Tool attaching / detaching jig

Abstract

To provide a new tool attaching / detaching jig that is able to minimize the risk of falling of a tool when attaching a machining tool to a mount connected to a spindle or detaching the tool from the mount.SOLUTION: A tool attaching / detaching jig includes: a support portion configured to support a tool from a side of the machining portion; a side wall portion provided at an end part of the support portion; and a clamp portion disposed on the side wall portion and configured to fix the side wall portion to a mount. The clamp portion includes: a fixing portion fixed to the side wall portion; a movable portion rotatably connected to the fixing portion; a contact portion provided on the movable portion and configured to come into contact with the mount when the side wall portion is fixed to the mount; and a moving mechanism configured to rotate the movable portion between a contact position at which the contact portion is in contact with the mount and a retracted position at which the contact portion is away from the mount.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to a tool attachment / detachment jig used for attaching a processing tool to a mount connected to a spindle or detaching the processing tool from the mount.

Background Art

[0002] In order to thin a plate-shaped workpiece typified by a semiconductor wafer, processing apparatuses called grinding apparatuses, polishing apparatuses, etc. are used (see, for example, Patent Document 1). These processing apparatuses typically include a spindle to which a mount for attaching a processing tool is connected, and a chuck table disposed below the spindle for holding the workpiece. The workpiece is processed by bringing a rotating tool into contact with the workpiece held by the chuck table.

[0003] By the way, the tool used in the above-described processing apparatus wears as the processing of the workpiece progresses. Therefore, the tool is replaced at an appropriate timing so that the workpiece is always processed well. On the other hand, this tool is large enough to process the entire workpiece, and the work involved in replacing it is by no means easy. Therefore, when replacing the tool, the operator may accidentally drop the tool, and the chuck table or the tool may be damaged.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] Therefore, an object of the present invention is to provide a new jig for attaching and detaching a tool that can suppress the possibility of the tool falling when attaching the tool for processing to the mount connected to the spindle or removing the tool from the mount.

Means for Solving the Problems

[0006] According to one aspect of the present invention, there is provided a jig for attaching and detaching a tool for processing, which is used when attaching or detaching the base portion side of a tool for processing, which has a base portion having a first surface and a second surface opposite to the first surface, and a processing portion provided on the first surface of the base portion, to a mount connected to a spindle serving as a rotation axis. The jig includes a support portion configured to support the tool from the processing portion side, a side wall portion provided at an end of the support portion, and a clamp portion disposed on the side wall portion and configured to fix the side wall portion to the mount. The clamp portion includes a fixed portion fixed to the side wall portion, a movable portion connected to the fixed portion so as to be rotatable, a contact portion provided on the movable portion and contacting the mount when fixing the side wall portion to the mount, and a movement mechanism configured to rotate the movable portion between a contact position where the contact portion contacts the mount and a retracted position where the contact portion is separated from the mount.

[0007] Preferably, the movement mechanism includes a lever handle connected to the fixed portion so as to be rotatable, and a connecting member connecting the lever handle and the movable portion. When the lever handle is rotated from a first position to a second position, the movable portion rotates from the retracted position to the contact position, and in a state where the lever handle is positioned at the second position, the movement of the movable portion positioned at the contact position toward the retracted position is restricted.

[0008] Further, preferably, the clamp portion is configured such that a part of the contact portion can be inserted into a through-hole provided in the mount for attaching the tool to the mount and into which a fastener is inserted. Further, preferably, the contact portion is configured to become thinner toward the tip.

[0009] Further, preferably, the side wall portion has a convex portion that contacts the outer surface of the base portion when fixed to the mount. Further, preferably, the side wall portion has a housing portion that can house a fastener used for attaching the tool to the mount.

Advantages of the Invention

[0010] The tool attachment / detachment jig according to one aspect of the present invention includes a support portion configured to support a machining tool, a side wall portion provided at an end of the support portion, and a clamp portion disposed on the side wall portion and configured to fix the side wall portion to a mount. Therefore, when the side wall portion is fixed to the mount, the support portion can support the tool between the mount.

[0011] That is, in a state where the side wall portion is fixed to the mount, the tool attached to the mount or the tool removed from the mount is supported by the support portion, so that the operator does not accidentally drop the tool. Thus, according to the tool attachment / detachment jig according to one aspect of the present invention, when attaching a machining tool to a mount connected to a spindle or removing the tool from the mount, the possibility of the tool falling can be reduced.

[0012] In addition, the clamp portion of the tool attachment / detachment jig according to one aspect of the present invention includes a fixed portion fixed to the side wall portion, a movable portion connected to the fixed portion so as to be rotatable, and a contact portion provided on the movable portion and contacting the mount when fixing the side wall portion to the mount. Further, the clamp portion has a movement mechanism configured to rotate the movable portion between a contact position where the contact portion contacts the mount and a retracted position where the contact portion separates from the mount.

[0013] Therefore, by simply rotating the movable part from the retracted position to the contact position by the moving mechanism, the contact part can be brought into contact with the mount, and the side wall part can be easily fixed to the mount. Thus, according to the tool attachment / detachment jig according to one aspect of the present invention, the operation of attaching a processing tool to or detaching the tool from the mount connected to the spindle is simplified.

Brief Description of the Drawings

[0014]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Embodiments for Carrying Out the Invention

[0015] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view showing a processing apparatus 2 in which a jig for tool attachment / detachment according to this embodiment is used. In FIG. 1, some components are represented by functional blocks. Also, the X-axis (front-rear axis), Y-axis (left-right axis), and Z-axis (vertical axis) used in the following description are perpendicular to each other.

[0016] As shown in FIG. 1, the processing apparatus 2 includes a base 4 that supports various elements constituting the processing apparatus 2. On the front end side of the upper surface of the base 4, a concave housing portion 4a is provided with an upper end opening to the upper surface of the base 4, and a robot arm 6 used for transporting the plate-shaped workpiece 11 is housed in the housing portion 4a. Note that the robot arm 6 can not only transport the workpiece 11 but also invert the workpiece 11 up and down.

[0017] The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor such as silicon. That is, the workpiece 11 has a circular surface 11a and a circular back surface 11b opposite to the surface 11a. The surface 11a side of the workpiece 11 is partitioned into a plurality of small regions by a plurality of streets (lines to be divided) intersecting each other, and devices such as integrated circuits (ICs) are formed in each small region.

[0018] The processing apparatus 2 of this embodiment is used, for example, when grinding and / or polishing the back surface 11b side of the workpiece 11. When grinding and / or polishing the back surface 11b side of the workpiece 11, a protective member typified by a protective tape made of a material such as resin can be attached to the surface 11a side of the workpiece 11. By attaching the protective member to the surface 11a side of the workpiece 11, the impact applied to the surface 11a side during grinding and / or polishing of the back surface 11b side is alleviated, and the devices of the workpiece 11 are protected.

