Dispensing apparatus
The supply device with flow guide components forms a clean gas region to prevent contamination during electronic component processing, enhancing processing quality and reducing clean gas consumption.
Patent Information
- Application Number
- JP2025095551
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2020-03-03
- Filing Date
- 2025-06-09
- Publication Date
- 2025-08-07
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
In electronic component processing, contamination by dust or impurities during fluid supply affects processing quality, necessitating a solution to ensure air cleanliness.
A supply device with parallel track components and flow guide components that form a clean gas region above the electronic components, utilizing clean gas inlets and outlets to prevent contamination.
The device effectively forms a clean gas area to protect electronic components from impurities, reducing clean gas usage and ensuring processing quality.
Smart Images
Figure 2025116291000001_ABST
Abstract
Description
[Technical Field]
[0001] [Related Applications] This application claims the benefit of Chinese Patent Application No. 202010139401.0, filed on March 3, 2020, which is expressly incorporated herein by reference in its entirety.
[0002] This application relates to feeding devices, and in particular to feeding devices used in the field of electronic component processing. [Background technology]
[0003] In the field of electronic component processing, it is necessary to use a supplying device to supply fluid droplets onto or into the surface of an electronic component, and if dust or impurities contaminate the fluid or the area of the electronic component where processing is performed during the fluid supplying process, it will affect the processing quality of the electronic component. Therefore, it is necessary to ensure the cleanliness of the air in the processing area of the electronic component to avoid contamination by dust or impurities as much as possible. Summary of the Invention
[0004] The present application provides a supply device that can effectively avoid contamination by dust or impurities during operation, the supply device comprising: a first track component and a second track component that are arranged in parallel and hold electronic components to be processed; and a first flow guide component and a second flow guide component, the first flow guide component being arranged on top of the first track component, the second flow guide component being arranged on top of the second track component, the first flow guide component having a first inner portion, and the second flow guide component having a second inner portion, the first inner portion and the second inner portion being arranged to face each other, the first flow guide component having at least one first gas inlet and at least one first gas outlet that are in communication with each other. wherein the at least one first gas inlet is in communication with a clean gas source, the at least one first gas outlet is disposed in the first interior portion of the first flow guide component, the second flow guide component has at least one second gas inlet and at least one second gas outlet in communication with each other, the at least one second gas inlet is disposed in the second interior portion of the second flow guide component, and the at least one second gas outlet is in communication with a gas exhaust power device, such that clean gas can flow from the at least one first gas outlet toward the at least one second gas inlet, thereby forming a clean gas region above the electronic component being processed.
[0005] In the above supply device, the first flow guide component has at least one delivery channel corresponding to each of the at least one first gas outlets, and the at least one delivery channel is formed to extend from the at least one first gas outlet into the interior of the first flow guide component, and the height of the delivery channel in a length direction perpendicular to the first track component gradually decreases from the at least one first gas outlet toward the interior.
[0006] In the above supply device, the at least one first gas outlet includes a plurality of gas outlets and a plurality of delivery channels respectively corresponding to the plurality of gas outlets, and the plurality of gas outlets are distributed in the length direction of the first flow guide component.
[0007] In the above supply device, the first flow guide component has a first accommodating cavity extending in the length direction of the first flow guide component and communicating with the at least one first gas inlet and the at least one delivery channel.
[0008] In the above-described supply device, the distance between the outer surface of the first gas outlet and the outer surface of the last gas outlet of the plurality of gas outlets in the longitudinal direction of the first flow guide component is equal to or greater than the length of the electronic component to be processed.
[0009] In the above supply device, the second flow guide component has at least one introduction channel corresponding to the at least one second gas inlet, the at least one introduction channel is formed to extend from the second gas inlet into the second flow guide component, and the height of the at least one introduction channel in a length direction perpendicular to the second track component gradually decreases from the second gas inlet toward the inside.
