Probe, and electric connection device

Abstract

To provide a probe and electric connection device that make interchange of the probes in the electric connection device easy.SOLUTION: A probe 10 has a tip end part 11 to be made contact with an examination object arranged in an end part of one in an axis direction, and has a base end part 13 arranged in an end part of other therein, and has a rectangular shape with four lateral faces when viewing from the axis direction. Between the tip end part 11 and the base end part 13, a plurality of coil spring parts having elasticity is connected to each other along the axis direction via a connecting part 122 having non-elasticity.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a probe and an electrical connecting device used for testing electrical characteristics of an object under test. [Background technology]

[0002] An electrical connection device including a probe is used to test the electrical characteristics of a test object such as a semiconductor integrated circuit in a wafer state. In a test using a probe, one end of the probe contacts an electrode of the test object, and the other end of the probe contacts a terminal (hereinafter also referred to as a "land") arranged on a substrate included in the electrical connection device. The land is electrically connected to a tester or other test device.

[0003] In order to accurately test the electrical characteristics of a test object, it is necessary to establish a stable electrical connection between the test object and the land via a probe. For this reason, when the probe itself does not have axial elasticity, a method is adopted in which the probe is held in a curved state by the probe head of an electrical connection device. By pressing the curved probe against the test object and further bending the probe using overdrive, the elasticity of the probe can be used to stably contact the test object and the land. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2018-4260 Summary of the Invention [Problem to be solved by the invention]

[0005] However, in an electrical connecting device that holds a probe in a curved state, when it becomes necessary to replace the probe, it is necessary to return the probe held by the probe head from the curved state to a straight state and then remove the probe from the probe head, which poses the problem of probe replacement taking time.

[0006] In view of the above problems, an object of the present invention is to provide a probe and an electrical connecting device that allow easy replacement of the probe in the electrical connecting device. [Means for solving the problem]

[0007] A probe according to one aspect of the present invention has a tip end that is arranged at one axial end to be in contact with an object to be inspected, a base end that is arranged at the other axial end, and is rectangular in shape with four side faces when viewed from the axial direction. A plurality of elastic coil springs are connected along the axial direction between the tip end and the base end via inelastic connecting parts. [Effects of the Invention]

