Collection device

Abstract

To provide a collection device capable of collecting an insoluble solid material contained in an etchant, and capable of continuously operating an etching device even if clogged by the insoluble solid material.SOLUTION: A collection device 1 includes: a filter part 2 having, in an interior space 8a, a first mesh filter 9 cylindrically-shaped and configured to collect an insoluble solid material contained in an etchant; an inflow part 3 having an inflow port 3b configured to make the etchant flow into the interior space 8a; an outflow part 4 having an outflow port 4b configured to make the etchant flow out from the interior space 8a; a first flange 5 arranged at an outer edge of an opening 9C of the first mesh filter 9; a second flange 6 provided at an inner wall of the filter part 2; and a spring structure part 7 configured to separate the first flange 5 from the second flange 6 accompanied by a rise of an internal pressure of the first mesh filter 9 to form a flow channel of the etchant between the first flange 5 and the second flange 6.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a collection device for collecting insoluble solids contained in an etching solution. [Background technology]

[0002] Metal etching plays an important role in the processing of printed wiring boards, IC lead frames, and precision electronic components. Ferric chloride solution and copper chloride solution are the most commonly used etchants. When using ferric chloride solution, the properly prepared etchant is circulated between the processing equipment and the tank using a pump and used repeatedly.

[0003] Copper alloys containing approximately 3% titanium by mass have hardness and strength comparable to steel and excellent spring properties. Therefore, these copper alloys are expected to be used as conductive spring materials. These copper alloys are etched and used as specific parts. When these copper alloys are etched, the concentration of titanium that is not dissolved during etching increases in the etching solution, resulting in the precipitation of titanium oxide. The precipitated titanium oxide adheres to the inner walls of the processing equipment's piping but eventually peels off from the inner walls. If titanium oxide that peels off from the inner walls of the piping (hereinafter referred to as "peeled pieces") clogs the nozzle opening used to spray the etching solution onto the copper alloy, the spray pattern of the etching solution changes, affecting the etching finish. Conventionally, periodic maintenance has been performed to prevent such nozzle opening clogging. During maintenance, most of the peeled pieces can be removed by high-pressure washing or chemical cleaning of the nozzle followed by flushing. However, there is a problem in that peeled pieces remain in the piping downstream of the processing equipment's filter, requiring time to resume operation after maintenance.

[0004] In order to prevent the flaked pieces from remaining in the pipe, it is known to provide a Y-shaped strainer in the pipe (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Patent No. 5357842 Summary of the Invention [Problem to be solved by the invention]

[0006] However, strainers require periodic maintenance and can become clogged unexpectedly. In such cases, the operation of the processing equipment must be stopped. Therefore, when etching is performed using a roll-to-roll process, many processing defects can occur depending on the timing of the strainer clogging.

[0007] The present invention has been made in consideration of the above circumstances, and aims to provide a collection device that can collect insoluble solids contained in an etching solution and that allows an etching processing device to continue operating even if clogging occurs due to insoluble solids. [Means for solving the problem]

[0008] The present invention has the following aspects. [1] A collection device for collecting insoluble solids contained in an etching solution, a filtering section having a cylindrical first mesh filter disposed in an internal space thereof for collecting the insoluble solids; an inlet portion having an inlet through which the etching liquid flows into the internal space; an outflow portion having an outlet through which the etching solution flows out from the internal space; a first flange provided on an outer edge of the opening of the first mesh filter; a second flange provided on an inner wall of the filtering section; a spring structure that separates the first flange from the second flange as the internal pressure of the first mesh filter increases, thereby forming a flow path for the etching liquid between the first flange and the second flange. [2] The collection device described in [1], wherein the spring structure separates the first flange from the second flange by compressing the spring above the filtration section. [3] The collection device described in [1], wherein the spring structure separates the first flange from the second flange by compressing the spring below the filtration section. [4] The collection device described in any one of [1] to [3], further comprising a second mesh filter disposed adjacent to the first mesh filter and configured to collect the insoluble solid matter contained in the etching solution that has flowed into the flow path. [5] The collection device described in [4], further comprising a third mesh filter arranged adjacent to the second mesh filter, having a mesh size smaller than that of the second mesh filter, and configured to collect the insoluble solids contained in the etching solution that has passed through the second mesh filter. [6] The collection device according to [1], comprising an output unit that outputs the operation of the spring structure unit. [Effects of the Invention]

