Inclination adjustment device

Abstract

To provide an inclination adjustment device which can prevent upsizing of a device base in the axial direction, while being capable of adjusting a reference plane and a first crimping tool end surface in a manner parallel to each other without applying a load onto the reference plane.SOLUTION: An inclination adjustment device 100 has a crimping tool 21, a rocking body 22, a shaft 23, a positioning mechanism 50, and a plate spring 56. The positioning mechanism 50 has: a first ultrasonic motor which moves a first movable member 53; and a second ultrasonic motor which moves a second movable member 55. The shaft 23 is connected by the second movable member 55 and the plate spring 56. The plate spring 56 is flexibly deformed, and a direction in which a base axis LB extends is denoted as a plate thickness direction T. By moving the first movable member 53 and the second movable member 55, the inclination adjustment device 100 adjusts a first crimping tool end surface 21a and a reference plane S in a manner parallel to each other via the plate spring 56, the shaft 23, and the rocking body 22.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to an inclination adjusting device.

Background Art

[0002] Conventionally, a bonding device for bonding a workpiece to a reference stage in a semiconductor manufacturing apparatus includes an imitation device that adjusts a tool having a pressure-bonding tool end face and the reference stage in parallel. For example, Patent Document 1 discloses an imitation device including a device base having a concave hemispherical surface, and an imitation member including a swing body and a tool having a convex hemispherical surface with the same radius of curvature as the concave hemispherical surface of the device base. Further, the imitation device disclosed in Patent Document 1 includes a holding member that engages with the imitation member, and an actuator that presses the imitation member against the device base in the Z-axis direction, which is the axial direction of the device base, via the holding member. The imitation member is assembled to the device base such that the convex hemispherical surface and the concave hemispherical surface overlap and the imitation member can rotate along the concave hemispherical surface. The imitation device presses the tip surface of the tool, which is the pressure-bonding tool end face, against the upper surface of the reference stage, and rotates the imitation member along the concave hemispherical surface of the device base, thereby making the imitation member imitate the reference stage so as to be parallel. Further, the imitation device holds the imitation state of the imitation member by pressing the imitation member, which is parallel to the reference stage, against the device base by the actuator via the holding member.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In a conventional imitation device, there is a risk of generating a load on the reference stage during the imitation operation of adjusting the tip surface of the tool and the reference stage in parallel. As a device that can perform parallel adjustment without generating such a load, for example, a tilt adjustment device that adjusts the tip surface of the tool and the reference stage in parallel by driving the tool using an actuator can be considered. In the tilt adjustment device, while being provided with an actuator, it is desired to suppress the enlargement in the Z-axis direction.

[0005] The present invention has been made in view of such circumstances. An object of the present invention is to provide a tilt adjustment device that can adjust the reference surface and the end surface of the first crimping tool in parallel without generating a load on the reference surface during the parallel adjustment of the reference surface and the end surface of the first crimping tool, and that is miniaturized in the axial direction of the device base.

Means for Solving the Problem

[0006] The inclination adjustment device for solving the above problems includes a swing body having a first swing body end face and a second swing body end face that is a convex spherical surface, a shaft protruding from the second swing body end face of the swing body, and a second crimping tool end face attached to the first swing body end face, and a crimping tool having a first crimping tool end face that is an end face different from the second crimping tool end face, and a first base end face that is a concave spherical surface engaging with the second swing body end face, and a device base through which the shaft penetrates, and the device base having a second base end face that is an end face different from the first base end face, and an inclination adjustment device that adjusts the inclination of the swing body so that the first crimping tool end face and the reference plane are parallel, and a positioning mechanism that swings the swing body through the shaft by changing the position of the tip of the shaft in a plane parallel to the second base end face, and a leaf spring connected to the shaft, the positioning mechanism having a plurality of actuators and a plurality of movable members moved by each of the plurality of actuators, the leaf spring being bendable and deformable as the position of the tip of the shaft by the positioning mechanism changes, and with the direction in which the base axis, which is the axis of the device base, extends as the plate thickness direction, and at least one of the plurality of movable members and the shaft being connected by the leaf spring so that the swing body can swing relative to the device base through the shaft.

[0007] In the above-mentioned inclination adjustment device, the positioning mechanism has, as the plurality of actuators, a first actuator and a second actuator, and has, as a plurality of movable members, a first movable member and a second movable member. The first movable member and the second movable member are arranged one above the other in the extending direction of the base axis. The second movable member is arranged on the side opposite to the first base end face with the first movable member interposed therebetween. The first movable member is movable in a first direction which is a direction orthogonal to the base axis by a first actuator movable part of the first actuator. The second movable member is movable in a second direction which is a direction orthogonal to the base axis and orthogonal to the first direction by a second actuator movable part of the second actuator. The first movable member defines a first movable member insertion hole through which the shaft passes. The second movable member defines a second movable member insertion hole through which the shaft passes. The leaf spring may connect the tip of the shaft passing through the first movable member insertion hole and the second movable member insertion hole to the second movable member.

[0008] In the above-mentioned inclination adjustment device, the swing body has a swing body inner peripheral surface that defines a swing body insertion hole through which the shaft passes, a lock swing body chamber that is formed inside the swing body and communicates with the outside of the swing body through the swing body insertion hole, and a holding swing body end surface that is continuous with the swing body inner peripheral surface and is formed between the first swing body end surface and the second swing body end surface. The swing body is provided inside the device base so as to be reciprocable in the extending direction of the base axis and surrounds the shaft while being spaced apart from the outer surface of the shaft. A lock mechanism may include a lock piston and a lock shaft. The lock piston reciprocates integrally with the lock shaft, has a lock shaft engagement surface that engages with the holding swing body end surface, and surrounds the shaft while being spaced apart from the outer surface of the shaft.

[0009] In the above-mentioned inclination adjustment device, the leaf spring may be cross-shaped extending in the first direction and the second direction when viewed from the plate thickness direction. In the above-mentioned inclination adjustment device, it may have a holding block attached to the leaf spring and a bearing that supports the holding block at the tip, and the shaft may be connected to the leaf spring via the holding block and the bearing.

[0010] In the above-mentioned inclination adjustment device, each of the actuators may have an ultrasonic motor.

Advantages of the Invention

[0011] According to the present invention, when adjusting the parallelism between the reference surface and the end face of the first crimping tool, it is possible to adjust the parallelism between the reference surface and the end face of the first crimping tool without generating a load on the reference surface, and it is possible to suppress the enlargement of the device base in the axial direction in the inclination adjustment device.

Brief Description of the Drawings

[0012]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Embodiments for Carrying Out the Invention

[0013] Hereinafter, an embodiment in which the inclination adjustment device is embodied will be described with reference to FIGS. 1 to 7. <Overall Image of the Tilt Adjustment Device> As shown in FIGS. 1 and 2, the tilt adjustment device 100 includes a crimping part swing body 20, a device base 30, a locking mechanism 40, a positioning mechanism 50, and a rotation prevention mechanism 90. The tilt adjustment device 100 also includes a control device 70 and an inclination detection sensor 80.

[0014] <Crimping Part Swing Body> As shown in FIG. 2, the crimping part swing body 20 is integrally formed by a crimping tool 21 for crimping a workpiece, a swing body 22, and a shaft 23. The direction in which the crimping part axis LP of the crimping part swing body 20 extends coincides with the direction in which the crimping tool 21, the swing body 22, and the shaft 23 are arranged.

[0015] The crimping tool 21 is columnar with each of a first crimping tool end face 21a and a second crimping tool end face 21b as end faces. The axial direction of the crimping tool 21 coincides with the direction in which the crimping part axis LP extends. The first crimping tool end face 21a is the opposite face of the second crimping tool end face 21b in the direction of the crimping part axis LP. Therefore, the crimping tool 21 has the second crimping tool end face 21b and has a different end face as the first crimping tool end face 21a. The crimping tool 21 is attached to the swing body 22 such that the first crimping tool end face 21a faces a reference surface S described later and the second crimping tool end face 21b faces a first swing body end face 22a described later. That is, the crimping tool 21 has the second crimping tool end face 21b attached to the first swing body end face 22a and has a different end face as the first crimping tool end face 21a. As described later, the tilt adjustment device 100 adjusts the inclination of the swing body 22 so that the first crimping tool end face 21a and the reference surface S described later are parallel.

[0016] The swing body 22 is columnar with a first swing body end face 22a to which the crimping tool 21 is attached and has a second swing body end face 22b which is a convex spherical surface. Also, as shown in FIG. 1, a swing body side pin 94 is provided on the swing body 22.

[0017] The axial direction of the rocking body 22 coincides with the direction in which the crimping portion axis LP extends. The rocking body 22 has an inner circumferential surface 22c of the rocking body that is continuous with the second end surface 22b of the rocking body. And a rocking body insertion hole 22d defined by the inner circumferential surface 22c of the rocking body is formed in the rocking body 22. That is, the rocking body 22 has a first end surface 22a of the rocking body and a second end surface 22b of the rocking body that is a convex spherical surface.