[0008] According to the present invention, it is possible to provide a probe and an electrical connecting device in which the probe can be easily replaced in the electrical connecting device. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a schematic side view showing the configuration of a probe according to an embodiment. [Figure 2] FIG. 2 is a schematic plan view showing the configuration of the probe according to the embodiment. [Figure 3] FIG. 3 is a schematic diagram showing a first component constituting the probe shown in FIG. [Figure 4] FIG. 4 is a schematic diagram showing a second part constituting the probe shown in FIG. [Figure 5] FIG. 5 is a schematic diagram showing a third component constituting the probe shown in FIG. [Figure 6]FIG. 6 is a schematic diagram showing the configuration of a coil spring portion of the probe according to the embodiment. [Figure 7] FIG. 7 is a schematic perspective view showing a coil spring portion of the probe according to the embodiment. [Figure 8] FIG. 8 is a schematic diagram showing the connection between the tip of the probe shown in FIG. 1 and the current path member. [Figure 9] FIG. 9 is a schematic diagram showing the connection between the coupling portion of the probe shown in FIG. 1 and the current path member. [Figure 10] FIG. 10 is a schematic diagram showing the shape of each wire of the coil spring portion of the probe according to the embodiment. [Figure 11] FIG. 11 is a schematic diagram showing the configuration of the electrical connecting device according to the embodiment. [Figure 12] FIG. 12 is a schematic diagram showing another configuration of the electrical connecting device according to the embodiment. [Figure 13] FIG. 13 is a schematic diagram showing a first component constituting a probe according to a first modified example of the embodiment. [Figure 14] FIG. 14 is a schematic diagram showing a second component constituting a probe according to a first modified example of the embodiment. [Figure 15] FIG. 15 is a schematic diagram showing a third component constituting a probe according to a first modified example of the embodiment. [Figure 16] FIG. 16 is a schematic diagram showing a current path member of a probe according to a first modified example of the embodiment. [Figure 17] FIG. 17 is a schematic side view showing the configuration of a probe according to a first modified example of the embodiment. [Figure 18] FIG. 18 is a schematic diagram showing a method of connecting the current path members of the probe shown in FIG. [Figure 19] FIG. 19 is a schematic diagram showing a first component constituting a probe according to a second modified example of the embodiment. [Figure 20] FIG. 20 is a schematic diagram showing a second component constituting a probe according to a second modified example of the embodiment. [Figure 21]FIG. 21 is a schematic diagram showing a third component constituting a probe according to a second modified example of the embodiment. [Figure 22] FIG. 22 is a schematic side view showing the configuration of a probe according to a second modified example of the embodiment. [Figure 23] FIG. 23 is a schematic diagram showing a method of connecting the current path members of the probe shown in FIG. [Figure 24] FIG. 24 is a schematic cross-sectional view showing an example of the shape of the opening of the connecting portion of the probe according to another embodiment. [Figure 25] FIG. 25 is a schematic cross-sectional view showing another example of the shape of the opening of the connecting portion of the probe according to another embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] Next, embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, identical or similar parts are designated by identical or similar reference numerals. However, it should be noted that the drawings are schematic, and the thickness ratios of the various parts may differ from those in reality. Furthermore, it goes without saying that the dimensional relationships and ratios of parts included in the drawings may differ from one another. The embodiments shown below exemplify devices and methods for embodying the technical ideas of the present invention, and the materials, shapes, structures, and arrangements of the components of the embodiments of the present invention are not limited to those described below.

[0011] (First embodiment) A probe 10 according to the first embodiment shown in Fig. 1 is used to test the electrical characteristics of an object under test. A tip portion 11 that comes into contact with the object under test is disposed at one axial end of the probe 10, and a base portion 13 is disposed at the other axial end. In the probe 10, a plurality of elastic coil spring portions are connected along the axial direction between the tip portion 11 and the base portion 13 via inelastic connecting portions 122. In the probe 10, the portion that is located between the tip portion 11 and the base portion 13 and includes the coil spring portions and connecting portions 122 is referred to as a main body portion 12.

[0012] The probe 10 has a columnar shape with a tip end 11 and a base end 13 as its two ends. As shown in Fig. 1, the axial direction of the probe 10 is the Z direction, the left-right direction in Fig. 1 is the X direction, and the depth direction in Fig. 1 is the Y direction. The direction along the Z direction in which the tip end 11 is located as viewed from the base end 13 is referred to as the upward direction, and the direction in which the base end 13 is located as viewed from the tip end 11 is referred to as the downward direction. The upward facing surface of each part of the probe 10 is referred to as the top surface, the downward facing surface as the bottom surface, and the surface connecting the top and bottom surfaces as the side surface.

[0013] As shown in FIG. 2, the probe 10 has a rectangular shape having four side faces when viewed in the axial direction. A side face when viewed in the Y direction is referred to as a first side face 101, and a side face facing opposite the first side face 101 is referred to as a second side face 102. A side face when viewed in the X direction is referred to as a third side face 103, and a side face facing opposite the third side face 103 is referred to as a fourth side face 104. As will be described later, the coil spring portion of the probe 10 is formed by combining a first part 111, a second part 112, and a third part 113. As shown in FIG. 2, the first side face 101 is a surface of the first part 111, the second side face 102 is a surface of the third part 113, and the third side face 103 and the fourth side face 104 are surfaces of the second part 112.

