Cleaning device, cleaning system, and cleaning method

Abstract

To provide a cleaning device, a cleaning system and a cleaning method which are able to clean an internal space of a storage container without requiring the storage container to have an additional structure for the cleaning.SOLUTION: A cleaning device 1 cleans an internal space of a storage container including: a container body that has an opening and the internal space in which panels are stored; and a lid body for closing the opening. The cleaning device 1 comprises: a closing body for closing the opening while the lid body is removed, the closing body having a gas supply port through which gas is introduced into the internal space, and a gas exhaust port through which gas is discharged from the internal space; and a gas supply device for supplying gas to the internal space via the gas supply port.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present disclosure relates to cleaning devices, cleaning systems, and cleaning methods. [Background technology]

[0002] There are known techniques for cleaning the internal space of a storage container with gas. For example, in a substrate storage container described in Patent Document 1, gas is blown onto a retainer from a gas ejection portion provided on the inner wall surface of a lid that closes the container body, thereby blowing off particles that have adhered to the retainer. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-145008 Summary of the Invention [Problem to be solved by the invention]

[0004] The technology described in Patent Document 1 requires the lid to be provided with a gas outlet, and further requires the provision of a flow path for introducing gas supplied from the outside to the gas inlet valve of the container body to the gas outlet of the lid. In this technical field, it is desired to clean the internal space of a storage container without providing the storage container with an additional structure for cleaning.

[0005] The present disclosure describes a cleaning device, a cleaning system, and a cleaning method that can clean the interior space of a storage container without providing the storage container with additional structures for cleaning. [Means for solving the problem]

[0006] A cleaning device according to one aspect of the present disclosure is a cleaning device for cleaning the interior space of a storage container that includes a container body having an opening and an interior space for accommodating a panel, and a lid that closes the opening. The cleaning device includes a closing body that closes the opening when the lid is removed, the closing body having an air inlet through which gas is introduced into the interior space and an exhaust port through which gas is exhausted from the interior space, and an air supply device that supplies gas to the interior space via the air inlet.

[0007] In this cleaning device, when the lid is removed, the opening of the container body is blocked by a blocking body having an air inlet and an exhaust port, and gas is supplied to the internal space of the container body through the air inlet by the air supply device. As a result, particles in the internal space are discharged together with the gas from the exhaust port. By using a cleaning blocking body instead of a lid in this way, the internal space of the storage container is cleaned, eliminating the need for additional cleaning structures in the storage container. In other words, the above cleaning device makes it possible to clean the internal space of a storage container without providing additional cleaning structures in the storage container.

[0008] The cleaning device may further include an exhaust device that exhausts gas from the interior space through an exhaust port. This configuration makes it easier for gas to be exhausted from the exhaust port, thereby improving the cleaning efficiency of the interior space.

[0009] The cleaning device may further include a control device that controls the air supply device or the exhaust device so that the air pressure in the internal space is maintained at a positive pressure. Positive air pressure in the internal space reduces the possibility of particles entering the internal space from the outside, thereby improving the cleaning efficiency of the internal space.

[0010] The cleaning device may further include a first moving mechanism that moves the container body and the closure relative to each other so that the closure closes the opening when the lid is removed. According to this configuration, the opening is closed by the closure using the first moving mechanism. This reduces the time required to close the opening with the closure, and reduces the possibility of particles entering the internal space from the outside. This improves the cleaning efficiency of the internal space.

[0011] The cleaning device may further include a mounting table including a stage on which the container body is placed and which moves the container body in a first direction. The blocking body may be provided on an edge of the mounting table in the first direction. The first moving mechanism may include a stage. With this configuration, the stage can move the container body in the first direction toward the blocking body. Therefore, there is no need to move the blocking body in the first direction, and changes in the distance between the gas supply device and the blocking body in the first direction are suppressed. Therefore, the length of the gas supply pipe for supplying gas that is provided between the gas supply device and the blocking body can be shortened.

[0012] The mounting table may further include a clamping mechanism for fixing the container body to the stage. With this configuration, the container body is fixed to the stage by the clamping mechanism, so that the container body can be firmly pressed against the closure, and the closure can more reliably close the opening. This reduces the possibility of particles entering the internal space from the outside, thereby improving the cleaning efficiency of the internal space.

[0013] The cleaning device may further include an opening / closing mechanism having a suction pad that adsorbs the lid and operates to lock and unlock the lid. With this configuration, the lid can be locked and unlocked while held by the suction pad. This shortens the time required to lock and unlock the lid, reducing the possibility of particles entering the internal space from the outside. This improves the cleaning efficiency of the internal space.

[0014] The cleaning device may further include a second movement mechanism that relatively moves the closure, the opening / closing mechanism, and the container body in a second direction intersecting the first direction. The closure and the opening / closing mechanism may be arranged in the second direction. With this configuration, the second movement mechanism can integrally move the opening / closing mechanism and the closure. Therefore, simply by moving the opening / closing mechanism and the closure in the second direction, it is possible to switch between a state for locking and unlocking the lid and a state for cleaning the internal space.

[0015] The gas supply device may also supply gas to the internal space via an air supply valve provided on the bottom plate of the container body. With this configuration, gas is supplied to the internal space not only through the air supply port of the closure but also through the air supply valve provided on the bottom plate of the container body, making it easier for the gas to spread throughout the internal space. This makes it possible to improve the cleaning efficiency of the internal space.

[0016] The air supply device may have a filter for removing particles. This configuration reduces the amount of particles contained in the gas supplied by the air supply device, thereby reducing the number of particles that enter the interior space. This improves the efficiency of cleaning the interior space.

[0017] The cleaning device may further include a particle counter that counts particles contained in the gas discharged from the internal space. The amount of particles contained in the gas discharged from the internal space is correlated with the amount of particles contained in the internal space. Therefore, the count value of the particle counter can be used to estimate the cleanliness of the internal space.

[0018] The above-mentioned purifying device may further include a barometer that measures the air pressure in the internal space. The obstruction may further include a measurement port to which the barometer is connected. For example, if an exhaust device is connected to the exhaust port, the pressure of the gas discharged from the exhaust port may be increased by the exhaust device, and this pressure may deviate from the air pressure in the internal space. According to the above-mentioned configuration, the barometer is connected to a measurement port different from the exhaust port, thereby reducing air pressure measurement errors caused by the exhaust device.

[0019] A cleaning system according to another aspect of the present disclosure includes the cleaning device and a storage container. Because this cleaning system includes the cleaning device described above, it is possible to clean the interior space of the storage container without providing the storage container with an additional structure for cleaning.

[0020] A cleaning method according to yet another aspect of the present disclosure is a method for cleaning the interior space of a storage container that includes a container body having an opening and an interior space for accommodating a panel, and a lid that closes the opening. This cleaning method includes closing the opening when the lid is removed with a closing body that closes the opening when the lid is removed, the closing body having an air inlet through which gas is introduced into the interior space and an exhaust port through which gas is exhausted from the interior space, and supplying gas to the interior space through the air inlet of the closing body.

