Detection method for frame holding state and processing device

Abstract

To provide a detection method for a frame holding state.SOLUTION: The detection method for a frame holding state includes: a holding mechanism activation step of activating a holding mechanism so that the holding mechanism clamps and holds a portion of a frame; a light irradiation step of irradiating the holding mechanism with light from an irradiating unit of a measuring unit that has the irradiating unit for irradiating the light and a receiving unit for receiving the light; a light reception step of receiving reflected light of the light from the irradiating unit with which the holding mechanism is irradiated and measuring an amount of light received; and a determination step of determining the holding state by determining whether the amount of light received is within a range specified by a threshold value.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to a method and a processing device for detecting the state of a frame being held by a holding mechanism. [Background technology]

[0002] Wafers made of silicon, for example, are used in the manufacturing process of device chips used in electronic devices such as mobile phones and PCs (Personal Computers). The wafers are subjected to various processes using various processing devices (cutting devices, laser processing devices, and other processing devices, and cleaning devices), and device chips are manufactured from the wafers.

[0003] When a wafer is processed by a processing device, the wafer is supported by a frame for ease of handling (transporting, holding, etc.) The frame is an annular member made of a metal such as SUS (stainless steel), and has a circular opening at the center of the frame that penetrates the frame in the thickness direction.

[0004] A film is provided on the frame side so as to cover the opening of the frame. A wafer is then placed on the film exposed inside the opening of the frame, and a frame unit is formed by integrating the wafer, film, and frame. The processing device includes a table that supports the frame unit (wafer), a holding mechanism that fixes the frame unit (wafer) to the table, and a processing unit that processes the wafer. The wafer is carried into the processing device together with this frame unit and processed by the processing device.

[0005] For example, when a wafer is cleaned by a cleaning device, a frame unit including the wafer is placed on a table, and the frame is held by a holding mechanism provided in the cleaning device, thereby fixing the frame unit to the table. The holding mechanism is composed of a clamp or the like, and holds a part of the frame by clamping it. With the frame unit fixed to the table by the holding mechanism, the table is rotated by a rotation drive mechanism provided in the cleaning device, thereby rotating the frame unit. In this state, a cleaning liquid is supplied toward the wafer from a nozzle of a cleaning mechanism (processing unit) provided above the frame unit. This cleans the wafer. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Publication No. 2023-115438 Summary of the Invention [Problem to be solved by the invention]

[0007] However, there are cases where the holding mechanism is unable to hold the frame properly due to various reasons. For example, the holding mechanism may be unable to clamp the frame properly due to deviations in the position of the frame unit placed on the table caused by variations in the transport operation when transporting the frame unit, or deviations in the operation timing when multiple holding members hold the frame. There are also cases where the holding mechanism is unable to clamp the frame properly due to a malfunction of the holding mechanism, etc.

[0008] If the table starts to rotate while the frame is not properly held by the holding mechanism, the frame unit may fly off during rotation, potentially damaging the wafer or cleaning mechanism. For this reason, when the frame unit is carried into the processing apparatus and fixed to the table by the holding mechanism, it is necessary to detect whether the frame is properly held by the holding mechanism.

[0009] In view of the above circumstances, an object of the present invention is to provide a method and processing device for detecting the holding state of a frame, which are capable of detecting the holding state of a frame by a holding mechanism. [Means for solving the problem]

[0010] According to one aspect of the present invention, there is provided a method for detecting the holding state of a frame, which detects the holding state when a ring-shaped frame is held by a holding mechanism that clamps and holds the frame, the method comprising: a holding mechanism activation step of activating the holding mechanism so that the holding mechanism clamps and holds a portion of the frame; a light irradiation step of irradiating light from an irradiation unit of a measurement unit that has an irradiation unit that irradiates light and a light receiving unit that receives the light onto the holding mechanism; a light receiving step of receiving the reflected light of the light irradiated from the irradiation unit onto the holding mechanism by the light receiving unit and measuring the amount of light received; and a determination step of determining the holding state by determining whether the amount of light received is within a range specified by a threshold value.

[0011] Preferably, the frame has a front surface and a back surface opposite the front surface, the holding mechanism has a first member that contacts the front surface and a second member that contacts the back surface, and the frame can be clamped between the first and second members, the holding mechanism operation step has a first step in which the frame is placed on the second member so that the second member contacts the back surface, and a second step in which the first member is placed on the surface so that the first member contacts the front surface, and in the light irradiation step, the irradiation unit irradiates the light onto the first member of the holding mechanism.

[0012] Preferably, in the holding mechanism actuating step, the holding mechanisms contact the frame so that a plurality of the holding mechanisms arranged along the circumferential direction of the frame clamp the frame.

[0013] Preferably, the method further includes, before the light irradiation step, a rotational movement initiation step of initiating relative rotational movement between the holding mechanism and the measurement unit along the circumferential direction, wherein in the light irradiation step, the irradiation unit sequentially irradiates the light onto each of the plurality of holding mechanisms, and in the light receiving step, the light receiving unit sequentially receives the reflected light reflected by each of the plurality of holding mechanisms and sequentially measures the amount of received reflected light, and in the determination step, the holding state of the frame by each of the holding mechanisms is individually determined.

[0014] According to another aspect of the present invention, there is provided a processing apparatus for processing a workpiece supported by an annular frame via a film attached to cover an opening of the annular frame, the processing apparatus comprising: a holding mechanism for clamping a portion of the frame to hold the frame; a processing unit for processing the workpiece supported by the frame held by the holding mechanism; a measurement unit having an irradiation section for irradiating light onto the holding mechanism and a light receiving section for receiving the reflected light of the light irradiated from the irradiation section onto the holding mechanism and measuring the amount of received light; a rotational movement mechanism for relatively rotating and moving the holding mechanism and the measurement unit along the circumferential direction of the frame; and a controller for controlling the holding mechanism, the measurement unit, and the rotational movement mechanism, the controller having a judgment section for judging the holding state of the frame by the holding mechanism based on whether the amount of light received of the light irradiated from the irradiation section of the measurement unit, reflected by the holding mechanism, and received by the light receiving section of the measurement unit is within a range defined by a threshold value.

