Adjustment device and machining device using the same

Abstract

To provide an adjustment device capable of restricting movement of a second plate with respect to a first plate and movement of a third plate with respect to the second plate, and a machining device.SOLUTION: An alignment stage 10 which is an adjustment device comprises: a first plate 20 having a first concave surface 21 extending in a first direction Y; a second plate 30 having a first convex surface 31 and a second concave surface 32 extending in a second direction X; a third plate 40 having a second convex surface 41; a plurality of first biasing means for connecting the second plate 30 and the first plate 20 to each other; and a plurality of second biasing means for connecting the third plate 40 and the second plate 30 to each other. At least one of the first and second biasing means is a leaf spring 60.SELECTED DRAWING: Figure 2

Description

Technical Field

[0001] The present invention relates to an adjustment device that can be used as an alignment stage for causing a workpiece processed by a rotary tool to follow the rotary tool, and a processing device including the same.

Background Art

[0002] For example, Patent Document 1 below describes an alignment stage including a first plate having a first concave surface, a second plate disposed on the first plate and having a first convex surface and a second concave surface, a third plate disposed on the second plate and having a second convex surface, a first biasing means for connecting the second plate and the first plate to bias the second plate back to its initial position with respect to the first plate, and a second biasing means for connecting the third plate and the second plate to bias the third plate back to its initial position with respect to the second plate.

[0003] Further, the first and second biasing means are tension springs (pull springs) each including a winding portion formed by winding a wire rod and hook-shaped locking portions provided at both ends thereof.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the way, depending on the use, purpose, machining accuracy, etc. of the workpiece to be machined, although the swing of the second plate with respect to the first plate and the swing of the third plate with respect to the second plate are allowed, there may be a case where the movement of the second plate with respect to the first plate and the movement of the third plate with respect to the second plate are restricted.

[0006] In this case, in the alignment stage of Patent Document 1 described above, the first and second biasing means are tension springs, which not only expand and contract axially in the winding portion but can also deform radially, and since the degree of freedom of deformation is high, the movement of the second plate relative to the first plate and the movement of the third plate relative to the second plate cannot be restricted.

[0007] Therefore, an object of the present invention is to provide an adjustment device and a processing device equipped with the same that can restrict the movement of the second plate relative to the first plate and the movement of the third plate relative to the second plate while allowing the second plate to swing relative to the first plate and the third plate to swing relative to the second plate.

Means for Solving the Problems

[0008] In order to achieve the above object, one aspect of the present invention is an adjustment device for supporting or holding an object and adjusting the position of the object with respect to a reference position and / or the angle of the object with respect to a reference plane, comprising: a first plate having a first concave surface in the shape of a concave curved surface and extending in a first direction; a second plate disposed above or below the first plate, having a first convex surface conforming to the shape of the first concave surface on the side of the first plate, and having a second concave surface in the shape of a concave curved surface and extending in a second direction orthogonal to the first direction on the side opposite to the first plate; a third plate disposed above or below the second plate and having a second convex surface conforming to the shape of the second concave surface on the side of the second plate; a plurality of first biasing means for connecting the second plate and the first plate to each other and biasing the second plate to return to its initial position with respect to the first plate when the second plate moves, swings, or moves and swings with respect to the first plate; a plurality of second biasing means for connecting the third plate and the second plate to each other and biasing the third plate to return to its initial position with respect to the second plate when the third plate moves, swings, or moves and swings with respect to the second plate; and at least one of the plurality of first biasing means and the plurality of second biasing means is a leaf spring, and the leaf spring is arranged such that its width direction is along the moving direction of the second plate with respect to the first plate or along the moving direction of the third plate with respect to the second plate.

[0009] According to the above invention, at least one of the plurality of first biasing means and the plurality of second biasing means is a leaf spring, and its width direction is arranged along the moving direction of the second plate with respect to the first plate, or is arranged along the moving direction of the third plate with respect to the second plate. Therefore, the movement of the second plate or the third plate in the direction along the width direction of the leaf spring can be restricted, and while allowing the swing of the second plate with respect to the first plate and the swing of the third plate with respect to the second plate, the movement of the second plate with respect to the first plate and the movement of the third plate with respect to the second plate can be restricted.

[0010] In the adjusting device of the present invention, at least one of the plurality of first biasing means and at least one of the plurality of second biasing means may be leaf springs.

[0011] According to the above aspect, at least one of the plurality of first biasing means and at least one of the plurality of second biasing means are leaf springs, so the movement of the second plate with respect to the first plate and the movement of the third plate with respect to the second plate can be restricted.

[0012] In the adjusting device of the present invention, the leaf spring may have a configuration including a bulging portion that bulges from the outer surface of each plate in a plan view of each plate, and a pair of fixing portions that extend from both ends of the bulging portion and are respectively fixed to the corresponding plate.

[0013] According to the above aspect, since the leaf spring is composed of a bulging portion and a pair of fixing portions, they can be integrally formed, and the number of parts of the first biasing means and the second biasing means can be reduced.

[0014] In addition, since the shape of the bulging portion can be appropriately selected, for example, when the bulging portion has a shape such as being curved in an arc shape, the elastic deformation performance of the bulging portion can be adjusted by appropriately setting its radius of curvature. Further, since a space is defined between the outer surface of the plate and the bulging portion, that is, inside the bulging portion, this internal space can be effectively utilized.

