Bracket, bracket assembly, machine arrangement body, and semiconductor processing system including bracket and bracket assembly, and manufacturing method of bracket assembly

Abstract

To provide a bracket.SOLUTION: A bracket includes a sheet part, first and second parts with a slot, and a bracket body having a flange part. The sheet part defines a bracket shaft. The first part with the slot and the second part with the slot are offset in a lateral direction from the sheet part of the bracket body. The second part with the slot is further separated in an axial direction from the first part with the slot by the sheet part of the bracket body. The flange part of the bracket body extends to the side of the sheet part of the bracket body, in a direction opposite to the first part with the slot and the second part with the slot of the bracket body. The flange part of the bracket body further extends in parallel with the bracket shaft, and restricts a yaw angle of an interlock switch sitting on the bracket body to the bracket shaft. There are provided a bracket assembly, a machine arrangement body, a semiconductor processing system, and a manufacturing method of the bracket assembly.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present disclosure generally relates to fixing components within an assembly, and more particularly to brackets used for fixing components within an assembly.

Background Art

[0002] Brackets are generally used to fix components within a larger assembly, such as to support an interlock switch for protecting personnel in the vicinity of potentially dangerous machinery. Brackets generally support an interlock switch against an access panel or door, such that when the access panel is removed or the door is opened, the machinery behind the access panel or door becomes inoperable. This generally limits the risk to personnel who may potentially be in the vicinity of dangerous machinery during operation of the machinery.

[0003] In some installations, the interlock switch may be displaced, which may limit (or prevent) the interlock switch from recognizing the position of the access panel or door. For example, if the interlock switch becomes loose due to vibrations in the installation environment and / or if a minor impact is applied, the interlock may prevent operation of the machinery even though the access panel is properly positioned or the door is closed. Such troublesome operation may unnecessarily impede operation of the machinery and / or desensitize personnel to operating events.

[0004] Such systems and methods have generally been considered suitable for their intended purposes. However, there remains a need in the art for improved brackets, bracket assemblies, machine arrangements including brackets and bracket assemblies, and methods of fabricating bracket assemblies. The present disclosure provides a solution to this need.

Summary of the Invention

[0005] A bracket is provided. The bracket includes a bracket body having a sheet portion, a first slotted portion, a second slotted portion, and a flange portion. The sheet portion defines a bracket axis. The first slotted portion is laterally offset from the sheet portion of the bracket body. The second slotted portion is also laterally offset from the sheet portion and is axially separated from the first slotted portion by the sheet portion of the bracket body. The flange portion of the bracket body extends laterally of the sheet portion of the bracket body in a direction opposite to the first slotted portion and the second slotted portion of the bracket body. The flange portion of the bracket body further extends parallel to the bracket axis to limit the yaw angle of an interlock switch seated on the bracket body with respect to the bracket axis.

[0006] In addition to, or alternatively to, one or more of the above features, a further example of the bracket may include that the flange portion is a first flange portion and the bracket body has a second flange portion. The second flange portion may be separated from the first flange portion by the bracket axis. The second flange portion may be substantially parallel to the first flange portion.

[0007] In addition to, or alternatively to, one or more of the above features, a further example of the bracket may include that the sheet portion defines a sheet fixing opening. The sheet fixing opening may be axially offset from the first flange portion and the second flange portion along the bracket axis.

[0008] In addition to one or more of the above features, or alternatively, a further example of the bracket may include the first slotted portion defining a slot pair therethrough. The slots of the slot pair may be axially offset from the first flange portion and the second flange portion of the bracket body along the bracket axis. The slots of the first slot pair may be substantially orthogonal to the bracket axis defined by the sheet portion of the bracket body.

[0009] In addition to one or more of the above features, or alternatively, a further example of the bracket may include a pin member fixed to the sheet portion of the bracket body. The pin member may extend from the sheet portion of the bracket body in opposite directions from both the first slotted portion and the second slotted portion of the bracket body.

[0010] In addition to one or more of the above features, or alternatively, a further example of the bracket may include the pin member separating the flange portion from the bracket axis. The pin member may separate the second flange portion from the first flange portion.

[0011] In addition to one or more of the above features, or alternatively, a further example of the bracket may include the pin member being a first pin member and the bracket including a second pin member. The second pin member may be fixed to the sheet portion. The second pin member may extend from the sheet portion in a direction opposite to the first slotted portion and the second slotted portion of the bracket body. The second pin member may be separated from the first pin member by the bracket axis.

[0012] In addition to one or more of the above features, or alternatively, a further example of the bracket may include the second slotted portion of the bracket body defining a single slot. The single slot may be substantially orthogonal to the bracket axis. The first slotted portion may define a pair of slots therethrough, and the slots of the pair of slots may be substantially orthogonal to the bracket axis.

[0013] In addition to one or more of the above features, or alternatively, a further example may include the bracket body being made of a metal sheet material.

[0014] A bracket assembly is provided. The bracket assembly includes the described bracket, and the bracket body is made of a metal sheet material. The interlock switch extends parallel to the flange portion of the bracket body, the bayonet fastener seats within the sheet portion of the bracket body and secures the interlock switch to the sheet portion of the bracket body, and the first pin member and the second pin member seat within the sheet portion of the bracket body and secure the interlock switch at a yaw angle relative to the bracket axis.

[0015] In addition to one or more of the above features, or alternatively, a further example of the bracket assembly may include an interlock circuit lead having a bayonet connector secured to the interlock switch. The bayonet connector may extend along the bracket axis and axially beyond the first slotted portion of the bracket body.

[0016] In addition to one or more of the above features, or alternatively, a further example of the bracket assembly may include the interlock switch having an interlock member receptacle. The interlock member receptacle may overlap the sheet portion of the bracket body. The bracket assembly further includes an interlock member movably supported relative to the interlock switch and received within the interlock member receptacle.

[0017] In addition to, or as an alternative to, one or more of the above features, a further example of a bracket assembly may include an interlock circuit electrically connected to an interlock switch. The interlock switch may be configured to be electrically opened when an interlock member is displaced from an interlock member receptacle defined within the housing of the interlock switch.