[0021] In this cleaning method, the opening of the container body with the lid removed is blocked by a blocking body having an air inlet and an exhaust port, and gas is supplied into the internal space of the container body through the air inlet. As a result, particles in the internal space are discharged together with the gas from the exhaust port. By using a cleaning blocking body instead of a lid in this way, the internal space of the storage container is cleaned, eliminating the need for additional cleaning structures in the storage container. In other words, the above-described cleaning device makes it possible to clean the internal space of a storage container without providing additional cleaning structures in the storage container. [Effects of the Invention]

[0022] According to the present disclosure, the internal space of a storage container can be cleaned without providing the storage container with an additional structure for cleaning. [Brief explanation of the drawings]

[0023] [Figure 1] FIG. 1 is a perspective view of a cleaning system according to one embodiment. [Figure 2] FIG. 2 is an exploded perspective view of the panel storage container shown in FIG. [Figure 3] FIG. 3 is a bottom view of the panel housing container shown in FIG. [Figure 4] FIG. 4 is a perspective view of the cleaning device shown in FIG. [Figure 5] FIG. 5 is a block diagram of the cleaning device shown in FIG. [Figure 6] FIG. 6 is a perspective view of the stage shown in FIG. [Figure 7] FIG. 7 is a perspective view of the door shown in FIG. [Figure 8] FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. [Figure 9] FIG. 9 is a flowchart showing a cleaning method performed by the cleaning device shown in FIG. [Figure 10] FIG. 10 is a flowchart illustrating in detail the lid removal process of FIG. [Figure 11] FIG. 11 is a flowchart illustrating in detail the process of attaching the lid body shown in FIG. [Figure 12] Fig. 12(a) is a schematic diagram illustrating the process of preparing a panel storage container. Fig. 12(b) and Fig. 12(c) are schematic diagrams illustrating the process of removing the lid. Fig. 12(d) and Fig. 12(e) are schematic diagrams illustrating the process of closing the opening with a closing body. DETAILED DESCRIPTION OF THE INVENTION

[0024] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the drawings. In the description of the drawings, the same elements are given the same reference numerals, and duplicated explanations will be omitted. Each drawing shows an XYZ coordinate system. The Y-axis direction (first direction) is a direction that intersects (here, is perpendicular to) the X-axis direction and the Z-axis direction (second direction). The Z-axis direction is a direction that intersects (here, is perpendicular to) the X-axis direction and the Y-axis direction. As an example, the X-axis direction is the left-right direction (width direction), the Y-axis direction is the front-back direction (depth direction), and the Z-axis direction is the up-down direction (height direction).

[0025] A cleaning system according to one embodiment will be described with reference to Fig. 1. Fig. 1 is a perspective view of a cleaning system according to one embodiment. The cleaning system 100 shown in Fig. 1 is a system for cleaning an internal space V (see Fig. 2) of a panel storage container 101 (storage container). The cleaning system 100 includes a cleaning device 1 and the panel storage container 101.

[0026] The cleaning device 1 is a device that cleans the internal space V of the panel storage container 101. The cleaning device 1 can remove particles contained in the internal space V by supplying gas to the internal space V of the panel storage container 101. The cleaning device 1 is installed, for example, in a clean room. Details of the cleaning device 1 will be described later.

[0027] The panel storage container 101 is a container for storing multiple panels. The panel storage container 101 complies with, for example, the SEMI (Semiconductor Equipment and Materials International) standard. The panel storage container 101 is, for example, called a FOUP (Front Opening Unified Pod) and is used to transport panels within a factory. Examples of panels include glass substrates for liquid crystal panels and panels equipped with electronic components. The panels are rectangular. Examples of panel sizes include 510 mm x 515 mm and 600 mm x 600 mm. The number of panels that can be stored in the panel storage container 101 is determined arbitrarily and may be, for example, 6, 12, 16, or 24.

[0028] The panel storage container 101 is used, for example, in a manufacturing device for manufacturing electronic component assemblies. Electronic component assemblies are manufactured through a process of mounting a large number of electronic components on a large carrier panel such as a glass plate or a stainless steel plate, sealing these electronic components with epoxy resin or the like, peeling the sealed electronic components from the carrier panel in panel form, and cutting out the panel-shaped electronic components individually. The panel storage container 101 is used to transport panels between these processes.

[0029] The panel storage container 101 will be described in detail with reference to Figures 2 and 3. Figure 2 is an exploded perspective view of the panel storage container shown in Figure 1. Figure 3 is a bottom view of the panel storage container shown in Figure 1. As shown in Figure 2, the panel storage container 101 includes a container body 102, a lid 103, and a handle 104.

[0030] The container body 102 is a rectangular parallelepiped container with an open front (front face). In other words, the container body 102 is a front-open box-type container with an opening 102a on the front face. The container body 102 has an internal space V for storing multiple panels. Specifically, the container body 102 stores multiple panels stacked vertically with intervals between them. The panels are inserted into and removed from the container body 102 through the opening 102a.

[0031] The container body 102 includes a top plate 121, a bottom plate 122, a pair of side walls 123, a rear wall 124, a flange 125, and a base portion 127 (see FIG. 3).

[0032] The top plate 121, the bottom plate 122, the side walls 123, and the rear wall 124 are rectangular plate materials. The top plate 121 and the bottom plate 122 face each other in the up-down direction and are disposed substantially parallel to each other. The pair of side walls 123 face each other in the left-right direction and are disposed substantially parallel to each other. The rear wall 124 faces the lid 103 in the front-rear direction when the lid 103 closes the opening 102a. Any two adjacent members of the top plate 121, the bottom plate 122, the side walls 123, and the rear wall 124 are connected to each other. An internal space V is defined by the top plate 121, the bottom plate 122, the pair of side walls 123, and the rear wall 124.

[0033] The flange 125 is a rectangular frame body that is provided across the front end of the top plate 121, the front end of the bottom plate 122, and the front ends of the pair of side walls 123. The flange 125 defines the opening 102a. Two locking holes 125h are provided in each of the upper and lower frame parts of the flange 125, and are spaced apart in the left-right direction. The locking holes 125h in the upper frame part and the locking holes 125h in the lower frame part are positioned opposite each other in the up-down direction.

[0034] The pedestal portion 127 is a portion that serves as the base of the container body 102. The pedestal portion 127 is provided on the lower surface of the bottom plate 122. The pedestal portion 127 is formed by combining a plurality of pillar-shaped support members.

[0035] The lid 103 is a member for closing the opening 102a of the container body 102. The lid 103 airtightly closes the opening 102a of the container body 102 via a sealing member such as a gasket. The lid 103 is detachably attached to a flange 125 that defines the opening 102a. The lid 103 includes a lid body 131, a cover member 132, and a locking mechanism 133.

[0036] The lid main body 131 is the main body portion of the lid body 103. The lid main body 131 is a rectangular plate material. The cover member 132 is a member that covers the front surface of the lid main body 131. The cover member 132 is a rectangular plate material. A keyhole 132h is provided in the cover member 132. A key (not shown) is inserted into the keyhole 132h.

[0037] The locking mechanism 133 locks or unlocks the lid 103 by operating a key inserted in a keyhole 132h. The locking mechanism 133 includes a latch (not shown). With the lid 103 attached to the flange 125, the latch is inserted into a locking hole 125h provided in the flange 125 by operating the key, thereby locking the lid 103. With the lid 103 locked, the latch is pulled out of the locking hole 125h by operating the key, thereby unlocking the lid 103.

[0038] The pair of handles 104 are members used when the conveying device conveys the panel storage container 101. The pair of handles 104 are provided on both left and right ends of the top plate 121. The conveying device can convey the panel storage container 101 by grasping the pair of handles 104 and lifting the panel storage container 101.

[0039] The container body 102, the lid 103, and the pair of handles 104 are formed by combining multiple parts molded from metal or resin materials. Examples of resins contained in the molding material for the resin material include thermoplastic resins. Examples of thermoplastic resins include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymer, acrylic resins such as polymethyl methacrylate, and acrylonitrile butadiene styrene copolymer. Alloys of these resins may also be used as the resins contained in the molding material for the resin material.

[0040] Conductive materials and various antistatic agents may be added to these resins. Examples of conductive materials include carbon fibers, carbon powder, carbon nanotubes, and conductive polymers. Examples of antistatic agents that can be used include anionic, cationic, and nonionic antistatic agents. Benzotriazole-based, salicylate-based, cyanoacrylate-based, oxalic acid anilide-based, and hindered amine-based ultraviolet absorbers may also be added. Glass fibers or carbon fibers, which improve rigidity, may also be added selectively.