[0018] Inside the rocking body 22, a rocking body chamber 22e for locking is formed. Among the surfaces that define the rocking body chamber 22e for locking, a holding rocking body end surface 22f that is a concave spherical surface is formed on the surface on the side of the second end surface 22b of the rocking body. The holding rocking body end surface 22f is continuous with the inner circumferential surface 22c of the rocking body and is connected to the second end surface 22b of the rocking body via the inner circumferential surface 22c of the rocking body. In other words, the rocking body 22 is continuous with the inner circumferential surface 22c of the rocking body and has a holding rocking body end surface 22f formed between the first end surface 22a and the second end surface 22b of the rocking body. That is, the rocking body chamber 22e for locking is formed inside the rocking body 22 and communicates with the outside of the rocking body 22 via the rocking body insertion hole 22d. In the rocking body chamber 22e for locking, a bottom surface 22g of the rocking body is formed on the surface facing the holding rocking body end surface 22f. A shaft fixing portion 23a of the shaft 23 is attached to the bottom surface 22g of the rocking body.

[0019] As shown in FIG. 1, the rocking body side pin 94 is provided on the outer circumferential surface of the rocking body 22. Two rocking body side pins 94 are provided side by side in the radial direction of the rocking body 22. In FIG. 1, one rocking body side pin 94 is shown, but the other rocking body side pin 94 is not shown. Each rocking body side pin 94 is columnar and extends in a direction orthogonal to the crimping portion axis LP. Each rocking body side pin 94 is inserted into a rocking body side pin hole 93b formed in the anti-rotation ring 93 as will be described later.

[0020] The shaft 23 extends from the inner bottom surface 22g of the swing body. The shaft 23 has a tip portion 23b at the end opposite to the shaft fixing portion 23a. The shaft 23 is cylindrical and extends from the shaft fixing portion 23a to the tip portion 23b. The axial direction of the shaft 23 coincides with the direction in which the crimping portion axis LP extends. Also, the direction in which the shaft 23 extends coincides with the direction from the first swing body end face 22a to the second swing body end face 22b. The shaft 23 passes through the swing body insertion hole 22d. Therefore, the swing body 22 has an inner circumferential surface 22c of the swing body that defines the swing body insertion hole 22d through which the shaft 23 passes. Also, the tip portion 23b is located outside the swing body 22.

[0021] <Device base> As shown in FIGS. 1 and 2, the device base 30 is in the shape of a column having a first base end face 30a as the first end face in the axial direction and a second base end face 30b as the second end face in the axial direction. Therefore, the device base 30 has a second base end face 30b as an end face different from the first base end face 30a. The base axis LB as the axis of the device base 30 is perpendicular to the first base end face 30a and the second base end face 30b. The direction in which the base axis LB extends is the Z-axis direction of the tilt adjustment device 100 and is also the axial direction of the device base 30. The Z-axis direction coincides with the plate thickness direction T shown in FIG. 1 and described later.

[0022] The device base 30 has a hole defining surface 30c that defines a base insertion hole 30d extending in the axial direction of the device base 30. The hole defining surface 30c connects the second base end face 30b and the first base end face 30a. Also, each of the first base end face 30a and the second base end face 30b is in a frame shape surrounding the base insertion hole 30d. As will be described later, the shaft 23 is inserted through the base insertion hole 30d. In other words, the shaft 23 passes through the device base 30.

[0023] The first base end face 30a is a concave spherical surface. The radius of curvature of the first base end face 30a is the same as the radius of curvature of the convex spherical surface of the second swing body end face 22b. And the first base end face 30a engages with the second swing body end face 22b. That is, the device base 30 has the first base end face 30a of a concave spherical surface that engages with the second swing body end face 22b. Substantially the whole of the first base end face 30a is formed by the annular porous material 31. The second base end face 30b is a flat surface.

[0024] The device base 30 has an air supply / discharge chamber 32 for an air bearing and an air port 33 for an air bearing shown in FIG. 1. The air supply / discharge chamber 32 for an air bearing communicates with the outside of the device base 30 through a plurality of holes of the annular porous material 31 and the air port 33 for an air bearing. As shown in FIG. 1, the air port 33 for an air bearing is provided on the outer surface of the device base 30. The annular porous material 31 functions as an aerostatic bearing by the air supply / discharge chamber 32 for an air bearing and the air port 33 for an air bearing.

[0025] As shown in FIGS. 2, 6, and 7, the hole defining surface 30c is formed by a cylindrical first defining surface 301c, a cylindrical second defining surface 302c, and a rectangular prism-shaped third defining surface 303c. The first defining surface 301c is located on the side of the first base end face 30a among the hole defining surfaces 30c. The second defining surface 302c is located on the side of the second base end face 30b rather than the first defining surface 301c among the hole defining surfaces 30c. The third defining surface 303c is located on the side of the second base end face 30b rather than the second defining surface 302c among the hole defining surfaces 30c. The inner diameter of the device base 30 at the second defining surface 302c is larger than the inner diameter of the device base 30 at the first defining surface 301c.

[0026] As shown in FIGS. 1 and 6, the third defining surface 303c includes four surfaces parallel to the base axis LB. Among the four surfaces included in the third defining surface 303c, two opposing surfaces are parallel, and the direction orthogonal to the base axis LB is defined as the first direction A1. Further, the direction orthogonal to the first direction A1 and orthogonal to the base axis LB is defined as the second direction A2. The third defining surface 303c includes four surfaces: two surfaces orthogonal to the axis extending in the first direction A1 and facing each other, and two surfaces orthogonal to the axis extending in the second direction A2 and facing each other.

[0027] As shown in FIGS. 2 and 7, the first defined surface 301c and the second defined surface 302c are connected by the base step surface 30e. The base step surface 30e is perpendicular to the first defined surface 301c and the second defined surface 302c, and is parallel to the second base end surface 30b. That is, the base step surface 30e faces the same direction as the second base end surface 30b.

[0028] The second defined surface 302c and the third defined surface 303c are connected by the fixed base installation surface 34. The fixed base installation surface 34 faces the same direction as the second base end surface 30b. A fixed base 51 described later is attached to the fixed base installation surface 34.

[0029] <Lock mechanism> As shown in FIGS. 2 and 7, the lock mechanism 40 includes a lock piston 41 and a lock shaft 42. The lock mechanism 40 also includes a magnet holding member 43, a magnet 44, and first to third seals 45 to 47.

[0030] The lock piston 41 has a disk-shaped piston body 411 and a male screw portion 412 extending from the central portion of the piston body 411. The axial direction of the lock piston 41 coincides with the axial direction of the device base 30. The lock piston 41 is accommodated in the base insertion hole 30d so as to be reciprocable in the axial direction of the device base 30 along the hole defining surface 30c. A lock piston insertion hole 41a is defined in the lock piston 41. The lock piston insertion hole 41a penetrates the piston body 411 and the male screw portion 412.

[0031] The outer peripheral surface of the piston body 411 faces the second defining surface 302c. A third seal 47 is provided on the outer peripheral surface of the piston body 411. The third seal 47 seals between the second defining surface 302c and the outer peripheral surface of the piston body 411. The piston body 411 has a lock piston step surface 41d that faces the base step surface 30e in the axial direction of the apparatus base 30. The lock piston step surface 41d faces the same direction as the first base end surface 30a and is parallel to the second base end surface 30b.

[0032] A lock shaft insertion hole 42a that penetrates the lock shaft 42 in the axial direction of the apparatus base 30 is defined in the lock shaft 42. The lock shaft 42 is provided with an internal thread portion 421 on the side of the second base end surface 30b in the lock shaft insertion hole 42a. The external thread portion 412 of the piston body 411 and the internal thread portion 421 of the lock shaft 42 are screwed together. A first seal 45 is held between the external thread portion 412 and the internal thread portion 421. The first seal 45 seals between the lock piston 41 and the lock shaft 42.

[0033] The lock piston 41 and the lock shaft 42 are coupled. As a result, the lock shaft 42 can reciprocate along the hole defining surface 30c in the direction of the base axis LB in conjunction with the lock piston 41. That is, the locking mechanism 40 includes a lock shaft 42 that reciprocates integrally with the lock piston 41.

[0034] A shaft 23 is inserted through the lock piston insertion hole 41a and the lock shaft insertion hole 42a. The outer peripheral surface of the shaft 23 is spaced apart from the inner peripheral surfaces of the lock piston 41 and the lock shaft 42. In other words, the outer diameter of the shaft 23 is smaller than the hole diameters of the lock piston insertion hole 41a and the lock shaft insertion hole 42a.