[0018] In addition to, or as an alternative to, one or more of the above features, a further example of a bracket assembly may include a lock nut. The lock nut may be held in a fixed position between the bayonet fastener and the seat portion of the bracket body. The bracket assembly may include an elastic member. The elastic member is made of an elastomeric material held in a fixed position between the bayonet fastener and the interlock switch.

[0019] A semiconductor processing system is provided. The semiconductor processing system includes an enclosure including a frame member and an access panel or door removably fixed to the frame member. A process module is disposed within the enclosure, and the above-described bracket is fixed to the frame member of the enclosure. An interlock switch is disposed within the enclosure and fixed to the bracket, and an interlock circuit is electrically connected to the interlock switch. The interlock switch is configured to electrically close the interlock circuit when the access panel or door is fixed to the frame member. The interlock switch is configured to electrically open the interlock circuit when the access panel or door is displaced from the frame.

[0020] A method of fabricating a bracket assembly is provided. The method includes forming a bracket including a sheet portion defining a bracket axis, a first slotted portion laterally offset from the sheet portion of the bracket body, a second slotted portion laterally offset from the sheet portion and axially separated from the first slotted portion by the sheet portion of the bracket body, and a flange portion extending from the sheet portion and parallel to the bracket axis. The interlock switch is located on the sheet portion of the bracket body and has a yaw angle with respect to the flange portion of the bracket body and the constrained bracket axis.

[0021] In addition to, or alternatively to, one or more of the above features, a further example of the method may include connecting an interlock circuit lead to the interlock switch and securing the bracket to a frame member of an enclosure that houses a machine within a machine layout. Forming the bracket may further include separating the natural frequency of the bracket assembly from an excitation frequency or range of excitation frequencies associated with the operation of a machine housed within an enclosure that includes the bracket member to which the bracket assembly is secured.

[0022] In addition to, or alternatively to, one or more of the above features, a further embodiment of the method may include securing one or more pin members to the sheet portion of the bracket body, slidably receiving the one or more pin members within the interlock switch, and further restricting the yaw angle of the interlock switch with respect to the bracket axis using the one or more pin members.

[0023] In addition to, or alternatively to, one or more of the above features, a further example of the method may include seating the interlock switch on the sheet portion of the bracket body, including securing the interlock switch to the sheet portion of the bracket body with one or more vibration isolation structures.

[0024] In addition to or as an alternative to one or more of the above features, a further example of the method may include seating an interlock switch on the sheet portion of the bracket body by (a) fixing the housing of the interlock switch to the sheet portion of the bracket body adjacent to the flange portion of the bracket body, or (b) fixing the housing of the interlock switch to the sheet portion of the bracket body such that a gap is formed between the housing and the flange portion.

[0025] This summary is provided to introduce a selected concept in a simplified form. These concepts are described in more detail in the following detailed description of examples of the present disclosure. This summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.

[0026] These and other features, aspects, and advantages of the invention disclosed herein are described below with reference to the drawings of certain embodiments, which are intended to illustrate the invention and not to limit the invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0027]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

DETAILED DESCRIPTION OF THE INVENTION

[0028] Of course, the elements in the figures are illustrated for simplicity and clarity and are not necessarily drawn to scale. For example, the relative sizes of some elements in the figures may be exaggerated compared to other elements to assist in understanding the illustrated embodiments of the present disclosure.

[0029] Reference is now made to the drawings, in which like reference numerals identify similar structural features or aspects of the present disclosure. For purposes of illustration and not limitation, a partial view of an example of a machine arrangement including a bracket assembly having brackets in accordance with the present disclosure is shown in FIG. 1, and the system is generally designated by reference numeral 100. Other examples of brackets, bracket assemblies, and machine arrangements including bracket assemblies having brackets, as well as methods related to fabricating bracket assemblies and machine arrangements, or aspects thereof, are provided in FIGS. 2-8 and are described below. The systems and methods of the present disclosure can be used to support interlock switches for access panels and / or doors within an enclosure housing a machine, such as a semiconductor processing system, that can pose a potential hazard to personnel in proximity to the semiconductor processing system during operation, but the present disclosure is not limited to support for semiconductor processing systems or general interlock switches.

[0030] Referring to FIG. 1, a machine arrangement 10 is shown. The machine arrangement 10 includes a machine 12, an enclosure 14 having an access panel or door 16, and a bracket assembly 200 including a bracket 100. The machine 12 is housed within the enclosure 14, separated from an external environment 2 outside the enclosure 14 by the enclosure 14, and is accessible from the external environment 2 by removal (or opening) of the access panel or door 16. The access panel or door 16 is removably fixed to a frame member 18 of the enclosure 14 and is configured to be removed from or displaced relative to the frame member 18 of the enclosure 14 that supports the access panel or door 16. The bracket assembly 200 includes an interlock switch 202 located on and coupled through the bracket 100 to the enclosure 14. The interlock switch 202 is intended to cooperate with an interlock circuit 20 to prevent (or stop) the operation of the machine 12 upon removal (or opening) of the access panel or door 16 from the enclosure 14. In certain embodiments, the machine arrangement 10 may include a semiconductor processing system. In such examples, the machine 12 may include one or more of a substrate handling robot and / or a process module. Examples of process modules include processes configured for material layer deposition, etching, polishing, and lithography.

[0031] Referring to FIG. 2, a bracket assembly 200 is shown. The bracket assembly 200 generally includes a bracket 100 and an interlock switch 202. The bracket 100 is configured to couple the interlock switch 202 to an enclosure 14 (shown in FIG. 1) through, for example, a frame member 18 that supports an access panel or door 16 (shown in FIG. 1). The interlock switch 202 is configured to securely interlock the access panel or door 16 when disposed relative to the frame member 18 or when in a closed position 28, and in this regard, is electrically connected to an interlock circuit 20 by an interlock circuit lead 24 (shown in FIG. 1). The electrical connection may be through a connector 210, which may be a bayonet connector and may extend axially along a bracket axis defined by a bracket body 102 of the bracket 100. The connector 210 may further cover a first slotted portion 108 of the bracket body 102.

