Electro-optical device and electronic apparatus

Abstract

To provide an electro-optical device capable of suppressing deterioration in display quality due to a reverse tilt domain without deteriorating contrast.SOLUTION: A liquid crystal device 300 comprises: a counter substrate 200, which includes a lens 80, a counter electrode 20, and a phase difference control member 50 disposed between the counter electrode 20 and the lens 80, and which is disposed on a light incident side; an element substrate 100, which includes a pixel electrode 10, a conductive layer 63, and a phase difference control member 40 disposed between the pixel electrode 10 and the conductive layer 63, and which is disposed on a light emission side; and liquid crystal molecules Lm disposed between the counter substrate 200 and the element substrate 100. One phase difference control member of the phase difference control member 50 and the phase difference control member 40 has a slow axis along a pretilt azimuth L of the liquid crystal molecule Lm, and the other phase difference control member has a slow axis along an azimuth intersecting the pretilt azimuth L of the liquid crystal molecule Lm.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to an electro-optical device and an electronic apparatus equipped with the electro-optical device. [Background technology]

[0002] A conventional electro-optical device is known, for example, from Patent Document 1. Patent document 1 describes a transmissive liquid crystal device in which phase difference control elements are placed between the polarizer on the incident side and the liquid crystal panel, and between the polarizer on the exit side and the liquid crystal panel, and the polarization state of light incident on the liquid crystal panel is changed to linearly polarized, circularly polarized, or elliptically polarized depending on the brightness of the screen, etc. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2023-124101 Summary of the Invention [Problem to be solved by the invention]

[0004] When the light incident on the liquid crystal panel is circularly polarized or elliptically polarized, it is possible to suppress the degradation of display quality due to reverse tilt domains. However, there is a problem in that the polarization state of the light reflected by the side surfaces of the wiring, etc. changes as it passes through the liquid crystal panel, causing light leakage and reducing contrast. [Means for solving the problem]

[0005] An electro-optical device according to one aspect of the present application comprises: a first substrate arranged on the light incident side, the first substrate having a lens, a counter electrode, and a first phase difference control member arranged between the counter electrode and the lens; a second substrate arranged on the light exit side, the second substrate having a pixel electrode, wiring, and a second phase difference control member arranged between the pixel electrode and the wiring; and liquid crystal arranged between the first substrate and the second substrate, wherein one of the first phase difference control member and the second phase difference control member has a slow axis aligned with the pretilt orientation of the liquid crystal, and the other phase difference control member has a slow axis aligned with an orientation intersecting the pretilt orientation of the liquid crystal.

[0006] An electro-optical device according to one aspect of the present application has a first substrate, a first phase difference control member arranged on the light incident side of the first substrate, a pixel electrode, wiring, and a second phase difference control member arranged between the pixel electrode and the wiring, a second substrate arranged on the light exit side of the first substrate, and liquid crystal arranged between the first substrate and the second substrate, wherein one of the first phase difference control member and the second phase difference control member has a slow axis aligned with the pretilt orientation of the liquid crystal, and the other phase difference control member has a slow axis aligned with an orientation intersecting the pretilt orientation of the liquid crystal.

[0007] An electronic device according to one aspect of the present application includes the electro-optical device described above. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a schematic diagram showing an example of an electronic device using the electro-optical device of the present embodiment. [Figure 2] FIG. 1 is a plan view of an electro-optical device according to a first embodiment. [Figure 3] FIG. 3 is a cross-sectional view of the electro-optical device taken along line BB in FIG. 2. [Figure 4] FIG. 2 is an equivalent circuit diagram showing the electrical configuration of an element substrate. [Figure 5] FIG. 6B is a cross-sectional view of the electro-optical device taken along line C1-C1 in FIG. 6A. [Figure 6A]FIG. 3 is a plan view showing the deposition directions of the phase difference control member and the alignment film, the pretilt directions, and the direction of the slow axis of the phase difference control member. [Figure 6B] FIG. 2 is an explanatory diagram showing the pretilt direction, the direction of the transmission axis of a polarizing plate, and the direction of the slow axis of a phase difference control member. [Figure 7] 8B is a cross-sectional view of the electro-optical device taken along line C2-C2 in FIG. 8A according to the second embodiment. [Figure 8A] FIG. 10 is a plan view showing the deposition directions of the phase difference control member and alignment film, the pretilt directions, and the direction of the slow axis of the phase difference control member according to the second embodiment. [Figure 8B] FIG. 10 is an explanatory diagram showing the pretilt azimuth, the azimuth of the transmission axis of the polarizing plate, and the azimuth of the slow axis of the phase difference control member according to the second embodiment. [Figure 9] FIG. 10B is a cross-sectional view of the electro-optical device according to the third embodiment taken along the line C3-C3 in FIG. 10A. [Figure 10A] FIG. 10 is a plan view showing the deposition direction, pretilt direction, and slow axis direction of the phase difference controlling member of the alignment film according to the third embodiment. [Figure 10B] FIG. 10 is an explanatory diagram showing the pretilt azimuth, the azimuth of the transmission axis of the polarizing plate, and the azimuth of the slow axis of the phase difference control member according to the third embodiment. [Figure 11] FIG. 12B is a cross-sectional view of the electro-optical device according to the fourth embodiment taken along the line C4-C4 in FIG. 12A. [Figure 12A] FIG. 10 is a plan view showing the deposition direction and pretilt direction of an alignment film and the direction of the slow axis of a phase difference controlling member according to a fourth embodiment. [Figure 12B] FIG. 10 is an explanatory diagram showing the pretilt azimuth, the azimuth of the transmission axis of the polarizing plate, and the azimuth of the slow axis of the phase difference control member according to the fourth embodiment. [Figure 13] 5A and 5B are schematic diagrams showing the configuration of a phase difference control member according to the third and fourth embodiments. [Figure 14] FIG. 10 is a cross-sectional view of an electro-optical device according to a fifth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0009] In the drawings illustrating the embodiments of the present invention, the dimensions of some components may be drawn to different scales in order to make the components easier to see. In each drawing, the X-axis, Y-axis, and Z-axis are perpendicular to one another. In the following description, the "X-axis direction" refers to a direction parallel to the X-axis, the "Y-axis direction" refers to a direction parallel to the Y-axis, and the "Z-axis direction" refers to a direction parallel to the Z-axis. In the following description, the "positive side" of the X, Y, and Z axes refers to the X1, Y1, and Z1 directions, and the "negative side" refers to the X2, Y2, and Z2 directions. In the following description, a "planar view" refers to a view from the Z-axis direction relative to a plane that includes the X-axis and Y-axis.

