Information processing system, information processing method, and information processing program

Abstract

To provide a technique that can reduce development lead time (design man-hours) and prevent the occurrence of differences in reuse sources due to a designer's experience or intuition when creating 2D drawings.SOLUTION: An information processing system comprises: a data obtaining unit which obtains 3D model data of a target item; a first information processing unit which estimates cost estimation of the target item based on the 3D model data; a second information processing unit which references a database of 2D drawing data based on the 3D model data to extract 2D drawing data for the target item or a similar item to the target item; and a data output unit which outputs the estimated cost estimation and the extracted 2D drawing data.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an information processing system, an information processing method, and an information processing program. [Background technology]

[0002] In recent years, as semiconductor devices have become more highly integrated, circuit wiring has become finer and the distance between wiring has become narrower. In the manufacture of semiconductor devices, many types of materials are repeatedly formed in film form on silicon wafers to form a layered structure. Semiconductor manufacturing equipment used to form this layered structure includes photolithography process equipment, thin film formation / etching / cleaning / drying equipment, exposure / drawing equipment, resist processing equipment, etching equipment, cleaning / drying equipment, heat treatment equipment, ion implantation equipment, thin film formation equipment, CMP equipment, bevel polishing equipment, plating equipment, and the like. Patent Document 1 discloses an example of a CMP equipment. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2018-6549 Summary of the Invention [Problem to be solved by the invention]

[0004] These semiconductor devices are characterized by: (1) a large number of components; (2) their use in clean rooms requires non-volatile and non-dusting materials and highly precise design and assembly of sliding parts; and (3) the demand for semiconductors, substrate materials, corresponding manufacturing methods, and manufacturing equipment changes rapidly and diversifiedly. Amid this rapid pace, the deadline for completing orders from order to shipment, including customization to meet customer requirements, is extremely tight. Furthermore, the time and effort required to rework parts due to component revisions and other factors is extremely costly. In particular, CMP (chemical mechanical polishing) equipment, bevel polishing equipment, and plating equipment, despite their large component counts, also perform processes that generate contaminants in clean environments. Therefore, non-volatile and non-dusting materials and highly precise design and assembly of sliding parts are even more essential than other types of manufacturing equipment.

[0005] In the development of semiconductor manufacturing equipment, the current specific steps for obtaining an estimate are as follows: (1) The designer performs 3D-CAD modeling and analysis to create a 3D model. (2) The designer creates a 2D drawing based on the 3D model. (3) The designer registers the 2D drawings in a database stored for design purposes and in a common in-house database used for product planning, design, manufacturing, use, and recycling purposes, obtains the part number, and releases a document to notify each department involved in product planning, design, manufacturing, use, and recycling of design change instructions. (4) The designer contacts the procurement department with the product number for which he or she wishes to request a quote. (5) The procurement department requests quotes from multiple product number suppliers. (6) The procurement department receives the quotation response and passes it on to the designer. (7) In order to reduce costs based on the estimated amount, the above steps (1) to (6) are repeated until the required amount is reached (in this repetition, step (3) may be omitted).

[0006] Of these, steps (4) to (6) take 2 to 3 weeks, but the number of repetitions of step (7) varies from project to project and is unpredictable, which may result in a longer development lead time.

[0007] In addition, in (2), designers find similar parts from equipment that has been shipped in the past and reuse those 2D drawings for reference. Therefore, inexperienced designers may end up using old 2D drawings as reference or reusing expensive 2D drawings.

[0008] The present invention has been made in consideration of the above points, and an object of the present invention is to provide a technology that can reduce development lead time (design man-hours) and prevent the occurrence of discrepancies in the source of 2D drawings due to the experience and intuition of the designer when creating the drawings. [Means for solving the problem]

[0009] An information processing system according to a first aspect of the present invention includes: a 3D model acquisition unit that acquires a 3D model of the target item; a first information processing unit that estimates a cost of the target item based on the 3D model; an estimate output unit that outputs the estimated cost estimate; A second information processing unit that refers to a database that stores 2D drawings of past items based on the 3D model and extracts a 2D drawing of the target item or an item similar to the target item; a 2D drawing output unit that outputs the extracted 2D drawing; Equipped with.