[0032] The interlock switch 202 is contemplated to be configured to receive an interlock member 26 therein. The interlock member 26 is carried by (or fixed relative to) the access panel or door 16 and may be received within the interlock switch 202 when the access panel or door 16 is in a closed position 30 (shown in FIG. 1), and in this regard, defines an interlock member receptacle 216 configured to receive an interlock member therein when the access panel or door 16 is in the closed position 30. As will be understood by those skilled in the art in view of the present disclosure, other types of interlock switches, such as electromagnetically and / or optically coupled interlock switches, may be coupled to the enclosure 14 and remain within the scope of the present disclosure.

[0033] Referring to FIG. 3, the bracket assembly 200 is shown in an exploded view. The interlock switch 202 is configured to supply a signal indicating whether the access panel or door 16 (shown in FIG. 1) is removed or fixed relative to the frame member 18 (shown in FIG. 1). In this regard, it includes the housing 206, the switch circuit element 208 (shown in FIG. 2), and the electrical connector 210 (FIG. 2). The switch circuit element 208 is disposed within the interior 212 (shown in FIG. 2) of the housing 206 and is coupled to the electrical connector 210 by switch leads 214 (shown in FIG. 2) disposed within the interior 212 of the housing 206. The electrical connector 210 is fixed to the housing 206, projects from the axial end face of the housing 206, and is configured to electrically connect the switch leads 214 to the interlock circuit leads 24 (shown in FIG. 2) and through it to the interlock circuit 20 (shown in FIG. 1). In this regard, the electrical connector 210 may be threaded and / or may include a bayonet-type function for fixing the corresponding connector of the interlock circuit leads 24 to the interlock switch 202.

[0034] The housing 206 of the interlock switch 202 defines an interlock member receptacle 216 within the outer surface of the housing 206. The interlock member receptacle 216 is configured to receive an interlock member 26 therein. The interlock member 26 is then carried by an access panel or door 16 (shown in FIG. 1), and the access panel or door 16 is between a first position 28 (shown in FIG. 1) and a second position 30 (shown in FIG. 1) of the access panel or door and is movable relative to the frame member 18. The interlock member 26 is received within the interlock member receptacle 216 when the access panel or door 16 is in the first position 28 of the access panel or door, and the interlock member 26 is intended to mechanically engage a switch circuit element 208 (shown in FIG. 2) to electrically close the interlock circuit 20 (shown in FIG. 1). Also, the interlock member 26 is disengaged from the engagement with the switch circuit element 208 when the access panel or door 16 is displaced, for example, when the access panel or door 16 is in the second position 30 of the access panel or door. In such an example, the interlock member 26 is removed from the receptacle 216 of the interlock member, whereby the interlock circuit 20 is intended to be electrically opened. An example of a suitable interlock switch is the Cadet™ 3-pole interlock switch available from Rockwell Automation, Inc., Milwaukee, Wisconsin.

[0035] As will be understood by those skilled in the art in view of the present disclosure, when the access panel or door is in the first position 28, due to the access panel or door 16 seating on the enclosure 14 (shown in FIG. 1), when the switch circuit element 208 is electrically closed, it may enable the operation of the machine 12 (shown in FIG. 1), whereby the machine 12 is in a safe state to operate. The interlock circuit 20, when the access panel or door 16 has moved to the second position 30 of the access panel or door, when the switch circuit element 208 is electrically open, for example, when the machine is being serviced or maintained, etc., does not enable the operation of the machine 12, and by the operation of the machine 12, it may prevent personnel who may be near the machine 12 during a service or maintenance event from being injured. As will be understood by those skilled in the art in view of the present disclosure, the displacement of the interlock switch 202 with respect to the frame member 18 (shown in FIG. 1) may limit the reliability of the interlock circuit 20 (shown in FIG. 1). For example, in some machine arrangements, the interlock switch may be displaced when subjected to a minor impact, such as during the maintenance or servicing of a machine housed within an enclosure protected by the interlock switch. Alternatively (or additionally), the interlock switch may loosen due to, for example, vibratory forces that may be characteristic of the operation of a particular type of machine, and when the access panel or door is stationary or closed, the switch circuit element within the interlock switch may remain electrically open. A bracket 100 is provided to avoid displacement and / or looseness and / or to facilitate troubleshooting of the interlock switch 202 if displacement and / or looseness occurs.

[0036] Bracket 100 includes a bracket body 102. The bracket body 102 is configured to fix the interlock switch 202 to the frame member 18, and in this regard, it has a sheet portion 104 that couples a first slotted portion 106 to a second slotted portion 108. The sheet portion 104 defines a bracket axis 110 and has a seating surface 112 that is substantially planar. The seating surface 112 is generally rectangular in shape and may be bisected by the bracket axis 110. The sheet portion 104 of the bracket body 102 is intended to axially separate the first slotted portion 106 of the bracket body 102 from the second slotted portion 108 of the bracket body 102. In certain embodiments, the bracket body 102 may be formed from a metal sheet material 114. In this regard, the bracket body 102 can be made of an aluminum-containing material such as an aluminum alloy. An example of a suitable aluminum alloy is 5053 aluminum alloy. Further, the bracket body 102 may be made of an iron-containing material such as stainless steel or carbon steel material. Examples of suitable stainless steel materials and carbon steel materials include 304 stainless steel alloy and A36 steel alloy, which may be powder-coated. Advantageously, forming the bracket body from the metal sheet material 104 enables, for example, the bracket 100 to be formed using stamping and / or pressing, and the manufacture of the bracket 100 can be simplified.

