Coating apparatus

Abstract

To provide a coating apparatus that prevents coating liquid from entering a gap formed between a substrate and a surrounding member due to suction force caused by reduction in pressure.SOLUTION: A coating apparatus comprises: a stage 10 having a substrate placement portion 16 on which a substrate 30 is placed, and a peripheral placement portion 17 on which one or more surrounding members 20, or 61 and 62 that surround a periphery of the substrate 30 are placed; and a coating unit 7 that applies a coating liquid P to an entire front surface of the substrate and to an inner portion of a front surface of each surrounding member to form a coating film 40. The substrate placement portion has a substrate suction portion 12 that suctions a back surface of the substrate. The peripheral placement portion has a peripheral suction portion 13 that suctions a back surface of each surrounding member. A gap 26 formed between the substrate and the surrounding member is provided with an atmosphere communication portion 18 that communicates with the atmosphere.SELECTED DRAWING: Figure 4

Description

Technical Field

[0001] The present invention relates to a coating apparatus for coating a substrate adsorbed and held on a stage, and more particularly to a coating apparatus for forming a coating film having a size larger than that of the substrate.

Background Art

[0002] Patent Document 1 discloses that a dummy substrate is brought into close contact with the side surface of a substrate, and a coating liquid is applied so as to straddle the substrate and the dummy substrate, thereby suppressing a change in film thickness at the end of the substrate and forming a coating film having a uniform film thickness.

[0003] Even if the side surface of the substrate and the side surface of the dummy substrate are brought into close contact with each other, a minute gap is formed between the two side surfaces. Patent Document 1 does not specifically disclose how the substrate and the dummy substrate are held with respect to the stage. For example, Patent Document 2 discloses holding the substrate by suction.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the holding method by suction, when a suction force due to reduced pressure acts on a minute gap formed between the substrate and a surrounding member surrounding the substrate, the coating liquid enters the gap. Then, the coating liquid that has entered the gap flows around the back surface of the substrate and the mounting surface of the stage, and has a problem of soiling the back surface of the substrate and the mounting surface of the stage.

[0006] Therefore, an object of the present invention is to provide a coating apparatus that prevents a coating liquid from entering a gap formed between a substrate and a surrounding member by an adsorption force due to reduced pressure.

Means for Solving the Problems

[0007] To solve the above problems, a coating apparatus according to an aspect of the present invention includes a stage having a substrate placement portion on which a substrate is placed and a surrounding placement portion on which a surrounding member surrounding the periphery of the substrate is placed, a coating unit that forms a coating film by applying a coating liquid to the entire surface of the substrate and the inner portion of the surface of the surrounding member, the substrate placement portion has a substrate adsorption portion that adsorbs the back surface of the substrate, the surrounding placement portion has a surrounding adsorption portion that adsorbs the back surface of the surrounding member, a gap formed between the side surface of the substrate and the side surface of the surrounding member is provided with an air communication portion communicating with the atmosphere.

Effects of the Invention

[0008] According to the present invention, even if an adsorption force due to reduced pressure acts on a gap formed between a substrate and a surrounding member, the gap is open to the atmosphere by the air communication portion, so that it is possible to prevent the coating liquid from entering the gap.

Brief Description of the Drawings

[0009]

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Embodiments for Carrying Out the Invention

[0010] Hereinafter, embodiments of the coating apparatus 1 according to the present invention will be described with reference to the drawings. In the following description, terms indicating a specific direction or position (for example, terms including "up", "down", "right", "left", "front", "rear") are used as necessary. However, the use of these terms is for facilitating the understanding of the present disclosure with reference to the drawings, and the technical scope of the present disclosure is not limited by the meanings of these terms. Further, the dimensions, materials, shapes, relative arrangements, etc. of the components described in the following embodiments are not intended to limit the scope of the present invention only to those, unless otherwise specifically described.

[0011] 〔Overall Configuration of Coating Apparatus〕 FIG. 1 is a diagram schematically explaining the coating apparatus 1 according to Embodiment 1. The overall configuration of the coating apparatus 1 will be described with reference to FIG. 1.

[0012] As shown in FIG. 1, the coating apparatus 1 includes a slit die 7, a stage 10, and a suction plate 20. The stage 10 is connected to a vacuum evacuation device (not shown). The suction plate 20 and the substrate 30 are disposed on the mounting surface 11 of the stage 10. Details of the suction plate 20 that functions as a surrounding member will be described later. The slit die 7 is disposed spaced above the stage 10.

