Electrode conveyance system

Abstract

To provide a technique that enables a movable element to be configured to adsorb and hold a sheet-like electrode, without complicating a configuration of the movable element.SOLUTION: A planar linear motor 5 includes a stator 10 and a movable element 11 and is configured to horizontally drive and turningly drive the movable element 11 while magnetically levitating the movable element 11 on the stator 10. The movable element 11 has an adsorption table 22 for adsorbing and holding the sheet-like electrode 2. The adsorption table 22 has a table upper surface 22a that can oppose to the sheet-like electrode 2, a table lower surface 22b at the opposite side of the table upper surface 22a, and a negative-pressure flow path 32 opening to the table upper surface 22a and the table lower surface 22b. An air floating stage 4 has a negative pressure supply body 50 that extends along a conveying direction of the sheet-like electrode 2 and supplies negative pressure to the negative-pressure flow path 32 opening to the table lower surface 22b of the adsorption table 22.SELECTED DRAWING: Figure 5

Description

Technical Field

[0001] The present invention relates to an electrode transfer system.

Background Art

[0002] Patent Document 1 discloses an electrode transfer device including an oval rail and a plurality of movers capable of traveling on the rail. Each mover includes a transfer plate on which a sheet-like electrode is placed, and a plurality of clamps that hold the sheet-like electrode placed on the transfer plate. Each clamp includes an L-shaped clamp arm, a tension spring that constantly biases the clamp arm, and a roller attached to the clamp arm. With this configuration, the clamp arm is biased by the tension spring, so that the clamp arm presses the sheet-like electrode against the transfer plate. When the roller of each clamp engages with a fixed cam provided on the traveling path of the mover, the clamp arm rotates against the tension spring, and the sheet-like electrode is released from the clamp arm.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] By the way, when transporting a sheet-like electrode while levitating it, it is conceivable to use a planar linear motor. That is, the sheet-like electrode can be transported by moving the mover in a magnetically levitated state while holding the sheet-like electrode on the mover constituting the planar linear motor.

[0005] As a means for the mover to hold the sheet-like electrode, a configuration in which the mover adsorbs and holds the sheet-like electrode is conceivable. However, in this case, it is necessary to provide a negative pressure source in the mover itself, and the configuration of the mover becomes complicated.

[0006] Therefore, an object of the present disclosure is to provide a technique for realizing a configuration in which a mover adsorbs and holds a sheet-like electrode without complicating the configuration of the mover.

Means for Solving the Problems

[0007] An air levitation stage for levitating a sheet-like electrode, A planar linear motor that adsorbs, holds, and conveys the sheet-like electrode levitated by the air levitation stage, including The planar linear motor includes a stator and a mover, and is configured to horizontally drive and swivel drive the mover in a state where the mover is magnetically levitated on the stator. The mover has an adsorption table for adsorbing and holding the sheet-like electrode. The adsorption table has a table upper surface facing the sheet-like electrode, a table lower surface on the opposite side of the table upper surface, and a negative pressure flow path opening to the table upper surface and the table lower surface. The air levitation stage has a negative pressure supply body that extends along the conveyance direction of the sheet-like electrode and supplies negative pressure to the negative pressure flow path opening to the table lower surface of the adsorption table. An electrode conveyance system is provided. According to the above configuration, a configuration in which the mover adsorbs and holds the sheet-like electrode is realized without complicating the configuration of the mover.

[0008] A lower opening that is connected to the negative pressure flow path and extends along the conveyance direction may be formed on the table lower surface of the adsorption table. According to the above configuration, the negative pressure supply body can supply the negative pressure to the negative pressure flow path without problems even when the mover is conveying the sheet-like electrode.

[0009] A plurality of upper openings to which the negative pressure flow path is connected may be formed on the table upper surface of the adsorption table. According to the above configuration, the adsorption table can stably adsorb and hold the sheet-shaped electrode.

[0010] The negative pressure supply body may be configured to constrain the adsorption table in the vertical direction without contact by simultaneously supplying positive pressure and negative pressure to the lower surface of the table of the adsorption table. According to the above configuration, the negative pressure supply body can constrain the adsorption table with high rigidity in the vertical direction.

