Linear sensor unit

Abstract

To provide an inexpensive linear sensor unit.SOLUTION: A linear sensor unit 1 of the present invention includes: a linear sensor 2 with a sensor wire 20 and a shield coating 25; and an output-side terminal member 3 electrically connected to the linear sensor 2. The output-side terminal member 3 is a film-like member having a first shield conductor layer 35 electrically connected to the shield coating 25. The first shield conductor layer 35 is overlapped around the liner sensor 20 more than one time.SELECTED DRAWING: Figure 20

Description

[Technical field]

[0001] The present invention relates to a linear sensor unit including a linear sensor having a sensor wire and a shield coating, and a terminal member electrically connected to the linear sensor. [Background technology]

[0002] A linear sensor is known that uses an internal conductor, a piezoelectric body provided in contact with the outer peripheral surface of the internal conductor, and an external conductor provided in contact with the outer peripheral surface of the piezoelectric body as a sensor wire (see, for example, Patent Document 1, etc.). This linear sensor has a characteristic that the piezoelectric body is deformed by the application of an external load, and a voltage is induced between the internal conductor and the external conductor. Using this characteristic, it is being considered to use the linear sensor as a pressure sensor for detecting pressure or a vibration sensor for detecting vibration. It is also being considered to configure a linear sensor using a resistance wire such as conductive rubber or a capacitor wire as a sensor wire instead of a sensor wire using a piezoelectric body. In these linear sensors, it becomes difficult to obtain accurate detection results if external noise enters the sensor wire. As a countermeasure against this external noise, there is a linear sensor that is provided with a shield coating to cover the outside of the sensor wire in order to block external noise from the outside. Also, a linear sensor unit is known in which terminal members are arranged on each of the end of a linear sensor provided with a shield coating that is connected to a circuit and the end opposite to the end connected to the circuit. Hereinafter, the end portion connected to the circuit will be referred to as the output end portion, and the end portion opposite to the side connected to the circuit will be referred to as the termination end portion. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. WO2019 / 117037 Summary of the Invention [Problem to be solved by the invention]

[0004] Both ends of the linear sensor unit must be connected to the terminal members without shorting the conductor portion of the sensor wire and the shield coating. If the linear sensor is simply cut into a ring, there is a risk that the conductor portion of the sensor wire and the shield coating will be shorted. For this reason, at the end of the linear sensor, the shield coating, the sheath between the shield coating and the conductor portion of the sensor wire, and the conductor portion of the sensor wire are cut at a position slightly away from each other in the extension direction of the linear sensor. Then, at the output end, after electrically connecting one end of the lead wire to each of the conductor portion of the sensor wire and the shield coating, the terminal member is formed by wrapping an insulating tape so as to cover the conductor portion of the sensor wire, covering the insulating tape with a conductive film electrically connected to the shield coating, and further covering the insulating tape with another insulating tape. On the other hand, at the termination end, the terminal member is formed by wrapping an insulating tape so as to cover the conductor portion of the sensor wire, covering the insulating tape with a conductive film electrically connected to the shield coating, and further covering the insulating tape with another insulating tape. By covering the output end and the termination end with a conductive film electrically connected to the shield coating, it is possible to prevent external noise from entering from both ends of the sensor line. However, this process is very cumbersome, which causes the linear sensor unit to become expensive.

[0005] SUMMARY OF THE PRESENT DISCLOSURE In view of the above circumstances, an object of the present invention is to provide an inexpensive linear sensor unit. [Means for solving the problem]

[0006] The linear sensor unit of the present invention that solves the above-mentioned object is a linear sensor unit including a linear sensor having a sensor wire and a shield coating, and a terminal member electrically connected to the linear sensor, the terminal member is a film-like member having a first shielding conductor layer electrically connected to the shielding coating, The first shield conductor layer is characterized in that it is overlapped a plurality of times to cover the periphery of the linear sensor.

[0007] In the linear sensor unit of the present invention, the sensor wire has an inner conductor and an outer conductor, the terminal member has a second connection conductor layer disposed with a gap therebetween and electrically connected to the external conductor, The first shielding conductor layer may cover the outside of the second connecting conductor layer. Effect of the Invention

[0008] According to the present invention, an inexpensive linear sensor unit can be provided. [Brief description of the drawings]

[0009] [Figure 1] FIG. 2A is a plan view showing an example of an output side end portion of a linear sensor unit of the present invention, and FIG. 2B is a cross-sectional view showing the structure of the linear sensor. [Diagram 2] 2 is a plan view showing an output-side terminal member shown in FIG. 1(a) in an expanded state. FIG. [Diagram 3] 2. FIG. 3A is a cross-sectional view taken along the line CC in FIG. 2, and FIG. 3B is a cross-sectional view taken along the line DD in FIG. [Figure 4] 3 is a bottom view of the output-side terminal member and the sensor wire shown in FIG. 2 as viewed from below. [Diagram 5] 2A is a cross-sectional view taken along line AA in FIG. 1, and FIG. 2B is a cross-sectional view taken along line BB in FIG. [Figure 6] FIG. 2A is a plan view showing an example of a terminal end portion of a linear sensor unit of the present invention, and FIG. 2B is a plan view showing the terminal end member shown in FIG. 2A when unfolded. [Figure 7] 6(a) is a cross-sectional view taken along line GG in FIG. 6(b), and (b) is a cross-sectional view taken along line HH in FIG. 6(b). [Figure 8] 6(a) is an E-E cross-sectional view taken along line E-E in FIG. 6(a), and (b) is an F-F cross-sectional view taken along line F-F in FIG. 6(a). [Figure 9]3 is a plan view similar to FIG. 2, showing an output-side terminal member of a modified example in a developed state. [Figure 10] 6(a) is a plan view similar to FIG. 6(b) showing an end side terminal member of a second modified example in a developed state, and FIG. 6(b) is a cross-sectional view taken along line JJ in FIG. 6(a). [Figure 11] 10 is a plan view similar to FIG. 2, illustrating a state in which an output terminal member in the linear sensor unit according to the second embodiment is developed. FIG. [Figure 12] 11. FIG. 14(a) is a KK cross-sectional view taken along line KK in FIG. 11, and FIG. 14(b) is a LL cross-sectional view taken along line LL in FIG. [Figure 13] 12 is a bottom view of the output side terminal member and the sensor wire shown in FIG. 11 . FIG. [Figure 14] 12 is an MM cross-sectional view of the output-side terminal member shown in FIG. 11 folded along the fold line and the second fold line and cut at a portion with an MM line. FIG. [Figure 15] 6(b) showing a state in which an end side terminal member in the linear sensor unit according to the second embodiment is developed; FIG. [Figure 16] 15. FIG. 16A is a cross-sectional view taken along the line NN in FIG. 15, and FIG. 16B is a cross-sectional view taken along the line PP in FIG. [Figure 17] 16 is a bottom view of the end-side terminal member and the sensor wire shown in FIG. 15 as viewed from below. [Figure 18] 16 is a QQ sectional view of the end-side terminal member shown in FIG. 15 folded along the end-side terminal fold line and the end-side terminal second fold line and cut at a portion with a QQ line. [Figure 19] FIG. 13 is a plan view showing a linear sensor unit according to a third embodiment. [Figure 20] FIG. 11 is a plan view showing a state in which an output side terminal member in the linear sensor unit of the third embodiment is developed. [Figure 21] 21 is a cross-sectional view taken along the line TT in FIG. 20. [Figure 22] 20 is a cross-sectional view taken along line RR in FIG. 19. [Figure 23]FIG. 11 is a plan view showing a state in which a trailing end terminal member in a linear sensor unit according to a third embodiment is developed. [Figure 24] 24 is a cross-sectional view taken along line UU in FIG. 23. [Diagram 25] 20 is a cross-sectional view taken along the line SS in FIG. 19. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0011] FIG. 1(a) is a plan view showing an example of an output side end portion of a linear sensor unit of the present invention, and FIG. 1(b) is a cross-sectional view showing the structure of the linear sensor.

[0012] The linear sensor unit 1 of this embodiment includes a linear sensor 2, an output side terminal member 3, and a termination side terminal member 4 (see FIG. 6). The output side terminal member 3 and the termination side terminal member 4 are each an example of a terminal member. As shown in FIG. 1(a), the output side terminal member 3 is fixed to the output side end of the linear sensor 2. The output side terminal member 3 is in the form of a film that is folded in half while sandwiching the output side end of the linear sensor 2. The output side terminal member 3 is also formed with a first contact portion 311, a second contact portion 312, and a third contact portion 313. The output side terminal member 3 is for transmitting a signal obtained by the linear sensor 2 to a measuring device or a circuit board (not shown) while preventing noise from the outside (hereinafter referred to as external noise) from entering the signal obtained by the linear sensor 2. The structures of the output side terminal member 3 and the termination side terminal member 4 will be described in detail later.

[0013] 1(b), the linear sensor 2 is composed of a sensor wire 20, an inner sheath 24, a shield coating 25, and an outer sheath 26. The sensor wire 20 is composed of an internal conductor 21, a piezoelectric body 22, and an external conductor 23. The internal conductor 21 is disposed at the center of the linear sensor 2, and is composed of seven conductor wires 211. The piezoelectric body 22 is provided on the outer periphery of the internal conductor 21. The external conductor 23 is provided on the outer periphery of the piezoelectric body 22.

[0014] All seven conductor wires 211 have a diameter of 10 μm, of which four are stainless steel conductor wires 211S and the remaining three are copper conductor wires 211C. In FIG. 1(b), the stainless steel conductor wires 211S are hatched downward to the left, and the copper conductor wires 211C are hatched downward to the right. In the internal conductor 21 shown in FIG. 1(b), the conductor wire arranged at the center is a stainless steel conductor wire 211S (stainless steel wire), and the conductor wires arranged on the periphery are alternately made of stainless steel conductor wires 211S and copper conductor wires 211C. The copper conductor wire 211C has a lower electrical resistance and is softer than the stainless steel conductor wire 211S. Conversely, the stainless steel conductor wire 211S has a higher electrical resistance than the copper conductor wire 211C, but has higher mechanical strength (e.g., tensile strength) and rigidity.

[0015] The seven conductor wires 211 are arranged at the vertices of a regular hexagon and at the center of the regular hexagon. These seven conductor wires 211 are twisted together. That is, the internal conductor 21 is formed by twisting the seven conductor wires 211 together after arranging them in a close-packed structure in the cross section. In this case, the thickness of the internal conductor 21 is a maximum of 30 μm. By twisting the multiple conductor wires 211 in this manner with a loose twist or a medium twist, loosening in the direction opposite to the twisting direction is permitted, and flexibility can be imparted to the linear sensor 2.

[0016] The diameter of the conductor wire 211 is not limited to 10 μm, and may be 8 μm to 40 μm, and is preferably 8 μm to 30 μm. The thinner the conductor wire 211, the higher the flexibility but the lower the strength and rigidity, and the thicker the conductor wire 211, the lower the flexibility but the higher the strength and rigidity. If the thickness of the conductor wire 211 is 20 μm or more, it can be manufactured at low cost and easily. The inner conductor 21 may be formed by twisting together conductor wires 211 of different thicknesses.

[0017] Although the internal conductor 21 shown in FIG. 1(b) is made by twisting seven conductor wires 211, the number of wires does not have to be seven. By twisting a plurality of conductor wires 211 together, the flexibility of the linear sensor 2 can be increased. In addition, the sensor 2 may be twisted in a plurality of stages, for example, by preparing a plurality of bundles of twisted wires and further twisting these bundles. For example, the sensor 2 may be configured to have seven bundles of twisted seven thin conductor wires 211, which are further twisted together. By twisting in a plurality of stages, the flexibility of the linear sensor 2 is further increased, so that the linear sensor 2 is easily deformed in response to vibrations or the like applied to the linear sensor 2. As a result, the detection sensitivity of the linear sensor 2 can be increased. In addition, when there are a plurality of twisting steps, such as when twisting in a plurality of stages, the twisting directions may be different. On the other hand, a plurality of conductor wires 211 may be bundled in a straight line without being twisted. Furthermore, these configurations may be combined, for example, by twisting together a bundle of multiple untwisted conductor wires 211 and multiple twisted conductor wires 211. Even in these cases, the multiple conductor wires 211 can be bonded and bundled together by applying a piezoelectric material, thereby producing a single piezoelectric fiber.

