Image sensor having NANO optical lens array and electronic equipment including the same

Abstract

To provide an image sensor having a nano optical lens array and electronic equipment including the same.SOLUTION: An image sensor includes a sensor substrate including a plurality of unit pixel patterns each having a first pixel, a second pixel, a third pixel, and a fourth pixel, and a nano optical lens array including a plurality of unit meta-patterns each having a first meta-region corresponding to the first pixel, a second meta-region corresponding to the second pixel, a third meta-region corresponding to the third pixel, and a fourth meta-region corresponding to the fourth pixel. Each of the first through fourth meta-regions includes a plurality of nanostructures arranged so as to color-separate incident light entering each unit meta-pattern of the nano optical lens array and focus the color-separated light onto the first through fourth pixels. The nanostructures are arranged such that light is not exchanged among the plurality of unit meta-patterns and color separation and light focusing occur independently for each unit meta-pattern.SELECTED DRAWING: Figure 3A

Description

Technical Field

[0001] The present invention relates to an image sensor including a nano-optical lens array and an electronic device including the same.

Background Art

[0002] An image sensor usually uses a color filter to sense the color of incident light. However, since the color filter absorbs the light of the remaining colors except for the light of the corresponding color, the light utilization efficiency may decrease. For example, when an RGB color filter is used, only 1 / 3 of the incident light is transmitted, and the remaining 2 / 3 is absorbed, so the light utilization efficiency is only about 33%. Therefore, in the case of a color display device or a color image sensor, most of the light loss occurs in the color filter.

[0003] In addition, since a general image sensor has a structure in which pixels that sense light of different hues are periodically arranged, information of the same hue cannot be obtained from all regions on the image sensor. Therefore, resolution degradation due to undersampling occurs, and artifacts occur in the video processing process for restoring the lost color information.

Summary of the Invention

Problems to be Solved by the Invention

[0004] The problem to be solved by the present invention is to provide an image sensor including a nano-optical lens array and having improved light efficiency, and an electronic device including the same.

[0005] Another problem to be solved by the present invention is to provide an image sensor including a nano-optical lens array configured such that demosaicing is unnecessary in the video processing process, and an electronic device including the same.

Means for Solving the Problems

[0006] An image sensor according to an embodiment includes a first pixel, a second pixel, a third pixel, and a fourth pixel that sense light, and a sensor substrate including a plurality of unit pixel patterns two-dimensionally arranged along a first direction and a second direction, and a nano-optical lens array including a first meta-region corresponding to the first pixel, a second meta-region corresponding to the second pixel, a third meta-region corresponding to the third pixel, and a fourth meta-region corresponding to the fourth pixel, and including a plurality of unit meta-patterns two-dimensionally arranged along the first direction and the second direction. Each of the first to fourth meta-regions includes a plurality of nanostructures arranged to separate colors of incident light incident on each unit meta-pattern of the nano-optical lens array and to condense the color-separated light onto the first to fourth pixels. In each of the plurality of unit meta-patterns, the cross-sectional area distribution of the plurality of nanostructures is asymmetric in a first direction, a second direction, a first diagonal direction, and a second diagonal direction with respect to the center of each of the plurality of unit meta-patterns. In each of the plurality of unit meta-patterns, the cross-sectional area distribution of the plurality of nanostructures in the first meta-region and the cross-sectional area distribution of the plurality of nanostructures in the fourth meta-region are in a 180° rotational symmetry relationship with respect to the center of each of the plurality of unit meta-patterns.

[0007] In the first meta-region, the second meta-region, the third meta-region, and the fourth meta-region, the heights, positions, and periods of the plurality of nanostructures are the same as each other.

[0008] The cross-sectional area distribution of the plurality of nanostructures in the first meta-region, the cross-sectional area distribution of the plurality of nanostructures in the second meta-region, the cross-sectional area distribution of the plurality of nanostructures in the third meta-region, and the cross-sectional area distribution of the plurality of nanostructures in the fourth meta-region may be determined such that there is no light exchange between the plurality of unit meta-patterns, and color separation and light condensation occur independently for each unit meta-pattern.

[0009] The cross-sectional area distribution of the plurality of nanostructures in the first meta-region is asymmetric in the first direction, the second direction, the first diagonal direction, and the second diagonal direction with respect to the center of the first meta-region, and the cross-sectional area distribution of the plurality of nanostructures in the fourth meta-region is asymmetric in the first direction, the second direction, the first diagonal direction, and the second diagonal direction with respect to the center of the first meta-region.

[0010] Among the plurality of nanostructures in the first meta-region, the phase delay of light by the nanostructures adjacent to the second meta-region and the phase delay of light by the nanostructures adjacent to the third meta-region are greater than the phase delay of light by other nanostructures. Among the plurality of nanostructures in the fourth meta-region, the phase delay of light by the nanostructures adjacent to the second meta-region and the phase delay of light by the nanostructures adjacent to the third meta-region are greater than the phase delay of light by other nanostructures.

[0011] At least one pair of a plurality of pairs of two nanostructures facing each other in the second direction with respect to the horizontal center line passing through the center of the first meta-region along the first direction have different cross-sectional areas from each other. At least one pair of a plurality of pairs of two nanostructures facing each other in the first direction with respect to the vertical center line passing through the center of the first meta-region along the second direction have different cross-sectional areas from each other. At least one pair of a plurality of pairs of two nanostructures facing each other with respect to the first diagonal line passing through the center of the first meta-region have different cross-sectional areas from each other. At least one pair of a plurality of pairs of two nanostructures facing each other with respect to the second diagonal line passing through the center of the first meta-region can have different cross-sectional areas from each other.

[0012] Adjacent to a unit metapattern different from the unit metapattern to which the first meta-region belongs, two nanostructures facing each other with respect to the second diagonal line can have the same cross-sectional area.

[0013] At least one pair of nanostructures out of a plurality of pairs of two nanostructures facing each other in the second direction with respect to a horizontal center line passing through the center of the fourth meta-region along the first direction have different cross-sectional areas from each other, at least one pair of nanostructures out of a plurality of pairs of two nanostructures facing each other in the first direction with respect to a vertical center line passing through the center of the fourth meta-region along the second direction have different cross-sectional areas from each other, at least one pair of nanostructures out of a plurality of pairs of two nanostructures facing each other with respect to a first diagonal line passing through the center of the fourth meta-region have different cross-sectional areas from each other, and at least one pair of nanostructures out of a plurality of pairs of two nanostructures facing each other with respect to a second diagonal line passing through the center of the fourth meta-region can have different cross-sectional areas from each other.

[0014] Adjacent to a unit meta-pattern different from the unit meta-pattern to which the fourth meta-region belongs, two nanostructures facing each other with reference to the second diagonal line can have the same cross-sectional area.

[0015] The cross-sectional area distribution of the plurality of nanostructures in the second meta-region is symmetric in the first diagonal direction with reference to the center of the second meta-region and asymmetric in the first direction, the second direction, and the second diagonal direction, and the cross-sectional area distribution of the plurality of nanostructures in the third meta-region is symmetric in the first diagonal direction with reference to the center of the second meta-region and asymmetric in the first direction, the second direction, and the second diagonal direction.

[0016] Among the plurality of nanostructures in the second meta-region, the phase delay of light by the nanostructures adjacent to the first meta-region and the phase delay of light by the nanostructures adjacent to the fourth meta-region are greater than the phase delay of light by other nanostructures, and among the plurality of nanostructures in the third meta-region, the phase delay of light by the nanostructures adjacent to the first meta-region and the phase delay of light by the nanostructures adjacent to the fourth meta-region are greater than the phase delay of light by other nanostructures.

[0017] In the second meta-region, two nanostructures facing each other with respect to a first diagonal line passing through the center of the second meta-region can have the same cross-sectional area.

[0018] At least one pair of nanostructures among a plurality of pairs of two nanostructures facing each other in a second direction with respect to a horizontal center line passing through the center of the second meta-region along a first direction may have different cross-sectional areas from each other, and at least one pair of nanostructures among a plurality of pairs of two nanostructures facing each other in a first direction with respect to a vertical center line passing through the center of the second meta-region along a second direction may have different cross-sectional areas from each other, and at least one pair of nanostructures among a plurality of pairs of two nanostructures facing each other with respect to a second diagonal line passing through the center of the second meta-region may have different cross-sectional areas from each other.

[0019] Within the third meta-region, two nanostructures facing each other with respect to a first diagonal line passing through the center of the third meta-region may have the same cross-sectional area.

[0020] At least one pair of nanostructures among a plurality of pairs of two nanostructures facing each other in a second direction with respect to a horizontal center line passing through the center of the third meta-region along a first direction may have different cross-sectional areas from each other, and at least one pair of nanostructures among a plurality of pairs of two nanostructures facing each other in a first direction with respect to a vertical center line passing through the center of the third meta-region along a second direction may have different cross-sectional areas from each other, and at least one pair of nanostructures among a plurality of pairs of two nanostructures facing each other with respect to a second diagonal line passing through the center of the third meta-region may have different cross-sectional areas from each other.

[0021] Within the unit meta-pattern, the nanostructure disposed at the center of the unit meta-pattern may be configured to have a greater phase delay than the nanostructures disposed directly adjacent to other unit meta-patterns.

[0022] The plurality of nanostructures may be arranged to separate colors of incident light incident on each unit meta-pattern of the nano-optical lens array, and condense light in a first wavelength band onto the first pixel and the fourth pixel, light in a second wavelength band onto the second pixel, and light in a third wavelength band onto the third pixel.

[0023] Within one unit pixel pattern, the second pixel and the third pixel are arranged in a first diagonal direction, and the first pixel and the fourth pixel are arranged in a second diagonal direction that intersects the first diagonal direction. Within one unit meta-pattern, the second meta-region and the third meta-region can be arranged in the first diagonal direction, and the first meta-region and the fourth meta-region can be arranged in the second diagonal direction.

[0024] The image sensor further includes a plurality of isolation patterns provided on the upper surface of the nano-optical lens array, and each of the plurality of isolation patterns can be provided to cover the first to fourth meta-regions of the corresponding unit meta-pattern among the plurality of unit meta-patterns.

[0025] Each of the plurality of isolation patterns can have a flat upper surface, an irregularly uneven upper surface, or a convex upper surface.

[0026] In each of the plurality of unit pixel patterns, the image sensor sums up all of the output of the first pixel, the output of the second pixel, the output of the third pixel, and the output of the fourth pixel to generate one luminance signal, subtracts the output of the first pixel and the output of the fourth pixel from the output of the third pixel to generate a first color phase signal, and subtracts the output of the first pixel and the output of the fourth pixel from the output of the second pixel to generate a second color phase signal, so as to be configured to generate one luminance signal, one first color phase signal, and one second color phase signal from one unit pixel pattern.

[0027] The image sensor converts the luminance signal, the first color phase signal, and the second color phase signal into digital signals, and is configured to selectively generate video data having one of a plurality of different digital video formats using the digitized luminance signal, the first color phase signal, and the second color phase signal, and output the video data to the outside.

[0028] An electronic device according to another embodiment includes a lens assembly that forms an optical image of a subject, an image sensor that converts the optical image formed by the lens assembly into an electrical signal, and a processor that processes the signal generated by the image sensor. The image sensor includes a first pixel, a second pixel, a third pixel, and a fourth pixel that sense light, and a sensor substrate including a plurality of unit pixel patterns two-dimensionally arranged along a first direction and a second direction. The image sensor further includes a nano-optical lens array including a first meta-region corresponding to the first pixel, a second meta-region corresponding to the second pixel, a third meta-region corresponding to the third pixel, and a fourth meta-region corresponding to the fourth pixel, and a plurality of unit meta-patterns two-dimensionally arranged along the first direction and the second direction. Each of the first to fourth meta-regions includes a plurality of nanostructures arranged to separate colors of incident light incident on each unit meta-pattern of the nano-optical lens array and to condense the color-separated light onto the first to fourth pixels. In each of the plurality of unit meta-patterns, the cross-sectional area distribution of the plurality of nanostructures is asymmetric in a first direction, a second direction, a first diagonal direction, and a second diagonal direction with respect to the center of each of the plurality of unit meta-patterns. In each of the plurality of unit meta-patterns, the cross-sectional area distribution of the plurality of nanostructures in the first meta-region and the cross-sectional area distribution of the plurality of nanostructures in the fourth meta-region are in a 180° rotational symmetry relationship with respect to the center of each of the plurality of unit meta-patterns.

[0029] An image sensor according to still another embodiment includes a first pixel, a second pixel, a third pixel, and a fourth pixel that sense light, and a sensor substrate including a plurality of unit pixel patterns two-dimensionally arranged along a first direction and a second direction, and a nano-optical lens array including a first meta-region, a second meta-region, a third meta-region, and a fourth meta-region respectively corresponding to the first pixel, the second pixel, the third pixel, and the fourth pixel, and including a plurality of unit meta-patterns two-dimensionally arranged along the first direction and the second direction. Each of the first to fourth meta-regions includes a plurality of nanostructures arranged to separate the incident light incident on each unit meta-pattern of the nano-optical lens array into colors and condense the color-separated light onto the first to fourth pixels. In each of the plurality of unit meta-patterns, the cross-sectional area distribution of the plurality of nanostructures is asymmetric in a first direction, a second direction, a first diagonal direction, and a second diagonal direction with respect to the center of each of the plurality of unit meta-patterns. The color separation and condensation of the light can occur independently in each of the plurality of unit meta-patterns without light exchange between the plurality of unit meta-patterns, depending on the cross-sectional area distribution of the plurality of nanostructures in the first meta-region, the cross-sectional area distribution of the plurality of nanostructures in the second meta-region, the cross-sectional area distribution of the plurality of nanostructures in the third meta-region, and the cross-sectional area distribution of the plurality of nanostructures in the fourth meta-region.

Brief Description of the Drawings

[0030]

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Embodiments for Carrying Out the Invention

[0031] Hereinafter, with reference to the accompanying drawings, an image sensor including a nano-optical lens array and an electronic device including the same will be described in detail. The embodiments described below are merely exemplary, and various modifications are possible from these embodiments. In the following drawings, the same reference numerals denote the same components, and on the drawings, the size of each component may be exaggerated for clarity and convenience of explanation.

[0032] Hereinafter, expressions described as “upper part” or “upper” include not only those that are immediately above, below, left, or right in contact, but also those that are above, below, left, or right without contact.

[0033] Terms such as first, second, etc. are used to describe various components, but are used only for the purpose of distinguishing one component from another. The terms do not limit that the substances or structures of the components are different.

[0034] The singular expression includes plural expressions unless it is clearly stated otherwise in the context. Also, when a certain part “includes” a certain component, it means that, unless otherwise stated to the contrary, it does not exclude other components and may further include other components.

[0035] Also, terms such as “... part” and “module” described in the specification mean units that process functions and operations, and these may be implemented by hardware or software, or by a combination of hardware and software.

[0036] The use of the term “the foregoing” and similar directive terms applies to both singular and plural.

[0037] The steps that make up the method may be performed in any appropriate order, provided there is no explicit indication that they must be performed in the order described. Also, the use of all exemplary terms (e.g., etc.) is merely for the purpose of explaining the technical concept in detail and does not limit the scope of rights by such terms unless otherwise limited by the claims.

[0038] FIG. 1 is a schematic block diagram of an image sensor according to an embodiment. Referring to FIG. 1, the image sensor 1000 includes a pixel array 1100, a timing controller 1010, a row decoder 1020, and an output circuit 1030. The image sensor may also be a CCD (charge coupled device) image sensor or a CMOS (complementary metal oxide semiconductor) image sensor.