[0010] 1. Overview of projection display devices FIG. 1 is a schematic diagram showing an example of an electronic device according to this embodiment, and is a diagram showing a schematic configuration of a projection display device 1000 as the electronic device.

[0011] The projection display device 1000 is, for example, a three-plate projector equipped with three liquid crystal devices 300 as electro-optical devices. The projection display device 1000 includes an illumination optical system 1001 , an illumination device 1002 , a projection optical system 1003 , and a control unit 1005 .

[0012] The illumination optical system 1001 separates the light emitted from the illumination device 1002, which is a light source, into red light RL, green light GL, and blue light BL, and supplies the red light RL, green light GL, and blue light BL to the liquid crystal device 300 provided corresponding to each color light.

[0013] A polarizing plate 410 and a polarizing plate 420 are respectively arranged on the light incident side and the light exit side of each liquid crystal device 300. The polarizing plates 410 and 420 are arranged in a crossed Nicol configuration in which the transmission axes of the polarizing plates 410 and 420 are orthogonal to each other.

[0014] The control unit 1005 includes, for example, a processor and a memory, and controls the operation of each liquid crystal device 300 . Each liquid crystal device 300 is controlled by the control unit 1005 and functions as a light modulation device that modulates the red light RL, green light GL, and blue light BL supplied from the illumination optical system 1001 in accordance with a display image. The projection optical system 1003 combines the light beams emitted through the polarizing plates 420 and projects the combined light beams onto a screen 1004 .

[0015] The electronic device is not limited to the exemplified three-panel projector. For example, it may be a single-panel, two-panel, or projector equipped with four or more liquid crystal devices 300. The electronic device may also be a smartphone, a PDA (Personal Digital Assistant), a camera, a television, a car navigation device, a personal computer, a display, electronic paper, a calculator, a videophone, a POS (Point of Sale), a printer, a scanner, a copier, a video player, or a device equipped with a touch panel.

[0016] 2. Overview of the LCD device In this embodiment, the liquid crystal device 300 is an active-drive transmissive liquid crystal device having a TFT (Thin Film Transistor) as a switching element for each pixel P.

[0017] 2.1. Structure of the liquid crystal device 2 and 3 show the structure of a liquid crystal device 300 according to this embodiment. Fig. 2 shows a plan view of the liquid crystal device 300. Fig. 3 is a schematic diagram showing a schematic cross-sectional configuration of the liquid crystal device 300 taken along line BB in Fig. 2.

[0018] 2 and 3, the liquid crystal device 300 includes a light-transmitting element substrate 100, a light-transmitting counter substrate 200, a sealant 8 provided in a frame shape to surround the display area A1, and a liquid crystal layer Lc. "Light-transmitting" refers to transparency to visible light, and preferably refers to a visible light transmittance of 50% or more.

[0019] As shown in FIG. 2, the liquid crystal device 300 has a display area A1 for displaying an image, and a peripheral area A2 located around the outer periphery of the display area A1 in a plan view. The display area A1 is provided with a plurality of pixels P arranged in a matrix. In this embodiment, the liquid crystal device 300 and the display area A1 are rectangular in shape, but may be other shapes, such as circular.

[0020] In the peripheral area A2 of the element substrate 100, various circuits including connection terminals 9, a scanning line driving circuit 6, a data line driving circuit 7, and an inspection circuit (not shown) are arranged. The connection terminals 9 are mounting terminals on which external connection lines such as FPCs (Flexible Printed Circuits) (not shown) are mounted. Various signals such as image signals, synchronization signals, inspection signals, common potentials, and power supply potentials are supplied to the connection terminals 9 from the outside via the external connection lines.

[0021] As shown in FIG. 3, the element substrate 100 and the counter substrate 200 are disposed with a seal material 8 and a liquid crystal layer Lc interposed therebetween. In this embodiment, the counter substrate 200 is disposed on the light incident side of the liquid crystal layer Lc, and the element substrate 100 is disposed on the light emitting side of the liquid crystal layer Lc. Incident light IL is modulated by the liquid crystal layer Lc and emitted from the element substrate 100 as modulated light ML. In this embodiment, the counter substrate 200 is an example of a first substrate, and the element substrate 100 is an example of a second substrate. The incident light IL is the light obtained after red light RL, green light GL, or blue light BL has passed through the polarizer 410 , and is linearly polarized light that vibrates in the direction of the transmission axis of the polarizer 410 .

[0022] The counter substrate 200 has a base 92 , a lens 80 , an insulating layer 83 , a phase difference control member 50 , a counter electrode 20 , and an alignment film 32 .

[0023] The base 92 is a flat plate that is light-transmitting and insulating. The substrate 92 is, for example, a glass substrate or a quartz substrate. The substrate 92 has lenses 80 each consisting of a plurality of lens surfaces 81 each consisting of a substantially hemispherical recess, and a lens layer 82 provided so as to fill the lens surfaces 81. The lenses 80 are microlenses (Micro Lens Array: MLA) provided so as to correspond to the pixel electrodes 10 in a plan view.

[0024] The base 92 and the lens layer 82 have different refractive indices. In this embodiment, the refractive index of the lens layer 82 is greater than the refractive index of the base 92. For example, the base 92 is made of silicon oxide (SiO2) and has a refractive index of 1.48. The lens layer 82 is made of silicon oxynitride (SiON) and has a refractive index of 1.58 to 1.68. The lens 80 converges the incident light IL and suppresses light that is blocked by the multiple conductive layers 60, which will be described later, thereby achieving a bright display.

[0025] The insulating layer 83 is transparent and insulating. The insulating layer 83 is made of an inorganic material such as silicon oxide. The insulating layer 83 can be referred to as an optical path adjustment layer. The lens 80 may be formed in two or more stages along the Z-axis direction.

[0026] The phase difference control member 50 changes the polarization state of the incident light IL from linearly polarized light to circularly polarized light or elliptically polarized light. In this embodiment, the phase difference control member 50 is an example of a first phase difference control member.

[0027] The liquid crystal device 300 of this embodiment prevents degradation of display quality due to reverse tilt domains by making the polarization state of light incident on the liquid crystal layer Lc circularly polarized or elliptically polarized. In the reverse tilt domain, for example, when a white display pixel and a black display pixel are adjacent to each other, the lateral electric field between the pixels causes the azimuth angle of the liquid crystal molecules Lm to deviate from the desired orientation, resulting in a degradation of display quality. The degradation of display quality caused by this reverse tilt domain can be improved by changing the polarization state of the incident light IL to elliptically polarized light, and can be completely eliminated by changing it to circularly polarized light.

