Solid target substance supply device, extreme-ultraviolet light generator, and electronic device manufacturing method

Abstract

SOLUTION: A solid target substance supply device includes: a solid target container storing a solid target substance; a first path through which the solid target substance supplied from the solid target container passes; a delivery device including a pipe including a receiving port receiving the solid target substance having passed through the first path and an opposite surface opposite to the receiving port, and a delivery rod delivering the solid target substance inside the pipe by alternately making forward movement and backward movement in a length direction of the pipe; and a second path supplying the solid target substance delivered by the delivery device to a melting target container of an extreme-ultraviolet light generator.EFFECT: A solid target substance supply device can supply a solid target substance to an extreme-ultraviolet light generator.SELECTED DRAWING: Figure 9

Description

[Technical Field]

[0001] The present disclosure relates to a solid target material supply apparatus, an extreme ultraviolet light generating apparatus, and a method for manufacturing an electronic device. [Background technology]

[0002] In recent years, with the miniaturization of semiconductor processes, the miniaturization of transfer patterns in optical lithography for semiconductor processes has progressed rapidly. In the next generation, fine processing of 10 nm or less will be required. For this reason, there is a demand for the development of an exposure tool that combines an extreme ultraviolet (EUV) light generation device that generates EUV light with a wavelength of approximately 13 nm and a reduced projection reflective optical system.

[0003] As an EUV light generation device, development of an LPP (Laser Produced Plasma) type device that uses plasma generated by irradiating a target material with laser light is progressing. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] US Patent Application Publication No. 2023 / 0008733 [Patent Document 2] Japanese Patent Application Publication No. 07-051419 [Patent Document 3] Japanese Patent Application Laid-Open No. 2003-164553 [Patent Document 4] Japanese Patent Application Publication No. 10-146452 [Patent Document 5] Japanese Patent Application Publication No. 08-071208 [Patent Document 6] Summary of JP 2007-020646 A

[0005] A solid target material supply device according to one aspect of the present disclosure comprises: a solid target container that stores solid target material; a first path through which the solid target material supplied from the solid target container passes; a delivery device including a tube having a receiving port that receives the solid target material that has passed through the first path and an opposing surface facing the receiving port; a delivery rod that delivers the solid target material from inside the tube by alternately moving back and forth along the length of the tube; and a stopper that, when the delivery rod moves back, moves toward the outside of the tube to form a passage through which the solid target material between the receiving port and the opposing surface moves inside the tube, and when the delivery rod moves back, moves toward the inside of the tube to prevent the solid target material from returning to between the receiving port and the opposing surface; and a second path through which the solid target material delivered by the delivery device is replenished to a molten target container of an extreme ultraviolet light generation device.

[0006] A method for manufacturing an electronic device according to one aspect of the present disclosure includes a delivery device including a solid target container that contains solid target material, a first path through which the solid target material supplied from the solid target container passes, a tube that is a delivery device and includes a receiving port that receives the solid target material that has passed through the first path and an opposing surface that faces the receiving port, a delivery rod that delivers the solid target material inside the tube by alternately moving back and forth along the length of the tube, and a stopper that, when the delivery rod moves back, moves toward the outside of the tube to form a passage through which the solid target material between the receiving port and the opposing surface moves inside the tube, and when the delivery rod moves back, moves toward the inside of the tube to prevent the solid target material inside the tube from returning to between the receiving port and the opposing surface; a solid target material supply device having a second path for supplying the solid target material delivered by the delivery device to a molten target container of the extreme ultraviolet light generation device; a molten target container for producing molten target material by melting the solid target material delivered by the solid target material supply device; a nozzle for emitting the molten target material produced in the molten target container; a laser device for irradiating with pulsed laser light the molten target material that has been emitted from the nozzle and reached a predetermined area; and an EUV collector mirror for collecting the extreme ultraviolet light emitted from the plasma generated in the predetermined area, generating extreme ultraviolet light by the extreme ultraviolet light generation device, outputting the extreme ultraviolet light to an exposure device, and exposing the extreme ultraviolet light onto a photosensitive substrate in the exposure device to the extreme ultraviolet light in order to manufacture an electronic device.

[0007] A method for manufacturing an electronic device according to one aspect of the present disclosure includes a solid target container that contains a solid target material, a first path through which the solid target material supplied from the solid target container passes, a delivery device including a tube including a receiving port that receives the solid target material that has passed through the first path and an opposing surface that faces the receiving port, a delivery rod that delivers the solid target material inside the tube by alternately moving back and forth along the length of the tube, and a stopper that, when the delivery rod moves back, moves toward the outside of the tube to form a passage through which the solid target material between the receiving port and the opposing surface moves inside the tube, and when the delivery rod moves back, moves toward the inside of the tube to prevent the solid target material inside the tube from returning to between the receiving port and the opposing surface, and a method for manufacturing an electronic device using the delivery device. a molten target container that generates molten target material by melting the solid target material replenished by the solid target material replenishment device; a nozzle that emits the molten target material generated in the molten target container; a laser device that irradiates with pulsed laser light the molten target material that has been emitted from the nozzle and reached a predetermined area; and an EUV collector mirror that collects the extreme ultraviolet light emitted from the plasma generated in the predetermined area, thereby inspecting the mask for defects, selecting a mask using the inspection results, and exposing and transferring a pattern formed on the selected mask onto a photosensitive substrate. [Brief explanation of the drawings]

[0008] Some embodiments of the present disclosure will now be described, by way of example only, with reference to the accompanying drawings, in which: [Figure 1] Figure 1 shows the configuration of an LPP-type EUV light generation system. [Figure 2] FIG. 2 shows the configuration of a droplet target generation device in an EUV light generation system according to a comparative example. [Figure 3] FIG. 3 shows the configuration and operation of a transmission device in a comparative example. [Figure 4] FIG. 4 shows the configuration and operation of a transmission device in a comparative example. [Figure 5] FIG. 5 shows the configuration and operation of a transmission device in a comparative example. [Figure 6] FIG. 6 shows the configuration and operation of a transmission device in a comparative example. [Figure 7] FIG. 7 shows the state of the feed rod in the comparative example during its forward movement. [Figure 8] FIG. 8 shows the comparative example in the middle of the forward movement of the delivery rod. [Figure 9] FIG. 9 shows the configuration of a transmission device in the first embodiment. [Figure 10] FIG. 10 shows the configuration of a transmission device in the first embodiment. [Figure 11] FIG. 11 shows the operation of the transmission device in the first embodiment. [Figure 12] FIG. 12 shows the operation of the delivery device in the first embodiment. [Figure 13] FIG. 13 shows the operation of the transmission device in the first embodiment. [Figure 14] FIG. 14 shows the operation of the delivery device in the first embodiment. [Figure 15] FIG. 15 shows the configuration of a transmission device in the second embodiment. [Figure 16] FIG. 16 is a cross-sectional view of a tapered portion of a stopper in a first modified example of the second embodiment. [Figure 17] FIG. 17 is a cross-sectional view of a tapered portion of a stopper in a second modified example of the second embodiment. [Figure 18] FIG. 18 shows the configuration of a droplet target generation device according to the third embodiment. [Figure 19] FIG. 19 shows the configuration of an exposure tool connected to an EUV light generation system. [Figure 20] Figure 20 shows the configuration of the inspection device connected to the EUV light generation system. Embodiment