[0018] In the sensor wire 20 described above, a plurality of types of conductor wires having different mechanical strengths and electrical resistances are used as the conductor wires 211 constituting the internal conductor 21. However, when the flexibility is to be further increased or the electrical resistance is to be further decreased, the central conductor wire 211 may be replaced with the copper conductor wire 211C, or all of the seven conductor wires 211 may be made of copper conductor wires 211C. Conversely, when the mechanical strength and rigidity are to be further increased, all of the seven conductor wires 211 may be made of stainless steel conductor wires 211S. In addition, instead of the stainless steel conductor wire 211S, a conductor wire made of tungsten, or a conductor wire made of high tensile steel or ultra-high tensile steel such as tungsten and its alloy may be used, and instead of the copper conductor wire 211C, a conductor wire made of titanium, a titanium alloy, or a conductor wire made of magnesium or magnesium alloy may be used. Furthermore, the conductor wire may be a conductor wire containing carbon nanotubes, or a conductor wire containing pitch-based carbon fibers. Alternatively, a conductor wire made of spring steel that is easily elastically deformed may be used.

[0019] The piezoelectric body 22 is formed by applying a piezoelectric material such as polyvinylidene fluoride (PVDF) to the internal conductor 21. Polyvinylidene fluoride is a lightweight polymeric material that generates a piezoelectric effect, and has the property that a voltage is generated when pressure is applied to it, and a distortion occurs when a voltage is applied to it. The piezoelectric body 22 has been subjected to a polarization process, and a voltage is induced between the internal conductor 21 and the external conductor 23 when the piezoelectric body 22 is deformed by vibration or the like.

[0020] Examples of the piezoelectric material constituting the piezoelectric body 22 shown in Fig. 1(b) include polyvinylidene fluoride, trifluoroethylene (TrEF), mixed crystal materials of PVDF and TrEF, and polymeric materials having a dipole moment such as polylactic acid, polyuric acid, and polyamino acid. The method of applying the piezoelectric material may be immersion (dip coating), spray coating, brush coating, or application using a coating device such as a coater. The method is not limited to a coating configuration, and may be, for example, a configuration in which a strip-shaped PVDF film is spirally wound around the internal conductor 21.

[0021] The thickness of the piezoelectric body 22 is preferably equal to or greater than the diameter of the conductor wire 211. The thickness of the piezoelectric body 22 shown in FIG. 1(b) is 10 μm at its thinnest point, but is preferably 10 μm to 50 μm. The thicker the piezoelectric body 22 is, the better the detection sensitivity becomes, but the limit value of the thickness of the piezoelectric body 22 is determined by the viscosity of the applied piezoelectric material and the application method. In addition, if the thickness of the piezoelectric body 22 is too thick, there is a disadvantage that the linear sensor 2 becomes too hard and lacks flexibility.

[0022] In the internal conductor 21 shown in Fig. 1(b), multiple conductor wires 211 are twisted together, and therefore there are depressions at the boundaries between the conductor wires 211. These depressions can support more piezoelectric material, and the volume of the piezoelectric material is larger (thicker), resulting in better detection sensitivity than other parts. Due to these depressions, the internal conductor 21 has six parts where the piezoelectric material is thicker than other parts, evenly spaced in the circumferential direction, which is why it functions as a highly sensitive piezoelectric fiber no matter what direction it is bent.

[0023] In addition, the adjacent conductor wires 211 shown in FIG. 1(b) are almost in contact with each other, but the piezoelectric material permeates through a small gap by capillary action, and the gap between the adjacent conductor wires 211 (inside the internal conductor 21) is filled with the piezoelectric material. However, depending on the viscosity of the piezoelectric material and the application method, the piezoelectric material may not permeate the gap between the adjacent conductor wires 211. Even in this case, it is sufficient that the piezoelectric material is supported on the portion facing the outer periphery of the internal conductor 21. In the configuration in which the above-mentioned strip-shaped PVDF film is used as the piezoelectric body 22, the linear sensor 2 is one in which the piezoelectric material does not permeate the gap between the adjacent conductor wires 211. In this linear sensor 2, the flexibility of the linear sensor 2 is increased compared to that in which the piezoelectric material permeates the gap between the adjacent conductor wires 211, and the detection sensitivity of the linear sensor 2 is increased.

[0024] The external conductor 23 shown in FIG. 1(b) is formed by applying a polymer conductive material containing carbon such as carbon nanotubes to the outer periphery of the piezoelectric body 22. The conductive material forming the external conductor 23 may be a polymer conductive material containing silver particles, silver paste, or the like. The conductive material may be applied by immersion (dip) coating, spray coating by a spray or the like, brush coating, or coating by a coating device such as a coater. The thickness of the external conductor 23 is preferably equal to or smaller than the diameter of the conductor wire 211, and is also preferably equal to or smaller than the thickness of the piezoelectric body 22. The thickness of the external conductor 23 shown in FIG. 1(b) is 5 μm, but is preferably 5 μm or more and 50 μm or less. The external conductor 23 may be a conductor wire without using a conductive material.

[0025] The inner sheath 24 covers the outer periphery of the outer conductor 23 to improve abrasion resistance, chemical resistance, and rust resistance. The inner sheath 24 is formed to a thickness of 6 μm. The inner sheath 24 is made of a material that is softer than the outer sheath 26. The inner sheath 24 is formed by applying a polyamide synthetic resin, but may also be formed by applying a polyvinyl chloride resin.

[0026] The shield coating 25 is a shield formed by braiding thin metal wires such as nickel-plated copper or stainless steel into a tube shape. The shield coating 25 may be formed by depositing copper, aluminum, or the like on the inner sheath 24 having the inner conductor 21, the piezoelectric body 22, and the outer conductor 23 on the inside. The shield coating 25 may be attached to the inner sheath 24 by other methods such as sputtering, EBD (electron beam deposition), CVD (chemical vapor deposition), coating, dipping (dipping), electroless plating, or bonding with an adhesive, or may be formed by wrapping a metal foil around it.

[0027] The outer sheath 26 is made of a material having higher abrasion resistance than the inner sheath 24. The outer sheath 26 is formed by coating with polytetrafluoroethylene (PTFE). However, the outer sheath 26 may be formed by coating with tetrafluoro-hexafluoropropylene fluororesin (FEP), tetrafluoroethylene ethylene copolymer (EPFE), or tetrafluoroethylene perfluoroalkoxyethylene copolymer fluororesin (PFA). The coating here may be immersion (dip) coating, spray coating, brush coating, or coating with a coating device such as a coater. In addition, it is preferable to apply multiple times in consideration of the occurrence of pinholes. In addition, the outer sheath 26 may be thicker than the inner sheath 24. Furthermore, the inner sheath 24 may be formed of a flammable material, but the outer sheath 26 is preferably formed of a flame-retardant material, a non-flammable material, or a flame-resistant material.

[0028] 1(b) has a diameter of 0.1 mm. However, the diameter of the linear sensor 2 may be larger or smaller, and is preferably 0.1 to 3.0 mm.

[0029] Fig. 2 is a plan view showing the state in which the output-side terminal member shown in Fig. 1(a) is unfolded. This Fig. 2 can also be said to be a plan view showing the state immediately before bending the output-side terminal member 3 in the final stage of the process of attaching the output-side terminal member 3 to the output-side end portion of the linear sensor 2.

[0030] As shown in FIG. 2, at the output end of the linear sensor 2, the outer sheath 26, the shield coating 25, the inner sheath 24, the outer conductor 23, and the piezoelectric body 22 are peeled off in a stepwise manner in order, so that the inner conductor 21, the piezoelectric body 22, the outer conductor 23, the inner sheath 24, and the shield coating 25 are each exposed by about 1 to 3 mm in the extension direction of the linear sensor 2. In order to prevent the inner conductor 21 and the outer conductor 23 from being short-circuited, it is preferable that the exposed length of the piezoelectric body 22 is longer than the exposed length of the inner conductor 21 or the outer conductor 23. Similarly, in order to prevent the outer conductor 23 and the shield coating 25 from being short-circuited, it is preferable that the exposed length of the inner sheath 24 is longer than the exposed length of the outer conductor 23 or the shield coating 25. In addition, the piezoelectric body 22, the inner sheath 24, and the outer sheath 26 may be removed by burning them with a laser instead of peeling them off.

[0031] As described above, the output side terminal member 3 is formed with the first contact portion 311, the second contact portion 312, and the third contact portion 313. These first contact portion 311, the second contact portion 312, and the third contact portion 313 are portions that come into contact with a contacted portion of an input terminal provided in a measuring device or the like, and are exposed on the upper surface of the output side terminal member 3 (the surface on the near side of the paper in FIG. 2). In addition, the output side terminal member 3 is provided with the first connection portion 314, the second connection portion 315, and the third connection portion 316. The first connection portion 314, the second connection portion 315, and the third connection portion 316 are exposed on the upper surface of the output side terminal member 3 in the state before the output side terminal member 3 shown in FIG. 2 is folded. The first connection portion 314 is connected to the first contact portion 311 by the first pattern wiring 317. These first connection portion 314 and the first pattern wiring 317 correspond to an example of a first connection conductor layer. The internal conductor 21 exposed at the output end of the linear sensor 2 is electrically connected and fixed to the first connection portion 314 by solder. In FIG. 2, the solder is indicated by a black square. A detection signal obtained at the internal conductor 21 is transmitted to a measuring device or the like through the first connection portion 314, the first pattern wiring 317, and the first contact portion 311. The second connection portion 315 is connected to the second contact portion 312 by the second pattern wiring 318. The second connection portion 315 and the second pattern wiring 318 correspond to an example of a second connection conductor layer. The external conductor 23 exposed at the output end of the linear sensor 2 is electrically connected and fixed to the second connection portion 315 by solder. The external conductor 23 is connected to a signal ground of a measuring device or the like through the second connection portion 315, the second pattern wiring 318, and the second contact portion 312. The third connection portion 316 is connected to the third contact portion 313 by a solid pattern 319. The third connection portion 316 and the solid pattern 319 correspond to an example of a third connection conductor layer. The shield coating 25 exposed at the output side end of the linear sensor 2 is electrically connected and fixed by solder to the third connection portion 316. The shield coating 25, the third connection portion 316, and the solid pattern 319 are connected to the earth of a measuring device or the like via the third contact portion 313.In addition, the signal transmission path consisting of the first contact portion 311, the first connection portion 314, and the first pattern wiring 317, the signal ground path consisting of the second contact portion 312, the second connection portion 315, and the second pattern wiring 318, and the earth path consisting of the third contact portion 313, the third connection portion 316, and the solid pattern 319 are each arranged on the same plane with a gap in the planar direction.

[0032] A fold line 3a is indicated on the output side terminal member 3. In FIG. 2, the fold line 3a is indicated by a thick dashed line. In the process of attaching the output side terminal member 3 to the linear sensor 2, an adhesive is applied to at least one of the upper part of the upper surface of the output side terminal member 3 in the state of FIG. 2, the part above the fold line 3a in FIG. 2 and the part below the fold line 3a in FIG. 2. Hereinafter, the part of the output side terminal member 3 above the fold line 3a in FIG. 2 is referred to as a first region 3S1, and the part of the output side terminal member 3 below the fold line 3a in FIG. 2 is referred to as a second region 3S2. As shown by the hollow arrow in FIG. 2, the output side end of the linear sensor unit 1 is completed by folding the output side terminal member 3 at the fold line 3a and overlapping the first region 3S1 with the second region 3S2 sandwiching the linear sensor 2 therebetween.

[0033] In Fig. 2, the first contact portion 311, the second contact portion 312, the third contact portion 313, the first connection portion 314, the second connection portion 315, the third connection portion 316, the first pattern wiring 317, the second pattern wiring 318, and the solid pattern 319 are shown with hatching inclined downward to the left. Also, in Fig. 2, the second shield conductor layer 33 is shown in an area surrounded by a thick dashed line. The lower surfaces of the first connection portion 314, the second connection portion 315, the first pattern wiring 317, and the second pattern wiring 318 are covered with the second shield conductor layer 33. In addition, when the output side terminal member 3 is folded at the folding line 3a, the upper surfaces of the first connection portion 314, the second connection portion 315, the first pattern wiring 317, and the second pattern wiring 318 are also covered with the second shield conductor layer 33.

[0034] Fig. 3(a) is a cross-sectional view taken along the line CC in Fig. 2. Note that in Fig. 3(a), the thickness of each part is exaggerated.