[0039] The pixel array 1100 includes pixels arranged two-dimensionally along a plurality of rows and a plurality of columns. The row decoder 1020 selects one of the rows of the pixel array 1100 in response to a row address signal output from the timing controller 1010. The output circuit 1030 outputs a light sensing signal in column units from a plurality of pixels arranged along the selected row. For this purpose, the output circuit 1030 may also include a column decoder and an analog-to-digital converter (ADC). For example, the output circuit 1030 includes a plurality of ADCs respectively arranged for each column between the column decoder and the pixel array 1100, or one ADC arranged at the output end of the column decoder. The timing controller 1010, the row decoder 1020, and the output circuit 1030 may be implemented by one chip or by individual chips respectively. A processor for processing the video signal output through the output circuit 1030 may also be implemented by one chip together with the timing controller 1010, the row decoder 1020, and the output circuit 1030.

[0040] The pixel array 1100 includes a plurality of pixels that sense light of different wavelengths. The arrangement of the pixels can be implemented in various ways. FIG. 2 exemplarily shows the pixel arrangement of the pixel array of the image sensor. In particular, FIG. 2 shows the arrangement of the Bayer Pattern structure generally adopted in the image sensor 1000.

[0041] Referring to FIG. 2, one unit pixel pattern includes four quadrant regions, and the first to fourth quadrants are a blue pixel B, a green pixel G, a red pixel R, and a green pixel G, respectively. Such unit pixel patterns are periodically repeated and two-dimensionally arranged along the first direction (X direction) and the second direction (Y direction) perpendicular to the first direction. That is, within one unit pixel pattern in the form of a 2×2 array, two green pixels G are arranged in one diagonal direction, and one blue pixel B and one red pixel R are arranged in the other diagonal direction, respectively. Looking at the overall pixel arrangement, a first row in which a plurality of green pixels G and a plurality of blue pixels B are alternately arranged along the first direction, and a second row in which a plurality of red pixels R and a plurality of green pixels G are alternately arranged along the first direction are repeatedly arranged along the second direction. The arrangement method of the pixel array 1100 can be various other than the Bayer pattern. Hereinafter, the case where the pixel array 1100 of the image sensor 1000 has the Bayer pattern structure shown in FIG. 2 will be exemplarily described.

[0042] FIGS. 3A and 3B are cross-sectional views schematically showing the configuration of the pixel array 1100 of the image sensor 1000 according to an embodiment. FIG. 3A shows a cross-section of the pixel array 1100 cut along the first direction (i.e., the X direction), and FIG. 3B shows a cross-section of the pixel array 1100 cut along the first direction (X direction) at a position different from the cross-section position of FIG. 3A in the second direction (i.e., the Y direction). Referring to FIGS. 3A and 3B, the pixel array 1100 includes a sensor substrate 110, a spacer layer 120 disposed on the sensor substrate 110, and a nano-optical lens array 130 disposed on the spacer layer 120.

[0043] FIG. 4A is a plan view schematically showing a pixel array of a sensor substrate 110 of the pixel array 1100 shown in FIGS. 3A and 3B. Referring to FIG. 4A, the sensor substrate 110 includes a plurality of pixels that sense incident light. For example, the sensor substrate 110 may include a plurality of first pixels 111, a plurality of second pixels 112, a plurality of third pixels 113, and a plurality of fourth pixels 114 that convert incident light into an electrical signal to generate a video signal.

[0044] One first pixel 111, one second pixel 112, one third pixel 113, and one fourth pixel 114 clustered and arranged in a 2×2 array can form one unit pixel pattern. In the sensor substrate 110, a plurality of unit pixel patterns including the first pixel 111, the second pixel 112, the third pixel 113, and the fourth pixel 114 are two-dimensionally arranged periodically repeating along a first direction (X direction) and a second direction (Y direction). For example, the plurality of first pixels 111 and the plurality of second pixels 112 may be alternately arranged along the first direction, and in cross-sections with different positions in the second direction perpendicular to the first direction, the plurality of third pixels 113 and the plurality of fourth pixels 114 may be alternately arranged along the first direction. Also, the plurality of second pixels 112 and the plurality of third pixels 113 may be arranged in a first diagonal direction, and the plurality of first pixels 111 and the plurality of fourth pixels 114 may be arranged in a second diagonal direction intersecting the first diagonal direction. In one example, the first pixel 111 and the fourth pixel 114 are green pixels that sense green light, the second pixel 112 is a blue pixel that senses blue light, and the third pixel 113 is a red pixel that senses red light.

[0045] In one example, each of the first to fourth pixels 111, 112, 113, 114 includes one light sensing cell. For example, each of the first to fourth pixels 111, 112, 113, 114 includes one photodiode. In this case, each of the first to fourth pixels 111, 112, 113, 114 can output only one signal.

[0046] FIG. 4B is a plan view schematically showing another pixel arrangement of the sensor substrate 110 of the pixel array 1100 shown in FIGS. 3A and 3B. Referring to FIG. 4B, in another example, each of the first to fourth pixels 111, 112, 113, 114 includes a plurality of light sensing cells that independently sense incident light. In this case, each of the first to fourth pixels 111, 112, 113, 114 includes a plurality of photodiodes. For example, each of the first to fourth pixels 111, 112, 113, 114 may include first to fourth light sensing cells c1, c2, c3, c4. The first to fourth light sensing cells c1, c2, c3, c4 can be two-dimensionally arranged along the first direction and the second direction. For example, in each of the first to fourth pixels 111, 112, 113, 114, the first to fourth light sensing cells c1, c2, c3, c4 are arranged in a 2×2 array.

[0047] Also, each of the first to fourth pixels 111, 112, 113, 114 includes a separation film DTI that electrically separates the plurality of light sensing cells. The separation film DTI is formed, for example, in a DTI (deep trench isolation) structure. The deep trench is filled with air or an electrically insulating material. The separation film DTI extends along the first direction and the second direction so as to divide each of the first to fourth pixels 111, 112, 113, 114 into four parts. By the separation film DTI, the first to fourth light sensing cells c1, c2, c3, c4 of each of the first to fourth pixels 111, 112, 113, 114 can be separated from each other. The separation film DTI extending in the first direction and the separation film DTI extending in the second direction can intersect each other at the center of each of the first to fourth pixels 111, 112, 113, 114.

[0048] Also, between adjacent pixels among the first to fourth pixels 111, 112, 113, and 114, the separation film DTI is arranged along the first direction and the second direction. Therefore, the separation film DTI can separate the first to fourth pixels 111, 112, 113, and 114 from each other. The separation film DTI extended in the first direction and the separation film DTI extended in the second direction can intersect each other at the center of the unit pixel pattern including the first to fourth pixels 111, 112, 113, and 114.

[0049] In FIG. 4B, it is exemplarily shown that each of the first to fourth pixels 111, 112, 113, and 114 includes four light sensing cells, but it is also possible that four or more independent light sensing cells are clustered and two-dimensionally arranged. For example, each of the first to fourth pixels 111, 112, 113, and 114 can also include a plurality of independent light sensing cells clustered and arranged in a 3×3 array or a 4×4 array. Hereinafter, for the sake of convenience, the case where each of the first to fourth pixels 111, 112, 113, and 114 includes light sensing cells arranged in a 2×2 array will be described.

[0050] When each of the first to fourth pixels 111, 112, 113, and 114 includes a plurality of light sensing cells, an autofocus signal is obtained from the difference between the output signals of adjacent light sensing cells. For example, from the difference between the output signal of the first light sensing cell c1 and the output signal of the second light sensing cell c2, the difference between the output signal of the third light sensing cell c3 and the output signal of the fourth light sensing cell c4, or the difference between the sum of the output signals of the first light sensing cell c1 and the third light sensing cell c3 and the sum of the output signals of the second light sensing cell c2 and the fourth light sensing cell c4, an autofocus signal in the first direction can be generated. Also, from the difference between the output signal of the first light sensing cell c1 and the output signal of the third light sensing cell c3, the difference between the output signal of the second light sensing cell c2 and the output signal of the fourth light sensing cell c4, or the difference between the sum of the output signals of the first light sensing cell c1 and the second light sensing cell c2 and the sum of the output signals of the third light sensing cell c3 and the fourth light sensing cell c4, an autofocus signal in the second direction can be generated.

[0051] General RGB images can be obtained in two different ways. First, the first to fourth photosensitive cells c1, c2, c3, c4 of the first to fourth pixels 111, 112, 113, 114 can each operate as one independent channel. In this case, the first pixel 111 can have four independent green channels, the second pixel 112 can have four independent blue channels, the third pixel 113 can have four independent red channels, and the fourth pixel 114 can have four independent green channels. Therefore, one unit pixel pattern can output 16 independent signals. In the video signal processing process, the processor can use the signals output from multiple photosensitive cells individually to perform operations such as noise reduction and color correction to generate a general RGB image. In one example, the processor may be included in the image sensor 1000 or may be a component included in an electronic device including the image sensor 1000.

[0052] Alternatively, it is also possible to perform binning mode operation to increase sensitivity in low light environments. The binning mode is an image processing method that sums the outputs of multiple independent photosensitive cells or sums the outputs of multiple pixels of the same hue. For example, in the binning mode, a general RGB image is obtained by summing the output signals of the first to fourth photosensitive cells c1, c2, c3, c4. For example, the output signals of the first to fourth photosensitive cells c1, c2, c3, c4 of the first pixel 111 are summed to generate a first green video signal, the output signals of the first to fourth photosensitive cells c1, c2, c3, c4 of the second pixel 112 are summed to generate a blue video signal, the output signals of the first to fourth photosensitive cells c1, c2, c3, c4 of the third pixel 113 are summed to generate a red video signal, and the output signals of the first to fourth photosensitive cells c1, c2, c3, c4 of the fourth pixel 114 are summed to generate a second green video signal. The processor can perform video signal processing on the summed video signal to generate a general RGB image.

[0053] The binning mode is performed by a software method using a processor or a hardware method using the output circuit 1030 of the image sensor. For example, in the case of the software method, the output circuit 1030 of the image sensor 1000 can output signals from a plurality of light sensing cells individually. The processor can perform an operation of adding up the output signals of a plurality of light sensing cells within one pixel of one unit pixel pattern among the signals from the image sensor 1000 in the video signal processing process. In the case of the hardware method, if the image sensor 1000 receives a binning mode instruction from the processor or another control circuit, the output circuit 1030 can be switched to combine and output the output signals of the light sensing cells within one pixel of one unit pixel pattern to one output line. In the general mode that is not the binning mode, the output circuit 1030 of the image sensor 1000 can be switched to output signals from a plurality of light sensing cells individually.

[0054] Referring again to FIGS. 3A and 3B, the image sensor 1000 includes a spacer layer 120 provided on the sensor substrate 110. The spacer layer 120 is disposed between the sensor substrate 110 and the nano-optical lens array 130 and serves to maintain a constant interval between the sensor substrate 110 and the nano-optical lens array 130. The spacer layer 120 is made of a dielectric material that is transparent to visible light, for example, polymethyl methacrylate (PMMA), SOG (siloxane-based spin on glass), SiO2, Si3N4, Al2O3, etc., has a refractive index lower than that of the nanostructure NP described later, and has a low absorption rate in the visible light band.

[0055] On the spacer layer 120, a nano-optical lens array 130 is provided. Although not shown, an etching stop layer may be further provided between the spacer layer 120 and the nano-optical lens array 130 to protect the spacer layer 120 during the process of forming the nano-optical lens array 130. The nano-optical lens array 130 includes a plurality of first meta-regions 131 corresponding to the plurality of first pixels 111, a plurality of second meta-regions 132 corresponding to the plurality of second pixels 112, a plurality of third meta-regions 133 corresponding to the plurality of third pixels 113, and a plurality of fourth meta-regions 134 corresponding to the plurality of fourth pixels 114. The first meta-region 131 is arranged to face the first pixel 111 along the third direction (Z direction), the second meta-region 132 is arranged to face the second pixel 112 along the third direction, the third meta-region 133 is arranged to face the third pixel 113 along the third direction, and the fourth meta-region 134 is arranged to face the fourth pixel 114 along the third direction.

[0056] Therefore, the first to fourth meta-regions 131, 132, 133, 134 are two-dimensionally arranged in the same manner as the first to fourth pixels 111, 112, 113, 114 described in FIG. 4A. For example, the plurality of first meta-regions 131 and the plurality of second meta-regions 132 are alternately arranged along the first direction, and in cross-sections with different positions in the second direction perpendicular to the first direction, the plurality of third meta-regions 133 and the plurality of fourth meta-regions 134 are alternately arranged along the first direction. Also, one first meta-region 131, one second meta-region 132, one third meta-region 133, and one fourth meta-region 134 clustered and arranged in a 2×2 array can form one unit meta-pattern.

[0057] According to an embodiment, the nano-optical lens array 130 is configured to separate incident light by color. For example, the nano-optical lens array 130 can separate light in a first wavelength band (e.g., green light), light in a second wavelength band (e.g., blue light), and light in a third wavelength band (e.g., red light) of the incident light and cause them to travel along different paths. Further, the nano-optical lens array 130 is also configured to function as a lens that condenses the color-separated light in the first wavelength band, the second wavelength band, and the third wavelength band onto pixels. For example, the nano-optical lens array 130 is configured to condense the light in the first wavelength band of the incident light onto the first pixel 111 and the fourth pixel 114, the light in the second wavelength band onto the second pixel 112, and the light in the third wavelength band onto the third pixel 113.

[0058] Also, in the nano-optical lens array 130 according to the embodiment, color separation and light condensation can occur independently for each unit meta-pattern. That is, the light incident on one unit meta-pattern is color-separated only within that unit meta-pattern and condensed only onto the pixel corresponding to that unit meta-pattern, and each unit meta-pattern does not affect the color separation and light condensation of other adjacent unit meta-patterns. For example, among the light incident on one unit meta-pattern, the light in the first wavelength band is condensed only onto the first pixel 111 and the fourth pixel 114 corresponding to the first meta-region 131 and the fourth meta-region 134 of that unit meta-pattern, and is not condensed onto the first pixel and the fourth pixel corresponding to other adjacent unit meta-patterns. Similarly, among the light incident on one unit meta-pattern, the light in the second wavelength band is condensed only onto the second pixel 112 corresponding to the second meta-region 132 of that unit meta-pattern, and is not condensed onto the second pixel corresponding to other adjacent unit meta-patterns. The light in the third wavelength band is condensed only onto the third pixel 113 corresponding to the third meta-region 133 of that unit meta-pattern, and is not condensed onto the third pixel corresponding to other adjacent unit meta-patterns. Therefore, adjacent unit meta-patterns are optically separated from each other, and no light exchange or energy exchange occurs between adjacent unit meta-patterns.

[0059] For this purpose, the nano-optical lens array 130 includes a plurality of nanostructures NP periodically arranged according to a predetermined rule. The nano-optical lens array 130 may further include a dielectric layer DL filled between the plurality of nanostructures NP spaced apart from each other. In order for the nano-optical lens array 130 to perform the above-described functions, the plurality of nanostructures NP of the nano-optical lens array 130 can be configured in various ways. For example, the plurality of nanostructures NP can be arranged so that the phase of the transmitted light passing through the nano-optical lens array 130 varies differently depending on the position on the nano-optical lens array 130. The cross-sectional size (e.g., width or diameter), cross-sectional shape, and height of each nanostructure NP, the interval between the plurality of nanostructures NP, the arrangement period (or pitch), and the arrangement form determine the phase profile of the transmitted light realized by the nano-optical lens array 130. Also, the behavior of the light transmitted through the nano-optical lens array 130 is determined by the phase distribution of the transmitted light.

[0060] The nanostructure NP can have a size smaller than the wavelength of visible light. The nanostructure NP can have, for example, a size smaller than the blue wavelength. For example, the width (or diameter) of the cross-section of the nanostructure NP is smaller than 400 nm, 300 nm, or 200 nm and larger than about 80 nm. The height of the nanostructure NP is about 500 nm to about 1500 nm, and the height is larger than the width of the cross-section.

[0061] The nanostructure NP is made of a material having a relatively high refractive index compared to the surrounding material and a relatively low absorption rate in the visible light band. For example, the nanostructure NP may include c-Si, p-Si, a-Si, and III-V compound semiconductors (such as GaP, GaN, GaAs, etc.), SiC, TiO2, SiN3, ZnS, ZnSe, Si3N4, and / or combinations thereof. The periphery of the nanostructure NP is filled with a dielectric layer DL having a relatively low refractive index compared to the nanostructure NP and a relatively low absorption rate in the visible light band. For example, the dielectric layer DL may be filled with PMMA, SOG, SiO2, Si3N4, Al2O3, air, or the like.

