to the conveying direction and approximately parallel to the conveying surface (i.e., the width direction of the conveyor belt). Each X-ray detection element detects X-rays at each position on the line, and outputs the intensity of the X-rays detected at each position (amount of transmitted X-rays) to the control unit 160.

[0031] The body cover 140 is a housing for the main body 100, and also functions as a shield to prevent X-rays from leaking outside the X-ray inspection apparatus 10. The body cover 140 is provided to cover the X-ray irradiation unit 120, the X-ray detection unit 130, and the drive conveyor unit 114, and also covers parts of the supply side roller conveyor unit 112 and the discharge side roller conveyor unit 116.

[0032] The main body cover 140 is provided with a supply port 148 for supplying the workpiece W to the inside, and a discharge port 149 for discharging the workpiece W to the outside. The workpiece W is transported on the transport surface from the supply port 148 to the discharge port 149 by the transport mechanism 110. An X-ray shield, which is a plate-shaped body made of metal (e.g., stainless steel) capable of blocking X-rays, is provided at the supply port 148. The X-ray shield is axially supported so as to be rotatable at a predetermined angle in the transport direction so as not to interfere with the movement of the workpiece W when it is pushed by the movement of the workpiece W transported by the transport mechanism 110.

[0033] As shown in FIG. 3, similar X-ray shields are provided immediately before (X-ray shield 142) and immediately after (X-ray shield 143) the inspection target region R1, as well as at the exhaust port 149. The X-ray shield 142 is located in front of the inspection target area R1 in the transport direction, so as not to interfere with the inspection target area R1 when open (see Figure 4 (c)), and is located at a position away from the X-ray shield 141 in the transport direction by at least the length of a predetermined tray T.

[0034] The X-ray shield 143 is provided immediately behind the inspection target area R1 in the transport direction and at a position not to intrude into the inspection target area R1 when open.

[0035] The X-ray shield 144 is provided at the discharge port 149. The X-ray shield 144 is disposed at a position farthest from the inspection target region R1 among the X-ray shields disposed between the inspection target region R1 and the discharge port 149. The distance from the X-ray shield 143 to the X-ray shield 144 (i.e., the discharge port 149) is set to be greater than the length of the tray T in the transport direction.

[0036] Next, the positional relationship between the transport mechanism 110 (the supply side roller conveyor section 112, the drive conveyor section 114, and the discharge side roller conveyor section 116) and each of the X-ray shields (141 to 144) will be described.

[0037] The distance from the X-ray shield 141 provided at the supply port 148 to the end of the drive conveyor unit 114 on the supply port 148 side is set to be about 10 to 20 cm shorter than the length of the tray T. Also, in the region from the supply port 148 to the end of the drive conveyor unit 114 on the supply port 148 side, a part of the supply side roller conveyor unit 112 is disposed.

[0038] In addition, the distance from the end of the drive conveyor unit 114 on the discharge port 149 side to the X-ray shielding body 144 provided at the discharge port 149 is set to be shorter than the length of the tray T by about 10 to 20 cm. In addition, a part of the discharge side roller conveyor unit 116 is arranged in the region from the end of the drive conveyor unit 114 on the discharge port 149 side to the discharge port 149. Since the length of the tray T is shorter than the distance between the X-ray shielding body 143 and the X-ray shielding body 144, the drive conveyor unit 114 transports the tray T on which the workpiece W is placed to a position where the X-ray shielding body 143 is in a closed state and the X-ray shielding body 144 is in an open state. During the transport process, there is a position where both X-ray shielding bodies (143, 144) are in a closed state (see FIG. 4(d)), and both X-ray shielding bodies (143, 144) are not in an open state at the same time, so that leakage of X-rays can be prevented.

[0039] A plurality of passage sensors for detecting objects on the conveying surface are disposed inside the main body cover 140. In this embodiment, a retroreflective photoelectric sensor is used as the passage sensor.