[0035] As shown in FIG. 3(a), the output-side terminal member 3 is a film-like member including a pattern conductor layer 31, a base film 32, a second shield conductor layer 33, an intermediate coverlay 34, a first shield conductor layer 35, an upper coverlay 36, and a lower coverlay 37. The thickness of the pattern conductor layer 31 is 0.02 to 0.5 mm. The pattern conductor layer 31 is formed by attaching copper to the upper surface of the base film 32 by vapor deposition. However, the pattern conductor layer 31 may be attached to the upper surface of the base film 32 by other methods such as sputtering, EBD, CVD, coating, immersion, and electroless plating, or may be formed by adhering a conductive foil to the upper surface of the base film 32. Furthermore, a conductor other than copper may be used for the pattern conductor layer 31. The first contact portion 311, the second contact portion 312, the third contact portion 313, the first connection portion 314, the second connection portion 315, the third connection portion 316, the first pattern wiring 317, the second pattern wiring 318, and the solid pattern 319 shown in FIG. 2 are formed by photoresist processing of the pattern conductor layer 31. Therefore, the first contact portion 311, the second contact portion 312, the third contact portion 313, the first connection portion 314, the second connection portion 315, the third connection portion 316, the first pattern wiring 317, the second pattern wiring 318, and the solid pattern 319 are formed on the same surface. However, they may be arranged on surfaces with different heights. In FIG. 3(a), the pattern conductor layer 31 is shown with hatching that is inclined downward to the left.

[0036] The base film 32 is a polyimide film having a thickness of 0.1 to 0.5 mm. The base film 32 may be a resin film made of other materials such as polyester as long as it is insulating. Alternatively, the base film 32 may be formed by providing a separate film as a substrate and attaching an insulating material to the substrate by vapor deposition or the like. This base film 32 corresponds to an example of a first insulating layer.

[0037] The second shielding conductor layer 33 is disposed between the base film 32 and the first shielding conductor layer 35 with the intermediate coverlay 34 sandwiched between the first shielding conductor layer 35. The intermediate coverlay 34 corresponds to an example of a second insulating layer. The thickness of the second shielding conductor layer 33 is 0.02 to 0.5 mm. The second shielding conductor layer 33 is formed by attaching copper to the lower surface of the base film 32 by vapor deposition. However, the second shielding conductor layer 33 may be attached to the lower surface of the base film 32 by other methods such as sputtering, EBD, CVD, coating, immersion, and electroless plating, or may be formed by adhering a conductive foil to the lower surface of the base film 32.

[0038] The intermediate coverlay 34 is formed by attaching an insulating film such as polyimide with an adhesive to the lower surface of the base film 32 on which the second shielding conductor layer 33 is formed. The thickness of the intermediate coverlay 34 is 0.05 to 0.5 mm. However, the intermediate coverlay 34 may be formed by screen printing an ink-like insulating material, or by applying an insulating material.

[0039] The first shielding conductor layer 35 is disposed with the base film 32 sandwiched between it and the pattern conductor layer 31. This first shielding conductor layer 35 is formed by attaching copper to the lower surface of the intermediate coverlay 34 by vapor deposition. However, the first shielding conductor layer 35 may be attached to the lower surface of the intermediate coverlay 34 by other methods such as sputtering, EBD, CVD, coating, dipping, electroless plating, etc., or may be formed by adhering a conductive foil to the lower surface of the intermediate coverlay 34. The thickness of the first shielding conductor layer 35 is 0.02 to 0.5 mm.

[0040] The upper coverlay 36 is formed by attaching an insulating film such as polyimide with an adhesive to the upper surface of the base film 32 on which the pattern conductor layer 31 is formed. The thickness of the upper coverlay 36 is 0.05 to 0.5 mm. However, the upper coverlay 36 may be formed by screen printing an ink-like insulating material, or may be formed by applying an insulating material.

[0041] The lower coverlay 37 is formed by attaching an insulating film such as polyimide to the lower surface of the first shielding conductor layer 35 with an adhesive. In the completed state of the output-side terminal member 3 shown in FIG. 1(a), the lower coverlay 37 is located at the outermost part of the output-side terminal member 3. For this reason, it is desirable for the lower coverlay 37 to have high abrasion resistance, chemical resistance, and rust resistance of the output-side terminal member, and it is preferable for the lower coverlay 37 to have a thickness equal to or greater than that of the upper coverlay 36. The lower coverlay 37 may also be formed by screen printing an ink-like insulating material, or by applying an insulating material.

[0042] Fig. 3(b) is a cross-sectional view taken along line DD in Fig. 2. Note that in Fig. 3(b), the thickness of each part is exaggerated.

[0043] 3(b), the output-side terminal member 3 has a first via hole 3191 formed therein, which penetrates the base film 32 and electrically connects the solid pattern 319 and the first shielding conductor layer 35. The first via hole 3191 corresponds to an example of a first conductor path. The first via hole 3191 is formed by a conductor (copper) that has entered the hole in the base film 32 by forming a hole in the base film 32 by milling and then depositing the pattern conductor layer 31 on the base film 32 on which the first shielding conductor layer 35 has been formed.

[0044] Further, the output-side terminal member 3 is formed with a second via hole 3181 that penetrates the base film 32 and electrically connects the second pattern wiring 318 and the second shielding conductor layer 33. This second via hole 3181 corresponds to an example of a second conductor path. The second via hole 3181 is formed by a conductor (copper) that enters the hole of the base film 32 by forming a hole in the base film 32 by milling and then depositing the pattern conductor layer 31 on the base film 32 on which the second shielding conductor layer 33 is formed.

[0045] FIG. 4 is a bottom view of the output side terminal member and the sensor wire shown in FIG. 2 as viewed from below.

[0046] In FIG. 4, the first shield conductor layer 35 is indicated by cross-hatching. As shown in FIG. 4, the first shield conductor layer 35 is provided over almost the entire area of ​​the output-side terminal member 3 with a small gap at the periphery. The second shield conductor layer 33 is indicated by an area surrounded by a thick dashed line. As can be seen from FIG. 4, the second shield conductor layer 33 is provided in an area covered by the first shield conductor layer 35. As described above, when the output-side terminal member 3 is folded at the folding line 3a, the first connection portion 314, the second connection portion 315, the first pattern wiring 317 (see FIG. 2), and the second pattern wiring 318 (see FIG. 2) are covered on the upper and lower surfaces by the second shield conductor layer 33. When the output-side terminal member 3 is folded at the folding line 3a, the second shield conductor layer 33 is covered on the upper and lower surfaces by the first shield conductor layer 35. Therefore, external noise does not directly intrude into the second shield conductor layer 33 from above or below. Moreover, since the second shield conductor layer 33 connected to the signal ground is interposed between the first connection portion 314 and the first pattern wiring 317 and the first shield conductor layer 35, even if external noise intrudes into the first shield conductor layer 35, it is possible to reliably prevent the first connection portion 314 and the first pattern wiring 317 from being affected by the external noise.

[0047] Fig. 5(a) is a cross-sectional view taken along the line AA in Fig. 1. In Fig. 5(a) as well, the thickness of each part is exaggerated.

[0048] 5(a), the output side terminal member 3 is overlapped to cover the periphery of the output side end portion of the linear sensor 2. The internal conductor 21, the piezoelectric body 22, the external conductor 23, the inner sheath 24, and the shield coating 25 (all see FIG. 2), which are exposed at the output side end portion of the linear sensor 2, are covered by the output side terminal member 3.

[0049] Fig. 5(b) is a cross-sectional view taken along line BB in Fig. 1. In Fig. 5(b) as well, the thickness of each part is exaggerated.

[0050] As shown in FIG. 5(b), the peripheral edges of the output side terminal member 3 other than the folded side (the upper end, the front end and the rear end in FIG. 5(b)) are not covered with the first shield conductor layer 35, and a gap of width C1 or C2 is generated between the first shield conductor layers 35. However, these widths C1 and C2 are set to an extremely short width that is less than 1 / 4 of the shortest wavelength of the vibrations measured by the linear sensor unit 1. This makes it possible to prevent external noise having the same wavelength as the wavelength to be measured from entering through the gap between the first shield conductor layers 35.

[0051] When attaching the output side terminal member 3 to the output side end of the linear sensor 2, the linear sensor 2 having the internal conductor 21, the piezoelectric body 22, the external conductor 23, the inner sheath 24, and the shield coating 25 exposed at the output side end, and the output side terminal member 3 coated with adhesive are prepared. Then, the internal conductor 21, the external conductor 23, and the shield coating 25 are soldered to the first connection portion 314, the second connection portion 315, and the third connection portion 316, respectively, and folded at the folding line 3a to complete the work, so that the output side terminal member 3 can be easily connected and fixed to the linear sensor 2.

[0052] Next, the configuration of the terminal end of the linear sensor unit 1 will be described.

[0053] FIG. 6(a) is a plan view showing an example of the terminal end of the linear sensor unit of the present invention.

[0054] The termination side terminal member 4 has a configuration similar to that of the output side terminal member 3, except that the first contact portion 311, the second contact portion 312, the third contact portion 313, and the first pattern wiring 317 shown in FIG. 2 are not present. As shown in FIG. 6(a), the termination side terminal member 4 is fixed to the termination side end portion of the linear sensor 2. The termination side terminal member 4 is in the form of a film that is folded in half while sandwiching the termination side end portion of the linear sensor 2. The termination side terminal member 4 serves to physically protect the termination side end portion of the linear sensor 2, and to prevent external noise from entering the signal obtained by the linear sensor 2.

[0055] Fig. 6(b) is a plan view showing the state in which the end terminal member 4 shown in Fig. 6(a) is unfolded, which can also be said to be a plan view showing the state immediately before bending the end terminal member 4 in the final stage of the process of attaching the end terminal member 4 to the end of the linear sensor 2.

[0056] 6(b), the outer sheath 26, the shield coating 25, the inner sheath 24, the outer conductor 23, and the piezoelectric body 22 are peeled off in a stepped manner in this order at the end of the linear sensor 2, so that the inner conductor 21, the piezoelectric body 22, the outer conductor 23, the inner sheath 24, and the shield coating 25 are each exposed by about 1 to 3 mm in the extension direction of the linear sensor 2. In order to prevent a short circuit at the end of the linear sensor 2, the exposed length of the piezoelectric body 22 is preferably longer than the exposed length of the inner conductor 21 or the outer conductor 23, and the exposed length of the inner sheath 24 is preferably longer than the exposed length of the outer conductor 23 or the shield coating 25. The piezoelectric body 22, the inner sheath 24, and the outer sheath 26 may be removed by burning them with a laser instead of peeling them off.

[0057] The termination side terminal member 4 is provided with a termination first connection portion 411, a termination second connection portion 412, and a termination third connection portion 413. The termination first connection portion 411, the termination second connection portion 412, and the termination third connection portion 413 are exposed on the upper surface of the termination side terminal member 4 in the state shown in FIG. 6(b). The termination first connection portion 411 corresponds to an example of a first connection conductor layer. The termination first connection portion 411 is for fixing the internal conductor 21 exposed at the termination side end of the linear sensor 2, and exists electrically isolated. The internal conductor 21 exposed at the termination side end of the linear sensor 2 is electrically connected and fixed to the termination first connection portion 411 by solder. In FIG. 6(b), the solder is indicated by a black square. The termination second connection portion 412 is connected to the termination second via hole 4141 by the termination pattern wiring 414. The termination second connection part 412 and the termination pattern wiring 414 correspond to an example of a second connection conductor layer. The termination second connection part 412 is for fixing the external conductor 23 exposed at the termination side end of the linear sensor 2, and for connecting the termination second shield conductor layer 43, which will be described in detail later, to the external conductor 23 connected to the signal ground at the output side end. The termination second connection part 412 is electrically connected and fixed to the external conductor 23 exposed at the termination side end of the linear sensor 2 by soldering. The termination third connection part 413 is connected to the termination first via hole 4151 by the termination solid pattern 415. The termination third connection part 413 and the termination solid pattern 415 correspond to an example of a third connection conductor layer. The termination third connection part 413 is for fixing the shield coating 25 exposed at the termination side end of the linear sensor 2, and for connecting the termination first shield conductor layer 45, which will be described in detail later, to earth. The shield coating 25 exposed at the termination side end of the linear sensor 2 is electrically connected and fixed by solder to the termination third connection portion 413. The termination signal ground path consisting of the termination first connection portion 411, the termination second connection portion 412 and the termination pattern wiring 414, and the termination earth path consisting of the termination third connection portion 413 and the termination solid pattern 415 are arranged on the same plane with a gap therebetween in the planar direction.

