Processing machine

Abstract

To provide a processing machine capable of improving operation efficiency.SOLUTION: A processing machine 20 includes a second base 42, an X-axis level 74, a Y-axis level 75, actuation parts 71, 72, 73 and an electronic control device 60. The second base 42 has a reference surface 47 concerning an attitude of a second grindstone 41. The X-axis level 74 and the Y-axis level 75 are provided on the reference surface 47 of the second base 42 and, at the same time, outputs a signal in accordance with an actual inclination angle of the same reference surface 47. The actuation parts 71, 72, 73 actuate so as to incline the second base 42 and change the inclination angle of the reference surface 47. The electronic control device 60 controls, based on output signals of the X-axis level 74 and the Y-axis level 75, actuation of the actuation parts 71, 72, 73 so as to make an actual inclination angle indicated by the output signals match with a predetermined reference angle.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present invention relates to a processing machine. [Background technology]

[0002] In general, when installing a processing machine that performs precision machining, the posture of the processing machine itself and the posture of the processing unit of the processing machine are adjusted to a reference posture such as horizontal or vertical. A spirit level is used for this operation. For example, an air bubble type spirit level is used (see Patent Document 1). This spirit level has a container in which liquid and gas (air bubbles) are sealed. The spirit level is set so that when the processing machine is in a desired posture (for example, horizontal), the air bubble is at a predetermined position in the container.

[0003] When adjusting the attitude of the processing machine, the actual attitude of the processing machine is measured using a level, and the attitude of the processing machine is manually adjusted so that the attitude of the processing machine measured by the level becomes the reference attitude. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent Publication No. 2021-175966 Summary of the Invention [Problem to be solved by the invention]

[0005] Here, the task of adjusting the attitude of the processing machine may be performed not only when the processing machine is installed, but also at any time after the installation of the processing machine. In addition, in one adjustment task, a series of tasks consisting of the task of measuring with a level and the task of adjusting the attitude of the processing machine may be performed multiple times. The task of adjusting the attitude of the processing machine is complicated, which is one of the factors that leads to a decrease in the operating efficiency of the processing machine. [Means for solving the problem]

[0006] A processing machine for solving the above problem includes a reference member having a reference plane for the attitude of the processing machine, a spirit level provided on the reference plane and outputting a signal corresponding to the actual inclination angle of the reference plane, an operating unit that operates to tilt the reference member to change the inclination angle of the reference plane, and a control unit that controls the operation of the operating unit based on the output signal of the spirit level so as to match the actual inclination angle indicated by the output signal with a predetermined reference angle.

[0007] According to the above configuration, the inclination angle of the reference plane of the processing machine can be automatically adjusted to the reference angle based on the output signal of the level provided in the processing machine. Therefore, the task of adjusting the inclination angle of the reference plane of the processing machine to the reference angle, which is a cumbersome task if performed manually, can be automatically performed through the operation control of the operating unit based on the output signal of the level. This makes it possible to reduce the work of adjusting the inclination angle of the reference plane to the reference angle, thereby improving the operating efficiency of the processing machine. Effect of the Invention

[0008] According to the present invention, the operating efficiency of a processing machine can be improved. [Brief description of the drawings]

[0009] [Figure 1] FIG. 1 is a front view of a processing machine according to an embodiment. [Diagram 2] FIG. 4 is a plan view of a second grindstone unit of the processing machine. [Diagram 3] FIG. 2 is a block diagram showing the electrical circuit structure of the processing machine. [Figure 4] 4 is a flowchart showing an execution mode of an operation control process. [Diagram 5] FIG. [Figure 6] FIG. [Figure 7] FIG. 4 is a front view showing a support structure for a swinging member of the level device. [Figure 8] 13(a) and 13(b) are front views showing the operation of the elastic hinge. [Figure 9] 1A is a rear view showing the scale portion and its surrounding structure, and FIG. 1B is an enlarged rear view showing the periphery of the scale portion. [Figure 10] 1A is a front view showing a fixing structure of an angle sensor unit, and FIG. 1B is an enlarged front view showing the angle sensor unit. [Figure 11] FIG. 4 is a side cross-sectional view showing the structure of a damper portion. [Figure 12] 4 is a front cross-sectional view showing the structure of the damper portion. [Figure 13] FIG. 4 is an explanatory diagram for explaining an arrangement of permanent magnets in a magnet row. [Figure 14] FIG. 11 is a front view of a processing machine according to another embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0010] Hereinafter, one embodiment of the processing machine will be described with reference to Fig. 1 to Fig. 13. In this embodiment, the left-right direction in Fig. 1 is defined as the left-right direction X1 of the processing machine, the direction perpendicular to the paper surface in Fig. 1 is defined as the front-rear direction Y1 of the processing machine, and the up-down direction in Fig. 1 is defined as the up-down direction Z1 of the processing machine.

[0011] As shown in FIG. 1 and FIG. 2, the processing machine 20 of this embodiment is a vertical-shaft double-headed surface grinding machine. The processing machine 20 has a first grindstone 31 and a second grindstone 41. The first grindstone 31 and the second grindstone 41 both have rotation axes extending in the vertical direction Z1. The first grindstone 31 and the second grindstone 41 are arranged so as to be spaced apart in the vertical direction Z1. When processing a workpiece, the first grindstone 31 and the second grindstone 41 are rotated while the workpiece is sandwiched between them. As a result, both sides of the workpiece in the vertical direction Z1 are ground.

[0012] The processing machine 20 has a machine base 21, a pair of side walls 22, and an upper base 23. The machine base 21 is a base for assembling various components, including the side wall portions 22 and the upper base 23, as components for realizing various functions of the processing machine 20. The pair of side wall portions 22 are provided on the machine base 21 in a manner extending upward from the upper portion of the machine base 21. The pair of side wall portions 22 are provided at an interval in the left-right direction X1 on the upper portion of the machine base 21. Each side wall portion 22 extends in the front-rear direction Y1 and the up-down direction Z1. The upper base 23 is installed between the upper portions of one of the pair of side wall portions 22 and the other upper portion. The upper base 23 extends in the left-right direction X1 and the front-rear direction Y1.