[0015] Preferably, the holding mechanism has a first member that contacts the surface of the frame and a second member that contacts the back surface of the frame opposite the surface, the frame being clamped between the first member and the second member, and the irradiation unit irradiates the light onto the first member.

[0016] Preferably, the frame is held by a plurality of the holding mechanisms arranged along the circumferential direction of the frame so as to sandwich the frame.

[0017] Preferably, the controller rotates the holding mechanism and the measurement unit relatively along the circumferential direction using the rotational movement mechanism, sequentially irradiates the light from the irradiation unit onto each of the plurality of holding mechanisms, sequentially receives the reflected light generated when the light is reflected by each of the plurality of holding mechanisms using the light receiving unit, sequentially measures the received amount of the reflected light, and individually determines the holding state of the frame by each of the holding mechanisms. [Effects of the Invention]

[0018] A method for detecting the holding state of a frame according to one aspect of the present invention includes a light irradiation step of irradiating light onto a holding mechanism that clamps and holds a part of the frame, a light receiving step of receiving the light reflected from the holding mechanism and measuring the amount of received light, and a determination step of determining the holding state by determining whether the amount of received light is within a range defined by a threshold value. This makes it possible to detect whether the holding mechanism is holding the frame properly. [Brief explanation of the drawings]

[0019] [Figure 1] FIG. 1 is a perspective view of a frame unit. [Figure 2] FIG. 2 is a cross-sectional view of the frame unit. [Figure 3] FIG. 3 is a perspective view of the processing device. [Figure 4] FIG. 4 is a cross-sectional view of the processing device. [Figure 5] FIG. 5 is a block diagram showing the functions of the measurement unit and the controller. [Figure 6] FIG. 6 is a flowchart showing a method for detecting the holding state of a frame. [Figure 7] FIG. 7 is a top view of the frame held by the holding mechanism. [Figure 8] FIG. 8 is a side view of a part of the holding mechanism and the frame unit when the frame is normally held by the holding mechanism (first normal example). [Figure 9]FIG. 9 is a graph showing the change in the amount of received light over time in the first normal example. [Figure 10] FIG. 10 is a side view of a part of the holding mechanism and the frame unit when the frame is not normally held by the holding mechanism (first abnormal example). [Figure 11] FIG. 11 is a graph showing the change over time in the amount of received light in the first abnormal case. [Figure 12] FIG. 12 is a side view of a part of the holding mechanism and the frame unit when the frame is not normally held by the holding mechanism (second abnormal example). [Figure 13] FIG. 13 is a graph showing the change over time in the amount of received light in the second abnormal case. [Figure 14] FIG. 14 is a graph showing the change over time in the amount of received light when the frame is normally held by the holding mechanism (second normal example). [Figure 15] FIG. 15 is a graph showing the change over time in the amount of received light when the frame is not normally held by the holding mechanism (third abnormal example). DETAILED DESCRIPTION OF THE INVENTION

[0020] Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. First, a frame to which a method for detecting the holding state of a frame according to this embodiment is applied will be described. FIG. 1 is a perspective view of a frame unit 21, and FIG. 2 is a cross-sectional view of the frame unit 21. As shown in FIGS. 1 and 2, the frame unit 21 is composed of a workpiece 11, a film 17, and a frame 19.

[0021] The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon. That is, the workpiece 11 is configured in a disk shape having a substantially circular first surface (front surface) 11a and a substantially circular second surface (back surface) 11b opposite to the first surface 11a. A notch 11c is formed in a part of the outer periphery (peripheral edge) of the workpiece 11 to indicate the crystal orientation of the workpiece 11.

[0022] However, the material and shape of the workpiece 11 are not limited to these. An orientation flat may be formed in place of the notch 11c in the workpiece 11. Furthermore, the notch 11c or the orientation flat may not be formed in the workpiece 11.

[0023] A plurality of planned division lines (streets) 13 are set in a grid pattern on the first surface 11a of the workpiece 11. Devices 15 such as ICs (Integrated Circuits) are formed in a plurality of regions separated by these planned division lines 13. The workpiece 11 is cut along the planned division lines 13 with a cutting blade or a laser beam, and is thereby divided into individual device chips, each having a device 15. However, the workpiece 11 does not necessarily have to have any devices formed thereon.

[0024] Furthermore, the workpiece 11 may be a package substrate such as a CSP (Chip Size Package) substrate or a QFN (Quad Flat Non-leaded package) substrate. For example, a package substrate is formed by mounting multiple device chips on a predetermined substrate and then covering and sealing the mounted device chips with a resin layer (mold resin). By cutting and dividing the package substrate using a cutting device or the like, multiple chips (packaged devices) each including multiple packaged device chips are manufactured.

[0025] Frame 19 is made of a metal material such as SUS or aluminum, and is configured as an annular member having an opening 19c in the center. Specifically, frame 19 has a substantially annular first surface 19a, a substantially annular second surface 19b opposite first surface 19a, and a substantially cylindrical opening 19c connected to both first surface 19a and second surface 19b.

[0026] Opening 19c has a width (diameter) larger than the width (diameter) of object to be processed 11 so as to accommodate object to be processed 11. However, the material, shape, and size of frame 19 are not limited to these.

[0027] A film 17 is attached to the second surface 19b of the frame 19 so as to cover the opening 19c. The film 17 is, for example, a laminate including a base material and an adhesive layer (glue layer) provided on the surface of the base material. The base material is made of a resin such as polyolefin, polyvinyl chloride, or polyethylene terephthalate, and the adhesive layer is made of an epoxy-based, acrylic-based, or rubber-based adhesive. The adhesive layer may be made of an ultraviolet-curing resin that hardens when irradiated with ultraviolet light.

