Ultrasonic wave assisted grinding device

Abstract

To provide an ultrasonic wave assisted grinding device which can reduce at least one of defects of the prior art.SOLUTION: An ultrasonic wave assisted grinding device includes: a housing unit 3; a spindle unit 4 that is fitted to the housing unit 3, and includes a rotatable rotary shaft 42 defining an internal space 420 therein; a power supply unit 5; a vibration unit 6 which is attached in the internal space 420, is spaced from the rotary shaft 42, and converts electric energy into vibrational energy which is an ultrasonic wave; a vibration reduction unit 7 including a plurality of buffer elements 72 which are respectively installed between the rotary shaft 42 and the vibration unit 6 so as to surround the vibration unit 6; and a grinding unit 8 including a transmission disk 81 which is connected to the rotary shaft 42 and the vibration unit 6, and a grinding wheel 82 attached to the transmission disk 81. The transmission disk 81 transmits the vibrational energy to the grinding wheel 82.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] The present invention relates to a grinding apparatus, and more particularly to an ultrasonically assisted grinding apparatus. [Background technology]

[0002] 1 shows a conventional grinding device 1 disclosed in Patent Document 1. The conventional grinding device 1 includes a grinding wheel 11 configured to grind a glass plate 2, and a spindle 12 connected to the grinding wheel 11 and driving the grinding wheel 11 to rotate it. The spindle 12 can transmit ultrasonic waves to the grinding wheel 11. As a result, in the process of processing the glass plate 2 by the grinding wheel 11, ultrasonic vibrations improve the grinding efficiency and reduce processing damage.

[0003] However, the conventional technology has a technical problem of generating noise and vibration because the ultrasonic waves need to be transmitted to the grinding wheel 11 via the spindle 12. In addition, the vibrations directly transmitted to the spindle 12 can damage the spindle 12 and its related parts, which in turn can cause a decrease in the surface accuracy of the glass plate 2. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Korean Patent Publication No. 10-2012-0114700 Summary of the Invention [Problem to be solved by the invention]

[0005] SUMMARY OF THE PRESENT DISCLOSURE OF THE PRESENT DISCLOSURE An object of the present invention is to provide an ultrasonic-assisted grinding apparatus which improves stability, reduces noise and vibration, and effectively improves machining efficiency and machining quality. [Means for solving the problem]

[0006] The ultrasonically assisted grinding device includes a housing unit, a spindle unit attached to the housing unit, a power supply unit for providing electric energy, a vibration unit for converting the electric energy into vibration energy, which is ultrasonic, a vibration reduction unit, and a grinding unit for grinding a workpiece. The spindle unit includes a motor and a rotating shaft driven by the motor to rotate. The rotating shaft surrounds the axis and defines an internal space therein. The vibration unit is attached within the internal space of the rotating shaft and is spaced apart from the rotating shaft. The vibration unit has an extension that protrudes from the housing unit along a direction parallel to the axis. The vibration reduction unit includes a plurality of buffer elements that are respectively installed between the rotating shaft and the vibration unit to surround the vibration unit, position the vibration unit, and suppress the transmission of vibration energy. The grinding unit includes a transmission disk connected to the rotating shaft and the extension and installed outside the housing unit, and a grinding wheel that is removably attached to the transmission disk. The transmission disk transmits vibration energy from the vibration unit to the grinding wheel. Effect of the Invention

[0007] The buffer element supporting the vibration unit suppresses the transmission of vibration energy to the rotating shaft, and keeps the center lines of the vibration unit and the rotating shaft aligned, improving the stability of the vibration unit and the rotating shaft, reducing noise and vibration, and efficiently improving processing efficiency and processing quality.