[0041] The panel storage container 101 further includes a shaft 161 and a shaft 162. The shafts 161 and 162 are members extending in the front-rear direction. The shaft 161 is used to support the center of the panel in the left-right direction. The shaft 162 is used to support the left and right ends of the panel. The rear end of the shaft 161 is fixed to a support column provided on the inner surface of the rear wall 124. The rear end of the shaft 162 is fixed to another support column provided on the inner surface of the rear wall 124. The shaft 162 is supported by a support member provided on the inner surface of the side wall 123. One shaft 161 and two shafts 162 provided at the same height form a storage stage for storing one panel. The shaft 161 is disposed between the two shafts 162 in the left-right direction.

[0042] As shown in FIG. 3, the panel housing 101 further includes a base substrate 151, a mounting plate 152, a mounting plate 153, a positioning member 154, an air intake valve 155, and an exhaust valve 156.

[0043] The base substrate 151 is a substrate for mounting the positioning member 154, the intake valve 155, and the exhaust valve 156. The base substrate 151 is a rectangular plate material. The base substrate 151 is provided below the pedestal portion 127. The base substrate 151 is provided with through holes 151h for mounting the intake valve 155 or the exhaust valve 156. The base substrate 151 is provided with four through holes 151h. The four through holes 151h are provided near the four corners of the base substrate 151.

[0044] The mounting plates 152 and 153 are members for mounting the positioning member 154 to the base substrate 151. The mounting plates 152 and 153 are plate-shaped members. The mounting plate 152 is provided with two through holes 152g for exposing the positioning member 154. The mounting plate 152 is further provided with a through hole 152h between the two through holes 152g, which is used to fix the panel housing container 101. The mounting plate 152 is provided with two through holes 152h. The two through holes 152h are aligned in the left-right direction. Each through hole 152h is, for example, a rectangular elongated hole extending in the left-right direction.

[0045] The mounting plate 153 is provided on the underside of the rear portion of the base substrate 151. The mounting plate 153 is provided with through-holes 153g for exposing the positioning members 154. The positioning members 154 are members used by external devices such as a transport device or a processing device to position the panel storage container 101 (container body 102). The positioning members 154 are V-shaped plates. The positioning members 154 are fitted into mounting holes in the base substrate 151 so as to be recessed (upward) toward the bottom plate 122. A V-shaped groove is defined by the V-shaped surfaces of the positioning members 154. The V-shaped surfaces are subjected to a wear-resistant surface treatment. The panel storage container 101 includes three positioning members 154.

[0046] The intake valve 155 and the exhaust valve 156 are used to maintain cleanliness and low humidity inside (internal space V) of the panel housing container 101. The intake valve 155 is a mechanism for supplying gas to the internal space V. The exhaust valve 156 is a mechanism for discharging gas from the internal space V. In this embodiment, the panel housing container 101 includes two intake valves 155 and two exhaust valves 156. The intake valves 155 and the exhaust valves 156 are provided on the bottom plate 122 and arranged between the bottom plate 122 and the base substrate 151.

[0047] The two intake valves 155 are provided so as to be exposed from two through holes 151h located at the rear, respectively. Each intake valve 155 supplies gas to the internal space V via a through hole provided in the bottom plate 122 and a through hole 151h provided in the base substrate 151. The two exhaust valves 156 are provided so as to be exposed from two through holes 151h located at the front, respectively. Each exhaust valve 156 exhausts gas from the internal space V via a through hole provided in the bottom plate 122 and a through hole 151h provided in the base substrate 151.

[0048] Next, the cleaning device 1 will be described with reference to FIGS. 4 to 8. FIG. 4 is a perspective view of the cleaning device shown in FIG. 1. FIG. 5 is a block diagram of the cleaning device shown in FIG. 1. FIG. 6 is a perspective view of the stage shown in FIG. 4. FIG. 7 is a perspective view of the door shown in FIG. 4. FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. 1. As shown in FIGS. 4 and 5, the cleaning device 1 includes a mounting table 2, a door 3, a lifting mechanism 4 (second moving mechanism), an air supply device 5, an exhaust device 6, a barometer 7, a particle counter 8, a guide monitor 9, a control device 10, a housing 11, an air supply pipe 12 (see FIG. 8), an exhaust pipe 13 (see FIG. 8), a piping 14 (see FIG. 8), an air supply pipe 15 (see FIG. 8), an exhaust pipe 16 (see FIG. 8), an air supply device 17, and an air supply pipe 18 (see FIG. 8).

[0049] The housing 11 is installed on the floor of the clean room and has a rectangular parallelepiped shape extending in the vertical direction. The housing 11 houses the air supply device 5, the exhaust device 6, the barometer 7, the particle counter 8, and the air supply device 17. The housing 11 has a surface 11a that extends in the vertical and horizontal directions.

[0050] The mounting table 2 is a table on which the panel storage container 101 is placed. The mounting table 2 is provided alongside the housing 11 and faces the surface 11a. As in the description of the panel storage container 101, in the description of the cleaning device 1, the direction from the housing 11 toward the mounting table 2 will be referred to as the "rear" and the direction from the mounting table 2 toward the housing 11 will be referred to as the "front." The mounting table 2 includes a base portion 21, a top surface member 22, a moving mechanism 23 (first moving mechanism), and a clamping mechanism 24.

[0051] The pedestal portion 21 is a portion that supports a stage 26, which will be described later, so that the stage 26 can move in the front-to-rear direction. The pedestal portion 21 is installed on the floor surface of a clean room, and has a rectangular parallelepiped shape that extends in the vertical direction. The pedestal portion 21 houses, for example, the control device 10. The top surface member 22 is provided on top of the pedestal portion 21. The top surface member 22 has a rectangular outer shape that is slightly larger than the pedestal portion 21 in a plan view. The top surface member 22 has a shape in which a central portion 22a in the left-to-right direction protrudes upward more than both sides.

[0052] The movement mechanism 23 is a mechanism that moves the panel storage container 101 (container body 102) in the front-to-rear direction. The movement mechanism 23 includes a pair of rails 25 and a stage 26. The pair of rails 25 are provided on the central portion 22a. Each rail 25 is a rod-shaped member that extends linearly in the front-to-rear direction. The pair of rails 25 are spaced apart from each other in the left-to-right direction and are arranged substantially parallel to each other. The pair of rails 25 define a movement path for the stage 26.

[0053] The stage 26 is a plate-shaped member on which the panel storage container 101 (container body 102) is placed. Specifically, the panel storage container 101 is placed on the stage 26 so that the lid 103 faces the surface 11a in the front-rear direction. The stage 26 is provided on the central portion 22a and sandwiched between a pair of rails 25. The stage 26 moves in the front-rear direction along the pair of rails 25. The stage 26 moves the panel storage container 101 (container body 102) placed on the stage 26 in the front-rear direction. The range of movement of the stage 26 in the front-rear direction is, for example, 70 mm. The movement mechanism 23 further includes a driving device (not shown) that drives the stage 26. For example, an electric, pneumatic, or hydraulic actuator is used as the driving device.

[0054] The stage 26 will now be described in detail with reference to Fig. 6. As shown in Fig. 6, the stage 26 includes a main body 61, a positioning pin 62, an air supply port 63, and an exhaust port 64.

[0055] The main body 61 is a plate-shaped portion that forms the main body of the stage 26. The main body 61 has a mounting surface 61a that faces the bottom plate 122 of the container body 102 in the up-down direction when the panel storage container 101 (container body 102) is placed on the stage 26.

[0056] The positioning pins 62 are provided on the mounting surface 61a and protrude upward from the mounting surface 61a. The stage 26 includes the same number of positioning pins 62 as the number of positioning members 154 (three in this embodiment). The three positioning pins 62 are arranged at positions corresponding to the three positioning members 154 of the panel storage container 101, respectively.

