Drive apparatus and position adjustment device

Abstract

To provide a drive apparatus and a position adjustment device that allow easy position adjustment of a workpiece and can be miniaturized.SOLUTION: A drive apparatus 1 according to an embodiment comprises: a speed reducer 10 which has an internal gear 11 that receives power from an electric motor 8 and outputs rotational force; an arm 4 which is attached to the internal gear 11 for moving a workpiece; and a position adjustment device 5 which is provided between the arm 4 and the workpiece for adjusting the position of the workpiece relative to the arm 4. In a state where the speed reducer 10 and the workpiece are arranged side by side in the horizontal direction, when viewed from the vertical direction, a part of the speed reducer 10 and a part of the position adjustment device 5 overlap each other.SELECTED DRAWING: Figure 10

Description

[Technical Field]

[0001] The present invention relates to a drive device and a position adjustment device. [Background technology]

[0002] Conventionally, there has been known an inspection device that rotates a test head for conducting continuity tests on electronic components. The test head is rotated by a drive device (test head rotation mechanism) having a drive source such as an electric motor. This allows the test head to approach or move away from, for example, a semiconductor wafer to be inspected. The drive device includes a reduction gear transmission having an output section that reduces the speed of the electric motor and outputs the reduced speed, and an arm (support arm) attached to the output section. A female screw section is formed in the output section, and a through hole that communicates with the female screw section is formed in the arm. The arm is fixed to the output section by inserting a bolt into the through hole and tightening the bolt into the female screw section. In addition, a test head is attached to the arm with a bolt. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 6650807 Summary of the Invention [Problem to be solved by the invention]

[0004] In order to perform an accurate test, it is necessary to position the test head with high precision relative to the test object. In the above-mentioned conventional technology, the arm is simply attached to the output section with a bolt, or the test head is attached to the arm. Therefore, when adjusting the position of the test head relative to the test object, it is necessary to adjust the position of the drive device itself or directly adjust the position of the test head relative to the arm. Thus, there is a problem in that adjusting the position of the test head is cumbersome. In particular, adjusting the position of a heavy test head not only makes adjustments to the position more difficult, but also places a greater load on the drive unit, potentially resulting in an increase in the size of the drive unit.

[0005] The present invention provides a drive device and a position adjustment device that can easily adjust the position of a workpiece such as a test head and can be made smaller. [Means for solving the problem]

[0006] A driving device according to one embodiment of the present invention comprises a reduction gear having an output section that receives power from a driving source and outputs rotational force, an arm attached to the output section for moving a workpiece, and a position adjustment device provided between the arm and the workpiece for adjusting the position of the workpiece relative to the arm, and when the reduction gear and the workpiece are aligned horizontally and viewed from above and below, a portion of the reduction gear and a portion of the position adjustment device overlap.

[0007] In this way, a position adjustment device is provided between the arm and the workpiece. Therefore, in order to adjust the position of the workpiece, it is no longer necessary to adjust the mounting position of the drive device itself or to directly adjust the position of the workpiece relative to the arm. Therefore, the position of the workpiece can be easily adjusted. When the reduction gear device and the workpiece are aligned horizontally and viewed from above, part of the reduction gear device overlaps part of the position adjustment device. This allows the length between the reduction gear device and the workpiece to be as short as possible. This reduces the moment acting on the reduction gear device and allows the drive unit to be made smaller.

[0008] In the above configuration, when the reduction gear device and the workpiece are aligned horizontally, the horizontal direction and the direction toward and away from the reduction gear device is defined as the X direction, the up and down direction is defined as the Z direction, and the direction perpendicular to the X direction and the Z direction is defined as the Y direction, the position adjustment device includes an X adjustment unit that adjusts the position of the workpiece in the X direction, a Y adjustment unit that adjusts the position of the workpiece in the Y direction, and a Z adjustment unit that adjusts the position of the workpiece in the Z direction, and the X adjustment unit, the Y adjustment unit, and the Z adjustment unit may be arranged in separate locations.

[0009] In the above configuration, the position adjustment device may be arranged in the order of the X adjustment unit, the Z adjustment unit, and the Y adjustment unit from the side closer to the reduction gear device toward the workpiece.

[0010] In the aforementioned configuration, the X adjustment unit and the Z adjustment unit may be arranged side by side on the same plane, the X adjustment unit and the Z adjustment unit may each have an operation unit for adjusting their position, and the operation units may be provided on the same plane.

[0011] A position adjustment device according to another aspect of the present invention comprises a first member, a second member, and a connecting member that connects the first member and the second member and adjusts the position of the second member relative to the first member, wherein the first member, the second member, and the connecting member have two guide portions that can slide the first member and the second member separately in two directions that intersect with each other.

[0012] With this configuration, the connecting member makes it easy to adjust the position of the second member relative to the first member. Each member has two guide parts that allow the first member and the second member to slide separately in two directions that intersect with each other, so adjusting one of the two directions does not affect the position of the other. This makes it possible to adjust the position of the second member relative to the first member easily and with high precision.

[0013] In the above configuration, the guide portion may include a plurality of oval guide holes formed in the first member and the second member, each extending along the direction of movement, a fixed female screw portion formed in the connecting member at a location leading to each of the guide holes, and a plurality of fixing bolts tightened to the fixed female screw portion through the guide holes.

[0014] In the above configuration, the guide portion may include a first guide convex portion provided on either the connecting member or the first member and extending along the movement direction, a first guide recess provided on the other of the connecting member or the first member and fitting into the first guide convex portion so as to be freely slidable, a second guide convex portion provided on either the connecting member or the second member and extending along the movement direction, a second guide recess provided on the other of the connecting member or the second member and fitting into the second guide convex portion so as to be freely slidable, and an adjustment portion that slides the first member and the second member.

[0015] In the above configuration, an auxiliary fixing portion may be provided that holds the connecting member and the first member with a certain gap therebetween, and also holds the connecting member and the second member with a certain gap therebetween.

[0016] In the above configuration, the auxiliary fixing portion has a pin portion, a male thread portion provided at one axial end of the pin portion and formed with a diameter smaller than the diameter of the pin portion via a step portion, and a head portion provided at the other axial end of the pin portion, the connecting member has a through hole into which the pin portion is inserted, the first member and the second member have auxiliary fixing female thread portions into which the male thread portion is tightened, and are provided with a washer arranged between the connecting member and the head, and the length of the pin portion is longer than the thickness of the connecting member plus the thickness of the washer.

[0017] In the above configuration, the first member and the second member each have a plurality of aligned guide holes, and the washer has a first washer having a plurality of first insertion holes formed therein and a second washer having a plurality of second insertion holes formed therein, and the plurality of first insertion holes may lead to the plurality of guide holes formed in the first member and have the fixing bolts inserted therein, and the plurality of second insertion holes may lead to the plurality of guide holes formed in the second member and have the fixing bolts inserted therein.

[0018] In the above configuration, the first member and the second member may be arranged side by side along their respective surfaces, the connecting member may be a block body, and the connecting member may be arranged facing in a direction parallel to the arrangement direction of the first member and the second member. [Effects of the Invention]

[0019] The above-described drive device and position adjustment device can easily adjust the position of the workpiece and can also reduce the size of the device. [Brief explanation of the drawings]

[0020] [Figure 1] FIG. 2 is a perspective view of a drive device according to the embodiment of the present invention. [Figure 2] FIG. 2 is an enlarged perspective view of an arm and a position adjustment device according to an embodiment of the present invention. [Figure 3] FIG. 2 is an exploded perspective view of the position adjustment device according to the embodiment of the present invention. [Figure 4] FIG. 2 is an exploded perspective view of the position adjustment device according to the embodiment of the present invention. [Figure 5] FIG. 2 is an enlarged perspective view of an arm and an attachment member according to the embodiment of the present invention. [Figure 6] FIG. 2 is a perspective view of a connecting member according to an embodiment of the present invention. [Figure 7] 1 is a partially transparent perspective view of a position adjustment device according to an embodiment of the present invention. [Figure 8] FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. 2. [Figure 9] FIG. 3 is a cross-sectional view of an X-direction adjustment bolt unit according to an embodiment of the present invention. [Figure 10] 3 is an enlarged plan view of the position adjustment device and its surroundings in the embodiment of the present invention, as viewed from the Z direction. FIG. [Figure 11] FIG. 11 is a view taken along the arrow XI in FIG. DETAILED DESCRIPTION OF THE INVENTION

[0021] Next, an embodiment of the present invention will be described with reference to the drawings.

