Plasma tail gas treatment device

Abstract

The utility model relates to the technical field of semiconductor tail gas treatment, in particular to a plasma tail gas treatment device which comprises a reaction assembly, a cooling pipe, a washing assembly, a water-gas separation assembly and a gas outlet pipe, the washing assembly comprises a water tank and a washing pipe, and the cooling pipe and the washing pipe are both fixedly installed above the water tank; the reaction assembly comprises a reaction cavity, an air inlet pipe and a plasma torch; an annular air plate for inputting combustion air is connected between the reaction cavity and the cooling pipe; spraying pipes for washing gas are arranged in the water tank and the washing pipe; the water-gas separation assembly comprises a water-gas separation pipe and a water-gas separation mechanism. According to the utility model, the plasma moment and the washing assembly are used for carrying out full treatment and spray hydrolysis on process gas, so that water-soluble substances are discharged as wastewater, and the treated gas reaching the standard is discharged to a common affair central system, so that full treatment of waste gas is completed; and the air supplementing mechanism is arranged for secondary air supplementing, and meanwhile, when the plasma moment loses efficacy, the air flow can be increased to dilute the waste gas.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor exhaust gas treatment technology, and in particular to a plasma exhaust gas treatment device. Background Technology

[0002] In semiconductor manufacturing, gases such as hydrogen are used as precursor gases to complete the chemical vapor deposition process. This process generates exhaust gases containing various components, including hydrogen, hydrogen chloride, and solid particles. If these exhaust gases are emitted directly without proper treatment, they will not only pollute the environment but may also pose safety hazards. Therefore, to ensure production safety and comply with environmental protection standards, the exhaust gases generated in the process must be effectively treated. Common exhaust gas treatment equipment often suffers from inadequate exhaust gas treatment. Utility Model Content

[0003] This utility model aims to solve the above problems and provides a plasma exhaust gas treatment device, the technical solution of which is as follows:

[0004] A plasma exhaust gas treatment device includes a reaction assembly, a cooling pipe, a water washing assembly, a water-gas separation assembly, and an exhaust pipe connected in sequence. The water washing assembly includes a water tank and a water washing pipe, both of which are fixedly installed above the water tank. The reaction assembly includes a reaction chamber, an inlet pipe, and a plasma moment. The inlet pipe inputs hydrogen gas to be treated into the reaction chamber, and the plasma moment generates plasma and ignites the hydrogen gas within the reaction chamber. An annular air plate for inputting combustion air connects the reaction chamber and the cooling pipe. Spray pipes for washing the gas are installed inside the water tank and the water washing pipe. The water-gas separation assembly includes a water-gas separation pipe and a water-gas separation mechanism. The water-gas separation pipe is located between the water washing pipe and the exhaust pipe, and the water-gas separation mechanism is located inside the water-gas separation pipe.

[0005] Based on the above scheme, an air supply mechanism is also included, which includes a blower and a blower pipe. The blower pipe is connected to the middle of the cooling pipe and supplies air into the cooling pipe.

[0006] Based on the above scheme, the cooling pipe includes an outer wall, a middle partition, and an inner pipe arranged sequentially from the outside to the inside. The inner pipe includes a first inner pipe and a second inner pipe. The first inner pipe is located above the second inner pipe, and the lower edge of the first inner pipe is lower than the upper edge of the second inner pipe. The first inner pipe is located inside the second inner pipe, and a radial gap is provided between the first inner pipe and the second inner pipe. A vent is provided at the end of the blower pipe, and a vent is provided on the middle partition. Multiple vents are arranged circumferentially. A blower guide plate is fixedly installed on the inner side of the middle partition. The blower guide plate is inclined downward from the outside to the inside and is located above the second inner pipe. The air in the blower pipe passes through the vent and the vent in sequence, then flows downward along the blower guide plate and enters the second inner pipe through the gap between the first inner pipe and the second inner pipe.

[0007] Preferably, a first spray pipe, a second spray pipe, a water tank sieve plate, and a third spray pipe are arranged sequentially in the water tank along the gas flow direction. The first spray pipe is located below the cooling pipe, and the second spray pipe, the water tank sieve plate, and the third spray pipe are located below the washing pipe. The spraying direction of the first spray pipe, the second spray pipe, and the third spray pipe is upward. The water tank sieve plate is a perforated plate.