[0057] The air supply port 63 is a portion that introduces gas into the internal space V via the air supply valve 155. The air supply port 63 is connected to, for example, the air supply device 5, and introduces gas supplied from the air supply device 5 into the internal space V. The stage 26 includes the same number of air supply ports 63 as the air supply valves 155 (two in this embodiment). The two air supply ports 63 are arranged at positions that respectively correspond to the two air supply valves 155. In other words, when the container body 102 is fixed to the stage 26, each air supply port 63 is connected to the corresponding air supply valve 155.

[0058] The exhaust ports 64 are portions for discharging gas from the internal space V via exhaust valves 156. The exhaust ports 64 are connected to, for example, an exhaust device 6. When the exhaust device 6 operates, gas is discharged from the internal space V through the exhaust valves 156 and the exhaust ports 64. The stage 26 includes the same number of exhaust ports 64 as the number of exhaust valves 156 (two in this embodiment). The two exhaust ports 64 are disposed at positions corresponding to the two exhaust valves 156, respectively. In other words, when the container body 102 is fixed to the stage 26, each exhaust port 64 is connected to the corresponding exhaust valve 156.

[0059] 4 and 5, the description of the cleaning device 1 will be continued. The clamp mechanism 24 is a mechanism for fixing the container body 102 to the stage 26. The clamp mechanism 24 has a pair of clamp members 24a. Each clamp member 24a has a T-shape. More specifically, each clamp member 24a has a shaft portion extending upward from the mounting surface 61a and a tip portion connected to the tip of the shaft portion and extending in a direction intersecting the shaft portion. The tip portion of each clamp member 24a extends in the left-right direction when the panel storage container 101 (container body 102) is not fixed, and extends in the front-rear direction when the panel storage container 101 (container body 102) is fixed. The two clamp members 24a are arranged in the left-right direction between two positioning pins 62 provided in the front. Each clamp member 24a may also have an L-shape.

[0060] The clamping mechanism 24 further includes a driving device (not shown) that drives the clamping member 24a. For example, an electric, pneumatic, or hydraulic actuator is used as the driving device. The driving device rotates the clamping member 24a around the shaft of the clamping member 24a. The clamping mechanism 24 rotates the clamping member 24a, which is inserted into the through-hole 152h of the panel storage container 101, around the shaft of the clamping member 24a, thereby hooking the tip of the clamping member 24a onto the upper surface of the mounting plate 152, thereby fixing the container body 102 to the stage 26.

[0061] The door 3 is a member that opens and closes the lid 103 and closes the opening 102a when the lid 103 is removed. The door 3 is provided on an edge (the front end in this embodiment) of the mounting table 2 in the front-rear direction. The door 3 will now be described in detail with reference to FIG. 7. As shown in FIG. 7, the door 3 includes an opening / closing mechanism 31 and a closing body 32. The opening / closing mechanism 31 and the closing body 32 are arranged in the vertical direction and are integrated. The door 3 has a surface 3a that faces the stage 26 in the front-rear direction.

[0062] The opening / closing mechanism 31 is a mechanism for operating the locking and unlocking of the lid 103. The opening / closing mechanism 31 includes a main body 33, a frame 34, a suction pad 35, and a latch operation mechanism 36. The main body 33 is a rectangular plate material. The main body 33 has a surface 33a that faces the stage 26 in the front-to-rear direction. The surface 33a is located forward of the surface 33a. The frame 34 is an annular member provided along the periphery of the surface 33a and surrounds the surface 33a. The frame 34 has a shape that allows the flange 125 to be inserted therein, and is slightly larger than the outer shape of the flange 125.

[0063] The suction pads 35 are members that suction-hold the lid 103. In this embodiment, the opening / closing mechanism 31 has four suction pads 35. The four suction pads 35 are provided at the four corners of the surface 33a. The four suction pads 35 are arranged at positions corresponding to the four pads 132a provided at the four corners of the cover member 132. The suction pads 35 hold the lid 103 after it has been removed from the container body 102.

[0064] The latch operating mechanism 36 operates the locking and unlocking of the lid 103. The latch operating mechanism 36 includes keys 36a, the number of which is the same as the number of keyholes 132h (two in this embodiment). Each key 36a protrudes rearward from the surface 33a. The tip of each key 36a has a T-shape. The two keys 36a are arranged at positions corresponding to the two keyholes 132h, respectively. The latch operating mechanism 36 operates the latch of the lid 103 by inserting the key 36a into the keyhole 132h and rotating the key 36a. The latch operating mechanism 36 further includes a driving device (not shown) that drives the keys 36a. For example, an electric, pneumatic, or hydraulic actuator is used as the driving device.

[0065] The closing body 32 is a member that closes the opening 102a when the lid 103 is removed. The closing body 32 is located above the opening / closing mechanism 31. The closing body 32 includes a main body 37 and a sealing member 38. The main body 37 is a rectangular plate. The outer shape of the main body 37 is larger than the outer shape of the lid 103. The main body 37 has a surface 37a that faces the stage 26 in the front-to-rear direction. The surface 37a is located slightly forward of the surface 3a.

[0066] The sealing member 38 is a member that seals the gap between the main body 37 and the container body 102. The sealing member 38 is provided on the surface 37a. The sealing member 38 has substantially the same rectangular annular shape as the front end of the flange 125. The sealing member 38 is pressed against the entire periphery of the front end of the flange 125, thereby airtightly closing the opening 102a of the container body 102. The sealing member 38 is made of, for example, an elastic member. Examples of elastic members that make up the sealing member 38 include fluororubber, EPDM (ethylene propylene rubber), silicone rubber, urethane, and elastomer. The position of the rear end of the sealing member 38 in the front-rear direction is substantially the same as the position of the surface 33a in the front-rear direction.

[0067] The main body 37 is provided with an air inlet 37b, an exhaust port 37c, and a measurement port 37d. The air inlet 37b is a through-hole that penetrates the main body 37 in the front-to-rear direction. Gas is introduced into the internal space V via the air inlet 37b. The exhaust port 37c is a through-hole that penetrates the main body 37 in the front-to-rear direction. Gas is exhausted from the internal space V via the exhaust port 37c. The measurement port 37d is a through-hole that penetrates the main body 37 in the front-to-rear direction. A barometer 7 is connected to the measurement port 37d.

[0068] Air inlet 37b, exhaust outlet 37c, and measurement outlet 37d are provided in a portion of surface 37a that is surrounded by sealing member 38. Specifically, air inlet 37b, measurement outlet 37d, and exhaust outlet 37c are arranged in that order on a diagonal line of the portion of surface 37a that is surrounded by sealing member 38. Measurement outlet 37d is provided at substantially the same position as the center of the portion of surface 37a that is surrounded by sealing member 38. Air inlet 37b and exhaust outlet 37c are provided at positions that are substantially point-symmetric with respect to the center of the portion of surface 37a that is surrounded by sealing member 38.

[0069] Returning to Figures 4 and 5, the description of the cleaning device 1 will continue. The lifting mechanism 4 is a mechanism that moves the door 3 (opening / closing mechanism 31 and closing body 32) in the up and down direction. The lifting mechanism 4 includes a guide member 41. The guide member 41 is a plate-shaped member that extends in the up and down directions and the left and right directions. The guide member 41 is provided at the front end of the mounting table 2 and extends upward from the top surface member 22. The length of the guide member 41 in the left and right direction is substantially the same as the length of the top surface member 22 in the left and right direction. The guide member 41 defines the movement path of the door 3. The guide member 41 is provided with a window 41a. The window 41a penetrates the guide member 41 in the front and back directions, exposing the opening / closing mechanism 31 or the closing body 32.