[0010] In the above-mentioned supply device, the at least one second gas inlet includes a plurality of gas inlets and a plurality of introduction channels respectively corresponding to the plurality of gas inlets, the plurality of gas inlets being distributed in a length direction of the second flow guide component; The second flow directing component has a second receiving cavity extending along the length of the second flow directing component and communicating with the at least one second gas outlet and the at least one introduction channel.
[0011] In the above feeding device, the distance between the inner surface of the first flow guide member and the inner surface of the second flow guide member is smaller than the width of the electronic component to be processed.
[0012] The supply apparatus further comprises an air filtration device having an inlet end and an outlet end, the inlet end communicating with an air source and the outlet end communicating with the at least one first gas inlet, the air filtration device supplying clean air to the first flow directing component.
[0013] The supply device further comprises a gas treatment device in communication with the second gas outlet and capable of purifying air flowing out of the second gas outlet.
[0014] The supply device provided in the present application can form a clean gas area in the area where electronic components are processed to avoid contamination by dust and impurities. The supply device provided in the present application is equipped with a pair of flow guide elements, which can effectively utilize the clean gas, reduce the amount of clean gas used, and ensure the cleanliness of the air in the processing area. [Brief explanation of the drawings]
[0015] [Figure 1A] 1 is a three-dimensional schematic view of a feeding device in one embodiment of the present application; [Figure 1B] FIG. 1B is an exploded view of the feeding device of FIG. 1A. [Figure 2A] FIG. 1C is a three-dimensional view of the first flow directing element 103 of FIG. 1B. [Figure 2B] 10 is a three-dimensional view of another embodiment of the first flow directing element 103. FIG. [Figure 3] FIG. 1C is a three-dimensional view of the second flow directing element 104 of FIG. 1B. [Figure 4A] 2B is a three-dimensional view of the first flow directing element of FIG. 2A cut longitudinally. [Figure 4B] 2B is a cross-sectional view of the first flow directing component of FIG. 2A. [Figure 5A] 4 is a three-dimensional view of the second flow guide element of FIG. 3 cut in the radial direction. [Figure 5B] 4 is an axial cross-sectional view of the second flow guide element of FIG. 3. FIG. [Figure 6]FIG. 1C is a three-dimensional view of the gas transport assembly of FIG. [Figure 7] FIG. 1C is a three-dimensional view of the gas exhaust assembly of FIG. [Figure 8A] FIG. 1B is a cross-sectional view of a portion of the delivery device of FIG. 1A. [Figure 8B] FIG. 8B is a partially enlarged view of a portion C of FIG. 8A. DETAILED DESCRIPTION OF THE INVENTION
[0016] Various specific embodiments of the present application will now be described with reference to the accompanying drawings, which form a part of this specification. While directional terms such as "front," "back," "top," "bottom," "left," and "right" are used in this application to describe various illustrative structural parts and elements of the present application, it should be understood that these terms are used herein merely for ease of description and are determined based on the illustrative directions shown in the drawings. Because the embodiments disclosed in this application can be arranged according to various directions, these directional terms are merely exemplary and should not be considered limiting.