[0028] However, the configuration of film 17 is not limited to these. For example, film 17 may be a sheet that does not have an adhesive layer and can be bonded to object 11 and frame 19 by thermocompression (thermocompression sheet).

[0029] The workpiece 11 is placed from the second surface 11b side toward the film 17 that is attached to the second surface 19b side of the frame 19 and exposed in the opening 19c, and the workpiece 11 is fixed to the film 17. By fixing the workpiece 11 to the film 17, a frame unit 21 is formed in which the workpiece 11, the film 17, and the frame 19 are integrated. The workpiece 11 is supported by the frame 19 in this manner.

[0030] Next, a processing device for processing the above-mentioned frame unit 21 will be described. Fig. 3 is a perspective view of the processing device 2, and Fig. 4 is a cross-sectional view of the table 4 and other components of the processing device 2. In this embodiment, a cleaning device will be used as an example of the processing device 2. Note that Fig. 3 shows a partial configuration of the processing device 2 in blocks. In Figs. 3 and 4, the direction along the X-axis (X-axis direction), the direction along the Y-axis (Y-axis direction), and the direction along the Z-axis (Z-axis direction) are perpendicular to one another.

[0031] 3 and 4, the processing device 2 has a substantially cylindrical case 14. The inside of the case 14 is a housing portion 14a that can house part of the configuration of the processing device 2.

[0032] As shown in Fig. 4, a support base 8 having a substantially disk-shaped portion is accommodated in the accommodation portion 14a of the case 14. The support base 8 has a substantially circular first surface (upper surface) 8a and a substantially circular second surface (lower surface) 8b opposite the upper surface 8a. A plurality of support pillars 10 are fixed to the upper surface 8a. The plurality of support pillars 10 are columnar members made of metal, resin, or the like, and are arranged at approximately equal intervals along the outer periphery of the upper surface 8a of the support base 8.

[0033] 4, a substantially disk-shaped support plate 12 is fixed to one end (upper end) of each of the multiple support columns 10. The support plate 12 is made of metal, resin, or the like, and has a substantially circular first surface (upper surface) 12a and a second surface (lower surface) 12b opposite to the first surface 12a.

[0034] As shown in FIGS. 3 and 4, a holding mechanism 6 is provided on the first surface 12a side of the support plate 12. The holding mechanism 6 is composed of two members (a first member 6a and a second member 6b). A plate-shaped support member 62 is fixed to the outer periphery of the support plate 12. The first member 6a is provided to the support member 62 via a rod-shaped connecting shaft 64. The first member 6a has a pressing portion 60 and can rotate around the connecting shaft 64 using the connecting shaft 64 as a rotation axis. By rotating around the connecting shaft 64, the first member 6a can move the pressing portion 60 in a direction approaching the first surface 12a of the support plate 12. The pressing portion 60 can also move in a direction away from the first surface 12a of the support plate 12.

[0035] A light reflecting portion 44 that reflects received light is provided on the upper surface of the first member 6a. The light reflecting portion 44 is, for example, a portion with extremely small irregularities, and reflects light better than the surrounding area. Alternatively, the light reflecting portion 44 is a member having a reflective surface that reflects light well, and is fixed to the upper surface of the first member 6a.

[0036] A second member 6b of the holding mechanism 6 is provided on the first surface 12a of the support plate 12. The second member 6b has a support portion 66. The support portion 66 comes into contact with the second surface 19b of the frame 19 and supports the frame 19.

[0037] The frame 19 constituting the frame unit 21 is placed on the second member 6b so that the second surface 19b contacts the support portion 66 of the second member 6b. In this state, the first member 6a is rotated to move the pressing portion 60 of the first member 6a in a direction approaching the first surface 12a of the support plate 12, whereby the pressing portion 60 contacts the first surface 19a of the frame 19. In this way, the first member 6a and the second member 6b sandwich a portion of the frame 19, and the holding mechanism 6 holds the frame 19.

[0038] In the processing apparatus 2 of this embodiment, four holding mechanisms 6 are arranged at approximately equal intervals along the circumferential direction of the frame 19. Note that two of the four holding mechanisms 6 are shown in Figures 3 and 4. However, the number of holding mechanisms 6 is not limited to four.

[0039] 4, the lower side of the support base 8 is connected to a rotational movement mechanism 16 such as a motor. Due to the rotational driving force generated by the rotational movement mechanism 16, the support base 8, the support column 10, and the support plate 12 that constitute the table 4 rotate around a rotation axis that is approximately parallel to a line that passes through the center of the support base 8 and the center of the support plate 12.

[0040] As shown in Fig. 4, the processing device 2 has a cover 18 that can cover almost the entire case 14. The cover 18 is connected to a movement mechanism (not shown) such as a ball screw, and moves in a direction approximately parallel to the Z axis by the driving force generated by the movement mechanism. However, the table 4, the case 14, and the rotational movement mechanism 16 may also be connected to a movement mechanism (not shown) such as a ball screw, and move in a direction approximately parallel to the Z axis by the driving force generated by the movement mechanism. It is sufficient that most of the table 4 and the case 14 are covered by the cover 18, and either the cover 18 or the table 4, the case 14, and the rotational movement mechanism 16 may move.

[0041] As shown in FIG. 3, the processing device 2 has a processing unit (liquid supply unit, cleaning unit) 20. The processing unit 20 includes a shaft 20a erected on the outside of a frame 19 held by the holding mechanism 6, arms 20b extending from the upper end of the shaft 20a along the first surface 12a of the support plate 12, and a nozzle (liquid supply nozzle, cleaning nozzle) 20c provided at the tip of the arms 20b. The shaft 20a and the arms 20b are pipe-shaped members having a flow path through which a liquid flows. The nozzle 20c is connected to a liquid supply source (not shown) that supplies cleaning liquid via the flow path of the shaft 20a and the arms 20b.

