Vibration type actuator, optical instrument, and electronic apparatus

Abstract

To provide a vibration type actuator which allows highly accurate drive.SOLUTION: In a vibration type actuator comprising: a vibrator having an electromechanical energy conversion element; a contact body contacting the vibrator and provided to be relatively movable to the vibrator; and a control unit which inputs an electric signal in the vibrator, it further comprises a base which supports the vibrator, the contact body, and the control unit, and includes communication means which can receive power and the electric signal from an external apparatus.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a vibration actuator, an optical device, and an electronic device. [Background technology]

[0002] Generally, a vibration actuator obtains driving force by bringing a vibrating body into pressure contact with a driven body (contact body) and frictionally driving the vibrating body and the driven body relative to each other using vibrations excited in the vibrating body. As a result, vibration actuators have a simple structure, are thin, and are capable of high-precision, quiet driving. Vibration actuators have been applied as drive motors for lens barrels with movable lenses, rotation drive devices such as camera pan heads, production equipment such as FA (factory automation), and office automation equipment.

[0003] For example, Patent Document 1 describes a technology for a small manipulator that applies a sinusoidal drive voltage to a vibration-type actuator using a piezoelectric element to produce linear or rotational motion. Specifically, in the manipulator of Patent Document 1, a power supply is connected to a drive device (drive circuit) that generates a control signal for the piezoelectric element, and the power required to drive the piezoelectric element is supplied. In addition, a personal computer is connected to the control drive device, and a control signal from the personal computer is sent to the drive device. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2006-175531 Summary of the Invention [Problem to be solved by the invention]

[0005] In order to perform highly accurate positioning of a vibration actuator, the vibration actuator may be provided with an encoder body (detecting portion) for position detection and a scale (detected portion).

[0006] However, in the vibration type actuator shown in the above-mentioned conventional example, the control drive device is installed in a position distant from the vibration type actuator and the encoder body, which may result in insufficient accuracy in detecting the position of the vibration type actuator.

[0007] Specifically, the drive signal of a vibration actuator is generally a high-voltage sinusoidal signal of about 100 Vpp to 400 Vpp. On the other hand, the position signal from the encoder body is generally a low-voltage signal of about 3 V to 5 V. Therefore, if the wiring for the drive signal and the wiring for the encoder's position signal are close to each other, the encoder's position signal will be affected by the drive signal, resulting in a signal with increased noise.

[0008] In other words, if the control drive device is located far from the vibration actuator as in the conventional example, the wiring for the drive signal and the wiring for the encoder connected to the control drive device will each be long. As a result, the wiring for the drive signal and the wiring for the encoder will be close to each other in many areas. This can increase noise in the position signal, making the drive of the vibration actuator controlled by the position signal unstable and reducing positioning accuracy.

[0009] Therefore, an object of the present invention is to provide a vibration actuator that can be driven with high precision. Another object of the present invention is to provide an optical device or electronic device that can be driven with high precision. [Means for solving the problem]

[0010] The above object is achieved by the present invention as follows. That is, according to the present invention, there is provided a vibration actuator comprising a vibrating body having an electromechanical energy conversion element, a contact body in contact with the vibrating body and movable relative to the vibrating body, a control unit that inputs an electric signal to the vibrating body, and a detector that detects the relative position of the vibrating body and the contact body, further comprising a base that supports the vibrating body, the contact body, the detector, and the control unit. Also, according to the present invention, there is provided an optical device or electronic device that comprises the above vibration actuator. [Effects of the Invention]

[0011] According to the present invention, it is possible to provide a vibration actuator that can be driven with high precision, and also to provide an optical device or electronic device that can be driven with high precision. [Brief explanation of the drawings]

[0012] [Figure 1] 1 is a perspective view showing a schematic configuration of a vibration type actuator according to a first embodiment. [Figure 2] 1 is an exploded perspective view of a vibration actuator according to a first embodiment. [Figure 3] FIG. 2 is a partially exploded perspective view of a drive unit that constitutes the vibration actuator according to the first embodiment. [Figure 4] FIG. 2 is a perspective view illustrating a first vibration mode and a second vibration mode according to the first embodiment. [Figure 5] 3 is a schematic diagram of a wiring pattern of a relay section of the vibration actuator according to the first embodiment. FIG. [Figure 6] FIG. 10 is a perspective view showing a schematic configuration of a vibration type actuator according to a second embodiment. [Figure 7] FIG. 10 is a partially exploded perspective view of a drive unit of a vibration actuator according to a second embodiment. [Figure 8] FIG. 10 is a perspective view showing a schematic configuration of a microscope according to a third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0013] The inventors have studied a configuration capable of driving a vibration actuator with high precision. As a result, they have found that if the encoder body and scale for position detection are provided in separate housings or components at distant locations, the position detection precision may be insufficient. After further study, they have found that the vibration actuator can be driven with high precision by providing a base that supports the vibrating body, contact body, control unit, and detector.