[0008] Other features and advantages of the present invention will become apparent in the following detailed description of the embodiments which proceeds with reference to the accompanying drawings. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a front view showing a conventional grinding device disclosed in Patent Document 1. [Diagram 2] 1 is a perspective view showing an ultrasonically assisted grinding device according to a first embodiment of the present invention. [Diagram 3]1 is a cross-sectional view of an ultrasonically assisted grinding apparatus according to a first embodiment. [Figure 4] FIG. 1 is an exploded view of an ultrasonically assisted grinding apparatus according to a first embodiment. [Diagram 5] FIG. 2 is a partial exploded view showing a grinding unit of the ultrasonically assisted grinding apparatus according to the first embodiment. [Figure 6] 1 is a partially enlarged cross-sectional view of an ultrasonically assisted grinding apparatus according to a first embodiment. [Figure 7] FIG. 4 is a partially enlarged cross-sectional view showing a first connecting element of the grinding unit. [Figure 8] FIG. 4 is a partially enlarged cross-sectional view showing a second connecting element of the grinding unit. [Figure 9] FIG. 7 is a cross-sectional view taken along line IX-IX in FIG. [Figure 10] 11 is a frequency characteristic graph showing the influence of a recess of a grinding unit. [Figure 11] FIG. 13 is a diagram showing a simulated energy gradient illustrating the energy distribution of the propagation disk of the grinding unit. [Figure 12] FIG. 12 is a simulated energy gradient similar to FIG. 11 showing that the amplitude of the transmission disk at the portion where it connects to the grinding wheel is greater than the amplitude of the transmission disk at the portion where it connects to the axis of rotation. [Figure 13] FIG. 4 is a cross-sectional view showing an ultrasonically assisted grinding device according to a second embodiment of the present invention. [Figure 14] FIG. 11 is a cross-sectional view showing an ultrasonically assisted grinding device according to another example of the second embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Before describing the present invention in more detail, it should be noted that, where considered appropriate, reference numerals or terminal portions of reference numerals have been repeated among the figures to indicate corresponding or similar elements which may have similar characteristics.

[0011] As used herein, the terms "couple" or "connect" refer to a direct connection between two or more electrical devices / apparatus / facilities by a conductive material (e.g., wires) or an indirect connection between two electrical devices / apparatus / facilities by one or more other devices / apparatus / facilities or wireless communication.

[0012] Furthermore, in this specification, directional terms such as "upper," "lower," "left," "right," "front," and "rear" are used only to exemplify the relative positions of multiple components in embodiments of the present invention in conjunction with the drawings, and are not intended to limit the scope of implementation of the present invention.

[0013] 2 to 5, an ultrasonically assisted grinding apparatus according to a first embodiment of the present invention is shown. The ultrasonically assisted grinding apparatus includes a housing unit 3, a spindle unit 4, a power supply unit 5, a vibration unit 6, a vibration reduction unit 7, and a grinding unit 8.

[0014] The housing unit 3 includes an outer housing 31, a rear lid 32 connected to one end of the outer housing 31, and a front lid 33 connected to the other end of the outer housing 31. The outer housing 31 surrounds the axis X to define a rear space 311 and a front space 312 opposite the rear space 311 in a direction parallel to the axis X. The rear lid 32 surrounds the axis X to define a rear opening 321 communicating with the rear space 311. The front lid 33 surrounds the axis X to define a front opening 331 communicating with the front space 312.

[0015] The spindle unit 4 includes a motor 41 attached to the outer housing 31 of the housing unit 3 and inserted into the rear space 311, a rotatable rotating shaft 42 extending through the motor 41 and the outer housing 31 along a direction parallel to the axis X, and a plurality of bearings 43.

[0016] In this embodiment, the center line of the rotating shaft 42 overlaps with the axis X. The rotating shaft 42 is driven to rotate by the motor 41. The rotating shaft 42 includes a rear portion 421 extending through the motor 41, a front space 422 opposite to the rear portion 421 surrounding the axis X and defining an internal space 420 therein, and a passage 423 communicating with the outside world and extending from one end surface to the other end surface along a direction parallel to the axis X. The front portion 422 is inserted and disposed in the front space 312 and protrudes from the housing unit 3 through the front opening 331. The passage 423 is configured to introduce a fluid from the outside world to pass through the rotating shaft 42. The passage 423 includes a main segment 424 extending along an axis X, a plurality of first sub-segments 425 communicating with the main segment 424 and arranged to surround the axis X, and a plurality of second sub-segments 426 communicating with the main segment 424 and the interior space 420. In this embodiment, the fluid may be, but is not limited to, gas or water.