[0008] Based on the above scheme, the cooling pipe includes an outer wall, a middle partition and an inner pipe arranged sequentially from the outside to the inside. The lower edge of the inner pipe is lower than the bottom plate of the water tank, and the spraying direction of the first spray pipe is towards the gap between the inner pipe and the middle partition.

[0009] Preferably, a fourth spray pipe, a second sieve plate, and a first sieve plate are arranged sequentially from top to bottom inside the water washing pipe. The spray direction of the fourth spray pipe is upward, and the second and first sieve plates are perforated plates. The lower part of the water-air separation pipe is connected to a water-air separation sieve plate, which is a perforated plate and is located below the water-air separation mechanism.

[0010] Preferably, an air intake pipe is provided on the annular air plate, the air intake pipe is connected to the reaction chamber, and a downwardly inclined air guide plate is provided on the inner wall of the annular air plate, the air guide plate is located at the end of the air outlet inside the air intake pipe.

[0011] Preferably, the water-air separation mechanism includes a fixed plate, a separating conical tube, an upper baffle, and a separating bottom ring. The fixed plate is fixedly connected to the water-air separation tube. A through hole is provided in the middle of the fixed plate. The separating conical tube is fixedly connected to the fixed plate. The separating conical tube includes an upper section, a middle section, and a lower section connected sequentially from top to bottom. The upper and lower sections are cylindrical structures, the middle section is a funnel-shaped structure, and the end of the lower section is located inside the separating bottom ring and is spaced apart from the bottom surface of the separating bottom ring. There are multiple separating conical tubes, which are arranged in a ring in the horizontal direction. The upper section of the separating conical tube extends tangentially near the central axis of the fixed plate to form a spiral baffle. The spiral baffles of the multiple separating conical tubes are arranged radially. An air inlet channel is formed between the end of the spiral baffle and the adjacent spiral baffle. An upper baffle is provided above the separating conical tube. The upper baffle protrudes downward at the center of the upper section of the separating conical tube to form an air outlet. The through hole in the middle of the fixed plate is connected to the air outlet through the air inlet channel.

[0012] Preferably, the air outlet pipe includes a first air outlet section, a variable diameter section and a second air outlet section connected sequentially from top to bottom. The diameter of the variable diameter section gradually increases from top to bottom, and the diameter of the lower end of the variable diameter section is greater than the diameter of the upper end of the second air outlet section.

[0013] Preferably, the gas outlet pipe includes a detection hole, which is connected to a temperature sensor and / or a gas concentration sensor.

[0014] The beneficial effects of this invention are as follows: A plasma arc is generated within the reaction chamber by a plasma moment, ionizing, bombarding, and decomposing the waste gas at high temperature, transforming it into various active particles and reacting to generate harmless substances such as water and carbon dioxide. The resulting mixture is then sprayed, cooled, and hydrolyzed by a water washing assembly, allowing water-soluble substances to be discharged as wastewater. The treated gas, meeting standards, is then discharged to the central system, thus completing the thorough treatment of the waste gas. A secondary air supply mechanism is installed inside the cooling pipes to ensure more complete combustion. Simultaneously, when the plasma moment fails, the increased airflow dilutes the waste gas. Multiple spray pipes and sieves ensure thorough water washing and preliminary water-gas separation. Attached Figure Description

[0015] Figure 1 : A schematic diagram of the structure of this utility model;

[0016] Figure 2 : Schematic diagram of the internal structure of the frame housing of this utility model;

[0017] Figure 3 : A cross-sectional view of the structure of this utility model;

[0018] Figure 4 This utility model Figure 3 Enlarged view of part A in the middle;

[0019] Figure 5 This utility model Figure 3 Enlarged view of part B in the middle;

[0020] Figure 6 : Schematic diagram of the water-air separation mechanism of this utility model;

[0021] Figure 7 : Schematic diagram of the spiral stop block structure of this utility model. Detailed Implementation

[0022] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0023] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0024] In the description of this utility model, it should be understood that the terms "center," "length," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," and "inner," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0025] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0026] like Figures 1 to 6 As shown, a plasma exhaust gas treatment device includes a frame housing 1, and a reaction assembly, a cooling pipe, a water washing assembly, a water-gas separation assembly, and an exhaust pipe 8 arranged sequentially inside the frame housing 1. The water washing assembly includes a water tank 51 and a water washing pipe 61. The cooling pipe and the water washing pipe 61 are both fixedly installed above the water tank 51. The process gas is treated and discharged after passing through the reaction assembly, the cooling pipe, the water washing assembly, the water-gas separation assembly, and the exhaust pipe 8.