[0009] According to the present invention, it is possible to provide a collection device that can collect insoluble solids contained in an etching solution and that allows the etching processing device to continue operating even if clogging occurs due to insoluble solids. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a cross-sectional view along the height direction, schematically illustrating a collection device according to a first embodiment of the present invention. [Figure 2] 1 is a plan view schematically showing a collection device according to a first embodiment of the present invention. [Figure 3] 1 is a cross-sectional view along the height direction, schematically illustrating a collection device according to a first embodiment of the present invention. [Figure 4] 1 is a plan view schematically showing a collection device according to a first embodiment of the present invention. [Figure 5] FIG. 6 is a cross-sectional view along the height direction, schematically illustrating a collection device according to a second embodiment of the present invention. [Figure 6] FIG. 4 is a plan view schematically showing a collection device according to a second embodiment of the present invention. [Figure 7] FIG. 6 is a cross-sectional view along the height direction, schematically illustrating a collection device according to a second embodiment of the present invention. [Figure 8] FIG. 4 is a plan view schematically showing a collection device according to a second embodiment of the present invention. [Figure 9] FIG. 10 is a cross-sectional view along the height direction, schematically illustrating a collection device according to a third embodiment of the present invention. [Figure 10] FIG. 10 is a plan view schematically showing a collection device according to a third embodiment of the present invention. [Figure 11] FIG. 10 is a cross-sectional view along the height direction, schematically illustrating a collection device according to a third embodiment of the present invention. [Figure 12] FIG. 10 is a plan view schematically showing a collection device according to a third embodiment of the present invention. [Figure 13] FIG. 10 is a cross-sectional view along the height direction, schematically illustrating a collection device according to a fourth embodiment of the present invention. [Figure 14] FIG. 10 is a plan view schematically showing a collection device according to a fourth embodiment of the present invention. [Figure 15] FIG. 10 is a cross-sectional view along the height direction, schematically illustrating a collection device according to a fourth embodiment of the present invention. [Figure 16] FIG. 10 is a plan view schematically showing a collection device according to a fourth embodiment of the present invention. [Figure 17] FIG. 10 is a cross-sectional view along the height direction, schematically illustrating a collection device according to a fifth embodiment of the present invention. [Figure 18] FIG. 10 is a plan view schematically showing a collection device according to a fifth embodiment of the present invention. [Figure 19] FIG. 10 is a cross-sectional view along the height direction, schematically illustrating a collection device according to a fifth embodiment of the present invention. [Figure 20] FIG. 10 is a plan view schematically showing a collection device according to a fifth embodiment of the present invention. [Figure 21] FIG. 10 is a cross-sectional view along the height direction, schematically illustrating a collection device according to a sixth embodiment of the present invention. [Figure 22] FIG. 10 is a plan view schematically showing a collection device according to a sixth embodiment of the present invention. [Figure 23] FIG. 10 is a cross-sectional view along the height direction, schematically illustrating a collection device according to a sixth embodiment of the present invention. [Figure 24] FIG. 10 is a plan view schematically showing a collection device according to a sixth embodiment of the present invention. [Figure 25] FIG. 13 is a cross-sectional view along the height direction, schematically illustrating a collection device according to a seventh embodiment of the present invention. [Figure 26] FIG. 10 is a plan view schematically showing a collection device according to a seventh embodiment of the present invention. [Figure 27] FIG. 13 is a cross-sectional view along the height direction, schematically illustrating a collection device according to a seventh embodiment of the present invention. [Figure 28] FIG. 10 is a plan view schematically showing a collection device according to a seventh embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0011] [Collection device] A collection device according to one embodiment of the present invention is a collection device for collecting insoluble solids contained in an etching solution, and comprises: a filtration section having a cylindrical first mesh filter arranged in an internal space for collecting the insoluble solids; an inlet section having an inlet for flowing the etching solution into the internal space; an outlet section having an outlet for flowing the etching solution out of the internal space; a first flange provided on the outer edge of an opening of the first mesh filter; a second flange provided on an inner wall of the filtration section; and a spring structure section that separates the first flange from the second flange as the internal pressure of the first mesh filter increases, thereby forming a flow path for the etching solution between the first flange and the second flange.

[0012] (First embodiment) Fig. 1 is a cross-sectional view along the height direction, which is a schematic illustration of the collection device of this embodiment. Fig. 2 is a plan view, which is a schematic illustration of the collection device of this embodiment. Fig. 3 is a cross-sectional view along the height direction, which is a schematic illustration of the collection device of this embodiment. Fig. 4 is a plan view, which is a schematic illustration of the collection device of this embodiment. As shown in FIGS. 1 and 3, the collection device 1 of this embodiment includes a filtering section 2, an inlet section 3, an outlet section 4, a first flange 5, a second flange 6, and a spring structure section .

[0013] The filtration unit 2 has a cylindrical housing 8 having an internal space 8a, and a first mesh filter 9 arranged in the internal space 8a to collect insoluble solids contained in the etching solution that has flowed into the internal space 8a.

[0014] The inlet section 3 is a cylindrical member having an internal space (flow path) 3a through which the etching liquid flows. The inlet section 3 is provided perpendicular to the height direction of the housing 8 at the top of the housing 8 of the filtration section 2. The inlet section 3 has an inlet 3b for allowing the etching liquid to flow into the internal space 8a of the housing 8. The inlet 3b is in communication with the internal space 3a.

[0015] The outflow section 4 is a cylindrical member having an internal space (flow path) 4a through which the etching liquid flows. The outflow section 4 is provided at the top of the housing 8 of the filtration section 2, perpendicular to the height direction of the housing 8. The center line along the length direction of the outflow section 4 is on the same line as the center line along the length direction of the inflow section 3, and the outflow section 4 and the inflow section 3 are provided opposite each other with the housing 8 interposed therebetween. The outflow section 4 has an outflow port 4b for discharging the etching liquid from the internal space 8a of the housing 8. The outflow port 4b is in communication with the internal space 4a.

[0016] The first mesh filter 9 has a cylindrical outer tube 9A, a bottom 9B located at the bottom of the housing 8 of the filtration unit 2, and an opening 9C that opens to the top of the housing 8 of the filtration unit 2. The outer tube 9A and the bottom 9B are made of a metal or resin mesh. The outer tube 9A and the bottom 9B capture insoluble solids but allow the etching solution to pass through. The opening 9C is inclined toward the outlet 4. Materials for the first mesh filter 9 include metals such as stainless steel, nickel, and titanium, and resins such as polyvinyl chloride and polytetrafluoroethylene. From these materials, a material that is resistant to the etching solution used is selected. Examples of the first mesh filter 9 include wire mesh (woven into a mesh shape with metal wires), and those made by processing methods such as etching, electroforming, and punching (punching with a die).

[0017] The first flange 5 is provided on the outer edge of the opening 9C of the first mesh filter 9. That is, the first flange 5 is provided so as to surround the outer edge of the opening 9C of the first mesh filter 9, and is provided so as to be inclined toward the outflow portion 4 side in parallel with the inclination of the opening 9C.

[0018] The second flange 6 is provided on the inner wall 8b of the housing 8 of the filtration unit 2, and is provided at an inclination toward the outflow unit 4, parallel to the inclination of the opening 9C and the inclination of the first flange 5. The second flange 6 also has an opening 6a through which the first mesh filter 9 can be inserted.

[0019] The spring structure 7 has a lid portion 7A arranged to cover the top of the housing 8, an inner lid 7B provided on the housing 8 side of the lid portion 7A, a spring 7C provided within the lid portion 7A along the height direction of the housing 8 and in contact with the inner lid 7B, and a rod-shaped connecting portion 7D provided along the height direction of the housing 8 and connecting the inner lid 7B to the first flange 5 (first mesh filter 9).

[0020] The collection device 1 of this embodiment preferably has an output unit that outputs the operation of the spring structure unit 7. This makes it possible to detect clogging of the first mesh filter 9 due to insoluble solids contained in the etching solution.

