Partition valve

Abstract

To avoid the occurrence of variations in protruding amount in a plurality of pressing cylinders.SOLUTION: A partition valve 100 comprises: a valve box including openings 12a and 12b of a flow passage H; a valve body 5 which is positioned inside of the valve box and capable of opening and closing the flow passage; a rotary shaft 20 which rotatably supports the valve body; a pressing cylinder 70 which is provided in the valve box and presses the valve body at a valve opening shielding position toward a valve closing position in a direction along the flow passage; a drive pressure generation mechanism 701 which is connected to the pressing cylinder and performs extending / contracting operation of the pressing cylinder; and a nonlinear operation application mechanism 770 which makes a linear operation and a nonlinear operation with respect to the extending / contracting operation of the pressing cylinder which is driven by the drive pressure generation mechanism.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present invention relates to a partition valve, and particularly to a technique suitable for use in a pendulum valve.

Background Art

[0002] In a vacuum device or the like, a partition valve is provided to partition between two spaces with different degrees of vacuum and connect the two partitioned spaces among a chamber, a pipe, a pump, and the like. As such a partition valve, various types of valves are known.

[0003] The inventors of the present invention developed a partition valve capable of performing a highly reliable partitioning operation and filed a patent application (Patent Document 1). In this partition valve, a valve box formed across a flow path, a neutral valve portion rotatable about a rotation axis of an axis parallel to the flow path direction, and a movable valve portion slidable in the flow path direction with respect to the neutral valve portion are provided. As the movable valve portion, a first movable valve portion that can be pressed against an opening of the flow path of the valve box and sealed, a second movable valve portion that is slidable in the flow path direction with respect to the first movable valve portion, a first biasing portion that can press the first movable valve portion against the opening to perform a sealing operation, a second biasing portion that can adjust the thickness dimensions of the first movable valve portion and the second movable valve portion, and a third biasing portion that biases the first movable valve portion with respect to the neutral valve portion are provided.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] The first biasing portion is composed of a plurality of hydraulic cylinders, and there is a problem that when the hydraulic cylinders protrude due to the volumetric expansion of the working oil due to a temperature rise, it may affect the rotational operation of the valve plate. In particular, due to factors such as the expansion and contraction frictional resistance of the hydraulic cylinder, if there is a difference in the expansion and contraction states among a plurality of hydraulic cylinders, only the most easily movable hydraulic cylinder will move, resulting in an easy increase in the protrusion amount. There has been a demand to improve this situation.

[0006] The present invention has been made in view of the above circumstances and aims to achieve the following objectives. 1. To be able to avoid the influence of volume expansion accompanying the temperature rise of the hydraulic fluid. 2. To be able to avoid the occurrence of variations in the protrusion amounts among a plurality of hydraulic cylinders. 3. To be able to avoid the inhibition of the rotational movement of the pendulum valve due to the protrusion of the hydraulic cylinder.

Means for Solving the Problem

[0007] (1) The partition valve according to one aspect of the present invention is a partition valve that partitions a flow path, a valve box that is inserted into the flow path and has a first opening and a second opening that communicate with each other facing each other to form the flow path, a valve body that is located in the hollow portion inside the valve box and can open and close the flow path, a rotary shaft that rotatably supports the valve body between a retracted position and a valve opening shielding position in the hollow portion in a direction intersecting the flow path and has an axis extending in the flow path direction, a rotary drive unit that can rotationally drive the valve body, a pressing cylinder provided on the valve box that presses the valve body in a direction along the flow path so that the valve body at the valve opening shielding position can be moved toward a valve closing position where it contacts the peripheral edge of the first opening, a drive pressure generation mechanism connected to the pressing cylinder that expands and contracts the pressing cylinder, a non-linear motion imparting mechanism that enables linear motion and non-linear motion with respect to the expansion and contraction motion of the pressing cylinder driven by the drive pressure generation mechanism, and comprises thereby solving the above problems. (2) In the above (1), the partition valve of the present invention The non-linear motion imparting mechanism enables the linear motion of the pressing cylinder at a position near the valve body being pressed and the non-linear motion of the pressing cylinder at a position separated from the valve body. It can be. (3) In the above (2), the partition valve of the present invention The non-linear motion imparting mechanism makes the expansion and contraction motion of the pressing cylinder by the drive pressure generating mechanism non-linear in the pressing cylinder in a state separated from the valve body as the non-linear motion. It can be. (4) In the above (3), the partition valve of the present invention The pressing cylinder is provided with a retraction spring that retracts the pressing cylinder with respect to the pressing cylinder that extends due to an increase in the drive pressure (operating pressure) by the drive pressure generating mechanism. The non-linear motion imparting mechanism has an elastic mechanism that retracts the pressing cylinder. It can be. (5) In the above (4), the partition valve of the present invention The elastic mechanism is an elastic body having a spring constant different from that of the retraction spring. It can be. (6) In the above (5), the partition valve of the present invention The elastic body is a weak spring having an elastic force smaller than that of the retraction spring and enabling the non-linear motion, and the retraction spring is a strong spring having an elastic force larger than that of the elastic body and enabling the linear motion. It can be. (7) In the above (6), the partition valve of the present invention The weak spring and the strong spring are arranged in series. It can be. (8) In the above (6), the partition valve of the present invention The weak spring and the strong spring are arranged in a double at the same axial position. It can be. (9) In the above (3), the partition valve of the present invention The non-linear motion imparting mechanism has a starting motion non-linear mechanism that enables the non-linear motion at the start of extension by the drive pressure generating mechanism in the pressing cylinder. It is possible. (10) The partition valve of the present invention is, in the above (9), The starting motion non-linear mechanism is either an elastic mechanism arranged in a hydraulic circuit configured by connecting the drive pressure generating mechanism and the pressing cylinder, an elastic pressure adjusting mechanism connected to the hydraulic circuit, or an elastic fluid connected to the hydraulic circuit. It is possible. (11) The partition valve of the present invention is, in the above (9), The starting motion non-linear mechanism has a vacuum region arranged in a hydraulic circuit configured by connecting the drive pressure generating mechanism and the pressing cylinder. It is possible.

[0008] (1) A partition valve according to one aspect of the present invention is a partition valve that partitions a flow path, a valve box that is inserted into the flow path and has a first opening and a second opening that face each other and communicate with each other to form the flow path, a valve body located in a hollow portion within the valve box and capable of opening and closing the flow path, a rotating shaft that rotatably supports the valve body in a direction intersecting the flow path between a retracted position and a valve opening shielding position within the hollow portion and has an axis extending in the flow path direction, a rotation driving unit capable of rotationally driving the valve body (neutral valve portion, movable valve portion, movable valve frame portion, movable valve plate portion), a pressing cylinder (valve box biasing portion) provided on the valve box and pressing the valve body (movable valve portion) in a direction along the flow path so as to be movable toward a valve closing position where the valve body at the valve opening shielding position contacts the periphery of the first opening, a drive pressure generating mechanism (drive unit) connected to the pressing cylinder and causing the pressing cylinder to expand and contract, a non-linear motion imparting mechanism that enables linear motion and non-linear motion with respect to the expansion and contraction motion of the pressing cylinder driven by the drive pressure generating mechanism Comprising The above problems are solved by this.

[0009] According to the above configuration, in the opening and closing operation of the partition valve, due to the telescopic operation of the pressing cylinder, the valve body moves along the flow path direction between the valve opening shielding position and the valve closing position. At this time, the non-linear motion imparting mechanism can perform, with the same device, a linear motion of pressing the valve body at the valve opening shielding position with respect to the telescopic motion of the pressing cylinder, and a non-linear motion of adjusting the protruding amount of the pressing cylinder in a state where it is not in contact with the valve body. Thereby, by extending the pressing cylinder by the non-linear motion imparting mechanism, the pressing cylinder can smoothly press the valve body and operate it to the valve closing position, and by retracting the pressing cylinder by the non-linear motion imparting mechanism, it is possible to smoothly release the pressing of the valve body and operate it to the valve opening shielding position.

[0010] At the same time, by enabling the non-linear motion of the pressing cylinder by the non-linear motion imparting mechanism, in the telescopic motion of the pressing cylinder, when rotating the valve body between the retracted position and the valve opening shielding position, etc., a state where the pressing cylinder has a sufficient distance from the valve body and is separated can be achieved. The non-linear motion imparting mechanism can prevent the pressing cylinder from inhibiting the rotation of the valve body.

[0011] Even when the force received from the sealing material or the friction surface, etc. in the telescopic part of the pressing cylinder becomes large, the non-linear motion imparting mechanism can prevent the pressing cylinder from being unable to perform a smooth telescopic motion. Therefore, the non-linear motion imparting mechanism can easily maintain a state where the pressing cylinder has a sufficient distance from the valve body and is separated. Thereby, there is no increase in the thickness of the valve box due to the countermeasure for avoiding the variation in the protruding amount of the pressing cylinder, which is to increase the thickness of the partition valve and sufficiently separate the pressing cylinder from the valve body. An increase in the thickness of the partition valve can be prevented.

[0012] When the partition valve is heated, for example, due to the temperature rise of the partition valve, the working fluid (hydraulic oil) that transmits the operating pressure for expanding and contracting the pressing cylinder from the drive pressure generating mechanism to the pressing cylinder thermally expands. Even when the working fluid thermally expands, the non-linear motion imparting mechanism can prevent the pressing cylinder from inadvertently protruding toward the valve body. Alternatively, the force received from a sealing material or a friction surface, etc. in the portion of the pressing cylinder that expands and contracts may increase. Thus, even when the operation of the pressing cylinder is inhibited, the non-linear motion imparting mechanism can prevent the pressing cylinder from inadvertently protruding toward the valve body.

[0013] Here, linear motion and non-linear motion mean whether the expansion and contraction movement of the pressing cylinder is a linear motion or a non-linear motion with respect to the increase and decrease of the operating pressure applied from the drive pressure generating mechanism to the pressing cylinder. Alternatively, linear motion and non-linear motion mean whether the expansion and contraction movement of the pressing cylinder is a linear motion or a non-linear motion with respect to the increase and decrease of the volume of the working fluid supplied to and discharged from the pressing cylinder by the drive pressure generating mechanism.

[0014] (2) The partition valve of the present invention is, in the above (1), The non-linear motion imparting mechanism enables the linear motion of the pressing cylinder at a position near the valve body (movable valve portion) that presses the valve body and the non-linear motion of the pressing cylinder at a position separated from the valve body (movable valve portion). It can be.

[0015] According to the above configuration, due to the non-linear motion imparting mechanism, at a position where the pressing cylinder is close to the valve body and can press the valve body, the linear motion enables the pressing cylinder to smoothly press the valve body by extension and operate it to the valve closing position, and enables the valve body to be smoothly released from the pressing by the retraction of the pressing cylinder and operate it to the valve opening shielding position.

[0016] By means of the non-linear motion imparting mechanism, when the pressing cylinder is separated from the valve body to such an extent that the valve body can rotate, the pressing cylinder can perform a non-linear motion. As a result, when the working fluid (hydraulic oil) that transmits the operating pressure from the drive pressure generating mechanism to the pressing cylinder due to heating thermally expands, it is possible to prevent the pressing cylinder from inadvertently protruding toward the valve body. Alternatively, the non-linear motion imparting mechanism can prevent the force received from a sealing material or a friction surface, etc. in the telescopic part of the pressing cylinder from becoming an inhibiting factor and preventing the pressing cylinder from performing a smooth telescopic motion.

[0017] That is, by causing the pressing cylinder to perform a non-linear motion by means of the non-linear motion imparting mechanism, the motion of the pressing cylinder can be adjusted smoothly and without being inhibited, and it becomes possible to shift to a linear motion at a position close to the valve body.

[0018] (3) In the partition valve of the present invention, in the above (2), The non-linear motion imparting mechanism makes the telescopic (extension and retraction) motion by the drive pressure generating mechanism non-linear in the pressing cylinder in a state separated from the valve body (movable valve part) as the non-linear motion. This can be done.

[0019] According to the above configuration, the non-linear motion imparting mechanism enables a linear motion in which the telescopic movement of the pressing cylinder is linear or a non-linear motion in which the telescopic movement of the pressing cylinder is non-linear with respect to the increase and decrease of the operating pressure applied from the drive pressure generating mechanism to the pressing cylinder. As a result, by causing the pressing cylinder to perform a non-linear motion, the motion of the pressing cylinder can be coordinated smoothly and without being inhibited, and it becomes possible to shift the pressing cylinder to a linear motion.

[0020] Here, the linear motion and the non-linear motion mean that, with respect to the increase and decrease of the operating pressure applied from the drive pressure generating mechanism to the pressing cylinder, the telescopic movement of the pressing cylinder is a linear motion that is linear or a non-linear motion that is non-linear. In particular, the non-linear operation means that the pressing cylinder does not expand or contract with respect to the increase and decrease of the operating pressure applied from the drive pressure generating mechanism to the pressing cylinder. Alternatively, the non-linear operation means that the expansion and contraction rate of the pressing cylinder changes at a certain pressure with respect to the change rate of the operating pressure increasing or decreasing.

[0021] In other words, in the linear operation, the expansion and contraction rate of the pressing cylinder does not change with respect to the change rate of the operating pressure. When the change in the operating pressure and the expansion and contraction (stroke) of the pressing cylinder are graphed, the linear operation is represented by a straight line with a constant slope for the relationship between the two values. Also, in the non-linear operation, the expansion and contraction rate changes with respect to the change rate of the operating pressure. When the change in the operating pressure and the expansion and contraction (stroke) of the pressing cylinder are graphed, the linear operation is not a straight line with a constant slope for the relationship between the two values, but the slope changes. The non-linear operation is represented by a vertical line along the vertical axis for the relationship between the two values in the graph. Alternatively, the non-linear operation is represented not only by a straight line but also by a broken line connecting straight lines, such as a point where the relationship between the two values in the graph forms a broken line.

[0022] Note that the non-linear operation referred to here does not include non-linear operations in the pressing cylinder other than those caused by the non-linear operation imparting mechanism, such as the sticking of the piston in the pressing cylinder.

[0023] (4) The partition valve of the present invention is as described in (3) above, The pressing cylinder is provided with a retracting spring that retracts the pressing cylinder with respect to the pressing cylinder that extends due to an increase in the drive pressure (operating pressure) by the drive pressure generating mechanism. The non-linear operation imparting mechanism has an elastic mechanism that retracts the pressing cylinder. This is possible.

[0024] According to the above configuration, the pressing cylinder extends due to an increase in the drive pressure (operating pressure) applied by the drive pressure generating mechanism. The pressing cylinder retracts due to the elastic force of the retracting spring when the drive pressure (operating pressure) decreases. The pressing cylinder can perform a linear operation by the operating pressure and the elastic force of the retracting spring. In contrast, as a configuration separate from the retraction spring, the non-linear operation imparting mechanism has an elastic mechanism capable of applying an elastic force in a direction to retract the pressing cylinder when the driving pressure (operating pressure) drops. The elastic mechanism enables non-linear operation in a pressing cylinder capable of linear operation.