[0035] The axial direction of the lock shaft 42 coincides with the axial direction of the device base 30. The lock shaft 42 is accommodated in the base insertion through-hole 30d so as to be reciprocable in conjunction with the lock piston 41 in the axial direction of the device base 30 along the hole defining surface 30c. The lock shaft 42 is provided with a lock shaft extension portion 42d at the end on the side of the first base end surface 30a in the axial direction of the device base 30. The lock shaft extension portion 42d extends in a direction orthogonal to the base axis LB. The lock shaft 42 is provided with a lock shaft engagement surface 42e that is convex spherical on the surface that is continuous with the outer peripheral surface of the lock shaft 42 among the surfaces provided on the lock shaft extension portion 42d. The radius of curvature of the lock shaft engagement surface 42e coincides with the radius of curvature of the holding swing body end surface 22f that is concave spherical. That is, the lock shaft 42 has a lock shaft engagement surface 42e that engages with the holding swing body end surface 22f.

[0036] The magnet holding member 43 is fixed to the first defining surface 301c. The axial direction of the magnet holding member 43 coincides with the axial direction of the device base 30. A magnet holding member insertion through-hole 43a is defined in the magnet holding member 43. The magnet holding member 43 is located on the side of the first base end surface 30a in the axial direction of the device base 30 from the piston body 411 and has a magnet holding member end surface 43d that faces the lock piston step surface 41d. Further, the magnet holding member 43 holds the magnet 44 on the end surface side different from the magnet holding member end surface 43d in the axial direction of the device base 30.

[0037] The lock shaft 42 is inserted through the magnet holding member insertion through-hole 43a. A second seal 46 is provided on the inner peripheral surface of the magnet holding member 43. The second seal 46 seals between the inner peripheral surface of the magnet holding member 43 and the outer peripheral surface of the lock shaft 42.

[0038] The air chamber 48 for locking is defined by the second defining surface 302c, the locking piston cross-section 41d, the base cross-section 30e, and the end surface 43d of the magnet holding member. Further, as shown in FIG. 1, a locking port 49 that communicates the air chamber 48 for locking with the outside of the apparatus base 30 is provided on the outer surface of the apparatus base 30.

[0039] <Positioning mechanism> The positioning mechanism 50 will be described with reference to FIGS. 1, 2, 3, and 6. As shown in FIG. 3, the positioning mechanism 50 includes a fixed base 51, two first ultrasonic motors 52 as a first actuator, and a first movable member 53. Further, the positioning mechanism 50 includes two second ultrasonic motors 54 as a second actuator and a second movable member 55. Further, the positioning mechanism 50 includes a leaf spring 56, a holding block 57, and a bearing 58. That is, the positioning mechanism 50 has the first ultrasonic motor 52 and the second ultrasonic motor 54 as a plurality of actuators, and has the first movable member 53 and the second movable member 55 as a plurality of movable members.

[0040] The fixed base 51 is plate-shaped and extends in a direction orthogonal to the base axis LB. The fixed base 51 has a first base surface 51a and a second base surface 51b that are opposite surfaces in the axial direction of the apparatus base 30. The first base surface 51a is the surface on the side of the first base end surface 30a, and the second base surface 51b is the surface on the side of the second base end surface 30b. A fixed base insertion hole 51c that opens in the axial direction of the apparatus base 30 is formed in the fixed base 51. The hole diameter of the fixed base insertion hole 51c is larger than the outer diameter of the shaft 23. Further, the fixed base 51 is attached to the fixed base installation surface 34 with the first base surface 51a facing the fixed base installation surface 34.

[0041] Each first ultrasonic motor 52 includes a first drive unit 52a and a first motor shaft 52b as a first actuator movable part. The first motor shaft 52b is a shaft driven by the first drive unit 52a. A first movable member 53 is attached to each first motor shaft 52b. Each first ultrasonic motor 52 can move the first movable member 53 in the axial direction of the first motor shaft 52b by the first motor shaft 52b driven by the first drive unit 52a.

[0042] Each first ultrasonic motor 52 is provided on the second base surface 51b of the fixed base 51. Each first ultrasonic motor 52 is provided on the second base surface 51b so as to be able to move the first movable member 53 in the first direction A1. In other words, each first ultrasonic motor 52 is provided on the second base surface 51b such that the axial direction of the first motor shaft 52b is the first direction A1. The two first ultrasonic motors 52 are arranged side by side in the second direction A2 with the fixed base insertion hole 51c interposed therebetween on the second base surface 51b. The first motor shafts 52b of each of the two first ultrasonic motors 52 are driven integrally.

[0043] The first movable member 53 is plate-shaped and extends in a direction orthogonal to the base shaft LB. The first movable member 53 has a first movable member lower surface 53c facing the first base end surface 30a side and a first movable member upper surface 53d facing the second base end surface 30b side as surfaces orthogonal to the base shaft LB. A first movable member insertion hole 53a that opens in the extending direction of the base shaft LB is defined in the first movable member 53. The hole diameter of the first movable member insertion hole 53a is larger than the outer diameter of the shaft 23. Each of the two first motor installation parts 53e formed on the first movable member lower surface 53c has each of the two first motor shafts 52b attached thereto. That is, the first movable member 53 can be moved in the first direction A1, which is a direction orthogonal to the base shaft LB, by the first motor shaft 52b of the first ultrasonic motor 52.

[0044] The first encoder 61 is provided on the second base surface 51b. The first encoder 61 measures the moving distance of the first movable member 53 in the first direction A1 with respect to the fixed base 51. In other words, the first encoder 61 measures the distance between each first motor installation part 53e and the corresponding first drive part 52a. The first encoder 61 is connected to the control device 70 shown in FIG. 1 by wireless or wired means so as to be able to transmit the result of the measurement to the control device 70.

[0045] Each second ultrasonic motor 54 includes a second drive part 54a and a second motor shaft 54b as a second actuator movable part. The second motor shaft 54b is a shaft driven by the second drive part 54a. A second movable member 55 is attached to each second motor shaft 54b. Each second ultrasonic motor 54 can move the second movable member 55 in the axial direction of the second motor shaft 54b by the second motor shaft 54b driven by the second drive part 54a.

[0046] Each second ultrasonic motor 54 is provided on the upper surface 53d of the first movable member. Each second ultrasonic motor 54 is provided on the upper surface 53d of the first movable member so as to be able to move the second movable member 55 in the second direction A2. In other words, each second ultrasonic motor 54 is provided on the upper surface 53d of the first movable member such that the axial direction of the second motor shaft 54b is the second direction A2. The two second ultrasonic motors 54 are arranged side by side in the first direction A1 with the first movable member insertion hole 53a therebetween on the upper surface 53d of the first movable member. The second motor shafts 54b of each of the two second ultrasonic motors 54 are driven integrally.

[0047] The second movable member 55 is plate-shaped and extends in a direction orthogonal to the base axis LB. The second movable member 55 has, as a surface orthogonal to the base axis LB, a second movable member lower surface 55c facing the first base end surface 30a side and a second movable member upper surface 55d facing the second base end surface 30b side. A second movable member insertion hole 55a that opens in the extending direction of the base axis LB is defined in the second movable member 55. The aperture diameter of the second movable member insertion hole 55a is larger than the outer diameter of the shaft 23. Each of the two second motor installation portions 55f formed on the second movable member lower surface 55c has attached thereto each of the two second motor shafts 54b. That is, the second movable member 55 is movable in the second direction A2, which is a direction orthogonal to the base axis LB and a direction orthogonal to the first direction A1, by the second motor shaft 54b of the second ultrasonic motor 54.

[0048] A movable member groove 55e that is recessed from the second movable member upper surface 55d is formed in the second movable member 55. The movable member groove 55e extends in the first direction A1 and the second direction A2 on the second movable member upper surface 55d.

[0049] The second encoder 62 is provided on the first movable member upper surface 53d and measures the moving distance of the second movable member 55 relative to the first movable member 53 in the second direction A2. In other words, the second encoder 62 measures the distance between each second motor installation portion 55f and the corresponding second drive portion 54a. The second encoder 62 is connected wirelessly or by wire to the control device 70 shown in FIG. 1 so as to be able to transmit the result of the measurement to the control device 70.

[0050] From the above, each first ultrasonic motor 52, the first movable member 53, each second ultrasonic motor 54, and the second movable member 55 included in the positioning mechanism 50 are arranged along the base axis LB. That is, in the positioning mechanism 50, the first movable member 53 and the second movable member 55 are arranged overlappingly in the axial direction of the apparatus base 30, and the second movable member 55 is arranged on the side opposite to the first base end surface 30a with the first movable member 53 interposed therebetween.

[0051] As shown in FIG. 1, the leaf spring 56 is plate-shaped and extends in a direction orthogonal to the base axis LB. Further, the leaf spring 56 has the axial direction of the base axis LB, that is, the axial direction of the apparatus base 30, as the plate thickness direction T. The leaf spring 56 is in the form of a thin plate with a thickness of 0.1 to 0.3 [mm] in the plate thickness direction T.