[0014] The present invention will be described in further detail below with reference to preferred embodiments.

[0015] [First embodiment] (Basic configuration of vibration type actuator) FIG. 1 is a perspective view showing a schematic configuration of a vibration actuator 100 according to the first embodiment. FIG. 1(a) is a perspective view seen from the communication unit 41 side, and FIG. 1(b) is a perspective view seen from the encoder 37 side. FIG. 2 is an exploded perspective view of the vibration actuator 100. FIG. 2(a) is an exploded perspective view seen from the communication unit 41 side, and FIG. 2(b) is a partially exploded perspective view seen from the drive circuit 40 side. FIG. 3 is a partially exploded perspective view of the drive unit 1. The vibration actuator 100 includes a vibrating body 2, a holding member 6, a support member 7, a contact body 10, a base 30, a linear guide 33, an encoder 37, and a drive circuit 40.

[0016] The vibrating body 2 has an elastic body 3, two protrusions 5 provided on one surface of the elastic body 3, and a piezoelectric element 4 provided on the surface of the elastic body 3 opposite to the surface on which the protrusions 5 are provided. Note that the contact body 10 can be driven if there is at least one protrusion 5.

[0017] The elastic body 3, which has a substantially rectangular, flat plate shape, may contain, for example, a metallic material such as martensitic stainless steel. The elastic body 3 may also be quenched as a hardening treatment to enhance durability. The protrusion 5 is formed to a thickness that provides springiness, and can be formed integrally with the elastic body 3, for example, by pressing the plate material that constitutes the elastic body 3. However, this is not limiting, and the protrusion 5 may be fixed to the elastic body 3 by welding or the like. The tip 5a (upper surface) of the protrusion 5 is in frictional sliding contact with the contact body 10, so it is preferable that the tip 5a (upper surface) be hardened, for example, by quenching, to enhance wear resistance.

[0018] The contact body 10 may contain a metal material such as stainless steel. The friction sliding surface of the contact body 10 with the protrusion 5 is preferably subjected to a hardening treatment such as nitriding to enhance wear resistance.

[0019] The piezoelectric element 4, which is an example of an electromechanical energy conversion element that converts an electrical quantity into a mechanical quantity, is adhered to the elastic body 3 with an adhesive. The piezoelectric element 4 has a structure in which electrodes of a predetermined shape are formed on both sides of a plate-shaped piezoelectric ceramic.

[0020] When the vibration actuator 100 is driven, a drive voltage (AC voltage) of a predetermined frequency is applied from the power supply flexible part 21 to the electrodes of the piezoelectric element 4. The applied voltage excites the vibrating body 2 to vibrate in a first vibration mode and a second vibration mode, which will be described later, and causes the protrusions 5 to perform elliptical motion in a plane that includes the direction connecting the two protrusions 5 and the protruding direction of the protrusions 5. As a result, the protrusions 5 frictionally drive (hereinafter simply referred to as "drive") the contact body 10, and linearly drive the contact body 10 and the vibrating body 2 relative to each other, i.e., they can be configured to be movable relative to each other.

[0021] 4A and 4B are perspective views illustrating the natural vibration modes excited in the vibrating body 2 to drive the vibration actuator 100 (to move the vibrating body 2 and the contact body 10 relatively). Fig. 4A is a perspective view illustrating the first vibration mode excited in the vibrating body 2 to drive the vibration actuator 100. Fig. 4B is a perspective view illustrating the second vibration mode excited in the vibrating body 2 to drive the vibration actuator 100.

[0022] 4(a) and 4(b), the amount of displacement is shown enlarged compared to the shape of the vibrating body 2 to make it easier to understand the deformed shape. To explain the first vibration mode and the second vibration mode, the X direction, Y direction, and Z direction shown in the figures are defined. The X direction is the direction connecting the two protrusions 5 (the tips of the protrusions), and is also the longitudinal direction of the vibrating body. The Z direction is the protruding direction of the protrusions 5, and is also the direction in which the vibrating body and the contact body come into pressure contact. The Y direction is the direction perpendicular to the X direction and Z direction, and is also the lateral direction of the vibrating body.