[0027] The reaction assembly includes a reaction chamber 21, an air inlet pipe 22, and a plasma array 23. The air inlet pipe 22 inputs process gases such as hydrogen to be processed into the reaction chamber 21. The plasma array 23 generates plasma within the reaction chamber 21 and ignites the hydrogen. An annular air plate 24 for inputting combustion air connects the reaction chamber 21 to the cooling pipe. Figure 4 As shown, an air inlet pipe 25 is provided on the annular air plate 24, which is connected to the reaction chamber 21. A downwardly inclined air guide plate 26 is provided on the inner wall of the annular air plate 24, located at the end of the air outlet inside the air inlet pipe 25. Compressed air from outside the reaction chamber 21 is input through the air inlet pipe 25 and discharged to the lower part of the reaction chamber 21 via the air guide plate 26, where it mixes with hydrogen to facilitate hydrogen combustion.

[0028] Preferably, the system also includes a make-up air mechanism, which includes a blower 41 and a blower pipe 42. The blower pipe 42 is connected to the middle of the cooling pipe and supplies air into the cooling pipe. Through the make-up air mechanism, on the one hand, air is introduced into the cooling pipe a second time, improving the hydrogen combustion reaction rate and ensuring complete combustion of hydrogen; on the other hand, when the plasma moment fails, the airflow can be increased to fill the cooling pipe with a large amount of air, thereby diluting the hydrogen to an acceptable emission standard.

[0029] like Figure 5As shown, the cooling pipe includes an outer wall 31, a middle partition 32, and an inner pipe arranged sequentially from the outside to the inside. The inner pipe includes a first inner pipe 33 and a second inner pipe 34. The first inner pipe 33 is disposed above the second inner pipe 34, and the lower edge of the first inner pipe 33 is lower than the upper edge of the second inner pipe 34. The first inner pipe 33 is disposed inside the second inner pipe 34, and a radial gap is provided between the first inner pipe 33 and the second inner pipe 34. A vent 43 is provided at the end of the blower pipe 42, and a vent hole 44 is provided on the middle partition 32. The vent hole 44 is circumferentially... Multiple air guide plates 45 are fixedly installed on the inner side of the partition plate 32. The air guide plates 45 are inclined downward from the outside to the inside and are located above the second inner tube 34. The air in the blower pipe 42 passes through the air inlet 43 and the air hole 44 in sequence, and then flows downward along the air guide plates 45 and enters the second inner tube 34 through the gap between the first inner tube 33 and the second inner tube 34. This ensures that the supplementary air is evenly input and controls the flow direction of the input air. The auxiliary gas flows from the cooling pipe to the water washing assembly.

[0030] The water tank 51 and the water washing pipe 61 are equipped with spray pipes for washing the gas with water, such as... Figure 3 As shown, a first spray pipe 52, a second spray pipe 53, a water tank sieve plate 54, and a third spray pipe 55 are sequentially arranged inside the water tank 51 along the gas flow direction. The first spray pipe 52 is located below the cooling pipe, while the second spray pipe 53, the water tank sieve plate 54, and the third spray pipe 55 are located below the washing pipe 61. The spray direction of the first spray pipe 52, the second spray pipe 53, and the third spray pipe 55 is upward. The water tank sieve plate 54 is a perforated plate. Through multiple spray washing, water-soluble substances in the mixed gas are fully dissolved in the water and separated from the gas. At the same time, the perforated sieve plate is used to perform initial screening of the water-gas mixture, thus achieving water-gas separation.

[0031] Preferably, the cooling pipe includes an outer wall 31, a middle partition 32, and an inner pipe arranged sequentially from the outside to the inside. The lower edge of the inner pipe is lower than the upper bottom plate of the water tank 51, and the spraying direction of the first spray pipe 52 is towards the gap between the inner pipe and the middle partition 32, thereby avoiding direct contact between the spray water column and the flame of the combustion reaction in the inner pipe. By spraying the inner pipe, the cooling pipe is cooled down, and then the gas in the inner pipe is cooled down, so that the flame is completely extinguished.

[0032] Inside the water washing pipe 61, a fourth spray pipe 64, a second sieve plate 63, and a first sieve plate 62 are arranged sequentially from top to bottom. The spray direction of the fourth spray pipe 64 is upward. The second sieve plate 63 and the first sieve plate 62 are perforated plates. The lower part of the water-air separation pipe 72 is connected to the water-air separation sieve plate 71, which is a perforated plate and is located below the water-air separation mechanism.