[0058] A terminal end fold line 4a is indicated on the terminal end side terminal member 4. In Fig. 6(b), the terminal end fold line 4a is indicated by a thick dashed line. In the process of attaching the terminal end side terminal member 4 to the linear sensor 2, an adhesive is applied to at least one of the upper portion of the upper surface of the terminal end side terminal member 4 in the state of Fig. 6(b) above the terminal end fold line 4a in Fig. 6(b) and the lower portion of the terminal end fold line 4a in Fig. 6(b). Hereinafter, the upper portion of the terminal end side terminal member 4 above the terminal end fold line 4a in Fig. 6(b) is referred to as a terminal end first region 4S1, and the lower portion of the terminal end side terminal member 4 below the terminal end fold line 4a in Fig. 6(b) is referred to as a terminal end second region 4S2. As shown by the white arrow in Figure 6(b), the terminal end of the linear sensor unit 1 is completed by folding the terminal end member 4 along the terminal end bending line 4a and overlapping the terminal end first region 4S1 and the terminal end second region 4S2 with the linear sensor 2 sandwiched in between.

[0059] 6(b), the termination first connection portion 411, the termination second connection portion 412, the termination third connection portion 413, the termination pattern wiring 414, and the termination solid pattern 415 are indicated by hatching inclined downward to the left. The termination second shield conductor layer 43 is indicated by an area surrounded by a thick dashed line. The lower surfaces of the termination first connection portion 411, the termination second connection portion 412, and the termination pattern wiring 414 are covered with the termination second shield conductor layer 43. In addition, when the termination side terminal member 4 is folded at the termination terminal folding line 4a, the upper surfaces of the termination first connection portion 411, the termination second connection portion 412, and the termination pattern wiring 414 are also covered with the termination second shield conductor layer 43.

[0060] Fig. 7(a) is a cross-sectional view taken along line GG in Fig. 6(b), in which the thickness of each part is exaggerated.

[0061] As shown in FIG. 7(a), the termination side terminal member 4 is a film-like member having a termination pattern conductor layer 41, a termination base film 42, a termination second shield conductor layer 43, a termination intermediate coverlay 44, a termination first shield conductor layer 45, a termination upper coverlay 46, and a termination lower coverlay 47. The termination pattern conductor layer 41 has a thickness of 0.02 to 0.5 mm. The termination pattern conductor layer 41 is formed by attaching copper to the upper surface of the termination base film 42 by vapor deposition. However, the termination pattern conductor layer 41 may be attached to the upper surface of the termination base film 42 by other methods such as sputtering, EBD, CVD, coating, immersion, and electroless plating, or may be formed by adhering a conductive foil to the upper surface of the termination base film 42. Furthermore, a conductor other than copper may be used for the termination pattern conductor layer 41. The termination first connection portion 411, the termination second connection portion 412, the termination third connection portion 413, the termination pattern wiring 414 (see FIG. 6(b)), and the termination solid pattern 415 are formed by photoresist processing the termination pattern conductor layer 41. Therefore, the termination first connection portion 411, the termination second connection portion 412, the termination third connection portion 413, the termination pattern wiring 414, and the termination solid pattern 415 are formed on the same surface. However, they may be disposed on surfaces at different heights. In FIG. 7(a), the termination pattern conductor layer 41 is shown with hatching slanting downward to the left.

[0062] The end base film 42 is a polyimide film having a thickness of 0.1 to 0.5 mm. The end base film 42 may be a resin film made of other materials such as polyester as long as it is insulating. Alternatively, the end base film 42 may be formed by providing a separate film as a substrate and attaching an insulating material to the substrate by vapor deposition or the like. This end base film 42 corresponds to an example of a first insulating layer.

[0063] The termination second shielding conductor layer 43 is disposed between the termination base film 42 and the termination first shielding conductor layer 45, with the termination intermediate coverlay 44 sandwiched between the termination first shielding conductor layer 45. The termination intermediate coverlay 44 corresponds to an example of a second insulating layer. The termination second shielding conductor layer 43 has a thickness of 0.02 to 0.5 mm. The termination second shielding conductor layer 43 is formed by attaching copper to the lower surface of the termination base film 42 by vapor deposition. However, the termination second shielding conductor layer 43 may be attached to the lower surface of the termination base film 42 by other methods such as sputtering, EBD, CVD, coating, immersion, and electroless plating, or may be formed by adhering a conductive foil to the lower surface of the termination base film 42.

[0064] The termination intermediate coverlay 44 is formed by attaching an insulating film such as polyimide with an adhesive to the lower surface of the termination base film 42 on which the termination second shielding conductor layer 43 is formed. The termination intermediate coverlay 44 has a thickness of 0.05 to 0.5 mm. However, the termination intermediate coverlay 44 may be formed by screen printing an ink-like insulating material, or may be formed by applying an insulating material.

[0065] The terminal first shielding conductor layer 45 is a layer disposed with the terminal base film 42 sandwiched between the terminal pattern conductor layer 41 and the terminal first shielding conductor layer 45. The terminal first shielding conductor layer 45 is formed by attaching copper to the lower surface of the terminal intermediate coverlay 44 by vapor deposition. However, the terminal first shielding conductor layer 45 may be attached to the lower surface of the terminal intermediate coverlay 44 by other methods such as sputtering, EBD, CVD, coating, immersion, and electroless plating, or may be formed by adhering a conductive foil to the lower surface of the terminal intermediate coverlay 44. The thickness of the terminal first shielding conductor layer 45 is 0.02 to 0.5 mm.

[0066] The terminal upper coverlay 46 is formed by attaching an insulating film such as polyimide with an adhesive to the upper surface of the terminal base film 42 on which the terminal pattern conductor layer 41 is formed. The terminal upper coverlay 46 has a thickness of 0.05 to 0.5 mm. However, the terminal upper coverlay 46 may be formed by screen printing an ink-like insulating material, or may be formed by applying an insulating material.

[0067] The termination lower coverlay 47 is formed by attaching an insulating film such as polyimide to the lower surface of the termination first shield conductor layer 45 with an adhesive. In the state shown in FIG. 6(a), the termination lower coverlay 47 is located at the outermost part of the termination side terminal member 4. For this reason, it is desirable for the termination lower coverlay 47 to have high abrasion resistance, chemical resistance, and rust resistance of the output side terminal member, and it is preferable for the termination lower coverlay 47 to have a thickness equal to or greater than that of the termination upper coverlay 46. The termination lower coverlay 47 may also be formed by screen printing an ink-like insulating material, or may be formed by applying an insulating material.

[0068] Fig. 7(b) is a cross-sectional view taken along line HH in Fig. 6(b), in which the thickness of each part is exaggerated.

[0069] 7(b), the termination side terminal member 4 has a termination first via hole 4151 formed therein, which penetrates the termination base film 42 and electrically connects the termination solid pattern 415 and the termination first shielding conductor layer 45. The termination first via hole 4151 corresponds to an example of a first conductor path. The termination first via hole 4151 is formed by a conductor (copper) that has entered the hole in the termination base film 42 by forming a hole in the termination base film 42 by milling, and then depositing the termination pattern conductor layer 41 on the termination base film 42 on which the termination first shielding conductor layer 45 has been formed.

[0070] Further, the termination side terminal member 4 is formed with a termination second via hole 4141 that penetrates the termination base film 42 and electrically connects the termination pattern wiring 414 and the termination second shielding conductor layer 43. This termination second via hole 4141 corresponds to an example of a second conductor path. The termination second via hole 4141 is formed by a conductor (copper) that enters the hole of the termination base film 42 by forming a hole in the termination base film 42 by milling, and then depositing the termination pattern conductor layer 41 on the termination base film 42 on which the termination second shielding conductor layer 43 is formed.

[0071] The termination first shielding conductor layer 45 is provided on almost the entire area of ​​the termination side terminal member 4 with a small gap at the periphery. Also, as shown in FIG. 6(b), the termination second shielding conductor layer 43 is shown in the area surrounded by the thick dashed line. That is, the termination second shielding conductor layer 43 is provided in the area whose lower surface is covered by the termination first shielding conductor layer 45. As described above, in the state in which the termination side terminal member 4 is folded at the termination terminal folding line 4a, the upper and lower surfaces of the termination first connecting portion 411, the termination second connecting portion 412, and the termination pattern wiring 414 shown in FIG. 6(b) are covered by the termination second shielding conductor layer 43. Also, in the state in which the termination side terminal member 4 is folded at the termination terminal folding line 4a, the upper and lower surfaces of the termination second shielding conductor layer 43 are covered by the termination first shielding conductor layer 45. Therefore, external noise does not directly enter the termination second shielding conductor layer 43 from the upper and lower directions. Furthermore, since the termination second shielding conductor layer 43 connected to the signal ground is interposed between the termination first connection portion 411 and the termination first shielding conductor layer 45, even if external noise enters the termination first shielding conductor layer 45, it is possible to reliably prevent the external noise from affecting the termination first connection portion 411 and the first pattern wiring 317.

[0072] Fig. 8(a) is a cross-sectional view taken along line EE in Fig. 6(a), in which the thickness of each part is also exaggerated.

[0073] 8(a), the termination side terminal member 4 is overlapped to cover the periphery of the termination side end of the linear sensor 2. The inner conductor 21, the piezoelectric body 22, the outer conductor 23, the inner sheath 24, and the shield coating 25 (all see FIG. 6(b)), which are exposed at the termination side end of the linear sensor 2, are covered by the termination side terminal member 4.

[0074] Fig. 8(b) is a cross-sectional view taken along line FF in Fig. 6(a), in which the thickness of each part is also exaggerated.

[0075] As shown in FIG. 8(b), the peripheral edges of the termination side terminal member 4 other than the folded side (the upper end, the front end and the rear end in FIG. 8(b)) are not covered with the termination first shield conductor layer 45, and a gap of width C3 or C4 is generated between the termination first shield conductor layers 45. However, these widths C3 and C4 are set to an extremely short width that is less than 1 / 4 of the shortest wavelength of the vibrations measured by the linear sensor unit 1. This makes it possible to prevent external noise having the same wavelength as the wavelength to be measured from entering through the gap between the termination first shield conductor layers 45.

[0076] When attaching the termination side terminal member 4 to the output side end of the linear sensor 2, the linear sensor 2 having the internal conductor 21, the piezoelectric body 22, the external conductor 23, the inner sheath 24, and the shield coating 25 exposed at the termination side end, and the termination side terminal member 4 coated with adhesive are prepared. Then, the internal conductor 21, the external conductor 23, and the shield coating 25 are soldered to the first connection portion 314, the second connection portion 315, and the third connection portion 316, respectively, and folded at the termination terminal folding line 4a to complete the work, so that the termination side terminal member 4 can be easily connected and fixed to the linear sensor 2.

[0077] When an external force such as vibration is applied to the linear sensor 2 described above, the piezoelectric body 22 deforms, and the potential difference between the inner conductor 21 and the outer conductor 23 varies due to the piezoelectric effect. This potential difference is output from the output terminal member 3. In other words, the linear sensor unit 1 functions as a sensor that outputs a signal based on an external force such as vibration. Note that a differential amplifier may be provided in the output terminal member 3 to amplify the potential difference before outputting it.

[0078] Next, a modified example of this embodiment will be described. In the following description, the names of components that are the same as those described above may be assigned the same reference numerals as those used above, and duplicate descriptions may be omitted.

[0079] Fig. 9 is a plan view similar to Fig. 2, showing an output-side terminal member of a modified example in an expanded state. In Fig. 9, the linear sensor 2 is simplified by a single solid line except for both end portions, and the simplified portion is shown short.

[0080] As shown in FIG. 9, the linear sensor unit 1 of this modification is different from the linear sensor unit 1 shown in FIG. 1 in that the end terminal member 4 is not provided, and both ends of the linear sensor 2 are connected to the output terminal member 3. The output terminal member 3 has a width in the vertical direction in FIG. 9 that is wider than that of the output terminal member 3 shown in FIG. 1 in both the first region 3S1 and the second region 3S2. In the description of this modification, among the ends of the linear sensor 2, the end directly connected to the output terminal member 3 is referred to as the output end, and the end connected to the output terminal member 3 via the output end is referred to as the end. The internal conductor 21 exposed at the output end of the linear sensor 2 is connected to the first connection portion 314 by soldering, and is electrically connected to the internal conductor 21 exposed at the end of the linear sensor 2 by a signal lead wire 51. Moreover, the outer conductor 23 exposed at the output end of the linear sensor 2 is connected to the second connection portion 315 by soldering, and is electrically connected to the outer conductor 23 exposed at the termination end of the linear sensor 2 by a ground lead wire 52. Furthermore, the shield coating 25 exposed at the output end of the linear sensor 2 is connected to the third connection portion 316 by soldering, and is electrically connected to the shield coating 25 exposed at the termination end of the linear sensor 2 by a ground lead wire 53.

