System, control method, and program

Abstract

To prevent forgotten registration and incorrect registration caused by an operator.SOLUTION: A system comprises a processing apparatus and a terminal. The processing apparatus includes a first controller. The terminal includes a power supply unit, a display unit for displaying the necessary items for maintenance of the processing apparatus when a power supply of the processing apparatus is turned off, and a second controller. The second controller includes a completion information storage area for memorizing information about the completion of the maintenance, and a completion information transmission unit for transmitting the information of the completion of the maintenance to the first controller. When an operator inputs the information of the maintenance of the processing apparatus to the terminal in a state that the power supply of the processing apparatus is off, the second controller provides a system in which the completion information transmission unit of the terminal commands the first controller to memorize the completion of the maintenance when the power supply of the processing apparatus is on.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a system including a processing device that processes a workpiece and a terminal arranged outside the processing device, a control method for controlling the system, and a program for controlling the system. [Background technology]

[0002] Various types of processing equipment are used in the manufacture of products such as semiconductor device chips. In particular, when multiple processes such as processing and cleaning of a workpiece are performed sequentially within one processing equipment, the processing equipment tends to become large. In large processing equipment, workers may perform tasks such as maintenance of the processing equipment at a position away from the operation panel provided on the front of the processing equipment.

[0003] For example, in a grinding machine used to grind workpieces such as semiconductor wafers, an opening and closing door is provided on the side or rear of the grinding machine away from the operation panel provided on the front of the grinding machine, and an operator enters the inside of the grinding machine through this opening and closing door to perform work.

[0004] Conventionally, when an operator works on such a grinding device, the operator can use an operation panel that is connected to the grinding device via a cable and can be carried within a certain distance to eliminate inconvenience during work (see, for example, Patent Document 1).

[0005] However, some tasks must be performed with the processing device turned off, and when the processing device is turned off, the operation panel connected to the processing device via a cable also becomes unusable. Therefore, after the maintenance is completed but before the processing device is turned on, it is not possible to register the completion of the maintenance in the processing device.

[0006] In this case, after the processing device is turned on, the operator must register that maintenance has been completed on the processing device via an operation panel provided on the front of the grinding device or an operation panel connected to the processing device via a cable.

[0007] It takes several minutes to turn on the power of a processing device and complete startup of the processing device. In addition, in a mechanism having a drive source provided inside the processing device and a moving body moved by the drive source, including an operation to return the position of the moving body to an initial position (origin position) (also called an initial operation), startup of the processing device may take several tens of minutes.

[0008] During that time, there is a risk that the worker will forget to register that the maintenance has been completed because the worker performs other tasks, etc. Furthermore, because there is a gap between the completion of maintenance and registration, there is a risk that the worker will forget which items have been completed for maintenance, and erroneously register that the maintenance has been completed for the wrong items (for example, items that have not been maintained). [Prior art documents] [Patent documents]

[0009] [Patent Document 1] Japanese Patent Application Publication No. 11-48059 Summary of the Invention [Problem to be solved by the invention]

[0010] The present invention has been made in consideration of the above problems, and aims to prevent operators from forgetting to register or registering incorrectly, even when the power to the processing device is turned off when maintenance is completed. [Means for solving the problem]

[0011] According to one aspect of the present invention, there is provided a system including a processing device for processing a workpiece and a terminal disposed outside the processing device, the processing device including a holding table for holding the workpiece, a processing unit for processing the workpiece held by the holding table, and a first controller having a first processor and a first memory and for controlling the operation of the holding table and the processing unit, the first controller including an item instructing unit for instructing the terminal on items requiring maintenance of the processing device when the power supply of the processing device is turned off, and the terminal including a power supply unit and a display for displaying to an operator the items instructed by the item instructing unit of the first controller. a display unit, a second controller having a second processor and a second memory and controlling the operation of the display unit, the second controller including a completion information storage area for storing information indicating that maintenance of the item displayed on the display unit has been completed, and a completion information transmission unit for transmitting information that maintenance has been completed to the first controller, wherein when the worker inputs information that maintenance of the processing device for the item has been completed to the terminal with the processing device powered off, when the processing device is powered on, the completion information transmission unit of the terminal instructs the first controller to store information that maintenance has been completed.

[0012] Preferably, the first controller includes an item instruction unit that instructs the terminal of the item, an item memory area that stores the item, a completion date memory area that stores the completion date of maintenance of the item, and a period memory area that stores the maintenance period of the item, and when the processing device is powered on, the item instruction unit of the first controller notifies the terminal of the item requiring maintenance based on the completion date stored in the completion date memory area and the period stored in the period memory area.

[0013] In addition, preferably, the items include work items requiring maintenance for a first mechanism for moving the holding table and a second mechanism for moving the machining unit.

[0014] Also, preferably, the terminal has an antenna and circuitry for wireless communication with the processing device.

[0015] In addition, preferably, the second controller of the terminal includes a procedure memory area in which information on procedures required for maintenance is stored, and the second controller, in accordance with instructions from the worker, causes the display unit to display the maintenance procedures for the item for which maintenance is to be performed.

[0016] Also, preferably, the processing unit has a spindle, and processes the workpiece held by the holding table with a cutting blade or a grinding wheel attached to the tip of the spindle.

[0017] According to another aspect of the present invention, there is provided a control method for controlling a system including a processing device for processing a workpiece and a terminal disposed outside the processing device, the processing device including a holding table for holding the workpiece, a processing unit for processing the workpiece held by the holding table, and a first computer, the terminal including a power supply unit, a display unit, and a second computer, the control method including a display step of the second computer of the terminal displaying to an operator via the display unit items requiring maintenance of the processing device when the power supply of the processing device is turned off; The control method includes a storage step in which the second computer of the terminal stores information indicating that maintenance of the item has been completed in response to an instruction from the worker, and a transmission step in which the second computer of the terminal transmits information that maintenance has been completed to the processing device, wherein in the transmission step, when the worker inputs information that maintenance of the processing device for the item has been completed to the terminal with the processing device powered off, the second computer of the terminal instructs the processing device to store information that maintenance has been completed when the processing device is powered on.

[0018] According to yet another aspect of the present invention, there is provided a program for controlling a system including a processing device for processing a workpiece and a terminal having a power supply unit and arranged outside the processing device, the program including a display step of causing a second computer of the terminal to display items requiring maintenance of the processing device via a display unit of the terminal when the processing device is powered off; a storage step of causing the second computer of the terminal to store information indicating that maintenance of the specified item has been completed in response to an instruction from an operator; a transmission step of causing the second computer to transmit to the processing device a notice that maintenance has been completed; and in the transmission step, when the operator inputs into the terminal with the processing device powered off that maintenance of the processing device for the item has been completed, when the processing device is powered on, the program includes a command to the second computer to store that maintenance has been completed. Effect of the Invention

[0019] In a system according to one aspect of the present invention, the terminal has its own power supply unit, and when an operator inputs to the terminal that maintenance of the processing device is completed while the processing device is powered off, a completion information transmission unit of the terminal instructs the processing device to store information indicating that maintenance is completed while the processing device is powered on.