[0011] The upper surface of the negative pressure supply body has a first region for supplying the negative pressure to the negative pressure flow path of the adsorption table, a second region for supplying the positive pressure to the lower surface of the table of the adsorption table, a third region for supplying the negative pressure to the lower surface of the table of the adsorption table, and an air vent groove for isolating the first region, the second region, and the third region from each other. It may have. According to the above configuration, regardless of whether the adsorption table is adsorbing and holding the sheet-shaped electrode, the negative pressure supply body can stably constrain the adsorption table.

Advantages of the Invention

[0012] According to the present disclosure, a configuration in which the mover adsorbs and holds the sheet-shaped electrode can be realized without complicating the configuration of the mover.

Brief Description of the Drawings

[0013]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Best Mode for Carrying Out the Invention

[0014] Hereinafter, the present invention will be described through embodiments of the invention, but the invention according to the claims is not limited to the following embodiments. Also, not all of the configurations described in the embodiments are essential as means for solving the problems. For the sake of clarity of explanation, the following description and drawings have been appropriately omitted and simplified. In each drawing, the same elements are denoted by the same reference numerals, and redundant explanations are omitted as necessary.

[0015] FIG. 1 shows a perspective view of an electrode transfer system 1. As shown in FIG. 1, the electrode transfer system 1 is incorporated and used in the manufacturing process of all-solid-state batteries. That is, the electrode transfer system 1 transports a sheet-shaped electrode 2 in order to roll-transfer a positive electrode foil 3 onto the sheet-shaped electrode 2 which is an all-solid-state battery electrode assembly in which a negative electrode composite layer, a solid electrolyte layer, and a positive electrode composite layer are formed on both sides of a negative electrode foil. To roll-transfer the positive electrode foil 3 onto the sheet-shaped electrode 2 means, in short, to attach the positive electrode foil 3 to the sheet-shaped electrode 2. The sheet-shaped electrode 2 is a specific example of a first sheet member. The positive electrode foil 3 is a specific example of a second sheet member. The first sheet member may be a positive electrode body in which a positive electrode composite layer is formed on both sides of the positive electrode foil, and the second sheet member may be used as a separator. The electrode transfer system 1 is also called a sheet transfer system.

[0016] As shown in FIG. 1, the electrode transfer system 1 includes an air levitation stage 4 for air-levitating the sheet-shaped electrode 2, a plurality of planar linear motors 5 for adsorbing, holding, and transporting the sheet-shaped electrode 2 that is air-levitated by the air levitation stage 4, a plurality of cameras 6 for imaging the sheet-shaped electrode 2, a control device 7, a positive pressure source 80, and a negative pressure source 81.

[0017] In this embodiment, the sheet-shaped electrode 2 is linearly conveyed while maintaining a horizontal posture. Therefore, the air floating stage 4 is formed in an elongated shape along the conveyance direction of the sheet-shaped electrode 2. Hereinafter, the longitudinal direction of the air floating stage 4 is simply referred to as the longitudinal direction. The direction orthogonal to the longitudinal direction in a plan view is referred to as the width direction. The direction orthogonal to the longitudinal direction and the width direction is referred to as the vertical direction. The longitudinal direction, the width direction, and the vertical direction are orthogonal to each other.

[0018] The longitudinal direction includes the front and the rear as the conveyance direction in which the sheet-shaped electrode 2 is conveyed. The front is also referred to as the conveyance direction. The vertical direction includes the upper side and the lower side. The vertical direction is also referred to as the up-and-down direction. The width direction includes the inner side of the width direction as the direction approaching the center of the sheet-shaped electrode 2 in the width direction and the outer side of the width direction as the direction moving away from the center of the sheet-shaped electrode 2 in the width direction.

[0019] The sheet-shaped electrode 2 is typically rectangular, the dimension in the longitudinal direction is typically from 50 centimeters to 150 centimeters, the dimension in the width direction is typically from 80 centimeters to 150 centimeters, and the thickness is typically from 0.5 millimeters to 1 millimeter.

[0020] The air floating stage 4 extends along the conveyance direction of the sheet-shaped electrode 2. The air floating stage 4 is typically a ceramic porous body, and by supplying positive pressure from the positive pressure source 80, air is jetted upward. Thereby, the sheet-shaped electrode 2 can float on the air floating stage 4.