[0013] The processing machine 20 has a first grindstone unit 30 including the first grindstone 31 and a second grindstone unit 40 including the second grindstone 41 . <First Grindstone Section> The first grindstone section 30 has a first grindstone 31, a first base 32, and a first motor 33. The first base 32 is provided on the upper part of the machine base 21. The first base 32 rotatably supports the first grindstone 31. Of both side surfaces of the first grindstone 31, the upper surface (hereinafter referred to as the upper surface 311) is exposed upward while facing the second grindstone 41. The rotating shaft of the first motor 33 is connected to the rotating shaft of the first grindstone 31. The first motor 33 drives the first grindstone 31 to rotate.

[0014] <Second Grindstone Section> The second grindstone unit 40 has a second grindstone 41, a second base 42, and a second motor 43. The second base 42 is a stepped columnar shape consisting of an upper small diameter portion 44 and a lower large diameter portion 45. The second base 42 rotatably supports the second grindstone 41. The lower surface (hereinafter referred to as the lower surface 411) of both sides of the second grindstone 41 is exposed below the second base 42 in a state facing the upper surface 311 of the first grindstone 31. The second base 42 is provided with a second motor 43. The rotating shaft of the second motor 43 is connected to the rotating shaft of the second grindstone 41. The second motor 43 drives the second grindstone 41 to rotate.

[0015] The second grindstone unit 40 is provided on the upper base 23 in a manner such that it is suspended from the upper base 23. More specifically, three support parts 46 are provided on the lower part of the upper base 23. Each support part 46 extends in the up-down direction Z1 in a manner such that it protrudes downward from the lower part of the upper base 23. The second grindstone unit 40 is fixed to the lower parts of the three support parts 46. The three support parts 46 are provided at different positions in a state in which they are sandwiched between the second base 42 as a reference member and the upper base 23 as a supported part.

[0016] In the processing machine 20 of the present embodiment, the support structure of the second grindstone unit 40 by the upper base 23 is a three-point support structure by the three support parts 46, so that the second grindstone unit 40 is stably supported by the upper base 23.

[0017] <Lifting device> The processing machine 20 has a lifting device 50. The lifting device 50 lifts and lowers the upper base 23 together with the second grinding stone unit 40. The lifting device 50 is composed of a lifting unit 51 provided on each of the pair of side wall units 22. Each lifting unit 51 has a ball screw mechanism, a servo motor, etc. (not shown). Through operation control of each lifting unit 51, the position of the upper base 23 in the up-down direction Z1 relative to the machine base 21 is controlled. In this way, specifically, the position of the second grinding stone 41 in the up-down direction Z1 relative to the first grinding stone 31 is controlled.

[0018] As shown in Fig. 1 and Fig. 3, the processing machine 20 has an electronic control device 60. The electronic control device 60 is configured by, for example, a microcomputer. The first grindstone unit 30, the second grindstone unit 40, and the lifting units 51 of the lifting device 50 are connected to the electronic control device 60. The electronic control device 60 executes operation control of the first motor 33 of the first grindstone unit 30, operation control of the second motor 43 of the second grindstone unit 40, and operation control of each servo motor of the lifting device 50 in a predetermined operation pattern.

[0019] Grinding of a workpiece by the processing machine 20 is basically performed as follows. When machining a workpiece, first, the workpiece to be machined is placed on the first grindstone unit 30. Thereafter, the first grindstone 31 and the second grindstone 41 are rotated through the operation control of each grindstone unit 30, 40, and the upper base 23 and the second grindstone unit 40 are lowered through the operation control of the lifting device 50. As a result, the upper surface 311 of the rotating first grindstone 31 comes into contact with the lower surface of the workpiece, and the lower surface 411 of the rotating second grindstone 41 comes into contact with the upper surface of the workpiece. At this time, the lower surface of the workpiece is ground by the upper surface 311 of the first grindstone 31, and the upper surface of the workpiece is ground by the lower surface 411 of the second grindstone 41.

[0020] <Reference adjustment device> In the processing machine 20 of this embodiment, a reference surface 47 for the posture of the processing machine 20 (specifically, the second grinding wheel 41) is formed on the upper surface of the large diameter portion 45 of the second base 42. In this processing machine 20, when the inclination angle of the reference surface 47 becomes the reference angle (horizontal in this embodiment), the inclination angle of the lower surface 411 of the second grinding wheel 41 also becomes the reference angle, i.e., horizontal.

[0021] The processing machine 20 of this embodiment has a reference adjustment device 70 that automatically adjusts the inclination angle of the reference surface 47 to a horizontal reference angle. The reference adjustment device 70 has three operating parts 71, 72, and 73, an X-axis level 74, and a Y-axis level 75.

[0022] <Operating part> The actuating parts 71, 72, and 73 are provided respectively corresponding to the three support parts 46. Each of the actuating parts 71, 72, and 73 has a ball screw mechanism, a servo motor 76, and the like (not shown). The actuating parts 71, 72, and 73 are provided between the support parts 46 and the upper base 23. More specifically, the support parts 46 are connected to the upper base 23 via the actuating parts 71, 72, and 73.

[0023] Each of the actuators 71, 72, and 73 is connected to the electronic control unit 60. The electronic control unit 60 executes the operation control of each of the actuators 71, 72, and 73. Through the operation control of the actuators 71, 72, and 73, the distance between the second grinding wheel portion 40 and the upper base 23 in the support direction of the second grinding wheel portion 40 (in the vertical direction Z1 in this embodiment) is changed at the portion where the support portion 46 corresponding to each of the actuators 71, 72, and 73 is provided. Thereby, the second base 42 having the reference surface 47 is tilted, and the tilt angle of the reference surface 47 is changed.

[0024] <X-axis level> As shown in FIGS. 1 and 2, the X-axis level 74 is fixed to the reference surface 47 of the second base 42. The X-axis level 74 detects the tilt angle (hereinafter referred to as the X-axis tilt angle AX) of the reference surface 47 in the left-right direction X1. Specifically, the X-axis level 74 outputs a signal corresponding to the tilt angle of the reference surface 47 in the left-right direction X1 with respect to the horizontal as the reference angle. The detection signal of the X-axis level 74 is taken into the electronic control unit 60.

