Vibration piece and vibration device

Abstract

To provide a vibration piece and a vibration device excellent in G-sensitivity characteristics.SOLUTION: A vibration piece 3 is formed of an AT-cut crystal substrate having a surface orthogonal to a Y'-axis, and when the length from an outer edge of a first portion 35 of a slit 34 on a side of an excitation electrode 38 to the other end in a first direction of the AT-cut crystal substrate is defined as Lx, and the length in the first direction of a second portion 36 as L1, the relationship of 0.0<L1 / Lx≤0.36 is satisfied.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a vibrating element and a vibrating device. [Background technology]

[0002] For example, Patent Document 1 discloses a vibrator element including an annular support arm, a vibrating part extending from a portion of the inner circumference of the support arm, a fixed part disposed on the other side facing the portion of the support arm, and a connecting part connecting the tip of the vibrating part to the support arm. It also discloses a vibrator element in which the gap between the vibrating part and the support arm is L-shaped, and a gap is disposed between the vibrating part and the fixed part. It describes an effect of this configuration in that thermal stress caused by changes in the ambient temperature at the fixed part is less likely to be transmitted to the vibrating part, improving temperature hysteresis characteristics. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-134824 Summary of the Invention [Problem to be solved by the invention]

[0004] However, although the vibrator element described in Patent Document 1 reduces the influence of thermal stress from the fixed portion, there is a problem in that no consideration is given to G sensitivity characteristics. [Means for solving the problem]

[0005] The vibrating piece is made of an AT-cut crystal substrate having a plane orthogonal to the Y' axis of a new orthogonal coordinate system (X, Y', Z) obtained by rotating by a predetermined angle around the X axis of the orthogonal coordinate system (X, Y, Z). It includes a first surface and a second surface that are in a front-back relationship, and is provided at one end in the first direction along the X axis. The support portion has the first surface side attached to a container, an excitation portion arranged side by side with the support portion along the first direction and having excitation electrodes, and a slit. When arranged such that one end in the first direction is on the left side and the other end in the first direction is on the right side, in a plan view from the second surface side, the slit is provided between the support portion and the excitation electrodes, and includes a first portion extending along a second direction intersecting the first direction, and a second portion connected to the upper end of the first portion in the second direction and arranged on the outer edge side of the upper side of the excitation electrodes in the second direction and extending along the first direction. When the length from the outer edge on the excitation electrode side of the first portion of the slit to the other end of the AT-cut crystal substrate in the first direction is Lx, and the length of the second portion in the first direction is L1, the relationship 0.0 < L1 / Lx ≦ 0.36 is satisfied.

[0006] The vibrating piece is made of an AT-cut quartz substrate having a plane orthogonal to the Y' axis of a new orthogonal coordinate system (X, Y', Z') obtained by rotating by a predetermined angle around the X axis of an orthogonal coordinate system (X, Y, Z). It includes a first surface and a second surface that are in a front-back relationship, and is provided at one end in the first direction along the X axis, and includes a support portion where the first surface side is attached to a container, an excitation portion arranged side by side with the support portion along the first direction and having excitation electrodes, and a slit. When arranged such that one end in the first direction is on the left side and the other end in the first direction is on the right side, in a plan view from the second surface side, the slit is provided between the support portion and the excitation electrodes, and includes a first portion extending along a second direction intersecting the first direction, and a third portion connected to the lower end of the first portion in the second direction and arranged on the outer edge side of the lower side of the excitation electrodes in the second direction and extending along the first direction. When the length from the outer edge on the excitation electrode side of the first portion of the slit to the other end of the AT-cut quartz substrate in the first direction is Lx and the length of the third portion in the first direction is L2, the relationship 0.0 < L2 / Lx ≦ 0.34 is satisfied.

[0007] The vibration device includes a vibrating piece made of the AT-cut quartz substrate described above, and a container to which the support portion of the vibrating piece is attached.