[0017] FIG. 1A illustrates a feeder according to an embodiment of the present application. In FIG. 1A, only a portion of the feeder is shown to more clearly illustrate the inventive features of the present application. FIG. 1B is an exploded view of the feeder of FIG. 1A. The feeder is used to process electronic components such as circuit boards. To process the electronic components, the feeder dispenses a fluid, such as solder paste or silicone grease, onto the electronic components, dripping or spreading the fluid onto the surface or inside the electronic components. During the process of processing electronic components using the feeder, the air inside the feeder may be contaminated by impurities such as dust. However, the area of the electronic components where processing is performed requires relatively clean air. Therefore, if dust in the air gets into the area of the electronic components where processing is performed or into the fluid being dispensed, the quality of the electronic components may be affected. The feeder provided in the present application can alleviate this problem. FIGS. 1A and 1B illustrate portions of the feeder. 1A and 1B , some of the supply assembly, housing, and other assemblies of the supply device are omitted to more clearly illustrate the structure capable of improving the cleanliness of air near electronic components of the present application. As shown in FIGS. 1A and 1B , the supply device includes a base 105, a first track component 101 and a second track component 102, a first flow guide component 103 and a second flow guide component 104, a gas transport assembly 110, and a gas exhaust assembly 120. The first track component 101 and the second track component 102 are used to hold and transport an electronic component 140 to be processed, and two sides of the electronic component 140 to be processed contact the first track component 101 and the second track component 102, respectively. The base 105 has a length direction L and a width direction W. The first track component 101 and the second track component 102 are arranged side by side on the base 105 in the width direction W. The second track component 102 is fixedly connected to the base 105 and is disposed on one side edge of the base 105. The base 105 includes a pair of slide rails 152 extending in the length direction L.The first track part 101 is slidably connected to the base 105 by a pair of slide rails 152, and in order to accommodate electronic components of various specifications, the first track part 101 slides in the length direction L of the base 105, thereby allowing the width between the first track part 101 and the second track part 102 to be adjusted.
[0018] The first flow guide component 103 is connected to the top of the first track component 101, and the second flow guide component 104 is connected to the top of the second track component 102. The gas transport assembly 110 is in communication with the first flow guide component 103 and can supply clean air to the first flow guide component 103. The gas exhaust assembly 120 is in communication with the second flow guide component 104 and can suck in and exhaust gas within the second flow guide component 104. Under the action of the gas transport assembly 110 and the gas exhaust assembly 120, clean air flows from the first flow guide component 103 toward the second flow guide component 104, forming a clean air region above the electronic component 140 being processed, in order to protect the electronic component 140 from interference from impurities such as dust during processing, or to prevent such interference as much as possible.
[0019] 2A is a three-dimensional view of the first flow guide component 103 of FIG. 1B. As shown in FIG. 2A, the first flow guide component 103 is substantially in the form of a long strip and includes a main body 210 and connecting portions 218 and 219. The connecting portions 218 and 219 extend outward from two longitudinal ends of the main body 210, respectively, and are used to connect to the first flow guide component 103. The first flow guide component 103 includes a first inner portion 214. When the first flow guide component 103 is attached to the first track component 101, the first inner portion 214 faces toward the second flow guide component 104. A pair of first gas inlets 202 are provided at the two longitudinal ends of the main body 210 of the first flow guide component 103, and a plurality of first gas outlets 204 are provided in the first inner portion 214. The pair of first gas inlets 202 communicate with a plurality of first gas outlets 204. The pair of first gas inlets 202 communicate with the gas transport assembly 110 to direct the clean air into the first flow directing component 103, and the clean air can be discharged through the first gas outlets 204.
[0020] In one embodiment of the present application, the first flow guide component 103 has substantially the same length as the first track component 101. The plurality of first gas outlets 204 are distributed in the longitudinal direction of the first flow guide component 103. The first gas outlet and the last gas outlet of the plurality of gas outlets are respectively near the two ends in the longitudinal direction of the first flow guide component 103, so that the length of the clean gas region that can be generated by the plurality of gas outlets 204 is close to the length of the first track component 101. The length of the clean gas region is at least equal to the length of the electronic component to be processed so as to ensure that a sufficiently large clean gas region is formed above the electronic component to be processed.
[0021] 2B shows another embodiment of the flow guide element of the present application, which is similar to the embodiment shown in FIG. 2A, except that a single first gas outlet 240 is provided to extend in the length direction of the first flow guide element 103, thereby forming the first gas outlet in the form of a long strip, and the length of the first gas outlet is equivalent to the length of the electronic component to be processed. The first gas outlet in this embodiment can also form a certain clean gas region.