[0010] According to this embodiment, a cost estimate for a target item can be automatically obtained from a 3D model of the target item, thereby reducing development lead time (design man-hours) and realizing a shorter market launch cycle. Also, since 2D drawings of the target item or similar parts can be automatically obtained from a 3D model of the target item, it is possible to prevent discrepancies in the source material due to the designer's experience or intuition when creating 2D drawings of the target item.

[0011] An information processing system according to a second aspect of the present invention is the information processing system according to the first aspect, The first information processing unit A step of estimating the processing steps and processing times of the target article based on the 3D model of the target article using a first trained model that has been machine-learned to describe the relationship between a 3D model of a past article and the processing steps and processing times of the past article; and estimating a cost estimate for the target item based on the estimated processing steps and processing times of the target item using a second trained model that has been machine-learned to understand the relationship between the past processing steps and processing times of the item and the cost estimates for the past items.

[0012] An information processing system according to a third aspect of the present invention is the information processing system according to the first or second aspect, The second information processing unit A step is performed in which a third trained model is used to machine-learn the relationship between a 3D model of a past item and a 2D drawing of the past item or a similar item to the past item that was reused when creating the 2D drawing of the past item, and a 2D drawing of the target item or a similar item to the target item is extracted based on the 3D model of the target item by referring to the database.

[0013] An information processing system according to a fourth aspect of the present invention is the information processing system according to any one of the first to third aspects, When outputting a 2D drawing of a similar product to the target product, the data output unit outputs the drawing while emphasizing differences between the target product and the similar product.

[0014] An information processing system according to a fifth aspect of the present invention is the information processing system according to the fourth aspect, a correction suggestion unit that proposes corrections to resolve the differences; an approval receiving unit that receives approval for the proposal; a 2D drawing creation unit that, upon receiving the approval, creates a new 2D drawing of the target product by modifying the 2D drawing of the similar product according to the modification content; Further provided are:

[0015] An information processing system according to a sixth aspect of the present invention is the information processing system according to any one of the first to fifth aspects, The target article is a part or all of a semiconductor manufacturing device.

[0016] An information processing method according to a seventh aspect of the present invention is an information processing method executed by a computer, obtaining a 3D model of the target item; estimating a cost estimate for the target article based on the 3D model; outputting the estimated cost estimate; A step of extracting a 2D drawing of the target item or a similar item to the target item based on the 3D model by referring to a database that stores 2D drawings of past items; outputting the extracted 2D drawing; Includes:

[0017] An information processing program according to an eighth aspect of the present invention comprises: On the computer, obtaining a 3D model of the target item; estimating a cost estimate for the target article based on the 3D model; outputting the estimated cost estimate; A step of extracting a 2D drawing of the target item or a similar item to the target item based on the 3D model by referring to a database that stores 2D drawings of past items; outputting the extracted 2D drawing; Execute the following. [Effects of the Invention]

[0018] According to the present invention, it is possible to reduce the development lead time (design man-hours) and prevent the occurrence of discrepancies in the source of 2D drawings due to the designer's experience or intuition when creating the drawings. [Brief explanation of the drawings]

[0019] [Figure 1] FIG. 1 is a diagram showing a schematic configuration of an information processing system according to an embodiment. [Figure 2] FIG. 2 is a block diagram showing the configuration of the server. [Figure 3] FIG. 3 is a flowchart showing an example of the operation of the information processing system according to an embodiment. [Figure 4] FIG. 4 is a flow chart illustrating an example process for estimating a cost estimate for a target item based on a 3D model of the target item. [Figure 5] FIG. 5 is a diagram for explaining a process of estimating a processing step and processing time based on a 3D model of a target article. [Figure 6] FIG. 6 is a diagram for explaining a process of estimating a cost estimate based on the processing steps and processing time of the target article. [Figure 7] FIG. 7 is a diagram illustrating a process of extracting a 2D drawing of a target item or a similar item based on a 3D model of the target item. DETAILED DESCRIPTION OF THE INVENTION

[0020] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description and the drawings used in the following description, parts that can be configured identically will be designated by the same reference numerals, and duplicated descriptions will be omitted.