[0062] The refractive index of the nanostructure NP is about 2.0 or more with respect to light having a wavelength of about 630 nm, and the refractive index of the dielectric layer DL is about 1.0 or more and less than 2.0 with respect to light having a wavelength of about 630 nm. Further, the difference between the refractive index of the nanostructure NP and the refractive index of the dielectric layer DL is about 0.5 or more. The nanostructure NP having a refractive index difference from the surrounding material can change the phase of the light passing through the nanostructure NP. This is due to the phase delay caused by the sub-wavelength shape dimensions of the nanostructure NP, and the degree to which the phase is delayed is determined by the detailed shape dimensions, arrangement form, etc. of the nanostructure NP.

[0063] FIG. 5 is a plan view exemplarily showing the arrangement of a plurality of nanostructures NP in one unit meta-pattern of the nano-optical lens array 130 shown in FIGS. 3A and 3B, and FIG. 6 shows a plurality of mutually different nanostructures NP arranged in the first to fourth meta-regions 131, 132, 133, 134 of one unit meta-pattern of the nano-optical lens array 130, denoted by reference numerals. On the other hand, in FIGS. 5 and 6, the grids represented by broken lines inside the first meta-region 131, the second meta-region 132, the third meta-region 133, and the fourth meta-region 134 are for clearly showing the positions of the nanostructures NP, and are not related to the actual configurations of the first meta-region 131, the second meta-region 132, the third meta-region 133, and the fourth meta-region 134.

[0064] Referring to FIG. 5, one unit meta-pattern 130U of the nano-optical lens array 130 includes a first meta-region 131, a second meta-region 132, a third meta-region 133, and a fourth meta-region 134 that are clustered and arranged in a 2×2 array. Within one unit meta-pattern 130U, the second meta-region 132 and the third meta-region 133 are arranged in the direction of the first diagonal DG1, and the first meta-region 131 and the fourth meta-region 134 are arranged in the direction of the second diagonal DG2. Although only one unit meta-pattern 130U is exemplarily shown in FIG. 5, the nano-optical lens array 130 can also include a plurality of unit meta-patterns 130U that are periodically two-dimensionally arranged along the first direction and the second direction. The plurality of unit meta-patterns 130U can correspond to one of the plurality of unit pixel patterns of the sensor substrate 110. The pattern period or lattice constant of the plurality of unit meta-patterns 130U of the nano-optical lens array 130 is the same as the pattern period or lattice constant of the plurality of unit pixel patterns of the sensor substrate 110.

[0065] Each of the first meta-region 131, the second meta-region 132, the third meta-region 133, and the fourth meta-region 134 includes a plurality of nanostructures NP having different cross-sectional areas from each other. In the example of FIG. 5, each of the first meta-region 131, the second meta-region 132, the third meta-region 133, and the fourth meta-region 134 is shown to include nine nanostructures NP two-dimensionally arranged in a 3×3 array, but is not necessarily limited thereto. For example, each of the first meta-region 131, the second meta-region 132, the third meta-region 133, and the fourth meta-region 134 can also include a plurality of nanostructures NP two-dimensionally arranged in an array of 4×4 or 5×5 or more.

[0066] In the first meta-region 131, the second meta-region 132, the third meta-region 133, and the fourth meta-region 134, the materials, cross-sectional shapes, heights, positions, periods, and array forms of the plurality of nanostructures NP are the same as each other, and only the cross-sectional areas are selected to be different from each other. That is, in the first meta-region 131, the second meta-region 132, the third meta-region 133, and the fourth meta-region 134, only the cross-sectional area distributions of the plurality of nanostructures NP are different from each other. FIG. 5 shows that the plurality of nanostructures NP have circular cross-sections in a plane parallel to the first direction and the second direction, that is, the plurality of nanostructures NP are cylindrical, but the present invention is not limited thereto. In a plane parallel to the first direction and the second direction, the plurality of nanostructures NP can also have cross-sections such as circular cross-sections, elliptical cross-sections, or polygons such as quadrilaterals. Hereinafter, the cross-sectional area of each nanostructure NP is defined as the area of the cross-section of the nanostructure NP along a plane parallel to the first direction and the second direction.

[0067] In each of the first meta-region 131, the second meta-region 132, the third meta-region 133, and the fourth meta-region 134, the distribution of the cross-sectional areas of the plurality of nanostructures NP is selected in consideration of the aforementioned functions of the nano-optical lens array 130. For example, the plurality of nanostructures NP are arranged such that no light exchange or energy exchange occurs between the plurality of unit metapatterns 130U, and color separation and light collection occur independently for each unit metapattern 130U. In particular, in each of the first meta-region 131, the second meta-region 132, the third meta-region 133, and the fourth meta-region 134, the distribution of the cross-sectional areas or the distribution of the phase delays of the plurality of nanostructures NP is determined such that no light exchange or energy exchange occurs between the plurality of unit metapatterns 130U, and color separation and light collection occur independently for each unit metapattern 130U.

[0068] For example, the first meta-region 131 is configured to send light in the second wavelength band among the incident light to the second pixel 112 corresponding to the second meta-region 132 along the +X direction, and send light in the third wavelength band among the incident light to the third pixel 113 corresponding to the third meta-region 133 along the -Y direction. The first meta-region 131 does not send the incident light in the -X direction or the +Y direction. For this purpose, among the plurality of nanostructures NP of the first meta-region 131, the nanostructures NP that are further adjacent to the second meta-region 132 within the same unit meta-pattern as the unit meta-pattern to which the first meta-region 131 belongs, and the nanostructures NP that are further adjacent to the third meta-region 133 within the same unit meta-pattern can be configured to have a greater phase delay of light than that by other nanostructures NP.

[0069] Referring to both FIGS. 5 and 6, the first meta-region 131 includes the first to seventh nanostructures NP1 to NP7. In FIG. 6, the nanostructures represented by the same reference numerals can have the same cross-sectional area. The nanostructures represented by different reference numerals are independent of each other and may have different cross-sectional areas from each other or the same cross-sectional area from each other depending on the design. Within the first meta-region 131, the phase delay of light by the first nanostructure NP1 disposed at the center, and the fifth nanostructure NP5, the sixth nanostructure NP6, and the seventh nanostructure NP7 adjacent to the second meta-region 132 and the third meta-region 133 within the same unit meta-pattern as the unit meta-pattern to which the first meta-region 131 belongs is greater than the phase delay of light by the second nanostructure NP2, the third nanostructure NP3, and the fourth nanostructure NP4 adjacent to a unit meta-pattern different from the unit meta-pattern to which the first meta-region 131 belongs.

[0070] FIG. 5 exemplarily shows that the cross-sectional areas of the first nanostructure NP1, the fifth nanostructure NP5, the sixth nanostructure NP6, and the seventh nanostructure NP7 are larger than those of the second nanostructure NP2, the third nanostructure NP3, and the fourth nanostructure NP4. However, it is not necessarily limited thereto. The phase delay is usually represented by a value wrapped by 2π. That is, for a phase delay greater than 2π, it is represented by the remaining value of 2π. For example, 2.5π is the same as 0.5π, and 5π is the same as π. Therefore, within 0 to 2π, the phase delay of the nanostructure is proportional to the cross-sectional area, but the phase delay of the nanostructure having a cross-sectional area larger than the cross-sectional area corresponding to 2π is wrapped by 2π and is smaller than 2π. If the cross-sectional areas for embodying the phase delays of the second nanostructure NP2, the third nanostructure NP3, and the fourth nanostructure NP4 are excessively small and it is difficult to manufacture the nano-optical lens array 130, the cross-sectional areas of the second nanostructure NP2, the third nanostructure NP3, and the fourth nanostructure NP4 can also be increased so as to embody a phase delay obtained by adding 2π to the target phase delay. In this case, the cross-sectional areas of the second nanostructure NP2, the third nanostructure NP3, and the fourth nanostructure NP4 are larger than those of at least one of the first nanostructure NP1, the fifth nanostructure NP5, the sixth nanostructure NP6, and the seventh nanostructure NP7.

[0071] Since the first meta-region 131 sends light in the +X direction in the second wavelength band, sends light in the -Y direction in the third wavelength band, and does not send light in the -X and +Y directions, the cross-sectional area distribution or phase delay distribution of the first to seventh nanostructures NP1 to NP7 in the first meta-region 131 is not symmetric in any direction with respect to the center of the first meta-region 131. That is, the cross-sectional area distribution or phase delay distribution of the first to seventh nanostructures NP1 to NP7 in the first meta-region 131 is asymmetric in the first direction, the second direction, the first diagonal DG1 direction, and the second diagonal DG2 direction with respect to the center of the first meta-region 131. Therefore, within the first meta-region 131, at least one pair of nanostructures out of a plurality of pairs of two nanostructures facing each other in the second direction with respect to the horizontal center line passing through the center of the first meta-region 131 along the first direction have different cross-sectional areas from each other, and at least one pair of nanostructures out of a plurality of pairs of two nanostructures facing each other in the first direction with respect to the vertical center line passing through the center of the first meta-region 131 along the second direction have different cross-sectional areas from each other, and at least one pair of nanostructures out of a plurality of pairs of two nanostructures facing each other with respect to the first diagonal DG1 passing through the center of the first meta-region 131 have different cross-sectional areas from each other, and at least one pair of nanostructures out of a plurality of pairs of two nanostructures facing each other with respect to the second diagonal DG2 passing through the center of the first meta-region 131 can have different cross-sectional areas from each other.

[0072] For example, the third nanostructure NP3 and the sixth nanostructure NP6 that face each other in the second direction with respect to the first nanostructure NP1 can have different cross-sectional areas from each other, and the fourth nanostructure NP4 and the seventh nanostructure NP7 that face each other in the second direction with respect to the fifth nanostructure NP5 can have different cross-sectional areas from each other. Also, the third nanostructure NP3 and the fifth nanostructure NP5 that face each other in the first direction with respect to the first nanostructure NP1 can have different cross-sectional areas from each other, and the fourth nanostructure NP4 and the seventh nanostructure NP7 that face each other in the first direction with respect to the sixth nanostructure NP6 can have different cross-sectional areas from each other. Further, the third nanostructure NP3 and the fifth nanostructure NP5, the second nanostructure NP2 and the seventh nanostructure NP7, and the third nanostructure NP3 and the sixth nanostructure NP6 that face each other with reference to the first diagonal DG1 can have different cross-sectional areas from each other, and the fifth nanostructure NP3 and the sixth nanostructure NP6 that face each other with reference to the second diagonal DG2 can have different cross-sectional areas from each other. However, two third nanostructures NP3 that are adjacent to a unit metapattern different from the unit metapattern to which the first meta-region 131 belongs and face each other with reference to the second diagonal DG2 can have the same cross-sectional area, and two fourth nanostructures NP4 that are adjacent to a unit metapattern different from the unit metapattern to which the first meta-region 131 belongs and face each other with reference to the second diagonal DG2 can also have the same cross-sectional area.

[0073] The second meta-region 132 is configured to send light in the first wavelength band of the incident light to the first pixel 111 corresponding to the first meta-region 131 along the -X direction and to the fourth pixel 114 corresponding to the fourth meta-region 134 along the -Y direction, and to send light in the third wavelength band of the incident light to the third pixel 113 corresponding to the third meta-region 133 along the -X direction and the -Y direction. The second meta-region 132 does not send the incident light in the +X direction or the +Y direction. For this purpose, among the plurality of nanostructures NP in the second meta-region 132, the nanostructures NP that are further adjacent to the first meta-region 131 within the same unit metapattern as the unit metapattern to which the second meta-region 132 belongs, and the nanostructures NP that are further adjacent to the fourth meta-region 134 within the same unit metapattern are configured to have a greater phase delay than the phase delay of light by other nanostructures NP.

[0074] Referring to both FIGS. 5 and 6, the second meta-region 132 includes the eighth to thirteenth nanostructures NP8 to NP 13 . Within the second meta-region 132, the eighth nanostructure NP8 disposed at the center and the twelfth nanostructure NP 12 and the thirteenth nanostructure NP 13 adjacent to the first meta-region 131 and the fourth meta-region 134 in the same unit meta-pattern cause a phase delay of light that is greater than that caused by the ninth nanostructure NP9, the tenth nanostructure NP 10 , and the eleventh nanostructure NP 11 adjacent to unit meta-patterns different from the unit meta-pattern to which the second meta-region 132 belongs. In FIG. 5, illustratively, the cross-sectional areas of the eighth nanostructure NP8, the twelfth nanostructure NP 12 , and the thirteenth nanostructure NP 13 are shown to be larger than the cross-sectional areas of the ninth nanostructure NP9, the tenth nanostructure NP 10 , and the eleventh nanostructure NP 11 . However, as described above, if the cross-sectional areas for realizing the phase delay of the ninth nanostructure NP9, the tenth nanostructure NP 10 , and the eleventh nanostructure NP 11 are excessively small and it is difficult to manufacture the nano-optical lens array 130, the cross-sectional areas of the ninth nanostructure NP9, the tenth nanostructure NP 10 , and the eleventh nanostructure NP 11 are larger than the cross-sectional areas of at least one of the eighth nanostructure NP8, the twelfth nanostructure NP 12 , and the thirteenth nanostructure NP 13 .

[0075] Since the second meta-region 132 sends light in the -X direction and the -Y direction in the first wavelength band and does not send light in the +X direction and the +Y direction, the cross-sectional area distribution or phase delay distribution of the eighth to thirteenth nanostructures NP8 to NP 13 in the second meta-region 132 is symmetric with respect to the first diagonal DG1 direction and asymmetric in the remaining directions. For example, the eighth to thirteenth nanostructures NP8 to NP 13The cross-sectional area distribution or the phase delay distribution is asymmetric in the first direction, the second direction, and the second diagonal DG2 direction with respect to the center of the second meta-region 132. Therefore, within the second meta-region 132, at least one pair of a plurality of pairs of nano-structures facing each other in the second direction with respect to the horizontal center line passing through the center of the second meta-region 132 along the first direction have different cross-sectional areas from each other, and at least one pair of a plurality of pairs of nano-structures facing each other in the first direction with respect to the vertical center line passing through the center of the second meta-region 132 along the second direction have different cross-sectional areas from each other. Two nano-structures facing each other with respect to the first diagonal DG1 passing through the center of the second meta-region 132 have the same cross-sectional area, and at least one pair of a plurality of pairs of nano-structures facing each other with respect to the second diagonal DG2 passing through the center of the second meta-region 132 can have different cross-sectional areas from each other.

[0076] For example, two 10th nano-structures NP facing each other with respect to the first diagonal DG1 10 have the same cross-sectional area, two 11th nano-structures NP 11 have the same cross-sectional area, and two 12th nano-structures NP 12 can have the same cross-sectional area. On the other hand, the 10th nano-structure NP 10 and the 12th nano-structure NP facing each other with respect to the second diagonal DG2 12 , and the 9th nano-structure NP9 and the 12th nano-structure NP 13 can have different cross-sectional areas from each other. Also, the 10th nano-structure NP 10 and the 12th nano-structure NP facing the 8th nano-structure NP8 in the second direction 12 have different cross-sectional areas from each other, and the 11th nano-structure NP 12 and the 13th nano-structure NP facing the 12th nano-structure NP 11 in the second direction can have different cross-sectional areas from each other. Also, the 12th nano-structure NP 13 and the 10th nano-structure NP facing the 8th nano-structure NP8 in the first direction 12 have different cross-sectional areas from each other, and the 12th nano-structure NP 10 ​12 A 13th nanostructure NP facing the first direction with respect to 13 and an 11th nanostructure NP 11 can have different cross-sectional areas from each other.