[0021] In this embodiment, the plurality of planar linear motors 5 are of the magnetic levitation type and include a first planar linear motor 8 and a second planar linear motor 9. The first planar linear motor 8 and the second planar linear motor 9 are arranged so as to sandwich the air floating stage 4 in the width direction. The first planar linear motor 8 and the second planar linear motor 9 are controlled by the control device 7.

[0022] The first planar linear motor 8 includes a stator 10 and a plurality of movers 11. Each mover 11 is configured to move in the longitudinal direction and the width direction and to turn under the control of the control device 7. Here, the "turn" means turning around the vertical axis, so-called yaw turn. And in the present embodiment, the plurality of movers 11 circulate and move counterclockwise in plan view along a predetermined circulation path 12 defined on the stator 10.

[0023] Similarly, the second planar linear motor 9 includes a stator 13 and a plurality of movers 14. Each mover 14 is configured to move in the longitudinal direction and the width direction and to turn under the control of the control device 7. Here, the "turn" means turning around the vertical axis, so-called yaw turn. And in the present embodiment, the plurality of movers 14 circulate and move clockwise in plan view along a predetermined circulation path 15 defined on the stator 13.

[0024] With the above configuration, when the sheet-like electrode 2 is carried into the electrode transfer system 1, the two movers 11 of the first planar linear motor 8 and the two movers 14 of the second planar linear motor 9 adsorb and hold the sheet-like electrode 2 that is floating in the air. That is, the sheet-like electrode 2 is adsorbed and held by the four movers 11 and 14. The four movers 11 and 14 move forward while adsorbing and holding the sheet-like electrode 2. At this time, the sheet-like electrode 2 is imaged by the plurality of cameras 6. The control device 7 respectively acquires a plurality of captured images from the plurality of cameras 6, and acquires the position and orientation of the sheet-like electrode 2 in plan view based on the plurality of captured images. Then, the control device 7 calculates a correction value regarding the position and orientation of the sheet-like electrode 2 by comparing the acquired position and orientation of the sheet-like electrode 2 with the proper position and proper orientation of the sheet-like electrode 2. The control device 7 corrects the position and orientation of the sheet-like electrode 2 by controlling the four movers 11 and 14 based on the calculated correction value. Next, the positive electrode foil 3 is roll-transferred onto the sheet-like electrode 2. And for the unloading of the sheet-like electrode 2, the four movers 11 and 14 release the adsorption and holding of the sheet-like electrode 2.

[0025] Specifically, the four movers 11 and 14 adsorb and hold the sheet-like electrode 2 carried into the electrode transfer system 1, and transfer the sheet-like electrode 2 forward while adsorbing and holding it. During the transfer, the position and orientation of the sheet-like electrode 2 in plan view are corrected, and the positive electrode foil 3 is roll-transferred onto the sheet-like electrode 2 after the correction. Then, for the unloading of the sheet-like electrode 2, the four movers 11 and 14 release the adsorption and holding of the sheet-like electrode 2.

[0026] The plurality of movers 11 of the first planar linear motor 8 and the plurality of movers 14 of the second planar linear motor 9 all have the same configuration. Therefore, hereinafter, one mover 11 will be described, and the description of the other movers will be omitted. When describing the mover 11, the longitudinal direction, width direction, and vertical direction defined in FIG. 1 will be used as they are. That is, as shown in FIG. 1, since the mover 11 adsorbs and holds the end portion of the sheet-like electrode 2 in the width direction, the posture of the mover 11 in the state of adsorbing and holding the sheet-like electrode 2 can be expressed using the longitudinal direction, width direction, and vertical direction. However, the mover 11 slightly turns when correcting the posture of the sheet-like electrode 2 in plan view. Hereinafter, when describing the configuration of the mover 11, the slight turning of the mover 11 for correcting the posture of the sheet-like electrode 2 in plan view may be ignored for the convenience of explanation.

[0027] FIG. 2 shows a perspective view of the mover 11. As shown in FIG. 2, the mover 11 includes a base 20, two rails 21, and an adsorption table 22.

[0028] The base 20 is configured in a flat plate shape presenting a square in plan view. The base 20 houses a plurality of permanent magnets (not shown). The base 20 faces the stator 10 in the vertical direction and is magnetically levitated from the stator 10 typically by about 1 millimeter to 3 millimeters due to the magnetic interaction with the stator 10.

[0029] The two rails 21 extend upward from the base 20 along the vertical direction. The two rails 21 extend parallel to each other. The two rails 21 are arranged apart from each other in the longitudinal direction.

