Processing apparatus, dust collection apparatus, and dust collection method

Abstract

To enhance the dust collection performance (collection efficiency) and improve economic efficiency.SOLUTION: A processing apparatus comprises: a charged mist ejection unit 18 that ejects a charged mist, obtained by mixing a liquid and a gas and charging the mixture toward a workpiece 8 during processing; and a dust collection unit 31 that collects oil mist generated during processing. The charged mist ejection unit 18 and the dust collection unit 31 are disposed in a processing chamber. The charged mist ejection unit 18 includes: an electrostatic nozzle 20 that is grounded and configured to eject a mixture of liquid and gas; and an induction electrode 27 that is applied with high voltage and disposed so as to be spaced apart from the vicinity of a tip of the electrostatic nozzle 20. The dust collection unit 31 includes a dust collection electrode plate 35 that is grounded.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a processing device, a dust collecting device, and a dust collecting method that can collect oil mist (oil smoke) generated in a processing chamber during processing. [Background technology]

[0002] In machining centers, numerically controlled machine tools, and other processing equipment, a cover is generally provided to completely surround the equipment in order to prevent the outflow of oil mist (oil smoke) generated when processing a workpiece (workpiece), ensure safety during processing, etc. In addition, in processing equipment, a coolant liquid is supplied to the processing area as a processing oil when processing the workpiece (workpiece) for purposes such as lubrication and cooling of the workpiece (workpiece) and tools, heat dissipation, and washing away processing debris (cuttings).

[0003] This coolant liquid is turned into mist by the processing heat generated during processing, and floats and fills the processing space. As a means of capturing (collecting) the oil mist floating and filling the processing space, machine tools have been proposed that are equipped with a filter-type purification unit within the processing device, as in Patent Document 1, for example. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2021-178368 Summary of the Invention [Problem to be solved by the invention]

[0005] However, the filter-type purification unit described in Patent Document 1 has the problem that it has lower collection performance than the electrostatic precipitator system, and that as operation time passes, the filter becomes clogged, which reduces collection performance and requires filter replacement.

[0006] The present invention has been made to solve the above-mentioned problems, and aims to provide a processing device, a dust collection device, and a dust collection method that are less likely to clog, have improved collection performance (dust collection efficiency), and are economical by reducing maintenance man-hours. [Means for solving the problem]

[0007] In order to achieve the above-mentioned object, a first machining apparatus of the present invention is a machining apparatus capable of collecting oil mist generated in a machining chamber when a workpiece is machined, and includes: a charged mist ejection unit that ejects charged mist formed by mixing liquid and gas during machining onto the workpiece; and a dust collection unit that collects the oil mist generated during machining, wherein the charged mist ejection unit and the dust collection unit are disposed within the machining chamber, and the charged mist ejection unit includes a grounded electrostatic nozzle that ejects a mixture of liquid and gas, and an induction electrode to which a high voltage is applied and that is disposed spaced apart near the tip of the electrostatic nozzle, and the dust collection unit includes a grounded dust collection electrode plate.

[0008] According to the first machining apparatus of the present invention, the charged mist jetting section and dust collecting section are housed within the machining chamber, so that the mist generated during machining can be charged and then efficiently collected by the grounded dust collecting electrode plate, which is less likely to clog (high breathability) and has higher collection performance (dust collection efficiency) than other dust collection methods (e.g., filter methods). Furthermore, the charged mist jetting section does not use corona discharge but generates the charged mist by forming only an electric field, and does not consume current, resulting in power savings and excellent economy.

[0009] A second processing apparatus of the present invention is the above-mentioned first processing apparatus, wherein the liquid is preferably a coolant liquid used during processing.

[0010] According to the second machining device of the present invention, the coolant liquid used during machining is charged, and no other liquid is used, so that it is possible to prevent adverse effects on machining.

[0011] A third processing apparatus of the present invention is the first processing apparatus described above, wherein the dust collection section is provided with a high-voltage electrode plate to which a high voltage is applied, and it is preferable that the dust collection electrode plate and the high-voltage electrode plate are arranged alternately at equal intervals.

[0012] According to the third processing device of the present invention, the oil mist that has been charged by the repulsive action of the high-voltage electrode plate is more likely to be collected by the dust-collecting electrode plate, so that the collection performance (dust collection efficiency) can be further improved.

[0013] A fourth processing apparatus of the present invention is preferably the third processing apparatus described above, wherein the high-voltage electrode plate and the dust collecting electrode plate are arranged side by side in a vertical position, and a collection section is provided below the dust collecting section for collecting the captured mist.

[0014] According to the fourth processing device of the present invention, the oil mist collected on the dust collecting electrode plate falls by gravity into the collection section provided below the dust collecting section, making it easy to collect the oil mist.

[0015] A fifth processing apparatus of the present invention is the first processing apparatus described above, wherein the workpiece is conductive, fixed to the workpiece fixing portion and electrically connected thereto, and the workpiece fixing portion is preferably grounded.

[0016] According to the fifth processing device of the present invention, the workpiece is electrically connected to the workpiece fixing portion and is grounded, and the charged mist easily adheres to the workpiece, so that the cooling and lubricating effects on the workpiece can be enhanced with a small amount of spray.

[0017] A sixth processing apparatus of the present invention is the third processing apparatus described above, wherein the high voltage applied to the induction electrode and the high voltage applied to the high-voltage electrode plate of the dust collecting section are preferably high voltages of opposite polarity.

[0018] According to the sixth processing apparatus of the present invention, when a negative high voltage is applied to the induction electrode, a positively charged mist is generated from the electrostatic nozzle, and the positively charged mist can be efficiently collected on the dust collecting electrode plate by a repulsive action, thereby improving the collection efficiency (dust collection efficiency).

[0019] A seventh processing apparatus of the present invention is the sixth processing apparatus described above, wherein the high voltage applied to the induction electrode and the high voltage applied to the high-voltage electrode plate of the dust collecting unit are preferably the same high voltage value applied from a common high-voltage power supply unit.

[0020] According to the seventh processing apparatus of the present invention, the same high voltage generated from a common high voltage power supply is supplied to the charged mist jetting portion and the high voltage electrode plate, which is highly economical.

[0021] An eighth machining apparatus of the present invention is preferably the third machining apparatus described above, further comprising a control device that controls the amount of charged mist sprayed from the charged mist spraying unit, the high voltage applied to the induction electrode of the charged mist spraying unit, and the high voltage applied to the high-voltage electrode plate of the dust collecting unit, depending on the properties of the liquid supplied to the electrostatic nozzle of the charged mist spraying unit and / or the machining conditions of the workpiece.

[0022] According to the eighth processing device of the present invention, an appropriate amount of charged mist is ejected and a high voltage is applied depending on the properties of the liquid supplied to the charged mist ejection section and / or the processing conditions of the workpiece, thereby achieving stable mist charging performance and mist collection performance (dust collection performance).

[0023] A ninth processing apparatus of the present invention is the eighth processing apparatus described above, wherein the control device preferably sets the high voltage to be applied to the high-voltage electrode plate of the dust collecting section lower when water-soluble oil is supplied to the charged mist spraying section than when oily oil is supplied.