[0009] <Contents> 1. Overview of the EUV Light Generation System 11 1.1 Configuration 1.2 Operation 2. Comparative Example 2.1 Configuration of the droplet target generation device 26 2.1.1 Solid Target Material Supply System 260 2.1.2 Molten target vessel C3 2.1.3 Nozzle 52 2.2 Operation of the droplet target generation device 26 2.3 Configuration of the transmission device 8 2.4 Operation of the sending device 8 2.5 Issues with the comparative example 3. Delivery device 8a with stopper 82 tilted 3.1 Configuration of the transmission device 8a 3.2 Operation of the sending device 8a 3.3 Effect 4. Delivery device 8b in which stopper 82 moves linearly 4.1 Configuration and operation 4.2 Effect 5. Delivery device 8b in which first surface 821 includes grooves 5.1 Configuration and operation 5.2 Effect 6. Solid target material supply device 260c including first and second detectors D1 and D2 6.1 Configuration 6.2 Operation 6.3 Effect 7.Other 7.1 EUV light utilization equipment 6 7.2 Supplementary Information

[0010] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. The embodiments described below show some examples of the present disclosure and do not limit the content of the present disclosure. Furthermore, not all of the configurations and operations described in each embodiment are necessarily essential as the configurations and operations of the present disclosure. Note that the same components are given the same reference symbols, and redundant explanations will be omitted.

[0011] 1. Overview of the EUV Light Generation System 11 1.1 Configuration FIG. 1 shows the configuration of an LPP-type EUV light generation system 11. The EUV light generation apparatus 1 is used together with a laser apparatus 3. In this disclosure, a system including the EUV light generation apparatus 1 and the laser apparatus 3 is referred to as the EUV light generation system 11. The EUV light generation apparatus 1 includes a chamber 2 and a droplet target generator 26. The chamber 2 is a sealable container. The droplet target generator 26 supplies a target 27 containing a target material into the chamber 2. The target material may include tin, terbium, gadolinium, lithium, xenon, or a combination of any two or more of these.

[0012] A through-hole is provided in the wall of the chamber 2. The through-hole is closed by a window 21, through which the pulsed laser beam 32 output from the laser device 3 passes. An EUV collector mirror 23 having a reflective surface with an ellipsoidal shape is disposed inside the chamber 2. The EUV collector mirror 23 has first and second focal points. A multilayer reflective film in which molybdenum and silicon are alternately stacked is formed on the surface of the EUV collector mirror 23. The EUV collector mirror 23 is disposed so that its first focal point is located in the plasma generation region 25 and its second focal point is located at the intermediate focal point 292. A through-hole 24 is provided in the center of the EUV collector mirror 23, through which the pulsed laser beam 33 passes.

[0013] The EUV light generation device 1 includes an EUV light generation processor 5, a target sensor 4, etc. The EUV light generation processor 5 is a processing device including a memory 501 in which a control program is stored and a CPU (central processing unit) 502 that executes the control program. The EUV light generation processor 5 is specially configured or programmed to execute various processes included in the present disclosure. The target sensor 4 detects at least one of the presence, trajectory, position, and speed of the target 27. The target sensor 4 may also have an imaging function.

[0014] The EUV light generation system 1 also includes a connection part 29 that connects the interior of the chamber 2 with the interior of the EUV light utilization system 6. The EUV light utilization system 6 may be an exposure system 6a shown in FIG. 19 or an inspection system 6b shown in FIG. 20. A wall 291 having an aperture formed therein is provided inside the connection part 29. The wall 291 is positioned so that the aperture is located at the second focal point of the EUV collector mirror 23.

[0015] The EUV light generation system 1 further includes a laser beam transmission device 34, a laser beam focusing mirror 22, and a target recovery unit 28 for recovering the target 27. The laser beam transmission device 34 includes an optical element for defining the transmission state of the pulsed laser beam 32, and an actuator for adjusting the position, attitude, etc. of the optical element.

[0016] 1.2 Operation The operation of the EUV light generation system 11 will be described with reference to Fig. 1. Pulsed laser light 31 output from the laser device 3 passes through a laser light transmission device 34, passes through a window 21 as pulsed laser light 32, and enters the chamber 2. The pulsed laser light 32 travels through the chamber 2 along the laser light path, is reflected by the laser beam focusing mirror 22, and is irradiated onto the target 27 as pulsed laser light 33.

[0017] The droplet target generation device 26 outputs a target 27 toward the plasma generation region 25 inside the chamber 2. The target 27 is irradiated with a pulsed laser beam 33. The target 27 irradiated with the pulsed laser beam 33 is converted into plasma, and the plasma emits radiation 251. The EUV light contained in the radiation 251 is reflected by the EUV collector mirror 23 with a higher reflectance than light in other wavelength ranges. Reflected light 252 containing EUV light reflected by the EUV collector mirror 23 is collected at an intermediate focus 292 and output to the EUV light utilization device 6. Note that one target 27 may be irradiated with multiple pulses contained in the pulsed laser beam 33.

[0018] The EUV light generation processor 5 controls the entire EUV light generation system 11. The EUV light generation processor 5 processes the detection results of the target sensor 4. Based on the detection results of the target sensor 4, the EUV light generation processor 5 controls the timing and output direction of the target 27. Furthermore, the EUV light generation processor 5 controls the oscillation timing of the laser device 3, the propagation direction of the pulsed laser beam 32, the focusing position of the pulsed laser beam 33, etc. The various controls described above are merely examples, and other controls may be added as necessary.

[0019] 2. Comparative Example 2.1 Configuration of the droplet target generation device 26 2 shows the configuration of a droplet target generation device 26 in an EUV light generation system 11 according to a comparative example. The comparative example in the present disclosure refers to a configuration that the applicant recognizes as being known only by the applicant, and is not a publicly known example that the applicant acknowledges. The droplet target generation device 26 includes a solid target material supply device 260, a molten target container C3, and a nozzle 52.

[0020] 2.1.1 Solid Target Material Supply System 260 The solid target material supply device 260 includes a solid target container C1, a dispenser 7, a delivery device 8, a funnel 9, a load lock chamber C2, a target supply processor 55, supply pipes 40 to 45, a gas cylinder G1, and a pressure regulator 56. The path of the solid target material 270 formed by the dispenser 7 and the supply pipe 40 corresponds to a first path along which the solid target material 270 supplied from the solid target container C1 passes. The path of the solid target material 270 from the supply pipe 41 to the supply pipe 45 corresponds to a second path along which the solid target material 270 delivered by the delivery device 8 is replenished to the molten target container C3.