[0030] The suction table 22 is configured in a flat plate shape. The suction table 22 is fixed to the upper ends of the two rails 21. The suction table 22 is supported by the two rails 21 so as to be in a horizontal posture. The suction table 22 protrudes inward in the width direction. The suction table 22 has a table upper surface 22a facing upward and a table lower surface 22b facing downward.

[0031] FIG. 3 shows a plan view of the suction table 22. As shown in FIG. 3, a plurality of upper openings 30 are formed in the table upper surface 22a of the suction table 22. As shown in FIG. 3, the plurality of upper openings 30 are arranged in a lattice pattern in a region of the table upper surface 22a that faces the sheet-like electrode 2 in the vertical direction when the mover 11 adsorbs and holds the sheet-like electrode 2.

[0032] FIG. 4 shows a bottom view of the suction table 22. As shown in FIG. 4, a lower opening 31 extending in the longitudinal direction is formed in the table lower surface 22b of the suction table 22. For convenience of explanation, a region of the table lower surface 22b where the lower opening 31 is formed is defined as an opening region 40. Also, a region of the table lower surface 22b that is adjacent to the opening region 40 in the width direction is defined as an adjacent region 41. As shown in FIG. 4, the table lower surface 22b includes the opening region 40 and two adjacent regions 41 arranged so as to sandwich the opening region 40 in the width direction. The opening region 40 and the two adjacent regions 41 both extend in the longitudinal direction and are parallel to each other.

[0033] And, a plurality of negative pressure channels 32 are formed in the adsorption table 22. The plurality of negative pressure channels 32 supply the negative pressure supplied to the lower opening 31 to the plurality of upper openings 30 respectively. That is, each negative pressure channel 32 is connected to the lower opening 31 and the plurality of upper openings 30. Therefore, it can be said that each negative pressure channel 32 opens to the table upper surface 22a and the table lower surface 22b of the table. Each negative pressure channel 32 extends in the width direction. Therefore, for example, the negative pressure channel 32A is connected to a plurality of upper openings 30A arranged at a predetermined interval in the width direction as shown in FIG. 3. And, the negative pressure supplied to the lower opening 31 is supplied to the plurality of upper openings 30 respectively via the plurality of negative pressure channels 32. Thereby, by supplying negative pressure to the lower opening 31, the mover 11 can hold the sheet-like electrode 2 in a state of adsorbing the sheet-like electrode 2 to the adsorption table 22.

[0034] FIG. 5 shows a plan view of the negative pressure supply body 50 of the air floating stage 4. That is, the air floating stage 4 includes an air floating stage main body 90 and a negative pressure supply body 50. The negative pressure supply body 50 is supported by the air floating stage main body 90. The negative pressure supply body 50 is fixed to the air floating stage main body 90. The negative pressure supply body 50 is configured to supply negative pressure to a negative pressure channel 32 that extends along the conveyance direction of the sheet-like electrode 2 and opens to the table lower surface 22b of the adsorption table 22.

[0035] The negative pressure supply body 50 includes a base block 51 and an adsorption and floating porous body 52. The adsorption and floating porous body 52 is mounted on the base block 51. Both the base block 51 and the adsorption and floating porous body 52 extend in the longitudinal direction.

[0036] The upper surface 51a of the base block 51 includes an adsorption region 53 and two restraint regions 54. The adsorption region 53 and the two restraint regions 54 extend in the longitudinal direction. The two restraint regions 54 are arranged so as to sandwich the adsorption region 53 in the width direction. In FIG. 5, the boundaries between the adsorption region 53 and the two restraint regions 54 are indicated by a two-dot chain line.

[0037] In the suction area 53, a plurality of suction negative pressure supply holes 57 are formed at predetermined intervals.

[0038] In each restraint area 54, a plurality of restraint negative pressure supply holes 55 and a plurality of restraint positive pressure supply holes 56 are alternately formed along the longitudinal direction. The plurality of restraint negative pressure supply holes 55 in one restraint area 54 and the plurality of restraint negative pressure supply holes 55 in the other restraint area 54 are arranged to face each other across the suction area 53 in the width direction. Similarly, the plurality of restraint positive pressure supply holes 56 in one restraint area 54 and the plurality of restraint positive pressure supply holes 56 in the other restraint area 54 are arranged to face each other across the suction area 53 in the width direction.