[0052] The leaf spring 56 is composed of first to fourth leaf spring forming members B1 to B4 and a leaf spring annular portion 56c. The longitudinal direction of each of the first leaf spring forming member B1 and the third leaf spring forming member B3 is the first direction A1, and the first leaf spring forming member B1 and the third leaf spring forming member B3 are aligned in a straight line in the first direction A1. Also, the longitudinal direction of each of the second leaf spring forming member B2 and the fourth leaf spring forming member B4 is the second direction A2, and the second leaf spring forming member B2 and the fourth leaf spring forming member B4 are aligned in a straight line in the second direction A2. That is, the leaf spring 56 is in a cross shape extending in the first direction A1 and the second direction A2 when viewed from the plate thickness direction T. Each of the first to fourth leaf spring forming members B1 to B4 extends from the leaf spring annular portion 56c and is continuous with each other via the leaf spring annular portion 56c.

[0053] A leaf spring hole 56b that opens in the plate thickness direction T is formed in the leaf spring 56. The first to fourth leaf spring forming members B1 to B4 are arranged so as to surround the leaf spring hole 56b. Also, the leaf spring annular portion 56c forms a ring surrounding the leaf spring hole 56b. Each of the first to fourth leaf spring forming members B1 to B4 has a fixed end portion 56d as an end portion different from the end portion on the side of the leaf spring annular portion 56c in the longitudinal direction. Each of the first to fourth leaf spring forming members B1 to B4 is attached to the second movable member 55 by the fixed end portion 56d being fixed to the upper surface 55d of the second movable member by a leaf spring fixing member 59. That is, the leaf spring 56 is attached to the second movable member 55.

[0054] As shown in FIGS. 1 and 6, the leaf spring 56 is attached to the second movable member 55 such that each of the first to fourth leaf spring forming members B1 to B4 is separated from the inner bottom surface of the movable member groove 55e except for the fixed end portion 56d and covers the movable member groove 55e. In other words, the leaf spring 56 contacts the second movable member 55 only at the fixed end portion 56d provided in each of the first to fourth leaf spring forming members B1 to B4. Further, the upper surface 55d of the second movable member is a surface orthogonal to the base shaft LB. That is, the leaf spring 56 is attached to the second movable member 55 so as to be elastically deformable in the axial direction of the apparatus base 30.

[0055] The holding block 57 is disposed on the surface facing the first base end surface 30a side among the surfaces in the plate thickness direction T of the leaf spring 56 and is attached to the leaf spring 56 by a leaf spring fixing member 59. The axial direction of the holding block 57 coincides with the extending direction of the crimping portion shaft LP. Further, a holding block insertion hole 57a is defined in the holding block 57. The outer diameter of the holding block 57 is smaller than the hole diameter of the second movable member insertion hole 55a.

[0056] The outer ring of the bearing 58 is fixed to the inner peripheral surface of the holding block 57 that defines the holding block insertion hole 57a. Further, the tip end portion 23b of the shaft 23 is inserted through the inner ring of the bearing 58, and the inner ring of the bearing 58 is fixed to the tip end portion 23b of the shaft 23 by a fixing member 24. The axial direction of the bearing 58 coincides with the extending direction of the crimping portion shaft LP. Between the inner ring and the outer ring of the bearing 58 is a rolling ball bearing with rolling elements 58a as balls.

[0057] <Anti-rotation mechanism> As shown in FIGS. 1 and 2, the anti-rotation mechanism 90 includes two side plates 91, a base-side pin 92, an anti-rotation ring 93, and a swing body-side pin 94.

[0058] Each side plate 91 is attached to the outer surface of the apparatus base 30 on the side of the first base end face 30a. The two side plates 91 are provided so as to face each other with the apparatus base 30 and the crimping portion swing body 20 interposed therebetween. Further, the two side plates 91 are arranged in the second direction A2. Each side plate 91 is plate-shaped having a plate thickness direction in the second direction A2. Each side plate 91 is provided with a base-side pin 92 on the surface facing the crimping portion swing body 20. Each base-side pin 92 is columnar extending from the side plate 91 toward the outer surface of the swing body 22.

[0059] The anti-rotation ring 93 is annular having an inner peripheral surface surrounding the swing body 22. The inner peripheral surface of the anti-rotation ring 93 is separated from the outer peripheral surface of the swing body 22 and the outer peripheral surface is separated from each side plate 91. As shown in FIG. 2, the swing body 22 has a portion bulging in a direction orthogonal to the crimping portion axis LP on the side of the first swing body end face 22a. The anti-rotation ring 93 is placed on and supported by the bulging portion of the swing body 22.

[0060] As shown in FIGS. 1 and 2, the anti-rotation ring 93 is formed with a base-side pin hole 93a and a swing body-side pin hole 93b. As shown in FIG. 2, two base-side pin holes 93a are formed in the anti-rotation ring 93 so as to be arranged in the second direction A2. As shown in FIG. 1, two swing body-side pin holes 93b are formed in the anti-rotation ring 93 so as to be arranged in the first direction A1. However, in FIG. 1, only one of the swing body-side pin holes 93b is shown and the other swing body-side pin hole 93b is not shown. Each base-side pin hole 93a is a groove-shaped opening in the direction from the first swing body end face 22a toward the second swing body end face 22b and penetrating in the radial direction of the anti-rotation ring 93. Each swing body-side pin hole 93b is a groove-shaped opening in the direction from the first swing body end face 22a toward the second swing body end face 22b and penetrating in the radial direction of the anti-rotation ring 93.

[0061] Each base-side pin hole 93a has a base-side pin 92 provided on the facing side plate 91 inserted therein. The outer peripheral surface of each base-side pin 92 is in contact with the surface among the surfaces defining each base-side pin hole 93a that is located in the circumferential direction of the anti-rotation ring 93.

[0062] Each swing body-side pin hole 93b has a swing body-side pin 94 inserted therein. The outer peripheral surface of each swing body-side pin 94 is in contact with the surface defining the swing body-side pin hole 93b in the circumferential direction of the anti-rotation ring 93.

[0063] Each base-side pin 92 is fixed to the apparatus base 30 by the side plate 91. The rotation of the anti-rotation ring 93 in the circumferential direction is restricted by the base-side pin 92 inserted into the base-side pin hole 93a. The swing body 22 is interlocked with the anti-rotation ring 93 by the swing body-side pin 94 inserted into the swing body-side pin hole 93b. That is, the swing body 22, together with the anti-rotation ring 93, has its rotation in the circumferential direction of the anti-rotation ring 93 restricted. In other words, the anti-rotation mechanism 90 restricts the rotation of the crimping portion swing body 20 having the crimping portion shaft LP as the rotation axis.

[0064] <Positional relationship between the crimping portion swing body, the apparatus base, and the positioning mechanism> With reference to FIGS. 1, 2, and 7, the relationship among the crimping portion swing body 20, the apparatus base 30, and the positioning mechanism 50 will be described.

[0065] The positioning mechanism 50 is housed in the space defined by the third defining surface 303c. A fixed base 51 provided in the positioning mechanism 50 is attached to the fixed base installation surface 34 formed on the hole defining surface 30c. That is, the positioning mechanism 50 is fixed to the apparatus base 30 by the fixed base 51.

[0066] The crimping portion swing body 20 is attached to the apparatus base 30 by inserting the shaft 23 through the base insertion hole 30d such that the first base end surface 30a and the second swing body end surface 22b face each other. The second swing body end surface 22b also faces the annular porous material 31.

[0067] The shaft 23 provided in the crimping part swing body 20 is inserted into the lock piston insertion hole 41a and the lock shaft insertion hole 42a. Further, the shaft 23 is inserted so that the tip end part 23b protrudes from the lock piston 41. The outer peripheral surface of the shaft 23 is separated from the inner peripheral surfaces of the lock piston 41 and the lock shaft 42. Therefore, the lock shaft 42 interlocks with the lock piston 41 and surrounds the shaft 23 while being separated from the outer peripheral surface of the shaft 23.

[0068] The lock shaft extension part 42d is accommodated in the locking swing body chamber 22e so that the holding swing body end face 22f and the lock shaft engagement face 42e face each other. That is, the lock shaft 42 is inserted through the swing body insertion hole 22d. Further, the lock shaft 42 is surrounded by the inner peripheral surface of the swing body 22c so that the outer peripheral surface of the lock shaft 42 and the inner peripheral surface of the swing body 22c are separated from each other in the swing body insertion hole 22d.

[0069] Therefore, in the swing body insertion hole 22d, the inner peripheral surface of the swing body 22c and the outer peripheral surface of the lock shaft 42 are separated from each other, and the inner peripheral surfaces of the lock shaft 42 and the lock piston 41 and the outer peripheral surface of the shaft 23 are separated from each other. In other words, the crimping part swing body 20 projects the swing body 22 from the base insertion hole 30d so as to be swingable with respect to the lock piston 41 and the lock shaft 42. The second swing body end face 22b is swingable along the first base end face 30a.