[0077] The third meta-region 133 is configured to send light in the first wavelength band among the incident light to the first pixel 111 corresponding to the first meta-region 131 along the +Y direction, send it to the fourth pixel 114 corresponding to the fourth meta-region 134 along the +X direction, and send light in the second wavelength band among the incident light to the second pixel 112 corresponding to the second meta-region 132 along the +X direction and the +Y direction. The third meta-region 133 does not send the incident light in the -X direction or the -Y direction. For this purpose, among the plurality of nanostructures NP in the third meta-region 133, the nanostructure NP further adjacent to the first meta-region 131 within the same unit meta-pattern as the unit meta-pattern to which the third meta-region 133 belongs, and the nanostructure NP further adjacent to the fourth meta-region 134 within the same unit meta-pattern are configured to have a phase delay even larger than the phase delay of light by other nanostructures NP.

[0078] Referring to both FIGS. 5 and 6, the third meta-region 133 includes 14th to 19th nanostructures NP 14 ~NP 19 The 14th nanostructure NP arranged at the center within the third meta-region 133 14 , and the 18th nanostructure NP adjacent to the first meta-region 131 and the fourth meta-region 134 within the same unit meta-pattern 18 and the 19th nanostructure NP 19 can have a phase delay even larger than that of the 15th nanostructure NP 15 , the 16th nanostructure NP 16 , and the 17th nanostructure NP 17 adjacent to a unit meta-pattern different from the unit meta-pattern to which the third meta-region 133 belongs. In FIG. 5, exemplarily, the cross-sectional areas of the 14th nanostructure NP 14 , the 18th nanostructure NP 18 , and the 19th nanostructure NP 19 are larger than those of the 15th nanostructure NP 15 , the 16th nanostructure NP16 and the 17th nanostructure NP 17 is shown to be larger than the cross-sectional area of. However, as described above, the 15th nanostructure NP 15 , the 16th nanostructure NP 16 , and the 17th nanostructure NP 17 has an excessively small cross-sectional area for realizing the phase delay, and when it is difficult to manufacture the nano-optical lens array 130, the 15th nanostructure NP 15 , the 16th nanostructure NP 16 , and the 17th nanostructure NP 17 has a cross-sectional area larger than that of at least one of the 14th nanostructure NP 14 , the 18th nanostructure NP 18 , and the 19th nanostructure NP 19 .

[0079] Since the third meta-region 133 sends light in the +X direction and the +Y direction within the first wavelength band and does not send light in the -X direction and the -Y direction, the cross-sectional area distribution or phase delay distribution of the 14th to 19th nanostructures NP 14 ~NP 19 in the third meta-region 133 is symmetric with respect to the first diagonal DG1 direction and asymmetric in the remaining directions. For example, the 14th to 19th nanostructures NP 14 ~NP 19The cross-sectional area distribution or phase delay distribution is asymmetric in the first direction, the second direction, and the second diagonal DG2 direction with respect to the center of the third meta-region 133. Therefore, within the third meta-region 133, at least one pair of a plurality of pairs of nanostructures facing each other in the second direction with respect to the horizontal center line passing through the center of the third meta-region 133 in the first direction have different cross-sectional areas from each other, and at least one pair of a plurality of pairs of nanostructures facing each other in the first direction with respect to the vertical center line passing through the center of the third meta-region 133 in the second direction have different cross-sectional areas from each other, two nanostructures facing each other with respect to the first diagonal DG1 passing through the center of the third meta-region 133 have the same cross-sectional area, and at least one pair of a plurality of pairs of nanostructures facing each other with respect to the second diagonal DG2 passing through the center of the third meta-region 133 can have different cross-sectional areas from each other.

[0080] For example, two 16th nanostructures NP facing each other with respect to the first diagonal DG1 16 have the same cross-sectional area, two 17th nanostructures NP 17 have the same cross-sectional area, and two 18th nanostructures NP 18 can have the same cross-sectional area. On the other hand, the 16th nanostructure NP 16 and the 18th nanostructure NP 18 facing each other with respect to the second diagonal DG2, and the 15th nanostructure NP 15 and the 19th nanostructure NP 19 can have different cross-sectional areas from each other. Also, the 16th nanostructure NP 14 and the 18th nanostructure NP 16 facing each other in the second direction with respect to the 14th nanostructure NP 18 have different cross-sectional areas from each other, and the 17th nanostructure NP 18 and the 19th nanostructure NP 17 facing each other in the second direction with respect to the 18th nanostructure NP 19 can have different cross-sectional areas from each other. Also, the 16th nanostructure NP 14 and the 18th nanostructure NP 16and the 18th nanostructure NP 18 have different cross-sectional areas from each other, and the 18th nanostructure NP 18 and the 17th nanostructure NP facing the first direction with respect to the 18th nanostructure NP 17 and the 19th nanostructure NP 19 can have different cross-sectional areas from each other.

[0081] The fourth meta-region 134 is configured to send the light in the second wavelength band of the incident light to the second pixel 112 corresponding to the second meta-region 132 along the +Y direction, and send the light in the third wavelength band of the incident light to the third pixel 113 corresponding to the third meta-region 133 along the -X direction. The first meta-region 131 does not send the incident light in the +X direction or the -Y direction. For this purpose, among the plurality of nanostructures NP in the fourth meta-region 134, the nanostructure NP further adjacent to the second meta-region 132 within the same unit meta-pattern as the unit meta-pattern to which the fourth meta-region 134 belongs, and the nanostructure NP further adjacent to the third meta-region 133 within the same unit meta-pattern are configured to have a phase delay even larger than the phase delay of the light by other nanostructures NP.

[0082] Referring to both FIGS. 5 and 6, the fourth meta-region 134 includes the 20th to 26th nanostructures NP 20 ~NP 26 . Within the fourth meta-region 134, the 20th nanostructure NP disposed at the center 20 , and the 24th nanostructure NP adjacent to the second meta-region 132 and the third meta-region 133 within the same unit meta-pattern 24 , the 25th nanostructure NP 25 and the 26th nanostructure NP 26 can have a phase delay even larger than that of the 21st nanostructure NP 21 , the 22nd nanostructure NP 22 and the 23rd nanostructure NP 23 adjacent to different unit meta-patterns from the unit meta-pattern to which the fourth meta-region 134 belongs. In FIG. 5, illustratively, the 20th nanostructure NP 20 , the 24th nanostructure NP 24 , the 25th nanostructure NP 25 , and the 26th nanostructure NP26 has a cross-sectional area larger than that of the 21st nanostructure NP 21 , the 22nd nanostructure NP 22 , and the 23rd nanostructure NP 23 . However, as described above, if the cross-sectional areas of the 21st nanostructure NP 21 , the 22nd nanostructure NP 22 , and the 23rd nanostructure NP 23 for embodying the phase delay are excessively small and it is difficult to manufacture the nano-optical lens array 130, the cross-sectional areas of the 21st nanostructure NP 21 , the 22nd nanostructure NP 22 , and the 23rd nanostructure NP 23 are larger than those of at least one of the 20th nanostructure NP 20 , the 24th nanostructure NP 24 , the 25th nanostructure NP 25 , and the 26th nanostructure NP 26 .

[0083] Since the 4th meta-region 134 sends light in the +Y direction in the 2nd wavelength band and sends light in the -X direction in the 3rd wavelength band and does not send light in the +X direction and the -Y direction, the cross-sectional area distribution or the phase delay distribution of the 20th to 26th nanostructures NP 20 ~NP 26 in the 4th meta-region 134 is not symmetric in any direction with respect to the center of the 4th meta-region 134. That is, the 20th to 26th nanostructures NP 20 ~NP 26The cross-sectional area distribution or phase delay distribution is asymmetric in all of the first direction, the second direction, the first diagonal DG1 direction, and the second diagonal DG2 direction with respect to the center of the fourth meta-region 134. Therefore, within the fourth meta-region 134, at least one pair of a plurality of pairs of two nanostructures facing each other in the second direction with respect to the horizontal center line passing through the center of the fourth meta-region 134 in the first direction have different cross-sectional areas from each other, and at least one pair of a plurality of pairs of two nanostructures facing each other in the first direction with respect to the vertical center line passing through the center of the fourth meta-region 134 in the second direction have different cross-sectional areas from each other, at least one pair of a plurality of pairs of two nanostructures facing each other with respect to the first diagonal DG1 passing through the center of the fourth meta-region 134 have different cross-sectional areas from each other, and at least one pair of a plurality of pairs of two nanostructures facing each other with respect to the second diagonal DG2 passing through the center of the fourth meta-region 134 can have different cross-sectional areas from each other.

[0084] For example, the 22nd nanostructure NP 20 facing the second direction with respect to the 20th nanostructure NP 22 and the 24th nanostructure NP 24 have different cross-sectional areas from each other, and the 23rd nanostructure NP 25 facing the second direction with respect to the 25th nanostructure NP 23 and the 26th nanostructure NP 26 can have different cross-sectional areas from each other. The 22nd nanostructure NP 20 facing the first direction with respect to the 20th nanostructure NP 22 and the 25th nanostructure NP 25 have different cross-sectional areas from each other, and the 23rd nanostructure NP 24 facing the first direction with respect to the 24th nanostructure NP 23 and the 26th nanostructure NP 26 can have different cross-sectional areas from each other. Also, the 22nd nanostructure NP 22 and the 24th nanostructure NP 24 facing each other with respect to the first diagonal DG1, the 21st nanostructure NP 21 and the 26th nanostructure NP 26, the 22nd nanostructure NP 22 and the 25th nanostructure NP 25 have different cross-sectional areas, and the 24th nanostructure NP 24 and the 25th nanostructure NP 25 opposite to each other with respect to the second diagonal DG2 can have different cross-sectional areas. However, two 22nd nanostructure NPs 22 adjacent to unit metapatterns different from the unit metapattern to which the fourth meta-region 134 belongs and opposite to each other with respect to the second diagonal DG2 can have the same cross-sectional area, and two 23rd nanostructure NPs 23 adjacent to unit metapatterns different from the unit metapattern to which the fourth meta-region 134 belongs and opposite to each other with respect to the second diagonal DG2 can also have the same cross-sectional area.

[0085] As a result, within one unit metapattern 130U, the nanostructure NPs arranged at the center of the unit metapattern 130U are configured to have a larger phase delay than the nanostructure NPs arranged at the edge of the unit metapattern 130U. In particular, the nanostructure NPs arranged directly adjacent to other unit metapatterns 130U are configured to have the smallest phase delay compared to other nanostructure NPs.

[0086] On the other hand, the first meta-region 131 and the fourth meta-region 134 are asymmetric with respect to the first diagonal DG1 passing through the center of the unit metapattern 130U. For example, at least one pair of nanostructures among a plurality of pairs of nanostructures in the first meta-region 131 and the fourth meta-region 134 that are opposite to each other with respect to the first diagonal DG1 passing through the center of the unit metapattern 130U can have different cross-sectional areas. In the example of FIG. 5, the 5th nanostructure NP5 in the first meta-region 131 and the 24th nanostructure NP 24 in the fourth meta-region 134 that are opposite to each other with respect to the first diagonal DG1 have different cross-sectional areas, and the 6th nanostructure NP6 in the first meta-region 131 and the 25th nanostructure NP 25They can have different cross-sectional areas from each other. The remaining nanostructures in the first meta-region 131 and the remaining nanostructures in the fourth meta-region 134 that face each other with respect to the first diagonal DG1 passing through the center of the unit meta-pattern 130U can have the same cross-sectional area. As a result, when looking at the unit meta-pattern 130U as a whole, the cross-sectional area distribution of the nanostructures arranged within the unit meta-pattern 130U is asymmetric in all of the first direction, the second direction, the first diagonal DG1 direction, and the second diagonal DG2 direction with respect to the center of the unit meta-pattern 130U.

[0087] Also, the first meta-region 131 and the fourth meta-region 134 are in a 180° rotational symmetry relationship with respect to the center of the unit meta-pattern 130U. In particular, the cross-sectional area distribution or the phase delay distribution of the plurality of nanostructures NP in the first meta-region 131 and the cross-sectional area distribution or the phase delay distribution of the plurality of nanostructures NP in the fourth meta-region 134 are in a 180° rotational symmetry relationship with respect to the center of the unit meta-pattern 130U. That is, if the first meta-region 131 or the fourth meta-region 134 is rotated 180° about the point where the vertex of the first meta-region 131 and the vertex of the fourth meta-region 134 coincide, the form of the nanostructures in the first meta-region 131, the form of the nanostructures in the fourth meta-region 134, and the cross-sectional area become the same. In this case, in the example of FIG. 5, the fifth nanostructure NP5 in the first meta-region 131 and the twenty-fifth nanostructure NP 25 in the fourth meta-region 134 have the same cross-sectional area, and the sixth nanostructure NP6 in the first meta-region 131 and the twenty-fourth nanostructure NP 24 in the fourth meta-region 134 can have the same cross-sectional area.

[0088] FIG. 7 is a distribution diagram exemplarily showing the phase distribution of blue light that has passed through the nano-optical lens array 130, and FIG. 8 is a graph exemplarily showing the phase distribution of blue light in the A1-A1' cross section of FIG. 7. Referring to FIGS. 7 and 8, the blue light that has passed through the nano-optical lens array 130 can have a phase distribution that is largest at the center of the second meta-region 132 and decreases in a direction away from the center of the second meta-region 132. Specifically, at the position immediately after passing through the nano-optical lens array 130, that is, on the lower surface of the nano-optical lens array 130, the phase of the blue light is largest at the center of the second meta-region 132 and gradually becomes smaller concentrically as it moves away from the center of the second meta-region 132. Also, the phase distribution of the blue light is continuous within one unit meta-pattern, but the phase distribution of the blue light is discontinuous at the boundary between two adjacent unit meta-patterns.

[0089] As a result, within one unit meta-pattern, among the incident light incident on the second meta-region 132 and the incident light incident on the first meta-region 131, the third meta-region 133, and the fourth meta-region 134 around the second meta-region 132, the blue light is condensed onto the second pixel 112 corresponding to the second meta-region 132. That is, the blue light incident on one unit meta-pattern is condensed onto the second pixel 112 corresponding to the second meta-region 132 of that unit meta-pattern. However, since the phase distribution of the blue light is discontinuous at the boundary between two adjacent unit meta-patterns, the blue light incident on one unit meta-pattern is not condensed onto the second pixel 112 corresponding to another unit meta-pattern adjacent to that unit meta-pattern.

[0090] FIG. 9 is a distribution diagram exemplarily showing the phase distribution of green light that has passed through the nano-optical lens array 130. FIG. 10A is a graph exemplarily showing the phase distribution of green light in the A2-A2' cross section of FIG. 9, and FIG. 10B is a graph exemplarily showing the phase distribution of green light in the A3-A3' cross section of FIG. 9. Referring to FIGS. 9, 10A, and 10B, the green light that has passed through the nano-optical lens array 130 can have a phase distribution that is largest at the centers of the first meta-region 131 and the fourth meta-region 134 and decreases in a direction away from the centers of the first and fourth meta-regions 131, 134. Specifically, at the position immediately after passing through the nano-optical lens array 130, that is, on the lower surface of the nano-optical lens array 130, the phase of the green light is largest at the centers of the first meta-region 131 and the fourth meta-region 134, and gradually becomes smaller concentrically as it moves away from the centers of the first meta-region 131 and the fourth meta-region 134. Also, the phase distribution of the green light is continuous within one unit meta-structure, but the phase distribution of the green light is discontinuous at the boundary between two adjacent unit meta-structures.

[0091] As a result, the green light incident on one unit meta-pattern is focused on the first pixel 111 corresponding to the first meta-region 131 of the unit meta-pattern and the fourth pixel 114 corresponding to the fourth meta-region 134. However, since the phase distribution of the green light is discontinuous at the boundary between two adjacent unit meta-patterns, the green light incident on one unit meta-pattern is not focused on the first pixel 111 and the fourth pixel 114 corresponding to the other unit meta-pattern adjacent to the unit meta-pattern.