[0040] The passage sensor 145 detects that an object has been supplied inside the body cover 140. The passage sensor 145 is provided to detect an object on the conveying surface between the X-ray shields 141 and 142. The passage sensor 145 is disposed on the side of the conveying path so that its optical axis faces the width direction of the conveying path and crosses directly above (for example, 1 cm above) the conveying surface. A reflector is disposed at a position where the optical axis of the passage sensor 145 intersects with the inner surface of the body cover 140, and reflects light emitted from a light emitting portion of the passage sensor 145 toward a light receiving portion of the passage sensor 145.

[0041] The passage sensor 146 detects that the workpiece W has reached the inspection target area R1. The passage sensor 146 is provided to detect an object on the transport surface between the X-ray shield 142 and the inspection target area R1. The passage sensor 146 is disposed on the side of the transport path so that its optical axis faces the width direction of the transport path and crosses directly above (e.g., 1 cm above) the transport surface. A reflector is disposed at a position where the optical axis of the passage sensor 146 intersects with the inner surface of the main body cover 140, and reflects light emitted from the light emitting portion of the passage sensor 146 toward the light receiving portion of the passage sensor 146.

[0042] The passing sensor 147 detects the presence or absence of an object in an area (the area indicated by the symbol R2 in FIG. 3, hereinafter referred to as the discharge waiting area R2) on the discharge-side roller conveyor section 116 and inside the main body cover 140, with its optical axis. The passing sensor 147 is an example of a waiting object detection section in the present invention. To detect an object in the discharge waiting area R2, the passing sensor 147 is disposed near one vertex of the waiting area so that its optical axis faces the diagonal direction of the discharge waiting area R2 and crosses directly above the waiting area (for example, 1 cm above). A reflector is disposed at a position where the optical axis of the passing sensor 147 intersects with the inner surface of the main body cover 140, and reflects light emitted from the light-emitting section of the passing sensor 147 toward the light-receiving section of the passing sensor 145.

[0043] An X-ray irradiation indicator L1 and a supply possible indicator L2 are disposed on the upper outer surface of the supply port 148 of the main body cover 140. The X-ray irradiation indicator L1 indicates that the X-ray irradiator 120 is irradiating X-rays, and for example, a red LED indicator is used. The supply possible indicator L2 is a means for visually indicating to an operator positioned near the supply port 148 that the supply possible state allows the supply of a new workpiece W to the X-ray inspection apparatus 10. The supply possible indicator L2 is an example of a visualization means in the present invention. For example, a green LED indicator is used as the supply possible indicator L2, which indicates that the supply possible state allows the supply of a new workpiece W to the X-ray inspection apparatus 10 when lit, and indicates that the supply prohibited state prohibits the supply of a new workpiece W to the X-ray inspection apparatus 10 when unlit.

[0044] The operation unit 150 includes switches and the like for performing various operations of the X-ray inspection apparatus 10. Specifically, the operation unit 150 includes a key switch KSW and a remote control button box RBX.

[0045] The key switch KSW has a structure similar to a normal key, and is provided on the outer surface of the main body cover 140. The switch can be turned ON / OFF by inserting a key into the key switch KSW and turning it. When the key switch KSW is in the ON state, the X-ray inspection apparatus 10 is in a usable state, and when it is in the OFF state, the X-ray inspection apparatus 10 is in an unusable state. The key can be removed from the cylinder of the key switch KSW only when it is in the OFF state, and when the X-ray inspection apparatus 10 is not in use, the key is removed from the key switch KSW and the removed key is kept by an administrator (for example, an operator with special authority).

[0046] The display 180 is disposed at a position that is easily visible to an operator performing foreign matter removal processing in the downstream processing unit 1c (for example, a position facing the operator across the workbench S). ​​The display 180 displays an X-ray transmission image of the workpiece W under the control of the control unit 160.