[0070] The lifting mechanism 4 further includes a driving device (not shown) that raises and lowers the door 3 along the guide member 41. For example, an electric, pneumatic, or hydraulic actuator is used as the driving device. The range of movement of the door 3 in the vertical direction is, for example, 400 mm. The lifting mechanism 4 raises and lowers the door 3, thereby switching the vertical position of the door 3 between a first position where the opening / closing mechanism 31 is exposed through the window 41 a and a second position where the blocking body 32 is exposed through the window 41 a. For example, after the opening / closing mechanism 31 unlocks the lid 103, the lifting mechanism 4 switches the vertical position of the door 3 from the first position to the second position. For example, after the internal space V is purified, the lifting mechanism 4 switches the vertical position of the door 3 from the second position to the first position.

[0071] The air supply device 5 is a device that supplies gas to the internal space V. The gas is, for example, CDA (Clean Dry Air). CDA is dry air that conforms to JIS B8392 and is a gas obtained by filtering out 99% or more of particles having a particle size of 0.01 μm or more contained in the dry air. For example, Class 1 dry air specified in JIS B8392 is used as the dry air. The gas supplied by the air supply device 5 may be an inert gas such as nitrogen gas or argon gas. Here, CDA is used from the viewpoints of improving safety and reducing costs.

[0072] As shown in FIG. 8 , the air supply device 5 is connected to the air supply opening 37b by an air supply pipe 12, and is connected to the air supply port 63 by an air supply pipe 15. For example, the air supply pipe 12 connected to the air supply opening 37b and the air supply pipe 15 connected to the air supply port 63 are connected to a main air supply pipe (not shown) that is connected to the air supply device 5. The air supply device 5 supplies gas to the internal space V via the air supply pipe 12 and the air supply opening 37b. The air supply device 5 may supply gas to the internal space V via the air supply pipe 15, the air supply port 63, and the air supply valve 155.

[0073] The air supply device 5 may supply gas via an air supply pipe 18. In this embodiment, the cleaning device 1 includes two air supply pipes 18. The two air supply pipes 18 are inserted into two through-holes (not shown) that penetrate the front surface of the mounting table 2 in the front-rear direction. These two through-holes are located opposite the surface 33a of the opening / closing mechanism 31 when the door 3 is in the second position. The two through-holes are located, for example, at two diagonally opposite corners of the surface 33a. The air supply pipes 18 are connected to a main air supply pipe (not shown) that is connected to the air supply device 5.

[0074] The air supply device 5 includes a fan 51 and a filter 52. The rotation speed of the fan 51 is adjusted by the control device 10, thereby adjusting the air supply flow rate of the air supply device 5. The filter 52 is a filter for removing particles. When the above-mentioned dry air passes through the filter 52, 99% or more of particles having a particle size of 0.01 μm or more are removed from the dry air, thereby obtaining CDA.

[0075] The exhaust device 6 is a device that exhausts gas from the internal space V. As shown in FIG. 8 , the exhaust device 6 is connected to the exhaust port 37c by an exhaust pipe 13 and to the exhaust port 64 by an exhaust pipe 16. For example, the exhaust pipe 13 connected to the exhaust port 37c and the exhaust pipe 16 connected to the exhaust port 64 are connected to a main exhaust pipe (not shown) that is connected to the exhaust device 6. The exhaust device 6 exhausts gas from the internal space V through the exhaust port 37c and the exhaust pipe 13. The exhaust device 6 may also exhaust gas from the internal space V through an exhaust valve 156, the exhaust port 64, and the exhaust pipe 16. The exhaust device 6 includes, for example, a fan. The exhaust flow rate of the exhaust device 6 is adjusted by the control device 10.

[0076] The air supply device 17 is a device for maintaining a clean environment inside the housing 11. The air supply device 17 is provided at an upper part inside the housing 11. The air supply device 17 is, for example, an FFU (Fan Filter Unit) including a fan and a filter. The rotation speed of the fan is adjusted by the control device 10, thereby adjusting the air supply flow rate of the air supply device 17. The filter removes foreign matter such as particles. When the air supply device 17 supplies air to the internal space of the housing 11, the air pressure in the internal space of the housing 11 increases, and the internal space of the housing 11 is maintained in a positive pressure state.

[0077] The barometer 7 is an instrument that measures the air pressure in the internal space V. The barometer 7 is airtightly connected to the measurement port 37d by piping 14. The barometer 7 outputs the measured air pressure value to the control device 10 at predetermined time intervals. The particle counter 8 is an instrument that counts particles contained in the gas (exhaust gas) exhausted from the internal space V. The particle counter 8 is connected to a main exhaust pipe (not shown) that is connected to the exhaust device 6. The particle counter 8 outputs the particle count value to the control device 10 at predetermined time intervals.

[0078] The guide monitor 9 is a device (control panel) that functions as an input / output device. The guide monitor 9 is provided on the side of the housing 11. The guide monitor 9 displays various information using a GUI (Graphical User Interface) and accepts operations from the user (operator). The guide monitor 9 displays information received from the control device 10. When the guide monitor 9 accepts an operation from the user, it outputs information indicating the operation content to the control device 10.

[0079] The control device 10 is a device (controller) that performs overall control of the cleaning device 1. The control device 10 is configured as a computer including, for example, a processor such as a CPU (Central Processing Unit), memories such as RAM (Random Access Memory) and ROM (Read Only Memory), and a communication interface such as a network card. The control device 10 controls, for example, the moving mechanism 23, the clamping mechanism 24, the opening / closing mechanism 31, the lifting mechanism 4, the air supply device 5, the exhaust device 6, the barometer 7, the particle counter 8, the guide monitor 9, and the air supply device 17.

[0080] Next, a cleaning method performed by the cleaning device 1 will be described with reference to Figs. 9 to 12(e). Fig. 9 is a flowchart showing the cleaning method performed by the cleaning device shown in Fig. 4. Fig. 10 is a flowchart explaining in detail the lid removal process of Fig. 9. Fig. 11 is a flowchart explaining in detail the lid attachment process of Fig. 9. Fig. 12(a) is a schematic diagram for explaining the process of preparing a panel storage container. Figs. 12(b) and 12(c) are schematic diagrams for explaining the lid removal process. Figs. 12(d) and 12(e) are schematic diagrams for explaining the process of closing the opening with a closing body.

[0081] The series of processes shown in FIG. 9 is started, for example, when a user performs a cleaning start operation on the guide monitor 9. The user may also set an end condition on the guide monitor 9. The user may set, for example, a target count value of the particle counter 8 as the end condition. The user may also set the intake air flow rate of the air intake device 5 and the exhaust flow rate of the exhaust device 6 on the guide monitor 9. At the start of the cleaning method, the position of the door 3 in the vertical direction is set to the first position. The control device 10 controls the air supply device 17 to continue to maintain a positive pressure state in the housing 11.

[0082] First, the control device 10 prepares the panel storage container 101 to be cleaned (step S1). In step S1, the control device 10 controls a transfer device (not shown) to place the panel storage container 101 on the stage 26. At this time, as shown in FIG. 12(a), the panel storage container 101 is placed on the stage 26 so that the lid 103 faces the window 41a in the front-rear direction and the positioning pins 62 of the stage 26 are accommodated in the V-shaped grooves of the corresponding positioning members 154. As a result, the air inlet ports 63 of the stage 26 are connected to the corresponding air inlet valves 155, the exhaust ports 64 of the stage 26 are connected to the corresponding exhaust valves 156, and the clamp members 24a are inserted into the corresponding through-holes 152h.

[0083] In this state, the control device 10 controls the clamp mechanism 24 to fix the panel storage container 101 to the stage 26. Specifically, the clamp mechanism 24 fixes the panel storage container 101 to the stage 26 by hooking the tip of the clamp member 24a onto the upper surface of the mounting plate 152.