[0023] The first vibration mode is a mode that generates a secondary bending vibration (with two vibration loops) in the X direction (longitudinal direction of the vibrating body) and has three vibration nodes (hereinafter simply referred to as "nodes") parallel to the Y direction. The protrusion 5 (its tip) reciprocates in the X direction due to vibration in the first vibration mode. At this time, by locating the protrusion 5 at or near a position that becomes a node in the vibration of the first vibration mode (so as to overlap with the position that becomes a node in the vibration of the first vibration mode), the protrusion 5 (its tip) can be displaced the largest in the X direction.

[0024] The second vibration mode is a mode that generates a primary bending vibration (one antinode of vibration) in the Y direction (the short side direction of the vibrating body) and has two nodes parallel to the X direction. The protrusion 5 reciprocates in the Z direction due to vibration in the second vibration mode. At this time, by arranging the protrusion 5 at a position that forms an antinode in the second vibration mode or in its vicinity (so as to overlap with the position that forms an antinode in the vibration of the second vibration mode), the protrusion 5 can be displaced the largest in the Z direction.

[0025] Therefore, by combining the first vibration mode and the second vibration mode, an elliptical motion can be generated at the tip of the protrusion 5 approximately in the ZX plane, thereby generating a driving force that drives the vibrator 2 approximately in the X direction. At this time, by arranging the two protrusions 5 at the node position of the first vibration mode and at the antinode position of the second vibration mode or in the vicinity thereof, the vibration displacement of the protrusion 5 (at its tip) can be maximized, thereby obtaining a high output.

[0026] As shown in Figures 1, 2, and 3, the vibrating body 2 is fixed to the holding member 6 by means of adhesive, welding, or the like near the end (fixing portion extending longitudinally from the flat plate portion) of the vibrating body 2 in the longitudinal direction (the direction connecting the tips 5a of the two protrusions 5).

[0027] The holding member 6 is structured so as to slide freely in the Z direction relative to the support member 7, and the vibrating body 2 can apply pressure to the contact body 10. Furthermore, the holding member 6 is fixed relative to the support member 7 in the X direction.

[0028] The support member 7 is provided with a drive connecting portion 8 and a drive connecting spring 9, which are connected to a connection holding portion 35 (described later) and transmit the driving force of the vibrating body 2.

[0029] The drive connecting spring 9 is a torsion spring that generates a biasing force in both the X and Z directions. The biasing force in the X direction acts to reduce backlash in the drive direction, and the biasing force in the Z direction acts to reduce backlash in the linear guide 33.

[0030] Each of the longitudinal ends of the contact body 10 is fixed to the base 20 by a screw.

[0031] The base 30 is composed of a drive mounting portion 31 and a circuit mounting portion 32, and the drive mounting portion 31 and the circuit mounting portion 32 are fixed with screws. However, they may also be fixed with adhesive, or the drive mounting portion 31 and the circuit mounting portion 32 may be formed integrally.

[0032] The base 20 of the drive unit 1 is fixed with screws to the drive mounting portion 31. This allows the vibrating body 2 to drive in the X direction relative to the contact body 10, the base 20 to which the contact body 10 is fixed, and the base 30 to which the base 20 is fixed.

[0033] The drive mounting portion 31 has four mounting holes 31a, which enable it to be fixed with screws to a fixed base (not shown) on which an object to be driven is provided. A linear guide 33 (guide portion) that can be guided in the X direction and an encoder 37 for position detection are fixed to the drive mounting portion 31 with screws.

[0034] An output unit 34 is fixed to the guide portion of the linear guide 33 with a screw, and the output unit 34 is movable in the X direction relative to the base 30. The output unit 34 has an output mounting portion 34a with an internal thread formed therein, and is capable of fixing an object to be driven (not shown) of the vibration actuator 100. Note that the structure is not limited to an internally threaded hole, and may be formed in any shape such as a hole or pin, as long as it is capable of fixing an object to be driven.

[0035] The output section 34 is provided with a connecting and holding section 35 and a scale 36. The connecting and holding section 35 is fixed to the output section 34 with screws, and is connected to the drive connecting section 8 as described above. Therefore, the connecting and holding section 35 and the output section 34 are driven integrally with the vibrating body 2 via the drive connecting section 8 which drives integrally with the vibrating body 2.