[0014] 1, a first coil spring portion 1211, a second coil spring portion 1212, a third coil spring portion 1213, and a fourth coil spring portion 1214 are connected in this order from the distal end portion 11 toward the proximal end portion 13 via a connecting portion 122. When not specifying the individual coil spring portions included in the probe 10, they will be referred to as "coil spring portion 121." While FIG. 1 exemplifies a case in which the number of coil spring portions 121 included in the probe 10 is four, the number of coil spring portions 121 included in the probe 10 can be set to any number equal to or greater than two.

[0015] Fig. 3 shows a first part 111 that constitutes the probe 10. Fig. 4 shows a second part 112 that constitutes the probe 10. Fig. 5 shows a third part 113 that constitutes the probe 10. The first part 111 and the third part 113 have a structure in which beams that extend obliquely with respect to the X direction (hereinafter also referred to as "oblique beams") are arranged along the Z direction. The second part 112 has a structure in which beams that are parallel to the Y direction (hereinafter also referred to as "parallel beams") are arranged along the Z direction.

[0016] The coil spring portion 121 of the probe 10 is configured by stacking the third part 113, the second part 112, and the first part 111 in this order along the Y direction. That is, the beam of the second part 112 connects the beam of the first part 111 and the beam of the third part 113, thereby configuring the coil spring portion 121.

[0017] FIG. 6 shows the configuration of the coil spring portion 121. The first component 111 appearing on the first side surface 101 includes a diagonal beam extending from the upper left to the lower right of the drawing when viewed from the normal direction of the first side surface 101. The third component 113 appearing on the second side surface 102 includes a diagonal beam extending from the upper right to the lower left of the drawing when viewed from the normal direction of the first side surface 101. In other words, the diagonal beam of the first component 111 and the diagonal beam of the third component 113 are arranged symmetrically with respect to the central axis of the probe 10. As shown in FIG. 6, the coil spring portion 121 has a double helix structure. FIG. 7 shows a perspective view of the coil spring portion 121.

[0018] Furthermore, the probe 10 includes a current path member 114A disposed inside the coil spring portion 121. The current path member 114A is a conductive columnar member. The current path member 114A of the probe 10 shown in FIG. 1 bridges at least one of the following: between the tip end portion 11 and the connecting portion 122; between the two connecting portions 122; and between the base end portion 13 and the connecting portion 122.

[0019] For example, the current path member 114A bridges the tip portion 11 with a connecting portion 122 that connects to one end of a coil spring portion 121, the other end of which is connected to the tip portion 11. This electrically connects the tip portion 11 with the connecting portion 122 that is closest to the tip portion 11.

[0020] Further, the current path member 114A bridges the base end 13 with a connecting portion 122 that connects to one end of the coil spring portion 121, the other end of which is connected to the base end 13. This electrically connects the base end 13 with the connecting portion 122 that is closest to the base end 13.

[0021] Furthermore, the current path member 114A bridges two connecting portions 122 that are respectively connected to both ends of one coil spring portion, thereby electrically connecting the two connecting portions 122 together.

[0022] 8, for example, current path member 114A disposed inside first coil spring portion 1211 has a first end inserted into first opening 110 formed in the lower surface of tip portion 11, and a second end connected to the upper surface of coupling portion 122. When coil spring portion 121 expands or contracts, the first end of current path member 114A slides inside first opening 110.

[0023] 9, the current path member 114A disposed inside the second coil spring portion 1212 has a first end inserted into a second opening 120 formed in the lower surface of one of the coupling portions 122, and a second end connected to the upper surface of the other coupling portion 122. The current path member 114A disposed inside the third coil spring portion 1213 also electrically connects the two coupling portions 122, similar to the current path member 114A disposed inside the second coil spring portion 1212. The current path member 114A disposed inside the fourth coil spring portion 1214 has a first end inserted into a second opening 120 formed in the lower surface of the coupling portion 122, and a second end connected to the upper surface of the base end portion 13. When the coil spring portion 121 expands or contracts, the first end of the current path member 114A slides inside the second opening 120.