[0015] In the adjusting device of the present invention, the leaf spring may be in a flat plate shape, and both ends thereof may be fixed to the corresponding plates via fixing brackets.

[0016] According to the above aspect, since a leaf spring in a flat plate shape can be used without any special processing, the versatility can be enhanced. Also, by changing the thickness of the leaf spring or stacking a plurality of leaf springs, the spring force of the entire leaf spring can be appropriately adjusted. Further, depending on the shape, structure, etc. of the fixing bracket, the strength and rigidity of the biasing means including the leaf spring can be enhanced.

[0017] In the adjusting device of the present invention, a plurality of third biasing means are further provided for connecting the third plate and the first plate to each other and biasing the third plate to return to its initial position with respect to the second plate indirectly via the first plate when the third plate moves, swings, or moves and swings with respect to the second plate. At least one of the plurality of first biasing means, the plurality of second biasing means, and the plurality of third biasing means is a leaf spring, and the leaf spring may be arranged such that its width direction is along the moving direction of the second plate with respect to the first plate, or along the moving direction of the third plate with respect to the second plate.

[0018] According to the above aspect, since the third plate is connected not only to the second plate by the second biasing means but also to the first plate by the third biasing means, the movement of the third plate with respect to the second plate can be more sufficiently restricted.

[0019] In the adjusting device of the present invention, it is also possible that a plurality of the first biasing means are composed of the leaf spring and the tension spring, or a plurality of the second biasing means are composed of the leaf spring and the tension spring, or each of the plurality of the first biasing means and the plurality of the second biasing means is composed of the leaf spring and the tension spring.

[0020] According to the above aspect, since the biasing means is composed of a combination of a leaf spring and a tension spring, it becomes easy to appropriately adjust the degree of restriction of the movement of the second plate with respect to the first plate, the degree of freedom of swinging, etc., and the degree of restriction of the movement of the third plate with respect to the second plate, the degree of freedom of swinging, etc., according to the use, purpose, processing accuracy, etc. of the workpiece to be processed.

[0021] Another processing device of the present invention includes a rotary tool that is rotationally driven and the adjusting device, and is characterized in that the adjusting device is used as an alignment stage that supports a workpiece to be processed by the rotary tool and automatically centers it.

[0022] According to the above invention, by using the adjusting device of the above invention as an alignment stage, a processing device having a function of supporting a workpiece to be processed by a rotary tool and automatically centering it can be obtained.

Effect of the Invention

[0023] In the present invention, at least one of the plurality of first biasing means and the plurality of second biasing means is a leaf spring, and its width direction is arranged along the movement direction of the second plate with respect to the first plate, or is arranged along the movement direction of the third plate with respect to the second plate, so that the movement of the second plate with respect to the first plate and the movement of the third plate with respect to the second plate can be restricted.

Brief Description of the Drawings

[0024]

Figure 1

Figure 2

Figure 3

Figure 4

Embodiments for Carrying Out the Invention

[0025] (An embodiment of the adjustment device and the processing device) Hereinafter, with reference to the drawings, an embodiment of an adjustment device according to the present invention and a processing device that uses the adjustment device as an alignment stage will be described.

[0026] In the case of this embodiment, the adjustment device according to the present invention is used as an alignment stage 10 for supporting or holding a workpiece W (see FIG. 3), which is an object, and automatically centering it. As shown in FIGS. 1 to 3, the alignment stage 10 of this embodiment includes a first plate 20 having a first concave surface 21, a second plate 30 disposed above the first plate 20 and having a first convex surface 31 and a second concave surface 32, and a third plate 40 disposed above the second plate 30 and having a second convex surface 41.

[0027] In this embodiment, the adjustment device can be used as an alignment stage 10 and applied to a processing device 100 or the like that processes a workpiece W with a rotationally driven rotary tool 102 as shown in FIG. 3. However, as the adjustment device, in addition to such a processing device 100, for example, it can be attached to the upper part of a mounting head (bonding head) of a semiconductor mounting device (such as a flip chip mounting device) and used as an angle adjustment mechanism of the mounting head (in this case, a substrate to be bonded or the like forms the "object" in the present invention). As long as it is possible to support or hold an object and adjust the position of the object with respect to a reference position and / or the angle of the object with respect to a reference plane, there is no particular limitation.

[0028] Also, although the alignment stage 10 in this embodiment is configured to support the workpiece W above the stage, as an adjustment device, for example, a second plate may be disposed below the first plate, and a third plate may be disposed below the second plate, in a so-called upside-down state to hold the object so as not to drop.

[0029] The first plate 20 is a substantially rectangular plate formed with a predetermined width dimension, a predetermined depth dimension, and a predetermined thickness dimension. The lower surface side is a flat surface, while a first concave surface 21 is formed on the upper surface side, that is, the surface side (opposing surface side) where the second plate 30 is opposedly disposed.

[0030] More specifically, on the upper surface side of the first plate 20, flat surfaces 22, 22 having a flat surface shape are respectively extended in the depth direction of the first plate 20 (the direction reaching the front side and the back side of the paper surface in the paper surface of FIG. 1. It can also be said to be the front-rear direction) at both end portions in the width direction (which can also be said to be the left-right direction on the paper surface of FIG. 1). When the first plate 20 is viewed from the plane direction, the width direction and the depth direction are orthogonal to each other.