[0025] <Y-axis level> The Y-axis level 75 is fixed to the reference surface 47 of the second base 42. The Y-axis level 75 detects the tilt angle (hereinafter referred to as the Y-axis tilt angle AY) of the reference surface 47 in the front-rear direction Y1. Specifically, the Y-axis level 75 outputs a signal corresponding to the tilt angle of the reference surface 47 in the front-rear direction Y1 with respect to the horizontal. The detection signal of the Y-axis level 75 is taken into the electronic control unit 60. The specific structures of the X-axis level 74 and the Y-axis level 75 will be described in detail later.

[0026] The electronic control unit 60 performs various calculations based on the detection signals of the X-axis level 74 and the Y-axis level 75, and executes the operation control of each of the actuators 71, 72, and 73 based on the calculation results. In this embodiment, the electronic control unit 60 corresponds to the control unit.

[0027] <Operation control process> The process (operation control process) related to the operation control of the actuators 71, 72, and 73 is executed as follows.

[0028] 3 shows an execution mode of the operation control process. The series of processes shown in the flowchart in the figure are executed by the electronic control device 60 every time a predetermined period of time elapses, on the condition that the processing machine 20 is not processing a workpiece.

[0029] As shown in FIG. 3, in this process, first, the X-axis tilt angle AX is detected by the X-axis level 74, and the Y-axis tilt angle AY is detected by the Y-axis level 75 (step S10). Thereafter, a target amount of operation T1 of the operating portion 71, a target amount of operation T2 of the operating portion 72, and a target amount of operation T3 of the operating portion 73 are calculated based on the X-axis tilt angle AX and the Y-axis tilt angle AY (step S11).

[0030] Here, in the processing machine 20, the tilt direction and the degree of tilt of the reference surface 47 can be grasped based on the X-axis tilt angle AX and the Y-axis tilt angle AY. Then, the operation amount of each of the operating parts 71, 72, 73 that can make the reference surface 47 horizontal can be grasped based on the tilt direction and the degree of tilt of the reference surface 47. In this embodiment, the relationship between the X-axis tilt angle AX, the Y-axis tilt angle AY, and the operation amount of each of the operating parts 71, 72, 73 that can make the reference surface 47 horizontal is obtained based on the results of various experiments and simulations by the inventors, etc. Then, this relationship is stored in advance in the electronic control device 60 as, for example, a calculation map. In the process of step S11, the operation amount of each of the operating parts 71, 72, 73 (specifically, the target operation amount T1, T2, T3) is calculated based on the X-axis tilt angle AX and the Y-axis tilt angle AY from the above relationship.

[0031] Then, the operation of each of the operating parts 71, 72, 73, more specifically the servo motor 76, is controlled so that the target operation amounts T1, T2, T3 match the actual operation amounts of the operating parts 71, 72, 73 (step S12).

[0032] As described above, in the operation control process of the present embodiment, based on the X-axis tilt angle AX and the Y-axis tilt angle AY, the operations of the respective operation units 71, 72, 73 are controlled so that the tilt angles AX and AY coincide with the horizontal, which is a predetermined reference angle.

[0033] According to the present embodiment, based on the output signals of the X-axis level 74 and the Y-axis level 75 provided on the second base 42, the tilt angle of the reference plane 47 of the second base 42 can be automatically adjusted to the horizontal, which is the reference angle. Therefore, the operation of adjusting the tilt angle of the reference plane 47 of the second base 42 to the horizontal, that is, the operation that becomes complicated when performed manually, can be automatically performed through the operation control of the respective operation units 71, 72, 73 based on the output signals of the levels 74 and 75. As a result, the operation of adjusting the tilt angle of the reference plane 47 to the horizontal can be made into an operation that does not require much effort, so that the operation efficiency of the processing machine 20 can be improved.

[0034] <X-axis level, Y-axis level> Hereinafter, the specific structures of the X-axis level 74 and the Y-axis level 75 will be described in detail with reference to FIGS. 5 to 13. Since the X-axis level 74 and the Y-axis level 75 have the same structure, hereinafter, only the specific structure of the X-axis level 74 will be described in detail, and the detailed description of the specific structure of the Y-axis level 75 will be omitted. Also, hereinafter, the left-right direction in FIG. 5 will be referred to as the X-axis direction X2 of the X-axis level 74, the direction orthogonal to the paper surface in FIG. 5 will be referred to as the Y-axis direction Y2 of the X-axis level 74, and the up-down direction in FIG. 5 will be referred to as the Z-axis direction Z2 of the X-axis level 74 for explanation.

[0035] As shown in Fig. 5 and Fig. 6, the X-axis level 74 has a case 81. The case 81 is composed of a base portion 82 and a pair of lid portions (not shown). The base portion 82 is in the shape of a rectangular cylinder composed of a bottom wall 83, a pair of side walls 84, and a top wall 85. The pair of lid portions are shaped to close the opening of the base portion 82 in the Y-axis direction Y2. The pair of lid portions are detachably provided on the base portion 82. Fig. 5 and Fig. 6 show the X-axis level 74 with the lid portions removed. Inside the case 81, various components constituting the X-axis level 74, such as the swing member 90, the scale portion 110, the angle sensor portion 120, and the damper portion 130, are housed.

[0036] The various components of the X-axis level 74 will now be described in detail. As shown in FIGS. 5 to 7, the swinging member 90 is connected to the base portion 82 so as to be swingable about a swing axis L in a manner such that the swinging member 90 is suspended from the top wall 85 of the base portion 82 via an elastic hinge 100.