[0024] As described above, when the coil spring portion 121 expands and contracts, the end portion of the current path member 114A slides inside the first opening 110 and the second opening 120. Therefore, even if the probe 10 expands and contracts in the axial direction, the current path member 114A is not bent and exposed outside the coil spring portion 121.

[0025] The first component 111, the second component 112, the third component 113, and the current path member 114A are formed by processing a plate of a conductive material such as a metal material. The probe 10 is manufactured by joining the third component 113, the second component 112, the current path member 114A, and the first component 111 in this order. The beams of the first component 111 and the third component 113 function as springs, and the beams of the first component 111 and the third component 113 are connected to each other by the second component 112. In other words, the beams of the first component 111, the second component 112, and the third component 113 are connected to each other to form the wires of the coil spring portion 121.

[0026] The probe 10 is flexible in the axial direction due to a coil spring part 121 formed by a first part 111, a second part 112, and a third part 113. In other words, since the probe 10 itself has elasticity in the axial direction, it is not necessary to hold the probe 10 in a curved state on the probe head, for example.

[0027] Furthermore, in the probe 10, the current path member 114A disposed inside the coil spring portion 121 functions as a current path between the tip end portion 11 and the base end portion 13. Therefore, even if the electrical resistance is high due to a long path in the coil spring portion 121, the current path of the probe 10 can be shortened. In other words, the current path member 114A can reduce the electrical resistance of the current path of the probe 10. In this way, the current path member 114A functions as a component that shortens the current path. Note that if the electrical resistance of the coil spring portion 121 is at a level that does not affect the inspection of the object under test, the probe 10 does not need to include the current path member 114A.

[0028] 8, the current path member 114A may be arranged in a curved state inside the coil spring portion 121. In this case, the curved directions of the multiple current path members 114A arranged along the axial direction may be different, for example, the curved directions may be staggered along the axial direction.

[0029] The probe 10 may be made of a material such as nickel (Ni), a nickel alloy, gold (Au), silver (Ag), copper (Cu), palladium (Pd), a palladium alloy, rhodium (Rh), a rhodium alloy, or other precious metals. The current path member 114A may be made of a material that has lower mechanical strength but higher conductivity than the first component 111, the second component 112, and the third component 113. For example, the first component 111 and the third component 113 may be made of a Ni alloy, and the current path member 114A may be made of gold or copper.

[0030] When viewed from a direction perpendicular to the axial direction, each wire of the coil spring portion 121 may not be straight but may include a curved portion. For example, as shown in FIG. 10, the direction of each wire may change midway along the side surface. Each wire of the coil spring portion 121 shown in FIG. 10 includes a structure in which a first portion 121A extending at a first angle relative to the axial direction is connected to a second portion 121B extending at a second angle different from the first angle relative to the axial direction. In the example shown in FIG. 10, the second portion 121B is disposed between the first portion 121A and the first portion 121A. By including a curved portion rather than a simple straight line, the load acting on the probe 10 is more easily transmitted in the axial direction, and the probe 10 is prevented from bending away from its central axis and buckling when a pressing force in the axial direction is applied to the probe 10.

[0031] The elastic forces of the multiple coil spring portions 121 included in the probe 10 do not have to be the same. For example, the number of turns of the coil may differ among some of the first coil spring portion 1211, the second coil spring portion 1212, the third coil spring portion 1213, and the fourth coil spring portion 1214. Alternatively, the number of turns may differ among all of the coil spring portions 121. As described above, of two coil spring portions 121 having different elastic forces, one coil spring portion 121 has a different number of turns from the other coil spring portion 121. The number of turns of the coil of each coil spring portion 121 included in the probe 10 can be selected arbitrarily.