[0025] The elastic mechanism can be a stroke buffer spring connected to the piston of the pressing cylinder and capable of applying an elastic force in the same direction as the retraction spring. The elastic mechanism can be a stroke buffer spring capable of applying an elastic force to the piston from the same side as the retraction spring in the expansion and contraction direction of the piston. The elastic mechanism can be capable of applying an elastic force to the piston from the side opposite to the retraction spring in the expansion and contraction direction of the piston.

[0026] The elastic mechanism can be a stroke buffer spring arranged in series with the retraction spring and capable of applying an elastic force to the piston of the pressing cylinder. Here, the stroke buffer spring arranged in series with the retraction spring can be either connected to or separated from the piston of the pressing cylinder. The elastic mechanism can be a stroke buffer spring arranged in parallel with the retraction spring and capable of applying an elastic force to the piston of the pressing cylinder. Here, the stroke buffer spring arranged in parallel with the retraction spring can exemplify a double spring structure in which the retraction spring and the stroke buffer spring are coaxial.

[0027] The elastic mechanism can be configured to be capable of applying an elastic force to the piston of the pressing cylinder via the working fluid (driving fluid) in the driving pressure generating mechanism. In this case, the elastic mechanism may be configured to be connected to or not connected to the piston of the pressing cylinder. The elastic mechanism can apply an elastic force to the piston from the side opposite to the retraction spring in the expansion and contraction direction of the piston. When the elastic mechanism is not connected to the piston of the pressing cylinder, the elastic mechanism is arranged at a position on the side opposite to the piston with respect to the expansion and contraction direction from the retraction spring. The elastic mechanism may be arranged in the pipe connecting the driving pressure generating mechanism and the pressing cylinder. Note that pressure can be applied to the retraction spring. Pressure cannot be applied to the retraction spring. Pressure can be applied to the stroke buffer spring. Pressure cannot be applied to the stroke buffer spring.

[0028] (5) In the partition valve of the present invention, in the above (4), The elastic mechanism is an elastic body having a spring constant different from that of the retraction spring. It can be.

[0029] According to the above configuration, the pressing cylinder linearly operates by the operating pressure of the drive pressure generating mechanism and the elastic force of the retraction spring. This pressing cylinder can operate non-linearly by the elastic body. Here, the pressing cylinder linearly operates with a predetermined expansion and contraction rate due to the rise and fall of the drive pressure (operating pressure) by the drive pressure generating mechanism and the retraction spring. In addition to this, the elastic body can apply an elastic force so that the pressing cylinder has an expansion and contraction rate different from the expansion and contraction rate of the linear operation by only the retraction spring. The elastic body has an elastic force that can be applied to the piston so that the pressing cylinder has an expansion and contraction rate different from the expansion and contraction rate of the linear operation by only the retraction spring. As a configuration different from the retraction spring, the elastic body can apply an elastic force in a direction to retract the pressing cylinder when the drive pressure (operating pressure) drops.

[0030] The elastic body can be a stroke buffer spring connected to the piston of the pressing cylinder and capable of applying an elastic force in the same direction as the retraction spring. The elastic body can be a stroke buffer spring capable of applying an elastic force to the piston from the same side as the retraction spring in the expansion and contraction direction of the piston. The elastic body can be capable of applying an elastic force to the piston from the side opposite to the retraction spring in the expansion and contraction direction of the piston.

[0031] The elastic body can be a stroke buffer spring arranged in series with the retraction spring and capable of applying an elastic force to the piston of the pressing cylinder. The elastic body can be a stroke buffer spring that is arranged in parallel with the retraction spring and can apply an elastic force to the piston of the pressing cylinder. Here, the stroke buffer spring arranged in parallel with the retraction spring can exemplify a double spring structure in which the retraction spring and the stroke buffer spring are coaxial.

[0032] The elastic body can be configured to be able to apply an elastic force to the piston of the pressing cylinder via the working fluid (driving fluid) in the driving pressure generating mechanism. In this case, the elastic body may be configured to be connected to the piston of the pressing cylinder or may not be connected to the piston of the pressing cylinder. The elastic body can apply an elastic force to the piston from the side opposite to the retraction spring in the expansion and contraction direction of the piston. When the elastic body is not connected to the piston of the pressing cylinder, the elastic body is arranged at a position on the side opposite to the piston with respect to the expansion and contraction direction from the retraction spring. The elastic body may be configured to be arranged in the pipe connecting the driving pressure generating mechanism and the pressing cylinder. The elastic body may be configured as an elastic mechanism that enables the pressing cylinder to expand and contract in a state where the working pressure applied from the driving pressure generating mechanism to the pressing cylinder is adjusted by the elastic force.

[0033] (6) In the partition valve of the present invention, in the above (5), The elastic body is a weak spring having an elastic force smaller than that of the retraction spring and enabling the non-linear operation, and the retraction spring is a strong spring having an elastic force larger than that of the elastic body and enabling the linear operation. This can be the case.

[0034] According to the above configuration, the pressing cylinder linearly operates by the operating pressure of the driving pressure generating mechanism and the elastic force of the retraction spring. This pressing cylinder can perform a non-linear operation by an elastic body having an elastic force smaller than that of the retraction spring. Since the elastic body has an elastic force smaller than that of the retraction spring, it contracts prior to the retraction spring due to an increase in the operating pressure applied from the driving pressure generating mechanism to the pressing cylinder and performs a non-linear operation. After the elastic body contracts to a predetermined length, the retraction spring contracts due to an increase in the operating pressure and performs a linear operation. Since the elastic body has a smaller elastic force than the retraction spring, the retraction spring extends and linearly operates due to the decrease in the operating pressure applied from the drive pressure generation mechanism to the pressing cylinder. After the retraction spring extends to a predetermined length and the linear operation ends, the elastic body extends and non-linearly operates due to the decrease in the operating pressure.

[0035] (7) In the partition valve of the present invention, in the above (6), the weak spring and the strong spring are arranged in series, which is possible.

[0036] According to the above configuration, when the pressing cylinder retracts due to the decrease in the operating pressure, the retraction spring and the weak spring that contract the piston of the pressing cylinder are arranged in series. The weak spring contracts and non-linearly operates earlier than the retraction spring due to the increase in the operating pressure. After the weak spring reaches a predetermined length, the retraction spring contracts and linearly operates due to the increase in the operating pressure. Since the weak spring has a smaller elastic force than the retraction spring, first, the retraction spring extends and linearly operates due to the decrease in the operating pressure. After the retraction spring reaches a predetermined length and the linear operation ends, the weak spring extends and non-linearly operates due to the decrease in the operating pressure.

[0037] The weak spring can be formed as a single spring continuous with the strong spring. The weak spring can be formed with a thinner wire diameter of the spring material than the strong spring. The weak spring can be arranged coaxially with the strong spring as a separate spring. The weak spring and the strong spring may have the same coil diameter or different coil diameters. Note that, as the retraction spring and the weak spring arranged in series, a deformed spring configuration in which the end of the retraction spring is formed in a conical shape or the like and the coil diameter changes is also possible.

[0038] (8) In the partition valve of the present invention, in the above (6), the weak spring and the strong spring are arranged in a double layer at the same axial position, which is possible.

[0039] According to the above configuration, when the pressing cylinder retracts due to a decrease in the operating pressure, a retracting spring and a weak spring that contract the piston of the pressing cylinder are arranged in a double layer. The retracting spring and the weak spring are arranged in parallel. The weak spring expands and contracts at a small operating pressure that does not cause the retracting spring to expand and contract, and performs a non-linear operation. When the weak spring reaches a predetermined length, the retracting spring expands and contracts at a larger operating pressure and performs a linear operation. The weak spring can be formed with a thinner wire diameter of the spring material than the strong spring. The weak spring, as a spring different from the strong spring, can have a coil diameter different from that of the strong spring. The weak spring can be arranged coaxially and concentrically with the strong spring. The weak spring can have a coil length longer than that of the strong spring. The weak spring and the strong spring can be a double spring.

[0040] (9) In the partition valve of the present invention, in the above (3), The non-linear operation imparting mechanism has a start operation non-linear mechanism that enables the non-linear operation at the start of the extension by the drive pressure generating mechanism in the pressing cylinder. It can be.

[0041] According to the above configuration, by having the start operation non-linear mechanism, with respect to the increase and decrease of the operating pressure applied from the drive pressure generating mechanism to the pressing cylinder, the expansion and contraction movement of the pressing cylinder is linear at the position where it abuts against the valve body, and the non-linear operation is enabled, where the expansion and contraction movement of the pressing cylinder is non-linear at the position farthest from the valve body. The start operation non-linear mechanism enables the non-linear operation near the start of the extension operation. That is, the start operation non-linear mechanism enables the non-linear operation near the end of the retraction operation.

[0042] When the starting operation non-linear mechanism separates the pressing cylinder from the valve body, a non-linear operation becomes possible at the rotatable position of the valve body. As a result, even when the working fluid (hydraulic oil) that expands and contracts the pressing cylinder thermally expands when the partition valve is heated and its temperature rises, it is possible to prevent the pressing cylinder from inadvertently protruding toward the valve body. Alternatively, the starting operation non-linear mechanism can prevent the force received from a sealing material or a friction surface or the like in the expanding and contracting portion of the pressing cylinder from making it impossible for the pressing cylinder to perform a smooth expanding and contracting operation due to an inhibiting factor.

[0043] The starting operation non-linear mechanism can be a stroke buffer spring connected to the piston of the pressing cylinder and capable of applying an elastic force in the same direction as the pulling spring. The starting operation non-linear mechanism can be a stroke buffer spring capable of applying an elastic force to the piston from the same side as the pulling spring in the expanding and contracting direction of the piston. The starting operation non-linear mechanism can be capable of applying an elastic force to the piston from the opposite side to the pulling spring in the expanding and contracting direction of the piston.

[0044] The starting operation non-linear mechanism can be a stroke buffer spring arranged in series with the pulling spring and capable of applying an elastic force to the piston of the pressing cylinder. The stroke buffer spring can have an elastic force smaller than that of the pulling spring. The starting operation non-linear mechanism can be a stroke buffer spring arranged in parallel with the pulling spring and capable of applying an elastic force to the piston of the pressing cylinder. The stroke buffer spring can have an elastic force smaller than that of the pulling spring.

[0045] The starting operation non-linear mechanism can be configured to be capable of applying an elastic force to the piston of the pressing cylinder via the working fluid (driving fluid) in the driving pressure generating mechanism. In this case, the starting operation non-linear mechanism may be configured to be connected to the piston of the pressing cylinder or may be configured not to be connected to the piston of the pressing cylinder. This starting operation non-linear mechanism can apply an elastic force to the piston from the opposite side to the pulling spring in the expanding and contracting direction of the piston. When the start operation non-linear mechanism is not connected to the piston of the pressing cylinder, the start operation non-linear mechanism is arranged at a position on the opposite side of the piston with respect to the expansion and contraction direction from the retraction spring. The start operation non-linear mechanism may be arranged in a pipe connecting the drive pressure generation mechanism and the pressing cylinder. The start operation non-linear mechanism may be connected to a pipe connecting the drive pressure generation mechanism and the pressing cylinder.

[0046] (10) In the partition valve of the present invention, in the above (9), The start operation non-linear mechanism is either an elastic mechanism arranged in a hydraulic circuit (inside) formed by connecting the drive pressure generation mechanism and the pressing cylinder, an elastic pressure adjustment mechanism connected to the hydraulic circuit, or an elastic fluid connected to the hydraulic circuit. It can be.

[0047] The start operation non-linear mechanism of the present invention can have an elastic mechanism arranged in a hydraulic circuit formed by connecting the drive pressure generation mechanism and the pressing cylinder. According to the above configuration, the start operation non-linear mechanism can be configured to be able to apply an elastic force to the piston of the pressing cylinder via the working fluid (drive fluid) in the drive pressure generation mechanism. In this case, the elastic mechanism may be configured to be connected to the piston of the pressing cylinder or not connected to the piston of the pressing cylinder. The elastic mechanism can adjust the working pressure acting on the piston from the opposite side of the retraction spring in the expansion and contraction direction of the piston.

[0048] When the elastic mechanism is not connected to the piston of the pressing cylinder, the elastic mechanism is arranged at a position on the opposite side of the piston with respect to the expansion and contraction direction from the retraction spring. This elastic mechanism can be a telescopic piston arranged in a pipe connecting the drive pressure generation mechanism and the pressing cylinder. The telescopic piston can expand and contract in the axial direction of the pipe inside the pipe, and the expansion and contraction of the telescopic piston can be linearly elastically deformed according to the applied working pressure. The telescopic piston can be configured to be freely movable along the axial direction of the pipe inside the pipe.

[0049] Specifically, the telescopic piston can be composed of two piston members spaced apart inside the pipe and an elastic part disposed between these piston members. Both of the two piston members can be configured to be freely movable along the pipe inside the pipe. The telescopic piston has an elastic part inside the pipe that can change the distance between the two piston members in response to the rise and fall of the operating pressure. The elastic part can be a member such as a spring that connects between the two piston members. When the elastic part is a member such as a spring, it only needs to be elastically deformable to the same extent as a weak spring with respect to the operating pressure.

[0050] The elastic part can be a compressible fluid or the like filled between the two piston members. The compressible fluid can be, for example, air. The compressible fluid can be air below atmospheric pressure. The compressible fluid can be air at about atmospheric pressure. The telescopic piston may be arranged so that an elastic force can be applied to the piston from the opposite side of the pulling spring in the telescopic direction of the piston.

[0051] The starting operation non-linear mechanism of the present invention can have an elastic pressure adjustment mechanism connected to a hydraulic circuit configured by connecting the drive pressure generation mechanism and the pressing cylinder.

[0052] According to the above configuration, the starting operation non-linear mechanism is a configuration that can adjust the operating pressure of the working fluid (drive fluid) by the drive pressure generation mechanism to make the operating pressure applied to the piston of the pressing cylinder in a non-linear operation state. The starting operation non-linear mechanism can be a separate hydraulic circuit connected to the drive pressure generation mechanism. The separate hydraulic circuit makes the telescopic movement of the pressing cylinder non-linear at the position farthest from the valve body with respect to the linear movement in which the telescopic movement of the pressing cylinder is linear at the position where it abuts against the valve body with respect to the rise and fall of the operating pressure applied from the drive pressure generation mechanism to the pressing cylinder, and sets the operating pressure applied to the piston of the pressing cylinder within a predetermined range. The separate hydraulic circuit can be an accumulator.