[0028] The counter electrode 20 is an electrode disposed opposite the plurality of pixel electrodes 10, and may also be referred to as a common electrode. The counter electrode 20 is made of ITO (Indium Tin Oxide). Alternatively, the counter electrode 20 may be made of a transparent conductive material such as IZO (Indium Zinc Oxide) or FTO (Fluorine-doped tin oxide). The counter electrode 20 and the pixel electrodes 10 apply an electric field to the liquid crystal layer Lc.

[0029] The alignment film 32 is an obliquely evaporated film formed on the substrate by oblique evaporation. The material of the alignment film 32 is, for example, silicon oxide. The alignment film 32 aligns the liquid crystal molecules Lm of the liquid crystal layer Lc in a desired pretilt direction. The pretilt direction is expressed by the pretilt direction L and the pretilt angle. The pretilt direction L refers to the component of a vector that indicates the alignment direction of the liquid crystal molecules Lm when no electric field is applied to the liquid crystal layer Lc, within the plane of the liquid crystal layer Lc, in other words, within the plane including the X-axis and Y-axis. The pretilt angle is the angle between the alignment film 32 and the long axis of the liquid crystal molecules Lm.

[0030] The sealing material 8 is disposed between the element substrate 100 and the counter substrate 200. The sealing material 8 is formed using an adhesive containing various curable resins such as epoxy resin. The sealing material 8 may also contain a gap material made of an inorganic material such as glass.

[0031] The liquid crystal layer Lc is disposed within an area surrounded by the element substrate 100, the counter substrate 200, and the sealant 8. The liquid crystal layer Lc is an electro-optical layer whose optical properties change in response to the electric field generated by the pixel electrodes 10 and the counter electrode 20. The liquid crystal layer Lc is made of a liquid crystal material containing liquid crystal molecules Lm with negative dielectric anisotropy. The orientation of the liquid crystal molecules Lm changes in response to the electric field applied to the liquid crystal layer Lc. The liquid crystal layer Lc modulates incident light IL in response to the applied electric field.

[0032] The element substrate 100 has a base 91 , a transistor 1 , a plurality of conductive layers 60 including conductive layers 61 , 62 , and 63 , a plurality of interlayer insulating layers 70 including insulating layers 71 , 72 , 73 , and 74 , a phase difference control member 40 , a pixel electrode 10 , and an alignment film 31 .

[0033] The substrate 91 is a flat plate having light-transmitting and insulating properties, and is, for example, a glass substrate or a quartz substrate.

[0034] The conductive layer 61 is, for example, a scanning line 3 described later, the conductive layer 62 is, for example, a data line 4 described later, and the conductive layer 63 is, for example, a common potential line 5 described later. The plurality of conductive layers 60 includes relay electrodes and other wirings (not shown), and are provided between the pixel electrode 10 and the transistor 1 and / or between the transistor 1 and the base 91, and have the function of shielding the transistor 1 from light.

[0035] The conductive layers 61, 62, and 63 are formed of a conductive material having light-shielding properties. Examples of the conductive material having light-shielding properties include metals such as tungsten (W), titanium (Ti), chromium (Cr), iron (Fe), and aluminum (Al), as well as metal materials such as metal nitrides and metal silicides. "Light-shielding properties" refers to the ability to block visible light, and preferably refers to a visible light transmittance of less than 50%, and more preferably 10% or less.

[0036] The plurality of interlayer insulating layers 70 are light-transmitting and insulating. The insulating layers 71, 72, 73, and 74 are made of an inorganic material such as silicon oxide.

[0037] The pixel electrode 10 is provided in the display area A1 and has light-transmitting properties. The pixel electrode 10 is made of ITO (Indium Tin Oxide). The pixel electrode 10 may also be made of a transparent conductive material such as IZO (Indium Zinc Oxide) or FTO (Fluorine-doped tin oxide).

[0038] The alignment film 31 is an obliquely evaporated film formed on the substrate by oblique evaporation, and is made of, for example, silicon oxide.

[0039] The phase difference control member 40 is provided between the pixel electrode 10 and the plurality of conductive layers 60. In this embodiment, the phase difference control member 40 is an example of a second phase difference control member. In this embodiment, the phase difference control member 40 changes the polarization state of light that has passed through the liquid crystal layer Lc from circularly polarized light or elliptically polarized light to linearly polarized light. In other words, in this embodiment, the light that passes through the plurality of conductive layers 60 is changed from circularly polarized light or elliptically polarized light to linearly polarized light by the phase difference control member 40 before reaching the plurality of conductive layers 60.

[0040] When the light passing through the plurality of conductive layers 60 is circularly polarized or elliptically polarized, the light reflected from the side surface of the conductive layer 63, etc. as it passes through the plurality of conductive layers 60 changes its polarization state, causing light leakage as it passes through the polarizing plate 420 and reducing the contrast. However, in the liquid crystal device 300 of this embodiment, the light passing through the plurality of conductive layers 60 is converted from circularly polarized or elliptically polarized light to linearly polarized light while passing through the plurality of conductive layers 60, and therefore, even if the light is reflected by the side surfaces of the conductive layers 63, etc. while passing through the plurality of conductive layers 60, the change in polarization state is suppressed. Therefore, the liquid crystal device 300 of this embodiment can suppress both the deterioration of display quality and the deterioration of contrast due to the reverse tilt domain.

[0041] 2.2. Electrical configuration of the liquid crystal device FIG. 4 is an equivalent circuit diagram showing the electrical configuration of the element substrate 100. As shown in FIG. 4, a display area A1 of the element substrate 100 is provided with a plurality of transistors 1, n scanning lines 3, m data lines 4, m common potential lines 5, pixel electrodes 10, and capacitive elements 2. n and m are each an integer of 2 or greater.

[0042] The transistors 1 are provided at the intersections of the n scanning lines 3 and the m data lines 4. The pixel electrodes 10 are electrically connected to the drain regions of the transistors 1. Each of the n scanning lines 3 extends in the X-axis direction, and the n scanning lines 3 are arranged at equal intervals in the Y-axis direction. Each of the n scanning lines 3 is electrically connected to the gate electrode of the corresponding transistor 1. The n scanning lines 3 are electrically connected to a scanning line driving circuit 6 (not shown). The scanning line driving circuit 6 supplies scanning signals G1, G2, ..., and Gn to the 1 to n scanning lines 3 in line sequence.