[0021] A method of using the collection device 1 of this embodiment will be described with reference to FIGS. 1 and 2, when the etching liquid starts to flow from the inlet portion 3 into the internal space 8a of the housing 8, the first flange 5 is in contact with the second flange 6. At this time, the etching liquid flows into the first mesh filter 9 from the opening 9C, insoluble solids contained in the etching liquid are collected by the first mesh filter 9, and the etching liquid passes through the first mesh filter 9 and flows to the outlet portion 4.

[0022] As the amount of insoluble solids in the first mesh filter 9 increases, the internal pressure of the first mesh filter 9 increases. When the first mesh filter 9 is filled with insoluble solids and the internal pressure of the first mesh filter 9 exceeds a predetermined value, as shown in FIGS. 3 and 4 , the spring 7C contracts upward in the height direction of the housing 8, separating the first flange 5 from the second flange 6. This forms a flow path 11 for the etching liquid between the first flange 5 and the second flange 6. Note that when the first mesh filter 9 is filled with insoluble solids, the first mesh filter 9 becomes clogged and the etching liquid no longer passes through. Here, by forming the flow path 11 and flowing the etching liquid through the flow path 11, the etching liquid flows to the outflow portion 4, preventing the flow of the etching liquid from stopping in the housing 8.

[0023] (Second embodiment) Fig. 5 is a cross-sectional view along the height direction, which is a schematic illustration of the collection device of this embodiment. Fig. 6 is a plan view, which is a schematic illustration of the collection device of this embodiment. Fig. 7 is a cross-sectional view along the height direction, which is a schematic illustration of the collection device of this embodiment. Fig. 8 is a plan view, which is a schematic illustration of the collection device of this embodiment. As shown in FIGS. 5 and 7, the collection device 20 of this embodiment includes a filtering section 21, an inlet section 22, an outlet section 23, a first flange 24, a second flange 25, and a spring structure section 26.

[0024] The filtration section 21 has a cylindrical housing 27 having an internal space 27a, and a first mesh filter 28 arranged in the internal space 27a to collect insoluble solids contained in the etching solution that has flowed into the internal space 27a.

[0025] The inlet section 22 is a cylindrical member having an internal space (flow path) 22a through which the etching liquid flows. The inlet section 22 is provided perpendicular to the height direction of the housing 27 at the top of the housing 27 of the filtration section 21. The inlet section 22 has an inlet 22b for allowing the etching liquid to flow into the internal space 27a of the housing 27. The inlet 22b is in communication with the internal space 22a.

[0026] The outflow section 23 is a cylindrical member having an internal space (flow path) 23a through which the etching liquid flows. The outflow section 23 is provided at the top of the housing 27 of the filtration section 21, perpendicular to the height direction of the housing 27. The center line of the outflow section 23 along the length direction is on the same line as the center line of the inflow section 22 along the length direction, and the outflow section 23 and the inflow section 22 are provided opposite each other with the housing 27 interposed therebetween. The outflow section 23 has an outflow port 23b for discharging the etching liquid from the internal space 27a of the housing 27. The outflow port 23b is in communication with the internal space 23a.

[0027] The first mesh filter 28 has a cylindrical outer tube 28A, a bottom 28B located on the lower side of the housing 27 of the filtration unit 21, and an opening 28C opening on the upper side of the housing 27 of the filtration unit 21. The outer tube 28A and the bottom 28B are made of a metal or resin mesh. The outer tube 28A and the bottom 28B collect insoluble solids but allow the etching solution to pass through. The opening 28C is inclined toward the outflow unit 23. The first mesh filter 28 may be similar to the first mesh filter 9.

[0028] The first flange 24 is arranged to surround the outer edge of the opening 28C of the first mesh filter 28 and to cover the inner edge of the opening 28C of the first mesh filter 28, and is arranged at an angle toward the outflow section 23, parallel to the angle of the opening 28C.

[0029] The second flange 25 is provided on the inner wall 27b of the housing 27 of the filtering section 21, and is provided at an inclination toward the outflow section 23 side, parallel to the inclination of the opening 28C and the inclination of the first flange 24. The second flange 25 also has an opening 25a whose area in a plan view is larger than that of the opening 24a of the first flange 24.

[0030] The spring structure 26 has a spring 26A provided between a bottom 28B of the first mesh filter 28 and an inner bottom surface 27c of the housing 27.

[0031] The collection device 20 of this embodiment has a lid 29 arranged to close the top of the housing 27.

[0032] The collection device 20 of the present embodiment preferably has an output unit that outputs the operation of the spring structure unit 26. This makes it possible to detect clogging of the first mesh filter 28 due to insoluble solids contained in the etching solution.

[0033] A method of using the collection device 20 of this embodiment will be described with reference to FIGS. 5 and 6 , when the etching liquid starts to flow from inlet portion 22 into internal space 27a of housing 27, first flange 24 is in contact with second flange 25. At this time, the etching liquid flows into first mesh filter 28 from opening 28C, insoluble solids contained in the etching liquid are collected by first mesh filter 28, and the etching liquid passes through first mesh filter 28 and flows to outlet portion 23.

[0034] As the amount of insoluble solids in the first mesh filter 28 increases, the internal pressure of the first mesh filter 28 increases. When the first mesh filter 28 is filled with insoluble solids and the internal pressure of the first mesh filter 28 exceeds a predetermined value, as shown in FIGS. 7 and 8 , the spring 26A contracts downward in the height direction of the housing 27, separating the first flange 24 from the second flange 25. This forms a flow path 31 for the etching liquid between the first flange 24 and the second flange 25. Note that when the first mesh filter 28 is filled with insoluble solids, the first mesh filter 28 becomes clogged and the etching liquid no longer passes through. By forming the flow path 31 and flowing the etching liquid through the flow path 31, the etching liquid flows to the outflow portion 23, preventing the flow of the etching liquid from being stopped in the housing 27.

[0035] (Third embodiment) Fig. 9 is a cross-sectional view along the height direction, which is a schematic illustration of the collection device of this embodiment. Fig. 10 is a plan view, which is a schematic illustration of the collection device of this embodiment. Fig. 11 is a cross-sectional view along the height direction, which is a schematic illustration of the collection device of this embodiment. Fig. 12 is a plan view, which is a schematic illustration of the collection device of this embodiment. As shown in Figures 9 and 11, the collection device 40 of this embodiment includes a filtration section 41, an inlet section 42, an outlet section 43, a first flange 44, a second flange 45, a third flange 46, and a spring structure section 47.