[0070] The shaft 23 is inserted through the fixed base insertion hole 51c, the first movable member insertion hole 53a, and the second movable member insertion hole 55a in the axial direction of the device base 30 and on the side of the second base end face 30b with respect to the lock piston 41. In other words, the tip 23b of the shaft 23 penetrates the fixed base insertion hole 51c, the first movable member insertion hole 53a, and the second movable member insertion hole 55a. Further, the tip 23b of the shaft 23 is inserted inside the bearing 58 and is attached to the bearing 58. That is, the shaft 23 supports the holding block 57 via the bearing 58 at the tip 23b. As described above, the holding block 57 is connected to the leaf spring 56. That is, the shaft 23 is connected to the leaf spring 56 via the holding block 57 and the bearing 58. In other words, the tilt adjustment device 100 has a leaf spring 56 connected to the shaft 23.

[0071] As described above, the leaf spring 56 is attached to the second movable member 55 by fixing the fixed end portions 56d provided in each of the first to fourth leaf spring forming materials B1 to B4 to the upper surface 55d of the second movable member. That is, the leaf spring 56 connects the tip 23b of the shaft 23 penetrating the first movable member insertion hole 53a and the second movable member insertion hole 55a to the second movable member 55.

[0072] As described above, the crimping part rocking body 20 inserts the shaft 23 through the base insertion hole 30d so that the rocking body 22 can rock with respect to the first base end face 30a. That is, the leaf spring 56 connects at least one of the first movable member 53 and the second movable member 55 as a plurality of movable members to the shaft 23 so that the rocking body 22 can rock with respect to the device base 30 via the shaft 23. In the present embodiment, the leaf spring 56 connects the shaft 23 and the second movable member 55.

[0073] <Control Device and Tilt Detection Sensor> The control device 70 controls the positioning mechanism 50. As shown in FIG. 1, the control device 70 includes a motor control unit 71 that drives the first and second ultrasonic motors 52 and 54, and a movement amount calculation unit 72.

[0074] The control device 70 includes a processor and a storage unit (not shown). The processor included in the control device 70 is, for example, a CPU (Central Processing Unit) or an MPU (Micro Processing Unit). The storage unit included in the control device 70 is, for example, a ROM (Read-Only Memory) or a RAM (Random Access Memory). The processor included in the control device 70 functions as a motor control unit 71 and a movement amount calculation unit 72 by executing instructions included in the program stored in the storage unit.

[0075] As shown in FIGS. 1, 4, and 5, in order for the end face 21a of the first crimping tool and the reference plane S to be parallel, the movement amount calculation unit 72 determines, as target values, the angle α by which the crimping part swing body 20 tilts with respect to the apparatus base 30 and the azimuth angle θ indicating the tilting direction. The determination is made based on the parallelism information transmitted by the inclination detection sensor 80. The parallelism information includes the angle α and the azimuth angle θ at the measurement time of the end face 21a of the first crimping tool and the reference plane S. The movement amount calculation unit 72 calculates the distance by which the first movable member 53 is moved in the first direction A1 by the first ultrasonic motor 52 based on the parallelism information and the target values. Further, the movement amount calculation unit 72 calculates the distance by which the first movable member 53 is moved in the second direction A2 by the second ultrasonic motor 54 based on the parallelism information and the target values. The distances for moving the first and second movable members 53 and 55 are obtained using the following equations (1) and (2).

[0076] X 2 =X 1 +K·L{sinα 2 cosθ 2 -sinα 1 cosθ 1}…Equation (1) Y 2 =Y 1 +K·L{sinα 2 sinθ 2 -sinα 1 sinθ 1}…Equation (2) X 1is the distance in the first direction A1 of the first movable member 53 with respect to the fixed base 51 in a posture where the crimping portion axis LP and the base axis LB coincide. Y 1 is the distance in the second direction A2 of the second movable member 55 with respect to the first movable member 53 in a posture where the crimping portion axis LP and the base axis LB coincide. Also, X 2 is the distance in the first direction A1 of the first movable member 53 with respect to the fixed base 51 in a situation where the crimping portion swing body 20 has an inclined posture at a target value with respect to the apparatus base 30. Y 2 is the distance in the second direction A2 of the second movable member 55 with respect to the first movable member 53 in a situation where the crimping portion swing body 20 has an inclined posture at a target value with respect to the apparatus base 30. X 1 And Y 1 Each of and Y

[0077] As shown in FIG. 4, the angle α is the angle formed by the crimping portion axis LP and the base axis LB. α 1 is the angle α measured by the inclination detection sensor 80. Also, as shown in FIG. 5, the azimuth angle θ is based on the origin on the base axis LB and with the first direction A1 as the reference axis, and indicates the direction in which the crimping portion axis LP inclines in a plane orthogonal to the base axis LB. θ 1 is the azimuth angle θ measured by the inclination detection sensor 80. α 2 is the target value of the angle formed by the crimping portion axis LP and the base axis LB. θ 2 is the target value of the azimuth angle θ which is the direction in which the crimping portion axis LP inclines in a plane orthogonal to the base axis LB. K is a proportional gain value and is a proportional constant given in advance. L is the distance from the swing center of the swing body 22 to the center of the tip portion 23b.

[0078] Based on the measurement result by the inclination detection sensor 80, the movement amount calculation unit 72 calculates the movement amounts of the first motor installation portion 53e and the second motor installation portion 55f required for the reference plane S and the end face 21a of the first crimping tool to be parallel. The measurement result includes information on the inclination of the end face 21a of the first crimping tool with respect to the reference plane S.

[0079] The inclination detection sensor 80 is a sensor that detects the parallelism between the end face 21a of the first crimping tool and the reference plane S. The inclination detection sensor 80 is, for example, a plurality of laser sensors attached to a plurality of locations on the crimping part swing body 20. The inclination detection sensor 80 measures the inclination of the end face 21a of the first crimping tool with respect to the reference plane S by measuring the distance between the end face 21a of the first crimping tool and the reference plane S at a plurality of locations with the laser sensor.

[0080] The inclination detection sensor 80 is electrically connected to the control device 70, and detects the parallelism between the end face 21a of the first crimping tool and the reference plane S, and transmits parallelism information regarding the parallelism to the control device 70. That is, the control device 70 includes a motor control unit 71, and based on the result measured by the inclination detection sensor 80, the motor control unit 71 drives each of the first and second ultrasonic motors 52 and 54 so that the reference plane S and the end face 21a of the first crimping tool are parallel.

[0081] <Operation of the inclination adjustment device related to the realization of the parallel posture> The operation of the inclination adjustment device 100 will be described with reference to FIGS. 1, 2, and 4 to 7. As shown in FIG. 2, the inclination adjustment device 100 takes an initial position. The inclination adjustment device 100 is attached to, for example, a transport device (not shown). The inclination adjustment device 100 is at a position where the end face 21a of the first crimping tool faces the reference plane S and the crimping tool 21 is separated from the reference plane S. In the initial position, the crimping part axis LP of the crimping part swing body 20 and the base axis LB of the device base 30 coincide. Also, the reference plane axis LS extending in the direction orthogonal to the reference plane S is not parallel to the crimping part axis LP and the base axis LB.

[0082] In the initial position, the leaf spring 56 has each of the first to fourth leaf spring forming materials B1 to B4 in its natural length. In other words, in the initial position, the leaf spring 56 does not bias the tip 23b of the shaft 23 in any direction.

[0083] Also, at the initial position, a pressure supply source (not shown) sucks air from the locking air chamber 48 through the locking port 49, making the supply pressure to the locking air chamber 48 negative pressure.

[0084] As shown in FIG. 2, as a result of making the supply pressure negative pressure, the locking piston 41 is in a position where a part of the locking piston cross-section 41d abuts against the base cross-section 30e in the axial direction of the apparatus base 30. Also, the locking shaft extension part 42d is in a position where the holding swing body end face 22f and the locking shaft engagement face 42e are separated from each other in the axial direction of the apparatus base 30.

[0085] During the inclination adjustment by the inclination adjustment device 100, the inclination detection sensor 80 measures the inclination of the first crimping tool end face 21a with respect to the reference plane S. The inclination detection sensor 80 transmits the inclination of the first crimping tool end face 21a with respect to the reference plane S as current angle information to the control device 70. The control device 70 receives the current angle information transmitted from the inclination detection sensor 80. The control device 70 determines, as a target value, the inclination of the crimping part swing body 20 with respect to the apparatus base 30 in a posture where the reference plane S and the first crimping tool end face 21a are parallel, by means of the movement amount calculation part 72. Also, the movement amount calculation part 72 of the control device 70 uses equations (1) and (2) to determine the amount by which each of the first and second movable members 53 and 55 is to be moved in each of the first and second ultrasonic motors 52 and 54 in order to achieve the target value.

[0086] When the movement amount is determined, a pressure supply source (not shown) supplies air to the air spindle port 33. The supplied air is supplied between the first base end face 30a and the second swing body end face 22b through the air supply / discharge chamber 32 for the air spindle and a plurality of holes of the annular porous material 31. Therefore, the annular porous material 31 receives the supply of air from the air spindle port 33. Due to the supply of this air, the gap between the second swing body end face 22b and the first base end face 30a is pressurized. As a result, the second swing body end face 22b moves away from the first base end face 30a. At the same time, the swing body 22 is attracted toward the first base end face 30a by the attracting magnetic force of the magnet 44 held by the magnet holding member 43. As a result, the second swing body end face 22b and the first base end face 30a form a slight gap and maintain the gap. Therefore, the device base 30 supports the swing body 22 so as to be swingable while being separated from the first base end face 30a.