[0024] According to a ninth aspect of the processing apparatus of the present invention, when water-soluble oil is used as the liquid, a water-soluble mist is generated from the electrostatic mist ejection portion. When the water-soluble mist adheres to the insulator provided in the dust collection unit, the insulation resistance of the electrode decreases, making creepage leakage more likely when a high applied voltage is used. Therefore, when water-soluble oil is used, the voltage applied to the dust collection unit can be set lower than when oil-based oil is used, making it less likely for creepage leakage to occur in the insulator and allowing the dust collection unit to operate stably.

[0025] A tenth processing apparatus of the present invention is the first processing apparatus described above, further comprising a partition plate that divides the inside of the processing chamber into a processing area where the charged mist ejection unit is located and a non-processing area where the dust collection unit is located, and the partition plate is disposed in a vertical position along the dust collection unit and is grounded, and the dust collection unit preferably comprises an insulator that supports a high-voltage electrode plate to which a high voltage is applied, and an oil mist collection unit below the partition plate.

[0026] According to the tenth processing apparatus of the present invention, the insulators provided in the dust collecting section prevent the oil mist from coming into contact with the partition plate, preventing short circuits, allowing the dust collecting section to operate stably. Furthermore, since the partition plate is grounded, it also functions as a dust collecting plate to capture the oil mist, and the captured oil mist can be dropped into the recovery section below.

[0027] The 11th processing apparatus of the present invention is the first processing apparatus described above, which is provided with an exhaust port for discharging air from the processing chamber to the outside, and it is preferable that the exhaust port is provided with an opening / closing means for switching between discharging air from the processing chamber to the outside or returning it to the processing chamber.

[0028] According to the eleventh processing apparatus of the present invention, when the charged mist is sprayed from the charged mist spraying part, compressed air is supplied into the processing chamber together with the mist, so that the pressure inside the processing chamber becomes positive. Therefore, by opening the opening / closing means (damper) and switching to exhaust the air inside the processing chamber to the outside, the pressure inside the processing chamber can be properly managed.

[0029] A twelfth processing apparatus of the present invention is the first processing apparatus described above, and is provided with a cleaning spray section that sprays liquid toward the dust collecting section, and it is preferable that the liquid used is the same as the liquid supplied to the charged mist spray section.

[0030] According to the twelfth processing apparatus of the present invention, the liquid for cleaning the dust collecting section is the same as the liquid used during processing, thereby improving economy.

[0031] A thirteenth processing apparatus of the present invention is the above-described first processing apparatus, further comprising: a cleaning jetting section which jets liquid from above the dust collecting section toward the dust collecting section; a blower which generates an air current from below to above within the dust collecting section during dust collection; and a collection section which is provided below the dust collecting section and collects oil mist collected by the dust collecting section, and it is preferable that the dust collecting section, the cleaning jetting section, and the blower are arranged in this order from the downstream side in the direction of air flow.

[0032] According to the thirteenth processing apparatus of the present invention, when cleaning the dust collecting section, the liquid is sprayed downward, so that the oil mist collected by the dust collecting section can be efficiently dropped into the recovery section. Moreover, since the air blower is disposed above the cleaning jetting section, the cleaning liquid does not get on the air blower and does not have a negative effect on the air blower.

[0033] A fourteenth processing apparatus of the present invention is the thirteenth processing apparatus described above, wherein after the spraying of liquid from the cleaning spray part onto the dust collector stops, the fan of the blower is preferably rotated in reverse to generate an air current flowing from above to below within the dust collecting part.

[0034] According to the 14th processing apparatus of the present invention, after cleaning the dust collection section, the blower device can be rotated in the reverse direction to blow air toward the dust collection section, thereby causing dirt and oil mist adhering to the surface of the dust collection section to fall off from the dust collection section, and restoring the collection performance (dust collection performance) of the dust collection section.

[0035] A fifteenth processing apparatus of the present invention is the first processing apparatus described above, wherein a collection section is provided below the dust collecting electrode plate of the dust collecting section to collect the oil mist captured by the dust collecting electrode plate, and the dust collecting electrode plate is preferably formed with a guide section that slopes downward toward the collection section so that the captured oil mist can be guided to the collection section.

[0036] According to the fifteenth processing apparatus of the present invention, the oil mist captured by the dust collecting electrode plate can be effectively collected in the collection section. Furthermore, even if the collection section is located on one side or both sides depending on the processing apparatus, the oil mist captured by the dust collecting electrode plate can be reliably collected in the collection section by changing the inclination direction of the guide section.

[0037] The dust collecting device of the present invention is a dust collecting device that collects oil mist generated during machining in a machining chamber, and is characterized by comprising: a dust collecting section that has a grounded dust collecting electrode plate and a high-voltage electrode plate to which a high voltage is applied, and that collects the mist generated during machining; a blower that generates an airflow within the dust collecting section when collecting the oil mist; a cleaning spray section that sprays liquid toward the dust collecting section after collecting the charged mist; and a control device that controls the high voltage applied to the high-voltage electrode plate of the dust collecting section depending on the properties of the liquid supplied during machining and / or the machining conditions of the workpiece being machined in the machining chamber.

[0038] According to the dust collecting device of the present invention, since the dust collecting unit is housed in the machining chamber, the mist generated during machining can be charged and then efficiently collected by the grounded dust collecting electrode plate, which makes it less likely to clog (high breathability) and improves collection performance (dust collection efficiency) compared to other dust collection methods (e.g., filter methods).In addition, dirt and oil mist adhering to the surface of the dust collecting unit can be removed from the dust collecting unit, thereby restoring the collection performance (dust collection performance) of the dust collecting unit.

[0039] The dust collection method of the present invention is a dust collection method for capturing oil mist generated during machining in a machining chamber, and is characterized by including: a dust collection process in which the high voltage applied to the high-voltage electrode plate of a dust collection unit arranged in the machining chamber is controlled in accordance with the properties of the liquid supplied to the charged mist jetting portion and / or the machining conditions of the workpiece being machined in the machining chamber, and the rotation speed of an air blower that generates an airflow within the dust collection unit, thereby capturing the mist generated during machining on the grounded dust collection electrode plate of the dust collection unit; a cleaning process in which, after the dust collection process, a cleaning liquid is sprayed from a cleaning jetting portion toward the dust collection unit; and a drying process in which, after the cleaning process, an airflow toward the dust collection unit is generated by the air blower.