[0092] FIG. 11 is a distribution diagram exemplarily showing the phase distribution of red light that has passed through the nano-optical lens array 130, and FIG. 12 is a graph exemplarily showing the phase distribution of red light in the A4-A4' cross section of FIG. 11. Referring to FIGS. 11 and 12, the red light that has passed through the nano-optical lens array 130 can have a phase distribution that is largest at the center of the third meta-region 133 and decreases in a direction away from the center of the third meta-region 133. Specifically, at the position immediately after passing through the nano-optical lens array 130, that is, on the lower surface of the nano-optical lens array 130, the phase of the red light is largest at the center of the third meta-region 133 and gradually becomes smaller concentrically as it moves away from the center of the third meta-region 133. Also, the phase distribution of the red light is continuous within one unit meta-pattern, but the phase distribution of the red light is discontinuous at the boundary between two adjacent unit meta-patterns.

[0093] As a result, the red light incident on one unit meta-pattern is focused on the third pixel 113 corresponding to the third meta-region 133 of that unit meta-pattern. However, since the phase distribution of the red light is discontinuous at the boundary between two adjacent unit meta-patterns, the red light incident on one unit meta-pattern is not focused on the third pixel 113 corresponding to another unit meta-pattern adjacent to that unit meta-pattern.

[0094] FIG. 13 is a graph exemplarily showing a comparison between the light utilization efficiency of the image sensor 1000 according to the embodiment and the light utilization efficiency of the image sensor according to the comparative example. In FIG. 13, the graphs represented by "POR R", "POR G", and "POR B" indicate the quantum efficiency with respect to red light, green light, and blue light in the image sensor according to the comparative example when a general color filter and microlenses are arranged on the sensor substrate. In the comparative example, it is assumed that one microlens is arranged for one unit pixel pattern of the sensor substrate. Also, in FIG. 13, the graphs represented by "MP R", "MP G", and "MP B" indicate the quantum efficiency with respect to red light, green light, and blue light in the image sensor 1000 according to the embodiment. Referring to FIG. 13, since the nano-optical lens array 130 separates colors without absorbing or reflecting the incident light and condenses the color-separated light onto each pixel, the image sensor 1000 according to the embodiment can have improved light utilization efficiency for blue light, green light, and red light compared to the image sensor according to the comparative example. Therefore, since it is possible to reduce the size of one pixel of the image sensor 1000 or the size of the independent light-sensing cells within the pixel, an image sensor 1000 with a higher resolution can be provided.

[0095] Further, according to the present embodiment, since there is no energy exchange or light exchange between adjacent unit meta-patterns 130U of the nano-optical lens array 130, it is possible to reduce the degradation of spatial resolution while improving the light utilization efficiency. For example, the light that is color-separated and condensed within one unit meta-pattern includes only the spatial information of the light incident on that unit meta-pattern and does not include the spatial information of the light incident on other adjacent unit meta-patterns. Therefore, since light having different spatial information does not mix and enter one pixel, each pixel can output a signal having unique spatial information.

[0096] In addition, the outputs of the pixels within the unit pixel pattern corresponding to one unit meta-pattern of the nano-optical lens array 130 can all have the same spatial information regardless of color. For example, the green light signals output from the first pixel 111 and the fourth pixel 114 within the unit pixel pattern corresponding to one unit meta-pattern, the blue light signal output from the second pixel 112, and the red light signal output from the third pixel 113 can all have the same spatial information. In this case, the green light signal, blue light signal, and red light signal output from all the pixels of the image sensor 1000 or the pixel array 1100 can all have spatial information for the entire area of the image sensor 1000 or the pixel array 1100 without gaps. Therefore, in an existing image sensor having a Bayer pattern structure, operations such as demosaicking or color filter array interpolation for filling the empty spatial information between the same-color pixels can be omitted in the video processing process of generating a video using the signals output from the image sensor 1000 according to the embodiment. Thereby, the amount of computation and power consumption of the video signal processing processor of the device including the image sensor 1000 or the processor within the image sensor 1000 can be reduced.

[0097] FIG. 14 is a plan view exemplarily showing the arrangement of a plurality of nanostructures NP in one unit meta-pattern of the nano-optical lens array 130 according to another embodiment. The cross-sectional areas of the plurality of nanostructures NP within the unit meta-pattern 130U' shown in FIG. 14 are different from the cross-sectional areas of the plurality of nanostructures NP within the unit meta-pattern 130U shown in FIG. 5. However, the nano-optical lens array 130 including the unit meta-pattern 130U' shown in FIG. 14 can also implement a phase distribution as shown in FIGS. 7 to 12. As described above, since the phase delay is represented by a value wrapped by 2π, considering the manufacturing conditions of the nanostructures NP and the like, it is possible to design various other arrangement forms or various other cross-sectional area distributions of the nanostructures NP that can implement the same phase distribution.

[0098] Even if the array form or cross-sectional area distribution of the nanostructures NP changes, the conditions described with reference to FIGS. 5 and 6 can be satisfied. For example, in the first meta-region 131 and the fourth meta-region 134, the cross-sectional area distribution or phase delay distribution of the plurality of nanostructures NP is asymmetric in the first direction, the second direction, the first diagonal DG1 direction, and the second diagonal DG2 direction with respect to the center of each meta-region. Further, the first meta-region 131 and the fourth meta-region 134 are in a 180° rotational symmetry relationship with respect to the center of the unit meta-pattern 130U'. In the second meta-region 132 and the fourth meta-region 134, the cross-sectional area distribution or phase delay distribution of the plurality of nanostructures NP is symmetric with respect to the first diagonal DG1 direction with respect to the center of each meta-region, and is asymmetric in the first direction, the second direction, and the second diagonal DG2 direction.

[0099] FIGS. 15A and 15B are cross-sectional views schematically showing the configuration of a pixel array of the image sensor 1000 according to another embodiment. Referring to FIGS. 15A and 15B, the pixel array 1100a according to another embodiment may further include a color filter array 140 provided between the sensor substrate 110 and the spacer layer 120. The color filter array 140 includes a plurality of color filters that transmit light in a specific wavelength band and absorb light in other wavelength bands. For example, the color filter array 140 includes a first color filter 141 and a fourth color filter 144 that transmit light in a first wavelength band and absorb light in other wavelength bands, a second color filter 142 that transmits light in a second wavelength band different from the first wavelength band and absorbs light in other wavelength bands, and a third color filter 143 that transmits light in a third wavelength band different from the first wavelength band and the second wavelength band and absorbs light in other wavelength bands.

[0100] The first color filter 141 is arranged to face the first pixel 111 along the third direction, the second color filter 142 is arranged to face the second pixel 112 along the third direction, the third color filter 143 is arranged to face the third pixel 113 along the third direction, and the fourth color filter 144 is arranged to face the fourth pixel 114 along the third direction. Thereby, the first pixel 111 can sense the light in the first wavelength band that has passed through the corresponding first color filter 141. The second pixel 112 can sense the light in the second wavelength band that has passed through the corresponding second color filter 142, and the third pixel 113 can sense the light in the third wavelength band that has passed through the corresponding third color filter 143. The fourth pixel 114 can sense the light in the first wavelength band that has passed through the corresponding fourth color filter 144. In one example, the first color filter 141 and the fourth color filter 144 are green color filters that transmit green light, the second color filter 142 is a blue color filter that transmits blue light, and the third color filter 143 is a red color filter that transmits red light.

[0101] Since the incident light has already been considerably color-separated by the nano-optical lens array 130, even if the color filter array 140 is used, the absorption loss caused by the color filter array 140 is low. By using both the nano-optical lens array 130 and the color filter array 140 together, the color purity can be improved. If sufficient color separation occurs by the nano-optical lens array 130, the color filter array 140 can be omitted.

[0102] The first to fourth color filters 141, 142, 143, 144 of the color filter array 140 are made of an organic polymer material. For example, the first to fourth color filters 141, 142, 143, 144 may include a colorant, a binder resin, a polymer photoresist, and the like. In this case, the spacer layer 120 can serve as a planarization layer that provides a flat surface for forming the nano-optical lens array 130 on the color filter array 140. Further, the spacer layer 120 is suitable for being laminated on the color filter array 140 formed of an organic material and includes an organic polymer material that easily forms a flat surface. The organic polymer material forming the spacer layer 120 can have a property of being transparent to visible light. For example, the spacer layer 120 may include at least one organic polymer material among epoxy resin, polyimide, polycarbonate, polyacrylate, and polymethyl methacrylate (PMMA). The spacer layer 120 is formed on the color filter array 140 by, for example, a spin coating method and can have a flat upper surface through heat treatment.

[0103] FIG. 16 is a cross-sectional view schematically showing the configuration of a pixel array of the image sensor 1000 according to still another embodiment. Referring to FIG. 16, the pixel array 1100b may further include a plurality of isolation patterns 151 provided on the upper surface of the nano-optical lens array 130 in order to more surely ensure the optical separation between the plurality of unit meta-patterns of the nano-optical lens array 130. Each of the plurality of isolation patterns 151 may be disposed on a corresponding unit meta-pattern among the plurality of unit meta-patterns of the nano-optical lens array 130. That is, each of the plurality of isolation patterns 151 is provided so as to cover the first to fourth meta-regions 131, 132, 133, 134 of the corresponding unit meta-pattern. Although FIG. 16 shows an isolation pattern 151 covering the first and second meta-regions 131, 132, in a cross-section whose position is different from that of FIG. 16 in the second direction, the isolation pattern 151 can further cover the third and fourth meta-regions 133, 134. Also, each of the plurality of isolation patterns 151 can be separated from other adjacent isolation patterns 151. The isolation pattern 151 can have a flat upper surface. Such an isolation pattern 151 has a refractive index lower than that of the nanostructure NP and is formed of a material transparent to visible light. For example, the isolation pattern 151 may include materials such as PMMA, SOG, SiO2, Si3N4, and Al2O3. The thickness of each of the plurality of isolation patterns 151 in the third direction is determined in consideration of the size of each pixel of the image sensor 1000 and the like so that sufficient optical separation occurs between the plurality of unit meta-patterns of the nano-optical lens array 130.

[0104] FIG. 17 is a cross-sectional view schematically showing the configuration of the pixel array of the image sensor 1000 according to still another embodiment. Referring to FIG. 17, the pixel array 1100c may further include a plurality of isolation patterns 152 according to another example provided on the upper surface of the nano-optical lens array 130 in order to more surely ensure the optical separation between the plurality of unit meta-patterns of the nano-optical lens array 130. The arrangement and configuration of the isolation pattern 152 shown in FIG. 17 are the same as those of the isolation pattern 151 shown in FIG. 16. The isolation pattern 152 shown in FIG. 17 is different from the isolation pattern 151 shown in FIG. 16 in that it has an irregularly convex and concave upper surface. For example, the isolation pattern 152 is also a diffusion pattern that scatters and diffuses the light incident on the corresponding unit meta-pattern. Thereby, the identity of the spatial information between the signals output from the first to fourth pixels 111, 112, 113, 114 corresponding to each unit meta-pattern can be improved.

[0105] FIG. 18 is a cross-sectional view schematically showing the configuration of the pixel array of the image sensor 1000 according to still another embodiment. Referring to FIG. 18, the pixel array 1100d may further include a plurality of isolation patterns 153 according to still another example provided on the upper surface of the nano-optical lens array 130 in order to more surely ensure the optical separation between the plurality of unit meta-patterns of the nano-optical lens array 130. The arrangement of the isolation pattern 153 shown in FIG. 18 is the same as that of the isolation pattern 151 shown in FIG. 16. The isolation pattern 153 shown in FIG. 18 can have a convex upper surface so as to condense the incident light toward the corresponding unit pixel pattern among the plurality of unit pixel patterns of the sensor substrate 110. For example, the isolation pattern 153 is also a microlens that condenses the incident light toward the corresponding unit meta-pattern.

[0106] FIG. 19 is a cross-sectional view schematically showing the configuration of the pixel array of the image sensor 1000 according to still another embodiment. Referring to FIG. 19, the pixel array 1100e may include an inorganic color filter array 140a instead of the color filter array 140 shown in FIGS. 15A and 15B. The inorganic color filter array 140a includes a plurality of inorganic color filters having an inorganic lattice structure. Only the first inorganic color filter 141a corresponding to the first pixel 111 and the second inorganic color filter 142a corresponding to the second pixel 112 are shown in FIG. 19, but the inorganic color filter array 140a may further include a third inorganic color filter corresponding to the third pixel 113 and a fourth inorganic color filter corresponding to the fourth pixel 114 in a cross-section that is different in position from FIG. 19 in the second direction. When the pixel array 1100e includes the inorganic color filter array 140a, the spacer layer 120 may include a common transparent inorganic material such as SOG, SiO2, Si3N4, or Al2O3.

[0107] On the other hand, since the outputs of the first to fourth pixels 111, 112, 113, and 114 within one unit pixel pattern have the same spatial information, the image sensor 1000 according to the embodiment does not necessarily need to have a pixel array with a Bayer pattern structure. In a pixel array with a Bayer pattern structure, the lost spatial information is restored using the green pixels, which are the most numerous. However, in the image sensor 1000 according to the embodiment, there is substantially no loss of spatial information. Therefore, various forms of pixel arrays are possible depending on the use and characteristics of the image sensor 1000 without constraints on the pixel array. For example, FIGS. 20 to 22 exemplarily show various pixel arrays of the pixel array of the image sensor 1000 according to still another embodiment.

[0108] Referring to FIG. 20, one unit pixel pattern of the pixel array includes two blue pixels B, one green pixel G, and one red pixel R. The two blue pixels B are arranged along the first diagonal direction, and the green pixel G and the red pixel R are arranged along the second diagonal direction. The pixel array may also include a plurality of unit pixel patterns having such a configuration.

[0109] In this case, the two meta-regions of the nano-optical lens array 130 corresponding to the blue pixel B follow the rules related to the cross-sectional area distribution or phase delay distribution of the nanostructures NP in the first and fourth meta-regions 131 and 134 described in FIGS. 5 and 6. For example, in the two meta-regions of the nano-optical lens array 130 corresponding to the blue pixel B, the cross-sectional area distribution of the nanostructures is all asymmetric with respect to the first direction, the second direction, the first diagonal direction, and the second diagonal direction. Also, the two meta-regions of the nano-optical lens array 130 corresponding to the blue pixel B have a 180° rotational symmetry relationship based on the center of the unit meta-pattern.

[0110] The meta-regions of the nano-optical lens array 130 corresponding to the green pixel G and the red pixel R follow the rules related to the cross-sectional area distribution or phase delay distribution of the nanostructures NP in the second and third meta-regions 132 and 133 described in FIGS. 5 and 6. For example, in the meta-regions of the nano-optical lens array 130 corresponding to the green pixel G and the red pixel R, the cross-sectional area distribution or phase delay distribution of the nanostructures is symmetric with respect to the first diagonal direction based on the center of each meta-region and is asymmetric with respect to the first direction, the second direction, and the second diagonal direction.

[0111] Referring to FIG. 21, one unit pixel pattern of the pixel array includes one green pixel G, one cyan pixel C, one blue pixel B, and one red pixel R. In this case, in all the meta-regions of the nano-optical lens array 130 corresponding to the green pixel G, the cyan pixel C, the blue pixel B, and the red pixel R respectively, the cross-sectional area distribution of the nanostructures is all asymmetric with respect to the first direction, the second direction, the first diagonal direction, and the second diagonal direction.

[0112] Referring to FIG. 22, the pixel array includes a plurality of pixels having a hexagonal shape. For example, one unit pixel pattern of the pixel array may include seven hexagonal pixels. A white pixel W is disposed at the center of the unit pixel pattern, and two green pixels G, two blue pixels B, and two red pixels R are disposed in contact with the six sides of the white pixel W, respectively. In particular, pixels of the same hue are disposed on two opposite sides of the six sides of the white pixel W. For example, two green pixels G are respectively disposed on two opposite sides of the white pixel W, two blue pixels B are respectively disposed on the other two opposite sides of the white pixel W, and two red pixels R are respectively disposed on the remaining two opposite sides of the white pixel W.

