Ultrasonic processing device

Abstract

To prevent adhesion of lithium foils to a processing tool after processing with a simple structure and thereby achieve a long life of the processing tool to maintain good processing over a long term.SOLUTION: A resin material R formed by a resin sheet made of HDPE (high density polyethylene) is disposed between a workpiece W supported by a support 2 and including lithium foils and a processing tool 35a. The structure allows the resin material R to extend sufficiently until processing of the workpiece W ends without being broken and prevents the lithium foils of the workpiece W from adhering to the processing tool 35a when the processing tool 35a is pressed by compressing means during the processing.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to an ultrasonic processing device that processes a workpiece including a lithium foil by pressing it while applying ultrasonic vibrations to the workpiece. [Background technology]

[0002] Conventionally, when cutting lithium foil, which is a workpiece, it has been proposed to cut it using, for example, the device described in Patent Document 1. Since the lithium foil after cutting tends to adhere to the cutting blade, measures have been taken to prevent adhesion, and in the device described in Patent Document 1, when cutting the lithium foil with the lower blade and upper blade, a gap is formed between the lower blade and the upper blade to prevent the lithium foil from being caught after cutting and to prevent the lithium foil from adhering to the blade tip. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 7-124816 Summary of the Invention [Problem to be solved by the invention]

[0004] Incidentally, the above-mentioned conventional device is configured to cut the lithium foil with a lower blade and an upper blade, but even when cutting the lithium foil with an ultrasonically vibrating cutting blade, if the cutting blade is used with the lithium foil still attached, the lithium foil cannot be cut, and the cutting blade itself needs to be replaced, shortening the life of the cutting blade. Therefore, an effective adhesion prevention measure is desired in a device that cuts lithium foil with an ultrasonically vibrating cutting blade. In addition, when joining lithium foil with ultrasonic vibration, the same problems as those described above occur.

[0005] The present invention has been made in consideration of the above-mentioned problems, and aims to prevent adhesion of lithium foil to a processing tool after processing with a simple configuration, thereby extending the life of the processing tool and maintaining good processing for a long period of time. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems, the ultrasonic processing device according to the present invention is an ultrasonic processing device that processes a workpiece including a lithium foil by pressing it while applying ultrasonic vibrations, and is characterized in that it comprises a support for supporting the workpiece, a processing tool that is provided on a pressing surface of a pressing body that presses the workpiece supported by the support and processes the workpiece, ultrasonic vibration means having an oscillator and a booster that impart ultrasonic vibrations to the processing tool, and pressure means that presses the workpiece sandwiched between the processing tool that presses the pressing body and ultrasonically vibrates it and the support, and a resin material having a mechanical elongation rate of 500% or more is interposed between the workpiece supported by the support and the processing tool.

[0007] If the elongation rate of the mechanical properties of the resin material is lower than 500%, the resin material will break when the processing tool is pressed for processing, and the lithium foil of the workpiece will adhere to the processing tool, making it impossible to continue using the processing tool and requiring the processing tool to be replaced. However, the inventors of the present application have discovered that if the elongation rate of the mechanical properties of the resin material is 500% or more, the resin material will not break when the processing tool is pressed for processing, and adhesion of the lithium foil of the workpiece to the processing tool can be prevented.

[0008] Therefore, as described above, a resin material having a mechanical property of elongation rate of 500% or more is interposed between the workpiece supported by the support and the processing tool. As a result, when the processing tool is pressed by the pressure means during processing, the resin material is sufficiently elongated without breaking until the processing is completed, and it is possible to prevent the lithium foil of the workpiece from adhering to the processing tool, and it is possible to prevent the processing tool from being unable to be used continuously due to adhesion, thereby extending the life of the processing tool and maintaining good processing for a long period of time. In this case, the resin material is preferably made of high density polyethylene (HDPE) or polypropylene (PP).

[0009] In addition, the resin material may be composed of a resin sheet wound around a winding roll, and the apparatus may include a payout means for paying out the resin sheet from the winding roll and interposing it between the workpiece and the processing tool, and a winding means for winding up the resin sheet interposed between the workpiece and the processing tool onto a winding roll.