[0033] The water-gas separation assembly includes a water-gas separation pipe 72 and a water-gas separation mechanism. The water-gas separation pipe 72 is disposed between the water washing pipe 61 and the air outlet pipe 8, and the water-gas separation mechanism is disposed inside the water-gas separation pipe 72.

[0034] like Figure 3 , Figure 6 and Figure 7 As shown, the water-air separation mechanism includes a fixed plate 73, a separating conical tube 75, an upper baffle 76, and a separating bottom ring 78. The fixed plate 73 is fixedly connected to the water-air separation tube 72. A through hole is provided in the middle of the fixed plate 73. The separating conical tube 75 is fixedly connected to the fixed plate 73. The separating conical tube 75 includes an upper section, a middle section, and a lower section connected sequentially from top to bottom. The upper and lower sections are cylindrical structures, the middle section is a funnel-shaped structure, and the end of the lower section is located inside the separating bottom ring 78 and is spaced apart from the bottom surface of the separating bottom ring 78. The number of separators 75 is multiple and arranged in a ring shape in the horizontal direction. A spiral baffle 74 extends tangentially from the upper section of the separator 75 near the central axis of the fixed plate 73. These spiral baffles 74 are radially distributed, with an air inlet channel formed between the end of each spiral baffle 74 and adjacent spiral baffles 74. An upper baffle 76 is installed above the separator 75, protruding downwards from the center of the upper section to form an air outlet 77. The through hole in the middle of the fixed plate 73 communicates with the air outlet 77 via the air inlet channel. The water-air mixture passing through the water-air separation sieve rises to the spiral baffle 74, where the airflow rotates. Under the action of centrifugal force and gravity, the water in the water-air mixture descends along the separator 75, while the gas is discharged upwards through the air outlet 77. The separated water also acts as a liquid seal at the bottom separator ring 78.

[0035] The exhaust pipe 8 includes a first exhaust section, a variable diameter section, and a second exhaust section connected sequentially from top to bottom. The diameter of the variable diameter section gradually increases from top to bottom, and the diameter at the lower end of the variable diameter section is larger than the diameter at the upper end of the second exhaust section. This ensures that the flow velocity of the discharged gas decreases in the variable diameter section and then gradually increases, preventing gas backflow and potential explosion hazards. The exhaust pipe 8 includes a detection port, which is connected to a temperature sensor and / or a gas concentration sensor to detect whether the temperature and concentration of the discharged gas meet emission standards.

[0036] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.

Claims

1. A plasma exhaust gas treatment device, characterized in that, The system includes a reaction assembly, a cooling pipe, a water washing assembly, a water-gas separation assembly, and an exhaust pipe (8) connected in sequence. The water washing assembly includes a water tank (51) and a water washing pipe (61). The cooling pipe and the water washing pipe (61) are both fixedly installed above the water tank (51). The reaction assembly includes a reaction chamber (21), an air inlet pipe (22), and a plasma meter (23). The air inlet pipe (22) inputs hydrogen gas to be processed into the reaction chamber (21), and the plasma meter (23) in the reaction chamber (21)... 1) The plasma is generated and hydrogen is burned. An annular air plate (24) is connected between the reaction chamber (21) and the cooling pipe to input combustion air. A spray pipe for washing the gas is installed in the water tank (51) and the water washing pipe (61). The water-gas separation assembly includes a water-gas separation pipe (72) and a water-gas separation mechanism. The water-gas separation pipe (72) is installed between the water washing pipe (61) and the gas outlet pipe (8). The water-gas separation mechanism is installed in the water-gas separation pipe (72).

2. The plasma exhaust gas treatment device according to claim 1, characterized in that, It also includes an air supply mechanism, which includes a blower (41) and a blower pipe (42). The blower pipe (42) is connected to the middle of the cooling pipe and supplies air into the cooling pipe.