[0036] With the above configuration, in the vibration actuator 100, when the vibrating body 2 is driven, the vibrating body 2, holding member 6, support member 7, drive connecting portion 8, connecting holding portion 35, and output portion 34 are driven together in the X-axis direction relative to the fixed contact body 10 and base 30.

[0037] (Position detection mechanism of vibration type actuator) The scale 36 is fixed to the output section 34 with adhesive, adhesive tape, or the like so as to be substantially parallel to the contact body 10 in the X-axis direction.

[0038] Here, a description will be given of the encoder 37 and the scale 36. The encoder 37 is made up of a sensor section 37a (detector) and an encoder flexible cable 37b.

[0039] The sensor unit 37a detects the relative position (displacement information) between the vibrating body 2 and the contact body 10. The sensor unit 37a may also be configured to detect the absolute position (position information) between the vibrating body 2 and the contact body 10. The "displacement information" refers to information detected by a so-called incremental encoder. The "position information" refers to information detected by a so-called absolute encoder.

[0040] In this embodiment, a reflective optical sensor having a light-emitting element and a light-receiving element is used as the sensor unit 37a. Light emitted from the sensor unit 37a is reflected by the scale (detected object) 36, which serves as a reflector, and the sensor unit 37a receives this reflected light to detect displacement information (or position information).

[0041] The sensor portion 37a is surface-mounted on the encoder flex 37b by soldering or the like, and is fixed to the drive mounting portion 31 via the encoder flex 37b by screws.

[0042] Therefore, when the vibrating body 2 and the contact body 10 move relative to each other, the sensor section 37a moves together with the contact body 10 relative to the vibrating body 2 and the output section 34. Therefore, the sensor section 37a and the scale 36 move relative to each other, making it possible to detect the relative position or absolute position of the vibrating body 2 and the contact body 10.

[0043] Next, the peripheral structure of the drive circuit 40 that generates the drive voltage to be applied to the vibrating body 2 will be described with reference to Figures 1, 2, and 5. Figure 5 is a schematic diagram of the wiring pattern of the relay section (relay flexible section) 45.

[0044] The circuit mounting portion 32 of the base 30 is provided with a drive circuit 40, a relay portion 45, and a cover portion 46. The cover portion 46 is provided to cover the top surface of the drive circuit 40 in order to prevent dust and other debris from entering the drive circuit 40 and to prevent short circuits caused by inadvertent contact by external devices or the user. Openings are provided in the cover portion 46 on the top surfaces of the communication portion 41 and the flexible connector portion 42 of the drive circuit 40 so that the respective wiring can be inserted and removed.

[0045] The drive circuit 40 (control unit) includes a communication unit 41, a flexible connector unit 42, and a transformer unit 43. A flexible terminal unit 45c of the relay unit 45 is inserted into the flexible connector unit 42. The relay unit 45 includes a drive connector unit 45a, a drive signal wiring unit 45a-1, a sensor connector unit 45b, a sensor signal wiring unit 45b-1, and a flexible terminal unit 45c.

[0046] The power supply flexible part 21 of the vibrating body 2 is inserted into the drive connector part 45a. Therefore, the drive voltage from the drive circuit 40 is supplied to the power supply flexible part 21 via the drive signal wiring part 45a-1 of the relay part 45 and the drive connector part 45a, and drives the vibrating body 2.

[0047] The encoder flex 37b of the encoder 37 is inserted into the sensor connector 45b. Therefore, an encoder power signal from the drive circuit 40 is supplied to the encoder flex 37b via the sensor signal wiring section 45b-1 of the relay section 45 and the sensor connector 45b, driving the sensor section 37a. In addition, a displacement information (or position information) signal from the sensor section 37a is sent to the drive circuit 40 via the relay section 45.

[0048] The drive signal wiring section 45a-1 and the sensor signal wiring section 45b-1 are provided in different regions without crossing each other within the relay section 45. This reduces the influence of noise from the high-voltage drive signal on the encoder position signal.

[0049] Here, "provided in different regions" does not necessarily mean that they do not intersect on the same plane of the relay section. For example, if the relay section has a multi-layer structure, it also includes being provided so that there is no region where the drive signal wiring section 45a-1 and the sensor signal wiring section 45b-1 intersect when viewed from the plane where the drive connector section 45a and the sensor connector section 45b are provided.