[0036] The filtration section 41 has a cylindrical housing 49 having an internal space 49a, and a first mesh filter 50 and a second mesh filter 51 arranged within the internal space 49a to capture insoluble solids contained in the etching solution that flows into the internal space 49a.

[0037] The inlet section 42 is a cylindrical member having an internal space (flow path) 42a through which the etching liquid flows. The inlet section 42 is provided perpendicular to the height direction of the housing 49 at the top of the housing 49 of the filtering section 41. The inlet section 42 has an inlet 42b for allowing the etching liquid to flow into the internal space 49a of the housing 49. The inlet 42b is in communication with the internal space 42a.

[0038] The outflow section 43 is a cylindrical member having an internal space (flow path) 43a through which the etching liquid flows. The outflow section 43 is provided perpendicular to the height direction of the housing 49 at the top of the housing 49 of the filtration section 41. The center line along the length direction of the outflow section 43 is on the same line as the center line along the length direction of the inflow section 42, and the outflow section 43 and the inflow section 42 are provided opposite each other with the housing 49 interposed therebetween. The outflow section 43 has an outflow port 43b for discharging the etching liquid from the internal space 49a of the housing 49. The outflow port 43b is in communication with the internal space 43a.

[0039] The first mesh filter 50 has a cylindrical outer tube 50A, a bottom 50B located at the lower side of the housing 49 of the filtration unit 41, and an opening 50C opening at the upper side of the housing 49 of the filtration unit 41. The outer tube 50A and the bottom 50B are made of a metal or resin mesh. The outer tube 50A and the bottom 50B collect insoluble solids but allow the etching solution to pass through. The opening 50C is inclined toward the outflow section 43. Examples of the first mesh filter 50 include those similar to the first mesh filter 9.

[0040] The second mesh filter 51 surrounds the outer periphery of the first mesh filter 50 and is adjacent to the first mesh filter 50. A gap is provided between the first mesh filter 50 and the second mesh filter 51. The second mesh filter 51 has a cylindrical outer tube 51A, a bottom 51B located at the lower side of the housing 49 of the filtration unit 41, and an opening 51C that opens at the upper side of the housing 49 of the filtration unit 41. The outer tube 51A and the bottom 51B are made of a metal or resin mesh. The outer tube 51A and the bottom 51B capture insoluble solids but allow the etching solution to pass through. The opening 51C is inclined toward the outflow section 43. The second mesh filter 51 may be similar to the first mesh filter 9. The second mesh filter 51 does not necessarily have to be in contact with the inner bottom surface of the housing 49.

[0041] The first flange 44 is arranged to surround the outer edge of the opening 50C of the first mesh filter 50 and to cover the inner edge of the opening 50C of the first mesh filter 50, and is arranged at an angle toward the outflow section 43, parallel to the angle of the opening 50C.

[0042] The second flange 45 is arranged to surround the outer edge of the opening 51C of the second mesh filter 51, and is arranged at an inclination toward the outflow section 43, parallel to the inclination of the opening 50C, the inclination of the first flange 44, and the inclination of the opening 51C. The third flange 46 is provided on the inner wall 49b of the housing 49 of the filtering section 41, and is provided inclined toward the outflow section 43 side, parallel to the inclination of the opening 50C, the inclination of the first flange 44, the inclination of the opening 51C, and the inclination of the second flange 45. The third flange 46 also has an opening 46a through which the second mesh filter 51 can be inserted.

[0043] The spring structure 47 has a lid portion 47A arranged to cover the top of the housing 49, an inner lid 47B provided on the housing 49 side of the lid portion 47A, a spring 47C provided within the lid portion 47A along the height direction of the housing 49 and in contact with the inner lid 47B, and a rod-shaped connecting portion 47D provided along the height direction of the housing 49 and connecting the inner lid 47B to the first flange 44 (first mesh filter 50).

[0044] The collection device 40 of the present embodiment preferably has an output unit that outputs the operation of the spring structure unit 47. This makes it possible to detect clogging of the first mesh filter 50 due to insoluble solids contained in the etching solution.

[0045] A method of using the collection device 40 of this embodiment will be described with reference to FIGS. 9 and 10 , when the etching liquid starts to flow from the inlet portion 42 into the internal space 49a of the housing 49, the first flange 44 is in contact with the second flange 45. At this time, the etching liquid flows into the first mesh filter 50 from the opening 50C, insoluble solids contained in the etching liquid are collected by the first mesh filter 50, and the etching liquid passes through the first mesh filter 50 and flows to the outlet portion 43.

[0046] As the amount of insoluble solids in the first mesh filter 50 increases, the internal pressure of the first mesh filter 50 increases. When the first mesh filter 50 is filled with insoluble solids and the internal pressure of the first mesh filter 50 exceeds a predetermined value, as shown in FIGS. 11 and 12 , the spring 47C contracts upward in the height direction of the housing 49, separating the first flange 44 from the second flange 45. This forms a flow path 53 for the etching liquid between the first flange 44 and the second flange 45. At this time, the etching liquid flows from the flow path 53 into the second mesh filter 51, the insoluble solids contained in the etching liquid are collected by the second mesh filter 51, and the etching liquid passes through the second mesh filter 51 and flows to the outlet 43. Here, by forming the flow path 53, the etching liquid flows to the outlet 43, preventing the etching liquid from being blocked in the housing 49.

[0047] The collection device 40 of this embodiment preferably includes a third mesh filter disposed adjacent to the second mesh filter 51 so as to surround the outer periphery of the second mesh filter 51. The third mesh filter has a smaller mesh size than the second mesh filter 51 and can capture insoluble solids contained in the etching solution that has passed through the second mesh filter 51. This allows the etching solution to be purified to a higher degree. Note that one or more third mesh filters may be provided.

[0048] (Fourth embodiment) Fig. 13 is a cross-sectional view along the height direction, which is a schematic illustration of the collection device of this embodiment. Fig. 14 is a plan view, which is a schematic illustration of the collection device of this embodiment. Fig. 15 is a cross-sectional view along the height direction, which is a schematic illustration of the collection device of this embodiment. Fig. 16 is a plan view, which is a schematic illustration of the collection device of this embodiment. As shown in Figures 13 and 15, the collection device 60 of this embodiment includes a filtration section 61, an inlet section 62, an outlet section 63, a first flange 64, a second flange 65, a third flange 66, and a spring structure section 67.

