Crimping head device

Abstract

To provide a crimp head device that reduces an impact load and mitigates an impact.SOLUTION: A crimping head device 1 includes: a base 20 on which a workpiece 50 can be placed; a crimping head main body 6 capable of crimping and separating a crimped body 59 to and from the workpiece in a workpiece direction; a rod 9 connected to the crimping head main body 6 in an axial direction; air bearings 17 and 18 corresponding to a first impact absorbing sliding part capable of alleviating an impact in the axial direction of the crimping head main body 6; and air cylinders 27 and 28 corresponding to a second impact absorbing sliding part capable of alleviating the impact in the axial direction of the rod 9. For driving of the crimping head main body 6 in the axial direction, a driving force of a Z-axis rotation motor 2 is transmitted to the crimping head main body 6 via a ball screw spline 44, a high rigidity plate 15, and the rod 9. The weight reciprocating in the axial direction integrally with the crimping head main body 6 can be reduced, and a speed can be increased with high accuracy.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a pressure bonding head device that bonds an object to be bonded. [Background technology]

[0002] In the manufacturing process of electronic components such as ECU board products, sensors, and semiconductors, a method of mounting components onto a board by crimping is known. This method of mounting components by crimping involves applying heat, pressure, or both heat and pressure to a crimping head to bond the object (component) to the board via a crimping adhesive.

[0003] The electronic component crimping device disclosed in Patent Document 1 comprises a first pressure applying means for crimping a component held by a crimping tool within a first load range, a second pressure applying means for moving the first pressure applying means coaxially to crimp the component held by the crimping tool within a second load range that is higher than the first load range, a first regulating means for abutting the first pressure applying means with the second pressure applying means and regulating relative movement of the first pressure applying means to the second pressure applying means when crimping is performed by the first pressure applying means, and a second regulating means for regulating relative movement of the crimping tool with the first pressure applying means when crimping is performed by the second pressure applying means. The electronic component crimping device disclosed in Patent Document 1 comprises a first pressure applying means for crimping a component held by a crimping tool within a first load range, a second pressure applying means for moving the first pressure applying means coaxially to the crimping tool within a second load range that is higher than the first load range, a first regulating means for abutting the first pressure applying means with the second pressure applying means and regulating relative movement of the first pressure applying means to the second pressure applying means when crimping is performed by the second pressure applying means, and a first load detecting means for detecting the load applied when crimping a component held by the crimping tool with the first pressure applying means and the second load detecting means, [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2006-147702 Summary of the Invention [Problem to be solved by the invention]

[0005] Conventional crimping head devices have a configuration that has only a Z axis for main stroke and a θ axis for adjusting mounting alignment, and when the crimping head presses the workpiece to crimp it onto the target object, it is difficult to avoid applying impact force to the target object and the workpiece. However, if an excessive impact force is applied during crimping of the workpieces, defects such as cracking of the workpieces occur. Generally, the head body of a crimping head is a single rigid body with a large mass, so in order to reduce the impact load, it is necessary to slow down the relative speed of the workpieces to the object when bringing them close to each other. This results in a problem of extended processing time in the process of bonding the workpieces to the object, reducing productivity.

[0006] Generally, in the process of mounting a bonded object to an object, the challenge in improving productivity is to shorten the time required to bond the object to the object. If the productivity of one production facility does not improve, the only solution available is to increase the number of facilities, which leads to increased capital investment.

[0007] The present invention has been made in view of the above, and an object of the present invention is to provide a pressure bonding head device that can bond an object to be bonded to a workpiece in a short time. [Means for solving the problem]

[0008] The crimping head device of the present invention is configured to include a base (20) on which a workpiece can be placed, a crimping head body (6) capable of crimping and separating the workpiece from the workpiece in the direction of the workpiece, a rod (9) connected axially to the crimping head body, a first shock absorbing sliding part (17, 18) capable of absorbing axial impact on the crimping head body, a second shock absorbing sliding part (27, 28) capable of absorbing axial impact on the rod, and a drive part (2) that drives the rod so that it can move back and forth in the axial direction.