[0013] The stage 10 penetrates in the thickness direction of the stage 10 and has a substrate suction portion 12 and a peripheral suction portion 13. The substrate suction portion 12 and the peripheral suction portion 13 are suction holes that suction the substrate 30 and the suction plate 20 placed on the mounting surface 11 of the stage 10, respectively.

[0014] The slit die 7 is connected to a coating liquid supply device (not shown), and the coating liquid P stored in the coating liquid supply device is supplied to the slit die 7. The coating liquid P is a general term for liquid materials having fluidity, such as aqueous liquids, paste-like high-viscosity liquids, and high-concentration slurries. The slit die 7 has a first die 7a, a second die 7b, and a shim plate 7c. The shim plate 7c is configured to be sandwiched between the first die 7a and the second die 7b. The first die 7a has a storage portion 7d in its internal space, and the coating liquid P supplied from the coating liquid supply device is stored in the storage portion 7d. The coating liquid P stored in the storage portion 7d is discharged through the supply path 7f of the shim plate 7c. The coating liquid P discharged from the slit die 7 is applied to the entire surface of the substrate 30 and the inner portion of the surface of the suction plate 20.

[0015] 〔Embodiment 1〕 With reference to FIGS. 5 to 7, the coating apparatus 1 using the suction plate 20 according to Embodiment 1 will be described. FIG. 5 is a plan view of the suction plate 20 shown in FIG. 3. FIG. 6 is a bottom view of the suction plate 20 shown in FIG. 3. FIG. 7 is a cross-sectional view of the suction plate 20 shown in FIG. 5 cut along line VII-VII.

[0016] As shown in FIGS. 5 to 7, the suction plate 20 that acts as a surrounding member of the substrate 30 has an opening 21 configured to surround the periphery of the substrate 30. For example, when the substrate 30 has a rectangular shape in plan view, the opening 21 has a rectangular opening in plan view that is configured to be slightly larger than the substrate 30 so as to accommodate the substrate 30. A minute gap 26 is formed between the inner side surface 22 that defines the opening 21 and the side surface 33 of the substrate 30 (see FIG. 4). The minute gap 26 is configured such that the side surface 33 of the substrate 30 and the inner side surface 22 of the opening 21 are adjacent to each other. Thereby, it is possible to prevent the coating liquid P from flowing into the gap 26 due to its own weight.

[0017] The suction plate 20 is formed of a flat plate-like body and has a coating surface 21a and a coating back surface 21b. The coating surface 21a is the upper surface of the suction plate 20 and is the surface on which the coating film 40 is formed by coating. The coating back surface 21b is the lower surface of the suction plate 20 and is the surface that contacts the mounting surface 11 of the stage 10. The suction plate 20 has the same thickness as the substrate 30. The coating surface 21a of the suction plate 20 is configured to be flush with the surface 31 of the substrate 30 accommodated in the opening 21. Thereby, it becomes easy to equalize the thickness of the coating film 40.

[0018] The suction plate 20 has an air communication portion 29 that communicates the gap 26 and the atmosphere. The air communication portion 29 has an opening hole 23, communication grooves 24, and a back surface groove 25. The opening hole 23 is formed in the suction plate 20 so as to connect between the communication grooves 24, the back surface groove 25, and the atmosphere. The opening hole 23 penetrates in the thickness direction of the suction plate 20 and is provided, for example, at four locations spaced apart in the vertical and horizontal directions.

[0019] The communication groove 24 and the back surface groove 25 that function as the concave portions on the back surface are formed on the coated back surface 21b of the suction plate 20, and are configured to connect the opening 21 and the opening hole 23. The back surface groove 25 is formed as a concave portion so as to connect the opening 21 and the communication groove 24 and surround the opening 21. Thereby, communication with the gap 26 can be surely performed through the opening 21, and the pressure in the gap 26 can be made equal to the atmospheric pressure. The back surface groove 25 has, for example, a rectangular shape. The communication groove 24 is a groove extending in the vertical and horizontal directions in a plan view so as to connect the back surface groove 25 and the opening hole 23.

[0020] With reference to FIGS. 2 to 4, the coating using the suction plate 20 according to Embodiment 1 will be described. FIG. 2 is a plan view for explaining the coating using the coating apparatus 1 shown in FIG. 1. FIG. 3 is a cross-sectional view taken along line III-III in FIG. 2. FIG. 4 is an enlarged view of the main part of the portion surrounded by the broken line in FIG. 3.