[0019] In addition, in the present embodiment, a disk-shaped wafer made of a semiconductor material such as silicon is exemplified as the workpiece 11. However, the material, shape, structure, size, etc. of the workpiece 11 are not limited to this mode. For example, a substrate or the like made of other materials such as semiconductors, ceramics, resins, and metals can be used as the workpiece 11. Similarly, the type, quantity, shape, structure, size, arrangement, etc. of the devices are also not limited to the above-described mode. The workpiece 11 may not have a device formed thereon.

[0020] As shown in FIG. 1, in front of the accommodating portion 4a, cassette tables 10a and 10b on which cassettes 8a and 8b capable of accommodating a plurality of workpieces 11 are placed are provided. Diagonally rearward of the accommodating portion 4a, a position adjusting mechanism 12 for adjusting the position of the workpiece 11 is arranged. The position adjusting mechanism 12 includes a disk-shaped position adjusting table 14 and a plurality of pins 16 arranged around the position adjusting table 14.

[0021] By moving the plurality of pins 16 along the radial direction of the position adjusting table 14, for example, the center of the workpiece 11 carried out from the cassette 8a by the robot arm 6 and placed on the position adjusting table 14 is aligned with a predetermined position within a plane parallel to the X-axis and the Y-axis. Note that the workpiece 11 is placed on the position adjusting table 14 such that the surface to be processed (for example, the back surface 11b) faces upward.

[0022] On the side of the position adjusting mechanism 12, a first transfer arm 18 for holding the workpiece 11 before processing and transferring it rearward is provided. At the base end portion of the first transfer arm 18, a rotational drive source (not shown) such as a motor and an actuator (not shown) such as an air cylinder are connected. Therefore, the tip end portion of the first transfer arm 18 moves (swivels) around a rotation axis substantially parallel to the Z-axis through the base end portion of the first transfer arm 18 by the power of the rotational drive source, and moves (moves up and down) along the Z-axis by the power of the actuator.

[0023] At the tip of the first transfer arm 18, a first holding pad 20 is provided that can suck and hold the upper surface (the surface to be processed) side of the workpiece 11 before processing. For example, the workpiece 11 whose position has been adjusted by the position adjustment mechanism 12 is held by the first holding pad 20, and by moving this first holding pad 20 with the first transfer arm 18, the workpiece 11 is transferred rearward.

[0024] A turntable 22 is provided behind the first transfer arm 18 and the first holding pad 20. The turntable 22 is connected to a rotational drive source (not shown) such as a motor, and rotates around a rotation axis substantially parallel to the Z-axis by the power of this rotational drive source. On the upper surface of the turntable 22, four disk-shaped chuck tables 24 are arranged at substantially equal intervals (equal angular intervals) along the circumferential direction of the turntable 22. However, the number of chuck tables 24 is not limited to this mode.

[0025] Each chuck table 24 includes a disk-shaped frame 26 made of a material such as ceramics. At the upper part of the frame 26, a concave portion (not shown) whose upper end opens circularly on the upper surface of the frame 26 is provided. A holding plate 28 made of a porous disk shape with a material such as ceramics is fixed to this concave portion. The upper surface 28a of the holding plate 28 functions as a holding surface for holding the workpiece 11 or the like.

[0026] The lower surface side of the holding plate 28 is connected to a suction source (not shown) such as an ejector via a flow path (not shown) provided inside the frame 26 and a valve (not shown) arranged outside the frame 26. Therefore, when the valve is opened and the negative pressure of the suction source acts in a state where the workpiece 11 (or the protective member) is in contact with the upper surface 28a of the holding plate 28, the workpiece 11 (or the protective member) is sucked by this chuck table 24. That is, the workpiece 11 is held by the upper surface 28a of the chuck table 24.

[0027] The frame 26 of each chuck table 24 is supported by the turntable 22 via a rotary drive source (not shown) such as a motor. Each chuck table 24 rotates around a rotation axis generally parallel to the Z-axis or a rotation axis slightly inclined with respect to the Z-axis by the power of this rotary drive source. That is, each chuck table 24 is configured to be able to rotate around a rotation axis intersecting its upper surface 28a.

[0028] For example, when the turntable 22 rotates in the direction of the arrow in FIG. 1 or in the direction opposite to the arrow, each chuck table 24 moves along the circumferential direction of the turntable 22. Specifically, the turntable 22 moves the chuck table 24, for example, to a loading / unloading area close to the first transfer arm 18 and the first holding pad 20, a rough grinding area behind the loading / unloading area, a finish grinding area on the side of the rough grinding area, a polishing area in front of the finish grinding area and on the side of the loading / unloading area, and the loading / unloading area in this order.

[0029] The workpiece 11 is transported from the positioning table 14 of the positioning mechanism 12 to the chuck table 24 arranged in the loading / unloading area by the first transfer arm 18 and the first holding pad 20. In the rough grinding area, the finish grinding area, and the polishing area, the space around the turntable 22 is covered by the cover 30. Therefore, the chips generated during the processing of the workpiece 11 stay in the processing chamber inside the cover 30 and are less likely to scatter outside the cover 30.

[0030] Columnar support structures 32 are provided behind the rough grinding area and the finish grinding area (that is, behind the turntable 22), respectively. On the front side of each support structure 32, a Z-axis movement mechanism 34 including a ball screw connected to a rotary drive source such as a motor is provided. This Z-axis movement mechanism 34 moves (lifts and lowers) a support 36 arranged in front of each support structure 32 up and down along the Z-axis.

[0031] Each support 36 supports a grinding mechanism 38 for grinding a workpiece 11 held by a chuck table 24 in a rough grinding area or a finish grinding area. Each grinding mechanism 38 includes a spindle housing 40 supported by the support 36. FIG. 2 is an exploded perspective view showing a part of the grinding mechanism 38.

[0032] Each spindle housing 40 houses a columnar spindle 42 that serves as a rotation axis parallel to the Z-axis or a rotation axis slightly inclined with respect to the Z-axis in a manner that it can rotate around its axis. A rotational drive source (not shown) such as a motor is connected to the upper end side (base end side) of each spindle 42, and due to the power of this rotational drive source, the spindle 42 rotates around its axis.

[0033] The lower end portion (tip portion) of each spindle 42 is exposed from the lower end surface of the spindle housing 40, and a disk-shaped mount 44 is connected to the lower end portion of this spindle 42. The mount 44 has a circular upper surface 44a, a circular lower surface 44b facing the opposite side of the upper surface 44a, and a side surface 44c connecting the edge of the upper surface 44a and the edge of the lower surface 44b. The lower end portion of the spindle 42 is fixed to the central portion of the upper surface 44a of the mount 44.

[0034] Also, at the upper surface 44a of the mount 44, the upper ends of six through holes 44d that are arranged at generally equal intervals (equal angular intervals) along the circumferential direction of the mount 44 and penetrate the mount 44 vertically are open. Each through hole 44d also opens at the lower surface 44b of the mount 44. When a fastening tool 46 such as a bolt is inserted into each through hole 44d from above, the lower end portion of the fastening tool 46 is exposed below the mount 44. Although it is preferable that the mount 44 is provided with a plurality of through holes 44d, the number of through holes 44d in the mount 44 is not limited to six.

