Acid generator, salt, resin, resist composition, and method for producing resist pattern

Abstract

To provide a salt, an acid generator, a resist composition, a resin and the like which allow a resist pattern having good CD uniformity to be produced.SOLUTION: The acid generator contains a salt represented by formula (I) or a structural unit derived from the salt of formula (I). [In the formula, Q1, Q2, R1 and R2 each represent an H atom, an F atom, a perfluoroalkyl group or the like; z represents an integer of 0-6; X1 represents -CO-O-, -O-CO- or the like; L1 represents a single bond or a substituted / unsubstituted hydrocarbon group; R3 represents a fluorinated alkyl group; R4 represents an H atom, an alkyl group or the like; X11 represents a single bond, -CO-O-, -O-CO- or the like; m3 represents an integer of 1-3; Ar represents a substituted / unsubstituted aromatic hydrocarbon group; X10 represents a single bond or -CO-O-; R5 represents an H atom, a halogen atom, or an alkyl group which may have a halogen atom; and ZI+ represents an organic cation.]SELECTED DRAWING: None

Description

Technical Field

[0001] The present invention relates to a salt for an acid generator used in semiconductor microfabrication, an acid generator containing the salt, a resin, a resist composition, and a method for producing a resist pattern.

Background Art

[0002] Patent Document 1 describes a resin containing a structural unit derived from a salt represented by the following formula and a resist composition containing the resin. TIFF2025109689000001.tif2864

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The present invention provides a salt capable of producing a resist pattern with better CD uniformity (CDU) than a resist pattern formed from the above resist composition.

Means for Solving the Problems

[0005] The present invention includes the following inventions. [1] An acid generator containing a salt represented by formula (I) or a structural unit represented by formula (IP). TIFF2025109689000002.tif61155[In formula (I) and formula (IP), Q 1 、Q 2 、R 1 and R 2 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z represents an integer from 0 to 6. When z is 2 or more, a plurality of R 1 and R 2 may be the same as or different from each other. X 1 is *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * represents the bonding site with C(R 1 )(R 2 ) or C(Q 1 )(Q 2 ).) represents the bonding site with. mm1 represents 0 or 1. L 1 represents a single bond or a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO-, -NR 7 - or -SO2-. R 7 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R 3 represents a fluorinated alkyl group having 1 to 6 carbon atoms. R 4 represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or a fluorinated alkyl group having 1 to 6 carbon atoms. X 11 is a single bond, *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * represents the bonding site with Ar.). m3 represents an integer from 1 to 3. When m3 is 2 or more, the signs in parentheses may be the same or different. Ar represents an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. X 10 is a single bond or *-CO-O- (where * represents the bonding site with the carbon atom to which R 5 is bonded.). R 5 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. ZI + represents an organic cation. [2]L 1 is a single bond, An alkanediyl group having 1 to 8 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-, and the alkanediyl group may have a substituent). *-L 11 -W 1 -L 12 -Or *-L 11 -W 1 -L 12 -W 2 -L 13 -(L 11 、L 12 And L 13 Each independently represents a single bond or an alkanediyl group having 1 to 8 carbon atoms which may have a substituent, and W 1 And W 2 Each independently represents a cyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent. The -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-, and the -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-. L 11 、L 12 、L 13 、W 1 And W 2 The total number of carbon atoms of is 20 or less. * Represents the bonding site with X 1 Or An alkanediyl group having 1 to 8 carbon atoms and having a cyclic hydrocarbon group having 3 to 12 carbon atoms in the side chain (the cyclic hydrocarbon group and the alkanediyl group may have a substituent, and the total number of carbon atoms of the cyclic hydrocarbon group and the alkanediyl group is 20 or less).) The acid generator according to [1]. [3]X 1 Is *-CO-O- or *-O-CO-O- (where * is C(R 1 )(R 2 ) or C(Q 1 )(Q 2 ) and represents the bonding site with.) The acid generator according to [1] or [2]. [4]R 3 And R 4The acid generator according to any one of [1] to [3], each independently being a perfluoroalkyl group having 1 to 3 carbon atoms. [5] A resist composition containing the acid generator according to any one of [1] to [4]. [6] The acid generator is a salt represented by formula (I), The resist composition according to [5], further containing a resin containing a structural unit (a1) having an acid-labile group. [7] The acid generator is a resin containing a structural unit represented by formula (IP), and the resin further contains a structural unit (a1) having an acid-labile group. The resist composition according to [5]. [8] The resist composition according to [7], further containing a salt represented by formula (I). [9] The structural unit (a1) having an acid-labile group includes at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), and a structural unit represented by formula (a1-5). The resist composition according to any one of [6] to [8]. TIFF2025109689000003.tif44145 [In formula (a1-0), formula (a1-1), and formula (a1-2), L a01 、L a1 and L a2 each independently represents -O- or *-O-(CH2) k1 -CO-O-, k1 represents an integer of 1 to 7, and * represents the bonding site with -CO-. R a01 、R a4 and R a5 each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 、R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, and the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. m1’ represents any integer from 0 to 14. n1 represents any integer from 0 to 10. n1’ represents any integer from 0 to 3. TIFF2025109689000004.tif31119[In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a17 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -CO-, or -NR a18 -. R a18 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36They are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with -C-O- to which they are bonded, and -CH2- contained in the hydrocarbon group and the divalent hydrocarbon group may be replaced by -O- or -S-. na1 represents any integer from 1 to 5, and when na1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. na11 represents any integer from 0 to 4, and when na11 is 2 or more, a plurality of Rs a17 may be the same as or different from each other. mc represents any integer from 0 to 2. TIFF2025109689000005.tif4558[In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. Z a1 represents a single bond or *-(CH2) h3 -CO-L 54 -, h3 represents any integer from 1 to 4, and * represents the bonding site with L 51 L 51 L 52 L 53 and L 54 each independently represents -O- or -S-. s1 represents any integer from 1 to 3. s1’ represents any integer from 0 to 3.

[10] The resist composition according to any one of [6] to [9], wherein the structural unit (a1) having an acid-labile group contains the structural unit represented by formula (a1-6). TIFF2025109689000006.tif3682[In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a62 R a63 and R a64 ​each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atom to which they are bonded. X a61 represents a single bond, -CO-O-*, or -CO-NR a65 -*, where * represents a bond to Ar, and R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 represents a single bond, *-O-L a61 -, or *-CO-O-L a62 -, where * represents a bond to Ar, and L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.] The resist composition according to any one of [6] to

[10] , wherein the resin containing the structural unit (a1) having an acid-labile group further contains a structural unit represented by the formula (a2-A). TIFF2025109689000007.tif31127[In the formula (a2-A), R a2 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -CO-, or -NR a28 -. R a28represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents any integer from 1 to 5, and when nA2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. na21 represents any integer from 0 to 4, and when na21 is 2 or more, the plurality of Rs a27 may be the same as or different from each other. mc represents any integer from 0 to 2. The resist composition according to any one of [5] to

[11] , further containing a salt that generates an acid having a lower acidity than the acid generated from the salt represented by formula (I) or the structural unit represented by formula (IP).

[13] (1) A step of applying the resist composition according to any one of [5] to

[12] onto a substrate, (2) A step of drying the applied resist composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the exposed composition layer, and (5) A step of developing the heated composition layer, which is a method for manufacturing a resist pattern.

[14] The salt represented by the above-mentioned formula (I).

[15] L 1 is a single bond, an alkanediyl group having 1 to 8 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-, and the alkanediyl group may have a substituent), *-L 11 -W 1 -L 12 - or *-L 11 -W 1 -L 12 -W 2 -L 13 -(L 11 、L 12 and L 13 each independently represents a single bond or an alkanediyl group having 1 to 8 carbon atoms which may have a substituent, and W 1 and W 2each independently represents a cyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent, -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-, L 11 L 12 L 13 W 1 and W 2 The total number of carbon atoms of is 20 or less. * represents the bonding site with X 1 ). Or an alkanediyl group having 1 to 8 carbon atoms and having a cyclic hydrocarbon group having 3 to 12 carbon atoms in the side chain (the cyclic hydrocarbon group and the alkanediyl group may have a substituent, and the total number of carbon atoms of the cyclic hydrocarbon group and the alkanediyl group is 20 or less).) The salt according to

[14] .

[16] X 1 is *-CO-O- or *-O-CO-O- (where * represents C(R 1 )(R 2 ) or C(Q 1 )(Q 2 ) and represents the bonding site with.).) The salt according to

[14] or

[15] .

[17] R 3 and R 4 are each independently a perfluoroalkyl group having 1 to 3 carbon atoms. The salt according to any one of

[14] to

[16] .

[18] A resin containing a structural unit represented by the above formula (IP). [Advantages of the Invention]

[0006] By using the resist composition containing the salt of the present invention, a resist pattern can be produced with good CD uniformity (CDU). [Embodiments for Carrying Out the Invention]

[0007] In this specification, the term "(meth)acrylic monomer" means "at least one of acrylic monomers and methacrylic monomers". Notations such as "(meth)acrylate" and "(meth)acrylic acid" also represent the same meaning. For groups described in this specification that can take both linear and branched structures, either one is acceptable. When -CH2- contained in a hydrocarbon group or the like is replaced by -O-, -S-, -SO-, -CO-, -NR X -(where X is an arbitrary symbol) or -SO2-, the same examples apply to each group, and the carbon number before replacement is defined as the carbon number of the hydrocarbon group or the like. The term "combined group" means a group formed by bonding two or more of the exemplified groups, and the valences of these groups may be appropriately changed depending on the bonding form. The terms "derived from" or "derived" refer to the fact that the polymerizable C=C bond contained in the molecule becomes a -C-C- group (single bond) by polymerization. When stereoisomers exist, all stereoisomers are included. An "acid-labile group" means a group that, when contacted with an acid (e.g., trifluoromethanesulfonic acid, etc.), causes a leaving group to leave and forms a hydrophilic group (e.g., a hydroxy group or a carboxy group). A "base-labile group" means a group that, when contacted with a base (e.g., trimethylamine, tetramethylammonium hydroxide, etc.), causes a leaving group to leave and forms a hydrophilic group (a carboxy group or a hydroxy group). Each group may have any position and number of hydrogen atoms contained in the group replaced by a bond depending on the number of substituents, etc. The carbon number in the substituent is not included in the carbon number of the group being substituted. In this specification, the "solid content of the resist composition" means the total of the components excluding the solvent (E) described later from the total amount of the resist composition.

[0008] <Salt represented by formula (I)> The present invention relates to a salt represented by formula (I) (hereinafter sometimes referred to as "salt (I)"). Among salts (I), the side having a negative charge may be referred to as "anion (I)", and the side having a positive charge may be referred to as "cation (I)".

[0009] 〔Anion (I)〕 In formula (I), Q1 , Q 2 , R 1 and R 2 Examples of the perfluoroalkyl group of Q, R, and R include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, etc. The number of carbon atoms of the perfluoroalkyl group is preferably 1 to 4, more preferably 1 to 3. Q 1 , Q 2 , R 1 and R 2 Examples of the alkyl group of Q, R, and R include a linear or branched alkyl group, for example, a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, etc. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3. Q 1 and Q 2 Preferably, at least one of Q and Q contains a fluorine atom or a perfluoroalkyl group, more preferably at least one of them is a fluorine atom or a perfluoroalkyl group, still more preferably each is independently a trifluoromethyl group or a fluorine atom, and even more preferably both are fluorine atoms. R 1 and R 2 Each of R and R is independently preferably a hydrogen atom, a fluorine atom, a methyl group or a trifluoromethyl group, more preferably a hydrogen atom or a fluorine atom, and still more preferably a hydrogen atom. z is preferably any integer from 0 to 4, more preferably any integer from 0 to 3, still more preferably any integer from 0 to 2, and even more preferably 0 or 1. X 1 is preferably *-CO-O- or *-O-CO-O-, more preferably *-CO-O- (* is C(R 1 )(R 2 ) or C(Q 1 )(Q2 ) represents the binding site with ().

[0010] L 1 Examples of the hydrocarbon group in include divalent chain hydrocarbon groups such as alkanediyl groups, divalent alicyclic hydrocarbon groups that are monocyclic or polycyclic (including spiro rings, condensed rings, bridged rings, etc.), and divalent cyclic hydrocarbon groups such as divalent aromatic hydrocarbon groups. A group formed by combining two or more of these groups (for example, a divalent hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group) may also be used. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, and heptadecane-1,17-diyl group, and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The number of carbon atoms in the chain hydrocarbon group may be 1 to 18, preferably 1 to 12, more preferably 1 to 10, still more preferably 1 to 9, even more preferably 1 to 8, still even more preferably 1 to 6, and even more preferably 1 to 4. Examples of the monocyclic or polycyclic divalent alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups, etc. The binding site can be at any position. JPEG2025109689000008.jpg47169Specifically, a monocyclic divalent alicyclic hydrocarbon group which is a monocyclic cycloalkanediyl group such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, a cyclooctane-1,5-diyl group, a polycyclic divalent alicyclic hydrocarbon group which is a polycyclic cycloalkanediyl group such as a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, an adamantane-1,5-diyl group, an adamantane-2,6-diyl group, and a spiro ring having a cycloalkyl group such as a spirocyclohexane-1,2'-cyclopentyl group, a spiroadamantane-2,3'-cyclopentyl group, a cycloalkyl group having a norbornyl group or an adamantyl group each spiro-bonded thereto, and the like can be mentioned. The number of carbon atoms of the alicyclic hydrocarbon group may be 3 to 18, preferably 3 to 16, and more preferably 3 to 12. Examples of the divalent aromatic hydrocarbon group include aromatic hydrocarbon groups such as arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, and a phenanthrylene group. The number of carbon atoms of the aromatic hydrocarbon group may be 6 to 18, preferably 6 to 14, and more preferably 6 to 10.

[0011] Examples of the group formed by combining two or more kinds of groups include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon, a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon, a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a chain hydrocarbon group, and the like. In the combination, two or more kinds of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined respectively. Also, any group may be bonded to X 1 It may be bonded. Examples of a group combining an alicyclic hydrocarbon group and a chain hydrocarbon include, for example, a divalent alicyclic hydrocarbon group - alkane diyl group -, an alkane diyl group - divalent alicyclic hydrocarbon group - alkane diyl group -, an alkane diyl group - divalent alicyclic hydrocarbon group -, an alkane diyl group having an alicyclic hydrocarbon group in its side chain, and the like. Examples of a group combining an aromatic hydrocarbon group and an alkane diyl group include, for example, a divalent aromatic hydrocarbon group - alkane diyl group -, an alkane diyl group - divalent aromatic hydrocarbon group - alkane diyl group -, an alkane diyl group - divalent aromatic hydrocarbon group -, an alkane diyl group having an aromatic hydrocarbon group in its side chain, and the like. Examples of a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include - aromatic hydrocarbon group - alicyclic hydrocarbon group -, - alicyclic hydrocarbon group - aromatic hydrocarbon group -, - alicyclic hydrocarbon group - aromatic hydrocarbon group - alicyclic hydrocarbon group -, a group in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are condensed, and the like. In the combination, two or more alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined respectively. Also, any group may be bonded to X 1 .

[0012] L 1 The -CH2- contained in the hydrocarbon group of may be replaced by -O-, -S-, -SO-, -SO2-, -NR 7 -, or -CO-. L 1 When the -CH2- contained in the hydrocarbon group of is replaced by -O-, -S-, -SO-, -SO2-, -NR 7 -, or -CO-, the number of carbon atoms before replacement is taken as the number of carbon atoms of the hydrocarbon group. R 7 Examples of the alkyl group of include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, and the like. When the -CH2- contained in the hydrocarbon group is -O-, -S-, -SO-, -SO2-, -NR 7-or a group replaced by -CO- includes a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- contained in a methyl group is replaced by -S-), an amino group (a group in which -CH2- contained in a methyl group is replaced by -NR 7 -), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in a methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), a peptide group (a group in which -CH2-CH2- contained in an ethylene group is replaced by -CO-NR 7 -), a carboxy group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), an alkoxy group (a group in which -CH2- at any position contained in an alkyl group is replaced by -O-), an alkylthio group (a group in which -CH2- at any position contained in an alkyl group is replaced by -S-), an alkylsulfonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -SO2-), an alkylamino group (a group in which -CH2- at any position contained in an alkyl group is replaced by -NR 7 -), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-), an alkylamino group (a group in which -CH2- at any position contained in an alkyl group is replaced by -NR 7-replaced group), an alkylcarbonyl group (a group in which any -CH2- in the alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which any -CH2-CH2- in the alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which any -CH2-CH2-CH2- in the alkyl group is replaced by -O-CO-O-), an alkanedioxy group (a group in which any -CH2- in the alkanedioxy group is replaced by -O-), an alkanedioxycarbonyl group (a group in which any -CH2-CH2- in the alkanedioxy group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which any -CH2- in the alkanediyl group is replaced by -CO-), an alkanediylcarbonyloxy group (a group in which any -CH2-CH2- in the alkanediyl group is replaced by -CO-O-), an alkanediylsulfonyl group (a group in which any -CH2- in the alkanediyl group is replaced by -SO2-), an alkanediylthio group (a group in which any -CH2- in the alkanediyl group is replaced by -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyl-oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, and the like can be mentioned.

[0013] Examples of the alkoxy group include alkoxy groups having 1 to 19 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, and the like. The number of carbon atoms of the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 19 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, undecylthio group and the like. The number of carbon atoms of the alkylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylamino group include alkylamino groups having 1 to 19 carbon atoms, such as methylamino group, ethylamino group, dimethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group and the like. The number of carbon atoms of the alkylamino group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 19 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 20 carbon atoms, such as acetyl group, propionyl group and butyryl group and the like. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 19 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. The number of carbon atoms of the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 19 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group and the like. The number of carbon atoms of the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanedioxy group include alkanedioxy groups having 1 to 19 carbon atoms, such as methyleneoxy group, ethyleneoxy group, propanedioloxy group, butanedioloxy group, pentanedioloxy group and the like. The number of carbon atoms of the alkanedioxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxycarbonyl group include alkanediyl-oxycarbonyl groups having 2 to 19 carbon atoms, such as a methylene-oxycarbonyl group, an ethylene-oxycarbonyl group, a propanediyl-oxycarbonyl group, and a butanediyl-oxycarbonyl group. Examples of the alkanediyl-carbonyl group include alkanediyl-carbonyl groups having 2 to 20 carbon atoms, such as a methylene-carbonyl group, an ethylene-carbonyl group, a propanediyl-carbonyl group, a butanediyl-carbonyl group, and a pentanediyl-carbonyl group. Examples of the alkanediyl-carbonyloxy group include alkanediyl-carbonyloxy groups having 2 to 19 carbon atoms, such as a methylene-carbonyloxy group, an ethylene-carbonyloxy group, a propanediyl-carbonyloxy group, and a butanediyl-carbonyloxy group. The number of carbon atoms of the alkanediyl-oxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkanediyl-carbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkanediyl-carbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl-sulfonyl group include alkanediyl-sulfonyl groups having 1 to 17 carbon atoms, such as a methylene-sulfonyl group, an ethylene-sulfonyl group, and a propylene-sulfonyl group. The number of carbon atoms of the alkanediyl-sulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-thio group include alkanediyl-thio groups having 1 to 19 carbon atoms, such as a methylene-thio group, an ethylene-thio group, and a propylene-thio group. The number of carbon atoms of the alkanediyl-thio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 27 carbon atoms, such as methyleneamino group, ethyleneamino group, dimethyleneamino group, propyleneamino group, butyleneamino group, pentyleneamino group, hexyleneamino group, and the like. The number of carbon atoms of the alkanediylamino group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 19 carbon atoms, such as cyclohexyloxy group, and the like. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 19 carbon atoms, such as cyclohexylmethoxy group, and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 18 carbon atoms, such as butoxycarbonyloxy group, and the like. Examples of the aromatic hydrocarbon group-carbonyl-oxy group include aromatic hydrocarbon group-carbonyl-oxy groups having 7 to 19 carbon atoms, such as benzoyloxy group, and the like. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 20 carbon atoms, such as benzoyl group, and the like. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 19 carbon atoms, such as phenyloxy group, and the like.

[0014] In addition, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -SO-, -CO-, -NR 7 - or -SO2- include the following groups and the like. Among the groups represented below, groups in which -O- is replaced by -S- and -CO- is replaced by -SO2- respectively are also included. The bonding site can be at any position. TIFF2025109689000009.tif54168 Examples of the group in which -CH2- contained in the group formed by condensation of an alicyclic hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -S-, -SO-, -CO- or -SO2- also include the following groups and the like. The bonding site can be at any position. TIFF2025109689000010.tif38164

[0015] L 1 Examples of the substituent that may be possessed include a halogen atom, a cyano group, a nitro group, etc. L 1 When -CH2- contained in the chain hydrocarbon group of is replaced with -O-, -S-, -SO-, -CO-, -NR 7 -, or -SO2-, substantially, L 1 may have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkylamino group, an amino group, a thiol group, an alkylthio group, an alkylsulfonyl group, etc. Also, L 1 When is a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group such as an alkyl group, the chain hydrocarbon group such as an alkyl group can be a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom, etc. L 1 The hydrocarbon group of may have one substituent or a plurality of substituents. L 1is preferably a single bond, a chain hydrocarbon group having 1 to 10 carbon atoms which may have a substituent (-CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), a cyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (-CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO-, -CO- or -SO2-), or a group formed by combining these, and is preferably a single bond, a linear or branched alkanediyl group having 1 to 8 carbon atoms (-CH2- contained in the alkanediyl group may be replaced with -O- or -CO-). and the alkanediyl group may have a substituent.), a cyclic hydrocarbon group having 3 to 12 carbon atoms (-CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-, and the cyclic hydrocarbon group may have a substituent), or a group formed by combining these, is more preferred, and a single bond, a linear or branched alkanediyl group having 1 to 8 carbon atoms (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-, and the alkanediyl group may have a substituent), *-L 11 -W 1 -L 12 -or*-L 11 -W 1 -L 12 -W 2 -L 13 -(L 11 , L 12 and L 13 each independently represents a single bond or a linear or branched alkanediyl group having 1 to 8 carbon atoms which may have a substituent; W 1 and W 2 each independently represents a cyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent, -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-, -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-, L 11 , L 12 , L 13 , W 1 and W 2The total number of carbon atoms is 20 or less. * is X 1 represents a bonding site with). Or a linear or branched alkanediyl group having 1 to 8 carbon atoms and having a cyclic hydrocarbon group having 3 to 12 carbon atoms in the side chain (the cyclic hydrocarbon group and the alkanediyl group may have a substituent, and the total number of carbon atoms of the cyclic hydrocarbon group and the alkanediyl group is 20 or less).) is more preferable. W 1 and W 2 The cyclic hydrocarbon group and the cyclic hydrocarbon group that the linear or branched alkanediyl group in have in the side chain are preferably an alicyclic hydrocarbon group having 3 to 12 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, and more preferably a monocyclic alicyclic hydrocarbon group having 5 or 6 carbon atoms, a polycyclic alicyclic hydrocarbon group having 5 to 12 carbon atoms or a phenylene group. L 11 is preferably a single bond or a linear or branched alkanediyl group having 1 to 4 carbon atoms that may have a substituent, and is preferably a single bond, a methylene group, an ethylene group, -CH(CF3)- or -C(CF3)2-. L 12 and L 13 are each independently preferably a single bond or a linear or branched alkanediyl group having 1 to 6 carbon atoms that may have a substituent (-CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and more preferably a single bond or a linear alkanediyl group having 1 to 6 carbon atoms (one -CH2- contained in the alkanediyl group is replaced by -CO-, and the other -CH2- may be replaced by -O- or -CO-). Further, in the case of an alkanediyl group having 2 or more carbon atoms, at least one -CH2-CH2- contained in the alkanediyl group is preferably replaced by -O-CO- or -CO-O-, and in the case of an alkanediyl group having 3 or more carbon atoms, at least one -CH2-CH2-CH2- contained in the alkanediyl group is preferably replaced by -O-CO-O-.