[0113] As described above, the light that is color-separated and condensed within one unit metapattern includes only the spatial information of the light incident on that unit metapattern and does not include the spatial information of the light incident on other adjacent unit metapatterns. Also, a color signal output from pixels within one unit pixel pattern, for example, within one Bayer pattern, can represent the overall color of that unit pixel pattern. For example, a red light signal output from a red pixel within one unit pixel pattern represents the overall red light within the incident light incident on that unit pixel pattern. Similarly, a blue light signal from a blue pixel represents the overall blue light within the incident light incident on the unit pixel pattern. Also, the average of the green light signals respectively output from the two green pixels within one unit pixel pattern represents the overall green light within the incident light incident on that unit pixel pattern.

[0114] Therefore, even if there is a positional difference between the red pixels, green pixels, and blue pixels within one unit pixel pattern, the red light signal, green light signal, and blue light signal can have the same spatial information. Since the spatial information matches among the red light signal, green light signal, and blue light signal output from one unit pixel pattern, a high-quality color video can be obtained without performing a demosaicking process during video processing using the output of the pixel array 1100. Therefore, by using the image sensor 1000 according to the embodiment, the video processing process can be simplified.

[0115] FIG. 23 is a flowchart schematically showing a video processing process according to an embodiment. Referring to FIG. 23, in step S10, preprocessing can be performed on, for example, a video signal based on a Bayer pattern output from the pixel array 1100. For example, in the preprocessing step S10, black level compensation for compensating for inconsistencies in the black level due to dark current, defective pixels correction for compensating for signal loss due to defective pixels such as dead pixels, white balance adjustment, and other processes can be performed. Thereafter, digitized red video data, green video data, and blue video data can be generated respectively. Alternatively, digital video data can be generated according to the video format required by another device (e.g., a digital camera, a smartphone, a CCTV) external to the image sensor 1000.

[0116] When the preprocessing step S10 is completed, in step S11, noise removal can be performed on the digital video data. In the noise removal step S11, the original image can be estimated based on the preprocessed digital video data, and noise components included in the digital data can be removed.

[0117] After noise removal, in step S12, post-processing can be performed to improve the quality of the final video. For example, in the post-processing step S12, deblurring of blurred areas in the video, brightness adjustment for correcting very bright or dark areas in the video such as HDR (high dynamic range), color correction for adjusting colors according to the characteristics of the human eye by matching the color characteristics due to the sensor characteristics of the camera, and other processes can be performed.

[0118] After finally generating the video, in step S13, the final video can be displayed on a display panel or the like, or stored in a recording medium.

[0119] The preprocessing step S10 shown in FIG. 23 is performed by a processor within the image sensor 1000. Alternatively, it is also possible for a separate video processing processor included in another device external to the image sensor 1000 to receive the RAW video data from the image sensor 1000 and perform the preprocessing step S10. Further, the noise removal step S11 and the post-processing step S12 are performed by a separate video processing processor included in another device external to the image sensor 1000.

[0120] FIG. 24 shows an example of the video processing process by the image sensor 1000 in the preprocessing step S10 shown in FIG. 23. Referring to FIG. 24, analog bining can be performed for each unit pixel pattern in the pixel array 1100 to generate video data in various formats. In FIG. 24, for example, in the pixel array 1100 having a Bayer pattern structure, one Bayer pattern, which is a unit pixel pattern, is shown by a thick square. First, within one unit pixel pattern, the output of a red pixel (e.g., the third pixel 113), the outputs of two green pixels (e.g., the first pixel 111 and the fourth pixel 114), and the output of a blue pixel (e.g., the second pixel 112) can be added together to generate one luminance signal Y. Also, within one unit pixel pattern, the output of the two green pixels can be subtracted from the output of the red pixel to generate a first chrominance signal Cb, and the output of the two green pixels can be subtracted from the output of the blue pixel to generate a second chrominance signal Cr.

[0121] In FIG. 24, the height is the height of one unit pixel pattern, and the width is the width of one unit pixel pattern. Also, in FIG. 24, the widths and heights of the pixels of Height / 2 and Width / 2 are shown respectively. According to the embodiment, the luminance signal Y, the first color phase signal Cb, and the second color phase signal Cr can be directly generated from the pixel output without performing demosaicking processing on the output of the red pixel, the outputs of the two green pixels, and the output of the blue pixel. In this case, one luminance signal Y, one first color phase signal Cb, and one second color phase signal Cr are generated from one unit pixel pattern. Each of the luminance signal Y, the first color phase signal Cb, and the second color phase signal Cr thus generated may include spatial information for one unit pixel pattern.

[0122] Thereafter, the image sensor 1000 can convert the luminance signal Y, the first color phase signal Cb, and the second color phase signal Cr, which are analog signals, into digital signals and generate video data in various digital formats. For example, the image sensor 1000 can selectively generate and output to the outside video data having one of a plurality of different digital video formats, such as the YCbCr 444 format, the YCbCr 422 format, and the YCbCr 420 format, according to a request from another external device including the image sensor 1000. Alternatively, when the external device uses only one format, video data having only one fixed format among the YCbCr 444 format, the YCbCr 422 format, and the YCbCr 420 format can be generated and output to the outside.

[0123] The video processing described with reference to FIG. 24 can be performed, for example, by the output circuit 1030 in the image sensor 1000. The output circuit 1030 can generate a luminance signal Y, a first chrominance signal Cb, and a second chrominance signal Cr, which are analog signals, and can convert these signals into digital signals. Further, the output circuit 1030 may include a color formatter 1031 configured to selectively generate video data in a YCbCr 444 format, a YCbCr 422 format, or a YCbCr 420 format using the digitized luminance signal Y, the first chrominance signal Cb, and the second chrominance signal Cr.

[0124] FIGS. 25A, 25B, and 25C illustrate examples of the video formats illustrated in FIG. 24. First, referring to FIG. 25A, in the YCbCr 444 format, unit video data includes four luminance signals Y, four first chrominance signals Cb, and four second chrominance signals Cr. The four luminance signals Y, the four first chrominance signals Cb, and the four second chrominance signals Cr are obtained by combining the outputs of four adjacent unit pixel patterns. When the image sensor 1000 provides video data in the YCbCr 444 format to an external electronic device, the external electronic device can further process the video data in the YCbCr 444 format according to the application.

[0125] Referring to FIG. 25B, in the YCbCr 422 format, unit video data includes four luminance signals Y, two first chrominance signals Cb, and two second chrominance signals Cr. In the case of the YCbCr 422 format, in the YCbCr 444 format shown in FIG. 25A, two horizontally adjacent first chrominance signals Cb out of the four first chrominance signals Cb are averaged to obtain two first chrominance signals Cb. Also, in the YCbCr 444 format, two horizontally adjacent second chrominance signals Cr out of the four second chrominance signals Cr are averaged to obtain two second chrominance signals Cr. Such a YCbCr 422 format can be mainly used, for example, in still video that adopts the JPEG (joint photographic experts group) standard.

[0126] Referring to FIG. 25C, in the YCbCr 420 format, the unit video data includes four luminance signals Y, one first chrominance signal Cb, and one second chrominance signal Cr. In the case of the YCbCr 420 format, in the YCbCr 444 format shown in FIG. 25A, all four first chrominance signals Cb are averaged to obtain one first chrominance signal Cb, and all four second chrominance signals Cr are averaged to obtain one second chrominance signal Cr. Such a YCbCr 420 format can be mainly used, for example, in a video adopting the MPEG (Moving Picture Experts Group)-4 standard.

[0127] As described above, since the image sensor 1000 can perform video processing as described above without demosaicking, the amount of computation for video processing is reduced, the video processing speed is improved, and the power consumption of the image sensor 1000 can be reduced. Further, by outputting the video data in a specific video format through the video processing as described above by the image sensor 1000, the amount of computation can also be reduced in the processor of the external device including the image sensor 1000, and the operation speed of the external device can be improved.

[0128] FIG. 26 shows another example of the video processing procedure in the preprocessing stage shown in FIG. 23. In FIG. 26, the process of generating the luminance signal Y, the first color phase signal Cb, and the second color phase signal Cr is the same as described above with reference to FIG. 24. Referring to FIG. 26, the output circuit 1030 may include a color converter 1032 configured to perform a color conversion to generate a digitized RGB signal using the digitized luminance signal Y, the first color phase signal Cb, and the second color phase signal Cr. Generally, the human eye has non-linear characteristics and is more sensitive to luminance. Therefore, when directly converting the analog outputs of red, green, and blue pixels into digital signals, the hue of the generated video data does not match the color perception of the human eye. Also, when generating a digitized RGB signal after converting to the luminance signal Y, the first color phase signal Cb, and the second color phase signal Cr, the data processing amount can be further reduced. The image sensor 1000 can selectively perform one of the video processing procedures shown in FIG. 24 and FIG. 26 according to a request from an external device. For example, when the external device requests a digitized RGB signal, the image sensor 1000 can perform the video processing shown in FIG. 26.

[0129] The image sensor 1000 according to an embodiment can configure a camera module together with modular lenses of various performances and can be applied to various electronic devices.

[0130] FIG. 27 is a block diagram showing an example of an electronic device ED01 including an image sensor 1000. Referring to FIG. 27, in a network environment ED00, the electronic device ED01 can communicate with another electronic device ED02 via a first network ED98 (such as a short-range wireless communication network) or can further communicate with still another electronic device ED04 and / or a server ED08 via a second network ED99 (such as a long-range wireless communication network). The electronic device ED01 can communicate with the electronic device ED04 via the server ED08. The electronic device ED01 includes a processor ED20, a memory ED30, an input device ED50, an acoustic output device ED55, a display device ED60, an audio module ED70, a sensor module ED76, an interface ED77, a haptic module ED79, a camera module ED80, a power management module ED88, a battery ED89, a communication module ED90, a subscriber identification module ED96, and / or an antenna module ED97. Some of the components of the electronic device ED01 (such as the display device ED60) may be omitted, and other components may be added. Some of the components may also be implemented by one integrated circuit. For example, the sensor module ED76 (such as a fingerprint sensor, an iris sensor, an illuminance sensor) can be implemented by being incorporated into the display device ED60 (such as a display).

[0131] Processor ED20 can execute software (such as program ED40), control one or more other components (hardware, software components, etc.) of the electronic device ED01 connected to the processor ED20, and perform various data processing or operations. As part of the data processing or operation, the processor ED20 can load instructions and / or data received from other components (such as sensor module ED76, communication module ED90) into the volatile memory ED32, process the instructions and / or data stored in the volatile memory ED32, and store the result data in the non-volatile memory ED34. The processor ED20 includes a main processor ED21 (such as a central processing unit, application processor, etc.) and an auxiliary processor ED23 (such as a graphics processing unit, image signal processor, sensor hub processor, communication processor, etc.) that can operate independently or together with the main processor ED21. The auxiliary processor ED23 can use less power than the main processor ED21 and can perform specialized functions.

[0132] The auxiliary processor ED23 can control the functions and / or states related to some of the components (such as display device ED60, sensor module ED76, communication module ED90, etc.) of the electronic device ED01 instead of the main processor ED21 while the main processor ED21 is in an inactive state (sleep state), or together with the main processor ED21 while the main processor ED21 is in an active state (application execution state). The auxiliary processor ED23 (such as an image signal processor, communication processor, etc.) is also embodied as part of other functionally related components (such as camera module ED80, communication module ED90, etc.).

[0133] Memory ED30 can store various data required by components of the electronic device ED01 (such as the processor ED20, the sensor module ED76, etc.). The data may include, for example, software (such as the program ED40), as well as input data and / or output data related to the associated instructions. Memory ED30 includes a volatile memory ED32 and / or a non-volatile memory ED34.

[0134] Program ED40 is stored as software in memory ED30 and includes an operating system ED42, middleware ED44, and / or an application ED46.

[0135] Input device ED50 can receive instructions and / or data used by components of the electronic device ED01 (such as the processor ED20, etc.) from outside the electronic device ED01 (such as a user). Input device ED50 may include a microphone, a mouse, a keyboard, and / or a digital pen (such as a stylus pen).

[0136] The acoustic output device ED55 can output an acoustic signal to the outside of the electronic device ED01. The acoustic output device ED55 may include a speaker and / or a receiver. The speaker is used for general purposes such as multimedia playback or recording playback, and the receiver is used for receiving incoming calls. The receiver may be coupled to a part of the speaker or may be embodied as an independent separate device.

[0137] Display device ED60 can visually provide information to the outside of the electronic device ED01. Display device ED60 may include a display, a hologram device, or a projector, and a control circuit for controlling the device. Display device ED60 includes a touch circuit (Touch Circuitry) set to sense touch and / or a sensor circuit (such as a pressure sensor) set to measure the intensity of the force generated by touch.

[0138] The audio module ED70 can convert sound into an electrical signal or convert an electrical signal into sound. The audio module ED70 can acquire sound via the input device ED50, or output sound via the speakers and / or headphones of the audio output device ED55 and / or other electronic devices (such as the electronic device ED02) directly or wirelessly connected to the electronic device ED01.

[0139] The sensor module ED76 can sense the operating state (such as power, temperature) of the electronic device ED01 or the external environmental state (such as the user state), and generate an electrical signal and / or data value corresponding to the sensed state. The sensor module ED76 may include a gesture sensor, a gyro sensor, a barometric pressure sensor, a magnetic sensor, an acceleration sensor, a grip sensor, a proximity sensor, a color sensor, an IR (Infrared) sensor, a biometric sensor, a temperature sensor, a humidity sensor, and / or an illuminance sensor.

[0140] The interface ED77 can support one or more specified protocols that can be used for the electronic device ED01 to be directly or wirelessly connected to other electronic devices (such as the electronic device ED02). The interface ED77 may include an HDMI (High Definition Multimedia Interface), a USB (Universal Serial Bus) interface, an SD card interface, and / or an audio interface.

[0141] The connection terminal ED78 includes a connector through which the electronic device ED01 can be physically connected to other electronic devices (such as the electronic device ED02). The connection terminal ED78 may include an HDMI connector, a USB connector, an SD card connector, and / or an audio connector (such as a headphone connector).

[0142] The haptic module ED79 can convert an electrical signal into a mechanical stimulus (such as vibration or movement) or an electrical stimulus that can be perceived by the user through touch or kinesthesia. The haptic module ED79 may include a motor, a piezoelectric element, and / or an electrical stimulation device.

[0143] The camera module ED80 can capture still images and videos. The camera module ED80 includes a lens assembly including one or more lenses, the image sensor 1000 of FIG. 1, an image signal processor, and / or a flash. The lens assembly included in the camera module ED80 can collect light emitted from a subject that is the object of image capture.

[0144] The power management module ED88 can manage the power supplied to the electronic device ED01. The power management module ED88 is also implemented as part of a PMIC (Power Management Integrated Circuit).

[0145] The battery ED89 can supply power to the components of the electronic device ED01. The battery ED89 may include a non-rechargeable primary battery, a rechargeable secondary battery, and / or a fuel cell.

[0146] The communication module ED90 can assist in establishing a direct (wired) communication channel and / or a wireless communication channel between the electronic device ED01 and other electronic devices (such as the electronic device ED02, the electronic device ED04, the server ED08, etc.), and in performing communication via the established communication channel. The communication module ED90 operates independently of the processor ED20 (such as an application processor) and includes one or more communication processors that support direct communication and / or wireless communication. The communication module ED90 includes a wireless communication module ED92 (such as a cellular communication module, a short-range wireless communication module, a GNSS (Global Navigation Satellite System) communication module, etc.) and / or a wired communication module ED94 (such as a LAN (Local Area Network) communication module, a power line communication module, etc.). The corresponding communication module among them can communicate with other electronic devices via the first network ED98 (a short-range communication network such as Bluetooth, WiFi Direct, or IrDA (Infrared Data Association)), or via the second network ED99 (a long-range communication network such as a cellular network, the Internet, or a computer network (LAN, WAN, etc.)). Such a large number of types of communication modules can be integrated by one component (such as a single chip), or implemented by a plurality of separate components (multiple chips) from each other. The wireless communication module ED92 can use the subscriber information (such as the International Mobile Subscriber Identifier (IMSI)) stored in the subscriber identification module ED96 to identify and authenticate the electronic device ED01 within a communication network such as the first network ED98 and / or the second network ED99.