[0053] By means of a separate hydraulic circuit, the pressing cylinder is separated from the valve body, and nonlinear operation is possible at a position where the valve body can rotate. When the partition valve is heated and its temperature rises, when the working fluid (hydraulic oil) that causes the pressing cylinder to expand and contract thermally expands, it is possible to prevent the pressing cylinder from inadvertently protruding toward the valve body. Alternatively, by means of a separate hydraulic circuit, it is possible to prevent the force received from the sealing material or the friction surface in the portion where the pressing cylinder expands and contracts from preventing the pressing cylinder from performing a smooth expansion and contraction operation due to an inhibiting factor.

[0054] The start operation nonlinear mechanism of the present invention can have an elastic fluid disposed in a hydraulic circuit configured by connecting the drive pressure generation mechanism and the pressing cylinder.

[0055] According to the above configuration, the elastic fluid applies an elastic force to the piston of the pressing cylinder via the working fluid (drive fluid) in the drive pressure generation mechanism to enable nonlinear operation. The elastic fluid is configured to be able to adjust the operating pressure applied to the piston of the pressing cylinder. In this case, the elastic fluid may be located at a position in contact with the piston of the pressing cylinder in the hydraulic circuit (pipe), or may be at a position not in contact with the piston of the pressing cylinder. The elastic fluid can apply an elastic force to the piston from the side opposite to the pulling spring in the expansion and contraction direction of the piston.

[0056] When the elastic fluid is not in contact with the piston of the pressing cylinder in the hydraulic circuit (pipe), the elastic fluid can be air bubbles disposed in the pipe connecting the drive pressure generation mechanism and the pressing cylinder. The elastic fluid can change its volume in the pipe, and can be configured such that the volume of the elastic fluid changes linearly according to the operating pressure. Also, since the working fluid is an incompressible fluid and has pressure isotropy, the elastic fluid can be set to an operating pressure that enables nonlinear operation simply by being disposed in the pipe.

[0057] The elastic fluid can move freely along the pipe inside the pipe. The elastic fluid can be compressed to an invisible extent according to the internal pressure of the pipe. The elastic fluid can be decompressed to an extent close to vacuum according to the internal pressure of the pipe. The elastic fluid can be insoluble in the working fluid inside the pipe within the assumed pressure range.

[0058] Specifically, the elastic fluid may be disposed inside the pressing cylinder. The elastic fluid may be disposed inside the drive pressure generating mechanism. In both cases, it is configured to be able to move freely inside the hydraulic oil circuit where the operating pressure is applied. The elastic fluid can perform the same expansion and contraction operation (elastic deformation) as the above-described expansion and contraction piston. The elastic fluid can bring about the same behavior of the operating pressure as the above-described expansion and contraction piston.

[0059] The elastic fluid can be a compressible fluid filled in the hydraulic circuit. The compressible fluid can be, for example, air. The compressible fluid can be air below atmospheric pressure. The compressible fluid can be air at about atmospheric pressure. The compressible fluid can be air at a pressure higher than atmospheric pressure.

[0060] (11) In the above (9), the partition valve of the present invention The start operation non-linear mechanism has a vacuum region disposed in a hydraulic circuit configured by connecting the drive pressure generating mechanism and the pressing cylinder. It can be.

[0061] According to the above configuration, the vacuum region is configured to adjust the operating pressure applied to the piston of the pressing cylinder through the working fluid (drive fluid) in the drive pressure generating mechanism to enable non-linear operation. In this case, when retracting the pressing cylinder, after the piston of the pressing cylinder reaches the stroke end due to the decrease in the operating pressure generated by the drive pressure generating mechanism, further reducing the pressure of the drive pressure generating mechanism forms a vacuum region in the working fluid. Here, the vacuum region may be formed at a position in the hydraulic circuit (pipe) that contacts the piston of the pressing cylinder, or may be formed at a position that does not contact the piston of the pressing cylinder.

[0062] The vacuum region can adjust the operating pressure applied to the piston from the side opposite to the pulling spring in the expansion and contraction direction of the piston. Here, the formation of the vacuum region is possible by moving the piston in the main cylinder of the drive pressure generating mechanism further in the pressure reduction direction to a negative pressure from the state where the piston of the pressing cylinder has reached the stroke end. Note that the stroke end refers to the limit position in the retraction direction pressed by the pulling spring within the moving range where the piston of the pressing cylinder expands and contracts.

[0063] When extending the pressing cylinder from the state where the vacuum region is formed, the operating pressure generated by the drive pressure generating mechanism is increased. As the operating pressure increases, first, the vacuum region shrinks and disappears. When the operating pressure increases, until the vacuum region disappears, the piston of the pressing cylinder does not move from the stroke end. Further, until the operating pressure generated by the drive pressure generating mechanism is increased beyond the value that overcomes the elastic force of the pulling spring, the piston of the pressing cylinder does not move from the stroke end. Furthermore, when the operating pressure generated by the drive pressure generating mechanism is increased beyond the value that overcomes the elastic force of the pulling spring, since the vacuum region has disappeared in the pipe, the piston of the pressing cylinder moves linearly.

[0064] The pressing cylinder that moves linearly by the operating pressure of the drive pressure generating mechanism and the pulling spring can perform non-linear movement by forming a vacuum region. Since the vacuum region is formed when the operating pressure starts to rise, the volume inside the pipe shrinks prior to the retraction spring due to the increase in the operating pressure of the drive pressure generation mechanism. After the vacuum region disappears, the retraction spring will contract and linearly operate due to the increase in the operating pressure of the dynamic pressure generation mechanism. Since the vacuum region is formed after the retraction spring has fully extended to its spring length, the retraction spring extends first due to the decrease in the operating pressure by the drive pressure generation mechanism. After the length of the retraction spring reaches its maximum and the linear operation ends, the vacuum region will be formed later due to the decrease in the operating pressure in the dynamic pressure generation mechanism.

[0065] By forming the vacuum region, the pressing cylinder is separated from the valve body, enabling non-linear operation at a rotatable position of the valve body. As a result, even when the working fluid (hydraulic oil), which transmits the operating pressure from the drive pressure generation mechanism to the pressing cylinder to cause the pressing cylinder to expand and contract, thermally expands when the partition valve is heated and its temperature rises, it can prevent the pressing cylinder from inadvertently protruding toward the valve body. Alternatively, by forming the vacuum region, it is possible to prevent the force received from the sealing material or friction surface, etc. in the expanding and contracting portion of the pressing cylinder from becoming an inhibiting factor and preventing the pressing cylinder from performing smooth expansion and contraction operations.

[0066] Note that the decrease in the operating pressure for forming the vacuum region may be performed by the drive pressure generation mechanism, or it can also be performed by a pressure control mechanism connected to a pipe or the like, separate from the drive pressure generation mechanism that linearly operates the pressing cylinder.

[0067] The partition valve of the present invention is any one of the above (1) to (10), A plurality of the pressing cylinders are provided in the circumferential direction of the valve body (movable valve frame portion), The non-linear operation imparting mechanism aligns the linear operations of the plurality of pressing cylinders, which can be achieved.

[0068] According to the above configuration, it is possible to simultaneously cause non-linear operation for a plurality of the pressing cylinders by means of a non-linear operation imparting mechanism. When all the pressing cylinders are separated from the valve body, non-linear operation is possible at a position where the valve body can rotate. As a result, when the partition valve is heated and its temperature rises, when the working fluid (hydraulic oil) that transmits the operating pressure for causing the pressing cylinders to expand and contract from the drive pressure generating mechanism to the pressing cylinders thermally expands, it is possible to prevent all the pressing cylinders from inadvertently protruding toward the valve body. Alternatively, by means of the non-linear operation imparting mechanism, it is possible to prevent the force received from a sealing material or a friction surface or the like in a portion where the pressing cylinder expands and contracts from becoming an inhibiting factor and preventing all the pressing cylinders from performing smooth expansion and contraction operations.

[0069] Here, consider the case where there is no non-linear operation imparting mechanism. At this time, in a plurality of pressing cylinders, there may be cases where the degree of inhibition of the expansion and contraction operation is different, such as different sticking states or different frictional resistance forces. In this case, when the drive pressure generating mechanism raises the operating pressure, due to the difference in the degree of inhibition, only the one pressing cylinder that is most easily movable starts to move. Then, the working fluid does not flow into the other pressing cylinders that are not moving. For this reason, due to the increase in the operating pressure, only the pressing cylinder that moved first will move even more. If this state continues, the total amount of the working fluid moved by the drive pressure generating mechanism to extend a plurality of pressing cylinders will only move the pressing cylinder that moved first. Therefore, only the pressing cylinder that moved first will move further. That is, due to the difference in the inhibiting factors, only one pressing cylinder will protrude. Similarly, even when the operating pressure is decreased, the working fluid flows out from the moving pressing cylinder, but the state where only one pressing cylinder moves and protrudes does not change.

[0070] On the other hand, by providing a non-linear motion imparting mechanism, non-linear motion becomes possible for all the pressing cylinders, so that the influence of the inhibiting factors can be eliminated for all the pressing cylinders. By providing a non-linear motion imparting mechanism, it is possible to prevent all the pressing cylinders from being unable to perform smooth expansion and contraction motions. By providing a non-linear motion imparting mechanism, it becomes possible for all the pressing cylinders to perform smooth expansion and contraction motions simultaneously. By providing a non-linear motion imparting mechanism, it is possible to align the protruding amounts of the plurality of pressing cylinders and prevent only one from protruding greatly. By providing a non-linear motion imparting mechanism, it becomes possible to suppress the influence of the volume expansion of the working fluid due to the temperature rise of the partition valve.

Advantages of the Invention

[0071] According to the present invention, it is possible to achieve the effect of providing a partition valve in which the pressing cylinder does not affect the rotational motion of the valve body regardless of the thermal expansion of the working fluid (hydraulic oil) or the presence or absence of factors inhibiting the expansion and contraction motion of the pressing cylinder.

Brief Description of the Drawings

[0072]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Embodiments for Carrying Out the Invention

[0073] Hereinafter, a first embodiment of the partition valve according to the present invention will be described with reference to the drawings. In addition, in each of the drawings used in the following description, the dimensions and ratios of each component are appropriately different from the actual ones in order to make each component large enough to be recognized on the drawing. The technical scope of the present invention is not limited to the embodiments described below, and various modifications can be made without departing from the spirit of the present invention.

[0074] FIG. 1 is a schematic cross-sectional view showing the partition valve in the present embodiment. FIG. 2 is a perspective view showing the partition valve in the present embodiment. In the figure, reference numeral 100 is the partition valve. The partition valve 100 according to this embodiment is a pendulum type slide valve. As shown in FIG. 1, the partition valve 100 according to this embodiment includes a valve box 10, a hollow portion 11, a valve body 5, a rotating shaft 20, a rotation driving unit 21, a pressing cylinder 70, a hydraulic driving means (non-compressible fluid driving unit) 700, and a non-linear motion imparting mechanism 770.

[0075] The valve box 10 has a hollow portion 11, a first opening 12a, and a second opening 12b. The first opening 12a and the second opening 12b are provided so as to sandwich the hollow portion 11 and communicate with each other to form a flow path H. The flow path H is set to extend from the second opening 12b toward the first opening 12a. The valve body 5 is disposed in the hollow portion 11 of the valve box 10. The valve body 5 can open and close the flow path H.

[0076] The rotating shaft 20 has an axis. The axis of the rotating shaft 20 extends along the direction of the flow path H. The rotating shaft 20 supports the valve body 5 so as to be rotatable around the axis with respect to the valve box 10. The rotating shaft 20 supports the valve body 5 so as to be rotatable between a retracted position (valve open position) and a valve opening shielding position (sliding preparation position) in the hollow portion 11. When viewed in the direction of the flow path H, in the retracted position (valve open position), the valve body 5 does not overlap the first opening 12a and the second opening 12b. When viewed in the direction of the flow path H, in the valve opening shielding position (sliding preparation position), the valve body 5 overlaps the first opening 12a and the second opening 12b.

[0077] In the retracted position, the valve body 5 retracts from the first opening 12a and is in an open state in which the flow path H can communicate. In the valve opening shielding position, the valve body 5 is in a closable state of shielding the first opening 12a.

[0078] In the partition valve 100, the valve body 5 operates in two stages between a retracted position (valve open position) and a valve closed position. The rotating shaft 20 functions as a position switching portion of the valve body 5. The rotation drive unit 21 rotationally drives the rotating shaft 20. Due to the rotation of the rotating shaft 20, the valve body 5 can reciprocally rotate between the retracted position and the valve opening shielding position.

[0079] The valve body 5 is composed of a neutral valve portion 30, a valve frame portion 63, and a movable valve portion (movable valve frame portion) 54. The neutral valve portion 30 is connected to the rotating shaft 20. The neutral valve portion 30 is fixed to the rotating shaft 20. The neutral valve portion 30 is located at the central position of the hollow portion 11 in the direction along the flow path H (or in the plan view in the schematic cross-sectional view of FIG. 1). The neutral valve portion 30 rotates integrally with the rotating shaft 20 around the axis. The neutral valve portion 30 maintains the central position of the hollow portion 11 in the direction along the flow path H at all positions among the retracted position, the valve opening shielding position, and the valve closing position.

[0080] The valve frame portion 63 is connected to the neutral valve portion 30. The valve frame portion 63 is located around the movable valve portion 54. The valve frame portion 63 is located at the central position of the hollow portion 11 in the direction along the flow path H. The valve frame portion 63 is fixed to the neutral valve portion 30. The valve frame portion 63 is located near the center of the hollow portion 11 in the direction along the flow path H. The valve frame portion 63 maintains the position near the center of the hollow portion 11 at all positions among the retracted position, the valve opening shielding position, and the valve closing position.

[0081] The movable valve portion (movable valve frame portion) 54 is connected to the valve frame portion 63. The movable valve portion 54 can change its position in the flow path H direction with respect to the neutral valve portion 30 and the valve frame portion 63 at the valve opening shielding position and the valve closing position. The movable valve portion 54 maintains the central position in the flow path H direction similar to the hollow portion 11 at the retracted position. The movable valve portion 54 maintains the central position in the flow path H direction similar to the hollow portion 11 at the valve opening shielding position. The movable valve portion 54 maintains the central position in the flow path H direction similar to the hollow portion 11 between the retracted position and the valve opening shielding position.

[0082] The movable valve part 54 is slidable in the direction of the flow path H with respect to the valve frame part 63. The movable valve part 54 is slidable in the direction of the flow path H with respect to the valve frame part 63 between the valve opening shielding position and the valve closing position. The movable valve part 54 can be in close contact with the inner surface 10b of the valve box 10 located around the first opening 12a at the valve closing position. A valve plate seal packing may be provided on either the movable valve part 54 or the inner surface 10b of the valve box 10. The valve plate seal packing can seal the space between the inner surface 10b of the valve box 10 located around the first opening 12a and the movable valve part 54.