[0031] And on the upper surface of the first plate 20, between the pair of flat surfaces 22, 22, a first concave surface 21 having a concave curved surface shape recessed downward (the lower end side in the thickness direction of the first plate 20) is formed.

[0032] Specifically, the first concave surface 21 has a bottom portion 21a that is recessed lowest at the center portion in the width direction of the first plate 20, and is a curved surface having a substantially arc shape that curves while drawing a curve with a predetermined curvature so as to gradually become higher from the bottom portion 21a toward the pair of flat surfaces 22, 22. Further, the first concave surface 21 is formed so as to extend from one end to the other end in the depth direction of the first plate 20, that is, is formed over the entire depth direction of the first plate 20.

[0033] Note that the direction in which the first concave surface 21 extends, that is, the direction along the depth direction (front-rear direction) of the first plate 20, forms the "first direction" in the present invention, and this is denoted as the "first direction X".

[0034] Also, a line segment passing through the bottom 21a of the first concave surface 21 and extending in the depth direction of the first plate 20 (a line segment parallel to the first direction X) serves as the first swing axis C1 when the second plate 30 swings with respect to the first plate 20.

[0035] Note that the above "width direction", "left-right direction", "depth direction", and "front-rear direction" have the same meaning also in the second plate 30, the third plate 40, and the like.

[0036] The second plate 30 is a substantially rectangular plate having a shape that fits the first plate 20 (the outer peripheral shape is the same and the width dimension and the depth dimension are the same) and a predetermined thickness, and a first convex surface 31 is formed on the lower surface side thereof, that is, the surface side on which the first plate 20 is disposed opposite.

[0037] This first convex surface 31 is a convex curved surface that protrudes in a convex shape from the lower surface of the second plate 30 so as to have a shape (a conforming shape) along the first concave surface 21.

[0038] Specifically, the first convex surface 31 has a top portion 31a that protrudes most downward at the center in the width direction of the second plate 30, and is a convex curved surface that forms a curve with a predetermined curvature so that the amount of protrusion gradually decreases from the top portion 31a toward both ends in the width direction of the second plate 30, forming a substantially arc shape. Also, the first convex surface 31 is formed over the entire width direction and the entire depth direction of the second plate 30.

[0039] And, as shown in FIG. 2, the first convex surface 31 of the second plate 30 enters into the first concave surface 21 of the first plate 20 and is disposed opposite to the first concave surface 21 with an air layer (not shown) or a lubricant by compressed air interposed therebetween.

[0040] Note that, as described above, an air layer or a lubricant is interposed between the first convex surface 31 and the first concave surface 21, and an air layer or a lubricating layer is also interposed between the second concave surface 32 and the second convex surface 41. Since these air layers and lubricants are described in detail in Japanese Patent Application No. 2016-14871 (Patent No. 6825812) filed by the applicant of the present application, detailed description thereof will be omitted.

[0041] As described above, as a result of the first convex surface 31 and the first concave surface 21 being arranged, the second plate 30 is movable along the first direction X with respect to the first plate 20 and is swingable in the direction of arrow R1 about the first swing axis C1. Note that the swing of the second plate 30 can also be said to be an operation in the direction along the curved surfaces of the first concave surface 21 and the first convex surface 31 in the second plate 30.

[0042] On the other hand, a second concave surface 32 is formed on the upper surface side of the second plate 30, that is, the surface side on which the third plate 40 is disposed to face.

[0043] More specifically, on the upper surface side of the second plate 30 and at both ends in the depth direction, flat surfaces 33, 33 having a flat surface shape are respectively extended in the width direction of the second plate 30.

[0044] And on the upper surface of the second plate 30, between the pair of flat surfaces 33, 33, a second concave surface 32 having a concave curved surface shape recessed downward (toward the lower end side in the thickness direction of the second plate 30) is formed.

[0045] Specifically, the second concave surface 32 has a bottom portion 32a that is most deeply recessed at the center in the depth direction of the second plate 30, and is a curved surface having a substantially arc shape that curves while drawing a curve with a predetermined curvature so as to gradually become higher from the bottom portion 32a toward the pair of flat surfaces 33, 33. Further, the second concave surface 32 is formed so as to extend from one end to the other end in the width direction of the second plate 30, that is, is formed over the entire width direction of the second plate 30.

[0046] Note that the direction in which the second concave surface 32 extends, that is, the direction along the width direction (left - right direction) of the second plate 30, forms the "second direction" in the present invention, and this is designated as the "second direction Y". Further, the second direction Y is a direction orthogonal to the first direction X when the plate is viewed from the planar direction.

[0047] Furthermore, a line segment passing through the bottom 32a of the second concave surface 32 and extending in the width direction of the second plate 30 (a line segment parallel to the second direction Y) serves as the second swing axis C2 when the third plate 40 swings with respect to the second plate 30.

[0048] The third plate 40 is a substantially rectangular plate having a shape that fits with the second plate 30 (the outer peripheral shapes are the same and the width dimensions and depth dimensions are the same) and a predetermined thickness. The upper surface side is flat, while on the lower surface side, that is, the surface side where the second plate 30 is disposed opposite, a second convex surface 41 is formed.

[0049] This second convex surface 41 is a convex curved surface that protrudes convexly from the lower surface of the third plate 40 so as to have a shape (a conforming shape) along the second concave surface 32.