[0039] Each suction negative pressure supply hole 57 is, for example, arranged between the restraint negative pressure supply hole 55 formed in one restraint area 54 and the restraint negative pressure supply hole 55 formed in the other restraint area 54.

[0040] The suction and floating porous body 52 is typically formed of a porous ceramic. The upper surface 52a of the suction and floating porous body 52 includes a suction area 63 and two restraint areas 64. The suction area 63 and the two restraint areas 64 extend in the longitudinal direction. The two restraint areas 64 are arranged to sandwich the suction area 63 in the width direction.

[0041] In the suction area 63, a plurality of suction negative pressure supply holes 67 are formed at predetermined intervals. The plurality of suction negative pressure supply holes 67 are respectively connected to the plurality of suction negative pressure supply holes 57 of the base block 51.

[0042] Each restraint area 64 alternately includes a plurality of negative pressure supply areas 65 and a plurality of positive pressure supply areas 66 along the longitudinal direction. In each negative pressure supply area 65, a restraint negative pressure supply hole 68 is formed. Each restraint negative pressure supply hole 68 in each restraint area 64 is connected to the restraint negative pressure supply hole 55 of the corresponding restraint area 54. In the present embodiment, no hole is formed in each positive pressure supply area 66 so as to penetrate the suction and floating porous body 52 straight in the vertical direction. Each positive pressure supply area 66 faces the restraint positive pressure supply hole 56 of the corresponding restraint area 54 in the vertical direction.

[0043] With the above configuration, when negative pressure is supplied from the negative pressure source 81 shown in FIG. 1 to the negative pressure supply body 50, the negative pressure is supplied to each of the plurality of restricted negative pressure supply holes 68 through the plurality of restricted negative pressure supply holes 55. Further, when positive pressure is supplied from the positive pressure source 80 shown in FIG. 1 to the negative pressure supply body 50, the positive pressure is supplied to each of the plurality of positive pressure supply regions 66 through the plurality of restricted positive pressure supply holes 56.

[0044] Here, when the mover 11 moves in the conveyance direction, the adsorption table 22 moves forward while always facing the negative pressure supply body 50 in the vertical direction. At this time, the opening region 40 of the table lower surface 22b of the adsorption table 22 shown in FIG. 4 always faces the adsorption region 63 of the adsorption and floating porous body 52 of the negative pressure supply body 50 shown in FIG. 5 in the vertical direction. Similarly, the two adjacent regions 41 of the table lower surface 22b of the adsorption table 22 shown in FIG. 4 always face the two restricted regions 64 of the adsorption and floating porous body 52 of the negative pressure supply body 50 shown in FIG. 5 in the vertical direction, respectively.

[0045] Therefore, when the mover 11 moves in the conveyance direction, the negative pressure supplied to each restricted negative pressure supply hole 68 acts on the two adjacent regions 41 of the table lower surface 22b of the adsorption table 22. As a result, the adsorption table 22 is pulled downward toward the negative pressure supply body 50. On the other hand, the positive pressure supplied to each positive pressure supply region 66 acts on the two adjacent regions 41 of the table lower surface 22b of the adsorption table 22. As a result, the adsorption table 22 is lifted upward so as to move away from the negative pressure supply body 50. Thus, forces acting upward and downward simultaneously act on the adsorption table 22. Thereby, the negative pressure supply body 50 is configured to non - contactingly restrict the adsorption table 22 in the vertical direction. In this way, by the negative pressure supply body 50 supporting the adsorption table 22 in a non - contacting manner, it is possible to effectively prevent a horizontal external force from acting on the mover 11 due to the adsorption table 22 coming into contact with the negative pressure supply body 50.

[0046] Further, when negative pressure is supplied from the negative pressure source 81 shown in FIG. 1 to the negative pressure supply body 50, the negative pressure is supplied to the plurality of adsorption negative pressure supply holes 67 through the plurality of adsorption negative pressure supply holes 57, respectively.

[0047] Therefore, when the mover 11 moves in the conveyance direction, the negative pressure supplied to each adsorption negative pressure supply hole 67 acts on the opening region 40 of the lower surface 22b of the table of the adsorption table 22. The negative pressure supplied to the opening region 40 is supplied to the plurality of upper openings 30 through the plurality of negative pressure channels 32, respectively. Therefore, the sheet-like electrode 2 is attracted and adsorbed to the upper surface 22a of the table of the adsorption table 22 of the mover 11. As a result, the adsorption and holding of the sheet-like electrode 2 by the mover 11 is realized.