[0021] (Configuration of information processing system) Fig. 1 is a diagram showing a schematic configuration of an information processing system 1 according to an embodiment. As shown in Fig. 1, the information processing system 1 includes a server 2 and a terminal 3. The server 2 and the terminal 3 are connected to each other so as to be able to communicate with each other via a network 4 such as the Internet. The network 4 may be either a wired line or a wireless line, and the type and form of the line are not important. At least a portion of the server 2 and the terminal 3 are realized by a computer.

[0022] Of these, terminal 3 is used by, for example, a designer involved in the development of semiconductor manufacturing equipment, and is an electronic device such as a notebook computer, desktop computer, tablet terminal, head-mounted display (HMD), etc. Terminal 3 includes at least an interface for the designer to input information (for example, a keyboard, touch panel, touchpad, mouse, microphone, handheld controller, etc.) and an interface for outputting information to the designer (for example, a display, speaker, etc.).

[0023] Next, the server 2 will be described. Fig. 2 is a block diagram showing the configuration of the server 2. As shown in Fig. 2, the server 2 has a communication unit 21, a control unit 22, and a storage unit 23. The units 21 to 23 are connected to each other so that they can communicate with each other.

[0024] Of these, the communication unit 21 is a communication interface between the server 2 and the network 4. The server communication unit 21 transmits and receives information between the server 2 and the terminal 3 via the network 4.

[0025] The memory unit 23 is a non-volatile data storage device such as a hard disk or flash memory. The memory unit 23 stores various data handled by the control unit 22. For example, the server memory unit 23 includes a database 231 that stores 2D drawings of previously shipped items (e.g., some or all of previously shipped semiconductor manufacturing equipment). Here, the semiconductor manufacturing equipment may include one or more of a photolithography process equipment, a thin film formation / etching / cleaning / drying equipment, an exposure / drawing equipment, a resist processing equipment, an etching equipment, a cleaning / drying equipment, a heat treatment equipment, an ion implantation equipment, a thin film formation equipment, a CMP equipment, a bevel polishing equipment, and a plating equipment. More preferably, the semiconductor manufacturing equipment may include one or more of a CMP equipment, a bevel polishing equipment, and a plating equipment, which have particularly large numbers of components.

[0026] Note that the memory unit 23 does not necessarily have to be physically located within the server 2, and part or all of the memory unit 23 may be located within another device (e.g., cloud storage) that is communicatively connected to the server 2 via an external network.

[0027] 2, the control unit 22 has a 3D model acquisition unit 221, a first information processing unit 222, an estimate output unit 223, a second information processing unit 224, a 2D drawing output unit 225, a revision suggestion unit 226, an approval acceptance unit 227, and a 2D drawing creation unit 228. Each of these units 221 to 228 may be realized by a processor in the server 2 executing a predetermined program, or may be implemented in hardware.

[0028] The 3D model acquisition unit 221 acquires a 3D model of a target item (for example, part or all of a semiconductor manufacturing process). The 3D model includes 3D-CAD data (such as 3D shape and center of gravity) created by 3D modeling and analysis. The 3D model may further include information such as material, weight, product number, part name, product name (Japanese / English), drawing number, and various classifications. Specifically, for example, when a designer operates terminal 2 to perform a predetermined process (for example, touching or clicking an execute button) while a 3D model of the target item is displayed on terminal 2, the 3D model data is transmitted from terminal 2 to server 3, and the 3D model acquisition unit 221 acquires the 3D model data.

[0029] The first information processing unit 222 estimates the cost of the target item based on the 3D model acquired by the 3D model acquisition unit 221.