[0083] A plurality of pressing cylinders 70 are embedded in the valve box 10. The pressing cylinders 70 are arranged in a plurality along the circumferential direction of the movable valve part 54. The pressing cylinder 70 can press the movable valve part 54 at the valve opening shielding position in the direction facing the sealing surface. The pressing cylinder 70 is an expansion and contraction cylinder capable of pressing the movable valve part 54 to the valve closing position. The pressing cylinder 70 is a biasing part that biases the movable valve part 54 when extended.

[0084] The pressing cylinder 70 can retract in a direction to weaken the pressing force with respect to the movable valve part 54 at the valve closing position. The pressing cylinder 70 can retract until the movable valve part 54 moves from the valve closing position to the valve opening shielding position. The pressing cylinder 70 can retract in a direction away from the movable valve part 54 at the valve opening shielding position. The pressing cylinder 70 can retract to a position further away from the movable valve part 54 at the valve opening shielding position. The pressing cylinder 70 can retract to a level flush with the inner surface 10b of the valve box 10. The pressing cylinder 70 can retract to an extent that the valve body 5 can rotate and separate between the retracted position and the valve opening shielding position.

[0085] The pressing cylinder 70 can bias the movable valve portion 54 toward the first opening 12a in the direction of the flow path H at the valve opening shielding position, between the valve opening shielding position and the valve closing position, and at the valve closing position. At the valve closing position, the pressing cylinder 70 presses the movable valve portion 54 so that the valve plate sealing packing can be in close contact with the inner surface 10b of the valve box 10 and the movable valve portion 54. The pressing cylinder 70 moves by pressing the periphery of the movable valve portion 54 at the valve opening shielding position in the direction of the flow path H. The flow path H is closed by the moved movable valve portion 54.

[0086] The plurality of pressing cylinders 70 can expand and contract along the flow path H. The expansion and contraction axes of the plurality of pressing cylinders 70 are parallel to each other. The expansion and contraction ranges of the plurality of pressing cylinders 70 in the direction along the flow path H are all the same range. The plurality of pressing cylinders 70 can press the movable valve portion 54 simultaneously. The plurality of pressing cylinders 70 can be separated from the movable valve portion 54 simultaneously. The plurality of pressing cylinders 70 can perform the same expansion and contraction operation uniformly.

[0087] The plurality of pressing cylinders 70 are all connected to a hydraulic driving means (incompressible fluid driving unit) 700. The pressing cylinder 70 can be driven to expand and contract according to the operating pressure applied by the working fluid. The pressing cylinder 70 is applied with the operating pressure by the hydraulic driving means 700.

[0088] The hydraulic driving means (incompressible fluid driving unit) 700 is connected to the pressing cylinder 70. The hydraulic driving means 700 supplies and discharges an incompressible fluid (hydraulic oil) to and from the pressing cylinder 70. The hydraulic driving means 700 can apply an operating pressure by supplying and discharging hydraulic oil to and from the pressing cylinder 70. The hydraulic driving means 700 has a driving pressure generation mechanism 701 to be described later. Typically, the driving pressure generation mechanism 701 is configured as a volume transfer type. The hydraulic driving means 700 can apply an operating pressure to the plurality of pressing cylinders 70 simultaneously. The hydraulic driving means 700 can drive the plurality of biasing portions (pressing cylinders) 70 simultaneously.

[0089] The partition valve 100 according to an embodiment of the present invention has a rotating shaft 20 rotated by a rotation driving unit 21 in a direction intersecting the direction of the flow path H. As the rotating shaft 20 rotates, a neutral valve unit 30 fixed to the rotating shaft 20 also rotates. At the same time, a movable valve unit 54 connected to the neutral valve unit 30 also rotates integrally with the neutral valve unit 30. During this rotation, the movable valve unit 54 does not slide in the thickness direction which is the direction of the flow path H. By the rotation of the valve body 5, the movable valve unit 54 moves in a pendulum motion between a retracted position (valve open position) which is a hollow portion 11 where the flow path H is not provided, and a valve opening shielding position (sliding preparation position) which is a position corresponding to the first opening 12a and shields the flow path H.

[0090] When the valve body 5 is in the valve opening shielding position, the hydraulic driving means 700 is operable. When the valve body 5 is not in the valve opening shielding position including the retracted position, the hydraulic driving means 700 does not operate.

[0091] The partition valve 100 according to an embodiment of the present invention can be expanded and contracted by a plurality of pressing cylinders 70 driven by a hydraulic driving means 700 toward the movable valve unit 54 in the valve opening shielding position. When the pressing cylinder 70 is not in the extended operation, the partition valve 100 maintains the movable valve unit 54 at the central position of the hollow portion 11 inside the valve box 10. When a plurality of pressing cylinders 70 come into contact with the movable valve unit 54 in the valve opening shielding position at the valve opening shielding position and the valve closing position, the position of the movable valve unit 54 in the flow path H direction with respect to the valve frame portion 63 can be changed.

[0092] Note that between the valve frame portion 63 and the movable valve unit 54, a biasing portion (neutral biasing portion) may be provided to bias the movable valve unit 54 toward the central position of the hollow portion 11 in the flow path H direction with respect to the valve frame portion 63. By the pressing cylinder 70 and the biasing portion (neutral biasing portion) of the valve frame portion 63, the thickness dimension in the flow path H direction between the valve frame portion 63 and the movable valve unit 54 can be adjusted.

[0093] FIG. 3 is a schematic cross-sectional view showing a pressing cylinder, a drive pressure generation mechanism, and a non-linear operation imparting mechanism in the partition valve of the present embodiment. A plurality of pressing cylinders (biasing portions) 70 are all built in the valve box 10. In FIG. 3, for the sake of convenience, three pressing cylinders 70 are shown, but the number of arranged pressing cylinders 70 is not limited to this. The plurality of pressing cylinders 70 all constitute a hydraulic driving means 700.

[0094] The hydraulic driving means 700 includes a plurality of pressing cylinders 70, a drive pressure generation mechanism 701, a pipe (hydraulic circuit) 702, and a non-linear operation imparting mechanism 770. The hydraulic driving means 700 is filled with a working fluid. The working fluid is an incompressible fluid such as hydraulic oil. The plurality of pressing cylinders 70 are filled with the working fluid. The plurality of pressing cylinders 70 are all connected to the drive pressure generation mechanism 701 via a pipe (hydraulic circuit) 702. The drive pressure generation mechanism 701 is the main cylinder of the hydraulic driving means 700.

[0095] The drive pressure generation mechanism 701 generates an operating pressure. The operating pressure generated by the drive pressure generation mechanism 701 is applied to the plurality of pressing cylinders 70 via a pipe (hydraulic circuit) 702. When the drive pressure generation mechanism 701 generates an operating pressure, hydraulic oil is supplied to the plurality of pressing cylinders 70. The plurality of pressing cylinders 70 all have the same configuration.

[0096] Hereinafter, one pressing cylinder 70 will be described.

[0097] The pressing cylinder 70 includes a hydraulic driving part (fixed part) 71, a movable part (piston) 72, a retracting spring (pressing spring) 73 which is a biasing member, a buffer part 75, and a seal part 76.

[0098] The fixed part (cylinder) 71 is fixed to the valve box 10. The hydraulic drive part 71 is built into the valve box 10. The hydraulic drive part 71 is a cylinder. The hydraulic drive part 71 houses the movable part 72. The hydraulic drive part 71 can drive the movable part 72 to expand and contract by the operating pressure (hydraulic pressure) supplied from the drive pressure generating mechanism 701.

[0099] The movable part 72 can expand and contract in the direction along the flow path H from the fixed part 71. The movable part 72 has a piston housed in the fixed part 71. The movable part 72 can expand and contract in the direction facing the movable valve part 54 from the fixed part 71 by the operating pressure. The movable part 72 has a contact part (tip part) 72a that can contact the movable valve part 54. The contact part 72a can expand and contract integrally with the piston. The contact part 72a can project in the direction along the flow path H from the fixed part 71. The contact part 72a can project from the fixed part 71 toward the movable valve part 54 in the valve opening shielding position and the valve closing position.

[0100] The retraction spring 73 is a biasing member that can bias the movable part 72 in the retracting direction. The retraction spring 73 can bias the movable part 72 in the direction away from the movable valve part 54. The retraction spring 73 can be composed of a cylindrical spring. The retraction spring 73 is housed in the fixed part 71 which is a cylinder. The retraction spring 73 biases the piston of the movable part 72 in the direction in which the tip part 72a retracts.

[0101] The buffer part 75 is a buffer space. The buffer part 75 is a space for buffering before leaking to the outside (vacuum chamber) on the vacuum side when the hydraulic pressure leaks from the pressing cylinder 70. The seal part 76 seals so that the working oil does not leak to the outside (vacuum chamber) on the vacuum side even when the movable part 72 expands and contracts.

[0102] The pipe (hydraulic circuit) 702 connects the plurality of pressing cylinders 70 and the drive pressure generating mechanism 701. The pipe 702 is filled with the working fluid (working oil). The pipe 702 supplies and discharges the working oil between the drive pressure generating mechanism 701 and the pressing cylinder 70. The pipe 702 supplies the operating pressure from the drive pressure generating mechanism 701 to the pressing cylinder 70.

[0103] The pressing cylinder 70 extends the tip 72a by the operating pressure applied from the drive pressure generating mechanism 701. The tip 72a of the extended movable part 72 abuts against the movable valve part 54 located at the valve opening shielding position, and moves the movable valve part 54 toward the first opening 12a. The movable part 72 can extend until the movable valve part 54 abuts against the inner surface 10b. The movable part 72 can extend to such an extent that it can press the movable valve part 54 against the inner surface 10b to seal. The movable part 72 can extend to such an extent that it can press the movable valve part 54 to the valve closing position. When the operating pressure from the drive pressure generating mechanism 701 is reduced (or increased), the pressing cylinder 70 causes the movable part 72 to retract (or extend) by the pulling spring 73. The tip 72a of the retracted movable part 72 separates from the movable valve part 54 and is stored inside the valve box 10.

[0104] Consider the valve closing operation of the partition valve 100. Assume the storage state where the tip 72a of the pressing cylinder 70 is retracted as the initial state. From this initial state, hydraulic oil is supplied from the drive pressure generating mechanism 701 to the pressing cylinder 70 via the pipe 702. The operating pressure of the pressing cylinder 70 increases. Due to the increase in the operating pressure, the movable part 72 extends, overcoming the biasing force of the pulling spring 73. Then, the pressing cylinder 70 has the extended tip 72a contact the movable valve part 54. Further, the pressing cylinder 70 presses the movable valve part 54 with the extended tip 72a. When the tip 72a presses, the movable valve part 54 moves toward the first opening 12a. The further moved movable valve part 54 contacts the inner surface 10b of the valve box 10. Further, the pressing cylinder 70 presses the movable valve part 54 against the inner surface 10b of the valve box 10 to a closed state, closing the flow path H (valve closing operation).

[0105] Consider the valve opening operation of the partition valve 100. From the extended valve-closed state of the movable part 72, the operating pressure supplied from the drive pressure generating mechanism 701 via the pipe 702 is decreased. Due to the decrease in the operating pressure, the hydraulic oil moves from the pressing cylinder 70 to the drive pressure generating mechanism 701. Due to the decrease in the operating pressure, the pressing cylinder 70 causes the movable part 72 to retract by the biasing force of the retraction spring 73. At the same time, when the tip 72a retracts, the biasing part (neutral biasing part) separates the movable valve part 54 from the first opening 12a. Thereby, the movable valve part 54 separates from the inner surface 10a of the valve box 10. Further, when the movable part 72 retracts, the tip 72a retracts. At the same time, the movable valve part 54 retreats to the central position of the hollow part 11 in the flow path H direction. By setting the movable valve part 54 to the central position of the hollow part 11 in the flow path H direction, the flow path H is opened (release operation).

[0106] Furthermore, when the movable part 72 further retracts, the tip 72a separates from the movable valve part 54. The tip 72a is housed in the fixed part 71. The housing of the tip 72a is included in the release operation.

[0107] In this way, by the mechanical contact operation of bringing the movable valve part 54 into contact with the inner surface 10a of the valve box 10 by the pressing cylinder (biasing part) 70 and the mechanical separation operation of separating the movable valve part 54 from the inner surface of the valve box 10 by the biasing part (neutral biasing part), the valve closing operation and the release operation of the valve body 5 become possible.

[0108] After this release operation, when the rotary shaft 20 is rotated by the rotary drive part 21 (retreat operation), the neutral valve part 30 and the movable valve part 54 also rotate in the same direction according to this rotation. The partition valve 100 performs a valve opening operation in which the movable valve part 54 retreats from the valve opening shielding position (sliding preparation position) to the retreat position (valve opening position) and becomes a valve open state by this release operation and retreat operation.

[0109] The driving of the pressing cylinder 70 is performed by the operating pressure of the operating fluid (pressurized incompressible fluid) supplied from the driving pressure generating mechanism 701 via the pipe 702. The pressing cylinder 70 can linearly operate by the operating pressure supplied from the driving pressure generating mechanism 701 and the biasing force of the retracting spring 73. In the vicinity where the tip 72a contacts the movable valve portion 54, the pressing cylinder 70 linearly operates.

[0110] When the operating pressure supplied from the driving pressure generating mechanism 701 exceeds the biasing force of the retracting spring 73, the pressing cylinder 70 overcomes the biasing force of the retracting spring 73 and the movable part 72 extends, moving toward the position where the operating pressure and the biasing force oppose each other. When the operating pressure supplied from the driving pressure generating mechanism 701 is lower than the biasing force of the retracting spring 73, the pressing cylinder 70 retracts the movable part 72 by the biasing force of the retracting spring 73 and moves toward the position where the operating pressure and the biasing force oppose each other. The movable part 72 can linearly expand and contract with respect to the resultant force of the operating pressure supplied from the driving pressure generating mechanism 701 and the biasing force of the retracting spring 73.

[0111] The non-linear motion imparting mechanism 770 can make the motion of the pressing cylinder 70 non-linear. The non-linear motion imparting mechanism 770 makes the motion of the pressing cylinder 70 non-linear at the position where the tip 72a is separated from the movable valve portion 54. The non-linear motion imparting mechanism 770 in the present embodiment is a stroke buffer spring (starting motion non-linear mechanism) 74 connected in parallel to the retracting spring 73. The stroke buffer spring 74 biases the movable part 72 independently of the retracting spring 73.