[0081] In this modified linear sensor unit 1, the output side terminal member 3 is bent as shown by the white arrow in Figure 9, and both ends of the linear sensor 2 are sandwiched between the output side terminal member 3 and the first region 3S1 and the second region 3S2 are overlapped, so that both ends of the linear sensor 2 are simultaneously covered and fixed by the output side terminal member 3.

[0082] When attaching the output side terminal members 3 to both ends of the linear sensor 2 of this modification, the linear sensor 2 with the internal conductor 21, the piezoelectric body 22, the external conductor 23, the inner sheath 24, and the shield coating 25 exposed at both ends and the output side terminal members 3 with adhesive applied are prepared. Then, the internal conductor 21, the external conductor 23, and the shield coating 25 at the output side end are soldered to the first connection portion 314, the second connection portion 315, and the third connection portion 316, respectively, and the internal conductor 21, the external conductor 23, and the shield coating 25 at the termination side end are connected to the signal lead wire 51, the ground lead wire 52, and the earth lead wire 53, respectively. Then, the linear sensor unit 1 is completed by folding at the folding line 3a, so that the output side terminal members 3 can be easily connected and fixed to the linear sensor 2. Also, as in the previous embodiment, even if external noise enters the first shield conductor layer 35 (see FIG. 4), the influence of the external noise on the first connection portion 314 can be reliably prevented.

[0083] Furthermore, since the internal conductor 21 and the external conductor 23 at both ends are electrically connected to the output terminal member 3, the signal is not reflected at the termination end and cancels out the signal generated by the linear sensor 2. As a result, it is possible to prevent a decrease in the sensor output of the linear sensor unit 1. In particular, when the linear sensor 2 is short, the signal is likely to be reflected at the termination end and cancel out the signal generated by the linear sensor 2, but the configuration of this modified example prevents a decrease in the sensor output and enables highly sensitive detection.

[0084] Next, a second modified example of this embodiment will be described.

[0085] FIG. 10(a) is a plan view similar to FIG. 6(b) showing the end side terminal member of the second modified example when developed, and FIG. 10(b) is a cross-sectional view taken along line JJ in FIG. 10(a).

[0086] As shown in FIG. 10(a), the linear sensor unit 1 of the second modified example is different from the linear sensor unit 1 shown in FIG. 1 in that the end terminal member 4 is used as a connection terminal for connecting the linear sensors 2 to each other. The end terminal member 4 has a width twice as large as that of the end terminal member 4 shown in FIG. 6 in the left-right direction in FIG. 10(a). The structure is symmetrical with respect to the center line in the left-right direction. In the description of this modified example, among the ends of the two linear sensors 2, the end of the linear sensor 2 shown on the left side of FIG. 10(a) is referred to as the connection side end, and the end of the linear sensor 2 shown on the right side of FIG. 10(a) is referred to as the connected side end. In addition, among the parts of the end terminal member 4 formed on the side covering the connected side end (the right half of FIG. 10(a)), the parts having the same function as the side covering the connecting side end (the left half of FIG. 10(a)) are indicated by the same reference numeral as the side covering the connecting side end, with the letter A added, and the description may be omitted. Similarly, the reference numeral for the connection side end of the linear sensor 2 will be added with an A, and the explanation thereof may be omitted.

[0087] The end of the termination side terminal member 4 that covers the end of the connected side has almost the same structure as the termination side terminal member 4 shown in FIG. 6. However, it is different from the termination side terminal member 4 shown in FIG. 6 in that a connection wiring 416 connected to the termination first connection part 411 is formed and the termination pattern wiring 414 extends toward the connected side. The connection wiring 416 electrically connects the termination first connection part 411 on the connecting side to the termination first connection part 411A on the connected side. The termination pattern wiring 414 also electrically connects the termination second connection part 412 on the connecting side to the termination second connection part 412A on the connected side. Furthermore, the termination solid pattern 415 also electrically connects the termination third connection part 413 on the connecting side to the termination third connection part 413A on the connected side. With these, signals and the like are transmitted between the linear sensor 2 on the connecting side and the linear sensor 2A on the connected side.

[0088] The termination second shield conductor layer 43 covers the lower surfaces of the termination first connection portion 411 on the connecting side, the termination first connection portion 411A on the connected side, the termination second connection portion 412 on the connecting side, the termination second connection portion 412A on the connected side, the termination pattern wiring 414, and the connection wiring 416. As shown by the outlined arrows in Fig. 10(a), the termination side terminal member 4 is bent to sandwich the ends of the two linear sensors 2 and overlap the termination terminal first region 4S1 with the termination terminal second region 4S2, whereby the ends of the two linear sensors 2 are simultaneously covered and fixed by the termination side terminal member 4. As a result, the upper surfaces of the terminal first connection portion 411 on the connecting side, the terminal first connection portion 411A on the connected side, the terminal second connection portion 412 on the connecting side, the terminal second connection portion 412A on the connected side, the terminal pattern wiring 414 on the connecting side, the terminal pattern wiring 414A on the connected side, and the connection wiring 416 are covered with the terminal second shield conductor layer 43.

[0089] As shown in FIG. 10(b), in the termination side terminal member 4 of the second modification, the termination first shield conductor layer 45 is provided on almost the entire area of ​​the termination side terminal member 4 with a small gap at the periphery. Therefore, when the termination side terminal member 4 is folded at the termination terminal folding line 4a shown in FIG. 10(a), the termination second shield conductor layer 43 is covered on the upper and lower surfaces by the termination first shield conductor layer 45. Therefore, external noise does not directly enter the termination second shield conductor layer 43 from the upper and lower directions. The termination second shield conductor layer 43 connected to the signal ground is interposed between the termination first connection part 411 on the connecting side, the termination first connection part 411A on the connected side, and the connection wiring 416 on the connected side, and the termination first shield conductor layer 45. Therefore, even if external noise enters the termination first shield conductor layer 45, it is possible to reliably prevent the influence of the external noise from being exerted on the termination first connection part 411 on the connecting side, the termination first connection part 411A on the connected side, and the connection wiring 416.

[0090] In this second modified example, the inner conductor 21, the outer conductor 23, and the shield coating 25 of the connecting linear sensor 2 and the inner conductor 21A, the outer conductor 23A, and the shield coating 25A of the connected linear sensor 2A are soldered, respectively, and the terminating terminal member 4 is bent at the terminating terminal bending line 4a to complete the linear sensor unit 1. Therefore, the two linear sensors 2 can be easily connected and fixed. Note that one of the two linear sensors 2 may be replaced with a signal cable without a sensor function, and the terminating terminal member 4 of this second modified example may be used as a connection terminal for connecting the linear sensor 2 and the signal cable.

[0091] Next, a linear sensor unit according to a second embodiment will be described.

[0092] Fig. 11 is a plan view similar to Fig. 2, showing the state in which the output-side terminal member in the linear sensor unit of the second embodiment is unfolded. Fig. 11 can also be said to be a plan view showing the state immediately before bending the output-side terminal member 3 in the final stage of the process of attaching the output-side terminal member 3 to the output-side end portion of the linear sensor 2.

[0093] The linear sensor unit 1 shown in FIG. 11 differs from the linear sensor unit 1 shown in the previous embodiment in the shape of the output side terminal member 3 and the end side terminal member 4. The end side terminal member 4 will be described in detail later. The output side terminal member 3 shown in FIG. 11 differs from the output side terminal member 3 shown in FIG. 2 in that the second pattern wiring 318 and the third shielding conductor layer 38 have the function of the second shielding conductor layer 33 (see FIG. 2) and in that the output side terminal member 3 has a third region 3S3 in addition to the first region 3S1 and the second region 3S2 and is folded at two places. In the state shown in FIG. 11, the third region 3S3 is located below the second region 3S2. A second folding line 3b is drawn at the boundary between the second region 3S2 and the third region 3S3. In FIG. 11, the second folding line 3b is indicated by a thick dashed line.

[0094] As shown in Fig. 11, the second pattern wiring 318 of the second embodiment also extends to the second region 3S2 across the folding line 3a. The portion of the second pattern wiring 318 extending to the second region 3S2 is formed to a size that covers the first connection portion 314, the second connection portion 315, and the upper surface of the first pattern wiring 317 when the output-side terminal member 3 is folded at the folding line 3a and the first region 3S1 overlaps with the second region 3S2. The solid pattern 319 also extends to the third region 3S3 across the second folding line 3b. The portion of the solid pattern 319 extending to the third region 3S3 is formed to a size that covers almost the entire area of ​​the third region 3S3.

[0095] Fig. 12(a) is a cross-sectional view taken along line KK in Fig. 11. Note that in Fig. 12(a), the thickness of each part is exaggerated.

[0096] As shown in FIG. 12(a), the output terminal member 3 is a film-like member having a pattern conductor layer 31, a base film 32, a first shield conductor layer 35, an upper coverlay 36, a lower coverlay 37, and a third shield conductor layer 38. The first shield conductor layer 35 and the third shield conductor layer 38 are layers disposed with the base film 32 sandwiched between the pattern conductor layer 31 and the first shield conductor layer 35. The first shield conductor layer 35 and the third shield conductor layer 38 are formed by depositing copper on the lower surface of the base film 32 by vapor deposition. However, the first shield conductor layer 35 and the third shield conductor layer 38 may be attached to the lower surface of the base film 32 by other methods such as sputtering, EBD, CVD, coating, immersion, and electroless plating, or may be formed by adhering a conductive foil to the lower surface of the base film 32. The thickness of the first shield conductor layer 35 is 0.02 to 0.5 mm. The first shielding conductor layer 35 and the third shielding conductor layer 38 are formed by photoresist processing of a conductor layer formed on the entire lower surface of the base film 32. Therefore, the first shielding conductor layer 35 and the third shielding conductor layer 38 are formed on the same surface with a gap in the planar direction. However, they may be arranged on surfaces at different heights. In FIG. 12(a), the first shielding conductor layer 35 and the third shielding conductor layer 38 are indicated by cross-hatching.

[0097] Fig. 12(b) is a cross-sectional view taken along the line LL in Fig. 11. Note that in Fig. 12(b), the thickness of each part is exaggerated.

[0098] 12(b), the output-side terminal member 3 has a third via hole 3182 formed therein, which penetrates the base film 32 and electrically connects the second pattern wiring 318 and the third shielding conductor layer 38. The third via hole 3182 corresponds to an example of a third conductor path. The third via hole 3182 is formed by a conductor (copper) that has entered the hole in the base film 32 by forming a hole in the base film 32 by milling and then depositing the pattern conductor layer 31 on the base film 32 on which the third shielding conductor layer 38 has been formed.

[0099] 13 is a bottom view of the output side terminal member and the sensor wire shown in FIG. 11 as viewed from below.

[0100] In Fig. 13, the first shield conductor layer 35 and the third shield conductor layer 38 are indicated by cross-hatching. As shown in Fig. 13, the first shield conductor layer 35 is provided in almost the entire area of ​​the second region 3S2 and the third region 3S3 with a small gap at the periphery. The third shield conductor layer 38 is formed to a size sufficient to cover the lower surfaces of the first connection portion 314, the second connection portion 315, and the first pattern wiring 317 (see Fig. 11). That is, in a state in which the output-side terminal member 3 is folded at the folding line 3a and the second folding line 3b, the first connection portion 314, the second connection portion 315, and the first pattern wiring 317 are sandwiched between the second pattern wiring 318 (see Fig. 11) and the third shield conductor layer 38, and the upper and lower surfaces are covered.

[0101] Fig. 14 is an MM cross-sectional view of the output terminal member shown in Fig. 11 bent along the fold line and the second fold line and cut at the MM line. The thickness of each part is also exaggerated in Fig. 14. Fig. 14 can also be said to be a cross-sectional view showing the completed state of the output end of the linear sensor 2.

[0102] In a state in which the output-side terminal member 3 shown in FIG. 11 is folded at the folding line 3a and the second folding line 3b, as shown in FIG. 14, the third shielding conductor layer 38 and the second pattern wiring 318 are covered on the outside by the first shielding conductor layer 35. Therefore, external noise does not directly enter the third shielding conductor layer 38 and the second pattern wiring 318. In addition, as described above, the first connection portion 314 and the first pattern wiring 317 shown in FIG. 11 are covered by the second pattern wiring 318 connected to the signal ground and the third shielding conductor layer 38. Therefore, even if external noise enters the first shielding conductor layer 35, it is possible to reliably prevent the influence of the external noise from reaching the first connection portion 314 and the first pattern wiring 317. That is, the second pattern wiring 318 and the third shielding conductor layer 38 of this second embodiment correspond to an example of the second shielding conductor layer.