[0035] A grinding tool (processing tool) 48 is attached to the lower surface 44b of the mount 44 by the fastening tool 46 described above. The grinding tool 48 includes an annular tool base (base portion) 50 made of a metal such as stainless steel or aluminum. This tool base 50 has an annular first surface 50a and an annular second surface 50b facing the side opposite to the first surface 50a.

[0036] The outer edge of the first surface 50a and the outer edge of the second surface 50b are connected to each other by an outer surface 50c. Also, the inner edge of the first surface 50a and the inner edge of the second surface 50b are connected to each other by an inner surface 50d. Note that a through-hole penetrating the central portion of the tool base 50 is defined by this inner surface 50d.

[0037] An annular groove (not shown) along the circumferential direction of the tool base 50 is open on the second surface 50b of the tool base 50, and a plurality of grinding wheels (processing portions) 52 in which abrasive grains such as diamond are dispersed in a binder such as vitrified are arranged in this groove. That is, the plurality of grinding wheels 52 are arranged on the second surface 50b side of the tool base 50. Also, each grinding wheel 52 is fixed to the tool base 50 by an adhesive or the like.

[0038] Note that the conditions regarding the grinding wheels 52, such as the size of the abrasive grains and the type of binder, are appropriately set according to the type of the workpiece 11 and the quality required for the workpiece 11 after grinding. For example, a grinding tool 48 equipped with a grinding wheel 52 composed of abrasive grains of a relatively large particle size and a binder is attached to the mount 44 of the grinding mechanism 38 on the rough grinding region side. Also, for example, a grinding tool 48 equipped with a grinding wheel 52 composed of abrasive grains of a relatively small particle size and a binder is attached to the mount 44 of the grinding mechanism 38 on the finish grinding region side.

[0039] On the first surface 50a of the tool base 50, one ends of six fastening holes 50e arranged at substantially equal intervals (equal angular intervals) corresponding to the through holes 44d of the mount 44 are open. That is, the fastening holes 50e of the tool base 50 and the through holes 44d of the mount 44 are provided at corresponding positions. Note that the number of the fastening holes 50e of the tool base 50 is not limited to six. It is sufficient that the tool base 50 is provided with a plurality of fastening holes 50e corresponding to the through holes 44d of the mount 44.

[0040] On the inner wall surface of each fastening hole 50e, a thread corresponding to the thread provided on the fastener 46 is provided. As shown in FIG. 2, with the lower surface 44b of the mount 44 and the first surface 50a of the tool base 50 facing each other so that the positions of the through hole 44d and the fastening hole 50e coincide, and after bringing them close to each other, when the fastener 46 is inserted into the through hole 44d, the fastener 46 can be fastened to the corresponding fastening hole 50e. When the fastener 46 is fastened to the fastening hole 50e through the through hole 44d, the grinding tool 48 is fixed to the mount 44.

[0041] Next to each grinding mechanism 38, a nozzle (not shown) capable of supplying a grinding liquid (grinding fluid) to the portion where the workpiece 11 and the grinding wheel 52 come into contact is arranged. Instead of this nozzle, or together with the nozzle, a liquid supply port used for supplying the liquid may be provided on the tool base 50 of the grinding tool 48 or the like.

[0042] As shown in FIG. 1, another support structure 54 is provided on the side of the polishing area. On the surface of the support structure 54 on the turntable 22 side, a Z-axis movement mechanism 56 including a rotational drive source (not shown) such as a motor is provided. This Z-axis movement mechanism 56 moves (lifts and lowers) a support 58 arranged on the turntable 22 side of the support structure 54 up and down along the Z-axis.

[0043] A polishing mechanism 60 for polishing the workpiece 11 held by the chuck table 24 in the polishing area is supported by the support 58. The polishing mechanism 60 includes a spindle housing 62 supported by the support 58. FIG. 3 is an exploded perspective view showing a part of the polishing mechanism 60.

[0044] The spindle housing 62 houses a columnar spindle 64 that has a rotation axis parallel to the Z-axis or a rotation axis slightly inclined with respect to the Z-axis in a manner that allows it to rotate around its axis. A rotational drive source (not shown) such as a motor is connected to the upper end side (base end side) of the spindle 64, and the spindle 64 rotates around its axis by the power of this rotational drive source.

[0045] The lower end portion (tip portion) of the spindle 64 is exposed from the lower end surface of the spindle housing 62, and a disk-shaped mount 66 is connected to the lower end portion of this spindle 64. The mount 66 has a circular upper surface 66a, a circular lower surface 66b facing the opposite side of the upper surface 66a, and a side surface 66c connecting the edge of the upper surface 66a and the edge of the lower surface 66b. The lower end portion of the spindle 64 is fixed to the central portion of the upper surface 66a of the mount 66.

[0046] Also, at the upper surface 66a of the mount 66, the upper ends of six through holes 66d that are arranged generally at equal intervals (equal angular intervals) along the circumferential direction of the mount 66 and penetrate the mount 66 vertically are open. Each through hole 66d also opens at the lower surface 66b of the mount 66. When a fastener 68 such as a bolt is inserted into each through hole 66d from above, the lower end portion of the fastener 68 is exposed below the mount 66. Although it is preferable that a plurality of through holes 66d are provided in the mount 66, the number of through holes 66d in the mount 66 is not limited to six.

[0047] A polishing tool (tool for processing) 70 is attached to the lower surface 66b of the mount 66 by the above-described fastener 68. The polishing tool 70 includes a disk-shaped tool base (base portion) 72 made of a resin typified by polyethylene terephthalate (PET), a metal typified by stainless steel, a ceramic typified by alumina, or the like.

[0048] This tool base 72 has a circular first surface 72a and a circular second surface 72b facing the side opposite to the first surface 72a. The outer edge of the first surface 72a and the outer edge of the second surface 72b are connected to each other by an outer surface 72c. Further, a through hole 72d penetrating the tool base 72 in the thickness direction is provided at the central portion of the tool base 72. For example, a polishing liquid (abrasive liquid) is supplied to this through hole 72d from the side of the mount 66.

[0049] A disk-shaped polishing pad (processing portion) 74 having a diameter approximately the same as that of the tool base 72 is attached to the second surface 72b of the tool base 72 by an adhesive or the like made of resin. The polishing pad 74 is typically composed of a non-woven fabric or a polymer foam and does not contain abrasive grains. However, the polishing pad 74 may contain abrasive grains. Further, a through hole 74a (see FIG. 10 etc.) penetrating the polishing pad 74 in the thickness direction is provided at the central portion of the polishing pad 74. For example, a polishing liquid is supplied to this through hole 74a through the through hole 72d of the tool base 72.