[0030] 5, the first information processing unit 222 first estimates the processing step and processing time of the target item based on the 3D model of the target item using a first trained model that has been machine-learned to describe the relationship between a 3D model of a previously shipped item and the processing step (e.g., lathe processing) and processing time of the previously shipped item. Next, referring to FIG. 6, the first information processing unit 222 estimates the cost estimate of the target item based on the estimated information on the processing step and processing time of the target item using a second trained model that has been machine-learned to describe the relationship between the processing step and processing time of the previously shipped item and the cost estimate of the previously shipped item.

[0031] The first trained model and the second trained model may be, for example, tuned neural network systems. The first trained model may be generated, for example, by performing machine learning (supervised learning) using as training data data in which information on the processing steps and processing times of previously shipped items is added to a 3D model of the previously shipped item. The second trained model may be generated, for example, by performing machine learning (supervised learning) using as training data data in which information on the processing steps and processing times of previously shipped items is added to information on cost estimates of the previously shipped items.

[0032] The estimate output unit 223 transmits information on the cost estimate estimated by the first information processing unit 222 to the terminal device 2 and outputs it.

[0033] Based on the 3D model acquired by the 3D model acquisition unit 221, the second information processing unit 224 refers to a database 231 that stores 2D drawings of items shipped in the past, and extracts 2D drawings of the target item or items similar to the target item.

[0034] As an example, referring to Figure 7, the second information processing unit 224 uses a third trained model that has been machine-learned to identify the relationship between a 3D model of a previously shipped item and a 2D drawing of the previously shipped item or a similar item that was reused by the designer at the time when creating the 2D drawing of the previously shipped item, and then refers to the database 231 based on the 3D model of the target item to extract a 2D drawing of the target item or a similar item to the target item.

[0035] The third trained model may be, for example, a tuned neural network system. The third trained model may be generated by performing machine learning (supervised learning) using as training data a 3D model of a previously shipped item, to which is added information about 2D drawings stored in database 231 and reused by the designer at the time of creating the 2D drawings of the previously shipped item.

[0036] The 2D drawing output unit 225 transmits the 2D drawing extracted by the second information processing unit 224 to the terminal device 2 for output.

[0037] 7, when outputting a 2D drawing of a similar product to the target product, the 2D drawing output unit 225 may identify differences between the target product and the similar product and output the differences with emphasis. Here, the 2D drawing output unit 225 may identify differences between the target product and the similar product by comparing the dimensions and angles of each part in the 3D model of the target product with the dimensions and angles of each part in the extracted 2D model of the similar product.

[0038] In the example shown in Figure 7, on the 2D drawing of the similar product, the dimension lines and dimension extension lines of different part A are displayed thicker than the dimension lines and dimension extension lines of other parts, and a speech bubble is added to indicate that it is a different part, thereby emphasizing different part A, but the manner of highlighting is not limited to this. For example, different part A may be emphasized by displaying the dimension lines and dimension extension lines of different part A in a color different from the dimension lines and dimension extension lines of other parts, or by displaying them in a flashing color.

[0039] The correction suggestion unit 226 suggests corrections to the designer to resolve the difference. In the example shown in Fig. 7, the correction suggestion unit 226 sends and outputs to the terminal 2 a suggestion message saying, "If you correct only difference A, it will become a 2D drawing of the target product. Do you want to correct it?", thereby suggesting corrections to the designer to resolve difference A.

[0040] The approval receiving unit 227 receives approval from the designer for the proposal made by the revision proposing unit 226. For example, as shown in Fig. 7, when a button for approval (a "YES" button) and a button for rejection (a "NO" button) are displayed in a proposal message displayed on the terminal 2, and the designer operates the terminal 2 to touch or click the button for approval (the "YES" button), information indicating that the designer has approved is transmitted from the terminal 2 to the server 3, and the approval receiving unit 227 receives the approval from the designer.