[0050] Specifically, the second convex surface 41 has a top portion 41a that protrudes most downward at the center in the depth direction of the third plate 40, and is a curved surface in a substantially arc shape that curves while drawing a curve with a predetermined curvature such that the amount of protrusion gradually decreases from the top portion 41a toward both ends in the depth direction of the third plate 40. Also, the second convex surface 41 is formed over the entire width direction and the entire depth direction of the third plate 40.

[0051] Then, as shown in FIG. 2, the second convex surface 41 of the third plate 40 enters into the second concave surface 32 of the second plate 30 and is disposed opposite to the second concave surface 32 with an air layer (not shown) or a lubricant by compressed air interposed therebetween.

[0052] As a result, the third plate 40 is movable along the second direction Y with respect to the second plate 30 and is also swingable in the direction of arrow R2 about the second swing axis C2. Note that the swing of the third plate 40 can also be described as an operation in the direction along the curved surfaces of the second concave surface 32 and the second convex surface 41 in the third plate 40.

[0053] The alignment stage 10 further includes a plurality of first biasing means for connecting the second plate 30 and the first plate 20 to each other, a plurality of second biasing means for connecting the third plate 40 and the second plate 30 to each other, and a plurality of third biasing means for connecting the third plate 40 and the first plate 20 to each other.

[0054] When the second plate 30 moves along the first direction X and swings in the R1 direction, or moves along the first direction X and swings in the R1 direction with respect to the first plate 20 as described above, the first biasing means biases the second plate 30 to return it to the initial position with respect to the first plate 20.

[0055] When the third plate 40 moves along the second direction Y and swings in the R2 direction, or moves along the second direction Y and swings in the R2 direction with respect to the second plate 30 as described above, the second biasing means biases the third plate 40 to return it to the initial position with respect to the second plate 30.

[0056] Furthermore, when the third plate 40 moves along the second direction Y and swings in the R2 direction, or moves along the second direction Y and swings in the R2 direction with respect to the second plate 30 as described above, the third biasing means indirectly biases the third plate 40 to return it to the initial position with respect to the second plate 30 via the first plate 20.

[0057] Each of the above biasing means will be specifically described below.

[0058] On both outer side surfaces 24, 24 in the depth direction of the first plate 20 and both outer side surfaces 35, 35 in the depth direction of the second plate 30, a pair of upper and lower engaged portions 55, 55 are provided so as to project at positions that align with each other at both ends in the width direction of the two plates 20, 30.

[0059] One of the biasing means is two types of tension springs (pull springs) 50, 50A with different dimensions. Each tension spring 50, 50A has a wound portion 51 formed by closely winding a wire rod, and hook-shaped locking portions 52, 52 provided at both axial ends of the wound portion 51. Note that the wound portion 51 of the tension spring 50A has a larger diameter than the wound portion 50 of the tension spring 50, and the locking portions 52, 52 of the tension spring 50A are also larger than the locking portions 52, 52 of the tension spring 50.

[0060] Then, by locking both locking portions 52, 52 of the tension spring 50 to the engaged portions 55, 55 fixed to the first plate 20 and the second plate 30 respectively, the first plate 20 and the second plate 30 are connected to each other by the tension spring 50, and the second plate 30 is biased in a direction approaching the first plate 20. That is, the first convex surface 31 of the second plate 30 is biased in a direction approaching the first concave surface 21 of the first plate 20.

[0061] As a result, when the second plate 30 moves along the first direction X or swings in the R1 direction with respect to the first plate 20 and the wound portion 51 of the tension spring 50 is pulled, the wound portion 51 elastically returns to its initial shape by its own spring force (which can also be referred to as elastic force, elastic restoring force, elastic recovery force, etc. The same applies in the following description). Therefore, the second plate 30 returns to its initial position with respect to the first plate 20.

[0062] That is, in this embodiment, a plurality of tension springs 50 (a total of four tension springs 50) interposed at both ends in the width direction on both outer side surfaces in the depth direction of the first plate 20 and the second plate 30 constitute the "first biasing means" in the present invention.

[0063] In addition, on both outer side surfaces 23, 23 in the width direction of the first plate 20 and both outer side surfaces 42, 42 in the width direction of the third plate 40, a pair of upper and lower locked portions 55, 55 project at positions that align with each other at the central portion in the width direction of both plates 20, 30.

[0064] Then, by locking both locking portions 52, 52 of the tension spring 50A to the locked portions 55, 55 fixed to the first plate 20 and the third plate 40 respectively, the first plate 20 and the third plate 40 are connected to each other by the tension spring 50A, and indirectly via the first plate 20, the third plate 40 is biased in a direction approaching the second plate 30. That is, the second convex surface 41 of the third plate 40 is biased in a direction approaching the second concave surface 32 of the second plate 30.

[0065] As a result, when the third plate 40 moves along the second direction Y or swings in the R2 direction with respect to the second plate 30 and the winding portion 51 of the tension spring 50A is pulled, the winding portion 51 elastically returns to its initial shape, so that indirectly via the first plate 20, the third plate 40 returns to its initial position with respect to the second plate 30.

[0066] That is, in this embodiment, a plurality of tension springs 50 (a total of two tension springs 50) respectively interposed at the central portions in the depth direction on both outer side surfaces in the width direction of the first plate 20 and the third plate 40 constitute the "third biasing means" in the present invention.