[0087] As shown in FIGS. 1 and 3, based on the determination by the movement amount calculation unit 72, the motor control unit 71 drives the first drive unit 52a to realize the movement of each of the required first movable members 53. Further, based on the determination by the movement amount calculation unit 72, the motor control unit 71 drives the second drive unit 54a to realize the movement of each of the required second movable members 55.

[0088] That is, the driving of the first ultrasonic motor 52 by the motor control unit 71 leads to the movement of the first movable member 53 in the first direction A1. The movement of the first movable member 53 in the first direction A1 leads to the movement of the tip end portion 23b of the shaft 23 in the first direction A1 through the second movable member 55 and the leaf spring 56.

[0089] Furthermore, the driving of the second ultrasonic motor 54 guides the movement of the second movable member 55 in the second direction A2. The movement of the second movable member 55 guides, via the leaf spring 56, the movement of the tip 23b of the shaft 23 in the second direction A2. As described above, each of the first direction A1 and the second direction A2 is orthogonal to each other and orthogonal to the base axis LB. Therefore, the motor control unit 71 moves the tip 23b of the shaft 23 within the plane orthogonal to the base axis LB by driving each of the first and second ultrasonic motors 52, 54.

[0090] Also, the movement of the tip 23b guides, via the shaft 23, the movement of the swing body 22 in the direction orthogonal to the base axis LB. However, the swing body 22 has a second swing body end face 22b that engages with the first base end face 30a. As a result, the movement of the tip 23b guides, via the shaft 23, the swing of the swing body 22 with respect to the device base 30. In other words, the positioning mechanism 50 swings the swing body 22 via the shaft 23 by changing the position of the tip 23b of the shaft 23 within the plane parallel to the second base end face 30b.

[0091] As a result of the swing of the swing body 22, a parallel posture between the first crimping tool end face 21a and the reference plane S is realized. Therefore, the inclination adjustment device 100 drives the positioning mechanism 50 based on the target value determined by the control device 70 and inclines the swing body 22 with respect to the device base 30, thereby realizing a parallel posture between the first crimping tool end face 21a and the reference plane S. The inclination adjustment device 100 adjusts the inclination of the swing body 22 so that the reference plane S and the first crimping tool end face 21a are parallel while swinging the second swing body end face 22b along the first base end face 30a.

[0092] Therefore, the inclination adjustment device 100 performs parallel adjustment between the first crimping tool end face 21a and the reference plane S by driving the positioning mechanism 50 based on the control device 70 and the inclination detection sensor 80. When the shaft 23 is oscillated via the tip 23b by the positioning mechanism 50 and the swing body 22 is oscillated, air is supplied from the air shaft receiving port 33. By supplying air from the air shaft receiving port 33, the swing body 22 assumes a desired inclination without bringing the second swing body end face 22b into sliding contact with the first base end face 30a. Further, when the shaft 23 is oscillated via the tip 23b by the positioning mechanism 50 and the swing body 22 is oscillated, the rotation prevention mechanism 90 restricts the rotation of the crimping portion swing body 20 having the crimping portion axis LP as the rotation axis.

[0093] The movement of the tip 23b in the plane parallel to the second base end face 30b by the positioning mechanism 50 guides the oscillation of the swing body 22 via the shaft 23. The oscillation guides the inclination of the crimping portion axis LP with respect to the base axis LB. That is, along with the oscillation, the shaft 23 also oscillates. The oscillation of the shaft 23 inclines the axial directions of the holding block 57 and the bearing 58 from the base axis LB and guides the bending deformation of the leaf spring 56.

[0094] For example, as shown in FIGS. 6 and 7, assume a situation where the shaft 23 is inclined in the second direction A2 by the second movable member 55. In the first direction A1, one direction side is defined as the + side and the other direction side is defined as the - side. Similarly, in the second direction A2, one direction side is defined as the + side and the other direction side is defined as the - side. In this situation, the tip 23b moves in the direction from the fourth leaf spring forming member B4 toward the second leaf spring forming member B2, and the crimping portion rocker 20 is inclined toward the + side in the second direction A2. The inclination of the crimping portion rocker 20 guides the movement of the tip 23b in the axial direction of the apparatus base 30. The movement of the tip 23b causes the second leaf spring forming member B2 to deflect in the direction approaching the inner bottom surface of the movable member groove 55e and the fourth leaf spring forming member B4 to deflect in the direction away from the inner bottom surface of the movable member groove 55e. The second leaf spring forming member B2 that deflects in the direction approaching the inner bottom surface of the movable member groove 55e is accommodated in the movable member groove 55e. The bending deformation of the leaf spring 56 described above occurs regardless of the direction in which the tip 23b moves. However, the direction and magnitude of the bending deformation change depending on the direction in which the tip 23b moves. For example, among the first to fourth leaf spring forming members B1 to B4, the leaf spring forming member in which the bending deformation occurs differs depending on the direction in which the tip 23b moves. That is, the leaf spring 56 can be bent and deformed as the position of the tip 23b of the shaft 23 changes by the positioning mechanism 50. Therefore, the bending deformation in the leaf spring 56 absorbs the movement of the tip 23b in the direction along the base axis LB accompanying the rocking of the rocker 22 and the inclination of the shaft 23.

[0095] Even when the crimping portion rocker 20 is inclined toward the - side in the second direction A2, the leaf spring 56 absorbs the movement of the tip 23b in the direction along the base axis LB. Further, although not shown, even when the crimping portion rocker 20 is inclined toward the + side or the - side in the first direction A1, the leaf spring 56 absorbs the movement of the tip 23b in the direction along the base axis LB.

[0096] <Operation of the inclination adjustment device for maintaining the parallel posture> Next, the operation for the tilt adjustment device 100 to maintain the posture in which the end face 21a of the first crimping tool is parallel to the reference plane S will be described.

[0097] After the end face 21a of the first crimping tool becomes parallel to the reference plane S, a pressure supply source (not shown) stops the supply of air to the air shaft receiving port 33 and sucks air from the air shaft receiving port 33. Therefore, the annular porous material 31 receives the discharge of air from the air shaft receiving port 33. That is, the pressure supply source creates a negative pressure in the air shaft receiving air supply / discharge chamber 32 by performing vacuum suction through the air shaft receiving port 33.

[0098] As shown in FIG. 7, due to the reduced pressure, the second end face 22b of the swing body 22 contacts and is adsorbed to the first base end face 30a of the device base 30 while maintaining the parallel posture with respect to the reference plane S of the end face 21a of the first crimping tool. As a result of the reduced pressure, the tilt adjustment device 100 performs a temporary lock to maintain the parallel posture of the end face 21a of the first crimping tool with respect to the reference plane S. That is, the tilt adjustment device 100 fixes the inclined posture of the swing body 22 by performing vacuum suction through the air shaft receiving port 33.

[0099] After the temporary locking is performed by reducing the pressure in the air supply and discharge chamber 32 for the air spindle, the pressure source switches the pressure of the air supplied to the locking port 49 from negative pressure to positive pressure. This supply leads to the pressurization of the locking air chamber 48 that communicates with the locking port 49. When the locking air chamber 48 is pressurized, the locking piston 41 and the locking shaft 42 move in the direction from the first base end face 30a to the second base end face 30b as shown by the two-dot chain line in FIG. 7. By this movement, in the locking swing body chamber 22e, the locking shaft 42 presses the locking shaft engagement surface 42e against the holding swing body end face 22f. By this pressing, the locking shaft 42 and the swing body 22 are strongly engaged. As a result, the crimping part swing body 20 is pressed in the direction from the first base end face 30a to the second base end face 30b. The swing body 22 of the crimping part swing body 20 is in contact with the first base end face 30a at the second swing body end face 22b due to the temporary locking. That is, this pressurization generates a vertical resistance force against this pressing at the contact surface between the second swing body end face 22b and the first base end face 30a. This vertical resistance force leads to a static frictional force that prevents the swing body 22 from swinging with respect to the apparatus base 30 at this contact surface. Thereby, the swinging of the crimping part swing body 20 with respect to the apparatus base 30 is restricted. As a result of this pressurization, the inclination adjustment device 100 performs this main locking to maintain the parallel posture with respect to the reference plane S of the first crimping tool end face 21a in addition to the temporary locking. Therefore, the inclination adjustment device 100 maintains the parallel posture between the crimping part swing body 20 and the reference plane S by the temporary locking and the main locking.