[0042] The processing unit 20 also includes a rotary drive source (not shown) that rotates the shaft portion 20a around the Z-axis direction. By operating the rotary drive source, the nozzle 20c can be swung above the frame 19. By operating the liquid supply source and the rotary drive source, the nozzle 20c is swung above the frame 19, and a cleaning fluid is sprayed from the nozzle 20c toward the first surface 11a of the workpiece 11 held by the frame 19. As the cleaning liquid, for example, a liquid such as pure water is used. Note that the processing unit 20 is not shown in FIG. 4.

[0043] The processing device 2 has a measurement unit 22. The measurement unit 22 has an irradiation section 24 that irradiates light 23 from a light source onto the holding mechanism 6, and a light receiving section 26 that receives reflected light 25 generated when the light 23 is reflected by the holding mechanism 6 (see FIG. 5). Note that the measurement unit 22 is not shown in FIG. 4. The measurement unit 22 is disposed above the support plate 12. The position of the measurement unit 22 is adjusted so that the light 23 emitted from the irradiation section 24 of the measurement unit 22 is irradiated onto the light reflecting section 44 of the first member 6a of the holding mechanism 6.

[0044] The processing device 2 has a display unit (display section, display device) 40. The display unit 40 is composed of various displays and displays information (processing conditions, processing status, etc.) related to the processing device 2 or the workpiece 11, as well as an operation screen, etc. For example, a display panel equipped with a touch panel is used as the display unit 40. In this case, the display unit 40 also functions as an input unit (input section, input device) for inputting information to the processing device 2, and an operator (worker) can input information to the processing device 2 by touch operation using the display unit 40. However, the input unit may also be an electronic device (mouse, keyboard, transceiver, etc.) provided independently of the display unit 40.

[0045] The processing device 2 has an alarm unit (alarm section, alarm device) 42 that notifies an operator of information. For example, an indicator light (warning light) is installed as the alarm unit 42, and when an abnormality occurs in the processing device 2 or the object to be processed 11, the indicator light lights up or flashes to signal an error. However, there is no limitation on the type of alarm unit 42. For example, the alarm unit 42 may be a speaker or the like that notifies the operator of information by sound or voice.

[0046] The processing device 2 also has one or more transport mechanisms (not shown) that can transport the above-mentioned frame unit 21 to the table 4 or the like. The transport mechanism is, for example, a robot arm. The frame unit 21 is carried onto the table 4 by this transport mechanism and placed on the first surface 12a of the support plate 12 that constitutes the table 4 so that the first surface 11a of the workpiece 11 is exposed. The frame unit 21 is also carried out from the table 4 to the outside by the transport mechanism.

[0047] Furthermore, the processing device 2 includes a controller (control unit, control section, control device) 28 that controls the processing device 2. The controller 28 is connected to each component (holding mechanism 6, rotational movement mechanism 16, cover 18, processing unit 20, measurement unit 22, display unit 40, notification unit 42, transport mechanism, etc.) that constitutes the processing device 2. The controller 28 is configured by a computer including, for example, a processing device 30 (see FIG. 5) such as a CPU (Central Processing Unit), and a storage device 32 (see FIG. 5) that is a main storage device such as a DRAM (Dynamic Random Access Memory) and / or an auxiliary storage device such as a hard disk drive or flash memory.

[0048] The functions of the controller 28 are realized by the processing device 30 operating in accordance with a program (software) stored in the storage device 32. However, the controller 28 may also be realized solely by hardware.

[0049] Fig. 5 is a block diagram showing the functions of the measurement unit 22 and the controller 28. Fig. 5 also shows a side view of a portion of the first member 6a of the holding mechanism 6, and a block diagram of the display unit 40 and the notification unit 42.

[0050] The irradiation section 24 of the measurement unit 22 has a light source such as an LED that emits light. The light emitted by the light source of the irradiation section 24 is guided to the outside of the measurement unit 22 via an optical fiber or the like, and is irradiated toward the light reflecting section 44 of the first member 6a that constitutes the holding mechanism 6 and reflected by the light reflecting section 44. The reflected light 25 reflected by the light reflecting section 44 reaches the light receiving surface of the light receiving section 26 and is received by the light receiving section 26.

[0051] The light receiving unit 26 includes a photoelectric conversion unit that generates a signal (received light amount signal) corresponding to the amount of light received by the light receiving unit 26 (received light amount). The photoelectric conversion unit has a photoelectric conversion element that converts light into an electric signal (voltage). The photoelectric conversion element is, for example, a CCD (Charge Coupled Device) sensor or a CMOS (Complementary Metal Oxide Semiconductor) sensor. The photoelectric conversion element generates a received light amount signal corresponding to the amount of light received by the light receiving unit 26. The received light amount signal generated by the photoelectric conversion unit is output to the controller 28.

[0052] In this embodiment, the controller 28 and the measurement unit 22 detect the holding state of the frame 19. Specifically, the controller 28 controls the measurement unit 22 to measure the amount of reflected light 25 received by the light receiving section 26 of the measurement unit 22, and determines whether the holding mechanism 6 is holding the frame 19 properly based on this amount of received light. This makes it possible to avoid continuing the processing of the workpiece 11 in a state where the frame 19 is not being held properly by the holding mechanism 6, and to avoid damage to the workpiece 11 and the processing device 2.

[0053] A specific example of a method for detecting the holding state of a frame according to this embodiment will be described below. FIG. 6 is a flowchart showing a method for detecting the holding state of frame 19. In this embodiment, in a holding mechanism activation step S1, the holding mechanism 6 holds frame 19. Next, in a light irradiation step S2, the irradiation unit 24 of the measurement unit 22 irradiates light 23 onto the first member 6a of the holding mechanism 6. Thereafter, in a light receiving step S3, the light receiving unit 26 receives reflected light 25 reflected from the first member 6a. Then, in a determination step S4, the holding state of frame 19 is determined based on the amount of reflected light 25 received by the light receiving unit 26 in the light receiving step S3. Each step will be described in detail below.