[0021] As shown in FIGS. 2 to 4, the suction plate 20 and the substrate 30 are placed on the placement surface 11 of the stage 10, and the substrate 30 is configured to be accommodated in the opening 21 of the suction plate 20 and surrounded by the suction plate 20. The side surface 33 of the substrate 30 and the inner side surface 22 of the opening 21 are adjacent to each other with a minute gap 26 therebetween.

[0022] The stage 10 has a substrate placement portion 16 and a peripheral placement portion 17. The substrate 30 is placed on the substrate placement portion 16, and the substrate 30 is suction-held by a substrate suction portion 12 disposed on the substrate placement portion 16. The suction plate 20 is placed on the peripheral placement portion 17, and the suction plate 20 is suction-held by a peripheral suction portion 13 disposed on the peripheral placement portion 17.

[0023] The coating liquid P is applied to the coating surface 21a of the suction plate 20 adsorbed and held on the placement surface 11 of the stage 10 and the surface 31 of the substrate 30 in a size larger than that of the substrate 30. Then, a coating film 40 is formed on the entire surface 31 of the substrate 30 and the inner part of the coating surface 21a of the suction plate 20. The coating film 40 has a substrate coating part 41, a gap coating part 43, and a peripheral coating part 42 that are continuously connected. The substrate coating part 41 is formed on the entire surface of the surface 31 of the substrate 30. The peripheral coating part 42 is formed on the coating surface 21a so as to extend from the inner side surface 22 to the vicinity of the opening hole 23. The gap coating part 43 is located between the substrate coating part 41 and the peripheral coating part 42 and is formed on the gap 26.

[0024] As shown in FIG. 4, even if the substrate suction part 12 and / or the peripheral suction part 13 is located in the vicinity of the gap 26, the gap 26 is open to the atmosphere by the atmosphere communication part 29. Thereby, the suction force of the substrate suction part 12 and / or the peripheral suction part 13 does not act on the gap 26, and it is possible to prevent the gap coating part 43 from entering the gap 26.

[0025] Therefore, even if a suction force due to reduced pressure acts on the gap 26 formed between the substrate 30 and the suction plate 20, since the gap 26 is open to the atmosphere by the atmosphere communication part 29, it is possible to prevent the coating liquid P from entering the gap 26.

[0026] [Embodiment 2] With reference to FIGS. 8 to 11, the coating apparatus 1 using the horizontal dummy substrate 61 and the vertical dummy substrate 62 according to Embodiment 2 will be described. FIG. 8 is a plan view for explaining coating using the coating apparatus 1 according to Embodiment 2. FIG. 9 is a cross-sectional view taken along line IX-IX of FIG. 8. FIG. 10 is a plan view of the stage 10 of the coating apparatus 1 according to Embodiment 2. FIG. 11 is a cross-sectional view taken along line XI-XI of FIG. 10.

[0027] As shown in FIGS. 10 and 11, the stage 10 of the coating apparatus 1 has a stage recess 18 that serves as an air communication portion. The stage recess 18 is formed so as to separate the substrate placement portion 16 and the peripheral placement portion 17 and communicates with the atmosphere. For example, the stage recess 18 is a groove having a rectangular cross section that is recessed downward with respect to the placement surface 11.

[0028] The stage 10 shown in FIG. 10 has a substrate placement portion 16 that is located in the central portion and extends in the lateral direction, and a peripheral placement portion 17 that is disposed so as to surround the substrate placement portion 16. The peripheral placement portion 17 is configured to correspond to each of the plurality of horizontal dummy substrates 61 and vertical dummy substrates 62. For example, the peripheral placement portion 17 has two horizontally extending long portions, two vertically extending long portions, and four corner portions that are rectangular. For example, the substrate placement portion 16 has four substrate suction portions 12, the two horizontally extending long portions of the peripheral placement portion 17 have four peripheral suction portions 13, and the two vertically extending long portions and the four corner portions of the peripheral placement portion 17 have one peripheral suction portion 13. Thereby, the adsorption and holding of the plurality of dummy substrates 61 and 62 are facilitated and ensured.

[0029] As shown in FIGS. 8 and 9, a horizontally long substrate 30 is placed on the substrate placement portion 16, and the substrate 30 is adsorbed and held by the substrate suction portions 12 disposed on the substrate placement portion 16. Horizontally extending dummy substrates 61 and vertically extending dummy substrates 62 that act as surrounding members for the substrate 30 are placed on the peripheral placement portion 17, and the plurality of dummy substrates 61 and 62 are adsorbed and held by the peripheral suction portions 13 disposed on the peripheral placement portion 17.

