Robot

Abstract

To provide a robot that is effective for both space saving and ease of maintenance.SOLUTION: A robot 10 comprises: a hand 12 supporting a substrate W; a base 11; an articulated arm 20 that connects the hand 12 to the base 11; one or more motors 40 that drive the articulated arm 20 to change the position of the hand 12 relative to the base 11; a drive circuit 50 that supplies drive power to one or more motors 40; and a circuit enclosure 200 that houses the drive circuit 50 and is removably mounted to the base 11.SELECTED DRAWING: Figure 1

Description

[Technical field]

[0001] The present disclosure relates to robots. [Background technology]

[0002] Patent document 1 discloses a transport robot including a housing, a first arm attached to the housing, a second arm attached to the first arm, a third arm attached to the second arm, and a fourth arm attached to the third arm. The housing houses a control device that outputs a drive power supply and control signals to the motor that drives the transport robot. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2007-038360 A Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a robot that is effective in achieving both space saving and ease of maintenance. [Means for solving the problem]

[0005] A robot according to one aspect of the present disclosure comprises a hand that supports a substrate, a base, a multi-joint arm that connects the hand to the base, one or more motors that drive the multi-joint arm to change the position of the hand relative to the base, a drive circuit that supplies drive power to the one or more motors, and a circuit housing that houses the drive circuit and is removably attached to the base. Effect of the Invention

[0006] According to the present disclosure, it is possible to provide a robot that is effective in achieving both space saving and ease of maintenance. [Brief description of the drawings]

[0007] [Figure 1] FIG. 2 is a cross-sectional view illustrating a configuration of a robot. [Diagram 2] FIG. 2 is a front view of the base and circuit housing with the cover removed. [Diagram 3] FIG. 13 is a rear view of the base and circuit housing with the cover removed. [Figure 4] FIG. 2 is a side view of the base and the circuit housing with the cover attached. [Diagram 5] 11 is a side view illustrating an example of a mounting portion of the second frame to the first frame. FIG. [Figure 6] FIG. 13 is a rear view of the base, the circuit housing, and the power supply housing. [Figure 7] FIG. 2 is a front view of the base, the circuit housing, and the power supply housing. [Figure 8] FIG. 2 is a front view showing a state in which the cover is attached to the power supply housing. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0008] Hereinafter, the embodiments will be described in detail with reference to the drawings. In the description, the same elements or elements having the same functions are denoted by the same reference numerals, and duplicated description will be omitted.

[0009] The substrate transfer apparatus 1 shown in FIG. 1 is an apparatus for transferring a substrate W in a substrate processing apparatus for processing the substrate W. Examples of the substrate W include a semiconductor substrate, a glass substrate, a mask substrate, and an FPD (Flat Panel Display) substrate. As shown in FIG. 1, the substrate transfer apparatus 1 includes a chamber 90 and a robot 10. The chamber 90 accommodates the substrate W being transferred. For example, the chamber 90 has a horizontally extending top plate 91 and a horizontally extending bottom plate 92 below the top plate 91, and accommodates the substrate W in an internal space 93 formed between the top plate 91 and the bottom plate 92. The chamber 90 may be of a sealed type, or may be of a pressure-resistant type capable of evacuating the internal space 93.

[0010] The robot 10 transports the substrate W in the internal space 93. For example, the robot 10 transports the substrate W between a plurality of stations arranged around the chamber 90. The plurality of stations may include a load lock chamber that temporarily accommodates the substrate W to be transported, and a processing chamber that performs processing on the substrate W. For example, the robot 10 transports the substrate W in the internal space 93 along the horizontal direction.

[0011] For example, the robot 10 includes a hand 12, a base 11, an articulated arm 20, one or more motors 40, and a drive circuit 50. The hand 12 supports the substrate W from below, which is aligned with a horizontal plane. "Along the horizontal plane" also includes a state in which the substrate W is slightly tilted with respect to the horizontal plane at an error level. The same applies below. The hand 12 may be configured to hold the supported substrate W by suction or the like. The base 11 is fixed to the chamber 90.

[0012] The articulated arm 20 connects the hand 12 to the base 11. For example, the articulated arm 20 is a horizontal articulated arm, and has an arm 21 and an arm 22 between the base 11 and the hand 12, which are connected in sequence from the base 11 to the hand 12. The arm 21 is attached to the base 11 so as to be rotatable about an axis line Ax1 along the vertical direction, and extends away from the axis line Ax1. "Along the vertical direction" also includes a state in which the arm is slightly tilted with an error level with respect to a direction perpendicular to a horizontal plane. The same applies hereinafter.

[0013] The arm 22 is attached to the end of the arm 21 so as to be rotatable about an axis Ax2 along the vertical direction, and extends in a direction away from the axis Ax2. The hand 12 is attached to the end of the arm 22 so as to be rotatable about an axis Ax3 along the vertical direction, and extends in a direction away from the axis Ax3. Thus, the articulated arm 20 has a joint 23 about the axis Ax1, a joint 24 about the axis Ax2, and a joint 25 about the axis Ax3.

[0014] The robot 10 may have a plurality of hands and a plurality of articulated arms respectively corresponding to the plurality of hands so as to be able to handle a plurality of substrates W simultaneously. For example, the articulated arm 20 further has a hand 13 and an articulated arm 30 in addition to the hand 12 and the articulated arm 20. Like the hand 12, the hand 13 supports the substrate W along a horizontal plane from below. The hand 13 may be configured to hold the supported substrate W by suction or the like.

[0015] The articulated arm 30 connects the hand 13 to the base 11. For example, the articulated arm 30 has an arm 31 and an arm 32, similar to the articulated arm 20. The arm 31 is attached to the base 11 so as to be rotatable around an axis Ax1, and extends away from the axis Ax1. The arm 32 is attached to an end of the arm 31 so as to be rotatable around an axis Ax4 along the vertical direction, and extends away from the axis Ax4. The hand 13 is attached to an end of the arm 32 so as to be rotatable around an axis Ax5 along the vertical direction, and extends away from the axis Ax5. Thus, the articulated arm 30 has a joint 33 around the axis Ax1, a joint 34 around the axis Ax4, and a joint 35 around the axis Ax5.