[0037] The first slotted portion 106 of the bracket body 102 is axially offset from the sheet portion 104 along the bracket axis 110 and can be spaced apart from the bracket axis 110. The first slotted portion 106 may also be generally flat in shape and may extend substantially parallel to the bracket axis 110. In certain embodiments, the first slotted portion 106 may define a pair of slots 116 therethrough. The pair of slots 116 may include two slots that extend through the thickness of the bracket body 102 respectively and extend laterally across a portion of the lateral width of the first slotted portion 106. The slots of the pair of slots 116 are axially spaced apart from each other along the bracket axis 110, are substantially parallel to each other, and may be substantially orthogonal to the bracket axis 110. The second slotted portion 108 of the bracket body 102 may be similar to the first slotted portion 106 of the bracket body 102, and further, is axially separated from the first slotted portion 106 of the bracket body 102 by the sheet portion 104 of the bracket body 102 and further defines a single slot 118 therethrough. The single slot 118 similarly extends through the thickness of the bracket body 102, extends laterally across a portion of the lateral width of the bracket body 102, and may be substantially parallel to the slots of the pair of slots 116.

[0038] Slot pair 116 and single slot 118 are contemplated to be configured to receive a plurality of bracket-frame member fasteners 218 therethrough. Frame member 18 (shown in FIG. 1) may define first and second slotted partial fastener patterns 32 configured to receive a plurality of bracket and frame member fasteners 218 therethrough. The first and second slotted partial fastener patterns 32 (shown in FIG. 2) may then include a plurality of threaded openings suitable for the axial position of slot pair 116 defined by first slotted portion 106 of bracket body 102. The first and second slotted partial fastener patterns 32 may further define threaded openings that spatially conform to single slot 118 of second slotted portion 108 of bracket body 102. As will be appreciated by those skilled in the art from the present disclosure, the slots of slot pair 116 and single slot 118 may cooperate, for example, to enable securing of bracket assembly 200 to enclosure 14 (shown in FIG. 1) on frame member 18 to accommodate variations in the form and fit of access panel or door 16 (shown in FIG. 1) so that bracket assembly 200 can be adjusted relative to enclosure 14. Also, as will be appreciated by those skilled in the art from the present disclosure, although three (3) slots are shown and described herein as having, bracket body 102 may have fewer or additional slots and remain within the scope of the present disclosure and should be understood to be understood.

[0039] Referring to FIG. 4, the bracket body 102 may have a first intermediate portion 120 and a second intermediate portion 122. The first intermediate portion 120 is axially disposed between the first slotted portion 106 and the sheet portion 104 of the bracket body 102, coupling the first slotted portion 106 to the sheet portion 104 of the bracket body 102 and defining a first sheet offset 124 between the first slotted portion 106 and the sheet portion 104 of the bracket body 102. The first intermediate portion 120 may be substantially orthogonal (at least in part) to the sheet portion 104 of the bracket body 102. The first intermediate portion 120 may be oblique (at least in part) to the sheet portion 104 of the bracket body 102. The second intermediate portion 122 is similar to the first intermediate portion 120 and is further axially separated from the first intermediate portion 120 along the bracket axis 110 and may couple the sheet portion 104 of the bracket body 102 to the second slotted portion 108 of the bracket body 102. The second intermediate portion 122 is contemplated to define a second sheet offset 126 between the second slotted portion 108 of the bracket body 102 and the sheet portion 104 of the bracket body 102. The first sheet offset 124 and the second sheet offset 126 are further contemplated to cooperate to separate the sheet portion 104 from the frame member 18 (shown in FIG. 1) by a distance sufficient to allow the nut 220 (shown in FIG. 2) to be threadedly received onto the bayonet fastener 222 (shown in FIG. 2) and secure the interlock switch 202 (shown in FIG. 1) to the bracket member 18, thereby securing the bracket assembly 200 within the enclosure 14 (shown in FIG. 1). The nut 220 may be held in a fixed position between the bayonet fastener 222 and the sheet portion 104 of the bracket body 102.

[0040] In certain embodiments, the second sheet offset 126 may be substantially equivalent to the first sheet offset 124. According to a particular example, the sheet portion 104 of the bracket body 102 may be configured such that the interlock switch 202 (shown in FIG. 1) can be fixed to the bracket 100 by the piercing fastener 222 (shown in FIG. 2). In this regard, the housing 206 of the interlock switch 202 (shown in FIG. 2) defines a housing fixing opening 224 therethrough, the sheet portion 104 defines a sheet fixing opening 128 therethrough, and the piercing fastener 222 is intended to extend through the housing fixing opening 224 and the sheet fixing opening 128 to fix the interlock switch 202 to the bracket 100. In the illustrated embodiment, the interlock switch 202 is fixed to the bracket 100 by two or more piercing fasteners. In this regard, the housing fixing opening 224 is the first housing fixing opening 224, and the housing 206 defines a second housing fixing opening 226 (shown in FIG. 3), and the sheet fixing opening 128 is the first sheet fixing opening 128, and the sheet portion 104 of the bracket body 102 defines a second sheet fixing opening 130, and the piercing fastener 222 is the first piercing fastener 222, and the bracket assembly 200 further includes a second piercing fastener 228, and the second piercing fastener 228 is intended to extend through the second housing fixing opening 226 and the second sheet fixing opening 130 and to fix the interlock switch 202 to the bracket 100.

[0041] In certain embodiments, the nut 220 (shown in FIG. 2) may be a lock nut. As would be understood by one of ordinary skill in the art in view of the present disclosure, using a lock nut to secure the bayonet fastener 222 within the bracket assembly 200 may reduce the risk that the interlock switch 202 loosens due to vibrations associated with the operation of the machine 12 (shown in FIG. 1). According to a particular example, the resilient member 230 (shown in FIG. 3), which is made of an elastomeric material, may be held in place between the interlock switch 202 and the bayonet fastener 222, such as an O-ring. As would be understood by one of ordinary skill in the art in view of the present disclosure, the resilient member 230 absorbs vibrations associated with the operation of the machine 12 and may limit the risk that the interlock switch 202 loosens over time due to vibrations transmitted through the bracket assembly 200, for example, through the bracket member 18 (shown in FIG. 1) to which the bracket 100 is secured. Advantageously, using either (or both) of the lock nut and the resilient member 230 as vibration countermeasures can extend the interval between interlock switch inspections, improve availability, and thereby improve the throughput of the machine arrangement 10 (shown in FIG. 1).