[0054] In the holding mechanism operation step S1, the frame 19 constituting the frame unit 21 is held by the holding mechanism 6. Specifically, first, a transport unit (not shown) transports the frame unit 21 to the table 4. At this time, the frame 19 is placed on the second member 6b of the holding mechanism 6 so that the second surface 19b of the frame 19 contacts the support portion 66 of the second member 6b (first step). Next, the first member 6a rotates about the connecting shaft 64 as the rotation axis so that the pressing portion 60 of the first member 6a contacts the first surface 19a of the frame 19 (second step). As a result, the frame 19 is clamped and held by the holding mechanism 6.

[0055] Next, in a light irradiation step S2, the rotational movement mechanism 16 rotates the table 4 about the rotation axis, thereby relatively moving the holding mechanisms and the measurement unit along the circumferential direction of the frame. Then, while continuing the rotational movement, the irradiation unit 24 of the measurement unit 22 sequentially irradiates light 23 toward the four holding mechanisms 6 and the first surface 19a of the frame 19. Furthermore, in a light receiving step S3, reflected light 25 reflected from the four holding mechanisms 6 and the first surface 19a of the frame 19 is sequentially received by the light receiving unit 26 of the measurement unit 22. The amount of reflected light 25 received by the light receiving unit 26 is input to the determination unit 34 of the controller 28 (see FIG. 5). The rotational movement speed of the table 4 by the rotational movement mechanism 16 is, for example, 10 rpm or more and 100 rpm or less, and is typically 30 rpm. The rotational movement of the table 4 by the rotational movement mechanism 16 may be started in the light irradiation step S2, or may be started in a step (rotational movement start step) that is set before the light irradiation step S2 and is independent of the light irradiation step S2.

[0056] Fig. 7 is a top view of the frame 19. In Fig. 7, the portion onto which light 23 is irradiated from the irradiation portion 24 of the measurement unit 22 is indicated by a dotted line A. As shown in Fig. 7, the light 23 is irradiated onto four light reflecting portions 44a, 44b, 44c, and 44d provided on each of the first members 6a of the four holding mechanisms 6. The material, area, surface roughness, and the like of the light reflecting portions 44a, 44b, 44c, and 44d are adjusted so that the amount of light reflected by each of the light reflecting portions 44a, 44b, 44c, and 44d is greater than that of other portions and so that light is reflected from each of them in a similar manner.

[0057] Fig. 8 is a side view of the holding mechanism 6 and a portion of the frame unit 21 when the frame 19 is normally held by the holding mechanism 6 (first normal example). Fig. 8 shows the holding mechanism 6 having the light reflecting portion 44b, but it is assumed that the other three holding mechanisms 6 also normally hold the frame 19. Fig. 9 is a graph showing the change in the amount of received light over time in the first normal example.

[0058] 8, when the frame 19 is properly held by the holding mechanism 6, the light 23 is properly reflected by the light reflecting portions 44a, 44b, 44c, and 44d. In this case, as shown in the graph of FIG. 9, peaks B1, B2, B3, and B4, which represent relatively large amounts of received light, are observed based on the reflected light 25 reflected by the light reflecting portions 44a, 44b, 44c, and 44d.

[0059] 9 shows the range of the amount of received light within which it can be determined that frame 19 is properly held by holding mechanism 6. In FIG. 9, the lower limit (threshold) C1 of this range is indicated by a dashed line, and the upper limit (threshold) C2 of this range is indicated by a dashed line. That is, in FIG. 9, the lower limit of the range defined by the threshold of the amount of received light is indicated by C1, and the upper limit of the range defined by the threshold of the amount of received light is indicated by C2. As shown in FIG. 9, when frame 19 is properly held by holding mechanism 6, the amounts of received light at peaks B1, B2, B3, and B4 all fall within the range defined by the threshold (greater than or equal to C1 and less than or equal to C2).

[0060] FIG. 10 is a side view of the holding mechanism 6 and a portion of the frame unit 21 when the frame 19 is not properly held by the holding mechanism 6 (first abnormality example), and FIG. 11 is a graph showing the change in the amount of received light over time in the first abnormality example. FIG. 10 illustrates a state in which the first member 6a provided with the light reflecting portion 44b is not in contact with the first surface 19a of the frame 19. The other first members 6a provided with the light reflecting portions 44a, 44c, and 44d are assumed to be in proper contact with the frame 19. In this case, the light 23 irradiated from the irradiation portion 24 of the measurement unit 22 is not reflected by the light reflecting portion 44b, and therefore the magnitude of peak B2 is smaller than the other peaks B1, B3, and B4. Therefore, the amount of received light at peak B2 is less than the lower limit C1 of the range defined by the threshold.

[0061] FIG. 12 is a side view of a portion of the holding mechanism 6 and the frame unit 21 when the frame 19 is not properly held by the holding mechanism 6 (second abnormal example), and FIG. 13 is a graph showing the change in the amount of received light over time in the second abnormal example. FIG. 12 shows a state in which the pressing portion 60 of the first member 6a provided with the light reflecting portion 44b is in contact with the first surface 19a of the frame 19, but the pressing portion 60 side of the first member 6a is lower than in the normal holding state. The first member 6a provided with the other light reflecting portions 44a, 44c, and 44d is in normal contact with the frame 19. In this case, the amount of light 23 irradiated from the irradiation portion 24 of the measurement unit 22 to the light reflecting portion 44b and reflected thereby reaches the light receiving portion is less than the amount of light reflected by the light reflecting portions 44a, 44c, and 44d of the first member 6a that is properly holding the frame 19. That is, the magnitude of peak B2 is smaller than the other peaks B1, B3, and B4. Therefore, the maximum value of peak B2 is less than the lower limit C1 of the range defined by the threshold value of the amount of received light.