[0016] The multi-joint arms 20 and 30 may be configured such that at least one or more pairs of the joints 23, 24, and 25 and the joints 33, 34, and 35 are interlocked with each other. For example, the arm 21 and the arm 31 may be fixed to each other while being extended in different directions. This causes the joint 23 and the joint 33 to be interlocked with each other, and the arm 21 and the arm 31 to rotate integrally around the axis line Ax1.

[0017] The multi-joint arm 20 may be configured such that the joint 24 and the joint 25 are interlocked. For example, the multi-joint arm 20 may further include a transmission mechanism 26 (e.g., a pulley and a belt) that interlocks the joint 24 and the joint 25 so that the rotation of the arm 22 relative to the arm 21 and the rotation of the hand 12 relative to the arm 22 are interlocked in opposite directions. The transmission mechanism 26 allows the hand 12 to be displaced while maintaining a constant posture of the hand 12 relative to the arm 21 by rotating the arm 22 relative to the arm 21.

[0018] Similarly, the multi-joint arm 30 may be configured so that the joint 34 and the joint 35 are interlocked. For example, the multi-joint arm 30 may further include a transmission mechanism 36 (e.g., a pulley and a belt) that interlocks the joint 34 and the joint 35 so that the rotation of the arm 32 relative to the arm 31 and the rotation of the hand 13 relative to the arm 32 are interlocked in opposite directions.

[0019] As described above, according to the configuration in which the joints 23 and 33 are linked, the joints 24 and 25 are linked, and the joints 34 and 35 are linked, the hands 12 and 13 can be advanced and retreated in any direction around the axis line Ax1 by the three motors. The robot 10 may be configured to raise and lower the substrate W in addition to transporting the substrate W in the horizontal direction.

[0020] The one or more motors 40 drive the multi-joint arm 20 to change the position of the hand 12 relative to the base 11. The one or more motors 40 may further drive the multi-joint arm 30 to change the position of the hand 13 relative to the base 11. Furthermore, the one or more motors 40 may raise and lower the multi-joint arm 20 and the multi-joint arm 30.

[0021] The one or more motors 40 may be built into the base 11. For example, the base 11 has a base housing 100, and the one or more motors 40 are housed in the base housing 100.

[0022] For example, the one or more motors 40 include a motor 41, a motor 42, a motor 43, and a motor 44. The motors 41, 42, 43, and 44 are housed in the base housing 100.

[0023] The motor 41 is, for example, an electric servo motor, and has an output shaft 45 along the axis Ax1. The output shaft 45 protrudes upward from within the base housing 100 and is connected to the arms 21 and 31. The motor 41 rotates the output shaft 45 about the axis Ax1, thereby rotating the arms 21 and 31 about the axis Ax1.

[0024] The motor 42 is, for example, an electric servo motor, and drives the joint 24 via a transmission mechanism 27 (for example, a pulley and a belt) that passes through an output shaft 45 and the arm 21. For example, the motor 42 rotates the arm 22 relative to the arm 21 around an axis line Ax2.

[0025] The motor 43 is, for example, an electric servo motor, and drives the joint 34 via a transmission mechanism 37 (for example, a pulley and a belt) that passes through the output shaft 45 and the arm 31. For example, the motor 43 rotates the arm 32 relative to the arm 31 around the axis Ax3. The motors 41, 42, and 43 are lined up in order from top to bottom and fixed to each other. The motor 44 is, for example, an electric servo motor, and raises and lowers the motor 43 via a transmission mechanism 46 (for example, a pulley, a belt, and a ball screw). As a result, the multi-joint arm 20 and the multi-joint arm 30 connected to the output shaft 45 are raised and lowered.

[0026] The motors 41, 42, 43, and 44 respectively have rotation angle sensors 71, 72, 73, and 74. The rotation angle sensor 71 detects the rotation angle of the motor 41 (the rotation angle of the output shaft 45), the rotation angle sensor 72 detects the rotation angle of the motor 42, the rotation angle sensor 73 detects the rotation angle of the motor 43, and the rotation angle sensor 74 detects the rotation angle of the motor 44. The rotation angle sensors 71, 72, 73, and 74 are, for example, optical or magnetic rotary encoders.

[0027] In order to transport the substrate W in the internal space 93, at least the hands 12, 13 and the articulated arms 20, 30 are housed in the internal space 93. The base 11 may be disposed outside the chamber 90. In this case, the chamber 90 may further have a chamber opening 94 for disposing the base 11 outside the chamber 90.

[0028] For example, the chamber opening 94 is formed in the bottom plate 92 and opens downward. The base 11 protrudes downward from the bottom plate 92 through the chamber opening 94. In this case, the robot 10 may further have a flange 14. The flange 14 extends horizontally over the entire circumference around the axis Ax1 so as to separate the articulated arms 20, 30 and the base 11. The flange 14 is attached to the bottom plate 92 so as to close the chamber opening 94.

[0029] The flange 14 may be attached to the bottom plate 92 from below, or may be attached to the bottom plate 92 from above. When the flange 14 is attached to the bottom plate 92 from above, an entry opening 95 for carrying the robot 10 is formed in the top plate 91. The robot 10 is carried into the internal space 93 from above through the entry opening 95, and the base 11 is passed through the chamber opening 94 from above. The chamber 90 may further have a cover 96 that covers the entry opening 95.

[0030] The robot 10 may further include a seal member 60. The seal member 60 is provided on the flange 14 so as to airtightly separate the internal space of the base 11 from the external space of the base 11. For example, the seal member 60 includes an inner seal 61, an outer seal 62, and an expandable portion 63. The inner seal 61 surrounds the output shaft 45 and is fixed to the motor 41. The inner seal 61 is, for example, a mechanical seal, and is in close contact with the output shaft 45 over the entire circumference while allowing the output shaft 45 to rotate. The outer seal 62 surrounds the output shaft 45, is in close contact with the flange 14 over the entire circumference, and is fixed to the flange 14. The expandable portion 63 is a bellows-shaped hose that surrounds the output shaft 45 between the inner seal 61 and the outer seal 62, and expands and contracts in response to the elevation and lowering of the motor 41 by the motor 44.

