Ion detection device and gas analysis system

Abstract

To provide an ion detection device which achieves high detection accuracy of an ion.SOLUTION: An ion detection device includes: an ion filter for selecting ions; a first circuit for operating the ion filter; a detector for detecting the ions which have passed the ion filter; a second circuit for operating the detector; and a circuit board which is arranged between the ion filter and the detector and in which the first or second circuit is arranged. The detector is arranged away from the circuit board.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to an ion detection device and a gas analysis system. [Background technology]

[0002] Conventionally, an ion detector using a method called Field Asymmetric Ion Mobility Spectrometry (FAIMS) is known, which detects ionized gas molecules and chemical substances according to the trajectories of ions passing through an ion filter to which an asymmetric high AC voltage is applied.

[0003] Furthermore, for example, Patent Document 1 discloses an ion detection device having an electrode structure that moves ions toward an ion detector so that a drift gas flow is not used when operating the ion detection device. Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the ion detection device described in Patent Document 1, the circuit that operates the ion filter and the detector are arranged on the same circuit board. Therefore, if the ionized gas has high humidity or is adhesive, a leakage current may flow to the detector through the moisture or adhesive matter adsorbed on the circuit board, which may reduce the detection accuracy of the ion detection device.

[0005] An object of the present invention is to improve the accuracy of ion detection. [Means for solving the problem]

[0006] An ion detection device according to one aspect of the present invention includes an ion filter that selects ions, a first circuit that operates the ion filter, a detector that detects the ions that have passed through the ion filter, a second circuit that operates the detector, and a circuit board that is disposed between the ion filter and the detector and on which the first circuit or the second circuit is disposed, and the detector is disposed at a distance from the circuit board. [Effects of the Invention]

[0007] According to the present invention, it is possible to improve the accuracy of ion detection. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a schematic diagram showing the overall configuration of an ion detector according to a first embodiment of the present invention. [Figure 2] FIG. 2 is a schematic exploded perspective view showing the configuration of the ion detector according to the first embodiment of the present invention and the periphery of a circuit board. [Figure 3] FIG. 2 is a schematic top view of a circuit board disposed in the ion detector according to the first embodiment of the present invention. [Figure 4] FIG. 2 is a schematic bottom view of a circuit board and a detector arranged in the ion detection device according to the first embodiment of the present invention. [Figure 5] FIG. 3 is a schematic cross-sectional view taken along line VV in FIG. 2. [Figure 6] FIG. 10 is a schematic exploded perspective view showing the configuration of the periphery of a circuit board of an ion detector according to a comparative example. [Figure 7] FIG. 10 is a schematic top view of a circuit board disposed in an ion detector according to a comparative example. [Figure 8] FIG. 10 is a schematic bottom view of a circuit board and a detector disposed in an ion detection device according to a comparative example. [Figure 9] FIG. 7 is a schematic cross-sectional view taken along line IX-IX in FIG. 6. [Figure 10] FIG. 10 is a schematic exploded perspective view showing the configuration of the periphery of a circuit board of an ion detector according to a second embodiment of the present invention. [Figure 11]FIG. 10 is a schematic top view of a circuit board disposed in an ion detector according to a second embodiment of the present invention. [Figure 12] FIG. 10 is a schematic bottom view of a circuit board and a detector arranged in an ion detection device according to a second embodiment of the present invention. [Figure 13] 11 is a schematic cross-sectional view taken along line XIII-XIII in FIG. 10. [Figure 14] FIG. 10 is a block diagram showing the configuration of a gas analysis system according to a third embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0009] An ion detection device and a gas analysis system according to an embodiment of the present invention will be described in detail below with reference to the drawings. However, the following embodiments are merely illustrative of an ion detection device and a gas analysis system for embodying the technical concept of the present embodiment, and are not limited thereto. Furthermore, unless otherwise specified, the dimensions, materials, shapes, relative arrangements, and the like of components described in the embodiments are merely illustrative examples and are not intended to limit the scope of the present invention. The sizes, positional relationships, and the like of components shown in the drawings may be exaggerated for clarity. In the following description, the same names and symbols indicate components that are the same or of the same quality, and detailed descriptions will be omitted as appropriate.