[0047] 5, the X-ray inspection apparatus 10 includes a control unit 160 that controls the operation of the X-ray inspection apparatus 10. The control unit 160 is connected to the above-mentioned X-ray irradiation unit 120, X-ray detection unit 130, drive conveyor unit 114, passage sensors (145-147), display 180, X-ray irradiation indicator light L1, supply possible indicator light L2, image memory 190, auxiliary information generation unit 200, display control unit 210, and operation unit 150. The control unit 160 performs processing based on signals from the passage sensors (145-147), X-ray detection unit 130, and operation unit 150, and controls each unit in the X-ray inspection apparatus.

[0048] The control unit 160 generates an X-ray transmission image of the workpiece W using the results of the X-ray detection by the X-ray detection unit 130 , and stores the image in the image memory 190 .

[0049] The auxiliary information generating unit 200 generates auxiliary information that assists in grasping the position of the foreign body E in the workpiece W. In this embodiment, the auxiliary information is displayed on the display 180 together with the X-ray transmission image, and assists the worker in grasping the position of the foreign body in the workpiece W. The auxiliary information includes first auxiliary information J1 that assists in grasping the relative position in the workpiece W, and second auxiliary information J2 that indicates grasping the position of the foreign body E in the workpiece W.

[0050] The first auxiliary information J1 may be, for example, grid lines (grid lines formed by solid lines, dotted lines, broken lines, etc.), lattice points, etc. For example, when the first auxiliary information J1 is grid lines or lattice points, the grid lines may be at a predetermined equal interval (for example, 5 mm, 1 cm, etc.). The setting of this predetermined interval may be freely changed by the operator using an external input means (setting button, etc.), or may be set in advance. The auxiliary information generating unit 200 may determine the position and display range of the grid lines and lattice points based on the workpiece W. The display position and display range of the first auxiliary information will be described later with reference to Figs. 6 to 8. The first auxiliary information J1 may be information other than the grid lines and lattice points. For example, the first auxiliary information may be a plurality of concentric circles and a plurality of radial straight lines passing through the centers of the concentric circles. In other words, the first auxiliary information may be any information that assists in grasping the relative position in the workpiece W.

[0051] The second auxiliary information J2 may be a predetermined graphic such as a circle or a square displayed at the position of the foreign matter E. It is more preferable to use the graphic as a frame to surround the foreign matter E. The auxiliary information generating unit 200 may analyze the X-ray transmission image to be displayed on the display 180, identify the foreign matter E in the workpiece W that appears in the X-ray transmission image, and generate the second auxiliary information according to the position of the identified foreign matter E.

[0052] The display control unit 210 causes the display 180 to display the X-ray transmission image and auxiliary information J1, J2 in order to assist the removal operation of the foreign matter E on the work table S of the downstream processing unit 1c. The display control unit 210 causes the display 180 to display the X-ray transmission image to which the auxiliary information J1 and J2 have been added, based on the X-ray transmission image stored in the image memory 190 and the auxiliary information J1 and J2 generated by the auxiliary information generation unit 200.

[0053] The timing at which the display control unit 210 displays the X-ray transmission image to which the auxiliary information J1 and J2 have been added on the display 180 is arbitrary, but it is preferable to switch the display of the X-ray transmission image and auxiliary information to the X-ray transmission image and auxiliary information for the next work W in sequence, using a predetermined event as a trigger. For example, the display may be switched using the push button provided on the remote control button box RBX as a trigger. The display may also be switched based on the output signal of the passage sensor. Specifically, the display may be switched using the fact that the passage sensor 147 no longer detects an object (i.e., the work W has been removed from the discharge waiting area R2). Also, a placement sensor may be provided on the workbench S, and the display may be switched using the fact that the placement sensor detects that the work W has been placed on the workbench S as a trigger. When the X-ray inspection device 10 is configured to judge the quality of the work W based on the X-ray transmission image or the like and perform sorting, the display may be switched based on a sorting signal indicating the result of the quality judgment (more specifically, the output of a sorting signal indicating a defect as a trigger).