[0040] According to the dust collection method of the present invention, since the dust collection unit is housed in the machining chamber, the mist generated during machining can be charged and then efficiently collected by the grounded dust collection electrode plate, which is less likely to clog (high breathability) and improves collection performance (dust collection efficiency) compared to other dust collection methods (e.g., filter methods).In addition, dirt and oil mist adhering to the surface of the dust collection unit electrode plate can be removed from the dust collection unit, thereby restoring the collection performance (dust collection performance) of the dust collection unit. [Effects of the Invention]

[0041] According to the present invention, it is possible to obtain various excellent effects, such as improving collection performance (dust collection efficiency) and increasing economy by reducing the number of maintenance steps. [Brief explanation of the drawings]

[0042] [Figure 1] 1 is an overall schematic view showing a processing apparatus including a dust collecting device according to an embodiment of the present invention; [Figure 2] 1 is an overall view showing a processing apparatus equipped with a dust collecting device according to an embodiment of the present invention; [Figure 3] FIG. 10 is an overall view showing a modified example of a processing apparatus including a dust collecting device according to an embodiment of the present invention. [Figure 4] 1 is a perspective view showing a dust collecting device according to an embodiment of the present invention; [Figure 5] 1A is a view of a dust collecting device according to an embodiment of the present invention when a dust collecting section is being cleaned, and FIG. 1B is a view of the dust collecting section when being dried. [Figure 6] 1 is a block diagram showing a control device for controlling the operation of a processing machine equipped with a dust collecting device according to an embodiment of the present invention. [Figure 7] 4 is a time chart showing the operation of the dust collecting device according to the embodiment of the present invention. [Figure 8] FIG. 10 is an overall view showing another modified example of a processing apparatus including a dust collecting device according to an embodiment of the present invention. [Figure 9] In the dust collecting section of the dust collecting device according to the embodiment of the present invention, (a) is a side view showing a first example in which the guide portion of the dust collecting electrode plate is formed so as to be inclined downward toward the collection portion, and (b) is a side view showing a second example in which the guide portion of the dust collecting electrode plate is formed so as to be inclined downward toward the collection portion. [Figure 10] In the dust collection section of a dust collector according to an embodiment of the present invention, (a) is a side view showing a third embodiment in which the induction portion of the dust collection electrode plate is formed so as to incline downwards toward the collection section, (b) is a side view showing a fourth embodiment in which the induction portion of the dust collection electrode plate is formed so as to incline downwards toward the collection section, (c) is a side view showing the fourth embodiment in which the induction portion of the dust collection electrode plate is formed so as to incline downwards toward the collection section, (d) is a side view showing a fifth embodiment in which the induction portion of the dust collection electrode plate is formed so as to incline downwards toward the collection section, (e) is a side view showing a sixth embodiment in which the induction portion of the dust collection electrode plate is formed so as to incline downwards toward the collection section, and (f) is a side view showing a seventh embodiment in which the induction portion of the dust collection electrode plate is formed so as to incline downwards toward the collection section. [Figure 11] FIG. 13 is a side view showing an eighth example of the dust collecting section of the dust collecting device according to the embodiment of the present invention, in which the guide portion of the dust collecting electrode plate is formed so as to incline downward toward the recovery portion. DETAILED DESCRIPTION OF THE INVENTION

[0043] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0044] Fig. 1 is a schematic diagram showing an overall view of a processing apparatus equipped with a dust collecting device according to an embodiment of the present invention, and Fig. 2 is an overall view of a processing apparatus with a relatively low airtightness. The interior of processing chamber A is divided into a processing area A1 and a non-processing area A2 by a partition plate 3. The partition plate 3 is installed in a vertical position and is open at the top and bottom.

[0045] The machining chamber A is sealed by a cover body 4 to prevent foreign matter such as chips and cutting oil generated during machining of a workpiece 8 (workpiece) from leaking out. The cover body 4 includes a side cover 5 surrounding the side of the machining area A1, a ceiling cover 6, and a dust collection door 7 that allows the dust collection device 2 to be removed from and attached to the machining apparatus 1, as well as a sliding door (not shown) that allows the workpiece 8 to be removed from and attached. In this case, the side cover 5 may be grounded to function as a dust collection unit 31, which will be described later.

[0046] The processing device 1 includes a processing machine 9 and a charged mist ejection section 18 arranged in the processing area A1, a dust collection device 2 arranged in the non-processing area A2, and a coolant tank 15, a coolant pump 16, and a coolant valve 17 arranged outside the processing chamber A.

[0047] The processing machine 9 processes the workpiece 8 by bringing a rotating tool 10 into contact with the workpiece 8, and is, for example, a horizontal machining center in which the central axis of rotation of the tool 10 extends horizontally. The processing area A1 is also provided with a tool storage section (not shown) for storing the tool 10. Note that the processing machine 9 is not limited to a horizontal or vertical machining center, and may be, for example, a multi-processing device having a lathe, a turning function, and a milling function.

[0048] The processing machine 9 includes a bed 11, a tool spindle 12, and a table 13. The bed 11 is a base member for supporting the tool spindle 12 by a column or the like (not shown). The tool spindle 12 is provided so as to be movable in the horizontal and vertical directions by various feed mechanisms provided on the column or the like, and rotates a tool 10 such as a drill, reamer, or milling cutter. The tool spindle 12 incorporates a clamping mechanism (not shown) for detachably holding the tool 10. The table 13 is a device for fixing a workpiece fixing portion (pallet) 14, and is provided so as to be movable in each direction by various feed mechanisms.

[0049] The coolant tank 15 stores coolant liquid as machining oil. The coolant tank 15 is configured to be able to collect coolant liquid from within the machining area A1. The coolant pump 16 is provided in the coolant tank 15, and when driven, pressure-feeds the coolant liquid stored in the coolant tank 15 toward the electrostatic nozzle 20 and the cleaning nozzle 21, which will be described later. The coolant valves 17 are provided in the flow path 23a between the coolant pump 16 and the electrostatic nozzle 20, and in the flow path 23b between the coolant pump 16 and the cleaning nozzle 21. The coolant valves 17 are provided in each of the flow paths 23a and 23b, and function as control valves that control the flow rate of the coolant liquid sent from the coolant pump 16 toward the electrostatic nozzle 20 and the cleaning nozzle 21.

[0050] The charged mist jetting unit 18 uses an electrostatic nozzle 20 to spray coolant liquid together with compressed air, thereby utilizing the pressure of the compressed air to efficiently generate a fine charged mist. In the figure, the charged mist jetting unit 18 is installed at an angle around the workpiece 8 so that the sprayed charged mist can easily come into contact with the workpiece 8, but it may also be installed on the ceiling. By spraying mist and charged coolant liquid around the workpiece 8, the charged mist jetting unit 18 suppresses heat generated during machining of the workpiece 8, lubricates the gap between the workpiece 8 and the tool 10, and separates chips generated during machining of the workpiece 8 from the workpiece 8.

[0051] The electrostatic nozzle 20 is a two-fluid nozzle that simultaneously sprays two types of fluid and is grounded. Unlike a single-fluid nozzle, the electrostatic nozzle 20 can mix gas and liquid to form various spray patterns. In addition, the electrostatic nozzle 20 has high atomization performance, is resistant to clogging, and can be used with highly viscous liquids.