Brief Description of the Drawings

[0008] [Figure 1] A plan view showing the schematic structure of the vibration device according to the first embodiment. [Figure 2] A cross-sectional view taken along line A1 - A1 in FIG. 1. [Figure 3] A plan view showing the schematic structure of the vibrating piece included in the vibration device according to the first embodiment. [Figure 4] A plan view for explaining the in-plane rotation angle Ψ of the vibrating piece. [Figure 5] A diagram showing the G sensitivity of the vibrating piece with respect to L1 / Lx. [Figure 6] A plan view showing the schematic structure of the vibration device according to the second embodiment. [Figure 7] FIG. 10 is a plan view showing a schematic structure of a vibrating element included in a vibrating device according to a second embodiment. [Figure 8] FIG. 10 is a graph showing the G sensitivity of the vibrating element relative to L2 / Lx. [Figure 9] FIG. 10 is a plan view showing a schematic structure of a resonation device according to a third embodiment. [Figure 10] FIG. 10 is a graph showing the G sensitivity of the vibrating element relative to L1 / Lx. [Figure 11] FIG. 10 is a plan view showing a schematic structure of a vibration device according to a fourth embodiment. [Figure 12] FIG. 10 is a graph showing the G sensitivity of the vibrating element relative to L2 / Lx. [Figure 13] FIG. 10 is a plan view showing a schematic structure of a vibration device according to a fifth embodiment. [Figure 14] 14 is a cross-sectional view taken along line A2-A2 in FIG. 13. DETAILED DESCRIPTION OF THE INVENTION

[0009] 1. First embodiment First, a vibration device 1 according to a first embodiment will be described with reference to Fig. 1 to Fig. 5, taking as an example a vibrator in which a vibration element 3 is housed in a container 10 and a lid 20. Note that Fig. 1 illustrates a state in which the lid 20 is removed for the convenience of explaining the internal configuration of the vibration device 1.

[0010] For ease of explanation, the following drawings of the vibration devices 1, 1a, 1b, 1c, and 1g show three mutually orthogonal axes: an X axis, a Y axis, and a Z axis. The direction along the X axis is referred to as the "X direction," the direction along the Y axis as the "Y direction," and the direction along the Z axis as the "Z direction." The tip of the arrow in each axial direction is referred to as the "plus side," and the base end as the "minus side."

[0011] Furthermore, for convenience of explanation, FIGS. 3, 4, and 7 illustrate the X-axis, Y'-axis, and Z'-axis as three mutually orthogonal crystal axes corresponding to the crystal axes of quartz. The direction along the X-axis is referred to as the "X-direction," the direction along the Y'-axis as the "Y'-direction," and the direction along the Z'-axis as the "Z'-direction." The tip end of each axial arrow is also referred to as the "plus side," and the base end as the "minus side." In this embodiment, the first direction is the X-direction, and the second direction is the Z'-direction. In the following drawings of the resonation devices 1, 1a, 1b, 1c, and 1g, the X-axis coincides with the X-axis of the crystal, the Y-axis coincides with the Z'-axis of the crystal, and the Z-axis coincides with the Y'-axis of the crystal.

[0012] As shown in FIGS. 1 and 2, the vibration device 1 includes a container 10, a lid 20, and a vibration element 3.

[0013] The container 10 has a third surface 13 and a fourth surface 14, which are opposite surfaces, and the third surface 13 faces the vibrating element 3. Two electrode pads 11 and 12 that join the vibrating element 3 are arranged side by side along the Y direction on the third surface 13, and a plurality of external terminals 15 used for supplying power and outputting frequencies are provided on the fourth surface 14. The electrode pads 11 and 12 and the external terminals 15 are electrically connected by wiring or through electrodes (not shown). Silicon is a suitable material for the container 10, but glass, ceramic, etc. may also be used.

[0014] The lid 20 has a recess 21 that opens toward the container 10, and is joined to the third surface 13 of the container 10 via a joining member 25, forming a housing space 22 together with the container 10 to house the vibrating element 3. The lid 20 and the container 10 may be joined directly without using the joining member 25. The inside of the housing space 22 is in a reduced pressure state, preferably a state closer to a vacuum. This reduces viscous resistance and improves the oscillation characteristics of the vibrating element 3. Silicon is a suitable material for the lid 20, but glass, ceramic, etc. may also be used.