[0054] 6 to 8 are diagrams showing examples of displays on the display 180. FIG.

[0055] 6(A), grid lines are displayed as first auxiliary information J1 superimposed on the X-ray transmission image. Also, a rectangle surrounding the foreign object E is displayed as second auxiliary information. With this configuration, the worker can use the evenly spaced grid lines to identify the position of the foreign object E in the X-ray transmission image of the workpiece W by comparing it with the workpiece W in front of him.

[0056] In the example shown in FIG. 6(B), grid lines are displayed as first auxiliary information J1 in an area other than the workpiece W in the X-ray transmission image (i.e., the grid lines do not cover the workpiece W). Also, a rectangle surrounding the foreign object E is displayed as second auxiliary information. With this configuration, it is possible to reduce the difficulty in viewing caused by the grid lines being displayed superimposed on the workpiece W. Then, the worker can use the grid lines as a guide to identify the position of the foreign object E shown in the X-ray transmission image of the workpiece W by comparing the image with the workpiece W in front of him.

[0057] 7(A), grid lines are displayed as first auxiliary information J1 so as not to overlap the workpiece W and its surroundings in the X-ray transmission image. Also, a rectangle surrounding the foreign substance E is displayed as second auxiliary information.

[0058] 7(B), grid lines are displayed as first auxiliary information J1 only around the workpiece W in the X-ray transmission image. Also, a rectangle surrounding the foreign substance E is displayed as second auxiliary information.

[0059] 7(C), dashed grid lines are superimposed and displayed as first auxiliary information J1 so that the grid lines do not overlap the workpiece W in the X-ray transmission image. Also, a rectangle surrounding the foreign object E is displayed as second auxiliary information.

[0060] 7(D), when grid lines are displayed as first auxiliary information J1 superimposed on the X-ray transmission image, dashed grid lines are displayed as the first auxiliary information J1 in the region of the workpiece W in the X-ray transmission image, and actual grid lines are displayed as the first auxiliary information J1 in the region other than the workpiece W. In addition, a rectangle surrounding the foreign object E is displayed as the second auxiliary information.

[0061] 8(A), grid points displayed at equal intervals in the vertical and horizontal directions on the screen, rather than grid lines, are superimposed on the X-ray transmission image as first auxiliary information J1. Also, a rectangle surrounding a foreign object E is displayed as second auxiliary information.

[0062] In the example shown in FIG. 8(B), grid lines are displayed at the ends of the area of ​​the workpiece W in the vertical and horizontal directions, and at positions that divide the area equally into the vertical and horizontal ends. Also, a rectangle surrounding the foreign object E is displayed as the second auxiliary information. In order to realize such a display form of the first auxiliary information, the auxiliary information generating unit 200 may identify the area of ​​the workpiece W in the X-ray transmission image, and determine the display positions of the grid lines based on the identified area of ​​the workpiece W. Note that, in the example shown in FIG. 8(B), grid lines are displayed at positions that divide the area between the vertical and horizontal ends into thirds, respectively, but the number of grid lines may be any number of equal divisions, not limited to thirds.

[0063] According to the first embodiment, the auxiliary information J1 and J2 are displayed on the display 180 together with the X-ray transmission image of the workpiece W, so that the worker can easily identify the position of the foreign object by comparing the X-ray transmission image displayed on the display 180 with the object to be inspected in front of him / her during the visual inspection process and corrective work. Therefore, the X-ray inspection device can improve the efficiency of the work performed by the worker.

[0064] Second Embodiment A second embodiment of the present invention will now be described. In the following description, the same reference numerals will be used to designate parts that have already been described, and description thereof will be omitted. In the first embodiment, the display control unit 210 displays the auxiliary information J1, J2 generated by the auxiliary information generation unit 200 on the display 180. In contrast, the X-ray inspection apparatus 10A according to the second embodiment differs from the first embodiment in that it further includes an auxiliary information presentation unit 220 and an auxiliary imaging unit 230.