[0009] According to the present invention, a configuration is adopted in which the impact load is suppressed by minimizing the mass m in order to increase the velocity v as much as possible based on the relationship of impact load F=mv / Δt (mass*velocity / collision time). Specifically, the crimping head is divided into two parts (Configuration A and Configuration B), the mass m of Configuration A, which is essentially subjected to the impact load, is minimized, and Configuration A slides (moves) relative to Configuration B, which is essentially not subjected to the impact load, in the Z-axis direction when it comes into contact with the workpiece.

[0010] Here, the crimping head body and the rod correspond to configuration A. In the embodiment described later, the configuration of the area indicated by the thick dashed line 60 in Fig. 5 corresponds to configuration A. Configuration A is the sliding part head mass with the smallest mass.

[0011] According to the crimping head device of the present invention, among the elements constituting the crimping head device, the mass of the movable part that moves integrally with the crimping head main body is reduced, thereby reducing the mass that affects the magnitude of the impact load. The crimping head device is configured to be provided with a first impact absorbing slide part and a second impact absorbing slide part. Furthermore, sliding resistance can be made substantially zero or minimal. Therefore, when the crimping head main body presses the workpiece, the first impact absorbing slide part and the second impact absorbing slide part reduce the impact load in the Z-axis direction when the workpiece comes into contact with the workpiece, thereby mitigating the impact. [Brief explanation of the drawings]

[0012] [Figure 1] 4 is a cross-sectional view taken along line II in FIG. 3 showing a crimping head device according to an embodiment of the present invention; [Figure 2] Cross-sectional view of line II-II in Figure 1; [Figure 3] 3 is a view of a crimping head device according to an embodiment of the present invention, taken in the direction of arrow III in FIG. 1; [Figure 4] IV arrow view of FIG. 3; [Figure 5] 1 is a diagram illustrating the operation of an inertial weight according to an embodiment of the present invention; [Figure 6]1 is an explanatory diagram of an operation of an embodiment of the present invention; [Figure 7] 10 is a schematic time chart comparing the load acting on the workpiece between the embodiment and comparative examples 1 and 2. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0013] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that substantially the same components in multiple embodiments are denoted by the same reference numerals, and descriptions thereof will be omitted.

[0014] (First embodiment) 1 to 4 show a crimping head device according to one embodiment of the present invention. 1 is a cross-sectional view taken along line II in FIG. 3, FIG. 2 is a cross-sectional view taken along line II-II in FIG. 1, FIG. 3 is a front view showing the external appearance of the crimping head device, and FIG. 4 is a side view showing the external appearance of the crimping head device.

[0015] The crimping head device 1 is provided with a Z-axis rotation motor 2 corresponding to a drive unit mounted on a base 20. The driving force of the Z-axis rotation motor 2 drives the crimping head main body 6 in the z-axis direction, and a workpiece 59 is crimped onto the upper surface of a workpiece 50 (see FIG. 5) placed on the base 20. Specifically, a ball screw shaft 3 is connected to a motor shaft (not shown) of the Z-axis rotation motor 2, a ball screw nut 4 is screwed onto the ball screw shaft 3, and a frame 5 is fixed to the ball screw nut 4. The rotation of the Z-axis rotation motor 2 allows the frame 5 to move back and forth in the Z-axis direction (vertical direction: gravity direction) relative to the base 20.

[0016] Frame 5 is connected between frames 51 and 52 by pitch direction parallelism adjustment mechanisms 7 and 8. The pitch direction parallelism of frames 51 and 52 can be adjusted by adjusting the tilt angle in the pitch direction by the pitch direction parallelism adjustment mechanisms 7 and 8. Frame 51 is fixed to frame 5. Frame 52 is fixed to a high-rigidity plate 15. Plate 15 is made of a thin, rigid body and is connected to rod 9 via a load cell tester 21.

[0017] The first shock absorbing sliding part that rotatably supports rod 9 is made up of air bearings 17 and 18 that serve as ultra-low friction bearings. Air bearing 17 is located on the upper side around rod 9, and air bearing 18 is located on the lower side around rod 9. When an impact load acts on rod 9 in the axial direction, the relative axial position of rod 9 can be freely displaced in the axial direction.