[0062] In this way, when the frame 19 is not held properly by the holding mechanism 6, the amount of reflected light 25 received by the light receiving unit 26 of the measurement unit 22 decreases. Therefore, the amount of received light that can be used to determine whether the frame 19 is being held properly is defined in advance as a threshold, and by comparing the measured amount of received light with the threshold, it is possible to determine whether the frame 19 is being held properly by the holding mechanism 6. The threshold may be input into the storage device 32 in advance, or the amount of received light (measured value) when the frame 19 is being held properly may be acquired and the threshold may be determined based on this measurement. Furthermore, it is preferable that the threshold be defined taking into consideration the performance of the light receiving unit 26 (error in the amount of received light), etc.

[0063] In determination step S4, the measurement value of the amount of received light input to determination unit 34 is compared with the threshold value of the amount of received light stored in threshold value storage unit 38 of storage device 32. If the measurement value is within the range defined by the threshold value, it is determined that the holding state of frame 19 is normal, and this flow ends. On the other hand, if the measurement value is not within the range defined by the threshold value, it is determined that the holding state of frame 19 is abnormal. In this case, notification step S5 is executed.

[0064] Specifically, in the notification step S5, the notification control unit 36 outputs a control signal to the display unit 40, causing the display unit 40 to display information (such as a message) indicating that the frame 19 is not being held properly. The notification control unit 36 also outputs a control signal to the notification unit 42, causing the notification unit 42 to light up or blink. This notifies the operator that the frame 19 is not being held properly.

[0065] A different normal example from the first normal example described above will now be described. Fig. 14 is a graph showing the change over time in the amount of received light when frame 19 is normally held by holding mechanism 6 (second normal example). The graph shown in Fig. 14 shows peaks D1, D2, D3, and D4 based on the light reflected by first surface 19a of frame 19. As such, depending on the material of frame 19, light may be reflected well by frame 19, resulting in peaks D1, D2, D3, and D4 of a certain magnitude.

[0066] 14, the values of the received light amounts of peaks D1, D2, D3, and D4 may fall between the set lower limit C1 and upper limit C2 of the threshold. In this case, in order to determine whether the frame 19 is properly held by the holding mechanism 6, a preliminary determination may be made as to whether the measured value of the received light amount input to the determination unit 34 is derived from the reflected light 25 reflected by the light reflecting portions 44a, 44b, 44c, and 44d of the first member 6a.

[0067] For example, the above-mentioned preliminary determination is performed using the period during which a specific amount of light continues to be received by the light receiving section 26 of the measurement unit 22 (corresponding to the time width of the peak in the graph). The peak based on the reflected light 25 reflected by the light reflecting sections 44a, 44b, 44c, and 44d of the first member 6a generally has a different time width from the peak based on the reflected light reflected by the first surface 19a of the frame 19. Alternatively, the shapes and configurations of the light reflecting sections 44a, 44b, 44c, and 44d are determined so that the time widths of the peaks differ between the two. Therefore, the two can be distinguished from each other based on the time widths of the peaks.

[0068] 14, the time widths of peaks B1, B2, B3, and B4 based on reflected light 25 reflected by light reflecting portions 44a, 44b, 44c, and 44d are smaller than the time widths of peaks D1, D2, D3, and D4 based on reflected light reflected by first surface 19a of frame 19. Therefore, of two peaks with different time widths that appear in the graph showing the time change in the amount of received light, the peak with the relatively smaller time width is determined to be the peak based on reflected light 25 reflected by light reflecting portions 44a, 44b, 44c, and 44d. Note that the time widths of the two peaks may be reversed. Then, in determination step S4, following this preliminary determination, determination unit 34 determines the holding state of frame 19 by holding mechanism 6 as described above.

[0069] The period during which the reflected light 25 reflected by the light reflecting portions 44a, 44b, 44c, and 44d continues to be received by the light receiving portion 26 of the measurement unit 22 (the duration of the peak in the graph) is a predetermined value. More specifically, this period is determined by the position, shape, and size of the light reflecting portions 44a, 44b, 44c, and 44d, and the speed (rotation speed) of the rotational movement of the table 4 and the like. Therefore, a preliminary determination may be performed based on whether the period during which the light receiving portion 26 continues to receive light at a predetermined amount of received light matches the period during which the reflected light 25 reflected by the light reflecting portions 44a, 44b, 44c, and 44d of the first member 6a is received.

[0070] That is, if the period (reference period) during which reflected light 25 reflected by the light reflecting portions 44a, 44b, 44c, and 44d of the first member 6a is received does not match the period during which certain light is received by the light receiving portion 26, the amount of received light is not used to determine the holding state of the holding mechanism 6. On the other hand, if the period during which certain light is received by the light receiving portion 26 is determined to match the reference period, it can be determined that this light is reflected light 25 reflected by the light reflecting portions 44a, 44b, 44c, and 44d of the first member 6a. Then, in determination step S4, following this preliminary determination, the determiner 34 determines the holding state of the frame 19 by the holding mechanism 6 as described above using the amount of received light.

[0071] Furthermore, the procedure for determining the holding state of the frame 19 by the holding mechanism 6 when the amount of light reflected by the first surface 19a of the frame 19 falls between the set lower limit C1 and upper limit C2 of the threshold is not limited to the above. The holding state may be determined using the periodicity of the change over time in the amount of light received, more specifically, one cycle of the waveform in a graph showing the change over time in the amount of light received. Here, one cycle corresponds to the time required for one rotation of the table 4 or the like.

[0072] For example, the waveform that appears on a graph showing the change over time in the amount of light received by the light receiving unit 26 when the frame 19 is properly held by each holding mechanism 6 is registered in advance in the controller 28 as a normal waveform. Then, in the determination step S4, the determination unit 34 determines the holding state of the frame 19 by each holding mechanism 6 based on whether or not the waveform that appears on the graph showing the change over time in the amount of light received by the light receiving unit 26 in the light receiving step S3 matches the normal waveform.