[0112] The apparent spring constant of the stroke buffer spring 74 and the retracting spring 73 in the linear region Lnr described later is larger than the apparent spring constant in the region Sbr described later. There are no restrictions on the individual spring constants of the stroke buffer spring 74 and the retracting spring 73. In addition, when the stroke buffer spring 74 has a spring constant K2, if the spring constant of the retracting spring 73 is K0, K0≧K2 It can be. That is, the spring constant of the stroke buffer spring 74 can be smaller than the spring constant of the retraction spring 73. The stroke buffer spring 74 can have a smaller elastic force than the retraction spring 73. When the retraction spring 73 is a strong spring, the stroke buffer spring 74 is a weak spring.

[0113] The stroke buffer spring 74 is arranged coaxially with the retraction spring 73. The stroke buffer spring 74 applies an elastic force to the movable part 72 which is a piston from the same side as the retraction spring 73. The stroke buffer spring 74 is arranged on the same side as the retraction spring 73 in the expansion and contraction direction of the movable part 72 with respect to the movable part 72 which is a piston.

[0114] The stroke buffer spring 74 can also be formed as a wire rod different from the retraction spring 73. The stroke buffer spring 74 has a different coil diameter from the retraction spring 73. The stroke buffer spring 74 has a smaller coil diameter than the retraction spring 73. The stroke buffer spring 74 can also be formed with a smaller wire diameter than the retraction spring 73. The stroke buffer spring 74 may have a different coil length from the retraction spring 73 in the free length state. It is preferable that the stroke buffer spring 74 has a longer coil length than the retraction spring 73. The stroke buffer spring 74 is not connected to the retraction spring 73. The stroke buffer spring 74 and the retraction spring 73 have a double spring structure when viewed from the pressing cylinder 70.

[0115] At the most retracted position of the movable part 72, the piston-side end of the retraction spring 73 is locked to the cylinder 71 by a slidable locking part 73r so as to be separated from the piston. The locking part 73r is slidable together with the piston when the movable part 72 comes into contact. Also, when the movable part 72 moves away, the locking part 73r locks the piston-side end of the retraction spring 73 at a position where the retraction spring 73 does not extend any further. In this typical locking position, that is, the position where it does not extend any further, the length of the retraction spring 73 is set to be equal to or less than the free length of the retraction spring 73. By doing so, at the position where the movable part 72 comes into contact with the locking part 73r, it becomes possible to apply an operating pressure P corresponding to the applied pressure generated due to the retraction spring 73 being less than the free length to the piston. Among the expansion and contraction strokes of the movable part 72 in the pressing cylinder 70 described later, at the position where the most distal end 72a is retracted, the retraction spring 73 is not in contact with the piston. Among the expansion and contraction strokes of the movable part 72 in the pressing cylinder 70, at the position where the most distal end 72a is retracted, the stroke buffer spring 74 is in contact with the piston.

[0116] Hereinafter, the operation of the pressing cylinder 70 by the non-linear operation imparting mechanism 770 will be described.

[0117] FIG. 4 is a P-X graph showing the operation of the pressing cylinder in the partition valve of the present embodiment. In FIG. 4, the horizontal axis X is the stroke (expansion and contraction length) of the movable part 72 of the pressing cylinder 70. The dimension of the stroke X is length. The vertical axis P is the operating pressure applied to the pressing cylinder 70. The dimension of the operating pressure P is pressure. As shown in FIG. 4, at the stroke end where the stroke X = X0, the operating pressure P of the pressing cylinder 70 is the end pressure Ps1. The stroke end is the position where the movable part 72 is most retracted in the expansion and contraction direction. Typically, the stroke end is defined as the most retracted position in terms of design.

[0118] When the working pressure P rises from the end pressure Ps1, the pressing cylinder 70 extends the movable part 72 and the stroke X increases. When the working pressure P reaches the contact pressure Pt, the pressing cylinder 70 reaches the contact position Xt of the stroke X of the movable part 72. At the contact position Xt, the tip 72a contacts the movable valve part 54. Further, when the working pressure P rises from the contact pressure Pt, the pressing cylinder 70 moves the stroke X of the movable part 72 to the range Xp exceeding the contact position Xt, and the tip 72a presses the movable valve part 54.

[0119] In the range Xp, the movable part 72 can move to the position where the movable valve part 54 contacts the inner surface 10a. In FIG. 4, the operation in the range Xp where the stroke X is larger than the contact position Xt is omitted. Similarly, in FIG. 4, the operation in the range where the working pressure P is larger than the contact pressure Pt is omitted.

[0120] When the working pressure P drops from the contact pressure Pt, the pressing cylinder 70 retracts the movable part 72 in response to the drop from Pt, and the stroke X decreases from the contact position Xt. When the working pressure P drops from the contact pressure Pt, the tip 72a separates from the movable valve part 54.

[0121] Here, as shown in FIG. 4, in the range where the stroke X is near the contact position Xt and smaller than the contact position Xt, the pressing cylinder 70 operates linearly. In the range where the working pressure P is near the contact pressure Pt and smaller than the contact pressure Pt, the pressing cylinder 70 operates linearly. This range where the stroke X and the working pressure P have a linear relationship is the linear operation region Lnr. In the linear operation region Lnr, the pressing cylinder 70 maintains a linear relationship between the stroke X and the working pressure P. In the linear operation region Lnr, the stroke X and the working pressure P satisfy a relationship represented by a straight line with a constant upward slope on the graph. Note that the movable part 72, which is the piston to which the working force F is applied, is represented by the working pressure P instead of the working force F because the area to which the working pressure is applied does not change.

[0122] In the linear motion region Lnr, as shown in FIG. 4, the lower limit of the stroke X in which the pressing cylinder 70 linearly moves is Xc. In the linear motion region Lnr, the upper limit of the stroke X in which the pressing cylinder 70 linearly moves is Xt. In the linear motion region Lnr, as shown in FIG. 4, the lower limit of the operating pressure P in which the pressing cylinder 70 linearly moves is Pn2. In the linear motion region Lnr, the upper limit of the operating pressure P in which the pressing cylinder 70 linearly moves is Pt.

[0123] The linear motion region Lnr is in the range where the stroke X is from the lower limit Xc to the upper limit Xt. The linear motion region Lnr is in the range where the operating pressure P is from the lower limit Pc to the upper limit Pt. In the linear motion region Lnr, biasing forces of the stroke buffer spring 74 and the retraction spring 73 are applied to the piston 72. In the range where the stroke X is larger than Xc, biasing forces of the stroke buffer spring 74 and the retraction spring 73 are applied to the piston 72. In the linear motion region Lnr, due to the decrease (or increase) of the operating pressure P, the stroke buffer spring 74 and the retraction spring 73 will elastically deform so as to extend (or contract).

[0124] When the operating pressure P drops to reach the lower limit Pn2 of the linear motion region Lnr. At this time, the movable part 72 retracts and the stroke X reaches Xc. In the initial state where the stroke X reaches Xc along with the drop of the operating pressure P, the piston 72 is in contact with the locking part 73r. Even when the stroke X reaches X = Xc and the operating pressure P drops from Pn2, the piston 72 does not move and maintains the contact state. That is, after the stroke X reaches X = Xc, the operating pressure P becomes smaller than Pn2, but the stroke X maintains Xc.

[0125] Furthermore, when the operating pressure P decreases to Pn1, the piston 72 is in a state where only the biasing force of the stroke buffer spring 74 is applied. In the range where the operating pressure P is from Pn2 to Pn1, the pressing cylinder 70 operates non-linearly. The range where the operating pressure P is from Pn2 to Pn1 is the non-linear motion region NL.

[0126] As shown in FIG. 4, the non-linear operation region NL is a range where the operating pressure P is from the lower limit Pn1 to the upper limit Pn2. In the non-linear operation region NL, the stroke X maintains Xc. As shown in FIG. 4, the non-linear operation region NL is represented by a vertical straight line along the vertical axis P for the stroke X and the operating pressure P. The non-linear operation region NL is represented by a straight line between the upper limit point NL2(Xc, Pn2) and the lower limit point NL1(Xc, Pn1). In the non-linear operation region NL, biasing forces of a stroke buffer spring 74 and a retraction spring 73 are applied to the piston 72. In the non-linear operation region NL, even if the operating pressure P decreases, the biasing forces of the stroke buffer spring 74 and the retraction spring 73 change, but these two springs do not apparently elastically deform. The range from the lower limit Pn1 to the upper limit Pn2 is synonymous with the pressure application amount of the retraction spring 73, and the position of the piston 72 is maintained at Xc until the transfer of this amount is completed. Between the upper limit point NL2(Xc, Pn2) and the lower limit point NL1(Xc, Pn1), the pressing cylinder 70 non-linearly operates.

[0127] When the operating pressure P further drops below the lower limit Pn1 of the non-linear operation region NL, the movable part 72 retracts and the piston 72 separates from the locking part 73r. As the operating pressure P drops, the stroke X decreases from Xc. In the range where the stroke X is smaller than Xc, the retraction spring 73 is not in contact with the piston 72. In the range where the stroke X is smaller than Xc, only the stroke buffer spring 74 will elastically deform.

[0128] Furthermore, when the operating pressure P decreases to Ps1, the piston 72 reaches the stroke X = X0 where it becomes the stroke end. At the stroke X = X0, the tip 72a may be housed in the fixed part 71. At the stroke X = X0, the tip 72a may be housed in the fixed part 71. When the decreased operating pressure P reaches Ps1, the piston 72 does not retract any further. A typical value of the operating pressure Ps1 is the value brought about to the piston 72 by the elastic deformation of each stroke buffer spring 74 at the stroke X0. The range of the operating pressure P from Pn1 to Ps1 is the region Sbr. In the region Sbr, the retraction spring 73 is not in contact with the piston 72. In the region Sbr, only the stroke buffer spring 74 will undergo elastic deformation. In the region Sbr, the stroke X and the operating pressure P satisfy a relationship represented by a straight line with a constant upward slope on the graph. In the region Sbr, the stroke X and the operating pressure P are represented by a straight line with a slope smaller than that of the linear operating region Lnr. Note that at the stroke X = X0, the tip 72a does not have to be completely housed in the fixed portion 71.

[0129] When the operating pressure P rises from Ps1, the piston 72 at the stroke X = X0 extends from the stroke end. While the operating pressure P rises from Ps1 to Pn1, the stroke X changes along the straight line indicated by the region Sbr. While the operating pressure P rises from Pn1 to Pn2, the stroke X maintains Xc along the straight line indicated by the non-linear operating region NL. While the operating pressure P rises from Pn2 to Pt, the stroke X changes from Xc to Xt along the straight line indicated by the linear operating region Lnr. When the operating pressure P rises above Pt, the stroke X increases beyond XXt and the tip 72a presses the movable valve portion 54.

[0130] The stroke buffer spring 74, which is the non-linear motion imparting mechanism 770, has a spring constant smaller than that of the retraction spring 73. The stroke buffer spring 74 has only an elastic force weaker than that of the retraction spring 73. Therefore, even in the vicinity of the stroke end where the stroke X is the initial value X0, the operating pressure P can apply a minute operating pressure as the initial pressure Ps1. Moreover, in the range where the operating pressure P is from Ps1 to Pn1, the stroke buffer spring 74 expands and contracts, while the retraction spring 73 does not extend. In contrast, in the range where the operating pressure P is from Pn2 to Pt, in addition to the stroke buffer spring 74, the retraction spring 73 also expands and contracts.

[0131] Here, between the point NL1(Xc, Pn1) and the point NL2(Xc, Pn2), the pressing cylinder 70 does not perform a continuous linear motion, and the relationship is such that the stroke X with respect to the operating pressure P undergoes non-linear motion. Therefore, even if there are variations in the positions or operations of the plurality of pistons 72 originally before movement, all the pistons 72 will move uniformly by passing through the non-linear operation region NL.

[0132] FIG. 5 is a schematic cross-sectional view showing a pressing cylinder without a non-linear operation imparting mechanism. In FIG. 5, the same reference numerals are given to the configurations corresponding to those in FIG. 3, and the description thereof is omitted. FIG. 6 is a P-X graph showing the operation of a pressing cylinder without a non-linear operation imparting mechanism. Also in FIG. 6, the horizontal axis X is the stroke (expansion / contraction length) of the movable part 72 of the pressing cylinder without a non-linear operation imparting mechanism, and the vertical axis P is the operating pressure P applied to the pressing cylinder without a non-linear operation imparting mechanism.

[0133] FIG. 5 shows a pressing cylinder 70 without a non-linear operation imparting mechanism. As shown in FIG. 6, in the pressing cylinder 70 without a non-linear operation imparting mechanism, at the stroke end where the stroke X = X0, the operating pressure P is the initial pressure Ps1. Note that the stroke end is the limit position in the retracting direction of the movable part 72. The typical values of the initial pressure Ps1 and the operating pressure P are the values brought about by the elastic deformation at each X of each retracting spring 73.

[0134] In the pressing cylinder 70 without a non-linear operation imparting mechanism, as shown in FIG. 6, the movable part 72 linearly operates over the entire range where the stroke X is from the initial position X0 to the contact position Xt. More specifically, the value of the operating pressure P and the elastic deformation at each stroke X of each retracting spring 73 operate in a state where the superposition principle (superposition principle for a plurality of linear equations) holds. The movable part 72 linearly operates over the entire range where the operating pressure P is from the initial pressure Ps1 to the contact pressure Pt. Over the entire range from X0 to Xt, the stroke X and the operating pressure P satisfy a linear relationship as the straight line Lnr shown in FIG. 6.

[0135] In the pressing cylinder 70 without a non-linear operation imparting mechanism, as shown in FIG. 6, there is no non-linear operation region NL where non-linear operation occurs.

[0136] Here, consider the case of driving a plurality of pressing cylinders 70.

[0137] All of the plurality of pressing cylinders 70 have the same structure. Therefore, when the operating pressure P rises from the initial pressure Ps1, in the plurality of pressing cylinders 70, the operating pressure P rises at the same rate. For this reason, ideally, the plurality of pressing cylinders 70 extend by the same value of the stroke X with respect to the rise of the operating pressure P.

[0138] However, although all of the plurality of pressing cylinders 70 have the same structure, there is a possibility that they may perform different operations due to factors inhibiting the expansion and contraction operation, such as the lubrication state of the piston 72 and friction from the seal portion 76 and the like.

[0139] Consider the balance equation for the piston 72. Here, assuming that the force applied to the piston at the stroke end is the elastic force F1 from the retracting spring 73, the force F2 from the working fluid which is the operating pressure P, and the static frictional force F4, the balance equation is as follows. F1 + F2 - F4 = 0 Here, the retraction direction of the piston is taken as positive. Note that the sign of the static frictional force F4 may be reversed depending on the operating history of the piston.