[0020] Therefore, even if the power of the processing device is turned off when the maintenance is completed, the completion of the maintenance can be reliably registered in the processing device when the power of the processing device is turned on. Furthermore, even if there is a time lapse between the completion of the maintenance and the registration in the processing device, it is possible to prevent an incorrect item from being registered. In other words, it is possible to prevent forgetting to register or erroneous registration caused by the operator. [Brief description of the drawings]

[0021] [Figure 1] FIG. 1 is a perspective view of a system according to a first embodiment. [Diagram 2] FIG. 2 is a partial cross-sectional side view of a cutting unit, etc. [Diagram 3] FIG. 2 is a block diagram illustrating the function of each controller. [Figure 4] FIG. 4 is a flow diagram of a method for controlling the system. [Diagram 5] FIG. 11 is a flow chart of a control method of a system according to a modified example. [Figure 6] FIG. 11 is a perspective view of a system according to a second embodiment. [Figure 7] FIG. 2 is a partial cross-sectional side view of the rough grinding unit and the chuck table. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] (First embodiment) An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a perspective view of a system 2 according to a first embodiment. The X-axis direction (machining feed direction), Y-axis direction (indexing feed direction), and Z-axis direction (vertical direction, up-down direction) shown in Fig. 1 are mutually orthogonal. Note that Fig. 1 shows some of the components as functional blocks.

[0023] The system 2 includes a cutting device (processing device) 4a and a tablet terminal (terminal) 4b disposed outside the cutting device 4a. Note that, as a terminal constituting the system 2, other portable devices may be adopted instead of the tablet terminal 4b.

[0024] Other portable devices include, in addition to smartphones, wearable computers (so-called wearable devices) that can communicate with the cutting device 4a and can be attached to a part of the worker's body (hand, wrist, arm, face, ear, head, etc.) or to a part of the worker's clothing (clothes, hat, shoes, etc.).

[0025] The cutting device 4a will be described. The cutting device 4a has a base 6 that supports or houses each component. A box-shaped exterior panel 8 that covers the base 6 is provided above the base 6. A predetermined space is formed inside the exterior panel 8.

[0026] In this predetermined space, for example, a cutting unit (processing unit) 10 for cutting (processing) a workpiece 11 is disposed. The workpiece 11 to be cut includes, for example, a disk-shaped semiconductor substrate (i.e., a wafer) made of a semiconductor material such as single crystal silicon. However, there are no limitations on the material, shape, structure, size, etc. of the wafer.

[0027] A plurality of division lines (streets) are set in a lattice pattern on the surface 11a of the workpiece 11, and devices such as ICs (Integrated Circuits) are formed in each rectangular area partitioned by the plurality of division lines. There are no limitations on the type, number, shape, structure, size, arrangement, etc. of the devices.

[0028] A resin dicing tape 13 is attached to the back surface 11b of the workpiece 11. One surface of a metal annular frame 15 is attached to the outer periphery of the dicing tape 13, and the workpiece 11 is supported by the annular frame 15 via the dicing tape 13.

[0029] In this manner, the workpiece 11, dicing tape 13, and annular frame 15 are integrated into the workpiece unit 17, and processing such as transportation, cutting, and cleaning is performed on the workpiece 11. The cutting unit 10 has a rectangular columnar spindle housing 12 whose longitudinal direction is arranged approximately parallel to the Y-axis direction.

[0030] 2, a part of a cylindrical spindle 14 is rotatably accommodated in the spindle housing 12. A motor (rotation drive source) (not shown) is provided in a part of the spindle 14. A cutting blade 16 having an annular cutting edge 16a is attached to the tip of the spindle 14.

[0031] The cutting blade 16 is a consumable item that wears out as the workpiece 11 is cut, and is replaced frequently. Therefore, in commercial distribution of the cutting device 4a, the cutting blade 16 is not normally attached to the tip of the spindle 14, but is attached to the tip of the spindle 14 when the cutting device 4a is in use.

[0032] A microscope camera unit 18 for acquiring images used for alignment, kerf checking, etc. is fixed to one side of the spindle housing 12. The microscope camera unit 18 has a light source (not shown) such as an LED (Light Emitting Diode), an optical system (not shown) including a condenser lens, and a solid-state imaging element (not shown).

[0033] The spindle housing 12 is configured to be movable in the Z-axis direction by a Z-axis movement mechanism 20. The spindle housing 12 is slidably attached to a pair of Z-axis guide rails 22 arranged substantially parallel to the Z-axis direction. A screw shaft 24 is arranged between the pair of Z-axis guide rails 22 and substantially parallel to the Z-axis direction.

[0034] The screw shaft 24 is rotatably coupled via a plurality of balls (not shown) to a nut portion (not shown) fixed to the spindle housing 12. A drive source 26 such as a stepping motor is fixed to the upper end of the screw shaft 24.

[0035] When the driving source 26 is operated, the cutting unit 10 moves along the Z-axis direction. The Z-axis direction moving mechanism 20 is fixed to a Y-axis direction moving plate 28. The Y-axis direction moving plate 28 is configured to be movable in the Y-axis direction by a Y-axis direction moving mechanism 30.

[0036] The Y-axis direction movement mechanism 30 is slidably attached to a pair of Y-axis direction guide rails 32 arranged substantially parallel to the Y-axis direction. A screw shaft 34 is arranged between the pair of Y-axis direction guide rails 32 and substantially parallel to the Y-axis direction.

[0037] The screw shaft 34 is rotatably coupled via a plurality of balls (not shown) to a nut portion (not shown) fixed to the Y-axis direction moving plate 28. A driving source 36 such as a stepping motor is fixed to one end of the screw shaft 34.

[0038] When the driving source 36 is operated, the Y-axis direction moving plate 28 moves along the Y-axis direction. The Z-axis direction moving mechanism 20 and the Y-axis direction moving mechanism 30 configure a mechanism (i.e., a second mechanism) that moves the cutting unit 10 along the Y-axis and Z-axis directions.

[0039] A disk-shaped chuck table (holding table) 38 for suction-holding the workpiece 11 is provided below the cutting unit 10. The chuck table 38 has a disk-shaped frame body made of metal. A disk-shaped recess having a diameter smaller than the diameter of the outer periphery of the frame body is formed in the frame body.