[0049] The filtration section 61 has a cylindrical housing 69 having an internal space 69a, and a first mesh filter 70 and a second mesh filter 71 arranged within the internal space 69a to collect insoluble solids contained in the etching solution that flows into the internal space 69a.

[0050] The inlet section 62 is a cylindrical member having an internal space (flow path) 62a through which the etching liquid flows. The inlet section 62 is provided perpendicular to the height direction of the housing 69 at the top of the housing 69 of the filtering section 61. The inlet section 62 has an inlet 62b for allowing the etching liquid to flow into the internal space 69a of the housing 69. The inlet 62b is in communication with the internal space 62a.

[0051] The outflow section 63 is a cylindrical member having an internal space (flow path) 63a through which the etching liquid flows. The outflow section 63 is provided at the top of the housing 69 of the filtration section 61, perpendicular to the height direction of the housing 69. The center line of the outflow section 63 along the length direction is on the same line as the center line of the inflow section 62 along the length direction, and the outflow section 63 and the inflow section 62 are provided opposite each other with the housing 69 interposed therebetween. The outflow section 63 has an outflow port 63b for discharging the etching liquid from the internal space 69a of the housing 69. The outflow port 63b is in communication with the internal space 63a.

[0052] The first mesh filter 70 has a cylindrical outer tube portion 70A, a bottom portion 70B located on the lower side of the housing 69 of the filtration unit 61, and an opening portion 70C opening on the upper side of the housing 69 of the filtration unit 61. The outer tube portion 70A and the bottom portion 70B are made of a metal or resin mesh. The outer tube portion 70A and the bottom portion 70B collect insoluble solids but allow the etching solution to pass through. The opening portion 70C is inclined toward the outflow portion 63. Examples of the first mesh filter 70 include those similar to the first mesh filter 9.

[0053] The second mesh filter 71 is disposed adjacent to the first mesh filter 70. The second mesh filter 71 has a cylindrical outer tube portion 71A, a bottom portion 71B located at the lower side of the housing 69 of the filtration unit 61, and an opening portion 71C that opens at the upper side of the housing 69 of the filtration unit 61. The outer tube portion 71A and the bottom portion 71B are made of a metal or resin mesh. The outer tube portion 71A and the bottom portion 71B collect insoluble solids but allow the etching solution to pass through. The opening portion 71C is disposed at an angle toward the outflow portion 63. The second mesh filter 71 may be similar to the first mesh filter 9.

[0054] First flange 64 is provided so as to cover the inner edge of opening 70C of first mesh filter 70, and is provided so as to be inclined toward outflow portion 63 in parallel with the inclination of opening 70C.

[0055] The second flange 65 is arranged to cover the inner edge of the opening 51C of the second mesh filter 71, and is arranged at an inclination toward the outflow portion 63 parallel to the inclination of the opening 70C, the inclination of the first flange 64, and the inclination of the opening 71C. The third flange 66 is provided on the inner wall 69b of the housing 69 of the filtering section 61, and is provided at an angle toward the outflow section 63, parallel to the inclination of the opening 70C, the inclination of the first flange 64, the inclination of the opening 71C, and the inclination of the second flange 65. The third flange 66 also has an opening 66a.

[0056] The spring structure 67 has a spring 67A provided between the bottom 70B of the first mesh filter 70 and the inner bottom surface 71a of the second mesh filter 71.

[0057] The collection device 60 of this embodiment has a lid portion 72 arranged to close the top of the housing 69.

[0058] The collection device 60 of this embodiment preferably has an output unit that outputs the operation of the spring structure unit 67. This makes it possible to detect clogging of the first mesh filter 70 due to insoluble solids contained in the etching solution.

[0059] A method of using the collection device 60 of this embodiment will be described with reference to FIGS. 13 and 14 , when the etching liquid starts to flow from the inlet portion 62 into the internal space 69a of the housing 69, the first flange 64 is in contact with the second flange 65. At this time, the etching liquid flows into the first mesh filter 70 from the opening 70C, insoluble solids contained in the etching liquid are collected by the first mesh filter 70, and the etching liquid passes through the first mesh filter 70 and flows to the outlet portion 63.

[0060] As the amount of insoluble solids in the first mesh filter 70 increases, the internal pressure of the first mesh filter 70 increases. When the first mesh filter 70 is filled with insoluble solids and the internal pressure of the first mesh filter 70 exceeds a predetermined value, as shown in FIGS. 15 and 16 , the spring 67AC contracts downward in the height direction of the housing 69, separating the first flange 64 from the second flange 65. This forms a flow path 73 for the etching liquid between the first flange 64 and the second flange 65. At this time, the etching liquid flows from the flow path 73 into the second mesh filter 71, the insoluble solids contained in the etching liquid are collected by the second mesh filter 71, and the etching liquid passes through the second mesh filter 71 and flows to the outflow portion 63. Here, by forming the flow path 73, the etching liquid flows to the outflow portion 63, preventing the etching liquid from being blocked in the housing 69.

[0061] (Fifth embodiment) Fig. 17 is a cross-sectional view along the height direction, which is a schematic illustration of the collection device of this embodiment. Fig. 18 is a plan view, which is a schematic illustration of the collection device of this embodiment. Fig. 19 is a cross-sectional view along the height direction, which is a schematic illustration of the collection device of this embodiment. Fig. 20 is a plan view, which is a schematic illustration of the collection device of this embodiment. As shown in Figures 17 and 19, the collection device 80 of this embodiment includes a filtration section 81, an inlet section 82, an outlet section 83, a first flange 84, a second flange 85, a third flange 86, and a spring structure section 87.

[0062] The filtration section 81 has a cylindrical housing 89 having an internal space 89a, a first mesh filter 90 and a second mesh filter 91 arranged in the internal space 89a to collect insoluble solids contained in the etching solution that flows into the internal space 89a, and a first partition plate 93 and a second partition plate 94.

[0063] The inlet section 82 is a cylindrical member having an internal space (flow path) 82a through which the etching liquid flows. The inlet section 82 is provided perpendicular to the height direction of the housing 89 at the top of the housing 89 of the filtering section 81. The inlet section 82 has an inlet port 82b for allowing the etching liquid to flow into the internal space 89a of the housing 89. The inlet port 82b is in communication with the internal space 82a.