[0022] <Drive unit> FIG. 1 is a perspective view of the drive device 1. FIG. 1, a driving device 1 is used in, for example, a probe device, which is an inspection device. The driving device 1 rotates a test head W (an example of a workpiece in the claims). The drive device 1 comprises a base 2, a motor 3 with a reducer supported on the base 2, an arm (an example of the arm, first member in the claims) 4 attached to the motor 3 with a reducer, and a position adjustment device 5 provided on the arm 4. In the following description, the vertical and horizontal directions refer to a state in which the drive device 1 is installed on a floor surface F.

[0023] The gantry 2 includes a gantry main body 6 placed on a floor surface F, and a plate-shaped support plate 7 protruding upward from the upper end of the gantry main body 6. An opening 7a is formed in the support plate 7. The motor 3 with a reducer is supported so that it can be inserted into the opening 7a. The motor with a reducer 3 includes an electric motor (an example of a drive source in the claims) 8, a drive transmission unit 9 connected to the electric motor 8, and a reduction gear 10 connected to the drive transmission unit 9. The motor with a reducer 3 has the electric motor 8 and the drive transmission unit 9 arranged on one side of a support plate 7, and the reduction gear 10 arranged on the other side.

[0024] The drive transmission unit 9 transmits the power of the electric motor 8 to the reduction gear 10. The drive transmission unit 9 is configured by, for example, a worm gear (not shown). The reduction gear 10 is, for example, an eccentric oscillating reduction gear. That is, the reduction gear 10 includes an internal gear 11 formed in a cylindrical shape and arranged coaxially, a carrier 12 rotatably mounted on the internal gear 11, a crankshaft (not shown) rotatably supported by the carrier 12, and an oscillating external gear (not shown) supported by the crankshaft for oscillating rotation and meshing with the internal gear 11. The outer diameter of the internal gear 11 is larger than the outer diameter of the carrier 12.

[0025] The reduction gear 10 is disposed so that the direction of the rotation axis A of the reduction gear 10 coincides with the thickness direction of the support plate 7. The carrier 12 and the drive transmission unit 9 of the reduction gear 10 are fixed to the support plate 7. In this way, the reduction geared motor 3 is supported on the support plate 7. When the power of the electric motor 8 is input to the reduction gear 10 via the drive transmission unit 9, the internal gear 11 is rotated relative to the carrier 12. The rotation of the internal gear 11 is output at a reduced speed relative to the rotation of the electric motor 8. In other words, the internal gear 11 functions as the output unit of the reduction gear 10. The arm 4 is attached to this output unit.

[0026] FIG. 2 is an enlarged perspective view of the arm 4 and the position adjustment device 5. As shown in FIG. As shown in Figures 1 and 2, the arm 4 is a plate-like member that is long in one direction (the vertical direction in Figure 2). An opening 4a is formed at a first longitudinal end 4d of the arm 4, into which the carrier 12 of the reduction gear 10 is inserted. The arm 4 is placed over the axial end face of the internal gear 11 with part of the carrier 12 inserted in the opening 4a. Therefore, the arm 4 is disposed parallel to the support plate 7. In other words, the thickness direction of the arm 4 coincides with the direction of the rotation axis A of the reduction gear 10.

[0027] Around the periphery of the opening 4a of the arm 4, bolt insertion holes (not shown) are formed, penetrating the arm 4 in the thickness direction. These bolt insertion holes are arranged at equal intervals in the circumferential direction. Female threads (not shown) are formed coaxially with the bolt insertion holes on the end surface of the internal gear 11 where the arm 4 overlaps. Arm bolts 13 are fastened to the female threads through the bolt insertion holes, respectively. This attaches the arm 4 to the internal gear 11. The arm 4 rotates integrally with the internal gear 11 around the rotation axis A. In the following description, the orientation in which the longitudinal direction of the arm 4 coincides with the up-down direction, i.e., the orientation in which the second end 4e of the arm 4 opposite the first end 4d faces upward, is referred to as the reference orientation of the arm 4.

[0028] In the standard position, the arm 4 is formed so that a first side 4b in the short side direction extends vertically. In the standard position, the arm 4 is formed so that a second side 4c opposite the first side 4b in the short side direction gradually slopes upward toward the first side 4b. In other words, the arm 4 is formed so as to taper from the first end 4d toward the second end 4e. A position adjustment device 5 is provided on the second end 4e side of the arm 4, on the first side 4b side. The second end 4e side of the arm 4, where the position adjustment device 5 is provided, constitutes a part of the position adjustment device 5.

[0029] Hereinafter, in the reference position of the arm 4, the horizontal direction and the short side direction of the arm 4 (plane direction of the arm 4) will be referred to as the X direction. In the reference position of the arm 4, the horizontal direction and the direction perpendicular to the X direction will be referred to as the Y direction. In the reference position of the arm 4, the up-down direction will be referred to as the Z direction. The X direction can also be said to be the horizontal direction approaching or moving away from the reduction gear 10.

[0030] <Position adjustment device> Fig. 3 is an exploded perspective view of the position adjustment device 5 as seen from the opposite side to the support plate 7 (the opposite side to the electric motor 8 and the drive transmission unit 9). Fig. 4 is an exploded perspective view of the position adjustment device 5 as seen from the support plate 7 side. 2 to 4, the position adjustment device 5 is provided at a position slightly offset in the X direction from directly above the reduction gear transmission 10. In addition to a part of the arm 4 on the side of the second end 4e, the position adjustment device 5 mainly comprises a mounting member 21 arranged alongside the arm 4 in the X direction, a connecting member 22 that connects the arm 4 and the mounting member 21, a fixing bolt (an example of an operating portion in the claims) 23 that maintains the connected state between the arm 4 and the connecting member 22, and the connected state between the mounting member 21 and the connecting member 22, and an auxiliary fixing bolt 24.

[0031] FIG. 5 is an enlarged perspective view of the arm 4 and the mounting member 21 as viewed from the support plate 7 side. 3 to 5, an X-direction guide recess 25 is formed on the first surface 4f of the arm 4 on the second end 4e side, facing the support plate 7. The X-direction guide recess 25 is formed in a rectangular shape that is long in the Z direction when viewed from the first surface 4f side. The X-direction guide recess 25 is open on the first side 4b of the arm 4. The X-direction guide recess 25 is formed with a plurality of arm-side X-direction guide holes 26 that penetrate through the X-direction guide recess 25 in the thickness direction.

[0032] For example, in this embodiment, the number of arm-side X-direction guide holes 26 is eight. The arm-side X-direction guide holes 26 are aligned in two rows in the X direction and four rows in the Z direction. The arm-side X-direction guide holes 26 are formed in an oval shape that is long in the X direction. Two arm auxiliary fixing female screw portions 27 are formed on each side in the Z direction of the arm-side X-direction guide hole 26 in the X-direction guide recess 25. Each arm auxiliary fixing female screw portion 27 is arranged so as to be aligned with the arm-side X-direction guide hole 26 in the Z direction.