[0140] Due to the inhibiting factors inferred from the above equation, there may be a case where there is a pressing cylinder 70 that does not expand and contract when the operating pressure P rises. Then, the working fluid that should have been supplied to the non-operating pressing cylinder 70 flows into the operating pressing cylinder 70.

[0141] Moreover, in the plurality of pressing cylinders 70 having the same structure, the strength of the inhibiting factors for the expansion and contraction operation described above, that is, the ease of expansion and contraction of the piston 72, may be different for each pressing cylinder 70. Here, when the strength of the inhibiting factor for the expansion and contraction operation is different among the plurality of pressing cylinders 70, first, the pressing cylinder 70 with the weakest inhibiting factor starts to operate. At this time, all the operating fluid that should have been supplied to the other pressing cylinders 70 that do not operate flows into the single operating pressing cylinder 70.

[0142] For this reason, the amount of the operating fluid flowing into the single operating pressing cylinder 70 is equal to the volume obtained by summing up the amounts of all the other pressing cylinders 70. Therefore, only this single pressing cylinder 70 will protrude significantly. That is, due to the inhibiting factor for the expansion and contraction operation, there is a possibility that only one pressing cylinder 70 will protrude as compared with the position when each cylinder protrudes evenly, that is, there is a possibility that the stroke X of the pressing cylinder 70 will move to the contact position Xt which interferes with the valve opening shielding position (sliding preparation position). This means that the pressing cylinder 70 has entered the distance (gap) that enabled the valve body 5 to rotate between the retracted position and the valve opening shielding position. This leads to the possibility that the pressing cylinder 70 will inhibit the rotation of the valve body 5. When all the other pressing cylinders 70 rise to the contact pressure Pt by the increase in the operating pressure P to operate the valve body 5, there is no operation to rotate the valve body 5 between the retracted position and the valve opening shielding position. Therefore, the phenomenon that only this single pressing cylinder 70 protrudes significantly does not become an inhibiting factor. However, for example, this phenomenon may occur due to the thermal expansion of the operating fluid caused by a temperature change in the environment such as baking. That is, in the plurality of pressing cylinders 70, there may be a case where the mimicking operation in which each cylinder protrudes evenly cannot be performed, and the rotation of the valve body 5 is inhibited.

[0143] In the pressing cylinder 70 without the non-linear motion imparting mechanism shown in FIG. 5, it is conceivable that the mimicking operation with the same stroke X cannot be performed among the plurality of pressing cylinders 70 in the entire range where the operating pressure P ranges from the contact pressure Pt to the initial pressure Ps1.

[0144] In contrast, in the partition valve 100 according to the present embodiment, when the operating pressure P rises from the initial pressure Ps1, all the pressing cylinders 70 pass through the non-linear operation region NL due to the non-linear operation imparting mechanism 770, as shown in FIG. 4.

[0145] As a result, even when there is a variation in the stroke X in the range where the operating pressure P is less than Pn2 among the plurality of pressing cylinders 70, by passing through the non-linear operation region NL, the operating pressure contributed by the pressing cylinder 70 that has protruded earlier increases non-linearly, and there is an effect of promoting the protrusion of the subsequent pressing cylinders 70. Due to this effect, the operations are aligned in the vicinity of the operating pressure P rising and passing through the point NL2(Xc, Pn2), and the protrusion does not become biased on the side of the linear region Lnr where the operating pressure P is greater than Pn2, and the protrusion amounts of all the pressing cylinders 70 can be made uniform.

[0146] Hereinafter, the operations of the plurality of pressing cylinders 70 in the non-linear operation region NL will be described in detail.

[0147] For example, consider the case where the stroke X of the plurality of pressing cylinders 70 increases from the stroke end. Here, for the sake of explanation, the plurality of pressing cylinders 70 are distinguished as a pressing cylinder 70A, a pressing cylinder 70B, and a pressing cylinder 70C, respectively.

[0148] In these plurality of pressing cylinders 70, it is assumed that there is a difference in the degree of inhibition of operation in the range where X0 ≤ X ≤ Xc of the stroke X. The strength of the degree of inhibition increases in the order of the pressing cylinder 70A, the pressing cylinder 70B, and the pressing cylinder 70C. That is, the pressing cylinder 70A has the weakest degree of inhibition. The pressing cylinder 70C has the strongest degree of inhibition. The inhibition of operation is typically a stick-slip phenomenon, and the sticking phenomenon is observed as an inhibitory factor.

[0149] First, the operating pressure P is increased from Ps1. When hydraulic oil is supplied from the driving pressure generating mechanism 701 to a plurality of pressing cylinders 70, the operating pressure P increases. In the plurality of pressing cylinders 70, as the hydraulic oil flows in, they extend along the region Sbr. However, since there are differences in the degree of operation inhibition among the plurality of pressing cylinders 70, the piston 72 first extends in the pressing cylinder 70A with the weakest degree of operation inhibition. At this time, the pistons 72 in the pressing cylinder 70B and the pressing cylinder 70C do not extend.

[0150] While hydraulic oil flows into the pressing cylinder 70A in response to the increase in the operating pressure P, no hydraulic oil flows into the other pressing cylinder 70B and the pressing cylinder 70C. That is, all the hydraulic oil supplied from the driving pressure generating mechanism 701 flows into the pressing cylinder 70A with weak operation inhibition. The pressing cylinder 70A will have an extra stroke X increase corresponding to the inflow volume of the hydraulic oil that should have flowed into the pressing cylinder 70B and the pressing cylinder 70C.

[0151] Since no hydraulic oil flows into the pressing cylinder 70B and the pressing cylinder 70C with strong operation inhibition, only the pressing cylinder 70A extends significantly in response to the increase in the operating pressure P. Therefore, before the operating pressure P reaches Pn1, the pressing cylinder 70A may reach the stroke X = Xc first in response to the increase in the operating pressure P. The pressing cylinder 70A reaches the non-linear operation region NL first in response to the increase in the operating pressure P. At this time, the pressing cylinder 70B and the pressing cylinder 70C have not reached the stroke X = Xc. The pressing cylinder 70B and the pressing cylinder 70C are in the range of stroke X < Xc.

[0152] When only the single pressing cylinder 70A reaches the non-linear operation region NL where the stroke is equal to or greater than Xc first, the operating pressure P increases non-linearly. Due to this pressure increase, the pressing cylinders 70B and 70C overcome the inhibiting factors and start the extending operation along the region Sbr. At this time, depending on the intensity of the operation inhibition, for example, after the pressing cylinder 70B starts the extending operation, the pressing cylinder 70C starts the extending operation. Then, hydraulic oil flows into the pressing cylinders 70B and 70C, and the extending operation of the pressing cylinder 70A is alleviated.

[0153] In response to the increase in the operating pressure P, the pressing cylinders 70B and 70C reach the position corresponding to the operating pressure P (for example, the stroke X = Xc). When the pressing cylinders 70B and 70C reach the non-linear operation region NL, the operating pressure P becomes greater than Pn1. During this period, hydraulic oil flows into the pressing cylinders 70B and 70C, maintaining the state where the extending operation of the pressing cylinder 70A is alleviated.

[0154] That is, due to the first-reaching pressing cylinder 70A reaching the non-linear operation region NL, the operating pressure P increases non-linearly, causing the pressing cylinders 70B and 70C that start the extending operation later to exert the effect of aligning their respective strokes X near the position of the stroke X of the pressing cylinder 70A.

[0155] When the operating pressure P further increases in the non-linear operation region NL, an effect of further aligning the strokes X of the pressing cylinders 70A, 70B, and 70C occurs while the operating pressure P rises to Pn2. That is, in the non-linear operation region NL, the plurality of pressing cylinders 70 can be adjusted so that the same stroke Xc is obtained when Pn1 < P < Pn2 for the operating pressure P.

[0156] When the operating pressure P reaches Pn2, it is preferable that all the pressing cylinders 70 have synchronized operations. That is, it is preferable to determine the value of Pn2 such that all the pressing cylinders 70 have the same extended position at the stroke X = Xc. More specifically, it is preferable to determine the value of Pn2 so that each pressing cylinder 70 can function individually. When the operating pressure P rises and exceeds Pn2, all the pressing cylinders 70 with synchronized operations simultaneously reach the linear operation region Lnr. When exceeding Xc in the linear operation region Lnr, all the pressing cylinders 70 with synchronized operations linearly operate with the same stroke X.

[0157] Therefore, at the contact position Xt of the stroke X, all the pressing cylinders (pressing cylinder 70A, pressing cylinder 70B, pressing cylinder 70C) simultaneously reach the tip 72a to the movable valve portion 54. All the pressing cylinders 70 can have synchronized operations with respect to the operating pressure P, and some of the pressing cylinders 70 do not protrude to inhibit the rotation of the valve body 5. Note that when the operating pressure P further rises and exceeds the linear operation region Lnr, the tip 72a of the pressing cylinder 70A, the pressing cylinder 70B, and the pressing cylinder 70C simultaneously presses the movable valve portion 54.

[0158] In this way, by passing through the non-linear operation region NL as the operating pressure P rises, the inhibited pressing cylinders 70 move smoothly in synchronization.

[0159] Next, consider the case of decreasing the stroke X of the plurality of pressing cylinders 70 from the contact position Xt.

[0160] In this case, there are fewer problems compared to the case of increasing the stroke X of each pressing cylinder 70 (when operating from the stationary state). This is because in the interval where the operating pressure P is from Pt to Pn, the influence of the operating pressure P is dominant over the factors inhibiting the operations of the respective pressing cylinders 70, and since the dynamic friction coefficient is smaller than the static friction coefficient, the inhibiting factors are small during operation.

[0161] Next, consider the case where the partition valve 100 is heated.

[0162] FIG. 7 is an XV graph showing the operation of a pressing cylinder without a non-linear operation imparting mechanism. In FIG. 5, the vertical axis X is the stroke (expansion and contraction length) of the movable part 72 of the pressing cylinder without a non-linear operation imparting mechanism, and the horizontal axis V is the volume V of the working fluid flowing in and out of the pressing cylinder without a non-linear operation imparting mechanism. For the pressing cylinder 70 without a non-linear operation imparting mechanism, as shown by the solid line Lnr in FIG. 7, there is a linear relationship between the volume V of the working fluid flowing in and the stroke X.

[0163] When the partition valve 100 is heated due to a change in the ambient temperature or the like, the hydraulic driving means (non-compressible fluid driving part) 700 is heated. Due to the heating of the hydraulic driving means 700, the filled working fluid is heated. The heated working fluid thermally expands. The working fluid is filled in a closed circuit formed by the piping (hydraulic circuit) 702, the driving pressure generating mechanism 701, and the pressing cylinder 70. Therefore, under the condition that the volume of the system other than the movable part 72 does not change, the movable part 72, which is a piston in the hydraulic cylinder 70, is pushed corresponding to the thermally expanded volume. That is, due to thermal expansion, the same phenomenon occurs in the pressing cylinder 70 as when the pressure P of the working fluid flowing in increases. Due to thermal expansion, the piston 72 operates in the extending direction by ΔXb, as shown by Lnr+ in FIG. 7.

[0164] Also, when the partition valve 100 is cooled, similarly, the volume of the working fluid shrinks. Due to thermal contraction, the same phenomenon occurs in the pressing cylinder 70 as when the pressure P of the working fluid flowing in decreases. Due to this thermal contraction, the piston 72 operates in the retracting direction by ΔXb, as shown by Lnr- in FIG. 7.

[0165] In the plurality of pressing cylinders 70, when the above-described inhibiting factors are equal, due to the volume change caused by heat, all the pressing cylinders 70 operate equally in the direction in which the stroke X changes, as shown in FIG. 7. That is, when the operating pressure P is the initial pressure Ps1, due to thermal expansion or thermal contraction, the stroke X moves from the initial position X0. In particular, when thermal expansion occurs, the piston 72 moves in the direction in which the stroke X extends from the initial position X0.

[0166] In the plurality of pressing cylinders 70, when the above-described inhibiting factors are not equal, in the case of a pressing cylinder without a non-linear motion imparting mechanism, as described above, only one of the plurality of pressing cylinders 70 that is most likely to move extends. That is, when the operating pressure P is the initial pressure Ps1, due to the thermal expansion of the working fluid, only the pressing cylinder 70 with the weakest operating inhibition factor may extend significantly. In a pressing cylinder without a non-linear motion imparting mechanism, regardless of the operating position of the valve body 5, the movable part 72 may protrude due to a temperature rise. That is, one of the pressing cylinders 70 that is most likely to move may enter the distance (gap) that allows the valve body 5 to rotate between the retracted position and the valve opening shielding position, and the pressing cylinder 70 may inhibit the rotation of the valve body 5.

[0167] On the other hand, in the partition valve 100 according to the present embodiment, as described above, the plurality of pressing cylinders 70 perform an extension operation following the non-linear motion imparting mechanism 770. That is, even when thermal expansion occurs such that the stroke X moves in the protruding direction from the initial position X0, all of the plurality of pressing cylinders 70 pass through the non-linear motion region NL, so that only one pressing cylinder 70 does not protrude unevenly. All the pressing cylinders 70 perform the same extension operation with respect to the movable valve portion 54. Thereby, the distance (gap) that allows the valve body 5 to rotate between the retracted position and the valve opening shielding position can be ensured. Therefore, the non-linear motion imparting mechanism 770 can suppress the influence of thermal expansion in which the stroke X of the plurality of pressing cylinders 70 increases in the range where the operating pressure P is smaller than Pn1.

[0168] By having the non-linear motion imparting mechanism 770, the partition valve 100 in the present embodiment can align the values of the stroke X of each pressing cylinder 70 in the vicinity of Xc with respect to the extension motion in which the stroke X of the plurality of pressing cylinders 70 moves in the protruding direction from the initial position X0. The non-linear motion imparting mechanism 770 enables a non-linear motion in which the protruding amounts of the plurality of pressing cylinders 70 can be adjusted without contacting the valve body 5. This enables the pressing cylinder 70 to press the valve body 5 and enables the valve body 5 to smoothly operate to a position where it seals the opening 12b. It is possible to smoothly release the pressing state of the valve body 5 and to operate the valve body 5 to a rotatable position while releasing the sealing of the opening 12b.

[0169] The non-linear motion imparting mechanism 770 enables all the pressing cylinders 70 to simultaneously have a state in which the movable part 72 is separated from the valve body 5 by a sufficient distance during the expansion and contraction motion of the pressing cylinder 70. Thereby, the movable part 72 does not inhibit the rotation of the valve body 5. Even when the working fluid (working oil) thermally expands, the non-linear motion imparting mechanism 770 can prevent the movable part 72 from inadvertently coming into contact with the valve body 5. Alternatively, even when the operating inhibiting factors such as the sticking of the pressing cylinder 70 and the friction with the seal part 76 increase, or when the operating inhibiting factors vary, the non-linear motion imparting mechanism 770 can maintain the necessary clearance.