[0050] The drive circuit 40 is also provided on the same base 30 as the drive unit 1 and the encoder 37, and is disposed at a short distance. Furthermore, the power supply flexible unit 21 and the encoder flexible unit 37b are fixed to the relay unit 45. This prevents the power supply flexible unit 21 and the encoder flexible unit 37b from getting close to each other, even if the vibration actuator 100 is moved when installed on a fixed base (not shown), and reduces the effect of the drive signal on the encoder position signal.

[0051] As a result, the position signal of the encoder becomes less susceptible to the influence of the drive signal of the vibration actuator 100 and becomes a stable signal with less noise. This improves the accuracy of detecting the position of the vibration actuator 100, making it possible to achieve highly accurate driving.

[0052] (Means of communication) The communication unit 41 is preferably configured with a USB connector, which is a universal serial bus, and is connected to a personal computer (external device, not shown) via a USB cable. In this embodiment, a C connector, a so-called Type-C connector, is used.

[0053] A control signal is transmitted from the personal computer to the communication unit 41 via a USB cable, and a drive voltage for the drive circuit 40 is supplied to the communication unit 41 via the USB cable.

[0054] The voltage supplied from the personal computer is 5 V, which is boosted by the transformer unit 43 of the drive circuit 40, and a voltage of approximately 100 Vpp to 400 Vpp is applied to the vibrating body 2. The current supplied from the personal computer is approximately 1 A to 3 A, and a power of 5 W to 15 W can be supplied to the vibrating body 2.

[0055] Therefore, it is possible to supply the communication unit 41 with enough power to drive the vibration actuator 100. In other words, the communication unit 41 is a communication means capable of receiving power and electrical signals, which are control signals, from a personal computer, which is an external device. Therefore, compared to conventional cases in which the vibration actuator 100 is driven using a power supply device and a personal computer, it is possible to drive the vibration actuator 100 using only the personal computer, which makes it possible to save space and reduce costs for the entire device.

[0056] Furthermore, a dedicated cable for connecting the power supply and the drive circuit is no longer necessary, and the vibration actuator 100 can be easily driven using only a general-purpose USB cable. Furthermore, the user of the vibration actuator 100 can drive the vibration actuator 100 simply by plugging and unplugging the USB cable, without having to plug and unplug the power supply flexible part 21 and the encoder flexible part 37b. This makes it possible to prevent damage caused by plugging and unplugging the power supply flexible part 21 and the encoder flexible part 37b, and allows the vibration actuator 100 to be driven stably.

[0057] Furthermore, since the drive circuit 40 can receive power and electrical signals using only one communication unit 41, one connector can be eliminated compared to when two connectors are provided and power and electrical signals are input separately, thereby enabling the size of the drive circuit 40 to be reduced.

[0058] The drive circuit 40 is arranged so that the USB cable can be inserted and removed in the Y direction, which is perpendicular to the X direction, which is the drive direction of the vibration actuator 100. This prevents interference with the object to be driven when the USB cable is inserted and removed. Note that the USB cable may also be arranged so that it can be inserted and removed in the Z direction, which is perpendicular to the X direction.

[0059] [Second embodiment] As a second embodiment, an example of the configuration of a vibration-type actuator having a different configuration from that of the first embodiment will be described with reference to Figures 6 and 7. This embodiment differs from the structure shown in Figure 1 in that the drive unit 200 has a configuration in which two vibrating bodies 102 sandwich a contact body 110, as shown in Figures 6 and 7. The other elements of this embodiment are the same as those corresponding to the first embodiment described above, and therefore the last two digits of the figure numbers are the same and their explanations will be omitted.

[0060] Fig. 6(a) shows a perspective view of the schematic configuration of the vibration actuator 200 of this embodiment as seen from the communication unit 141 side, and Fig. 6(b) shows a perspective view as seen from the relay unit 145 side. Fig. 7 is a partial exploded perspective view of the drive unit 101.

[0061] The vibration actuator 200 has a configuration in which a contact body 110 is sandwiched between a vibrating body 102 held by a lower support member 107-1 (support member) and a vibrating body 102 held by an upper support member 107-2 (support member). Each longitudinal end of the contact body 110 is fixed to a contact body holder 123 via a vibration-damping rubber 123a. The vibration-damping rubber 123a is made of butyl rubber, silicone rubber, or the like, which has high vibration-damping performance, and suppresses the generation of unnecessary vibrations in the contact body 110 while the vibration actuator 200 is operating, thereby suppressing the generation of abnormal noise and preventing a decrease in output. Each axial end of the guide bar 133 is fixed to the contact body holder 123.