[0033] The mounting member 21 is formed in an L-shape when viewed from the Z direction. More specifically, the mounting member 21 includes a plate-like first mounting plate (an example of the second member in the claims) 31 arranged to face the first side 4b of the arm 4 in the X direction, and a plate-like second mounting plate 32 extending long in the Y direction from the end of the first mounting plate 31 opposite the arm 4. The first mounting plate 31 is arranged side by side on the same plane as the arm 4. In other words, the thickness direction of the first mounting plate 31 is parallel to the thickness direction of the arm 4. The first mounting plate 31 is formed in a rectangular shape that is long in the Z direction when viewed from the Y direction.

[0034] A Z-direction guide recess 33 is formed in the first surface 31a of the first mounting plate 31 on the support plate 7 side. The Z-direction guide recess 33 is formed over the entire Z direction of the first mounting plate 31 when viewed from the first surface 31a side. In other words, the Z-direction guide recess 33 is open at both ends of the first mounting plate 31 in the Z direction. The Z-direction guide recess 33 is formed with a plurality of mounting-side Z-direction guide holes 34 that penetrate in the thickness direction.

[0035] For example, in this embodiment, there are eight attachment-side Z-direction guide holes 34. The attachment-side Z-direction guide holes 34 are aligned in two rows in the X direction and four rows in the Z direction. The attachment-side Z-direction guide holes 34 are formed in an oval shape that is long in the Z direction. The Z-direction guide recess 33 is formed with two auxiliary mounting fixing female screw portions 35 on each side in the Z direction of the mounting-side Z-direction guide hole 34. Each auxiliary mounting fixing female screw portion 35 is arranged so as to be aligned with the mounting-side Z-direction guide hole 34 in the Z direction.

[0036] The second mounting plate 32 extends from the first mounting plate 31 on the opposite side to the support plate 7. The thickness direction of the second mounting plate 32 coincides with the X direction. The second mounting plate 32 is formed with a plurality of Y-direction guide holes 36 that penetrate in the thickness direction. The Y-direction guide holes 36 are formed in an oval shape that is long in the Y direction. The Y-direction guide holes 36 are used to mount the test head W to the second mounting plate 32.

[0037] That is, the test head W is placed on the first surface 32a of the second mounting plate 32 opposite the first mounting plate 31 (reduction gear 10). Then, bolts (not shown) are inserted into each Y-direction guide hole 36 from the second surface 32b of the second mounting plate 32 on the first mounting plate 31 side (reduction gear 10 side). The test head W is attached to the second mounting plate 32 by fastening these bolts to the test head W. At this time, with the bolts temporarily fastened, the position of the test head W in the Y direction can be adjusted in the reference posture of the arm 4. The Y-direction guide hole 36 is formed in an oval shape that is long in the Y direction, and thus serves as a guide when moving the test head W in the Y direction. In this way, the second mounting plate 32 functions as a Y adjustment unit 100Y that adjusts the position of the test head W in the Y direction.

[0038] FIG. 6 is a perspective view of the connecting member 22. As shown in FIG. As shown in Figures 3, 4, and 6, the connecting member 22 is a block body that is square when viewed from the Y direction. More specifically, the connecting member 22 has a base plate 41 that is square and plate-shaped when viewed from the Y direction. The thickness direction of the base plate 41 coincides with the Y direction. The base plate 41 is arranged so as to overlap the first surface 4f of the arm 4 and the first surface 31a of the first mounting plate 31. Therefore, the base plate 41 is arranged parallel to the arm 4 and the first mounting plate 31. In other words, the base plate 41 is arranged facing in a direction parallel to the arrangement direction of the arm 4 and the first mounting plate 31.

[0039] The base plate 41 has a first surface 41b that overlaps with the first surface 4f of the arm 4 and the first surface 31a of the first mounting plate 31, a second surface 41c opposite the first surface 41b, and a side surface 41d that is perpendicular to the first surface 41b and the second surface 41c. A chamfered surface 41a is formed on the side surface 41d of the base plate 41 at the corner closest to the reduction gear 10 out of four corners. The chamfered surface 41a prevents contact between the base plate 41 and the reduction gear 10 when the base plate 41 is in position.

[0040] An X-direction guide protrusion 42 and a Z-direction guide protrusion 43 are integrally formed on the first surface 41b of the base plate 41. The X-direction guide protrusion 42 is located closer to the arm 4 than the center of the base plate 41 in the X direction. The X-direction guide protrusion 42 is formed in a rectangular parallelepiped shape to correspond to the X-direction guide recess 25. The X-direction guide protrusion 42 fits into the X-direction guide recess 25. The X-direction guide protrusion 42 is slidable in the X direction along the X-direction guide recess 25.

[0041] The X-direction guide protrusion 42 has a plurality of arm-fixing female screw portions 44 formed therein. The number of arm-fixing female screw portions 44 is the same as the number of arm-side X-direction guide holes 26. The arm-fixing female screw portions 44 are aligned so as to correspond to the positions of the arm-side X-direction guide holes 26. Each arm-fixing female screw portion 44 communicates with the corresponding arm-side X-direction guide hole 26.

[0042] The X-direction guide protrusion 42 is formed with two connecting-side X-direction guide holes (an example of the through holes in the claims) 45 on each side in the Z direction of the arm fixing female screw portion 44. The connecting-side X-direction guide holes 45 are formed in an oval shape that is long in the X direction and penetrate through in the thickness direction. The connecting-side X-direction guide holes 45 are arranged to correspond to the positions of the arm auxiliary fixing female screw portions 27. Each connecting-side X-direction guide hole 45 leads to a corresponding arm auxiliary fixing female screw portion 27.

[0043] The Z-direction guide protrusion 43 is positioned closer to the first mounting plate 31 than the center of the base plate 41 in the X direction. A tip surface 43a (end surface on the first mounting plate 31 side) of the Z-direction guide protrusion 43 and a tip surface 42a (end surface on the arm 4 side) of the X-direction guide protrusion 42 are on the same plane. The Z-direction guide protrusion 43 is formed in a rectangular parallelepiped shape to correspond to the Z-direction guide recess 33. The Z-direction guide protrusion 43 fits into the Z-direction guide recess 33. The Z-direction guide protrusion 43 is slidable in the Z direction along the Z-direction guide recess 33.

[0044] The Z-direction guide protrusion 43 has a plurality of female screw threads 46 formed therein. The number of female screw threads 46 is the same as the number of Z-direction mounting-side guide holes 34. The female screw threads 46 are aligned to correspond to the positions of the Z-direction mounting-side guide holes 34. Each female screw thread 46 communicates with the corresponding Z-direction mounting-side guide hole 34.

[0045] The X-direction guide protrusion 42 is formed with two connecting-side Z-direction guide holes (an example of through holes in the claims) 47 on each side in the Z direction of the mounting and fixing female screw portion 46. The connecting-side Z-direction guide holes 47 are formed in an oval shape that is long in the Z direction and penetrate through in the thickness direction. The connecting-side Z-direction guide holes 47 are arranged to correspond to the positions of the mounting auxiliary fixing female screw portions 35. Each connecting-side Z-direction guide hole 47 leads to one of the mounting auxiliary fixing female screw portions 35.

[0046] Fig. 7 is a partially see-through perspective view of the position adjustment device 5. The orientation of the perspective view in Fig. 7 is the same as that in Fig. 2. Fig. 8 is a cross-sectional view taken along line VIII-VIII in Fig. 2. As shown in FIGS. 2 to 4, 7 and 8, each fixing bolt 23 is inserted into the arm-side X-direction guide hole 26 and the attachment-side Z-direction guide hole 34, respectively.

[0047] Each fixing bolt 23 is inserted into the corresponding guide hole 26, 34 via a washer 51, 52 (arm-side X washer 51, mounting-side Z washer 52) from the second surface 4g of the arm 4 and the second surface 31b opposite the first surface 31a of the first mounting plate 31. Each fixing bolt 23 is then tightened into the arm fixing female thread portion 44 and the mounting fixing female thread portion 46 of the connecting member 22, respectively. This fixes the connecting member 22 to the arm 4 and the first mounting plate 31.

