Bracket, inspection device, and method for manufacturing bracket

Abstract

To accurately align a connector provided on a bracket.SOLUTION: A bracket comprises guide members, moving members for moving a connector relative to the guide members, and rolling elements located between the guide members and the moving members. At least part of the rolling element is embedded in a groove provided in the guide member.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a bracket, an inspection device, and a method for manufacturing a bracket.

Background Art

[0002] In recent years, as a type of semiconductor device, CPO (Co-Packaged Optics) has been developed. CPO is a device in which an optical communication chip is mounted on a substrate. In CPO, in addition to conventional electrical signals, optical signals are also used as signals transmitted within the substrate.

[0003] Patent Document 1 describes the connection between the connector of a fixture and the connector of a connection unit. An inspection object is placed on the fixture. The connection unit includes a unit body, a movable member, and a toggle clamp. A connector is provided on the movable member. The unit body and the movable member are movable toward the fixture by the toggle clamp. The connector provided on the movable member is connected to the connector of the fixture by the movement of the unit body and the movable member.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] A connector provided on a socket on which an object to be inspected is mounted and a connector provided on a bracket attached to the socket may be connected to each other. These sockets may be connected to each other when the connector provided on the bracket moves toward the connector provided on the socket. Then, a signal from a coaxial cable connected to the connector provided on the bracket is sent to the object to be inspected via the connected connectors. When moving the connector provided on the bracket to connect it to the connector provided on the socket, for example, it is necessary to accurately align the connector provided on the bracket with the connector provided on the socket in order to reduce signal transmission loss.

[0006] An example of the object of the present invention is to accurately align the connector provided on the bracket. Other objects of the present invention will become apparent from the description herein.

Means for Solving the Problems

[0007] One aspect of the present invention is a guide member, a moving member for moving a connector relative to the guide member, a rolling element positioned between the guide member and the moving member, and a bracket in which at least a part of the rolling element is embedded in a groove provided in the guide member.

[0008] One aspect of the present invention is a socket for mounting an object to be inspected, the above bracket attached to the socket, and an inspection apparatus comprising the same.

[0009] One aspect of the present invention is a step of assembling a guide member, a moving member for moving a connector relative to the guide member, and a rolling element positioned between the guide member and the moving member, The step of assembling the case member, the moving member, and the rolling elements includes a step of aligning the moving member by aligning a jig attached to the moving member, which is a method for manufacturing a bracket.

[0010] According to the above aspect of the present invention, the connector provided on the bracket can be aligned with high precision.

Brief Description of the Drawings

[0011]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Embodiments for Carrying Out the Invention

[0012] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In all the drawings, the same components are denoted by the same reference numerals, and the description thereof will be omitted as appropriate.

[0013] FIG. 1 is a plan view of an inspection apparatus 10 according to an embodiment. FIG. 2 is an exploded perspective view of a bracket 200 according to an embodiment. FIG. 3 is a cross-sectional view of a cross roller table 220 according to an embodiment. FIG. 4 is a plan view of a cross roller table 220 according to an embodiment.

[0014] As shown in FIG. 1, the inspection apparatus 10 according to the embodiment includes a socket 100 and a bracket 200. As shown in FIG. 1, the socket 100 has a socket body 110 and an inlay 120. As shown in FIG. 1, the inlay 120 includes an inlay body 122 and an inlay protrusion 124. As shown in FIGS. 1 and 2, the bracket 200 has a frame body 210, a pair of cross roller tables 220, a connector assembly 230, a cam follower assembly 240, and a pair of dampers 250. As shown in FIGS. 1 and 2, the frame body 210 defines an opening 210a. As shown in FIGS. 1 to 4, each cross roller table 220 includes a guide rail 221, a block 222, a pair of sliding rails 223, a plurality of rollers 224, and a pair of gauges 225. In FIG. 3, for the sake of explanation, the pair of gauges 225 are not shown. As shown in FIG. 2, the connector assembly 230 includes a first holding member 232 and a second holding member 234. As shown in FIG. 2, the cam follower assembly 240 includes a stage 242 and a cam follower 244.