[0010] For ease of explanation, the arrangement and configuration of each part will be described below using an XYZ Cartesian coordinate system. The three axes in the XYZ Cartesian coordinate system are mutually orthogonal. In the XYZ Cartesian coordinate system, the direction in which the X axis extends is referred to as the "X direction," the direction in which the Y axis extends is referred to as the "Y direction," and the direction in which the Z axis extends is referred to as the "Z direction." The direction in which the arrow indicating the X axis points is referred to as the +X direction, and the direction opposite to the +X direction is referred to as the -X direction. The direction in which the arrow indicating the Y axis points is referred to as the +Y direction, and the direction opposite to the +Y direction is referred to as the -Y direction. The direction in which the arrow indicating the Z axis points is referred to as the +Z direction, and the direction opposite to the +Z direction is referred to as the -Z direction. Ions or gases that are the subject of the ion detection device and gas analysis system according to embodiments of the present invention flow in the +Z direction. However, these directional expressions merely describe the relationship of relative position, orientation, direction, etc., and may not coincide with the relationship when the ion detection device and gas analysis system according to the embodiment of the present invention are used. Furthermore, these directions are unrelated to the direction of gravity.

[0011] In order to avoid overly complicated drawings, schematic diagrams may be used that omit some parts or components, or end views that show only the cut surface may be used as cross-sectional views. "To be placed" does not only mean to be in direct contact, but also includes being placed indirectly, for example, via other components.

[0012] [First embodiment] <Configuration of ion detector according to first embodiment> The configuration of an ion detector 100 according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 9. FIG. 1 is a schematic perspective view showing an example of the overall configuration of the ion detector 100 according to the first embodiment of the present invention. FIG. 2 is a schematic exploded perspective view showing an example of the configuration around a circuit board 5 of the ion detector 100 according to the first embodiment of the present invention. FIG. 3 is a schematic top view showing an example of the circuit board 5 arranged in the ion detector 100 according to the first embodiment of the present invention. FIG. 4 is a schematic bottom view showing an example of the circuit board 5 and detector 3 arranged in the ion detector 100 according to the first embodiment of the present invention. FIG. 5 is a schematic cross-sectional view taken along line VV in FIG. 2. FIG. 6 is a schematic exploded perspective view showing the configuration around a circuit board 5 of an ion detector 100X according to a comparative example. FIG. 7 is a schematic top view of the circuit board 5 arranged in the ion detector 100X according to the comparative example. FIG. 8 is a schematic bottom view of the circuit board 5 and detector 3 arranged in the ion detector 100X according to the comparative example. FIG. 9 is a schematic cross-sectional view taken along line IX-IX in FIG. 6.

[0013] As shown in FIG. 1, the ion detector 100 includes an ion filter 1 that selects ions Si, a first circuit 2 that operates the ion filter 1, and a detector 3 that detects ions Si that arrive after passing through the ion filter 1. The ion detector 100 also includes a second circuit 4 that operates the detector 3, and a circuit board 5 that is disposed between the ion filter 1 and the detector 3 and on which the first circuit 2 or the second circuit 4 is disposed. The ion detector 100 shown in FIG. 1 also includes an airflow generating mechanism 6 that generates an airflow that causes gas Sa containing ions Si, which are the subject of the ion detector 100, to flow in the +Z direction, and an ionizer 7 that ionizes the gas Sa. The ion detector 100 shown in FIG. 1 also includes a support member 8 that supports the ion filter 1, a rectifying member 9 that is disposed between the support member 8 and the ion filter 1 and that rectifies the flow of ions Si, and an insulating member 10 that is disposed between the rectifying member 9 and the ion filter 1.

[0014] The ion detector 100 is an apparatus for detecting ions using a method called field asymmetric waveform ion mobility spectrometry (FAIMS). The ion detector 100 shown in Fig. 1 ionizes gas Sa flowing in the +Z direction by an airflow generated by an airflow generating mechanism 6 using an ionizer 7. The ionized ions Si flow in the +Z direction and reach the ion filter 1 supported by a support member 8 via a rectifying member 9 and an insulating member 10.