[0018] The crimping head main body 6 connected to the lower end of the rod 9 is configured as shown in Figures 2 and 5. A tool (tip jig) 54 is clamped by a tool clamp 53, and the tool 54 has a single air suction hole 55 through which a workpiece 59 (see Figure 6A) can be sucked onto the tip surface, making it possible to hold the workpiece at the tip of the tool 54. A heater 56 heats the tool 54, and a thermocouple 57 makes it possible to heat the tool 54 and detect its temperature. The tool 54 is held by a mechanical clamp system so that it can be changed according to the size of the workpiece. The workpiece is, for example, a sintered silver thermocompression bonded element.

[0019] During the bonding operation, the bonding head main body 6, which has attracted the object to be bonded 59 to its tip, is collided (applied pressure) with the workpiece 50 shown in FIG. 6A placed on the base 20, and the object to be bonded 59 is pressed against the workpiece 50. The bonding head device 1 uses, for example, a substrate as the workpiece and an element to which sintered silver has been thermocompression-bonded as the object to be bonded. The element is attracted from a lattice-shaped pallet, and heat is applied, and the bonding head main body pre-compresses the object to be bonded, with the sintered silver thermocompression-bonded to the element, onto the top surface of the substrate. In this way, the object to be bonded 59 is pre-compressed to the workpiece 50.

[0020] The second shock absorbing sliding parts 27, 28 are attached to a thin, circular, highly rigid plate 15 via a load cell tester 21 provided at the upper end of the rod 9. Specifically, the second shock absorbing sliding parts 27, 28 are made up of air-pel cylinders, and are attached to the plate 15 which is sandwiched at three points between upper rollers 33, 34 and a lower roller 35 which are rotatably attached via brackets 31, 32. The upper rollers 33, 34, the lower roller 35, and the plate 15 constitute a cam follower 30.

[0021] The air-pel cylinders 27, 28 are ultra-low-friction cylinders, with ultra-precise fittings that eliminate the need for seals. They are compatible with both ultra-low and ultra-high-speed operation, are resistant to external impacts, and can be used without lubrication or oil. When the Z-axis rotary motor 2, which corresponds to the drive unit, is driven, the rod 9 rapidly rises axially upon receiving an impact reaction force from the crimping head body 6 during crimping of the workpiece to the workpiece, attempting to raise the air-pel cylinders 27, 28 via the plate 15, rollers 33, 34, and brackets 31, 32. Since the total mass of the movable body, including the rod 9, load cell tester 21, plate 15, rollers 33, 34, 35, and brackets 31, 32, is relatively light, the impact during crimping of the workpiece to the workpiece is mitigated. Furthermore, high-speed crimping is possible.

[0022] Airpel Cylinders 27 and 28 are ultra-low friction cylinders that are specialized for single-acting push-out and achieve zero sliding resistance. The piston floats within the cylinder due to the air supply, and as it is completely non-contact, there is no wear and it has a semi-permanent long life. In addition, it has excellent responsiveness, allows delicate and precise load control, and is dust-free and lubrication-free, making it suitable for clean environments.

[0023] 5, in the θ-axis rotary motor 10, a ball screw shaft 13 connected to a motor shaft (not shown) is threaded into a ball screw nut 14. The ball screw shaft 13 and a plate 15 are connected via a ball spline 24.

[0024] The ball spline 24 is composed of a spline shaft (not shown) with a transfer groove (not shown) and an outer cylinder (not shown). A cage (not shown), a side ring (not shown), and steel balls (not shown) are installed inside the spline outer cylinder, allowing for smooth sliding. This allows for high-precision torque transmission, and the transmission of rotational and linear motion.