[0015] As shown in FIG. 3, the vibrating element 3 includes a quartz crystal substrate 30, an excitation electrode 38, a first connection electrode 41, and a second connection electrode 42. The quartz crystal substrate 30 is an AT-cut quartz crystal substrate. An AT-cut quartz crystal substrate has three crystal axes, X, Y, and Z, which are perpendicular to each other; the X axis is called the electrical axis, the Y axis is called the mechanical axis, and the Z axis is called the optical axis. It has a surface that is perpendicular to the Y' axis of the new Cartesian coordinate system (X,Y',Z') obtained by rotating it counterclockwise by a predetermined angle, for example, about 35°15', around the X axis of the Cartesian coordinate system (X,Y,Z).

[0016] The quartz crystal substrate 30 is rectangular in plan view, with the X direction as the long side direction, the Z' direction as the short side direction, and the Y' direction as the thickness direction. The plane including the X axis and the Z' axis, which are orthogonal to the Y' axis, is the main surface, and thickness-shear vibration is excited on the main surface as the main vibration.

[0017] The in-plane rotation angle Ψ of the quartz crystal substrate 30 is 0° or 180°. The in-plane rotation angle Ψ of the quartz crystal substrate 30 is the angle between the X-axis and an imaginary line 50 passing through the center of the support portion 33 and the center of the excitation electrode 38 in a plan view, as shown in FIG.

[0018] The quartz crystal substrate 30 has a first surface 31a and a second surface 31b which are opposite surfaces, and is provided with a support portion 33 which is provided at one end in the first direction, i.e., the X direction, in a plan view, and whose first surface 31a side is attached to the container 10, an excitation portion 32 which is aligned with the support portion 33 in the X direction in a plan view, and in which an excitation electrode 38 is arranged, and a slit 34 which penetrates from the first surface 31a to the second surface 31b.

[0019] The first surface 31a of the quartz substrate 30 faces the third surface 13 of the container 10. An excitation electrode 38, a first connection electrode 41, and a second connection electrode 42 are provided on the first surface 31a of the quartz substrate 30. The excitation electrode 38 is disposed on the excitation portion 32, and the first connection electrode 41 and the second connection electrode 42 are disposed on the support portion 33. The first connection electrode 41 and the second connection electrode 42 are arranged side by side along one short side of the quartz substrate 30. The first connection electrode 41 faces an electrode pad 11 provided on the container 10, and the second connection electrode 42 faces an electrode pad 12 provided on the container 10. The excitation electrode 38 is provided on the second surface 31b of the quartz substrate 30.

[0020] The excitation electrode 38 provided on the first surface 31a is electrically connected to a first connection electrode 41 via a lead electrode 39. The excitation electrode 38 provided on the second surface 31b is electrically connected to a second connection electrode 42 provided on the first surface 31a via the lead electrode 39 and a side surface electrode 40 provided on the side surface on the negative side in the X direction of the quartz crystal substrate 30. The excitation electrode 38 provided on the first surface 31a and the excitation electrode 38 provided on the second surface 31b are arranged to overlap in a plan view.

[0021] In a plan view from the second surface 31b side when one end in the X direction is positioned on the left side, i.e., the negative side in the X direction, and the other end in the X direction is positioned on the right side, i.e., the positive side in the X direction, the slit 34 includes: a first portion 35 provided between the support portion 33 and the excitation electrode 38 and extending along a second direction, which is the Z' direction intersecting the X direction; and a second portion 36 connected to an upper end of the first portion 35 on the positive side in the Z' direction, disposed on the upper outer edge side of the excitation electrode 38 on the positive side in the Z' direction, and extending along the X direction. Since the slit 34 is provided between the support portion 33 and the excitation electrode 38, it is possible to suppress transmission of distortion generated by joining the vibrating element 3 to the container 10 and stress accompanying temperature changes to the excitation portion 32.

[0022] As shown in FIGS. 1 and 2, the support portion 33 of the vibrating piece 3 and the container 10 are joined via conductive joining members 43 and 44. Specifically, the conductive joining member 43 joins and electrically connects the first connection electrode 41 disposed on the support portion 33 and the electrode pad 11. The conductive joining member 44 joins and electrically connects the second connection electrode 42 disposed on the support portion 33 and the electrode pad 12. Further, the constituent materials of the conductive joining members 43 and 44 are metal bumps, solder, conductive adhesives, etc.