[0021] The target supply processor 55 is a processing device including a memory 551 in which a control program is stored and a CPU 552 that executes the control program. The target supply processor 55 corresponds to the processor in this disclosure. The target supply processor 55 is specially configured or programmed to execute various processes included in this disclosure.

[0022] The solid target container C1 is a container that contains a solid target material 270 such as tin. The solid target material 270 may be, for example, approximately spherical grains of approximately the same size. The diameter of the solid target material 270 is, for example, 2 mm or more and 5 mm or less. The temperature inside the solid target container C1 is lower than the melting point of the target material. The pressure inside the solid target container C1 is approximately the same as atmospheric pressure.

[0023] A dispensing device 7 is connected to the bottom of the solid target container C1, and the dispensing device 7 is connected to a sending device 8 via a supply pipe 40. Details of the sending device 8 will be described later with reference to FIGS. 3 to 6. The supply pipe 41 is disposed at an angle to the direction of gravity, and the sending device 8 is connected to the lower end of the supply pipe 41. A funnel 9 is disposed below a discharge port 410 near the upper end of the supply pipe 41, with a gap between the discharge port 410 and the supply pipe 411.

[0024] The funnel 9 has a conical shape whose diameter decreases in the direction of gravity, and its lower end is connected to the load lock chamber C2 via supply pipes 42 and 43. A valve V1 is connected between the supply pipes 42 and 43.

[0025] The load lock chamber C2 is a container that contains the solid target material 270 supplied from the solid target container C1. The temperature inside the load lock chamber C2 is lower than the melting point of the target material. The load lock chamber C2 is connected to the molten target container C3 via supply pipes 44 and 45. A valve V2 is connected between the supply pipes 44 and 45.

[0026] 2.1.2 Molten target vessel C3 The molten target container C3 is a container that contains the target material supplied from the load lock chamber C2. The molten target container C3 is connected to a gas cylinder G1 via a pressurized gas pipe L0. The gas cylinder G1 contains a high-pressure rare gas such as argon gas or helium gas as pressurized gas. A pressure regulator 56 and a pressure gauge P are arranged on the pressurized gas pipe L0. The target supply processor 55 controls the pressure regulator 56 based on the output of the pressure gauge P, thereby adjusting the pressure inside the molten target container C3 to a predetermined pressure higher than atmospheric pressure.

[0027] A heater 51 and a level sensor 54 are disposed in the molten target container C3. The heater 51 is connected to a power supply (not shown) and heats the interior of the molten target container C3 to a predetermined temperature higher than the melting point of the target material. The power supply is controlled based on the output of a temperature sensor (not shown) disposed in the molten target container C3, thereby controlling the temperature inside the molten target container C3. As a result, the solid target material 270 is melted in the molten target container C3, generating the molten target material. The level sensor 54 detects the liquid level of the molten target material inside the molten target container C3.

[0028] 2.1.3 Nozzle 52 The nozzle 52 is disposed at the lower end of the molten target container C3 in the direction of gravity. The tip of the nozzle 52 opens into the interior of the chamber 2 (see FIG. 1). A piezoelectric element 53 is disposed in the nozzle 52.

[0029] 2.2 Operation of the droplet target generation device 26 When the level sensor 54 detects that the liquid surface position of the molten target material inside the molten target container C3 has fallen below a threshold, the solid target material 270 is replenished from the solid target container C1 as follows.

[0030] The target supply processor 55 opens valve V1 while keeping valve V2 closed. With valve V2 closed, the interior of the molten target container C3 is maintained at high pressure. By opening valve V1, the load lock chamber C2 is ready to receive the solid target material 270.

[0031] The target supply processor 55 calculates the amount of solid target material 270 to be supplied by the dispensing device 7 from the shortage of the molten target material inside the molten target container C3, and outputs a dispensing signal to the dispensing device 7. The dispensing device 7 dispenses the solid target material 270 one by one to the supply pipe 40 in accordance with the dispensing signal. The target supply processor 55 does not output the next dispensing signal until the replenishment of the solid target material 270 into the molten target container C3 based on the most recent dispensing signal is completed.

[0032] The delivery device 8 receives the solid target material 270 from the supply pipe 40 and delivers the solid target material 270 one by one to the supply pipe 41 at regular time intervals in accordance with a control signal from the target supply processor 55 .

[0033] The solid target materials 270 delivered one by one from the delivery device 8 to the supply pipe 41 are pressed by the solid target materials 270 delivered later. As a result, the solid target materials 270 are connected together and move within the supply pipe 41 against gravity, and are released from the release port 410 in order starting from the leading solid target material 270.

[0034] The solid target material 270 discharged from the discharge port 410 is received by the funnel 9 and flows into the supply pipe 42. The solid target material 270 passes through the open valve V1 and the supply pipe 43 and moves to the load lock chamber C2. When a desired amount of the solid target material 270 has moved to the load lock chamber C2, the target supply processor 55 stops the operation of the dispensing device 7 and the sending device 8 and closes the valve V1.

[0035] Next, the target supply processor 55 opens valve V2 to supply the solid target material 270 contained in the load lock chamber C2 to the molten target container C3. The solid target material 270 moves from the load lock chamber C2 to the molten target container C3. The solid target material 270 supplied to the molten target container C3 melts and mixes with the target material already contained and melted in the molten target container C3. The heater 51 prevents the temperature inside the molten target container C3 from decreasing.

[0036] When valve V2 is opened, part of the gas inside the molten target vessel C3 moves to the load lock chamber C2, causing a temporary drop in the pressure inside the molten target vessel C3. Because valve V1 is closed before valve V2 is opened, the high-pressure gas inside the molten target vessel C3 is prevented from flowing from valve V1 toward the funnel 9. In addition, pressurized gas inside gas cylinder G1 is supplied to the molten target vessel C3 via pressure regulator 56, thereby restoring the pressure inside the molten target vessel C3.

[0037] The molten target material inside the molten target container C3 is ejected from the opening at the tip of the nozzle 52 due to the pressure difference between the pressurized gas supplied from the pressure regulator 56 and the pressure inside the chamber 2. When the nozzle 52 is vibrated by the piezoelectric element 53, the jet of molten target material ejected from the nozzle 52 is separated into droplets, which become the target 27.

[0038] According to the comparative example, the solid target material 270 contained in the solid target container C1, which is at approximately atmospheric pressure, can be supplied to the inside of the molten target container C3, which is at high pressure. Even if the target material inside the molten target container C3 is consumed, the target material can be replenished without replacing the molten target container C3, thereby reducing the downtime of the EUV light generation system 1.

[0039] 2.3 Configuration of the transmission device 8 3 to 6 show the configuration and operation of a delivery device 8 in a comparative example. In FIGS. 3 to 6, the individual solid target materials 270 are labeled with symbols α to ω, and these symbols α to ω may be used to distinguish between them. The delivery device 8 includes a tube 80, a delivery rod 81, a stopper 82, and a base portion 83.