[0043] Each of the m data lines 4 extends in the Y-axis direction, and the m data lines 4 are arranged at equal intervals in the X-axis direction. Each of the m data lines 4 is electrically connected to the source regions of a corresponding one of the transistors 1. The m data lines 4 are electrically connected to a data line driving circuit 7 (not shown). The data line driving circuit 7 supplies image signals E1, E2, ..., and Em to the 1 to m data lines 4.

[0044] The n scanning lines 3 and m data lines 4 are electrically insulated from each other and arranged in a grid pattern in a plan view. In this embodiment, an area surrounded by two adjacent scanning lines 3 and two adjacent data lines 4 corresponds to a pixel P.

[0045] Each of the m common potential lines 5 extends in the Y-axis direction, and the m common potential lines 5 are arranged at equal intervals in the X-axis direction. The common potential lines 5 are electrically insulated from the data lines 4 and the scanning lines 3 and are arranged at intervals from these. A fixed potential such as a common potential or a ground potential applied to the counter electrode 20 is supplied to the common potential lines 5 via a connection terminal 9.

[0046] One electrode of the capacitance element 2 is electrically connected to a common potential line 5 . The other electrode of the capacitive element 2 is electrically connected to the pixel electrode 10 and holds the potential of the image signal E1 or the like supplied to the pixel electrode 10.

[0047] 3. Phase difference control member and alignment film Next, five embodiments of the phase difference control member and alignment film, each having different configurations and / or arrangements, will be described.

[0048] 3.1. Embodiment 1 5 to 6B illustrate a liquid crystal device 300 according to the first embodiment. Fig. 5 is a cross-sectional view of the liquid crystal device 300 taken along line C1-C1 in Fig. 6A. Fig. 6A is a plan view illustrating the deposition orientations v41 and v42 of the phase difference control member 40, the deposition orientations v51 and v52 of the phase difference control member 50, the deposition orientation v31 of the alignment film 31, the deposition orientation v32 of the alignment film 32, the pretilt orientations L1, L2, and L, the orientation F40 of the slow axis of the phase difference control member 40, the orientation F50 of the slow axis of the phase difference control member 50, the orientation D1 of the transmission axis of the polarizing plate 410, and the orientation D2 of the transmission axis of the polarizing plate 420. Fig. 6B is an explanatory diagram illustrating the pretilt orientation L, the orientation D1, the orientation D2, the orientation F40, and the orientation F50.

[0049] In the first embodiment, the alignment films 31 and 32 are provided so that their alignment directions form an angle of 45° with the transmission axis direction D1 of the polarizer 410 and the transmission axis direction D2 of the polarizer 420, respectively. The liquid crystal molecules Lm are aligned by the alignment films 31 and 32 so that the pretilt direction L forms an angle of 45° with the direction D1 and the direction D2.

[0050] 5, arrow V31 indicates the deposition direction of alignment film 31, which is an obliquely deposited film. In other words, deposition direction V31 indicates the direction in which columnar structures 31p of alignment film 31 grow. Arrow V32 indicates the deposition direction of alignment film 32, which is an obliquely deposited film. In other words, deposition direction V32 indicates the direction in which columnar structures 32p of alignment film 32 grow. The alignment films 31 and 32 align the liquid crystal molecules Lm of the liquid crystal layer Lc obliquely with respect to the surfaces of the pixel electrode 10 and the counter electrode 20, as shown in FIG.

[0051] 6A, the deposition orientation v31 refers to the component in a plane including the X-axis and Y-axis of the vector indicating the deposition direction V31. The deposition orientation v32 refers to the component in a plane including the X-axis and Y-axis of the vector indicating the deposition direction V32.

[0052] The deposition orientation v31 and the deposition orientation v32 form an angle of 45° with the orientation D1 of the transmission axis of the polarizing plate 410 and the orientation D2 of the transmission axis of the polarizing plate 420, respectively. As a result, the alignment films 31 and 32 align the liquid crystal molecules Lm in the liquid crystal layer Lc so that the pretilt orientation L of the liquid crystal molecules Lm forms an angle of 45° with the orientation D1 of the transmission axis of the polarizer 410 and the orientation D2 of the transmission axis of the polarizer 420, as shown in Figure 6A.

[0053] 5, the pretilt orientation L1 indicates the direction in which the liquid crystal molecule Lm tilts with respect to the surface of the alignment film 31, and indicates the direction from the tip of the liquid crystal molecule Lm on the alignment film 31 side to the tip on the alignment film 32 side as shown in Fig. 6A. In the first embodiment, the pretilt orientation L1 is an example of the pretilt orientation L of the liquid crystal molecule Lm.

[0054] As shown in Figure 5, the pretilt orientation L2 indicates the direction in which the liquid crystal molecule Lm tilts relative to the surface of the alignment film 32, and as shown in Figure 6A, it indicates the direction from the tip of the liquid crystal molecule Lm on the alignment film 32 side to the tip on the alignment film 31 side.

[0055] 5, in the first embodiment, the phase difference controlling member 50 has two vapor-deposited films 51 and 52 formed by oblique deposition. The material of the vapor-deposited films 51 and 52 is preferably titanium oxide (TiO2). The material of the vapor-deposited films 51 and 52 is not limited to titanium oxide. The material of the vapor-deposited films 51 and 52 can be, for example, a dielectric material with a high refractive index, such as silicon oxide, silicon oxynitride, silicon nitride (Si3N4), aluminum oxide (Al2O3), or hafnium oxide (HfO2).

[0056] In FIG. 5, arrow V51 indicates the deposition direction of the deposited film 51. The deposited film 51 has a columnar structure (not shown), and the columnar structure of the deposited film 51 grows along the deposition direction V51. Arrow V52 indicates the deposition direction of the deposited film 52. In other words, the deposition direction V52 is opposite to the deposition direction V51. The deposited film 52 has a columnar structure (not shown), and the columnar structure of the deposited film 52 grows along the deposition direction V52. In embodiment 1, the deposited film 51 is an example of a first deposited film, and the deposited film 52 is an example of a second deposited film.

[0057] 6A, the deposition orientation v51 refers to the component in a plane including the X-axis and Y-axis of the vector indicating the deposition direction V51. The deposition orientation v52 refers to the component in a plane including the X-axis and Y-axis of the vector indicating the deposition direction V52. The direction F50 indicates the direction of the slow axes of the deposited films 51 and 52. As shown in Fig. 6B, the deposited films 51 and 52 have slow axes aligned with the pretilt direction L. In the first embodiment, the pretilt direction L and the direction F50 are parallel to each other.