[0017] The bearings 43 are attached between the outer housing 31 and the rotating shaft 42, and are located in the rear space 311 and the front space 312. The bearings 43 support the rear portion 421 and the front portion 422 of the rotating shaft 42.

[0018] The power supply unit 5 includes a first sensing unit 51 mounted on the rear cover 32 and providing electrical energy, and a second sensing unit 52 mounted on the rotating shaft 42. The electrical energy is transmitted from the first sensing unit 51 to the second sensing unit 52 via electromagnetic induction.

[0019] 3 to 6, the vibration unit 6 is inserted into the internal space 420 along a direction parallel to the axis X, and is attached in the internal space 420 and spaced apart from the rotation shaft 42. The vibration unit 6 has a vibration unit diameter d1 in a direction perpendicular to the axis X, and is electrically connected to the second sensing unit 52. The vibration unit 6 includes a transducer 61 that converts electrical energy into ultrasonic vibration energy, and a horn 62 that is connected to the transducer 61 and extends along a direction parallel to the axis X. The horn 62 amplifies the amplitude of the vibration energy. The horn 62 has an extension 621 that protrudes from the front opening 331 along a direction parallel to the axis X. In this embodiment, the center line of the horn 62 overlaps with the axis X. The frequency of the vibration energy is in the range of 15 kHz to 100 kHz. In a preferred embodiment, the frequency of the vibration energy is in the range of 15 kHz to 25 kHz. It should be noted that the term "ultrasonic waves" in the present invention is intended to include the above frequency range.

[0020] The vibration reduction unit 7 includes two annular elements 71 spaced apart from each other in a direction parallel to the axis X and surrounding the vibration unit 6, and two buffer elements 72 disposed between the rotation shaft 42 and the vibration unit 6 so as to surround the vibration unit 6 and corresponding to the annular elements 71. Each of the annular elements 71 has a mounting groove 711 formed on its outer circumferential surface. Each of the buffer elements 72 is mounted in the mounting groove 711 of the corresponding annular element 71 and disposed between the corresponding annular element 71 and the rotation shaft 42. The buffer elements 72 position the vibration unit 6 so that the center line of the vibration unit 6 coincides with the center line of the rotation shaft 42, and reduce the propagation of vibration energy in a direction perpendicular to the axis X, i.e., suppress the propagation of vibration energy from the vibration unit 6 to the rotation shaft 42 in a direction perpendicular to the axis X.

[0021] The annular element 71 may be formed integrally with the vibration unit 6, or may be attached to the vibration unit 6 in a detachable manner.

[0022] The grinding unit 8 includes a transmission disk 81 connected to the horn 62, a grinding wheel 82 removably attached to the transmission disk 81, a plurality of first protrusions 83, a plurality of second protrusions 84, a central connecting member 85, a plurality of first connecting members 86, and a plurality of second connecting members 87. The transmission disk 81 transmits vibration energy from the vibration unit 6 to the grinding wheel 82. The central connecting member 85, the first connecting member 86, and the second connecting member 87 are, for example, but not limited to, bolts.

[0023] The propagation disk 81 is connected to the rotation shaft 42 and the extension 621 and is disposed outside the housing unit 3. Specifically, the propagation disk 81 has a central portion 811 located in the middle thereof and substantially perpendicular to the axis X, a centrifugal portion 812 surrounding the central portion 811, a first disk surface 813 located on one side thereof, a second disk surface 814 located on the other side thereof opposite to the first disk surface 813, an annular rib 815 formed on the second disk surface 814 around the axis X, and a plurality of outlets 816 extending from the first disk surface 813 to the second disk surface 814. The central portion 811 has a recess 817. The first disk surface 813 contacts the extension 621 of the horn 62 and is spaced apart from the rotation shaft 42. The outlets 816 correspond to the first sub-segments 425 of the passages 423 of the rotation shaft 42, respectively.