[0015] To explain the directions, the X direction, the Y direction, and the Z direction are defined. The Z direction is a direction parallel to the vertical direction. The X direction is one of the horizontal directions perpendicular to the Z direction. The Y direction is one of the horizontal directions perpendicular to the Z direction and the X direction. In the embodiment, the X direction is the direction from the side where one of the socket 100 and the bracket 200 is located to the side where the other of the socket 100 and the bracket 200 is located. In FIGS. 1 and 4, the white circle with a black dot indicating the Z direction shows that the arrow of the Z axis points from the back to the front of the paper surface. In FIG. 3, the white circle with a black dot indicating the X direction shows that the arrow of the X axis points from the back to the front of the paper surface.

[0016] Hereinafter, as necessary, the side indicated by the arrow of the X axis is referred to as the +X side, the side opposite to the side indicated by the arrow of the X axis is referred to as the -X side, the side indicated by the arrow of the Y axis is referred to as the +Y side, the side opposite to the side indicated by the arrow of the Y axis is referred to as the -Y side, the side indicated by the arrow of the Z axis is referred to as the +Z side, and the side opposite to the side indicated by the arrow of the Z axis is referred to as the -Z side.

[0017] As shown in FIG. 1, when viewed from the Z direction, the socket 100 and the bracket 200 are arranged side by side in the X direction. In the example shown in FIG. 1, the socket 100 is located on the +X side with respect to the bracket 200, and the bracket 200 is located on the -X side with respect to the socket 100. The socket 100 and the bracket 200 are positioned relative to each other by pins and are mechanically connected to each other by a mechanical connection method such as screwing. However, the arrangement of the socket 100 and the bracket 200 is not limited to the example shown in FIG. 1.

[0018] As shown in FIG. 1, on the +Z side surface side of the socket 100, a semiconductor package 20, a pair of socket-side connectors 22, and a plurality of optical cables 24 are mounted via an inlay 120. The semiconductor package 20, the pair of socket-side connectors 22, and the optical cables 24 are CPO (Co-Packaged Optics). As shown in FIGS. 1 and 2, the bracket 200 is provided with a pair of bracket-side connectors 30. Each socket-side connector 22 is a female connector that receives each bracket-side connector 30, and each bracket-side connector 30 is a male connector that is inserted into the socket-side connector 22. However, the socket-side connector 22 may be a male connector and the bracket-side connector 30 may be a female connector. In the example shown in FIG. 1, the -X side end of each socket-side connector 22 and the +X side end of each bracket-side connector 30 are connected to each other.

[0019] When the inspection device 10 is shipped, the semiconductor package 20, the pair of socket-side connectors 22, the plurality of optical cables 24, and the pair of bracket-side connectors 30 are usually removed from the inspection device 10. Hereinafter, unless otherwise specified, the inspection device 10 means not only the inspection device 10 provided with the semiconductor package 20, the pair of socket-side connectors 22, the plurality of optical cables 24, and the pair of bracket-side connectors 30, but also the inspection device 10 not provided with the semiconductor package 20, the pair of socket-side connectors 22, the plurality of optical cables 24, and the pair of bracket-side connectors 30.

[0020] The socket body 110 is made of, for example, metal, resin, or ceramic. As shown in FIG. 1, when viewed from the Z direction, the socket body 110 has a substantially rectangular shape with a pair of long sides substantially parallel to the X direction and a pair of short sides substantially parallel to the Y direction. However, the shape of the socket body 110 is not limited to the example shown in FIG. 1.

[0021] The inlay 120 is made of, for example, resin, resin, or ceramic. As shown in FIG. 1, the inlay 120 is embedded in a socket groove 110a provided on the +Z side surface of the socket body 110. When viewed from the Z direction, the inlay body 122 is located at substantially the central portions of the socket body 110 in the X and Y directions. As shown in FIG. 1, when viewed from the Z direction, the inlay body 122 has a substantially rectangular shape with a pair of long sides substantially parallel to the X direction and a pair of short sides substantially parallel to the Y direction. However, the shape of the inlay body 122 is not limited to the example shown in FIG. 1. A semiconductor package 20 is mounted on the +Z side surface side of the inlay body 122. The inlay protrusion 124 protrudes from the -X side edge of the inlay body 122 toward the bracket 200. The -X side end portion of the inlay protrusion 124 and the portion located on the +X side with respect to the opening 210a of the frame body 210 overlap each other in the Z direction. A pair of socket-side connectors 22 are mounted on the +Z side surface side of the -X side end portion of the inlay protrusion 124. The semiconductor package 20 and the pair of socket-side connectors 22 are optically coupled to each other via a plurality of optical cables 24. The plurality of optical cables 24 are mounted on the +Z side surface side of the inlay 120 from one of the inlay body 122 and the inlay protrusion 124 to the other. Therefore, by embedding the inlay 120 in the socket groove 110a with the plurality of optical cables 24 held on the +Z side surface side of the inlay 120, the semiconductor package 20, the pair of socket-side connectors 22, and the plurality of optical cables 24 can be integrally mounted on the +Z side surface side of the socket body 110.