[0048] As described above, when the mover 11 adsorbs and holds the sheet-like electrode 2, no horizontal force acts on the sheet-like electrode 2 due to the holding operation of the adsorption and holding. This is because, during the adsorption and holding operation in which the mover 11 switches from the state of not adsorbing and holding the sheet-like electrode 2 to the state of adsorbing and holding the sheet-like electrode 2, only an external force along the vertical direction acts on the sheet-like electrode 2. Therefore, the adsorption and holding operation does not change the position and posture of the sheet-like electrode 2, and thus does not adversely affect the corrected position and corrected posture of the sheet-like electrode 2. Therefore, it can be said that the electrode conveyance system 1 is suitable for conveying the sheet-like electrode 2 with high precision.

[0049] As shown in FIG. 5, an air vent groove 70 is formed on the upper surface 52a of the adsorption and lifting porous body 52. The air vent groove 70 includes a first air vent groove 70a that separates the adjacent negative pressure supply regions 65 in the longitudinal direction from each other, and a second air vent groove 70b that separates the adjacent adsorption regions 63 and the respective restraint regions 64 from each other in the width direction. That is, the air vent groove 70 is formed so as to isolate the adsorption region 63 (the first region), the positive pressure supply region 66 (the second region), and the negative pressure supply region 65 (the third region) from each other. With this configuration, when the adsorption table 22 of the mover 11 faces the sheet-like electrode 2 and adsorbs and holds the sheet-like electrode 2, and when the adsorption table 22 of the mover 11 does not face the sheet-like electrode 2 and does not adsorb and hold the sheet-like electrode 2, in either case, a positive pressure and a negative pressure can be stably applied to the lower surface 22b of the table of the adsorption table 22. Therefore, the mover 11 can be stably and non-contactingly restrained in the vertical direction without vibration.

[0050] As described above, the preferred embodiments of the present disclosure have been described. The above embodiments have the following features.

[0051] The electrode transfer system 1 includes an air floating stage 4 that floats the sheet-like electrode 2, and a planar linear motor 5 that adsorbs and holds the sheet-like electrode 2 floating by the air floating stage 4 and transfers it. The planar linear motor 5 includes a stator 10 and a mover 11, and is configured to horizontally drive and swivel drive the mover 11 in a state where the mover 11 is magnetically levitated on the stator 10. The mover 11 has an adsorption table 22 for adsorbing and holding the sheet-like electrode 2. The adsorption table 22 has a table upper surface 22a that can face the sheet-like electrode 2, a table lower surface 22b on the opposite side of the table upper surface 22a, and a negative pressure flow path 32 that opens to the table upper surface 22a and the table lower surface 22b. The air floating stage 4 extends along the conveyance direction of the sheet-like electrode 2 and has a negative pressure supply body 50 that supplies negative pressure to the negative pressure flow path 32 that opens to the lower surface 22b of the table of the adsorption table 22. According to the above configuration, a configuration in which the mover 11 adsorbs and holds the sheet-like electrode 2 is realized without complicating the configuration of the mover 11.

[0052] Further, a negative pressure flow path 32 is connected to the lower table surface 22b of the adsorption table 22, and a lower opening 31 that extends along the conveyance direction is formed. According to the above configuration, even when the mover 11 is conveying the sheet-like electrode 2, the negative pressure supply body 50 can supply negative pressure to the negative pressure flow path 32 without any problems.

[0053] Further, a plurality of upper openings 30 to which the negative pressure flow path 32 is connected are formed in the upper table surface 22a of the adsorption table 22. According to the above configuration, the adsorption table 22 can stably adsorb and hold the sheet-like electrode 2.

[0054] Further, the negative pressure supply body 50 is configured to non - contactingly restrain the adsorption table 22 in the vertical direction by simultaneously supplying positive pressure and negative pressure to the lower table surface 22b of the adsorption table 22. According to the above configuration, the negative pressure supply body 50 can restrain the adsorption table 22 with high rigidity in the vertical direction.