[0031] The drive circuit 50 supplies drive power to one or more motors 40. Supplying drive power includes converting power supplied from a power source into drive power and supplying it to one or more motors 40. The drive power means power that generates a magnetic field for driving a movable part such as a rotor.

[0032] For example, the drive circuit 50 includes a servo circuit 51, a servo circuit 52, a servo circuit 53, a servo circuit 54, an arithmetic circuit 55, and a communication circuit 56. The servo circuit 51 converts the power supplied from the power source into drive power corresponding to the control command and supplies it to the motor 41. The servo circuit 52 converts the power supplied from the power source into drive power corresponding to the control command and supplies it to the motor 42. The servo circuit 53 converts the power supplied from the power source into drive power corresponding to the control command and supplies it to the motor 43. The servo circuit 54 converts the power supplied from the power source into drive power corresponding to the control command and supplies it to the motor 44. The arithmetic circuit 55 calculates control commands for the motors 41, 42, 43, and 44 to cause the multi-joint arm 20 and the multi-joint arm 30 to perform a predetermined operation, and outputs the calculation results to the servo circuits 51, 52, 53, and 54, respectively. The communication circuit 56 communicates with an external device of the robot 10 in response to a request from the arithmetic circuit 55. Examples of the external device include a host controller and a calibration device for the position of the substrate W. The communication circuit 56 has one or more communication connectors C11 that are connected to devices external to the robot 10.

[0033] From the viewpoint of maintainability, the drive circuit 50 is housed in a housing separate from the base housing 100 in which the motors 41, 42, 43, 44 are housed, and cables for electrically connecting the drive circuit 50 and the motors 41, 42, 43, 44 are wired between the housing housing the drive circuit 50 and the base housing 100. The cables include, for example, a power cable for supplying drive power from the drive circuit 50 to the motors 41, 42, 43, 44, and a feedback cable for transmitting a feedback signal from the rotation angle sensors 71, 72, 73, 74 to the drive circuit 50. For this reason, in order to mount the robot 10, in addition to the installation space for the housing housing the drive circuit 50, it is necessary to secure wiring space for many cables around the chamber 90. It is not necessarily easy to secure such spaces in a substrate processing apparatus. Therefore, the robot 10 further includes a circuit housing 200. The circuit housing 200 houses the drive circuit 50 and is attached to the base 11 in a detachable state. For example, the circuit housing 200 is attached to the base housing 100 .

[0034] Since the circuit housing 200 is attached to the base 11, the wiring space from the drive circuit 50 to the base 11 can be significantly reduced. It is also unnecessary to provide an installation space for the circuit housing 200 separate from the installation space for the robot 10. Furthermore, when maintenance of the drive circuit 50 is required, the maintenance of the drive circuit 50 can be performed by removing the circuit housing 200 while leaving the base 11 installed. This is therefore effective in achieving both space saving and ease of maintenance.

[0035] The state in which the circuit housing 200 is removable from the base housing 100 means that the circuit housing 200 can be removed from the base housing 100 without destroying the base housing 100 and the circuit housing 200. For example, the circuit housing 200 is attached to the base housing 100 by a fastener such as a bolt that can be repeatedly attached and detached.

[0036] The circuit housing 200 may be attached to the base 11 such that the base 11 is located between the circuit housing 200 and the flange 14. The base 11 can suppress the transfer of heat from the space in which the hands 12, 13 and the articulated arms 20, 30 are disposed (for example, the internal space 93 of the chamber 90) to the circuit housing 200, thereby preventing the drive circuit 50 from becoming too hot. As described above, when the robot 10 is provided with the seal member 60, the transfer of heat from the internal space 93 of the chamber 90 to the internal space of the circuit housing 200 can be further suppressed, thereby further preventing the drive circuit 50 from becoming too hot.

[0037] For example, with the flange 14 attached to the bottom plate 92, the base 11 is located below the flange 14, and the circuit housing 200 is located below the base 11. The flange 14 may hold the base 11 in a state in which the circuit housing 200 is separated from the floor surface FS. By keeping the circuit housing 200 in a state in which it is raised above the floor surface FS, further space saving can be achieved.

[0038] The base housing 100 may have a first frame 110, and the circuit housing 200 may have a second frame 210. The first frame 110 imparts a load capacity to the base 11 that exceeds the total weight of the hands 12, 13, the articulated arms 20, 30, the flange 14, and the motors 41, 42, 43, 44. The first frame 110 imparts a load capacity to the base 11 means that the load capacity of the base 11 cannot be obtained if the first frame 110 is removed from the base 11, and the load capacity of the base 11 can be obtained if the first frame 110 is not removed from the base 11. The first frame 110 may bear half or more of the load capacity of the base 11, may bear 70% or more, or may bear 90% or more.

[0039] The second frame 210 imparts to the circuit housing 200 a load capacity that exceeds the total weight of the hands 12, 13, the articulated arms 20, 30, the flange 14, the motors 41, 42, 43, 44, and the base 11. That the second frame 210 imparts a load capacity to the circuit housing 200 means that if the second frame 210 is removed from the circuit housing 200, the load capacity of the circuit housing 200 cannot be obtained, but if the second frame 210 is not removed from the circuit housing 200, the load capacity of the circuit housing 200 can be obtained. The second frame 210 may bear half or more of the load capacity of the circuit housing 200, may bear 70% or more, or may bear 90% or more.

[0040] The second frame 210 may be attached to the first frame 110. When the entire robot 10 is removed from the chamber 90 for maintenance, the hands 12, 13, the articulated arms 20, 30, the flange 14, and the motors 41, 42, 43, 44 can be supported by the circuit housing 200 and the base 11, which further improves maintainability.

[0041] 2 and 3, the base housing 100 has a first frame 110 and a cover 120. The first frame 110 is fixed under the flange 14 and surrounds at least one of the motors 41, 42, 43, and 44 (for example, the motors 41, 42, and 43) around an axis that intersects with the flange 14. For example, the first frame 110 is made of a metal material such as steel, stainless steel, or an aluminum alloy, and has a plurality of openings 111 for weight reduction or the like.