[0016] R 3 and R 4Examples of the alkyl fluoride group include a difluoromethyl group, a trifluoromethyl group, a 1,1-difluoroethyl group, a 2,2-difluoroethyl group, a 2,2,2-trifluoroethyl group, a perfluoroethyl group, a 1,1,2,2-tetrafluoropropyl group, a 1,1,2,2,3,3-hexafluoropropyl group, a perfluoroethylmethyl group, a 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 1,1,2,2-tetrafluorobutyl group, a 1,1,2,2,3,3-hexafluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluorobutyl group, a 1,1-bis(trifluoro)methyl-2,2,2-trifluoroethyl group, a 2-(perfluoropropyl)ethyl group, a 1,1,2,2,3,3,4,4-octafluoropentyl group, a perfluoropentyl group, a 1,1,2,2,3,3,4,4,5,5-decafluoropentyl group, a 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl group, a perfluoropentyl group, a 2-(perfluorobutyl)ethyl group, a 1,1,2,2,3,3,4,4,5,5-decafluorohexyl group, a 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl group, a perfluoropentylmethyl group, and a perfluorohexyl group. The number of carbon atoms of the alkyl fluoride group is preferably 1 to 4, more preferably 1 to 3. R 4 Examples of the alkyl group of 1 include the alkyl groups exemplified in the examples of the alkyl group of R 3 and R 4 are each independently preferably a perfluoroalkyl group having 1 to 6 carbon atoms, more preferably a perfluoroalkyl group having 1 to 3 carbon atoms, and even more preferably a trifluoromethyl group. X 11 is preferably a single bond or *-CO-O-. m3 is preferably 1 or 2, more preferably 1. Examples of the aromatic hydrocarbon group of Ar include aromatic hydrocarbon groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, and a phenanthrylene group. Examples of the substituent of Ar include L 1 and the same groups as those. Ar is preferably a phenylene group which may have a substituent or a naphthylene group which may have a substituent, more preferably a phenylene group which may have a substituent, and even more preferably a phenylene group. When Ar is a phenylene group, X 11 is preferably bonded to the m-position or p-position with respect to the bonding position of X 10 . X 10 is preferably a single bond. Examples of the halogen atom of R 5 include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group having 1 to 6 carbon atoms in R 5 are the alkyl groups exemplified as the alkyl group of R 1 . The alkyl group of R 5 may be a haloalkyl group which is an alkyl group having a halogen atom. Examples of the haloalkyl group include a fluoroalkyl group having 1 to 6 carbon atoms, a chloroalkyl group having 1 to 6 carbon atoms, a bromoalkyl group having 1 to 6 carbon atoms, and an iodoalkyl group having 1 to 6 carbon atoms. Examples of the haloalkyl group include a perfluoroalkyl group having 1 to 6 carbon atoms (such as a trifluoromethyl group and a pentafluoroethyl group), a chloromethyl group, a bromomethyl group, and an iodomethyl group. R 5 is preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, and more preferably a hydrogen atom or a methyl group.

[0017] Examples of the anion (I) include, for example, the following anions. Among them, the anions represented by Formula (Ia-1) to Formula (Ia-20), Formula (Ia-25) to Formula (Ia-65), and Formula (Ia-70) to Formula (Ia-90) are preferred. TIFF2025109689000011.tif214158

[0018] TIFF2025109689000012.tif239165

[0019] TIFF2025109689000013.tif127163

[0020] TIFF2025109689000014.tif107160

[0021] TIFF2025109689000015.tif226161

[0022] TIFF2025109689000016.tif254156

[0023] TIFF2025109689000017.tif247166

[0024] 〔Cation (I)〕 ZI + Examples of the organic cation include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, and organic phosphonium cations. Among these, organic sulfonium cations and organic iodonium cations are preferred, and arylsulfonium cations are more preferred. Specifically, cations represented by any of formula (b2-1) to formula (b2-5) (hereinafter, may be referred to as etc. according to the formula number) can be mentioned. TIFF2025109689000018.tif82160[In formula (b2-1) to formula (b2-5), R b4 ~R b6Each independently represents a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms. The hydrogen atoms contained in the chain hydrocarbon group may be substituted with a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. The hydrogen atoms contained in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group. The hydrogen atoms contained in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b4 and R b5 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded, and the -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. R b7 and R b8 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent any integer from 0 to 5. When m2 is 2 or more, the plurality of R b7 may be the same or different, and when n2 is 2 or more, the plurality of R b8 may be the same or different. R b9 and R b10 each independently represents a chain hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded, and the -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. R b11represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and a hydrogen atom contained in the chain hydrocarbon group may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, and a hydrogen atom contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 and may be bonded to each other to form a ring including -CH-CO- to which they are bonded, and -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. R b13 ~R b18 and R b21 ~R b26 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b13 and R b14 and R b21 and R b22 and may be bonded to each other to form a ring containing a sulfur atom together with the benzene ring to which they are bonded, and -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. R b27 ~R b29 each independently represents a hydrogen atom or a group containing an acid-labile group. L b31 and L b41 ~L b43 each independently represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer of 0 to 5. q2 and r2 each independently represent an integer of 0 to 4. u2 represents 0 or 1. When o2 is 2 or more, a plurality of R b13are the same or different, and when p2 is 2 or more, a plurality of Rs b14 are the same or different, and when q2 is 2 or more, a plurality of Rs b15 are the same or different, and when r2 is 2 or more, a plurality of Rs b16 are the same or different, and when s2 is 2 or more, a plurality of Rs b17 are the same or different, and when t2 is 2 or more, a plurality of Rs b18 are the same or different. u3 represents any integer from 1 to 3, and satisfies 1 ≦ u3 + q23 ≦ 5. u4 and u5 each independently represent any integer from 0 to 3, and satisfy 0 ≦ u4 + o21 ≦ 5 and 0 ≦ u5 + p22 ≦ 5. o21, p22, q23, r24, t25 and s26 each independently represent any integer from 0 to 4. When u3, u4 and u5 are each 2 or more, the groups in the plurality of parentheses are each the same or different. When o21, p22, q23, r24, t25 and s26 are each 2 or more, a plurality of Rs b21 ~R b26 are each the same or different.]

[0025] When u2 is 0, any one of o2, p2, q2 and r2 is 1 or more, and R b13 ~R b16 At least one of them is preferably a halogen atom. When u2 is 1, any one of o2, p2, s2, t2, q2 and r2 is 1 or more, and R b13 ~R b18 At least one of them is preferably a halogen atom. Furthermore, when u2 is 0, r2 is preferably 1 or more, and more preferably 1. Also, when u2 is 0 and r2 is 1 or more, R b16 is preferably a halogen atom. The aliphatic hydrocarbon group represents a chain hydrocarbon group and an alicyclic hydrocarbon group. Examples of the chain hydrocarbon group include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, octyl group, and 2-ethylhexyl group. In particular, R b9 ~R b12 The chain hydrocarbon group is preferably a C1-C12 group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, and cyclodecyl group. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, norbornyl group, and the following groups. TIFF2025109689000019.tif11157 In particular, R b9 ~R b12 The alicyclic hydrocarbon group is preferably a C3-C18 group, more preferably a C4-C12 group.

[0026] Examples of the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include methylcyclohexyl group, dimethylcyclohexyl group, 2-methyladamantan-2-yl group, 2-ethyladamantan-2-yl group, 2-isopropyladamantan-2-yl group, methylnorbornyl group, and isobornyl group. In the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms of the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less. The alkyl fluoride group represents an alkyl group having 1 to 12 carbon atoms and having a fluorine atom, and examples thereof include fluoromethyl group, difluoromethyl group, trifluoromethyl group, and perfluorobutyl. The number of carbon atoms of the alkyl fluoride group is preferably 1 to 9, more preferably 1 to 6, and even more preferably 1 to 4. Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, biphenyl group, naphthyl group, and phenanthryl group. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and examples of the aromatic hydrocarbon group having a chain hydrocarbon group include tolyl group, xylyl group, cumenyl group, mesityl group, p-ethylphenyl group, p-tert-butylphenyl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc., and examples of the aromatic hydrocarbon group having an alicyclic hydrocarbon group include p-cyclohexylphenyl group, p-adamantylphenyl group, etc. When the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, a chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms are preferred. Examples of the aromatic hydrocarbon group in which a hydrogen atom is substituted with an alkoxy group include p-methoxyphenyl group, etc. Examples of the chain hydrocarbon group in which a hydrogen atom is substituted with an aromatic hydrocarbon group include aralkyl groups such as benzyl group, phenethyl group, phenylpropyl group, trityl group, naphthylmethyl group, naphthylethyl group, etc. Examples of the alkoxy group include methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, heptyloxy group, octyloxy group, decyloxy group, and dodecyloxy group, etc. Examples of the alkylcarbonyl group include acetyl group, propionyl group, and butyryl group, etc. Examples of the halogen atom include fluorine atom, chlorine atom, bromine atom, and iodine atom, etc. Examples of the alkylcarbonyloxy group include methylcarbonyloxy group, ethylcarbonyloxy group, propylcarbonyloxy group, isopropylcarbonyloxy group, butylcarbonyloxy group, sec-butylcarbonyloxy group, tert-butylcarbonyloxy group, pentylcarbonyloxy group, hexylcarbonyloxy group, octylcarbonyloxy group, and 2-ethylhexylcarbonyloxy group, etc. R b4 and R b5The ring formed by the combination of them together with the sulfur atom to which they are attached may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include rings having 3 to 18 carbon atoms, preferably rings having 4 to 18 carbon atoms. Further, examples of the ring containing a sulfur atom include 3-membered to 12-membered rings, preferably 3-membered to 7-membered rings, and examples thereof include the following rings. * represents a bonding site. TIFF2025109689000020.tif24142

[0027] R b9 and R b10 The ring formed by their combination may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include 3-membered to 12-membered rings, preferably 3-membered to 7-membered rings. Examples thereof include thiolan-1-ium ring (tetrahydrothiophenium ring), thian-1-ium ring, 1,4-oxathian-4-ium ring and the like. R b11 and R b12 The ring formed by their combination may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. Examples of this ring include 3-membered to 12-membered rings, preferably 3-membered to 7-membered rings. Examples thereof include oxocycloheptane ring, oxocyclohexane ring, oxonorbornane ring, oxoadamantane ring and the like. R b27 ~R b29 Examples of the group containing an acid-labile group of ~R include -R c30 , -CO-O-R c30 or -L c10 -CO-O-R c30 wherein the group represented by (L c10 represents an alkanediyl group having 1 to 6 carbon atoms, and R c30 represents an acid-labile group.). R b27 ~R b29 Examples of the acid-labile group of ~R include the acid-labile groups represented by formula (1) or formula (2) in the present specification.

[0028] Among cations (b2-1) to (b2-5), preferably, cation (b2-1), cation (b2-4), or cation (b2-5). Examples of cation (b2-1) include the following cations. TIFF2025109689000021.tif150165 Examples of cation (b2-2) include the following cations. TIFF2025109689000022.tif18150 Examples of cation (b2-3) include the following cations. TIFF2025109689000023.tif26140 Examples of cation (b2-4) include the following cations. TIFF2025109689000024.tif122163 Examples of cation (b2-5) include the following cations. TIFF2025109689000025.tif115158

[0029] Specific examples of salt (I) include salts formed by arbitrarily combining the above-mentioned cations and anions. Specific examples of salt (I) are shown in the following table. In the following table, each symbol represents the symbol attached to the structure representing the above-mentioned anion or cation, and "~" indicates that each of salt (I) and anion (I) corresponds. For example, salt (I-1) is a salt composed of the anion represented by formula (Ia-1) and the cation represented by formula (b2-c-1), salt (I-2) is a salt composed of the anion represented by formula (Ia-2) and the cation represented by formula (b2-c-1), and salt (I-41) is a salt composed of the anion represented by formula (Ia-1) and the cation represented by formula (b2-c-10). TIFF2025109689000026.tif2894 [Table 1] TIFF2025109689000028.tif229159

[0030] Among them, as the salt (I), it is preferable that the salt is a combination of an anion represented by any one of the formulas (Ia-1) to (Ia-20), (Ia-25) to (Ia-65), (Ia-70) to (Ia-90) and a cation represented by any one of the formulas (b2-c-1), (b2-c-10), (b2-c-13), (b2-c-14), (b2-c-18) to (b2-c-20), (b2-c-27), (b2-c-30), (b2-c-31), (b2-c-47), (b2-c-48), (b2-c-50) to (b2-c-79).

[0031] <Method for producing salt (I)> In salt (I), X 11 being *-CO-O- or *-O- (where * represents the bonding site with Ar), the salt (I1) can be produced, for example, by reacting the salt represented by the formula (I-a) with the compound represented by the formula (I-b) in a solvent in the presence of a catalyst. TIFF2025109689000029.tif61158[In the formula, the symbols each represent the same meaning as described above. X 11’ represents *-CO-O- or *-O- (where * represents the bonding site with Ar).] Examples of the catalyst in this reaction include carbonyldiimidazole, triethylamine, diisopropylethylamine, pyridine, dimethylaminopyridine, potassium hydroxide, etc. Examples of the solvent in this reaction include chloroform, acetonitrile, etc. The reaction temperature is usually 5°C to 80°C, and the reaction time is usually 0.5 hour to 24 hours. Examples of the salt represented by the formula (I-a) include salts represented by the following formula, etc., which can be easily obtained from the market and can also be easily produced by known production methods. TIFF2025109689000030.tif237155

[0032] TIFF2025109689000031.tif248167

[0033] TIFF2025109689000032.tif200164

[0034] Examples of the compound represented by formula (I-b) include compounds represented by the following formula, and they are more readily available from the market. TIFF2025109689000033.tif21146

[0035] In salt (I), X 11 Salt (I2) in which is *-O-CO-O- (where * represents the bonding site with Ar) can be produced, for example, by reacting the salt represented by formula (I-a) with the compound represented by formula (I-b2) in a solvent in the presence of carbonyldiimidazole. TIFF2025109689000034.tif64158 [In the formula, the symbols have the same meanings as described above.] Examples of the solvent in this reaction include chloroform, acetonitrile, and the like. The reaction temperature is usually 5°C to 80°C, and the reaction time is usually 0.5 hour to 24 hours. Examples of the compound represented by formula (I-b2) include compounds represented by the following formula, and they are more readily available from the market. TIFF2025109689000035.tif1869

[0036] In salt (I), X 11 Salt (I3) in which is *-O-CO- (where * represents the bonding site with Ar) can be produced, for example, by reacting the salt represented by formula (I-a3) with the compound represented by formula (I-b2) in a solvent in the presence of carbonyldiimidazole. TIFF2025109689000036.tif64161 [In the formula, the symbols have the same meanings as described above.] Examples of the solvent in this reaction include chloroform, acetonitrile, and the like. The reaction temperature is usually 5°C to 80°C, and the reaction time is usually 0.5 hour to 24 hours. The salts represented by formula (I-a3) include salts represented by the following formula, etc., can be easily obtained from the market, and can also be easily produced by known production methods. TIFF2025109689000037.tif130163

[0037] In salt (I), when mm1 = 1, X 11 is a single bond, and L 1 is a single bond, salt (I4) can be produced, for example, by reacting a salt represented by formula (I-a4) with a compound represented by formula (I-b4) in a solvent in the presence of carbonyldiimidazole. TIFF2025109689000038.tif56153 [In the formula, the symbols have the same meanings as described above.] Examples of the solvent in this reaction include chloroform, acetonitrile, etc. The reaction temperature is usually 5°C to 80°C, and the reaction time is usually 0.5 hour to 24 hours. The salts represented by formula (I-a4) include salts represented by the following formula, etc., can be easily obtained from the market, and can also be easily produced by known production methods. TIFF2025109689000039.tif79170

[0038] Examples of the compound represented by formula (I-b4) include compounds represented by the following formula, etc., and can be easily obtained from the market. TIFF2025109689000040.tif28153

[0039] [Structural unit derived from the salt represented by formula (I)] The structural unit derived from the salt represented by formula (I) of the present invention is a structural unit represented by formula (IP) (hereinafter sometimes referred to as "structural unit (IP)"). TIFF2025109689000041.tif36153 [In formula (IP), all the symbols have the same meanings as described above.] The structural unit (IP) is CH2 = C-R contained in salt (I) 5It shows a state where the double bond of Such a structural unit (IP) functions as an acid generator as well as the salt (I), and also functions as a structural unit constituting a compound or a resin.

[0040] [Resin containing the structural unit (IP) derived from the salt represented by formula (I)] The resin of the present invention is a resin containing the structural unit (IP) (hereinafter sometimes referred to as "resin (Ap)"). The resin (Ap) may be a homopolymer containing one kind of structural unit (IP), or a copolymer containing two or more kinds of structural units (IP). Further, the resin (Ap) may contain structural units other than the structural unit (IP). Examples of the structural units other than the structural unit (IP) include a structural unit having an acid-labile group (hereinafter sometimes referred to as "structural unit (a1)") and structural units other than the structural unit (a1). Examples of the structural units other than the structural unit (a1) include a structural unit having no acid-labile group (hereinafter sometimes referred to as "structural unit (s)"), other structural units (hereinafter sometimes referred to as "structural unit (t)"), and structural units known in the art. Here, the "acid-labile group" has a leaving group, and when contacted with an acid, the leaving group leaves and the constitutional unit is converted into a constitutional unit having a hydrophilic group (for example, a hydroxy group or a carboxy group). The content of the structural unit (IP) is 0.1 mol% or more, preferably 0.5 mol% or more, more preferably 0.8 mol% or more, and still more preferably 1 mol% or more, based on all the structural units of the resin (Ap). Also, it is 100 mol% or less, preferably 50 mol% or less, more preferably 30 mol% or less, and still more preferably 10 mol% or less. Specifically, it is 0.1 to 100 mol%, preferably 0.5 to 50 mol%, more preferably 0.8 to 30 mol%, and still more preferably 1 to 10 mol%.

[0041] In particular, when the resin (Ap) is used in a resist composition, as described below, in addition to the structural unit (IP), it can contain a structural unit (a1), a structural unit (s), and / or other structural units, etc. Also, when the resin (Ap) is used in a resist composition, as described below, regardless of whether it contains the structural unit (a1), it may be used in combination with a resin containing the structural unit (a1) (hereinafter sometimes referred to as "resin (A)") and / or a resin other than resin (A), etc. Hereinafter, resin (Ap) and / or resin (A) may sometimes be referred to as "resin (A) etc.". It is preferable that the resin (Ap) and the resin (A) each further contain a structural unit other than the structural unit (a1).

[0042] 〈Structural unit (a1)〉 The structural unit (a1) is derived from a monomer having an acid-labile group (hereinafter sometimes referred to as "monomer (a1)"). The acid-labile groups contained in the resin (A) etc. are preferably a group represented by formula (1) (hereinafter also referred to as group (1)) and / or a group represented by formula (2) (hereinafter also referred to as group (2)). TIFF2025109689000042.tif2298 [In formula (1), R a1 , R a2 and R a3 each independently represent an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R a1 and R a2 are bonded to each other to form an alicyclic hydrocarbon group having 3 to 20 carbon atoms together with the carbon atom to which they are bonded, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * represents a bonding site. ] TIFF2025109689000043.tif2278 [In formula (2), R a1’ and R a2’each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R a3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2’ and R a3’ are bonded to each other to form, together with the carbon atom to which they are bonded and X, a heterocyclic group having 3 to 20 carbon atoms, and the -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group may have a halogen atom. X represents an oxygen atom or a sulfur atom. na’ represents 0 or 1. * represents a bonding site.]

[0043] R a1 、R a2 and R a3 Examples of the alkyl group in R 、R a1 、R a2 and R a3 include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group and the like. R a1 、R a2 and R a3 Examples of the alicyclic hydrocarbon group in R a1 、R a2 and R a3 may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, and a cyclooctyl group. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following group (* represents a bonding site.). The number of carbon atoms of the alicyclic hydrocarbon group of R TIFF2025109689000044.tif10159R a1 、R a2 and R a3Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group, and phenanthryl group. Examples of the combined group include a group formed by combining the above-mentioned alkyl group and alicyclic hydrocarbon group (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornil group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), aryl-cycloalkyl groups such as phenylcyclohexyl group, etc. Preferably, ma is 0 and na is 1. R a1 and R a2 When they are bonded to each other to form an alicyclic hydrocarbon group, examples of -C(R a1 )(R a2 )(R a3 ) include the following groups. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms. * represents a bond to -O-. TIFF2025109689000045.tif26138

[0044] R a1’ R a2’ and R a3’ Examples of the hydrocarbon group in R include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. a1 R a2 and R a3 include the same groups as those mentioned for R R a2’ and R a3’When they are bonded to each other to form a heterocyclic ring together with the carbon atom to which they are bonded and X, -C(R a1’ )(R a2’ )-X-R a3’ includes the following groups. * represents a bond. TIFF2025109689000046.tif19124R a1 R a2 R a3 R a1 R a2’ R a3’ The halogen atom that R R a1’ R a2’ may have includes a fluorine atom, a chlorine atom, a bromine atom or an iodine atom. na' is preferably 0.

[0045] Examples of the group (1) include the following groups. In formula (1), R a1 R a2 R a3 are alkyl groups, ma = 0, and na = 1. The tert-butoxycarbonyl group is preferred as such a group. In formula (1), R a1 R a2 together with the carbon atom to which they are bonded form an adamantyl group, R a3 is an alkyl group, ma = 0, and na = 1. In formula (1), R a1 R a2 are each independently an alkyl group, R a3 is an adamantyl group, ma = 0, and na = 1. Specific examples of the group (1) include the following groups. * represents a bond. TIFF2025109689000047.tif150165

[0046] Specific examples of the group (2) include the following groups. * represents a bond. TIFF2025109689000048.tif55153

[0047] The monomer (a1) is preferably a monomer having an acid-labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid-labile group. Among the (meth)acrylic monomers having an acid-labile group, those having an alicyclic hydrocarbon group with 5 to 20 carbon atoms are preferred. If a resin (A) or the like having a structural unit derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group is used in the resist composition, the resolution of the resist pattern can be improved.

[0048] Examples of the structural unit derived from the (meth)acrylic monomer having the group (1) include a structural unit represented by the formula (a1-0) (hereinafter sometimes referred to as the structural unit (a1-0)), a structural unit represented by the formula (a1-1) (hereinafter sometimes referred to as the structural unit (a1-1)), or a structural unit represented by the formula (a1-2) (hereinafter sometimes referred to as the structural unit (a1-2)). Preferably, it is at least one structural unit selected from the group consisting of the structural unit (a1-0), the structural unit (a1-1), and the structural unit (a1-2), more preferably at least one or two structural units selected from the group consisting of the structural unit (a1-1) and the structural unit (a1-2). These may be used alone or in combination of two or more. TIFF2025109689000049.tif43144[In the formula (a1-0), the formula (a1-1), and the formula (a1-2), all the symbols represent the same meaning as described above.]

[0049] R a01 、R a4 、R a5 Examples of the halogen atom in are a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom. R a01 、R a4 、R a5Examples of the alkyl group which may have a halogen atom include chloromethyl group, bromomethyl group, iodomethyl group, trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, and perfluorohexyl group. R a01 、R a4 and R a5 are preferably a hydrogen atom or a methyl group, more preferably a methyl group. L a01 、L a1 and L a2 are preferably an oxygen atom or *-O-(CH2) k01 -CO-O- (wherein k01 is preferably any integer from 1 to 4, more preferably 1), and more preferably an oxygen atom. R a02 、R a03 and R a04 Examples of the alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and a group combining these in R a1 、R a2 and R a3 are the same groups as those exemplified for the groups in R R a6 and R a7 Examples of the alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and a group combining these in R a1 、R a2 and R a3 are the same groups as those exemplified for the groups in R R a02 、R a03 、and R a04 The alkyl group in is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, still more preferably a methyl group. R a6 and R a7 The alkyl group in R and R is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group or a t-butyl group, and still more preferably an ethyl group, an isopropyl group or a t-butyl group. R a6 and R a7 The alkenyl group in R and R is preferably an alkenyl group having 2 to 6 carbon atoms, more preferably an ethenyl group, a propenyl group, an isopropenyl group or a butenyl group. R a02 R a03 R a04 R a6 and R a7 The number of carbon atoms of the alicyclic hydrocarbon group of R, R, R, R, and R is preferably 5 to 12, and more preferably 5 to 10. R a02 R a03 R a04 R a6 and R a7 The number of carbon atoms of the aromatic hydrocarbon group of R, R, R, R, and R is preferably 6 to 12, and more preferably 6 to 10. For the group formed by combining an alkyl group and an alicyclic hydrocarbon group, it is preferable that the total number of carbon atoms of these alkyl group and alicyclic hydrocarbon group is 18 or less. For the group formed by combining an alkyl group and an aromatic hydrocarbon group, it is preferable that the total number of carbon atoms of these alkyl group and aromatic hydrocarbon group is 18 or less. R a02 and R a03 R and R are preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, an ethyl group, a phenyl group or a naphthyl group which may have a halogen atom. R a04 R is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a halogen atom, and more preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group which may have a halogen atom. Ra6 and R a7 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom, or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group, a phenyl group or a naphthyl group which may have a halogen atom, and still more preferably an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group or a phenyl group which may have a halogen atom. m1' is preferably any integer from 0 to 3, more preferably 0 or 1. n1 is preferably any integer from 0 to 3, more preferably 0 or 1. n1' is preferably 0 or 1.