[0024] Each of the outlets 816 communicates with the outside world and with a corresponding first sub-segment 425 and is configured to expel fluid entering from the corresponding first sub-segment 425 to the outside world.

[0025] In this embodiment, the propagation disk 81 is disk-shaped and centered on the axis X. The propagation disk 81 has a disk diameter D that is larger than the vibration unit diameter d1.

[0026] In this embodiment, the grinding wheel 82 is a grinding stone and has a wheel diameter d2 larger than the disk diameter D in a direction perpendicular to the axis X. The grinding wheel 82 has a wheel frame 821 and a plurality of grinding materials 822 connected to the wheel frame 821. The wheel frame 821 has an inner peripheral surface 823 surrounding the axis X, an outer peripheral surface 824 surrounding the inner peripheral surface 823, a frame surface 825 connecting the inner peripheral surface 823 and the outer peripheral surface 824, and a wheel surface 826 opposite to the frame 825. The inner peripheral surface 823 abuts against the annular rib 815. The frame surface 825 faces the second disk surface 814. The grinding materials 822 connect to the wheel surface 826 and are adjacent to the periphery of the wheel surface 826. The grinding materials 822 grind / polish a workpiece (not shown). The workpiece is, for example, a wafer.

[0027] 6 to 8, in this embodiment, the number of the first protrusions 83 is six (see further FIG. 5), and the first protrusions 83 are formed on the first disk surface 813 of the propagation disk 81 and are substantially circular. The first protrusions 83 connect to the rotation shaft 42 and the first disk surface 813.

[0028] In this embodiment, the number of the second protrusions 84 is six (see further FIG. 4 ), and the second protrusions 84 are formed on the second disk surface 814 of the propagation disk 81 and are substantially semicircular. The second protrusions 84 connect to the frame surface 825 of the grinding wheel 82 and the first disk surface 84.

[0029] The first convex portion 83 is not limited to being formed on the first disk surface 813, and in another embodiment of this embodiment, the first convex portion 83 may be formed on the rotating shaft 42. Similarly, the second convex portion 84 is not limited to being formed on the second disk surface 814, and in another embodiment of this embodiment, the second convex portion 84 may be formed on the frame surface 825 of the grinding wheel 82. In this embodiment, the first convex portion 83 and the second convex portion 84 are integrally formed with the propagation disk 81, but the first convex portion 83 and the second convex portion 84 may be shims formed separably on the propagation disk 81.

[0030] The central connecting member 85 includes a central connecting head 851 that is inserted into a recess 817 in the center 811 of the propagation disk 81 along the axis X and abuts against the center 811 of the propagation disk 81, and a central connecting rod 852 that extends from the central connecting head 851 through the recess 817 in a direction parallel to the axis X and connects to the horn 62 of the vibration unit 6.

[0031] The first connecting members 86 are arranged at equal angular intervals around the axis X. Each of the first connecting members 86 includes a first connecting head 861 that abuts against the propagation disk 81, and a first connecting rod 862 that extends from the first connecting head 861 through the propagation disk 81 along a direction parallel to the axis X and connects to the rotation shaft 42.

[0032] The propagation disk 81 is divided into a central portion 811 and a centrifugal portion 812 via the first connecting member 86. In other words, the portion of the propagation disk 81 between the first connecting member 86 and the axis X is the central portion 811, and the remaining portion of the propagation disk 81 is the centrifugal portion 812.