[0010] According to this configuration, the unwinding means unwinds a resin sheet, which is a resin material, from the winding roll and interposes it between the workpiece and the processing tool, and the winding means winds up the resin sheet interposed between the workpiece and the processing tool onto the winding roll, so that a resin material having a mechanical property elongation rate of 500% or more can be interposed between the workpiece supported by the support and the processing tool.Furthermore, even if the resin sheet between the workpiece and the processing tool is damaged by processing due to the unwinding and winding of the resin sheet, a resin sheet with a minimal degree of damage can always be interposed between the workpiece and the processing tool.

[0011] The resin material may be attached to the lower surface of the processing tool. The resin material may be coated on the surface of the processing tool. The processing tool is preferably a cutting blade for cutting the workpiece, and the cutting blade is preferably formed from the resin material. In this manner, a resin material having a mechanical property elongation rate of 500% or more can be interposed between the workpiece supported by the support and the processing tool. When the resin material is attached, the resin material may be replaced depending on the degree of damage to the resin material. When the surface of the processing tool is coated, or when the processing tool is a cutting blade and the cutting blade is formed from a resin material, the processing tool may be replaced depending on the degree of damage to the resin material, but the frequency of replacement can be significantly reduced compared to when the processing tool is not coated.

[0012] The resin material preferably has a mechanical compressive strength of 60 MPa or less, and a tensile modulus of elasticity of 2000 MPa or less. In this case, as in the case where the mechanical property elongation rate of the resin material is 500% or more, the breakage of the resin material when the processing tool is pressed for processing can be effectively suppressed, and the effect of preventing the lithium foil of the workpiece from adhering to the processing tool can be obtained.

[0013] In addition, in an ultrasonic processing device that processes a workpiece including a lithium foil by pressing it while applying ultrasonic vibration, the device includes a support that supports the workpiece, a processing tool that processes the workpiece and is provided on the pressing surface of a pressing body that presses the workpiece supported by the support, an ultrasonic vibration means having an oscillator and a booster that apply ultrasonic vibration to the processing tool, and a pressure means that presses the pressing body and ultrasonically vibrates the workpiece sandwiched between the processing tool and the support, and a resin material having a tensile strength of 100 MPa or less may be interposed between the workpiece supported by the support and the processing tool. In this case, when the processing tool is pressed by the pressure means during processing, the resin material is sufficiently stretched without breaking until processing is completed, and the lithium foil of the workpiece can be prevented from adhering to the processing tool. Effect of the Invention

[0014] According to the present invention, by interposing a resin material having a mechanical property elongation rate of 500% or more between the workpiece supported by the support and the processing tool, when the processing tool is pressed by a pressure means during processing, the resin material stretches sufficiently without breaking until the processing is completed, preventing the lithium foil of the workpiece from adhering to the processing tool. This prevents the processing tool from becoming unusable due to adhesion, extends the life of the processing tool, and makes it possible to maintain good processing over a long period of time. [Brief description of the drawings]

[0015] [Figure 1] 1 is a side view of a first embodiment of an ultrasonic processing device (for joining) of the present invention. [Diagram 2] FIG. 1 is a front view of a first embodiment. [Diagram 3] FIG. 2 is a front view of a portion of the first embodiment. [Figure 4] FIG. 4 is a side view of a second embodiment of the ultrasonic processing device (for cutting) of the present invention. [Diagram 5] FIG. 11 is a front view of a portion of the second embodiment; [Figure 6] FIG. 13 is a front view of a portion of the third embodiment. [Figure 7] FIG. 13 is a front view of a portion of the fourth embodiment. [Figure 8] FIG. 13 is a front view of a portion of the fifth embodiment. [Figure 9] FIG. 13 is a front view of a portion of the sixth embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0016] First Embodiment A first embodiment of an ultrasonic processing device to which the present invention is applied for joining will be described with reference to FIGS.