[0050] Examples of the structural unit (a1-0) include structural units represented by any of formula (a1-0-1) to formula (a1-0-24) and the methyl group corresponding to R in the structural unit (a1-0) a01 which is replaced by a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group, and structural units represented by any of formula (a1-0-1) to formula (a1-0-10), formula (a1-0-13), formula (a1-0-14), formula (a1-0-19) to formula (a1-0-24) are preferred. TIFF2025109689000050.tif120161

[0051] Examples of the structural unit (a1-1) include structural units derived from the monomers described in JP-A-2010-204646. Among them, structural units represented by any of formula (a1-1-1) to formula (a1-1-7) and the methyl group corresponding to R in the structural unit (a1-1) a4 which is replaced by a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group are preferred, and structural units represented by any of formula (a1-1-1) to formula (a1-1-4) are more preferred. TIFF2025109689000051.tif38168

[0052] Examples of the structural unit (a1-2) include a structural unit represented by any of formulae (a1-2-1) to (a1-2-20) and a structural unit in which the methyl group corresponding to R in the structural unit (a1-2) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. The structural unit represented by any of formula (a1-2-2), formula (a1-2-5), formula (a1-2-6), and formulae (a1-2-10) to (a1-2-20) is preferred. a5 When the resin (A) etc. contain the structural unit (a1-0) and / or the structural unit (a1-1) and / or the structural unit (a1-2), the total content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on all the structural units of the resin (A) etc. Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 70 mol% or less, even more preferably 65 mol% or less. Specifically, it is 10 to 95 mol%, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, still more preferably 25 to 70 mol%, even more preferably 30 to 70 mol%. TIFF2025109689000052.tif92163

[0053] When the resin (A) etc. contain the structural unit (a1-0) and / or the structural unit (a1-1) and / or the structural unit (a1-2), the total content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on all the structural units of the resin (A) etc. Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 70 mol% or less, even more preferably 65 mol% or less. Specifically, it is 10 to 95 mol%, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, still more preferably 25 to 70 mol%, even more preferably 30 to 70 mol%. When the resin (A) etc. contains the structural unit (a1-0), the content rate is 5 mol% or more, preferably 10 mol% or more, more preferably 15 mol% or more, still more preferably 20 mol% or more, even more preferably 25 mol% or more, still even more preferably 30 mol% or more, and even more preferably 35 mol% or more, with respect to all the structural units of the resin (A) etc. Also, it is 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less, even more preferably 60 mol% or less. Specifically, 5 to 80 mol% is mentioned, preferably 5 to 75 mol%, and more preferably 10 to 70 mol%. When the resin (A) etc. contains the structural unit (a1-1) and / or the structural unit (a1-2), the total content rate of these is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more, with respect to all the structural units of the resin (A) etc. Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, 10 to 90 mol% is mentioned, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, still more preferably 20 to 80 mol%, even more preferably 20 to 75 mol%, and still even more preferably 20 to 70 mol%.

[0054] Examples of the structural unit having the group (2) in the structural unit (a1) include the structural unit represented by the formula (a1-4) (hereinafter sometimes referred to as "structural unit (a1-4)"). TIFF2025109689000053.tif31119[In the formula (a1-4), all the symbols have the same meanings as described above respectively.]

[0055] R a1 and R a17 Examples of the halogen atom and the alkyl group which may have a halogen atom in R include the same ones as those exemplified by R of formula (a1-0). a01 etc. R a1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a17 Examples of the alkoxy group in R include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, even more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a17 Examples of the alkoxyalkyl group in R include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably an alkoxyalkyl group having 2 to 4 carbon atoms, even more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. R a17 Examples of the alkoxyalkoxy group in R include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably an alkoxyalkoxy group having 2 to 4 carbon atoms, even more preferably a methoxyethoxy group or an ethoxyethoxy group. R a17Examples of the alkylcarbonyl group in [description] include an acetyl group, a propionyl group, a butyryl group and the like. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 4 carbon atoms, more preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and even more preferably an acetyl group. R a17 Examples of the alkylcarbonyloxy group in [description] include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 4 carbon atoms, more preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and even more preferably an acetyloxy group. R a17 is preferably a halogen atom, a hydroxy group, a carboxy group, an optionally halogenated alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group.

[0056] A a11Examples of the alkandiyl group include linear alkandiyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkandiyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, heptane-1,6-diyl group, octane-1,7-diyl group, nonane-1,8-diyl group, decane-1,9-diyl group, undecane-1,10-diyl group, etc. The number of carbon atoms of the alkandiyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, still even more preferably 1 to 3, and even more preferably 1 or 2. R a18 Examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, and tert-butyl group. A a11 When -CH2- contained in the alkandiyl group of A is replaced by -O-, -CO- or -NR a18 -, the number of carbon atoms before replacement is defined as the number of carbon atoms of the alkandiyl group. A a11 When -CH2- contained in the alkandiyl group of A is replaced by -O-, -CO- or -NR a18 -, examples of the resulting group include hydroxy group, carboxy group, carbonyl group, oxy group, amino group (where -CH2- contained in the methyl group is replaced by -NR a18 -), alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylamino group (where any -CH2- contained in the alkyl group is replaced by -NR a18 -), peptide group (where -CH2-CH2- contained in the ethylene group is replaced by -CO-NR a18-replaced group), an alkanediyl-oxy group, an alkanediyl-oxy-carbonyl group, an alkanediyl-carbonyl group, an alkanediyl-carbonyl-oxy group, an alkanediyl-sulfonyl group, an alkanediyl-thio group, an alkanediyl-amino group (wherein any -CH2- at any position in the alkanediyl group is -NR a18 -replaced group), etc. are exemplified. These replaced groups include those similar to those exemplified herein within the range where the upper limit of the number of carbon atoms allows. Examples of the alkylamino group include alkylamino groups having 1 to 11 carbon atoms, such as methylamino group, ethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, octylamino group, etc. The number of carbon atoms of the alkylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 11 carbon atoms, such as methyleneamino group, ethyleneamino group, propyleneamino group, etc. The number of carbon atoms of the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. For example, A a11 -replaced groups where the -CH2- contained in the alkanediyl group of is -O-, -CO- or -NR a18 -include *-O-, *-CO-O-, *-O-CO-, *-CO-O-A a12 -CO-O-, *-O-CO-A a12 -O-, *-O-A a12 -CO-O-, *-CO-O-A a12 -O-CO-, *-O-CO-A a12 -O-CO-, *-CO-NR a18 -are exemplified. Among them, *-CO-O-, *-CO-O-A a12 -CO-O-, *-O-A a12 -CO-O-, *-CO-NR a18 -are preferred. Here, A a12 represents an alkanediyl group having 1 to 8 carbon atoms, and * is R a1represents the bonding site with the carbon atom to which it is bonded. A a12 The alkane diyl group of a11 includes alkane diyl groups similar to A a11 within the range allowed by the upper limit of the number of carbon atoms. A a11 is preferably a single bond, *-CO-O- or *-CO-O-A a12 -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH2-CO-O-, and even more preferably a single bond or *-CO-O-. na1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. mc is preferably 0 or 1.

[0057] R a34 、R a35 and R a36 Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining these. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, etc. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, etc. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group, and the following group (* represents the bonding site.). TIFF2025109689000054.tif10151 Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, a phenanthryl group, etc. Examples of the combined groups include groups formed by combining the above-described alkyl group and alicyclic hydrocarbon group (e.g., alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornil group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), aryl-cycloalkyl groups such as phenylcyclohexyl group, etc. In particular, R a36 Examples of R include an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these. R a35 and R a36 Examples of the divalent hydrocarbon group having 2 to 20 carbon atoms formed by R and R bonding to each other together with the -C-O- to which they are bonded include the following groups. * represents the bonding site, and one is the bonding site with R a34 and the other is the bonding site with R TIFF2025109689000055.tif16105

[0058] R a34 is preferably a hydrogen atom. R a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a methyl group or an ethyl group. R a36 The hydrocarbon group of R is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. R a36The alkyl group and alicyclic hydrocarbon group in [it] are preferably unsubstituted. R a36 The aromatic hydrocarbon group in [it] preferably has an aromatic ring having an aryloxy group with 6 to 10 carbon atoms. -OC(R a34 )(R a35 )-O-R a36 in the structural unit (a1-4) eliminates upon contact with an acid (for example, p-toluenesulfonic acid) to form a hydroxy group or a carboxy group. -X a1 -O-C(R a34 )(R a35 )-O-R a36 in the case of a benzene ring may be bonded to any of the o-position, m-position, or p-position with respect to the bonding position of A a11 . Among them, it is preferable that at least one is bonded to the o-position or p-position, and more preferably bonded to the p-position. In the case of a naphthalene ring, when the bonding position of A a11 is the 1-position, it may be bonded to any of the 2nd to 8th positions, and when the bonding position of A a11 is the 2nd position, it may be bonded to any of the 1st and 3rd to 8th positions. Among them, when the bonding position of A a11 is the 1st position, it is preferable that at least one is bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. When the bonding position of A a11 is the 2nd position, it is preferable that it is bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0059] Examples of the structural unit (a1-4) include structural units derived from the monomers described in JP-A-2010-204646. Preferably, the structural units represented by formula (a1-4-1) to formula (a1-4-42) and the hydrogen atom corresponding to R a1 in the structural unit (a1-4) are replaced with a halogen atom, a haloalkyl group, or an alkyl group, and more preferably, the structural units represented by formula (a1-4-1) to formula (a1-4-5), formula (a1-4-10), formula (a1-4-13), and formula (a1-4-14) are included. TIFF2025109689000056.tif229165

[0060] When the resin (A) contains the structural unit (a1-4), its content is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total of all the structural units of the resin (A). Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, still more preferably 20 to 85 mol%, still even more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol%.

[0061] Examples of the structural unit derived from the (meth)acrylic monomer having the group (2) also include the structural unit represented by the formula (a1-5) (hereinafter sometimes referred to as "structural unit (a1-5)"). TIFF2025109689000057.tif4558[In the formula (a1-5), all the symbols have the same meanings as described above.]

[0062] R a8 Examples of the halogen atom and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R are the same as those exemplified for R in the formula (a1-0). a01 In the formula (a1-5), R a8 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. L 51 is preferably an oxygen atom. L 52 and L 53 ​Among them, it is preferable that one is -O- and the other is -S-. For s1, 1 is preferable. For s1', any integer from 0 to 2 is preferable. Z a1 is preferably a single bond or *-CH2-CO-O-.

[0063] Examples of the structural unit (a1-5) include structural units derived from monomers described in JP-A-2010-61117. Among them, the structural units represented by Formula (a1-5-1) to Formula (a1-5-4) are preferable, and the structural unit represented by Formula (a1-5-1) or Formula (a1-5-2) is more preferable. TIFF2025109689000058.tif33133

[0064] When the resin (A) etc. contain the structural unit (a1-5), the content thereof is 1 mol% or more, preferably 2 mol% or more, more preferably 3 mol% or more, still more preferably 5 mol% or more, even more preferably 10 mol% or more, still even more preferably 20 mol% or more, and still more preferably 25 mol% or more, based on all the structural units of the resin (A) etc. Further, 80 mol% or less is mentioned, preferably 70 mol% or less, more preferably 60 mol% or less, still more preferably 50 mol% or less, even more preferably 45 mol% or less, still even more preferably 40 mol% or less, and still more preferably 30 mol% or less. Specifically, 1 to 50 mol% is preferable, 3 to 45 mol% is more preferable, 5 to 40 mol% is still more preferable, and 5 to 30 mol% is still more preferably.

[0065] Examples of the structural unit having the group (1) in the structural unit (a1) include the structural unit represented by Formula (a1-6) (hereinafter sometimes referred to as "structural unit (a1-6)"). TIFF2025109689000059.tif3682[In Formula (a1-6), all the symbols have the same meanings as described above.]

[0066] Ra61 is the same group as exemplified in R of the formula (a1-0). a01 Among them, R a61 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. R a62 、R a63 、R a64 and R a65 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a heptyl group, a hexyl group and the like. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and still more preferably a methyl group or an ethyl group. R a62 、R a63 and R a64 Examples of the cyclic hydrocarbon group in include an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group and the like. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group and the like. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12. Examples of the aromatic hydrocarbon group include a phenylene group, a naphthylene group and the like. Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group and the like. R a62 and R a63 The ring formed by R a62 and R a63 bonding to each other includes an adamantane ring, a cyclopentane ring or a cyclohexane ring and the like. Specifically, when R a62 )(R a63 )(Ra64 ) includes the following groups. * represents the bonding site with an oxygen atom. The number of carbon atoms in the ring is preferably 3 to 16, more preferably 3 to 12 carbon atoms. TIFF2025109689000060.tif34110

[0067] L a61 and L a62 Examples of the alkanediyl group having 1 to 4 carbon atoms in L a61 and L a62 are each independently preferably a methylene group or an ethylene group. X a61 is preferably a single bond or -CO-O-*, more preferably a single bond. X a62 is preferably a single bond or *-O-L 1 -, more preferably a single bond.

[0068] Examples of the aromatic hydrocarbon group having 6 to 20 carbon atoms in Ar include a phenylene group, a 1-naphthylene group, a 2-naphthylene group, a 1-anthrylene group, a 9-anthrylene group, a biphenylene group, a 1-phenanthrylene group, and a 2-phenanthrylene group. Examples of the substituent that the aromatic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.

[0069] Examples of the halogen atom include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group and perfluorohexyl group. Examples of the alkyl group include methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group and hexyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. Examples of the alkoxy group include methoxy group, ethoxy group, propoxy group, isopropoxy group, butoxy group, sec-butoxy group, tert-butoxy group, pentyloxy group and hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. Examples of the alkoxyalkyl group include methoxymethyl group, ethoxyethyl group, propoxymethyl group, isopropoxymethyl group, butoxymethyl group, sec-butoxymethyl group and tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. Examples of the alkoxyalkoxy group include methoxymethoxy group, methoxyethoxy group, ethoxymethoxy group, ethoxyethoxy group, propoxymethoxy group, isopropoxymethoxy group, butoxymethoxy group, sec-butoxymethoxy group and tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. The substituent is preferably a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxyethoxy group, and still more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. Ar is preferably a phenylene group which may have a substituent, and more preferably a phenylene group which may have a hydroxy group.

[0070] Examples of the structural unit (a1-6) include structural units represented by Formula (a1-6-1) to Formula (a1-6-44). The structural units represented by Formula (a1-6-1) to Formula (a1-6-9) are preferred, and the structural units represented by Formula (a1-6-1), Formula (a1-6-2), Formula (a1-6-4), Formula (a1-6-5), Formula (a1-6-7), or Formula (a1-6-8) are more preferred, and the structural units represented by Formula (a1-6-1) or Formula (a1-6-2) are still more preferred. In the following structural units, the hydrogen atom corresponding to R a61 substituted with a methyl group or the like, and in the structural units represented by Formula (a1-6-10) to Formula (a1-6-15), Formula (a1-6-22) to Formula (a1-6-27), and Formula (a1-6-31) to Formula (a1-6-36), the methyl group corresponding to R a61 substituted with a hydrogen atom or the like are also included as the structural unit (a1-6). TIFF2025109689000061.tif227164

[0071] When the resin (A) etc. contain the structural unit (a1-6), the content rate is 3 mol% or more, preferably 5 mol% or more, more preferably 7 mol% or more, still more preferably 10 mol% or more, even more preferably 20 mol% or more, still even more preferably 30 mol% or more, and even more preferably 40 mol% or more, based on all the structural units of the resin (A) etc. Also, 80 mol% or less is mentioned, preferably 75 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, still more preferably 7 to 70 mol%, still even more preferably 7 to 65 mol%, and particularly preferably 10 to 60 mol%.

[0072] Also, as the structural unit (a1), the following structural units are also mentioned. TIFF2025109689000062.tif34165

[0073] When the resin (A) etc. contain the structural units represented by the formulas (a1-7-1) to (a1-7-7), the content rate is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on all the structural units of the resin (A) etc. Also, 95 mol% or less is mentioned, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, it is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, still more preferably 20 to 85 mol%, still even more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol%.

[0074] In addition, examples of the structural unit (a1) also include the following structural units. When resin (A) or the like contains structural units represented by formulas (a1-8-1) to (a1-8-3), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on all the structural units of resin (A) or the like. Also, 95 mol% or less is mentioned, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, 10 to 60 mol% is preferable, 15 to 55 mol% is more preferable, 20 to 50 mol% is still more preferable, 20 to 45 mol% is even more preferable, and 20 to 40 mol% is particularly preferable.

[0075] 〈Structural unit (s)〉 The structural unit (s) is derived from a monomer having no acid-labile group (hereinafter sometimes referred to as "monomer (s)"). As the monomer from which the structural unit (s) is derived, a monomer having no acid-labile group known in the resist field can be used. As the structural unit(s), it is preferable to have a hydroxy group, a carboxy group or a lactone ring. By using a resin containing a structural unit having a hydroxy group or a carboxy group and not having an acid-labile group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring and not having an acid-labile group (hereinafter sometimes referred to as "structural unit (a3)") in the resist composition of the present invention, the resolution of the resist pattern and the adhesion to the substrate can be improved. In addition to the above-described structural units, the structural unit(s) include a structural unit having a halogen atom (hereinafter sometimes referred to as "structural unit (a4)"), a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), a structural unit having a sultone structure (hereinafter sometimes referred to as "structural unit (a6)"), or a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)"), and the like.

[0076] 〈Structural unit (a2)〉 The structural unit (a2) is a structural unit represented by the formula (a2) and has an alcoholic hydroxy group, a phenolic hydroxy group or a carboxy group. TIFF2025109689000064.tif3892[In the formula (a2), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -CO- or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms. L a21 represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO- or -SO2-. L a22represents a linear hydrocarbon group having 1 to 12 carbon atoms which may have a single bond or a fluorine atom, and -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-. na2 represents any integer from 1 to 4. When na2 is 2 or more, a plurality of L a22 may be the same as or different from each other.] R a2 Examples of the halogen atom in R include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. R a2 Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. Among them, R a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0077] A a21Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, heptane-1,6-diyl group, octane-1,7-diyl group, nonane-1,8-diyl group, decane-1,9-diyl group, undecane-1,10-diyl group, etc. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, still even more preferably 1 to 3, and even more preferably 1 or 2. Among them, A a21 is preferably a methylene group or an ethylene group. R a28 Examples of the alkyl group of R include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, and tert-butyl group. A a21 When -CH2- contained in the alkanediyl group of A is replaced by -O-, -CO- or -NR a28 , the number of carbon atoms before replacement is defined as the number of carbon atoms of the alkanediyl group. A a21 Examples of the group in which -CH2- contained in the alkanediyl group of A is replaced by -O- or -CO- include hydroxy group (the group in which -CH2- contained in the methyl group is replaced by -O-), carboxy group (the group in which -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), carbonyl group (the group in which -CH2- contained in the methylene group is replaced by -CO-), oxy group (the group in which -CH2- contained in the methylene group is replaced by -O-), amino group (the group in which -CH2- contained in the alkanediyl group is replaced by -NR a28-replaced group), alkoxy group (a group in which any -CH2- in the alkyl group is replaced by -O-), alkoxycarbonyl group (a group in which any -CH2-CH2- in the alkyl group is replaced by -O-CO-), alkylcarbonyl group (a group in which any -CH2- in the alkyl group is replaced by -CO-), alkylamino group (a group in which -CH2- contained in the alkyl group is replaced by -NR a28 -replaced group), peptide group (a group in which -CH2-CH2- contained in the ethylene group is replaced by -CO-NR a28 -replaced group), alkanediylamino group (a group in which any -CH2- in the alkanediyl group is replaced by -NR a28 -replaced group), etc. are exemplified. These replaced groups include those similar to those exemplified herein as long as the upper limit of the number of carbon atoms permits. Among them, A a21 The -CH2- contained in the alkanediyl group of is replaced by -O-, -CO- or -NR a28 -replaced groups include *-O-, *-CO-O-, *-O-CO-, *-CO-O-A a22 -CO-O-, *-O-CO-A a22 -O-, *-O-A a22 -CO-O-, *-CO-O-A a22 -O-CO-, *-O-CO-A a22 -O-CO-, *-CO-NR a28 - are exemplified. Among them, *-CO-O-, *-CO-O-A a22 -CO-O-, *-O-A a22 -CO-O-, *-CO-NR a28 - are preferred. Here, A a22 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents the bonding site with the carbon atom to which R a2 is bonded. The alkanediyl group of A a22 includes alkanediyl groups similar to A a21 within the range permitted by the upper limit of the number of carbon atoms. A a21 is a single bond, *-CO-O- or *-CO-O-A a22It is preferably -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH2-CO-O-, and even more preferably a single bond or *-CO-O-.

[0078] L a21 The hydrocarbon group in L is a (na2 + 1)-valent hydrocarbon group, and examples thereof include linear or branched chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, condensed rings, bridged rings, etc.) alicyclic hydrocarbon groups, and cyclic hydrocarbon groups such as aromatic hydrocarbon groups. A group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group) may also be used. L a21 Examples of the chain hydrocarbon group of L include divalent to hexavalent chain hydrocarbon groups such as alkanediyl groups, alkanetriyl groups, alkanetetrayl groups, alkanepentayl groups, and alkanexayl groups. Examples of the alkanediyl group include, for example, an alkanediyl group similar to A a21 The same alkanediyl groups as those described above can be mentioned. Examples of the alkanetriyl group include methanetriyl group, ethanetriyl group, propanetriyl group, butanetriyl group, pentanetriyl group, hexanetriyl group, heptanetriyl group, octanetriyl group, nonanetriyl group, decanetriyl group, undecanetriyl group, dodecanetriyl group, tridecanetriyl group, tetradecanetriyl group, pentadecanetriyl group, hexadecanetriyl group, and heptadecanetriyl group. Examples of the alkanetetrayl group include methanetetrayl group, ethanetetrayl group, propanetetrayl group, butanetetrayl group, pentanetetrayl group, hexanetetrayl group, heptanetetrayl group, octanetetrayl group, nonanetetrayl group, decanetetrayl group, undecanetetrayl group, dodecanetetrayl group, tridecanetetrayl group, tetradecanetetrayl group, pentadecanetetrayl group, hexadecanetetrayl group, and heptadecanetetrayl group. Examples of the alkane pentyl group include a methane pentyl group, an ethane pentyl group, a propane pentyl group, a butane pentyl group, a pentane pentyl group, a hexane pentyl group, and the like. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 18, more preferably from 1 to 12, still more preferably from 1 to 10, even more preferably from 1 to 9, still even more preferably from 1 to 8, still more preferably from 1 to 6, still even more preferably from 1 to 5, and particularly preferably from 1 to 4. L a21 Examples of the monocyclic and polycyclic alicyclic hydrocarbon groups in L include the following alicyclic hydrocarbon groups and the like. The bonding site can be at any position. TIFF2025109689000065.tif46168For example, divalent to hexavalent alicyclic hydrocarbon groups such as a cycloalkane diyl group, a cycloalkane triyl group, a cycloalkane tetrayl group, a cycloalkane pentyl group, and a cycloalkane hexyl group can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, a cyclooctane-1,5-diyl group, a cyclopropane triyl group, a cyclobutane triyl group, a cyclopentane triyl group, a cyclohexane triyl group, a cycloheptane triyl group, a cyclooctane triyl group, a cyclodecane triyl group, a cyclopropane tetrayl group, a cyclobutane tetrayl group, a cyclopentane tetrayl group, a cyclohexane tetrayl group, a cycloheptane tetrayl group, a cyclooctane tetrayl group, a cyclodecane tetrayl group, and Examples of the polycyclic alicyclic hydrocarbon group include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediy group, norbornanetril group, adamantanetril group, decahydronaphthalenetril group, bicyclo[3.3.0]octanetril group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, bicyclo[3.3.0]octanetetrayl group, and the like. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, even more preferably 3 to 12, even more preferably 6 to 12, particularly preferably 6 to 10. L a21 Examples of the divalent aromatic hydrocarbon group in L include divalent to hexavalent aromatic hydrocarbon groups such as arylene group, arenetricyl group, arenetetrayl group, arenepentayl group, arenexayl group, and the like. Specifically, aromatic hydrocarbon groups such as phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group, benzenetricyl group, naphthalenetricyl group, anthracenetricyl group, biphenylenetricyl group, phenanthrenetricyl group, benzenetetrayl group, naphthalenetetrayl group, anthracenetetrayl group, biphenylenetetrayl group, phenanthrenetetrayl group, and the like can be mentioned. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 20, more preferably 6 to 18, still more preferably 6 to 14, even more preferably 6 to 10. Examples of the trivalent to pentavalent alicyclic hydrocarbon group and aromatic hydrocarbon group include a group in which 1 to 3 hydrogen atoms are removed from the above-described divalent group to form a bond. Examples of the group formed by combining two or more of them include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group, a chain hydrocarbon group, and an aromatic hydrocarbon group, and the like. In the combination, two or more alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined respectively. Also, any group may be bonded to A a21 and L a22 respectively. Examples of groups in which -CH2- contained in a hydrocarbon group is replaced by -O-, -S-, -SO-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- contained in a methyl group is replaced by -S-), an alkoxy group (a group in which -CH2- at any position contained in an alkyl group is replaced by -O-), an alkylthio group (a group in which -CH2- at any position contained in an alkyl group is replaced by -S-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-), an alkylsulfonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -SO2-), an alkylcarbonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-O-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in a methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), an alkanedioxy group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -CO-O-), an alkanediylsulfonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -SO2-),An alkanediylthio group (a group in which any -CH2- in the alkanediyl group is replaced by -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyl-oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, etc. may be mentioned. Further, a group in which one or more hydrogen atoms of these groups are replaced at the bonding site, etc. may also be mentioned. Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group and the like. The number of carbon atoms of the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group and the like. The number of carbon atoms of the alkylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl group, propionyl group and butyryl group and the like. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as butoxycarbonyloxy group and the like. The number of carbon atoms of the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkoxycarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group and the like. The number of carbon atoms of the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanedioxy group include alkanedioxy groups having 1 to 27 carbon atoms, such as methyleneoxy group, ethyleneoxy group, propanedioxy group, butanedioxy group, pentanedioxy group and the like. The number of carbon atoms of the alkanedioxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl oxycarbonyl group include alkanediyl oxycarbonyl groups having 2 to 27 carbon atoms, such as a methylene oxycarbonyl group, an ethylene oxycarbonyl group, a propanediyl oxycarbonyl group, and a butanediyl oxycarbonyl group. Examples of the alkanediyl carbonyl group include alkanediyl carbonyl groups having 2 to 28 carbon atoms, such as a methylene carbonyl group, an ethylene carbonyl group, a propanediyl carbonyl group, a butanediyl carbonyl group, and a pentanediyl carbonyl group. Examples of the alkanediyl carbonyloxy group include alkanediyl carbonyloxy groups having 2 to 27 carbon atoms, such as a methylene carbonyloxy group, an ethylene carbonyloxy group, a propanediyl carbonyloxy group, and a butanediyl carbonyloxy group. The number of carbon atoms of the alkanediyl oxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkanediyl carbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkanediyl carbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl thio group include alkanediyl thio groups having 1 to 27 carbon atoms, such as a methylene thio group, an ethylene thio group, and a propanediyl thio group. The number of carbon atoms of the alkanediyl thio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl sulfonyl group include alkanediyl sulfonyl groups having 1 to 27 carbon atoms, such as a methylene sulfonyl group, an ethylene sulfonyl group, and a propylene sulfonyl group. The number of carbon atoms of the alkanediyl sulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of the alkoxycarbonyloxy group include aromatic hydrocarbon group-carbonyl-oxy groups having 7 to 27 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 27 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as a phenyloxy group.