[0048] The washers 51, 52 are disposed between the arm 4 or the first mounting plate 31 and the head 23a of each fixing bolt 23. Of the washers 51, the arm-side X washer 51 is formed in a rectangular shape that is long in the Z direction when viewed from the Y direction so as to cover all of the arm-side X-direction guide holes 26 from the second surface 4g side. The arm-side X washer 51 has a plurality of insertion holes 51a (eight in this embodiment, for example). Each insertion hole 51a leads to a corresponding arm-side X-direction guide hole 26 and allows a fixing bolt 23 to be inserted therein.

[0049] Of the washers 51, the mounting-side Z washer 52 is formed in a rectangular shape that is long in the Z direction when viewed from the Y direction so as to cover all of the mounting-side Z-direction guide holes 34 from the second surface 31b side. The mounting-side Z washer 52 has a plurality of (e.g., eight in this embodiment) insertion holes 52a formed therein. Each insertion hole 52a communicates with a corresponding mounting-side Z-direction guide hole 34, and a fixing bolt 23 can be inserted therein.

[0050] The auxiliary fixing bolts 24 are inserted into the connecting-side X-direction guide holes 45 and the connecting-side Z-direction guide holes 47. The auxiliary fixing bolts 24 are so-called shoulder bolts. The auxiliary fixing bolts 24 are integrally formed with a pin portion 24a, a male thread portion 24b formed at one axial end of the pin portion 24a, and a head portion 24c formed at the other axial end of the pin portion 24a. The male thread portion 24b is formed so that its diameter is smaller than that of the pin portion 24a via a step portion 24d.

[0051] Each auxiliary fixing bolt 24 is inserted into the corresponding guide hole 45, 47 via a washer 53, 54 (connection-side X washer 53, connection-side Z washer 54) from the second surface 41c side of the base plate 41. The male thread portion 24b of each auxiliary fixing bolt 24 is tightened into the arm auxiliary fixing female thread portion 27 and the mounting auxiliary fixing female thread portion 35 of the arm 4, respectively.

[0052] That is, each washer 53, 54 is disposed between the connecting member 22 and the head 24c of each auxiliary fixing bolt 24. Of the washers 53, 54, the connecting-side X washer 53 is formed in a rectangular shape that is long in the X direction when viewed from the Y direction so as to cover the two connecting-side X-direction guide holes 45 that are aligned in the X direction. That is, there is one connecting-side X washer 53 on the top and one on the bottom. Two through holes 53a are formed in the connecting-side X washer 53. The two through holes 53a communicate with the corresponding connecting-side X-direction guide holes 45 and allow the pin portions 24a of the auxiliary fixing bolts 24 to be inserted therein.

[0053] Of the washers 53, 54, the connecting-side Z washer 54 is formed in a rectangular shape that is long in the X direction when viewed from the Y direction so as to cover the two connecting-side Z-direction guide holes 47 that are aligned in the X direction. That is, one connecting-side Z washer 54 is provided on the top and one on the bottom. Two through holes 53a are formed in the connecting-side Z washer 54. The two through holes 53a communicate with the corresponding connecting-side Z-direction guide holes 47 and allow the pin portion 24a of the auxiliary fixing bolt 24 to be inserted therein.

[0054] Here, the length L1 of the pin portion 24a of the auxiliary fixing bolt 24 is slightly longer than the thickness T1 of the connecting member 22 plus the thickness T2 of each washer 53, 54. The thickness T1 of the connecting member 22 is the thickness of the base plate 41 plus the thickness of the X-direction guide protrusion 42 or the Z-direction guide protrusion 43. Therefore, when the auxiliary fixing bolt 24 is fully tightened into each auxiliary fixing female thread portion 27, 35, a slight gap is created between the X-direction guide recess 25 or the Z-direction guide recess 33 and the head 24c of the auxiliary fixing bolt 24.

[0055] In other words, even when the auxiliary fixing bolt 24 is fully tightened to the arm 4 or the first mounting plate 31, the connecting member 22 will have some rattle relative to the arm 4 or the first mounting plate 31. The fully tightened state of the auxiliary fixing bolt 24 means that it is tightened until the stepped portion 24d of the auxiliary fixing bolt 24 abuts against the X-direction guide recess 25 or the Z-direction guide recess 33. The size of the gap is, for example, about 40 μm.

[0056] In addition, an auxiliary plate 55 is fixed to the second surface 41c of the base plate 41 at a central position avoiding the washers 53, 54 by a plurality of bolts 56 (for example, four in this embodiment). The auxiliary plate 55 is formed in a square shape when viewed from the Y direction. The four corners of the auxiliary plate 55 are fixed by the bolts 56. The thickness of the auxiliary plate 55 is greater than the thickness of the washers 53, 54.

[0057] The second surface 41c of the base plate 41 is covered with a cover 57 from above the auxiliary plate 55, the washers 53 and 54, and the head 24c of the auxiliary fixing bolt 24. The cover 57 has an opening 57a on the base plate 41 side and is formed in a square box shape to correspond to the shape of the base plate 41. That is, the cover 57 has a square top plate 57b and four side plates 57c that rise from the edges of the four sides of the top plate 57b.

[0058] The side plate 57c covers the side surface 41d of the base plate 41. The side plate 57c is fixed to the side surface 41d of the base plate 41 with bolts (not shown). Of the pair of side walls 57c facing each other in the X direction, the side wall 57c on the side of the reduction gear 10 has a recess 57d formed in the center in the Z direction to avoid interference with an X-direction adjustment bolt unit 61 (described later), and the recess 57d is formed in a semicircular shape.

[0059] FIG. 9 is a cross-sectional view of the X-direction adjustment bolt unit 61. As shown in FIG. 2 to 4, 6, 7, and 9, a female screw portion 41e is formed in the center in the Z direction on the side 41d of the base plate 41 that faces the reduction gear 10, out of a pair of side surfaces 41d that face each other in the X direction. An X-direction adjustment bolt unit 61 is attached to the female screw portion 41e. The X-direction adjustment bolt unit 61 mainly comprises a rectangular parallelepiped support block 62 and an adjustment bolt 69 rotatably supported by the support block 62 .

[0060] The support block 62 is attached to the first surface 4f of the arm 4. Two bolt insertion holes 62a into which the bolts 60 are inserted are formed in the support block 62. A female screw portion 14 (see FIG. 5) into which the bolts 60 are fastened is formed in the first surface 4f of the arm 4. The support block 62 is attached to the first surface 4f of the arm 4 by fastening the bolts 60 inserted into the bolt insertion holes 62a into the female screw portion 14.

[0061] A through hole 62b is formed in the support block 62 between the two bolt insertion holes 62a. The axial direction of the through hole 62b is perpendicular to the axial direction of each of the bolt insertion holes 62a. When the support block 62 is attached to the arm 4, the through hole 62b and the female thread portion 41e of the base plate 41 are positioned coaxially. Flanged collars 63 are inserted into the through hole 62b from both axial sides.

[0062] The flanged collar 63 is formed integrally with a cylindrical portion 64 that is inserted into the through-hole 62b and an outer flange portion 65 that protrudes radially outward from the axial end of the cylindrical portion 64. An adjustment bolt 69 is inserted into the cylindrical portion 64. When the two cylindrical portions 64 are inserted into the through-hole 62b, their tips on the opposite side from the outer flange portion 65 butt against each other. In this butted state, a small gap is formed between the surface of the support block 62 and the outer flange portion 65.

[0063] The adjustment bolt 69 has a male thread portion 66 that is inserted into the cylindrical portion 64, and a head portion 67 that is integrally formed with one axial end of the male thread portion 66. Such an adjustment bolt 69 is inserted into the through hole 62b of the support block 62, and then tightened into the female thread portion 41e of the base plate 41. A recess 57d is formed in the cover 57 to avoid interference with the male thread portion 66 that is tightened into the female thread portion 41e in this manner.