[0032] The probe 10 is used in, for example, an electrical connecting device 100A shown in FIG. 11. The probe 10 is held by a holding part 20 having an insertion hole into which the probe 10 is inserted. The probe 10 is inserted into the insertion hole of the holding part 20 from the base end 13 side. A land 21, which is a conductive terminal, is arranged at the bottom of the insertion hole of the holding part 20, and the end face of the base end 13 of the probe 10 is electrically connected to the land 21. The holding part 20 includes an external terminal 22 that is electrically connected to the land 21 via an internal circuit (not shown). The external terminal 22 is electrically connected to an inspection device such as an IC tester (not shown).

[0033] The electrical connecting device 100A may be configured by joining the base end 13 of the probe 10 to the land 21. The connecting method and connecting material for joining the probe 10 to the land 21 may be selected arbitrarily. For example, the end face of the base end 13 of the probe 10 may be joined to the land 21 by soldering.

[0034] The holding unit 20 may be, for example, an integrally molded space transformer. When the holding unit 20 is a space transformer, the arrangement intervals of the external terminals 22 can be made larger than the arrangement intervals of the probes 10. This makes it easier to connect the electrical connecting device 100A to an inspection device.

[0035] When inspecting the inspection object 200, the tip 11 of the probe 10 comes into contact with an electrode pad (not shown) of the inspection object 200. The inspection of the inspection object 200 is performed by transmitting an electrical signal between the inspection object and the inspection device via the probe 10 and the holder 20.

[0036] Since the coil spring portion 121 of the probe 10 has elasticity, when the tip portion 11 of the probe 10, with the base end portion 13 connected to the land 21, is brought into contact with the test object 200, the probe 10 can be elastically deformed along the axial direction. Therefore, after the probe 10 is brought into contact with the test object 200, an overdrive can be applied so as to press the probe 10 against the test object 200. The overdrive can ensure an electrical connection between the probe 10 and the test object 200.

[0037] After the inspection of the inspection object 200 is completed, the probe 10 is separated from the inspection object 200. The probe 10 having the coil spring portion 121 returns to its original shape after being separated from the inspection object 200.

[0038] 11, the probes 10 are shown as being held in a line in the holder 20, but the arrangement of the probes 10 in the holder 20 is arbitrary. For example, the probes 10 may be arranged in a matrix when viewed from the axial direction. Because the probes 10 are held linearly along the axial direction, the arrangement density of the probes 10 can be increased.

[0039] The depth of the insertion hole of the holder 20 into which the probe 10 is inserted can be set arbitrarily. For example, by making the insertion hole deeper, it is possible to prevent the probe 10 from being held at an angle in the holder 20. This makes it possible to prevent the tip 11 from being misaligned with the electrode pad of the test object 200.

[0040] 12 shows an electrical connecting device 100B as another example of an electrical connecting device including probes 10. The holding section 20 of the electrical connecting device 100B includes a probe head 201 having insertion holes through which the probes 10 are inserted, and a wiring board 202 stacked on the probe head 201. Lands 21 are arranged on the surface of the wiring board 202 that faces the probe head 201. The wiring board 202 may be, for example, a space transformer.

[0041] As described above, the holding part 20 that holds the probe 10 may be formed by integral molding as shown in Fig. 11, or may be formed by combining multiple parts as shown in Fig. 12. For example, when the holding part 20 is formed by multiple parts, the manufacturing time of the holding part 20 can be shortened by manufacturing each part in parallel.

[0042] The electrical connection device may stack a printed circuit board having a wiring pattern electrically connected to the external terminals 22 on the holder 20. Electrical signals are transmitted between the object under test and the inspection device via the wiring pattern.

[0043] As described above, the probe 10 according to the embodiment has the coil spring portion 121, and is therefore flexible in the axial direction. Therefore, it is not necessary to hold the probe 10 in a curved state in the electrical connection device. Therefore, the probe 10 and the electrical connection device including the probe 10 make it easy to replace the probe in the electrical connection device.

[0044] <First Modification> In the above, the case where the current path members 114A are individually arranged inside the coil spring portions 121 has been described. However, as shown in FIGS. 13 to 16, the probe 10 may be configured using a current path member 114B that is a single columnar member. FIG. 13 shows the structure of the first component 111. FIG. 14 shows the structure of the second component 112. FIG. 15 shows the structure of the third component 113. FIG. 16 shows the current path member 114B.