[0079] In addition, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -SO-, -CO- or -SO2- include the following groups. Among the groups represented below, groups in which -O- is replaced by -S- and -CO- is replaced by -SO2- are also included. The bonding site can be at any position. Examples of the group in which -CH2- contained in the combined group is replaced by -O-, -S-, -SO-, -CO- or -SO2- also include the following groups. The bonding site can be at any position. TIFF2025109689000067.tif26164L a21 The hydrocarbon group in may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. L a21The hydrocarbon group in [description] can have substituents such as a haloalkyl group by having a halogen atom as a substituent. Examples of the haloalkyl group include a chloromethyl group, a bromomethyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl group, etc. A haloalkyl group having 1 to 4 carbon atoms is preferred, and a haloalkyl group having 1 to 3 carbon atoms is more preferred. L a21 The hydrocarbon group of [description] can have substituents such as an alkyl group by including a branched structure. a21 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. The number of carbon atoms of the alkyl group is preferably 1 to 12, more preferably 1 to 10, still more preferably 1 to 8, even more preferably 1 to 6, still even more preferably 1 to 4, and even more preferably 1 to 3. L a21 When -CH2- contained in the hydrocarbon group of [description] is replaced by a group such as -O- or -CO-, a21 L can have substituents such as a hydroxy group, a carboxy group, an alkoxy group, a thiol group, a sulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxyalkyl group, an alkoxyalkoxy group, an acryloyloxy group, and a methacryloyloxy group. The number of carbon atoms of the alkoxy group is preferably 1 to 12, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The number of carbon atoms of the alkoxycarbonyl group, the alkylcarbonyl group, and the alkylcarbonyloxy group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 to 3. The number of carbon atoms of the alkoxyalkyl group and the alkoxyalkoxy group is preferably 2 to 12, more preferably 2 to 8, still more preferably 2 to 6, and even more preferably 2 to 4. Examples of the above-mentioned group include those similar to those exemplified in this specification. L a21 Examples of the substituent that the hydrocarbon group in a21 may have include a halogen atom, a haloalkyl group having 1 to 8 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). A halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 10 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-) is more preferable. A halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms is even more preferable. A fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group is still more preferable. A fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, or an ethoxyethoxy group is even still more preferable. Also, when the alkanediyl group of L a21 is replaced by -O-, -CO-, or the like, for example, *-L a23 -X a21 -(L a23 represents an alkanediyl group having 1 to 8 carbon atoms, X a21 represents -O-, -O-CO-, -CO-O-, or -O-CO-O-, and * represents the bonding site with A a21 . It is also preferable that it is like this. L a21 ​​​​​​​​​​​​is a single bond, an optionally substituted linear hydrocarbon group having 1 to 12 carbon atoms (provided that -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-), or a group formed by combining an optionally substituted linear hydrocarbon group having 1 to 8 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (provided that -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO2- or -CO-), and is preferably an optionally substituted linear hydrocarbon group having 1 to 10 carbon atoms (provided that -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-), or a group formed by combining an optionally substituted linear hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -SO2- or -CO-).

[0080] L a22Examples of the chain hydrocarbon group having 1 to 12 carbon atoms include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, 1-methylpropane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-dimethylpropane-1,3-diyl group, pentane-2,4-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, etc. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, and even more preferably 1 to 4. Examples of the group in which -CH2- contained in the chain hydrocarbon group is replaced by -O- or -CO- include those similar to those exemplified in the present specification within the range allowed by the upper limit of the number of carbon atoms. L a22 The fluorine atom(s) that L has may be one or two or more. na2 is preferably any integer from 1 to 4, and more preferably any integer from 1 to 3. L a21 Examples of the structural unit (a2) when L is a single bond or a chain hydrocarbon group include, for example, the following structural units. Among the following structural units, the structural units in which the methyl group corresponding to R a2 is replaced by a hydrogen atom or the like are also preferred structural units of the structural unit (a2) in the same manner as the following structural units. When the resin (A) contains the above structural unit, its content is 1 mol% or more, preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, and even more preferably 20 mol% or more, based on all the structural units of the resin (A). Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less, even more preferably 60 mol% or less, still even more preferably 50 mol% or less, still more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, still more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%.

[0081] When producing a resist pattern from the resist composition of the present invention, when using a high-energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet light) as the exposure light source, as the structural unit (a2), a structural unit (a2) having a phenolic hydroxy group is preferable, and it is more preferable to use the structural unit (a2-A) described later. Also, when using an ArF excimer laser (193 nm) or the like, as the structural unit (a2), a structural unit (a2) having an alcoholic hydroxy group is preferable, and it is more preferable to use the structural unit (a2-1) described later. The structural unit (a2) may be contained alone or in combination of two or more.

[0082] In the structural unit (a2), L a21 When it is a cyclic hydrocarbon group, examples of the structural unit having a phenolic hydroxy group or a carboxy group include a structural unit represented by the formula (a2-A) (hereinafter sometimes referred to as "structural unit (a2-A)"). TIFF2025109689000069.tif31127[In the formula (a2-A), all the symbols have the same meanings as described above.]

[0083] Ra2 and A a21 is each a group similar to those exemplified by formula (a2). R a27 Examples of the halogen atom and the alkyl group which may have a halogen atom of R a2 include those similar to R R a27 Examples of the alkoxy group of R include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, and a tert-butoxy group. The number of carbon atoms of the alkoxy group is preferably 1 to 4, more preferably 1 to 3, still more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a27 Examples of the alkoxyalkyl group of R include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and still more preferably a methoxymethyl group. R a27 Examples of the alkoxyalkoxy group of R include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group. R a27 Examples of the alkylcarbonyl group of R include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, more preferably an acetyl group. R a27Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, more preferably an acetyloxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an optionally halogenated alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxy-methoxy group, still more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nA2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, still more preferably 1 or 2. na21 is preferably 0, 1, 2, or 3, more preferably 0, 1, or 2, still more preferably 0 or 1. mc is preferably 0 or 1. -X a2 -OH, in the case of a benzene ring, may be bonded to any of the o-position, m-position, or p-position with respect to the bonding position of A a21 . Among them, at least one is preferably bonded to the m-position or p-position, more preferably bonded to the m-position. In the case of a naphthalene ring, when the bonding position of A a21 is at the 1-position, it may be bonded to any of the 2nd to 8th positions, and when the bonding position of A a21 is at the 2nd position, it may be bonded to any of the 1st and 3rd to 8th positions. Among them, when the bonding position of A a21 is at the 1st position, at least one is preferably bonded to the 3rd to 6th positions, more preferably bonded to the 3rd or 4th position. When the bonding position of A a21 is at the 2nd position, it is preferably bonded to the 4th to 7th positions, more preferably bonded to the 5th or 6th position.

[0084] Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A-2010-204634 and JP-A-2012-12577. As the structural unit (a2-A), the structural units represented by Formula (a2-2-1) to Formula (a2-2-32) and Formula (a2-3-1) to Formula (a2-3-24), and in the structural units represented by Formula (a2-2-1) to Formula (a2-2-32) and Formula (a2-3-1) to Formula (a2-3-24), R a2 in the structural unit (a2-A) corresponding methyl groups replaced by a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group can be mentioned. TIFF2025109689000070.tif107170

[0085] When the structural unit (a2-A) is contained in the resin (A), the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, and even more preferably 20 mol% or more with respect to all the structural units. Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, still more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The structural unit (a2-A) can be incorporated into the resin (A) by polymerizing a compound that induces the structural unit (a2-A) (for example, a compound (a2-A') in which -CH2-C(-R a2 )- is in the state of CH2=C(-R a2 ) of the double bond before cleavage, etc.). Further, for example, after polymerization using the structural unit (a1-4), it can be incorporated into the resin (A) by treatment with an acid such as p-toluenesulfonic acid. Also, after polymerization using acetoxystyrene or the like, the structural unit (a2-A) can be incorporated into the resin (A) by treatment with an alkali such as tetramethylammonium hydroxide.

[0086] In the structural unit (a2), L a21When it is a cyclic hydrocarbon group, examples of the structural unit having an alcoholic hydroxy group or a carboxy group include a structural unit represented by the formula (a2-B) (hereinafter sometimes referred to as "structural unit (a2-B)"), a structural unit represented by the formula (a2-C) (hereinafter sometimes referred to as "structural unit (a2-C)"), and a structural unit represented by the formula (a2-D) (hereinafter sometimes referred to as "structural unit (a2-D)"). TIFF2025109689000072.tif4699[In the formulas (a2-B) and (a2-C), R a2 represents the same meaning as in the formula (a2). R a27 represents the same meaning as in the formula (a2-A). L a25 represents -O- or *-O-(CH2) k2 -CO-O-, k2 represents an integer of any one of 1 to 7. * represents the bonding site with -CO-. X a2 represents a single bond or -CO-. R a25 and R a26 each independently represent a hydrogen atom, a methyl group, or a hydroxy group. nB2 represents an integer of any one of 1 to 5. When nB2 is 2 or more, a plurality of X a2 may be the same as or different from each other. nB22 represents an integer of any one of 0 to 8. When nB22 is 2 or more, a plurality of R a27 may be the same as or different from each other. nC22 represents an integer of any one of 0 to 10. When nC22 is 2 or more, a plurality of R a27 may be the same as or different from each other.] L a25 is preferably -O-, -O-(CH2) f1 -CO-O- (wherein f1 represents an integer of any one of 1 to 4), and more preferably -O-. R a2 is preferably a methyl group. X a2 is preferably a single bond. R a25 is preferably a hydrogen atom. R a26 is preferably a hydrogen atom or a hydroxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an optionally halogenated alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. nB22 is preferably any integer from 0 to 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. nC22 is preferably any integer from 0 to 6, more preferably any integer from 0 to 3, and even more preferably 0 or 1.

[0087] Examples of the structural unit (a2-B) and the structural unit (a2-C) include structural units derived from the monomers described in JP-A-2010-204646, the following structural units, and the methyl group or hydrogen atom corresponding to R in the following structural units replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. Among them, the structural units represented by any of formula (a2-B-1) to formula (a2-B-5) and formula (a2-C-1) to formula (a2-C-9) are preferred. a2 Examples thereof include structural units in which the methyl group or hydrogen atom corresponding to R is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. Among them, the structural units represented by any of formula (a2-B-1) to formula (a2-B-5) and formula (a2-C-1) to formula (a2-C-9) are preferred. When the resin (A) contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on all the structural units of the resin (A). Further, it is 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, still more preferably 20 mol% or less, and even more preferably 10 mol% or less. Specifically, it is 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, still more preferably 1 to 20 mol% or 2 to 20 mol%, and even more preferably 1 to 10 mol% or 2 to 10 mol%.

[0088] TIFF2025109689000074.tif51105[In the formula (a2-D), R a2 and A a21 each represent the same meaning as in the formula (a2). R a27 represents the same meaning as in the formula (a2-A). R a21 and R a22 each independently represent an alkyl fluoride group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents any integer from 1 to 5. When nD2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. nD22 represents any integer from 0 to 4. When nD22 is 2 or more, the plurality of R a27 may be the same as or different from each other. However, 1 ≦ nD2 + nD22 ≦ 5.) R a21 and R a22 Examples of the alkyl fluoride groups of R R a21and R a22 is preferably a trifluoromethyl group. L a24 Examples of the alkanediyl group of L include a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, and the like. L a24 is preferably a single bond or a methylene group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxy-methoxy group, even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nD2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, even more preferably 1 or 2, and even more preferably 1. Further, preferably, nD2 is 1 and the group in parentheses is bonded to the para position. nD22 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2, even more preferably 0 or 1, and even more preferably 0.

[0089] As the structural unit (a2-D), a structural unit represented by the following formula (a2-D1) (hereinafter, may be referred to as "structural unit (a2-D1)") is more preferable. TIFF2025109689000075.tif51107[In formula (a2-D1), R a2 , A a21 , R a27 , nD2 and nD22 represent the same meanings as in formula (a2-D).] In formula (a2-D1), R a2 is preferably a hydrogen atom or a methyl group. A a21 is preferably a single bond.

[0090] Examples of the structural unit (a2-D) include the structural units described below. TIFF2025109689000076.tif61168

[0091] In the structural units represented by formulae (a2-D-1) to (a2-D-8), the hydrogen atom corresponding to R a2 and the structural units in which the methyl group corresponding to R a2 is replaced with a hydrogen atom or the like can also be cited as specific examples of the structural unit (a2-D). Among them, the structural units represented by formulae (a2-D-1) to (a2-D-8) are preferred, the structural units represented by formulae (a2-D-1) to (a2-D-4) are more preferred, and the structural unit represented by formula (a2-D-1) is even more preferred.

[0092] The content of the structural unit (a2-D) in the resin (A) or the like is preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more with respect to all the structural units. Also, it is preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and still more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and still more preferably 10 to 65 mol%.

[0093] <Structural unit (a3)> The lactone ring of the structural unit (a3) may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or a condensed ring of a monocyclic lactone ring and another ring. Preferably, a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, the structural unit represented by the following formula (a3-2)) can be cited.

[0094] The structural unit (a3) is preferably a structural unit represented by formula (a3-1), formula (a3-2), formula (a3-3) or formula (a3-4). It may contain one of these alone or two or more of them. TIFF2025109689000077.tif48155[In formula (a3-1), formula (a3-2), formula (a3-3) and formula (a3-4), L a4 、L a5 and L a6 each independently represents a group represented by -O- or *-O-(CH2) k3 -CO-O- (where k3 represents an integer from 1 to 7). L a7 represents -O-, *-O-L a8 -O-, *-O-L a8 -CO-O-, *-O-L a8 -CO-O-L a9 -CO-O- or *-O-L a8 -O-CO-L a9 -O-. L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * represents the bonding position with the carbonyl group. R a18 、R a19 、R a20 and R a24 each independently represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. X a3 represents -CH2- or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 、R a23 and R a25 each independently represents a carboxy group, a cyano group or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents an integer from 0 to 5. q1 represents an integer from 0 to 3. r1 represents an integer from 0 to 3. w1 represents an integer from 0 to 8. When p1, q1, r1, and / or w1 is 2 or more, a plurality of Rs a21 , R a22 , R a23 and / or R a25 may be the same as or different from each other.

[0095] R a21 , R a22 , R a23 and R a25 Examples of the aliphatic hydrocarbon group in R, R, R, and R include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, and tert-butyl group. R a18 , R a19 , R a20 and R a24 Examples of the halogen atom and the alkyl group which may have a halogen atom in R, R, R, and R are the same as those exemplified by R of formula (a1-0) etc. a01 and the like. L a8 and L a9 Examples of the alkanediyl group in L and L include methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group and the like. L a4 ~L a6 are each independently, preferably -O- or, *-O-(CH2) k3 -CO-O- wherein k3 is an integer from 1 to 4, more preferably -O- and, *-O-CH2-CO-O-, still more preferably an oxygen atom. L a7 is preferably -O- or *-O-L a8 -CO-O-, more preferably -O-, -O-CH2-CO-O- or -O-C2H4-CO-O-. R a18 , Ra19 and R a20 and R a24 are preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group. R a21 is preferably a methyl group. R a22 and R a23 and R a25 are each independently preferably a carboxy group, a cyano group or a methyl group. p1, q1 and r1 are each independently preferably any integer from 0 to 2, more preferably 0 or 1. w1 is preferably any integer from 0 to 2, more preferably 0 or 1. In particular, formula (a3-4) is preferably formula (a3-4)'. TIFF2025109689000078.tif3848 (wherein R a24 and L a7 represent the same meaning as above.)

[0096] Examples of the structural unit (a3) include structural units derived from the monomers described in JP-A-2010-204646, the monomers described in JP-A-2000-122294, and the monomers described in JP-A-2012-41274. Examples of the structural unit (a3) include structural units represented by any of formula (a3-1-1), formula (a3-1-2), formula (a3-2-1), formula (a3-2-2), formula (a3-3-1), formula (a3-3-2) and formula (a3-4-1) to formula (a3-4-12), and, in the above structural units, structural units in which the methyl groups corresponding to R a18 and R a19 and R a20 and R a24 are replaced with hydrogen atoms are preferred. TIFF2025109689000079.tif108164

[0097] When the resin (A) etc. contain the structural unit (a3), the total content rate is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, still more preferably 10 mol% or more with respect to all the structural units of the resin (A) etc. Also, 70 mol% or less is mentioned, preferably 65 mol% or less, more preferably 60 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, still more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, 1 to 70 mol% is mentioned, preferably 1 to 65 mol%, more preferably 1 to 60 mol%, still more preferably 3 to 60 mol%. Further, the content rate of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3) or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, still more preferably 5 mol% or more, and even more preferably 10 mol% or more with respect to all the structural units of the resin (A) etc. Also, it is preferably 60 mol% or less, more preferably 55 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, still more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, 1 to 60 mol% is preferable, 3 to 50 mol% is more preferable, and 5 to 50 mol% is still more preferable.

[0098] 〈Structural unit (a4)〉 The structural unit represented by the formula (a4) is shown below. TIFF2025109689000080.tif2870 [In the formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 represents an aliphatic hydrocarbon group having a halogen atom with 1 to 48 carbon atoms, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-.]

[0099] R 42 The aliphatic hydrocarbon group represented by 42 includes a linear or branched chain hydrocarbon group, a monocyclic or polycyclic alicyclic hydrocarbon group, and a group formed by combining these, etc. Examples of the chain hydrocarbon group include linear alkyl groups such as methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, hexadecyl group, heptadecyl group, and octadecyl group; and branched alkyl groups such as isopropyl group and isobutyl group. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include monocyclic alicyclic hydrocarbon groups which are monocyclic cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group, and cyclooctyl group; and polycyclic alicyclic hydrocarbon groups which are polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group, and the following group (* represents the bonding site). Examples of the group formed by the combination include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic hydrocarbon groups, such as -alkanediyl group-alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, -alkanediyl group-alicyclic hydrocarbon group-alkyl group, etc. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, and hexane-1,6-diyl group; and branched alkanediyl groups such as propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-methylbutane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The terminal of the branched alkanediyl group may be a methyl group. R 42 Examples of the halogen atom contained in the aliphatic hydrocarbon group in 42 include fluorine atom, chlorine atom, bromine atom, or iodine atom. R 42Examples of the group in which -CH2- of the aliphatic hydrocarbon group contained in [compound name] is replaced by -O- or -CO- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanedicarbonyl group, an alkanedicarbonyl oxy group, a cycloalkoxy group, a cycloalkylalkoxy group, a group formed by combining two or more of these groups, and the like. These replaced groups include the same groups as those exemplified in the present specification within the range where the upper limit of the number of carbon atoms is allowed.

[0100] Examples of the structural unit (a4) include R 42 is preferably an aliphatic hydrocarbon group having a fluorine atom, and R 42 Examples of the structural unit (a4) in which is an aliphatic hydrocarbon group having a fluorine atom include a structural unit represented by the formula (a4-1) (hereinafter sometimes referred to as "structural unit (a4-1)"), a structural unit represented by the formula (a4-2) (hereinafter sometimes referred to as "structural unit (a4-2)"), a structural unit represented by the formula (a4-3) (hereinafter sometimes referred to as "structural unit (a4-3)"), and a structural unit represented by the formula (a4-A) (hereinafter sometimes referred to as "structural unit (a4-A)"). The structural unit represented by the formula (a4-1) is the structural unit shown below. TIFF2025109689000082.tif3092 [In the formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f represents an alkanediyl group having 1 to 8 carbon atoms having a fluorine atom or a cycloalkanediyl group having 3 to 12 carbon atoms having a fluorine atom. R 42f represents a hydrogen atom or a fluorine atom.]

[0101] L 41Examples of the alkanediyl group in [context] include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, etc., and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, and 2-methylpropane-1,2-diyl group. The terminal of the branched alkanediyl group may be a methyl group. L 42f Examples of the alkanediyl group having a fluorine atom in [context] include linear alkanediyl groups having a fluorine atom such as methylene group having a fluorine atom, ethylene group having a fluorine atom, propane-1,3-diyl group having a fluorine atom, butane-1,4-diyl group having a fluorine atom, pentane-1,5-diyl group having a fluorine atom, hexane-1,6-diyl group having a fluorine atom, heptane-1,7-diyl group having a fluorine atom, octane-1,8-diyl group having a fluorine atom, etc.; branched alkanediyl groups having a fluorine atom such as ethane-1,1-diyl group having a fluorine atom, propane-1,1-diyl group having a fluorine atom, propane-1,2-diyl group having a fluorine atom, propane-2,2-diyl group having a fluorine atom, pentane-2,4-diyl group having a fluorine atom, 2-methylpropane-1,3-diyl group having a fluorine atom, 2-methylpropane-1,2-diyl group having a fluorine atom, pentane-1,4-diyl group having a fluorine atom, 2-methylbutane-1,4-diyl group having a fluorine atom. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom. L 42f Examples of the cycloalkanediyl group having a fluorine atom in [context] include monocyclic cycloalkanediyl groups having a fluorine atom such as cyclobutane-1,3-diyl group having a fluorine atom, cyclopentane-1,3-diyl group having a fluorine atom, cyclohexane-1,4-diyl group having a fluorine atom, cyclohexene-3,6-diyl group having a fluorine atom, cycloheptane-1,4-diyl group having a fluorine atom, cyclooctane-1,5-diyl group having a fluorine atom, etc., Examples of the polycyclic cycloalkanediyl group having a fluorine atom include a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, an adamantane-2,6-diyl group having a fluorine atom, and the like. L 42f The number of fluorine atoms in the alkanediyl group having a fluorine atom and the cycloalkanediyl group having a fluorine atom in 42f may be 1 or more, and is preferably 2 or more. L 42f The alkanediyl group having a fluorine atom and the cycloalkanediyl group having a fluorine atom in 42f are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0102] L 42f Examples of the perfluoroalkanediyl group in 42f include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3,3-diyl group, a perfluorohexane-1,6-diyl group, a perfluorohexane-2,2-diyl group, a perfluorohexane-3,3-diyl group, a perfluoroheptane-1,7-diyl group, a perfluoroheptane-2,2-diyl group, a perfluoroheptane-3,4-diyl group, a perfluoroheptane-4,4-diyl group, a perfluorooctane-1,8-diyl group, a perfluorooctane-2,2-diyl group, a perfluorooctane-3,3-diyl group, a perfluorooctane-4,4-diyl group, and the like. L 42fExamples of the perfluorocycloalkanediyl group include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, a perfluoroadamantanediyl group, and the like.