[0017] 1 and 2 show an ultrasonic processing device 1, in which the workpieces are sandwiched between a support surface 21 of a support 2 and a horn of a head unit 3 that ultrasonically vibrates in a horizontal direction (Y-axis direction in Figs. 1 and 2) parallel to the support surface 21, and the workpieces are joined by applying ultrasonic vibration energy in the form of so-called lateral vibration in the left-right direction (Y-axis direction) while pressing the workpieces in the up-down direction (Z-axis direction) using a pressure means controlled by a control device 4 configured as a microcomputer equipped with a CPU and memory. Here, the workpieces may be, for example, a laminate of lithium foils, or a laminate of lithium foil and other metals, and lithium foils with a thickness of 10 μm to several hundreds of μm can be joined.

[0018] The head portion 3 includes a vibrator 31 that applies ultrasonic vibrations in the Y-axis direction in FIG. 1, which is the pressure direction, a resonator 32 connected to one end of the vibrator 31, and a support means 33 that supports the vibrator 31 and the resonator 32 so that they can move freely in the up-down direction (the Z-axis direction in FIGS. 1 and 2) perpendicular to the left-right direction (the Y-axis direction in FIGS. 1 and 2), which is the vibration direction. The vibrator 31 ultrasonically vibrates the resonator 32, thereby applying ultrasonic vibrations to the objects to be joined, and the objects to be joined are joined.

[0019] Here, the resonator 32 includes a booster 34 and a horn 35, and the transducer 31 and the resonator 32 (booster 34 and horn 35) correspond to the ultrasonic vibration means in the present invention. A processing tool 35a that directly contacts and joins the workpiece is attached to the lower surface of the horn 35.

[0020] Specifically, resonator 32 resonates with ultrasonic vibrations generated by transducer 31 controlled by control device 4 and ultrasonically vibrates in the left-right direction (Y-axis direction in FIG. 2), which is the direction of its central axis, and includes booster 34 and horn 35, with horn 35 connected to the underside of booster 34. Booster 34 is formed to a length of one wavelength of the resonant frequency so that its approximate center position in the Y-axis direction and both left and right end positions are maximum amplitude points, for example, and horn 35 is connected to the central maximum amplitude point.

[0021] At this time, two positions 1 / 4 wavelength away from each maximum amplitude point in the left-right direction (Y-axis direction) correspond to the first and second minimum amplitude points of booster 34, respectively, and resonator 32 is supported at these first and second minimum amplitude points by support means 33. Booster 34 is formed in a columnar shape whose cross section is, for example, octagonal, and vibrator 31 is connected to the right end of booster 34 by a headless screw or the like so as to be coaxial with the central axis of booster 34.

[0022] Here, the resonator 32 (booster 34 and horn 35) may be formed from various metal materials generally used to form resonators, such as titanium, titanium alloys, iron, stainless steel, aluminum, and aluminum alloys such as duralumin, etc. Also, the resonator 32 is desirably configured so that its resonance frequency is about 15 kHz to about 60 kHz, and its vibration amplitude (amplitude of expansion and contraction in the Y-axis direction in Figs. 1 and 2) is about 2 µm to about 300 µm.

[0023] The support means 33 includes a base 33a, a vertical (Z-axis direction in Figures 1 and 2) pillar 33b whose upper end is connected to the base 33a, a support portion 33c connected to the lower end of the pillar 33b, and a pair of clamp portions 33d connected to the lower surface of the support portion 33c, and supports the resonator 32 by gripping gripped portions at positions corresponding to the first and second minimum amplitude points of the booster 34 with both clamp portions 33d.

[0024] Here, each of the clamp portions 33d is composed of upper and lower two divided gripping members 33d1, 33d2 which can be combined, and the upper gripping member 33d1 is fixed to the lower surface of the support portion 33c, and the upper and lower gripping members 33d1, 33d2 clamp and grip the gripped portions at positions corresponding to the first and second minimum amplitude points of the booster 34 of the resonator 32.

[0025] The gripped portion of the booster 34 may be supported by the support means 33 via an elastic member such as an O-ring or a diaphragm.