[0023] Next, with the in-plane rotation angle Ψ of the crystal substrate 30 being 0° or 180°, the relationship between the G sensitivity and the length of the second portion 36 of the slit 34 will be described with reference to FIG. 5.

[0024] As shown in FIG. 3, FIG. 5 shows the result of simulating the G sensitivity with respect to L1 / Lx when the length from the outer edge on the excitation electrode 38 side of the first portion 35 of the slit 34 to the other end in the X direction of the crystal substrate 30 is Lx and the length of the second portion 36 is L1. The G sensitivity is Γ which is the square root of the sum of the squares of the G sensitivities in the X, Y, and Z directions.

[0025] From FIG. 5, the range of L1 / Lx for which Γ is less than 0.6 ppb / G, that is, the G sensitivities in the X, Y, and Z directions can be made less than ±0.6 ppb / G each, is greater than 0.0 and less than or equal to 0.36, and is a range that satisfies the relationship 0.0 < L {1} / {Lx} ≦ 0.36. By setting the in-plane rotation angle Ψ of the vibrating piece 3 to 0° or 180° and satisfying the relationship 0.0 < L1 / Lx ≦ 0.36, the G sensitivities in the X, Y, and Z directions can be made less than ±0.6 ppb / G each.

[0026] As described above, since the vibration device 1 of the present embodiment includes the vibrating piece 3 in which the in-plane rotation angle Ψ is 0° or 180° and the ratio L1 / Lx of the length L1 of the second portion 36 of the slit 34 to the length Lx of the excitation portion 32 satisfies the relationship 0.0 < L1 / Lx ≦ 0.36, it is possible to reduce the influence of the support stress and obtain excellent G sensitivity characteristics in which the G sensitivities in the X, Y, and Z directions are each less than ±0.6 ppb / G.

[0027] 2. Second embodiment Next, a vibration device 1a according to a second embodiment will be described with reference to Fig. 6, Fig. 7, and Fig. 8. In Fig. 6, for the sake of convenience in describing the internal configuration of the vibration device 1a, the cover 20 is shown removed.

[0028] The resonator device 1a of this embodiment is similar to the resonator device 1 of the first embodiment except that the shape of the slits 34a in the resonator elements 3a is different from that of the resonator device 1 of the first embodiment. Note that the following description will focus on the differences from the first embodiment described above, and a description of similar points will be omitted.

[0029] As shown in FIG. 6, the vibration device 1a includes a container 10, a lid 20, and a vibration element 3a.

[0030] As shown in FIG. 7, the vibrating element 3a has a quartz crystal substrate 30a, an excitation electrode 38, a first connection electrode 41, and a second connection electrode 42, and the quartz crystal substrate 30a is an AT-cut quartz crystal substrate.

[0031] The quartz crystal substrate 30 has a first surface 31a and a second surface 31b which are opposite surfaces, and is provided with a support portion 33 whose first surface 31a side is attached to the container 10, an excitation portion 32 in which an excitation electrode 38 is arranged, and a slit 34a which penetrates from the first surface 31a to the second surface 31b.

[0032] When the slit 34a is arranged so that one end in the X direction is on the left side, i.e., the negative side in the X direction, and the other end in the X direction is on the right side, i.e., the positive side in the X direction, as viewed in a plan view from the second surface 31b side, the slit 34a includes: a first portion 35 that is provided between the support portion 33 and the excitation electrode 38 and extends along the Z' direction that intersects with the X direction; and a third portion 37 that is connected to the lower end of the first portion 35 that is on the negative side in the Z' direction, is arranged on the lower outer edge side of the excitation electrode 38 that is on the negative side in the Z' direction, and extends along the X direction.

[0033] Next, with the in-plane rotation angle Ψ of the vibrating piece 3 being 0° or 180°, the relationship between the length L2 of the third portion 37 of the slit 34a and the G sensitivity will be described with reference to FIG. 8.