[0064] The outflow section 83 is a cylindrical member having an internal space (flow path) 83a through which the etching liquid flows. The outflow section 83 is provided perpendicular to the height direction of the housing 89 at the top of the housing 89 of the filtration section 81. The center line along the length direction of the outflow section 83 is on the same line as the center line along the length direction of the inflow section 82, and the outflow section 83 and the inflow section 82 are provided opposite each other with the housing 89 interposed therebetween. The outflow section 83 has an outflow port 83b for discharging the etching liquid from the internal space 89a of the housing 89. The outflow port 83b is in communication with the internal space 83a.

[0065] The first mesh filter 90 has a semi-cylindrical outer tube 90A, a bottom 90B located at the lower side of the housing 89 of the filtration unit 81, and an opening 90C opening at the upper side of the housing 89 of the filtration unit 81. The outer tube 90A and the bottom 90B are made of a metal or resin mesh. The outer tube 90A and the bottom 90B capture insoluble solids but allow the etching solution to pass through. The opening 90C is inclined toward the outflow section 83. A first partition plate 93 is provided on the surface of the outer tube 90A of the first mesh filter 90 facing the second mesh filter 91. The first partition plate 93 has an opening 93a.

[0066] The second mesh filter 91 is disposed adjacent to the first mesh filter 90. The second mesh filter 91 has a semi-cylindrical outer tube 91A, a bottom 91B located at the lower side of the housing 89 of the filtration unit 81, and an opening 91C opening at the upper side of the housing 89 of the filtration unit 81. The outer tube 91A and the bottom 91B are made of a metal or resin mesh. The outer tube 91A and the bottom 91B capture insoluble solids but allow the etching solution to pass through. The opening 91C is inclined toward the outflow section 83. A second partition plate 94 is disposed on the surface of the outer tube 91A of the second mesh filter 91 facing the first mesh filter 90. The second partition plate 94 has an opening 94a.

[0067] The first flange 84 is provided on the outer edge of the opening 90C of the first mesh filter 90. That is, the first flange 84 is provided so as to surround the outer edge of the opening 90C of the first mesh filter 90, and is provided so as to be inclined toward the outflow portion 83 side in parallel with the inclination of the opening 90C.

[0068] The second flange 85 is provided to cover (block) the opening 91C of the second mesh filter 91. The second flange 85 is provided inclined toward the outflow portion 83 side, parallel to the inclination of the opening 90C, the inclination of the first flange 84, the inclination of the opening 91C, and the inclination of the second flange 85. The third flange 86 is provided on the inner wall 89b of the housing 89 of the filtration section 81, and is inclined toward the outflow section 83, parallel to the inclination of the opening 90C, the inclination of the first flange 84, the inclination of the opening 71C, and the inclination of the second flange 85. It should be noted that the first mesh filter 90 and the second mesh filter 91 do not necessarily have to be in contact with the inner bottom surface of the housing 89.

[0069] The spring structure 87 has a lid portion 87A arranged to cover the top of the housing 89, an inner lid 87B provided on the housing 89 side of the lid portion 87A, a spring 87C provided within the lid portion 87A along the height direction of the housing 89 and in contact with the inner lid 87B, and a rod-shaped connecting portion 876D provided along the height direction of the housing 89 and connecting the inner lid 87B to the first flange 84 (first mesh filter 90).

[0070] The collection device 80 of the present embodiment preferably has an output unit that outputs the operation of the spring structure unit 87. This makes it possible to detect clogging of the first mesh filter 90 due to insoluble solids contained in the etching solution.

[0071] A method of using the collection device 80 of this embodiment will be described with reference to FIGS. 17 and 18 , when the etching liquid starts to flow from the inflow portion 82 into the internal space 89a of the housing 89, the first partition plate 93 covers (blocks) the opening 94a of the second partition plate 94. At this time, the etching liquid flows into the first mesh filter 90 from the opening 90C, the insoluble solids contained in the etching liquid are collected by the first mesh filter 90, and the etching liquid passes through the first mesh filter 90 and flows to the outflow portion 83.

[0072] As the amount of insoluble solids in the first mesh filter 90 increases, the internal pressure of the first mesh filter 90 increases. When the first mesh filter 90 is filled with insoluble solids and the internal pressure of the first mesh filter 90 exceeds a predetermined value, as shown in FIGS. 19 and 20 , the spring 87C contracts upward in the height direction of the housing 89, causing the opening 93a of the first partition plate 93 and the opening 94a of the second partition plate 94 to face each other and communicate with each other. Then, the etching solution flows from the first mesh filter 90 into the second mesh filter 91, the insoluble solids contained in the etching solution are captured by the second mesh filter 91, and the etching solution passes through the second mesh filter 91 and flows to the outflow portion 83. Here, by communicating the opening 93a of the first partition plate 93 with the opening 94a of the second partition plate 94, the flow of the etching solution in the housing 89 can be prevented from being blocked.

[0073] (Sixth embodiment) Fig. 21 is a cross-sectional view along the height direction, which is a schematic illustration of the collection device of this embodiment. Fig. 22 is a plan view, which is a schematic illustration of the collection device of this embodiment. Fig. 23 is a cross-sectional view along the height direction, which is a schematic illustration of the collection device of this embodiment. Fig. 24 is a plan view, which is a schematic illustration of the collection device of this embodiment. As shown in Figures 21 and 22, the collection device 100 of this embodiment includes a filtration section 101, an inlet section 102, an outlet section 103, a first flange 104, a second flange 105, a third flange 106, and a spring structure section 107.

[0074] The filtration section 101 includes a cylindrical housing 109 having an internal space 109a, a first mesh filter 110 and a second mesh filter 111 arranged in the internal space 109a to collect insoluble solids contained in the etching solution that flows into the internal space 109a, a first partition plate 112, and a second partition plate 113.

[0075] The inlet section 102 is a cylindrical member having an internal space (flow path) 102a through which the etching liquid flows. The inlet section 102 is provided perpendicular to the height direction of the housing 109 at the top of the housing 109 of the filtering section 101. The inlet section 102 has an inlet 102b for allowing the etching liquid to flow into the internal space 109a of the housing 109. The inlet 102b is in communication with the internal space 102a.