[0058] 5, in the first embodiment, the phase difference controlling member 40 has two vapor-deposited films 41 and 42 formed by oblique deposition. The material of the vapor-deposited films 41 and 42 is the same as that of the vapor-deposited films 51 and 52, and is preferably titanium oxide. The material of the vapor-deposited films 41 and 42 may also be a high-refractive-index dielectric material such as silicon oxide, silicon oxynitride, silicon nitride, aluminum oxide, or hafnium oxide.

[0059] In FIG. 5, arrow V41 indicates the deposition direction of the deposited film 41. Arrow 41 points obliquely in the Z2 direction from the front to the back of the drawing. The deposited film 41 has a columnar structure (not shown), and the columnar structure of the deposited film 41 grows along the deposition direction V41. Arrow V42 indicates the deposition direction of the deposited film 42. Arrow V42 points obliquely in the Z2 direction from the back to the front of the drawing. In other words, the deposition direction V42 is opposite to the deposition direction V41. The deposited film 42 has a columnar structure (not shown), and the columnar structure of the deposited film 42 grows along the deposition direction V42. In embodiment 1, the deposited film 41 is an example of a first deposited film, and the deposited film 42 is an example of a second deposited film.

[0060] 6A, the deposition orientation v41 refers to the component in a plane including the X-axis and Y-axis of the vector indicating the deposition direction V41. The deposition orientation v42 refers to the component in a plane including the X-axis and Y-axis of the vector indicating the deposition direction V42. The direction F40 indicates the direction of the slow axis of the deposited film 41 and the deposited film 42. As shown in Fig. 6B, the deposited film 41 and the deposited film 42 have a slow axis along a direction intersecting the pretilt direction L. In the first embodiment, the angle between the pretilt direction L and the direction F40 is 90°.

[0061] The thickness d1 of the phase difference control member 40 and the thickness d2 of the phase difference control member 50 are the same thickness d. The thickness d is set using the following formula 1 according to the phase difference required for the phase difference control member 40 and the phase difference control member 50.

[0062]

number

[0063] Δn is the refractive index anisotropy, and in embodiment 1, the value of Δn varies depending on the materials and film formation angles of the deposited films 41, 42, 51, and 52. The film formation angle of the deposited film 41 is the angle between the deposition direction V41 and a plane including the X-axis and Y-axis. The film formation angle of the deposited film 42 is the angle between the deposition direction V42 and a plane including the X-axis and Y-axis. The film formation angle of the deposited film 51 is the angle between the deposition direction V51 and a plane including the X-axis and Y-axis. The film formation angle of the deposited film 52 is the angle between the deposition direction V52 and a plane including the X-axis and Y-axis. In the first embodiment, the value of the thickness d is about 1 μm to several μm.

[0064] When the phase difference of the phase difference control member 40 and the phase difference control member 50 is λ / 4, the phase difference control member 50 changes the polarization state of the incident light IL from linearly polarized light to circularly polarized light, and the phase difference control member 40 changes the polarization state of the light that has passed through the liquid crystal layer Lc from circularly polarized light to linearly polarized light. Therefore, it is possible to completely eliminate the degradation of display quality caused by the reverse tilt domain while suppressing the degradation of contrast.

[0065] When the phase difference of the phase difference control member 40 and the phase difference control member 50 is λ / 8, the phase difference control member 50 changes the polarization state of the incident light IL from linearly polarized light to elliptically polarized light, and the phase difference control member 40 changes the polarization state of the light that has passed through the liquid crystal layer Lc from elliptically polarized light to linearly polarized light. Therefore, it is possible to improve the degradation of display quality caused by the reverse tilt domain while suppressing the degradation of contrast.

[0066] 3.2. Embodiment 2 7 to 8B illustrate a liquid crystal device 300 according to the second embodiment. Fig. 7 is a cross-sectional view of the liquid crystal device 300 taken along line C2-C2 in Fig. 8A. Fig. 8A is a plan view illustrating the deposition orientations v43 and v44 of the phase difference control member 40, the deposition orientations v53 and v54 of the phase difference control member 50, the deposition orientation v31 of the alignment film 31, the deposition orientation v32 of the alignment film 32, the pretilt orientations L1, L2, and L, the orientation F40 of the slow axis of the phase difference control member 40, the orientation F50 of the slow axis of the phase difference control member 50, the orientation D1 of the transmission axis of the polarizing plate 410, and the orientation D2 of the transmission axis of the polarizing plate 420. Fig. 8B is an explanatory diagram illustrating the pretilt orientation L, the orientation D1, the orientation D2, the orientation F40, and the orientation F50.

[0067] The second embodiment is different from the first embodiment in the direction F40 of the slow axis of the phase difference control member 40 and the direction F50 of the slow axis of the phase difference control member 50, but the other configurations are the same as those of the first embodiment.

[0068] 7, in the second embodiment, the phase difference controlling member 40 has two vapor-deposited films 43 and 44 formed by oblique deposition. The material of the vapor-deposited films 43 and 44 is preferably titanium oxide. The material of the vapor-deposited films 43 and 44 may also be a dielectric material with a high refractive index, such as silicon oxide, silicon oxynitride, silicon nitride, aluminum oxide, or hafnium oxide.

[0069] In FIG. 7, arrow V43 indicates the deposition direction of the deposited film 43. The deposited film 43 has a columnar structure (not shown), and the columnar structure of the deposited film 43 grows along the deposition direction V43. Arrow V44 indicates the deposition direction of the deposited film 44. In other words, the deposition direction V44 is opposite to the deposition direction V43. The deposited film 44 has a columnar structure (not shown), and the columnar structure of the deposited film 44 grows along the deposition direction V44. In embodiment 2, the deposited film 43 is an example of a first deposited film, and the deposited film 44 is an example of a second deposited film.

[0070] 8A, the deposition orientation v43 refers to the component in a plane including the X-axis and Y-axis of the vector indicating the deposition direction V43. The deposition orientation v44 refers to the component in a plane including the X-axis and Y-axis of the vector indicating the deposition direction V44. The direction F40 indicates the direction of the slow axes of the deposited films 43 and 44. As shown in Fig. 8B, the deposited films 43 and 44 have slow axes aligned with the pretilt direction L. In the second embodiment, the pretilt direction L and the direction F40 are parallel to each other.