[0022] In an embodiment, the semiconductor package 20 is an object to be inspected by the inspection apparatus 10. The semiconductor package 20 is optically coupled to an external device of the inspection apparatus 10 via a plurality of optical cables 24, a pair of socket-side connectors 22, and a pair of bracket-side connectors 30. Further, the semiconductor package 20 is electrically connected to an inspection substrate (not shown) provided in the inspection apparatus 10 via a probe (not shown) provided inside the socket 100.

[0023] The frame body 210 is made of, for example, metal. As shown in FIGS. 1 and 2, when viewed from the Z direction, the frame body 210 has a substantially rectangular frame shape having a pair of short sides substantially parallel to the X direction and a pair of long sides substantially parallel to the Y direction. However, the shape of the frame body 210 is not limited to the examples shown in FIGS. 1 and 2.

[0024] Each guide rail 221 is made of, for example, metal. As shown in FIGS. 1 and 2, when viewed from the Z direction, the pair of guide rails 221 are located on both sides in the Y direction of the opening 210a. As shown in FIG. 2, each guide rail 221 extends in the X direction. Both end portions in the X direction of the +Y side guide rail 221 and the +Y side portion of the opening 210a of the frame body 210 are fixed to each other by screwing a pair of rail mounting screws 226. Both end portions in the X direction of the -Y side guide rail 221 and the -Y side portion of the opening 210a of the frame body 210 are fixed to each other by screwing another pair of rail mounting screws 226.

[0025] Each block 222 is made of, for example, metal. As shown in FIG. 2, when viewed from the Z direction, each block 222 has a substantially rectangular shape with a pair of long sides substantially parallel to the X direction and a pair of short sides substantially parallel to the Y direction. However, the shape of each block 222 is not limited to the example shown in FIG. 2. As shown in FIG. 3, a block groove 222a is provided on the -Z side surface of each block 222. As shown in FIG. 3, when viewed from the X direction, a pair of sliding rails 223 are provided on both inner side surfaces in the Y direction of the block groove 222a. Each sliding rail 223 is made of, for example, metal. The block 222 and the pair of sliding rails 223 are fixed to each other by screwing. The block 222 and the pair of sliding rails 223 are integrally slidable in the X direction with respect to the guide rail 221. Therefore, the guide rail 221 serves as a guiding member for guiding the block 222 and the pair of sliding rails 223 in the X direction. The block 222 and the pair of sliding rails 223 serve as moving members for moving the bracket-side connector 30 with respect to the guide rail 221 in a state where the block 222 and the connector assembly 230 are attached to each other.

[0026] As shown in FIGS. 3 and 4, a plurality of rollers 224 are arranged between the +Y side surface of the guide rail 221 and the -Y side surface of the +Y side sliding rail 223. Hereinafter, as necessary, the roller 224 arranged between the +Y side surface of the guide rail 221 and the -Y side surface of the +Y side sliding rail 223 is referred to as the +Y side roller 224. The +Y side roller 224 is made of, for example, metal. As shown in FIG. 4, the plurality of +Y side rollers 224 are integrally held along the guide rail 221 by a +Y side gauge 225 extending in the X direction. In the example shown in FIGS. 3 and 4, the +Y side roller 224 with a rotation axis inclined at approximately 45° in the Y direction with respect to the Z direction and the +Y side roller 224 with a rotation axis inclined at approximately -45° in the Y direction with respect to the Z direction are alternately arranged in the X direction. The +Y side roller 224 serves as a rolling element that rolls between the +Y side surface of the guide rail 221 and the -Y side surface of the +Y side sliding rail 223. However, as the rolling element, balls may be used instead of the roller 224.