[0037] <Elastic hinge> The elastic hinge 100 is composed of a leaf spring, which is a plate-shaped elastic material. The elastic hinge 100 extends in the Z-axis direction Z2 and the Y-axis direction Y2. As shown in FIG. 7 and FIG. 8(a), the elastic hinge 100 has a groove portion 101. The groove portion 101 is provided on one surface (the surface on the right side in FIG. 7) of the elastic hinge 100 in the thickness direction. The groove portion 101 is a groove extending in a U-shaped cross section on the outer surface of the elastic hinge 100. As shown in FIG. 5 to FIG. 7, the groove portion 101 extends in a direction perpendicular to the Z-axis direction Z2, which is the hanging direction of the swinging member 90, (more specifically, in the Y-axis direction Y2) at approximately the center of the elastic hinge 100 in the Z-axis direction Z2.

[0038] An upper portion of the elastic hinge 100 is fixed to the top wall 85 of the base portion 82 by a first hinge fixing portion 102. The first hinge fixing portion 102 has two fixing blocks 1021, 1022. Each of the fixing blocks 1021, 1022 has a substantially rectangular block shape. One of the fixing blocks 1021 is fixed to the lower surface of the top wall 85 of the base portion 82. The other fixing block 1022 is fixed to the fixing block 1022 with the upper portion of the elastic hinge 100 sandwiched between the fixing block 1021 and the fixing block 1022.

[0039] <Swinging member> The swing member 90 has a second hinge fixing portion 91 that constitutes the upper portion thereof and a main body portion 92 that constitutes the lower portion thereof.

[0040] The second hinge fixing part 91 is for fixing the lower part of the elastic hinge 100 to the upper part of the main body part 92 together with the second hinge fixing part 91. The second hinge fixing part 91 has two fixing blocks 911, 912. Each of the fixing blocks 911, 912 has a substantially rectangular parallelepiped shape. The two fixing blocks 911, 912 are fixed to each other with the lower part of the elastic hinge 100 sandwiched between them. In this state, the two fixing blocks 911, 912 are fixed to the upper surface of the main body part 92.

[0041] The main body 92 has a plate shape extending in the Z-axis direction Z2 and the X-axis direction X2. More specifically, the upper part of the main body 92 has a trapezoidal plate shape that becomes wider as it goes downward. The lower part of the main body 92 has a rectangular plate shape. A copper plate 93 is fixed to the main body 92. The copper plate 93 is provided so as to cover the outer surface of the main body 92. More specifically, the copper plate 93 is provided so as to cover the bottom surface 921 of the main body 92, the lower parts of both side surfaces 922, 923 of the main body 92 in the X-axis direction X2, and the portions of both side surfaces 924, 925 of the main body 92 in the thickness direction (Y-axis direction Y2) excluding the upper parts.

[0042] The oscillating member 90 is connected to the base part 82 in a manner that the oscillating member 90 is suspended from the top wall 85 of the base part 82 via the elastic hinge 100, the first hinge fixing part 102, and the second hinge fixing part 91. Therefore, the main body part 92 of the oscillating member 90 functions as a "weight" and the part of the elastic hinge 100 where the groove part 101 is provided functions as a fulcrum, so that the oscillating member 90 can swing like a pendulum, as shown by the arrow C in FIG.

[0043] Specifically, when the base portion 82 is tilted in the X-axis direction X2, the center of gravity of the oscillating member 90 suspended from the base portion 82 is directed vertically downward due to the action of gravity. At this time, as shown in Figures 8(a) and 8(b), the portion of the elastic hinge 100 where the groove portion 101 is provided is bent, causing the oscillating member 90 to oscillate about the oscillation axis L. In the X-axis level 74 of this embodiment, the oscillating member 90 oscillates about the oscillation axis L through the operation of the elastic hinge 100.

[0044] In the X-axis level 74 of this embodiment, the bottom wall 83 of the base portion 82 is fixed to the reference surface 47 of the second base 42 (see FIG. 1). Then, in this X-axis level 74, the inclination angle of the second base 42 is detected by detecting the scale 111 on the scale portion 110 integrated with the swinging member 90 by the angle sensor portion 120 integrated with the base portion 82, as shown in FIG.

[0045] <Scale section> As shown in Fig. 6 and Fig. 9(a), the scale portion 110 is fixed to the oscillating member 90 via a scale fixing portion 113. The scale fixing portion 113 is in the form of a flat plate extending in the Z-axis direction Z2 and the X-axis direction X2. The scale fixing portion 113 is fixed to a surface of the second hinge fixing portion 91 of the oscillating member 90 on the angle sensor portion 120 side (the right side in Fig. 6). The scale portion 110 is in the form of a flat plate extending in the Z-axis direction Z2 and the X-axis direction X2. The scale portion 110 is fixed to a surface of the scale fixing portion 113 on the angle sensor portion 120 side.

[0046] <Scale> As shown in Fig. 9(a) and Fig. 9(b), the scale portion 110 has graduations 111 formed in a side portion in the swing direction of the swing member 90 so as to be arranged in an arc shape centered on the swing axis line L. More specifically, the graduations 111 are formed on a surface 1101 of the scale portion 110 on the angle sensor portion 120 side (the front side in the direction perpendicular to the paper surface of Fig. 9). As shown in Fig. 9(b), the graduations 111 are arranged in a range S of a circular arc shape centered on the swing axis line L on the surface 1101. The graduations 111 are formed of a plurality of grooves formed on the surface of the scale portion 110. The grooves constituting the graduations 111 extend radially from the swing axis line L. The grooves constituting the graduations 111 are arranged so as to be arranged at equal intervals in the range S. Note that Fig. 9(b) conceptually illustrates the grooves constituting the graduations 111. In reality, the grooves constituting the scale 111 are minute grooves arranged at close intervals. In this embodiment, the scale 111 of the scale portion 110 is adapted to swing about the swing axis L together with the swing member 90 as the swing member 90 swings.

[0047] <Angle sensor part> 5, 6, 10(a) and 10(b), an optical type is used as the angle sensor unit 120, which irradiates light onto the scale unit 110, which is the detection target, and detects the reflected light. Note that the detection method used by the angle sensor unit 120 and the scale unit 110 can be a method in which the angle sensor unit 120 outputs a signal corresponding to the amount of movement of the scale unit 110, or a method in which the angle sensor unit 120 outputs a signal corresponding to the absolute position of the scale unit 110.