[0062] The drive unit mounting portion 131 of the base 130 is fixed with adhesive, adhesive tape, or the like so that the scale 136 is approximately parallel to the X-axis direction with the contact body 110. The drive unit 101 is formed by connecting the contact body holding portion 123, the base 120, and the drive unit mounting portion 131 with screws, or the like.

[0063] A through-hole portion 107-2c provided in the upper support member 107-2 is slidably fitted onto the guide bar 133. As a result, the upper support member 107-2 is guided in the axial direction (X-axis direction) of the guide bar 133, which is a guide member, and is movable relative to the contact body 110.

[0064] The lower support member 107-1 is positioned relative to the upper support member 107-2 by engagement of connection pins 107-1b provided on the lower support member 107-1 with connection receptacles 107-2b provided on the upper support member 107-2. Therefore, the lower support member 107-1 and the upper support member 107-2 are guided along the guide bar 133 and are movable integrally. The contact body 110 and the guide bar 133 are provided so as to be approximately parallel to the X-axis direction. A spherical output mounting portion 134a is provided on the top of the upper support member 107-2, and is connected to an object to be driven by the vibration actuator 200 to transmit a driving force.

[0065] The tension coil spring 125 is suspended between a spring bearing provided on the lower support member 107-1 and a spring bearing provided on the upper support member 107-2, and draws the lower support member 107-1 and the upper support member 107-2 together. This maintains a state in which the tip 105a of the protrusion 105 of the vibrating body 102, which is held by the lower support member 107-1 and the upper support member 107-2, is in pressure contact with the contact body 110. Note that the means for connecting the lower support member 107-1 and the upper support member 107-2 so as to draw them together is not limited to the tension coil spring 125, and may be rubber, a conical coil spring, or the like.

[0066] The power supply flexible cables of the vibrating bodies 102 held by the lower support member 107-1 and the upper support member 107-2 are inserted into and fixed to the connecting connectors of the connecting flexible cable 121. The connecting flexible cable 121 applies AC signals such that the elliptical motions approximately in the ZX plane generated by the vibrating bodies 102 held by the lower support member 107-1 and the vibrating bodies 102 held by the upper support member 107-2 are in opposite directions. Therefore, the two vibrating bodies 102 arranged opposite to each other with respect to the contact body 110 can drive the contact body 110 in the same direction. Furthermore, since the connecting flexible cable 121 moves integrally with the movement of the vibrating bodies in the X direction, a U-turn portion is formed, and the connecting flexible cable 121 achieves stable drive in the X direction without interfering with other components.

[0067] With the above configuration, when the vibrating body 102 is driven, the vibrating body 102, the holding member 106, the lower support member 107-1, the upper support member 107-2 and the tension coil spring 125 are driven integrally in the axial direction of the guide bar 133.

[0068] The encoder 137 is provided on the lower support member 107-1 so that the sensor unit 137a is disposed at a position facing the scale 136 in the Z direction. A U-turn portion is formed in the encoder flex 137b of the encoder 137, and the encoder flex 137b achieves stable drive in the X direction without interfering with other components. In this embodiment as well, a reflective optical sensor having a light-emitting element and a light-receiving element is used as the sensor unit 137a.

[0069] Next, the peripheral structure of the drive circuit 140 that generates the drive voltage to be applied to the vibrating body 102 will be described with reference to FIG.

[0070] A drive circuit 140, a relay section 145, and a cover section 146 are disposed on the circuit mounting section 132 of the base .

[0071] As in the first embodiment, the drive circuit 140 includes a communication section 141, a flexible connector section 142, and a transformer section 143, and a relay section 145 is inserted into the flexible connector section 142.

[0072] The relay section 145 includes a drive connector section 145a and a sensor connector section 145b, and a connecting flexible cable 121, to which the two power supply flexible cables of the vibrating body 2 are connected, is inserted into the drive connector section 145a. Therefore, the drive voltage from the drive circuit 140 passes through the relay section 145 and the connecting flexible cable 121 and ultimately drives the two vibrating bodies 102.

[0073] The encoder flex 137b of the encoder 137 is inserted into the sensor connector portion 145b. Therefore, an encoder power signal from the drive circuit 140 is supplied to the encoder flex 137b via the relay portion 145 to drive the sensor portion 137a. In addition, a signal of displacement information (or position information) from the sensor portion 137a is sent to the drive circuit 140 via the relay portion 145.