[0027] As shown in FIGS. 3 and 4, a plurality of rollers 224 are arranged between the -Y side surface of the guide rail 221 and the +Y side surface of the -Y side sliding rail 223. Hereinafter, as necessary, the roller 224 arranged between the -Y side surface of the guide rail 221 and the +Y side surface of the -Y side sliding rail 223 is referred to as the -Y side roller 224. The -Y side roller 224 is made of, for example, metal. As shown in FIG. 4, the plurality of -Y side rollers 224 are integrally held along the guide rail 221 by a -Y side gauge 225 extending in the X direction. In the example shown in FIGS. 3 and 4, the -Y side roller 224 with a rotation axis inclined approximately 45° in the Y direction with respect to the Z direction and the -Y side roller 224 with a rotation axis inclined approximately -45° in the Y direction with respect to the Z direction are alternately arranged in the X direction. The -Y side roller 224 serves as a rolling element that rolls between the -Y side surface of the guide rail 221 and the +Y side surface of the -Y side sliding rail 223. However, as the rolling element, balls may be used instead of the roller 224.

[0028] As shown in FIGS. 2 and 3, a pair of rail grooves 221a are provided on both side surfaces of each guide rail 221 in the Y direction. As shown in FIG. 2, each rail groove 221a extends in the X direction. As shown in FIG. 3, at least a part of the +Y side roller 224 and at least a part of the -Y side roller 224 are respectively embedded in the +Y side rail groove 221a and the -Y side rail groove 221a. Therefore, the contact area between the guide rail 221 and the roller 224 can be increased as compared with the case where a linear bush having a shaft without a groove corresponding to the rail groove 221a is used instead of the guide rail 221. Therefore, the allowable load of the cross roller table 220 can be increased as compared with the case where a linear bush is used.

[0029] As shown in FIGS. 1 and 2, the first holding member 232 includes a base 232a and a pair of mounting plates 232b. The base 232a defines a groove for accommodating a pair of bracket-side connectors 30. The pair of mounting plates 232b are located on both sides of the base 232a in the Y direction. The base 232a and the pair of mounting plates 232b are, for example, integrally formed metal. As shown in FIGS. 1 and 2, each mounting plate 232b has a substantially rectangular shape with a pair of long sides substantially parallel to the X direction and a pair of short sides substantially parallel to the Y direction. However, the shape of each mounting plate 232b is not limited to the example shown in FIGS. 1 and 2. As shown in FIGS. 1 and 2, each mounting plate 232b and each block 222 are fixed to each other by screwing a plurality of first assembly screws 236a. Therefore, the pair of blocks 222 and the first holding member 232 are integrated and slidable in the X direction with respect to the pair of guide rails 221. In the example shown in FIGS. 1 and 2, four first assembly screws 236a are provided at the four corners of each mounting plate 232b. However, the number and arrangement of the first assembly screws 236a are not limited to the example shown in FIGS. 1 and 2.

[0030] The second holding member 234 is made of, for example, metal. As shown in FIGS. 1 and 2, the second holding member 234 covers the +Z side surfaces of the pair of bracket-side connectors 30. As shown in FIGS. 1 and 2, the second holding member 234 has a substantially rectangular shape with a pair of short sides substantially parallel to the X direction and a pair of long sides substantially parallel to the Y direction. However, the shape of the second holding member 234 is not limited to the example shown in FIG. 2. The second holding member 234 and the base 232a are fixed to each other by screwing a plurality of second assembly screws 236b. Therefore, the first holding member 232 and the second holding member 234 are integrated as a connector assembly 230 and serve as a holding member for holding the pair of bracket-side connectors 30. In the example shown in FIGS. 1 and 2, four second assembly screws 236b are provided at the four corners of the second holding member 234. However, the number and arrangement of the second assembly screws 236b are not limited to the example shown in FIGS. 1 and 2.

[0031] As shown in FIGS. 1 and 2, two holding screws 236c are screwed to the +X side end of the second holding member 234. The -Z side end of each holding screw 236c protrudes -Z side from the -Z side surface of the second holding member 234 and presses the +Z side surface of the bracket side connector 30. Therefore, the rattling of the bracket side connector 30 can be suppressed by the holding screws 236c. However, the number and arrangement of the holding screws 236c are not limited to the examples shown in FIGS. 1 and 2.

[0032] As shown in FIG. 2, when viewed from the Z direction, the stage 242 has a substantially rectangular shape having a pair of long sides substantially parallel to the X direction and a pair of short sides substantially parallel to the Y direction. However, the shape of the stage 242 is not limited to the example shown in FIG. 2. As shown in FIG. 2, the stage 242 is attached to the -Z side surface of the base 232a. As shown in FIG. 2, the base 232a and the stage 242 are fixed to each other by screwing a plurality of stage mounting screws 246. In the example shown in FIG. 2, four stage mounting screws 246 are provided at the four corners of the stage 242. However, the number and arrangement of the stage mounting screws 246 are not limited to the example shown in FIG. 2.