[0064] Two nuts 68a, 68b (a first nut 68a and a second nut 68b) are attached to the male thread portion 66 between the support block 62 and the base plate 41. Of the two nuts 68a, 68b, the first nut 68a on the support block 62 side is tightened so that it abuts against the outer flange portion 65 of the flanged collar 63. As a result, the two flanged collars 63 are sandwiched between the first nut 68a and the head 67 of the adjustment bolt 69.

[0065] With the tips of the cylindrical portions 64 of the two flanged collars 63 butting against each other, a small gap is formed between the surface of the support block 62 and the outer flange portion 65. As a result, the adjustment bolt 69 is rotatably supported by the support block 62. Of the two nuts 68a, 68b, the second nut 68b on the base plate 41 side is used to maintain the tightened state of the male thread portion 66 to the base plate 41 (details will be described later).

[0066] A Z-direction adjustment bolt unit 71 is attached to the lower end of the connecting member 22 and the lower end of the first mounting plate 31 so as to straddle the connecting member 22 and the first mounting plate 31. The basic configuration of the Z-direction adjustment bolt unit 71 is the same as that of the aforementioned X-direction adjustment bolt unit 61. That is, the Z-direction adjustment bolt unit 71 includes a support block 72, an adjustment bolt 74 rotatably supported on the support block 72 via two flanged collars 73, and two nuts 76a, 76b (a first nut 76a and a second nut 76b) attached to a male thread portion 75 of the adjustment bolt 74.

[0067] The support block 72 is attached to the lower end of the Z-direction guide protrusion 43 of the connecting member 22. The support block 72 is formed in an L-shape when viewed from the X direction. This allows the male thread portion 75 of the adjustment bolt 74 to be tightened into a female thread portion (not shown) formed on the lower end of the first mounting plate 31. Two nuts 76a, 76b attached to the male thread portion 75 are disposed between the support block 72 and the first mounting plate 31.

[0068] Of the two nuts 76a, 76b, the first nut 76a on the support block 72 side and the head 76 of the adjustment bolt 74 sandwich the two flanged collars 73. Therefore, the adjustment bolt 74 is rotatably supported by the support block 72. Of the two nuts 76a, 76b, the second nut 76b on the first mounting plate 31 side is used to maintain the tightened state of the male thread portion 75 to the first mounting plate 31 (details will be described later).

[0069] <Positional relationship between the position adjustment device and the reduction gear> Next, the positional relationship between the position adjustment device 5 and the reduction gear transmission 10 will be described with reference to FIGS. FIG. 10 is an enlarged plan view of the position adjustment device 5 and its surroundings in the drive device 1, as viewed from the Z direction. 2 and 10, in the reference position of the arm 4, the reduction gear 10 and the second mounting plate 32 face each other in the X direction. Since the test head W is attached to the second mounting plate 32, in the reference position of the arm 4, the reduction gear 10 and the test head W are aligned in the X direction (horizontal direction).

[0070] In such a reference posture of the arm 4, when viewed from the Z direction, a part of the reduction gear 10 overlaps with a part of the position adjustment device 5. Specifically, when viewed from the Z direction, of the position adjustment device 5, the X-direction guide protrusion 42 of the connecting member 22, the X-direction adjustment bolt unit 61, and the periphery thereof overlap with a part of the reduction gear 10.

[0071] <Function of the position adjustment device> Next, the operation of the position adjustment device 5 will be described. In addition to adjusting the position of the test head W in the Y direction using the second mounting plate 32, the position adjustment device 5 also adjusts the position of the test head W in the X direction and the Z direction (hereinafter simply referred to as X direction position adjustment and Y direction position adjustment).

[0072] First, the position adjustment in the X direction by the position adjustment device 5 will be described. To adjust the position in the X direction, the fixing bolt 23, which is fastened to the X-direction guide protrusion 42 of the connecting member 22 via the arm 4, is loosened. At this time, the arm 4 and the connecting member 22 are fastened by the auxiliary fixing bolt 24 to the extent that there is some rattle. Therefore, even when the fixing bolt 23 is loosened, the posture of the arm 4 and the connecting member 22 does not change significantly from the posture when the fixing bolt 23 is fully fastened. The posture of the arm 4 and the connecting member 22 is maintained within a certain range. Furthermore, the connecting-side X-direction guide hole 45, into which the auxiliary fixing bolt 24 is inserted, is formed in an oval shape that is long in the X direction. Therefore, the arm 4 and the connecting member 22 can slide in the X direction relative to the arm 4 while maintaining their posture within a certain range. In other words, the connecting-side X-direction guide hole 45, the X-direction guide protrusion 42, and the X-direction guide recess 25 into which the X-direction guide protrusion 42 is fitted guide the sliding of the connecting member 22 in the X direction relative to the arm 4.

[0073] In this state, the adjustment bolt 69 of the X-direction adjustment bolt unit 61 is turned. This causes the male thread portion 66 of the adjustment bolt 69 to be pushed into or pulled out of the female thread portion 41e formed in the base plate 41 of the connecting member 22. At this time, the adjustment bolt 69 is rotatably supported by the support block 62. Therefore, turning the adjustment bolt 69 results in the connecting member 22 sliding in the X direction relative to the arm 4.

[0074] Since mounting member 21 is fixed to connecting member 22, position adjustment in the X direction is performed. Thereafter, fixing bolt 23 is tightened into X-direction guide protrusion 42 of connecting member 22, thereby completing the X-direction position adjustment. In this manner, X-direction guide protrusion 42 of connecting member 22, part of arm 4 (X-direction guide recess 25, etc.), fixing bolt 23, auxiliary fixing bolt 24, and X-direction adjustment bolt unit 61 function as X adjustment unit 100X that adjusts the position of test head W in the X direction. Fixing bolt 23 tightened into X-direction guide protrusion 42 functions as an operation unit that adjusts the position of X adjustment unit 100X.

[0075] Here, the posture of the arm 4 and the connecting member 22 is maintained within a certain range by the auxiliary fixing bolt 24. This makes it possible to suppress changes in the posture (misalignment) of the connecting member 22 when the fixing bolt 23 is tightened from a loosened state. In this way, the posture of the first mounting plate 31 and the connecting member 22 being within a certain range means that the change in the posture of the connecting member 22 when the fixing bolt 23 is tightened from a loosened state is within a certain numerical value.

[0076] The fixing bolt 23 is fastened to the X-direction guide protrusion 42 via the arm-side X washer 51. The arm-side X washer 51 is formed in a rectangular shape that is long in the Z direction when viewed from the Y direction so as to cover all of the arm-side X-direction guide holes 26 from the second surface 4g side. This prevents the head 23a of the fixing bolt 23 from being locally pressed against the second surface 4g of the arm 4. This reduces the surface pressure of the fixing bolt 23 on the arm 4.

[0077] Next, the position adjustment in the Z direction by the position adjustment device 5 will be described. To adjust the position in the Z direction, the fixing bolt 23 that is fastened to the Z-direction guide protrusion 43 of the connecting member 22 via the first mounting plate 31 is loosened. At this time, the first mounting plate 31 and the connecting member 22 are fixed by the auxiliary fixing bolt 24 to the extent that there is some rattle. Furthermore, the connecting-side Z-direction guide hole 47 into which the auxiliary fixing bolt 24 is inserted is formed in an oval shape that is long in the Z direction. Therefore, even if the fixing bolt 23 is loosened, the first mounting plate 31 can slide in the Z direction relative to the connecting member 22 while maintaining the attitudes of the first mounting plate 31 and the connecting member 22 within a certain range. In other words, the connecting-side Z-direction guide hole 47, the Z-direction guide protrusion 43, and the Z-direction guide recess 33 into which the Z-direction guide protrusion 43 is fitted guide the sliding of the first mounting plate 31 in the Z direction relative to the connecting member 22.