[0084] Next, the control device 10 performs a process for removing the lid body 103 (step S2). In step S2, as shown in FIG. 12(b), the control device 10 controls the moving mechanism 23 to move the stage 26 forward until the flange 125 is inserted into the frame 34 of the opening / closing mechanism 31 through the window 41a and the pad 132a of the cover member 132 abuts against the suction pad 35 of the opening / closing mechanism 31 (step S21). Then, the control device 10 controls the opening / closing mechanism 31 to adsorb the lid body 103 onto the suction pad 35 of the opening / closing mechanism 31 (step S22). Specifically, the suction pad 35 adsorbs the pad 132a of the cover member 132.

[0085] In this state, the control device 10 controls the opening / closing mechanism 31 to insert the key 36a of the latch operating mechanism 36 into the keyhole 132h and turn the key 36a to unlock the lid 103 (step S23). Then, as shown in FIG. 12(c), the control device 10 controls the moving mechanism 23 to move the stage 26 backward until the flange 125 is pulled out from the frame 34 (step S24). At this time, the suction pad 35 is adsorbing the lid 103, so that the lid 103 is detached from the container body 102.

[0086] Next, the control device 10 closes the opening 102a of the container body 102 with the closing body 32 (step S3). In step S3, as shown in FIG. 12(d), first, the control device 10 controls the lifting mechanism 4 to lower the door 3 and switch the vertical position of the door 3 from the first position to the second position. Then, as shown in FIG. 12(e), the control device 10 controls the moving mechanism 23 to move the stage 26 forward until the front end of the flange 125 abuts against the sealing member 38 of the closing body 32. As a result, the sealing member 38 is pressed against the entire periphery of the front end of the flange 125, and the opening 102a of the container body 102 is airtightly closed by the closing body 32.

[0087] Next, the control device 10 purifies the internal space V of the container body 102 (step S4). In step S4, the control device 10 controls the air supply device 5 to obtain a preset air intake flow rate and controls the exhaust device 6 to obtain a preset exhaust flow rate. The control device 10 then causes the barometer 7 and the particle counter 8 to start measurement. As a result, the gas (CDA) is supplied from the air supply device 5 to the internal space V via the air supply pipe 12 and the air supply port 37b, and the gas (CDA) is supplied from the air supply device 5 to the internal space V via the air supply pipe 15, the air supply port 63, and the air supply valve 155. Particles adhering to components in the internal space V are removed by the gas supplied from the air supply device 5. The removed particles are then exhausted from the internal space V together with the gas via the exhaust port 37c and the exhaust pipe 13, or via the exhaust valve 156, the exhaust port 64, and the exhaust pipe 16. At this time, the gas supply device 5 blows gas onto the back surface of the lid body 103 (the surface facing the internal space V when the lid body 103 is attached to the container body 102) via the gas supply pipe 18. This blows off particles adhering to the back surface of the lid body 103.

[0088] In this example, the supply air flow rate is set to a value greater than the exhaust air flow rate, so the air pressure in the internal space V becomes a positive pressure greater than the air pressure outside the container body 102. This reduces the possibility that particles will enter the internal space V from outside the container body 102.

[0089] Next, the control device 10 determines whether or not a termination condition is satisfied (step S5). Here, the termination condition is exemplified as the count value of the particle counter 8 falling below a preset target value. If the count value output from the particle counter 8 is greater than the target value, the control device 10 determines that the termination condition is not satisfied (step S5: NO), and repeats steps S4 and S5 until the termination condition is satisfied.

[0090] On the other hand, if the count value output from the particle counter 8 is smaller than the target value, the control device 10 determines that the termination condition is satisfied (step S5: YES) and terminates the purification (step S6). In step S6, the control device 10 stops the operations of the air supply device 5, the exhaust device 6, the barometer 7, and the particle counter 8.

[0091] Next, the control device 10 performs an attachment process for the lid body 103 (step S7). In step S7, as shown in Fig. 11, the control device 10 controls the movement mechanism 23 to move the stage 26 rearward so that the front end of the flange 125 is positioned rearward of the window 41a (step S71). Then, the control device 10 controls the lifting mechanism 4 to lift the door 3, thereby switching the vertical position of the door 3 from the second position to the first position (step S72).

[0092] Here, the internal space of the housing 11 is maintained at a positive pressure, so even if the internal space of the housing 11 temporarily communicates with the external space when the door 3 is raised, the possibility of particles entering the internal space from the external space of the housing 11 is reduced.

[0093] Then, the control device 10 controls the moving mechanism 23 to move the stage 26 forward until the flange 125 is inserted into the frame 34 of the opening / closing mechanism 31 through the window 41a and the lid body 103 held by the suction pads 35 of the opening / closing mechanism 31 is attached to the flange 125 (step S73). In this state, the control device 10 controls the opening / closing mechanism 31 to insert the key 36a of the latch operation mechanism 36 into the keyhole 132h and turn the key 36a to lock the lid body 103 (step S74). Then, the control device 10 controls the opening / closing mechanism 31 to release the suction by the suction pads 35 of the opening / closing mechanism 31 and release the lid body 103 (step S75).

[0094] Then, the control device 10 controls the moving mechanism 23 to move the stage 26 backward until the flange 125 is pulled out from the frame 34 (step S76). In this way, the lid 103 is attached to the container body 102.

[0095] Next, the control device 10 carries out the cleaned panel storage container 101 (step S8). In step S8, the control device 10 controls the clamp mechanism 24 to release the fixation of the panel storage container 101, and controls the transport device (not shown) to carry out the panel storage container 101 from the stage 26.

[0096] This completes the series of steps in the cleaning method.

[0097] As described above, in the cleaning system 100, the cleaning device 1, and the cleaning method performed by the cleaning device 1, the opening 102a of the container body 102 with the lid 103 removed is blocked by the blocking body 32 having the air inlet 37b and the exhaust port 37c, and gas is supplied by the air supply device 5 to the internal space V of the container body 102 through the air inlet 37b. As a result, particles in the internal space V are discharged together with the gas from the exhaust port 37c. In this way, by using the cleaning blocking body 32 instead of the lid 103, the internal space V of the panel storage container 101 is cleaned, so there is no need to provide the panel storage container 101 with an additional structure for cleaning. In other words, the cleaning system 100, the cleaning device 1, and the cleaning method performed by the cleaning device 1 make it possible to clean the internal space V of the panel storage container 101 without providing the panel storage container 101 with an additional structure for cleaning.

[0098] It is conceivable to purify the internal space V using an air inlet valve 155 and an exhaust valve 156 provided on the bottom plate 122. However, the positions of the air inlet valve 155 and the exhaust valve 156 are regulated by the SEMI standard, and therefore the air inlet valve 155 and the exhaust valve 156 cannot be freely positioned. Because the air inlet valve 155 and the exhaust valve 156 are provided on the bottom plate 122, even if gas is supplied to the internal space V from the air inlet valve 155, the gas may not be distributed throughout the internal space V. In contrast, the cleaning system 100, the cleaning device 1, and the cleaning method performed by the cleaning device 1 use a blocking body 32 instead of the cover body 103, and therefore the number and arrangement of the air inlet ports 37b and the exhaust ports 37c can be freely designed. This makes it possible to improve the cleaning efficiency of the internal space V.

[0099] The exhaust device 6 exhausts gas from the internal space V through the exhaust port 37c, so that the gas is more easily exhausted from the exhaust port 37c compared to a configuration in which the exhaust device 6 is not connected to the exhaust port 37c. Therefore, the cleaning efficiency of the internal space V can be improved.

[0100] Since the supply air flow rate is set to a value greater than the exhaust air flow rate, the air pressure in the internal space V becomes positive. This reduces the possibility that particles will enter the internal space V from the outside of the container body 102. This makes it possible to improve the cleaning efficiency of the internal space V.