[0071] 7, in the second embodiment, the phase difference controlling member 50 has two vapor-deposited films 53 and 54 formed by oblique deposition. The material of the vapor-deposited films 53 and 54 is the same as that of the vapor-deposited films 43 and 44, and is preferably titanium oxide. The material of the vapor-deposited films 53 and 54 may also be a dielectric material with a high refractive index, such as silicon oxide, silicon oxynitride, silicon nitride, aluminum oxide, or hafnium oxide.

[0072] In FIG. 7, arrow V53 indicates the deposition direction of the deposited film 53. Arrow 53 points obliquely in the Z1 direction from the front to the back of the drawing. The deposited film 53 has a columnar structure (not shown), and the columnar structure of the deposited film 53 grows along the deposition direction V53. Arrow V54 indicates the deposition direction of the deposited film 54. Arrow 54 points obliquely in the Z1 direction from the back to the front of the drawing. In other words, the deposition direction V54 is opposite to the deposition direction V53. The deposited film 54 has a columnar structure (not shown), and the columnar structure of the deposited film 54 grows along the deposition direction V54. In embodiment 2, the deposited film 53 is an example of a first deposited film, and the deposited film 54 is an example of a second deposited film.

[0073] 8A, the deposition orientation v53 refers to the component in a plane including the X-axis and Y-axis of the vector indicating the deposition direction V53. The deposition orientation v54 refers to the component in a plane including the X-axis and Y-axis of the vector indicating the deposition direction V54. The direction F50 indicates the direction of the slow axis of the deposited films 53 and 54. As shown in Fig. 8B, the deposited films 53 and 54 have slow axes aligned in a direction intersecting the pretilt direction L. In the second embodiment, the angle between the pretilt direction L and the direction F50 is 90°.

[0074] 3.3. Embodiment 3 9 to 10B and 13 illustrate a liquid crystal device 300 according to the third embodiment. FIG. 9 is a cross-sectional view of the liquid crystal device 300 taken along line C3-C3 in FIG. 10A. FIG. 10A is a plan view illustrating the deposition orientation v31 of the alignment film 31, the deposition orientation v32 of the alignment film 32, the pretilt orientations L1, L2, and L, the orientation F40 of the slow axis of the retardation control member 40, the orientation F50 of the slow axis of the retardation control member 50, the orientation D1 of the transmission axis of the polarizing plate 410, and the orientation D2 of the transmission axis of the polarizing plate 420. FIG. 10B is an explanatory diagram illustrating the pretilt orientation L, the orientation D1, the orientation D2, the orientation F40, and the orientation F50. FIG. 13 is a schematic diagram illustrating the configuration of the retardation control member 40 according to the third embodiment.

[0075] The third embodiment differs from the first and second embodiments in that the phase difference controlling member 40 and the phase difference controlling member 50 are configured with form birefringent layers.

[0076] As shown in FIG. 13, the phase difference control member 40 made of a structural birefringent layer has a structure in which refractive members 45 and 46 made of dielectric materials each having a different refractive index are alternately arranged at a predetermined period T. A low refractive index member with a low refractive index is used for the refractive member 45. For example, air or silicon oxide can be used as the low refractive index member. A high refractive index member with a higher refractive index than the low refractive index member is used for the refractive member 46. For example, aluminum oxide or hafnium oxide can be used as the high refractive index member.

[0077] The phase difference control member 40 has a direction with a period and a direction without a period. The direction having a periodicity is the direction in which the refractive members 45 and the refractive members 46 are alternately arranged, and the direction without a periodicity is the direction in which the refractive members 45 and the refractive members 46 extend. In the third embodiment, the orientation F40 of the slow axis of the phase difference controlling member 40 is a direction without a periodicity.

[0078] 10B, the phase difference controlling member 40 has a slow axis along a direction intersecting with the pretilt direction L. In the third embodiment, the angle formed between the pretilt direction L and the direction F40 is 90°.

[0079] The phase difference control member 50 has the same configuration as the phase difference control member 40. The phase difference control member 50 has a refractive member 55 and a refractive member 56, and the refractive member 55 has a configuration corresponding to the refractive member 45, and the refractive member 56 has a configuration corresponding to the refractive member 46. In the third embodiment, the orientation F50 of the slow axis of the phase difference control member 50 is a direction having a periodicity. 10B, the phase difference controlling member 50 has a slow axis along the pretilt direction L. In the third embodiment, the pretilt direction L and the direction F50 are parallel to each other.

[0080] As shown in Figure 13, if the width of refractive member 45 is t1 and the width of refractive member 46 is t2, the dimensions of width t1 and width t2 are set so that the predetermined period T (T = t1 + t2) is sufficiently smaller than the incident light IL.

[0081] The thickness d3 of the phase difference control member 40 and the thickness d4 of the phase difference control member 50 are the same thickness d. The thickness d is set using the above-mentioned formula 1 according to the phase difference required for the phase difference control member 40 and the phase difference control member 50.

[0082] In Equation 1, the phase difference is the same value for the phase difference controlling member 40 and the phase difference controlling member 50. In the third embodiment, the phase difference is preferably λ / 4 or less and λ / 8 or more, and is optimally λ / 4. In the third embodiment, Δn can be calculated by the following formulas 2 to 5.

[0083]

number

number

number

number

[0084] In the third embodiment, the thickness d of the phase difference control member 40 and the phase difference control member 50 can be calculated using Formulas 1 to 5. Therefore, the thickness d of the phase difference control member 40 and the phase difference control member 50 varies depending on the refractive indexes n1 and n2 and the occupancy rate f of the dielectric material used. Three specific examples with different thicknesses d are described below: In each example, the phase difference of the phase difference control member 40 and the phase difference control member 50 is λ / 4.

[0085] [Example 1] In this example, the refractive member 45 is air (refractive index n1=1), the refractive member 46 is aluminum oxide (refractive index n2=1.77), and the dimensional ratio between the refractive members 45 and 46 is 1:1 (occupancy rate f=0.5). In this example, the thickness d is 788 nm.

[0086] [Example 2] In this example, refractive member 45 is air (refractive index n1=1), refractive member 46 is hafnium oxide (refractive index n2=1.91), and the dimensional ratio between refractive member 45 and refractive member 46 is 1:1 (occupancy ratio f=0.5). In this example, the thickness d is 598 nm.

[0087] [Example 3] In this example, the refractive member 45 is silicon oxide (refractive index n1=1.46), the refractive member 46 is hafnium oxide (refractive index n2=1.91), and the dimensional ratio between the refractive member 45 and the refractive member 46 is 1:1 (occupancy ratio f=0.5). In this example, the thickness d is 2728 nm.