[0065] The following describes the differences from the first embodiment, focusing on the configuration that realizes the function of presenting such auxiliary information on the actual workpiece W placed on the workbench S. Fig. 9 shows a functional block diagram of an X-ray inspection apparatus 10A according to the second embodiment.

[0066] 9, the X-ray inspection apparatus 10A includes an auxiliary information presenting unit 220 and an auxiliary imaging unit 230 in addition to the configuration of the X-ray inspection apparatus 10 in the first embodiment. The auxiliary information presenting unit 220 presents the auxiliary information J1, J2 generated by the auxiliary information generating unit 200 on the actual workpiece W placed on the workbench S. Furthermore, the auxiliary imaging unit 230 captures an image of the actual workpiece W placed on the workbench S.

[0067] 10, the auxiliary information presentation unit 220 can be realized by, for example, a projector. When the auxiliary information presentation unit 220 is realized by a projector, the projector may project the auxiliary information J1, J2 onto the surface of the workpiece W and present the auxiliary information J1, J2 on the actual workpiece W itself in the same manner as it is displayed on the display 180.

[0068] At this time, the auxiliary information presentation unit 220 may automatically adjust the position, angle (direction), and size at which the auxiliary information is presented, based on the image of the workpiece W on the workbench S captured by the auxiliary imaging unit 230. This allows the same auxiliary information as that displayed on the display 180 to be projected and presented on the original workpiece W. As a result, the worker can easily grasp the position of the foreign object E based on the auxiliary information J1, J2 projected onto the surface of the workpiece W.

[0069] In this embodiment, in addition to the same advantageous effects as those of the first embodiment, the following advantageous effects can be achieved. That is, since the auxiliary information J1, J2 is presented on the actual workpiece W by the auxiliary information presenting unit 220, the worker can identify the position of the foreign matter E in the visual inspection process and corrective work by referring to the auxiliary information J1, J2 provided by the auxiliary information presenting unit 220. At that time, since it is not necessary to refer to the display on the display 180, the efficiency of the work by the worker can be further improved.

[0070] [Modifications of the embodiment] Although the present embodiment has been described above, the present invention is not limited to these examples. For example, in the second embodiment, the display control unit 210 displays the auxiliary information J1 and J2 on the display 180, but the display control unit and the display unit may be omitted. In this case, for example, the auxiliary information J1 and J2 may be provided to the worker only by projection by the projector which is the auxiliary information presentation unit 220 in the second embodiment.

[0071] In the second embodiment, the auxiliary information presentation unit 220 is realized by a projector, but the auxiliary information presentation unit 220 does not have to be a projector. For example, the auxiliary information presentation unit 220 may be realized by a head mounted display. In this case, the head mounted display may be provided with various sensors such as an acceleration sensor, an attitude sensor, and a small camera, and the auxiliary information may be displayed on a screen based on information obtained by these sensors so that the auxiliary information appears to be presented in accordance with the position of the workpiece W. It is preferable that the head mounted display be an optically transparent type that allows the actual workpiece and the auxiliary information displayed on the screen to be simultaneously visible.

[0072] As another example, the auxiliary information presentation unit 220 may be realized by a display provided on the top plate of the workbench S. Specifically, the first auxiliary information J1 may be displayed on the top plate of the workbench S. The display position of the first auxiliary information J1 may be adjusted based on the image captured by the auxiliary imaging unit 230, as in the second embodiment. In this way, the first auxiliary information J1 can be presented for the workpiece W on the workbench S in a manner similar to the display on the display 180 shown in FIG. 6(B) and FIG. 7(A). Note that the second auxiliary information indicating the position of the foreign object E does not need to be displayed in this modified example, since it is displayed in a position hidden by the workpiece W on the top plate of the workbench S.