[0052] The electrostatic nozzle 20 is an internal mixing type having a central fluid passage 22a and peripheral fluid passages 22b. The tip of the electrostatic nozzle 20 is formed in a conical shape and is open. A compressed air inlet 24 is formed on the side of the electrostatic nozzle 20 to which compressed air is supplied. A liquid (coolant liquid) is supplied from a coolant supply unit 25 (see FIG. 6) to the central fluid passage 22 of the electrostatic nozzle 20, and compressed air is supplied from a compressed air supply unit 26 (see FIG. 6) to the peripheral fluid passages 22b. The liquid (coolant liquid) and gas (compressed air) are mixed and sprayed from the tip of the electrostatic nozzle 20. Note that in this embodiment, an internal mixing type two-fluid nozzle is used for the electrostatic nozzle 20, but an external mixing type two-fluid nozzle may also be used.

[0053] Compressed air, for example, at a pressure in the range of 0.1 to 1.0 MPa, more preferably about 0.6 to 0.7 MPa, is supplied from a compressed air supply unit 26 (see FIG. 6) such as a compressor to the compressed air introduction unit 24. The pressure of the compressed air may be adjusted in proportion to the amount of coolant sprayed, and specifically, may be adjusted to increase as the amount of coolant sprayed increases.

[0054] A conductive annular induction electrode 27 is disposed at a distance from the electrostatic nozzle 20 on the tip side of the electrostatic nozzle 20 so as to surround the vicinity of the tip of the electrostatic nozzle 20 in an annular shape. The induction electrode 27 is formed of a conductive metal, but may also be formed of a conductive resin other than metal. The gap (distance) between the electrostatic nozzle 20 and the induction electrode 27 is fixed at about several mm, but the gap may be varied in accordance with fluctuations in the high voltage applied to the induction electrode 27, for example, as follows. For high voltage V = 5 (KV), the gap distance G = 8 (mm) For high voltage V = 6 (KV), the gap distance G = 10 (mm) For high voltage V = 7 (KV), the gap distance G = 12 (mm)

[0055] The charged mist jetting unit 18 of the present invention does not use corona discharge, but generates the charged mist by forming only an electric field, so the discharge current is approximately 0 μA. In contrast, the charging unit of a conventional two-stage electrostatic precipitator uses corona discharge, which consumes discharge current. Therefore, the charged mist jetting unit 18 of the present invention does not consume current, so it can save power and is highly economical.

[0056] A negative DC high voltage is applied to the induction electrode 27 from the high-voltage generator (negative electrode) 28 (see FIG. 6), generating a positively charged mist. When the electrostatic nozzle 20 is connected to GND and a negative DC high voltage is applied from the high-voltage generator (negative electrode) 28 (see FIG. 6) to the induction electrode 27, the electrostatic nozzle 20 carries a charge of the opposite polarity (positive charge) on its surface (dipolephoresis). As a result, the liquid that reaches the tip of the electrostatic nozzle 20 also carries a charge of the opposite polarity (positive charge) on its surface. In this state, the liquid and gas mix and atomize, generating charged microparticles, and the charged mist (charged mist) is sprayed from the nozzle tip. In this way, by spraying the liquid (coolant liquid) together with compressed air from the electrostatic nozzle 20 and charging the mist with the induction electrode 27, it is possible to efficiently spray a fine charged mist using the pressure of the compressed air.

[0057] In the dust collecting device 2, arranged in this order from bottom to top along the direction of airflow are a pre-treatment device 30 for capturing relatively large particles such as machining chips in the oil mist, a dust collecting section 31 for capturing oil mist (particles) generated by machining, a cleaning device 32 for washing away the oil mist (particles) captured in the dust collecting section 31, and an air blower 34 having a fan 33 and a fan motor 39 for rotating the fan 33. In addition, a collection section 59 for collecting the captured oil mist is arranged below the dust collecting section 31.

[0058] The pre-treatment device 30 is configured, for example, by semicircular coarse dust filters arranged alternately in a maze pattern in the direction of the airflow. Relatively large particles such as cuttings come into contact with the pre-treatment device 30 and fall downward, and the air containing the oil mist after the relatively large particles have been collected flows through the pre-treatment device 30 toward the dust collection section 31. Note that, although the pre-treatment device 30 has a semicircular shape in this embodiment, the shape is not limited to this as long as it is capable of collecting relatively large particles such as cuttings. For example, it may be U-shaped with an opening located on the lower side, triangular, or formed from a mesh.

[0059] 4, dust collection unit 31 is formed by alternately arranging a plurality of aluminum dust collection electrode plates 35 connected to earth and aluminum high-voltage electrode plates 37 connected to high-voltage power supply unit 36 ​​(see FIG. 6) at equal intervals. Dust collection electrode plates 35 and high-voltage electrode plates 37 are arranged in a vertical position so as to face each other.

[0060] A rectangular frame 38 is formed around the outer periphery of the dust collecting unit 31, and left and right side plates 29 are attached to the frame 38 so as to stand facing each other. Four connecting shafts 40 are horizontally installed between the left and right side plates 29, and these connecting shafts 40 penetrate the dust collecting electrode plate 35 and the high-voltage electrode plate 37.

[0061] A first power supply member 41, a second power supply member 42, an upper mounting member 43, and a lower mounting member 44 are attached to the outer surfaces of the left and right side plates 29, respectively, at the front and rear. A first insulator 45 (made of resin) is interposed between the first power supply member 41 and the upper mounting member 43, and a second insulator 46 (made of resin) is interposed between the second power supply member 42 and the lower mounting member 44. In this manner, the first power supply member 41 and the second power supply member 42 are supported in an insulated state by the left and right side plates 29, and a high-voltage power supply unit 36 ​​(see FIG. 6) is electrically connected to the first power supply member 41 and the second power supply member 42. A power supply spring 49 is fixed to the second power supply member 42, and a high voltage generated by the high-voltage power supply unit 36 ​​is applied to the power supply spring 49.

[0062] Furthermore, seat plates 47 are attached to the four sides of the dust collecting unit 31 excluding the top and bottom. These seat plates 47 can prevent oil mist from adhering to the insulators 45, 46 provided on the side surfaces and prevent airflow from flowing in or out from the sides. The seat plate 47 on the side of the side plate 29 on which the first power supply member 41 and the second power supply member 42 are provided has a round hole 48 for power supply.

[0063] In this embodiment, the high voltage (V1) applied to induction electrode 27 and the high voltage (V2) applied to high-voltage electrode plate 37 of precipitator 31 are the same high voltage values ​​but opposite in polarity, applied from a common high-voltage power supply unit 36 ​​(see FIG. 6). Specifically, high voltages of V1 = -5 to 7 (KV) and V2 = +5 to 7 (KV) are applied. Note that although a negative DC high voltage is applied to induction electrode 27, a positive DC high voltage may also be applied. In that case, the high voltage applied to high-voltage electrode plate 37 of precipitator 31 is a negative DC high voltage.

[0064] The cleaning device 32 is provided with a cleaning nozzle 21 as a cleaning jetting part. is disposed above the dust collecting section 31 and facing the dust collecting section 31. A wide-angle nozzle with a wide spray angle is used for the cleaning nozzle 21 so that cleaning water can be sprayed over the entire dust collecting section 31. In this embodiment, the liquid used in the cleaning nozzle 21 for cleaning the dust collecting section 31 is the same as the coolant liquid used in the charged mist ejection section 18. By using the same coolant liquid as the liquid used during machining in this way, economic efficiency can be improved. Note that, although the cleaning nozzle 21 is disposed above the dust collecting section 31 in this embodiment, it may be disposed in another position as long as the coolant liquid sprayed from the cleaning nozzle 21 is sprayed over the entire dust collecting electrode plate 35.