[0022] FIG. 3 is a three-dimensional view of the second flow guide component 104 in FIG. 1B. The structure of the second flow guide component 104 is similar to that of the first flow guide component 103. As shown in FIG. 3, the second flow guide component 104 is substantially in the form of a long strip and has a main body 310 and connecting portions 318 and 319. The connecting portions 318 and 319 extend outward from two longitudinal ends of the main body 310, respectively, and are used to connect to the second flow guide component 104. The second flow guide component 104 has a second inner portion 314. When the second flow guide component 104 is attached to the second track component 102, the second inner portion 314 faces toward the first flow guide component 103. That is, the first inner portion 214 and the second inner portion 314 are arranged to face each other. The second flow guide component 104 has a pair of second gas outlets 302 at two longitudinal ends of the body 310, and a plurality of second gas inlets 304 at the second inner portion 314. The pair of second gas outlets 302 communicate with the plurality of second gas inlets 304. The pair of second gas outlets 302 communicate with the gas exhaust assembly 120, so that clean air is guided into the second flow guide component 104 through the second gas inlets 304 and exhausted from the second gas outlets 302. The second flow guide component 104 and the first flow guide component 103 are structurally symmetrical, but have different internal gas flow directions.
[0023] In the present application, the second flow directing element 104 and the first flow directing element 103 are arranged symmetrically, but in other embodiments, the second flow directing element may be structurally different from the first flow directing element 103. For example, the number and size of the second gas inlets 304 may be different from the number and size of the first gas outlets 204, as long as the second gas inlets 304 are arranged in the second inner portion 314. The second gas inlet 304 may be a single inlet extending in the length direction, or may be a combination of multiple inlets of different sizes.
[0024] 4A is a three-dimensional view of the first flow guide element 103 of FIG. 2A cut longitudinally, and FIG. 4B is a cross-sectional view of the first flow guide element 103 of FIG. 2A cut along line AA. As shown in FIG. 4A , the first flow guide element 103 has a first accommodating cavity 403 and a plurality of delivery channels 405. The first accommodating cavity 403 is connected to the plurality of delivery channels 405. The plurality of delivery channels 405 extend inward from corresponding first gas outlets 204 to the first accommodating cavity 403. Two first gas inlets 202 are disposed at two ends of the first accommodating cavity 403, and each of the plurality of first gas outlets 204 is connected to the first gas inlet 202 through the corresponding delivery channel 405 and the first accommodating cavity 403. It should be noted that the location and number of the first gas inlets 202 can be set according to design requirements. One or more first gas inlets may be provided and may be located in any area of the surface of the first flow directing component 103 as long as they communicate with the first receiving cavity 403 .
[0025] 4B , the delivery channel 405 gradually narrows from the corresponding first gas outlet 204 toward the inside (i.e., toward the first accommodating cavity 403), and the delivery channel 405 has a flared shape in which the size gradually increases from the inside to the outside. This helps the gas diverge as it leaves the first gas outlet 204 and fill as much of the space above the electronic components as possible. The delivery channel 405 does not need to have a regular flared shape, as long as its height in the length direction perpendicular to the first track component 101 gradually decreases from the outside to the inside. That is, if the delivery channel 405 gradually decreases in size from the inside to the outside in the axial cross section of the first flow guide component 103, the gas flow guide effect can be achieved.
[0026] 5A is a three-dimensional view of the second flow guide component of FIG. 3 cut in the radial direction, and FIG. 5B is an axial cross-sectional view of the second flow guide component of FIG. 3 cut along line BB. As shown in FIGS. 3 and 5A and 5B, similar to the first flow guide component 103, the second flow guide component 104 has a second accommodating cavity 503 and a plurality of inlet channels 505. The second accommodating cavity 503 communicates with the plurality of inlet channels 505. The plurality of inlet channels 505 extend inward (i.e., toward the second accommodating cavity 503) from corresponding second gas inlets 304 to the second accommodating cavity 503. Two gas outlets 302 are disposed at two ends of the second accommodating cavity 503, and each of the plurality of second gas inlets 304 communicates with the second gas outlet 302 via a corresponding inlet channel 505 and the second accommodating cavity 503. It should be mentioned that the location and number of the second gas outlets 302 can be set according to design requirements. One or more second gas outlets may be provided and may be located in any area on the surface of the second flow guide component 104, as long as they communicate with the second accommodating cavity 503.