[0101] The moving mechanism 23 includes a stage 26 that moves the container body 102 placed on the stage 26 in the front-rear direction. When the door 3 is set to the second position in the vertical direction, the blocking body 32 is located at the front end of the mounting base 2. With this configuration, the stage 26 can move the container body 102 forward toward the blocking body 32. This reduces the time required to close the opening 102a with the blocking body 32, compared to when a user manually closes the opening 102a, and reduces the possibility of particles entering the internal space V from outside the container body 102. This improves the cleaning efficiency of the internal space V. Furthermore, with the above configuration, it is not necessary to move the blocking body 32 in the front-rear direction, which reduces the change in the distance between the air supply device 5 and the blocking body 32 in the front-rear direction. This reduces the length of the air supply pipe (air supply pipe 12) for supplying gas that is provided between the air supply device 5 and the blocking body 32. Similarly, this reduces the change in the distance between the exhaust device 6 and the blocking body 32 in the front-rear direction. Therefore, the length of the exhaust pipe (exhaust pipe 13) for discharging gas, which is provided between the exhaust device 6 and the blocking body 32, can be shortened.

[0102] In the cleaning device 1, the container body 102 is fixed to the stage 26 by the clamp mechanism 24. Therefore, even if the container body 102 is pressed against the closing body 32, it will not shift backward, and the container body 102 can be firmly pressed against the closing body 32, allowing the closing body 32 to more reliably close the opening 102a. This reduces the possibility of particles entering the internal space V from outside the container body 102, making it possible to improve the cleaning efficiency of the internal space V.

[0103] The opening / closing mechanism 31 has a suction pad 35 that suctions the lid 103, and operates to lock and unlock the lid 103. With this configuration, the lid 103 can be locked and unlocked while it is held by the suction pad 35. Therefore, compared to when the lid 103 is not held by the suction pad 35, the time required to lock and unlock the lid 103 can be shortened, and the possibility of particles entering the internal space V from outside the container body 102 can be reduced. Therefore, the cleaning efficiency of the internal space V can be improved.

[0104] The lifting mechanism 4 lifts and lowers the door 3. That is, the lifting mechanism 4 moves the opening / closing mechanism 31 and the blocking body 32 in the vertical direction. With this configuration, the lifting mechanism 4 can move the opening / closing mechanism 31 and the blocking body 32 integrally by moving the door 3. Therefore, simply by moving the door 3 in the vertical direction, it is possible to switch between a state for locking and unlocking the lid body 103 and a state for cleaning the internal space V.

[0105] The gas supply device 5 supplies gas to the internal space V further via the gas supply valve 155 provided on the bottom plate 122 of the container body 102. With this configuration, gas is supplied to the internal space V not only through the gas supply port 37b of the blocking body 32 but also via the gas supply valve 155, making it easier for the gas to spread throughout the internal space V. This makes it possible to improve the cleaning efficiency of the internal space V.

[0106] The air supply device 5 has a filter 52 for removing particles, and supplies gas that has passed through the filter 52. With this configuration, the amount of particles contained in the gas supplied by the air supply device 5 can be reduced, and therefore fewer particles enter the internal space V. Therefore, it is possible to improve the cleaning efficiency of the internal space V.

[0107] The exhaust device 6 further exhausts gas from the internal space V via an exhaust valve 156 provided on the bottom plate 122 of the container body 102. According to this configuration, gas is exhausted from the internal space V not only through the exhaust port 37c of the blocking body 32 but also via the exhaust valve 156. This improves exhaust efficiency.

[0108] The particle counter 8 counts particles contained in the gas discharged from the internal space V. It can be said that the amount of particles contained in the gas discharged from the internal space V is correlated with the amount of particles contained in the internal space V. Therefore, the count value of the particle counter 8 can be used to estimate the cleanliness of the internal space V. Therefore, when the count value falls below a target value, it can be determined that the internal space V has been sufficiently cleaned, and the cleaning can be terminated.

[0109] For example, if the exhaust device 6 is connected to the exhaust port 37c, the pressure of the gas discharged from the exhaust port 37c will be increased by the exhaust device 6, and this pressure may deviate from the atmospheric pressure in the internal space V. In the purifying device 1, the barometer 7 is connected to the measurement port 37d. With this configuration, the barometer 7 is connected to the measurement port 37d different from the exhaust port 37c, so that it is possible to reduce an error in measuring the atmospheric pressure caused by the exhaust device 6. For example, when the guide monitor 9 displays the measurement value of the barometer 7, the user can more accurately grasp the atmospheric pressure in the internal space V.

[0110] The cleaning device, cleaning system, and cleaning method according to the present disclosure are not limited to the above-described embodiments.

[0111] The panel container 101 may be a FOSB (Front Opening Shipping Box) used to transport panels (substrates) between factories.

[0112] The configuration of the moving mechanism 23 is not limited as long as it can relatively move the container body 102 and the closing body 32 so that the closing body 32 closes the opening 102a when the lid 103 is removed. For example, instead of a configuration in which the moving mechanism 23 moves the stage 26 in the front-rear direction, the moving mechanism 23 may be a mechanism that moves the door 3 in the front-rear direction. Even in this configuration, the opening 102a is closed by the closing body 32 by the moving mechanism 23. Therefore, compared to a case in which a user closes the opening 102a with the closing body 32, the operation time can be shortened and the possibility of particles entering the internal space V from outside the container body 102 is reduced. Therefore, the cleaning efficiency of the internal space V can be improved.

[0113] The opening / closing mechanism 31 and the blocking body 32 may be arranged in the left-right direction. In this case, the cleaning device 1 includes, instead of the lifting mechanism 4, a movement mechanism (second movement mechanism) that moves the door 3 in the left-right direction.

[0114] The opening / closing mechanism 31 and the blocking body 32 do not have to be integrated. In this case, the cleaning device 1 includes, instead of the lifting mechanism 4, a mechanism for switching the opening / closing mechanism 31 and the blocking body 32.

[0115] Instead of the opening / closing mechanism 31, the user may open and close the lid 103. In this case, the door 3 does not need to include the opening / closing mechanism 31. The door 3 is fixed in a position where the blocking body 32 is exposed through the window 41a, and the cleaning device 1 does not need to include the lifting mechanism 4. The mounting table 2 does not need to include the clamp mechanism 24.

[0116] The air supply device 5 does not need to include the filter 52, and may supply CDA generated outside the air supply device 5. The air supply device 5 does not need to supply gas to the internal space V through the air supply valve 155, as long as the gas is supplied to the internal space V through the air supply port 37b. In this case, the purification device 1 does not need to include the air supply pipe 15.

[0117] As long as the exhaust device 6 exhausts gas from the internal space V through the exhaust port 37c, it is not necessary for the exhaust device 6 to exhaust gas from the internal space V through the exhaust valve 156. In this case, the cleaning device 1 does not need to include the exhaust pipe 16.

[0118] Each of the air intake pipes 12 and 15 may be provided with an electromagnetic valve (not shown) that opens and closes the gas flow path. In this case, the control device 10 can select the path through which the gas is supplied by opening one or both of the air intake pipes 12 and 15. Each of the exhaust pipes 13 and 16 may be provided with an electromagnetic valve (not shown) that opens and closes the gas flow path. In this case, the control device 10 can select the path through which the gas is discharged by opening one or both of the exhaust pipes 13 and 16.

[0119] When gas is supplied to the internal space V by the gas supply device 5, the air pressure in the internal space V becomes higher than the air pressure outside the container body 102, and the gas can be naturally discharged from the exhaust port 37c. Therefore, the cleaning device 1 does not need to include the exhaust device 6.