[0048] The angle sensor unit 120 is fixed to the base unit 82 via a sensor fixing part 121. The sensor fixing part 121 has a flat plate shape extending in the Z-axis direction Z2 and the X-axis direction X2. The sensor fixing part 121 is fixed to the lower surface of the top wall 85 of the base unit 82. The angle sensor unit 120 is fixed to the surface of the sensor fixing part 121 on the oscillating member 90 side (the left side in FIG. 6).

[0049] The angle sensor unit 120 is fixed at a position where the detection surface 1201 of the angle sensor unit 120 faces the scale 111 of the scale unit 110. In more detail, even when the oscillating member 90 oscillates, the angle sensor unit 120 is fixed at a position where the detection surface 1201 of the angle sensor unit 120 and the scale 111 of the scale unit 110 always face each other.

[0050] In the X-axis level 74 of this embodiment, when the oscillating member 90 oscillates with respect to the base portion 82, the scale portion 110 moves relative to the angle sensor portion 120 in an arc-shaped trajectory, as shown by arrow D in Fig. 10(b). At this time, the scale 111 of the scale portion 110, more specifically, the grooves that make up the scale 111, sequentially pass through a position facing the detection portion of the angle sensor portion 120. The angle sensor portion 120 detects the scale 111 as the oscillating position of the oscillating member 90, and outputs a signal corresponding to the detected scale 111.

[0051] 5 and 6, in this embodiment, the angle sensor unit 120 is connected to the electronic control unit 60. The electronic control unit 60 takes in the output signal of the angle sensor unit 120 and performs various calculations based on the signal. Based on the calculation results, the electronic control unit 60 calculates the swing angle of the swing member 90, and further the inclination angle of the reference surface 47 of the second base 42 (see FIG. 1) to which the X-axis level 74 is fixed.

[0052] In the X-axis level 74, when the bottom wall 83 of the base portion 82 is fixed to the reference surface 47 of the second base 42, the second base 42 is tilted and the swinging member 90 swings relative to the base portion 82, the scale portion 110 of the swinging member 90 moves along an arc-shaped trajectory relative to the base portion 82. In the X-axis level 74, in accordance with the relative swing between the base portion 82 and the swinging member 90, the scale 111 of the scale portion 110, which is integral with the swinging member 90 and extends along the relative swing direction, is read by the angle sensor unit 120 integral with the base portion 82. In the X-axis level 74, the inclination angle, which is an index value of the posture of the second base 42, is detected by reading the scale 111 that is arranged in an arc shape in the relative movement direction, rather than the scale that is arranged in a straight line. This makes it possible to detect the direction and degree of posture deviation of the second base 42 from a predetermined posture (horizontal) with high accuracy.

[0053] <Damper section> The X-axis level 74 has a damper section 130. The damper section 130 is for damping the oscillation of the oscillating member 90. The damper section 130 has a pair of side plates 131, 132, a bottom plate 133, and a magnet section 134.

[0054] <Side Panel> 11 and 12, each of the pair of side plates 131, 132 has a flat plate shape extending in the Z-axis direction Z2 and the X-axis direction X2. The pair of side plates 131, 132 are arranged at a distance from each other in the Y-axis direction Y2 so as to sandwich the oscillating member 90 therebetween. The pair of side plates 131, 132 extend along the oscillating member 90 on the sides in the oscillating direction of the oscillating member 90 (the X-axis direction X2).

[0055] The bottom plate 133 has a flat plate shape extending in the X-axis direction X2 and the Y-axis direction Y2. The bottom plate 133 is fixed to an upper surface of the bottom wall 83 of the base portion 82. Lower portions of a pair of side plates 131, 132 are fixed to both sides of the bottom wall 83 in the Y-axis direction Y2. In this embodiment, the pair of side plates 131, 132 are provided integrally with the base portion 82 via the bottom plate 133.

[0056] <Magnet section> The magnet section 134 is provided separately on a surface of one side plate 131 facing the oscillating member 90 (right side in FIG. 11) and a surface of the other side plate 132 facing the oscillating member 90 (left side in FIG. 11). The magnet section 134 is composed of three magnet rows 135. Each magnet row 135 is composed of seven permanent magnets 136 arranged in a row in the X-axis direction X2. The three magnet rows 135 are arranged in parallel at intervals in the Z-axis direction Z2 on the surface of each side plate 131, 132 facing the oscillating member 90. As conceptually shown in FIG. 13, each magnet row 135 is composed of permanent magnets 136 arranged in a Halbach array.

[0057] In this embodiment, the side plates 131, 132 correspond to the opposing wall portions, the surfaces of the side plates 131, 132 facing the oscillating member 90 correspond to the opposing surfaces of the opposing wall portions, and the surfaces facing the sides of the oscillating member 90 in the oscillating direction correspond to the opposing surfaces of the oscillating member 90.

[0058] As shown in FIG. 12, in the X-axis level 74, when the bottom wall 83 of the base portion 82 is fixed to the reference surface 47 of the second base 42, the second base 42 is tilted and the oscillating member 90 oscillates relative to the base portion 82, and the oscillating member 90 and the side wall 84 of the damper portion 130 move relative to each other. At this time, an eddy current is generated in the oscillating member 90, more specifically, in the copper plate 93 covering the outer surface of the oscillating member 90, based on the magnetic field generated by the magnet portion 134 of the side wall 84. Then, the movement amount of the oscillating member 90 per unit time is limited by this eddy current. In this way, in the X-axis level 74 of this embodiment, the oscillation of the oscillating member 90 is damped by the damper portion 130. When the oscillation of the oscillating member 90 stops, the relative movement between the oscillating member 90 and the side wall 84 also stops, so the eddy current is no longer generated. Therefore, the damping force that damps the oscillation of the oscillating member 90 is no longer generated.