[0103] Furthermore, the peripheral edges of the output terminal member 3 other than the folded side (the front end, rear end, and lower left part of the paper in FIG. 14) are not covered with the first shield conductor layer 35, and a gap of width C5 or C6 is generated between the first shield conductor layers 35. However, this width C5 or C6 is set to an extremely short width that is less than 1 / 4 of the shortest wavelength of the vibrations measured by the linear sensor unit 1. This makes it possible to prevent external noise having the same wavelength as the wavelength to be measured from entering through the gap between the first shield conductor layers 35.

[0104] In the linear sensor unit 1 of the second embodiment, when attaching the output side terminal member 3 to the output side end of the linear sensor 2, the linear sensor 2 having the internal conductor 21, the piezoelectric body 22, the external conductor 23, the inner sheath 24, and the shield coating 25 exposed at the output side end, and the output side terminal member 3 coated with adhesive are prepared. Then, the internal conductor 21, the external conductor 23, and the shield coating 25 are soldered to the first connection portion 314, the second connection portion 315, and the third connection portion 316, respectively, and folded at the folding lines 3a and the second folding lines 3b, completing the work, so that the output side terminal member 3 can be easily connected and fixed to the linear sensor 2. Moreover, the output side terminal member 3 is simply formed with one conductor layer on each side of the base film 32, so that the output side terminal member 3 can be constructed inexpensively.

[0105] Next, the end side terminal member 4 of the second embodiment will be described.

[0106] Fig. 15 is a plan view similar to Fig. 6(b) showing the state in which the end terminal member in the linear sensor unit of the second embodiment is unfolded. Fig. 15 can also be said to be a plan view showing the state immediately before bending the end terminal member 4 in the final stage of the process of attaching the end terminal member 4 to the end of the linear sensor 2.

[0107] The termination side terminal member 4 shown in Fig. 15 differs from the termination side terminal member 4 shown in Fig. 6 in that it does not include a termination second shield conductor layer 43, and in that it includes a termination terminal third region 4S3 in addition to a termination terminal first region 4S1 and a termination terminal second region 4S2, and is folded at two places. In the state shown in Fig. 15, the termination terminal third region 4S3 is located below the termination terminal second region 4S2. A termination terminal second fold line 4b is drawn at the boundary between the termination terminal second region 4S2 and the termination terminal third region 4S3. In Fig. 15, the termination terminal second fold line 4b is indicated by a thick dashed line.

[0108] As shown in Fig. 15, the termination pattern wiring 414 of the second embodiment also extends to the termination terminal second region 4S2 across the termination terminal folding line 4a. The portion of the termination pattern wiring 414 that extends to the termination terminal second region 4S2 is formed to a size that covers the upper surfaces of the termination first connection portion 411 and the termination second connection portion 412 when the termination side terminal member 4 is folded at the termination terminal folding line 4a and the termination terminal first region 4S1 overlaps with the termination terminal second region 4S2. The termination solid pattern 415 also extends to the termination terminal third region 4S3 across the termination terminal second folding line 4b. The portion of the termination solid pattern 415 that extends to the termination terminal third region 4S3 is formed to a size that covers almost the entire area of ​​the termination terminal third region 4S3.

[0109] Fig. 16(a) is a cross-sectional view taken along the line NN in Fig. 15. Note that in Fig. 16(a), the thickness of each part is exaggerated.

[0110] As shown in FIG. 16(a), the termination side terminal member 4 is a film-like member having a termination pattern conductor layer 41, a termination base film 42, a termination first shielding conductor layer 45, a termination upper coverlay 46, a termination lower coverlay 47, and a termination third shielding conductor layer 48. The termination first shielding conductor layer 45 and the termination third shielding conductor layer 48 are layers disposed between the termination pattern conductor layer 41 and the termination base film 42. The termination first shielding conductor layer 45 and the termination third shielding conductor layer 48 are formed by depositing copper on the lower surface of the termination base film 42 by vapor deposition. However, the termination first shielding conductor layer 45 and the termination third shielding conductor layer 48 may be attached to the lower surface of the termination base film 42 by other methods such as sputtering, EBD, CVD, coating, immersion, and electroless plating, or may be formed by adhering a conductive foil to the lower surface of the termination base film 42. The termination first shielding conductor layer 45 has a thickness of 0.02 to 0.5 mm. The terminal first shielding conductor layer 45 and the terminal third shielding conductor layer 48 are formed by photoresist processing of a conductor layer formed on the entire lower surface of the terminal base film 42. Therefore, the terminal first shielding conductor layer 45 and the terminal third shielding conductor layer 48 are formed on the same surface with a gap in the planar direction. However, they may be arranged on surfaces at different heights. In FIG. 16(a), the terminal first shielding conductor layer 45 and the terminal third shielding conductor layer 48 are indicated by cross-hatching.

[0111] Fig. 16(b) is a cross-sectional view taken along the line PP in Fig. 15. Note that in Fig. 16(b), the thickness of each part is exaggerated.

[0112] 16(b), the termination side terminal member 4 has a termination third via hole 4142 formed therein, which penetrates the termination base film 42 and electrically connects the termination pattern wiring 414 and the termination third shielding conductor layer 48. The termination third via hole 4142 corresponds to an example of a third conductor path. The termination third via hole 4142 is formed by a conductor (copper) that has entered the hole in the termination base film 42 by forming a hole in the termination base film 42 by milling, and then depositing the termination pattern conductor layer 41 on the termination base film 42 on which the termination third shielding conductor layer 48 has been formed.

[0113] FIG. 17 is a bottom view of the end terminal member and the sensor wire shown in FIG. 15 as viewed from below.

[0114] In Fig. 17, the termination first shielding conductor layer 45 and the termination third shielding conductor layer 48 are indicated by cross-hatching. As shown in Fig. 17, the termination first shielding conductor layer 45 is provided in almost the entire area of ​​the termination terminal second region 4S2 and the termination terminal third region 4S3 with a small gap at the periphery. The termination third shielding conductor layer 48 is formed to a size that covers the lower surfaces of the termination first connecting portion 411 and the termination second connecting portion 412. That is, in a state in which the termination side terminal member 4 is folded at the termination terminal folding line 4a and the termination terminal second folding line 4b, the termination first connecting portion 411 and the termination second connecting portion 412 are sandwiched between the termination pattern wiring 414 (see Fig. 15) and the termination third shielding conductor layer 48, and the upper and lower surfaces are covered.

[0115] Fig. 18 is a QQ cross-sectional view of the end terminal member shown in Fig. 15 bent at the end terminal fold line and the end terminal second fold line and cut at a portion with a QQ line. In Fig. 18, the thickness of each part is exaggerated. Fig. 18 can also be said to be a cross-sectional view showing the state in which the end terminal of the linear sensor 2 is completed.

[0116] In the state where the termination side terminal member 4 is folded at the termination terminal folding line 4a and the termination terminal second folding line 4b shown in Fig. 15, the termination third shielding conductor layer 48 and the termination pattern wiring 414 are covered on the outside by the termination first shielding conductor layer 45 as shown in Fig. 18. Therefore, external noise does not directly enter the termination second shielding conductor layer 43 and the termination pattern wiring 414. Also, as described above, the termination first connecting portion 411 shown in Fig. 15 is covered by the termination pattern wiring 414 connected to the signal ground and the termination third shielding conductor layer 48. Therefore, even if external noise enters the termination first shielding conductor layer 45, it is possible to reliably prevent the influence of the external noise from reaching the termination first connecting portion 411.

[0117] Furthermore, the edges of the termination side terminal member 4 other than the folded side (the front end, rear end, and lower left part in FIG. 18) are not covered with the termination first shield conductor layer 45, and a gap of width C7 or C8 is generated between the termination first shield conductor layers 45. However, this width C7 or C8 is set to an extremely short width that is less than 1 / 4 of the shortest wavelength of the vibrations measured by the linear sensor unit 1. This makes it possible to prevent external noise having the same wavelength as the wavelength to be measured from entering through the gap between the termination first shield conductor layers 45.

[0118] In the linear sensor unit 1 of the second embodiment, when attaching the termination side terminal member 4 to the termination side end of the linear sensor 2, the linear sensor 2 having the internal conductor 21, the piezoelectric body 22, the external conductor 23, the inner sheath 24, and the shield coating 25 exposed at the termination side end, and the termination side terminal member 4 coated with adhesive are prepared. Then, the internal conductor 21, the external conductor 23, and the shield coating 25 are soldered to the termination first connecting portion 411, the termination second connecting portion 412, and the termination third connecting portion 413, respectively, and folded at the termination terminal folding line 4a and the termination terminal second folding line 4b, thereby completing the work, and the termination side terminal member 4 can be easily connected and fixed to the linear sensor 2. Moreover, the termination side terminal member 4 is simply a single conductor layer formed on each side of the base film 32, so that the termination side terminal member 4 can be constructed inexpensively.

[0119] Next, a linear sensor unit according to a third embodiment will be described.

[0120] FIG. 19 is a plan view showing the linear sensor unit of the third embodiment.

[0121] The linear sensor unit 1 of the third embodiment shown in FIG. 19 has a different configuration of the output side terminal member 3 and the end side terminal member 4 from the linear sensor unit 1 shown in FIG. 1. In addition, this linear sensor unit 1 has a signal cable 39 connected to the output side terminal member 3. Furthermore, an insulating output side sealant 30 is provided at both ends of the output side terminal member 3 to cover the end face. An insulating end side sealant 40 is also provided at both ends of the end side terminal member 4 to cover the end face. These output side sealant 30 and end side sealant 40 are made by solidifying an adhesive such as epoxy resin. The output side sealant 30 and end side sealant 40 may be an adhesive other than epoxy resin. The output side sealant 30 and end side sealant 40 can prevent liquid or water vapor from entering through the end faces of the output side terminal member 3 and end side terminal member 4. In this third embodiment, the film-shaped output side terminal member 3 and the film-shaped end side terminal member 4 are folded four times so that the end of the linear sensor 2 is the innermost, and overlapped to form a sheet shape. However, the film-like output side terminal member 3 and the film-like termination side terminal member 4 may be wrapped around the end of the linear sensor 2 to form a cylindrical shape. When the output side terminal member 3 and the termination side terminal member 4 are wrapped around the linear sensor 2 to form a cylindrical shape, a heat shrink tube may be used instead of the output side sealing material 30 and the termination side sealing material 40. Also, instead of the output side sealing material 30 and the termination side sealing material 40, a cap may be used to cover the end faces of the output side terminal member 3 and the termination side terminal member 4. In short, it is sufficient to dispose an insulating material that covers the end faces of the output side terminal member 3 and the termination side terminal member 4 watertightly or airtightly.

[0122] Fig. 20 is a plan view showing the state in which the output-side terminal member in the linear sensor unit of the third embodiment is unfolded. This Fig. 20 can also be said to be a plan view showing the state immediately before bending the output-side terminal member 3 in the final stage of the process of attaching the output-side terminal member 3 to the output-side end portion of the linear sensor 2. Note that the output-side sealing material 30 shown in Fig. 19 is applied and solidified after the output-side terminal member 3 is folded, so the output-side sealing material 30 is not shown in Fig. 20.

[0123] The output-side terminal member 3 shown in Fig. 20 differs from the output-side terminal member 3 shown in Fig. 2 in that the signal cable 39 is connected, the conductor layer is provided only on one side of the base film 32 (see Fig. 21), and the output-side terminal member 3 has a third region 3S3, a fourth region 3S4, and a fifth region 3S5 in addition to the first region 3S1 and the second region 3S2 and is folded at four places. In the output-side terminal member 3 of the third embodiment, the solid pattern 319 has the function of the first shield conductor layer 35 (see Fig. 2), and the second pattern wiring 318 has the function of the second shield conductor layer 33 (see Fig. 2). The third region 3S3, the fourth region 3S4, and the fifth region 3S5 are located below the second region 3S2 in this order in the state shown in Fig. 20. A second fold line 3b is drawn at the boundary between the second region 3S2 and the third region 3S3, a third fold line 3c is drawn at the boundary between the third region 3S3 and the fourth region 3S4, and a fourth fold line 3d is drawn at the boundary between the fourth region 3S4 and the fifth region 3S5. In Fig. 20, each fold line is indicated by a thick dashed line. In addition, taking into consideration the thickness when folded, the first region 3S1, the second region 3S2, the third region 3S3, the fourth region 3S4, and the fifth region 3S5 are arranged in the order of increasing length in the vertical direction in Fig. 20.