[0041] When the approval receiving unit 227 accepts the approval, the 2D drawing creation unit 228 creates a new 2D drawing of the target item by modifying the 2D drawing of the similar item in accordance with the modification content proposed by the modification proposing unit 226. For example, if the length of different portion A on the 2D drawing of the similar item is 5 mm shorter than that of the target item, the 2D drawing creation unit 228 modifies the length of different portion A on the 2D drawing of the similar item to be 5 mm longer. This creates a new 2D drawing of the target item. The 2D drawing of the target item newly created by the 2D drawing creation unit 228 is transmitted to and output from the terminal device 2 by the 2D drawing output unit 225.

[0042] (Example of operation) Next, an example of the operation of the information processing system 1 configured as above will be described with reference to Fig. 3. Fig. 3 is a flowchart showing an example of the operation of the information processing system 1.

[0043] As shown in FIG. 3, first, with a 3D model of the target item displayed on the designer's terminal 2, the designer operates terminal 2 to perform a predetermined process (for example, touching or clicking an execute button), and the data of the displayed 3D model is sent from terminal 2 to server 3, and the 3D model acquisition unit 221 acquires the data of the 3D model (step S11).

[0044] Next, the first information processing unit 222 estimates the cost of the target item based on the 3D model acquired by the 3D model acquisition unit 221 (step S12).

[0045] FIG. 4 is a flowchart showing an example of the step (step S12) of estimating a cost estimate for the target item based on a 3D model of the target item.

[0046] As shown in Figure 4, the first information processing unit 222 first estimates the processing process and processing time of the target item based on the 3D model of the target item, using a first trained model (see Figure 5) that has been machine-learned to determine the relationship between a 3D model of a previously shipped item and the processing process and processing time of the previously shipped item (step S121).

[0047] Next, the first information processing unit 222 uses a second trained model (see Figure 6) that has been machine-learned to determine the relationship between the processing process and processing time of previously shipped items and the cost estimate of the previously shipped items, to estimate a cost estimate for the target item based on the information on the processing process and processing time of the target item estimated in step S121 (step S122) (see Figure 6).

[0048] Then, the estimate output unit 223 transmits and outputs the cost estimate information estimated by the first information processing unit 222 to the terminal device 2 (step S13). This allows the designer to automatically obtain a cost estimate for the target item from the 3D model of the target item.

[0049] Next, as shown in FIG. 3, the second information processing unit 224 extracts a 2D drawing of the target item or a similar item to the target item based on the 3D model acquired by the 3D model acquisition unit 221, by referring to a database 231 that stores 2D drawings of items shipped in the past (step S14).

[0050] As an example, the second information processing unit 224 uses a third trained model (see Figure 7) that has been machine-learned to identify the relationship between a 3D model of a previously shipped item and a 2D drawing of the previously shipped item or a similar item that was reused by the designer at the time when creating the 2D drawing of the previously shipped item, and then refers to the database 231 based on the 3D model of the target item to extract a 2D drawing of the target item or a similar item to the target item.

[0051] Then, the 2D drawing output unit 225 transmits and outputs the 2D drawing of the target item or a similar item to the target item extracted by the second information processing unit 224 to the terminal device 2 (step S15). This allows the designer to automatically obtain the 2D drawing of the target item or a similar part from the 3D model of the target item.

[0052] In step S15, when a 2D drawing of a similar product to the target product is output, the 2D drawing output unit 225 identifies the differences between the target product and the similar product, and outputs the differences with emphasis, as shown in FIG. 7 (step S16).

[0053] Next, the modification suggesting unit 226 proposes modifications to the designer to eliminate the differences (step S17).

[0054] Then, when the approval receiving unit 227 receives approval from the designer for the proposal made by the modification suggestion unit 226 (step S18), the 2D drawing creation unit 228 creates a new 2D drawing of the target item by modifying the 2D drawing of the similar item in accordance with the modifications proposed by the modification suggestion unit 226 (step S19).

[0055] Next, the 2D drawing output unit 225 transmits and outputs the 2D drawing of the target item newly created by the 2D drawing creation unit 228 to the terminal device 2 (step S15). This allows the designer to obtain the 2D drawing of the target item simply by approving the proposal from the modification proposal unit 226, without having to manually modify the 3D model of an item similar to the target item, thereby significantly reducing the time required to create the drawing.