[0147] Antenna module ED97 can transmit signals and / or power to the outside (such as other electronic devices) or receive them from the outside. The antenna includes a radiator composed of a conductive pattern formed on a substrate (such as a PCB). Antenna module ED97 includes one or more antennas. When multiple antennas are included, the communication module ED90 selects an antenna suitable for the communication method used in a communication network such as the first network ED98 and / or the second network ED99 from the multiple antennas. Signals and / or power are transmitted or received between the communication module ED90 and other electronic devices via the selected antenna. In addition to the antenna, other components (such as RFICs (Radio Frequency Integrated Circuits)) may be included as part of the antenna module ED97.

[0148] Some of the components are connected to each other via a communication method between peripheral devices (such as a bus, GPIO (General Purpose Input and Output), SPI (Serial Peripheral Interface), MIPI (Mobile Industry Processor Interface)), and can exchange signals (such as commands and data) with each other.

[0149] Commands or data are transmitted or received between the electronic device ED01 and an external electronic device ED04 via a server ED08 connected to a second network ED99. The other electronic devices ED02 and ED04 are devices of the same or different types as the electronic device ED01. All or part of the operations executed on the electronic device ED01 may be executed on one or more of the other electronic devices ED02, ED04, and ED08. For example, when the electronic device ED01 has to perform a certain function or service, instead of having the function or service executed by itself, it can request one or more other electronic devices to perform part or all of that function or service. One or more other electronic devices that receive the request can execute additional functions or services related to the request and transmit the results of the execution to the electronic device ED01. For this purpose, cloud computing technology, distributed computing technology, and / or client-server computing technology are utilized.

[0150] FIG. 28 is a block diagram showing a camera module ED80 provided in the electronic device ED01 of FIG. 27. Referring to FIG. 28, the camera module ED80 includes a lens assembly 1110, a flash 1120, an image sensor 1000, an image stabilizer 1140, a memory 1150 (such as a buffer memory), and / or an image signal processor 1160. The lens assembly 1110 can collect light emitted from a subject that is the object of image capture. The camera module ED80 includes a plurality of lens assemblies 1110, in which case the camera module ED80 becomes a dual camera, a 360° camera, or a spherical camera. Some of the plurality of lens assemblies 1110 may have the same lens attributes (such as angle of view, focal length, autofocus, F-number, optical zoom, etc.) or different lens attributes. The lens assembly 1110 includes a wide-angle lens or a telephoto lens.

[0151] The flash 1120 can emit light used to enhance the light emitted or reflected from the subject. The flash 1120 can emit visible light or infrared light. The flash 1120 includes one or more light-emitting diodes (such as RGB (Red-Green-Blue) LEDs, White LEDs, Infrared LEDs, Ultraviolet LEDs, etc.) and / or xenon lamps. The image sensor 1000 is also the image sensor described in FIG. 1, and can acquire an image corresponding to the subject by converting the light emitted or reflected from the subject and transmitted through the lens assembly 1110 into an electrical signal.

[0152] The image stabilizer 1140 reacts to the movement of the camera module ED80 or the electronic device 1101 including the same, and moves one or more lenses included in the lens assembly 1110 or the image sensor 1000 in a specific direction, or controls the operating characteristics of the image sensor 1000 (such as adjusting the read-out timing) so as to compensate for the negative effects of the movement. The image stabilizer 1140 can sense the movement of the camera module ED80 or the electronic device ED01 by using a gyro sensor (not shown) or an acceleration sensor (not shown) disposed inside or outside the camera module ED80. The image stabilizer 1140 is also implemented optically.

[0153] Memory 1150 can store data of part or all of the images acquired via image sensor 1000 for the next image processing operations. For example, when multiple images are acquired at high speed, the acquired original data (such as Bayer-Patterned data, high-resolution data, etc.) is stored in memory 1150, and only the low-resolution images are displayed, and then the original data of the selected (such as user selection) images can be used to be transmitted to image signal processor 1160. Memory 1150 is integrated into the memory ED30 of electronic device ED01 or is composed of a separate memory that operates independently.

[0154] Image signal processor 1160 can acquire video using the electrical signals output from image sensor 1000. For example, image signal processor 1160 can directly perform some of the image processing shown in FIGS. 23 to 26 in cooperation with image sensor 1000. Also, depending on the format of the required video data, image sensor 1000 can be requested to output video data in a specific format.

[0155] In addition, image signal processor 1160 can perform further image processing on the video acquired via image sensor 1000 or the video data stored in memory 1150. The image processing includes depth map generation, three-dimensional modeling, panorama generation, feature point extraction, image synthesis, and / or image compensation (such as noise reduction, resolution adjustment, brightness adjustment, blurring, sharpening, softening, etc.). Image signal processor 1160 can perform control (such as exposure time control or readout timing control) on the components (such as image sensor 1000) included in camera module ED80.

[0156] The video processed by the image signal processor 1160 is either saved again in the memory 1150 for additional processing or provided to external components of the camera module ED80 (such as the memory ED30, the display device ED60, the electronic device ED02, the electronic device ED04, the server ED08, etc.). The image signal processor 1160 is either integrated into the processor ED20 or composed of a separate processor that operates independently of the processor ED20. When the image signal processor 1160 is composed of a separate processor from the processor ED20, the image processed by the image signal processor 1160 is displayed via the display device ED60 after undergoing additional image processing by the processor ED20.

[0157] Also, the image signal processor 1160 can receive two output signals independently from adjacent light sensing cells within each pixel or sub-pixel of the image sensor 1000, and generate an autofocus signal from the difference between the two output signals. The image signal processor 1160 can control the lens assembly 1110 based on the autofocus signal so that the focus of the lens assembly 1110 accurately aligns with the surface of the image sensor 1000.

[0158] The electronic device ED01 may further include one or more additional camera modules each having different attributes or functions. Such camera modules also include a configuration similar to the camera module ED80 in FIG. 28, and the image sensors included therein are embodied by CCD sensors and / or CMOS sensors, and include one or more sensors selected from image sensors with different attributes, such as RGB sensors, BW (Black and White) sensors, IR sensors, or UV sensors. In that case, one of the plurality of camera modules ED80 is a wide-angle camera, and another one is a telephoto camera. Similarly, one of the plurality of camera modules ED80 is a front camera, and another one is a rear camera.

[0159] FIG. 29 is a block diagram of an electronic device including a multi-camera module, and FIG. 30 is a detailed block diagram of one camera module of the electronic device shown in FIG. 29.

[0160] Referring to FIG. 29, the electronic device 1200 includes a camera module group 1300, an application processor 1400, a PMIC (power management integrated circuit) 1500, an external memory 1600, and an image generator 1700.

[0161] The camera module group 1300 includes a plurality of camera modules 1300a, 1300b, 1300c. Even though the drawings show an embodiment in which three camera modules 1300a, 1300b, 1300c are arranged, the embodiment is not limited thereto. In some embodiments, the camera module group 1300 may be implemented by being modified to include only two camera modules. Also, in some embodiments, the camera module group 1300 may be implemented by being modified to include n (n is a natural number of 4 or more) cameras.

[0162] Hereinafter, referring to FIG. 30, the detailed configuration of the camera module 1300b will be described more specifically. However, the following description is similarly applicable to the other camera modules 1300a, 1300c according to the embodiment.

[0163] Referring to FIG. 30, the camera module 1300b includes a prism 1305, an OPFE (Optical Path Folding Element) 1310, an actuator 1330, an image sensing device 1340, and a storage unit 1350.

[0164] The prism 1305 includes a reflection surface 1307 of a light reflecting material and can deform the path of the light L incident from the outside.

[0165] In some embodiments, the prism 1305 can change the path of the light L incident in the first direction (X direction) to the second direction (Y direction) perpendicular to the first direction (X direction). Further, the prism 1305 can rotate in the A direction about the central axis 1306 of the reflecting surface 1307 of the light reflecting substance, or rotate the central axis 1306 in the B direction, and change the path of the light L incident in the first direction (X direction) to the perpendicular second direction (Y direction). At this time, the OPFE 1310 can also move in the third direction (Z direction) perpendicular to the first direction (X direction) and the second direction (Y direction).

[0166] In some embodiments, as shown in the figure, the maximum rotation angle of the prism 1305 in the A direction is 15° or less in the plus (+) A direction and greater than 15° in the minus (-) A direction, but the embodiments are not limited thereto.

[0167] In some embodiments, the prism 1305 can rotate in the plus (+) or minus (-) B direction in the range of about 20°, or 10° - 20°, or 15° - 20°. Here, the rotation angle can rotate at the same angle in the plus (+) or minus (-) B direction, or rotate to an approximately similar angle in the range of about 1°.

[0168] In some embodiments, the prism 1305 can move in the third direction (for example, the Z direction) parallel to the extension direction of the central axis 1306 of the reflecting surface 1307 of the light reflecting substance.

[0169] The OPFE 1310 includes, for example, optical lenses composed of m groups (where m is a natural number). The m lenses can move in the second direction (Y direction) to change the optical zoom ratio of the camera module 1300b. For example, when the basic optical zoom ratio of the camera module 1300b is Z, when the m optical lenses included in the OPFE 1310 are moved, the optical zoom ratio of the camera module 1300b is also changed to an optical zoom ratio of 3Z, 5Z, or 10Z or more.

[0170] The actuator 1330 can move the OPFE 1310 or an optical lens (hereinafter referred to as the optical lens) to a specific position. For example, the actuator 1330 can adjust the position of the optical lens so that the image sensor 1342 is positioned at the focal length of the optical lens for accurate sensing.

[0171] The image sensing device 1340 includes an image sensor 1342, control logic 1344, and a memory 1346. The image sensor 1342 can sense an image of a sensing target using the light L provided through the optical lens. The control logic 1344 can control the overall operation of the camera module 1300b. For example, the control logic 1344 can control the operation of the camera module 1300b according to a control signal provided through the control signal line CSLb.

[0172] As an example, the image sensor 1342 includes the above-described color separation lens array or nano-optical lens array. By using the color separation lens array based on the nanostructure, the image sensor 1342 can receive more signals separated by wavelength for each pixel. Due to such an effect, the amount of light required to generate a high-resolution and high-quality image at low illuminance can be ensured.

[0173] Memory 1346 can store information necessary for the operation of camera module 1300b, such as calibration data 1347. Calibration data 1347 can also include information necessary to generate image data using light L provided from the outside through camera module 1300b. Calibration data 1347 may include, for example, information related to the aforementioned degree of rotation, information related to the focal length, information related to the optical axis, and the like. When camera module 1300b is implemented in a multi-state camera form in which the focal length changes depending on the position of the optical lens, calibration data 1347 can also include the focal length value for each position (or state) of the optical lens and information related to auto-focusing.

[0174] Storage unit 1350 can store the image data sensed through image sensor 1342. Storage unit 1350 is disposed outside image sensing device 1340 and is also implemented in a stacked form with the sensor chip constituting image sensing device 1340. In some embodiments, storage unit 1350 is implemented by an EEPROM (Electrically Erasable Programmable Read-Only Memory), but the embodiments are not limited thereto.

[0175] Referring to both FIGS. 29 and 30, in some embodiments, each of the plurality of camera modules 1300a, 1300b, 1300c includes an actuator 1330. Accordingly, each of the plurality of camera modules 1300a, 1300b, 1300c includes calibration data 1347 that is the same as or different from each other due to the operation of the actuator 1330 included therein.

[0176] In some embodiments, one of the plurality of camera modules 1300a, 1300b, 1300c (e.g., 1300b) is a camera module in a folded lens form including the aforementioned prism 1305 and OPFE 1310, and the remaining camera modules (e.g., 1300a and 1300b) are camera modules in a vertical form that do not include the prism 1305 and OPFE 1310, but the embodiments are not limited thereto.

[0177] In some embodiments, one of the plurality of camera modules 1300a, 1300b, 1300c (e.g., 1300c) is also a vertical depth camera that extracts depth information using, for example, IR (Infrared Ray).

[0178] In some embodiments, at least two of the plurality of camera modules 1300a, 1300b, 1300c (e.g., 1300a and 1300b) can have different observation fields of view (Field of View, viewing angle). In this case, for example, the optical lenses of at least two of the plurality of camera modules 1300a, 1300b, 1300c (e.g., 1300a and 1300b) are different from each other, but the embodiments are not limited thereto.

[0179] Also, in some embodiments, the viewing angles of the plurality of camera modules 1300a, 1300b, 1300c are different from each other. In this case, the optical lenses included in each of the plurality of camera modules 1300a, 1300b, 1300c are also different from each other, but the embodiments are not limited thereto.

[0180] In some embodiments, each of the plurality of camera modules 1300a, 1300b, 1300c may be physically separated and arranged from each other. That is, the sensing area of one image sensor 1342 is not divided and used by the plurality of camera modules 1300a, 1300b, 1300c, and independent image sensors 1342 may be arranged inside each of the plurality of camera modules 1300a, 1300b, 1300c.

[0181] Referring to FIG. 29 again, the application processor 1400 includes an image processing device 1410, a memory controller 1420, and an internal memory 1430. The application processor 1400 can be implemented separately from the plurality of camera modules 1300a, 1300b, 1300c. For example, the application processor 1400 and the plurality of camera modules 1300a, 1300b, 1300c are implemented separately from each other by separate semiconductor chips.

[0182] The image processing device 1410 includes a plurality of image processors 1411, 1412, 1413 and a camera module controller 1414.

[0183] The image data generated from each of the camera modules 1300a, 1300b, 1300c is provided to the image processing device 1410 through the image signal lines ISLa, ISLb, ISLc that are separated from each other. Such image data transmission is performed, for example, using CSI (Camera Serial Interface) based on MIPI (Mobile Industry Processor Interface), but the embodiments are not limited thereto.

[0184] The image data transmitted to the image processing device 1410 is stored in the external memory 1600 before being transmitted to the image processors 1411 and 1412. The image data stored in the external memory 1600 is provided to the image processor 1411 and / or the image processor 1412. The image processor 1411 can correct the received image data in order to generate a video. The image processor 1412 can correct the received image data in order to generate a still image. As an example, the image processors 1411 and 1412 can perform pre-processing operations such as color correction and gamma correction on the image data.

[0185] The image processor 1411 includes sub-processors. When the number of sub-processors is the same as the number of camera modules 1300a, 1300b, and 1300c, each sub-processor can process the image data provided from one camera module. When the number of sub-processors is less than the number of camera modules 1300a, 1300b, and 1300c, at least one of the sub-processors can process the image data provided from a plurality of camera modules using a timing sharing process. The image data processed by the image processor 1411 and / or the image processor 1412 is stored in the external memory 1600 before being transmitted to the image processor 1413. The image data stored in the external memory 1600 is transmitted to the image processor 1412. The image processor 1412 can perform post-processing operations such as noise correction and sharpen correction on the image data.

[0186] The image data processed by the image processor 1413 is provided to the image generator 1700. The image generator 1700 can generate a final image using the image data provided from the image processor 1413 according to generating information or a mode signal.

[0187] Specifically, the image generator 1700 can merge at least a part of the image data generated from the camera modules 1300a, 1300b, and 1300c having different viewing angles from each other according to the image generation information or the mode signal, and generate an output image. Also, the image generator 1700 can select any one of the image data generated from the camera modules 1300a, 1300b, and 1300c having different viewing angles from each other according to the image generation information or the mode signal, and generate an output image.

[0188] In some embodiments, the image generation information may also include a zoom signal or a zoom factor. Also, in some embodiments, the mode signal is, for example, a signal based on a mode selected by a user.