[0124] As shown in FIG. 20, the first region 3S1 of the output side terminal member 3 is provided with a first connection portion 314, a second connection portion 315, a third connection portion 316, a second cable connection portion 3151, and a third cable connection portion 3161. A signal cable 39 is connected to the output side terminal member 3. The signal cable 39 is composed of a signal line 391, a cable inner sheath 392, a signal ground line 393, a cable intermediate sheath 394, a cable earth line 395, and a cable outer sheath 396. The signal cable 39 is for transmitting a signal obtained by the linear sensor 2 to a measuring device (not shown), and a connector (not shown), such as a USB connector, is attached to the other end opposite to the one end shown in FIG. 20. By connecting this connector to the measuring device, the signal obtained by the linear sensor 2 is transmitted to the measuring device. The signal line 391 is a copper conductor wire arranged in the center of the signal cable 39. The cable inner sheath 392 is an insulator such as polyamide synthetic resin that covers the outer periphery of the signal line 391. The signal ground line 393 is a conductor made of a polymer conductive material that covers the outer periphery of the cable inner sheath 392. The cable intermediate sheath 394 is an insulator such as polyamide synthetic resin that covers the outer periphery of the signal ground line 393. The cable earth line 395 is a tube-shaped braided wire made of a metal such as nickel-plated copper or stainless steel that covers the outer periphery of the cable intermediate sheath 394. The cable outer sheath 396 is an insulator such as PTFE that covers the outer periphery of the cable earth line 395. Note that the materials of the members that make up the signal cable 39 are not limited to these, and any material can be used as long as the conductor and the insulator are formed in order from the center.

[0125] The first connection portion 314, the second connection portion 315, the third connection portion 316, the second cable connection portion 3151, and the third cable connection portion 3161 are exposed on the upper surface of the output side terminal member 3 in a state before the output side terminal member 3 shown in FIG. 20 is bent. The internal conductor 21 exposed at the output side end of the linear sensor 2 and the signal line 391 exposed at one end of the signal cable 39 are electrically connected and fixed to the first connection portion 314 by solder. In FIG. 20, the solder is shown as a black square. This first connection portion 314 corresponds to an example of a first connection conductor layer. The detection signal obtained by the internal conductor 21 is transmitted to a measuring device or the like through the first connection portion 314 and the signal line 391. The signal ground line 393 exposed at one end of the signal cable 39 is electrically connected and fixed to the second cable connection portion 3151. The second cable connection portion 3151 is electrically connected to the second connection portion 315 by the second pattern wiring 318. The second connection portion 315, the second pattern wiring 318, and the second cable connection portion 3151 correspond to an example of a second connection conductor layer. The outer conductor 23 is connected to a signal ground of a measuring device or the like through the second connection portion 315, the second pattern wiring 318, the second cable connection portion 3151, and the signal ground line 393. The cable earth wire 395 exposed at one end of the signal cable 39 is electrically connected to and fixed to the third cable connection portion 3161. The third cable connection portion 3161 is electrically connected to the third connection portion 316 by the solid pattern 319. The third connection portion 316, the solid pattern 319, and the third cable connection portion 3161 correspond to an example of a third connection conductor layer. The shield coating 25 is connected to the ground of a measuring device or the like through the third connection portion 316, the solid pattern 319, the third cable connection portion 3161, and the ground wire 385. The first connection portion 314, the second connection portion 315, the second pattern wiring 318, and the second cable connection portion 3151, the third connection portion 316, the solid pattern 319, and the third cable connection portion 3161 are arranged with gaps between them in the planar direction.Furthermore, even when the output side terminal member 3 shown in Figure 19 is folded, the first connection portion 314, the second connection portion 315, the second pattern wiring 318, and the second cable connection portion 3151, and the third connection portion 316, the solid pattern 319, and the third cable connection portion 3161 do not come into contact with each other because the base film 32 (see Figure 21) or the upper cover lay 36 (see Figure 21) is arranged facing each other in the thickness direction and is arranged with a gap between them in the thickness direction.

[0126] The second pattern wiring 318 of the third embodiment also extends to the second region 3S2 and the third region 3S3 across the folding line 3a and the second folding line 3b. The portion of the second pattern wiring 318 extending to the second region 3S2 is formed to a size that covers the first connection portion 314, the second connection portion 315, and the second cable connection portion 3151 when the output side terminal member 3 is folded at the folding line 3a and the first region 3S1 overlaps with the second region 3S2 in the thickness direction. The portion of the second pattern wiring 318 extending to the third region 3S3 is formed to a size that covers the first connection portion 314, the second connection portion 315, and the second cable connection portion 3151 when the output side terminal member 3 is folded at the folding line 3a and the second folding line 3b and the surface of the first region 3S1 on the back side in FIG. 20 overlaps with the third region 3S3 in the thickness direction.

[0127] The solid pattern 319 extends across the fold line 3a, the second fold line 3b, the third fold line 3c, and the fourth fold line 3d to the second region 3S2, the third region 3S3, the fourth region 3S4, and the fifth region 3S5. The portions of the solid pattern 319 that extend to the fourth region 3S4 and the fifth region 3S5 are formed to a size that covers almost the entire area of ​​the first region 3S1, the second region 3S2, and the third region 3S3 that are folded at the fold line 3a and the second fold line 3b.

[0128] Fig. 21 is a cross-sectional view taken along line TT in Fig. 20. Note that the thickness of each part is exaggerated in Fig. 21. Also, first connection part 314, second connection part 315, third connection part 316, second cable connection part 3151 and third cable connection part 3161 have exposed surfaces gold-plated to improve connectivity with the solder and to increase the height, but the gold plating is not shown.

[0129] 21, the output-side terminal member 3 is in the form of a film having a conductor layer for pattern 31 and a base film 32. In the output-side terminal member 3 of the third embodiment, the conductor layer for pattern 31 is formed on one side of the base film 32, and no conductor layer is formed on the side of the base film 32 opposite to the side on which the conductor layer for pattern 31 is formed.

[0130] Fig. 22 is a cross-sectional view taken along line RR in Fig. 19. In Fig. 22 as well, the thickness of each part is exaggerated.

[0131] As shown in FIG. 22, the first region 3S1, the second region 3S2, and the third region 3S3 are covered on the outside by the parts of the solid pattern 319 that are in the fourth region 3S4 and the fifth region 3S5. The output side end of the linear sensor 2 and one end of the signal cable 39 shown in FIG. 20 are also covered on the outside by the parts of the solid pattern 319 that are in the fourth region 3S4 and the fifth region 3S5. The solid pattern 319 is electrically connected to the shielding cover 25 and the cable earth wire 395 shown in FIG. 20. Therefore, noise is prevented from directly entering the outside of the first region 3S1, the second region 3S2, the third region 3S3, the output side end of the linear sensor 2, and one end of the signal cable 39. That is, in this third embodiment, the parts of the solid pattern 319 that are in the fourth region 3S4 and the fifth region 3S5 correspond to an example of a first shield conductor layer. In addition, the first connection portion 314, the internal conductor 21 of the linear sensor 2 exposed at the output end, and the signal line 391 exposed at one end of the signal cable 39 are covered on the outside by the portions of the second pattern wiring 318 in the second region 3S2 and the third region 3S3. Therefore, even if external noise enters the portions of the solid pattern 319 in the fourth region 3S4 and the fifth region 3S5, it is possible to reliably prevent the external noise from affecting the first connection portion 314, the internal conductor 21 of the linear sensor 2 exposed at the output end, and the signal line 391 exposed at one end of the signal cable 39. That is, the portions of the second pattern wiring 318 in the second region 3S2 and the third region 3S3 in this third embodiment correspond to an example of a second shield conductor layer.

[0132] A solid pattern 319 is arranged on the outermost edge of the output side terminal member 3 (the lower left part in FIG. 22). This prevents noise from directly entering from this end face into the second pattern wiring 318, the output side end of the linear sensor 2, and one end of the signal cable 39. As shown in FIG. 20, solid patterns 319 are also arranged on both end faces of the output side terminal member 3 (both left and right ends in FIG. 20). This prevents noise from directly entering from this end face into the second pattern wiring 318, the output side end of the linear sensor 2, and one end of the signal cable 39.

[0133] In the linear sensor unit 1 of the third embodiment, when attaching the output side terminal member 3 to the output side end of the linear sensor 2, first, the linear sensor 2, the output side terminal member 3, and the signal cable 39 are prepared. Then, at the output side end of the linear sensor 2, the inner conductor 21, the piezoelectric body 22, the outer conductor 23, the inner sheath 24, and the shield coating 25 are gradually exposed. Also, at one end of the signal cable 39, the signal line 391, the cable inner sheath 392, the signal ground line 393, the cable intermediate sheath 394, and the cable earth line 395 are gradually exposed. Then, the inner conductor 21, the outer conductor 23, and the shield coating 25 are soldered to the first connection portion 314, the second connection portion 315, and the third connection portion 316, respectively. Also, the signal line 391, the signal ground line 393, and the cable earth line 395 are soldered to the first connection portion 314, the second cable connection portion 3151, and the third cable connection portion 3161, respectively. Next, an adhesive is applied to one surface of the output side terminal member 3 that will become the inner surface, and the output side terminal member 3 is folded in this order along the fold line 3a, the second fold line 3b, the third fold line 3c, and the fourth fold line 3d, and finally the output side sealing material 30 is applied to complete the work. Therefore, the output side terminal member 3 can be easily connected and fixed to the linear sensor 2. Also, the output side terminal member 3 can be constructed inexpensively because it is only a single conductor layer formed on one surface of the base film 32.

[0134] Next, the end side terminal member 4 of the third embodiment will be described.

[0135] Fig. 23 is a plan view showing an end-side terminal member in the linear sensor unit of the third embodiment when it is unfolded. This Fig. 23 can also be said to be a plan view showing the state immediately before bending the end-side terminal member 4 in the final stage of the process of attaching the end-side terminal member 4 to the end-side end of the linear sensor 2. Note that the end-side sealing material 40 shown in Fig. 19 is applied and solidified after bending the end-side terminal member 4, so the end-side sealing material 40 is not shown in Fig. 23.

[0136] The termination side terminal member 4 shown in Fig. 23 differs from the termination side terminal member 4 shown in Fig. 2 in that the conductor layer is provided only on one side of the termination base film 42 (see Fig. 24) and that in addition to the termination terminal first region 4S1 and the termination terminal second region 4S2, the termination side terminal member 4 has a termination terminal third region 4S3, a termination terminal fourth region 4S4, and a termination terminal fifth region 4S5 and is folded at four places. In the termination side terminal member 4 of the third embodiment, the termination solid pattern 415 has the function of the termination first shielding conductor layer 45 (see Fig. 7), and the termination pattern wiring 414 has the function of the termination second shielding conductor layer 43 (see Fig. 7). The termination terminal third region 4S3, the termination terminal fourth region 4S4, and the termination terminal fifth region 4S5 are located below the termination terminal second region 4S2 in this order in the state shown in Fig. 23. A terminal second fold line 4b is drawn at the boundary between the terminal second region 4S2 and the terminal third region 4S3, a terminal third fold line 4c is drawn at the boundary between the terminal third region 4S3 and the terminal fourth region 4S4, and a terminal fourth fold line 4d is drawn at the boundary between the terminal fourth region 4S4 and the terminal fifth region 4S5. In Fig. 23, each fold line is shown by a thick dashed line. In addition, taking into consideration the thickness when folded, the terminal first region 4S1, the terminal second region 4S2, the terminal third region 4S3, the terminal fourth region 4S4, and the terminal fifth region 4S5 are arranged in the order of length in the vertical direction in Fig. 23.

[0137] As shown in FIG. 23, the termination terminal first region 4S1 of the termination side terminal member 4 is provided with a termination first connection portion 411, a termination second connection portion 412, and a termination third connection portion 413. The termination first connection portion 411, the termination second connection portion 412, and the termination third connection portion 413 are exposed on the upper surface of the termination side terminal member 4 in the state before the termination side terminal member 4 shown in FIG. 23 is folded. The termination first connection portion 411 corresponds to an example of a first connection conductor layer, and the termination second connection portion 412 and the termination pattern wiring 414 correspond to an example of a second connection conductor layer. The termination third connection portion 413 and the termination solid pattern 415 correspond to an example of a third connection conductor layer. The termination first connection portion 411, the termination second connection portion 412, the termination pattern wiring 414, the termination third connection portion 413, and the termination solid pattern 415 are arranged with gaps between them in the planar direction. Furthermore, even when the termination side terminal member 4 shown in Figure 19 is folded, the termination first connection portion 411, the termination second connection portion 412 and the termination pattern wiring 414, and the termination third connection portion 413 and the termination solid pattern 415 are arranged opposite each other in the thickness direction with the termination base film 42 (see Figure 24) or the termination upper cover lay 46 (see Figure 24) arranged opposite each other and with a gap between them in the thickness direction, so they do not come into contact with each other.