[0034] As shown in FIG. 7, FIG. 8 shows the result of simulating the G sensitivity with respect to L2 / Lx when the length from the outer edge on the excitation electrode 38 side of the first portion 35 of the slit 34a to the other end in the X direction of the crystal substrate 30 is Lx and the length of the third portion 37 is L2. Note that the G sensitivity is Γ obtained by taking the square root of the sum of the squares of the G sensitivities in the X, Y, and Z directions.

[0035] From FIG. 8, the range of L2 / Lx for which Γ is less than 0.6 ppb / G, that is, the G sensitivities in the X, Y, and Z directions can be made less than ±0.6 ppb / G respectively, is greater than 0.0 and less than or equal to 0.34, that is, it is a range satisfying the relationship 0.0 < L2 / Lx ≤ 0.34. By setting the in-plane rotation angle Ψ of the vibrating piece 3 to 0° or 180° and satisfying the relationship 0.0 < L2 / Lx ≤ 0.34, the G sensitivities in the X, Y, and Z directions can be made less than ±0.6 ppb / G respectively.

[0036] As described above, the vibration device 1a of the present embodiment has a vibrating piece 3a in which the in-plane rotation angle Ψ is 0° or 180° and the ratio L2 / Lx of the length L2 of the third portion 37 of the slit 34a to the length Lx of the excitation portion 32 satisfies the relationship 0.0 < L2 / Lx ≤ 0.34. Therefore, the influence of the support stress can be reduced, and excellent G sensitivity characteristics in which the G sensitivities in the X, Y, and Z directions are each less than ±0.6 ppb / G can be obtained.

[0037] 3. Third Embodiment Next, the vibration device 1b according to the third embodiment will be described with reference to FIGS. 9 and 10. In FIG. 9, for the sake of convenience in explaining the internal configuration of the vibration device 1b, the state in which the lid body 20 is removed is shown.

[0038] The vibration device 1b of the present embodiment is the same as the vibration device 1 of the first embodiment, except that the range satisfying the desired G-sensitivity characteristics of L1 / Lx of the vibrating piece 3b is different. Note that the description will focus on the differences from the above-described first embodiment, and the description of the same matters will be omitted.

[0039] As shown in FIG. 9, the vibration device 1b includes a container 10, a lid body 20, and a vibrating piece 3b.

[0040] The vibrating piece 3b of the present embodiment has an in-plane rotation angle Ψ of 0° or 180°, and the relationship between the length L1 of the second portion 36 of the slit 34 and the G-sensitivity is the same as that in FIG. 5. Therefore, from FIG. 10, which is the same as FIG. 5, the range of L1 / Lx for which Γ is less than 0.3 ppb / G, that is, the G-sensitivity in the X, Y, and Z directions is less than ±0.3 ppb / G, respectively, is greater than 0.0 and not more than 0.12, and is a range satisfying the relationship of 0.0 < L1 / Lx ≤ 0.12.

[0041] As described above, the vibration device 1b of the present embodiment has an in-plane rotation angle Ψ of 0° or 180°, and the vibrating piece 3b satisfies the relationship of 0.0 < L2 / Lx ≤ 0.12, which is the ratio of the length L1 of the second portion 36 of the slit 34 to the length Lx of the excitation portion 32. Therefore, the influence of the support stress can be reduced, and excellent G-sensitivity characteristics can be obtained, where the G-sensitivity in the X, Y, and Z directions is less than ±0.3 ppb / G, respectively.

[0042] 4. Fourth Embodiment Next, the vibration device 1c according to the fourth embodiment will be described with reference to FIGS. 11 and 12. Note that in FIG. 11, for convenience of explaining the internal configuration of the vibration device 1c, the state where the lid body 20 is removed is illustrated.

[0043] The vibration device 1c of the present embodiment is the same as the vibration device 1a of the second embodiment, except that the range satisfying the desired G-sensitivity characteristics of L2 / Lx of the vibrating piece 3c is different. Note that the description will focus on the differences from the above-described second embodiment, and the description of the same matters will be omitted.

[0044] As shown in FIG. 11, the vibration device 1c includes a container 10, a lid body 20, and a vibration piece 3c.