[0103] L 41 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group or an ethylene group, and even more preferably a single bond or a methylene group. L 42f is preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and even more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0104] Examples of the structural unit (a4-1) include the following structural units and structural units in which the methyl group corresponding to R in the following structural units is replaced by a hydrogen atom in the structural unit (a4-1). 41 The structural unit represented by the formula (a4-2) is the following structural unit. TIFF2025109689000084.tif33102[In the formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. R 43f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. However, at least one of 43f L 43f and 43f R 43fThe total number of carbon atoms in the molecule is limited to 21.

[0105] L 43f and R 43f Examples of the aliphatic hydrocarbon group in include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these groups. 43f and R 43f Examples of the aliphatic hydrocarbon group in 43f and R 43f As long as the upper limit of the total number of carbon atoms in 42 Examples of the aliphatic hydrocarbon group include the same groups as the exemplified aliphatic hydrocarbon groups.

[0106] L 43f The aliphatic hydrocarbon group is preferably an alkanediyl group having 1 to 6 carbon atoms or a group represented by the formula (L43f-1). TIFF2025109689000085.tif13119 [In formula (L43f-1), s represents 0 or 1. L 45f and L 46f each independently represents a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom. L 47f represents a single bond or a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms which may contain a fluorine atom. X 46f and X 47f each independently represents -O-, -CO-, -CO-O- or -O-CO-. However, L 45f , L 46f , L 47f , X 46f and X 47f The total number of carbon atoms is 7 or less. * and ** are binding sites, ** is -O-CO-R 43f This is the binding site for

[0107] L in the group represented by formula (L43f-1) 45f , L 46f and L47f Examples of the divalent aliphatic hydrocarbon group represented by [chemical formula] include linear or branched alkanediyl groups, monocyclic or polycyclic divalent alicyclic hydrocarbon groups, and divalent aliphatic hydrocarbon groups formed by combining an alkanediyl group and a divalent alicyclic hydrocarbon group. Specific examples include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, and the like. s is preferably 0.

[0108] Examples of the group represented by formula (L43f-1) include the following groups. In the following examples, * and ** each represent a bonding site, and ** is the bonding site with -O-CO-R 43f and. TIFF2025109689000086.tif47140

[0109] R 43f is preferably an aliphatic hydrocarbon group having a fluorine atom. Examples of the structural unit represented by formula (a4-2) in this case include the structural units represented by formula (a4-2A) or (formula a4-2B). TIFF2025109689000087.tif41157[In formula (a4-2A) and formula (a4-2B), R 41 and L 43f represent the same as those in formula (a4-2). R 43fA represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms and having a fluorine atom. A 43f represents a divalent aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. X 43 represents **-O-CO- or **-CO-O-, and ** represents the bonding site with A 43f and. R 43fBrepresents an aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom. However, in formula (a4-2A), L 43f and R 43fA have a total carbon number of 21 or less. In formula (a4-2B), L 43f , A 43f , X 43 and R 43fB have a total carbon number of 21 or less. Among A 43f and R 43fB , at least one has at least one fluorine atom. The aliphatic hydrocarbon group of R 43fA is, as long as the upper limit of the carbon number allows, the same aliphatic hydrocarbon group as the aliphatic hydrocarbon group exemplified by R 42 . R 43fA is preferably an alkyl group having 1 to 13 carbon atoms and having a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms and having a fluorine atom, or a group combining them, *-(CF2) n43f -R 42’ (* represents the bonding site with the carbonyl group. n43f represents any integer from 1 to 6. R 42’ represents a hydrogen atom or a fluorine atom.) or a perfluorocycloalkyl group having 3 to 12 carbon atoms is more preferable. The aliphatic hydrocarbon groups of A 43f and R 43fB are, as long as the upper limit of the carbon number allows, the same aliphatic hydrocarbon groups as the aliphatic hydrocarbon groups exemplified by R 42 in formula (a4). A 43f is preferably a divalent chain hydrocarbon group which may have a fluorine atom, a divalent alicyclic hydrocarbon group, or a group combining them, more preferably a divalent chain hydrocarbon group having a fluorine atom, and even more preferably a fluoroalkanediyl group having 1 to 6 carbon atoms. R 43fBThe aliphatic hydrocarbon group which may have a fluorine atom is preferably a chain hydrocarbon group, an alicyclic hydrocarbon group or a combination thereof which may have a fluorine atom, more preferably an alkyl group having 1 to 12 carbon atoms, a cycloalkyl group having 3 to 12 carbon atoms or a combination thereof which may have a fluorine atom, and trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, perfluorohexyl group, heptyl group, perfluoroheptyl group, octyl group, perfluorooctyl group and other alkyl fluoride groups, cyclopropylmethyl group, cyclopropyl group, cyclobutylmethyl group, cyclopentyl group, cyclohexyl group, perfluorocyclohexyl group, adamantyl group, adamantylmethyl group, adamantyldimethyl group, norbornyl group, norbornylmethyl group, perfluoroadamantyl group, perfluoroadamantylmethyl group and the like are more preferable.

[0110] In formula (a4-2B), *-A f43 -X 43 -R f43B An example of the structure that the group represented by can take is the following structure (* is the bonding site with the carbonyl group). TIFF2025109689000088.tif15170

[0111] As the structural unit represented by formula (a4-2A), there may be mentioned the following structural units and the structural units in which the methyl group corresponding to R in the structural unit represented by formula (a4-2A) below is replaced by a hydrogen atom. 41 TIFF2025109689000089.tif99167

[0112] Examples of the structural unit represented by formula (a4-2B) include the following structural units and structural units in which the methyl group corresponding to R in the following structural units is replaced by a hydrogen atom. 41 Examples include structural units in which the methyl group corresponding to R in the following structural units is replaced by a hydrogen atom. TIFF2025109689000090.tif111163

[0113] Examples of the structural unit (a4) also include the structural unit represented by formula (a4-3). TIFF2025109689000091.tif3689[In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. R 44f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. However, at least one of 44f L 44f and 44f R 44f has a fluorine atom, and the upper limit of the total number of carbon atoms of

[0114] L 44f and 44f R is 21.] 44f Examples of the aliphatic hydrocarbon group in 44f L 44f and 44f R include linear or branched chain aliphatic hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these. Examples of the aliphatic hydrocarbon group in 42 L and 44fis preferably an alkanediyl group having 1 to 14 carbon atoms (wherein -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and -(CH2) j1 -, -(CH2) j2 -O-(CH2) j3 - or -(CH2) j4 -CO-O-(CH2) j5 - (where j1 to j5 each independently represent an integer of 1 to 6). More preferably, it is an alkanediyl group having 1 to 4 carbon atoms (where one -CH2- contained in the alkanediyl group may be replaced by -O-, and one -CH2-CH2- contained in the alkanediyl group may be replaced by -CO-O- or -O-CO-). R 44f is preferably an aliphatic hydrocarbon group having 1 to 10 carbon atoms having a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom, an alicyclic hydrocarbon group having 3 to 10 carbon atoms having a fluorine atom, or a group combining them, still more preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom, and even more preferably an alkyl group having 1 to 6 carbon atoms having a fluorine atom.

[0115] Examples of the structural unit represented by the formula (a4-3) include structural units represented by the following structural units and the following formulas, in which the methyl group corresponding to R in the structural unit (a4-3) is replaced by a hydrogen atom. 41 TIFF2025109689000092.tif86170

[0116] Examples of the structural unit (a4) also include a structural unit represented by the formula (a4-A). TIFF2025109689000093.tif3686 [In the formula (a4-A), R 1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 11 represents a single bond or *-CO-O-. * is R​1 represents the bonding site with the carbon atom to which it is bonded. L 1 represents an aliphatic hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O-, -S-, -SO2-, -SO- or -CO-. R 2 represents an alkyl fluoride group having 1 to 8 carbon atoms. R 3 represents a hydrogen atom or an alkyl fluoride group having 1 to 6 carbon atoms, and the alkyl fluoride group may combine with L 1 to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-. mi represents any integer from 1 to 4. When mi is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other.

[0117] R 1 Examples of the alkyl group having 1 to 6 carbon atoms in R include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R 1 Examples of the halogen atom in R include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 1 Examples of the alkyl group having 1 to 6 carbon atoms having a halogen atom in R include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, and a dibromomethyl group. R 1is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0118] L 1 Examples of the aliphatic hydrocarbon group in L include a chain hydrocarbon group, an alicyclic hydrocarbon group which is monocyclic or polycyclic (including a spiro ring, a condensed ring, a bridged ring, etc.), and a group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group). Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, and an alkanepentayl group. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group, and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. Also included are groups in which one or more hydrogen atoms of the above-described groups are replaced with a bonding site. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 9, still even more preferably 1 to 8, still more preferably 1 to 6, still even more preferably 1 to 5, and particularly preferably 1 to 4. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups, etc. The bonding site can be at any position. TIFF2025109689000094.tif45164For example, divalent to pentavalent alicyclic hydrocarbon groups such as cycloalkanediyl groups, cycloalkanetriyl groups, cycloalkanetetrayl groups, cycloalkanepentayl groups, etc. can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, etc. and Polycyclic alicyclic hydrocarbon groups such as spiro rings having a cycloalkanediyl group, norbornanediyl group or adamantanediyl group and a cycloalkanediyl group spiro-bonded thereto, respectively, such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediyl group, spirocyclohexane-1,2'-cyclopentane-diyl group, spiroadamantane-2,3'-cyclopentane-diyl group, etc. can be mentioned. In addition, groups in which one or more hydrogen atoms of the above-mentioned groups are replaced by a bonding site, etc. can also be mentioned. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12.

[0119] Examples of the group combined with two or more types include a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group, etc. In the combination, the alicyclic hydrocarbon group and the chain hydrocarbon group may each be combined with two or more types. Also, which group is X 11It may be bonded to. Examples of the group combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - chain hydrocarbon group - etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - etc.), a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which an alicyclic hydrocarbon group, a chain hydrocarbon group, and an alicyclic hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which a chain hydrocarbon group, an alicyclic hydrocarbon group, and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - etc.), and the like. * represents the bonding site to X. 11 represents the bonding site with. Moreover, groups in which one or more hydrogen atoms of the above-described groups are replaced with a bonding site, etc. are also included.

[0120] L 1 The -CH2- contained in the aliphatic hydrocarbon group having 1 to 28 carbon atoms of L may be replaced with -O-, -S-, -SO-, -SO2- or -CO-. L 1 When the -CH2- contained in the aliphatic hydrocarbon group having 1 to 28 carbon atoms of L is replaced with -O-, -S-, -SO-, -SO2- or -CO-, the carbon number before replacement is regarded as the carbon number of the aliphatic hydrocarbon group. Examples of the group in which -CH2- contained in the aliphatic hydrocarbon group is replaced by -O-, -S-, -SO2-, -SO- or -CO- include a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, a group formed by combining two or more of these groups, and the like. These replaced groups include the same groups as those exemplified in the present specification within the range allowed by the upper limit of the number of carbon atoms. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced by a bonding site. Examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the same groups as those exemplified in the present specification within the range allowed by the upper limit of the number of carbon atoms.

[0121] L 1 The aliphatic hydrocarbon group in L may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms (wherein -CH2- contained in the alkyl group or the alicyclic hydrocarbon group may be replaced by -O- or -CO-). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like. The haloalkyl groups having 1 to 4 carbon atoms include fluoroalkyl groups having 1 to 4 carbon atoms, chloroalkyl groups having 1 to 4 carbon atoms, bromoalkyl groups having 1 to 4 carbon atoms, iodoalkyl groups having 1 to 4 carbon atoms, and the like. Examples of the haloalkyl group include perfluoroalkyl groups having 1 to 4 carbon atoms (such as trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group, and the like. The number of carbon atoms of the haloalkyl group is preferably 1 to 3, more preferably 1 or 2. Examples of the alkyl group having 1 to 12 carbon atoms include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, and the like. The number of carbon atoms of the alkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alicyclic hydrocarbon group having 3 to 18 carbon atoms include monocyclic cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, cyclodecyl group, and polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group, and the like. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12, still more preferably 3 to 10. Examples of the aromatic hydrocarbon group having 6 to 18 carbon atoms include phenyl group, naphthyl group, biphenyl group, anthryl group, phenanthryl group, binaphthyl group, and the like. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 14, more preferably 6 to 12, still more preferably 6 to 10. When -CH2- contained in an alkyl group is replaced by -O- or -CO-, the number of carbon atoms before replacement is defined as the total number of carbon atoms of the alkyl group. Examples of the replaced group include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, etc. These replaced groups include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. In addition, examples of the group in which -CH2- contained in an alicyclic hydrocarbon group is replaced by -O- or -CO- include those similar to the groups exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. L 1 Examples of the substituent that the aliphatic hydrocarbon group in L may have include a halogen atom, a haloalkyl group having 1 to 3 carbon atoms, an alkyl group having 1 to 6 carbon atoms, an alicyclic hydrocarbon group having 3 to 10 carbon atoms, or an aromatic hydrocarbon group having 6 to 10 carbon atoms (wherein -CH2- contained in the alkyl group or the alicyclic hydrocarbon group may be replaced by -O- or -CO-). A fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-) is more preferable, and a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, or a methoxy group is even more preferable. L 1 is R 3When it does not form an alkyl fluoride group and an alicyclic hydrocarbon group, a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-) is preferable, a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent, or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-) is more preferable, a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent, a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining an alicyclic hydrocarbon group having 5 to 12 carbon atoms, a chain hydrocarbon group having 1 to 6 carbon atoms, and an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-) is even more preferable.

[0122] R 2Examples of the alkyl fluoride group having 1 to 8 carbon atoms include difluoromethyl group, trifluoromethyl group, 1,1-difluoroethyl group, 2,2-difluoroethyl group, 2,2,2-trifluoroethyl group, perfluoroethyl group, 1,1,2,2-tetrafluoropropyl group, 1,1,2,2,3,3-hexafluoropropyl group, perfluoroethylmethyl group, 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, perfluoropropyl group, 1,1,2,2-tetrafluorobutyl group, 1,1,2,2,3,3-hexafluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, perfluorobutyl group, 1,1-bis(trifluoro)methyl-2,2,2-trifluoroethyl group, 2-(perfluoropropyl)ethyl group, 1,1,2,2,3,3,4,4-octafluoropentyl group, perfluoropentyl group, 1,1,2,2,3,3,4,4,5,5-decafluoropentyl group, 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl group, perfluoropentyl group, 2-(perfluorobutyl)ethyl group, 1,1,2,2,3,3,4,4,5,5-decafluorohexyl group, 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl group, perfluoropentylmethyl group, perfluorohexyl group, perfluoroheptyl group, perfluorooctyl group. The number of carbon atoms of the alkyl fluoride group is preferably 1 to 6, more preferably 1 to 5, still more preferably 1 to 4, and even more preferably 1 to 3. R 3 When the alkyl fluoride group having 1 to 6 carbon atoms is R 2 the alkyl fluoride groups having 1 to 6 carbon atoms as exemplified in the examples of the alkyl fluoride group of R R 2 is preferably an alkyl fluoride group having 1 to 6 carbon atoms when R 3 is an alkyl fluoride group having 1 to 6 carbon atoms, more preferably an alkyl fluoride group having 1 to 3 carbon atoms, still more preferably a trifluoromethyl group, a perfluoroethyl group or a perfluoropropyl group, and even more preferably a trifluoromethyl group. R2 is, when R 3 is a hydrogen atom, preferably an alkyl fluoride group having 1 to 6 carbon atoms, more preferably an alkyl fluoride group having 1 to 5 carbon atoms, still more preferably an alkyl fluoride group having 3 to 5 carbon atoms. R 3 is L 1 and combines to form an alicyclic hydrocarbon group having 3 to 12 carbon atoms, R 3 is L 1 Examples of the group formed by combining with include groups represented by the following formulas. Among the following formulas, * and ** represent bonding sites, and the two ** represent that one represents the bonding site with a hydroxy group and the other represents the bonding site with R 2 and, L 1A is, L 1 is a part of the hydrocarbon group of L 1 and represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. R 3 is L 1 The number of carbon atoms of the alicyclic hydrocarbon group formed by combining with is preferably 3 to 10, more preferably 3 to 8, still more preferably 3 to 6. TIFF2025109689000095.tif22138R 3 is preferably a hydrogen atom or an alkyl fluoride group having 1 to 3 carbon atoms. mi is preferably any integer from 1 to 3, more preferably 1 or 2, still more preferably 1.

[0123] Examples of the structural unit (a4-A) include the following structural units and the like. In the following structural units, structural units in which the methyl group corresponding to R 1 is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or an alkyl group other than a methyl group, and structural units in which the hydrogen atom corresponding to R 1 is replaced with a halogen atom, a haloalkyl group or an alkyl group can also be cited as specific examples of the structural unit (a4-A). TIFF2025109689000096.tif192166

[0124] When the resin (A) etc. has the structural unit (a4), its content is preferably 1 to 97 mol%, more preferably 2 to 95 mol%, still more preferably 3 to 90 mol% with respect to all the structural units of the resin (A) etc.

[0125] 〈Structural unit (a5)〉 Examples of the non-detachable hydrocarbon group that the structural unit (a5) has include a group having a linear, branched or cyclic hydrocarbon group. Among them, the structural unit (a5) preferably has a group having an alicyclic hydrocarbon group. Examples of the structural unit (a5) include a structural unit represented by the formula (a5-1). TIFF2025109689000097.tif3351[In the formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and the hydrogen atoms contained in the alicyclic hydrocarbon group may be substituted with an aliphatic hydrocarbon group having 1 to 8 carbon atoms. L 55 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-.]

[0126] R 52 The alicyclic hydrocarbon group in R may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group and a cyclohexyl group. Examples of the polycyclic alicyclic hydrocarbon group include an adamantyl group and a norbornyl group etc. Examples of the aliphatic hydrocarbon group having 1 to 8 carbon atoms include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group and a 2-ethylhexyl group. Examples of the alicyclic hydrocarbon group having a substituent include a 3-methyladamantyl group etc. R 52is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, more preferably an adamantyl group, a norbornyl group or a cyclohexyl group.

[0127] L 55 Examples of the divalent saturated hydrocarbon group in include divalent chain saturated hydrocarbon groups and divalent alicyclic saturated hydrocarbon groups, preferably divalent chain saturated hydrocarbon groups. Examples of the divalent chain saturated hydrocarbon group include alkane diyl groups such as a methylene group, an ethylene group, a propane diyl group, a butane diyl group and a pentane diyl group. The divalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic saturated hydrocarbon group include cycloalkane diyl groups such as a cyclopentane diyl group and a cyclohexane diyl group. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include an adamantane diyl group and a norbornane diyl group. L 55 Examples of the group in which -CH2- contained in the divalent saturated hydrocarbon group represented by is replaced by -O- or -CO- include groups represented by formula (L1-1) to formula (L1-4). In the following formulas, * and ** each represent a bonding site, and * represents a bonding site with an oxygen atom. TIFF2025109689000098.tif18164[In formula (L1-1), X x1 represents *-O-CO- or *-CO-O- (* represents the bonding site with L x1 .). L x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, the total number of carbon atoms of L x1 and L x2 is 16 or less. In formula (L1-2), L x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms. L x4represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, the total number of carbon atoms in L x3 and L x4 is 17 or less. In formula (L1-3), L x5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. L x6 and L x7 each independently represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 14 carbon atoms. However, the total number of carbon atoms in L x5 , L x6 and L x7 is 15 or less. In formula (L1-4), L x8 and L x9 represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms. W x1 represents a divalent alicyclic saturated hydrocarbon group having 3 to 15 carbon atoms. However, the total number of carbon atoms in L x8 , L x9 and W x1 is 15 or less.

[0128] L x1 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x2 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond. L x3 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x4 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x6is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x7 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x8 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. L x9 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. W x1 is preferably a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, more preferably a cyclohexanediyl group or an adamantanediyl group.

[0129] Examples of the group represented by the formula (L1-1) include the following divalent groups. TIFF2025109689000099.tif37147 Examples of the group represented by the formula (L1-2) include the following divalent groups. TIFF2025109689000100.tif23130 Examples of the group represented by the formula (L1-3) include the following divalent groups. TIFF2025109689000101.tif16147 Examples of the group represented by the formula (L1-4) include the following divalent groups. TIFF2025109689000102.tif13168L 55 is preferably a single bond or a group represented by the formula (L1-1).

[0130] Examples of the structural unit (a5-1) include the following structural units and the structural units in the following structural units where the methyl group corresponding to R in the structural unit (a5-1) is replaced by a hydrogen atom. 51 are mentioned. When the resin (A) etc. has the structural unit (a5), its content is preferably 1 to 30 mol%, more preferably 2 to 20 mol%, still more preferably 3 to 15 mol% with respect to all the structural units of the resin (A) etc.

[0131] 〈Structural unit (a6)〉 The structural unit (a6) is a structural unit having a -SO2- group, and preferably has a -SO2- group in the side chain. The structural unit having a -SO2- group may have a linear structure having a -SO2- group, a branched structure having a -SO2- group, or a cyclic structure (monocyclic and polycyclic structures) having a -SO2- group. Preferably, it is a structural unit having a cyclic structure having a -SO2- group, and more preferably, it is a structural unit having a cyclic structure (sultone ring) containing -SO2-O-.

[0132] As the sultone ring, the following formula (T 1 -1), formula (T 1 -2), formula (T 1 -3) and formula (T 1 -4) are mentioned. The bonding site can be at any position. The sultone ring may be monocyclic, but is preferably polycyclic. The polycyclic sultone ring means a bridged ring containing -SO2-O- as an atomic group constituting the ring, and the rings represented by formula (T 1 -1) and formula (T 1 -2) are mentioned. The sultone ring may further contain a hetero atom in addition to -SO2-O- as an atomic group constituting the ring, like the ring represented by formula (T 1 -2). Examples of the hetero atom include an oxygen atom, a sulfur atom or a nitrogen atom, and preferably an oxygen atom. TIFF2025109689000104.tif2977

[0133] The sultone ring may have a substituent, and examples of the substituent include an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, and an alkylcarbonyl group having 2 to 4 carbon atoms, etc.

[0134] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group, preferably an alkyl group having 1 to 6 carbon atoms, and more preferably a methyl group. Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, preferably a trifluoromethyl group. Examples of the alkyl group having a hydroxy group include a hydroxymethyl group and a hydroxyalkyl group such as a 2-hydroxyethyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a p-methylphenyl group, a p-tert-butylphenyl group, a p-adamantylphenyl group, a tolyl group, a xylyl group, a cumyl group, a mesityl group, a biphenyl group, a phenanthryl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group. Examples of the aralkyl group include a benzyl group, a phenethyl group, a phenylpropyl group, a naphthylmethyl group, and a naphthylethyl group. Examples of the alkoxycarbonyl group include a group in which an alkoxy group such as a methoxycarbonyl group or an ethoxycarbonyl group is bonded to a carbonyl group, preferably an alkoxycarbonyl group having 6 or fewer carbon atoms, and more preferably a methoxycarbonyl group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group.

[0135] From the viewpoint of easy production of the monomer leading to the structural unit (a6), a sultone ring having no substituent is preferred. As the sultone ring, a ring represented by the following formula (T1') is preferred. TIFF2025109689000105.tif2665[In the formula (T1'), X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents any integer from 0 to 9. When ma is 2 or more, a plurality of R 41 may be the same or different. The bonding site is at an arbitrary position.] X 11 is preferably an oxygen atom or a methylene group, and more preferably a methylene group. R 41 includes the same ones as the substituents of the sultone ring, and an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group is preferred. ma is preferably 0 or 1, and more preferably 0.

[0136] Examples of the ring represented by formula (T1’) include the following rings. The bonding site can be at any position. Among them, the bonding site is preferably at the 1-position or 3-position. TIFF2025109689000106.tif44148

[0137] The structural unit having a -SO2- group preferably further has a group derived from a polymerizable group. Examples of the polymerizable group include a vinyl group, an acryloyl group, a methacryloyl group, an acryloyloxy group, a methacryloyloxy group, an acryloylamino group, a methacryloylamino group, an acryloylthio group, a methacryloylthio group, and the like. Among them, the monomer that leads to the structural unit (a6) is preferably a monomer having an ethylenically unsaturated bond, and more preferably a (meth)acrylic monomer.