[0026] The pressure applying means 5 moves the support means 33 supporting the resonator 32 in the vertical direction (the Z-axis direction in Figures 1 and 2) to move the resonator 32 closer to or away from the support 2, and is provided with a drive motor 51, a vertical (Z-axis) ball screw 52 rotated by the drive motor 51, a U-shaped cross-section base 53 which rotatably supports the upper and lower ends of the ball screw 52, ​​and a rectangular parallelepiped movable support 54 whose front side is connected to the base 33a of the support means 33 and whose central part is formed with a vertical female screw to which the ball screw 52 is screwed.

[0027] The base 53 includes a long flat plate portion 53a extending in the vertical direction (the Z-axis direction in Figures 1 and 2), horizontal extension portions 53b which are integrally provided at the upper and lower ends of the flat plate portion 53a and which rotatably support the upper and lower ends of the ball screw 52, ​​and a vertical (Z-axis) guide rail 53c which is attached to the front side of the flat plate portion 53a between the upper and lower extension portions 53b and which is attached along the flat plate portion 53a.

[0028] Then, the drive motor 51 is placed on the upper surface of the upper extension portion 53b, and a guide rail 53c is inserted into a vertical (Z-axis) guide groove formed on the rear side of the movable support 54. The drive motor 51 is controlled by the control device 4 to rotate, and the ball screw 52 rotates, causing the movable support 54 to move vertically (in the Z-axis direction) along the guide rail 53c.

[0029] At this time, the movable support 54 moves upward or downward according to the rotation direction of the ball screw 52, ​​so that the base 33a of the support means 33 connected to the movable support 54 moves up and down, and the horn 35 of the resonator 32 approaches the support 2 and moves away from the support 2. Then, the downward movement of the base 33a caused by the downward movement of the movable support 54 applies pressure to the workpiece sandwiched between the horn 35 and the support 2 to join them.

[0030] Meanwhile, a pressure sensor (not shown) constituted by a load cell or the like is provided on the support 2 or the head unit 3, and the pressure sensor detects the pressure applied by the pressure means 5 to the workpiece held between the horn 35 and the support 2. Also, a linear encoder 6 (see FIG. 1) is provided on the movable support 54, which detects the height of the head unit 3 in the vertical direction (Z-axis direction in FIG. 1). The height of the head unit 3 is adjusted by the control device 4 controlling the drive motor 51 based on the detection signal from the linear encoder 6, and the height of the head unit 3 is adjusted, and the height of the horn 35 of the resonator 32 relative to the support 2 is adjusted.

[0031] The greatest feature of the present invention is that, as shown in FIG. 3, a resin material R having a mechanical elongation rate of 500% or more is interposed between the workpiece W supported by the support 2 and the processing tool 35a.

[0032] Here, the resin material R is most preferably made of, for example, high density polyethylene (HDPE), and as shown in Fig. 3, the resin material R is made of a resin sheet made of HDPE wound around a winding roll 8a, and includes a payout means for paying out the resin material R made of the resin sheet wound around the winding roll 8a so as to be interposed between the workpiece W and the processing tool 35a, and a winding means for winding up the resin material R made of the resin sheet interposed between the workpiece W and the processing tool 35a around a winding roll 8b which is rotationally driven by a drive motor (not shown). Here, the resin material R made of the resin sheet preferably has a thickness of about 10 µm to several hundreds of µm.

[0033] HDPE (high density polyethylene) has mechanical properties of an elongation rate of 500% or more, a mechanical compressive strength of 60 MPa or less, and a tensile modulus of elasticity of 2000 MPa or less. Therefore, by interposing HDPE between the workpiece W supported by the support 2 and the processing tool 35a, when the processing tool 35a is pressed by the pressure means 5 during processing, the resin material R will not be sufficiently elongated and broken until processing is completed.

[0034] Then, in a state in which the resonator 32 is interposed between the workpiece W supported by the support 2 and the processing tool 35a, the support means 33 supporting the resonator 32 is moved in the vertical direction (Z-axis direction in Figs. 1 and 2) by the pressure means 5 to bring the resonator 32 close to the support 2, and while controlling the pressure applied by the processing tool 35a to a predetermined value, the oscillator 31 and the resonator 32, which are ultrasonic vibration means, are ultrasonically vibrated, and the processing tool 35a is pressed toward the support 2 with the resin material R sandwiched therebetween, and ultrasonic vibration is applied to join the workpiece W. At this time, when the processing tool 35a is pressed by the pressure means 5, the resin material R is sufficiently stretched until the processing is completed, so that the resin material R does not break during processing, and the lithium foil of the workpiece W is prevented from adhering to the processing tool 35a due to the breakage.