[0027] As shown in FIG. 5B , the inlet channel 505 narrows gradually from the corresponding second gas inlet 304 toward the inside, symmetrically to the first flow guide element 103. The inlet channel 505 has a flared shape that gradually increases in size from the inside to the outside. This facilitates gas collection within a large area above the electronic component. Similarly, the inlet channel 505 does not need to have a regular flared shape, as long as its height in the length direction perpendicular to the second track element 102 gradually decreases from the outside to the inside. That is, if the inlet channel 505 gradually decreases in size from the inside to the outside in the axial cross section of the second flow guide element 104, the effect of facilitating gas collection can be achieved. It should be noted that the inlet channel 505 of the second flow guide element 104 may be a channel with a uniform inner diameter. The reason for this is that the shape of the delivery channel 405 of the first flow guide element 103 can already ensure that the cleaning gas can diffuse to the area above the electronic component, so that the processing requirements are met, and the second flow guide element 104 only needs to be able to guide this portion of the gas to flow out.
[0028] Figure 6 shows gas transport assembly 110 of Figure 1B. As shown in Figure 1B, gas transport assembly 110 includes air filtration device 608, inlet end 630, and outlet end 640. Inlet end 630 communicates with air filtration device 608 at one end and with a blower at the other end to deliver air into air filtration device 608. Inlet end 630 includes inlet duct 635, flow control valve 637, and pressure control valve 638, which are connected on the duct and adjust the flow rate and pressure of gas flowing into air filtration device 608, respectively. Outlet end 640 includes outlet duct 645. Outlet duct 645 includes main pipe 641 and branch pipe 642. One end of the main pipe 641 communicates with the air filtering device 608, and the other end communicates with one of the first gas inlets 202 of the first flow guiding element 103. The branch pipe 642 communicates with the main pipe 641 at one end, and communicates with the other of the first gas inlets 202 of the first flow guiding element 103 at the other end. Thus, the ambient air becomes purified air after being filtered by the air filtering device 608, and this purified air is delivered into the first flow guiding element. It should be noted that the first flow guiding element 103 may be directly connected to a high-pressure purified air source, in which case there is no need to provide an additional blower and air filter. As long as the gas flowing into the first flow guiding element 103 is purified air having a certain pressure, the technical effect of the present application can be achieved.
[0029] FIG. 7 is a three-dimensional view of the gas exhaust assembly 120. As shown in FIG. 7, the gas exhaust assembly 120 includes a gas exhaust duct 740, a vacuum generator 710, and a gas treatment device 720. The gas exhaust duct 740 includes a main pipe 741 and a branch pipe 742. The main pipe 741 is connected to the vacuum generator 710 at one end and to the second gas outlet 302 of the second flow guide component 104 at the other end. The branch pipe 742 is connected to the main pipe 741 at one end and to the second gas outlet 302 at the other end. The vacuum generator 710 creates a certain degree of vacuum within the second flow guide component, thereby guiding gas to flow out through the gas outlet 302 of the second flow guide component. The gas treatment device 720 is connected to the vacuum generator 710 and filters and treats the gas flowing out of the second flow guide component 104. The gas treatment device 720 can be located outside the supply device. In one embodiment of the present application, the vacuum generator is a Venturi tube that is separately connected to the gas exhaust duct 740 and an external high-pressure gas source to generate a certain amount of vacuum. In other embodiments, the vacuum generator can be a vacuum pump or another gas exhaust device.