[0138] The structural unit (a6) is preferably a structural unit represented by formula (a6-0). TIFF2025109689000107.tif3878[In formula (a6-0), R x represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. A xx represents an oxygen atom, -N(R c )-, or a sulfur atom. A x represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O-, -CO-, or -N(R d )-. X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 represents the same groups as described above. ma represents any integer from 0 to 9. When ma is 2 or more, the plurality of R 41 may be the same or different. R c and R dEach independently represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

[0139] R x Examples of the halogen atom of R include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R x Examples of the alkyl group of R include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, and an n-hexyl group, etc. Preferably, it is an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group. R x Examples of the alkyl group having a halogen atom of R include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, etc. R x R is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. A x Examples of the divalent saturated hydrocarbon group of A include a linear alkanediyl group, a branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and those obtained by combining two or more of these groups may also be used. Specifically, linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, heptadecane-1,17-diyl group, ethane-1,1-diyl group, propane-1,1-diyl group and propane-2,2-diyl group; Branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group; Monocyclic divalent alicyclic saturated hydrocarbon groups which are cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; Polycyclic divalent alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc. may be mentioned. A x The bonding position to the sultone ring of can be at any position, but the one at the 1-position is preferred.

[0140] Examples of the structural unit (a6-0) include the following structural units. TIFF2025109689000108.tif78129Among them, the structural units represented by formula (a6-1), formula (a6-2), formula (a6-6), formula (a6-7), formula (a6-8) and formula (a6-12) are preferred, and the structural units represented by formula (a6-1), formula (a6-2), formula (a6-7) and (a6-8) are more preferred. When the resin (A) etc. has the structural unit (a6), its content is preferably 1 to 50 mol%, more preferably 2 to 40 mol%, still more preferably 3 to 30 mol% with respect to all the structural units of the resin (A) etc.

[0141] <Structural unit (a7)> The resin (A) etc. may further contain a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)"). Specific examples of the structural unit (a7) include the structural units described in JP-A-2016-79235, and it is preferably a structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain or a structural unit having a sulfonio group and an organic anion in the side chain. The structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain is preferably a structural unit represented by the formula (a7-A). TIFF2025109689000109.tif26125[In the formula (a7-A), R a7 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a71 represents a single bond, *-O-, *-CO-O-, *-O-CO-O-**, *-CO-NR a71 -**, *-NR a71 -CO-O-**, *-O-CO-NR a71 -** or *-Ax-Ph-Ay-**. R a71 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. * and ** represent bonding sites, and * represents the bonding site with the carbon atom to which R a7 is bonded. L a71 and L a72Each independently represents a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-. X a72 represents ***-CO-O-, ***-O-CO-, ***-O-CO-O-, ***-O-, where *** is L a71 represents the bonding site with. na7 represents any integer from 0 to 2. When na7 is 2, the groups in the plurality of parentheses may be the same as or different from each other. RA - represents a sulfonate anion or a carboxylate anion. ZA + represents an organic cation.

[0142] R a7 is the R in formula (a1-0) a01 and the like include the same groups as those exemplified in. Among them, R a7 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, even more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a71 The alkyl group having 1 to 6 carbon atoms in includes a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. X a71 When the group represented by *-Ax-Ph-Ay-** is, it is preferably a linking group represented by the following formula (X10). TIFF2025109689000110.tif3351[In formula (X10), Ax represents the bonding species that binds to the carbon atom to which R a7 is bonded, and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. Ay is L a71Represents a bonding type that binds to, and represents one or more bonding types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate bond, and an amide bond. Rx represents a halogen atom, a hydroxy group, a C1-C6 fluoroalkyl group, a C1-C18 alkyl group, or a C1-C6 alkoxy group. mx represents any integer from 0 to 4, and when mx is an integer of 2 or more, the plurality of Rx may be the same as or different from each other. When either Ax or Ay is a single bond, it is preferable that the other is one or more selected from the group consisting of an ether bond, a thioether bond, an ester bond, a carbonate bond, and an amide bond. When either Ax or Ay is an amide bond, it is preferably a bond represented by -CO-NR a71 -. The bonding position of Ay in the phenylene group is preferably the m-position or the p-position with respect to the bonding position of Ax, and more preferably the p-position. Among them, Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, or an ethyl group. mx is preferably 0, 1, or 2. X a71 Examples of X 10 -1) to the group represented by the formula (X 10 -10). * represents the bonding site with the carbon atom to which -R a7 is bonded. ** represents the bonding site with L a71 . X 20 represents -O- or -NR a71 -. TIFF2025109689000111.tif44163 The specific examples of the group represented by the formula (X 10 -1) to the formula (X 10 -10) include the following groups. TIFF2025109689000112.tif87161 Among them, X a71 is a single bond and the formula (X 10 -1’), the formula (X 10 -3’) to the formula (X10 It is preferably a group represented by any of -9’), and is a single bond or formula (X 10 -1’), formula (X 10 -4’), formula (X 10 -5’), formula (X 10 -6’) and formula (X 10 -9’), more preferably a group represented by any of them, and is more preferably a single bond, a group represented by formula (X 10 -1’), a group represented by formula (X 10 -5’), a group represented by formula (X 10 -6’) or a group represented by formula (X 10 -9’).

[0143] L a71 Examples of the hydrocarbon group of include a group obtained by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, and combining with X a71 and X a72 . Further, examples of the hydrocarbon group of L a72 include a group obtained by removing one hydrogen atom from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, and combining with X a72 and RA - . L a71 and L a72 Examples of the chain hydrocarbon group of include a group obtained by removing one hydrogen atom from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specifically includes a methyl group, an ethyl group, a propyl group, an iso-propyl group, an n-butyl group, a sec-butyl group, an iso-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decanyl group, an undecanyl group, a dodecanyl group, a tridecanyl group, a tetradecanyl group, a pentadecanyl group, a heptadecanyl group, etc. Examples of the alkenyl group include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, a nonenyl group. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 36, more preferably from 1 to 20, and even more preferably from 1 to 10. L a71 and L a72 Examples of the alicyclic hydrocarbon group of L and L include a group obtained by removing one hydrogen atom from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cyclopentyl group, a cyclooctyl group and the like. L a71 and L a72 Examples of the polycyclic cycloalkyl group of L and L include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group, an adamantyl group and the like. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4.4.0]decanyl group, a steroid group (steroid skeleton) and the like. Further, examples of the ring in which two rings are spiro-bonded include a spirocyclic cycloalkyl group in which one cycloalkyl group selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, an adamantyl group and a cycloalkyl group having 5 to 8 carbon atoms are spiro-bonded. Also, a double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, the alicyclic hydrocarbon group represented by the following formula can be mentioned. TIFF2025109689000113.tif28158 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably from 3 to 12, more preferably from 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably from 7 to 12. L a71 and L a72Examples of the aromatic hydrocarbon group include an aryl group from which one hydrogen atom has been removed. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, a fluorene group, and the like. The number of carbon atoms in the aromatic hydrocarbon group is preferably 5 to 14, more preferably 5 to 10. L a71 and L a72 When -CH2- contained in the hydrocarbon group of L and L is replaced by -O-, -CO-, -S-, -SO- or -SO2-, the number of carbon atoms before replacement is defined as the number of carbon atoms of the hydrocarbon group. L a71 and L a72Among the hydrocarbon groups, examples of the group in which -CH2- contained in the chain hydrocarbon group is replaced by -O-, -CO-, -S-, -SO- or -SO2- include a hydroxy group (a group in which -CH2- contained in the methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), a carbonyl group (a group in which -CH2- contained in the methylene group is replaced by -CO-), an oxy group (a group in which -CH2- contained in the methylene group is replaced by -O-), an alkoxy group (a group in which -CH2- at any position contained in the alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position contained in the alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -CO-O-), an alkanedioxy group (a group in which -CH2- at any position contained in the alkanediyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkanediyl group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position contained in the alkanediyl group is replaced by -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkanediyl group is replaced by -CO-O-), and the like. These replaced groups include those similar to those exemplified in the present specification. L a71 and L a72 Among the hydrocarbon groups, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -CO-, -S-, -SO- or -SO2- include a cyclic ether, a cyclic ketone, a cyclic ester (lactone), a cyclic thioether, a cyclic acetal, a cyclic sultone, and the like. Specifically, alicyclic hydrocarbon groups represented by the following formulas are included. The bonding positions of the alicyclic hydrocarbon groups exemplified by the following formulas can be at any position. TIFF2025109689000114.tif46146L a71and L a72 Among the hydrocarbon groups of a72 and L, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-. Examples of the group in which -CH2- is replaced by -O- or -S- include a furan ring and a thiophene ring, respectively. L a71 and L a72 Examples of the group formed by combining two or more of the chain hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group of a71 and L include the group formed by combining the above chain hydrocarbon group and the above alicyclic hydrocarbon group, the group formed by combining the above chain hydrocarbon group and the above aromatic hydrocarbon group, the group formed by combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and the group formed by combining the above chain hydrocarbon group, the above alicyclic hydrocarbon group, and the above aromatic hydrocarbon group. The above combined groups are included. The group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group may be a condensed ring. L a71 and L a72 Examples of the substituent that the hydrocarbon group of a71 and L may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. L a71 and L a72 When a71 and L are a group formed by combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group, substantially, the chain hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. Also, L a71 and L a72 By replacing -CH2- of the chain hydrocarbon group contained in the hydrocarbon group of a71 and L with -O-, -CO-, -S-, -SO- or -SO2-, L a71 and L a72 The hydrocarbon group of a71 and L can substantially have substituents such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, a sulfonyl group, etc. na7 is preferably 0 or 1. ZA in formula (a7-A) + includes the same ones as the cations in the salts represented by formula (B1).

[0144] In formula (a7-A), L a71 and L a72 are saturated hydrocarbon groups, in the formula (a7-B) described later, A b7 may include the same groups as the groups exemplified as the divalent linking group of. Examples of the structural unit represented by formula (a7-A) include the structural unit represented by formula (a7-A1). TIFF2025109689000115.tif31138 [In formula (a7-A1), R a7 , X a71 , L a71 , X a72 , na7, RA - and ZA + have the same meanings as described above. z7 represents any integer from 0 to 6. Q a7 , Q b7 , R z71 and R z72 each independently represent a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. When z7 is 2 or more, a plurality of R z71 and R z72 may be the same as or different from each other.] Q a7 , Q b7 , R z71 and R z72 Examples of the perfluoroalkyl group having 1 to 6 carbon atoms or the alkyl group having 1 to 6 carbon atoms in include the same groups as the groups exemplified for R a7 .

[0145] Examples of the structural unit represented by formula (a7-A) include, for example, the following structural units, groups corresponding to the methyl group of R a7 are replaced by a hydrogen atom, a halogen atom (for example, a fluorine atom), or an alkyl group having 1 to 6 carbon atoms that may have a halogen atom (for example, a trifluoromethyl group, etc.), and the structural units described in International Publication No. 2012 / 050015. ZA +represents an organic cation. TIFF2025109689000116.tif131157

[0146] TIFF2025109689000117.tif244163

[0147] The structural unit having a sulfonio group and an organic anion in the side chain is preferably a structural unit represented by the formula (a7-B). TIFF2025109689000118.tif28105[In the formula (a7-B), R a7 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A b7 represents a single bond or a divalent linking group. R b71 represents a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. R b72 and R b73 each independently represent a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and R b72 and R b73 may combine with each other to form a ring together with the sulfur atom to which they are attached. A - represents an organic anion. ] R a7 Examples of the halogen atom and the alkyl group which may have a halogen atom of R include the same halogen atoms and alkyl groups which may have a halogen atom as those in the formula (a7-A). R b71 Examples of the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by include a phenylene group and a naphthylene group. R b72 and R b73 Examples of the hydrocarbon group represented by include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. Examples of the alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and groups formed by combining these are the same as those described above. A b7 Examples of the divalent linking group represented by b7 include divalent saturated hydrocarbon groups having 1 to 18 carbon atoms, and -CH2- contained in the divalent saturated hydrocarbon group may be replaced by -O-, -S-, or -CO-. Examples of the divalent saturated hydrocarbon group include linear or branched alkanediyl groups, monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups, and combinations thereof. Specifically, linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group; branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group; cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; divalent polycyclic alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc. Examples of those in which -CH2- contained in the saturated hydrocarbon group is replaced by -O-, -S-, or -CO- include divalent groups represented by the following. However, the carbon number before -CH2- contained in the saturated hydrocarbon group is replaced by -O-, -S-, or -CO- is 17 or less respectively. In the following formula, * and ** represent bonding sites, and * represents the bonding site with R II2 represents the bonding site with TIFF2025109689000119.tif92163[wherein X 3represents a divalent saturated hydrocarbon group having 1 to 16 carbon atoms. X 4 represents a divalent saturated hydrocarbon group having 1 to 15 carbon atoms. X 5 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms. X 6 represents a divalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 7 represents a trivalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 8 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms.

[0148] Examples of the structural unit containing the cation in formula (a7-B) include the structural units represented below and the group corresponding to the methyl group of R a7 in which the methyl group is replaced with a hydrogen atom, a halogen atom (e.g., a fluorine atom), or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (e.g., a trifluoromethyl group, etc.).

[0149] JPEG2025109689000120.jpg72163

[0150] A - Examples of the organic anion represented by include sulfonate anions, sulfonylimide anions, and sulfonylmethide anions. A - The organic anion represented by is preferably a sulfonate anion, and more preferably an anion contained in the salt represented by formula (B1) described later. Examples of the sulfonylimide anion, sulfonylmethide anion, and carboxylate anion are the same as those exemplified as the anion of the acid generator (B).

[0151] Examples of the structural unit represented by formula (a7-B) include the structural units represented below. JPEG2025109689000121.jpg95158

[0152] When the resin (A) contains the structural unit (a7), the structural unit (a7) may be contained alone or in combination of two or more. The total content ratio of the structural unit (a7) is preferably 1 to 30 mol%, more preferably 1 to 25 mol%, still more preferably 2 to 20 mol%, even more preferably 3 to 15 mol%, and even more preferably 3 to 10 mol% based on all the structural units of the resin (A1).

[0153] The resin (A) etc. are preferably resins containing the structural unit (a1). In particular, the resin (Ap) is more preferably a resin composed of the structural unit (IP), the structural unit (a1), and the structural unit (s), that is, a copolymer of the salt (I), the monomer (a1), and the monomer (s). The resin (A) not containing the structural unit (IP) is preferably a resin composed of the structural unit (a1) and the structural unit (s), that is, a copolymer of the monomer (a1) and the monomer (s). The structural unit (a1) is preferably at least one selected from the group consisting of the structural unit (a1-0), the structural unit (a1-1), and the structural unit (a1-2) (preferably the structural unit having a cyclohexyl group or a cyclopentyl group), more preferably at least two, and still more preferably at least two selected from the group consisting of the structural unit (a1-1) and the structural unit (a1-2). The structural unit (s) is preferably at least one selected from the group consisting of the structural unit (a2) and the structural unit (a3). The structural unit (a2) is preferably the structural unit (a2-1) or the structural unit (a2-A). The structural unit (a3) is preferably at least one selected from the group consisting of the structural unit represented by the formula (a3-1), the structural unit represented by the formula (a3-2), and the structural unit represented by the formula (a3-4).

[0154] Each structural unit constituting the resin (A) etc. may be used alone or in combination of two or more, and can be produced by a known polymerization method (for example, radical polymerization method) using the monomers leading to these structural units. The content ratio of each structural unit possessed by the resin (A) etc. can be adjusted by the amount of the monomers used in the polymerization. The weight average molecular weights of the resin (A) and the resin (Ap) are preferably 2,000 or more (more preferably 2,500 or more, still more preferably 3,000 or more) and 50,000 or less (more preferably 30,000 or less, still more preferably 15,000 or less), but oligomers having a weight average molecular weight of less than 2,000 may be included. In the present specification, the weight average molecular weight is a value determined under the conditions described in the examples by gel permeation chromatography. Note that the structural unit (IP) may constitute a dimer, a trimer, or a compound having a weight average molecular weight of less than 2,000.

[0155] <Acid generator> The acid generator of the present invention is an acid generator containing the salt (I) of the present invention or the structural unit (IP). The structural unit (IP) can be contained as a compound or a resin in which a plurality of them are polymerized. In the acid generator, one kind of the salt (I) may be used, or two or more kinds of the salt (I) may be used. A compound or a resin containing the structural unit (IP) may be used alone, or two or more kinds may be combined. Further, the acid generator of the present invention may contain both the salt (I) and the structural unit (IP). In addition to the salt (I) and / or the structural unit (IP), the acid generator of the present invention may contain a known compound (hereinafter sometimes referred to as "compound (B)" or "acid generator (B)") that acts as an acid generator in the resist field. The compound (B) may be used alone or in combination of two or more kinds. When the acid generator contains the salt (I) and the compound (B), the ratio of the contents of the salt (I) and the compound (B) (mass ratio, salt (I):compound (B)) is usually 1:99 to 99:1, preferably 2:98 to 98:2, more preferably 5:95 to 95:5, still more preferably 10:90 to 90:10, still more preferably 15:85 to 85:15, and particularly preferably 40:60 to 60:40. When the acid generator contains the structural unit (IP) and the compound (B), the ratio of the contents of the structural unit (IP) and the compound (B) (mass ratio, structural unit (IP): compound (B)) is usually from 1:99 to 99:1, preferably from 2:98 to 98:2, more preferably from 5:95 to 95:5, still more preferably from 10:90 to 90:10, even more preferably from 15:85 to 85:15, and particularly preferably from 40:60 to 60:40.

[0156] [Resist composition] The resist composition of the present invention contains the acid generator of the present invention. The acid generator here may be the salt (I) or may be the resin (Ap) containing the structural unit (IP). That is, the resist composition of the present invention only needs to contain an acid generator containing the structural unit (IP) of the present invention or the salt (I) of the present invention. In addition to the acid generator of the present invention, the resist composition of the present invention may contain a resin. The resin may be a resin containing the structural unit (a1) having an acid-labile group or may be a resin not containing the structural unit (a1). It is preferable that the resist composition of the present invention contains a resin containing the structural unit (a1) having an acid-labile group. That is, at least, (a) contains the salt (I) and the resin (A) containing the structural unit (a1) having an acid-labile group, or (b) contains the resin (Ap) containing the structural unit (IP) and the structural unit (a1) having an acid-labile group, or (c) preferably contains the resin (Ap) containing the structural unit (IP) and the resin (A) containing the structural unit (a1) having an acid-labile group. Among them, the resist composition of the above (b) is preferable. It may contain two or more kinds of resins (A) and / or resins (Ap). The resist composition of the present invention preferably further contains a quencher (hereinafter sometimes referred to as "quencher (C)") and / or a solvent (hereinafter sometimes referred to as "solvent (E)"). Further, the resist composition of the present invention may further contain a resin other than the above-mentioned resin (A) and the like.

[0157] [Resin other than resin (A) and the like] The resist composition of the present invention may contain a resin (Ap) and a resin other than the resin (A). Examples of the resin other than the resin (Ap) and the resin (A) include a resin (AX) having the same structural units as the resin (A) etc., except that it does not contain the structural unit (a1) in the resin (A) etc. described above, and a resin containing the structural unit (a4) and / or the structural unit (a5) (however, it does not contain the structural unit (IP) and the structural unit (a1). Hereinafter, it may be referred to as "resin (X)").

[0158] Examples of the resin (AX) include a resin containing the structural unit (a2), and a resin containing the structural unit (a2-A) is preferable. In the resin (AX), the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, and further preferably 15 mol% or more with respect to the total of all the structural units of the resin (AX). Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, and further preferably 60 mol% or less. Examples of the structural units that the resin (X) may further have include the structural unit (a2), the structural unit (a3), and structural units derived from other known monomers. Among them, the resin (X) is preferably a resin composed of only the structural unit (a4) and / or the structural unit (a5), and more preferably a resin composed of only the structural unit (a4). When the resin (X) contains the structural unit (a4), in the resin (X), the content of the structural unit (a4) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and still more preferably 45 mol% or more, based on the total of all the structural units of the resin (X). Also, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, still more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. When the resin (X) contains the structural unit (a5), the content of the structural unit (a5) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and still more preferably 45 mol% or more, based on the total of all the structural units of the resin (X). Also, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, still more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. Further, when the resin (X) contains the structural unit (a4) and the structural unit (a5), the total content of the structural unit (a4) and the structural unit (a5) is 40 mol% or more, preferably 60 mol% or more, more preferably 70 mol% or more, and still more preferably 80 mol% or more, based on the total of all the structural units of the resin (X). Furthermore, it is 100 mol% or less. Specifically, it is 40 to 100 mol%, preferably 60 to 100 mol%, more preferably 70 to 100 mol%, and still more preferably 80 to 100 mol%. Each of the structural units constituting the resin (AX) and the resin (X) may be used alone or in combination of two or more, and can be produced by a known polymerization method (for example, radical polymerization method) using the monomers that induce these structural units. The content of each structural unit of the resin (AX) and the resin (X) can be adjusted by the amount of the monomers used in the polymerization. The weight average molecular weight of the resin (AX) and the resin (X) is preferably 6,000 or more (more preferably 7,000 or more) and 80,000 or less (more preferably 60,000 or less), but oligomers having a weight average molecular weight of less than 6,000 may be included. The means for measuring the weight average molecular weight of the resin (AX) and the resin (X) is the same as in the case of the resin (A) and the like.

[0159] When the resist composition of the present invention contains the resin (X), its content is preferably 1 to 60 parts by mass, more preferably 1 to 50 parts by mass, still more preferably 1 to 40 parts by mass, even more preferably 1 to 30 parts by mass, and even more preferably 1 to 8 parts by mass with respect to 100 parts by mass in total of the resin (A) and the like.

[0160] The content rate of the resin (A) and the like in the resist composition is preferably 80% by mass or more and 99% by mass or less, and more preferably 90% by mass or more and 99% by mass or less with respect to the solid content of the resist composition. The content rate of the resin (Ap) is preferably 80% by mass or more and 99% by mass or less, and more preferably 90% by mass or more and 99% by mass or less with respect to the solid content of the resist composition. When a resin other than the resin (A) and the like is included, the total content rate of the resin (A) and the like and the resin other than the resin (A) and the like is preferably 80% by mass or more and 99% by mass or less, and more preferably 90% by mass or more and 99% by mass or less with respect to the solid content of the resist composition. The solid content of the resist composition and the content rate of the resin with respect thereto can be measured by known analysis means such as liquid chromatography or gas chromatography.

[0161] <Acid generator> The acid generator of the present invention may be any of an acid generator containing only the salt (I) and / or the structural unit (IP), and an acid generator containing the salt (I) and / or the structural unit (IP) and a known acid generator (B) that acts as an acid generator in the resist field. <Acid generator (B)> The acid generator (B) may be either a nonionic compound or an ionic compound. Examples of nonionic compounds include sulfonate esters (e.g., 2-nitrobenzyl esters, aromatic sulfonates, oxime sulfonates, N-sulfonyloxyimides, sulfonyloxy ketones, diazonaphthoquinone 4-sulfonates), sulfones (e.g., disulfones, ketosulfones, sulfonyldiazomethane), etc. Representative examples of ionic compounds include onium salts containing an onium cation (e.g., diazonium salts, phosphonium salts, sulfonium salts, iodonium salts). Examples of anions of onium salts include sulfonic acid anions, benzenesulfonyl anions, sulfonylimide anions, sulfonylmethide anions, and carboxylic acid anions, etc. Also, the acid generator (B) may be a structural unit having an acid generation function, for example, it may be a resin having the above-mentioned structural unit (a7).

[0162] As the acid generator (B), compounds that generate acid by radiation described in, for example, JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, U.S. Patent No. 3,779,778, U.S. Patent No. 3,849,137, German Patent No. 3914407, European Patent No. 126,712, etc. can be used. Also, compounds produced by known methods may be used. Also, the acid generator (B) may be an acid generator having an acid-labile group. For example, the compound or resin serving as the acid generator may contain a partial structure that becomes an acid-labile group, and the acid-labile group preferably contains the above-mentioned group (1) or group (2). When the resist composition of the present invention has a compound having an acid-labile group, a resin containing a structural unit having an acid-labile group may not be included.