[0015] The ion filter 1 includes a first electrode 1a and a second electrode 1b. Ions Si that reach the ion filter 1 pass between the first electrode 1a and the second electrode 1b. The ion filter 1 generates an AC electric field of a strength according to the type of ion Si in response to an asymmetric high AC voltage applied to the first electrode 1a and the second electrode 1b. The ion filter 1 applies the AC electric field to the ions Si passing between the first electrode 1a and the second electrode 1b, thereby changing the trajectory of the ions Si according to the type of ion Si.

[0016] For example, among the ions Si passing between the first electrode 1a and the second electrode 1b, ions other than the analyte ions Si do not follow a predetermined trajectory due to the action of the AC electric field in the ion filter 1 and therefore cannot reach the detector 3. On the other hand, the analyte ions Si follow a predetermined trajectory and reach the detector 3, colliding with the detector 3. The ion detector 100 can detect the ions Si that have reached the detector 3. From another perspective, the ion detector 100 can select the ions Si using the ion filter 1, taking advantage of differences in mobility depending on the strength of the electric field.

[0017] The ion detector 100 outputs, as information about the ions Si, a current corresponding to the number of charges of the ions Si that have reached the detector 3. For example, a gas analysis system that receives the current from the ion detector 100 can analyze the concentration of each type of gas, the concentration distribution of each type of gas, and the like, based on the current from the ion detector 100.

[0018] It should be noted that the method disclosed in Japanese Patent No. 7102733, for example, can be applied to the field asymmetric waveform ion mobility spectrometry (FAIMS) method using the ion detector 100. The contents of the disclosure in Japanese Patent No. 7102733 are incorporated herein by reference.

[0019] 2, 3, and 5, in the ion detection device 100, the first circuit 2 is disposed on a first surface 51 of the circuit board 5 on the side where the ion filter 1 is located. Four pogo pins 22 electrically connected to the first circuit 2 are disposed on the first surface 51 of the circuit board 5. The ion filter 1 is disposed on the four pogo pins 22, and is thereby electrically connected to the first circuit 2. The ion filter 1 operates when an AC voltage is applied from an AC power supply 21 through the first circuit 2.

[0020] In the ion detection device 100, the detector 3 is disposed at a distance from the circuit board 5. In the example shown in FIGS. 2 and 5, the detector 3 is disposed at a distance from the circuit board 5 in the +Z direction. The second circuit 4 is disposed on a second surface 52 of the circuit board 5, opposite to the side on which the ion filter 1 is located. The detector 3 is held by a conductive holding member 41. In a state where the detector 3 is separated from the second circuit 4, the detector 3 is electrically connected to the second circuit 4 via the holding member 41.

[0021] 4 and 5, the circuit board 5 includes an opening 50 disposed between the ion filter and the detector 3, and the second circuit 4 is disposed outside the opening 50 when the circuit board 5 is viewed from the side where the detector 3 is located, for example, the +Z side. The second circuit 4 also includes a pair of second circuits 4a and 4b. The pair of second circuits 4a and 4b are disposed outside the opening 50 in positions symmetrical with respect to the opening 50. The detector 3 performs detection operation using a current or voltage supplied from the pair of second circuits 4a and 4b.

[0022] Here, an ion detector 100X according to a comparative example will be described. In the comparative example shown in Fig. 6 to Fig. 9, components having substantially the same functions as those of the ion detector 100 according to the first embodiment of the present invention are denoted by the same reference numerals as those of the ion detector 100 for ease of understanding.

[0023] In the ion detection device 100X, the detector 3 is arranged on the circuit board 5 so as to be inserted into an opening 50 provided in the circuit board 5. A first circuit 2 is arranged on a first surface 51 of the circuit board 5 on the side where the ion filter 1 is located. The ion filter 1 is electrically connected to the first circuit 2 by being arranged on four pogo pins 22 that are electrically connected to the first circuit 2. The ion filter 1 operates when an AC voltage is applied from an AC power supply 21 through the first circuit 2.