[0030] 8A is a cross-sectional view of the feeding device of FIG. 1A, and FIG. 8B is a partial enlarged view of portion C of the feeding device of FIG. 8A. As shown in FIGS. 8A and 8B, the first track component 101 and the second track component 102 include a first conveyor belt 811 and a second conveyor belt 812, respectively. The electronic component 140 is held and transported by the first conveyor belt 811 and the second conveyor belt 812. When the first conveyor belt 811 and the second conveyor belt 812 transport the electronic component 140 to the processing position, a clamp component (not shown) lifts the electronic component 140 until the two side edges of the electronic component 140 abut the lower portions of the first flow guide component 103 and the second flow guide component 104. At this time, the electronic component 140 becomes immobile, and a feeding assembly (not shown) located above the electronic component 140 supplies fluid to the upper surface of the electronic component 140. Once the electronic component 140 has been processed, the clamping elements (not shown) move downward, and the electronic component 140 again contacts the first conveyor belt 811 and the second conveyor belt 812, thereby transporting it away from the feeding device. In this embodiment, the distance between the first inner portion 214 of the first flow guide element 103 and the second inner portion 314 of the second flow guide element 104 is smaller than the width of the electronic component 140, and the first flow guide element 103 and the second flow guide element 104 cooperate with the clamping elements (not shown) to secure the electronic component 140 in a position where processing will occur. In another embodiment, the electronic component 140 may be secured in a position where processing will occur by cooperation between another corresponding mechanical structure and the clamping elements (not shown). In this case, the first flow guide element 103 and the second flow guide element 104 do not contact the electronic component 140 to be processed, but the width between the first flow guide element 103 and the second flow guide element 104 is substantially similar to the width of the electronic component to be processed. A reasonable distance between the first flow guide element 103 and the second flow guide element 104 can ensure that the clean air area above the electronic component 140 diffuses as little as possible into surrounding areas where clean air is not required, while still meeting the processing requirements of the electronic component 140 to reduce the amount of clean air used.
[0031] In another embodiment, the first track component 101 and the second track component 102 need not comprise conveyor belts. The electronic component 140 may be gripped by a corresponding mechanical device to place the electronic component 140 in a position where processing will occur.
[0032] When the electronic component 140 reaches the processing position and is fastened, the clean gas is discharged through the first gas outlet 204 of the first inner portion 214 of the first flow guide component 103. Because the delivery channel 205 is flared, the gas flows out in the direction indicated by the arrow 802, thereby forming a clean gas region 801 above the electronic component 140. Most of the gas in the clean gas region 801 is drawn through the second inner portion 314 of the second flow guide component 104 along the arrow 803 and discharged after being treated in the gas treatment device 720. Due to the cooperation of the first flow guide component 103 and the second flow guide component 104, the clean gas region 801 formed above the electronic component 140 is relatively concentrated. The clean gas region 801 is the region to which the supply component supplies fluid during processing, and the clean gas region 801 can ensure processing quality. The cooperation of the first flow guide element 103 and the second flow guide element 104 results in a smaller and relatively concentrated area of the clean gas, which avoids the diffusion of the clean gas to other unnecessary areas, and results in a higher utilization of the clean gas and a smaller amount of clean gas used, thereby reducing energy loss.