[0050] One end of six fastening holes 72e arranged at substantially equal intervals (equal angular intervals) corresponding to the through holes 66d of the mount 66 is open on the first surface 72a of the tool base 72. That is, the fastening holes 72e of the tool base 72 and the through holes 66d of the mount 66 are provided at corresponding positions. Note that the number of the fastening holes 72e of the tool base 72 is not limited to six. It is sufficient that a plurality of fastening holes 72e corresponding to the through holes 66d of the mount 66 are provided in the tool base 72.

[0051] Threads corresponding to the threads provided on the fastener 68 are provided on the inner wall surface of each fastening hole 72e. As shown in FIG. 3, with the lower surface 66b of the mount 66 and the first surface 72a of the tool base 72 facing each other so that the positions of the through hole 66d and the fastening hole 72e match, and after bringing them close to each other, when the fastener 68 is inserted into the through hole 66d, the fastener 68 can be fastened to the corresponding fastening hole 72e. When the fastener 68 is fastened to the fastening hole 72e through the through hole 66d, the polishing tool 70 is fixed to the mount 66.

[0052] The workpiece 11 held by the chuck table 24 in the rough grinding area is ground on the upper surface side by the grinding mechanism 38 on the rough grinding area side described above. Also, the workpiece 11 held by the chuck table 24 in the finish grinding area is ground on the upper surface side by the grinding mechanism 38 on the finish grinding area side described above. And the workpiece 11 held by the chuck table 24 in the polishing area is polished on the upper surface side by the polishing mechanism 60 described above.

[0053] In this way, by the chuck table 24 holding the workpiece 11 moving in the order of the loading / unloading area, the rough grinding area, the finish grinding area, and the polishing area, rough grinding of the workpiece 11, finish grinding after rough grinding, and polishing after finish grinding are continuously performed. The chuck table 24 in the polishing area is positioned again in the loading / unloading area when the polishing of the workpiece 11 is completed. Note that the processing apparatus 2 of the present embodiment may be used only for performing any one of rough grinding, finish grinding, and polishing of the workpiece 11.

[0054] A second transfer arm 76 for holding and transferring the processed workpiece 11 forward is provided in front of the loading / unloading area and on the side of the first transfer arm 18 and the first holding pad 20. A rotation drive source (not shown) such as a motor and an actuator (not shown) such as an air cylinder are connected to the base end portion of the second transfer arm 76. Therefore, the tip end portion of the second transfer arm 76 moves (swivels) around a rotation axis substantially parallel to the Z-axis through the base end portion of the second transfer arm 76 by the power of the rotation drive source, and moves (moves up and down) along the Z-axis by the power of the actuator.

[0055] At the tip of the second transfer arm 76, a second holding pad 78 is provided that can suck and hold the upper surface side of the processed workpiece 11. For example, the processed workpiece 11 on the chuck table 24 that has moved to the loading / unloading area is held by the second holding pad 78, and by moving this second holding pad 78 with the second transfer arm 76, the workpiece 11 is transferred forward. Note that the second holding pad 78 is larger than the first holding pad 20 and can hold substantially the entire workpiece 11 whose rigidity has decreased due to processing.

[0056] On the side of the second transfer arm 76 and the second holding pad 78, a cleaning mechanism 80 for cleaning the processed workpiece 11 unloaded from the chuck table 24 in the loading / unloading area is provided. The cleaning mechanism 80 includes, for example, a cleaning nozzle (not shown) that can inject a cleaning fluid. Below this cleaning nozzle, a spinner table (cleaning table) 82 for holding the workpiece 11 during the cleaning process by the cleaning nozzle is arranged.

[0057] The structure of the spinner table 82 is similar to the structure of the chuck table 24. That is, the spinner table 82 is configured to be able to suck and hold the workpiece 11. Also, a rotational drive source such as a motor is connected to the lower part of this spinner table 82, and the spinner table 82 rotates around a rotation axis substantially parallel to the Z-axis by the power of the rotational drive source. The workpiece 11 is transferred from the chuck table 24 to the spinner table 82 by the second transfer arm 76 and the second holding pad 78.

[0058] By injecting the cleaning fluid from the cleaning nozzle toward the workpiece 11 held by the spinner table 82 while rotating the spinner table 82, the workpiece 11 is cleaned. The cleaning fluid injected from the cleaning nozzle is typically a mixed fluid (two-fluid) of water and air. Of course, water or the like that is not mixed with air may be used as the cleaning fluid. The cleaned workpiece 11 is transferred by the robot arm 6 and, for example, housed in the cassette 8b.

[0059] A controller (control unit) 84 is connected to each element of the processing apparatus 2. This controller 84 is constituted by a computer including, for example, a processing device 86 and a storage device 88, and controls the operations of each element of the processing apparatus 2 described above so that the workpiece 11 is appropriately processed.

[0060] The processing device 86 is typically a CPU (Central Processing Unit) and performs various processes necessary to control the above-described elements. The storage device 88 includes, for example, a main storage device such as a DRAM (Dynamic Random Access Memory) and an auxiliary storage device such as a hard disk drive or a flash memory. The functions of the controller 84 are realized, for example, by the processing device 86 operating according to a program stored in the storage device 88.

[0061] An input / output device 90 serving as a user interface is connected to this controller 84. The input / output device 90 is, for example, a touch screen, and inputs commands from an operator to the controller 84. Further, the input / output device 90 outputs (displays in the case of a touch screen) information regarding the processing apparatus 2 in a manner recognizable by the operator based on a command from the controller 84.

[0062] In this embodiment, an input / output device 90 having both an input function and an output function is shown, but an input device having an input function and an output device having an output function may be connected to the controller 84, respectively. As the input device, for example, a keyboard, a mouse, or the like can be adopted. As the output device, for example, a display device such as a liquid crystal display, a speaker capable of transmitting information by sound, an indicator light capable of transmitting information by the color or emission state (emission, blinking, extinguishing, etc.) of light, or the like can be adopted.

[0063] FIG. 4 is a perspective view showing a first tool attachment / detachment jig 102 used when attaching a grinding tool 48 to a mount 44 connected to a spindle 42 or when detaching the grinding tool 48 from the mount 44. As shown in FIG. 4, the first tool attachment / detachment jig 102 has a support portion 104 formed in a disk shape from a material such as resin. This support portion 104 has an annular first surface 104a and an annular second surface 104b facing the side opposite to the first surface 104a.

[0064] A columnar convex portion 104c protruding from the first surface 104a is provided at the central portion of the support portion 104. The convex portion 104c is configured to have a size corresponding to a through hole penetrating the central portion of the tool base 50. For example, when the first tool attachment / detachment jig 102 is used, it is inserted into the through hole of the tool base 50 from the side of the grinding wheel 52 and contacts a part of the inner surface 50d (see FIG. 7 etc.).