[0067] And in this alignment stage 10, at least one of the plurality of first biasing means and the plurality of second biasing means is a leaf spring 60.

[0068] The leaf spring 60 of this embodiment has a bulging portion 61 that bulges from the outer surfaces of the plates 20, 30, 40 in a plan view of each plate 20, 30, 40 (when each plate 20, 30, 40 is viewed from the planar direction), and a pair of fixing portions 62, 62 that extend from both ends of the bulging portion 61 and are respectively fixed to the corresponding plates.

[0069] Specifically, the bulging portion 61 is curved so as to form a substantially arc shape with a predetermined curvature, and bulges (swells out) so as to be separated from the outer surfaces of the plates 20, 30, 40 (the outer surfaces in the width direction and the outer surfaces in the depth direction). From both circumferential ends of the bulging portion 61, the pair of fixing portions 62, 62 extend so as to be separated from each other and spread. The pair of fixing portions 62, 62 extend so as to be located on the same plane.

[0070] Also, the leaf spring 60 is formed with a constant thickness and a constant width from one fixing portion 62 through the bulging portion 61 to the other fixing portion 62. Furthermore, the bulging portion 61 and the pair of fixing portions 62, 62 are integrally formed. The leaf spring 60 can be manufactured, for example, by appropriately bending a metal plate material made of a spring steel such as stainless steel like SUS304, SUS301, or SUS316.

[0071] Then, at both outer surfaces 23, 23 in the width direction of the first plate 20 and both outer surfaces 34, 34 in the width direction of the second plate 30, at positions that align with each other at both ends in the depth direction of both plates 20, 30, the pair of fixing portions 62, 62 of the leaf spring 60 are fixed by welding, fixing with a fixture such as a bolt, adhesion with an adhesive or an adhesive tape, etc., and the first plate 20 and the second plate 30 are connected to each other by the leaf spring 60.

[0072] Also, as shown in FIG. 2, the leaf spring 60 is arranged such that its width direction (the direction orthogonal to the extending direction in the plan view of the leaf spring 60) is along the moving direction of the second plate 30 with respect to the first plate 20, that is, the first moving direction X.

[0073] As a result, when the second plate 30 moves relative to the first plate 20 along the first direction X, the upper and lower pairs of fixing portions 62, 62 of the leaf spring 60 are displaced in the direction along the first direction X. Thus, the bulging portion 61 mainly deforms obliquely in its width direction. Therefore, due to the spring force of the bulging portion 61 itself, it quickly elastically returns to its initial shape, and the second plate 30 returns to its initial position relative to the first plate 20.

[0074] On the other hand, when the second plate 30 swings relative to the first plate 20 in the R1 direction, the upper fixing portion 62 moves in and out (protrudes and sinks) in the plate width direction relative to the lower fixing portion 62. Thus, the bulging portion 61 mainly deforms radially outward or radially inward (it can also be said that it deforms in a direction away from or approaching the outer surface of the plate. The same applies in the following description). Therefore, the bulging portion 61 elastically returns to its initial shape, and the second plate 30 returns to its initial position relative to the first plate 20.

[0075] That is, in this embodiment, a plurality of leaf springs 60 (a total of four leaf springs 60) arranged and fixed at both end portions in the depth direction on both outer side surfaces in the width direction of the first plate 20 and the second plate 30 constitute the "first biasing means" in the present invention.

[0076] The "first biasing means" in this embodiment is composed of a combination of the plurality of tension springs 50, 50A described above and the plurality of leaf springs 60.

[0077] Also, the initial position of the second plate 30 relative to the first plate 20 means a state as shown in FIG. 2, that is, the outer side surfaces 23, 23 in the width direction of the first plate 20 and the outer side surfaces 34, 34 in the width direction of the second plate 30 are aligned, the outer side surfaces 24, 24 in the depth direction of the first plate 20 and the outer side surfaces 35, 35 in the depth direction of the second plate 30 are aligned, and further, the bottom portion 21a of the first concave surface 21 of the first plate 20 and the top portion 31a of the first convex surface 31 of the second plate 30 coincide.

[0078] Furthermore, on both outer side surfaces 35, 35 in the depth direction of the second plate 30 and both outer side surfaces 43, 43 in the depth direction of the third plate 40, at positions that are aligned with each other at the center in the width direction of both plates 30, 40, a pair of fixing portions 62, 62 of the leaf spring 60 are fixed by welding, fixing with fixtures such as welding, bolts, or adhesion with adhesives, adhesive tapes, etc., and the second plate 30 and the third plate 40 are connected to each other by the leaf spring 60.

[0079] As shown in FIGS. 2 and 3, the leaf spring 60 is arranged such that its width direction is along the moving direction of the third plate 40 with respect to the second plate 30, that is, the second moving direction Y.

[0080] When the third plate 40 moves along the second direction Y with respect to the second plate 30, the upper and lower pair of fixing portions 62, 62 of the leaf spring 60 are displaced in the direction along the first direction X, so mainly the bulging portion 61 is deformed obliquely in its width direction. Therefore, due to the self-spring force of this bulging portion 61, it quickly elastically returns to the initial shape, and the third plate 40 returns to the initial position with respect to the second plate 30.