[0040] The tube 80 has a cylindrical shape with a straight central axis, and includes a receiving port 801 for receiving the solid target material 270 that has passed through the dispensing device 7 and the supply tube 40, and an inlet / outlet 802 facing the receiving port 801. The delivery rod 81 is located inside the tube 80, and is configured to deliver the solid target material 270 inside the tube 80 by alternately moving forward and backward in the lengthwise direction of the tube 80 using a driving unit 84.

[0041] The direction of the forward movement of the delivery rod 81 is the X direction, the direction in which the solid target material 270 passes through the receiving port 801 is the Z direction, and one of the directions perpendicular to the X and Z directions is the Y direction. Figures 3 to 6 are views of the delivery device 8 as viewed in the -Y direction. The tube 80 is supported by a base 83 at an angle A with respect to the horizontal direction, and is connected to a supply tube 41 which has an even greater inclination. A drive unit 84 is supported by the base 83.

[0042] The stopper 82 includes a tapered portion 820 and a rod portion 824. The tapered portion 820 is supported by the rod portion 824, and the rod portion 824 is supported by the base portion 83 via a rotation shaft 825. The rotation shaft 825 is parallel to the Y direction, and the stopper 82 is movable while rotating within a plane parallel to the XZ plane.

[0043] Tapered portion 820 passes through entrance / exit 802 of pipe 80. Tapered portion 820 includes a first surface 821 and a second surface 822. First surface 821 is inclined with respect to the X direction, and second surface 822 intersects with the X direction at an angle closer to perpendicular than the angle between the X direction and first surface 821.

[0044] 3 to 6 is applied to the stopper 82 by the restoring force of the spring 826. When the delivery rod 81 moves forward in the X direction, the stopper 82 is pressed by the delivery rod 81 and rotates clockwise against the restoring force of the spring 826. When the delivery rod 81 moves backward in the -X direction, the stopper 82 rotates counterclockwise by the restoring force of the spring 826, but when the stopper 82 hits the locking pin 827, the counterclockwise rotation of the stopper 82 is restricted. At this time, the stopper 82 restricts the solid target material δ inside the tube 80 from returning in the -X direction. In addition, a space is secured between the receiving port 801 and the inlet / outlet 802 to receive the solid target material γ supplied from the receiving port 801.

[0045] 2.4 Operation of the sending device 8 3 to 6, the operation of the delivery device 8 to deliver the solid target material γ waiting in the supply pipe 40 to the supply pipe 41 will be described. As a result of the delivery device 8 delivering the plurality of solid target materials 270 one by one, as shown in Fig. 3, it is assumed that the inside of the pipe 80 and the supply pipe 41 is already filled with solid target materials δ to ω. When the delivery rod 81 moves back and reaches the most retracted position in the -X direction, the solid target material γ moves into the space between the receiving port 801 and the entrance / exit port 802.

[0046] Thereafter, the delivery rod 81 moves in the X direction within the tube 80, pressing against the first surface 821 of the stopper 82 through the solid target material γ between the receiving port 801 and the outlet port 802. As shown in Fig. 4, the stopper 82 pressed by the delivery rod 81 rotates clockwise in Fig. 4 against the restoring force of the spring 826, and most of the tapered portion 820 moves to the outside of the tube 80. As a result, a passage is formed within the tube 80 that moves the solid target material γ in the X direction.

[0047] The solid target material γ is pressed against the wall surface on the −Z direction side of the inside of the tube 80 by the reaction force from the inclined first surface 821 of the stopper 82, and is then pressed by the delivery rod 81 moving in the X direction, and moves inside the tube 80 as shown by arrow B in FIG. 4. The solid target material γ presses the solid target materials δ to ω. In this way, the delivery rod 81 delivers the solid target materials γ to ω against gravity, and causes the solid target material ω to be released from the release port 410.

[0048] When the solid target material γ moves over the ridge between the first surface 821 and the second surface 822 of the tapered portion 820 and separates from the first surface 821, the stopper 82 rotates counterclockwise in FIG. 4 to the tip position of the delivery rod 81 due to the restoring force of the spring 826. In other words, the passage of the solid target material 270 in the tube 80 becomes maximum when the solid target material γ moves over the ridge between the first surface 821 and the second surface 822 of the tapered portion 820, and thereafter the tapered portion 820 moves toward the inside of the tube 80.

[0049] 5, when the delivery rod 81 starts to move in the -X direction, the stopper 82 rotates counterclockwise in FIG. 5 while being pressed against the delivery rod 81 by the restoring force of the spring 826, and the tapered portion 820 moves further toward the inside of the tube 80. At this time, the solid target material γ cannot get over the ridge between the first surface 821 and the second surface 822, and therefore cannot return to the space between the receiving port 801 and the entrance / exit port 802, and remains in contact with the second surface 822. The counterclockwise rotation of the stopper 82 is stopped by the locking pin 827.

[0050] As shown in FIG. 6, the solid target material β waiting in the supply pipe 40 moves into the space between the receiving port 801 and the exit port 802 when the delivery rod 81 moves to the most retracted position in the −X direction.

[0051] Thereafter, the operations described with reference to FIGS. 3 to 6 are repeated to deliver the solid target materials 270 to the supply pipe 41 one by one.

[0052] 2.5 Issues with the comparative example 7 and 8 show the state of the delivery rod 81 in the middle of its forward movement in a comparative example. As explained with reference to FIG. 4, the solid target material γ pressed by the delivery rod 81 receives a reaction force from the first surface 821 and is pressed against the wall surface inside the tube 80. At this time, the solid target material γ is pressed against the edge of the receiving port 801, and may become trapped on three sides by the edge of the receiving port 801, the delivery rod 81, and the first surface 821. This phenomenon in which the solid target material 270 becomes trapped is hereinafter referred to as "jamming."

[0053] The size of the solid target material 270 is not completely uniform, and its shape is not perfect sphere but varies. As shown in Figure 7, a large diameter solid target material γ can cause jamming. As shown in Figure 8, a non-spherical solid target material γ can also cause jamming.

[0054] 7 and 8 , if the delivery rod 81 is moved in the X direction with sufficient force, a portion of the surface of the solid target material γ may be scraped off by the edge of the receiving port 801, thereby eliminating the jamming. However, scraping off a portion of the surface of the solid target material γ deforms the solid target material γ, which may cause jamming or clogging somewhere in the second path. In addition, scraping off a portion of the surface of the solid target material γ may produce shavings that adhere to the rotation shaft 825 of the stopper 82, increasing friction and hindering the operation of the stopper 82. The shavings may also adhere to the inner wall surfaces of the tube 80 or the supply tube 41, potentially causing a clogging of the solid target material 270.

[0055] The embodiments described below relate to the stable replenishment of solid target material 270 even when the diameter and shape of the solid target material 270 vary.