[0033] As shown in FIG. 2, the cam follower 244 protrudes -Z side from the -Z side surface of the stage 242 and extends in the Z direction. By pushing the -Z side end of the cam follower 244 +X side or -X side by an actuator arm (not shown), the pair of blocks 222, the connector assembly 230, the stage 242, and each bracket side connector 30 can be moved integrally in the X direction. Note that the bracket 200 may have a simple shaft body that protrudes -Z side from the -Z side surface of the stage 242 and extends in the Z direction instead of the cam follower 244.

[0034] As shown in FIGS. 1 and 2, the frame body 210 has a partition wall 212 located on the +X side with respect to the opening 210a. As shown in FIG. 1, the partition wall 212 is located between the -X side end of the inlay protrusion 124 and the +X side end of the connector assembly 230. Therefore, the partition wall 212 serves as a regulating member that regulates the movement of the pair of blocks 222, the connector assembly 230, the cam follower assembly 240, and each bracket side connector 30 toward the +X side. As shown in FIG. 2, the partition wall 212 is cut out by a pair of notch grooves 212a that open toward the +Z side. As shown in FIGS. 1 and 2, the pair of notch grooves 212a are provided in a portion of the partition wall 212 that faces the +X side ends of the pair of bracket side connectors 30. As shown in FIG. 1, the -X side ends of the pair of socket side connectors 22 are inserted into the pair of notch grooves 212a. The partition wall 212 may be cut out by a hole that penetrates the partition wall 212 in the X direction instead of grooves such as the notch grooves 212a. Each socket side connector 22 can enter not only the notch grooves 212a but also a hole that penetrates the partition wall 212 in the X direction.

[0035] As shown in FIGS. 1 and 2, a pair of dampers 250 are attached to the end face on the +X side of the base 232a. As shown in FIG. 2, the pair of dampers 250 and the base 232a are fixed to each other by screwing the damper mounting screws 252. In the embodiment, each damper 250 is a super engineering plastic such as PEEK (polyether ether ketone). However, each damper 250 may be constituted by an elastic member such as a spring. In the embodiment, when each bracket-side connector 30 is moved toward each socket-side connector 22 to connect each socket-side connector 22 and each bracket-side connector 30 to each other, the +X side surface of each damper 250 and the -X side surface of the partition wall 212 come into contact with each other. Therefore, each damper 250 alleviates the impact of the contact between each socket-side connector 22 and the bracket-side connector 30. Thus, compared with the case where the damper 250 is not provided, damage to each socket-side connector 22 and the bracket-side connector 30 during the connection of each socket-side connector 22 and each bracket-side connector 30 can be suppressed. The position where the damper 250 is provided is not limited to the example shown in FIGS. 1 and 2. For example, the damper 250 may be provided on the -X side surface of the partition wall 212 instead of the end face on the +X side of the base 232a.

[0036] Next, in order to describe the function of the cross roller table 220 according to the embodiment, the embodiment and the comparative example are compared. In the comparative example, a linear bush is used instead of the cross roller table 220. The linear bush according to the comparative example has a shaft in which a groove corresponding to the rail groove 221a is not provided, replacing the guide rail 221 of the embodiment.

[0037] In the embodiment, in order to connect each socket-side connector 22 and each bracket-side connector 30 to each other, the -Z side end of the cam follower 244 is pushed toward the +X side by an actuator arm (not shown), and each bracket-side connector 30 is moved toward the socket 100. However, when the -Z side end of the cam follower 244 is pushed toward the +X side, a moment is generated that rotates the cam follower 244 clockwise as viewed from the +Y side. When the cam follower 244 rotates clockwise as viewed from the +Y side, each bracket-side connector 30 also rotates clockwise as viewed from the +Y side. When each bracket-side connector 30 rotates clockwise as viewed from the +Y side, the +X side end of each bracket-side connector 30 and the -X side end of each socket-side connector 22 no longer face each other straight in the X direction. When the +X side end of each bracket-side connector 30 and the -X side end of each socket-side connector 22 no longer face each other straight in the X direction, it becomes difficult to accurately align the +X side end of each bracket-side connector 30 with the -X side end of each socket-side connector 22. When the +X side end of each bracket-side connector 30 is not accurately aligned with the -X side end of each socket-side connector 22, it may become difficult to achieve a good connection between each socket-side connector 22 and each bracket-side connector 30.