[0040] A disk-shaped porous plate having approximately the same diameter as the recess is fixed in the recess. The porous plate is made of porous ceramics. A suction source (not shown), such as a vacuum pump, is connected to the porous plate via a predetermined flow path formed in the frame. Negative pressure generated by the suction source is transmitted to the upper surface of the porous plate.

[0041] The upper surfaces of the frame and the porous plate are substantially flush with each other, forming a substantially flat holding surface 38a along the XY plane. A plurality of clamp units 38b are provided on the outer periphery of the frame. In this embodiment, four clamp units 38b are provided at substantially equal intervals along the circumferential direction of the frame.

[0042] Each clamp unit 38b is an air actuator having a support base and a clamp, and drives the clamp relative to the support base using compressed air, etc. The annular frame 15 arranged on the support base is pressed down by the clamp, so that the annular frame 15 is sandwiched between the support base and the clamp.

[0043] A rotation drive mechanism (not shown) is provided below the chuck table 38. The rotation drive mechanism includes a motor and the like for rotating the chuck table 38 around a rotation axis that passes through the radial center of the holding surface 38a and is disposed substantially parallel to the Z-axis direction.

[0044] The rotary drive mechanism and the chuck table 38 are supported by an X-axis direction moving plate (not shown). The X-axis direction moving plate is slidably attached to a pair of X-axis direction guide rails (not shown) arranged substantially parallel to the X-axis direction.

[0045] A screw shaft (not shown) is disposed between the pair of X-axis guide rails and is substantially parallel to the X-axis direction. This screw shaft is rotatably coupled to a nut portion (not shown) fixed to the lower surface of the X-axis moving plate via a number of balls (not shown).

[0046] A drive source (not shown) such as a stepping motor is fixed to one end of this screw shaft, and when the drive source is operated, the X-axis moving plate moves along the X-axis direction together with the rotation drive mechanism and chuck table 38.

[0047] The pair of X-axis guide rails, the screw shaft, the nut, the drive source, etc. constitute the X-axis direction moving mechanism 40. In addition, the X-axis direction moving mechanism 40 constitutes a mechanism (i.e., a first mechanism) that moves the chuck table 38 along the X-axis direction.

[0048] 2 is a partial cross-sectional side view of the cutting unit 10, the Z-axis direction moving mechanism 20, the Y-axis direction moving mechanism 30, the chuck table 38, etc. When cutting the workpiece 11, for example, first, the workpiece 11 is suction-held by the holding surface 38a via the dicing tape 13 so that the surface 11a is exposed upward.

[0049] Next, the cutting blade 16 rotating at high speed around the spindle 14 is placed on an extension of the intended division line in the XY plane, and the position of the lower end of the cutting blade 16 is adjusted in the Z-axis direction.

[0050] Then, while supplying cutting water such as pure water from a cutting water supply nozzle (see FIG. 1) to the contact point between the cutting blade 16 and the workpiece 11, the chuck table 38 is moved along the X-axis direction, thereby cutting the workpiece 11 along the intended division line.

[0051] For example, after cutting the workpiece 11 along each planned division line, the chuck table 38 is rotated 90 degrees, and then the workpiece 11 is similarly cut along each planned division line, thereby dividing the workpiece 11 into a plurality of device chips.

[0052] Returning now to Fig. 1, a touch panel 42 is provided on the front surface 8a of the exterior panel 8 of the cutting device 4a. The touch panel 42 is a touch panel type liquid crystal display, an OLED (Organic Light Emitting Diode) display, or an LED (Light Emitting Diode) display.

[0053] The touch panel 42 serves as both an input device for the operator to input instructions to the controller 44 described later, and a display device for displaying images acquired by the microscope camera unit 18, a display window that displays processing conditions, and an input window such as a keyboard in the form of a GUI (Graphical User Interface).

[0054] It should be noted that a display having only a display function may be provided instead of the touch panel 42. In this case, however, a user interface such as a keyboard, a mouse, a trackball, a joystick, a touch panel, or a pen tablet is separately provided on the front surface 8a as an input device.

[0055] A cassette mounting table 8c is provided near the front surface 8a on which a cassette (not shown) containing one or more workpiece units 17 is mounted. The cassette mounting table 8c is movable along the Z-axis direction by an elevator (not shown) to adjust the height of the workpiece units 17 that are carried in and out of the cutting device 4a.

[0056] The operations of the cutting unit 10, microscope camera unit 18, Z-axis direction moving mechanism 20, Y-axis direction moving mechanism 30, chuck table 38, X-axis direction moving mechanism 40, touch panel 42, etc. are controlled by a controller (first controller) 44.

[0057] The controller 44 is configured by, for example, a computer (first computer) including a processor (first processor) 44a represented by a CPU (Central Processing Unit) and a memory (first memory) 44b.

[0058] The memory 44b includes a main storage device such as a dynamic random access memory (DRAM) and an auxiliary storage device such as a flash memory, a hard disk drive (HDD), or a solid state drive (SSD).

[0059] The auxiliary storage device stores software including a predetermined program 44c. The functions of the controller 44 are realized by operating the processor 44a and other components in accordance with the program 44c.

[0060] The program 44c does not have to be stored in advance in the memory 44b. In this case, the program 44c is stored in a non-transitory computer readable medium and is stored in the memory 44b via the recording medium.

[0061] Non-transitory computer-readable recording media include semiconductor memories such as flash memories, magnetic recording media such as HDDs, optical discs such as CDs (Compact Discs) and DVDs (Digital Versatile Discs), and magneto-optical recording media.

[0062] A wireless module 44d is connected to the controller 44. The wireless module 44d includes a radio frequency integrated circuit (RFIC) and a base band IC / media access control (MAC).

[0063] The RFIC has a receiving circuit that receives radio waves as analog signals via the antenna 44e, and a transmitting circuit that transmits the analog signals as radio waves from the antenna 44e. The baseband IC / MAC performs AD conversion, DA conversion, signal processing according to a communication protocol, communication with the controller 44, etc.

[0064] In FIG. 1, for ease of explanation, the controller 44, the program 44c, the wireless module 44d, the antenna 44e, etc. are shown on the outside of the exterior panel 8; however, in reality, the controller 44, etc. are positioned on the inside of the exterior panel 8 or on the inside of the base portion 6.

[0065] The tablet terminal 4b has a power supply unit 52 and operates on power supplied from the power supply unit 52. The power supply unit 52 includes a primary battery such as a dry cell, a lithium ion battery, a secondary battery such as an all-solid-state battery, etc. The tablet terminal 4b further includes a touch panel (display unit) 50.