[0033] Although only certain features of the present application have been shown and described herein, many modifications and changes will occur to those skilled in the art. It is, therefore, intended in the appended claims to cover all such modifications and changes that fall within the true spirit of the present application. [Explanation of symbols]
[0034] 101 First Truck Parts 102 Second Truck Parts 103 Inductive Components 104 Inductive Components 105 Base 110 Gas transport assembly 120 Gas exhaust assembly 140 Electronic Components 152 slide rail 202 First gas inlet 204 First gas outlet 205 Outgoing Channel 210 Main Unit 214 First Medial Section 218 Connection 219 Connection 240 First gas outlet 302 Second gas outlet 303 Second gas outlet 304 Second gas inlet 310 Main Unit 314 Second Medial Section 318 Connection 319 Connection 403 First Containment Cavity 405 Outgoing Channel 503 Second Containment Cavity 505 Introduction Channel 608 Air Filtration Device 630 Inlet end 635 Inlet Duct 637 Control valve 638 Pressure Regulating Valve 640 Outlet end 641 Master 642 Branch Pipe 645 Exit Duct 710 Vacuum Generator 720 Gas Treatment Equipment 740 Gas Exhaust Duct 741 Master 742 Branch Pipe 801 Clean gas area
Claims
1. In a feeding device for processing electronic components, a first track part (101) and a second track part (102) arranged in parallel and holding an electronic component to be processed; a first flow guide element (103) and a second flow guide element (104), the first flow guide element (103) being disposed on top of the first track element (101) and the second flow guide element (104) being disposed on top of the second track element (102), the first flow guide element (103) having a first inner portion (214) and the second flow guide element (104) having a second inner portion (314), the first inner portion (214) and the second flow guide element inner portion (314) being disposed facing each other; The first flow guide element (103) has at least one first gas inlet (202) and at least one first gas outlet (204) that are in communication with each other, the at least one first gas inlet (202) being in communication with a clean gas source, the at least one first gas outlet (204) being disposed in the first inner portion (214) of the first flow guide element (103), and the second flow guide element (104) has at least one second gas inlet (304) and at least a second gas outlet (302), the at least one second gas inlet (304) being disposed in the second inner portion (314) of the second flow guide component (104), the at least one second gas outlet (302) being in communication with a gas exhaust power unit, such that clean gas can flow from the at least one first gas outlet (204) toward the at least one second gas inlet (304), thereby forming a clean gas region above the electronic component being processed; the first flow guide element (103) has at least one delivery channel (405) corresponding to each of the at least one first gas outlets (204), the at least one delivery channel (405) being formed in a flared shape extending from the at least one first gas outlet (204) into the interior of the first flow guide element (103), and the height of the delivery channel (405) in a length direction perpendicular to the first track element (101) gradually decreases from the at least one first gas outlet (204) toward the interior; The first flow guide element (103) has a first accommodating cavity (403) extending in the length direction of the first flow guide element (103) and communicating with the at least one first gas inlet (202) and the at least one delivery channel (405).
2. 2. The supply device of claim 1, wherein the at least one first gas outlet (204) comprises a plurality of gas outlets and a plurality of delivery channels respectively corresponding to the plurality of gas outlets, the plurality of gas outlets being distributed in a length direction of the first flow guide element (103).
3. 3. The supply device according to claim 2, wherein a distance between an outer surface of a first gas outlet and an outer surface of a last gas outlet of the plurality of gas outlets in the length direction of the first flow guide element (103) is equal to or greater than a length of an electronic component to be processed.
4. 2. The supply device according to claim 1, wherein the second flow guide element (104) has at least one introduction channel (505) corresponding to the at least one second gas inlet (304), the at least one introduction channel (505) being formed to extend from the second gas inlet (304) into the interior of the second flow guide element (104), and the height of the at least one introduction channel (505) in a length direction perpendicular to the second track element (102) gradually decreases from the second gas inlet (304) toward the interior.
5. the at least one second gas inlet (304) includes a plurality of gas inlets and a plurality of introduction channels corresponding to the plurality of gas inlets, the plurality of gas inlets being distributed along a length of the second flow guide component; 5. The supply device of claim 4, wherein the second flow guide element (104) has a second accommodating cavity (503) extending in the length direction of the second flow guide element (104) and communicating with the at least one second gas outlet (302) and the at least one introduction channel (505).
6. 2. The feeding device according to claim 1, wherein the distance between the inner surface of the first flow guide element (103) and the inner surface of the second flow guide element (104) is smaller than the width of the electronic component to be processed.
7. an air filtration device (608) having an inlet end (630) and an outlet end (640); 2. The supply system of claim 1, wherein the inlet end (630) communicates with an air source and the outlet end (640) communicates with the at least one first gas inlet (202), and the air filtering device (608) supplies clean air to the first flow guide element (103).
8. 2. The supply system of claim 1, further comprising a gas treatment device (720) in communication with the second gas outlet (302) and capable of purifying air exiting the second gas outlet (302).