[0065] It is preferable to use an axial fan (for example, a reversible flow fan) as the fan 33 of the blower 34, but a sirocco fan or turbo fan may also be used. An axial fan has multiple blades attached to a motor shaft, and is a fan that draws air in from the front of the blades and expels it to the rear. In this embodiment, by reversing the rotation direction of the fan blades, it is possible for a single fan to blow air in both directions, and the wind direction can be switched.

[0066] FIG. 3 shows a modified example of a processing apparatus 1 equipped with a dust collector 2 according to an embodiment of the present invention, and is an overall view of a highly airtight processing apparatus 1. As shown in FIG. 3, the processing apparatus 1 is installed in the center of a processing chamber A, with dust collectors 2 disposed on both the left and right sides of the processing apparatus 1. The interior of the processing chamber A is divided by left and right partition plates 3 into a processing area A1 where the processing apparatus 1 is installed and two non-processing areas A2 on the left and right where the dust collectors 2 are installed. Each partition plate 3 is installed vertically, with openings at the top and bottom. The processing apparatus 1 is a vertical machining center in which the central axis of rotation of the tool 10 extends vertically, and the tool spindle 12 is provided so as to be movable vertically and horizontally.

[0067] In the case of a highly airtight processing apparatus 1 such as that shown in Fig. 3, an exhaust port 51 is provided in the ceiling cover 6 corresponding to the downstream side of the dust collector 2 in the airflow direction. The exhaust port 51 is equipped with a damper 52 as an opening / closing means, and the air flow can be adjusted (opened, suppressed, or blocked) by moving the damper 52. For example, when the electrostatic nozzle 20 of the charged mist ejection unit 18 ejects the charged mist together with compressed air into the processing chamber A, the pressure inside the processing chamber A becomes positive, so the damper 52 is opened and the pressure inside the processing chamber A is released.

[0068] 3, one damper 52 (the right damper in FIG. 3) may be closed to generate a circulating airflow within the processing chamber A, and the other damper 52 (the left damper in FIG. 3) may be open to release the pressure within the processing chamber A to the outside. Also, when charged mist is being sprayed from the charged mist spraying unit 18, either one of the dampers 52 may be open, or both dampers 52 may be open. Furthermore, as shown in FIG. 7, the two dampers 52 may be controlled to alternate between the open state and the closed state.

[0069] On the other hand, in the case of a processing device 1 with a relatively low airtightness as shown in Figure 2, the exhaust port 51 and damper 52 are not provided because pressure escapes to the outside through a gap in the cover body 4 of the processing device 1. In this case, a gap is provided between the partition plate 3 and the ceiling cover 6, so that the processing area A1 and the non-processing area A2 communicate with each other, and the air purified in the dust collector 2 is returned to the processing chamber A.

[0070] Next, a control device 60 that controls the operation of the processing apparatus 1 equipped with the dust collecting device 2 according to the embodiment of the present invention will be described with reference to Fig. 6. The control device 60 is a control panel that is installed outside the processing apparatus 1 and controls various operations in the processing apparatus 1, and is equipped with various devices.

[0071] As shown in FIG. 6, the control device 60 includes an operation unit 61 including various buttons and switches used by an operator when operating the processing device 1, a display unit 62 that displays the processing state of the workpiece 8, a program storage unit 63 that stores an execution program (numerical control program) for processing the workpiece 8, a tool spindle motor 65 that rotates the tool spindle 12 in accordance with a control signal from a program execution unit (not shown) of a CPU 64, a tool spindle control unit 67 that controls a tool spindle feed motor (not shown) for moving the tool spindle 12 in each direction, a table control unit 69 that controls a table feed motor 68 that moves the table in each direction in accordance with a control signal from the program execution unit, and a coolant pump 16 and a coolant liquid supply unit 21 that pressure-feed coolant liquid toward the charged mist jetting unit 18 and the cleaning nozzle 21 in accordance with a control signal from the program execution unit. a compressed air supply unit 26 that controls the opening and closing of a solenoid valve (not shown) for compressed air that is pressure-fed toward a charged mist jetting unit 18, which is a charged mist generating unit, in accordance with a control signal from the program execution unit; a high-voltage power supply unit 36 ​​that controls the positive high voltage applied from a high-voltage generation unit (positive electrode) 74 to a high-voltage electrode plate 37 of the dust collecting unit 31 and the negative high voltage applied from a high-voltage generation unit (negative electrode) 28 to an induction electrode 27 of the charged mist jetting unit 18 in accordance with a control signal from the program execution unit; an exhaust port opening / closing control unit 75 that controls the opening and closing of a damper 52 of an exhaust port 51 using a solenoid drive unit 66; and a motor control unit 78 that has a rotation direction control unit 76 that controls the rotation direction of a fan motor 39 and a rotation speed control unit 77 that controls the rotation speed of the fan motor 39.

[0072] In the machining apparatus 1 having the above-described configuration, the control device 60 controls the amount of coolant sprayed from the charged mist spraying unit 18, the voltage applied to the induction electrode 27 of the charged mist spraying unit 18, the voltage applied to the high-voltage electrode plate 37 of the dust collecting unit 31, and the rotation speed of the fan motor 39, depending on the properties of the coolant liquid as machining oil (water-soluble oil or oil-based oil) selected based on the machining conditions.

[0073] Machining oils (coolants) are broadly divided into two types: water-soluble oils, which are water-soluble cutting fluids, and oil-based oils, which are water-insoluble cutting fluids. The type is selected based on the machining conditions. Water-soluble oils are used by dissolving them in water and have excellent cooling properties and no risk of fire, while oil-based oils are used without dissolving them in water and have excellent lubricating properties but no risk of fire. Therefore, the type of machining oil (coolant) is selected based on the type of material being processed and the machining method. For example, water-soluble oils have excellent cooling properties and are suitable for machining with high cutting resistance, while oil-based oils have excellent lubricating properties and are suitable for finishing processes that require high finishing precision. Water-soluble oils and oil-based oils used in machining oils (coolants) can be electrically charged by applying a high voltage.

[0074] [Table 1] Next, with reference to FIGS. 1 to 8 and Table 1, a procedure for cutting a workpiece 8 using the processing device 1 according to the embodiment of the present invention will be described.

[0075] First, as a preparation step for processing, an automatic tool changer (not shown) holds a tool (drill) 10 to be used for cutting the workpiece 8 on a tool spindle 12, rotates the tool spindle 12, and then moves the tool 10 and the workpiece 8 held on a table 13 to a predetermined position.

[0076] After the preparation process for machining is completed, the cutting process of the workpiece 8 is started. In this cutting process, as shown in Fig. 7 , charged mist is sprayed from the charged mist spray unit 18 of the processing machine 9 onto the workpiece 8, and a high voltage is applied to the induction electrode 27 of the charged mist spray unit 18 and the high-voltage electrode plate 37 of the dust collecting unit 31. In addition, the fan 33 of the air blower 34 is operated in the forward direction to generate an air current that flows from below to above within the dust collecting unit 31.