[0066] The touch panel 50 serves both as an input device for the worker to input instructions and as a display device for displaying characters, numbers, images, GUI, etc. Instead of the touch panel 50, the tablet terminal 4b may be provided with a display having only the function of a display device.

[0067] In this case, however, a user interface such as a keyboard, a mouse, a trackball, a joystick, a touch panel, a pen tablet, etc. is separately provided as an input device in the tablet terminal 4b. The operation of the touch panel 50 is controlled by a controller (second controller) 54.

[0068] The controller 54 is configured by, for example, a computer (second computer) including a processor (second processor) 54a represented by a CPU, and a memory (second memory) 54b.

[0069] The memory 54b includes a main storage device such as a DRAM, and an auxiliary storage device such as a flash memory, HDD, SSD, etc. The auxiliary storage device stores software including a predetermined program 54c. The functions of the controller 54 are realized by operating the processor 54a and the like in accordance with the program 54c.

[0070] The program 54c does not have to be stored in the memory 54b in advance. In this case, the program 54c is stored in the non-transitory computer-readable recording medium and is stored in the memory 54b via the recording medium.

[0071] The antenna 54e is connected to the controller 54 via a wireless module (circuit) 54d. The wireless module 54d includes the above-mentioned RFIC and baseband IC / MAC. Therefore, the tablet terminal 4b of this embodiment can wirelessly communicate with the cutting device 4a.

[0072] In addition, in the tablet terminal 4b which is a mobile device, the processor 54a and the baseband IC / MAC constituting the wireless module 54d may be integrated into one device chip.

[0073] In FIG. 1, for ease of explanation, the controller 54, the program 54c, the wireless module 54d, the antenna 54e, etc. are shown on the outside of the tablet terminal 4b, but in reality, the controller 54 etc. are disposed inside the housing of the tablet terminal 4b.

[0074] Next, the functions of the controllers 44, 54 will be described with reference to Fig. 3. Fig. 3 is a block diagram illustrating the functions of each of the controllers 44, 54. The controller 44 includes an item storage area 44f which is a partial area of ​​the memory 44b.

[0075] The item storage area 44f stores items 56 that require maintenance of the cutting device 4a when the cutting device 4a is powered off. The items 56 include work items that require the cutting device 4a to be powered off to ensure the safety of the worker during maintenance.

[0076] More specifically, item 56 includes work items that require maintenance among the X-axis direction moving mechanism 40 as the first mechanism, the Z-axis direction moving mechanism 20 and the Y-axis direction moving mechanism 30 as the second mechanism, and other mechanisms.

[0077] Item 56 related to the X-axis direction moving mechanism 40 includes greasing (i.e., greasing up) the screw shaft of the X-axis direction moving mechanism 40. Note that greasing is a task of replenishing semi-solid grease by injecting, applying, or the like. Item 56 related to the Z-axis direction moving mechanism 20 and the Y-axis direction moving mechanism 30 includes greasing the screw shafts 24, 34.

[0078] Items 56 relating to other mechanisms include (a) replacement of the carbon brushes of the spindle 14, (b) oiling the bearings in the elevator of the cassette mounting table 8c, (c) replacement of the battery of the uninterruptible power supply (UPS), (d) cleaning of the cooling fan of the controller 44, (e) checking for damage to the piping for supplying cutting water, (f) checking for damage to the piping for transmitting vacuum, and (g) checking for damage to the electrical wiring.

[0079] The controller 44 further includes a completion date storage area 44g, which is another part of the memory 44b. The completion date storage area 44g stores the completion date when the maintenance of each item 56 was completed.

[0080] In this embodiment, the completion date is stored in the completion date memory area 44g as a result of the worker inputting it via the touch panel 50 of the tablet terminal 4b, but it may also be stored in the completion date memory area 44g as a result of the worker inputting it via the touch panel 42 of the cutting device 4a.

[0081] The controller 44 further includes a cycle storage area 44h which is another part of the memory 44b. The cycle storage area 44h stores the maintenance cycle for the item 56. For example, the cycle for greasing the screw shaft of the X-axis direction movement mechanism 40 is 180 days, and the cycle for greasing the screw shafts 24, 34 of the Z-axis direction movement mechanism 20 and the Y-axis direction movement mechanism 30 is 180 days.

[0082] The controller 44 includes an item instructing unit 44i that is implemented in the controller 44 as a program that is read and executed by the processor 44a. The item instructing unit 44i instructs the tablet terminal 4b about items 56 that require maintenance.

[0083] Specifically, when the cutting device 4a is powered on, the item instructing unit 44i determines whether or not maintenance is required for each of the items 56. The item instructing unit 44i determines whether or not maintenance is required based on the latest completion date stored in the completion date storage area 44g and the cycle previously stored in the cycle storage area 44h.

[0084] In this embodiment, the item indication unit 44i determines that maintenance is not required if the date obtained by adding the period stored in the period memory area 44h to the latest completion date stored in the completion date memory area 44g has not reached the current date, but determines that maintenance is required if this date has reached the current date or has passed the current date.

[0085] The period is not limited to days, but may be hours, months, or other time units. The unit of the period may be appropriately determined for each item 56.

[0086] The item instructing unit 44i determines whether or not maintenance is required for each item 56, and notifies the tablet terminal 4b of the items 56 requiring maintenance via the wireless module 44d, etc. The items 56 instructed by the item instructing unit 44i are displayed to the worker via the touch panel 50 of the tablet terminal 4b.

[0087] The controller 54 of the tablet terminal 4b includes a completion information storage area 54f that is a partial area of ​​the memory 54b. The completion information storage area 54f stores information indicating that maintenance of the item 56 displayed on the touch panel 50 has been completed. The information includes at least the date on which the maintenance was completed.

[0088] The controller 54 also includes a completion information transmission unit 54g implemented in the controller 54 as a program that is read and executed by the processor 54a. The completion information transmission unit 54g transmits a notification that the maintenance has been completed to the controller 44 of the cutting device 4a.

[0089] The cutting device 4a is powered off when the worker actually performs maintenance on item 56. In this state, when the worker inputs to the tablet terminal 4b that the maintenance of the cutting device 4a for item 56 has been completed, the completion information sending unit 54g commands the controller 44 of the cutting device 4a to store that the maintenance for item 56 has been completed when the cutting device 4a is restarted and turned on (i.e., issues command 58).

[0090] In order for the completion information transmitting unit 54g to issue a command 58 to the controller 44 when the cutting device 4a is powered on, the completion information transmitting unit 54g repeatedly sends the command 58 until it receives an affirmative signal such as an ACK for the command 58 from the cutting device 4a that is powered on (see FIG. 4).