[0045] Fig. 17 shows a probe 10 in which a coil spring portion 121 is formed by a first component 111, a second component 112, and a third component 113 shown in Fig. 13 to Fig. 15, respectively, and a current path member 114B shown in Fig. 16 is arranged inside the coil spring portion 121. The number of coil spring portions 121 included in the probe 10 shown in Fig. 17 is two.

[0046] In the probe 10 shown in FIG. 17, as shown in FIG. 14, a second through hole 152 penetrating in the axial direction is formed in the connecting portion 122. The current path member 114B is disposed inside the second through hole 152 of the coil spring portion 121 and the connecting portion 122, and bridges the distal end portion 11 and the proximal end portion 13. For example, a first end of the current path member 114B is inserted into a first through hole 151 formed in the distal end portion 11 shown in FIG. 14, and a second end is inserted into a third through hole 153 formed in the proximal end portion 13. When the coil spring portion 121 expands and contracts, the ends of the current path member 114B slide inside the first through hole 151 and the third through hole 153.

[0047] 18, the current path member 114B may be connected to the coupling portion 122 between the first component 111 and the third component 113 by a connecting component 115. The connecting component 115 is disposed between the current path member 114B and the support plate 116 disposed inside the second through-hole 152, and joins the support plate 116 and the current path member 114B.

[0048] 17, the electrical resistance of the current path can be reduced compared to the probe 10 shown in Fig. 1, which uses multiple current path members 114A. This allows the allowable value of the current flowing through the probe 10 to be increased.

[0049] <Second Modification> In probe 10 using current path member 114B, which is a single columnar member, coil spring portion 121 may be configured using first component 111 shown in Fig. 19, second component 112 shown in Fig. 20, and third component 113 shown in Fig. 21. Fig. 22 shows probe 10 in which coil spring portion 121 is configured using first component 111, second component 112, and third component 113 shown in Fig. 19 to Fig. 21, respectively, and current path member 114B shown in Fig. 16 is disposed inside coil spring portion 121.

[0050] 22, a coupling portion 122 connected to the tip end portion 11 via a first coil spring portion 1211 and a coupling portion 122 connected to the base end portion 13 via a second coil spring portion 1212 are arranged opposite to and spaced apart from each other in the axial direction. In other words, the main body portion 12 is divided into two blocks.

[0051] 22, similarly to the probe 10 shown in FIG. 17, the current path member 114B is disposed inside the coil spring portion 121 and the second through hole 152 of the connecting portion 122, and bridges the tip end portion 11 and the base end portion 13. A first end of the current path member 114B is inserted into the first through hole 151 formed in the tip end portion 11, and a second end is inserted into the third through hole 153 formed in the base end portion 13.

[0052] The current path member 114B may be connected to the coupling portion 122 between the first component 111 and the third component 113 by a connecting component 115. For example, as shown in Fig. 23 , the connecting component 115 is disposed between the current path member 114B and a support plate 116 disposed inside the second through-hole 152 of the coupling portion 122, and joins the support plate 116 and the current path member 114B.

[0053] 22 shows the probe 10 including two coil spring portions 121, the number of coil spring portions 121 of the probe 10 is not limited to two. One of the coupling portions 122 electrically connected to the tip end portion 11 via at least one coil spring portion 121 and the other coupling portion 122 electrically connected to the base end portion 13 via at least one coil spring portion 121 may be arranged apart from each other in the axial direction. In other words, the main body portion 12 may be divided into any two or more blocks.

[0054] (Other embodiments) Although the present invention has been described above by way of the preferred embodiment, the descriptions and drawings that form part of this disclosure should not be understood as limiting the present invention. From this disclosure, various alternative embodiments, examples, and operating techniques will become apparent to those skilled in the art.