[0045] The vibration piece 3c of the present embodiment has an in-plane rotation angle Ψ of 0° or 180°, and the relationship between the G sensitivity and the length L2 of the third portion 37 of the slit 34a is the same as that in FIG. 8. Therefore, from FIG. 12 which is the same as FIG. 8, the range of L2 / Lx for which Γ is less than 0.3 ppb / G, that is, the G sensitivity in the X direction, Y direction, and Z direction can be made less than ±0.3 ppb / G respectively, is greater than 0.0 and less than or equal to 0.10, and is a range that satisfies the relationship of 0.0 < L2 / Lx ≤ 0.10.

[0046] As described above, since the vibration device 1c of the present embodiment has an in-plane rotation angle Ψ of 0° or 180° and includes a vibration piece 3c in which the ratio L2 / Lx of the length L2 of the third portion 37 of the slit 34a to the length Lx of the excitation portion 32 satisfies the relationship of 0.0 < L2 / Lx ≤ 0.10, the influence of the support stress can be reduced, and excellent G sensitivity characteristics in which the G sensitivity in the X direction, Y direction, and Z direction are each less than ±0.3 ppb / G can be obtained.

[0047] 5. Fifth Embodiment Next, the vibration device 1g according to the fifth embodiment will be described with reference to FIGS. 13 and 14. In FIG. 13, for the sake of convenience in explaining the internal structure of the vibration device 1g, a state in which the lid body 20 is removed is shown.

[0048] The vibration device 1g of the present embodiment is the same as the vibration device 1 of the first embodiment except that the structure of the container 10g and the structure of the vibration piece 3g are different from those of the vibration device 1 of the first embodiment. Hereinafter, the description will focus on the differences from the aforementioned first embodiment, and the description of the same matters will be omitted.

[0049] As shown in FIGS. 13 and 14, the vibration device 1g includes a container 10g, a lid body 20, and a vibration piece 3g.

[0050] The container 10g has two electrode pads 11g and 12g arranged side by side along the X direction which is the longitudinal direction on the third surface 13. On the fourth surface 14, a plurality of external terminals 15 used for power supply and frequency output are provided.

[0051] The vibrating piece 3g has a crystal substrate 30, an exciting electrode 38, a first connection electrode 41g, and a second connection electrode 42g.

[0052] The crystal substrate 30 includes a support portion 33, an exciting portion 32, and a slit 34 provided between the support portion 33 and the exciting electrode 38. Incidentally, the length L1 of the second portion 36 of the slit 34 satisfies the relationship of 0.0 < L1 / Lx ≦ 0.36 or 0.0 < L1 / Lx ≦ 0.12.

[0053] The crystal substrate 30 has a first surface 31a and a second surface 31b which are in a front-back relationship. The first connection electrode 41g is provided on the first surface 31a of the support portion 33, and the second connection electrode 42g is provided on the second surface 31b of the support portion 33. The first connection electrode 41g and the second connection electrode 42g have an overlapping portion at the center of the short side direction of the crystal substrate 30 in plan view.

[0054] An exciting electrode 38 is provided on the exciting portion 32 of the crystal substrate 30. The exciting electrode 38 provided on the first surface 31a of the exciting portion 32 is electrically connected to the first connection electrode and the first connection electrode 41g via a lead electrode 39. The exciting electrode 38 provided on the second surface 31b of the exciting portion 32 is electrically connected to the second connection electrode 42g via a lead electrode 39.

[0055] The first connection electrode 41g is arranged at a position overlapping with the electrode pad 11g provided on the container 10g, and is joined to the electrode pad 11g via a conductive joining member 43g and is electrically connected. The second connection electrode 42g is electrically connected to the electrode pad 12g provided on the container 10g via a bonding wire 45.

[0056] Furthermore, in the vibrating piece 3g of the present embodiment, although the quartz substrate 30 which is the AT-cut quartz substrate of the first embodiment or the third embodiment is used, it is not limited thereto, and the quartz substrate 30a which is the AT-cut quartz substrate used in the second embodiment or the fourth embodiment and satisfies the relationship of 0.0 < L2 / Lx ≤ 0.34 or 0.0 < L2 / Lx ≤ 0.10 may also be used.

[0057] With such a configuration, the vibrating piece 3g can be supported at one point, the influence of the support stress can be further reduced, and the same effect as that of the first embodiment can be obtained.