[0091] In addition, the completion information sending unit 54g may check whether the cutting device 4a is turned on by sending a polling signal to the cutting device 4a at regular intervals, and when it is confirmed that the cutting device 4a is turned on (i.e., when the power is turned on), it may send a command 58 (see Figure 5).

[0092] Therefore, even if the power of the cutting device 4a is turned off when the maintenance is completed, the completion of the maintenance can be reliably registered in the cutting device 4a when the power of the cutting device 4a is turned on. Furthermore, even if there is a time lapse between the completion of the maintenance and the registration in the cutting device 4a, it is possible to prevent an incorrect item 56 from being registered in the cutting device 4a. In other words, it is possible to prevent forgetting to register or erroneous registration caused by the worker.

[0093] In addition, the operator can input that maintenance has been completed near the side or rear of the cutting device 4a, which is away from the touch panel 42 provided on the front surface 8a, or even inside the cutting device 4a, thereby improving convenience compared to when input is limited to the front surface 8a only.

[0094] The controller 54 of the tablet terminal 4b includes a procedure storage area 54h which is another part of the memory 54b. The procedure storage area 54h stores information on procedures required for maintenance of each item 56.

[0095] The controller 54, in accordance with instructions from the operator, displays the maintenance procedure for the item 56 to be maintained on the touch panel 50. This eliminates the need for the operator to go back to the front surface 8a to look at the touch panel 42, and allows the operator to check the work procedure even if he or she is near the opening and closing door located on the side or rear surface of the cutting device 4a.

[0096] Next, a method of controlling the system 2 will be described with reference to Fig. 4. Fig. 4 is a flow chart showing an example of a method of controlling the system 2.

[0097] As described above, the item indication unit 44i of the controller 44 of the cutting device 4a indicates to the tablet terminal 4b the items 56 requiring maintenance based on the latest completion date and cycle, and the controller 54 of the tablet terminal 4b stores the indicated items 56 in the memory 54b (item indication process S10).

[0098] After the item instructing step S10, the controller 54 of the tablet terminal 4b displays the instructed item 56 to the worker via the touch panel 50 (display step S20). That is, the controller 54 causes the instructed item 56 to be displayed on the touch panel 50. After the display step S20, the worker turns off the power of the cutting device 4a and then performs maintenance on the item 56 (maintenance step S30).

[0099] After the maintenance step S30, with the cutting device 4a powered off, the worker inputs to the tablet terminal 4b that the maintenance of the instructed item 56 has been completed. For example, the worker presses a check button displayed on the touch panel 50, inputs the completion date, or performs other operations to input that the maintenance has been completed.

[0100] Then, in response to instructions from the worker, the controller 54 of the tablet terminal 4b stores information indicating that maintenance of the instructed item 56 has been completed in the completion information storage area 54f (i.e., the controller 54 stores the information in response to instructions from the worker) (storage process S40).

[0101] After the storage step S40, the controller 54 of the tablet terminal 4b transmits to the cutting device 4a (that is, causes the controller 54 to transmit) a message indicating that the maintenance has been completed (transmission step S50).

[0102] In the example shown in FIG. 4, after the completion information transmitting unit 54g transmits the command 58, the controller 54 confirms an affirmative signal in response to the command 58 from the cutting device 4a in a power-on state (confirmation step S60).

[0103] If the affirmative signal cannot be confirmed (NO in S60), the completion information transmitting unit 54g returns to the transmission step S50 and again sends the command 58. On the other hand, if the affirmative signal can be confirmed (YES in S60), the flow ends.

[0104] In this way, in the transmission step S50, when the cutting device 4a is powered on, the tablet terminal 4b instructs the cutting device 4a to store that the maintenance has been completed. In other words, the tablet terminal 4b instructs the controller 54 to cause the cutting device 4a to store that the maintenance has been completed.

[0105] Fig. 5 is a flow diagram of a control method of the system 2 according to the modified example. In the flow shown in Fig. 5, the controller 54 constantly checks whether the cutting device 4a is turned on by sending a polling signal to the cutting device 4a at a constant cycle (checking step S42).

[0106] Therefore, after the storage step S40, if it is confirmed that the cutting device 4a is powered on (YES in S42), the cutting device 4a is instructed to store that the maintenance has been completed, but if it is not confirmed that the cutting device 4a is powered on (NO in S42), the command 58 is not issued and the device waits.

[0107] 4 and 5, the completion of maintenance can be reliably registered in the cutting device 4a, and even if there is a gap between the completion of maintenance and registration in the cutting device 4a, it is possible to prevent an incorrect item 56 from being registered in the cutting device 4a. In other words, it is possible to prevent forgetting to register or erroneous registration caused by the operator.

[0108] 4 and 5 correspond to the algorithm of a program for the controllers 44 and 54 to control the operation of the system 2. The item designation step S10, display step S20, storage step S40, transmission step S50, and confirmation steps S60 and S42 shown in FIG.

[0109] Second Embodiment Next, a second embodiment will be described with reference to Fig. 6 and Fig. 7. Fig. 6 is a perspective view of a system 62 according to a second embodiment. The system 62 of the second embodiment includes a grinding device (processing device) 64a and a tablet terminal (terminal) 4b arranged outside the grinding device 64a.

[0110] The tablet terminal 4b is substantially the same as that of the first embodiment, so the grinding device 64a will be mainly described below. Note that the X-axis direction, Y-axis direction (front-back direction), and Z-axis direction (vertical direction, up-down direction, grinding feed direction) shown in Fig. 6 are mutually orthogonal. Also, Fig. 6 shows some of the components as functional blocks.

[0111] The grinding device 64a has a base 66 that supports or houses components. A recess 66a is formed in the front of the base 66 (on one side in the Y-axis direction), and a transport robot 68 having a multi-joint link mechanism for transporting the workpiece 11 is provided in the recess 66a.

[0112] Cassette placement areas 70a, 70b are present on both sides of the recess 66a in the X-axis direction. A cassette 72a is placed on the cassette placement area 70a, and a cassette 72b is placed on the cassette placement area 70b.

[0113] Each of the cassettes 72a and 72b accommodates one or more workpieces 11. In this embodiment, a protective tape 19 made of resin and having approximately the same diameter as the workpiece 11 is attached to a front surface 11a of the workpiece 11, and a back surface 11b is exposed.

[0114] A positioning table 74 is provided behind the cassette placement area 70a (the other side in the Y-axis direction) to determine the position of the workpiece 11 carried out by the transport robot 68 at a predetermined position. A base end of a loading arm 78 is provided in an area adjacent to one side of the positioning table 74 in the X-axis direction.