[0059] Here, if the moving speed of the oscillating member 90 is fast, the oscillating member 90 will repeatedly swing like a pendulum, which is one factor that leads to a decrease in the accuracy of detection of the horizontality by the X-axis level 74. On the other hand, if the moving speed of the oscillating member 90 is slow, it takes time for the position of the oscillating member 90 to reach a position that corresponds to the actual tilt angle of the second base 42, and therefore it takes a corresponding amount of time for the X-axis level 74 to detect the tilt angle of the second base 42.

[0060] In consideration of this point, in this embodiment, the structure of each part of the damper section 130, such as the arrangement of the permanent magnets 136 on the side wall 84 and the distance between the side wall 84 and the oscillating member 90, is set so as to appropriately suppress the moving speed of the oscillating member 90. The structure of each part of the damper section 130 is determined based on the results of various experiments and simulations conducted by the inventors, etc.

[0061] In this embodiment, the X-axis level 74 is provided on the reference surface 47 of the second grindstone unit 40 so that the X-axis direction X2 of the X-axis level 74 coincides with the left-right direction X1 of the processing machine 20 (see FIG. 1). Therefore, the X-axis level 74 detects the inclination angle (X-axis inclination angle AX) of the reference surface 47 in the left-right direction X1.

[0062] On the other hand, the Y-axis level 75 is provided on the reference surface 47 of the second grindstone unit 40 so that the X-axis direction X2 of the Y-axis level 75 coincides with the front-rear direction Y1 of the processing machine 20. Therefore, the Y-axis level 75 detects the inclination angle (Y-axis inclination angle AY) of the reference surface 47 in the front-rear direction Y1.

[0063] <Action and effect> According to this embodiment, the following advantageous effects can be obtained. (1) The processing machine 20 has a second base 42, an X-axis level 74, a Y-axis level 75, operating units 71, 72, 73, and an electronic control device 60. The second base 42 has a reference plane 47 for its posture. The X-axis level 74 and the Y-axis level 75 are provided on the reference plane 47 of the second base 42. The X-axis level 74 and the Y-axis level 75 output signals according to the actual inclination angle of the reference plane 47. The operating units 71, 72, 73 operate to incline the second base 42 to change the inclination angle of the reference plane 47. The electronic control device 60 controls the operation of the operating units 71, 72, 73 based on the output signals of the levelers 74, 75 so as to match the actual inclination angle indicated by the output signals with the horizontal, which is the reference angle.

[0064] According to this embodiment, the inclination angle of the reference surface 47 of the second base 42 can be automatically adjusted to the horizontal reference angle based on the output signals of the X-axis level 74 and the Y-axis level 75 provided on the second base 42. This makes it possible to reduce the work of adjusting the inclination angle of the reference surface 47 to the horizontal, thereby improving the operating efficiency of the processing machine 20.

[0065] (2) In the processing machine 20, three support parts 46 for supporting the second base 42 are provided at different positions in a state where they are sandwiched between the second base 42 and the upper base 23. The actuating parts 71, 72, 73 are provided separately on the three support parts 46. Each of the actuating parts 71, 72, 73 operates to change the distance between the second base 42 and the upper base 23 in the supporting direction of the second base 42.

[0066] According to this embodiment, the support structure of the second base 42 by the upper base 23 is a three-point support structure by the three support parts 46, so that the second base 42 can be stably supported by the upper base 23. Moreover, the distance between the second base 42 and the upper base 23 can be changed individually in the support parts by the three support parts 46. This makes it possible to change the inclination angle of the reference surface 47 of the second base 42.

[0067] (3) The inclination angle of reference surface 47 with respect to the horizontal as a reference angle can be automatically adjusted through the operation control of operating units 71 , 72 , and 73 based on the output signals of X-axis level 74 and Y-axis level 75 .

[0068] (4) The X-axis level 74 and the Y-axis level 75 each include a base portion 82, a swinging member 90, a scale portion 110, and an angle sensor portion 120. The swinging member 90 is connected to the base portion 82 so as to be swingable about a swing axis L while being suspended from the base portion 82. The scale portion 110 is provided integrally with the swinging member 90. The scale portion 110 has scales 111 formed in an arc shape centered on the swing axis L at a lateral portion in the swing direction of the swinging member 90. The angle sensor portion 120 is provided integrally with the base portion 82 at a position opposite to the scale portion 110. The angle sensor portion 120 detects the scales 111 of the scale portion 110 and outputs a signal corresponding to the detected scales 111.

[0069] According to this embodiment, the inclination angle of the second base 42 can be detected by reading the scale 111 arranged in an arc in the relative movement direction between the swinging member 90 and the base part 82, rather than the scale arranged in a straight line. Therefore, the direction and degree of deviation of the second base 42 from a predetermined attitude (horizontal) can be detected with high accuracy.

[0070] (5) The oscillating member 90 is connected to the base portion 82 via the elastic hinge 100 made of a plate-shaped elastic material. The oscillating member 90 oscillates around the oscillation axis L through the operation of the elastic hinge 100.

[0071] According to this embodiment, a structure can be achieved in which no frictional force is generated when the oscillating member 90 oscillates. Therefore, the position of the oscillating member 90 can be smoothly changed to a position corresponding to the actual tilt angle of the second base 42. Therefore, the tilt angle of the second base 42 can be detected with high accuracy.

[0072] (6) The elastic hinge 100 has a groove 101 on its outer surface that extends in a direction perpendicular to the hanging direction of the oscillating member 90. This allows the elastic hinge 100 to bend at the portion where the groove 101 is formed. Therefore, the oscillation axis L that forms the oscillation center of the oscillating member 90 can be easily grasped. Therefore, the positions of the scale unit 110 and the angle sensor unit 120 that are arranged based on the oscillation axis L can be easily set.

[0073] (7) The X-axis level 74 and the Y-axis level 75 each include a damper section 130. The damper section 130 has a pair of side plates 131, 132 and a magnet section 134. The pair of side plates 131, 132 are provided integrally with the base section 82 and extend along the oscillating member 90 on the sides in the oscillating direction of the oscillating member 90. The magnet section 134 is composed of permanent magnets 136 arranged in a Halbach array on the opposing surfaces of the pair of side plates 131, 132 facing the oscillating member 90. The damper section 130 damps the oscillation of the oscillating member 90 by eddy currents generated on the surfaces corresponding to the sides in the oscillating direction of the oscillating member 90 when the oscillating member 90 oscillates.