[0035] When the joining of the workpieces W is completed, the application of ultrasonic vibration to the processing tool 35a is stopped, the resonator 32 is moved upward to stop the pressing of the processing tool 35a, the processing tool 35a is separated from the support 2, and the resin material R is also separated from the workpieces W. Then, depending on the degree of damage to the resin material R, a resin sheet which is the resin material R is taken up on the take-up roll 8b by the pay-out means and the take-up means, and the undamaged resin material R is interposed between the workpieces W and the processing tool 35a.

[0036] Therefore, according to the first embodiment, a resin material R consisting of a resin sheet made of HDPE (high density polyethylene) is interposed between the workpiece W including the lithium foil supported by the support 2 and the processing tool 35a. Therefore, when the processing tool 35a is pressed by the pressure means 5 during processing of the workpiece W, the resin material R stretches sufficiently without breaking until the processing is completed, preventing the lithium foil of the workpiece W from adhering to the processing tool 35a. This makes it possible to prevent the processing tool 35a from becoming unable to continue to be used due to adhesion, thereby extending the life of the processing tool 35a and maintaining good processing for a long period of time.

[0037] In addition, the unwinding means unwinds a resin sheet, which is resin material R, from the winding roll 8a and interposes it between the workpiece W and the processing tool 35a, and the winding means winds up the resin sheet interposed between the workpiece W and the processing tool 35a onto the winding roll 8b, so that the resin material R made of an HDPE sheet can be interposed between the workpiece W supported by the support body 2 and the processing tool 35a, and even if the resin material R between the workpiece W and the processing tool 35a is damaged by processing due to the unwinding and winding of the resin sheet, it is possible to always interpose undamaged resin material R between the workpiece W and the processing tool 35a.

[0038] Furthermore, since high-density polyethylene (HDPE) has mechanical properties such as an elongation rate of 500% or more, a mechanical compressive strength of 60 MPa or less, and a tensile modulus of elasticity of 2000 MPa or less, by interposing it between the workpiece W supported by the support 2 and the processing tool 35a, when the processing tool 35a is pressed by the pressure means 5 during processing, the resin material R stretches sufficiently without breaking until the processing is completed, thereby obtaining a high effect of preventing the lithium foil of the workpiece W from adhering to the processing tool 35a.

[0039] <Second embodiment> A second embodiment of an ultrasonic processing device to which the present invention is applied for cutting will be described with reference to Figures 4 and 5. Note that the second embodiment differs from the first embodiment in that an ultrasonic vibration means is arranged horizontally and ultrasonic vibrations are applied to a pressing body in the vertical direction (Z-axis direction in Figure 4) to cut the lithium foil that is the workpiece, and other configurations are the same as those of the first embodiment, so the following mainly describes the differences from the first embodiment.

[0040] As shown in FIG. 4, a resonator 302 constituting a head unit 30 similar to the ultrasonically vibrating head unit 3 (see FIG. 1 and FIG. 2) resonates with ultrasonic vibrations generated by a transducer 301 controlled by a control device 4 and ultrasonically vibrates in the vertical direction (Z-axis direction in FIG. 4), which is the direction of its central axis, and includes a booster 304 and a horn 305. Here, similar to the booster 34, the lower end of the booster 304 and the upper end of the horn 305 are connected by a headless screw so that their central axes are coaxial. The booster 304 is formed to have a length of one wavelength of the resonant frequency so that its approximate center position in the vertical direction (Z-axis direction) and both its upper and lower end positions are maximum amplitude points, and two positions 1 / 4 wavelength away from each maximum amplitude point in the vertical direction (Z-axis direction) correspond to the first and second minimum amplitude points of the booster 304, respectively. The booster 304 is formed in a cylindrical shape with a circular cross section.