[0115] A disk-shaped turntable 80 is provided behind the base end of the loading arm 78. A rotation drive mechanism (not shown), such as a motor, that rotates the turntable 80 is provided on the underside of the turntable 80.

[0116] The upper surface of the turntable 80 is divided into three sector-shaped areas by three linear partition plates radially provided on the upper surface. The sector-shaped area closest to the loading arm 78 is a loading / unloading area A where the workpiece 11 is loaded onto or unloaded from the turntable 80.

[0117] The sector-shaped area approximately 120 degrees clockwise from the loading / unloading area A when viewed from above becomes the rough grinding area B where rough grinding of the workpiece 11 is performed, and the sector-shaped area approximately 120 degrees counterclockwise from the loading / unloading area A when viewed from above becomes the finish grinding area C where finish grinding of the workpiece 11 is performed.

[0118] Each sector-shaped area is provided with one chuck table 82. The workpiece 11 is transferred from the positioning table 74 to the chuck table 82 arranged in the carry-in / carry-out area A by the loading arm 78.

[0119] The upper surface of the chuck table 82 functions as a holding surface that suction-holds the workpiece 11. The holding surface of the chuck table 82 has a conical shape with the center in the radial direction protruding slightly (by about several tens of μm) compared to the outer periphery.

[0120] A rotation drive mechanism 82a (see FIG. 7) for rotating the chuck table 82 about a predetermined rotation axis is connected to the lower part of each chuck table 82. Each of the three sets of chuck tables 82 and rotation drive mechanisms 82a moves together with the rotation of the turntable 80.

[0121] The rotational drive mechanism 82a includes a motor, a drive pulley fixed to the output shaft of the motor, a driven pulley fixed to the lower end of the rotational shaft of the chuck table 82, and an endless belt stretched between the drive pulley and the driven pulley (all not shown).

[0122] The rotation axis of the chuck table 82 is not completely parallel to the Z-axis direction, but is slightly inclined relative to the Z-axis direction so that the arc-shaped area of ​​the holding surface located directly below the grinding wheels (rough grinding wheel 104a, finish grinding wheel 104b) described later is approximately parallel to the XY plane.

[0123] A square pillar-shaped support structure 84a is provided behind the turntable 80 in a manner that protrudes from the upper surface of the base portion 66. A grinding feed mechanism 86 is provided on the front side of the support structure 84a.

[0124] The grinding feed mechanism 86 has a pair of Z-axis guide rails 88 fixed to the front surface of the support structure 84a and substantially parallel to the Z-axis direction. A Z-axis moving plate 90 is slidably attached to the pair of Z-axis guide rails 88.

[0125] A nut portion 90a (see FIG. 7) is provided on the rear side of the Z-axis moving plate 90. A screw shaft 92, which is provided along the Z-axis direction between the pair of Z-axis guide rails 88, is rotatably coupled to the nut portion 90a via a plurality of balls (not shown).

[0126] A pulse motor 94 is connected to the upper end of the screw shaft 92 , and when the screw shaft 92 is rotated by the pulse motor 94 , the Z-axis moving plate 90 moves in the Z-axis direction along the Z-axis guide rail 88 .

[0127] A rough grinding unit (processing unit) 96a is provided on the front surface of the Z-axis moving plate 90. Fig. 7 is a partial cross-sectional side view of the rough grinding unit 96a and the chuck table 82. The rough grinding unit 96a has a cylindrical spindle housing 98 fixed to the Z-axis moving plate 90.

[0128] The spindle housing 98 is disposed such that the height direction of the cylinder is substantially parallel to the Z-axis direction. A part of a cylindrical spindle 100 is rotatably accommodated inside the spindle housing 98. The spindle 100 is disposed such that the longitudinal direction thereof is substantially parallel to the Z-axis direction.

[0129] A rotation drive source (not shown) such as a motor is provided at a portion of the upper end side of the spindle 100. A disk-shaped mount 102 is provided at the lower end side of the spindle 100. An annular rough grinding wheel 104a is attached to the lower surface side of the mount 102.

[0130] The rough grinding wheel 104a has an annular wheel base 104a1 made of a metal material such as an aluminum alloy, etc. A plurality of block-shaped rough grinding stones 104a2 are fixed to the lower surface of the wheel base 104a1.

[0131] The rough grinding wheels 104a2 are arranged in a ring shape at approximately equal intervals along the circumferential direction of the wheel base 104a1. The rough grinding wheels 104a2 have abrasive grains such as diamond, cBN (cubic boron nitride), or the like, and a binder such as ceramics or resin for fixing the abrasive grains.

[0132] 6, a grinding water supply unit (not shown) that supplies grinding water such as pure water to the contact area between the workpiece 11 and the rough grinding wheel 104a2 during grinding is provided near the rough grinding area B. A square pillar-shaped support structure 84b is provided at a position adjacent to the other side in the X-axis direction of the support structure 84a.

[0133] Similar to the support structure 84a, a grinding feed mechanism 86 is provided in front of the support structure 84b. A finish grinding unit (processing unit) 96b is connected to a Z-axis moving plate 90 of the grinding feed mechanism 86.

[0134] Like the rough grinding unit 96a, the finish grinding unit 96b also has a spindle housing 98, a spindle 100, a rotation drive source, a mount 102, etc. However, an annular finish grinding wheel 104b is attached to the spindle 100 of the finish grinding unit 96b via the mount 102.

[0135] The finish grinding wheel 104b has a structure similar to that of the rough grinding wheel 104a. However, on the lower surface side of the wheel base of the finish grinding wheel 104b, a plurality of finish grinding stones are provided at approximately equal intervals along the circumferential direction of the wheel base. The finish grinding stones also have abrasive grains and a binder.

[0136] However, the average grain size of the abrasive grains of the finish grinding wheel 104a2 is smaller than that of the rough grinding wheel 104a2. The area directly below the finish grinding wheel 104b corresponds to the above-mentioned finish grinding area C. A grinding water supply unit (not shown) is also provided near the finish grinding area C. The rough grinding wheel 104a and the finish grinding wheel 104b are consumables that wear out during grinding and are frequently replaced.

[0137] Therefore, the rough grinding wheel 104a and the finish grinding wheel 104b are not normally mounted to the tip of the spindle 100 in commercial distribution of the grinding apparatus 64a, but are mounted to the tip of the spindle 14 when the grinding apparatus 64a is in use.

[0138] When the workpiece 11 is carried into the carry-in / carry-out area A, the front surface 11a side is sucked and held by the chuck table 82 so that the back surface 11b is exposed. Then, the turntable 80 is rotated to transport the workpiece 11 to the rough grinding area B.