[0065] The protruding amount (height) of the convex portion 104c from the first surface 104a is set in a range where the grinding wheel 52 and the first surface 104a of the support portion 104 do not contact each other while the convex portion 104c is in contact with a part of the inner surface 50d of the tool base 50 (see FIG. 7 etc.). That is, the distance from the portion of the convex portion 104c that contacts the inner surface 50d to the first surface 104a is larger than the distance from this portion to the tip of the grinding wheel 52.

[0066] In this way, the support portion 104 of the present embodiment is configured to be able to support the grinding tool 48 from the side of the grinding wheel 52 in a manner that does not directly contact the grinding wheel 52. Therefore, the possibility that the grinding wheel 52 is damaged due to the impact caused by the contact with the support portion 104 is extremely low. However, the support portion 104 may be configured to be able to support the grinding tool 48 from the side of the grinding wheel 52 in a manner that directly contacts the grinding wheel 52.

[0067] In two regions located at the outer edge (end portion) of the first surface 104a of the support portion 104 described above, side wall portions 106 each formed in a columnar shape from a material such as resin are fixed. In the present embodiment, two arc-shaped and columnar side wall portions 106 along the outer edge of the first surface 104a are arranged so as to realize substantially the same positional relationship as the positional relationship of any two through holes 44d of the mount 44.

[0068] Each side wall portion 106 has a first surface 106a and a second surface corresponding to a pair of bottom surfaces, and the second surface side is fixed to the support portion 104. On the other hand, a clamp portion 108 for fixing the side wall portion 106 to the mount 44 when using, for example, the first tool attachment / detachment jig 102 is provided on the exposed first surface 106a of each side wall portion 106. The two clamp portions 108 are also arranged so as to realize substantially the same positional relationship as the positional relationship of any two through holes 44d of the mount 44.

[0069] FIG. 5 is a perspective view showing the side wall portion 106 and the clamp portion 108 in the first state, and FIG. 6 is a perspective view showing the side wall portion 106 and the clamp portion 108 in the second state. As shown in FIGS. 5 and 6, the side wall portion 106 is provided with a concave accommodating portion 106b capable of accommodating a fastener 46 used for attaching the grinding tool 48 to the mount 44.

[0070] One end of the accommodating portion 106b opens to the first surface 106a of the side wall portion 106 so as not to overlap, for example, the clamp portion 108. By accommodating the fastener 46 in the accommodating portion 106b, the workability when attaching the grinding tool 48 to the mount 44 or when removing the grinding tool 48 from the mount 44 is improved. Note that one end of the accommodating portion 106b may open to another surface (such as a side surface) of the side wall portion 106.

[0071] Further, as shown in FIG. 6, on the inner side surface of the side wall portion 106 (the side surface facing inward along the radial direction of the first surface 104a), a convex portion 106c that contacts the outer surface 50c of the tool base 50 is provided when using the first tool attachment / detachment jig 102, that is, when the side wall portion 106 is fixed to the mount 44.

[0072] When this convex portion 106c contacts the outer surface 50c of the tool base 50, the first tool attachment / detachment jig 102 can securely hold the grinding tool 48. In this embodiment, a concave portion 50f having a shape matching the shape of the convex portion 106c is provided at the position where the convex portion 106c of the outer surface 50c of the tool base 50 contacts (see FIG. 7 etc.). However, the concave portion 50f may not be provided on the outer surface 50c of the tool base 50.

[0073] As shown in FIGS. 5 and 6, the clamp portion 108 includes a fixing portion 110 made of a material such as metal and fixed to the first surface 106a side of the side wall portion 106 with a screw or the like. This fixing portion 110 has a first end portion 110a that contacts the side wall portion 106, a second end portion 110b that is located inside (along the radial direction of the first surface 104a and does not contact the side wall portion 106), and a third end portion 110c that is located outside (along the radial direction of the first surface 104a and does not contact the side wall portion 106).

[0074] A movable portion 112 made of a material such as metal is connected to the second end portion 110b of the fixing portion 110 so as to be rotatable about the second end portion 110b in a plane substantially perpendicular to the first surface 104a of the support portion 104 and along the radial direction of the first surface 104a. The movable portion 112 has a first end portion 112a connected to the second end portion 110b of the fixing portion 110, a second end portion 112b far from the first end portion 112a, and a third end portion 112c closer to the first end portion 112a than the second end portion 112b.

[0075] A contact portion 114 made of a material such as resin is provided at the second end portion 112b of the movable portion 112. This contact portion 114 is configured, for example, in a frustum shape (hammer shape) that becomes thinner toward the tip, and when the side wall portion 106 is fixed to the mount 44, its tip portion 114a contacts the upper surface 44a of the mount 44.

[0076] A moving mechanism 116 for rotating the movable part 112 is connected to the third end 110c of the fixed part 110 and the third end 112c of the movable part 112. The moving mechanism 116 includes a lever handle 118 made of a material such as metal. This lever handle 118 is connected to the third end 110c so as to be rotatable about the third end 110c of the fixed part 110, for example, in a plane that is substantially perpendicular to the first surface 104a of the support part 104 and along the radial direction of the first surface 104a.

[0077] The lever handle 118 has a first end 118a connected to the third end 110c of the fixed part 110, a second end 118b located on the side opposite to the first end 118a, and an intermediate part 118c located between the first end 118a and the second end 118b. The second end 118b has a surface made of a material such as resin, for example, and functions as a grip that the operator's hand touches. That is, the operator can rotate the lever handle 118 by touching the second end 118b and applying a force.

[0078] Further, the moving mechanism 116 is configured in a rod shape with a material such as metal and includes a connecting member 120 connected to the third end 112c of the movable part 112 and the intermediate part 118c of the lever handle 118. Specifically, this connecting member 120 has a first end 120a connected to the third end 112c of the movable part 112 and a second end 120b connected to the intermediate part 118c of the lever handle 118.

[0079] The first end 120a is connected to the third end 112c so as to be rotatable about the third end 112c of the movable part 112, for example, in a plane that is substantially perpendicular to the first surface 104a of the support part 104 and along the radial direction of the first surface 104a. Also, the second end 120b is connected to the intermediate part 118c so as to be rotatable about the intermediate part 118c of the lever handle 118, for example, in a plane that is substantially perpendicular to the first surface 104a of the support part 104 and along the radial direction of the first surface 104a.

[0080] Therefore, when the lever handle 118 is rotated, the connecting member 120 moves while rotating about the third end 112c of the movable part 112 and the middle part 118c of the lever handle 118 respectively, and applies a force to the movable part 112. That is, when the lever handle 118 is rotated, the movable part 112 also rotates.

[0081] For example, in the first state of the clamp part 108 where the lever handle 118 is in the first position shown in FIG. 5, when the lever handle 118 is rotated from the first position to the second position in the direction of arrow A (clockwise), the movable part 112 rotates in the direction of arrow B (clockwise) and is positioned at the contact position shown in FIG. 6. That is, the contact position is the position of the movable part 112 in a state where the contact part 114 approaches the side wall part 106.