[0081] On the other hand, when the third plate 40 swings in the R2 direction with respect to the second plate 30, the upper fixing portion 62 moves in and out in the plate depth direction with respect to the lower fixing portion 62, and mainly the bulging portion 61 is deformed radially outward or radially inward. Therefore, the bulging portion 61 elastically returns to the initial shape, and the third plate 40 returns to the initial position with respect to the second plate 30.

[0082] That is, in this embodiment, a plurality of leaf springs 60 (a total of two leaf springs 60) respectively arranged and fixed at the center in the width direction on both outer side surfaces in the depth direction of the second plate 30 and the third plate 40 form the "second biasing means" in the present invention.

[0083] Note that the initial position of the third plate 40 with respect to the second plate 30 means a state as shown in FIG. 2, that is, the outer surfaces 34, 34 in the width direction of the second plate 30 and the outer surfaces 42, 42 in the width direction of the third plate 40 are aligned, the outer surfaces 35, 35 in the depth direction of the second plate 30 and the outer surfaces 43, 43 in the depth direction of the third plate 40 are aligned, and further, the bottom 32a of the second concave surface 32 of the second plate 30 and the top 41a of the second convex surface 41 of the third plate 40 coincide with each other.

[0084] The leaf spring 60 described above has a shape in which the bulging portion 61 and the pair of fixing portions 62, 62 are integrally formed, but the shape, structure, layout, etc. of the leaf spring are not limited to the above-described embodiment.

[0085] For example, the leaf spring may have a flat plate shape as shown in FIG. 4 (this will be described in detail in the embodiments described later). Further, the bulging portion of the leaf spring may have a shape such as a substantially U shape, a substantially C shape, a substantially V shape, a substantially W shape, a substantially ω shape, a substantially semi-circular shape, a shape obtained by halving an ellipse, a substantially bell shape such as a Gaussian function, etc. when viewed from the side of the leaf spring (these are symmetric with respect to a straight line passing through the pair of fixing portions and a line segment passing through the top of the bulging portion), and further, it may have an asymmetric shape with respect to a straight line passing through the pair of fixing portions and a line segment passing through the top of the bulging portion, and it is preferably a shape that is curved or bent so as to bulge from the outer surface of the plate.

[0086] Furthermore, the plate width and plate thickness of the leaf spring may be appropriately changed at predetermined locations. For example, the bulging portion may be made thicker or thinner with respect to the fixing portion, or may be made wider or narrower when viewed from the front of the leaf spring (when viewed from a direction orthogonal to the thickness direction). Also, a slit may be formed, a notch may be made, or ribbing or embossing may be performed at a predetermined location of the bulging portion to adjust the spring force.

[0087] Also, in this embodiment, all the tension springs 50, 50A and the leaf spring 60 are arranged and fixed to the predetermined plates 20, 30, 40 so that their postures are vertical. However, for example, they may be arranged and fixed to a predetermined plate so that the postures of the tension springs and the leaf spring are oblique.

[0088] Furthermore, the leaf spring 60 in this embodiment is one of the first biasing means and also one of the second biasing means. However, as the leaf spring, it may constitute only the first means or only the second means.

[0089] Also, in this embodiment, the tension spring 50 connecting the first plate 20 and the second plate 30 is arranged so as to be line-symmetrical with respect to the second swing axis C2 in the plan view of both plates 20, 30. Furthermore, the leaf spring 60 connecting the first plate 20 and the second plate 30 is arranged so as to be line-symmetrical with respect to the first swing axis C1 in the plan view of both plates 20, 30.

[0090] Also, the leaf spring 60 connecting the second plate 30 and the third plate 40 is arranged so as to be line-symmetrical with respect to the second swing axis C2 in the plan view of both plates 30, 40. Furthermore, the tension spring 50A connecting the first plate 20 and the third plate 40 is arranged so as to be line-symmetrical with respect to the first swing axis C1 in the plan view of both plates 20, 40.

[0091] However, as the layout of the tension springs 50, 50A and the leaf spring 60, for example, they may be arranged in point symmetry with reference to the centers (center of gravity positions) of the plates 20, 30, 40, arranged obliquely on the diagonal line with respect to the centers of the plates 20, 30, 40, made mirror-symmetrical with reference to the first vertical plane and the second vertical plane passing through the centers of the plates 20, 30, 40 and having the first direction X and the second direction Y as the perpendicular directions, or furthermore, arranged without providing regularity, and there is no particular limitation.

[0092] Further, a tension spring may be arranged at one end of a predetermined plate in the depth direction or the width direction, while a leaf spring may be arranged at the other end of the plate in the depth direction or the width direction (springs of different types are arranged at both ends of the plate).

[0093] Furthermore, in this embodiment, the "first biasing means" is configured as a combination of a plurality of tension springs 50 and a plurality of leaf springs 60. However, the "second biasing means" may be configured as a combination of a tension spring and a leaf spring, or further, both the "first biasing means" and the "second biasing means" may be configured as a combination of a tension spring and a leaf spring.

[0094] FIG. 3 shows a processing apparatus 100 employing the alignment stage 10 having the above configuration. The processing apparatus 100 of this embodiment includes a motor 101 serving as rotation driving means, a rotary tool 102 that is rotationally driven by the motor 101 to perform cutting processing or the like on a workpiece W, the alignment stage 10 having the above configuration, and a fixture 103 for fixing the workpiece W.