[0042] The cover 120 surrounds the first frame 110 around an axis that intersects with the flange 14, and covers at least some (for example, all) of the multiple openings 111.

[0043] The cover 120 may be separated into a cover 130 and a cover 140 so as to be removable from the first frame 110 along a radial direction centered on an axis line intersecting the flange 14. The cover 130 and the cover 140 cover the first frame 110 in opposite directions in the radial direction. Each of the cover 130 and the cover 140 is attached to the first frame 110 in a removable state by a fastener such as a bolt. Hereinafter, for convenience of explanation, the side where the cover 130 is located relative to the first frame 110 will be referred to as the "front" and the side where the cover 140 is located relative to the first frame 110 will be referred to as the "rear".

[0044] The circuit housing 200 includes a second frame 210 and a cover 240. The second frame 210 is made of a metal material such as steel, stainless steel, or an aluminum alloy, and includes a base plate 211 and a pair of support beams 220A and 220B. The base plate 211 extends from below to cover the drive circuit 50 and supports the drive circuit 50. The pair of support beams 220A and 220B protrude upward from the left and right ends of the drive circuit 50, respectively, to connect the base plate 211 to the first frame 110. The ends (upper ends) of the pair of support beams 220A and 220B are attached to the first frame 110, respectively. This allows the second frame 210 to support the hands 12 and 13, the articulated arms 20 and 30, the flange 14, the base 11, and the motors 41, 42, 43, and 44.

[0045] The support beams 220A and 220B form a front opening 214 and a rear opening 215 in the second frame 210. The openings 214 and 215 are used as wiring openings that expose one or more connectors to which the motors 41, 42, 43, and 44 are electrically connected (for example, to which the above-mentioned cables are connected).

[0046] For example, the drive circuit 50 has power connectors C21 and C22 and feedback connectors C23, C24, C25 and C26. The power connector C21 connects power cables CA21, CA22 and CA23 from the motors 41, 42 and 43 to the servo circuits 51, 52 and 53, respectively. The power connector C22 connects a power cable CA24 from the motor 44 to the servo circuit 54. This makes it possible for the power cables CA21, CA22, CA23 and CA24 to supply drive power from the servo circuits 51, 52, 53 and 54 to the motors 41, 42, 43 and 44, respectively.

[0047] The feedback connector C23 connects a feedback cable CA25 from the rotation angle sensor 71 to the servo circuit 51. The feedback connector C24 connects a feedback cable CA26 from the rotation angle sensor 72 to the servo circuit 52. The feedback connector C25 connects a feedback cable CA27 from the rotation angle sensor 73 to the servo circuit 53. The feedback connector C26 connects a feedback cable CA28 from the rotation angle sensor 74 to the servo circuit 54. This makes it possible for the feedback cables CA25, CA26, CA27, and CA28 to transmit feedback signals from the rotation angle sensors 71, 72, 73, and 74 to the servo circuits 51, 52, 53, and 54, respectively.

[0048] As shown in FIG. 2, the opening 214 exposes the power connector C21 and the feedback connectors C23, C24, C25, and C26 when the circuit housing 200 is attached to the base 11. As shown in FIG. 3, the opening 215 exposes the power connector C22 when the circuit housing 200 is attached to the base 11. The state in which the base 11 is attached to the circuit housing 200 means a state in which at least the second frame 210 is attached to the base 11. The same applies below. The opening 214 exposes the power connector C21 and the feedback connectors C23, C24, C25, and C26 means that an operator can access the power connector C21 and the feedback connectors C23, C24, C25, and C26 through the opening 214. Similarly, the opening 215 exposes the power connector C22 means that an operator can access the power connector C22 through the opening 215.

[0049] The openings 214 and 215 allow the motors 41, 42, 43, and 44 to be connected to the drive circuit 50 after the circuit housing 200 is attached to the base 11, and the circuit housing 200 can be removed from the base 11 after the motors 41, 42, 43, and 44 are separated from the drive circuit 50. This further improves the ease of mounting and removing the circuit housing 200 to and from the base 11.

[0050] The second frame 210 may further have a sub-frame 230 protruding from the base plate 211 so as to cover the communication circuit 56 from the rear. The sub-frame 230 may have an opening 231 for exposing the communication connector C11.

[0051] As shown in FIG. 4, the cover 240 surrounds the second frame 210 around an axis that intersects with the flange 14 to cover the openings 214 and 215 .

[0052] The cover 240 may be divided into a cover 250 and a cover 260 so that the cover 240 can be removed from the second frame 210 along a radial direction centered on an axis line intersecting the flange 14. The cover 250 and the cover 260 cover the second frame 210 in opposite directions in the radial direction. For example, the cover 250 covers the opening 214 from the front, and the cover 260 covers the opening 215 from the rear. The cover 250 and the cover 260 are each attached to the support beams 220A and 220B in a detachable state by a fastener such as a bolt. The cover 260 may have an opening 261 corresponding to the opening 231. The opening 261 exposes the communication connector C11 (see FIG. 6).

[0053] In this way, with the base 11 attached to the circuit housing 200, the cover 250 can be attached to and detached from the second frame 210. Therefore, the cover 250 can open and close the opening 214 with the circuit housing 200 attached to the base 11. Similarly, with the base 11 attached to the circuit housing 200, the cover 260 can be attached to and detached from the second frame 210. Therefore, the cover 260 can open and close the opening 215 with the circuit housing 200 attached to the base 11. It is possible to protect the inside of the circuit housing 200 while further improving the ease of attachment and detachment of the circuit housing 200 to and from the base 11.

[0054] As shown in Fig. 5, the ends of the support beams 220A, 220B are removably attached to the first frame 110. For example, the robot 10 includes one or more first hooks 121 and one or more second hooks 221. The one or more first hooks 121 are provided on the base 11. The one or more second hooks 221 are provided so as to hook onto the one or more first hooks 121, respectively, and temporarily fasten the circuit housing 200 to the base 11. The circuit housing 200 is attached to the base 11 with the one or more second hooks 221 hooked onto the one or more first hooks 121, respectively.