[0055] Further, the upper surface 52a of the adsorption and floating porous body 52 of the negative pressure supply body 50 has an adsorption region 63 (first region) that supplies negative pressure to the negative pressure flow path 32 of the adsorption table 22, a positive pressure supply region 66 (second region) that supplies positive pressure to the lower table surface 22b of the adsorption table 22, and a negative pressure supply region 65 (third region) that supplies negative pressure to the lower table surface 22b of the adsorption table 22. The upper surface 52a of the adsorption and floating porous body 52 of the negative pressure supply body 50 further has an air vent groove 70 that separates the adsorption region 63, the positive pressure supply region 66, and the negative pressure supply region 65 from each other. According to the above configuration, regardless of whether the adsorption table 22 is adsorbing and holding the sheet-like electrode 2 or not, the negative pressure supply body 50 can stably restrain the adsorption table 22.

[0056] In addition, in FIG. 5, no holes are formed in the positive pressure supply region 66 so as to penetrate the adsorption and floating porous body 52 straight in the vertical direction. However, instead of this, a plurality of holes may be formed in the positive pressure supply region 66 so as to penetrate the adsorption and floating porous body 52 straight in the vertical direction.

[0057] In addition to adsorbing and holding the sheet-like electrode 2, the mover 11 may be configured to clamp the sheet-like electrode 2 by providing a clamp arm or the like.

Explanation of Signs

[0058] 1 Electrode transfer system 2 Sheet-like electrode 3 Positive electrode foil 4 Air floating stage 5 Planar linear motor 6 Camera 7 Control device 8 First planar linear motor 9 Second planar linear motor 10 Stator 11 Mover 12 Circulation path 13 Stator 14 Mover 15 Circulation path 20 Base 21 Rail 22 Adsorption table 22a Table upper surface 22b Table lower surface 30 Upper opening 30A Upper opening 31 Lower opening 32 Negative pressure flow path 32A Negative pressure flow path 40 Opening region 41 Adjacent region 50 Negative pressure supply body 51 Base block 51a Upper surface 52 Adsorption floating porous body 52a Upper surface 53 Adsorption region 54 Restraint region 55 Restraint negative pressure supply hole 56 Restraint positive pressure supply hole 57 Adsorption negative pressure supply hole 63 Adsorption region 64 Restraint region 65 Negative pressure supply region 66 Positive pressure supply region 67 Suction negative pressure supply hole 68 Restraint negative pressure supply hole 70 Air vent groove 70a First air vent groove 70b Second air vent groove 80 Positive pressure source 81 Negative pressure source 90 Air floating stage body

Claims

1. An air levitation stage for levitating a sheet-shaped electrode, A planar linear motor that adsorbs and holds the sheet-shaped electrode levitated by the air levitation stage and conveys it, Including, The planar linear motor includes a stator and a mover, and is configured to horizontally drive and swivel-drive the mover in a state where the mover is magnetically levitated on the stator, The mover has an adsorption table for adsorbing and holding the sheet-shaped electrode, The adsorption table has a table upper surface facing the sheet-shaped electrode, a table lower surface on the opposite side of the table upper surface, and a negative pressure flow path opening to the table upper surface and the table lower surface, The air levitation stage has a negative pressure supply body that extends along the conveyance direction of the sheet-shaped electrode and supplies negative pressure to the negative pressure flow path opening to the table lower surface of the adsorption table, An electrode conveyance system.

2. The electrode conveyance system according to Claim 1, On the table lower surface of the adsorption table, a lower opening that is connected to the negative pressure flow path and extends along the conveyance direction is formed, An electrode conveyance system.

3. The electrode conveyance system according to Claim 1, On the table upper surface of the adsorption table, a plurality of upper openings to which the negative pressure flow path is connected are formed, An electrode conveyance system.

4. The electrode conveyance system according to Claim 1, The negative pressure supply body is configured to non-contactingly constrain the adsorption table in the vertical direction by simultaneously supplying positive pressure and negative pressure to the table lower surface of the adsorption table, An electrode conveyance system.

5. The electrode conveyance system according to Claim 4, The upper surface of the negative pressure supply body is, A first region that supplies the negative pressure to the negative pressure flow path of the adsorption table, A second region that supplies the positive pressure to the table lower surface of the adsorption table, A third region that supplies the negative pressure to the table lower surface of the adsorption table, An air vent groove that separates the first region, the second region, and the third region from each other, Having, An electrode conveyance system.

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