[0139] Then, the chuck table 82 and the rough grinding wheel 104a are rotated in a predetermined direction, and the rough grinding wheel 104a is moved downward at a predetermined speed by the grinding feed mechanism 86 while grinding water is supplied at a predetermined flow rate to the contact area between the rough grinding stone 104a2 and the workpiece 11. In this manner, the back surface 11b side is roughly ground (processed).

[0140] After the back surface 11b side has been roughly ground, the turntable 80 is rotated to transport the workpiece 11 to the finish grinding area C. Then, the chuck table 82 and the finish grinding wheel 104b are rotated in respective predetermined directions, and the finish grinding wheel 104b is moved downward at a predetermined speed by the grinding feed mechanism 86 while supplying grinding water at a predetermined flow rate to the contact area between the finish grinding stone and the workpiece 11.

[0141] In this manner, the back surface 11b side is finish-ground (machined). After the back surface 11b side is finish-ground, the turntable 80 is rotated, and the workpiece 11 is returned to the carry-in / carry-out area A again.

[0142] After finish grinding, the workpiece 11 is transferred to the spinner cleaning unit 108 by the unloading arm 106. After being cleaned in the spinner cleaning unit 108, the workpiece 11 is transferred by the transfer robot 68 to the cassette 72a or the cassette 72b.

[0143] A front surface 110a of an exterior panel 110 of the grinding device 64a is provided with a touch panel 112. The touch panel 112 is a touch panel type liquid crystal display, an OLED display, or an LED display, and serves as both an input device and a display device.

[0144] A display having only a display function may be provided instead of the touch panel 112. In this case, however, a user interface such as a keyboard, a mouse, a trackball, a joystick, a touch panel, or a pen tablet is separately provided on the front surface 110a as an input device.

[0145] The operations of the loading arm 78, turntable 80, each chuck table 82, grinding feed mechanism 86, rough grinding unit 96a, finish grinding unit 96b, unloading arm 106, spinner cleaning unit 108, touch panel 112, etc. are controlled by a controller (first controller) 114.

[0146] The controller 114 is configured by, for example, a computer (first computer) including a processor (first processor) 114a, represented by a CPU, and a memory (first memory) 114b.

[0147] The memory 114b includes a main storage device such as a DRAM, and an auxiliary storage device such as a flash memory, HDD, SSD, etc. The auxiliary storage device stores software including a predetermined program 114c. The functions of the controller 114 are realized by operating the processor 114a and the like in accordance with the program 114c.

[0148] The program 114c does not have to be stored in the memory 114b in advance. In this case, the program 114c is stored in a non-transitory computer-readable recording medium, and is stored in the memory 114b via this recording medium.

[0149] A wireless module 114d is connected to the controller 114. The wireless module 114d includes the above-mentioned RFIC and baseband IC / MAC. The controller 114 includes an item storage area 44f, which is a part of the memory 114b, like the controller 44 (see FIG. 3).

[0150] In FIG. 6, for ease of explanation, the controller 114, the program 114c, the wireless module 114d, the antenna 114e, etc. are shown on the outside of the exterior panel 110; however, in reality, the controller 114, etc. are positioned on the inside of the exterior panel 110 or on the inside of the base portion 66.

[0151] The item storage area 44f stores items 56 that require maintenance of the grinding device 64a when the power of the grinding device 64a is turned off. The items 56 include work items that require maintenance of each grinding feed mechanism 86 as the second mechanism and other mechanisms. The items 56 related to the grinding feed mechanism 86 include greasing the screw shaft 92.

[0152] Items 56 relating to other mechanisms include (a') replacement of the carbon brushes of the spindle 100, (c') replacement of the battery of the uninterruptible power supply, (d') cleaning of the cooling fan in the housing in which the controller 114 is located, (e') checking for damage to the piping for supplying grinding water, (f') checking for damage to the piping for vacuum transmission, and (g') checking for damage to the electrical wiring.

[0153] The controller 114 further includes a completion date storage area 44g, which is another part of the memory 114b (see FIG. 3). The completion date storage area 44g stores the completion date when the maintenance of each item 56 was completed.

[0154] The controller 114 further includes a cycle storage area 44h which is another part of the memory 114b (see FIG. 3). The cycle storage area 44h stores the maintenance cycle for the item 56. For example, the cycle for greasing the screw shaft 92 of the grinding feed mechanism 86 is 180 days.

[0155] The controller 114 includes an item instructing unit 44i implemented in the controller 114 as a program that is read and executed by the processor 114a (see FIG. 3). The item instructing unit 44i instructs the tablet terminal 4b on items 56 that require maintenance.

[0156] The item instructing unit 44i determines whether or not maintenance is required for each item 56 as described above, and notifies the tablet terminal 4b of the items 56 requiring maintenance via the wireless module 54d, etc. The items 56 instructed by the item instructing unit 44i are displayed to the worker via the touch panel 50 of the tablet terminal 4b.

[0157] The configuration of the tablet terminal 4b is the same as that of the first embodiment, and therefore a duplicated description will be omitted. When performing maintenance on item 56, the power supply of the grinding device 64a is turned off.

[0158] When the worker inputs into the tablet terminal 4b that maintenance of the grinding device 64a for item 56 has been completed while the power to the grinding device 64a is turned off, the completion information sending unit 54g of the tablet terminal 4b instructs the controller 44 of the grinding device 64a to store that maintenance for item 56 has been completed when the grinding device 64a is restarted and turned on.

[0159] Therefore, even if the power of the grinding device 64a is turned off when the maintenance is completed, the completion of the maintenance can be reliably registered in the grinding device 64a when the power of the grinding device 64a is turned on. Furthermore, even if there is a time lapse between the completion of the maintenance and the registration in the grinding device 64a, it is possible to prevent an incorrect item 56 from being registered in the grinding device 64a. In other words, it is possible to prevent forgetting to register or erroneous registration caused by the operator.

[0160] In addition, since the fact that maintenance has been completed can be input near the side or rear of the grinding device 64a, which is away from the touch panel 112 provided on the front surface 110a, or even inside the grinding device 64a, convenience is improved compared to when input is limited to only the front surface 110a.

[0161] In addition, the structures, methods, etc. according to the above-described embodiments can be modified as appropriate without departing from the scope of the present invention. In the above-described embodiment, communication between the processing device and the terminal is performed by wireless communication. However, instead of wireless communication, communication between the two may be performed by a wired connection such as a LAN (Local Area Network) cable or a USB (Universal Serial Bus) cable.