[0073] That is, if a waveform that is recognized as matching a normal waveform appears on the graph, it is determined that the holding state of the frame 19 by each holding mechanism 6 is normal. On the other hand, if the waveform that appears on the graph is not recognized as matching a normal waveform, it is determined that the holding state of the frame 19 is not normal.

[0074] The normal waveform pre-registered in controller 28 includes a peak based on reflected light 25 reflected by light reflecting portions 44a, 44b, 44c, and 44d of first member 6a of holding mechanism 6 that normally holds frame 19. The amount of reflected light 25 indicated by this peak falls within a range defined by the threshold value for the amount of received light stored in threshold memory unit 38 of memory device 32. Therefore, if the waveform appearing in the graph showing the time change in the amount of received light received by light receiving unit 26 matches the normal waveform, this means that the amount of received light 25 reflected by light reflecting portions 44a, 44b, 44c, and 44d falls within the range defined by the threshold value. Therefore, determining whether the waveform appearing in the graph showing the time change in the amount of received light received by light receiving unit 26 matches the normal waveform results in determining whether the amount of received light is within the range defined by the threshold value.

[0075] The determination of the holding state using the periodicity of the change in the amount of received light over time may be simplified. For example, as shown in the graph of FIG. 14, the amount of light received by the light receiving unit 26 periodically enters and leaves a range defined by a lower limit C1, which corresponds to the lower limit of the range defined by the threshold, and an upper limit C2, which corresponds to the upper limit of the range defined by the threshold. More specifically, the amount of received light falls within the range defined by the threshold for a certain period of time, then falls out of this range for another certain period of time, and then falls back into this range for yet another certain period of time. Therefore, the determination may be made based on the periodicity of the amount of received light entering and leaving the range defined by the threshold.

[0076] For example, normal cycle data expressed as a sequence of times when the amount of light received by light receiving unit 26 falls within a range defined by a threshold and times when it does not fall within the range when frame 19 is properly held by each holding mechanism 6 is registered in controller 28. Then, in determination step S4, determination unit 34 determines the holding state of frame 19 by each holding mechanism 6 based on whether the sequence of times when the amount of light received by light receiving unit 26 falls within a range defined by a threshold and times when it does not fall within the range in light receiving step S3 matches the normal cycle data.

[0077] That is, if the sequence of the time when the amount of received light falls within the range defined by the threshold and the time when it does not fall therein is found to match the normal cycle data, it is determined that the holding state of the frame 19 by each holding mechanism 6 is normal. On the other hand, if the sequence of the time when the amount of received light falls within the range defined by the threshold and the time when it does not fall therein is not found to match the normal cycle data, it is determined that the holding state of the frame 19 is not normal. Note that when a determination is made according to this procedure, it is determined that a determination has been made as to whether the amount of received light is within the range defined by the threshold.

[0078] FIG. 15 is a graph showing the change over time in the amount of received light when the frame 19 is not properly held by the holding mechanism 6 (third abnormal example). Similar to FIG. 14, peaks D1, D2, D3, and D4 appear in FIG. 15, and the first member 6a provided with the light reflecting portion 44b is not in contact with the first surface 19a of the frame 19. The other first members 6a provided with the light reflecting portions 44a, 44c, and 44d are assumed to be in proper contact with the frame 19. In this case, the light 23 irradiated from the irradiation portion 24 of the measurement unit 22 is not reflected by the light reflecting portion 44b, and therefore the magnitude of peak B2 is smaller than the other peaks B1, B3, and B4. Therefore, the amount of received light at peak B2 is less than the lower limit C1 of the range defined by the threshold.

[0079] As described above, even when peaks D1, D2, D3, and D4 based on the reflected light 25 reflected by the first surface 19a of the frame 19 appear, the holding state of the frame 19 by the holding mechanism 6 can be detected.

[0080] As described above, the method for detecting the frame holding state and the processing device 2 according to this embodiment can determine whether the holding mechanism 6 is properly holding the frame 19. This makes it possible to avoid continuing processing of the workpiece 11 when the frame 19 is not properly held by the holding mechanism 6, and to avoid damage to the workpiece 11 and the processing device 2.

[0081] In this embodiment, the measurement unit 22 may be disposed above the table 4. In this case, the rotational movement of the table 4 during processing by the processing device 2 does not disturb the airflow generated in the storage section 14a of the case 14. Therefore, the processing device 2 of this embodiment has a configuration that does not interfere with the processing of the object 11 to be processed.

[0082] The frame holding state detection method and the configuration of the processing device 2 according to this embodiment are not limited to those described above. For example, by varying the length of each light reflecting portion 44 (the size of the frame 19 in the circumferential direction), it is possible to vary the amount of received reflected light 25 reflected by each light reflecting portion 44. This allows the widths of peaks B1 to B4 to be varied. With this configuration, it is possible to identify from the widths of peaks B1 to B4 which of the light reflecting portions 44a, 44b, 44c, and 44d the peak indicating that the frame 19 is not being held properly is caused by the reflected light. In other words, it is possible to quickly identify the holding mechanism 6 that is not holding the frame 19 properly. This allows for quick adjustment, repair, replacement, etc. of the holding mechanism 6.

[0083] Furthermore, in the above-described embodiment, the processing device 2 has one measurement unit 22, but may have multiple measurement units 22. For example, a measurement unit may be provided above each of the four holding mechanisms 6. In this case, there is no need to rotate the table 4 in the light irradiation step S2 and the light receiving step S3.

[0084] Furthermore, the amount of received light of the reflected light 25 reflected by the first surface 19a of the frame 19 can be used to determine whether the frame 19 is present on the table 4 during processing by the processing device 2. More specifically, during processing by the processing device 2, a light irradiation step S2, a light receiving step S3, and a determination step S4 are executed. In processing by the processing device 2, the rotational movement speed of the table 4 by the rotational movement mechanism 16 is higher than the rotational movement speed in the light irradiation step S2 (e.g., 1000 rpm or more and 3000 rpm or less, typically 2000 rpm). Therefore, although it is not possible to distinguish between the reflected light 25 reflected by the first surface 19a of the frame 19 and the reflected light 25 reflected by the light reflecting portions 44a, 44b, 44c, and 44d of the holding mechanism 6, the light receiving unit 26 detects an amount of received light whose value falls within a range defined by a threshold (C1 or more and C2 or less). When the amount of light received by the light receiving unit 26 falls below the lower limit C1 of the threshold, it is possible to determine that the frame 19 does not exist on the table 4, and to interrupt the process.