[0030] So as to surround the substrate 30, upper and lower horizontal dummy substrates 61 are disposed above and below the stage 10 in FIG. 8, and two vertical dummy substrates 62 are disposed between the upper and lower horizontal dummy substrates 61. Accordingly, the horizontal dummy substrates 61 and the vertical dummy substrates 62 function as a surrounding member that surrounds the periphery of the substrate 30. Note that the horizontal dummy substrates 61 and the vertical dummy substrates 62 have the same thickness as the substrate 30, and the surfaces of the horizontal dummy substrates 61 and the vertical dummy substrates 62 are configured to be flush with the surface 31 of the substrate 30. Thereby, it becomes easy to equalize the thickness of the coating film 40.

[0031] The side surfaces of the substrate 30, the horizontal dummy substrates 61, and the vertical dummy substrates 62 and the side surfaces of the horizontal dummy substrates 61 and the vertical dummy substrates 62 are aligned by the alignment unit 51 so as to be in close contact with and clamped with each other. Note that an extremely minute gap 26 is formed between each of these side surfaces. The aligned substrate 30, horizontal dummy substrates 61, and vertical dummy substrates 62 are adsorbed and held on the mounting surface 11 of the stage 10.

[0032] Similar to the first embodiment, using the slit die 7, the coating film 40 is formed in a size larger than that of the substrate 30, that is, it is formed on the entire surface of the substrate 30 and the inner portions of the surfaces of the horizontal dummy substrates 61 and the vertical dummy substrates 62.

[0033] Accordingly, even if an adsorption force due to reduced pressure acts on the gap 26 formed between the substrate 30 and the horizontal dummy substrates 61 and the vertical dummy substrates 62, the gap 26 is opened to the atmosphere by the stage recess 18 that functions as an atmosphere communication portion, so that it is possible to prevent the coating liquid P from entering the gap 26. Further, by appropriately changing the arrangement of the plurality of horizontal dummy substrates 61 and vertical dummy substrates 62, it is possible to flexibly cope with the coating of various substrates 30.

[0034] Then, the substrate 30, horizontal dummy substrates 61, and vertical dummy substrates 62 on which the coating film 40 is formed are lifted from the stage 10 using the lifter 55 and then moved in the horizontal direction and conveyed to a drying device (not shown).

[0035] [Embodiment 3] With reference to FIGS. 12 to 15, a coating apparatus 1 using a horizontal dummy substrate 61 and a vertical dummy substrate 62 according to Embodiment 3 will be described. FIG. 12 is a plan view for explaining coating using the coating apparatus 1 according to Embodiment 3. FIG. 13 is a cross-sectional view taken along line XIII-XIII of FIG. 12. FIG. 14 is a plan view of a stage 10 of the coating apparatus 1 according to Embodiment 3. FIG. 15 is a cross-sectional view taken along line XV-XV of FIG. 14.

[0036] In Embodiment 3, a coating film 40 is formed on a plurality of substrates 30 in a group having the same size in one coating operation. The description will focus on the differences from the coating apparatus 1 according to Embodiment 2 described above.

[0037] The stage 10 shown in FIG. 14 has a plurality of substrate placement portions 16 arranged side by side in the horizontal direction at the central portion, and a peripheral placement portion 17 disposed so as to surround the substrate placement portions 16. For example, four substrate placement portions 16 are arranged side by side in the horizontal direction, and each of the substrate placement portions 16 has a substrate adsorption portion 12.

[0038] As shown in FIGS. 12 and 13, substrates 30 are placed on each of the four substrate placement portions 16, and each of the four substrates 30 is adsorbed and held by the substrate adsorption portions 12 disposed on each substrate placement portion 16.

[0039] The upper and lower horizontal dummy substrates 61 are disposed above and below the stage 10 in FIG. 12 so as to surround a group of four substrates 30 arranged side by side in the horizontal direction, and two vertical dummy substrates 62 are disposed between the upper and lower horizontal dummy substrates 61 and on the left and right sides of the four substrates 30. Therefore, the horizontal dummy substrate 61 and the vertical dummy substrate 62 act as a surrounding member surrounding the periphery of a group of four substrates 30.