[0042] In certain embodiments, the bracket assembly 200 may include a pin member 232. In such embodiments, the pin member 232 may be configured to fix the interlock switch 202 (shown in FIG. 1) on the sheet portion 104 of the bracket body 102 at a yaw angle (shown in FIG. 5) with respect to the bracket axis 110. In this regard, the pin member 232 may extend through the sheet portion 104 of the bracket body 102 at a position where the pin member 232 is axially separated from the first slotted portion 106 (or the second slotted portion 108) of the bracket body 102 by the sheet fixing opening 128. Further, the pin member 232 may extend from the sheet portion 104 of the bracket body 102 in a direction facing the first slotted portion 106 and the second slotted portion 108 of the bracket body 102. The pin member 232 is contemplated to be slidably received within a corresponding pin recess 234 (shown in FIG. 3) defined within the plane of the surface of the bracket of the housing 206 (shown in FIG. 3) of the interlock switch 202 when the interlock switch 202 is placed on the bracket 100. In this regard, the sheet portion 104 of the bracket body 102 defines a pin member opening 132 therethrough, and the pin member 232 may be fixedly seated within the pin member opening 132. Advantageously, the pin member 232 may resist displacement of the interlock switch 202 even when an external force impact is applied to the interlock switch 202, such as during maintenance or servicing of the machine arrangement 10 (shown in FIG. 1). The pin member 232 may also operate to maintain the yaw angle of the interlock switch 202 in the event that the fastener 220 loosens, and may improve the reliability of the machine arrangement 10.

[0043] In certain embodiments of the present disclosure, the pin member 232 can be fixedly seated within the seat portion 104 of the bracket body 102 by a self-clamping arrangement. As will be appreciated by those skilled in the art from the present disclosure, the self-clamping arrangement can simplify the manufacture of the bracket assembly 200. For example, the use of a clamping arrangement may eliminate the need to form threads within the pin member opening 132 defined by the seat portion 104 of the bracket body 102. Next, by eliminating the threads, it becomes possible to form the bracket body 102 from a relatively thin (or soft) metal sheet material, reducing the cost of the bracket 100 and / or the bracket assembly 200.

[0044] In certain embodiments, the pin member 232 may be the first pin member 232, and the bracket 100 may include a second pin member 236. In such examples, the second pin member 236 may be similar to the first pin member 232 and may additionally protrude from the sheet portion 104 of the bracket body 102 in a direction opposite to the first slotted portion 106 and the second slotted portion 108 of the bracket body 102 at a position separated from the first pin member 232 by the bracket axis 110. In such examples, the pin member opening 132 may be the first pin member opening 132, and the sheet portion 104 of the bracket body 102 may define a second pin member opening 134. The second pin member opening 134 may be similar to the first pin member opening 132 and may be further separated from the first pin member opening 132 by the bracket axis 110. It is contemplated that the second pin member opening 134 and the first pin member opening 132 may be axially aligned along the bracket axis 110, but it is understood and to be evaluated that the second pin member opening 134 may be axially offset from the first pin member opening 132 and remain within the scope of the present disclosure. As will be understood by those skilled in the art in view of the present disclosure, the second pin member 236 may operate to maintain the yaw angle of the interlock switch 202 when an external force impact is applied to the interlock switch 202 and / or when the fastener 220 loosens, and may provide additional resistance displacement of the interlock switch 202 even when further improving the reliability of the machine arrangement 10. Although two pin members are shown, the bracket 100 may include a single pin member or more than two pin members and it is understood and to be evaluated that it remains within the scope of the present disclosure.

[0045] Referring to FIG. 5 and continuing to refer to FIG. 4, the bracket body 102 is contemplated to have a flange portion 136. The flange portion 136 may project from the sheet portion 104 of the bracket body 102 in a direction opposite to the first slotted portion 106 and the second slotted portion 108 of the bracket body 102. The flange portion 136 may extend axially along the bracket body 102, for example, in a direction substantially parallel to the bracket axis 110. The flange portion 136 may extend further only partially along the axial length of the bracket body 102. In this regard, the flange portion 136 may extend only partially along the axial length 138 of the sheet portion 104 of the bracket body 102, and the flange portion 136 has an axial length 140 that is smaller than the axial length 138 of the sheet portion 104 of the bracket body 102. In a particular embodiment, the flange portion 136 of the bracket body 102 may be axially offset from the sheet fixing opening 128 along the bracket axis 110. According to a particular example, the flange portion 136 may axially overlap with the pin member 232. Advantageously, the flange portion 136 serves as a countermeasure for changing the yaw angle (shown in FIG. 5) of the interlock switch 202 with respect to the bracket axis 110 when an external force impacts the interlock switch 202 (shown in FIG. 1) and / or when the bayonet fastener 222 (shown in FIG. 3) becomes loose.

[0046] In certain embodiments, the flange portion 136 may be configured to shift the natural frequency 238 (shown in FIG. 2) of the bracket assembly 200 away from the excitation frequency or frequency range 34 (shown in FIG. 1) of the operation of the machine arrangement 10 (shown in FIG. 1), or the excitation frequencies within the environment including the bracket assembly 200. For example, the machine 12 (shown in FIG. 1) housed within the enclosure 14 (shown in FIG. 1) may include an excitation source. The excitation source, depending on the rotational speed of the motor, transmits excitation vibration forces to the bracket assembly 200 via the frame member 18 at a natural frequency or frequency range 34 (shown in FIG. 1) specific to the machine 12, such that the natural frequency 238 (shown in FIG. 1) of the bracket assembly 200, at which the bracket assembly 200 may resonate (e.g., resonate such that relatively small vibration forces are amplified), is not sufficiently spaced from the frequency or frequency range 34 of the machine 12, the bracket assembly 200 may resonate (e.g., resonate such that relatively small vibration forces are amplified). Shifting may be achieved, for example, by one or more of the height and length of the flange portion 136 in conjunction with the rigidity of the metal sheet material 114 (shown in FIG. 3) of the bracket body 102. As would be understood by one of ordinary skill in the art in view of the present disclosure, by avoiding the resonant response to excitation vibrations within the environment of the bracket assembly 200, the tendency for the interlock switch 202 to loosen during operation of the machine 12 is limited, and the need to inspect and / or periodically tighten the bayonet fastener 222 (shown in FIG. 3) is limited (or eliminated). By avoiding resonance, the elastic member 230 (shown in FIG. 3) is able to absorb (attenuate) residual vibration forces, allowing the nut 220 to be tightened over long operating intervals, and also limiting (or removing) the need to inspect and / or periodically tighten the bayonet fastener 222.