[0078] In this state, the adjustment bolt 74 of the Z-direction adjustment bolt unit 71 is turned. The operation of the Z-direction adjustment bolt unit 71 is the same as that of the X-direction adjustment bolt unit 61 described above. That is, by turning the adjustment bolt 74, the first mounting plate 31 slides in the Z direction relative to the connecting member 22, and the position in the Z direction is adjusted. Thereafter, the fixing bolt 23 is tightened into the Z-direction guide protrusion 43 of the connecting member 22, thereby completing the position adjustment in the Z direction.

[0079] In this way, the Z-direction guide protrusion 43 of the connecting member 22, the first mounting plate 31, the fixing bolt 23, the auxiliary fixing bolt 24, and the Z-direction adjustment bolt unit 71 function as a Z adjustment unit 100Z that adjusts the Z-direction position of the test head W. The fixing bolt 23 tightened to the Z-direction guide protrusion 43 functions as an operating unit that adjusts the position of the Z adjustment unit 100Z.

[0080] Here, the posture of the first mounting plate 31 and the connecting member 22 is maintained within a certain range by the auxiliary fixing bolt 24. Therefore, it is possible to suppress a change in posture (misalignment) of the connecting member 22 when the fixing bolt 23 is tightened from a loosened state. The fixing bolt 23 is fastened to the Z-direction guide protrusion 43 via the mounting-side Z washer 52. The mounting-side Z washer 52 is formed in a rectangular shape that is long in the Z direction when viewed from the Y direction so as to cover all of the mounting-side Z-direction guide holes 34 from the second surface 31b side. This prevents the head 23a of the fixing bolt 23 from being pressed locally against the second surface 31b of the first mounting plate 31. This reduces the surface pressure that the fixing bolt 23 exerts on the first mounting plate 31.

[0081] The fixing bolts 23 are inserted into the corresponding guide holes 26, 34 from the second surface 4g of the arm 4 and the second surface 31b of the first mounting plate 31, which face the same direction. In this way, the fixing bolts 23 are provided on the same surface.

[0082] <Operation of the drive unit> Next, the operation of the driving device 1 will be described with reference to FIG. FIG. 11 is a view taken along the arrow XI in FIG. As shown in Fig. 11, when the electric motor 8 is driven by driving the motor 3 with a speed reducer, a rotational force is transmitted to the arm 4 via the speed reducer 10. As a result, the arm 4 is rotated around the rotation axis A (see arrow M1 in Fig. 11). As the arm 4 rotates, the mounting member 21 to which the test head W is attached moves up and down in a rotating manner (see arrow M2 in Fig. 11). As a result, for example, the test head W can be moved closer to or farther away from the test object.

[0083] Here, in the reference posture of the arm 4, the reduction gear 10 and the test head W (second mounting plate 32) are aligned in the X direction (horizontal direction), and when viewed from the Z direction, a part of the reduction gear 10 overlaps a part of the position adjustment device 5. By configuring in this manner, the reduction gear 10 and the test head W (second mounting plate 32) can be aligned in the X direction (horizontal direction), while the distance L2 between the reduction gear 10 (rotation axis A) and the test head W (second mounting plate 32) can be made as short as possible.

[0084] 11, for example, suppose the reduction gear 10 and the test head W (second mounting plate 32) are aligned in the X direction (horizontal direction), and the position adjustment device 5 is disposed between the reduction gear 10 and the test head W. In such a case, the distance L3 between the reduction gear 10 (rotation axis A) and the test head W (second mounting plate 32) becomes longer than the distance L2.

[0085] <Actions and Effects> Therefore, with the above-described driving device 1, the distance L2 between the reduction gear 10 (rotation axis A) and the test head W (second mounting plate 32) can be made as short as possible even if the position adjustment device 5 is provided between the arm 4 and the second mounting plate 32. This reduces the moment acting on the reduction gear 10, allowing the driving device 1 to be made smaller. The drive device 1 has a position adjustment device 5 provided between the arm 4 and the second mounting plate 32. Therefore, in order to adjust the position of the test head W, it is no longer necessary to adjust the mounting position of the drive device 1 itself or to directly adjust the position of the test head W relative to the arm 4. This makes it easy to adjust the position of the test head W.

[0086] The position adjustment device 5 includes an X adjustment unit 100X, a Y adjustment unit 100Y, and a Z adjustment unit 100Z. These adjustment units 100X, 100Y, and 100Z are located in different locations. This allows the test head W to be adjusted in the X, Y, and Z directions separately. In other words, adjusting the test head W in any of the X, Y, and Z directions does not affect the position in the other directions. This allows the position of the test head W to be adjusted easily and with high precision.

[0087] The position adjustment device 5 is arranged in the order of X adjustment unit 100X, Z adjustment unit 100Z, and Y adjustment unit 100Y, moving from the side closer to the reduction gear device 10 to the side closer to the test head W. This allows the arrangement space for each of the adjustment units 100X, 100Y, and 100Z to be made as small as possible.

[0088] For example, suppose the Z adjustment unit 100Z is located closest to the reduction gear 10. In this case, if the reduction gear 10 and the position adjustment unit 5 are located so that part of them overlap when viewed from the Z direction, there is a possibility that they may come into contact with the reduction gear 10 as the position adjustment unit 5 moves up and down. For this reason, it is necessary to either locate the position adjustment unit 5 at a sufficient distance above the reduction gear 10, or to locate the reduction gear 10 and the position adjustment unit 5 side by side in the X direction. In this case, the subsequent X adjustment unit 100X would be located further away from the reduction gear 10, which would increase the size of the position adjustment unit 5. For this reason, by arranging the X adjustment unit 100X, the Z adjustment unit 100Z, and the Y adjustment unit 100Y in this order from the reduction gear 10 toward the test head W, the position adjustment unit 5 can be made smaller, and ultimately the drive unit 1 can be made smaller.

[0089] Of position adjustment device 5, X adjustment unit 100X and Z adjustment unit 100Z are arranged side by side on the same plane (XZ plane). Fixing bolts 23 for adjusting these adjustment units 100X, 100Z are arranged on the same plane (second surface 4g of arm 4 and second surface 31b of first mounting plate 31). In this way, fixing bolts 23 are provided together on the same plane, which improves the operability of X adjustment unit 100X and Z adjustment unit 100Z.

[0090] The position adjustment device 5 includes a portion of the arm 4, a first mounting plate 31, and a connecting member 22 that connects the arm 4 and the first mounting plate 31. The arm 4, first mounting plate 31, and connecting member 22 are provided with guide protrusions 42, 43 and guide recesses 25, 33 that are slidable in the X and Z directions, which intersect with each other. This makes it easy to adjust the position of the first mounting plate 31 relative to the arm 4 using the connecting member 22. Adjusting one of the X and Z directions does not affect the position of the other. This allows the position of the first mounting plate 31 relative to the arm 4 to be adjusted easily and with high precision.

[0091] The arm 4 has a plurality of arm-side X-direction guide holes 26 formed along the X direction. The first mounting plate 31 has a plurality of mounting-side Z-direction guide holes 34 formed along the Z direction. Each fixing bolt 23 is fastened to the connecting member 22 via these guide holes 26, 34. Therefore, the guide holes 26, 34 can restrict the movement directions of the arm 4 and the first mounting plate 31. Therefore, the arm 4 and the first mounting plate 31 can be easily moved in the X direction and the Z direction relative to the connecting member 22, and the position of the test head W can be easily adjusted.