[0056] 3. Delivery device 8a with stopper 82 tilted 3.1 Configuration of the transmission device 8a 9 and 10 show the configuration of the delivery device 8a in the first embodiment. FIG. 9 is a view of the delivery device 8a as viewed in the -Y direction, and FIG. 10 is a view of the delivery device 8a as viewed in the Z direction. The tube 80 includes an opposing surface 803 facing the receiving port 801. The opposing surface 803 is a surface that does not have an entrance / exit 802 through which the stopper 82 enters and exits, and may be a cylindrical surface. The entrance / exit 802 is not located opposite the receiving port 801, but is located on the Y direction side that is perpendicular to both the opposing direction between the receiving port 801 and the opposing surface 803 and the longitudinal direction of the tube 80. The entrance / exit 802 is rectangular and is longer in the X direction than in the Z direction.

[0057] Stopper 82 is located on the Y-direction side of pipe 80. Rotation axis 825 is, for example, parallel to the Z-direction, and stopper 82 is rotatable within a plane intersecting the Z-direction and away from receiving port 801. More preferably, stopper 82 is rotatable within a plane perpendicular to the Z-direction.

[0058] The tapered portion 820 passes through the entrance / exit port 802. A rotational force in the counterclockwise direction in FIG. 10 is applied to the stopper 82 by the restoring force of a spring 826. The counterclockwise rotation of the stopper 82 is restricted by a stop pin 827.

[0059] 3.2 Operation of the sending device 8a 11 to 14 show the operation of the delivery device 8a in the first embodiment. Figures 11 to 14 are views of the delivery device 8a as viewed in the Z direction, and show operations that are substantially the same as those shown in Figures 3 to 6, except that the stopper 82 rotates in a plane perpendicular to the Z direction.

[0060] When the delivery rod 81 moves forward in the X direction, the first surface 821 of the tapered portion 820 is pressed against the delivery rod 81 via the solid target material γ, and the stopper 82 rotates clockwise in Figures 11 to 14, thereby moving toward the outside of the tube 80. As a result, a passage is formed between the receiving port 801 and the opposing surface 803, allowing the solid target material γ to move inside the tube 80.

[0061] Since the stopper 82 rotates in a plane perpendicular to the Z direction, the solid target material γ moves inside the tube 80 as shown by the arrow E in Fig. 12 while being pressed against the wall surface on the -Y direction side inside the tube 80. Since the solid target material γ is not pressed against the wall surface on the -Z direction side, even if the solid target material γ has a large diameter, it is prevented from getting caught.

[0062] When the delivery rod 81 moves back in the -X direction, the stopper 82 rotates counterclockwise due to the restoring force of the spring 826, moving toward the inside of the tube 80, but when the stopper 82 hits the locking pin 827, the counterclockwise rotation of the stopper 82 is restricted. At this time, the second surface 822 restricts the solid target material δ inside the tube 80 from returning in the -X direction. In addition, as the delivery rod 81 moves further in the -X direction, a space is secured between the receiving port 801 and the opposing surface 803, between the delivery rod 81 and the stopper 82, to receive the solid target material γ supplied from the receiving port 801.

[0063] 3.3 Effect (1) According to the first embodiment, the solid target material supply device 260 includes a solid target container C1, a dispenser 7, a supply pipe 40, a sending device 8a, and a path from the supply pipe 41 to the supply pipe 45. The solid target container C1 contains the solid target material 270. The dispensing device 7 and the supply pipe 40 are passed through by the solid target material 270 supplied from the solid target container C1. The sending device 8a includes a pipe 80, a sending rod 81, and a stopper 82. The pipe 80 includes a receiving port 801 that receives the solid target material 270 that has passed through the dispenser 7 and the supply pipe 40, and an opposing surface 803 that faces the receiving port 801. The sending rod 81 sends out the solid target material 270 from the pipe 80 by alternately moving forward and backward parallel to the X direction, which is the longitudinal direction of the pipe 80. When the delivery rod 81 moves forward in the X direction, the stopper 82 moves toward the outside of the tube 80, thereby forming a passage for moving the solid target material 270 between the receiving port 801 and the facing surface 803 inside the tube 80. When the delivery rod 81 moves backward in the -X direction, the stopper 82 moves toward the inside of the tube 80, thereby preventing the solid target material 270 inside the tube 80 from returning to between the receiving port 801 and the facing surface 803. The path from the supply pipe 41 to the supply pipe 45 replenishes the solid target material 270 delivered by the delivery device 8a to the molten target container C3 of the EUV light generation system 11.

[0064] This can prevent the solid target material 270 from getting caught on the edge of the receiving opening 801 even if the diameter or shape of the solid target material 270 varies.

[0065] (2) According to the first embodiment, the stopper 82 moves within a plane that intersects with the Z direction, which is the direction in which the solid target material 270 passes through the receiving port 801 .

[0066] According to this, the direction of the force that the solid target material 270 receives from the stopper 82 is shifted from the Z direction, which is the movement direction of the solid target material 270 passing through the receiving port 801. Therefore, the solid target material 270 is prevented from being pressed toward the receiving port 801 by the stopper 82, and the solid target material 270 can be prevented from getting caught on the edge of the receiving port 801.

[0067] (3) According to the first embodiment, the stopper 82 moves in the XY plane perpendicular to the Z direction, which is the direction in which the solid target material 270 passing through the receiving port 801 moves.

[0068] According to this, the direction of the force that the solid target material 270 receives from the stopper 82 is significantly deviated from the Z direction, which is the movement direction of the solid target material 270 passing through the receiving port 801. This makes it possible to prevent the solid target material 270 from getting caught on the edge of the receiving port 801.

[0069] (4) According to the first embodiment, the stopper 82 moves in a plane away from the receiving opening 801.

[0070] According to this, since the receiving port 801 is not present in the plane on which the stopper 82 moves, the solid target material 270 is prevented from being pressed toward the receiving port 801 by the stopper 82, and the solid target material 270 is prevented from getting caught on the edge of the receiving port 801.

[0071] (5) According to the first embodiment, the stopper 82 is pressed by the feed rod 81 and moves when the feed rod 81 moves forward in the X direction, and moves due to the restoring force of the spring 826 when the feed rod 81 moves backward in the -X direction.

[0072] This allows the stopper 82 to move in response to the forward and backward movements of the feed rod 81.

[0073] (6) According to the first embodiment, the stopper 82 has a first surface 821 that is pressed by the delivery rod 81 via the solid target material γ when the delivery rod 81 moves forward in the X direction.

[0074] This allows the forward movement of the delivery rod 81 to press both the solid target material γ and the stopper 82 .

[0075] (7) According to the first embodiment, the first surface 821 is inclined with respect to the X direction, which is the direction of the forward movement of the feed rod 81.

[0076] In this way, the reciprocating movement of the feed rod 81 in the X direction can realize the movement of the stopper 82 in the Y direction.