[0047] In certain embodiments, the axial length 140 of the flange portion 136 may be about 25% to about 75% of the axial length 138 of the sheet portion 104 in order to achieve the separation of the aforementioned natural frequencies. According to a particular example, the axial length 140 of the flange portion 136 may be about 25% to about 60% of the axial length 138 of the sheet portion 104, or about 25% to about 50% of the axial length 138 of the sheet portion 104 of the bracket body 102, or even about 25% to about 40%. As would be understood by one of ordinary skill in the art in view of the present disclosure, other types of reinforcement structures may be employed and remain within the scope of the present disclosure.

[0048] In certain embodiments, the flange portion 136 may be a first flange portion 136, and the bracket body 102 may have a second flange portion 142. The second flange portion 142 is similar to the first flange portion 136, and further, one or more of the bracket axis 110, the sheet fixing opening 128, and the pin member 232 may be separated from the first flange portion 136. In certain embodiments, the second flange portion 138 axially overlaps the first flange portion 136 of the bracket body 102 along the bracket axis 110, and the first flange portion 136 and the second flange portion 142 may reside at a common axial position along the bracket axis 110. The second flange portion 142 may have an axial length 144 that is substantially equal to the axial length 140 of the first flange portion 136, and it is contemplated that the second flange portion 142 may overlap the first flange portion 136 along substantially the entire axial length 140 of the first flange portion 136. As would be understood by one of ordinary skill in the art in view of the present disclosure, the second flange portion 142 further restricts the yaw angle of the interlock switch 202 with respect to the bracket axis 110, such that the second flange portion 142 may also limit the displacement and / or change in the yaw angle of the interlock switch 202 (shown in FIG. 1) when the interlock switch 202 is bumped and / or the bayonet fastener 222 becomes loose.

[0049] The second flange portion 138 is contemplated to be laterally separated from the first flange portion 136 by a separation distance 146. In certain embodiments, the separation distance 146 can be substantially equal to the lateral width 240 of the housing 206 of the interlock switch 202. In such examples, the housing 206 can abut (e.g., mechanically engage closely) the first flange portion 136 and / or the second flange portion 142 of the bracket body 102. As would be understood by one of ordinary skill in the art in view of the present disclosure, the abutment of the housing 206 against either (or both) of the first flange portion 136 and the second flange portion 142 can reduce (or prevent) the angular displacement and / or change of the yaw angle of the interlock switch 202 when the interlock switch 202 is bumped or the bayonet fastener 222 becomes loose.

[0050] In certain embodiments, the separation distance 146 may be greater than the lateral width 240 of the housing 206 of the interlock switch 202. In such an example, either (or both) of the first flange portion 136 and the second flange portion 142 may be separated from the housing 206 by a lateral gap 242. The lateral gap 242 may provide a visual indication of whether the interlock switch 202 has been bumped and / or the bayonet fastener 222 has loosened, while operating to limit the angular displacement and / or change of the yaw angle of the interlock switch 202. Further, in an example where the lateral gap extends continuously along the axial length 140 of either (or both) of the first flange portion 136 and the second flange portion 142, the lateral gap 242 may additionally provide a tactile indication of whether the interlock switch 202 has been bumped and / or the bayonet fastener 222 has loosened. For example, a maintenance person may evaluate the position of the interlock switch 202 relative to the bracket 100 by moving a feeler gauge through the lateral gap 242 and along its axial length to determine whether the interlock switch 202 has been displaced and / or whether the interlock switch 202 has changed in yaw angle relative to the bracket axis 110.

[0051] Referring to FIGS. 6-9, a method 300 for fabricating a bracket assembly, e.g., bracket assembly 200 (shown in FIG. 1), is shown. As shown in FIG. 6, method 300 includes forming a bracket, e.g., bracket 100 (shown in FIG. 1), as shown by box 302. Method 300 also includes seating an interlock switch on a sheet portion of the bracket body of the bracket, e.g., seating interlock switch 202 (shown in FIG. 1) on sheet portion 104 (shown in FIG. 2) of bracket body 102 (shown in FIG. 2). It is contemplated that method 300 may further include restraining the interlock switch in the yaw direction with respect to a bracket axis defined by, e.g., bracket axis 110 (shown in FIG. 1), of the sheet portion of the bracket body, as shown by box 306. In certain embodiments, method 300 further includes connecting an interlock circuit lead to the interlock switch, e.g., interlock circuit lead 24 (shown in FIG. 2), and securing the bracket to a frame member of an enclosure that houses the machine, e.g., frame member 18 (shown in FIG. 2), as shown by boxes 308 and 310.

[0052] As shown in FIG. 7, forming the bracket 302 may include forming a first slotted portion and a second slotted portion that are joined together by a sheet portion of the bracket body, such as the first slotted portion 106 (shown in FIG. 2) and the second slotted portion 108 (shown in FIG. 2), as shown in box 312. Forming the bracket 302 may include forming a first intermediate portion that couples the first slotted portion to a sheet portion, such as the first intermediate portion 120 (shown in FIG. 4), as shown in box 314. Forming the bracket 302 may include forming a second intermediate portion that couples the second slotted portion to a sheet portion, such as the second intermediate portion 122 (shown in FIG. 4), as shown in box 316. Forming the bracket 302 may include forming a flange portion extending from the sheet portion in a direction opposite to the first slotted portion and the second slotted portion of the bracket body, such as either (or both) of the first flange portion 136 (shown in FIG. 3) and the second flange portion 142 (shown in FIG. 3), as shown in box 318.