[0085] For example, during processing by the processing device 2, the holding mechanism 6 may release the frame 19 for some reason, causing the frame unit 21 to deviate from the table 4. As described above, by determining whether the frame 19 is present on the table 4 during processing by the processing device 2, if the frame unit 21 deviates from the table 4, it is possible to prevent the processing by the processing device 2 from continuing.

[0086] In addition, the structures, methods, etc. according to the above-described embodiments and modifications may be modified and implemented without departing from the scope of the present invention. [Explanation of symbols]

[0087] 11: Object to be treated 11a: 1st side (front) 11b: 2nd side (back side) 11c: Notch 13: Planned division line (street) 15: Device 17: Film 19: Frame 19a: 1st page 19b: 2nd side 21: Frame unit 23: light 25:Reflected light 2: Processing equipment 4: Table 6: Retention mechanism 6a: First member 6b: Second member 8: Support stand 8a: 1st page 8b: 2nd side 10: Support pillar 12: Support plate 12a: 1st page 12b: 2nd side 14: Case 14a: Storage section 16: Rotational movement mechanism 18: Cover 20: Processing unit 20a:Shaft part 20b: Arm 20c: Nozzle 22: Measurement unit 24: Irradiation unit 26: Light receiving part 28: Controller 30: Processing equipment 32: Storage device 34: Judgment section 36: Notification control section 38: Threshold memory unit 40: Display unit 42: Announcement unit 44a: Light reflecting part 44b: Light reflecting part 44c: Light reflecting part 44d: Light reflecting part 60: Pressing part 62: Support member 64:Connection shaft 66: Support part

Claims

1. A method for detecting a holding state of a frame, the method comprising: detecting a holding state when a ring-shaped frame is held by a holding mechanism that clamps and holds the frame; a holding mechanism actuating step of actuating the holding mechanism so that the holding mechanism clamps and holds a portion of the frame; a light irradiation step of irradiating the holding mechanism with light from an irradiation unit of a measurement unit having an irradiation unit that irradiates light and a light receiving unit that receives the light; a light receiving step of receiving, by the light receiving unit, reflected light of the light irradiated from the irradiating unit onto the holding mechanism and measuring the amount of received light; a determining step of determining whether the amount of received light is within a range defined by a threshold value, thereby determining the holding state.

2. The frame has a front surface and a back surface opposite to the front surface, the holding mechanism has a first member that contacts the front surface and a second member that contacts the back surface, and is capable of sandwiching the frame between the first member and the second member; the holding mechanism operating step includes a first step of placing the frame on the second member so that the second member contacts the back surface, and a second step of arranging the first member on the front surface so that the first member contacts the front surface; 2. The method for detecting the holding state of a frame according to claim 1, wherein in the light irradiating step, the irradiating unit irradiates the light onto the first member of the holding mechanism.

3. 3. A method for detecting the holding state of a frame as described in claim 1 or claim 2, wherein in the holding mechanism activation step, the holding mechanisms contact the frame so that a plurality of the holding mechanisms arranged along the circumferential direction of the frame each clamp the frame.

4. The method further includes a rotational movement starting step of starting a relative rotational movement between the holding mechanism and the measurement unit along the circumferential direction before the light irradiation step, In the light irradiation step, the irradiation unit sequentially irradiates the light onto each of the plurality of holding mechanisms, In the light receiving step, the light receiving unit sequentially receives the reflected light generated by each of the plurality of holding mechanisms, and sequentially measures the received light amount of the reflected light; 4. The method for detecting a holding state of a frame according to claim 3, wherein the determining step determines the holding state of the frame by each of the holding mechanisms individually.

5. A processing apparatus for processing a processing object supported by an annular frame through a film attached to close an opening of the frame, the processing apparatus comprising: a holding mechanism that holds a part of the frame; a processing unit for processing the object supported by the frame held by the holding mechanism; a measurement unit having an irradiation unit that irradiates the holding mechanism with light and a light receiving unit that receives reflected light of the light irradiated from the irradiation unit to the holding mechanism and measures the amount of received light; a rotational movement mechanism that relatively rotates and moves the holding mechanism and the measurement unit along the circumferential direction of the frame; a controller that controls the holding mechanism, the measurement unit, and the rotational movement mechanism; The controller is a processing device having a judgment unit that judges the holding state of the frame by the holding mechanism based on whether the amount of light received, irradiated from the irradiation unit of the measurement unit, reflected by the holding mechanism, and received by the light receiving unit of the measurement unit, is within a range determined by a threshold value.

6. the holding mechanism has a first member that contacts a front surface of the frame and a second member that contacts a back surface of the frame opposite to the front surface, and the frame is sandwiched between the first member and the second member; The processing apparatus according to claim 5 , wherein the irradiation unit irradiates the first member with the light.

7. 7. The processing apparatus according to claim 5, wherein the frame is held by a plurality of the holding mechanisms arranged along the circumferential direction of the frame so as to sandwich the frame.

8. 8. The processing device according to claim 7, wherein the controller rotates the holding mechanism and the measurement unit relatively along the circumferential direction using the rotational movement mechanism, sequentially irradiates the light from the irradiation unit onto each of the plurality of holding mechanisms, sequentially receives the reflected light generated when the light is reflected by each of the plurality of holding mechanisms using the light receiving unit, sequentially measures the received amount of the reflected light, and individually determines the holding state of the frame by each of the holding mechanisms.

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