[0055] For example, in the above example, the first opening 110, the second opening 120, the first through-hole 151, the second through-hole 152, and the third through-hole 153 are formed perpendicular to the upper or lower surface of the distal end portion 11, the proximal end portion 13, or the connecting portion 122. However, the opening shapes of these openings and through-holes may be tapered, with the area of the opening gradually narrowing from the outside toward the center.

[0056] 24 and 25 show an example in which the opening shape of the second opening 120 in a cross section along the axial direction is tapered. By making the opening shape tapered, the end of the current path member 114A can be easily inserted into the first opening 110 and the second opening 120, and the end of the current path member 114B can be easily inserted into the first through hole 151 and the third through hole 153.

[0057] The electrical connecting device may also be configured so that the base end 13 of the probe 10 can freely contact and separate from the land 21. For example, as in an electrical connecting device 100B shown in Fig. 12, the probe 10 may be held by a probe head 201. Since the base end 13 is not joined to the land 21, the probe 10 can be easily replaced, for example, when a malfunction occurs in the probe 10.

[0058] Thus, it goes without saying that the present invention includes various embodiments not described above. [Explanation of symbols]

[0059] 10 probes 11 Tip 12 Main body 13 Proximal end 20 Holding part 21 rand 22 External terminal 100A Electrical Connection Device 100B Electrical connection device 101 First aspect 102 Second aspect 103 Third aspect 104 Fourth aspect 111 First Part 112 2nd part 113 Third Part 114A Current path components 114B Current path member 115 Connecting parts 121A Part 1 121B 2nd part 122 Connecting part 200 Inspection objects 201 Probe Head 202 Wiring board 1211 First coil spring part 1212 Second coil spring part 1213 Third coil spring part 1214 4th coil spring part

Claims

1. A probe used for inspecting electrical characteristics of an object to be inspected, a tip portion that is to be brought into contact with the test object is disposed at one end in the axial direction; The proximal end is disposed at the other end, It has a rectangular shape having four sides when viewed from the axial direction, A plurality of elastic coil spring portions are connected along the axial direction between the distal end portion and the proximal end portion via inelastic connecting portions. probe.

2. The probe according to claim 1 , comprising at least two of the coil spring portions having different elastic forces.

3. The probe according to claim 2 , wherein one of the two coil spring portions having different elastic forces has a different number of turns from the other coil spring portion.

4. The probe according to claim 1 , wherein each line of the coil spring portion includes a curved portion when viewed in a direction perpendicular to the axial direction.

5. 2. The probe according to claim 1, further comprising a conductive pillar-shaped member arranged inside the coil spring portion, the pillar-shaped member bridging at least one of between the tip end portion and the connecting portion, between two of the connecting portions, and between the base end portion and the connecting portion.

6. a through hole penetrating in the axial direction is formed in the connecting portion, The probe according to claim 1 , further comprising a single columnar member disposed inside the through-holes of the coil spring portion and the connecting portion, bridging the distal end portion and the proximal end portion.

7. The probe according to claim 6 , further comprising a connecting part that connects the columnar member and the coupling part.

8. 7. The probe according to claim 6, wherein one of the connecting portions electrically connected to the tip end portion via at least one of the coil spring portions and another of the connecting portions electrically connected to the base end portion via at least one of the coil spring portions are arranged opposite and spaced apart along the axial direction.

9. A probe according to any one of claims 1 to 8; an insertion hole into which the probe is inserted from the base end, a terminal electrically connected to an end face of the base end being arranged at the bottom of the insertion hole, and a holding part for holding the probe; An electrical connection device comprising:

10. 10. The electrical connecting device according to claim 9, wherein the holding portion is a space transformer.

11. The holding portion is a probe head through which the insertion hole passes; a wiring board that is stacked on the probe head and has the terminals arranged on a surface that faces the probe head; 10. The electrical connection device of claim 9, comprising:

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