[0055] Before mounting the circuit housing 200 to the base 11, the circuit housing 200 is temporarily fastened to the base 11 by one or more first hooks 121 and one or more second hooks 221, so that the worker can mount the circuit housing 200 to the base 11 without having to support the circuit housing 200 himself / herself. This improves the ease of mounting the circuit housing 200 to the base 11.

[0056] The robot 10 is provided with a plurality of (e.g., three) first hooks 121 and a plurality of second hooks 221 corresponding to the first hooks 121 at the ends of the support beams 220A and 220B. The end of the support beam 220A will be described below. The description of the end of the support beam 220B that overlaps with the description of the end of the support beam 220A will be omitted.

[0057] For example, the first hooks 121 are pins provided on the outer circumferential surface of the lower end of the first frame 110. The first hooks 121 are lined up in the circumferential direction of the first frame 110, and each protrudes outward from the outer circumferential surface of the first frame 110. The second hooks 221 are hook-shaped portions provided on the upper end of the support beam 220A so as to hook onto the first hooks 121, respectively. For example, the upper end of the support beam 220A is formed with a plurality of notches 222 lined up in the circumferential direction of the first frame 110, and each receiving the first hooks 121.

[0058] Each of the multiple cutouts 222 is open upward of the support beam 220A, and is bent at a position away from the upper end of the support beam 220A to follow the circumferential direction of the first frame 110. A second hook 221, which is a hook-shaped portion that hooks onto the first hook 121, is formed above the portion of the cutout 222 that follows the circumferential direction of the first frame 110. The support beam 220A is attached to the first frame 110 by multiple mounting fixtures 223 at multiple locations adjacent to the multiple cutouts 222 in the circumferential direction of the first frame 110. The multiple mounting fixtures 223 are multiple bolts.

[0059] The bending direction of the multiple notches 222 in the support beam 220B may be the same as the bending direction of the multiple notches 222 in the support beam 220A. In this case, in a state in which the multiple first hooks 121 enter the multiple notches 222 in the support beam 220A from above, and the multiple first hooks 121 enter the multiple notches 222 in the support beam 220B from above, the circuit housing 200 can be rotated around an axis intersecting with the flange 14 to hook the multiple second hooks 221 onto the multiple first hooks 121, respectively.

[0060] The bending direction of the multiple notches 222 in the support beam 220B may be opposite to the bending direction of the multiple notches 222 in the support beam 220A. In this case, the multiple first hooks 121 enter the multiple notches 222 in the support beam 220A from above, and the multiple first hooks 121 enter the multiple notches 222 in the support beam 220B from above, and then the circuit housing 200 is slid in the horizontal direction, whereby the multiple second hooks 221 can be hooked onto the multiple first hooks 121, respectively.

[0061] The multiple mounting fixtures 223 are not necessarily limited to multiple bolts, as long as they are at least attached to the first frame 110 in a detachable state and maintain the support beam 220A attached to the first frame 110. For example, the multiple mounting fixtures 223 may be multiple rivets. Also, the multiple first hooks 121 may double as the multiple mounting fixtures 223, and the multiple second hooks 221 may double as the multiple mounting fixtures 223. For example, the multiple first hooks 121 may be multiple bolts that function as the multiple first hooks 121 when loosely attached to the first frame 110, and function as the multiple mounting fixtures 223 by being fastened with the multiple notches 222 hooked on the multiple first hooks 121.

[0062] As shown in FIG. 3 and FIG. 6, the robot 10 may further include a first ventilation port 112, a second ventilation port 232, and a ventilator 300. The first ventilation port 112 is formed in the first frame 110 and the cover 120 so as to communicate the internal space of the base 11 (for example, the space surrounded by the first frame 110) with the external space of the base 11 (see FIG. 6). The second ventilation port 232 is formed in the second frame 210 and the cover 240 so as to communicate the internal space of the circuit housing 200 with the external space of the circuit housing 200 (see FIG. 6). The ventilator 300 generates an airflow between the first ventilation port 112 and the second ventilation port 232 through the internal space of the base 11 and the internal space of the circuit housing 200. The airflow generated by the ventilator 300 in the internal space of the base 11 and the internal space of the circuit housing 200 can further suppress the drive circuit 50 from becoming hot.

[0063] The ventilator 300 may generate an airflow that flows from the second ventilation port 232 to the first ventilation port 112 through between the internal space of the base 11 and the internal space of the circuit housing 200. By placing the internal space of the circuit housing 200 upstream of the ventilation, the temperature rise of the drive circuit 50 can be further suppressed. As described above, in a configuration in which all of the motors 41, 42, 43, and 44 are built into the base 11, the temperature of the internal space of the base 11 can become higher. In contrast, by placing the internal space of the circuit housing 200 upstream of the ventilation, the temperature rise of the drive circuit 50 can be further suppressed.

[0064] For example, the first ventilation opening 112 is formed in the first frame 110 and the cover 140 so as to open rearward. The second ventilation opening 232 is formed in the subframe 230 and the cover 260 so as to open rearward. These are merely examples and can be changed. For example, the first ventilation opening 112 may be formed in the first frame 110 and the cover 130 so as to open forward. The second ventilation opening 232 may be formed in the base plate 211 so as to open downward.

[0065] The ventilator 300 may have a fan 310. The fan 310 is provided in the first ventilation port 112 so as to send gas from the internal space of the base 11 to the external space of the base 11. For example, the fan 310 has a rotating blade that generates an airflow from the internal space of the base 11 to the external space of the base 11 by rotation, and is attached to the first frame 110 so as to cover at least a part of the first ventilation port 112 with the rotating blade. By providing the fan 310 at the most downstream position in the internal space of the base 11 and the internal space of the circuit housing 200, it is possible to suppress the stagnation of gas in the internal space of the base 11 and further suppress the heat transfer from the internal space of the base 11 to the internal space of the circuit housing 200.