[0120] The barometer 7 may be connected to a main exhaust pipe (not shown) that is connected to the exhaust device 6, and the blocking body 32 may not have the measurement port 37d. In this case, the air pressure in the internal space V can be calculated based on the measurement value of the barometer 7 and the exhaust flow rate of the exhaust device 6.

[0121] The cleaning device 1 does not need to include a barometer 7. Even in this case, the air pressure in the internal space V can be calculated from the air supply flow rate of the air supply device 5, the air exhaust flow rate of the exhaust device 6, the time elapsed since the air supply device 5 started operating, and the time elapsed since the exhaust device 6 started operating.

[0122] The cleaning device 1 does not necessarily have to include the particle counter 8. In this case, for example, the end condition in step S5 may be that the time elapsed since the start of cleaning reaches a preset time.

[0123] The arrangement of the guide monitor 9 is not limited to the side surface of the housing 11, and the guide monitor 9 may be provided, for example, outside the clean room.

[0124] The control device 10 may control at least one of the air supply device 5 and the exhaust device 6 so that the air pressure in the internal space V is maintained at a positive pressure. When the air pressure in the internal space V is a positive pressure, the possibility of particles entering the internal space V from the outside of the container body 102 is reduced. Therefore, the cleaning efficiency of the internal space V can be improved.

[0125] Each of the processes shown in FIGS. 9 to 11 may be performed in response to the user sequentially inputting an operation to start the process.

[0126] At least one of steps S1, S2, S3, S7 and S8 may be performed by the user instead of being performed by the cleaning device 1.

[0127] (Addendum) [Article 1] A cleaning device for cleaning the internal space of a storage container, the cleaning device comprising: a container body having an opening and an internal space for accommodating a panel; and a lid body for closing the opening, a closing body that closes the opening when the lid body is removed, the closing body having an air inlet through which gas is introduced into the internal space and an exhaust port through which gas is exhausted from the internal space; an air supply device that supplies gas to the internal space through the air supply port; A cleaning device comprising:

[0128] [Clause 2] 10. The cleaning apparatus of claim 1, further comprising an exhaust device for exhausting gas from the interior space through the exhaust port.

[0129] [Article 3] The cleaning device according to clause 2, further comprising a control device that controls the air supply device or the exhaust device so that the air pressure in the internal space is maintained at a positive pressure.

[0130] [Article 4] The cleaning device described in any one of clauses 1 to 3 further comprises a first moving mechanism that moves the container body and the closure relative to each other so that the closure closes the opening when the lid is removed.

[0131] [Article 5] a mounting table including a stage on which the container body is placed and which moves the container body in a first direction; the blocking member is provided on an edge of the mounting table in the first direction, 5. The cleaning apparatus of claim 4, wherein the first moving mechanism includes the stage.

[0132] [Article 6] 6. The cleaning apparatus according to clause 5, wherein the stage further includes a clamping mechanism for fixing the container body to the stage.

[0133] [Article 7] The cleaning device according to clause 5 or 6, further comprising an opening / closing mechanism having a suction pad that adsorbs the lid and that operates to lock and unlock the lid.

[0134] [Article 8] a second moving mechanism that relatively moves the closing body, the opening / closing mechanism, and the container body in a second direction that intersects with the first direction, 8. The cleaning device of claim 7, wherein the closure and the opening / closing mechanism are aligned in the second direction.

[0135] [Article 9] The cleaning device according to any one of clauses 1 to 8, wherein the gas supply device supplies gas to the internal space further via an air supply valve provided on a bottom plate of the container body.

[0136] [Article 10] The cleaning device according to any one of clauses 1 to 9, wherein the air supply device has a filter for removing particles.

[0137] [Article 11] The cleaning device according to any one of clauses 1 to 10, further comprising a particle counter that counts particles contained in the gas discharged from the internal space.

[0138] [Article 12] Further provided is a barometer for measuring the air pressure in the internal space, The cleaning device according to any one of clauses 1 to 11, wherein the obstruction further has a measurement port to which the barometer is connected.

[0139] [Article 13] A cleaning device according to any one of clauses 1 to 12; The storage container; A cleaning system comprising:

[0140] [Article 14] A cleaning method for cleaning an internal space of a storage container including a container body having an opening and an internal space for accommodating a panel, and a lid body for closing the opening, comprising: a closing body that closes the opening when the lid body is removed, the closing body having an air inlet through which gas is introduced into the internal space and an exhaust port through which gas is exhausted from the internal space, the closing body closing the opening when the lid body is removed; supplying gas to the internal space through the air inlet of the blocking body; A cleaning method comprising: [Explanation of symbols]

[0141] 1...purification device, 2...mounting platform, 4...lifting mechanism (second moving mechanism), 5...air supply device, 6...exhaust device, 7...barometer, 8...particle counter, 10...control device, 23...moving mechanism (first moving mechanism), 24...clamping mechanism, 26...stage, 31...opening / closing mechanism, 32...obstructing body, 35...suction pad, 37b...air supply port, 37c...exhaust port, 37d...measurement port, 52...filter, 100...purification system, 101...panel storage container (storage container), 102...container body, 102a...opening, 103...lid body, 122...bottom plate, 155...air supply valve, V...internal space.

Claims

1. A cleaning device for cleaning the internal space of a storage container, the cleaning device comprising: a container body having an opening and an internal space for accommodating a panel; and a lid body for closing the opening, a closing body that closes the opening when the lid body is removed, the closing body having an air inlet through which gas is introduced into the internal space and an exhaust port through which gas is exhausted from the internal space; an air supply device that supplies gas to the internal space through the air supply port; A cleaning device comprising:

2. The cleaning device of claim 1 , further comprising an exhaust device that exhausts gas from the interior space through the exhaust port.

3. The cleaning device according to claim 2 , further comprising a control device that controls the air supply device or the exhaust device so that the air pressure in the internal space is maintained at a positive pressure.

4. A cleaning device as described in any one of claims 1 to 3, further comprising a first moving mechanism that moves the container body and the closure body relative to each other so that the closure body blocks the opening when the lid body is removed.

5. a mounting table including a stage on which the container body is placed and which moves the container body in a first direction; the blocking member is provided on an edge of the mounting table in the first direction, The cleaning device of claim 4 , wherein the first moving mechanism includes the stage.

6. The cleaning apparatus according to claim 5 , wherein the stage further includes a clamping mechanism for fixing the container body to the stage.

7. The cleaning device according to claim 5 , further comprising an opening / closing mechanism having a suction pad that adsorbs the lid and that operates to lock and unlock the lid.

8. a second moving mechanism that relatively moves the closing body, the opening / closing mechanism, and the container body in a second direction that intersects with the first direction, The cleaning device of claim 7 , wherein the closing body and the opening / closing mechanism are aligned in the second direction.

9. 4. The cleaning device according to claim 1, wherein the gas supply device supplies gas to the internal space via an air supply valve provided on a bottom plate of the container body.

10. 4. The cleaning device according to claim 1, wherein the air supply device has a filter for removing particles.

11. 4. The cleaning device according to claim 1, further comprising a particle counter that counts particles contained in the gas discharged from the internal space.

12. Further provided is a barometer for measuring the air pressure in the internal space, The cleaning device according to any one of claims 1 to 3, wherein the obstruction further has a measurement port to which the barometer is connected.

13. The cleaning device according to any one of claims 1 to 3, The storage container; A cleaning system comprising:

14. A cleaning method for cleaning an internal space of a storage container including a container body having an opening and an internal space for accommodating a panel, and a lid body for closing the opening, comprising: a closing body that closes the opening when the lid body is removed, the closing body having an air inlet through which gas is introduced into the internal space and an exhaust port through which gas is exhausted from the internal space, the closing body closing the opening when the lid body is removed; supplying gas to the internal space through the air inlet of the blocking body; A cleaning method comprising:

Images