[0082] On the other hand, in the second state of the clamp part 108 where the lever handle 118 is in the second position shown in FIG. 6, when the lever handle 118 is rotated from the second position to the first position in the direction of arrow C (counterclockwise), the movable part 112 rotates in the direction of arrow D (clockwise) and is positioned at the retracted position shown in FIG. 5. That is, the retracted position is the position of the movable part 112 in a state where the contact part 114 is separated from the side wall part 106.

[0083] Note that the clamp part 108 is configured such that in the second state where the lever handle 118 is in the second position shown in FIG. 6, the first end 118a, the middle part 118c, and the first end 120a of the moving mechanism 116 are arranged substantially linearly. Therefore, when the lever handle 118 is positioned at the second position, even if an external force is applied to the movable part 112, the movable part 112 cannot substantially rotate.

[0084] That is, in a state where the lever handle 118 is positioned at the second position, the movement of the movable part 112 positioned at the contact position toward the retracted position is restricted. As a result, due to the self - weight of the first tool attachment / detachment jig 102, the grinding tool 48, etc., the fixing of the side wall part 106 to the mount 44 by the clamp part 108 is not released.

[0085] FIG. 7 is a cross-sectional view showing a first tool attaching / detaching jig 102 that supports a grinding tool 48. For example, when attaching the grinding tool 48 to the mount 44, as shown in FIG. 7, the operator places the grinding tool 48 on the first tool attaching / detaching jig 102 such that the convex portion 104c of the support portion 104 is inserted into the through hole of the tool base 50 from the side of the grinding wheel 52.

[0086] As a result, the convex portion 104c of the support portion 104 contacts a part of the inner surface 50d of the tool base 50, the convex portion 106c of the side wall portion 106 is fitted into the concave portion 50f of the tool base 50, and the grinding tool 48 is supported by the first tool attaching / detaching jig 102. As described above, in the present embodiment, the grinding wheel 52 does not contact the first surface 104a of the support portion 104.

[0087] FIG. 8 is a cross-sectional view showing the first tool attaching / detaching jig 102 fixed to the mount 44. When the grinding tool 48 is supported by the first tool attaching / detaching jig 102, the operator, for example, after confirming that the lever handle 118 is positioned at the first position, faces the first surface 50a of the tool base 50 to the lower surface 44b of the mount 44, and then brings them sufficiently close.

[0088] In the first state of the clamp portion 108 where the lever handle 118 is in the first position, the movable portion 112 is positioned at the retracted position, and the contact portion 114 is separated from the side wall portion 106. Therefore, in this state, the tip portion 114a of the contact portion 114 cannot contact the upper surface 44a of the mount 44, and the side wall portion 106 is not fixed to the mount 44.

[0089] Next, the operator rotates the lever handle 118 from the first position to the second position, thereby rotating the movable portion 112 from the retracted position to the contact position. When the movable portion 112 is positioned at the contact position, the contact portion 114 approaches the side wall portion 106. Then, the tip portion 114a of the contact portion 114 contacts the upper surface 44a of the mount 44, and the side wall portion 106 is fixed to the mount 44. That is, the first tool attaching / detaching jig 102 is fixed to the mount 44.

[0090] Thus, the above-described contact position is also the position where the contact portion 114 contacts the mount 44, and the retracted position is also the position where the contact portion 114 separates from the mount 44. When the first tool attachment / detachment jig 102 is attached to the mount 44, the operator fastens the fastener 46 through the through-hole 44d with respect to the fastening hole 50e. Thereby, the grinding tool 48 is attached to the mount 44.

[0091] Note that, as shown in FIG. 7, when the movable portion 112 is positioned at the contact position, it is desirable for the operator to adjust the orientation of the grinding tool 48 with respect to the first tool attachment / detachment jig 102 so that the contact portion 114 is disposed directly above the fastening hole 50e of the tool base 50. Further, as shown in FIG. 8, when the movable portion 112 is positioned at the contact position, it is desirable for the operator to adjust the orientation of the first tool attachment / detachment jig 102 with respect to the mount 44 so that the contact portion 114 is disposed directly above the through-hole 44d of the mount 44.

[0092] As described above, the two clamp portions 108 are arranged so as to realize the same positional relationship as the positional relationship of any two through-holes 44d of the mount 44. Further, the contact portion 114 is configured to become thinner toward the tip. Therefore, after the orientation of the first tool attachment / detachment jig 102 with respect to the mount 44 is adjusted as described above, when the movable portion 112 is positioned at the contact position, the tip portion 114a of the contact portion 114 is inserted into the through-hole 44d. As a result, the first tool attachment / detachment jig 102 is more securely fixed to the mount 44.

[0093] Further, after the orientation of the first tool attachment / detachment jig 102 with respect to the mount 44 and the orientation of the grinding tool 48 with respect to the first tool attachment / detachment jig 102 are adjusted as described above, when the movable portion 112 is positioned at the contact position, all the fastening holes 50e overlap with the through-hole 44d. Thereby, the fastener 46 can be easily fastened to the fastening hole 50e through the through-hole 44d into which the tip portion 114a of the contact portion 114 is not inserted.

[0094] After fastening the fastener 46 to the fastening hole 50e, the lever handle 118 is rotated from the second position to the first position, and the movable part 112 is rotated from the contact position to the retracted position, thereby releasing the fixing of the side wall portion 106 to the mount 44. As a result, the first tool attachment / detachment jig 102 is removed from the mount 44. Note that the procedure for removing the grinding tool 48 from the mount 44 is the reverse of the procedure for attaching the grinding tool 48 to the mount 44.

[0095] As described above, the first tool attachment / detachment jig 102 according to the present embodiment includes a support portion 104 configured to support a grinding tool 48, which is a tool for grinding (processing tool), a side wall portion 106 provided at an outer edge portion (end portion) of the first surface 104a of the support portion 104, and a clamp portion 108 disposed on the side wall portion 106 and configured to fix the side wall portion 106 to the mount 44. Therefore, when the side wall portion 106 is fixed to the mount 44, the support portion 104 can support the grinding tool 48 between the support portion 104 and the mount 44.

[0096] That is, in a state where the side wall portion 106 is fixed to the mount 44, the grinding tool 48 attached to the mount 44 or the grinding tool 48 removed from the mount 44 is supported by the support portion 104, so that the operator does not accidentally drop the grinding tool 48. As described above, according to the first tool attachment / detachment jig 102 according to the present embodiment, when attaching the grinding tool 48 to the mount 44 connected to the spindle 42 or removing the grinding tool 48 from the mount 44, the possibility of the grinding tool 48 falling can be reduced.

[0097] In addition, the clamp portion 108 of the first tool attachment / detachment jig 102 according to the present embodiment includes a fixed portion 110 fixed to the side wall portion 106, a movable portion 112 connected to be rotatable with respect to the fixed portion 110, and a contact portion 114 provided on the movable portion 112 and contacting the mount 44 when fixing the side wall portion 106 to the mount 44. In addition, it has a moving mechanism 116 configured to be able to rotate the movable portion 112 between a contact position where the contact portion 114 contacts the mount 44 and a retracted position where the contact portion 114 separates from the mount 44.