[0066] The ventilator 300 may have a second fan 320 instead of the fan 310. The second fan 320 is provided in the second ventilation port 232 so as to send gas from the external space of the circuit housing 200 to the internal space of the circuit housing 200. For example, the second fan 320 has a rotating blade that generates an airflow from the external space of the circuit housing 200 to the internal space of the circuit housing 200 by rotation, and is attached to the subframe 230 so as to cover at least a part of the second ventilation port 232 with the rotating blade. By providing the fan 310 at the most upstream position in the internal space of the base 11 and the internal space of the circuit housing 200, it is possible to suppress the retention of gas in the internal space of the circuit housing 200 and further suppress the heat transfer from the internal space of the base 11 to the internal space of the circuit housing 200.

[0067] The ventilator 300 may have both the fan 310 and the second fan 320. This can suppress the stagnation of gas in both the internal space of the base 11 and the internal space of the circuit housing 200, and can further suppress the heat transfer from the internal space of the base 11 to the internal space of the circuit housing 200.

[0068] In this manner, in a configuration in which the internal space of the circuit housing 200 is upstream of the ventilation, a part of the drive circuit 50 (e.g., the arithmetic circuit 55) may protrude from the circuit housing 200 toward the flange 14 and be housed in the base 11 (see FIG. 1). Any of the motors 41, 42, 43, 44 and the transmission mechanism 46 may protrude from the first frame 110 away from the flange 14 (e.g., downward) and be housed in the circuit housing 200.

[0069] The surplus space in the base 11 can be used to accommodate the drive circuit 50, thereby making the circuit housing 200 smaller, and further space-saving can be achieved. In addition, the surplus space in the circuit housing 200 can be used to accommodate the transmission mechanism 46, etc., thereby making the base 11 smaller, and further space-saving can be achieved. Since the internal space of the circuit housing 200 is upstream of the ventilation, the drive circuit 50 is prevented from becoming too hot in both cases where a part of the drive circuit 50 is accommodated in the base and where the transmission mechanism 46, etc. are accommodated in the circuit housing 200.

[0070] 6, the robot 10 may further include a power supply circuit 70 and a power supply housing 400. The power supply circuit 70 supplies power to the drive circuit 50. For example, the power supply circuit 70 generates a plurality of power supplies having different voltages and supplies them to the drive circuit 50. The power supply housing 400 houses the power supply circuit 70 and is attached to the circuit housing 200 in a detachable state.

[0071] Since the power supply housing 400 is attached to the circuit housing 200, the wiring space from the power supply circuit 70 to the drive circuit 50 can be significantly reduced. It is also unnecessary to provide an installation space for the power supply housing 400 separate from the installation space for the robot 10. Furthermore, when maintenance of the power supply circuit 70 is required, the power supply housing 400 can be removed while the hands 12, 13, the articulated arms 20, 30, the base 11, and the circuit housing 200 are left installed to perform maintenance of the power supply circuit 70. This is therefore even more effective in achieving both space saving and ease of maintenance.

[0072] The power supply housing 400 may be attached to the circuit housing 200 so as to be aligned with the circuit housing 200 in a direction (e.g., left-right direction) intersecting the direction in which the base 11 and the circuit housing 200 are aligned (e.g., up-down direction). The space around the circuit housing 200 can be utilized for arranging the power supply housing 400. In the illustrated example, the power supply housing 400 is attached to the support beam 220B by a removable fastener such as a bolt.

[0073] The power supply housing 400 may be attached to the support beam 220B via a bracket 410. For example, the power supply housing 400 may be fixed to a plate-shaped bracket 410 interposed between the power supply housing 400 and the support beam 220B, and the bracket 410 may be attached to the support beam 220B by the above-mentioned attachment. As shown in FIG. 7, the robot 10 may further have an opening 251 that allows wiring from the power supply circuit 70 to the drive circuit 50 even in a state in which the cover 240 is attached to the second frame 210 and the cover 120 is attached to the first frame 110. In the example of FIG. 7, the opening 251 is formed at the lower right end of the cover 130 and the upper right end of the cover 250.

[0074] For example, the drive circuit 50 further includes one or more power connectors C41. The one or more power connectors C41 connect one or more power cables CA41 from the power supply housing 400 to the servo circuits 51, 52, 53, 54, the arithmetic circuit 55, and the communication circuit 56, respectively. This makes it possible for the one or more power cables CA41 to supply a plurality of power sources generated by the power supply housing 400 to the servo circuits 51, 52, 53, 54, the arithmetic circuit 55, and the communication circuit 56, respectively.

[0075] The opening 251 exposes one or more power connectors C41 when the cover 130 is attached to the first frame 110 and the cover 250 is attached to the second frame 210. The opening 251 exposes one or more power connectors C41 means that an operator can access the one or more power connectors C41 through the opening 251. For example, one or more power cables CA41 are drawn out from a surface of the outer surface of the power supply housing 400 facing the circuit housing 200, and are connected to the one or more power connectors C41 through the opening 251, respectively.

[0076] 8, the robot 10 may further include a cover 420 that covers the opening 251. For example, the cover 420 is attached to the power supply housing 400 by fasteners such as bolts in a removable state.

[0077] Returning to FIG. 6, the robot 10 may further include a communication connector C31 provided in the power supply housing 400, and a communication cable CA31 that electrically connects the communication connector C31 to the drive circuit 50. The drive circuit 50 may be configured to communicate with an external device via the communication connector C31 and the communication cable CA31. Provided in the power supply housing 400 includes being provided inside the power supply housing 400. The surplus space in the power supply housing 400 can be effectively used as an arrangement space for the communication connector C31, thereby achieving further space saving.

[0078] For example, the communication circuit 56 may be configured to communicate with an external device via the communication connector C31 and the communication cable CA31. As described above, examples of the external device include a host controller and a calibration device. The communication circuit 56 may be configured to communicate with the host controller via the communication connector C11 and to communicate with the calibration device via the communication connector C31. By connecting the communication connector C11 and the communication connector C31 to different destinations, the workability of wiring can be further improved.