[0076] The outflow section 103 is a cylindrical member having an internal space (flow path) 103a through which the etching liquid flows. The outflow section 103 is provided at the top of the housing 109 of the filtration section 101, perpendicular to the height direction of the housing 109. The center line of the outflow section 103 along the length direction is on the same line as the center line of the inflow section 102 along the length direction, and the outflow section 103 and the inflow section 102 are provided opposite each other with the housing 109 interposed therebetween. The outflow section 103 has an outflow port 103b for discharging the etching liquid from the internal space 109a of the housing 109. The outflow port 103b is in communication with the internal space 103a.

[0077] The first mesh filter 110 has a semi-cylindrical outer tube 110A, a bottom 110B located at the lower side of the housing 109 of the filtration unit 101, and an opening 110C opening at the upper side of the housing 109 of the filtration unit 101. The outer tube 110A and the bottom 110B are made of a metal or resin mesh. The outer tube 110A and the bottom 110B capture insoluble solids but allow the etching solution to pass through. The opening 110C is inclined toward the outflow unit 103. A first partition plate 112 is provided on the surface of the outer tube 110A of the first mesh filter 110 facing the second mesh filter 111.

[0078] The second mesh filter 111 is disposed adjacent to the first mesh filter 110. The second mesh filter 111 has a semi-cylindrical outer tube 111A, a bottom 111B located at the lower side of the housing 109 of the filtration unit 101, and an opening 111C that opens at the upper side of the housing 109 of the filtration unit 101. The outer tube 111A and the bottom 111B are made of a metal or resin mesh. The outer tube 111A and the bottom 111B capture insoluble solids but allow the etching solution to pass through. The opening 111C is disposed at an angle toward the outflow section 103. A second partition plate 113 is disposed on the surface of the outer tube 111A of the second mesh filter 111 facing the first mesh filter 110. Second partition plate 113 does not extend to opening 111C of second mesh filter 111, and has opening 113a between opening 111C and second partition plate 113.

[0079] First flange 104 is provided on the outer edge of opening 110C of first mesh filter 110. That is, first flange 104 is provided so as to surround the outer edge of opening 110C of first mesh filter 110, and is provided so as to be inclined toward outflow portion 103 in parallel with the inclination of opening 110C.

[0080] Second flange 105 is provided to cover (block) opening 110C of second mesh filter 111. Second flange 105 is provided tilted toward outflow portion 103 in parallel with the inclination of opening 110C, the inclination of first flange 104, the inclination of opening 111C, and the inclination of second flange 105. The third flange 106 is provided on the inner wall 109b of the housing 109 of the filtration section 101, and is provided inclined toward the outflow section 103 side parallel to the inclination of the opening 110C, the inclination of the first flange 104, the inclination of the opening 111C, and the inclination of the second flange 105. It should be noted that first mesh filter 110 and second mesh filter 111 do not necessarily have to be in contact with the inner bottom surface of housing 109.

[0081] Spring structure 107 has spring 107A provided between bottom 110B of first mesh filter 110 and inner bottom surface 109c of housing 109.

[0082] The collection device 100 of this embodiment has a lid 114 arranged to close the top of the housing 109.

[0083] The collection device 100 of this embodiment preferably has an output unit that outputs the operation of the spring structure unit 107. This makes it possible to detect clogging of the first mesh filter 110 due to insoluble solids contained in the etching solution.

[0084] A method of using the collection device 100 of this embodiment will be described with reference to FIGS. 21 and 22 , when the etching liquid starts to flow from the inflow portion 102 into the internal space 109a of the housing 109, the first partition plate 112 covers (blocks) the opening 113a of the second partition plate 113. At this time, the etching liquid flows into the first mesh filter 110 from the opening 110C, the insoluble solids contained in the etching liquid are collected by the first mesh filter 110, and the etching liquid passes through the first mesh filter 110 and flows to the outflow portion 103.

[0085] As the amount of insoluble solids in the first mesh filter 110 increases, the internal pressure of the first mesh filter 110 increases. When the first mesh filter 110 is filled with insoluble solids and the internal pressure of the first mesh filter 110 exceeds a predetermined value, as shown in FIGS. 23 and 24 , the spring 107A contracts downward in the height direction of the housing 109, thereby separating the first flange 104 from the third flange 106. Then, the first partition plate 112 moves downward in the height direction of the housing 109, and the opening 113a of the second partition plate 113 opens. At this time, the etching solution flows from the first mesh filter 110 into the second mesh filter 111, the insoluble solids contained in the etching solution are collected by the second mesh filter 111, and the etching solution passes through the second mesh filter 111 and flows to the outflow portion 103. Here, by opening the opening 113a of the second partition plate 113, it is possible to prevent the flow of the etching liquid in the housing 109 from being stopped.

[0086] (Seventh embodiment) Fig. 25 is a cross-sectional view along the height direction, which is a schematic illustration of the collection device of this embodiment. Fig. 26 is a plan view, which is a schematic illustration of the collection device of this embodiment. Fig. 27 is a cross-sectional view along the height direction, which is a schematic illustration of the collection device of this embodiment. Fig. 28 is a plan view, which is a schematic illustration of the collection device of this embodiment. As shown in Figures 25 and 26, the collection device 120 of this embodiment includes a filtration section 121, an inlet section 122, an outlet section 123, a first flange 124, a second flange 125, a third flange 126, and a spring structure section 127.

[0087] The filtration section 121 has a cylindrical housing 129 having an internal space 129a, a first mesh filter 130 and a second mesh filter 131 arranged in the internal space 129a to collect insoluble solids contained in the etching solution that has flowed into the internal space 129a, a first partition plate 132, and a second partition plate 133.

[0088] The inlet section 122 is a cylindrical member having an internal space (flow path) 122a through which the etching liquid flows. The inlet section 122 is provided perpendicular to the height direction of the housing 129 at the top of the housing 129 of the filtering section 121. The inlet section 122 has an inlet 122b for allowing the etching liquid to flow into the internal space 129a of the housing 129. The inlet 122b is in communication with the internal space 122a.