[0100] [Effects of the Present Embodiment] The effects of the present embodiment will be described together with the operations. (1) The inclination adjustment device 100 includes a positioning mechanism 50 having first and second ultrasonic motors 52 and 54. The positioning mechanism 50 changes the position of the tip 23b of the shaft 23, and thereby swings the swing body 22 and the crimping tool 21 via the shaft 23. The inclination adjustment device 100 adjusts the posture of the crimping part swing body 20 so that the first crimping tool end face 21a and the reference plane S become parallel by this swing. As a result, the inclination adjustment device 100 can adjust the first crimping tool end face 21a and the reference plane S to be parallel without generating a load on the reference plane S when adjusting the parallelism between the reference plane S and the first crimping tool end face 21a.

[0101] The crimping part swing body 20 and the second movable member 55 included in the positioning mechanism 50 are connected by a leaf spring 56. The plate thickness direction T of the leaf spring 56 coincides with the axial direction of the device base 30, and the leaf spring 56 is a thin plate. Therefore, the inclination adjustment device 100 can suppress the increase in size in the direction of the base axis LB while including the positioning mechanism 50 that adjusts the posture of the crimping part swing body 20 by connecting the crimping part swing body 20 and the positioning mechanism 50 with the leaf spring 56.

[0102] (2) When the shaft 23 is inclined with respect to the base axis LB by the positioning mechanism 50, the leaf spring 56 bends in the plate thickness direction T to absorb the displacement in the axial direction of the device base 30 generated at the tip 23b of the shaft 23. As a result, the inclination adjustment device 100 can guide the inclination of the shaft 23 without generating wear when the shaft 23 is inclined by using the leaf spring 56. Therefore, the inclination adjustment device 100 can adjust the inclination of the crimping part swing body 20 with high precision.

[0103] (3) The inclination adjustment device 100 uses a thin plate-shaped leaf spring 56 that is easily elastically deformed. For example, compared with the case of using a leaf spring 56 having high rigidity and being difficult to elastically deform, the thrust required for the first and second ultrasonic motors 52 and 54 that move the tip 23b can be reduced. Therefore, the inclination adjustment device 100 can reduce the size of the first and second ultrasonic motors 52 and 54 and reduce the size of the inclination adjustment device 100 by using a thin plate-shaped leaf spring 56 that is easily elastically deformed.

[0104] (4) In the positioning mechanism 50, the fixed base 51, the first ultrasonic motor 52, the first movable member 53, the second ultrasonic motor 54, and the second movable member 55 are arranged so as to overlap in the axial direction of the apparatus base 30. That is, compared with the case where the first ultrasonic motor 52 and the first movable member 53, and the second ultrasonic motor 54 and the second movable member 55 are arranged in a direction orthogonal to the base axis LB, the tilt adjustment device 100 is miniaturized in the direction orthogonal to the base axis LB.

[0105] Also, the shaft 23 is inserted through the fixed base insertion hole 51c, the first movable member insertion hole 53a, and the second movable member insertion hole 55a. The tip 23b of the shaft 23 is connected to the second movable member 55 by a leaf spring 56 so that the shaft 23 can swing in the base insertion hole 30d. Further, the positioning mechanism 50 is attached to the fixed base installation surface 34 by the fixed base 51 and is housed in the base insertion hole 30d. That is, in the base insertion hole 30d, the tilt adjustment device 100 moves the tip 23b by the positioning mechanism 50 and swings the shaft 23 and the swing body 22. As a result, the tilt adjustment device 100 can be miniaturized in the direction of the base axis LB compared with the case where the positioning mechanism 50 is provided on the second base end face 30b.

[0106] (5) When the first movable member insertion hole 53a is not formed in the first movable member 53 and the second movable member insertion hole 55a is not formed in the second movable member 55, the positioning mechanism 50 is housed in the base insertion hole 30d and is provided on the second base end face 30b. In this case, the leaf spring 56 is connected between the first base end face 30a and the second base end face 30b to the holding block 57 and the second movable member 55. That is, the attachment of the leaf spring 56 to the holding block 57 and the second movable member 55 is performed in the base insertion hole 30d. This makes the attachment difficult. Further, in this case, it is necessary to secure a space in the base insertion hole 30d sufficient to perform the attachment. This leads to an increase in size of the tilt adjustment device 100.

[0107] In contrast, in the inclination adjustment device 100 of the present embodiment, a first movable member insertion hole 53a is formed in the first movable member 53, and a second movable member insertion hole 55a is formed in the second movable member 55. Therefore, the inclination adjustment device 100 of the present embodiment does not cause the above-described mounting difficulty and increase in size, so the assembly of the inclination adjustment device 100 can be facilitated and miniaturized.

[0108] (6) In the lock mechanism 40, the shaft 23 is inserted through a lock piston insertion hole 41a and a lock shaft insertion hole 42a. The outer peripheral surface of the shaft 23 is spaced apart from the inner peripheral surfaces of the lock piston 41 and the lock shaft 42. Further, in the lock mechanism 40, after the lock shaft 42 abuts the holding swing body end face 22f of the lock shaft engagement surface 42e, the swing body 22 is pressed against the first base end face 30a to perform this lock. That is, during the operation of parallel adjustment of the crimping portion swing body 20 by the positioning mechanism 50, the shaft 23 is spaced apart from the lock piston 41 and the lock shaft 42, and the swing body 22 is spaced apart from the lock shaft 42. That is, the inclination adjustment device 100 can perform parallel adjustment of the crimping portion swing body 20 without interfering with the lock mechanism 40. Further, the lock mechanism 40 can hold the parallel posture of the crimping portion swing body 20 without applying a swinging moment to the crimping portion swing body 20 via the shaft 23 during this lock. That is, the lock mechanism 40 can hold the parallel posture of the crimping portion swing body 20 with higher precision compared to the case of applying a swinging moment to the crimping portion swing body 20. As a result, the inclination adjustment device 100 can perform parallel adjustment with higher precision compared to the case where the lock mechanism 40 and the crimping portion swing body 20 are in contact.

[0109] (7) The leaf spring 56 is cross-shaped and extends in each of the first direction A1 and the second direction A2. Further, in the leaf spring 56, each of the first to fourth leaf spring forming members B1 to B4 extends from the leaf spring annular portion 56c. That is, the deformation occurring in each of the first to fourth leaf spring forming members B1 to B4 affects the other leaf spring forming members only through the leaf spring annular portion 56c. Therefore, by being formed in a cross shape, the leaf spring 56 reduces the influence due to mutual interference in each of the first to fourth leaf spring forming members B1 to B4. As a result, the inclination adjustment device 100 can perform parallel adjustment with higher precision compared to the case where the leaf spring 56 is not cross-shaped, for example, rectangular.

[0110] (8) The shaft 23 is inserted through the holding block 57 and the bearing 58 and is connected to the leaf spring 56 through the holding block 57 and the bearing 58. Thereby, the influence of the leaf spring 56 on the operation of the crimping part swing body 20 in the crimping part axis LP direction is reduced. As a result, the inclination adjustment device 100 can perform the inclination adjustment of the crimping part swing body 20 with high precision.

[0111] (9) In the positioning mechanism 50, the first movable member 53 moves in the first direction A1 by the first ultrasonic motor 52, and the second movable member 55 moves in the second direction A2 by the second ultrasonic motor 54. The first motor shaft 52b provided in the first ultrasonic motor 52 is driven by the first drive unit 52a and moves the first movable member 53 in the first direction A1. Also, the second motor shaft 54b provided in the second ultrasonic motor 54 is driven by the second drive unit 54a and moves the second movable member 55 in the second direction A2. Each of the first ultrasonic motor 52 and the second ultrasonic motor 54 operates by power supply from a power source (not shown). In other words, the positioning mechanism 50 operates by power supply from a power source (not shown).

[0112] When moving the first movable member 53 and cutting off the power supply to the first ultrasonic motor 52, the first ultrasonic motor 52 stops operating while maintaining the position of the moved first movable member 53. Also, when moving the second movable member 55 and cutting off the power supply to the second ultrasonic motor 54, the second ultrasonic motor 54 stops operating while maintaining the position of the moved second movable member 55. That is, when the positioning mechanism 50 changes the position of the tip 23b in a plane parallel to the second base end face 30b and then the power supply is cut off, the positioning mechanism 50 stops operating while maintaining the position of the tip 23b. Thereby, even when the power supply to the positioning mechanism 50 stops after the parallel adjustment of the crimping part swing body 20, the inclination adjustment device 100 can maintain the parallel posture of the crimping part swing body 20.

[0113] [Modification Example] Note that the above-described embodiment can be modified as follows. The above-described embodiment and the following modification examples can be implemented in combination with each other within a technically non - conflicting range.

[0114] ○ As a plurality of actuators, the inclination adjustment device 100 does not necessarily use a plurality of ultrasonic motors. In this case, for example, a plurality of linear actuators may be used as the plurality of actuators.

[0115] ○ In the connection with the leaf spring 56, the shaft 23 does not necessarily pass through the holding block 57 and the bearing 58. That is, the leaf spring 56 may be directly attached to the tip 23b of the shaft 23. In this case, the inclination adjustment device 100 does not necessarily include the anti - rotation mechanism 90.