[0079] 〔summary〕 The above-described embodiment includes the following configurations. (1) A robot 10 comprising a hand 12 that supports a substrate W, a base 11, a multi-joint arm 20 that connects the hand 12 to the base 11, one or more motors 40 that drive the multi-joint arm 20 to change the position of the hand 12 relative to the base 11, a drive circuit 50 that supplies drive power to the one or more motors 40, and a circuit housing 200 that houses the drive circuit 50 and is removably attached to the base 11. Since the circuit housing 200 is attached to the base 11, the wiring space can be significantly reduced. It is also unnecessary to provide an installation space for the circuit housing 200 separate from the installation space for the robot 10. Furthermore, when maintenance of the drive circuit 50 is required, the maintenance of the drive circuit 50 can be performed by removing the circuit housing 200 while leaving the articulated arm 20 installed. This is therefore effective in achieving both space saving and ease of maintenance.

[0080] (2) The robot 10 described in (1), further comprising a flange 14 extending to separate the arm and the base 11, and the circuit housing 200 is attached to the base 11 such that the base 11 is positioned between the circuit housing 200 and the flange 14. The base 11 prevents heat from being transferred from the space in which the hand 12 and the arm are disposed to the circuit housing 200, thereby preventing the drive circuit 50 from becoming too hot.

[0081] (3) The robot 10 described in (2) further includes a first ventilation opening 112 that connects the internal space of the base 11 to the external space of the base 11, a second ventilation opening 232 that connects the internal space of the circuit housing 200 to the external space of the circuit housing 200, and a ventilator 300 that generates an airflow between the first ventilation opening 112 and the second ventilation opening 232 through the internal space of the base 11 and the internal space of the circuit housing 200. This further prevents the drive circuit 50 from becoming too hot.

[0082] (4) The robot 10 according to (3), wherein the ventilator 300 generates an air current that flows from the second ventilation opening 232 to the first ventilation opening 112 through the internal space of the base 11 and the internal space of the circuit housing 200 . By placing the internal space of the circuit housing 200 upstream of the ventilation, the temperature rise of the drive circuit 50 can be further suppressed.

[0083] (5) The robot 10 according to (4), wherein the ventilator 300 has a fan 310 provided in the first ventilation opening 112 so as to send gas from the internal space of the base 11 to the external space of the base 11. Heat transfer from the internal space of the base 11 to the internal space of the circuit housing 200 can be further suppressed.

[0084] (6) The robot 10 according to (5), wherein the ventilator 300 further includes a second fan 320 provided in the second ventilation port 232 so as to send gas from the external space of the circuit housing 200 to the internal space of the circuit housing 200. Heat transfer from the internal space of the base 11 to the internal space of the circuit housing 200 can be further suppressed.

[0085] (7) The robot 10 according to any one of (4) to (6), wherein the one or more motors 40 are built into the base 11. Although the inside of the base 11 may become hotter, the internal space of the circuit housing 200 is located upstream of the ventilation, so that the temperature rise in the drive circuit 50 can be further suppressed.

[0086] (8) The robot 10 according to any one of (4) to (7), wherein a portion of the drive circuit 50 protrudes from the circuit housing 200 toward the flange 14 and is housed in the base 11. The surplus space in the base 11 can be used to accommodate the drive circuit 50, thereby making the circuit housing 200 smaller and further saving space. Since the internal space of the circuit housing 200 is upstream of the ventilation, even if a part of the drive circuit 50 is accommodated in the base 11, the drive circuit 50 is prevented from becoming too hot.

[0087] (9) The robot 10 according to any one of (2) to (8), further comprising a seal member 60 provided on the flange 14 so as to air-tightly separate an internal space of the base 11 from an external space of the base 11. This further reduces the transfer of heat from the space in which the hand 12 and the arm are disposed to the internal space of the circuit housing 200, thereby further preventing the drive circuit 50 from becoming too hot.

[0088] (10) The robot 10 described in any one of (2) to (9), wherein the base 11 and the circuit housing 200 are positioned below the flange 14, and the flange 14 holds the base 11 with the circuit housing 200 spaced from the floor surface. By keeping the circuit housing 200 above the floor surface, further space saving can be achieved.

[0089] (11) A robot 10 described in (10), wherein the base 11 has a first frame 110 that provides the base 11 with a load-bearing capacity that exceeds the combined weight of the hand 12, the articulated arm 20, the flange 14, and one or more motors 40, and the circuit housing 200 has a second frame 210 that provides the circuit housing 200 with a load-bearing capacity that exceeds the combined weight of the hand 12, the articulated arm 20, the flange 14, the one or more motors 40, and the base 11, and the second frame 210 is attached to the first frame 110. During maintenance, the hand 12, the articulated arm 20, the flange 14, and one or more motors 40 can be supported by the circuit housing 200 and the base 11, further improving maintainability.

[0090] (12) The robot 10 described in (10) or (11) further comprises a first hook 121 provided on the base 11 and a second hook 221 provided on the circuit housing 200 so as to engage with the first hook 121 to temporarily secure the circuit housing 200 to the base 11, and the circuit housing 200 is attached to the base 11 with the second hook 221 engaged with the first hook 121. This improves the ease of mounting the circuit housing 200 to the base 11.

[0091] (13) The robot 10 described in any one of (1) to (12), wherein the drive circuit 50 has a connector to which one or more motors 40 are electrically connected, and the circuit housing 200 has wiring openings 214, 215 that expose the connector when the circuit housing 200 is attached to the base 11. After the circuit housing 200 is attached to the base 11, one or more motors 40 can be connected to the drive circuit 50, and after the one or more motors 40 are disconnected from the drive circuit 50, the circuit housing 200 can be removed from the base 11. This further improves the ease of mounting and removing the circuit housing 200 to and from the base 11.

[0092] (14) The robot 10 according to (13), further comprising a cover capable of opening and closing the wiring openings 214, 215 when the circuit housing 200 is attached to the base 11. The inside of the circuit housing 200 can be protected while further improving the ease of attachment and detachment of the circuit housing 200 to the base 11.