[0077] As described above, in the cutting process of this workpiece 8, the type of processing oil to be used (water-soluble oil or oil-based oil) is first selected based on processing conditions such as the type of material to be processed and the processing method. As shown in Table 1, if an oil-based oil is selected, one of patterns No. 1 to No. 3 is applied, and if a water-soluble oil is selected, one of patterns No. 4 to No. 6 is applied. It is also possible to change the processing oil during the cutting process, for example, by using water-soluble oil for heavy and medium cutting, and then switching to oil-based oil for light cutting (finish cutting). In this case, separate coolant tanks 15 for storing the oil-based oil and the water-soluble oil must be provided.

[0078] For example, when oil-based oil is selected, pattern No. 1 (heavy cutting) is applied first, the amount of charged mist sprayed is set to large (Q1), the applied voltage to the induction electrode 27 is set to -7.0 (KV), the applied voltage to the high-voltage electrode plate 37 of the dust collection section is set to +7.0 (KV), and the rotation speed of the fan 33 is set to high (RPM1), and heavy cutting processing is performed. After No. 1 (heavy cutting) is completed, the process moves to No. 2 (medium cutting), where the amount of charged mist sprayed is set to medium (Q2), the applied voltage to the induction electrode 27 is set to -6.5 (KV), the applied voltage to the high-voltage electrode plate 37 of the dust collection unit is set to +6.5 (KV), and the rotation speed of the fan 33 is set to medium (RPM2). After medium cutting, the process moves to pattern No. 3 (light cutting), where the amount of charged mist sprayed is set to small (Q3), the applied voltage to the induction electrode 27 is set to -6.0 (KV), the applied voltage to the high-voltage electrode plate 37 of the dust collection unit is set to +6.0 (KV), and the rotation speed of the fan 33 is set to low (RPM3). After finishing, cutting of the workpiece 8 is completed.

[0079] In the example of the present embodiment described above, the amount of charged mist ejected gradually decreases and the rotation speed of fan 33 decreases as the cutting progresses from heavy cutting to medium cutting to light cutting. The high voltage applied to induction electrode 27 is set in the range of −6.0 to −7.0 KV when oil-based oil is selected, and in the range of −5.0 to −6.0 KV when water-soluble oil is selected, depending on the cutting conditions (heavy, medium, and light cutting). The high voltage applied to high-voltage electrode plate 37 of dust collection unit 31 is set in the range of +6.0 to +7.0 KV when oil-based oil is selected, and in the range of +5.0 to +6.0 KV when water-soluble oil is selected, depending on the cutting conditions (heavy, medium, and light cutting).

[0080] Thus, it is preferable to set the voltage applied to the high-voltage electrode plate 37 highest during heavy cutting, which generates a large amount of oil mist, and then lower the voltage applied to the high-voltage electrode plate 37 as the amount of oil mist decreases with the change from medium to light cutting. Furthermore, when using water-soluble oil, the water-soluble mist generated from the charged mist jetting portion 18 adheres to the insulators 45 and 46, reducing the insulation resistance of the high-voltage electrode plate 37. Therefore, a high voltage applied to the high-voltage electrode plate 37 increases the risk of creepage leakage. Therefore, it is preferable to set the voltage applied to the high-voltage electrode plate 37 lower than when using oil-based oil. Furthermore, as shown by the dashed lines in Figure 7, when transitioning from heavy cutting to medium cutting, from medium cutting to light cutting, or from light cutting to a resting step, the high voltage applied to the high-voltage electrode plate 37 during the previous cutting step may be maintained for a certain period of time.

[0081] As described above, when the electrically charged mist is sprayed toward the workpiece 8 in the processing area A1, the air containing the oil mist, which has been converted into a mist by the heat generated during processing, is guided into the non-processing area A2 through the lower opening of the partition plate 3 as the fan 33 rotates. At this time, as the air containing the oil mist enters the non-processing area A2 from the processing area A1 through the lower opening of the partition plate 3, the direction of the airflow reverses from below to above, causing relatively large particles in the air, such as cuttings, to be blown out of the airflow before reaching the pre-processing device 30 and fall into the collection section 59. Furthermore, some of the relatively large particles, such as cuttings, that are not blown out of the airflow are collected by the pre-processing device 30, and the oil mist in the air that has passed through the pre-processing device 30 flows into the dust collection section 31 and is collected. Then, some of the oil mist collected in the dust collection section 31 falls by gravity and is collected in the collection section 59 below the dust collection section 31.

[0082] The air then passes through the dust collection section 31, where the oil mist contained in the air is captured and purified. In a relatively airtight processing device 1 such as that shown in Figure 2, the air is returned to the processing area A1 through the upper opening of the partition plate 3, and in a highly airtight processing device 1 such as that shown in Figure 3, the damper 52 of the exhaust port 51 installed in the ceiling cover 6 is opened, and the air is discharged to the outside through the exhaust port 51.

[0083] When cutting of the workpiece 8 is completed as described above, the processing machine 9 is stopped. This stops the rotation of the tool spindle 12, the ejection of charged mist from the charged mist ejection unit 18, the application of high voltage to the induction electrode 27 and the high-voltage electrode plate 37 of the dust collection unit 31, and the operation of the fan 33 of the air blower 34. If there is a next cutting operation to be performed, the automatic tool changer holds the tool 10 to be used in the next processing job on the tool spindle 12, and the above-mentioned processing steps are continued.

[0084] Thereafter, the process proceeds to a cleaning step for the dust collection unit 31. In the cleaning step, the application of high voltage to the high-voltage electrode plate 37 is stopped, and as shown in FIG. 5(a), coolant liquid is sprayed from the cleaning nozzle 21 toward the dust collection unit 31 below. Dirt and oil mist that have fallen off from the dust collection unit 31 by this cleaning step fall into the recovery unit 59. Note that this cleaning step does not necessarily have to be performed after each cutting process is completed; for example, it may be performed after all cutting processes for the day are completed, or it may be performed periodically.

[0085] After the cleaning process is completed, the dust collecting unit 31 is dried. In this drying process, as shown in FIG. 5(b), the fan 33 of the blower 34 is rotated in the reverse direction, generating an air current from above to below within the dust collecting unit 31, causing the coolant (cleaning liquid) containing the oil mist that has fallen from the dust collecting unit 31 to fall into the recovery unit 59. In this drying process, it is preferable to control the fan 33 to rotate at a higher rotation speed than during dust collection. In addition, in a highly airtight processing apparatus 1 such as that shown in FIG. 3, the damper 52 of the exhaust port 51 is kept open during the cleaning and drying processes, as shown in FIGS. 5(a) and 5(b).

[0086] 8 is an overall view showing another modified example of the low-airtight processing apparatus 1 according to the embodiment of the present invention. In the processing apparatus 1 of this modified example, a vertical tool spindle 12 is arranged in the processing area A1, a charged mist ejection unit 18 and a dust collection unit 31 are arranged opposite each other on the left and right, and a blower 34 is arranged in the center of the ceiling cover 6.