[0074] The wiring area for the drive signal and the wiring area for the sensor signal wired within the relay unit 145 are provided in different areas without intersecting, as in the first embodiment. This makes it possible to reduce the influence of noise from the high-voltage drive signal on the encoder position signal. The drive circuit 140 is also provided on the same base 130 as the drive unit 100, and is disposed at a close distance. Furthermore, the connecting flexible unit 121 and the encoder flex 137b are fixed to the relay unit 145. This prevents the connecting flexible unit 121 and the encoder flex 137b from getting close to each other, even if the vibration actuator 200 is moved when installed on a fixed base (not shown), and makes it possible to reduce the influence of the drive signal on the encoder position signal.

[0075] As a result, in this embodiment as well, the position signal of the encoder is less susceptible to the influence of the drive signal of the vibration actuator 200 and is a stable signal with less noise. This improves the accuracy of detecting the position of the vibration actuator 200, making it possible to achieve highly accurate driving.

[0076] The communication unit 141 is configured with a connector for a USB, which is a universal serial bus, and is connected to a personal computer (external device) (not shown) via a USB cable.

[0077] A control signal is communicated from the personal computer to the communication unit 141 via a USB cable, and a drive voltage for the drive circuit 140 is supplied to the communication unit 141 via the USB cable. Therefore, in this embodiment as well, the vibration actuator 200 can be driven using only a personal computer, allowing for space-saving and cost-effectiveness of the entire device. Furthermore, the vibration actuator 200 can be easily driven using only a general-purpose USB cable, and because there is no need to insert or remove the connecting flexible cable 121 or the encoder flexible cable 137b, damage to the flexible cables can be prevented, and the vibration actuator 200 can be driven stably.

[0078] The drive circuit 140 is arranged so that the USB cable can be inserted and removed in the Y direction, which is perpendicular to the X direction, which is the drive direction of the vibration actuator 100. This prevents interference with the object to be driven when the USB cable is inserted and removed. Note that the USB cable may also be arranged so that it can be inserted and removed in the Z direction, which is perpendicular to the X direction.

[0079] [Third embodiment] In the third embodiment, the configuration of a microscope 400 equipped with an XY stage will be described as an example of an optical or electronic device equipped with a vibration type actuator according to the present invention, with reference to Fig. 8. Fig. 8 is a perspective view showing a schematic configuration of a microscope 400 (stage device) equipped with a vibration type actuator according to the present invention.

[0080] The microscope 400 has an imaging unit 410 incorporating an imaging element (not shown) and an optical system (optical element), and an automatic stage 430. The automatic stage 430 has a base, a first vibration type actuator (not shown) and a second vibration type actuator (not shown) provided on the base, and a stage 420 provided on the base and movable within the XY plane. The first vibration type actuator and the second vibration type actuator each use the vibration type actuator 100 of the first embodiment or the second embodiment.

[0081] The first vibration type actuator is used as a driving device that drives a stage 420, which is an example of a member, in the X direction of the stage 420. The first vibration type actuator is also arranged so that the direction of relative movement between the vibrating body 2 and a part of the contact body 10 coincides with the X direction of the stage 420.

[0082] The second vibration type actuator is used as a drive device that drives a stage 420, which is an example of a component, in the Y direction of the stage 420. The second vibration type actuator is arranged so that the direction of relative movement between the vibrating body 2 and a part of the contact body 10 coincides with the Y direction of the stage 420.

[0083] An object to be observed is placed on the top surface of the stage 420, and a magnified image is captured by the imaging unit 410. When the observation range is wide, the first vibration type actuator and the second vibration type actuator are used to drive the automatic stage 430 to move the stage 420 in an in-plane direction, thereby moving the object to be observed, thereby changing the imaging area. Images captured in different imaging areas are combined by image processing using a computer (not shown), making it possible to obtain a single high-resolution image with a wide observation range.

[0084] Furthermore, at least one of the imaging element and the optical element may be moved by a vibration type actuator (not shown).

[0085] While the present invention has been described in detail above based on preferred embodiments thereof, the present invention is not limited to these specific embodiments, and various forms within the scope of the gist of the present invention are also included in the present invention. Furthermore, each of the above-described embodiments merely represents one embodiment of the present invention, and each embodiment can be combined as appropriate.

[0086] The disclosure of this embodiment includes the following configurations and methods.

[0087] (Configuration 1) a vibrating body having an electromechanical energy conversion element; a contact body that is in contact with the vibrating body and is provided so as to be movable relative to the vibrating body; a control unit that inputs an electrical signal to the vibrator; a detector for detecting a relative position between the vibrating body and the contact body, A vibration type actuator further comprising a base supporting the vibrating body, the contact body, the detector, and the control unit.