[0041] A long mounting member 306 is detachably attached to the underside of the horn 305 in the X-axis direction in FIG. 4 in the same manner as the horn 305, and a cutting blade 307, which is a processing tool, is fixed to the underside of the mounting member 306. The lithium foil, which is the workpiece placed on the support surface 21 of the support 2, is pressed downward (in the Z-axis direction) through the horn 305 with a predetermined pressure by the downward movement of the support means 303 described later, and the horn 305 resonates with the oscillator 301 to vibrate ultrasonically, thereby applying ultrasonic vibration to the cutting blade 307. Note that the horn 305 is formed to have a length of half the wavelength of the resonance frequency so that both ends of the horn 305 in the vertical direction (Z-axis direction) in FIG. 4 are maximum amplitude points. At this time, the position of the horn 305 approximately in the center in the vertical direction (Z-axis direction) corresponds to the third minimum amplitude point.

[0042] Meanwhile, in order to attach mounting member 306, whose vertical cross section, which is a vertical cross section in the Z-axis direction perpendicular to the longitudinal direction of horn 305 (the X-axis direction in FIG. 4), is substantially concave, a horn-side convex stripe (not shown) having a length direction in the X-axis direction is formed in the center of the lower surface of horn 305, and a mounting member-side concave groove (not shown) having a length direction in the X-axis direction is formed in the center of the upper surface of mounting member 306, and mounting member 306 is attached to the lower surface of horn 305 by fitting the horn-side convex stripe and the mounting member-side concave groove together. Then, a long groove is formed in the X-axis direction in the lower surface of mounting member 306 for fixing cutting blade 307, and the upper end of cutting blade 307 is fitted into this groove and bonded or welded with an adhesive, so that cutting blade 307 is fixed to mounting member 306.

[0043] 1 and 2, the support means 303 includes a movable support body 54 and a clamp means 308, and supports the resonator 302 by clamping the gripped portion of the booster 304 with the clamp means 308. The clamp means 308 is provided at two locations on the movable support body 54 so as to be able to grip (clamp) two gripped portions formed on the booster 304, and each of the clamp means 308 includes a first member and a second member that clamp the gripped portion of the booster 304.

[0044] Specifically, the first and second members of clamping means 308 are each provided with a recess having a shape capable of engaging with the cross-sectional shape of the gripped portion, and the first and second members of clamping means 308 supported by movable support 54 are inserted into concave grooves forming the gripped portion so that the gripped portion of booster 304 is clamped between the recesses of the first and second members, and the first and second members are fixed with bolts, whereby the gripped portion of booster 304 is gripped by clamping means 308.

[0045] The configuration of the support means 303 supporting the resonator 302 is not limited to the clamp means 308 fixed by a bolt while gripping the gripped portion formed on the booster 304 as described above, but may be any configuration capable of supporting the gripped portion of the booster 304, such as a mechanical clamp mechanism configured to be electrically controllable or a clamp mechanism that can be attached with one touch.

[0046] Furthermore, the position of the gripped portion formed on the resonator 302 is not limited to the minimum amplitude point, and the gripped portion may be formed at any position on the resonator 302. Furthermore, the configuration of the gripped portion is not limited to a configuration in which a concave groove is formed along the circumferential direction on the outer circumferential surface of the resonator 302, and the gripped portion may be formed in any shape as long as it can be gripped by the support means 303, such as a configuration in which a convex flange is formed along the circumferential direction on the outer circumferential surface of the resonator 302. Furthermore, the gripped portion may be supported by the support means 303 via an elastic member such as an O-ring or a diaphragm.

[0047] In the second embodiment, as shown in FIG. 5, a resin material R made of, for example, high density polyethylene (HDPE) having a mechanical property of elongation of 500% or more is interposed between the workpiece Wa made of lithium foil supported by the support 2 and the cutting blade 307 which is a processing tool. Here, in the present embodiment, as in the above-mentioned first embodiment, a payout means for paying out the resin material R made of a resin sheet wound around a winding roll 8a and interposing it between the workpiece W and the processing tool 35a, and a winding means for winding up the resin material R made of a resin sheet interposed between the workpiece W and the processing tool 35a around a winding roll 8b are provided. The lithium foil which is the workpiece Wa has a thickness of, for example, 10 μm to several hundreds of μm.