[0073] In the present invention, the "work area" refers to a place where an operator performs some kind of work on the work W that has passed through the inspection target area. Some kind of work includes, for example, holding the work W in one's hand, visually or manually sorting the work W, and removing foreign matter remaining on the work W. In each of the above embodiments, the work table S has been described as an example of the work area in the present invention, but the work area does not necessarily need to be provided with a work table.

[0074] In each of the above embodiments, the transport mechanism 110 transports the work W that has passed through the inspection area to the work area (work table S), but the transport mechanism 110 does not have to transport the work W to the work area. For example, in a configuration in which the quality of the work W is determined, the transport mechanism 110 may transport the work W that has been determined to be defective to an NG box or the like in which the work W is accumulated, and transport the work W that has been determined to be non-defective to a downstream process (e.g., a packaging process, etc.). Alternatively, the work W that has been passed through the inspection area by the transport mechanism 110 may be transported to the work area by an operator.

[0075] Any embodiment in which a person of ordinary skill in the art appropriately adds, deletes, or modifies components of the above-described embodiments, or any combination of features of each embodiment, is included within the scope of the present invention as long as it contains the gist of the present invention. [Explanation of symbols]

[0076] 1 Processing and inspection line 1a Upstream processing section 1b Imaging section 1c Downstream processing section 10 X-ray inspection equipment 100 Main body 110 Conveyor mechanism 112 Supply side roller conveyor section 114 Drive conveyor section 116 Discharge side roller conveyor section 120 X-ray irradiation section 130 X-ray detector 140 Body cover 150 Operation section 160 Control section 180 Display 190 Image Memory 200 Auxiliary information generation section 210 Display control unit 220 Auxiliary information presentation section 230 Auxiliary imaging unit W Work (Inspection item) T-Tray J1 1st auxiliary information J2 2nd auxiliary information

Claims

1. an X-ray irradiation unit that irradiates an object to be inspected in an inspection target area with X-rays; an X-ray detection unit that detects X-rays transmitted through the object to be inspected; a conveying unit that conveys the object to pass through the inspection target area; a display unit that displays an X-ray transmission image of the object to be inspected; a control unit that generates an X-ray transmission image of the inspection object using a result of the X-ray detection by the X-ray detection unit; an auxiliary information generating unit that generates auxiliary information that assists in grasping a position of a foreign substance in the inspection object; a display control unit that causes the X-ray transmission image and the auxiliary information to be displayed on the display unit; Equipped with 2. An X-ray inspection apparatus according to claim 1, wherein the auxiliary information includes at least first auxiliary information that assists in grasping a relative position of the object to be inspected.

2. 2. The X-ray inspection apparatus according to claim 1, wherein the transport unit transports the object to be inspected that has passed through the inspection target area to a work area where an operator works.

3. 2. The X-ray inspection apparatus according to claim 1, wherein the auxiliary information generated by the auxiliary information generation unit is presented in accordance with the object to be inspected that has passed through the inspection target area and been placed in a work area.

4. an X-ray irradiation unit that irradiates an object to be inspected in an inspection target area with X-rays; an X-ray detection unit that detects X-rays transmitted through the object to be inspected; a conveying unit that conveys the object to pass through the inspection target area; a control unit that generates an X-ray transmission image of the inspection object using a result of the X-ray detection by the X-ray detection unit; an auxiliary information generating unit that generates auxiliary information; and an auxiliary information providing unit that presents the auxiliary information generated by the auxiliary information generating unit in accordance with the object to be inspected that has passed through the inspection target area and been placed in a work area where an operator works.

5. 5. The X-ray inspection apparatus according to claim 4, wherein the transport unit transports the object to be inspected, which has passed through the inspection target area, to the work area.

6. The auxiliary information is 6. The X-ray inspection apparatus according to claim 1, further comprising second auxiliary information indicating a position of a foreign object in the object to be inspected.

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