[0033] The second connecting members 87 are arranged at equal angular intervals around the axis X. Each of the second connecting members 87 includes a second connecting head 871 that abuts against the centrifugal portion 812 of the propagation disk 81, and a second connecting rod 872 that extends from the second connecting head 871 through the propagation disk 81 along a direction parallel to the axis X and connects to the grinding wheel 82.

[0034] In this embodiment, each of the second connecting members 87 is spaced a predetermined distance T from the axis X in a direction perpendicular to the axis X. The predetermined distance T is in a range of 50 mm to 120 mm. In a preferred embodiment, the predetermined distance T is in a range of 80 mm to 100 mm, a range of 85 mm to 95 mm, a range of 60 mm to 80 mm, a range of 80 mm to 120 mm, or a range of 90 mm to 110 mm.

[0035] 6 to 9, in the process of transmitting vibration energy from horn 62 through transmission disk 81 to grinding wheel 82, first, horn 62 is elongated in a direction parallel to axis X due to the stress of the vibration energy, and vibrates in a high-frequency first mode.

[0036] When vibration energy is transmitted from the horn 62 to the transmission disk 81, the central portion 811 of the transmission disk 81 is easily deformed by the recess 817. At this time, in addition to the central portion 811 of the transmission disk 81 being elongated in a direction parallel to the axis X, the centrifugal portion 812 is curved so as to twist around the first connecting member 86, and is shear deformed in a direction perpendicular to the axis X. This causes the transmission disk 81 to vibrate in the second mode at a high frequency.

[0037] 10, it can be seen that when the propagation disk 81 has the recess 817, periodic vibration occurs more easily than when the propagation disk 81 does not have the recess 817. This improves the effectiveness and stability in propagating vibration energy.

[0038] When the vibration energy is transmitted from the transmission disk 81 to the grinding wheel 82 via the second protrusion 84, the transmission disk 81 and the grinding wheel 82 vibrate in a high-frequency resonance mode. The resonance mode is a concentric resonance mode as shown in Fig. 11. With reference to Figs. 9 and 11, that is, the vibration energy is transmitted from the central connecting member 85 to the annular rib 815 in the concentric mode.

[0039] In the process of the vibration energy being propagated, the vibration energy is also propagated from the propagation disk 81 to the rotating shaft 42 via the first convex portion 83. Further referring to the diagrams simulating the energy gradient shown in FIG. 11 and FIG. 12, it can be seen that the center portion 811 is directly connected to the horn 62 and has the largest vibration energy. However, from the viewpoint of the concentric resonance mode, the concentric circles with a relatively dark color are portions with a relatively small vibration energy and an amplitude close to zero, and the concentric circles with a relatively light color are portions with a relatively large vibration energy and an amplitude close to the peak value. The innermost concentric circle 9a with a dark color corresponds to the portion adjacent to the first convex portion 83 of the propagation disk 81. The outermost concentric circle 9b with a light color corresponds to the portion adjacent to the second convex portion 84 of the propagation disk 81. Therefore, it is clear that the amplitude of the portion adjacent to the second convex portion 84 of the propagation disk 81 is greater than the amplitude of the portion adjacent to the first convex portion 83.

[0040] As a result, when the abrasive material 822 is adjacent to the second protrusion 84 and vibrates at high frequency together with the centrifugal portion 812, the vibration magnitude of the abrasive material 822 is effectively increased, so that the workpiece can be ground more quickly by the incision cutting force due to elongation in the direction parallel to the axis X and the shear cutting force in the direction perpendicular to the axis X, and the possibility of damaging the workpiece can also be greatly reduced.

[0041] In addition, in the process of transmitting the vibration energy, a fluid is introduced from the outside into the passage 423 of the rotating shaft 42 through a pressurizing device (e.g., a pump). Specifically, the fluid first enters the main segment 424 of the passage 423, then enters the first sub-segment 425 or the second sub-segment 426, and flows toward the outlet 816 of the transmission disk 81 or the internal space 420 of the rotating shaft 42. Finally, the fluid is discharged from the outlet 816 and the gap between the rotating shaft 42 and the transmission disk 81, and is sprayed onto the workpiece, and becomes interposed between the workpiece and the grinding material 822. As a result, the fluid exchanges heat with the grinding material 822, the workpiece, and the vibration unit 6, and can dissipate heat, cool, or lubricate the grinding material 822, the workpiece, and the vibration unit 6.