[0170] In the present embodiment, the non-linear motion region NL by the non-linear motion imparting mechanism 770 is formed at Xc for the stroke X. However, as long as the stroke X is between X0 and Xc, that is, from the start of the extension motion of the piston 72 until it enters the linear motion region Lnr, the stroke X of the non-linear motion region NL is not particularly limited.

[0171] FIG. 8 is a P-X graph showing the operation in another example of the pressing cylinder of the present embodiment. In addition, in this embodiment, the non-linear operation region NL can be configured to be represented by the operating pressure P at which Pn1 and Pn2 coincide, as shown in FIG. 8. As a typical example, there is a configuration in which no pressure is applied to the retraction spring 73 in FIG. 3. That is, as a typical example, there is a configuration in which the free length of the retraction spring 73 is such that the piston-side end of the retraction spring 73 is located at the locking portion 73r. The non-linear operation region NL is represented by the point NL(Xc, Pn). In this case, the operations of the plurality of pressing cylinders 70 are aligned by passing through the point NL(Xc, Pn). Here, the upper limit point NL2(Xc, Pn2) and the lower limit point NL1(Xc, Pn1) in the non-linear operation region NL coincide with the point NL(Xc, Pn). The non-linear operation point NL can be set, for example, by the position of the locking portion 73r, the magnitudes of the spring constants of the stroke buffer spring 74 and the retraction spring 73, and the magnitude of the applied pressure of the stroke buffer spring 74.

[0172] Furthermore, in this embodiment, the non-linear operation applying mechanism 770 has a double spring structure having a stroke buffer spring 74 with a smaller wire diameter and a smaller coil diameter than the retraction spring 73. However, the non-linear operation applying mechanism 770 can also be configured to have a stroke buffer spring having a non-linear characteristic continuous with the retraction spring 73.

[0173] In this case, the non-linear operation applying mechanism 770 can also form the stroke buffer spring at both ends of the retraction spring 73. The stroke buffer spring can be configured as a coil spring that is integral with the retraction spring 73 and has a non-linear characteristic. The stroke buffer spring in this example may use a tapered wire. The tapered stroke buffer spring is an unequal coil diameter portion where the wires do not contact each other when a load is applied. As a typical example of this, the stroke buffer spring is a conical spring, a drum-shaped spring, or a bellows spring. In the case of this example, the stroke buffer spring and the retraction spring 73 can also be configured to be integrated.

[0174] In the operation of this example, the non-linear operation region NL shown in FIG. 4 is represented by a curve connecting the point NL1(Xc, Pn1) and the point NL2(Xc2, Pn2). Here, Xc2 is a stroke X larger than Xc. Furthermore, as the non-linear spring that changes the above configuration, the pitch, coil diameter, and wire diameter may be changed.

[0175] Hereinafter, a second embodiment of the partition valve according to the present invention will be described with reference to the drawings. FIG. 9 is a schematic cross-sectional view showing the partition valve in this embodiment. In this embodiment, the difference from the above-described first embodiment lies in the non-linear operation imparting mechanism 770, and the same reference numerals are given to the corresponding configurations as those in the above-described first embodiment, and the description thereof is omitted.

[0176] The non-linear operation imparting mechanism 770 of this embodiment is a telescopic piston 740 disposed in the pipe 702 as shown in FIG. 9. In this embodiment, the stroke buffer spring 74 and the locking portion 73r are not disposed in the fixed portion 71. The telescopic piston 740 includes a moving piston 741a (piston member), a moving piston 741b (piston member), and a stroke buffer spring (elastic portion) 744.

[0177] Both the moving piston 741a and the moving piston 741b are housed in the pipe 702. Both the moving piston 741a and the moving piston 741b have the same diameter as the pipe 702. Both the moving piston 741a and the moving piston 741b can move freely along the moving direction of the hydraulic oil in the pipe 702. The moving piston 741a and the moving piston 741b are arranged to be spaced apart from each other in the moving direction of the hydraulic oil in the pipe 702. The distance between the moving piston 741a and the moving piston 741b in the moving direction of the hydraulic oil can vary. A stroke buffer spring (starting operation non-linear mechanism) 744 is disposed between the moving piston 741a and the moving piston 741b.

[0178] The stroke buffer spring (elastic mechanism) 744 connects the moving pistons 741a and 741b. The stroke buffer spring 744 can expand and contract in the moving direction of the hydraulic fluid within the pipe 702. The stroke buffer spring 744 can apply a biasing force to the moving pistons 741a and 741b.

[0179] The stroke buffer spring 744 is a weak spring, similar to the stroke buffer spring 74 in the first embodiment. The stroke buffer spring 744 corresponds to the stroke buffer spring 74 in the first embodiment. The non-linear operation imparting mechanism 770 in the present embodiment corresponds to the configuration in the first embodiment where the stroke buffer spring 74 is disposed on the side opposite to the retraction spring 73 within the cylinder (fixed portion) 71. That is, the present embodiment corresponds to the configuration in which the retraction spring 73 and the stroke buffer spring 744 are arranged in series to apply an elastic force to the piston 72. The present embodiment can be said to be an example in which the non-linear spring of the first embodiment is constituted by the stroke buffer spring 744 and the retraction spring 73.

[0180] The telescopic piston 740 is immersed in the working fluid within the pipe 702. The inside of the pipe 702 is filled with the working fluid outside the telescopic piston 740. That is, both the inside of the pipe 702 on the side closer to the drive pressure generating mechanism 701 than the moving piston 741a and the inside of the pipe 702 on the side closer to the pressing cylinder 70 than the moving piston 741b are filled with the working fluid. The inside of the telescopic piston 740 is not filled with the working fluid.

[0181] In the present embodiment, the telescopic piston 740 transmits the working pressure P applied from the drive pressure generating mechanism 701 to the pressing cylinder 70 within the pipe 702.

[0182] The operating pressure P transmitted from the moving piston 741a is applied to the pressing cylinder 70 side via the stroke buffer spring 744 and the moving piston 741b. Similarly, the operating pressure P transmitted from the moving piston 741b is applied to the drive pressure generation mechanism 701 side via the stroke buffer spring 744 and the moving piston 741a. At this time, the stroke buffer spring 744 elastically deforms according to the operating pressure P.

[0183] That is, when the working fluid is supplied from the drive pressure generation mechanism 701 into the pipe 702, the operating pressure P is applied to the moving piston 741a corresponding to the supply volume of the working fluid. The telescopic piston 740 moves in the pipe 702 corresponding to the supply volume of the working fluid. At this time, the stroke buffer spring 744 expands and contracts according to the operating pressure P. Further, the operating pressure P is transmitted to the moving piston 741b via the stroke buffer spring 744. The moving piston 741b presses the working fluid. At the same time, the telescopic piston 740 moves the working fluid in the pipe 702 toward the pressing cylinder 70 corresponding to the supply volume of the working fluid and the expansion and contraction length of the stroke buffer spring 744. Thereby, the working fluid is supplied to the cylinder 71 of the pressing cylinder 70.

[0184] In the present embodiment, by the non-linear motion imparting mechanism 770, as in the first embodiment shown in FIG. 4, the plurality of pressing cylinders 70 pass through the non-linear motion region NL. Thereby, the operations of the plurality of pressing cylinders 70 can be made uniform, and irregular protrusion generation can be prevented.

[0185] In the present embodiment, the same effects as those of the above-described embodiments can be achieved, and further, the effect that it is possible to make the telescopic piston 740 operate following the plurality of pressing cylinders 70 only by arranging it in the pipe 702 can be achieved.

[0186] Note that the telescopic piston 740 can be arranged closer to the pressing cylinder 70 than the position where the pipe 702 branches from the drive pressure generation mechanism 701 to the plurality of respective pressing cylinders 70. The telescopic piston 740 can be arranged closer to the drive pressure generation mechanism 701 than the position where the pipe 702 branches from the drive pressure generation mechanism 701 to the plurality of respective pressing cylinders 70.

[0187] Furthermore, as the elastic part in the telescopic piston 740, instead of the stroke buffer spring 744, it can be a compressible fluid or the like filled between the two piston members 741a and 741b. The compressible fluid can be, for example, air. Since the compressible fluid elastically deforms with respect to the compressive force, it can perform the same operation as the stroke buffer spring 744.

[0188] Hereinafter, a third embodiment of the partition valve according to the present invention will be described with reference to the drawings. FIG. 10 is a schematic cross-sectional view showing the partition valve in the present embodiment. In the present embodiment, the difference from the above-described second embodiment lies in the non-linear operation imparting mechanism 770, and the same reference numerals are given to the corresponding configurations as those in the above-described second embodiment, and the description thereof will be omitted.

[0189] As shown in FIG. 10, the non-linear operation imparting mechanism 770 of the present embodiment is an accumulator 701a. In the present embodiment, the stroke buffer spring 74 and the locking portion 73r are not arranged in the fixed portion 71. The accumulator (starting operation non-linear mechanism) 701a is an elastic pressure adjusting mechanism (separate circuit) having a storage stroke. The accumulator 701a has, for example, a drop lid type tank equipped with an internal spring. When supplying the working fluid from the drive pressure generation mechanism 701, the accumulator 701a alleviates the increase in the working pressure P and enables the non-linear operation of the pressing cylinder 70. The accumulator 701a forms a region Sbr and a non-linear operation region NL. The increase in the operating pressure P mitigated by the accumulator 701a corresponds to the stroke buffer spring 74 in the first embodiment. The internal spring of the accumulator 701a is a weak spring, similar to the stroke buffer spring 74 in the first embodiment. This embodiment can be said to be an example in which the non-linear spring of the first embodiment is composed of the accumulator 701a and the retraction spring 73.

[0190] In this embodiment, by means of the non-linear operation imparting mechanism 770, as in the first embodiment shown in FIG. 4, the plurality of pressing cylinders 70 pass through the non-linear operation region NL. Thereby, the operations of the plurality of pressing cylinders 70 can be aligned to prevent irregular protrusions from occurring. In this embodiment, the point NL1(Xc, Pn1) and the point NL2(Xc, Pn2) in the non-linear operation region NL can be set by the internal spring set pressure at the upper limit of the storage volume of the accumulator 701a.

[0191] In this embodiment, effects equivalent to those of the above-described embodiments can be achieved.

[0192] Note that the accumulator 701a can be connected to the pipe 702 closer to the pressing cylinder 70 than the position where the pipe 702 branches from the drive pressure generating mechanism 701 to the plurality of respective pressing cylinders 70. The accumulator 701a can be connected to the pipe 702 closer to the drive pressure generating mechanism 701 than the position where the pipe 702 branches from the drive pressure generating mechanism 701 to the plurality of respective pressing cylinders 70.

[0193] Hereinafter, a fourth embodiment of the partition valve according to the present invention will be described with reference to the drawings. FIG. 11 is a schematic cross-sectional view showing the partition valve in this embodiment. In this embodiment, what is different from the above-described first embodiment and second embodiment is the point regarding the non-linear operation imparting mechanism 770. For the configurations corresponding to the above-described second embodiment other than this, the same reference numerals are given and the description thereof is omitted.

[0194] As shown in FIG. 11, the non-linear operation imparting mechanism 770 of the present embodiment is a bubble (elastic fluid) Bb disposed in the pipe 702 instead of the telescopic piston 740 of the second embodiment. In the present embodiment, the stroke buffer spring 74 and the locking portion 73r are not disposed in the fixed portion 71. The bubble (starting operation non-linear mechanism) Bb has a configuration corresponding to the space portion between the moving piston 741a and the moving piston 741b in the telescopic piston 740 of the second embodiment. The bubble Bb has an elastic force corresponding to the stroke buffer spring (elastic portion) 744 of the second embodiment. The present embodiment can be said to be an example in which the non-linear spring of the first embodiment is constituted by the bubble Bb and the retracting spring 73. Alternatively, the non-linear operation imparting mechanism 770 of the present embodiment corresponds to a configuration in which, as the elastic portion in the telescopic piston 740 of the second embodiment, instead of the stroke buffer spring 744, a compressible fluid or the like filled between the two piston members 741a and 741b is used, and the two piston members 741a and 741b are not provided.

[0195] The bubble Bb is housed in the pipe 702. The bubble Bb is formed to have approximately the same diameter as the pipe 702. If the bubble Bb is formed in the pipe 702, its diameter dimension may be smaller than the pipe 702 diameter. The bubble Bb can move freely along the moving direction of the hydraulic oil in the pipe 702. The volume of the bubble Bb can change in the pipe 702.

[0196] The bubble Bb is immersed in the working fluid in the pipe 702. The inside of the pipe 702 is filled with the working fluid outside the bubble Bb. The bubble Bb is a compressible gas enclosed inside the pipe 702 according to the set operating pressure P. Alternatively, the bubble Bb can be air appropriately selected according to the operating conditions of the shut-off valve 100. In particular, the bubble Bb can be selected according to the vapor pressure of the working fluid or the like. As the bubble Bb, a gas such as nitrogen gas or argon gas that does not react according to the reactivity with the working fluid can be selected.

[0197] In addition, the encapsulation pressure of the air bubble Bb can be selected according to the vapor pressure of the working fluid, the operating temperature of the switching valve 100, and the like. The encapsulation pressure of the air bubble Bb can be set to the same as the atmospheric pressure. The encapsulation pressure of the air bubble Bb can be set to be smaller than the atmospheric pressure. The encapsulation pressure of the air bubble Bb can be set to be larger than the atmospheric pressure.

[0198] The air bubble Bb is a weak spring, similar to the stroke buffer spring 744 in the second embodiment. The non-linear operation imparting mechanism 770 in the present embodiment corresponds to a configuration in which an air bubble Bb, which is an elastic fluid, is disposed on the side opposite to the pulling spring 73 in the cylinder (fixed portion) 71. That is, the present embodiment corresponds to a configuration in the second embodiment in which the pulling spring 73 and the stroke buffer spring 744 are arranged in series to apply an elastic force to the piston 72.

[0199] In the present embodiment, the volume of the air bubble Bb can expand and contract according to the operating pressure P in the pipe 702 applied from the drive pressure generating mechanism 701 to the pressing cylinder 70. That is, the air bubble Bb exhibits the same action as the stroke buffer spring 744 that elastically deforms by the operating pressure P.

[0200] In the present embodiment, due to the non-linear operation imparting mechanism 770, a plurality of pressing cylinders 70 pass through the non-linear operation region NL in the same manner as in the first embodiment shown in FIG. 4. Thereby, the operations of the plurality of pressing cylinders 70 can be made uniform, and irregular protrusion generation can be prevented.