[0038] As described above, in the embodiment, as shown in FIG. 3, at least a part of the roller 224 is embedded in the rail groove 221a. Therefore, in the embodiment, the contact area between the guide rail 221 and the roller 224 can be increased as compared with the comparative example. Accordingly, in the embodiment, the allowable load and the allowable moment of the block 222 can be increased as compared with the comparative example. Thus, even if a moment is generated that pushes the -Z side end of the cam follower 244 toward the +X side and rotates the cam follower 244 clockwise as viewed from the +Y side, in the embodiment, as compared with the comparative example, it is possible to make it difficult to rotate the cam follower 244 clockwise as viewed from the +Y side. Therefore, in the embodiment, as compared with the comparative example, the +X side end of each bracket side connector 30 can be accurately aligned with the -X side end of each bracket side connector 30 in all directions including the X direction, the Y direction, and the Z direction.

[0039] FIGS. 5 to 7 are diagrams for explaining an example of a method for manufacturing the bracket 200 according to the embodiment. In the example shown in FIGS. 5 to 7, the bracket 200 is manufactured by assembling a frame body 210, a pair of cross roller tables 220, a connector assembly 230, a cam follower assembly 240, and a pair of dampers 250 as follows.

[0040] First, as shown in FIG. 5, the jig 40 is held by the connector assembly 230. In the example shown in FIG. 5, the jig 40 has a jig body 42 and a pair of jig protrusions 44. In the example shown in FIG. 5, first, the jig body 42 is received in the base 232a with the pair of jig protrusions 44 protruding toward the +X side from the end face on the +X side of the base 232a. Next, the first holding member 232 and the second holding member 234 are fixed to each other by screwing a plurality of second assembly screws 236b. Next, a plurality of pressing screws 236c are screwed into the second holding member 234, and the +Z side surface of the jig body 42 is pressed toward the -Z side by the end portion on the -Z side of each pressing screw 236c. Therefore, the rattling of the jig body 42 can be suppressed by the pressing screws 236c. In the example shown in FIG. 5, a pair of dampers 250 are fixed to the end face on the +X side of the base 232a by screwing a pair of damper mounting screws 252.

[0041] Next, as shown in FIG. 6, the frame body 210 and the pair of cross roller tables 220 are temporarily fixed to each other by temporarily fixing a plurality of rail mounting screws 226. In the example shown in FIG. 6, with each block 222 moved to the -X side to expose the +X side end of each guide rail 221, the +X side end of each guide rail 221, the portion of the frame body 210 where the +X side end of each guide rail 221 overlaps in the Z direction, are temporarily fixed by temporarily fixing the rail mounting screws 226. Next, with each block 222 moved to the +X side to expose the -X side end of each guide rail 221, the -X side end of each guide rail 221, the portion of the frame body 210 where the -X side end of each guide rail 221 overlaps in the Z direction, are temporarily fixed by temporarily fixing the rail mounting screws 226.

[0042] Next, as shown in FIG. 7, the pair of blocks 222 and the pair of second holding members 234 are fixed to each other by screwing a plurality of first assembly screws 236a. By fixing the pair of blocks 222 and the pair of second holding members 234, the jig 40 is attached to the pair of blocks 222 via the connector assembly 230.

[0043] Next, insert a pair of jig protrusions 44 into the pair of notch grooves 212a to align the pair of jig protrusions 44. By aligning the pair of jig protrusions 44, the pair of cross roller tables 220 and the connector assembly 230 are aligned. The partition wall 212 may be cut out by a hole penetrating the partition wall 212 in the X direction instead of a groove such as the notch groove 212a. Also by the hole, the pair of jig protrusions 44 can be aligned in the same manner as the notch groove 212a.

[0044] Next, with the pair of cross roller tables 220 and the connector assembly 230 aligned by aligning the jig 40, the frame body 210 and the pair of guide rails 221 are fixed to each other by fully tightening a plurality of rail mounting screws 226. By fixing the frame body 210 and the pair of guide rails 221, the positions of the pair of cross roller tables 220 and the connector assembly 230 in the Z direction are determined.