[0024] In the ion detector 100X, the detector 3 is disposed on the circuit board 5 so as to be inserted into the opening 50, and is not disposed at a distance from the circuit board 5. From another perspective, the detector 3 is integrated with the circuit board 5 by being inserted into the opening 50. By integrating the detector 3 with the circuit board 5, when the circuit board 5 is exposed to a highly humid or adhesive wet gas (hereinafter simply referred to as a wet gas), such as a highly humid gas, a gas containing mist, or a corrosive gas, a leakage current may flow between the first circuit 2 and the detector 3 through the wet gas. A leakage point 31 indicated by a dashed circle in FIG. 9 is an example of a point where a leakage current flows from the first circuit 2 to the detector 3. In the ion detector 100X, noise corresponding to the leakage current may reduce the accuracy of ion detection.

[0025] In the ion detector 100 according to the first embodiment of the present invention, the detector 3 is disposed apart from the circuit board 5. This makes it possible to reduce the current flowing from the first circuit 2 to the detector 3 through the moist gas, and thus the leakage current, even when the circuit board 5 is exposed to moist gas, compared to when the detector 3 is integrated into the circuit board 5. By reducing the leakage current, the first embodiment of the present invention can provide an ion detector 100 that reduces noise in ion detection and has high detection accuracy.

[0026] In the ion detection device 100, when the circuit board 5 is viewed from the side where the detector 3 is located, the second circuit 4 is disposed outside the opening 50. This makes it possible to reduce the amount of wet gas flowing in the +Z direction that passes through the opening 50 and reaches the second circuit 4, or the amount of wet gas that reaches between the second circuit 4 and the detector 3, even when the analyte is wet gas. This also makes it possible to reduce adhesion of moisture or attachments contained in the wet gas to the second circuit 4 or to the region of the circuit board 5 between the second circuit 4 and the detector 3. As a result, it is possible to reduce leakage current that flows from the first circuit 2 to the second circuit 4 through moisture or attachments contained in the wet gas, thereby improving the detection accuracy of the ions Si.

[0027] In the ion detector 100, the first circuit 2 is disposed on the side of the circuit board 5 where the ion filter 1 is located, and the second circuit 4 is disposed on the opposite side of the circuit board 5 from the side where the ion filter 1 is located. This makes it possible to reduce the leakage current flowing from the first circuit 2 to the second circuit 4 through the moist air, even when the circuit board 5 is exposed to moist air, compared to when the first circuit 2 and the second circuit 4 are disposed on the same side of the circuit board 5. As a result, the leakage current flowing from the first circuit 2 to the second circuit 4 through the moist air is reduced, and the detection accuracy of the ions Si can be improved.

[0028] In the ion detection device 100, the second circuit 4 includes a pair of second circuits 4a and 4b that are arranged symmetrically with respect to the opening 50. As shown in FIG. 5 , the distance b between the pair of second circuits 4a and 4b is longer than the width a of the opening 50. This makes it possible to reduce the amount of wet gas flowing in the +Z direction that reaches the second circuit 4 through the opening 50 or the amount of wet gas that reaches between the second circuit 4 and the detector 3, even when the analyte is wet gas. This also makes it possible to reduce adhesion of moisture or deposits contained in the wet gas to the second circuit 4 or to the region of the circuit board 5 between the second circuit 4 and the detector 3. As a result, the leakage current that flows from the first circuit 2 to the second circuit 4 through the wet air is reduced, thereby improving the detection accuracy of the ions Si.

[0029] 5, in the ion detection device 100, the width c of the detector 3 is longer than the width a of the opening 50 and shorter than the distance b between the pair of second circuits 4a and 4b. As a result, even when the analyte is wet gas, it is possible to reduce the amount of wet gas flowing in the +Z direction that passes through the opening 50 and reaches between the second circuit 4 and the detector 3. This also reduces adhesion of moisture or deposits contained in the wet gas to the second circuit 4 or the region of the circuit board 5 between the second circuit 4 and the detector 3. As a result, it is possible to reduce the leakage current that flows from the second circuit 4 to the detector 3 through the wet air, thereby improving the detection accuracy of ions Si.