[0042] It should be noted that the outlet 816 for discharging the fluid 816 is not limited to being directly connected to the outside world. In another embodiment of this embodiment, the grinding wheel 82 may further have a fluid passage (not shown) that communicates with the outside world and the outlet 816, and the fluid passes through the outlet 816 and is discharged from the fluid passage. That is, the outlet 816 communicates with the outside world via the fluid passage. In addition, when the fluid is a gas, the passage 423 may be used to pass an electric wire (not shown) that electrically connects the second sensing unit 52 and the vibration unit 6.

[0043] 13, there is shown an ultrasonically assisted grinding apparatus according to a second embodiment of the present invention. The differences between the second embodiment and the first embodiment are as follows.

[0044] The rotating shaft 42 further has two wiring through holes 427. The passage 423 extends in a direction parallel to the axis X, communicates with the internal space 420 and the outside world, and is configured to introduce a fluid from the outside world into the internal space 420. The wiring through hole 427 extends in a direction parallel to the passage 423 (i.e., extends in a direction parallel to the axis X), communicates with the internal space 420 and the outside world, and is configured to pass electric wires (not shown) that are electrically connected to the second sensing unit 52 and the vibration unit 6.

[0045] The grinding unit 8 further comprises a connection part 88 which surrounds the vibration unit 6 and is located between the first disc surface 813 of the transmission disc 81 and the rotation axis 42 .

[0046] For each of the first connecting members 86 , a first connecting head 861 abuts a connecting part 88 and a first connecting rod 862 extends through the connecting part 88 and connects to the rotation shaft 42 .

[0047] It should be noted that the vibration unit 6 is not limited to one that converts electrical energy into vibration energy. In another example of this embodiment shown in Fig. 14, the vibration unit 6 defines a fluid passage 60 that extends from one end face to another end face along a direction parallel to the axis X and communicates with the passage 423. Furthermore, the central connecting member 85 has a central through hole 853 that passes through the central connecting head 851 and the central connecting rod 852 along a direction parallel to the axis X and communicates with the fluid passage 60.

[0048] This allows the fluid to pass through the passage 423 and the fluid passage 60 and be discharged from the central through hole 853, exchanging heat with the abrasive material 822, the workpiece, and the vibration unit 6, thereby dissipating heat, cooling, or lubricating the abrasive material 822, the workpiece, and the vibration unit 6.

[0049] The advantages of the above-described embodiments can be summarized as follows:

[0050] The vibration unit 6 of the present invention is in point contact with the rotating shaft 42 only via the annular element 71 and the buffer element 72, so that the center line of the vibration unit 6 and the center line of the rotating shaft 42 are kept coincident via the annular element 71, and the transmission of vibration energy to the rotating shaft 42 is suppressed via the buffer element 72.

[0051] In addition, the present invention reduces the loss of vibration energy by using the predetermined interval T, the first convex portion 83, the second convex portion 84, and the concave portion 817, increases the vibration energy of the portion adjacent to the second convex portion 84 of the transmission disk 81, and reduces the vibration energy of the portion adjacent to the first convex portion 83 of the transmission disk 81. This not only effectively avoids the vibration of the rotating shaft 42 and reduces noise, but also increases the vibration magnitude of the grinding material 822, allowing the workpiece to be ground more quickly and allowing for a larger or heavier grinding wheel 82 to be accommodated. Furthermore, it also prevents dust from adhering to the grinding wheel 82, thereby extending the service life.

[0052] Furthermore, since the first sensing unit 51 and the second sensing unit 52 of the present invention transmit electrical energy via electromagnetic induction, no wire connection is required, which not only avoids direct physical contact, but also reduces wear and tear, thus improving service life.