[0095] Note that the rotary tool 102 is, for example, a roller burnishing tool and is movable in the vertical direction. Further, the fixture 103 is, for example, a lever chuck and is placed on the upper surface of the third plate 40 constituting the alignment stage 10 to fix the workpiece W.

[0096] (Function and Effect) Next, the function and effect of the alignment stage 10 and the processing apparatus 100, which are adjustment apparatuses having the above configuration, will be described.

[0097] That is, in this alignment stage 10, at least one of the plurality of first biasing means and the plurality of second biasing means, here at least one of the plurality of first biasing means, and the plurality of second biasing means are leaf springs 60, and the leaf springs 60 are arranged such that their width direction is along the moving direction of the second plate 30 with respect to the first plate 20, or along the moving direction of the third plate 40 with respect to the second plate 30.

[0098] By the way, since the tension spring 50 has a configuration in which its winding portion 51 is formed by winding a wire, it can be deformed not only in its axial direction but also in the radial direction and the torsional direction.

[0099] On the other hand, the leaf spring 60 has a plate shape with a predetermined width in its width direction, that is, in a direction perpendicular to the extending direction of the leaf spring 60 (which can also be said to be an orthogonal direction), and there is no gap like the winding portion 51 of the tension spring 50. Therefore, when an external force acts in the width direction of the leaf spring 60, the leaf spring 60 does not deform or is extremely difficult to deform.

[0100] Therefore, the movement of the second plate 30 and the third plate 40 in the direction along the width direction of the leaf spring 60 can be restricted. That is, even if the second plate 30 moves along the first direction X with respect to the first plate 20, or the third plate 40 moves along the second direction Y with respect to the second plate 30, the leaf spring 60 quickly elastically returns by its own spring force, and the third plate 40 and the second plate 30 quickly return to their initial positions. Therefore, the movement of the second plate 30 and the third plate 40 can be substantially restricted.

[0101] Therefore, while allowing the second plate 30 to swing with respect to the first plate 20 and the third plate 40 to swing with respect to the second plate 30, the movement of the second plate 30 with respect to the first plate 20 and the movement of the third plate 40 with respect to the second plate 30 can be restricted.

[0102] In addition, since at least one of the plurality of first biasing means and the plurality of second biasing means are leaf springs 60, the two plates 30 and 40 that have moved or swung can be quickly returned to their initial positions. As a result, the predetermined position of the workpiece W (for example, the center of the workpiece W) can be automatically centered so as to coincide with the center of each plate that is the reference position (in this embodiment, the center in the depth direction and the center in the width direction of each plate).

[0103] Furthermore, since the leaf spring 60 in this embodiment is composed of a bulging portion 61 and a pair of fixing portions 62 and 62 extending from both ends thereof, the bulging portion 61 and the pair of fixing portions 62 and 62 can be integrally formed, and the number of parts of the first biasing means and the second biasing means can be reduced.

[0104] Also, since the shape of the bulging portion 61 can be appropriately selected, for example, when the bulging portion 61 has a shape that is curved in an arc shape or the like, the elastic deformation performance of the bulging portion 61 can be adjusted by appropriately setting the radius of curvature.

[0105] Furthermore, since the leaf spring 60 has the above shape, a space is defined between the outer surfaces of the plates 20, 30, and 40 and the bulging portion 61, that is, inside the bulging portion 61, so that this internal space can be effectively utilized.

[0106] Also, in this embodiment, in addition to the first biasing means and the second biasing means, a plurality of third biasing means are provided.

[0107] According to this aspect, the third plate 40 is connected not only to the second plate 30 by the second biasing means but also to the first plate 20 by the third biasing means, so that the movement of the third plate 40 relative to the second plate 30 can be more sufficiently restricted.

[0108] Furthermore, in this embodiment, since the "first biasing means" is configured as a combination of a plurality of tension springs 50 and a plurality of leaf springs 60, it is possible to easily adjust as appropriate the degree of restriction of the movement of the second plate 30 relative to the first plate 20, the degree of freedom of rocking, etc., according to the use, purpose, machining accuracy, etc. of the workpiece W to be machined.

[0109] Also, in the machining apparatus 100 of the present invention, it includes a rotationally driven rotary tool 102 and an alignment stage 10 that supports and automatically centers a workpiece W to be machined by the rotary tool 102 and is used as an alignment stage 10.

[0110] According to this, by using the adjustment device having the above configuration as the alignment stage 10, it is possible to obtain a machining apparatus 100 having a function of supporting and automatically centering a workpiece W machined by the rotary tool 102.

[0111] (Another embodiment of the adjustment device) FIG. 4 shows another embodiment of the adjustment device according to the present invention. Note that the same reference numerals are given to substantially the same parts as those in the above embodiment, and the description thereof is omitted.

[0112] The adjustment device of this embodiment is used as an alignment stage in the same manner as in the above embodiment. In the alignment stage 10A, the structure of the leaf spring 70 forming the first biasing means and the second biasing means is different from the structure of the leaf spring 60 in the alignment stage 10 of the above embodiment.

[0113] That is, the leaf spring 70 in this embodiment is in a flat plate shape, and both ends thereof are fixed to the corresponding plates via the fixing brackets 72, respectively. More specifically, the leaf spring 70 has a flat plate shape extending with a constant width and a constant thickness. Further, the fixing bracket 72 includes a fixing portion 73 fixed to the outer surfaces of the predetermined plates 20, 30, 40 by welding, fixing with a fixture such as welding, bolts, or adhesion with an adhesive or an adhesive tape, etc., and a clamping portion 74 disposed opposite to the fixing portion 73 and clamping the end portion of the leaf spring 70 between the fixing portion 73 and the clamping portion 74.