[0089] The outflow section 123 is a cylindrical member having an internal space (flow path) 123a through which the etching liquid flows. The outflow section 123 is provided at the top of the housing 129 of the filtration section 121, perpendicular to the height direction of the housing 129. The center line of the outflow section 123 along the length direction is on the same line as the center line of the inflow section 122 along the length direction, and the outflow section 123 and the inflow section 122 are provided opposite each other with the housing 129 interposed therebetween. The outflow section 123 has an outflow port 123b for discharging the etching liquid from the internal space 129a of the housing 129. The outflow port 123b is in communication with the internal space 123a.

[0090] The first mesh filter 130 has a semi-cylindrical outer tube 130A, a bottom 130B located at the lower side of the housing 129 of the filtration unit 121, and an opening 130C opening at the upper side of the housing 129 of the filtration unit 121. The outer tube 130A and the bottom 130B are made of a metal or resin mesh. The outer tube 130A and the bottom 130B capture insoluble solids but allow the etching solution to pass through. The opening 130C is inclined toward the outflow section 123. A first partition plate 132 is provided on the surface of the outer tube 130A of the first mesh filter 130 facing the second mesh filter 131.

[0091] The second mesh filter 131 is disposed adjacent to the first mesh filter 130. The second mesh filter 131 has a semi-cylindrical outer tube 131A, a bottom 131B located at the lower side of the housing 129 of the filtration unit 121, and an opening 131C opening at the upper side of the housing 129 of the filtration unit 121. The outer tube 131A and the bottom 131B are made of a metal or resin mesh. The outer tube 131A and the bottom 131B capture insoluble solids but allow the etching solution to pass through. The opening 131C is inclined toward the outflow section 123. A second partition plate 133 is disposed on the surface of the outer tube 131A of the second mesh filter 131 facing the first mesh filter 130. The second partition plate 133 has an opening 133a near the opening 131C.

[0092] First flange 124 is provided on the outer edge of opening 130C of first mesh filter 130. That is, first flange 124 is provided so as to surround the outer edge of opening 130C of first mesh filter 130, and is provided so as to be inclined toward outflow portion 123 in parallel with the inclination of opening 130C.

[0093] Second flange 125 is provided to cover (block) opening 131C of second mesh filter 131. Second flange 125 is provided inclined toward outflow portion 123, parallel to the inclination of opening 130C, the inclination of first flange 124, the inclination of opening 131C, and the inclination of second flange 125. The third flange 126 is provided on the inner wall 129b of the housing 129 of the filtration section 121, and is provided inclined toward the outflow section 123 side parallel to the inclination of the opening 130C, the inclination of the first flange 124, the inclination of the opening 131C, and the inclination of the second flange 125. It should be noted that first mesh filter 130 and second mesh filter 131 do not necessarily have to be in contact with the inner bottom surface of housing 129.

[0094] The spring structure 127 has a spring 127A provided between the bottom 130B of the first mesh filter 130 and the inner bottom surface 129c of the housing 129.

[0095] The collection device 120 of this embodiment has a lid portion 134 arranged to close the top of the housing 129.

[0096] The collection device 120 of this embodiment preferably has an output unit that outputs the operation of the spring structure unit 127. This makes it possible to detect clogging of the first mesh filter 130 due to insoluble solids contained in the etching solution.

[0097] A method of using the collection device 120 of this embodiment will be described with reference to FIGS. 25 and 26 , when the etching liquid starts to flow from inlet portion 122 into internal space 129a of housing 129, first partition plate 132 covers (blocks) opening 133a of second partition plate 133. At this time, the etching liquid flows into first mesh filter 130 from opening 130C, insoluble solids contained in the etching liquid are collected by first mesh filter 130, and the etching liquid passes through first mesh filter 130 and flows to outlet portion 123.

[0098] As the amount of insoluble solids in first mesh filter 130 increases, the internal pressure of first mesh filter 130 increases. When first mesh filter 130 is filled with insoluble solids and the internal pressure of first mesh filter 130 exceeds a predetermined value, spring 127A contracts downward in the height direction of housing 129, thereby separating first flange 124 from third flange 126, as shown in FIGS. 27 and 28 . This causes first partition plate 132 to move downward in the height direction of housing 129, and opening 133a of second partition plate 133 opens. At this time, the etching solution flows from first mesh filter 130 into second mesh filter 131, where the insoluble solids contained in the etching solution are collected. The etching solution then passes through second mesh filter 131 and flows to outlet 123. Here, by opening the opening 133a of the second partition plate 133, it is possible to prevent the flow of the etching liquid in the housing 129 from being stopped. [Explanation of symbols]

[0099] 1,20,40,60,80,100,120 Collection device 2,21,41,61,81,101,121 Filtration section 3,22,42,62,82,102,122 Inlet 4,23,43,63,83,103,123 Outlet 5,24,44,64,84,104,124 First flange 6,25,45,65,85,105,125 Second flange 7,26,47,67,87,107,127 Spring structure 8,27,49,69,89,109,129 housing 9,28,50,70,90,110,130 First mesh filter 11,31,53,73 Channel 46,66,86,106,126 Third flange 51,71,91,111,131 Second mesh filter 72,114,134 Lid 93,112,132 First partition 94,113,133 Second partition

Claims

1. A collection device for collecting insoluble solids contained in an etching solution, a filtering section having a cylindrical first mesh filter disposed in an internal space thereof for collecting the insoluble solids; an inlet portion having an inlet through which the etching liquid flows into the internal space; an outflow portion having an outlet through which the etching solution flows out from the internal space; a first flange provided on an outer edge of an opening of the first mesh filter; a second flange provided on an inner wall of the filtering section; a spring structure that separates the first flange from the second flange as the internal pressure of the first mesh filter increases, thereby forming a flow path for the etching liquid between the first flange and the second flange.

2. The collection device according to claim 1 , wherein the spring structure separates the first flange from the second flange by compressing the spring above the filtering section.

3. The collection device according to claim 1 , wherein the spring structure separates the first flange from the second flange by compressing the spring below the filtering section.

4. The collection device according to claim 1 , further comprising a second mesh filter disposed adjacent to the first mesh filter and configured to collect the insoluble solids contained in the etching solution that has flowed into the flow path.

5. 5. The collection device according to claim 4, further comprising a third mesh filter disposed adjacent to the second mesh filter, having a mesh size smaller than that of the second mesh filter, and configured to collect the insoluble solids contained in the etching solution that has passed through the second mesh filter.

6. The collection device of claim 1 , further comprising an output for outputting the movement of the spring structure.

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