[0045] Next, remove the second holding member 234 from the first holding member 232 by removing a plurality of second assembly screws 236b, and remove the jig 40 from the first holding member 232. Next, fix the first holding member 232 and the second holding member 234 to each other again by screwing a plurality of second assembly screws 236b. Next, fix the connector assembly 230 and the cam follower assembly 240 to each other by screwing a plurality of stage mounting screws 246. In a state where the first holding member 232 and the second holding member 234 are fixed to each other again, the connector assembly 230 may not hold the pair of bracket side connectors 30. For example, the bracket 200 is shipped in a state where the connector assembly 230 does not hold the bracket side connector 30.

[0046] In the embodiment, the bracket-side connector 30 is guided in the X direction by a pair of cross roller tables 220 arranged parallel to each other. Therefore, if the pair of cross roller tables 220 are not accurately arranged parallel to each other in the X direction, it may be difficult to smoothly guide the connector assembly 230 in the X direction. However, in the embodiment, the pair of cross roller tables 220 and the connector assembly 230 are aligned by aligning the jig 40. Therefore, compared with the case where the jig 40 is not used, the pair of cross roller tables 220 can be accurately arranged parallel to each other in the X direction. By accurately arranging the pair of cross roller tables 220 parallel to each other in the X direction, the +X side end of each bracket-side connector 30 can be accurately aligned with the -X side end of each bracket-side connector 30 in all directions including the X direction, Y direction, and Z direction.

[0047] Furthermore, in the embodiment, it is possible to align the +X side end of each bracket-side connector 30 with the -X side end of each bracket-side connector 30 without the need to slightly move each bracket-side connector 30 in the Y direction by a mechanical element such as a spring. Therefore, compared with the case where the mechanical element is used, the durability of the bracket 200 can be improved.

[0048] Furthermore, in the embodiment, with the frame body 210 and the pair of guide rails 221 temporarily fixed, the frame body 210, the pair of cross roller tables 220 and the set of connector assemblies 230 are aligned by aligning the jig 40. Therefore, with the pair of jig protrusions 44 entering the pair of notch grooves 212a in the state where the frame body 210 and the pair of guide rails 221 are temporarily fixed, the pair of blocks 222 and the connector assembly 230 are moved in the X direction so that the frame body 210, the pair of cross roller tables 220 and the set of connector assemblies 230 can be aligned. Thus, after the frame body 210 and the pair of guide rails 221 are fixed to each other by tightening a plurality of rail mounting screws 226, compared with the case of aligning the frame body 210, the pair of cross roller tables 220 and the set of connector assemblies 230, the alignment of the frame body 210, the pair of cross roller tables 220 and the set of connector assemblies 230 can be made easily with a margin.

[0049] As described above, the embodiments of the present invention have been described with reference to the drawings. These are examples of the present invention, and various configurations other than the above can also be adopted.

[0050] For example, the guide device for guiding the bracket side connectors 30 is not limited to the cross roller table 220 according to the embodiment. For example, the guide device may be a linear guide in which rolling elements circulate along a circulation path provided inside the guide device. Also in the linear guide, at least a part of the rolling elements is embedded in a groove provided in the guide rail. Therefore, as described in the embodiment, compared with the case where the linear bush is used, the +X side end of each bracket side connector 30 can be aligned with high precision in all directions including the X direction, Y direction and Z direction with respect to the -X side end of each bracket side connector 30.

[0051] The object to be inspected mounted on the socket 100 is not limited to a CPO, and may be a semiconductor package without optical elements. The connector provided on the bracket 200 may not be an optical connector optically coupled to the object to be inspected mounted on the socket 100, but an electrical connector electrically connected to the object to be inspected mounted on the inspection apparatus 10.

[0052] According to the present specification, brackets, inspection apparatuses, and manufacturing methods of brackets according to the following aspects are provided. (Aspect 1) In Aspect 1, the bracket includes a guide member, a moving member for moving the connector relative to the guide member, and a rolling element positioned between the guide member and the moving member, and at least a part of the rolling element is embedded in a groove provided in the guide member.

[0053] The "guide member" corresponds to the "guide rail" in the above-described embodiment. The "moving member" corresponds to the "block" and the "sliding rail" in the above-described embodiment. The "rolling element" corresponds to the "roller" in the above-described embodiment.