[0189] When the image generation information is a zoom signal (zoom factor) and each of the camera modules 1300a, 1300b, and 1300c has a different observation field of view (viewing angle) from each other, the image generator 1700 can perform different operations according to the type of the zoom signal. For example, when the zoom signal is a first signal, after merging the image data output from the camera module 1300a and the image data output from the camera module 1300c, an output image can be generated using the merged image signal and the image data output from the camera module 1300b that is not used for the merging. If the zoom signal is a second signal different from the first signal, the image generator 1700 can select any one of the image data output from each of the camera modules 1300a, 1300b, and 1300c without performing such image data merging, and generate an output image. However, the embodiments are not limited to this, and the method of processing the image data can be modified and implemented at any time as needed.

[0190] The camera module controller 1414 can provide control signals to the respective camera modules 1300a, 1300b, 1300c. The control signals generated from the camera module controller 1414 are provided to the corresponding camera modules 1300a, 1300b, 1300c through the control signal lines CSLa, CSLb, CSLc separated from each other.

[0191] In some embodiments, the control signals provided from the camera module controller 1414 to the plurality of camera modules 1300a, 1300b, 1300c include mode information by a mode signal. Based on such mode information, the plurality of camera modules 1300a, 1300b, 1300c can operate in a first operation mode and a second operation mode in relation to the sensing speed.

[0192] The plurality of camera modules 1300a, 1300b, 1300c generate an image signal at a first speed (for example, generate an image signal at a first frame rate) in the first operation mode, encode this at a second speed higher than the first speed (for example, encode an image signal at a second frame rate higher than the first frame rate), and can transmit the encoded image signal to the application processor 1400. At this time, the second speed is 30 times or less of the first speed.

[0193] The application processor 1400 stores the received image signal, that is, the encoded image signal, in the memory 1430 provided inside or the storage 1600 outside the application processor 1400, and then reads out and decodes the encoded image signal from the memory 1430 or the storage 1600, and can display the image data generated based on the decoded image signal. For example, the image processors 1411, 1412 of the image processing device 1410 can perform decoding and can perform image processing on the decoded image signal.

[0194] In the second operation mode, the plurality of camera modules 1300a, 1300b, and 1300c can generate image signals at a third speed lower than the first speed (for example, generate image signals at a third frame rate lower than the first frame rate), and transmit the image signals to the application processor 1400. The image signals provided to the application processor 1400 are unencoded signals. The application processor 1400 performs image processing on the received image signals or stores the image signals in the memory 1430 or the storage 1600.

[0195] The PMIC 1500 can supply power, for example, a power supply voltage, to each of the plurality of camera modules 1300a, 1300b, and 1300c. For example, the PMIC 1500 can supply first power to the camera module 1300a through the power signal line PSLa, supply second power to the camera module 1300b through the power signal line PSLb, and supply third power to the camera module 1300c through the power signal line PSLc under the control of the application processor 1400.

[0196] The PMIC 1500 can generate power corresponding to each of the plurality of camera modules 1300a, 1300b, and 1300c and adjust the level of the power in response to the power control signal PCON from the application processor 1400. The power control signal PCON includes power adjustment signals for different operation modes of the plurality of camera modules 1300a, 1300b, and 1300c. For example, the operation mode includes a low power mode, and at this time, the power control signal PCON can also include information related to the camera module operating in the low power mode and the set power level. The levels of the power provided to each of the plurality of camera modules 1300a, 1300b, and 1300c may be the same as or different from each other. Also, the level of the power can be dynamically changed.

[0197] The image sensor including the aforementioned nano-optical lens array and the electronic device including the same have been described with reference to the embodiments shown in the drawings, but they are merely exemplary, and those having ordinary knowledge in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the disclosed embodiments should be considered from an illustrative rather than a limiting perspective. The scope of rights is represented not by the foregoing description but by the claims, and all differences within the equivalent scope thereof should be construed as being included in the scope of rights.

Explanation of Reference Numerals

[0198] 110 Sensor substrate 111 First pixel 112 Second pixel 113 Third pixel 114 Fourth pixel 120 Spacer layer 130 Nano-optical lens array 131 First meta-region 132 Second meta-region 133 Third meta-region 134 Fourth meta-region 1100 Pixel array DL Dielectric layer NP Nanostructure

Claims

1. A sensor substrate including a plurality of unit pixel patterns that are two-dimensionally arranged along a first direction and a second direction, and include a first pixel, a second pixel, a third pixel, and a fourth pixel that sense light; A nano-optical lens array including a first meta-region corresponding to the first pixel, a second meta-region corresponding to the second pixel, a third meta-region corresponding to the third pixel, and a fourth meta-region corresponding to the fourth pixel, and including a plurality of unit meta-patterns that are two-dimensionally arranged along the first direction and the second direction; comprising: Each of the first to fourth meta-regions includes a plurality of nanostructures arranged to separate colors of incident light incident on each unit meta-pattern of the nano-optical lens array and to condense the color-separated light onto the first to fourth pixels; In each of the plurality of unit meta-patterns, the cross-sectional area distribution of the plurality of nanostructures is asymmetric in a first direction, a second direction, a first diagonal direction, and a second diagonal direction with respect to the center of each of the plurality of unit meta-patterns; An image sensor, wherein in each of the plurality of unit meta-patterns, the cross-sectional area distribution of the plurality of nanostructures in the first meta-region and the cross-sectional area distribution of the plurality of nanostructures in the fourth meta-region are in a 180° rotational symmetry relationship with respect to the center of each of the plurality of unit meta-patterns.

2. The image sensor according to claim 1, wherein in the first meta-region, the second meta-region, the third meta-region, and the fourth meta-region, the heights, positions, and periods of the plurality of nanostructures are the same as each other.

3. The image sensor according to claim 1, wherein the cross-sectional area distribution of the plurality of nanostructures in the first meta-region, the cross-sectional area distribution of the plurality of nanostructures in the second meta-region, the cross-sectional area distribution of the plurality of nanostructures in the third meta-region, and the cross-sectional area distribution of the plurality of nanostructures in the fourth meta-region are determined such that there is no light exchange between the plurality of unit meta-patterns, and color separation and light condensation occur independently for each unit meta-pattern.

4. The cross-sectional area distribution of the plurality of nanostructures in the first meta-region is asymmetric in a first direction, a second direction, a first diagonal direction, and a second diagonal direction with respect to the center of the first meta-region; The image sensor according to claim 1, wherein the cross-sectional area distribution of the plurality of nanostructures in the fourth meta-region is asymmetric in a first direction, a second direction, a first diagonal direction, and a second diagonal direction with respect to the center of the first meta-region.

5. Among the plurality of nanostructures in the first meta-region, the phase delay of light by the nanostructures adjacent to the second meta-region and the phase delay of light by the nanostructures adjacent to the third meta-region are greater than the phase delay of light by other nanostructures. The image sensor according to claim 4, wherein among the plurality of nanostructures in the fourth meta-region, the phase delay of light by the nanostructures adjacent to the second meta-region and the phase delay of light by the nanostructures adjacent to the third meta-region are greater than the phase delay of light by other nanostructures.

6. Among a plurality of pairs of two nanostructures facing each other in a second direction with respect to a horizontal center line passing through the center of the first meta-region along a first direction, at least one pair of nanostructures has different cross-sectional areas from each other. Among a plurality of pairs of two nanostructures facing each other in a first direction with respect to a vertical center line passing through the center of the first meta-region along a second direction, at least one pair of nanostructures has different cross-sectional areas from each other. Among a plurality of pairs of two nanostructures facing each other with respect to a first diagonal line passing through the center of the first meta-region, at least one pair of nanostructures has different cross-sectional areas from each other. Among a plurality of pairs of two nanostructures facing each other with respect to a second diagonal line passing through the center of the first meta-region, at least one pair of nanostructures has different cross-sectional areas from each other. The image sensor according to claim 1, wherein the first meta-region is adjacent to a unit metapattern different from the unit metapattern to which it belongs, and two nanostructures facing each other with reference to a second diagonal line have the same cross-sectional area.

7. Among a plurality of pairs of two nanostructures facing each other in a second direction with respect to a horizontal center line passing through the center of the fourth meta-region along a first direction, at least one pair of nanostructures has different cross-sectional areas from each other. Among a plurality of pairs of two nanostructures facing each other in a first direction with respect to a vertical center line passing through the center of the fourth meta-region along a second direction, at least one pair of nanostructures has different cross-sectional areas from each other. Among a plurality of pairs of two nanostructures facing each other with respect to a first diagonal line passing through the center of the fourth meta-region, at least one pair of nanostructures has different cross-sectional areas from each other. The image sensor according to claim 1, wherein among a plurality of pairs of two nanostructures facing each other with respect to a second diagonal line passing through the center of the fourth meta-region, at least one pair of nanostructures has different cross-sectional areas from each other.

8. The image sensor according to claim 7, wherein two nanostructures that are adjacent to a unit metapattern different from the unit metapattern to which the fourth meta-region belongs and face each other with respect to the second diagonal line have the same cross-sectional area.

9. The cross-sectional area distribution of a plurality of nanostructures in the second meta-region is symmetric in the first diagonal direction with respect to the center of the second meta-region, and asymmetric in the first direction, the second direction, and the second diagonal direction. The image sensor according to claim 1, wherein the cross-sectional area distribution of a plurality of nanostructures in the third meta-region is symmetric in the first diagonal direction with respect to the center of the second meta-region, and asymmetric in the first direction, the second direction, and the second diagonal direction.

10. Among the plurality of nanostructures in the second meta-region, the phase delay of light by the nanostructures adjacent to the first meta-region and the phase delay of light by the nanostructures adjacent to the fourth meta-region are greater than the phase delay of light by other nanostructures. The image sensor according to claim 9, wherein among the plurality of nanostructures in the third meta-region, the phase delay of light by the nanostructures adjacent to the first meta-region and the phase delay of light by the nanostructures adjacent to the fourth meta-region are greater than the phase delay of light by other nanostructures.

11. The image sensor according to claim 1, wherein in the second meta-region, two nanostructures that face each other with respect to the first diagonal line passing through the center of the second meta-region have the same cross-sectional area.

12. Among a plurality of pairs of two nanostructures that face each other in the second direction with respect to the horizontal center line passing through the center of the second meta-region along the first direction, at least one pair of nanostructures have different cross-sectional areas from each other. Among a plurality of pairs of two nanostructures that face each other in the first direction with respect to the vertical center line passing through the center of the second meta-region along the second direction, at least one pair of nanostructures have different cross-sectional areas from each other. The image sensor according to claim 11, wherein among a plurality of pairs of two nanostructures that face each other with respect to the second diagonal line passing through the center of the second meta-region, at least one pair of nanostructures have different cross-sectional areas from each other.

13. In the third meta-region, two nanostructures that face each other with respect to the first diagonal line passing through the center of the third meta-region have the same cross-sectional area. At least one pair of nanostructures out of a plurality of pairs of two nanostructures facing each other in a second direction with respect to a horizontal center line passing through the center of the third meta-region along the first direction have different cross-sectional areas from each other. At least one pair of nanostructures out of a plurality of pairs of two nanostructures facing each other in a first direction with respect to a vertical center line passing through the center of the third meta-region along the second direction have different cross-sectional areas from each other. The image sensor according to claim 1, wherein at least one pair of nanostructures out of a plurality of pairs of two nanostructures facing each other with respect to a second diagonal line passing through the center of the third meta-region have different cross-sectional areas from each other.

14. In the unit meta-pattern, the nanostructure disposed at the center of the unit meta-pattern is configured to have a greater phase delay than the phase delay of light by nanostructures disposed directly adjacent to other unit meta-patterns. The image sensor according to claim 1.

15. The plurality of nanostructures are arranged to separate the incident light incident on each unit meta-pattern of the nano-optical lens array by color, collect the light in the first wavelength band to the first pixel and the fourth pixel, the light in the second wavelength band to the second pixel, and the light in the third wavelength band to the third pixel. Within one unit pixel pattern, the second pixel and the third pixel are arranged in a first diagonal direction, and the first pixel and the fourth pixel are arranged in a second diagonal direction intersecting the first diagonal direction. The image sensor according to claim 1, wherein within one unit meta-pattern, the second meta-region and the third meta-region are arranged in a first diagonal direction, and the first meta-region and the fourth meta-region are arranged in a second diagonal direction.

16. Further comprising a plurality of isolation patterns provided on the upper surface of the nano-optical lens array. Each of the plurality of isolation patterns is provided to cover the first to fourth meta-regions of the corresponding unit meta-pattern among the plurality of unit meta-patterns. The image sensor according to claim 1, wherein each of the plurality of isolation patterns has a flat upper surface, an irregularly convex and concave upper surface, or a convex upper surface.

17. In each of the plurality of unit pixel patterns, the image sensor adds up all of the outputs of the first pixel, the output of the second pixel, the output of the third pixel, and the output of the fourth pixel to generate one luminance signal. subtracts the outputs of the first pixel and the fourth pixel from the output of the third pixel to generate a first color phase signal. The image sensor according to claim 1, configured to generate a second color phase signal by subtracting the outputs of the first pixel and the fourth pixel from the output of the second pixel.

18. The image sensor, converts the luminance signal, the first color phase signal, and the second color phase signal into digital signals, and is configured to selectively generate video data having any one of a plurality of different digital video formats using the digitized luminance signal, the first color phase signal, and the second color phase signal, and output the video data externally. The image sensor according to claim 17.

19. A lens assembly that forms an optical image of a subject, an image sensor that converts the optical image formed by the lens assembly into an electrical signal, a processor that processes the signal generated by the image sensor, comprising: The image sensor, includes a sensor substrate having first, second, third, and fourth pixels that sense light, and including a plurality of unit pixel patterns two-dimensionally arranged along a first direction and a second direction, a nano-optical lens array having a first meta-region corresponding to the first pixel, a second meta-region corresponding to the second pixel, a third meta-region corresponding to the third pixel, and a fourth meta-region corresponding to the fourth pixel, and including a plurality of unit meta-patterns two-dimensionally arranged along a first direction and a second direction, comprising: Each of the first to fourth meta-regions includes a plurality of nanostructures arranged to separate colors of incident light incident on each unit meta-pattern of the nano-optical lens array and condense the color-separated light onto the first to fourth pixels. In each of the plurality of unit meta-patterns, the cross-sectional area distribution of the plurality of nanostructures is asymmetric in a first direction, a second direction, a first diagonal direction, and a second diagonal direction with respect to the center of each of the plurality of unit meta-patterns. An electronic device in which, in each of the plurality of unit meta-patterns, the cross-sectional area distribution of the plurality of nanostructures in the first meta-region and the cross-sectional area distribution of the plurality of nanostructures in the fourth meta-region have a 180° rotational symmetry relationship with respect to the center of each of the plurality of unit meta-patterns.

20. A sensor substrate having first, second, third, and fourth pixels that sense light, and including a plurality of unit pixel patterns two-dimensionally arranged along a first direction and a second direction, A nano-optical lens array including a first meta-region, a second meta-region, a third meta-region, and a fourth meta-region corresponding to the first pixel, the second pixel, the third pixel, and the fourth pixel, respectively, and including a plurality of unit meta-patterns two-dimensionally arranged along a first direction and a second direction. Including Each of the first to fourth meta-regions includes a plurality of nanostructures arranged to separate colors of incident light incident on each unit meta-pattern of the nano-optical lens array and to condense the color-separated light onto the first to fourth pixels. In each of the plurality of unit meta-patterns, the cross-sectional area distribution of the plurality of nanostructures is asymmetric in a first direction, a second direction, a first diagonal direction, and a second diagonal direction with respect to the center of each of the plurality of unit meta-patterns. The color separation and condensation of the light occur independently in each of the plurality of unit meta-patterns without light exchange between the plurality of unit meta-patterns, by the cross-sectional area distribution of the plurality of nanostructures in the first meta-region, the cross-sectional area distribution of the plurality of nanostructures in the second meta-region, the cross-sectional area distribution of the plurality of nanostructures in the third meta-region, and the cross-sectional area distribution of the plurality of nanostructures in the fourth meta-region. An image sensor.

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