[0030] In the example shown in FIG. 1 , the ion detector 100 has a support member 8 and a rectifying member 9, and the potential of the support member 8 is equal to the potential of the rectifying member 9. This electrically connects the support member 8 and the rectifying member 9, thereby reducing the current flowing from the support member 8 or the rectifying member 9 to the ion filter 1. By reducing the current flowing from the support member 8 or the rectifying member 9 to the ion filter 1, the selection operation of the ion Si by the ion filter 1 can be stabilized, and the detection sensitivity of the ion detector 100 can be increased. The ion detector 100 can increase the detection accuracy of the ions Si by increasing the detection sensitivity. It is only necessary that the potential of the support member 8 and the potential of the rectifying member 9 are substantially equal.

[0031] 5, the detector 3 of the ion detector 100 is formed with a plurality of through-holes 30, each penetrating in the direction in which the gas Sa containing ions Si flows (for example, the +Z direction). For example, if the flow of gas flowing through the ion detector is disturbed, the accuracy of selecting ions Si by the ion filter may decrease, resulting in a decrease in the detection accuracy of ions Si. In the ion detector 100, the gas Sa flowing along the airflow generated by the airflow generating mechanism 6 passes through the plurality of through-holes 30, allowing the detector 3 to detect ions Si without disturbing the flow of the gas Sa. This allows the ion detector 100 to increase the accuracy of selecting ions Si by the ion filter 1 and increase the detection accuracy of ions Si.

[0032] 1 and 2, the ion filter 1 of the ion detection device 100 is made of SOI-MEMS (Silicon On Insulator-Micro Electro Mechanical Systems) or the like. The first electrode 1a and the second electrode 1b of the ion filter 1 each have a comb-like shape and are arranged opposite to each other. The first electrode 1a and the second electrode 1b can be made of materials including a metal material or the like.

[0033] The comb teeth of the first electrode 1a and the second electrode 1b are aligned in a predetermined direction, for example, the X direction, in a virtual plane, for example, the XY plane, that intersects with the direction in which ions Si flow. When viewed in the +X direction, the comb teeth of the first electrode 1a constitute even-numbered comb teeth. When viewed in the +X direction, the comb teeth of the second electrode 1b constitute odd-numbered comb teeth. A potential difference is established between the comb teeth of the first electrode 1a that constitute even-numbered comb teeth and the comb teeth of the second electrode 1b that constitute odd-numbered comb teeth. This configuration allows the area of ​​the electrodes that generate an AC electric field to be increased, and the ions Si can be moved with precision by the ion filter 1. As a result, the ion detector 100 can increase the accuracy of selecting ions Si and the accuracy of detecting ions Si.

[0034] The detector 3 is grounded and can capture the charge of ions Si that reach the detector 3 after passing between the first electrode 1a and the second electrode 1b of the ion filter 1. The detector 3 can be made of materials including a metal material, etc.

[0035] 2 and 5, the detector 3 is held by a conductive holding member 41 in a state separated from the circuit board 5. By being held by the holding member 41, even when the circuit board 5 is exposed to a moist gas, moisture or deposits in the moist gas are easily adsorbed by the holding member 41, thereby reducing moisture or deposits adhering to the detector 3. This reduces leakage current due to moisture or deposits adhering to the detector 3, and improves the detection accuracy of the ion detection device 100.

[0036] The circuit board 5 may be a PCB (Printed Circuit Board) or a PWB (Printed Wiring Board) in which conductive wiring is patterned inside or on the surface of an insulating material.

[0037] A pump or the like can be used for the airflow generating mechanism 6. A corona discharger or the like can be used for the ionizer 7. The support member 8 and the rectifying member 9 can be configured to include a conductive material such as a metal material. The insulating member 10 can be configured to include a resin material or the like. The rectifying member 9 and the insulating member 10 can be configured from SOI-MEMS or the like.

[0038] [Second embodiment] Next, an ion detector according to a second embodiment of the present invention will be described. The same names and symbols as those in the previously described embodiments indicate the same or similar components or configurations, and detailed descriptions thereof will be omitted as appropriate. This also applies to the other embodiments described below.