[0054] According to the above aspect, compared with the case where a linear bushing having a shaft without a groove instead of the guide member is used, the contact area between the guide member and the rolling element can be increased. Therefore, compared with the case where a linear bushing is used, the allowable moment of the moving member can be increased. Thus, compared with the case where a linear bushing is used, it is possible to make it difficult to rotate the connector when the connector is moved by the moving member. Therefore, compared with the case where a linear bushing is used, the connector can be aligned with high precision.

[0055] (Aspect 2) In Aspect 2, the bracket further includes a damper that alleviates the impact of contact between the connector and another connector connected to the connector.

[0056] According to the above aspect, compared with the case where the damper is not provided, damage to the connector and the other connector during connection of the connector and the other connector can be suppressed.

[0057] (Aspect 3) In Aspect 3, the bracket further includes a partition wall that restricts the movement of the moving member toward the side where the other connector connected to the connector is located, and a portion of the partition wall facing the connector is cut out.

[0058] According to the above aspect, at least a part of the jig provided on the moving member can be inserted into the cut-out portion of the partition wall to align the jig. By aligning the moving member by aligning the jig, the connector can be aligned with high precision.

[0059] (Aspect 4) In Aspect 4, the inspection device includes a socket for mounting an object to be inspected and the above-described bracket attached to the socket.

[0060] In Aspect 4, in the same manner as in Aspect 1, the connector can be aligned with high precision compared with the case where a linear bush is used.

[0061] (Aspect 5) In Aspect 5, the manufacturing method of the bracket includes a step of assembling a guide member, a moving member for moving the connector relative to the guide member, and a rolling element located between the guide member and the moving member. The step of assembling the guide member, the moving member, and the rolling element includes a step of aligning the moving member by aligning a jig attached to the moving member.

[0062] The "guide member" corresponds to the "guide rail" in the above-described embodiment. The "moving member" corresponds to the "block" and the "sliding rail" in the above-described embodiment. The "rolling element" corresponds to the "roller" in the above-described embodiment.

[0063] According to the above aspect, the connector can be aligned with high precision as compared with the case where the moving member is not aligned.

[0064] (Aspect 6) In Aspect 6, the step of assembling the guide member, the moving member, and the rolling element further includes a step of temporarily fixing the guide member.

[0065] According to Aspect 6, the moving member can be moved so that the jig is aligned with the guide member in a temporarily fixed state, and the moving member can be aligned. Therefore, compared with the case of aligning the moving member after the guide member is fixed, the alignment of the moving member can be easily performed with a margin.

Explanation of Reference Numerals

[0066] 10 inspection device, 20 semiconductor package, 22 socket-side connector, 24 optical cable, 30 bracket-side connector, 40 jig, 42 jig body, 44 jig protrusion, 100 socket, 110 socket body, 110a socket groove, 120 inlay, 122 inlay body, 124 inlay protrusion, 200 bracket, 210 frame body, 210a opening, 212 partition wall, 212a notch groove, 220 cross roller table, 221 guide rail, 221a rail groove, 222 block, 222a block groove, 223 sliding rail, 224 roller, 225 gauge, 226 rail mounting screw, 230 connector assembly, 232 first holding member, 232a base, 232b mounting plate, 234 second holding member, 236a first assembly screw, 236b second assembly screw, 236c pressing screw, 240 cam follower assembly, 242 stage, 244 cam follower, 246 stage mounting screw, 250 damper, 252 damper mounting screw

Claims

1. An internal member, a moving member for moving a connector with respect to the internal member, rolling elements positioned between the internal member and the moving member, and a bracket in which at least a part of the rolling elements are embedded in grooves provided in the internal member.

2. The bracket according to claim 1, further comprising a damper for mitigating the impact of contact between the connector and another connector connected to the connector.

3. The bracket according to claim 1, further comprising a partition wall for restricting the movement of the moving member toward the side where another connector connected to the connector is located, wherein a portion of the partition wall facing the connector is cut out.

4. A socket for mounting an object to be inspected, and the bracket according to any one of claims 1 to 3 attached to the socket, and an inspection apparatus comprising the same.

5. A method for manufacturing a bracket, comprising a step of assembling an internal member, a moving member for moving a connector with respect to the internal member, and rolling elements positioned between the internal member and the moving member, wherein the step of assembling the internal member, the moving member, and the rolling elements includes a step of aligning the moving member by aligning a jig attached to the moving member.

6. The method for manufacturing a bracket according to claim 5, wherein the step of assembling the internal member, the moving member, and the rolling elements further includes a step of temporarily fixing the internal member.

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