[0092] X adjustment unit 100X has an X-direction guide protrusion 42 and an X-direction guide recess 25 to restrict the movement direction in the X direction. X adjustment unit 100X has an X-direction adjustment bolt unit 61 (adjustment bolt 69) as an adjustment unit for adjusting the position in the X direction. Z adjustment unit 100Z has a Z-direction guide protrusion 43 and a Z-direction guide recess 33 to restrict the movement direction in the Z direction. Z adjustment unit 100Z has a Z-direction adjustment bolt unit 71 (adjustment bolt 74) as an adjustment unit for adjusting the position in the Z direction. This allows for precise control of the movement direction of the arm 4 and the first mounting plate 31 relative to the connecting member 22. This allows for highly accurate position adjustment of the test head W. By simply turning the adjustment bolts 69 and 74 of the adjustment bolt units 61 and 71, the relative positions of the test head W can be easily and finely adjusted.

[0093] The position adjustment device 5 includes an auxiliary fixing bolt 24 as an auxiliary fixing part. The auxiliary fixing part holds the connecting member 22 in a state where it is slightly loose relative to the arm 4 and the first mounting plate 31. Therefore, even if the fixing bolt 23 is loosened, the connecting member 22 can slide in the X direction relative to the arm 4 while the postures of the arm 4 and the connecting member 22 are maintained within a certain range. Furthermore, even if the fixing bolt 23 is loosened, the first mounting plate 31 can slide in the Z direction relative to the connecting member 22 while the postures of the first mounting plate 31 and the connecting member 22 are maintained within a certain range. As a result, it is possible to suppress changes in the posture (positional deviation) of the connecting member 22 when the fixing bolt 23 is tightened from a loosened state. This makes it possible to adjust the position of the test head W more easily and with higher precision.

[0094] As described above, in order to hold the connecting member 22 with some play, the auxiliary fixing bolt 24 is composed of a pin portion 24a and male thread portions 24b and head portion 24c formed on both axial ends of the pin portion 24a. The length L1 of the pin portion 24a is slightly longer than the thickness T1 of the connecting member 22 plus the thickness T2 of each washer 53, 54. Therefore, when the auxiliary fixing bolt 24 is tightened until the stepped portion 24d of the auxiliary fixing bolt 24 abuts against the X-direction guide recess 25 or the Z-direction guide recess 33, a slight gap is generated between the X-direction guide recess 25 or the Z-direction guide recess 33 and the head portion 24c of the auxiliary fixing bolt 24. Therefore, even if the fixing bolt 23 is loosened, the orientation of the arm 4 and the first mounting plate 31 relative to the connecting member 22 can be reliably maintained within a certain range.

[0095] The fixing bolt 23 is fastened to the connecting member 22 via an arm-side X washer 51 and an attachment-side Z washer 52. The arm-side X washer 51 is formed in a rectangular shape that is long in the Z direction when viewed from the Y direction so as to cover all of the arm-side X-direction guide holes 26 from the second surface 4g side. The attachment-side Z washer 52 is formed in a rectangular shape that is long in the Z direction when viewed from the Y direction so as to cover all of the attachment-side Z-direction guide holes 34 from the second surface 31b side. This prevents the head 23a of the fixing bolt 23 from being locally pressed against the second surface 4g of the arm 4 or the second surface 31b of the first attachment plate 31. This reduces the surface pressure that the fixing bolt 23 applies to the arm 4 and the first attachment plate 31, preventing damage to the arm 4 and the first attachment plate 31.

[0096] The arm 4 and the first mounting plate 31 are arranged side by side on the same plane. The connecting member 22 (base plate 41) is arranged facing in a direction parallel to the arrangement direction of the arm 4 and the first mounting plate 31. This allows the position adjustment device 5 to be made thinner than when the arm 4 and the first mounting plate 31 are arranged overlapping in the thickness direction.

[0097] The present invention is not limited to the above-described embodiment, and includes various modifications to the above-described embodiment without departing from the spirit of the present invention. For example, in the above embodiment, the driving device 1 has been described as being used in a probe device, which is an inspection device, for example. The driving device 1 has been described as being used to rotate a test head W as a workpiece. However, the present invention is not limited to this, and the driving device 1 can be applied to devices that drive various workpieces.

[0098] In the above embodiment, the driving device 1 has been described as including the position adjustment device 5. The position adjustment device 5 has been described as including the X adjustment unit 100X, the Z adjustment unit 100Z, and the Y adjustment unit 100Y. However, this is not limited thereto, and the position adjustment device 5 may be configured to adjust the position of the workpiece. When viewed from the Z direction in the reference posture of the arm 4, it is sufficient that a portion of the reduction gear 10 and a portion of the position adjustment device 5 overlap.

[0099] The position adjustment device 5 preferably includes a guide portion that is slidable in at least two directions that intersect with each other. In the above-described embodiment, the guide portions are formed as the X-direction guide protrusions 42, the X-direction guide recesses 25, and the arm-side X-direction guide holes 26, and the Z-direction guide protrusions 43, the Z-direction guide recesses 33, and the attachment-side Z-direction guide holes 34. However, the present invention is not limited to this, and the guide portions may have a structure that restricts the movement of the connecting member 22 in two directions relative to the arm 4 and the first attachment plate 31.

[0100] In the above embodiment, the X-direction guide recess 25 is formed in the arm 4, the Z-direction guide recess 33 is formed in the first mounting plate 31, and the X-direction guide protrusion 42 and the Z-direction guide protrusion 43 are formed to fit into the corresponding guide recesses 25, 33 on the connecting member 22. However, this is not limited to this, and it is sufficient to form the X-direction guide recess 25 on either the arm 4 or the connecting member 22, and the X-direction guide protrusion 42 on the other. It is sufficient to form the Z-direction guide recess 33 on either the arm 4 or the connecting member 22, and the Z-direction guide protrusion 43 on the other.

[0101] In the above embodiment, the position adjustment device 5 is described as being arranged in the order of X adjustment unit 100X, Z adjustment unit 100Z, and Y adjustment unit 100Y, moving from the side closer to the reduction gear device 10 toward the test head W. However, this is not limiting, and the arrangement order of X adjustment unit 100X, Z adjustment unit 100Z, and Y adjustment unit 100Y may be determined arbitrarily.

[0102] In the above-described embodiment, the case where fixing bolt 23 is used as the operating part of X adjustment unit 100X and Z adjustment unit 100Z has been described. However, this is not limited to this, and the operating part of X adjustment unit 100X may be any part that can fix and release arm 4 and connecting member 22 together. The operating part of Z adjustment unit 100Z may be any part that can fix and release first mounting plate 31 and connecting member 22 together. For example, a so-called lock lever or the like may be used instead of fixing bolt 23.

[0103] In the above embodiment, the position adjustment device 5 has been described as including the auxiliary fixing bolt 24 as an auxiliary fixing part to hold the connecting member 22 with some play. The auxiliary fixing bolt 24 has been described as including a pin portion 24a, a male thread portion 24b formed at one axial end of the pin portion 24a, and a head portion 24c formed at the other axial end of the pin portion 24a. However, this is not limited to this, and the auxiliary fixing part may be any part that can hold the connecting member 22 with some play. For example, a pin may be used as the auxiliary fixing part instead of the auxiliary fixing bolt 24. A bolt consisting only of a male thread portion and a head may be used instead of the auxiliary fixing bolt 24.

[0104] In the above embodiment, the size of the gap that occurs between the X-direction guide recess 25 or the Z-direction guide recess 33 and the head 24c of the auxiliary fixing bolt 24 when the auxiliary fixing bolt 24 is fully tightened into each auxiliary fixing female thread portion 27, 35 is, for example, about 40 μm. However, this is not limited to this, and the size of the gap may be any size that allows the auxiliary fixing bolt (auxiliary fixing portion) 24 to maintain the orientation of the arm 4 and the first mounting plate 31 relative to the connecting member 22 within a certain range.

[0105] In the above embodiment, the electric motor 8 is used as the drive source of the drive device 1. However, this is not limiting, and various drive sources that output power to the reduction gear transmission 10 can be used instead of the electric motor 8. For example, a hydraulic motor or the like can be used instead of the electric motor 8.