[0093] (15) The robot 10 described in any one of (1) to (14) further comprises a power supply circuit 70 that supplies power to the drive circuit 50, and a power supply housing 400 that houses the power supply circuit 70 and is removably attached to the circuit housing 200. Since the power supply housing 400 is attached to the circuit housing 200, the wiring space from the power supply circuit 70 to the drive circuit 50 can be significantly reduced. There is also no need to provide an installation space for the power supply housing 400 separate from the installation space for the robot 10. Furthermore, when maintenance of the power supply circuit 70 is required, the power supply housing 400 can be removed while the articulated arm 20 and the circuit housing 200 are left installed to perform maintenance of the power supply circuit 70. This is therefore even more effective in achieving both space saving and ease of maintenance.

[0094] (16) The robot 10 according to (15), wherein the power supply housing 400 is attached to the circuit housing 200 so as to be aligned with the circuit housing 200 in a direction intersecting a direction in which the base 11 and the circuit housing 200 are aligned. The space around the circuit housing 200 can be utilized for arranging the power supply housing 400 .

[0095] (17) The robot 10 described in (15) further includes a communication connector C31 provided on the power supply housing 400 and a communication cable CA31 that electrically connects the communication connector C31 to the drive circuit 50, and the drive circuit 50 communicates with external devices via the communication cable CA31 and the communication connector C31. The surplus space in the power supply housing 400 can be utilized as space for arranging the communication connector C31, thereby achieving further space saving.

[0096] (18) A substrate transport device 1 comprising: a robot 10 described in any one of (2) to (6); and a chamber 90 that accommodates a hand 12 and a multi-joint arm 20, the chamber 90 having a chamber opening 94 for disposing a base 11 and a circuit housing 200 outside the chamber 90, and a flange 14 attached to the chamber 90 so as to cover the chamber opening 94.

[0097] (19) The substrate transport device (1) described in (18), wherein the chamber opening (94) opens downward and the flange (14) holds the base (11) with the circuit housing (200) spaced apart from the floor surface. [Explanation of symbols]

[0098] 1...substrate transport device, W...substrate, 90...chamber, 10...robot, 12...hand, 11...base, 20...articulated arm, 40...motor, 94...chamber opening, 14...flange, 60...sealing member, 50...drive circuit, 200...circuit housing, 110...first frame, 210...second frame, 214, 215...wiring opening, 121...first hook, 221...second hook, 112...first ventilation hole, 232...second ventilation hole, 300...ventilator, 310...fan, 320...second fan, 70...power supply circuit, 400...power supply housing, C31...communication connector, CA31...communication cable.

Claims

1. A hand for supporting the substrate; With the base, an articulated arm that connects the hand to the base; one or more motors that drive the articulated arm to change the position of the hand relative to the base; A drive circuit for supplying drive power to the one or more motors; a circuit housing that houses the drive circuit and is removably attached to the base; A robot equipped with

2. A flange extending between the arm and the base is further provided, the circuit housing is attached to the base such that the base is located between the circuit housing and the flange; The robot according to claim 1.

3. A first ventilation port that communicates an internal space of the base with an external space of the base; a second ventilation port that communicates an internal space of the circuit housing with an external space of the circuit housing; a ventilator that generates an airflow between the first ventilation port and the second ventilation port through an internal space of the base and an internal space of the circuit housing; Further comprising: The robot according to claim 2.

4. the ventilator generates an airflow that flows from the second ventilation opening to the first ventilation opening through the internal space of the base and the internal space of the circuit housing. The robot according to claim 3.

5. The ventilator has a fan provided in the first ventilation port so as to send gas from the internal space of the base to the external space of the base. The robot according to claim 4.

6. the ventilator further includes a second fan provided in the second ventilation port so as to send gas from an external space of the circuit housing to an internal space of the circuit housing. The robot according to claim 5.

7. The one or more motors are embedded in the base. The robot according to any one of claims 4 to 6.

8. a portion of the drive circuit protruding from the circuit housing toward the flange and accommodated in the base; The robot according to any one of claims 4 to 6.

9. The base further includes a seal member provided on the flange so as to airtightly separate an internal space of the base from an external space of the base. The robot according to any one of claims 2 to 6.

10. the base and the circuit housing are located below the flange; The flange holds the base while the circuit housing is spaced apart from a floor surface. The robot according to any one of claims 2 to 6.

11. the base has a first frame that provides the base with a load capacity that exceeds a combined weight of the hand, the articulated arm, the flange, and the one or more motors; the circuit housing has a second frame that provides the circuit housing with a load capacity that exceeds a combined weight of the hand, the articulated arm, the flange, the one or more motors, and the base; The second frame is attached to the first frame. The robot according to claim 10.

12. A first hook provided on the base; a second hook provided on the circuit housing so as to be hooked on the first hook to temporarily fasten the circuit housing to the base; Further comprising: The circuit housing is attached to the base with the second hook hooked on the first hook. The robot according to claim 10.

13. the drive circuit includes a connector to which the one or more motors are electrically connected; the circuit housing has a wiring opening through which the connector is exposed when the circuit housing is attached to the base. The robot according to any one of claims 1 to 6.

14. a cover capable of opening and closing the wiring opening when the circuit housing is attached to the base, The robot according to claim 13.

15. a power supply circuit for supplying power to the drive circuit; a power supply housing that houses the power supply circuit and is removably attached to the circuit housing; Further comprising: The robot according to any one of claims 1 to 6.

16. the power supply housing is attached to the circuit housing so as to be aligned with the circuit housing in a direction intersecting a direction in which the base and the circuit housing are aligned; The robot according to claim 15.

17. a communication connector provided in the power supply housing; a communication cable electrically connecting the communication connector to the drive circuit; Further comprising: the drive circuit communicates with an external device via the communication cable and the communication connector; The robot according to claim 15.

18. A robot according to any one of claims 2 to 6, a chamber for accommodating the hand and the articulated arm; Equipped with the chamber has a chamber opening for disposing the base and the circuit housing outside the chamber; The flange is attached to the chamber so as to close the chamber opening.

19. The chamber opening opens downward, The flange holds the base while the circuit housing is spaced apart from a floor surface. The substrate transport apparatus of claim 18.

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