3. The plasma exhaust gas treatment device according to claim 2, characterized in that, The cooling pipe includes an outer wall (31), a middle partition (32), and an inner pipe arranged sequentially from the outside to the inside. The inner pipe includes a first inner pipe (33) and a second inner pipe (34). The first inner pipe (33) is located above the second inner pipe (34), and the lower edge of the first inner pipe (33) is lower than the upper edge of the second inner pipe (34). The first inner pipe (33) is located inside the second inner pipe (34), and a radial gap is provided between the first inner pipe (33) and the second inner pipe (34). The blower pipe (42) has a vent (43) at its end. Ventilation holes (44) are provided on the partition plate (32). Multiple ventilation holes (44) are provided along the circumference. A blower guide plate (45) is fixedly provided on the inner side of the partition plate (32). The blower guide plate (45) is inclined downward from the outside to the inside. The blower guide plate (45) is located above the second inner tube (34). The air in the blower tube (42) passes through the ventilation port (43) and ventilation hole (44) in sequence, and then flows downward along the blower guide plate (45) and enters the second inner tube (34) through the gap between the first inner tube (33) and the second inner tube (34).

4. The plasma exhaust gas treatment device according to claim 1, characterized in that, Inside the water tank (51), a first spray pipe (52), a second spray pipe (53), a water tank sieve plate (54), and a third spray pipe (55) are arranged sequentially along the gas flow direction. The first spray pipe (52) is located below the cooling pipe, and the second spray pipe (53), the water tank sieve plate (54), and the third spray pipe (55) are located below the washing pipe (61). The spraying direction of the first spray pipe (52), the second spray pipe (53), and the third spray pipe (55) is upward. The water tank sieve plate (54) is a perforated plate.

5. The plasma exhaust gas treatment device according to claim 4, characterized in that, The cooling pipe includes an outer wall (31), a middle partition (32) and an inner pipe arranged sequentially from the outside to the inside. The lower edge of the inner pipe is lower than the bottom plate of the water tank (51), and the spraying direction of the first spray pipe (52) is towards the gap between the inner pipe and the middle partition (32).

6. The plasma exhaust gas treatment device according to claim 1, characterized in that, The washing pipe (61) is provided with a fourth spray pipe (64), a second screen plate (63) and a first screen plate (62) arranged from top to bottom. The spray direction of the fourth spray pipe (64) is upward. The second screen plate (63) and the first screen plate (62) are perforated plates. The water-air separation pipe (72) is connected to the water-air separation screen plate (71) at the bottom. The water-air separation screen plate (71) is a perforated plate and is located below the water-air separation mechanism.

7. The plasma exhaust gas treatment device according to claim 1, characterized in that, An air inlet pipe (25) is provided on the annular air plate (24), and the air inlet pipe (25) is connected to the reaction chamber (21). A downwardly inclined air guide plate (26) is provided on the inner wall of the annular air plate (24), and the air guide plate (26) is located at the end of the air outlet inside the air inlet pipe (25).

8. The plasma exhaust gas treatment device according to claim 1, characterized in that, The water-air separation mechanism includes a fixed plate (73), a separation conical tube (75), an upper baffle (76), and a separation bottom ring (78). The fixed plate (73) is fixedly connected to the water-air separation tube (72). A through hole is provided in the middle of the fixed plate (73). The separation conical tube (75) is fixedly connected to the fixed plate (73). The separation conical tube (75) includes an upper section, a middle section, and a lower section connected sequentially from top to bottom. The upper and lower sections are cylindrical structures, the middle section is a funnel-shaped structure, and the end of the lower section is located inside the separation bottom ring (78) and is spaced from the bottom surface of the separation bottom ring (78). The number of... The quantity is multiple and arranged in a ring in the horizontal direction. The upper section of the separation cone tube (75) extends along the tangential direction near the central axis of the fixed plate (73) to form a spiral baffle (74). The spiral baffles (74) of the multiple separation cone tubes (75) are arranged radially. The upper section air intake channel is formed between the end of the spiral baffle (74) and the adjacent spiral baffle (74). An upper baffle (76) is provided above the separation cone tube (75). The upper baffle (76) protrudes downward at the center of the upper section of the separation cone tube (75) to form an air outlet (77). The through hole in the middle of the fixed plate (73) is connected to the air outlet (77) through the air intake channel.

9. The plasma exhaust gas treatment device according to claim 1, characterized in that, The air outlet pipe (8) includes a first air outlet section, a variable diameter section and a second air outlet section connected sequentially from top to bottom. The diameter of the variable diameter section gradually increases from top to bottom, and the diameter of the lower end of the variable diameter section is greater than the diameter of the upper end of the second air outlet section.

10. A plasma exhaust gas treatment device according to claim 1, characterized in that, The outlet pipe (8) includes a detection hole, which is connected to a temperature sensor and / or a gas concentration sensor.

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