[0106] In the above embodiment, the reduction gear 10 has been described as, for example, an eccentric oscillating reduction gear. The internal gear 11 functions as the output part of the reduction gear 10. However, this is not limited to this, and it is also possible to fix the internal gear 11 to the support plate 7 and have the carrier 12 function as the output part. The reduction gear 10 can use various reduction gears instead of the eccentric oscillating reduction gear. All that is required is to attach the arm 4 to the output part of the reduction gear.

[0107] In the above embodiment, the position adjustment device 5 has been described as including the X-direction adjustment bolt unit 61 as an adjustment unit for adjusting the position in the X direction. The position adjustment device 5 has been described as including the Z-direction adjustment bolt unit 71 as an adjustment unit for adjusting the position in the Z direction. However, this is not limited to this, and any device may be used as long as it can slide the connecting member 22 relative to the arm 4 and slide the first mounting plate 31 relative to the connecting member 22. For example, a pinion and rack may be used instead of the adjustment bolt units 61 and 71. The connecting member 22 and the first mounting plate 31 can be slid by rotating the pinion to slide the rack.

[0108] In the above embodiment, the Y adjustment unit 100Y is configured by forming the Y-direction guide hole 36 in the second mounting plate 32. However, this is not limited to this, and the same configuration as the X adjustment unit 100X or the Z adjustment unit 100Z can also be applied to the Y adjustment unit 100Y. It is also possible to provide the configuration of the Y adjustment unit 100Y to the connecting member 22.

[0109] In the above embodiment, the mounting member 21 is described as being formed by the first mounting plate 31 and the second mounting plate 32 in an L-shape when viewed from the Z direction. However, this is not limited to this, and the second mounting plate 32 can extend in any direction. For example, it does not have to extend in a direction perpendicular to the X direction and the Z direction. Even when the mounting member 21 extends in the Y direction, the mounting member 21 may be formed, for example, in a T-shape when viewed from the Z direction.

[0110] Among the embodiments disclosed in this specification, those that are comprised of multiple objects may be integrated, and conversely, those that are comprised of a single object may be separated into multiple objects. Regardless of whether they are integrated, it is sufficient that they are configured to achieve the object of the invention. [Explanation of symbols]

[0111] 1...Driver 4...Arm (first member, second member) 5...Position adjustment device 8...Electric motor (drive source) 10…Reduction device 11...Internal gear (output part) 12...Carrier (output section) 21... Mounting member (first member, second member) 22...Connecting member 23...Fixing bolt (operating part) 24...Auxiliary fixing bolt (auxiliary fixing part) 24a...Pin part 24b…Male thread part 24c…Head 25...X-direction guide recess (guide part, first guide recess, second guide recess) 26...Arm-side X-direction guide hole (guide portion, first guide recess, second guide recess) 27...Auxiliary female screw part for fixing the arm (auxiliary female screw part for fixing the arm) 31...First mounting plate (first member, second member) 33... Z-direction guide recess (guide portion, first guide recess, second guide recess) 34... Mounting side Z-direction guide hole (guide part, guide hole) 35...Auxiliary fixing female screw part (auxiliary fixing female screw part) 42...X-direction guide protrusions (guide portion, first guide protrusion, second guide protrusion) 43... Z-direction guide protrusions (guide portion, first guide protrusion, second guide protrusion) 44...Female threaded arm fixing part (female threaded arm fixing part) 45...Connecting side X-direction guide hole (through hole) 46...Fixed female screw part (Fixed female screw part) 47... Z-direction guide hole (through hole) on connecting side 51...Arm side X washer (washer, first washer, second washer) 51a...insertion hole 52... Mounting side Z washer (washer, first washer, second washer) 52a...insertion hole 61...X-direction adjustment bolt unit (adjustment part) 69...Adjustment bolt (adjustment part) 71...Z-direction adjustment bolt unit (adjustment part) 74...Adjustment bolt (adjustment part) 100X…X adjustment section 100Y…Y adjustment section 100Z…Z adjustment section

Claims

1. a reduction gear transmission having an output section that receives power from a drive source and outputs rotational force; an arm attached to the output unit for moving a workpiece; a position adjustment device provided between the arm and the workpiece and configured to adjust the position of the workpiece relative to the arm; Equipped with When the reduction gear device and the workpiece are aligned horizontally and viewed from above, a portion of the reduction gear device and a portion of the position adjustment device overlap. Drive unit.

2. When the reduction gear device and the workpiece are aligned horizontally, the horizontal direction and the direction approaching and moving away from the reduction gear device are defined as the X direction, the vertical direction is defined as the Z direction, and the direction perpendicular to the X direction and the Z direction is defined as the Y direction. The position adjustment device is an X adjustment unit that adjusts the position of the workpiece in the X direction; a Y adjustment unit that adjusts the position of the workpiece in the Y direction; a Z adjustment unit that adjusts the position of the workpiece in the Z direction; Equipped with The X adjustment unit, the Y adjustment unit, and the Z adjustment unit are disposed in separate locations. The drive device according to claim 1 .

3. The position adjustment device is arranged in this order from the side of the reduction gear device to the side of the workpiece, the X adjustment unit, the Z adjustment unit, and the Y adjustment unit. The drive device according to claim 2 .

4. the X-adjustment unit and the Z-adjustment unit are arranged side by side on the same plane, the X-adjustment unit and the Z-adjustment unit each have an operation unit for performing position adjustment, The operation units are provided on the same surface. The drive device according to claim 3 .

5. A first member; A second member; a connecting member that connects the first member and the second member and adjusts the position of the second member relative to the first member; Equipped with The first member, the second member, and the connecting member each have two guide portions that allow the first member and the second member to slide in two directions that intersect with each other. Position adjustment device.

6. The guide portion is a plurality of oval guide holes formed in the first member and the second member and extending along the movement direction; a female screw portion formed on the connecting member and connected to each of the guide holes; a plurality of fixing bolts that are fastened to the fixing female screw portion through the guide holes; Including, The position adjustment device according to claim 5 .

7. The guide portion is a first guide protrusion provided on either the connecting member or the first member and extending along a movement direction; a first guide recess provided on the other of the connecting member and the first member, the first guide recess being slidably fitted into the first guide protrusion; a second guide protrusion provided on either the connecting member or the second member and extending along the movement direction; a second guide recess provided on the other of the connecting member and the second member, the second guide recess being slidably fitted into the second guide protrusion; an adjustment unit that slides the first member and the second member; Including, The position adjustment device according to claim 6 .

8. an auxiliary fixing portion that holds the connecting member and the first member with a certain gap therebetween and also holds the connecting member and the second member with a certain gap therebetween; The position adjustment device according to claim 7 .

9. The auxiliary fixing portion is A pin portion and a male screw portion provided at one axial end of the pin portion and formed with a diameter smaller than that of the pin portion via a step portion; a head portion provided at the other axial end of the pin portion; and the connecting member has a through hole into which the pin portion is inserted, the first member and the second member have auxiliary fixing female screw portions to which the male screw portions are fastened, a washer disposed between the connecting member and the head; The length of the pin portion is longer than the thickness of the connecting member plus the thickness of the washer. The position adjustment device according to claim 8 .

10. The first member and the second member each have a plurality of guide holes aligned and arranged therein, The washer is a first washer having a plurality of first insertion holes formed therein; a second washer having a plurality of second insertion holes formed therein; and the plurality of first insertion holes communicate with the plurality of guide holes formed in the first member, and the fixing bolts are inserted into the plurality of first insertion holes; The plurality of second insertion holes communicate with the plurality of guide holes formed in the second member, and the fixing bolts are inserted into the second insertion holes. The position adjustment device according to claim 9.

11. The first member and the second member are arranged side by side along a surface direction of each other, the connecting member is a block body, The connecting member is disposed facing a direction parallel to an arrangement direction of the first member and the second member. The position adjustment device according to any one of claims 5 to 10.

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