[0039] <Configuration of ion detector according to second embodiment> The configuration of an ion detector according to a second embodiment of the present invention will be described with reference to Figs. 10 to 13. Fig. 10 is a schematic exploded perspective view showing an example of the configuration around a circuit board 5 of an ion detector 100 according to the second embodiment of the present invention. Fig. 11 is a schematic top view showing an example of the circuit board 5 arranged in the ion detector 100 according to the second embodiment of the present invention. Fig. 12 is a schematic bottom view showing an example of the circuit board 5 and detector 3 arranged in the ion detector 100 according to the second embodiment of the present invention. Fig. 13 is a schematic cross-sectional view taken along line XIII-XIII in Fig. 10.

[0040] The ion detection device 100 according to the second embodiment of the present invention differs from the ion detection device 100 according to the first embodiment of the present invention mainly in that it includes a covering member 11 that covers the second circuit 4 arranged on the circuit board 5.

[0041] 10 to 13, the covering member 11 covers the second circuit 4 arranged on the second surface 52 of the circuit board 5. Furthermore, as shown in FIG. 12, the covering member 11 is arranged on the outside of the opening 50 when the circuit board 5 is viewed from the side where the detector 3 is located. In the example shown in FIG. 12, the covering member 11 is arranged on the second surface 52 of the circuit board 5 so as to surround the entire periphery of the opening 50. The covering member 11 can be made of a material including a resin material or the like.

[0042] By covering the second circuit 4 with the covering member 11, even when the circuit board 5 is exposed to moist gas, it is possible to prevent moisture or deposits contained in the moist gas from adhering to the region of the circuit board 5 between the first circuit 2 and the second circuit 4. This reduces the leakage current flowing between the first circuit 2 and the second circuit 4, and improves the detection accuracy of the ion detection device 100.

[0043] Furthermore, when the circuit board 5 is viewed from the side where the detector 3 is located, the covering member 11 is disposed outside the opening 50, thereby reducing adhesion of moisture or adsorbates contained in moist air to the side wall of the covering member 11 facing the opening 50. This reduces leakage current due to moisture or adsorbates adhering to the detector 3, and improves the detection accuracy of the ion detection device 100.

[0044] [Third embodiment] Next, a gas analyzing system according to a third embodiment of the present invention will be described.

[0045] 14 is a block diagram showing an example of the configuration of a gas analysis system 200 according to the third embodiment of the present invention. The gas analysis system 200 includes an ion detector 100 and a processing unit 150.

[0046] The processing unit 150 includes a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and a communication I / F (Interface), etc. These are connected to each other via a system bus so that they can communicate with each other.

[0047] The processing unit 150 receives the detection results from the ion detection device 100 and can analyze the gas Sa containing Si ions based on the detection results. The gas analysis system 200 can output the analysis results from the processing unit 150 to an external device other than the gas analysis system 200. The external device can be an information processing device such as a PC (Personal Computer), a display device, a storage device, a communication device connected to a network such as the Internet, or the like.

[0048] The gas analysis system 200 includes the ion detection device 100 that can detect ions Si with high accuracy, and thus can analyze gases containing ions Si with high accuracy.

[0049] Although the preferred embodiments have been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications and substitutions can be made to the above-described embodiments without departing from the scope of the claims.

[0050] The ordinal numbers, quantities, and other figures used in the above description of the embodiments are all provided as examples to specifically explain the technology of the present invention, and the present invention is not limited to the illustrated figures. Furthermore, the connection relationships between the components are provided as examples to specifically explain the technology of the present invention, and the connection relationships for realizing the functions of the present invention are not limited to these.