[0053] In the present invention, the passage 423 and the outlet 816 allow the fluid to be introduced from the outside world into the passage 423 and flow to the workpiece via the outlet 816. This allows the fluid to exchange heat with the abrasive material 822, the workpiece, and the vibration unit 6, and dissipate heat, cool, or lubricate the abrasive material 822, the workpiece, and the vibration unit 6.

[0054] In the above description, for the purpose of explanation, numerous specific details are set forth to provide a thorough understanding of the embodiments. However, it will be apparent to one skilled in the art that one or more other embodiments may be implemented without the specific details. In addition, in the description of "one embodiment" or "one embodiment" in this specification, it should be understood that all descriptions accompanied by ordinal numbers or other indications may be included in the specific implementation of the present invention having specific aspects, structures, and features. Furthermore, in this specification, multiple variations are sometimes incorporated into one embodiment, drawing, or description thereof, but this is for the purpose of streamlining the specification and for the purpose of understanding the multiple aspects of the present invention, and one or more features or specific examples in one embodiment may be implemented together with one or more features or specific examples in other embodiments, where appropriate, in the implementation of the present invention.

[0055] Although the embodiments and modified examples of the present invention have been described above, the present invention is not limited to these, and is intended to encompass all modifications and equivalent configurations as various configurations falling within the spirit and scope of the broadest interpretation. [Explanation of symbols]

[0056] 3 Housing Unit 31 Outer housing 311 Rear space 312 Front space 32 Rear cover 321 Rear opening 33 Front cover 331 Front opening 4 Spindle unit 41 Motor 42 Rotation axis 420 Interior Space 421 Rear part 422 Front part Aisle 423 424 Main Segment 425 1st subsegment 426 Second Subsegment 427 Wiring through hole 43 Bearing 5 Power Supply Unit 51 First sensing unit 52 Second sensing unit 6 Vibration Unit 60 Fluid passage 61 Transducer 62 Horn 621 Stretching section 7 Vibration reduction unit 71 Annular element 711 Mounting groove 72 Buffer element 8 Grinding Unit 81 Propagation disc 811 Center 812 Centrifugal section 813 1st disk surface 814 Second disk surface 815 Circular Rib 816 Exit 817 Recess 82 Grinding Wheel 821 Wheel Frame 822 Abrasives 823 Inner surface 824 Outer surface 825 Frame surface 826 Wheel Surface 83 First protrusion 84 Second protrusion 85 Central connecting member 851 Center Connection Head 852 central connecting rod 853 Center through hole 86 First connecting member 861 1st Connection Head 862 First connecting rod 87 Second connecting member 871 Second Connection Head 872 Second connecting rod 88 Connection parts 9a Dark concentric circles 9b Light colored concentric circles X axis D Disc diameter d1 Vibration unit diameter d2 Wheel diameter T given interval

Claims

1. The present invention includes a housing unit, a spindle unit attached to the housing unit, a power supply unit for providing electric energy, a vibration unit for converting the electric energy into ultrasonic vibration energy, a vibration reduction unit, and a grinding unit for grinding a workpiece, The spindle unit includes a motor and a rotating shaft that is driven to rotate by the motor, the rotating shaft surrounding an axis and defining an internal space therein; the vibration unit is attached within the internal space of the rotating shaft and spaced apart from the rotating shaft, the vibration unit having an extension protruding from the housing unit along a direction parallel to the axis; the vibration reduction unit includes a plurality of buffer elements that are respectively installed between the rotation shaft and the vibration unit so as to surround the vibration unit, position the vibration unit, and suppress transmission of the vibration energy; the grinding unit includes a transmission disk connected to the rotating shaft and the extension and installed outside the housing unit, and a grinding wheel removably attached to the transmission disk, the transmission disk transmitting the vibration energy from the vibration unit to the grinding wheel; Ultrasonic assisted grinding equipment.