[0053] The formation 302 of the bracket body is contemplated to optionally include forming the bracket body from a metallic sheet material, such as metallic sheet material 114 (shown in FIG. 3). The formation 302 of the bracket may optionally include defining one or more sheet fixing openings in one or more of the sheet portions of the bracket body, such as the first sheet fixing opening 128 (shown in FIG. 4) and the second sheet fixing opening 130 (shown in FIG. 4), as shown by box 320. In this regard, the formation of the bracket may optionally include defining the first sheet fixing opening and the second sheet fixing opening within the sheet portion of the bracket body, as shown by boxes 322 and 324. In a particular embodiment, as shown by box 326, the formation 318 of one or more flange portions may optionally include separating the natural frequency of the bracket assembly from the excitation frequency value or frequency range associated with the operation of the machine housed within the enclosure by the flange portion of the bracket body, e.g., separating the natural frequency 238 (shown in FIG. 1) of the bracket assembly from the excitation frequency or excitation frequency range 36 (shown in FIG. 1) communicated to the bracket assembly. As shown by boxes 328 and 330, forming either (or both) of the first flange portion and the second flange portion according to the excitation frequency or frequency range characteristics of the machines and transmitting the formed flange portions to an interlock switch upon installation may achieve separating the natural frequency.

[0054] As shown in FIG. 8, seating the interlock switch on the bracket 304 may include, for example, seating the interlock switch adjacent to one or more flange portions of the bracket body between a first flange portion and a second flange portion of the bracket body, as shown in box 332. Seating the interlock switch on the bracket 304 may include, as shown in box 334, aligning one or more housing fixing openings with one or more seat fixing openings, for example, one or more of the first housing fixing openings 224 (shown in FIG. 3) and the second housing fixing openings 226 (shown in FIG. 3). Seating 304 may include, as shown in box 336, using one or more piercing fasteners, such as one or more of the first piercing fastener 222 (shown in FIG. 2) and the second piercing fastener 228 (shown in FIG. 2), to fix the housing of the interlock switch to the seat portion of the bracket body. In certain embodiments, fastening the housing to the seat portion 328 may include, as shown in box 338, using vibration countermeasures to fix the housing. For example, the interlock switch may be fixed (and thereby secured) to the bracket using one or more lock nuts and / or elastic members held in place, as shown in boxes 340 and 342.

[0055] In certain embodiments, seating the interlock switch on the bracket 304 may include seating the interlock switch against an anti-yaw feature, as shown in box 344. For example, one or more pin members may be secured to a second portion of the bracket body, such as a first pin member 232 (shown in FIG. 4) and a second pin member 236 (shown in FIG. 4), as shown in boxes 346 and 348, and the one or more pin members may be slidably received within the housing to limit yaw of the interlock switch relative to the bracket axis when a minor impact is applied to the interlock switch and / or when one or more of the bayonet fasteners become loose. Alternatively (or additionally), as shown in box 350, the interlock switch may be positioned such that the housing abuts against either (or both) a first flange portion and a second flange portion of the bracket body to limit yaw of the interlock switch relative to the bracket axis when the interlock switch is bumped and / or when one or more of the bayonet fasteners become loose. Also, the interlock switch may be installed on a seat portion of the bracket body, as shown in box 352, such that the housing is spaced away from one of the first flange portion and the second portion to provide a visual and / or tactile indication that the interlock switch has been depressed and / or that one or more of the bayonet fasteners have become loose.

[0056] An interlock switch is generally used to prevent the operation of a machine through cooperation with an interlock member carried by an access panel or a door in a situation where the operation of the machine may pose a danger to personnel in the vicinity of the machine. The interlock member typically electrically closes a switch circuit element disposed with the housing of the interlock circuit when the access panel is installed on the enclosure that houses the machine or when the door is closed, whereby the interlock switch enables the operation of the machine housed within the enclosure. When the access panel is removed or the door is opened, the interlock member typically electrically opens the switch circuit element, causing the machine to be housed within the enclosure, thereby stopping the operation and / or preventing the resumption of the operation. Although suitable for the generally intended purpose, such interlock switches may have reduced reliability during the operation of the machine protected by the interlock switch, such as when the fasteners fixing the interlock switch to the enclosure become loose due to vibrations transmitted to the interlock switch and / or when the interlock switch is bumped by a maintenance person or personnel servicing the machine. Once released, the interlock may prevent the operation of the machine despite the protected access panel or the protected door being closed, and the throughput of the machine housed within the enclosure protected by the interlock switch may be limited.

[0057] In the embodiments described herein, the interlock switch is mounted on a bracket that includes a flange portion. The flange portion that extends along the interlock switch restricts the change in the yaw angle of the interlock switch with respect to the bracket when the fastener that secures the interlock switch to the bracket becomes loose, and can provide a visual or tactile indication of whether the interlock switch has become loose. In certain embodiments, the flange portion is fixed to the bracket and cooperates with one or more pin members received within the housing of the interlock switch, and the one or more pin members further restrict the yaw of the interlock switch with respect to the bracket on which the interlock switch is seated. According to a particular example, the flange portion prevents ringing of the bracket assembly (and / or limit switch) in response to vibration excitation that may accompany the operation of the machine housed within the enclosure, and the tendency of the natural frequency of the bracket assembly for promoting displacement of the interlock switch can be restricted (or eliminated). Also, the bracket assembly may include one or more vibration countermeasure structures such as lock nuts and / or O-rings, or else is configured to prevent loosening of the fastener that secures the interlock switch to the bracket and / or absorb vibration transmitted to the bracket assembly through the frame member to which the bracket assembly is fixed.

[0058] The present disclosure has been provided in the context of certain embodiments and implementations, but the present disclosure extends beyond the specifically described embodiments to other alternative embodiments and / or uses thereof, and obvious modifications and equivalents thereof, as will be understood by those skilled in the art. Additionally, while some variations of the embodiments of the present disclosure are shown and described in detail, other modifications within the scope of the present disclosure will be readily apparent to those skilled in the art based on the present disclosure. Various combinations or partial combinations of specific features and aspects of the embodiments may be made and are still contemplated to fall within the scope of the present disclosure. Of course, the various features and aspects of the disclosed embodiments may be combined with or replaced by one another to form various modes of the embodiments of the present disclosure. Accordingly, it is intended that the scope of the present disclosure should not be limited by the specific embodiments described above.