[0162] Note that functions corresponding to the item storage area 44f, the completion date storage area 44g, the periodic storage area 44h, and the item instruction unit 44i may be implemented in a server (not shown) communicatively connected to the controller 44, 114. In this case, the server, rather than the processing device, instructs the tablet terminal 4b on the above-mentioned items 56 requiring maintenance. [Explanation of symbols]

[0163] 2: System, 4a: Cutting device (processing device), 4b: Tablet terminal (terminal) 6: base, 8: exterior panel, 8a: front surface, 8c: cassette placement stand 10: cutting unit (machining unit), 12: spindle housing, 14: spindle 11: Workpiece, 11a: Front surface, 11b: Back surface 13: dicing tape, 15: annular frame, 17: workpiece unit 16: cutting blade, 16a: cutting edge 18: Microscope camera unit 19: Protective tape 20: Z-axis movement mechanism (second mechanism) 22: Z-axis guide rail, 24: screw shaft, 26: driving source, 28: Y-axis moving plate 30: Y-axis movement mechanism (second mechanism) 32: Y-axis guide rail, 34: screw shaft, 36: drive source 38: chuck table (holding table), 38a: holding surface, 38b: clamp unit 40: X-axis direction movement mechanism (first mechanism) 42: Touch panel 44: Controller (first controller, first computer) 44a: processor (first processor), 44b: memory (first memory) 44c: program, 44d: wireless module, 44e: antenna 44f: Item storage area, 44g: Completion date storage area 44h: Periodic storage area, 44i: Item instruction section 50: Touch panel (display unit), 52: Power supply unit 54: Controller (second controller, second computer) 54a: processor (second processor), 54b: memory (second memory) 54c: program, 54d: wireless module (circuit), 54e: antenna 54f: Completion information storage area, 54g: Completion information transmission unit, 54h: Procedure storage area 56: Item, 58: Directive 62: System, 64a: Grinding device (processing device) 66: base portion, 66a: recessed portion, 68: transport robot 70a, 70b: cassette placement area, 72a, 72b: cassette 74: Positioning table, 78: Loading arm 80: Turntable 82: chuck table (holding table), 82a: rotation drive mechanism 84a, 84b: Support structure 86: Grinding feed mechanism (second mechanism), 88: Z-axis guide rail, 90: Z-axis moving plate 90a: nut portion, 92: screw shaft, 94: pulse motor 96a: Rough grinding unit (processing unit) 96b: Finish grinding unit (processing unit) 98: spindle housing, 100: spindle, 102: mount 104a: rough grinding wheel, 104a1: wheel base, 104a2: rough grinding stone 104b: Finish grinding wheel 106: unloading arm, 108: spinner cleaning unit 110: exterior panel, 110a: front surface, 112: touch panel (display unit) 114: Controller (first controller, first computer) 114a: processor (first processor), 114b: memory (first memory) 114c: program, 114d: wireless module, 114e: antenna A: Loading / unloading area, B: Rough grinding area, C: Finish grinding area S10: item instruction process, S20: display process, S30: maintenance process S40: storage step, S50: transmission step, S60, S42: confirmation step

Claims

1. A system including a processing device that processes a workpiece and a terminal disposed outside the processing device, The processing device includes a holding table for holding the workpiece, a processing unit for processing the workpiece held by the holding table, and a first controller having a first processor and a first memory and for controlling operations of the holding table and the processing unit, the terminal has a power supply unit, a display unit for displaying to an operator items requiring maintenance of the processing device when the power of the processing device is turned off, and a second controller having a second processor and a second memory and controlling the operation of the display unit; the second controller includes a completion information storage area that stores information indicating that maintenance of the item displayed on the display unit has been completed, and a completion information transmission unit that transmits information indicating that maintenance has been completed to the first controller; When the worker inputs to the terminal with the power of the processing device turned off that the maintenance of the processing device for the item has been completed, the completion information transmission unit of the terminal instructs the first controller to store the fact that the maintenance has been completed when the power of the processing device is turned on.

2. The first controller includes: an item designation unit that designates the item to the terminal; an item storage area for storing the item; a completion date storage area for storing the completion date of the maintenance of the item; a period storage area for storing the maintenance period of the item; Including, The system described in claim 1, characterized in that when the processing device is turned on, the item indication unit of the first controller notifies the terminal of the item requiring maintenance based on the completion date stored in the completion date memory area and the period stored in the period memory area.

3. 2. The system according to claim 1, wherein the items include work items requiring maintenance for a first mechanism for moving the holding table and a second mechanism for moving the processing unit.

4. 2. The system of claim 1, wherein the terminal includes an antenna and circuitry for wirelessly communicating with the processing device.

5. The second controller of the terminal includes a procedure storage area in which information on a procedure required for maintenance is stored; 2. The system according to claim 1, wherein the second controller causes the display unit to display a maintenance procedure for the item to be maintained in accordance with an instruction from the operator.

6. The system described in any one of claims 1 to 5, characterized in that the processing unit has a spindle and processes the workpiece held by the holding table using a cutting blade or grinding wheel attached to the tip of the spindle.

7. A control method for controlling a system including a processing device that processes a workpiece and a terminal disposed outside the processing device, comprising: The processing device includes a holding table that holds the workpiece, a processing unit that processes the workpiece held by the holding table, and a first computer; the terminal has a power supply unit, a display unit, and a second computer; The control method includes: a display step of displaying items requiring maintenance of the processing apparatus to an operator via the display unit by the second computer of the terminal when the power supply of the processing apparatus is turned off; a storage step of storing information indicating that the maintenance of the instructed item has been completed in the second computer of the terminal in response to an instruction from the worker; a transmission step in which the second computer of the terminal transmits to the processing device a notification that the maintenance has been completed; Equipped with The control method is characterized in that in the transmission step, when the worker inputs to the terminal with the power of the processing device turned off that the maintenance of the processing device for the item has been completed, the second computer of the terminal instructs the processing device to store that the maintenance has been completed when the power of the processing device is turned on.

8. A program for controlling a system including a processing device that processes a workpiece and a terminal that has a power supply unit and is disposed outside the processing device, a display step of causing a second computer of the terminal to display items requiring maintenance of the processing device when the power supply of the processing device is turned off via a display unit of the terminal; a storage step of storing information indicating that the maintenance of the designated item has been completed in the second computer of the terminal in response to an instruction from an operator; a transmission step of causing the second computer to transmit to the processing device a notification that the maintenance has been completed; in the transmission step, when the worker inputs to the terminal, with the power supply of the processing device turned off, that the maintenance of the processing device has been completed for the item, the second computer is instructed to store, when the power supply of the processing device is turned on, that the processing device has completed the maintenance; A program for executing the above.

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