[0077] (8) According to the first embodiment, the stopper 82 has a second surface 822 that restricts the solid target material γ, which is pressed by the delivery rod 81 and separated from the first surface 821, from moving in the -X direction, which is the direction of the return movement of the delivery rod 81.

[0078] This prevents the solid target material γ from returning in the −X direction when the delivery rod 81 makes a return motion in the −X direction, so that one solid target material 270 can be delivered each time the delivery rod 81 makes one reciprocating motion.

[0079] (9) According to the first embodiment, the first surface 821 is inclined with respect to the X direction, which is the direction of the forward motion of the delivery rod 81, and the second surface 822 intersects with the X direction at an angle closer to perpendicular than the angle between the X direction and the first surface 821.

[0080] As a result, the angle between the second surface 822 and the X direction, which is the direction of the forward movement of the delivery rod 81, is nearly perpendicular, so that even if the solid target material 270 presses against the second surface 822, the stopper 82 can be prevented from moving toward the outside of the tube 80.

[0081] (10) According to the first embodiment, the stopper 82 includes a first surface 821 that is pressed via the solid target material γ when the feed rod 81 moves forward in the X direction. According to the first embodiment, the feed rod 81 presses the first surface 821 via the solid target material γ to move the stopper 82 toward the outside of the tube 80, and after the solid target material γ leaves the first surface 821 of the stopper 82, the feed rod 81 moves backward in the −X direction with the stopper 82 in contact with the feed rod 81.

[0082] According to this, when the delivery rod 81 moves forward in the X direction, it delivers the solid target material 270 in the X direction, and when the delivery rod 81 moves backward in the -X direction, it can operate so as not to deliver the solid target material 270 in the -X direction.

[0083] (11) According to the first embodiment, after the delivery rod 81 moves back in the -X direction and the stopper 82 moves inside the tube 80, the delivery rod 81 moves back further while the stopper 82 is stopped, thereby forming a space for receiving the solid target material β between the receiving port 801 and the opposing surface 803, between the delivery rod 81 and the stopper 82.

[0084] This allows the next solid target material 270 to be received when the delivery rod 81 moves back in the -X direction.

[0085] (12) According to the first embodiment, the tube 80 is arranged at an angle so that the solid target material 270 is delivered against gravity when the delivery rod 81 moves forward in the X direction.

[0086] With this, the solid target material 270 is delivered against gravity, which reduces the height dimension of the entire EUV light generation system 11 including the solid target material supply device 260, and improves the flexibility of installation. Since the solid target material 270 is delivered against gravity not only from the supply pipe 41 but also from the pipe 80, the front and rear solid target materials 270 are transported to the discharge port 410 in a state of contact with each other and are pushed out one by one. Therefore, the solid target material 270 can be delivered stably.

[0087] (13) According to the first embodiment, the stopper 82 moves while rotating.

[0088] This allows the stopper 82 to be moved by a simple moving mechanism such as the rotary shaft 825.

[0089] In other respects, the first embodiment is similar to the comparative example.

[0090] 4. Delivery device 8b in which stopper 82 moves linearly 4.1 Configuration and operation FIG. 15 shows the configuration of a delivery device 8b in the second embodiment. FIG. 15 is a view of the delivery device 8b as viewed in the Z direction. In the second embodiment, the stopper 82 is supported on the base portion 83 via a slider 828 instead of a rotation shaft 825, and is capable of linearly reciprocating motion parallel to the Y direction. In the second embodiment, the stopper 82 is also movable within a plane intersecting the Z direction and is movable within a plane spaced apart from the receiving port 801. More preferably, the stopper 82 is movable within a plane perpendicular to the Z direction.

[0091] The rod portion 824 is pressed in the -Y direction by the restoring force of the spring 829. When the delivery rod 81 moves forward in the X direction, the inclined first surface 821 of the tapered portion 820 is pressed against the delivery rod 81 via the solid target material γ, causing the stopper 82 to move in the Y direction toward the outside of the tube 80, and a passage is formed between the receiving port 801 and the opposing surface 803 to move the solid target material γ inside the tube 80.

[0092] When the delivery rod 81 moves back in the -X direction, the stopper 82 moves in the -Y direction toward the inside of the tube 80 due to the restoring force of the spring 829, but when the stopper 82 hits the locking pin 827, the movement of the stopper 82 in the -Y direction is restricted. At this time, the second surface 822 restricts the solid target material δ inside the tube 80 from returning in the -X direction. In addition, as the delivery rod 81 moves further in the -X direction, a space is secured between the receiving port 801 and the opposing surface 803 to receive the solid target material γ supplied from the receiving port 801.

[0093] 4.2 Effect (14) According to the second embodiment, the stopper 82 moves linearly.

[0094] This eliminates the need for the rotation shaft 825 of the stopper 82, so even if fine particles such as shavings of the solid target material 270 are generated, adverse effects such as increased friction on the rotation shaft 825 can be suppressed, and the durability of the delivery device 8b can be improved.

[0095] In other respects, the second embodiment is similar to the first embodiment.

[0096] 5. Delivery device 8b in which first surface 821 includes grooves 5.1 Configuration and operation 16 is a cross-sectional view of a tapered portion 820 of a stopper 82 in a first modified example of the second embodiment. FIG. 16 shows a cross section of a portion of the tapered portion 820 taken along line II in FIG. 15. A first surface 821 of the tapered portion 820 has a groove parallel to the XY plane. When the delivery rod 81 presses the first surface 821 via the solid target material 270, the reaction force F that the solid target material 270 receives from the first surface 821 includes a directional component directed toward an imaginary plane G that is parallel to the XY plane and passes through the center of the groove. Therefore, the solid target material 270 is prevented from being pressed against the wall surface on the -Z direction side, and jamming is prevented.

[0097] 17 is a cross-sectional view of tapered portion 820 of stopper 82 in a second modified example of the second embodiment. In the first modified example, the groove in first surface 821 has a V-shaped cross section, whereas in the second modified example, the groove in first surface 821 may have a cylindrical surface or other concave curved surface, and in other respects, the second modified example may be similar to the first modified example. Such grooves also suppress jamming.

[0098] Here, the case where the first surface 821 includes a groove has been described in the second embodiment, but the first surface 821 may also include a groove in the first embodiment.

[0099] 5.2 Effect (15) According to the first and second modified examples, the stopper 82 includes a first surface 821 that is inclined with respect to the X direction, which is the direction of the forward movement of the delivery rod 81, and the first surface 821 includes a groove that is parallel to an XY plane that is parallel to both the X direction and the Y direction, which is the movement direction of the stopper 82.

[0100] This makes it possible to stabilize the position of the solid target material 270 in the direction intersecting the groove when the delivery rod 81 presses against the first surface 821 via the solid target material 270 .

[0101] 6. Solid target material supply device 260c including first and second detectors D1 and D2 6.1 Configuration 18 shows the configuration of a droplet target generation device 26 in the third embodiment. In the third embodiment, a solid target material supply device 260c includes first and second detectors D1 and D2, and a display device 57.