Explanation of Reference Numerals

[0058] 1, 1a, 1b, 1c, 1g... vibration device, 3, 3a, 3b, 3c, 3g... vibrating piece, 10... container, 11, 12... electrode pad, 13... third surface, 14... fourth surface, 15... external terminal, 20... lid body, 21... recess, 22... accommodation space, 25... joining member, 30... quartz substrate, 31a... first surface, 31b... second surface, 32... excitation portion, 33... support portion, 34... slit, 35... first portion, 36... second portion, 37... third portion, 38... excitation electrode, 39... lead electrode, 40... side surface electrode, 41... first connection electrode, 42... second connection electrode, 43, 44... conductive joining member, 45... bonding wire, 50... virtual line, L1, L2, Lx... length, Ψ... in-plane rotation angle.

Claims

1. an AT-cut quartz crystal substrate that has been rotated by a predetermined angle around the X-axis of a Cartesian coordinate system (X, Y, Z) and has a surface that is orthogonal to the Y'-axis of a new Cartesian coordinate system (X, Y', Z') obtained by this rotation; It includes a first surface and a second surface that are opposite surfaces, a support portion provided at one end in a first direction along the X axis, the support portion having the first surface attached to the container; an excitation section aligned with the support section along the first direction and including excitation electrodes; a slit; When the first end portion is disposed so that one end portion in the first direction is on the left side and the other end portion in the first direction is on the right side, in a plan view from the second surface side, The slit is a first portion provided between the support portion and the excitation electrode and extending along a second direction intersecting the first direction; a second portion connected to an upper end of the first portion in the second direction, disposed on an upper outer edge side of the excitation electrode in the second direction, and extending along the first direction, When the length from the outer edge of the first portion of the slit on the excitation electrode side to the other end of the AT-cut quartz crystal substrate in the first direction is Lx, and the length of the second portion in the first direction is L1, 0.0<L1 / Lx≦0.36 Satisfy the relationship of vibrating piece.

2. an AT-cut quartz crystal substrate that has been rotated by a predetermined angle around the X-axis of a Cartesian coordinate system (X, Y, Z) and has a surface that is orthogonal to the Y'-axis of a new Cartesian coordinate system (X, Y', Z') obtained by this rotation; It includes a first surface and a second surface that are opposite surfaces, a support portion provided at one end in a first direction along the X axis, the support portion having the first surface attached to the container; an excitation section aligned with the support section along the first direction and including excitation electrodes; a slit; When the first end portion is disposed so that one end portion in the first direction is on the left side and the other end portion in the first direction is on the right side, in a plan view from the second surface side, The slit is a first portion provided between the support portion and the excitation electrode and extending along a second direction intersecting the first direction; a third portion connected to a lower end of the first portion in the second direction, disposed on a lower outer edge side of the excitation electrode in the second direction, and extending along the first direction, When the length from the outer edge of the first portion of the slit on the excitation electrode side to the other end of the AT-cut quartz crystal substrate in the first direction is Lx, and the length of the third portion in the first direction is L2, 0.0<L2 / Lx≦0.34 Satisfy the relationship of vibrating piece.

3. In claim 1, 0.0<L1 / Lx≦0.12 Satisfy the relationship of vibrating piece.

4. In claim 2, 0.0<L2 / Lx≦0.10 Satisfy the relationship of vibrating piece.

5. In any one of claims 1 to 4, The slit extends from the first surface to the second surface. vibrating piece.

6. In any one of claims 1 to 4, The support portion is a first connection electrode and a second connection electrode disposed on the first surface of the vibrating element; The first connection electrode and the second connection electrode are arranged side by side along one side of the vibrating element. vibrating piece.

7. In any one of claims 1 to 4, The support portion is a first connection electrode disposed on the first surface of the vibrating element and a second connection electrode disposed on the second surface, the first connection electrode and the second connection electrode have an overlapping portion in a plan view; vibrating piece.

8. A vibrating piece made of an AT-cut quartz crystal substrate according to any one of claims 1 to 4; a container to which the support portion of the vibrating element is attached; Equipped with Vibration device.

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