[0116] ○ The leaf spring 56 does not necessarily have a cross shape. For example, a rectangular leaf spring having sides extending in each of the first direction A1 and the second direction A2 may be used. ○ The locking shaft engaging surface 42e does not have to be a convex spherical surface, and the end face 22f of the holding rocking body does not have to be a concave spherical surface. In this case, as shown in FIG. 9, the end face 22f of the holding rocking body is a flat surface orthogonal to the axis LP of the crimping portion. Further, the locking mechanism 40 has an engaging member G including the locking shaft engaging surface 42e. The engaging member G is provided at an end different from the end having the female screw portion 421 among the ends of the locking shaft 42. The engaging member G is reciprocally movable integrally with the locking shaft 42 in the direction in which the base shaft LB extends. Further, the engaging member G is provided swingably with respect to the end of the locking shaft 42. In this case, the locking shaft engaging surface 42e is formed on the engaging member G and is a surface perpendicular to the outer peripheral surface of the engaging member G. The locking shaft engaging surface 42e in this case is a flat surface orthogonal to the axis LP of the crimping portion. The swing center of the engaging member G is within the plane including the locking shaft engaging surface 42e. The locking shaft engaging surface 42e engages with the end face 22f of the holding rocking body.

[0117] ○ The locking mechanism 40 does not have to include the locking piston 41 and the locking shaft 42. Further, the inclination adjusting device 100 does not have to include the locking mechanism 40. In this case, the posture of the crimping portion rocking body 20 is maintained only by temporary locking.

[0118] ○ The positioning mechanism 50 does not have to include the first actuator and the second actuator as a plurality of actuators. Further, the positioning mechanism 50 does not have to include the first movable member 53 and the second movable member 55 as a plurality of movable members.

[0119] For example, the positioning mechanism 50 may include three actuators surrounding the tip portion 23b of the shaft 23 as a plurality of actuators. Further, the positioning mechanism 50 may include three movable members as a plurality of movable members.

[0120] FIG. 8 shows a positioning mechanism 50 including first to third ultrasonic motors C1 to C3 as three actuators and first to third movable members D1 to D3 corresponding to each of the first to third ultrasonic motors C1 to C3. The positioning mechanism 50 in this case has three fixed bases E1 to E3. Each of the three fixed bases E1 to E3 is attached to a fixed base installation surface 34. Each of the three fixed bases E1 to E3 is centered on a base axis LB of the apparatus base 30 and is arranged on the circumference of a circle having a radial direction parallel to the fixed base installation surface 34. Each of the three fixed bases E1 to E3 is preferably arranged at a position that trisects the circumference of the circle.

[0121] Each of the first to third ultrasonic motors C1 to C3 is attached to each of the three fixed bases E1 to E3 on the fixed base installation surface 34 so that each of the first to third movable members D1 to D3 can be moved in different directions from each other. That is, the first to third ultrasonic motors C1 to C3 are arranged surrounding the tip portion 23b. Each of the first to third ultrasonic motors C1 to C3 is preferably arranged such that axes extending in the moving direction of each ultrasonic motor form an equilateral triangle. Each of the first to third movable members D1 to D3 is provided so as to be interlocked with the corresponding ultrasonic motor among the first to third ultrasonic motors D1 to D3. Each of the first to third movable members D1 to D3 and the tip portion 23b are connected by each of the first to third linear slide mechanisms F1 to F3, a leaf spring 56, and a holding block 57. Each of the first to third linear slide mechanisms F1 to F3 is linearly movable in a direction along the fixed base installation surface 34.

[0122] The first linear slide mechanism F1 absorbs a change in the distance between the first movable member D1 and the leaf spring 56 that occurs as the second movable member D2 and the third movable member D3 operate. The second linear slide mechanism F2 absorbs a change in the distance between the second movable member D2 and the leaf spring 56 that occurs as the first movable member D1 and the third movable member D3 operate. The third linear slide mechanism F3 absorbs a change in the distance between the third movable member D3 and the leaf spring 56 that occurs as the first movable member D1 and the second movable member D2 operate.

[0123] The tip portion 23b moves in a direction obtained by synthesizing the moving directions of the first to third ultrasonic motors C1 to C3 in a plane parallel to the fixed base installation surface 34. Therefore, the positioning mechanism 50 changes the position of the tip portion 23b in a plane parallel to the fixed base installation surface 34 by each of the first to third ultrasonic motors C1 to C3.

[0124] Note that the positioning mechanism 50 in the aspect shown in FIG. 8 may include two or four or more actuators as a plurality of actuators and two or four or more movable members as a plurality of movable members.

Explanation of Reference Numerals

[0125] 21... Crimping tool, 21a... First crimping tool end face, 21b... Second crimping tool end face, 22... Oscillating body, 22a... First oscillating body end face, 22b... Second oscillating body end face, 22c... Inner peripheral surface of the oscillating body, 22d... Oscillating body insertion hole, 22e... Locking oscillating body chamber, 22f... Holding oscillating body end face, 23... Shaft, 23b... Tip portion, 30... Device base, 30a... First base end face, 30b... Second base end face, 40... Locking mechanism, 41... Locking piston, 42... Locking shaft, 50... Positioning mechanism, 52... First ultrasonic motor as a plurality of actuators, 52b... First motor shaft as a first actuator movable part, 53... First movable member as a plurality of movable members, 53a... First movable member insertion hole, 54... Second ultrasonic motor as a plurality of actuators, 54b... Second motor shaft as a second actuator movable part, 55... Second movable member as a plurality of movable members, 55a... Second movable member insertion hole, 56... Leaf spring, 57... Holding block, 58... Bearing, 100... Tilt adjustment device, A1... First direction, A2... Second direction, LB... Base axis, S... Reference plane, T... Plate thickness direction.

Claims

1. A rocker having a first rocker end surface and a second rocker end surface which is a convex spherical surface; a shaft protruding from an end surface of the second oscillator in the oscillator; a crimping tool having a second crimping tool end face attached to the first oscillator end face and having a first crimping tool end face different from the second crimping tool end face; a device base having a first base end face which is a concave spherical surface that engages with the second oscillator end face, and through which the shaft passes, the device base having a second base end face which is different from the first base end face; An inclination adjustment device that adjusts the inclination of the oscillator so that the end surface of the first crimping tool is parallel to a reference surface, a positioning mechanism for varying a position of a tip end of the shaft within a plane parallel to an end surface of the second base to thereby cause the swinging body to swing via the shaft; a leaf spring connected to the shaft; The positioning mechanism includes: A plurality of actuators; a plurality of movable members moved by each of the plurality of actuators; The leaf spring is The shaft is flexible and deformable in response to a change in the position of the tip of the shaft by the positioning mechanism, and the direction in which a base axis that is the axis of the device base extends is defined as a plate thickness direction. A tilt adjustment device, characterized in that at least one of the plurality of movable members is connected to the shaft by the leaf spring so that the oscillating body can oscillate relative to the device base via the shaft.

2. The positioning mechanism includes: The actuators include a first actuator and a second actuator, and the movable members include a first movable member and a second movable member, the first movable member and the second movable member are arranged to overlap in a direction in which the base axis extends, and the second movable member is arranged on the opposite side to the first base end surface with the first movable member in between; the first movable member is movable in a first direction perpendicular to the base axis by a first actuator movable part of the first actuator, and the second movable member is movable in a second direction perpendicular to the base axis and perpendicular to the first direction by a second actuator movable part of the second actuator, the first movable member defines a first movable member insertion hole through which the shaft is inserted, and the second movable member defines a second movable member insertion hole through which the shaft is inserted, 2. The tilt adjustment device according to claim 1, wherein the leaf spring connects the tip end of the shaft passing through the first movable member insertion hole and the second movable member insertion hole to the second movable member.

3. The rocking body is A circumferential surface of a rocker body defining a rocker body insertion hole through which the shaft passes; a locking rocker chamber formed inside the rocker and communicating with the outside of the rocker through the rocker insertion hole; a retaining oscillator end surface that is continuous with the inner circumferential surface of the oscillator and is formed between the first oscillator end surface and the second oscillator end surface; a lock piston provided inside the device base so as to be reciprocable in a direction in which the base axis extends, and spaced apart from an outer surface of the shaft and surrounding the shaft; The tilt adjustment device according to claim 1 or 2, characterized in that it has a lock mechanism including a lock shaft that reciprocates integrally with the lock piston, has a lock shaft engagement surface that engages with the end surface of the retaining rocker, and is spaced apart from the outer surface of the shaft to surround the shaft.

4. The inclination adjustment device according to claim 2 , wherein the leaf spring has a cross shape extending in the first direction and the second direction when viewed in the plate thickness direction.

5. a retaining block attached to the leaf spring; a bearing that supports the holding block at the tip portion, 3. The tilt adjustment device according to claim 1, wherein the shaft is connected to the leaf spring via the retaining block and the bearing.

6. 3. The tilt adjustment device according to claim 1, wherein each of the actuators comprises an ultrasonic motor.

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