[0102] The first detector D1 is disposed in the supply pipe 40. The first detector D1 may be one that detects a change in the electrical resistance of the supply pipe 40, or one that detects a change in vibration. The second detector D2 is disposed near the discharge port 410. The second detector D2 may be one that detects light that is output from a light source (not shown) and reflected by the solid target material 270. The display device 57 is a device that displays information so that it can be visually recognized, and may be an image display device or a light-emitting element.

[0103] 6.2 Operation The first detector D1 transmits a first detection signal to the target supply processor 55 each time a piece of solid target material 270 passes through the supply pipe 40. Each time the target supply processor 55 receives a first detection signal, it transmits a drive signal to the driver 84 of the delivery device 8a at a predetermined time interval from the first detection signal. Each time the driver 84 receives a drive signal, it causes the delivery rod 81 to make one reciprocating motion. The driver 84 transmits a reciprocating motion signal to the target supply processor 55, indicating that the delivery rod 81 has made one reciprocating motion.

[0104] The second detector D2 sends a second detection signal to the target delivery processor 55 for each release of a solid target material 270 from the release port 410. The target delivery processor 55 monitors the consistency between the reciprocation signal and the second detection signal.

[0105] As a first example of a consistency monitoring operation, if the reciprocating motion signal is received but the second detection signal is not received, the target supply processor 55 may display an error condition on the display device 57. The error condition display may inform the operator of the EUV light generation system 11 that there may be a jam or other malfunction in the delivery device 8a or the supply pipe 41.

[0106] As a second example of the consistency monitoring operation, if the time interval between the second detection signals is shorter than the time interval between the reciprocating motion signals, i.e., if multiple solid target materials 270 are released from the discharge port 410 during one reciprocating motion of the delivery rod 81, the target supply processor 55 may display an error on the display device 57. For example, if the sizes of the solid target materials 270 vary, the number of solid target materials 270 released from the discharge port 410 may be greater than the number of solid target materials 270 delivered from the delivery device 8a. If the number of solid target materials 270 replenished at one time is greater than the desired number, the capacity of the load lock chamber C2 may be exceeded or the temperature change in the molten target container C3 may be large. The error status display informs the operator of the EUV light generation system 11 that the number of solid target materials 270 to be replenished may be large.

[0107] 6.3 Effect (16) According to the third embodiment, the solid target material supply device 260c includes a first detector D1, a driver 84, and a target supply processor 55. The first detector D1 detects the solid target material 270 passing through the dispensing device 7 and the supply pipe 40. The driver 84 moves the delivery rod 81 forward and backward parallel to the X direction. The target supply processor 55 controls the driver 84 based on the detection result of the first detector D1.

[0108] This allows the number of solid target materials 270 passing through the dispensing device 7 and the supply pipe 40 to match the number of solid target materials 270 passing through the pipe 80.

[0109] (17) According to the third embodiment, the solid target material supply device 260c includes a second detector D2 and a target supply processor 55. The second detector D2 detects the solid target material 270 passing through the path from the supply pipe 41 to the supply pipe 45. The target supply processor 55 determines whether the forward and backward movements of the delivery rod 81 parallel to the X direction are consistent with the detection result of the second detector D2, and outputs the determination result.

[0110] This allows an alarm to be issued when the number of solid target materials 270 passing through pipe 80 does not match the number of solid target materials 270 passing through the path from supply pipe 41 to supply pipe 45.

[0111] In other respects, the third embodiment is similar to the first embodiment. Alternatively, the third embodiment may include a delivery device 8b in which the stopper 82 moves linearly, or the first surface 821 may include a groove.

[0112] 7.Other 7.1 EUV light utilization equipment 6 FIG. 19 shows the configuration of an exposure apparatus 6a connected to an EUV light generation system 11. In FIG. 19, the exposure apparatus 6a, which serves as the EUV light utilization apparatus 6 (see FIG. 1), includes a mask illumination unit 608 and a workpiece illumination unit 609. The mask illumination unit 608 illuminates a mask pattern on a mask table MT via a reflection optical system with EUV light incident from the EUV light generation system 11. The workpiece illumination unit 609 forms an image of the EUV light reflected by the mask table MT onto a workpiece (not shown) placed on a workpiece table WT via a reflection optical system. The workpiece is a photosensitive substrate such as a semiconductor wafer coated with photoresist. The exposure apparatus 6a exposes the workpiece to EUV light reflecting the mask pattern by synchronously translating the mask table MT and the workpiece table WT. Electronic devices can be manufactured by transferring a device pattern onto a semiconductor wafer using the exposure process described above.

[0113] FIG. 20 shows the configuration of an inspection apparatus 6b connected to the EUV light generation system 11. In FIG. 20, the inspection apparatus 6b, which serves as the EUV light utilization apparatus 6 (see FIG. 1), includes an illumination optical system 603 and a detection optical system 606. The illumination optical system 603 reflects EUV light incident from the EUV light generation system 11 and irradiates a mask 605 placed on a mask stage 604. The mask 605 here includes a mask blank before a pattern is formed. The detection optical system 606 reflects the EUV light from the illuminated mask 605 and forms an image on the light-receiving surface of a detector 607. The detector 607 receives the EUV light and acquires an image of the mask 605. The detector 607 is, for example, a TDI (time delay integration) camera. The image of the mask 605 acquired through the above process is used to inspect the mask 605 for defects, and the inspection results are used to select a mask suitable for manufacturing an electronic device. The pattern formed on the selected mask is then exposed and transferred onto a photosensitive substrate using an exposure apparatus 6a, thereby manufacturing an electronic device.

[0114] 7.2 Supplementary Information The above description is intended to be illustrative rather than limiting. Thus, it will be apparent to one skilled in the art that modifications can be made to the disclosed embodiments without departing from the scope of the claims. It will also be apparent to one skilled in the art that the disclosed embodiments can be used in combination.

[0115] Terms used throughout this specification and claims should be construed as "open ended" unless expressly stated otherwise. For example, words such as "comprise," "have," "comprise," and "equip" should be construed as meaning "without excluding the presence of elements other than those listed." In addition, the modifier "a" should be construed as meaning "at least one" or "one or more." In addition, the term "at least one of A, B, and C" should be construed as "A," "B," "C," "A+B," "A+C," "B+C," or "A+B+C." Furthermore, it should be construed as including combinations of these with elements other than "A," "B," and "C."

Claims

1. a solid target container containing a solid target material; a first path through which the solid target material supplied from the solid target container passes; A delivery device comprising: a tube including a receiving port for receiving the solid target material that has passed through the first path and an opposing surface facing the receiving port; a delivery rod that delivers the solid target material from the tube by alternately moving back and forth along the length of the tube; a stopper that, when the delivery rod moves outward, moves toward the outside of the tube to form a passage for moving the solid target material between the receiving port and the opposing surface inside the tube, and, when the delivery rod moves back, moves toward the inside of the tube to prevent the solid target material inside the tube from returning to the space between the receiving port and the opposing surface; the delivery device, a second path for replenishing the solid target material delivered by the delivery device to a molten target container of an extreme ultraviolet light generation device; A solid target material supply device comprising:

2. 2. The solid target material supply device according to claim 1, the stopper moves in a plane intersecting the direction of movement of the solid target material passing through the receiving opening; Solid target material supply device.