2. The rotating shaft further defines a passageway extending in a direction parallel to the axis and communicating with the outside world, the propagation disk having an outlet communicating with the outside world and the passageway; The passage is configured to introduce a fluid from the outside world and pass the rotating shaft, and the outlet is configured to discharge the fluid entering from the passage to the outside world, thereby allowing the fluid to cool or lubricate the workpiece.

2. The ultrasonically assisted grinding apparatus of claim 1.

3. The rotating shaft is connected to the outside world and the internal space, extends in a direction parallel to the axis, and has a wiring through hole configured to pass an electric wire therethrough.

3. The ultrasonically assisted grinding apparatus of claim 2.

4. The vibration reduction unit further includes a plurality of annular elements spaced apart from each other in a direction parallel to the axis, each of which surrounds the vibration unit and corresponds to each of the buffer elements, and each of the buffer elements is disposed between the corresponding annular element and the rotation shaft.

2. The ultrasonically assisted grinding apparatus of claim 1.

5. The grinding unit further includes a central connecting member, the propagation disk having a central portion located at the center thereof and a centrifugal portion surrounding the central portion, the central portion having a recess, the central connecting member extending through the recess along a direction parallel to the axis and abutting against the central portion to connect to the vibration unit.

2. The ultrasonically assisted grinding apparatus of claim 1.

6. The grinding unit further includes a plurality of first connecting members and a plurality of first convex portions located between the propagation disk and the rotation shaft, the propagation disk further has a first disk surface located on one side thereof, the first connecting members are arranged at equal angular intervals around the axis, each extending through the propagation disk along a direction parallel to the axis, and abutting against the propagation disk to connect to the rotation shaft, and the first convex portions contact the rotation shaft and the first disk surface of the propagation disk.

6. The ultrasonically assisted grinding apparatus of claim 5.

7. The grinding unit further includes a plurality of second connecting members, the propagation disk further having a second disk surface located on the other side opposite to the first disk surface, and an annular rib formed on the second disk surface around the axis, the annular rib abutting against the grinding wheel, and the second connecting members are arranged at equal angular intervals around the axis, extend through the propagation disk along a direction parallel to the axis, and abut against the propagation disk to connect to the grinding wheel.

7. The ultrasonically assisted grinding apparatus of claim 6.

8. the grinding unit further includes a plurality of second convex portions located between the transmission disk and the grinding wheel, the second convex portions contact the second disk surface of the transmission disk and the grinding wheel to transmit the vibration energy to the grinding wheel, and an amplitude of a portion of the transmission disk adjacent to the second convex portions is greater than an amplitude of a portion of the transmission disk adjacent to the first convex portions; 8. The ultrasonically assisted grinding apparatus of claim 7.

9. Each of the second connection members is spaced apart from the axis at a predetermined distance in a direction perpendicular to the axis, the predetermined distance being in a range of 60 mm to 80 mm, or in a range of 90 mm to 110 mm; During the transmission of the vibration energy from the vibration unit to the grinding wheel through the transmission disk, the transmission disk vibrates in a high frequency resonant mode, the resonant mode being a concentric resonant mode.

8. The ultrasonically assisted grinding apparatus of claim 7.

10. The grinding unit further includes a connecting part surrounding the vibration unit and located between the transmission disk and the rotation shaft, and a plurality of first connecting members, the first connecting members being arranged to surround the axis, each extending through the connecting part along a direction parallel to the axis, and abutting against the connecting part to connect to the rotation shaft.

6. The ultrasonically assisted grinding apparatus of claim 5.

11. the power supply unit includes a first sensing unit attached to the housing unit and providing the electrical energy; and a second sensing unit attached to the rotating shaft and electrically connecting to the vibration unit, the electrical energy being transmitted from the first sensing unit to the second sensing unit via electromagnetic induction.

2. The ultrasonically assisted grinding apparatus of claim 1.

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