[0114] And, the leaf springs 70 are disposed on both outer side surfaces 23, 23 in the width direction of the first plate 20 and both outer side surfaces 34, 34 in the width direction of the second plate 30, at both end portions in the depth direction of both plates 20, 30. The first plate 20 and the second plate 30 are connected to each other by these leaf springs 70 and the fixing brackets 72. The width direction of the leaf spring 70 is arranged along the moving direction (the first moving direction X) of the second plate 30 with respect to the first plate 20.

[0115] Also, a pair of two leaf springs 70, 70 are arranged in parallel with a predetermined interval at the center portions in the width direction of both plates 30, 40 on both outer side surfaces 35, 35 in the depth direction of the second plate 30 and both outer side surfaces 43, 43 in the depth direction of the third plate 40. The second plate 30 and the third plate 40 are connected to each other by these leaf springs 70 and the fixing brackets 72. The width direction of the leaf spring 70 is arranged along the moving direction (the second moving direction Y) of the third plate 40 with respect to the second plate 30.

[0116] And, in this embodiment, since the leaf spring 70 is in a flat plate shape and both ends thereof are fixed to the corresponding plates via the fixing brackets 72, the leaf spring 70 having a flat plate shape can be used without any special processing, and the versatility can be enhanced.

[0117] Also, by changing the thickness of the leaf spring 70 or stacking a plurality of leaf springs 70, the spring force of the entire leaf spring can be adjusted as appropriate. Further, depending on the shape and structure of the fixed bracket (for example, increasing the thickness of the fixing portion 73 or the clamping portion 74), the strength and rigidity of the entire biasing means including the leaf spring 70 can be enhanced.

[0118] Note that the present invention is not limited to the above-described embodiments, and various modified embodiments are possible within the scope of the gist of the present invention, and such embodiments are also included in the scope of the present invention.

Explanation of Reference Numerals

[0119] 10, 10A... Alignment stage (adjusting device), 20... First plate, 21... First concave surface, 30... Second plate, 31... First convex surface, 32... Second concave surface, 40... Third plate, 41... Second convex surface, 50... Tension spring, 60... Leaf spring, 61... Bulging portion, 62... Fixing portion, 70... Leaf spring, 72... Fixed bracket, 100... Processing device, 102... Rotating tool, W... Workpiece (object)

Claims

1. An adjusting device for supporting or holding an object and adjusting the position of the object with respect to a reference position and / or the angle of the object with respect to a reference plane, comprising: a first plate having a first concave surface that is concave and curved and extends in a first direction; a second plate disposed above or below the first plate, having a first convex surface that conforms to the shape of the first concave surface on the side of the first plate, and a second concave surface that is concave and curved and extends in a second direction orthogonal to the first direction on the side opposite to the first plate; a third plate disposed above or below the second plate, having a second convex surface that conforms to the shape of the second concave surface on the side of the second plate; a plurality of first biasing means for connecting the second plate and the first plate to each other and biasing the second plate to return to its initial position with respect to the first plate when the second plate moves, swings, or moves and swings with respect to the first plate; a plurality of second biasing means for connecting the third plate and the second plate to each other and biasing the third plate to return to its initial position with respect to the second plate when the third plate moves, swings, or moves and swings with respect to the second plate; and at least one of the plurality of first biasing means and the plurality of second biasing means is a leaf spring, and the leaf spring is arranged such that its width direction is along the moving direction of the second plate with respect to the first plate or along the moving direction of the third plate with respect to the second plate. An adjusting device characterized by this.

2. The adjusting device according to Claim 1, wherein at least one of the plurality of first biasing means and at least one of the plurality of second biasing means are leaf springs.

3. The adjusting device according to Claim 1 or 2, wherein the leaf spring comprises a bulging portion that bulges from the outer surface of each plate in a plan view of each plate, and a pair of fixing portions that extend from both ends of the bulging portion and are respectively fixed to the corresponding plate.

4. The adjusting device according to Claim 1 or 2, wherein the leaf spring is flat, and both ends thereof are respectively fixed to the corresponding plate via fixing brackets.

5. connecting the third plate and the first plate to each other, and when the third plate moves, swings, or moves and swings relative to the second plate, indirectly urging the third plate back to its initial position relative to the second plate via the first plate, further comprising a plurality of third biasing means; The adjusting device according to claim 1 or 2, wherein at least one of the plurality of first biasing means, the plurality of second biasing means, and the plurality of third biasing means is a leaf spring, and the leaf spring is arranged such that its width direction is along the moving direction of the second plate with respect to the first plate, or along the moving direction of the third plate with respect to the second plate.

6. The adjusting device according to claim 1 or 2, wherein the plurality of first biasing means is composed of the leaf spring and a tension spring, or the plurality of second biasing means is composed of the leaf spring and a tension spring, or each of the plurality of first biasing means and the plurality of second biasing means is composed of the leaf spring and a tension spring.

7. a rotary tool driven to rotate; The processing device is characterized by comprising the adjusting device according to claim 1 or 2, and using the adjusting device as an alignment stage for automatically centering and supporting a workpiece to be processed by the rotary tool.

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