[0088] (Configuration 2) 2. The vibration actuator according to configuration 1, wherein a wiring portion of the detector is disposed on the base.

[0089] (Configuration 3) the base includes an output unit that outputs the relative movement and a guide unit that guides the output unit in a direction of the relative movement, 3. The vibration actuator according to configuration 1 or 2, wherein a detected object for detecting the relative position by the detector is provided in the output section.

[0090] (Configuration 4) 4. The vibration actuator according to any one of configurations 1 to 3, wherein the control unit has a communication means capable of receiving power and an electric signal from an external device.

[0091] (Configuration 5) a vibrating body having an electromechanical energy conversion element; a contact body that is in contact with the vibrating body and is provided so as to be movable relative to the vibrating body; a control unit that inputs an electric signal to the vibrator, a base supporting the vibrating body, the contact body, and the control unit; A vibration type actuator characterized by having a communication means capable of receiving power and electrical signals from an external device.

[0092] (Configuration 6) The vibration type actuator according to configuration 5, further comprising a detector for detecting the relative position between the vibrating body and the contact body.

[0093] (Configuration 7) 7. The vibration actuator according to configuration 5 or 6, wherein a wiring portion of the detector is disposed on the base.

[0094] (Configuration 8) a relay unit connected to the control unit, The vibration actuator according to any one of configurations 1 to 7, characterized in that the relay section has a drive connector section that connects to the wiring section of the vibrating body and a sensor connector section that connects to the wiring section of the detector.

[0095] (Configuration 9) 9. The vibration type actuator according to configuration 8, wherein in the relay section, the wiring area of the drive connector section and the wiring area of the sensor connector section do not intersect.

[0096] (Configuration 10) The components and 10. An electronic device comprising the vibration actuator according to any one of configurations 1 to 9 for driving the member.

[0097] (Configuration 11) a vibration type actuator according to any one of configurations 1 to 9; An optical device comprising at least one of an optical element and an imaging element driven by the vibration type actuator. [Explanation of symbols]

[0098] 2 vibrating body 3 Elastic bodies 4. Piezoelectric element (electromechanical energy conversion element) 6 Retaining member 7 Support member 10 Contact body 30 Foundations 32 Circuit mounting part 36 scale 37 Encoder 40 Drive circuit 41 Communications Department 45 Relay Section

Claims

1. a vibrating body having an electromechanical energy conversion element; a contact body that is in contact with the vibrating body and is provided so as to be movable relative to the vibrating body; a control unit that inputs an electrical signal to the vibrator; a detector for detecting a relative position between the vibrating body and the contact body, A vibration type actuator further comprising a base supporting the vibrating body, the contact body, the detector, and the control unit.

2. 2. The vibration actuator according to claim 1, wherein a wiring portion of the detector is disposed on the base.

3. the base includes an output unit that outputs the relative movement and a guide unit that guides the output unit in a direction of the relative movement, 2. The vibration actuator according to claim 1, wherein a detected object for detecting the relative position by the detector is provided in the output section.

4. 2. The vibration actuator according to claim 1, wherein the control unit has a communication means capable of receiving power and electrical signals from an external device.

5. a vibrating body having an electromechanical energy conversion element; a contact body that is in contact with the vibrating body and is provided so as to be movable relative to the vibrating body; a control unit that inputs an electric signal to the vibrator, a base supporting the vibrating body, the contact body, and the control unit; A vibration type actuator characterized by having a communication means capable of receiving power and electrical signals from an external device.

6. 6. The vibration type actuator according to claim 5, further comprising a detector for detecting the relative position between the vibrating body and the contact body.

7. 6. The vibration actuator according to claim 5, wherein a wiring portion of the detector is disposed on the base.

8. a relay unit connected to the control unit, 6. The vibration type actuator according to claim 5, wherein the relay section has a drive connector section connected to a wiring section of the vibrator, and a sensor connector section connected to a wiring section of the detector.

9. 9. The vibration type actuator according to claim 8, wherein in the relay section, a wiring area of the drive connector section and a wiring area of the sensor connector section do not intersect.

10. The components and An electronic device comprising the vibration actuator according to claim 1 for driving the member.

11. A vibration type actuator according to any one of claims 1 to 9; An optical device comprising at least one of an optical element and an imaging element driven by the vibration type actuator.

Images