3. 2. The solid target material supply device according to claim 1, the stopper moves in a plane perpendicular to the direction of movement of the solid target material passing through the receiving opening; Solid target material supply device.

4. 2. The solid target material supply device according to claim 1, The stopper moves in a plane away from the receiving opening. Solid target material supply device.

5. 2. The solid target material supply device according to claim 1, The stopper is pressed by the feeding rod and moves when the feeding rod moves forward, and moves by the restoring force of a spring when the feeding rod moves backward. Solid target material supply device.

6. 2. The solid target material supply device according to claim 1, the stopper has a first surface that is pressed against the delivery rod through the solid target material when the delivery rod moves forward; Solid target material supply device.

7. 7. The solid target material supply device according to claim 6, the first surface is inclined relative to a direction of forward motion of the delivery bar; Solid target material supply device.

8. 7. The solid target material supply device according to claim 6, The stopper further has a second surface that restricts the solid target material that has been pressed by the delivery rod and separated from the first surface from moving in the direction of the return movement of the delivery rod. Solid target material supply device.

9. 9. The solid target material supply device according to claim 8, the first surface is inclined relative to a direction of forward motion of the delivery bar; the second surface intersects the direction of outward movement of the delivery rod at an angle closer to perpendicular than an angle between the direction of outward movement of the delivery rod and the first surface; Solid target material supply device.

10. 2. The solid target material supply device according to claim 1, the stopper includes a first surface that presses through the solid target material when the delivery rod moves forward; the feed rod presses the first surface through the solid target material to move the stopper toward the outside of the tube, and after the solid target material leaves the first surface of the stopper, the feed rod moves back with the stopper in contact with the feed rod; Solid target material supply device.

11. 2. The solid target material supply device according to claim 1, the feed rod moves back and the stopper moves into the tube, and then the feed rod moves back further with the stopper stopped, thereby forming a space for receiving the solid target material between the receiving port and the opposing surface and between the feed rod and the stopper; Solid target material supply device.

12. 2. The solid target material supply device according to claim 1, the tube is inclined so as to deliver the solid target material against gravity when the delivery rod moves forward; Solid target material supply device.

13. 2. The solid target material supply device according to claim 1, The stopper moves while rotating. Solid target material supply device.

14. 2. The solid target material supply device according to claim 1, The stopper moves linearly. Solid target material supply device.

15. 2. The solid target material supply device according to claim 1, The stopper includes a first surface inclined with respect to a direction of forward movement of the feed rod, and the first surface includes a groove oriented parallel to a plane parallel to both the direction of forward movement of the feed rod and the direction of movement of the stopper. Solid target material supply device.

16. 2. The solid target material supply device according to claim 1, a first detector for detecting solid target material passing through the first path; a drive unit that moves the delivery rod forward and backward; a processor that controls the driving unit based on a detection result of the first detector; The solid target material supply device further comprises:

17. 2. The solid target material supply device according to claim 1, a second detector for detecting solid target material passing through the second path; a processor that determines whether the forward and backward movements of the delivery rod are consistent with the detection result of the second detector, and outputs the determination result; The solid target material supply device further comprises:

18. a solid target material supply device according to claim 1; a molten target container for melting the solid target material supplied by the solid target material supply device to produce a molten target material; a nozzle for ejecting the molten target material generated in the molten target container; a laser device that irradiates a pulsed laser beam onto the molten target material that has been emitted from the nozzle and reached a predetermined area; an EUV collector mirror that collects extreme ultraviolet light emitted from the plasma generated in the predetermined region; An extreme ultraviolet light generating device comprising:

19. A method for manufacturing an electronic device, comprising: a solid target container containing a solid target material; a first path through which the solid target material supplied from the solid target container passes; A delivery device comprising: a tube including a receiving port for receiving the solid target material that has passed through the first path and an opposing surface facing the receiving port; a delivery rod that delivers the solid target material from the tube by alternately moving back and forth along the length of the tube; a stopper that, when the delivery rod moves outward, moves toward the outside of the tube to form a passage for moving the solid target material between the receiving port and the opposing surface inside the tube, and, when the delivery rod moves back, moves toward the inside of the tube to prevent the solid target material inside the tube from returning to the space between the receiving port and the opposing surface; the delivery device, a second path for replenishing the solid target material delivered by the delivery device to a molten target container of an extreme ultraviolet light generation device; a solid target material supply device comprising: a molten target container for melting the solid target material supplied by the solid target material supply device to produce a molten target material; a nozzle for ejecting the molten target material generated in the molten target container; a laser device that irradiates a pulsed laser beam onto the molten target material that has been emitted from the nozzle and reached a predetermined area; an EUV collector mirror that collects extreme ultraviolet light emitted from the plasma generated in the predetermined region; generating extreme ultraviolet light by an extreme ultraviolet light generating device comprising: Extreme ultraviolet light is output to the exposure device, In order to manufacture an electronic device, a photosensitive substrate is exposed to extreme ultraviolet light in the exposure apparatus. A method for manufacturing an electronic device, comprising:

20. A method for manufacturing an electronic device, comprising: a solid target container containing a solid target material; a first path through which the solid target material supplied from the solid target container passes; A delivery device comprising: a tube including a receiving port for receiving the solid target material that has passed through the first path and an opposing surface facing the receiving port; a delivery rod that delivers the solid target material from the tube by alternately moving back and forth along the length of the tube; a stopper that, when the delivery rod moves outward, moves toward the outside of the tube to form a passage for moving the solid target material between the receiving port and the opposing surface inside the tube, and, when the delivery rod moves back, moves toward the inside of the tube to prevent the solid target material inside the tube from returning to the space between the receiving port and the opposing surface; the delivery device, a second path for replenishing the solid target material delivered by the delivery device to a molten target container of an extreme ultraviolet light generation device; a solid target material supply device comprising: a molten target container for melting the solid target material supplied by the solid target material supply device to produce a molten target material; a nozzle for ejecting the molten target material generated in the molten target container; a laser device that irradiates a pulsed laser beam onto the molten target material that has been emitted from the nozzle and reached a predetermined area; an EUV collector mirror that collects extreme ultraviolet light emitted from the plasma generated in the predetermined region; and inspecting a mask for defects by irradiating the mask with extreme ultraviolet light generated by an extreme ultraviolet light generating device comprising: selecting a mask using the results of said testing; The pattern formed on the selected mask is transferred onto a photosensitive substrate by exposure. A method for manufacturing an electronic device, comprising:

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