[0138] The termination pattern wiring 414 of the third embodiment also extends across the termination terminal folding line 4a and the termination terminal second folding line 4b to the termination terminal second region 4S2 and the termination terminal third region 4S3. The portion of the termination pattern wiring 414 extending to the termination terminal second region 4S2 is formed to a size that covers the termination first connection portion 411 and the termination second connection portion 412 when the termination side terminal member 4 is folded at the termination terminal folding line 4a and the termination terminal first region 4S1 overlaps with the termination terminal second region 4S2 in the thickness direction. The portion of the termination pattern wiring 414 extending to the termination terminal third region 4S3 is formed to a size that covers the termination first connection portion 411 and the termination second connection portion 412 when the termination side terminal member 4 is folded at the termination terminal folding line 4a and the termination terminal second folding line 4b and the surface of the termination terminal first region 4S1 on the back side in FIG. 23 overlaps with the termination terminal third region 4S3 in the thickness direction.

[0139] The terminal solid pattern 415 extends across the terminal fold line 4a, the terminal second fold line 4b, the terminal third fold line 4c, and the terminal fourth fold line 4d, and also extends into the terminal second region 4S2, the terminal third region 4S3, the terminal fourth region 4S4, and the terminal fifth region 4S5. The terminal solid pattern 415 extends into the terminal fourth region 4S4 and the terminal fifth region 4S5 in a size that covers almost the entire terminal first region 4S1, the terminal second region 4S2, and the terminal third region 4S3 that are folded at the terminal fold line 4a and the terminal second fold line 4b.

[0140] Figure 24 is a cross-sectional view taken along line UU in Figure 23. Note that the thickness of each part is exaggerated in Figure 24. Also, terminal first connection part 411, terminal second connection part 412, and terminal third connection part 413 have their exposed surfaces gold-plated to improve connectivity with solder and to raise their height, but the gold plating is omitted from the illustration.

[0141] 24, the termination side terminal member 4 is in the form of a film having a termination pattern conductor layer 41 and a termination base film 42. In the termination side terminal member 4 of the third embodiment, the termination pattern conductor layer 41 is formed on one side of the termination base film 42, and no conductor layer is formed on the side of the termination base film 42 opposite to the side on which the termination pattern conductor layer 41 is formed.

[0142] Fig. 25 is a cross-sectional view taken along the line SS in Fig. 19. In Fig. 25 as well, the thickness of each part is exaggerated.

[0143] As shown in FIG. 25, the terminal first region 4S1, the terminal second region 4S2, and the terminal third region 4S3 are covered on the outside by the portion of the terminal solid pattern 415 that is in the terminal fourth region 4S4 and the terminal fifth region 4S5. The terminal end of the linear sensor 2 is also covered on the outside by the portion of the terminal solid pattern 415 that is in the terminal fourth region 4S4 and the terminal fifth region 4S5. The terminal solid pattern 415 is electrically connected to the shield coating 25 shown in FIG. 23. Therefore, noise is prevented from directly entering the terminal first region 4S1, the terminal second region 4S2, the terminal third region 4S3, and the terminal end of the linear sensor 2. That is, in this third embodiment, the portion of the terminal solid pattern 415 that is in the terminal fourth region 4S4 and the terminal fifth region 4S5 corresponds to an example of a first shield conductor layer. Furthermore, the internal conductor 21 (see FIG. 23) of the linear sensor 2 exposed at the termination first connection portion 411 and the termination side end portion is covered on the outside by the portion of the termination pattern wiring 414 in the termination terminal second region 4S2 and the termination terminal third region 4S3. Therefore, even if external noise enters the portion of the termination solid pattern 415 in the termination terminal fourth region 4S4 and the termination terminal fifth region 4S5, it is possible to reliably prevent the external noise from affecting the internal conductor 21 of the linear sensor 2 exposed at the termination first connection portion 411 and the termination side end portion. That is, the portion of the termination pattern wiring 414 in the termination terminal second region 4S2 and the termination terminal third region 4S3 in this third embodiment corresponds to an example of a second shield conductor layer.

[0144] A termination solid pattern 415 is arranged on the outermost edge of the termination side terminal member 4 (the lower left part in FIG. 25). This prevents noise from directly entering the termination pattern wiring 414 and the termination side end of the linear sensor 2 from this end face. Also, as shown in FIG. 23, termination solid patterns 415 are arranged on both end faces of the termination side terminal member 4 (both left and right ends in FIG. 23). This prevents noise from directly entering the termination pattern wiring 414 and the termination side end of the linear sensor 2 from this end face.

[0145] In the linear sensor unit 1 of the third embodiment, when attaching the end terminal member 4 to the end terminal of the linear sensor 2, first prepare the linear sensor 2 and the end terminal member 4. Then, the internal conductor 21, the piezoelectric body 22, the external conductor 23, the inner sheath 24, and the shield coating 25 are exposed stepwise at the end terminal of the linear sensor 2. After that, the internal conductor 21, the external conductor 23, and the shield coating 25 are soldered to the end terminal first connecting portion 411, the end terminal second connecting portion 412, and the end terminal third connecting portion 413, respectively. Next, adhesive is applied to one surface that will become the inner surface of the end terminal member 4, and the end terminal is folded in the order of the end terminal folding line 4a, the end terminal second folding line 4b, the end terminal third folding line 4c, and the end terminal fourth folding line 4d, and finally the end terminal sealing material 40 is applied to complete the work. Therefore, the end terminal member 4 can be easily connected and fixed to the linear sensor 2. Furthermore, since the end side terminal member 4 is simply a single conductor layer formed on one surface of the end base film 42, the end side terminal member 4 can be constructed at low cost.

[0146] According to the linear sensor unit 1 of the embodiment and the modified example described above, the output side terminal member 3 and the end side terminal member 4 can be easily connected and fixed, so that the manufacturing cost of the linear sensor unit can be reduced. In addition, the output side terminal member 3 and the end side terminal member 4 can be made small.

[0147] The present invention is not limited to the above-mentioned embodiment, and various modifications can be made within the scope of the claims. For example, in the present embodiment, the linear sensor 2 using the piezoelectric body 22 has been described, but the linear sensor 2 may be changed to one using a resistance wire such as conductive rubber or a capacitor wire. In addition, in the present embodiment, the output side terminal member 3 and the end side terminal member 4 are folded once or twice, but the number of folding times may be three or more. In addition, the output side terminal member 3 and the end side terminal member 4 may be wrapped around the linear sensor 2 without folding.

[0148] Note that even if a component is included only in the description of each of the embodiments and modified examples described above, that component may be applied to other embodiments or other modified examples.

[0149] The linear sensor unit described above is a linear sensor unit including a linear sensor having a sensor wire and a shield coating, and a terminal member electrically connected to the linear sensor, The terminal member has a first shield conductor layer electrically connected to the shield coating, and is a film-like member overlapped to cover the periphery of the linear sensor.

[0150] According to this linear sensor unit, since the terminal member is a film having the first shield conductor layer, the terminal member can be easily connected and fixed to the sensor wire, and as a result, the linear sensor unit can be produced at low cost.

[0151] Here, the terminal member may be folded in half to sandwich the sensor wire therebetween, or may be folded two or more times to sandwich the sensor wire therebetween, or may be wound around the sensor wire.

[0152] In the linear sensor unit, the sensor wire has an inner conductor and an outer conductor, The terminal member may have a first connecting conductor layer arranged across a first insulating layer from the first shielding conductor layer and to which the internal conductor is electrically connected, and a second connecting conductor layer arranged across the first insulating layer from the first shielding conductor layer and to which the external conductor is electrically connected.

[0153] According to this aspect, the internal conductor and the external conductor can be electrically connected to the terminal member.

[0154] Here, the first shielding conductor layer may cover the outside of the first connecting conductor layer and the second connecting conductor layer. The first insulating layer may be an insulating film. Furthermore, the first connecting conductor layer and the second connecting conductor layer may be disposed on the same plane with a gap therebetween in the planar direction.

[0155] Furthermore, in this linear sensor unit, the terminal member may have a second shielding conductor layer arranged between the first insulating layer and the first shielding conductor layer with a second insulating layer sandwiched between the first shielding conductor layer and the second shielding conductor layer, and a second conductor path penetrating the first insulating layer and electrically connecting the second connecting conductor layer and the second shielding conductor layer.

[0156] Since the second shielding conductor layer is provided, even if external noise enters the first shielding conductor layer, the influence of the external noise can be prevented from reaching the first connecting conductor layer.

[0157] Here, the second shielding conductor layer may be covered on the outside by the first shielding conductor layer, and the first connecting conductor layer may be covered on the outside by the second shielding conductor layer.

[0158] In addition, in this linear sensor unit, the terminal member may have a third shielding conductor layer arranged with a gap in the planar direction from the first shielding conductor layer, and a third conductor path that penetrates the first insulating layer and electrically connects the second connecting conductor layer and the third shielding conductor layer.

[0159] Since the third shielding conductor layer is provided, even if external noise enters the first shielding conductor layer, the influence of the external noise on the first connection conductor layer can be reliably prevented.

[0160] Here, the terminal member may be folded twice to sandwich the linear sensor. Also, the first connecting conductor layer may be covered on the outside by the second connecting conductor layer and the third shielding conductor layer. Furthermore, the second connecting conductor layer and the third shielding conductor layer may be covered on the outside by the first shielding conductor layer.

[0161] In addition, in this linear sensor unit, the terminal member may have a third connecting conductor layer to which the shield coating is electrically connected, and a first conductor path that penetrates the first insulating layer and electrically connects the third connecting conductor layer and the first shield conductor layer.

[0162] This allows the shield coating and the first shield conductor layer to be easily electrically connected.

[0163] Here, the third connection conductor layer may be disposed on the same plane as at least one of the first connection conductor layer and the second connection conductor layer with a gap therebetween in a planar direction.

[0164] In the linear sensor unit, the sensor wire has an inner conductor and an outer conductor, The terminal member may have a second connecting conductor layer arranged with a gap from the first shielding conductor layer and electrically connected to the external conductor, and a first connecting conductor layer arranged with a gap from the first shielding conductor layer and the second connecting conductor layer and electrically connected to the internal conductor.

[0165] According to this aspect, the internal conductor and the external conductor can be electrically connected to the terminal member.

[0166] Here, the terminal member may be overlapped a plurality of times to cover the periphery of the linear sensor, and further, the terminal member may be wound a plurality of times around the sensor wire.

[0167] In the linear sensor unit, the first connection conductor layer electrically connects the internal conductors at both ends of the linear sensor, The second connection conductor layer may be configured such that the external conductors at both ends of the linear sensor are electrically connected to each other.

[0168] When one end of the sensor wire is connected to the circuit side and the other end is a free end, a signal generated in the sensor wire may be reflected at the free end side and cancel out the signal generated, resulting in a decrease in sensor output. In this embodiment, the inner conductor and the outer conductor at both ends are electrically connected to a single terminal member that is connected to the circuit, so that the signal is not canceled out. As a result, a decrease in sensor output can be prevented.

[0169] In the linear sensor unit, the linear sensor may include a piezoelectric material provided between the internal conductor and the external conductor.

[0170] By using the piezoelectric material, a signal corresponding to the load or vibration applied to the sensor wire can be generated with high accuracy. [Explanation of symbols]

[0171] 1 Linear sensor unit 2 Linear Sensor 3 Output side terminal material 4 End terminal member 20 Sensor wire 25 Shield coating 35 First shield conductor layer 45 Termination 1st shield conductor layer

Claims

1. A linear sensor unit including a linear sensor having a sensor wire and a shield coating, and a terminal member electrically connected to the linear sensor, the terminal member is a film-like member having a first shield conductor layer electrically connected to the shield coating, The linear sensor unit according to claim 1, wherein the first shield conductor layer is overlapped a plurality of times to cover the periphery of the linear sensor.

2. the sensor wire has an inner conductor and an outer conductor; the terminal member has a second connection conductor layer disposed with a gap therebetween and electrically connected to the external conductor, 2. The linear sensor unit according to claim 1, wherein the first shield conductor layer covers the outside of the second connection conductor layer.

Images