[0059] The headings (if any) provided herein are for convenience only and do not necessarily affect the scope or meaning of the devices and methods disclosed herein.

Claims

1. A bracket comprising a bracket body, wherein the bracket body has, a sheet portion defining a bracket axis, a first slotted portion offset laterally from the sheet portion of the bracket body, a second slotted portion offset laterally from the sheet portion and axially separated from the first slotted portion by the sheet portion of the bracket body, and a flange portion extending from the sheet portion of the bracket body in a direction opposite to the first slotted portion and the second slotted portion, the flange portion further extending parallel to the bracket axis to constrain the yaw angle of an interlock switch seated on the bracket body with respect to the bracket axis. A bracket.

2. The bracket according to claim 1, wherein the flange portion is a first flange portion, the bracket body has a second flange portion, the second flange portion is separated from the first flange portion by the bracket axis, and the second flange portion is parallel to the first flange portion.

3. The bracket according to claim 2, wherein the sheet portion defines a sheet fixing opening axially offset from the first flange portion and the second flange portion.

4. The bracket according to claim 2, wherein the first slotted portion defines a pair of slots passing through the first slotted portion, the slots of the pair of slots are axially offset from the first flange portion and the second flange portion of the bracket body, and the slots of the pair of slots are further orthogonal to the bracket axis defined by the sheet portion of the bracket body.

5. The bracket according to claim 1, further comprising a pin member fixed to the sheet portion and extending from the sheet portion in a direction opposite to the first slotted portion and the second slotted portion of the bracket body.

6. The bracket according to claim 5, wherein the pin member separates the flange portion from the bracket axis.

7. The pin member is a first pin member, Further provided with a second pin member fixed to the sheet portion and extending from the sheet portion in a direction opposite to the first slotted portion and the second slotted portion of the bracket body. The bracket according to claim 6, wherein the second pin member is separated from the first pin member by the bracket shaft.

8. The bracket according to claim 1, wherein the second slotted portion defines a single slot passing through the second slotted portion, the single slot is orthogonal to the bracket axis, the sheet portion defines a pair of slots passing through the sheet portion, and the pair of slots is orthogonal to the bracket axis.

9. The bracket according to claim 1, wherein the bracket body is made of a metal sheet material.

10. A bracket according to claim 1, wherein the bracket body is made of a metal sheet material, a bracket, An interlock switch extending parallel to the flange portion of the bracket body, A bayonet fastener seated in the sheet portion of the bracket body and fixing the interlock switch to the sheet portion of the bracket body, A bracket assembly comprising a first pin member and a second pin member seated in the sheet portion of the bracket body and fixing the interlock switch at a yaw angle with respect to the bracket axis.

11. Further provided with an interlock circuit lead wire having a bayonet connector fixed to the interlock switch, The bracket assembly according to claim 10, wherein the bayonet connector extends axially along the bracket axis and overlaps the first slotted portion of the bracket body.

12. The interlock switch has an interlock member container overlapping the front sheet portion of the bracket body, the bracket assembly is movably supported with respect to the interlock switch, The bracket assembly according to claim 10, further comprising an interlock member received in the interlock member container.

13. Further provided with an interlock circuit connected to the interlock switch. The bracket assembly according to claim 10, wherein the interlock switch is configured to be electrically opened when the interlock member is displaced from an interlock member receptacle defined within the interlock switch.

14. A lock nut held in a fixed position between the bayonet fastener and the seat portion of the bracket body, An elastic member formed of an elastomeric material held in a fixed position between the bayonet fastener and the interlock switch, The bracket assembly according to claim 10, further comprising at least one of.

15. An enclosure including a frame member and an access panel or door removably fixed to the frame member, A process module disposed within the enclosure, The bracket according to claim 1, wherein the bracket is fixed to the frame member of the enclosure, An interlock switch disposed within the enclosure and fixed to the bracket, An interlock circuit connected to the interlock switch, The interlock switch is configured to electrically close the interlock circuit when the access panel or door abuts against the frame member, A semiconductor processing system, wherein the interlock switch is configured to electrically open the interlock circuit when the access panel or door is displaced from the frame member.

16. A method of fabricating a bracket assembly, Forming a bracket including a bracket body, the bracket body including a seat portion defining a bracket axis, a first slotted portion laterally offset from the seat portion of the bracket body, a second slotted portion laterally offset from the seat portion and axially separated from the first slotted portion by the seat portion of the bracket body, and a flange portion extending from the seat portion and parallel to the bracket axis, Seating an interlock switch on the seat portion of the bracket body, Constraining the yaw angle of the interlock switch with respect to the bracket axis by the flange portion of the bracket body.

17. connecting the interlock circuit lead wire to the interlock switch; further comprising fixing the bracket to a frame member of an enclosure that houses the machine of the machine arrangement body; The method according to claim 16, wherein forming the bracket includes separating the natural frequency of the bracket assembly from an excitation frequency or excitation frequency range associated with the operation of the machine housed within the enclosure.

18. fixing one or more pin members to the seat portion of the bracket body; slidably receiving the one or more pin members within the interlock switch; The method according to claim 16, further comprising further restricting the yaw angle of the interlock switch with respect to the bracket axis using the one or more pin members.

19. The method according to claim 16, wherein seating the interlock switch on the seat portion of the bracket body further includes fixing the interlock switch to the seat portion of the bracket body with one or more vibration countermeasure structures.

20. The method according to claim 16, wherein seating the interlock switch on the seat portion of the bracket body further includes (a) abutting the housing of the interlock switch against the flange portion of the bracket body and fixing it to the seat portion of the bracket body, or (b) fixing the housing of the interlock switch to the seat portion of the bracket body such that the housing and the flange portion define a gap therebetween.

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