[0048] Then, in a state in which the resonator 302 is interposed between the workpiece Wa supported by the support 2 and the cutting blade 307, the support means 303 supporting the resonator 302 is moved in the vertical direction (Z-axis direction in Figs. 1 and 2) by the pressure means 5, the resonator 302 is brought close to the support 2, and the pressure applied by the cutting blade 307 is controlled to a predetermined value while the oscillator 301 and the resonator 302, which are ultrasonic vibration means, are ultrasonically vibrated, and the cutting blade 307 is pressed toward the support 2 with the resin material R sandwiched therebetween while ultrasonic vibration is applied, thereby cutting the workpiece (lithium foil) Wa. At this time, when the cutting blade 307 is pressed by the pressure means 5, the resin material R is sufficiently stretched until the processing is completed, as in the case of the first embodiment, so that the resin material R does not break during processing, and the workpiece (lithium foil) Wa is prevented from adhering to the cutting blade 307 due to the breakage.

[0049] Therefore, according to the second embodiment, similarly to the first embodiment described above, when the cutting blade 307 is pressed by the pressure means 5 during cutting of the workpiece Wa, the resin material R stretches sufficiently without breaking until the cutting is completed, preventing the workpiece (lithium foil) Wa from adhering to the cutting blade 307. This makes it possible to prevent the cutting blade 307 from becoming unable to continue to be used due to adhesion. This extends the life of the cutting blade 307 and enables good processing to be maintained for a long period of time.

[0050] <Third embodiment> A third embodiment of an ultrasonic bonding device to which the present invention is applied for bonding will be described with reference to Fig. 6. Note that in the third embodiment, the basic configuration of the device is the same as that of the first embodiment described above, so the following mainly describes the differences from the first embodiment with reference to Figs. 1 and 2.

[0051] The third embodiment differs from the first embodiment in that a plate-shaped resin material Ra made of HDPE is attached to the lower surface of the processing tool 35a. The thickness of the resin material Ra may be up to 10 mm.

[0052] Therefore, according to the third embodiment, it is possible to achieve the same effects as those of the first embodiment described above.

[0053] <Fourth embodiment> A fourth embodiment of an ultrasonic bonding device to which the present invention is applied will be described with reference to Fig. 7. Note that in the fourth embodiment, the basic configuration of the device is the same as that of the first embodiment described above, so the following mainly describes the differences from the first embodiment with reference to Figs. 1 and 2.

[0054] The fourth embodiment differs from the first embodiment in that the surface of the processing tool 35a is coated with a resin material Rb made of HDPE to a thickness of 1 μm to several hundreds of μm.

[0055] Therefore, according to the fourth embodiment, it is possible to achieve the same effects as those of the first embodiment described above.

[0056] <Fifth embodiment> A fifth embodiment of the ultrasonic bonding device to which the present invention is applied for cutting will be described with reference to Fig. 8. Note that in the fifth embodiment, the basic configuration of the device is the same as that of the second embodiment described above, so the following mainly describes the differences from the second embodiment with reference to Fig. 4.

[0057] The fifth embodiment differs from the second embodiment in that the surface of a cutting blade 307, which is a processing tool, is coated with a resin material Rc made of HDPE to a thickness of 1 μm to several hundreds of μm.

[0058] Therefore, according to the fifth embodiment, it is possible to achieve the same effects as those of the second embodiment described above.

[0059] Sixth Embodiment A sixth embodiment of an ultrasonic joining device to which the present invention is applied for cutting will be described with reference to Fig. 9. Note that in the sixth embodiment, the basic configuration of the device is the same as that of the second embodiment described above, so the following mainly describes the differences from the second embodiment with reference to Fig. 4.

[0060] The sixth embodiment differs from the second embodiment in that the cutting blade 307 itself, which is a processing tool, is made of HDPE.

[0061] Therefore, according to the sixth embodiment, it is possible to achieve the same effects as those of the second embodiment described above.

[0062] The present invention is not limited to the above-described embodiment, and various modifications other than those described above are possible without departing from the spirit of the present invention.