[0163] A preferred form of the acid generator (B) includes a salt represented by formula (B1) (hereinafter sometimes referred to as "acid generator (B1)"). TIFF2025109689000122.tif1392[In formula (B1), L b1 represents a (nb1 + 1)-valent hydrocarbon group which may have a single bond or substituents, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. L b2 represents a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a single bond or substituents, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1 represents a methyl group which may have substituents or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. nb1 represents any integer from 1 to 6. When nb1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. Z1 + represents an organic cation.] L b1 Examples of the (nb1 + 1)-valent hydrocarbon group of b2 L include a group formed by removing nb1 hydrogen atoms from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a combination of two or more of these groups, and bonding to one or more Examples of the chain hydrocarbon group include a group formed by removing nb1 hydrogen atoms from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specific examples include methyl group, ethyl group, propyl group, iso-propyl group, n-butyl group, sec-butyl group, iso-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decanyl group, undecanyl group, dodecanyl group, tridecanyl group, tetradecanyl group, pentadecanyl group, heptadecanyl group, and the like. Examples of the alkenyl group include ethenyl group, propenyl group, isopropenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, hexenyl group, heptenyl group, octenyl group, isooctenyl group, and nonenyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 36, more preferably 1 to 20, and even more preferably 1 to 10. Examples of the alicyclic hydrocarbon group include a group formed by removing nb1 hydrogen atoms from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include cyclobutyl group, cyclopentyl group, cyclohexyl group, cyclopentyl group, cyclooctyl group, and the like. Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a cross-linked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a cross-linked structure include norbornyl group, adamantyl group, and the like. Examples of the cycloalkyl group in which two or more rings are condensed include bicyclo[4.40]decanyl group, steroid group (steroid skeleton), and the like. Examples of the ring in which two rings are spiro-bonded include a spirocyclic cycloalkyl group in which one or more cycloalkyl groups selected from the group consisting of cyclopentyl group, cyclohexyl group, norbornyl group, and adamantyl group and a cycloalkyl group having 5 to 8 carbon atoms are spiro-bonded. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group include those represented by the following formula. When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, still more preferably 3 to 18, even more preferably 3 to 12, even still more preferably 3 to 10, and even yet more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, still more preferably 6 to 18, even more preferably 6 to 12, and even still more preferably 7 to 12. Examples of the aromatic hydrocarbon group include an aryl group from which nb1 hydrogen atoms have been removed. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, a fluorene group, and the like. More specifically, aromatic hydrocarbon groups represented by the following formulas can be mentioned. TIFF2025109689000124.tif1185 The number of carbon atoms in the aromatic hydrocarbon group is preferably 4 to 24, more preferably 4 to 20, still more preferably 4 to 18, even more preferably 5 to 14, even still more preferably 5 to 10, and even yet more preferably 6 to 10. L b1 When -CH2- contained in the hydrocarbon group of L is replaced by -O-, -CO-, -S-, -SO- or -SO2-, the number of carbon atoms before replacement is defined as the number of carbon atoms of the hydrocarbon group. L b1 Examples of the group in which -CH2- contained in the chain hydrocarbon group among the hydrocarbon groups of L is replaced by -O-, -CO-, -S-, -SO- or -SO2- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, and the like. These replaced groups include those similar to the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms permits. L b1 Among the hydrocarbon groups of L, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include groups containing structures such as cyclic ethers, cyclic ketones, cyclic esters (lactones), cyclic thioethers, cyclic acetals, cyclic sulfonic acid esters (sultones), etc. As long as the upper limit of the number of carbon atoms permits, those similar to the groups exemplified in this specification may be mentioned. L b1 Among the hydrocarbon groups of L, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -CO-, -S-, -SO- or -SO2- include cyclic ethers, cyclic ketones, cyclic esters (lactones), cyclic thioethers, cyclic acetals, cyclic sultones, etc. As long as the upper limit of the number of carbon atoms permits, those similar to the groups exemplified in this specification may be mentioned. L b1 Among the hydrocarbon groups of L, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-. Examples of the group in which -CH2- is replaced by -O- or -S- include a furan ring or a thiophene ring, respectively. Specifically, aromatic hydrocarbon groups represented by the following formulas may be mentioned. TIFF2025109689000125.tif1325 Examples of the group in which -CH2- contained in a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include, as long as the upper limit of the number of carbon atoms permits, those similar to the groups exemplified in this specification. Examples of the group combining two or more of a chain hydrocarbon group, an alicyclic hydrocarbon group and an aromatic hydrocarbon group include the group combining the above chain hydrocarbon group and the above alicyclic hydrocarbon group, the group combining the above chain hydrocarbon group and the above aromatic hydrocarbon group, the group combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and the group combining the above chain hydrocarbon group, the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group. The above combined groups may be mentioned. The group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group may be a condensed ring. L b2Examples of the divalent hydrocarbon group include a group obtained by removing one hydrogen atom from a divalent chain hydrocarbon group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, and a group formed by combining two or more of these groups, and is a group that binds to Y b1 Examples of the divalent chain hydrocarbon group, divalent alicyclic hydrocarbon group, divalent aromatic hydrocarbon group, and divalent group formed by combining two or more of these groups of L L b2 are groups obtained by removing one hydrogen atom from the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and group formed by combining two or more of these groups exemplified by L b1 respectively, within the range allowed by the upper limit of the number of carbon atoms. L b1 and L b2 Examples of the substituents that the hydrocarbon group may have include a halogen atom, a cyano group, a nitro group, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. L b1 and L b2 When L b1 and L b2 are groups formed by combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group, the chain hydrocarbon group may be substantially regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. Further, when -CH2- of the chain hydrocarbon group contained in the hydrocarbon group of L b1 and L b2 is replaced by -O-, -CO-, -S-, -SO- or -SO2-, the hydrocarbon group of L Y b1 Examples of the cyclic hydrocarbon group of include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. Y b1 The alicyclic hydrocarbon group and the aromatic hydrocarbon group of are each L b1Examples thereof include the same as the alicyclic hydrocarbon group and aromatic hydrocarbon group exemplified above. When it has no substituent, it may be a monovalent alicyclic hydrocarbon group or aromatic hydrocarbon group. Y b1 Examples of the substituent that the methyl group of Y may have include a halogen atom, a cyano group, a hydroxy group, a nitro group, etc. b1 Examples of the substituent that the cyclic hydrocarbon group of Y may have include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms which may have a halogen atom, a cyano group, and a nitro group. -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-. b1 The number of carbon atoms of the hydrocarbon group that the cyclic hydrocarbon group of Y may have b1 is not included in the number of carbon atoms of the cyclic hydrocarbon group of Y. Y b1 Examples of the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of Y may have as a substituent include a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining these groups. Examples of the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and a group combining two or more of these groups include, within the range allowed by the upper limit of the number of carbon atoms, b1 the same groups as the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and a group combining two or more of these groups exemplified in L. Also, b1 Examples of the group in which -CH2- contained in the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of Y may have as a substituent is replaced by -O-, -S-, -SO-, -CO- or -SO2- include, within the range allowed by the upper limit of the number of carbon atoms, the same groups as the groups exemplified in this specification. Also, b1 The hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of Y may have as a substituent may constitute a protecting group or a leaving group (an acid-labile group or a base-labile group) generally used in the art. The anion of the salt represented by formula (B1) is preferably an anion represented by the following formula (B1-A1) (hereinafter sometimes referred to as "anion (B1-A1)") or an anion represented by formula (B1-A2) (hereinafter sometimes referred to as "anion (B1-A2)"). TIFF2025109689000126.tif31125[In formula (B1-A1), L b2 and Y b1 have the same meaning as in formula (B1). Q b1 、Q b2 、Q b3 and Q b4 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents any integer from 0 to 6. X 1 represents -O-CO-, -CO-O-, -O-CO-O- or -O-. L b3 represents a single bond or an (nb2 + 1)-valent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-. nb2 represents any integer from 1 to 3.] Q b1 、Q b2 、Q b3 and Q b4 Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. Q b1 、Q b2 、Q b3 and Q b4 Examples of the perfluoroalkyl group include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluoro sec-butyl group, a perfluoro tert-butyl group, a perfluoropentyl group, and a perfluorohexyl group. Qb1 and Q b2 is Q b1 and Q b2 It is preferable that at least one of them contains a fluorine atom or a perfluoroalkyl group, more preferably a fluorine atom or a perfluoroalkyl group, still more preferably a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms. Q b3 and Q b4 are each independently preferably a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b3 is preferably a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b4 is preferably a hydrogen atom or a fluorine atom. z1 is preferably any integer from 0 to 3, and preferably 0, 1 or 2. X 1 is preferably -O-CO- or -CO-O-.

[0164] L b3 As the hydrocarbon group in, within the range allowed by the upper limit of the number of carbon atoms, the same hydrocarbon groups as exemplified for L in formula (B1) b1 can be mentioned. In formula (B1-A1), L b3is preferably a linear hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (wherein -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-), an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent (wherein -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-), or a group formed by combining two or more of these groups, and more preferably a linear hydrocarbon group having 1 to 6 carbon atoms or a group represented by the following formula (Lb3-1). When -CH2- contained in the linear hydrocarbon group is replaced by -O- or -CO-, the number of -CH2- contained in the linear hydrocarbon group replaced by -O- or -CO- is preferably 1 to 4, and preferably one -CH2-CH2- contained in the linear hydrocarbon group is replaced by -O-CO- or -CO-O-, or -CH2-CH2-CH2- contained in the linear hydrocarbon group is replaced by -O-CO-O-. TIFF2025109689000127.tif1682[In the formula (Lb3-1), nb2 represents the same meaning as the formula (B1-A1). L b31 represents a single bond or a linear hydrocarbon group having 1 to 12 carbon atoms, wherein -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO- and may have a substituent. W b3 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and the alicyclic hydrocarbon group may have a substituent. * and ** represent bonding sites, and * represents the bonding site with X 1 and represents the bonding site with. In the formula (Lb3-1), L b31 's linear hydrocarbon group, as long as the upper limit of the number of carbon atoms permits, L b1Examples thereof include the same groups as the chain hydrocarbon groups exemplified above. In formula (Lb3-1), W b3 The alicyclic hydrocarbon group and the aromatic hydrocarbon group of may be the alicyclic hydrocarbon groups and aromatic hydrocarbon groups exemplified above as long as the upper limit of the number of carbon atoms allows. b1 Examples thereof include the alicyclic hydrocarbon groups and aromatic hydrocarbon groups exemplified above. In formula (Lb3-1), L b31 The substituents that the chain hydrocarbon group of may have and the substituents that the alicyclic hydrocarbon group and the aromatic hydrocarbon group of W b3 may have are the same groups as the substituents exemplified as the substituents that the hydrocarbon group of L b1 may have. L b31 is preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-). Among them, the alicyclic hydrocarbon group and the aromatic hydrocarbon group of W b1 are preferably the alicyclic hydrocarbon groups and aromatic hydrocarbon groups represented below. In the alicyclic hydrocarbon groups and aromatic hydrocarbon groups represented below, * and ** represent bonding sites, * represents the bonding site with X 1 or L b31 and ** represents a hydrogen atom, a substituent or the bonding site with L b2 and at least one ** represents the bonding site with L b2 In addition, in the alicyclic hydrocarbon groups represented below, the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO2-. When the -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -SO-, -CO- or -SO2-, it preferably forms an ether ring, an ester ring (lactone), a carbonate ester ring, a sulfonic acid ester ring (sultone) or an acetal ring. In formula (B1-A1), L b2is a single bond or an alkanediyl group having 1 to 12 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), preferably a single bond, -O-, -O-CO-, -CO-O-, -O-CO-O- or *-L b21 -X 2 -L b22 -**(L b21 and L b22 either represents an alkanediyl group having 1 to 6 carbon atoms, the other represents a single bond or an alkanediyl group having 1 to 6 carbon atoms, X 2 represents -O-, -CO-O-, -O-CO- or -O-CO-O-, * and ** represent bonding sites, and ** represents the bonding site with Y b1 However, the total carbon number of L b21 , X 2 and L b22 is 12 or less.) is preferred. In formula (B1-A1), L b2 is a single bond or an alkanediyl group having 1 to 12 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), preferably a single bond, -O-, -O-CO-, -CO-O-, -O-CO-O- or *-L b21 -X 2 -L b22 -**(L b21 and L b22 either represents an alkanediyl group having at least 1 to 6 carbon atoms, the other represents a single bond or an alkanediyl group having 1 to 6 carbon atoms, X 2 represents -O-, -CO-O-, -O-CO- or -O-CO-O-, * and ** represent bonding sites, and ** represents the bonding site with Y b1 However, the total carbon number of L b21 , X 2 and L b22 is 12 or less.) is preferred. In formula (B1-A1), Y b1is preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent or a phenyl group which may have a substituent, and more preferably a group represented by the following formula (Y1) to formula (Y36). In formula (Y1) to formula (Y36), R Yb represents, among the substituents that the cyclic hydrocarbon group of Y b1 may have, an alkyl group having 1 to 4 carbon atoms, and R Yc represents a hydrogen atom or a substituent that the cyclic hydrocarbon group of Y b1 may have, and * represents the bonding site with L b2 . The alicyclic hydrocarbon group and aromatic hydrocarbon group represented by the following formulae may have other substituents although not particularly illustrated in the following formulae. TIFF2025109689000129.tif84161

[0165] As the anion represented by formula (B1-A1), anions represented by formula (B1-A1-1) to formula (B1-A1-85) [hereinafter, may be referred to as "anion (B1-A1-1)" etc. according to the formula number] are preferable, and an anion represented by any one of formula (B1-A1-1) to formula (B1-A1-4), formula (B1-A1-9), formula (B1-A1-10), formula (B1-A1-24) to formula (B1-A1-33), formula (B1-A1-36) to formula (B1-A1-40), and formula (B1-A1-47) to formula (B1-A1-85) is more preferable. TIFF2025109689000130.tif216161

[0166] TIFF2025109689000131.tif249151

[0167] TIFF2025109689000132.tif254163

[0168] Here, R i2 to R i7 are each independently, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. R i8is, for example, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by combining these, more preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group. L A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 represent the same meaning as described above. Specific examples of the anion represented by the formula (B1-A1) include the anions described in JP-A-2010-204646.

[0169] Preferred anions represented by the formula (B1-A1) include the anions represented by the formulas (B1a-1) to (B1a-70), respectively. Among them, anions represented by any of the formulas (B1a-1) to (B1a-3), (B1a-7) to (B1a-19), and (B1a-22) to (B1a-70) are preferred. TIFF2025109689000133.tif186163

[0170] TIFF2025109689000134.tif252165

[0171] TIFF2025109689000135.tif69165

[0172] The anion represented by the formula (B1-A2) is represented by the following formula. TIFF2025109689000136.tif2399[In the formula (B1-A2), L b2 and Y b1 represent the same meaning as in the formula (B1). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkyl group may be replaced by -O- or -CO-. nb4 represents any integer from 1 to 5. When nb4 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. nb3 represents any integer from 0 to 4. When nb3 is 2 or more, the plurality of Rs b1 may be the same as or different from each other. However, 1 ≤ nb4 + nb3 ≤ 5 is satisfied.

[0173] In formula (B1 - A2), examples of the hydrocarbon group of L b2 and examples of the cyclic hydrocarbon group of Y b1 are, within the range permitted by the upper limit of the number of carbon atoms, the same as the examples of the hydrocarbon group of L b2 in formula (B1) and the examples of the cyclic hydrocarbon group of Y b1 . Examples of the hydrocarbon group of L b2 , the methyl group of Y b1 and the substituents that the cyclic hydrocarbon group may have are also the same as the examples of the hydrocarbon group of L b2 in formula (B1), the methyl group of Y b1 and the examples of the substituents that the cyclic hydrocarbon group may have. L b2 is preferably a chain hydrocarbon group having 1 to 12 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), more preferably *-CO - O - L b41 -(L b41 is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-. * represents the bonding site with the benzene ring to which SO3 - is bonded. L b41 is preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms.). Y b1 ​​is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and Y in formula (B1-A1) b1 or L b1 is more preferably an alicyclic hydrocarbon group or an aromatic hydrocarbon group exemplified by. Specifically, it is preferably a group represented by the above-described formulas (Y1) to (Y36), and more preferably a group represented by the above-described formulas (Y1) to (Y19).

[0174] In formula (B1-A2), nb4 is preferably any integer from 1 to 4, more preferably any integer from 1 to 3, still more preferably 1 or 2, and even more preferably 2. When nb4 is 1 or 2, the bonding position of -L b2 -Y b1 is preferably the following structure which is the m-position substitution of the benzene ring with respect to the bonding position of SO3 - . TIFF2025109689000137.tif26105[In the above formula, L b2 , Y b1 , R b1 , and nb3 represent the same meanings as in formula (B1-A2).] In formula (B1-A2), when nb4 is 2 or more, a plurality of L b2 and Y b1 are preferably the same group as each other.

[0175] Examples of the alkyl group having 1 to 6 carbon atoms for R b1 include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, and hexyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, and more preferably 1 to 3. R b1Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like. Examples of the group in which -CH2- contained in the alkyl group is replaced by -O- or -CO- include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an oxy group, a carbonyl group, and the like. These replaced groups include the same groups as those exemplified in the present specification within the range where the upper limit of the number of carbon atoms allows. R b1 is each independently preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), more preferably a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methoxy group, or a methyl group. nb3 is preferably any integer from 0 to 3, and more preferably any integer from 0 to 2. In one embodiment, nb3 is preferably 0. In another embodiment, nb3 is preferably 1 or 2. When nb3 is 1, R b1 is preferably a halogen atom, and R b1 is more preferably a fluorine atom or an iodine atom. When nb3 is 2, one of R b1 is preferably a halogen atom, and the other is preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms. One of R b1 is more preferably a fluorine atom or an iodine atom, and the other is more preferably a fluorine atom, an iodine atom, or an alkyl group having 1 to 3 carbon atoms.

[0176] Examples of the anion represented by the formula (B1-A2) include, for example, the following anions. Among them, the anions represented by the formulas (B2a-1) to (B2a-20) are preferred, and the anions represented by the formulas (B2a-1) to (B2a-11) and the formulas (B2a-16) to (B2a-20) are more preferred. The following anions have some R b1is omitted and may contain substituents not shown in the figure. TIFF2025109689000138.tif95162

[0177] In another form of the acid generator (B), an anion in which the anion represented by the formula (B1) is replaced with a sulfonimide anion, a sulfonylmethide anion or a carboxylic acid anion is also preferably used as the acid generator (B). Examples of the sulfonylimide anion and the sulfonylmethide anion include anions represented by the following formulae. TIFF2025109689000139.tif1189[In the formula (B1-A3), all the symbols have the same meanings as described above.]

[0178] In the formula (B1-A3), L b2’ and Y b1’ Examples of the hydrocarbon group, cyclic hydrocarbon group and their substituents of b2 and Y b1 are the same groups as L L b2 ’ is a single bond, *-L b23 -X 2 - or *-L b23 -X 2 -W 2 -X 3 -(L b23 represents an alkanediyl group having 1 to 6 carbon atoms which may have a fluorine atom, X 2 and X 3 each independently represent -O-, -CO-O-, -O-CO-, -O-CO-O- or -O-, W 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O- or -CO-, and * represents a bonding site with SO2.). It is preferably Y b1' is preferably a methyl group having a fluorine atom or a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), more preferably a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. Specifically, it is preferably a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent or a phenyl group which may have a substituent, and more preferably a trifluoromethyl group or a group represented by Formula (Y1) to Formula (Y36) in Formula (B1-A1). In the anion of the salt represented by Formula (B1-A3), two SO2-L b2 '-R b2 When '-R' combine together to form a ring, for example, the anion represented by Formula (B1-A3') can be mentioned. TIFF2025109689000140.tif21122 [In Formula (B1-A3'), A 1 、Y b1 、L b2 、nb5 represent the same meaning as in Formula (B1) and Formula (B1-A3). W b4 represents a disulfonylimide ring or a disulfonylmethide ring having 3 to 12 carbon atoms which may have a fluorine atom. W b4 The disulfonylimide ring or the disulfonylmethide ring of W preferably has 3 to 6 carbon atoms, and the hydrogen atom of the methylene group contained in the ring is preferably replaced by a fluorine atom.

[0179] Examples of the anion represented by Formula (B1-A3) include the following. Among them, the anions represented by Formula (B3a-1) and Formula (B3a-2) are preferred. TIFF2025109689000141.tif188163 Further, in another form of the acid generator (B), a salt in which the anion of the salt represented by the formula (B1) is replaced with a carboxylic acid anion is also preferably used as the acid generator (B). Examples of the carboxylic acid anion include the following. TIFF2025109689000142.tif41155

[0180] Z1 + Examples of the organic cation of + Z in the formula (I) include the same cations as those of the organic cation of

[0181] The acid generator (B) is a combination of the above-mentioned anion and the above-mentioned organic cation, and these can be arbitrarily combined. Preferred examples of the acid generator (B) include any anion represented by any of the formulas (B1a-1) to (B1a-3), (B1a-7) to (B1a-19), (B1a-22) to (B1a-70), (B2a-1) to (B2a-11), (B2a-16) to (B2a-20), (B3a-1) to (B3a-3) or (B3a-11) to (B3a-14), and a combination with the cation (b2-1), cation (b2-2), cation (b2-3), cation (b2-4) or cation (b2-5). Preferred examples of the acid generator (B) include those represented by the formulas (B1-1) to (B1-105), (B2-1) to (B2-20) and (B3-1) to (B3-28), respectively. Among them, those containing an arylsulfonium cation are preferred, and those represented by the formulas (B1-1) to (B1-3), (B1-5) to (B1-7), (B1-11) to (B1-14), (B1-20) to (B1-26), (B1-29), (B1-31) to (B1-105) and (B2-1) to (B2-20), (B3-1) to (B3-28) are particularly preferred. TIFF2025109689000143.tif173168

[0182] TIFF2025109689000144.tif254163

[0183] TIFF2025109689000145.tif254165

[0184] TIFF2025109689000146.tif252160

[0185] TIFF2025109689000147.tif249163

[0186] TIFF2025109689000148.tif249150

[0187] TIFF2025109689000149.tif186160

[0188] In the resist composition of the present invention, the content of the acid generator (B1) is preferably 30% by mass or more and 100% by mass or less, more preferably 50% by mass or more and 100% by mass or less, based on the total amount of the acid generator. In the resist composition of the present invention, the total content of the acid generator is preferably 1% by mass or more, more preferably 3% by mass or more, and preferably 45% by mass or less, more preferably 40% by mass or less, still more preferably 35% by mass or less, based on the solid content of the resist composition. When the resist composition of the present invention contains a resin (A) or the like, the total content of the acid generator is preferably 1 part by mass or more and 45 parts by mass or less, more preferably 1 part by mass or more and 40 parts by mass or less, still more preferably 3 parts by mass or more and 35 parts by mass or less, per 100 parts by mass of the resin (A) or the like.

[0189] The content of the solvent (E) in the resist composition is usually 90% by mass or more and 99.9% by mass or less, preferably 92% by mass or more and 99% by mass or less, more preferably 94% by mass or more and 99% by mass or less. The content of the solvent (E) can be measured by known analytical means such as liquid chromatography or gas chromatography.

[0190] Examples of the solvent (E) include glycol ether esters such as ethyl cellosolve acetate, methyl cellosolve acetate, and propylene glycol monomethyl ether acetate; glycol ethers such as propylene glycol monomethyl ether; esters such as ethyl lactate, butyl acetate, amyl acetate, and ethyl pyruvate; ketones such as acetone, methyl isobutyl ketone, 2-heptanone, and cyclohexanone; cyclic esters such as γ-butyrolactone; and the like. One kind of the solvent (E) may be used alone, or two or more kinds may be used.

[0191] <Quencher (C)> Examples of the quencher (C) include basic nitrogen-containing organic compounds and salts that generate an acid having a lower acidity than the acid generated from the acid generator (salt (I), structural unit (IP), or acid generator (B)). When the resist composition contains the quencher (C), the content of the quencher (C) is preferably about 0.01 to 15% by mass, more preferably about 0.01 to 10% by mass, still more preferably about 0.1 to 8% by mass, and even more preferably about 0.1 to 7% by mass based on the solid content of the resist composition. Examples of the basic nitrogen-containing organic compounds include amines and ammonium salts. Examples of the amines include aliphatic amines and aromatic amines. Examples of the aliphatic amines include primary amines, secondary amines, and tertiary amines.

[0192] Examples of the amine include 1-naphthylamine, 2-naphthylamine, aniline, diisopropylaniline, 2-, 3- or 4-methylaniline, 4-nitroaniline, N-methylaniline, N,N-dimethylaniline, diphenylamine, hexylamine, heptylamine, octylamine, nonylamine, decylamine, dibutylamine, dipentylamine, dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, triethylamine, trimethylamine, tripropylamine, tributylamine, tripentylamine, trihexylamine, triheptylamine, trioctylamine, trinonylamine, tridecylamine, methyldibutylamine, methyldipentylamine, methyldihexylamine, methyldicyclohexylamine, methyldiheptylamine, methyldioctylamine, methyldinonylamine, methyldidecylamine, ethyldibutylamine, ethyldipentylamine, ethyldihexylamine, ethyldiheptylamine, ethyldioctylamine, ethyldinonylamine, ethyldidecylamine, dicyclohexylmethylamine, tris[2-(2-methoxyethoxy)ethyl]amine, triisopropanolamine, ethylenediamine, tetramethylenediamine, hexamethylenediamine, 4,4'-diamino-1,2-diphenylethane, 4,4'-diamino-3,3'-dimethyldiphenylmethane, 4,4'-diamino-3,3'-diethyldiphenylmethane, 2,2'-methylenebisaniline, imidazole, 4-methylimidazole, pyridine, 4-methylpyridine, 1,2-di(2-pyridyl)ethane, 1,2-di(4-pyridyl)ethane, 1,2-di(2-pyridyl)ethene, 1,2-di(4-pyridyl)ethene, 1,3-di(4-pyridyl)propane, 1,2-di(4-pyridyloxy)ethane, di(2-pyridyl)ketone, 4,4'-dipyridylsulfide, 4,4'-dipyridyldisulfide, 2,2'-dipyridylamine, 2,2'-dipicolylamine, bipyridine and the like. Preferably, diisopropylaniline is mentioned, and more preferably 2,6-diisopropylaniline is mentioned.