[0056] According to the above-described embodiment, a cost estimate for a target item can be automatically obtained from the 3D model of the target item, eliminating the need for a designer to request a quote from a processing company via the procurement department and then receive a quote response from the processing company. This reduces development lead time (design man-hours) and enables a shorter market launch cycle. Furthermore, because 2D drawings of the target item or similar parts can be automatically obtained from the 3D model of the target item, discrepancies in the source material due to the designer's experience or intuition can be prevented when creating 2D drawings of the target item.

[0057] Although the embodiments of the present invention have been described above by way of example, the scope of the present invention is not limited to these, and can be modified and changed according to the purpose within the scope of the claims.

[0058] In addition, the information processing system 1 according to this embodiment may be configured by one or more computers, but the program for realizing the information processing system 1 on one or more computers and the computer-readable recording medium on which the program is non-temporarily recorded are also protected by this case. [Explanation of symbols]

[0059] 1. Information Processing Systems 2 Server 21 Communications Department 22 Control Unit 221 3D Model Acquisition Department 222 First Information Processing Unit 223 Estimate Output Section 224 Second Information Processing Department 225 2D drawing output section 226 Correction section 227 Approval Reception Department 228 2D Drawing Creation Department 23 Memory section 231 Database of 2D drawings of historical objects 3. Terminal

Claims

1. a 3D model acquisition unit that acquires a 3D model of a target item; a first information processing unit that estimates a cost of the target item based on the 3D model; an estimate output unit that outputs the estimated cost estimate; a second information processing unit that refers to a database that stores 2D drawings of past objects based on the 3D model, and extracts a 2D drawing of the target object or an object similar to the target object; a 2D drawing output unit that outputs the extracted 2D drawing; An information processing system comprising:

2. The first information processing unit A step of estimating the processing steps and processing times of the target article based on the 3D model of the target article using a first trained model that has been machine-learned to describe the relationship between a 3D model of a past article and the processing steps and processing times of the past article; and estimating a cost estimate for the target item based on the estimated processing steps and processing times of the target item using a second trained model that has been machine-learned to understand the relationship between the past processing steps and processing times of the item and the cost estimates of the past items. The information processing system according to claim 1 .

3. The second information processing unit and performing a step of extracting a 2D drawing of the target item or a similar item to the target item by referring to the database based on the 3D model of the target item, using a third trained model that has been machine-learned to understand the relationship between a 3D model of a past item and a 2D drawing of the past item or a similar item to the past item that was reused when creating the 2D drawing of the past item.

3. The information processing system according to claim 1.

4. When outputting a 2D drawing of a similar product to the target product, the 2D drawing output unit outputs the drawing while emphasizing differences between the target product and the similar product.

3. The information processing system according to claim 1.

5. a correction suggestion unit that proposes corrections to resolve the differences; an approval receiving unit that receives approval for the proposal; a 2D drawing creation unit that, upon receiving the approval, creates a new 2D drawing of the target product by modifying the 2D drawing of the similar product according to the modification content; The information processing system according to claim 4 , further comprising:

6. The target item is a part or all of a semiconductor manufacturing device.

3. The information processing system according to claim 1.

7. 1. A computer-implemented information processing method, comprising: obtaining a 3D model of the target article; estimating a cost estimate for the target item based on the 3D model; outputting the estimated cost estimate; extracting a 2D drawing of the target item or a similar item to the target item based on the 3D model by referring to a database that stores 2D drawings of past items; outputting the extracted 2D drawing; An information processing method including:

8. On the computer, obtaining a 3D model of the target article; estimating a cost estimate for the target item based on the 3D model; outputting the estimated cost estimate; extracting a 2D drawing of the target item or a similar item to the target item based on the 3D model by referring to a database that stores 2D drawings of past items; outputting the extracted 2D drawing; An information processing program that executes the above.

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