[0074] According to this embodiment, the non-contact damper portion 130 is used to quickly converge the oscillation of the oscillating member 90 without generating frictional force. This allows the position of the oscillating member 90 to be smoothly changed to a position corresponding to the actual tilt angle of the second base 42. Therefore, the attitude of the second base 42 can be detected early and accurately by the X-axis level 74 and the Y-axis level 75.

[0075] Moreover, the permanent magnets 136 constituting the magnet section 134 are arranged in a Halbach array. Therefore, compared to a case where the permanent magnets 136 are simply arranged so that the N poles and the S poles are alternately arranged, a magnetic field can be efficiently generated by the magnet section 134 in the space on the oscillating member 90 side of the side plates 131, 132. Then, based on this magnetic field, an eddy current can be efficiently generated on the surface of the copper plate 93 covering the outer surface of the oscillating member 90. Therefore, according to this embodiment, a damping force for damping the oscillation of the oscillating member 90 can be efficiently generated in a small space.

[0076] <Example of change> The above embodiment can be modified as follows: The above embodiment and the following modifications can be combined with each other to the extent that no technical contradiction occurs.

[0077] Instead of fixing the copper plate 93 to the main body 92 of the oscillating member 90, a metal plate made of a metal material other than copper (for example, an aluminum alloy) may be fixed. In this case, it is preferable to use a metal material with high electrical conductivity as the material constituting the metal plate.

[0078] If an appropriate amount of eddy current is generated on the surface of the oscillating member 90, the copper plate 93 may be omitted. The number and arrangement of the permanent magnets 136 constituting the magnet section 134 can be changed as desired. For example, only one magnet array 135, only two magnet arrays, or four or more magnet arrays can be provided on each side plate 131, 132. Instead of arranging the permanent magnets 136 in a Halbach array, it is also possible to simply arrange them so that N poles and S poles are alternately arranged.

[0079] One of the pair of side plates 131, 132 can be omitted. Instead of providing the magnet portion 134 on the opposing surfaces of the side plates 131, 132, it may be provided on the opposing surface of the oscillating member 90, that is, on a surface that is on the side of the oscillating member 90 in the oscillating direction.

[0080] The damper portion 130 can be omitted. The grooves 101 may be provided on both surfaces of the elastic hinge 100 in the thickness direction.

[0081] If the elastic hinge 100 can be operated so as to bend at a predetermined location, the groove 101 can be omitted. The elastic hinge 100 is not limited to being made of a leaf spring, and may be made of other elastic metal plates. The point is that the elastic hinge 100 should be operable to bend at a predetermined location.

[0082] Instead of providing the elastic hinge 100 as a connecting member for connecting the oscillating member 90 to the base portion 82, an air bearing may be provided. The air bearing can be composed of, for example, an oscillating shaft integral with the oscillating member 90, a bearing groove provided in the base portion 82 (or a bearing member integral with the base portion 82), and an air supply portion that supplies air to the bearing groove.

[0083] The graduations 111 are not limited to being formed by a plurality of grooves on the surface of the graduation portion 110, but may be formed by a plurality of protrusions on the surface, or may be formed by a plurality of lines made of a metal film formed on the surface by etching or the like.

[0084] The angle sensor unit 120 is not limited to an optical type, and may be a magnetic type as long as it can detect the scale 111 of the scale unit 110. Any structure may be used for the X-axis level 74 and the Y-axis level 75. In short, it is sufficient that the actual inclination angle of the reference surface 47 can be detected.

[0085] Instead of providing two levels, the X-axis level 74 and the Y-axis level 75, only one level for detecting the tilt angle of the X2-Y2 plane may be provided. It is also possible to omit one of the three operating portions 71, 72, and 73. Even in this configuration, the inclination angle of the reference surface 47 of the second base 42 can be changed by controlling the operation of the two operating portions.

[0086] The timing for detecting the X-axis tilt angle AX and the Y-axis tilt angle AY may be set to any timing when the machining device 20 is not grinding the workpiece, or may be set to any timing when the machining device 20 is grinding the workpiece.

[0087] The operation control process may be executed every time a predetermined period of time elapses, or may be executed when an operator performs an operation to execute the operation control process.

[0088] The reference angle can be set to an inclination angle other than horizontal, such as vertical. In this case, the level, support, and operating unit can be arranged according to the reference angle. With this configuration, the inclination angle of the reference plane can be automatically adjusted to the reference angle based on the output signal of the level provided on the reference plane of the reference member.

[0089] The reference member for adjusting the inclination angle of the reference surface to the reference angle is not limited to the second base 42, but may be any component of the processing machine 20 (such as the machine base 21).

[0090] FIG. 14 shows an example of a processing machine 140 that employs a machine base 141 as a reference member. The processing machine 140 shown in FIG. 14 is a surface grinding machine having a rotary grindstone 144. A reference surface 147 is formed on the upper surface of the machine base 141 of the processing machine 140. An X-axis level 74 and a Y-axis level 75 are provided on the reference surface 147. The processing machine 140 has a plurality of (for example, three) legs 142 as a support part for supporting the machine base 141 on the ground 150. In this example, the ground 150 corresponds to the support target part. The plurality of legs 142 are each provided with an operating part 143. Each operating part 143 has a ball screw mechanism, a servo motor, etc., not shown. In the processing machine 140, an operation control process is executed by the electronic control device 60. In the operation control process, operation control of each operating part 143 is executed so that the X-axis tilt angle AX and the Y-axis tilt angle AY coincide with the horizontal, which is a reference angle.

[0091] The processing machine according to the above embodiment is not limited to a vertical-axis type double-head surface grinding machine, but can also be applied to a horizontal-axis type double-head surface grinding machine, a single-head surface grinding machine, a gear grinding machine, etc. The processing machine according to the above embodiment can be applied to any processing machine as long as it has a reference member on which a reference surface is formed.