[0040] The side surfaces between the four substrates 30, the side surfaces of the four substrates 30 and the side surface of the horizontal dummy substrate 61, the side surfaces of the four substrates 30 and the side surface of the vertical dummy substrate 62, and the side surfaces of the horizontal dummy substrate 61 and the vertical dummy substrate 62 are aligned by the alignment portion 51 so as to be in close contact with and clamped by each other. Note that an extremely minute gap 26 is formed between these side surfaces. The aligned substrates 30, horizontal dummy substrate 61, and vertical dummy substrate 62 are adsorbed and held by the substrate adsorption portion 12 and the peripheral adsorption portion 13 on the placement surface 11 of the stage 10.

[0041] Similar to the first embodiment, using the slit die 7, the coating film 40 is formed in a size larger than the size of a group of four substrates 30, that is, it is formed on the entire surface of a group of four substrates 30 and the inner portions of the surfaces of the horizontal dummy substrate 61 and the vertical dummy substrate 62.

[0042] Therefore, even if an adsorption force due to reduced pressure acts on the gap 26 formed between the substrates 30 and the gap 26 formed between the substrate 30 and the horizontal dummy substrate 61 and the vertical dummy substrate 62, the gap 26 is opened to the atmosphere by the stage recess 18 that acts as an atmosphere communication portion, so that the coating liquid P can be prevented from entering the gap 26.

[0043] Although the specific embodiments of the present invention have been described, the present invention is not limited to the above embodiments, and various modifications can be made within the scope of the present invention.

[0044] In the first embodiment above, the aspect in which the atmosphere communication portion 29 has the opening hole 23 penetrating in the thickness direction of the adsorption plate 20 has been described, but an aspect in which the communication groove 24 extends to the outer side surface of the adsorption plate 20 to communicate with the atmosphere may also be possible.

[0045] In the second and third embodiments above, the aspect in which the stage recess 18 is a groove having a rectangular cross section has been exemplified, but the stage recess 18 may also be a groove having a semicircular or crescent-shaped cross section.

[0046] In the above embodiment, the mode in which the substrate 30 has a rectangular shape in plan view has been described. However, the substrate 30 may have a circular shape, an elliptical shape, or a polygonal shape in plan view.

[0047] Summarizing this invention and the embodiment, it is as follows.

[0048] The coating apparatus 1 according to the first aspect of this invention includes a stage 10 having a substrate mounting portion 16 on which the substrate 30 is mounted, and a peripheral mounting portion 17 on which surrounding members 20; 61, 62 surrounding the periphery of the substrate 30 are mounted. It is provided with a coating section 7 for applying a coating liquid P to the entire surface 31 of the substrate 30 and the inner part of the surface of the surrounding members 20; 61, 62 to form a coating film 40. The substrate mounting portion 16 has a substrate suction portion 12 for sucking the back surface 32 of the substrate 30. The peripheral mounting portion 17 has a peripheral suction portion 13 for sucking the back surfaces of the surrounding members 20; 61, 62. An air communication portion 29 communicating with the atmosphere is disposed in a gap 26 formed between the substrate 30 and the surrounding members 20; 61, 62, which is characterized in that.

[0049] According to the above aspect, even if a suction force due to reduced pressure acts on the gap 26 formed between the substrate 30 and the surrounding members 20; 61, 62, since the gap 26 is open to the atmosphere by the air communication portion 29, it is possible to prevent the coating liquid P from entering the gap 26.

[0050] Further, the coating apparatus 1 according to the second aspect is, in the above first aspect, the surrounding member 20 is a suction plate 20 having an opening 21 for accommodating the substrate 30. The air communication portion 29 includes back surface recesses 24, 25 formed on the back surface of the suction plate 20 so as to connect to the opening 21, and an air connection portion 23 formed on the suction plate 20 so as to connect between the back surface recesses 24, 25 and the atmosphere.

[0051] According to the above aspect, by appropriately changing the shape of the opening 21 of the suction plate 20, it is possible to flexibly cope with the coating of various substrates 30.

[0052] Further, in the coating apparatus 1 according to the third aspect, in the above second aspect, The air connection portion 23 is an opening hole 23 that penetrates the suction plate 20 in the thickness direction.

[0053] According to the above aspect, the formation of the air connection portion 23 becomes easy.

[0054] Further, in the coating apparatus 1 according to the fourth aspect, in the above second aspect, The back surface recess 25 has a back surface groove 25 formed so as to surround the opening 21.