[0088] 3.4. Embodiment 4 11 to 12B show a liquid crystal device 300 according to Embodiment 4. Fig. 11 is a cross-sectional view of the liquid crystal device 300 taken along line C4-C4 in Fig. 12A. Fig. 12A is a plan view showing the deposition orientation v31 of the alignment film 31, the deposition orientation v32 of the alignment film 32, the pretilt orientations L1, L2, and L, the orientation F40 of the slow axis of the retardation control member 40, the orientation F50 of the slow axis of the retardation control member 50, the orientation D1 of the transmission axis of the polarizing plate 410, and the orientation D2 of the transmission axis of the polarizing plate 420. Fig. 12B is an explanatory diagram showing the pretilt orientation L, the orientation D1, the orientation D2, the orientation F40, and the orientation F50.

[0089] The fourth embodiment is different from the third embodiment in the direction F40 of the slow axis of the phase difference control member 40 and the direction F50 of the slow axis of the phase difference control member 50, but the other configurations are the same as those of the third embodiment.

[0090] 12B, the phase difference controlling member 40 has a slow axis along the pretilt direction L. In the fourth embodiment, the pretilt direction L and the direction F40 are parallel to each other. 12B, the phase difference controlling member 50 has a slow axis along a direction intersecting with the pretilt direction L. In the fourth embodiment, the angle formed between the pretilt direction L and the direction F50 is 90°.

[0091] 3.5. Embodiment 5 FIG. 14 is a schematic diagram illustrating the structure of a liquid crystal device 300 according to the fifth embodiment, showing a schematic cross-sectional configuration of the liquid crystal device 300 taken along line BB in FIG. The liquid crystal device 300 of embodiment 5 differs from the liquid crystal device 300 of embodiments 1 to 4 in that it includes a retardation plate 500 instead of the retardation control member 50 of embodiments 1 to 4, but the other configurations are the same as those of embodiments 1 to 4.

[0092] The retardation plate 500 is disposed on the light incident side of the counter substrate 200. The retardation plate 500 has the same phase difference as the phase difference control member 40. In this embodiment, the retardation plate 500 is an example of a first phase difference control member.

[0093] When the slow axis direction F40 of the phase difference controlling member 40 intersects with the pretilt direction L, the retardation plate 500 is disposed so that the slow axis direction of the retardation plate 500 is along the pretilt direction L. In this case, the pretilt direction L and the slow axis direction of the retardation plate 500 are parallel to each other. On the other hand, when the slow axis direction F40 of the phase difference controlling member 40 is parallel to the pretilt direction L, the retardation plate 500 is disposed so that the slow axis direction of the retardation plate 500 intersects with the pretilt direction L. In this case, the angle formed by the pretilt direction L and the slow axis direction of the retardation plate 500 is 90°.

[0094] As described above, the liquid crystal device 300 as an electro-optical device of this embodiment can provide the following effects. The liquid crystal device 300 of this embodiment has a lens 80, a counter electrode 20, and a phase difference control member 50 as a first phase difference control member arranged between the counter electrode 20 and the lens 80, and also has a counter substrate 200 as a first substrate arranged on the light incident side, a pixel electrode 10, a conductive layer 63 as wiring, and a phase difference control member 40 as a second phase difference control member arranged between the pixel electrode 10 and the conductive layer 63, and is equipped with an element substrate 100 as a second substrate arranged on the light output side, and liquid crystal molecules Lm as liquid crystals arranged between the counter substrate 200 and the element substrate 100, and one of the phase difference control members 50 and 40 has a slow axis along the pretilt orientation L of the liquid crystal molecules Lm, and the other phase difference control member has a slow axis along an orientation intersecting the pretilt orientation L of the liquid crystal molecules Lm.

[0095] As described above, the liquid crystal device 300 of this embodiment includes a retardation control member 50 having a slow axis aligned with the pretilt orientation L of the liquid crystal molecules Lm, between the counter electrode 20 and the lens 80, and a retardation control member 40 having a slow axis aligned with an orientation intersecting the pretilt orientation L, between the pixel electrode 10 and the conductive layer 63. Alternatively, the liquid crystal device 300 of this embodiment includes a retardation control member 50 having a slow axis aligned with an orientation intersecting the pretilt orientation L of the liquid crystal molecules Lm, between the counter electrode 20 and the lens 80, and a retardation control member 40 having a slow axis aligned with the pretilt orientation L, between the pixel electrode 10 and the conductive layer 63. Therefore, it is possible to improve the reverse tilt domain while suppressing a decrease in contrast, thereby realizing a liquid crystal device 300 with excellent display quality.

[0096] In the liquid crystal device 300 of this embodiment, the angle formed between the pretilt direction L of the liquid crystal molecules Lm and the slow axis of the phase difference controlling member 40 is 90°. Therefore, the phase difference control member 40 changes the polarization state of light that has passed through the liquid crystal layer Lc from circularly polarized light to linearly polarized light. Therefore, the liquid crystal device 300 of this embodiment can prevent the polarization state of light from changing even when light is reflected by the side surfaces of the conductive layer 63, etc., and therefore can prevent a decrease in contrast.

[0097] In the liquid crystal device 300 of this embodiment, the phase difference control member 50 and the phase difference control member 40 respectively have a refractive member 45 and a refractive member 55 as low refractive members, and a refractive member 46 and a refractive member 56 as high refractive members having a refractive index higher than that of the low refractive member.

[0098] As described above, in the liquid crystal device 300 of this embodiment, the phase difference controlling member 50 and the phase difference controlling member 40 are formed of form birefringent layers. Therefore, the phase difference controlling member 40 can be formed on the element substrate 100, and the phase difference controlling member 50 can be formed on the counter substrate 200. As a result, it is possible to realize a liquid crystal device 300 that can improve the reverse tilt domain while suppressing a decrease in contrast.

[0099] In the liquid crystal device 300 of this embodiment, the low refractive index member contains air or SiO2, and the high refractive index member contains Al2O3 or HfO2. Therefore, the phase difference control member 40 can be formed on the element substrate 100 and the phase difference control member 50 can be formed on the counter substrate 200, and a liquid crystal device 300 with excellent display quality can be realized.

[0100] In the liquid crystal device 300 of this embodiment, the phase difference control member 50 and the phase difference control member 40 have a vapor-deposited film 41 as a first vapor-deposited film and a vapor-deposited film 42 as a second vapor-deposited film deposited from the opposite direction to the vapor-deposited film 41. Therefore, the phase difference controlling member 40 can be formed on the element substrate 100, and the phase difference controlling member 50 can be formed on the counter substrate 200. As a result, it is possible to realize a liquid crystal device 300 that can improve the reverse tilt domain while suppressing a decrease in contrast.