[0193] Examples of the ammonium salt include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethylammonium hydroxide, tetra-n-butylammonium salicylate, choline, and the like.

[0194] The acidity of a salt that generates an acid with a lower acidity than the acid generated from the acid generator is indicated by the acid dissociation constant (pKa). A salt that generates an acid with a lower acidity than the acid generated from the acid generator is a salt having an acid dissociation constant of the acid generated from the salt usually of -3 < pKa, preferably -1 < pKa < 7, and more preferably 0 < pKa < 5. Examples of the salt that generates an acid with a lower acidity than the acid generated from the acid generator include salts represented by the following formula, salts represented by formula (D) described in JP-A-2015-147926 (hereinafter sometimes referred to as "weak acid inner salt (D)"), and salts described in JP-A-2012-229206, JP-A-2012-6908, JP-A-2012-72109, JP-A-2011-39502, and JP-A-2011-191745. The salt that generates an acid with a lower acidity than the acid generated from the acid generator is preferably a salt that generates a carboxylic acid with a lower acidity than the acid generated from the acid generator (a salt having a carboxylic acid anion), more preferably a weak acid inner salt (D), and still more preferably a diphenyliodonium salt containing a phenyl group substituted with a carboxylic acid anion among the weak acid inner salts (D). TIFF2025109689000150.tif95157

[0195] As the weak acid inner salt (D), a diphenyliodonium salt having an iodonium cation to which two phenyl groups are bonded and a carboxylate anion substituted for at least one of the two phenyl groups bonded to the iodonium cation is preferable. Specifically, salts represented by the following formulae can be mentioned. TIFF2025109689000151.tif1697[In formula (D), R D1 and R D2 each independently represent a hydrocarbon group having 1 to 12 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 7 carbon atoms, an acyloxy group having 2 to 7 carbon atoms, an alkoxycarbonyl group having 2 to 7 carbon atoms, a nitro group or a halogen atom. m' and n' each independently represent any integer from 0 to 4. When m' is 2 or more, the plurality of R D1 may be the same or different, and when n' is 2 or more, the plurality of R D2 may be the same or different.] R D1 and R D2 Examples of the hydrocarbon group include a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. Examples of the chain hydrocarbon group include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, hexyl group, nonyl group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and may be either saturated or unsaturated. Examples include cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cyclononyl group, cyclododecyl group, norbornyl group, adamantyl group. Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, 1-naphthyl group, 2-naphthyl group, 2-methylphenyl group, 3-methylphenyl group, 4-methylphenyl group, 4-ethylphenyl group, 4-propylphenyl group, 4-isopropylphenyl group, 4-butylphenyl group, 4-t-butylphenyl group, 4-hexylphenyl group, 4-cyclohexylphenyl group, anthryl group, p-adamantylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, biphenyl group, phenanthryl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc. Examples of the group formed by combining these include alkyl-cycloalkyl group, cycloalkyl-alkyl group, aralkyl group (for example, phenylmethyl group, 1-phenylethyl group, 2-phenylethyl group, 1-phenyl-1-propyl group, 1-phenyl-2-propyl group, 2-phenyl-2-propyl group, 3-phenyl-1-propyl group, 4-phenyl-1-butyl group, 5-phenyl-1-pentyl group, 6-phenyl-1-hexyl group, etc.). Examples of the alkoxy group include methoxy group, ethoxy group, etc. Examples of the acyl group include acetyl group, propanoyl group, benzoyl group, cyclohexanecarbonyl group, etc. Examples of the acyloxy group include the group in which an oxy group (-O-) is bonded to the above acyl group, etc. Examples of the alkoxycarbonyl group include the group in which a carbonyl group (-CO-) is bonded to the above alkoxy group, etc. Examples of the halogen atom include fluorine atom, chlorine atom, bromine atom, etc. R D1 and R D2 are each independently preferably an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 4 carbon atoms, an acyloxy group having 2 to 4 carbon atoms, an alkoxycarbonyl group having 2 to 4 carbon atoms, a nitro group or a halogen atom. m' and n' are each independently preferably any integer from 0 to 2, and more preferably 0. When m' is 2 or more, a plurality of RD1 may be the same or different, and when n’ is 2 or more, a plurality of R D2 may be the same or different.

[0196] More specifically, the following salts can be mentioned. TIFF2025109689000152.tif71165

[0197] <Other components> The resist composition of the present invention may contain, if necessary, components other than the above-mentioned components (hereinafter sometimes referred to as "other components (F)"). There are no particular limitations on the other components (F), and additives known in the resist field, such as sensitizers, dissolution inhibitors, surfactants, stabilizers, dyes, etc. can be used.

[0198] <Preparation of resist composition> The resist composition of the present invention can be prepared by mixing a salt represented by formula (I) or a compound or resin containing a structural unit represented by formula (IP), and, if necessary, resin (A), acid generator (B), resins other than resin (A), etc., solvent (E), quencher (C) and other components (F). The mixing order is arbitrary and not particularly limited. The temperature during mixing can be appropriately selected from 10 to 40°C according to the type of resin, etc. and the solubility of the resin, etc. in the solvent (E). The mixing time can be appropriately selected from 0.5 to 24 hours according to the mixing temperature. Note that the mixing means is also not particularly limited, and stirring and mixing, etc. can be used. After mixing the respective components, it is preferable to filter using a filter having a pore size of about 0.003 to 0.2 μm.

[0199] <Method for producing resist pattern> The method for producing a resist pattern of the present invention is (1) A step of applying the resist composition of the present invention onto a substrate, (2) A step of drying the applied composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the composition layer after exposure, and (5) A step of developing the composition layer after heating. To apply the resist composition onto a substrate, it can be usually performed by an apparatus such as a spin coater. Examples of the substrate include inorganic substrates such as silicon wafers, and organic substrates having a resist film or the like formed on the surface. Before applying the resist composition, the substrate may be cleaned, or an antireflection film or the like may be formed on the substrate. By drying the applied composition, the solvent is removed to form a composition layer. Drying is performed, for example, by evaporating the solvent using a heating device such as a hot plate (so-called pre-bake), or by using a decompression device. The heating temperature is preferably 50 to 200 °C, and the heating time is preferably 10 to 180 seconds. Also, the pressure during decompression drying is preferably about 1 to 1.0×10 5 Pa. The obtained composition layer is usually exposed using an exposure machine. The exposure machine may be an immersion exposure machine. As the exposure light source, those that emit laser light in the ultraviolet region such as KrF excimer laser (wavelength 248 nm), ArF excimer laser (wavelength 193 nm), F2 excimer laser (wavelength 157 nm), those that convert laser light from a solid laser light source (YAG or semiconductor laser, etc.) to emit harmonic laser light in the far ultraviolet region or vacuum ultraviolet region, those that irradiate electron beams, extreme ultraviolet light (EUV), etc., various ones can be used. In this specification, irradiating these radiations may be collectively referred to as "exposure". During exposure, usually, exposure is performed through a mask corresponding to the required pattern. When the exposure light source is an electron beam, exposure may be performed by direct drawing without using a mask. The composition layer after exposure is heat-treated (so-called post-exposure bake) to promote the deprotection reaction at the acid-labile groups. The heating temperature is usually about 50 to 200 °C, preferably about 70 to 150 °C. Chemical treatment (silylation) may be performed to adjust the hydrophilicity or hydrophobicity of the resin on the surface side of the composition after heating. Also, before development, the steps of coating, drying, exposing, and heating the resist composition may be repeatedly performed on the composition layer after exposure. The composition layer after heating is usually developed using a developing solution with a developing apparatus. Examples of the developing method include dip method, paddle method, spray method, dynamic dispense method, etc. The developing temperature is preferably, for example, 5 to 60 °C, and the developing time is preferably, for example, 5 to 300 seconds. By selecting the type of developing solution as follows, a positive resist pattern or a negative resist pattern can be manufactured. When manufacturing a positive resist pattern from the resist composition of the present invention, an alkaline developing solution is used as the developing solution. The alkaline developing solution may be various alkaline aqueous solutions used in this field. For example, aqueous solutions of tetramethylammonium hydroxide and (2-hydroxyethyl)trimethylammonium hydroxide (commonly known as choline) etc. may be mentioned. The alkaline developing solution may contain a surfactant. It is preferable to wash the resist pattern with ultrapure water after development, and then remove the water remaining on the substrate and the pattern. When manufacturing a negative resist pattern from the resist composition of the present invention, a developing solution containing an organic solvent (hereinafter sometimes referred to as an "organic-based developing solution") is used as the developing solution. Examples of the organic solvent contained in the organic-based developing solution include ketone solvents such as 2-hexanone and 2-heptanone; glycol ether ester solvents such as propylene glycol monomethyl ether acetate; ester solvents such as butyl acetate; glycol ether solvents such as propylene glycol monomethyl ether; amide solvents such as N,N-dimethylacetamide; aromatic hydrocarbon solvents such as anisole, etc. In the organic developing solution, the content of the organic solvent is preferably 90% by mass or more and 100% by mass or less, more preferably 95% by mass or more and 100% by mass or less, and still more preferably substantially only the organic solvent. Among them, as the organic developing solution, a developing solution containing butyl acetate and / or 2-heptanone is preferable. In the organic developing solution, the total content of butyl acetate and 2-heptanone is preferably 50% by mass or more and 100% by mass or less, more preferably 90% by mass or more and 100% by mass or less, and still more preferably substantially only butyl acetate and / or 2-heptanone. The organic developing solution may contain a surfactant. Further, the organic developing solution may contain a trace amount of water. During development, development may be stopped by replacing with a solvent of a type different from the organic developing solution. It is preferable to wash the resist pattern after development with a rinse solution. The rinse solution is not particularly limited as long as it does not dissolve the resist pattern, and a solution containing a general organic solvent can be used, preferably an alcohol solvent or an ester solvent. After washing, it is preferable to remove the rinse solution remaining on the substrate and the pattern.

[0200] <Usage> The resist composition of the present invention is suitable as a resist composition for KrF excimer laser exposure, a resist composition for ArF excimer laser exposure, a resist composition for electron beam (EB) exposure, or a resist composition for EUV exposure, particularly as a resist composition for electron beam (EB) exposure or a resist composition for EUV exposure, and is useful for fine processing of semiconductors.

Examples

[0201] The present invention will be described more specifically with reference to examples. In the examples, “%” and “parts” representing the content or the amount used are based on mass unless otherwise specified. The weight average molecular weight is a value determined by gel permeation chromatography. The analysis conditions for gel permeation chromatography are as follows. Column: TSKgel Multipore HXL-M x 3 + guard column (manufactured by Tosoh Corporation) Eluent: Tetrahydrofuran Flow rate: 1.0 mL / min Detector: RI detector Column temperature: 40 °C Injection volume: 100 μL Molecular weight standard: Standard polystyrene (manufactured by Tosoh Corporation) The structure of the compound was confirmed by measuring the molecular ion peak using mass spectrometry (LC is Agilent 1100 type, MASS is Agilent LC / MSD type). In the following examples, the value of this molecular ion peak is indicated by "MASS".

[0202] Example 1: Synthesis of the salt represented by formula (I-1) 4.38 parts of the salt represented by formula (I-1-a) and 30 parts of chloroform were mixed and stirred at 23 °C for 30 minutes. Then, 1.62 parts of the compound represented by formula (I-1-b) were added. After heating to 50 °C, the mixture was stirred at 50 °C for 2 hours. To the obtained mixture, 2.70 parts of the compound represented by formula (I-1-c) were added and stirred at 50 °C for 2 hours. After cooling the obtained mixture to 23 °C, 50 parts of chloroform and 20 parts of ion-exchanged water were added and stirred at 23 °C for 30 minutes. Then, the layers were separated and the organic layer was taken out. To the obtained organic layer, 20 parts of ion-exchanged water were added and stirred at 23 °C for 30 minutes. Then, the layers were separated and the organic layer was taken out. This washing operation was performed 5 times. The obtained organic layer was concentrated. To the concentrated residue, 30 parts of tert-butyl methyl ether were added and stirred at 23 °C for 30 minutes. Then, the supernatant was removed and concentrated to obtain 5.13 parts of the salt represented by formula (I-1). MASS (ESI(+) Spectrum): M + 263.1 MASS (ESI(-) Spectrum): M - 427.0

[0203] Example 2: Synthesis of the salt represented by formula (I-5) 4.38 parts of the salt represented by formula (I-1-a) and 30 parts of chloroform were mixed and stirred at 23°C for 30 minutes. Then, 1.62 parts of the compound represented by formula (I-1-b) were added. After heating to 50°C, the mixture was stirred at 50°C for 2 hours. To the resulting mixture, 2.18 parts of the compound represented by formula (I-5-c) were added and the mixture was stirred at 50°C for 2 hours. After cooling the resulting mixture to 23°C, 50 parts of chloroform and 20 parts of ion-exchanged water were added and the mixture was stirred at 23°C for 30 minutes. Then, the layers were separated and the organic layer was taken out. To the obtained organic layer, 20 parts of ion-exchanged water were added and the mixture was stirred at 23°C for 30 minutes. Then, the layers were separated and the organic layer was taken out. This washing operation with water was carried out 5 times. The obtained organic layer was concentrated. To the concentrated residue, 30 parts of tert-butyl methyl ether were added and the mixture was stirred at 23°C for 30 minutes. Then, the supernatant was removed and the residue was concentrated to obtain 4.03 parts of the salt represented by formula (I-5). MASS(ESI(+)Spectrum):M + 263.1 MASS(ESI(-)Spectrum):[M 2- +H] - 750.9

[0204] Example 3: Synthesis of the salt represented by formula (I-7) 1.48 parts of the compound represented by formula (I-7-c) and 30 parts of chloroform were mixed and stirred at 23°C for 30 minutes. Then, 1.62 parts of the compound represented by formula (I-1-b) were added. After heating to 50°C, the mixture was stirred at 50°C for 2 hours. To the resulting mixture, 6.33 parts of the salt represented by formula (I-7-a) were added and the mixture was stirred at 50°C for 2 hours. After cooling the resulting mixture to 23°C, 50 parts of chloroform and 20 parts of ion-exchanged water were added and the mixture was stirred at 23°C for 30 minutes. Then, the layers were separated and the organic layer was taken out. To the obtained organic layer, 20 parts of ion-exchanged water were added and the mixture was stirred at 23°C for 30 minutes. Then, the layers were separated and the organic layer was taken out. This washing operation with water was carried out 5 times. The obtained organic layer was concentrated. To the concentrated residue, 30 parts of tert-butyl methyl ether were added and the mixture was stirred at 23°C fo...

Claims

1. An acid generator containing a salt represented by formula (I) or a structural unit represented by formula (IP). [In formula (I) and formula (IP), Q １ , Q ２ , R １ and R ２ each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z represents any integer from 0 to 6, and when z is 2 or more, a plurality of Rs １ and Rs ２ may be the same as or different from each other. X １ represents a bonding site with *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * is C(R 1 )(R 2 ), or C(Q 1 )(Q 2 ).). mm1 represents 0 or 1. L １ represents a hydrocarbon group having 1 to 20 carbon atoms which may have a single bond or a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO-, -NR ７ - or -SO ２ - instead. R ７ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ３ represents an alkyl fluoride group having 1 to 6 carbon atoms. R ４ represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or a fluoroalkyl group having 1 to 6 carbon atoms. X １１ represents a single bond, *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * represents the bonding site with Ar). m3 represents any integer from 1 to 3. When m3 is 2 or more, the symbols in parentheses may be the same or different. Ar represents an optionally substituted aromatic hydrocarbon group having 6 to 18 carbon atoms. X １０ represents a single bond or *-CO-O- (where * represents the bonding site with the carbon atom to which R ５ is attached.). R ５ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. ZI ＋ represents an organic cation.

2. L １ is a single bond, An alkanediyl group having 1 to 8 carbon atoms (in the alkanediyl group, -CH 2 - may be replaced by -O- or -CO-, and the alkanediyl group may have a substituent.). * - L １１ - W １ - L １２ - or * - L １１ - W １ - L １２ - W ２ - L １３ - (L １１ 、L １２ and L １３ each independently represents a C1-C8 alkanediyl group which may have a single bond or a substituent, and W １ and W ２ each independently represents a C3-C12 cyclic hydrocarbon group which may have a substituent, and the -CH 2 - in the alkanediyl group may be replaced by -O- or -CO-, and the -CH ２ - in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO ２ -; the total number of carbon atoms of L １１ 、L １２ 、L １３ 、W １ and W ２ is 20 or less. * represents the bonding site with X １ .) or An acid generator according to claim 1, which is an alkanediyl group having 1 to 8 carbon atoms and having a cyclic hydrocarbon group having 3 to 12 carbon atoms in the side chain (the cyclic hydrocarbon group and the alkanediyl group may have substituents, and the total number of carbon atoms of the cyclic hydrocarbon group and the alkanediyl group is 20 or less).

3. X １ is *-CO-O- or *-O-CO-O- (wherein * represents a bonding site with C(R 1 )(R 2 ), or C(Q 1 )(Q 2 ).). The acid generator according to claim 1

4. R ３ and R ４ The acid generator according to claim 1, wherein each of them is independently a perfluoroalkyl group having 1 to 3 carbon atoms.

5. A resist composition containing the acid generator according to any one of claims 1 to 4.

6. The acid generator is a salt represented by formula (I), The resist composition according to claim 5, further containing a resin containing a structural unit (a1) having an acid-labile group.

7. The acid generator is a resin containing a structural unit represented by formula (IP), The resist composition according to claim 5, wherein the resin further contains a structural unit (a1) having an acid-labile group.

8. The resist composition according to claim 7, further containing a salt represented by formula (I).

9. The resist composition according to claim 6, wherein the structural unit (a1) having an acid-labile group contains at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), and a structural unit represented by formula (a1-5). [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L ａ１ and L ａ２ each independently represents -O- or *-O-(CH ２ ), ｋ１ -CO-O-, k1 represents an integer from 1 to 7, and * represents the bonding site with -CO-. R a01 , R ａ４ and R ａ５ each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, and the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. R ａ６ and R ａ７ each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. m1' represents any integer from 0 to 14. n1 represents any integer from 0 to 10. n1' represents any integer from 0 to 3. ] [In formula (a1-4), R ａ１ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ１７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A ａ１１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH ２ - in the alkanediyl group may be replaced by -O-, -CO- or -NR ａ１８ -. R ａ１８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ１ represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -C-O- to which they are bonded, and the -CH 2 - contained in the hydrocarbon group and the divalent hydrocarbon group may be replaced by -O- or -S-. na1 represents any integer from 1 to 5. When na1 is 2 or more, the groups in multiple parentheses may be the same or different from each other. na11 represents any integer from 0 to 4, and when na11 is 2 or more, a plurality of Rs ａ１７ may be the same as or different from each other. mc represents any integer from 0 to 2. ] [In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. Z a1 represents a single bond or *-(CH 2 ) h3 -CO-L 54 -, h3 represents an integer of any one of 1 to 4, and * represents the bonding site with L 51 . L 51 、 L 52 、 L 53 and L 54 each independently represents -O- or -S-. s1 represents any integer from 1 to 3. s1' represents any integer from 0 to 3. ]

10. The resist composition according to claim 6, wherein the structural unit (a1) having an acid-labile group contains a structural unit represented by formula (a1-6). [In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a6２ 、R a63 and R a6４ each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a6２ and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atoms to which they are bonded. X a61 represents a single bond, -CO-O-*, or -CO-NR a65 -*, where * represents a bond to Ar, and R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 represents a single bond, *-O-L a61 - or *-CO-O-L a62 -, where * represents a bond to Ar, and L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.

11. The resist composition according to claim 6, wherein the resin containing a structural unit (a1) having an acid-labile group further contains a structural unit represented by formula (a2-A). [In formula (a2-A), R ａ２ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH ２ - in the alkanediyl group may be replaced by -O-, -CO- or -NR ａ２８ -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ represents a single bond or a carbonyl group. nA2 represents any integer from 1 to 5, and when nA2 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other. na21 represents any integer from 0 to 4, and when na21 is 2 or more, a plurality of Rs ａ２７ may be the same as or different from each other. mc represents any integer from 0 to 2. ]

12. The resist composition according to claim 5, further containing a salt that generates an acid having a lower acidity than the acid generated from the salt represented by formula (I) or the structural unit represented by formula (IP).

13. (1) A step of applying the resist composition according to claim 5 onto a substrate, (2) A step of drying the applied resist composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the exposed composition layer, and (5) A step of developing the heated composition layer, A method for manufacturing a resist pattern including these steps.

14. A salt represented by formula (I). [In formula (I), Q １ , Q ２ , R １ and R ２ each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z represents an integer of any one of 0 to 6, and when z is 2 or more, a plurality of R １ and R ２ may be the same as or different from each other. X １ represents a bonding site with *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * is C(R 1 )(R 2 ), or C(Q 1 )(Q 2 ).) mm1 represents 0 or 1. L １ represents a hydrocarbon group having 1 to 20 carbon atoms which may have a single bond or a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO-, -NR ７ - or -SO ２ - may be replaced. R ７ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ３ represents an alkyl fluoride group having 1 to 6 carbon atoms. R ４ represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or a fluoroalkyl group having 1 to 6 carbon atoms. X １１ represents a single bond, *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * represents the bonding site with Ar). m3 represents any integer from 1 to 3, and when m3 is 2 or more, the symbols within the parentheses may be the same as or different from each other. Ar represents an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. X １０ represents a single bond or *-CO-O- (where * represents the bonding site with the carbon atom to which R ５ is attached.). R ５ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. ZI ＋ represents an organic cation.

15. L １ is a single bond, An alkanediyl group having 1 to 8 carbon atoms (in the alkanediyl group, -CH 2 - may be replaced by -O- or -CO-, and the alkanediyl group may have a substituent.). * - L １１ - W １ - L １２ - or * - L １１ - W １ - L １２ - W ２ - L １３ - (L １１ , L １２ and L １３ each independently represents an alkanediyl group having 1 to 8 carbon atoms which may have a single bond or a substituent, and W １ and W ２ each independently represents a cyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent, and -CH 2 - contained in the alkanediyl group may be replaced by -O- or -CO-, and -CH ２ - contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO- or -SO ２ -; the total number of carbon atoms of L １１ , L １２ , L １３ , W １ and W ２ is 20 or less. * represents the bonding site with X １ .) or The salt according to claim 14, which is an alkanediyl group having 1 to 8 carbon atoms and having a cyclic hydrocarbon group having 3 to 12 carbon atoms in the side chain (the cyclic hydrocarbon group and the alkanediyl group may have a substituent, and the total number of carbon atoms of the cyclic hydrocarbon group and the alkanediyl group is 20 or less).

16. X １ is a binding site with *-CO-O- or *-O-CO-O- (where * represents C(R 1 )(R 2 )(R) or C(Q 1 )(Q 2 )(Q)). The salt according to claim 14 or 15

17. R ３ and R ４ The salt according to claim 14 or 15, wherein each of them is independently a perfluoroalkyl group having 1 to 3 carbon atoms.

18. A resin containing a structural unit represented by formula (IP). [In formula (IP), Q １ , Q ２ , R １ and R ２ each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z represents an integer of any one of 0 to 6, and when z is 2 or more, a plurality of R １ and R ２ may be the same as or different from each other. X １ represents a bonding site with *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * is C(R 1 )(R 2 ), or C(Q 1 )(Q 2 ).) mm1 represents 0 or 1. L １ represents a hydrocarbon group having 1 to 20 carbon atoms which may have a single bond or a substituent, and the -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO-, -CO-, -NR ７ -, or -SO ２ - R ７ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. R ３ represents an alkyl fluoride group having 1 to 6 carbon atoms. R ４ represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or a fluoroalkyl group having 1 to 6 carbon atoms. X １１ represents a single bond, *-CO-O-, *-O-CO-, *-O-CO-O- or *-O- (where * represents the bonding site with Ar). m3 represents any integer from 1 to 3, and when m3 is 2 or more, the symbols within the parentheses may be the same as or different from each other. Ar represents an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. X １０ represents a single bond or *-CO-O- (where * represents the bonding site with the carbon atom to which R ５ is attached.). R ５ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. ZI ＋ represents an organic cation.

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