[0055] According to the above aspect, communication with the gap 26 can be surely performed through the opening 21.

[0056] Further, in the coating apparatus 1 according to the fifth aspect, in the above first aspect, The surrounding members 61 and 62 are constituted by arranging a plurality of horizontal dummy substrates 61 and vertical dummy substrates 62, The surrounding members 61 and 62 have a stage recess 18 formed as the air communication portion 29 so as to separate the peripheral placement portion 17 and the substrate placement portion 16, The stage recess 18 communicates with the atmosphere.

[0057] According to the above aspect, by appropriately changing the arrangement of the plurality of horizontal dummy substrates 61 and vertical dummy substrates 62, it is possible to flexibly cope with the coating of various substrates 30.

[0058] Further, in the coating apparatus 1 according to the sixth aspect, in the above fifth aspect, The peripheral placement portion 17 is configured to correspond to each of the plurality of horizontal dummy substrates 61 and vertical dummy substrates 62.

[0059] According to the above aspect, the adsorption and holding of the plurality of horizontal dummy substrates 61 and vertical dummy substrates 62 can be facilitated and ensured.

[0060] Further, the coating device 1 according to the seventh aspect is, in the above first aspect, The gap 26 is configured such that the substrate 30 and the surrounding members 20; 61, 62 are adjacent to each other.

[0061] According to the above aspect, it is possible to prevent the coating liquid P from flowing into the gap 26 due to its own weight.

[0062] Further, the coating device 1 according to the eighth aspect is, in the above first aspect, The surrounding members 20; 61, 62 have the same thickness as the substrate 30.

[0063] According to the above aspect, it becomes easy to equalize the thickness of the coating film 40.

Explanation of Reference Numerals

[0064] 1... Coating device 7... Slit die (coating section) 7a... First die 7b... Second die 7c... Shim plate 7d... Reservoir 7f... Supply path 10... Stage 11... Mounting surface 12... Substrate adsorption section 13... Peripheral adsorption section 16... Substrate mounting section 17... Peripheral mounting section 18... Stage recess (atmospheric communication section) 20... Suction plate (surrounding member) 21... Opening 21a... Coating surface 21b... Coating back surface 22... Inner side surface (side surface) 23... Opening hole (atmospheric connection section) 24... Communication groove (back surface recess) 25... Back surface groove (back surface recess) 26... Gap 29…Atmospheric communication part 30…Substrate 31…Surface 32…Back surface 33…Side surface 40…Coating film 41…Substrate coating part 42…Peripheral coating part 43…Gap coating part 51…Alignment part 55…Lifter 61…Horizontal dummy substrate (dummy substrate, surrounding member) 62…Vertical dummy substrate (dummy substrate, surrounding member) P…Coating liquid

Claims

1. A stage having a substrate placement portion on which a substrate is placed and a peripheral placement portion on which a surrounding member surrounding the periphery of the substrate is placed; A coating section that forms a coating film by applying a coating liquid to the entire surface of the substrate and the inner portion of the surface of the surrounding member; The substrate placement portion has a substrate suction portion that sucks the back surface of the substrate; The peripheral placement portion has a peripheral suction portion that sucks the back surface of the surrounding member; A coating apparatus in which an air communication portion communicating with the atmosphere is disposed in a gap formed between the substrate and the surrounding member.

2. The surrounding member is a suction plate having an opening for accommodating the substrate; The coating apparatus according to claim 1, wherein the air communication portion includes a back surface recess formed on the back surface of the suction plate so as to connect to the opening, and an air connection portion formed on the suction plate so as to connect between the back surface recess and the atmosphere.

3. The coating apparatus according to claim 2, wherein the air connection portion is an opening hole penetrating the suction plate in the thickness direction.

4. The coating apparatus according to claim 2, wherein the back surface recess has a back surface groove formed so as to surround the opening.

5. The surrounding member is configured by disposing a plurality of dummy substrates; The surrounding member has a stage recess formed so as to separate the peripheral placement portion and the substrate placement portion as the air communication portion; The coating apparatus according to claim 1, wherein the stage recess communicates with the atmosphere.

6. The coating apparatus according to claim 5, wherein the peripheral placement portion is configured to correspond to each of the plurality of dummy substrates.

7. The coating apparatus according to claim 1, wherein the gap is configured such that the substrate and the surrounding member are adjacent to each other.

8. The coating apparatus according to claim 1, wherein the surrounding member has the same thickness as the substrate.

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