[0098] Therefore, by simply rotating the movable portion 112 from the retracted position to the contact position by the moving mechanism 116, the contact portion 114 can be brought into contact with the mount 44, and the side wall portion 106 can be easily fixed to the mount 44. Thus, according to the first tool attachment / detachment jig 102 according to the present embodiment, the work of attaching the grinding tool 48 to the mount 44 connected to the spindle 42 or detaching the grinding tool 48 from the mount 44 is simplified.

[0099] FIG. 9 is a perspective view showing a second tool attachment / detachment jig 202 used when attaching a polishing tool 70 to a mount 66 connected to a spindle 64 or detaching the polishing tool 70 from the mount 66. Note that many elements constituting the second tool attachment / detachment jig 202 are common to the elements constituting the first tool attachment / detachment jig 102. Therefore, the same reference numerals are given to the common elements, and the detailed description thereof is omitted.

[0100] As shown in FIG. 9, the second tool attachment / detachment jig 202 has a support portion 104 formed in a disk shape from a material such as resin. This support portion 204 has a circular first surface 204a and a circular second surface 204b facing the opposite side of the first surface 204a. Note that the support portion 204 of the second tool attachment / detachment jig 202 is configured in a flat plate shape and does not have a convex portion such as the convex portion 104c of the first tool attachment / detachment jig 102.

[0101] Similar to the first tool attachment / detachment jig 102, side wall portions 106 each formed in a columnar shape from a material such as resin are fixed to two regions located at the outer edge portion (end portion) of the first surface 204a of the support portion 204. Also in this second tool attachment / detachment jig 202, two arc-shaped and columnar side wall portions 106 along the outer edge portion of the first surface 204a are arranged so as to achieve the same positional relationship as the positional relationship of any two through holes 66d of the mount 66.

[0102] On the exposed first surface 106a of each side wall portion 106, for example, a clamp portion 108 for fixing the side wall portion 106 to the mount 66 when using the second tool attachment / detachment jig 202 is provided. The two clamp portions 108 are also arranged so as to achieve the same positional relationship as the positional relationship of any two through holes 66d of the mount 66.

[0103] Note that the convex portion 106c provided on the inner side surface of the side wall portion 106 (the side surface facing inward along the radial direction of the first surface 204a) contacts the outer side surface 72c of the tool base 72 when using the second tool attachment / detachment jig 202, that is, when the side wall portion 106 is fixed to the mount 66. In the present embodiment, a concave portion 72f having a shape matching the shape of the convex portion 106c is provided at the position where the convex portion 106c of the outer side surface 72c of the tool base 72 contacts (see FIG. 10 etc.).

[0104] FIG. 10 is a cross-sectional view showing the second tool attachment / detachment jig 202 supporting the polishing tool 70. The procedure for attaching the polishing tool 70 to the mount 66 is the same as the procedure for attaching the grinding tool 48 to the mount 44. Specifically, as shown in FIG. 10, the operator arranges the polishing tool 70 with respect to the second tool attachment / detachment jig 202 so that the polishing pad 74 contacts the first surface 204a of the support portion 204. Thereby, the convex portion 106c of the side wall portion 106 is fitted into the concave portion 72f of the tool base 72, and the polishing tool 70 is supported by the second tool attachment / detachment jig 202.

[0105] FIG. 11 is a cross-sectional view showing the second tool attachment / detachment jig 202 fixed to the mount 66. When the polishing tool 70 is supported by the second tool attachment / detachment jig 202, the operator checks that the lever handle 118 is positioned at the first position, then faces the first surface 72a of the tool base 72 to the lower surface 66b of the mount 66, and then brings them sufficiently close to each other.

[0106] Next, the operator rotates the lever handle 118 from the first position to the second position, thereby rotating the movable part 112 from the retracted position to the contact position. When the movable part 112 is positioned at the contact position, the contact part 114 comes close to the side wall part 106. Then, the tip part 114a of the contact part 114 contacts the upper surface 66a of the mount 66, and the side wall part 106 is fixed to the mount 66. That is, the second tool attachment / detachment jig 202 is fixed to the mount 66.

[0107] As described above, the above-described contact position is also the position where the contact part 114 contacts the mount 66, and the retracted position is also the position where the contact part 114 separates from the mount 66. When the second tool attachment / detachment jig 202 is attached to the mount 66, the operator fastens the fastener 68 through the through hole 66d to the fastening hole 72e. Thereby, the polishing tool 70 is attached to the mount 66.

[0108] Note that, as shown in FIG. 10, when the movable part 112 is positioned at the contact position, it is desirable for the operator to adjust the orientation of the polishing tool 70 with respect to the second tool attachment / detachment jig 202 so that the contact part 114 is disposed directly above the fastening hole 72e of the tool base 72. Further, as shown in FIG. 11, when the movable part 112 is positioned at the contact position, it is desirable for the operator to adjust the orientation of the second tool attachment / detachment jig 202 with respect to the mount 66 so that the contact part 114 is disposed directly above the through hole 66d of the mount 66.

[0109] As described above, the two clamp portions 108 are arranged so as to realize the same positional relationship as the positional relationship of any two through holes 66d of the mount 66. Further, the contact portion 114 is configured to become thinner toward the tip. Therefore, when the movable portion 112 is positioned at the contact position after the orientation of the second tool attachment / detachment jig 202 with respect to the mount 66 is adjusted as described above, the tip portion 114a of the contact portion 114 is inserted into the through hole 66d. As a result, the second tool attachment / detachment jig 202 is more securely fixed to the mount 66.

[0110] Further, when the orientation of the second tool attachment / detachment jig 202 with respect to the mount 66 and the orientation of the polishing tool 70 with respect to the second tool attachment / detachment jig 202 are adjusted as described above, and the movable portion 112 is positioned at the contact position, all the fastening holes 72e overlap with the through hole 66d. As a result, the fastener 68 can be easily fastened to the fastening hole 72e through the through hole 66d into which the tip portion 114a of the contact portion 114 is not inserted.

[0111] After the fastener 68 is fastened to the fastening hole 72e, the lever handle 118 is rotated from the second position to the first position, and the movable portion 112 is rotated from the contact position to the retracted position, thereby releasing the fixing of the side wall portion 106 to the mount 66. As a result, the second tool attachment / detachment jig 202 is removed from the mount 66. Note that the procedure for removing the polishing tool 70 from the mount 66 is the reverse of the procedure for attaching the polishing tool 70 to the mount 66.

[0112] As described above, the second tool attachment / detachment jig 202 according to the present embodiment includes a support portion 204 configured to support a polishing tool 70 (a processing tool) that is a tool for polishing, a side wall portion 106 provided at an outer edge portion (end portion) of the first surface 204a of the support portion 204, and a clamp portion 108 disposed on the side wall portion 106 and configured to fix the side wall portion 106 to the mount 66. Therefore, when the side wall portion 106 is fixed to the mount 66, the support portion 204 can support the polishing tool 70 between the support portion 204 and the mount 66.