[0101] In the liquid crystal device 300 of this embodiment, the deposited films 41 and 42 are each made of TiO2. Therefore, the phase difference control member 40 can be formed on the element substrate 100 and the phase difference control member 50 can be formed on the counter substrate 200, and a liquid crystal device 300 with excellent display quality can be realized.

[0102] The liquid crystal device 300 of this embodiment has a counter substrate 200 as a first substrate, a retardation plate 500 as a first retardation control member arranged on the light incident side of the counter substrate 200, a pixel electrode 10, a conductive layer 63 as wiring, and a retardation control member 40 as a second retardation control member arranged between the pixel electrode 10 and the conductive layer 63, and also has an element substrate 100 as a second substrate arranged on the light exit side of the counter substrate 200, and liquid crystal molecules Lm as liquid crystals arranged between the counter substrate 200 and the element substrate 100, wherein one of the retardation plate 500 and the retardation control member 40 has a slow axis along the pretilt orientation L of the liquid crystal molecules Lm, and the other has a slow axis along an orientation intersecting the pretilt orientation L of the liquid crystal molecules Lm.

[0103] As described above, the liquid crystal device 300 of this embodiment includes a retardation plate 500 having a slow axis aligned with the pretilt orientation L of the liquid crystal molecules Lm on the light incident side of the counter substrate 200, and a retardation control member 40 having a slow axis aligned with the pretilt orientation L between the pixel electrode 10 and the conductive layer 63. Alternatively, the liquid crystal device 300 of this embodiment includes a retardation plate 500 having a slow axis aligned with the pretilt orientation L of the liquid crystal molecules Lm on the light incident side of the counter substrate 200, and a retardation control member 40 having a slow axis aligned with the pretilt orientation L between the pixel electrode 10 and the conductive layer 63. Therefore, it is possible to improve the reverse tilt domain while suppressing a decrease in contrast, thereby realizing a liquid crystal device 300 with excellent display quality.

[0104] A projection display device 1000 serving as an electronic device of this embodiment includes a liquid crystal device 300 serving as an electro-optical device. Therefore, by employing the liquid crystal device 300 with excellent display quality, the performance of the projection display device 1000 can be improved.

[0105] Although the preferred embodiment has been described above, the present invention is not limited to the above embodiment. The configuration of each part of the present invention can be replaced with any configuration that exhibits the same function as the above embodiment, and any configuration can be added. [Explanation of symbols]

[0106] 1...transistor, 2...capacitor element, 3...scanning line, 4...data line, 5...common potential line, 6...scanning line driving circuit, 7...data line driving circuit, 8...sealing material, 9...connection terminal, 10...pixel electrode, 20...counter electrode, 31, 32...alignment film, 31p, 32p...columnar structure, 40...phase difference control member, 41, 42, 43, 44...evaporated film, 45, 46...refractive member, 50...phase difference control member, 51, 52, 53, 54...deposited film, 55, 56...refractive element, 60, 61, 62, 63...conductive layer, 70...interlayer insulating layer, 71, 72, 73, 74...insulating layer, 80...lens, 81...lens surface, 82...lens layer, 83...insulating layer, 91, 92...base, 100...element substrate, 200...opposite substrate, 300...liquid crystal device, 410, 420...polarizing plate, 500...phase difference plate, 1000...projection type display device, 1001...illuminator Brightening optical system, 1002... illumination device, 1003... projection optical system, 1004... screen, 1005... control unit, D1, D2... orientation, RL... red light, GL... green light, BL... blue light, E1... image signal, G1... scanning signal, F40, F50... orientation, L, L1, L2... pretilt orientation, A1... display area, A2... peripheral area, Lc... liquid crystal layer, Lm... liquid crystal molecule, IL... incident light, ML... modulated light, P... pixel , t1,t2...width, T...period, d1,d2,d3,d4...thickness, n1,n2...refractive index, v31,v32...evaporation orientation, V31,V32...evaporation direction, v41,v42...evaporation orientation, V41,V4 2... Vapor deposition direction, v43, v44... Vapor deposition direction, V43, V44... Vapor deposition direction, v51, v52... Vapor deposition direction, V51, V52... Vapor deposition direction, v53, V54... Vapor deposition direction, V53, V54... Vapor deposition direction

Claims

1. a first substrate disposed on the light incident side, the first substrate having a lens, a counter electrode, and a first phase difference control member disposed between the counter electrode and the lens; a second substrate disposed on the light emission side, the second substrate having pixel electrodes, wiring, and a second phase difference control member disposed between the pixel electrodes and the wiring; a liquid crystal disposed between the first substrate and the second substrate, one of the first phase difference control member and the second phase difference control member has a slow axis along a pretilt azimuth of the liquid crystal, and the other phase difference control member has a slow axis along an azimuth intersecting with the pretilt azimuth of the liquid crystal; Electro-optical device.

2. the angle between the pretilt orientation of the liquid crystal and the slow axis of the second phase difference control member is 90°; The electro-optical device according to claim 1 .

3. the first phase difference control member and the second phase difference control member each have a low refractive index member and a high refractive index member having a refractive index higher than that of the low refractive index member; The electro-optical device according to claim 1 .

4. The low refractive index member is air or SiO 2 The high refractive index member comprises Al 2 O 3 or HfO 2 Including, The electro-optical device according to claim 3 .

5. the first phase difference control member and the second phase difference control member each have a first vapor-deposited film and a second vapor-deposited film vapor-deposited in a direction opposite to that of the first vapor-deposited film; The electro-optical device according to claim 1 .

6. The first vapor-deposited film and the second vapor-deposited film are each made of TiO 2 That is, 6. The electro-optical device according to claim 5.

7. a first substrate; a first phase difference control member disposed on the light incident side of the first substrate; a second substrate having pixel electrodes, wiring, and a second phase difference control member disposed between the pixel electrodes and the wiring, the second substrate being disposed on the light emission side of the first substrate; a liquid crystal disposed between the first substrate and the second substrate, one of the first phase difference control member and the second phase difference control member has a slow axis along a pretilt azimuth of the liquid crystal, and the other phase difference control member has a slow axis along an azimuth intersecting with the pretilt azimuth of the liquid crystal; Electro-optical device.

8. 8. An electronic device comprising the electro-optical device according to claim 1.

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