[0201] In the present embodiment, the same effects as those of the above-described embodiments can be achieved, and further, by simply encapsulating the air bubble Bb in the pipe 702, it is possible to cause the air bubble Bb to operate following a plurality of pressing cylinders 70 without increasing the number of parts.

[0202] Note that the air bubbles Bb can be arranged closer to the pressing cylinder 70 than the position where the pipe 702 branches from the driving pressure generating mechanism 701 to the plurality of respective pressing cylinders 70. The air bubbles Bb can be arranged closer to the driving pressure generating mechanism 701 than the position where the pipe 702 branches from the driving pressure generating mechanism 701 to the plurality of respective pressing cylinders 70. The air bubbles Bb may be located within the working fluid of the cylinder 71. The air bubbles Bb may be located within the working fluid of the driving pressure generating mechanism 701.

[0203] Hereinafter, a fifth embodiment of the partition valve according to the present invention will be described with reference to the drawings. FIG. 12 is a schematic cross-sectional view showing the partition valve in the present embodiment. FIG. 13 is a P-X graph showing the operation of the pressing cylinder in the partition valve of the present embodiment. In the present embodiment, what is different from the above-described third embodiment is the point regarding the non-linear motion imparting mechanism 770, and the same reference numerals are given to the corresponding configurations as those in the above-described third embodiment other than this, and the description thereof is omitted.

[0204] The non-linear motion imparting mechanism 770 of the present embodiment is a vacuum stroke (vacuum region) VS arranged in place of the air bubbles (elastic fluid) Bb of the third embodiment shown in FIG. 11. In the present embodiment, the abutting stop portion 77 is arranged within the fixed portion 71. In the present embodiment, the stroke buffer spring 74 and the locking portion 73r are not arranged within the fixed portion 71. As shown in FIG. 12, the pressing piston 70 of the present embodiment is provided with the abutting stop portion 77.

[0205] The abutting stop portion 77 is provided at a position where the piston 72 does not degenerate any further at the stroke X that is the stroke end. That is, the abutting stop portion 77 is provided at the position where the piston 72 abuts at the stroke end of the piston 72. The abutting stop portion 77 can be formed to protrude in the extending direction from the bottom of the cylinder 71. Alternatively, it can be formed to protrude from the side surface of the cylinder 71 in a direction approaching the central axis. When the retracted piston 72 contacts the abutting stop portion 77, a space is formed inside the cylinder 71 in which the working fluid remains.

[0206] The operation of the hydraulic driving means 700 in the present embodiment will be described.

[0207] In the present embodiment, in the driving pressure generating mechanism 701 which is the main cylinder, it is operable until the operating pressure P becomes a negative pressure. Consider the case where the stroke X decreases the operating pressure P from the contact position Xt. When the operating pressure P is decreased, the driving pressure generating mechanism 701 operates so as to suck the working fluid from the pressing cylinder 70. Typically, by expanding the internal volume in which the working fluid of the main cylinder in the driving pressure generating mechanism 701 is stored, in each pressing cylinder 70, the suction operation of the piston 72 using the pulling spring 73 as a power source is performed.

[0208] As the operating pressure P decreases, in the plurality of pressing cylinders 70, as shown in the linear operation region Lnr, the stroke X of the piston 72 decreases from the contact position Xt. In the present embodiment, when the operating pressure P decreases to Pn2, the piston 72 contacts the abutting stop portion 77. At this time, the stroke X becomes the end position X0. In the state where the operating pressure P has reached Pn2, a space in which the working fluid remains is formed inside the cylinder 71. In this state, the working fluid receives all the forces generated by the pulling spring 73 of the pressing cylinder 70. In this state, the abutting stop portion 77 does not receive the force generated by the pulling spring 73.

[0209] Furthermore, the driving pressure generating mechanism 701 operates to suck the working fluid from the pressing cylinder 70, causing the working pressure P to decrease from Pn2. In synchronization with this, the force generated by the pulling spring 73 of the pressing cylinder 70 is transferred from the working fluid to the abutting stop portion 77. Since the abutting stop portion 77 is composed of a rigid body, its position does not change. Even when the working pressure P decreases from Pn2, the piston 72 remains in contact with the abutting stop portion 77, so the stroke X does not change at the end position X0. That is, as shown in FIG. 13, the working pressure P decreases along the non-linear operation region NL represented by a straight line along the P axis.

[0210] When the working pressure P further decreases, the inside of the cylinder 71 becomes a negative pressure (e.g., gauge pressure). The state where the working pressure P is negative is, as shown in FIG. 13, at a position below the X axis along the P axis. When the working pressure P becomes negative, as shown in FIG. 12, a vacuum stroke (start operation non-linear mechanism) VS is formed inside the cylinder 71. Under the state where the working pressure P has become negative, for example, the internal volume of the driving pressure generating mechanism 701 is further expanded. Then, the volume of the vacuum stroke VS increases. When the decreased working pressure P reaches Pn1, the operation of the driving pressure generating mechanism 701 is stopped. This working pressure Pn1 is a negative pressure. In this embodiment, the lower limit value of the working pressure P is Pn1. Here, the working pressure P is not lowered below Pn1. By adjusting the internal volume of the driving pressure generating mechanism 701, the volume of the formed vacuum stroke VS can be set.

[0211] In this embodiment, as shown in FIG. 13, the non-linear operation region NL is the range where the working pressure P is from the lower limit Pn1 to the upper limit Pn2. The value of the lower limit Pn1 is, for example, about the vapor pressure obtained under the ambient temperature of the working fluid. In the non-linear operation region NL, the stroke X maintains the end position X0. The non-linear operation region NL is, as shown in FIG. 13, represented by a straight line in the vertical direction along the vertical axis P between the stroke X and the working pressure P. The non-linear operation region NL is represented by a straight line between the upper limit point NL2(X0, Pn2) and the lower limit point NL1(X0, Pn1). Note that Pn1 < 0 (gauge pressure).

[0212] Similarly, consider the case where the stroke X increases the operating pressure P from the end position X0. When increasing the operating pressure P, the drive pressure generating mechanism 701 operates to send the working fluid to the pressing cylinder 70. Typically, the drive pressure generating mechanism 701 performs an operation of reducing the internal volume, that is, the same operation as the direction of increasing the operating pressure P (boosting direction operation). First, the volume of the working fluid sent from the drive pressure generating mechanism 701 fills the volume of the vacuum stroke VS. During this operation, the operating pressure P substantially maintains the value of the lower limit Pn1. As the internal volume of the drive pressure generating mechanism 701 decreases, the volume of the vacuum stroke VS decreases. Thereafter, the volume of the vacuum stroke VS is filled. The vacuum stroke VS inside the cylinder 71 disappears. From this point on, the operating pressure P can rise from the lower limit Pn1. That is, when the working fluid is supplied to the pressing cylinder 70, the operating pressure P rises. At this time, as shown in FIG. 13, the operating pressure P rises along the non-linear operation region NL represented by a straight line along the P axis.

[0213] When the operating pressure P further rises, the inside of the cylinder 71 becomes a positive pressure (gauge pressure). When the operating pressure P becomes a positive pressure, the operating pressure P continues to rise due to the working fluid supplied to the pressing cylinder 70 by the drive pressure generating mechanism 701. When the operating pressure P rises to reach Pn2, the non-linear operation region NL ends. While the operating pressure P rises from Pn1 to Pn2, the stroke X maintains X0 along the straight line shown in the non-linear operation region NL.

[0214] When the operating pressure P rises above Pn2, the piston 72 separates from the abutting stop portion 77. When the operating pressure P rises from Pn2, the driving pressure generating mechanism 701 supplies the working fluid to the pressing cylinder 70. While the operating pressure P rises from Pn2 to Pt, the stroke X changes from X0 to Xt along the straight line shown in the linear operation region Lnr. When the operating pressure P rises above Pt, the stroke X increases beyond Xt, and the tip 72a presses the movable valve portion 54.

[0215] In the present embodiment, by means of the non-linear operation imparting mechanism 770, as in each of the above-described embodiments, the plurality of pressing cylinders 70 pass through the non-linear operation region NL. Thereby, the operations of the plurality of pressing cylinders 70 can be made uniform, and irregular protrusion generation can be prevented. This embodiment can be said to be an example in which the non-linear spring of the first embodiment is constituted by the retraction spring 73, the abutting stop portion 77, and the vacuum stroke VS. Note that, compared with other embodiments, the fifth embodiment is different in that it holds the dead zone (vacuum stroke VS) as a non-linear element. Having a dead zone means that the stroke X does not respond within the dead zone range. Specifically, it has the feature that the influence of the thermal expansion of the working fluid due to a change in the ambient temperature or the like is not output as the operation of the pressing cylinder 70.

[0216] In the present embodiment, the same effects as those of the above-described embodiments can be achieved, and further, by making the driving pressure generating mechanism 701 operable until the operating pressure P becomes a negative pressure, it is possible to make the plurality of pressing cylinders 70 operate following them without increasing the number of parts.

[0217] Note that the vacuum stroke VS can be formed at the position where the working fluid is filled in the driving pressure generating mechanism 701, the piping 702, and the plurality of pressing cylinders 70. The formation position of the vacuum stroke VS is not limited as long as it is inside the working fluid.

[0218] Furthermore, in the present invention, it is also possible to individually select each configuration in the above-described embodiments and combine and implement them respectively.

[0219] Incidentally, the specifications of the actual machine are presented below. Total stroke length of the drive pressure generating mechanism 701: 42.2 [mm] Volume of the vacuum stroke (vacuum region) VS: 6.1 [mm] Bore diameter of the drive pressure generating mechanism 701: φ15 [mm] Total operating oil volume of the drive pressure generating mechanism 701, the piping 702, and the plurality of pressing cylinders 70: 40436 [mm 3 Vacuum volume of the drive pressure generating mechanism 701 that forms a negative pressure: 1,078 [mm 3 Volume expansion rate of the operating oil (oil): 9.900×10 -04 [1 / ℃] Assumed temperature rise value in the partition valve 100: Δ20℃ Atmospheric pressure (1×10 5 [Pa]) The maximum pressure at which the enclosed air bubble Bb is compressed: 0.4×10 11 [Pa]

[0220] Fig. 14 shows another configuration of the pressing cylinder 70. In this configuration, one end surface 771a is the abutting stop portion.

[0221] Furthermore, as the movable valve portion of the valve body 5, a configuration including a movable valve frame portion (slide valve plate) and a movable valve plate portion (counter plate) can also be adopted. In this configuration, the movable valve frame portion or the movable valve plate portion can be pressed by the pressing cylinder 70 to perform a valve closing operation.

Industrial Applicability

[0222] As an application example of the present invention, it can be applied to a mechanism that performs hydraulic drive in a vacuum device or the like. In particular, it can be widely applied to a partition valve for switching between a state where two spaces having different properties such as vacuum degree, temperature, or gas atmosphere are partitioned by a connecting flow path and a state where this partition state is released. ​​

Explanation of Symbols

[0223] 5…Valve body 10…Valve box 10b…Inner surface of valve box 12a…First opening 12b…Second opening 20…Rotating shaft 21…Rotary drive unit 30…Neutral valve part 54…Movable valve part 70…Pressing cylinder (pushing cylinder) 71…Fixed part (cylinder) 72…Movable part (piston) 73…Retracting spring 74…Stroke buffer spring (starting operation non - linear mechanism) 100…Partition valve 700…Hydraulic drive means (incompressible fluid drive unit) 701…Drive pressure generation mechanism 701a…Elastic pressure adjustment mechanism (separate circuit) 702…Pipe (hydraulic circuit) 770…Non - linear motion imparting mechanism 740…Telescopic piston 741a, 741b…Moving piston 744…Stroke buffer spring (elastic mechanism) Bb…Bubble H…Flow path VS…Vacuum stroke (vacuum region)

Claims

1. A partition valve for partitioning a flow path, a valve box inserted into the flow path and having a first opening and a second opening that face each other and communicate with each other to form the flow path, a valve body located in a hollow portion within the valve box and capable of opening and closing the flow path, a rotating shaft that rotatably supports the valve body between a retracted position and a valve opening shielding position within the hollow portion in a direction intersecting the flow path and has an axis extending in the flow path direction, a rotation drive unit capable of rotationally driving the valve body, a pressing cylinder provided in the valve box and pressing the valve body so as to be movable in a direction along the flow path toward a valve closing position where the valve body at the valve opening shielding position contacts the periphery of the first opening, a drive pressure generation mechanism connected to the pressing cylinder and causing the pressing cylinder to perform a telescopic operation, a non-linear operation imparting mechanism that enables a linear operation and a non-linear operation with respect to the telescopic operation of the pressing cylinder driven by the drive pressure generation mechanism, comprising A partition valve characterized by the above.

2. The non-linear operation imparting mechanism enables the linear operation of the pressing cylinder at a position near where the valve body is pressed and the non-linear operation of the pressing cylinder at a position separated from the valve body. The partition valve according to claim 1, characterized by the above.

3. The non-linear operation imparting mechanism, as the non-linear operation, makes the telescopic operation by the drive pressure generation mechanism non-linear in the pressing cylinder in a state separated from the valve body. The partition valve according to claim 2, characterized by the above.

4. The pressing cylinder includes a retraction spring that retracts the pressing cylinder with respect to the pressing cylinder that extends due to an increase in the drive pressure (operating pressure) by the drive pressure generation mechanism. The non-linear motion imparting mechanism has an elastic mechanism for retracting the pressing cylinder. The partition valve according to claim 3, characterized in that.

5. The elastic mechanism is an elastic body having a spring constant different from that of the pulling spring. The partition valve according to claim 4, characterized in that.

6. The elastic body is a weak spring having an elastic force smaller than that of the pulling spring and enabling the non-linear motion, and the pulling spring is a strong spring having an elastic force larger than that of the elastic body and enabling the linear motion. The partition valve according to claim 5, characterized in that.

7. The weak spring and the strong spring are arranged in series. The partition valve according to claim 6, characterized in that.

8. The weak spring and the strong spring are arranged in double at the coaxial position. The partition valve according to claim 6, characterized in that.

9. The non-linear motion imparting mechanism has a start motion non-linear mechanism for enabling the non-linear motion at the start of the elongation by the drive pressure generating mechanism in the pressing cylinder. The partition valve according to claim 3, characterized in that.

10. The start motion non-linear mechanism has either an elastic mechanism arranged in a hydraulic circuit configured by connecting the drive pressure generating mechanism and the pressing cylinder, an elastic pressure adjusting mechanism connected to the hydraulic circuit, or an elastic fluid connected to the hydraulic circuit. The partition valve according to claim 9, characterized in that.

11. The start motion non-linear mechanism has a vacuum region arranged in a hydraulic circuit configured by connecting the drive pressure generating mechanism and the pressing cylinder. The partition valve according to claim 9, characterized in that.

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