[0063] For example, in each of the above-described embodiments, HDPE is given as the material of the resin material, but the resin materials R, Ra, Rb, and Rc are not limited to HDPE and may be PP (polypropylene).

[0064] In another embodiment, a material having a tensile strength of 100 MPa or less may be used for the resin materials R, Ra, Rb, and Rc. Specifically, PET (polyethylene terephthalate), HDPE, PP, PC (polycarbonate), and PES (polyethersulfone) can be used.

[0065] In addition, in Figure 3 showing the first embodiment and Figure 5 showing the second embodiment, the resin material R is arranged so as to float above the workpieces W, Wa except at the processing points, but the resin material R may have dimensions approximately the same as the workpieces W, Wa and be arranged so as to be placed on the workpieces W, Wa.

[0066] In addition, in the second, fifth and sixth embodiments described above, the cutting blade 307 has a straight cutting edge as an example, but the present invention can be similarly applied to blades having a rectangular, circular or other shaped cutting edge.

[0067] The present invention can be applied to an ultrasonic processing device that applies ultrasonic vibrations to a workpiece including lithium foil and presses the workpiece to process it. [Explanation of symbols]

[0068] 1,1a...Ultrasonic processing equipment 2...Support 4 ... Control device (notification means) 5. Pressurizing means 31,301 ... Transducer (ultrasonic vibration means) 32,302...Resonator (ultrasonic vibration means) 34,304 ... Booster (ultrasonic vibration means) 35.305 ... Horn (ultrasonic vibration means) 35a…Processing tools 307...Cutting blade (processing tool) W,Wa…workpiece R, Ra, Rb, Rc…Resin material

Claims

1. In an ultrasonic processing device that applies ultrasonic vibrations to a workpiece including a lithium foil and presses it to process the workpiece, A support for supporting the workpiece; a processing tool provided on a pressing surface of a pressing body that presses the workpiece supported by the support body and processes the workpiece; an ultrasonic vibration means having a vibrator and a booster for applying ultrasonic vibration to the processing tool; a pressurizing means for pressing the workpiece sandwiched between the processing tool, which applies pressure to the pressing body and ultrasonically vibrates the pressing body, against the support; A resin material having a mechanical property elongation rate of 500% or more is interposed between the workpiece supported by the support and the processing tool. An ultrasonic processing device characterized by:

2. the resin material is constituted by a resin sheet wound on a winding roll, a feeding means for feeding the resin sheet from the winding roll and inserting the resin sheet between the workpiece and the processing tool; a winding means for winding the resin sheet interposed between the workpiece and the processing tool onto a winding roll; 2. The ultrasonic processing device according to claim 1, further comprising:

3. 2. The ultrasonic machining device according to claim 1, wherein the resin material is attached to a lower surface of the machining tool.

4. 2. The ultrasonic machining device according to claim 1, wherein the resin material is coated on a surface of the machining tool.

5. the processing tool is a cutting blade for cutting the workpiece, 2. The ultrasonic processing device according to claim 1, wherein the cutting blade is made of the resin material.

6. 6. The ultrasonic processing device according to claim 1, wherein the resin material has a mechanical compressive strength of 60 MPa or less.

7. 6. The ultrasonic processing device according to claim 1, wherein the resin material has a tensile modulus of elasticity of 2000 MPa or less.

8. 7. The ultrasonic machining device according to claim 6, wherein the resin material has a tensile modulus of elasticity of 2000 MPa or less.

9. In an ultrasonic processing device that applies ultrasonic vibrations to a workpiece including a lithium foil and presses it to process the workpiece, A support for supporting the workpiece; a processing tool provided on a pressing surface of a pressing body that presses the workpiece supported by the support body and processes the workpiece; an ultrasonic vibration means having a vibrator and a booster for applying ultrasonic vibration to the processing tool; a pressurizing means for pressing the workpiece sandwiched between the processing tool, which applies pressure to the pressing body and ultrasonically vibrates the pressing body, against the support; A resin material having a tensile strength of 100 MPa or less is interposed between the workpiece supported by the support and the processing tool. An ultrasonic processing device characterized by:

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