[0051] For example, aspects of the present invention are as follows. <1> The ion detection device includes an ion filter that selects ions, a first circuit that operates the ion filter, a detector that detects the ions that have passed through the ion filter, a second circuit that operates the detector, and a circuit board that is disposed between the ion filter and the detector and on which the first circuit or the second circuit is disposed, wherein the detector is disposed at a distance from the circuit board. <2> the circuit board has an opening disposed between the ion filter and the detector, and when the circuit board is viewed from the side where the detector is located, the second circuit is disposed outside the opening; <1> The ion detection device is described in <3> the first circuit is disposed on a side of the circuit board where the ion filter is located, and the second circuit is disposed on a side of the circuit board opposite to the side where the ion filter is located; <1> or the above <2> The ion detection device is described in <4> The circuit board is provided with an opening that is disposed between the ion filter and the detector, and the second circuit includes a pair of second circuits that are disposed at positions symmetrical with respect to the opening, and a distance between the pair of second circuits is longer than a width of the opening. <1> From the above <3> The ion detector according to any one of the above items. <5> The width of the detector is longer than the width of the opening and shorter than the distance between the pair of second circuits. <4> The ion detection device is described in <6> a covering member that covers the second circuit disposed on the circuit board, <1> From the above <5> The ion detector according to any one of the above items. <7> the circuit board is provided with an opening that is disposed between the ion filter and the detector, and the covering member is disposed outside the opening when the circuit board is viewed from the side where the detector is located; <6> The ion detection device is described in <8> a support member for supporting the ion filter; and a rectifying member disposed between the support member and the ion filter to regulate the flow of the ions, wherein the potential of the support member and the potential of the rectifying member are equal. <1> From the above <7> The ion detector according to any one of the above items. <9> The detector has a plurality of through holes formed therein that penetrate in the direction in which the gas containing the ions flows. <1> From the above <8> The ion detector according to any one of the above items. <10> The aforementioned <1> From the above <9> and a gas analysis system that includes the ion detection device according to any one of the above, and analyzes a gas containing the ions based on a detection result by the ion detection device. [Explanation of symbols]

[0052] 1 Ion filter 1a 1st electrode 1b 2nd electrode 2 1st circuit 21 AC power supply 22 pogo pins 3. Detector 30 through holes 31 Leak Location 4, 4a, 4b 2nd circuit 41 Retaining member 5 Circuit Board 50 Opening 51 Page 1 52 2nd page 6 Airflow generation mechanism 7 Ionizer 8 Support member 9 Straightening member 10. Insulating material 11 Covering material 100 Ion detector 150 Processing section 200 Gas Analysis System a, b, c length Sa gas Si ions [Prior art documents] [Patent documents]

[0053] [Patent Document 1] Patent No. 5221954

Claims

1. an ion filter for selecting ions; a first circuit for operating the ion filter; a detector that detects the ions that have passed through the ion filter; a second circuit for operating the detector; a circuit board disposed between the ion filter and the detector, on which the first circuit or the second circuit is disposed; The ion detection device, wherein the detector is disposed remotely from the circuit board.

2. the circuit board is provided with an opening disposed between the ion filter and the detector; The ion detection device according to claim 1 , wherein the second circuit is disposed outside the opening when the circuit board is viewed from the side where the detector is located.

3. the first circuit is disposed on a side of the circuit board where the ion filter is located; The ion detection device according to claim 1 , wherein the second circuit is disposed on the opposite side of the circuit board from the side on which the ion filter is disposed.

4. the circuit board is provided with an opening disposed between the ion filter and the detector; the second circuit includes a pair of second circuits arranged at positions symmetrical with respect to the opening, The ion detection device according to claim 1 , wherein a distance between the pair of second circuits is longer than a width of the opening.

5. The ion detection device according to claim 4 , wherein the width of the detector is longer than the width of the opening and shorter than the distance between the pair of second circuits.

6. The ion detection device according to claim 1 , further comprising a covering member that covers the second circuit disposed on the circuit board.

7. the circuit board is provided with an opening disposed between the ion filter and the detector; The ion detection device according to claim 6 , wherein the covering member is disposed outside the opening when the circuit board is viewed from the side where the detector is located.

8. a support member for supporting the ion filter; a rectifying member disposed between the support member and the ion filter to regulate the flow of the ions, 2. The ion detector according to claim 1, wherein the potential of said support member and the potential of said rectifying member are equal.

9. The ion detection device according to claim 1 , wherein the detector has a plurality of through holes formed therein that penetrate in a direction in which the gas containing the ions flows.

10. The ion detector according to any one of claims 1 to 9, A gas analysis system that analyzes a gas containing the ions based on the detection results from the ion detection device.

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