[0087] 8, dampers 52 capable of controlling the amount of air may be provided in two clean air flow paths 80, 81 on the left and right sides. In this case, for example, when the left side of the workpiece 8 is being machined with the tool 10, it is estimated that more oil mist will be generated in the left side of the machining area A1 than in the right side. Therefore, the left damper 52 may be controlled to open the left side flow path 80 and the right damper 52 may be controlled to close the right side flow path 81. In this way, the degree of opening and closing of the dampers 52 may be controlled depending on the part of the workpiece 8 being machined.

[0088] In the modified examples shown in FIGS. 3 and 8, the dust collecting devices 2 are arranged opposite each other at two locations on the left and right, but depending on the size of the processing chamber A, the dust collecting devices 2 may be arranged at three or more locations.

[0089] As shown in FIG. 9 , a guide portion 85 inclined downward toward the collection portion 59 may be provided at the lower end of the dust collecting electrode plate 35 so that the collected oil mist can be guided to the collection portion 59. (The collected oil mist moves along the downward-sloping guide portion 85 due to the effects of surface tension and gravity toward the collection portion 59.) FIG. 9( a) shows a first embodiment in which the guide portion 85 is formed in the collection portion 59 and inclined downward from left to right, while FIG. 9( b) shows a second embodiment in which the guide portion 85 is formed inclined downward from the center toward each of the left and right collection portions 59. The dashed arrows in FIGS. 9( a) and 9(b) indicate the direction of airflow. In this case, the airflow flows from bottom to top, but it may also flow left and right. When the airflow direction and the inclination direction of the guide portion 85 are the same, the oil mist collected by the dust collecting electrode plate 35 can be reliably guided to the collection portion 59 via the guide portion 85.

[0090] 10(a) shows a third embodiment in which the guide section 85 is formed to be inclined downward toward the collection section 59, FIG. 10(b) shows a fourth embodiment in which the guide section 85 is formed to be inclined downward toward the collection section 59, FIG. 10(c) shows a fifth embodiment in which the guide section 85 is formed to be inclined downward toward the collection section 59, FIG. 10(d) shows a sixth embodiment in which the guide section 85 is formed to be inclined downward toward the collection section 59, FIG. 10(e) shows a seventh embodiment in which the guide section 85 is formed to be inclined downward toward the collection section 59, FIG. 10(f) shows an eighth embodiment in which the guide section 85 is formed to be inclined downward toward the collection section 59, and FIG. 11 shows a ninth embodiment in which the guide section 85 is formed to be inclined downward toward the collection section 59. The dashed arrows in FIGS. 10(a) to 10(c) indicate the flow direction of the airflow, and although the airflow flows from right to left in FIGS. 10(a) to 10(f), it may also flow vertically.

[0091] In a third embodiment shown in Fig. 10(a), the guide section 85 has a slit shape and is formed so as to be inclined downwards toward the right-side collection section 59, in a fourth embodiment shown in Fig. 10(b), the guide section 85 has a slit shape and is formed in a substantially V-shape toward the central collection section 59, and in a fifth embodiment shown in Fig. 10(c), the guide section 85 has a slit shape and is formed in a substantially inverted V-shape toward the collection sections 59 on both the left and right sides. The groove width of the slit hole in the guide section 85 in Figs. 10(a) to (c) is preferably set to a few mm or less, since setting it too large may have a negative effect on dust collection efficiency.

[0092] 10(d), the guide portion 85 has a concave-convex shape (see cross section XX) formed by half-punching (or drawing) and is tilted downward toward the right. In a seventh embodiment shown in Fig. 10(e), the guide portion 85 has a concave-convex shape formed by half-punching (or drawing) and is formed in a substantially V-shape toward the center. In an eighth embodiment shown in Fig. 10(f), the guide portion 85 has a concave-convex shape formed by half-punching (or drawing) and is formed in a substantially inverted V-shape toward both the left and right sides. The amount of concavity and convexity in the guide portion 85 in Figs. 10(d) to 10(f) is preferably set to about half the plate thickness of the dust collection electrode plate 35. For example, if the plate thickness of the dust collection electrode plate 35 is 1 mm, it is preferably set to about 0.5 mm.

[0093] Furthermore, in the ninth embodiment shown in Fig. 11, a protruding portion 86 and a second collection portion 84 are provided below the dust collecting electrode plate 35, at a location outside the area where the airflow flows. The second collection portion 84 and the coolant tank 15 are connected by a pipe 87, and the oil collected in the second collection portion 84 is returned to the coolant tank 15. In this case, the guide portion 85 has a slit hole shape or an uneven shape formed by half-punching (or drawing), and is formed so as to be inclined downward toward the second collection portion 84. The dashed arrow in Fig. 11 indicates the flow direction of the airflow, which in this case flows from bottom to top, but may also flow left and right.

[0094] 9 to 11, the guide portion 85 is formed as low as possible on the dust collecting electrode plate 35, and its tip is formed to face the collection portion 59 or the second collection portion 84. In addition, in the first to ninth embodiments, the guide portion 85 has a shape that slopes linearly downward, but it may be formed to slope curvedly downward.

[0095] In each of the first to ninth embodiments shown in FIGS. 9 to 11 , a portion of the oil mist and particles, including droplets, collected on the dust collecting electrode plate 35 moves downward due to the action of gravity over time. At this time, the oil mist collected on the dust collecting electrode plate 35 includes particles that are difficult to move downward due to the action of gravity, but the cleaning nozzle 21 can spray coolant (cleaning liquid) toward the dust collecting electrode plate 35 to move the particles that are difficult to move downward. The particles that have moved downward from the dust collecting electrode plate 35 due to the action of gravity and the spray of coolant (cleaning liquid) move along the slope of the induction section 85 and are finally stored in the collection section 59 or the second collection section 84.

[0096] In addition, since the waste liquid collected in the second collection section 84 has had large particles removed in advance by the pre-treatment device 30 located upstream of the dust collection section 31, it may be recycled by being directly returned to the coolant tank 15 without being subjected to filtration using the filtration filter 19 (see Figure 8).

[0097] A dust collecting electrode plate 35 that does not have an induction unit 85 cannot direct the collected oil mist to a specific location, so it is necessary to provide a collection unit 59 over the entire area corresponding to the dust collecting electrode plate 35. In contrast, a dust collecting electrode plate 35 that has an induction unit 85 can direct the oil mist to a specific location, so the size of the collection unit 59 can be reduced. Furthermore, for example, if the location of the collection unit 59 is determined in advance depending on the situation of each processing device 1, the induction unit 85 can be formed to correspond to the collection unit 59, so that the collected oil mist can be efficiently collected in one place.

[0098] Furthermore, the dust collecting section 31 having the dust collecting electrode plate 35 on which the induction section 85 is formed is not only suitable for the dust collecting section 31 housed within the processing device 1 of this embodiment, but may also be applied to a general electric dust collector that collects dirt generated from the processing device 1 via a duct hose, or to an electric dust collector for a fryer that collects oily smoke generated from the fryer.