[0113] That is, when the side wall portion 106 is fixed to the mount 66, the polishing tool 70 attached to the mount 66 or the polishing tool 70 removed from the mount 66 is supported by the support portion 204, so that the operator does not accidentally drop the polishing tool 70. Thus, according to the second tool attachment / detachment jig 202 according to the present embodiment, when attaching the polishing tool 70 to the mount 66 connected to the spindle 64 or detaching the polishing tool 70 from the mount 66, the possibility of the polishing tool 70 falling can be suppressed to a low level.

[0114] In addition, the clamp portion 108 of the second tool attachment / detachment jig 202 according to the present embodiment includes a fixed portion 110 fixed to the side wall portion 106, a movable portion 112 connected to the fixed portion 110 so as to be rotatable, and a contact portion 114 provided on the movable portion 112 and contacting the mount 66 when fixing the side wall portion 106 to the mount 66. Further, it has a moving mechanism 116 configured to be able to rotate the movable portion 112 between a contact position where the contact portion 114 contacts the mount 66 and a retracted position where the contact portion 114 separates from the mount 66.

[0115] Therefore, by simply rotating the movable portion 112 from the retracted position to the contact position by the moving mechanism 116, the contact portion 114 can be brought into contact with the mount 66, and the side wall portion 106 can be easily fixed to the mount 66. Thus, according to the second tool attachment / detachment jig 202 according to the present embodiment, the operation when attaching the polishing tool 70 to the mount 66 connected to the spindle 64 or detaching the polishing tool 70 from the mount 66 is simplified.

[0116] Note that the present invention is not limited to the description of the above-described embodiments and can be implemented with various modifications. For example, in the above-described embodiments, two side wall portions 106 configured in an arc shape along the outer edge portion of the first surface 104a or the first surface 204a, and two clamp portions 108 are used. However, three or more side wall portions 106 configured in an arc shape and three or more clamp portions 108 may be used. Further, one side wall portion configured in an annular shape along the outer edge portion of the first surface 104a or the first surface 204a and two or more clamp portions 108 may be used.

[0117] Further, the side wall portion 106 does not necessarily have to be provided with a housing portion 106b capable of housing the fastener 46. Further, the side wall portion 106 does not necessarily have to be provided with the convex portion 106c. And even when the convex portion 106c is provided on the side wall portion 106, the grinding tool 48 and the polishing tool 70 do not necessarily have to be provided with the concave portion 50f and the concave portion 72f.

[0118] In addition, the structures, methods, etc. according to the above-described embodiments and modified examples can be implemented with modifications as long as they do not deviate from the scope of the object of the present invention.

Explanation of Reference Numerals

[0119] 102: First tool detaching jig 104: Support portion 104a: First surface 104b: Second surface 104c: Convex portion 106: Side wall portion 106a: First surface 106b: Housing portion 106c: Convex portion 108: Clamp portion 110: Fixed portion 110a: First end 110b: Second end 110c: Third end 112: Movable portion 112a: First end 112b: Second end 112c: Third end 114: Contact part 114a: Tip part 116: Moving mechanism 118: Lever handle 118a: First end part 118b: Second end part 118c: Intermediate part 120: Connecting member 120a: First end part 120b: Second end part 202: Second tool attaching / detaching jig 204: Support part 204a: First surface 204b: Second surface 2: Processing device 4: Base 4a: Accommodating part 6: Robot arm 8a: Cassette 8b: Cassette 10a: Cassette table 10b: Cassette table 12: Position adjusting mechanism 14: Position adjusting table 16: Pin 18: First transfer arm 20: First holding pad 22: Turntable 24: Chuck table 26: Frame body 28: Holding plate 28a: Upper surface 30: Cover 32: Support structure 34: Z-axis moving mechanism 36: Support tool 38: Grinding mechanism 40: Spindle housing 42: Spindle 44: Mount 44a: Upper surface 44b: Lower surface 44c: Side surface 44d: Through hole 46: Fastener 48: Grinding tool (tool for processing) 50: Tool base (base part) 50a: First surface 50b: Second surface 50c: Outer surface 50d: Inner surface 50e: Fastening hole 50f: Recess 52: Grinding wheel (processing part) 54: Support structure 56: Z-axis movement mechanism 58: Support tool 60: Grinding mechanism 62: Spindle housing 64: Spindle 66: Mount 66a: Upper surface 66b: Lower surface 66c: Side surface 66d: Through hole 68: Fastening tool 70: Grinding tool (tool for processing) 72: Tool base (base part) 72a: First surface 72b: Second surface 72c: Outer surface 72d: Through hole 72e: Fastening hole 72f: Recess 74: Grinding pad (processing part) 74a: Through hole 76: Second transfer arm 78: Second holding pad 80: Cleaning mechanism 82: Spin table (cleaning table) 84: Controller (control unit) 86: Processing device 88: Memory device 90: Input / output device 11: Workpiece 11a: Surface 11b: Back surface

Claims

1. A tool attachment / detachment jig used to attach or detach the base portion side of a processing tool, which has a base portion having a first surface and a second surface opposite to the first surface, and a processing portion provided on the first surface of the base portion, to / from a mount connected to a spindle serving as a rotation axis, comprising: a support portion configured to support the tool from the processing portion side; a side wall portion provided at an end of the support portion; a clamp portion disposed on the side wall portion and configured to fix the side wall portion to the mount, and the clamp portion includes a fixed portion fixed to the side wall portion, a movable portion connected to the fixed portion so as to be rotatable, a contact portion provided on the movable portion and contacting the mount when fixing the side wall portion to the mount, and a movement mechanism configured to rotate the movable portion between a contact position where the contact portion contacts the mount and a retracted position where the contact portion is separated from the mount.

2. The movement mechanism includes a lever handle connected to the fixed portion so as to be rotatable, and a connecting member connecting the lever handle and the movable portion, and when the lever handle is rotated from a first position to a second position, the movable portion rotates from the retracted position to the contact position, and in a state where the lever handle is positioned at the second position, movement of the movable portion positioned at the contact position toward the retracted position is restricted. The tool attachment / detachment jig according to Claim 1.

3. The clamp portion is configured such that a part of the contact portion can be inserted into a through hole provided in the mount and into which a fastener is inserted for attaching the tool to the mount. The tool attachment / detachment jig according to Claim 1 or Claim 2.

4. The contact portion is configured to become thinner toward the tip. The tool attachment / detachment jig according to Claim 1 or Claim 2.

5. The side wall portion has a convex portion that contacts the outer surface of the base portion when being fixed to the mount. The tool attachment / detachment jig according to Claim 1 or Claim 2.

6. The side wall portion has a housing portion that can house a fastener used for attaching the tool to the mount. The tool attachment / detachment jig according to Claim 1 or Claim 2.

Images