[0092] <Additional Notes> The above embodiment includes the configurations described in the following supplementary notes. [Appendix 1] A processing machine comprising: a reference member having a reference plane for the attitude of the processing machine; a spirit level provided on the reference plane and outputting a signal corresponding to an actual inclination angle of the reference plane; an operating unit that operates to tilt the reference member to change the inclination angle of the reference plane; and a control unit that controls the operation of the operating unit based on the output signal of the spirit level so as to match the actual inclination angle indicated by the output signal with a predetermined reference angle.

[0093] [Appendix 2] The processing machine described in [Appendix 1] has three support parts for supporting the reference member, which are provided at different locations and are sandwiched between the reference member and a support target part supporting the same reference member, and the operating part is provided on at least two of the three support parts and operates to change the distance between the reference member and the support target part in the support direction of the reference member.

[0094] [Appendix 3] The processing machine described in [Appendix 1] or [Appendix 2], wherein the reference angle is horizontal. [Appendix 4] The level gauge is a processing machine described in any one of [Appendix 1] to [Appendix 3], comprising: a base portion; a oscillating member connected to the base portion so as to be oscillable around a swing axis in a manner to be suspended from the base portion; a scale portion provided integrally with the oscillating member and having scales arranged in an arc shape centered on the swing axis at a lateral portion in the swing direction of the oscillating member; and an angle sensor portion provided integrally with the base portion at a position facing the scale portion, for detecting the scale of the scale portion and outputting a signal corresponding to the detected scale.

[0095] [Appendix 5] The level is a processing machine described in [Appendix 4], in which the oscillating member is connected to the base portion via an elastic hinge made of a plate-shaped elastic member, and the oscillating member oscillates around the oscillating axis through the operation of the elastic hinge.

[0096] [Appendix 6] The elastic hinge has a groove portion on the outer surface of the elastic member extending in a direction perpendicular to the hanging direction of the oscillating member. [Appendix 7] The level includes a damper section, the damper section having an opposing wall section that is integrally provided with the base section and extends along the oscillating member on the side in the oscillating direction of the oscillating member, and a magnet section consisting of permanent magnets arranged in a Halbach array on one of the opposing surfaces of the oscillating member and the opposing wall section, and damps the oscillation of the oscillating member by eddy currents that are generated on the other of the opposing surfaces of the oscillating member and the opposing wall section when the oscillating member oscillates. A machining machine described in any one of [Appendix 4] to [Appendix 6]. [Explanation of symbols]

[0097] 20…Processing machine 21…Machine base 22...Side wall 23…Upper base 30…First grinding wheel section 31…First grindstone 311…Top surface 32…First base 33…First motor 40…Second grinding wheel section 41…Second grindstone 411…Bottom surface 42…Second base 43…Second motor 44…Small diameter part 45…Large diameter section 46...Support part 47...Reference plane 50…Lifting device 51…Lifting section 60...Electronic control device 70...Reference adjustment device 71...Operating part 72...Operating part 73...Operating part 74…X-axis level 75...Y-axis level 76...Servo motor 81…Case 82…Base section 83…Bottom wall 84…Side wall 85…Ceiling wall 90...Swinging member 91…Second hinge fixing part 911…Fixed Block 912…Fixed block 92…Main body 921…Bottom 922, 923, 924, 925…Side 93...Copper plate 100...Elastic hinge 101...Groove 102…First hinge fixing part 1021…Fixed block 1022...Fixed block 110…Scale 1101...face 111…scale 113…Scale fixing part 120...Angle sensor part 1201…Detection surface 121…Sensor fixing part 130…Damper section 131, 132…Side plate 133...Bottom plate 134…Magnet section 135...Magnet array 136...Permanent magnet 140…Processing machine 141…Machine base 142...legs 143...Operating part 144...Whetstone 147...Reference plane 150...ground

Claims

1. a reference member having a reference surface for the attitude of the processing machine; a level provided on the reference surface and outputting a signal corresponding to an actual inclination angle of the reference surface; an operating unit that operates to tilt the reference member to change the inclination angle of the reference surface; a control unit that controls the operation of the operation unit based on an output signal of the level so that the actual tilt angle indicated by the output signal coincides with a predetermined reference angle; A processing machine equipped with the above.

2. the processing machine includes three support parts for supporting the reference member, the support parts being provided at different positions in a state in which the support parts are sandwiched between the reference member and a support target part supporting the reference member, The actuation portion is provided on at least two of the three support portions and operates to change a distance between the reference member and the support target portion in a support direction of the reference member.

2. The processing machine according to claim 1.

3. The reference angle is horizontal.

3. The processing machine according to claim 1 or 2.

4. The level gauge is A base portion; a swing member that is connected to the base portion so as to be swingable about a swing axis in a manner to be suspended from the base portion; a scale portion that is integrally provided on the swing member and has scales arranged in an arc shape centered on the swing axis at a side portion in the swing direction of the swing member; an angle sensor unit provided integrally with the base unit at a position facing the scale unit, the angle sensor unit detecting the scale of the scale unit and outputting a signal corresponding to the detected scale; 3. The processing machine according to claim 1 or 2.

5. In the level, the swinging member is connected to the base portion via an elastic hinge made of a plate-shaped elastic member, and the swinging member swings around the swing axis through the operation of the elastic hinge.

5. The processing machine according to claim 4.

6. The elastic hinge has a groove portion extending in a direction perpendicular to the hanging direction of the swinging member on an outer surface of the elastic member. The processing machine according to claim 5.

7. The level gauge includes a damper portion, The damper portion has an opposing wall portion that is integrally provided on the base portion and extends along the oscillating member on the side in the oscillating direction of the oscillating member, and a magnet portion consisting of permanent magnets arranged in a Halbach array on one of the opposing surfaces of the oscillating member and the opposing wall portion, and damps the oscillation of the oscillating member by eddy currents that are generated on the other of the opposing surfaces of the oscillating member and the opposing wall portion when the oscillating member oscillates.

5. The processing machine according to claim 4.

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