[0099] As in the processing apparatus 1 according to the embodiment of the present invention, the oil mist is captured in the processing chamber A. When an electrostatic precipitator-type dust collector 31 is installed, it is possible to improve economy compared to the conventional case where a dust collector is installed outside the processing chamber, because there is no need for a duct hose to connect the processing chamber A to the dust collector 31, a recovery container to recover the discharged oil, or an oil drain hose to process the discharged oil collected by the dust collector 31 in the recovery container. Also, because there is no need to provide a place to install the dust collector 31 outside the processing chamber A as in the conventional case, the space around the processing chamber A can be used effectively.

[0100] The above-described embodiment shows one aspect of the processing apparatus 1, the dust collection apparatus 2, and the dust collection method according to the present invention, and the technical scope of the present invention is not limited to the above-described embodiment. [Explanation of symbols]

[0101] 1 Processing equipment 2 Dust collector 3 Divider 8 Workpiece 18. Charged mist ejection part 20 Electrostatic Nozzle 21 Cleaning nozzle (cleaning nozzle) 27 Induction electrode 31 Dust collection unit 33 Fans 34 Blower 35 Dust collection electrode plate 37 High voltage electrode plate 45 Insulator 46 Insulator 51 Exhaust port 52 Damper (opening and closing means) 59 Collection Department 60 Control device

Claims

1. A processing device capable of collecting oil mist generated during processing of a workpiece in a processing chamber, a charged mist ejection unit that ejects a charged mist, which is obtained by mixing a liquid and a gas and electrically charging the mist, onto the workpiece during processing; A dust collection unit that collects oil mist generated during processing, Equipped with the charged mist jetting unit and the dust collecting unit are disposed within the processing chamber, the charged mist jetting unit includes an electrostatic nozzle that is grounded and that jets a mixture of liquid and gas, and an induction electrode that is applied with a high voltage and that is disposed in the vicinity of a tip of the electrostatic nozzle at a distance, The processing apparatus is characterized in that the dust collecting unit includes a grounded dust collecting electrode plate.

2. 2. The processing device according to claim 1, wherein the liquid is a coolant liquid used during processing.

3. 2. The processing apparatus according to claim 1, wherein the dust collecting section includes a high-voltage electrode plate to which a high voltage is applied, and the dust collecting electrode plate and the high-voltage electrode plate are alternately arranged at equal intervals.

4. 4. The processing apparatus according to claim 3, wherein the high-voltage electrode plate and the dust-collecting electrode plate are arranged in parallel in a vertical position, and a collecting section for collecting the collected mist is provided below the dust collecting section.

5. 2. The processing apparatus according to claim 1, wherein the workpiece is electrically conductive, fixed to a workpiece fixing portion and electrically connected thereto, and the workpiece fixing portion is grounded.

6. 4. The processing apparatus according to claim 3, wherein the high voltage applied to the induction electrode and the high voltage applied to the high-voltage electrode plate of the dust collecting section have opposite polarities.

7. 7. The processing apparatus according to claim 6, wherein the high voltage applied to the induction electrode and the high voltage applied to the high voltage electrode plate of the dust collecting unit are the same high voltage value applied from a common high voltage power supply unit.

8. 4. The machining apparatus according to claim 3, further comprising a control device that controls the amount of charged mist sprayed from the charged mist spraying portion, the high voltage applied to the induction electrode of the charged mist spraying portion, and the high voltage applied to the high-voltage electrode plate of the dust collecting portion, depending on the properties of the liquid supplied to the electrostatic nozzle of the charged mist spraying portion and / or the machining conditions of the workpiece.

9. 9. The processing apparatus according to claim 8, wherein the control device sets a lower high voltage to be applied to the high-voltage electrode plate of the dust collecting section when water-soluble oil is supplied to the charged mist spraying section than when oil-based oil is supplied.

10. a partition plate that divides the inside of the processing chamber into a processing area where the charged mist jetting unit is arranged and a non-processing area where the dust collecting unit is arranged, the partition plate is disposed in a vertical position along the dust collecting unit and is grounded, the dust collecting unit includes an insulator supporting a high-voltage electrode plate to which a high voltage is applied, 2. The processing apparatus according to claim 1, further comprising an oil mist recovery section below the partition plate.

11. an exhaust port is provided for discharging air from within the processing chamber to the outside; 2. The processing apparatus according to claim 1, wherein the exhaust port is provided with an opening / closing means for switching between discharging air from the processing chamber to the outside and circulating the air back into the processing chamber.

12. 2. The processing apparatus according to claim 1, further comprising a cleaning jetting section that sprays liquid toward the dust collecting section, the liquid being the same as the liquid supplied to the charged mist jetting section.

13. a cleaning jetting unit that jets liquid from above the dust collecting unit toward the dust collecting unit; a blower that generates an air current that flows from below to above within the dust collecting unit during dust collection; a collecting section provided below the dust collecting section and configured to collect the oil mist captured by the dust collecting section; 2. The processing apparatus according to claim 1, wherein the dust collecting section, the cleaning jetting section, and the blower are arranged in this order from the downstream side in the direction of airflow.

14. 14. The processing apparatus according to claim 13, wherein after the cleaning jetting part stops spraying the liquid onto the dust collector, the fan of the air blowing device is rotated in reverse to generate an air current flowing from above to below within the dust collecting part.

15. a collecting section that collects the oil mist captured by the dust collecting electrode plate is provided below the dust collecting electrode plate of the dust collecting section, 2. The processing device according to claim 1, wherein the dust-collecting electrode plate is formed with a guide portion that is inclined downward toward the collection portion so as to be able to guide the collected oil mist to the collection portion.

16. A dust collecting device that collects oil mist generated in a processing chamber during processing, a dust collecting section having a grounded dust collecting electrode plate and a high voltage electrode plate to which a high voltage is applied, and which collects oil mist generated during machining; a blower that generates an air current in the dust collecting section when collecting oil mist; a cleaning jetting section that jets liquid toward the dust collecting section after collecting the oil mist; a control device that controls the high voltage applied to the high-voltage electrode plate of the dust collecting unit in accordance with the properties of the liquid supplied during machining and / or the machining conditions of the workpiece machined in the machining chamber; A dust collecting device characterized by comprising:

17. A dust collection method for collecting oil mist generated in a processing chamber during processing, comprising: a dust collection process in which a high voltage applied to a high-voltage electrode plate of a dust collection unit disposed in the processing chamber is controlled in accordance with the properties of the liquid supplied to the charged mist ejection unit and / or the processing conditions of the workpiece processed in the processing chamber, and the rotation speed of an air blower that generates an air current in the dust collection unit is controlled, thereby collecting the mist generated during processing on the grounded dust collection electrode plate of the dust collection unit; a cleaning step of spraying a cleaning liquid from a cleaning jetting part toward the dust collecting part after the dust collecting step; a drying step of causing the blower to generate an airflow directed toward the dust collecting unit after the cleaning step; A dust collection method comprising:

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