[0025] The θ-axis rotation motor 10, which can be driven in both forward and reverse directions, can rotate the plate 15, for example, 360 degrees forward and reverse around the axis of the rod 9 (θ-axis). In addition, by driving the θ-axis rotation motor 10, the rotation position of the plate 15 can be changed, allowing for mounting alignment adjustment of the underside (contact surface with the workpiece) of the crimping head main body 40 via the rod 9. Furthermore, when an impact reaction force is received from the crimping head main body 40 during crimping of the workpiece onto the workpiece, the ball spline 24 achieves low-friction sliding, absorbing axial displacement and mitigating the impact force.

[0026] The θ-axis rotary motor 10 uses a high-precision rotation mechanism to perform angle correction assembly of the rotation mechanism (360 degrees). When an impact force acts in the axial direction during linear motion, the steel ball rolls and slides smoothly, absorbing the impact force.

[0027] Pitch direction parallelism adjustment mechanisms 7 and 8, which correspond to the parallelism adjustment mechanisms, connect between frame 51 and frame 52 of frame 5. The pitch direction parallelism of frame 51 and frame 52 can be adjusted by the pitch direction parallelism adjustment mechanisms 7 and 8 by adjusting the tilt angle in the pitch direction.

[0028] As shown in Figures 2 and 3, the roll direction parallelism adjustment mechanism 41, which corresponds to the wedge mechanism, consists of two tapered wedges 45 and 46. The inclination of the crimping head body 6 in the roll direction can be adjusted according to the position of the inclined surfaces of the tapered wedges 45 and 46 relative to the rollers 47 and 48 into which the inclined surfaces of the tapered wedges 45 and 46 engage. Micrometers 37 and 38 are used as screws to press the tapered wedges 45 and 46. This allows the height position of the head tip to be adjusted in increments of 1 μm with one rotation of the micrometer. For example, if the pitch is 0.15 mm and the wedge taper ratio is 1:5, one rotation of the micrometer allows for a distance adjustment of 0.15 / 5 = 0.03 mm. It is assumed that the distance from the center of rotation to the head tip is the same as the distance from the wedge to the center of rotation.

[0029] Next, the operation of this embodiment will be described with reference to FIG. First, from the state shown in FIG. 6A, the Z-axis rotation motor 2 is driven to lower the crimping head main body 6, and the member 59 to be bonded, which is attracted to the tip, is brought close to the workpiece 50. Next, in the state shown in FIG. 6B, when the workpiece 59 is brought into contact with the upper surface of the workpiece 50 placed on the base 20, a reaction force is applied to the contact surface of the crimping head main body 6 in the direction of the arrow 61. 6C, pressure is applied in the Z-axis direction by driving Z-axis rotation motor 2. At this time, air bearings 17 and 18 cause substantially zero sliding resistance and frictional resistance, and also absorb impact forces. 6D, pressure is applied in the direction of arrow 62 by air-pel cylinders 27 and 28. At this time, the upper limit of the impact load in the direction of arrow 63 between the workpiece and the member to be joined is suppressed.

[0030] According to this embodiment, (1) the mass of the sliding part head is minimized, and (2) the sliding resistance is reduced to virtually zero by providing air bearings 17 and 18 corresponding to ultra-low friction bearings and air-pel cylinders 27 and 28 corresponding to ultra-low friction cylinders. This prevents overshooting of the impact load, which can prevent cracking of the workpiece.

[0031] According to the crimping head device 1 of this embodiment, it is possible to minimize the mass m of the components within the thick dashed line area indicated by reference numeral 60 in Figure 5 that move integrally with the crimping head body 6 and rod 9, among the "crimping head body 6, rod 9, first shock absorbing sliding parts 17, 18, and second shock absorbing sliding parts 27, 28," that is, the movable parts (rod equivalent parts) corresponding to the configuration of the crimping head body 6, rod 9, load cell tester 21, plate 15, and ball screw nut 14.Therefore, from the relationship of impact load F = mv / Δt (mass * velocity / collision time), the velocity v is increased as much as possible, and therefore the impact load can be suppressed by minimizing the mass m.

[0032] Specifically, when pressure is applied by the crimping head main body 6 and when the workpiece 59 and the workpiece 50 are brought into contact and pressurized, the first shock absorbing sliding parts 17, 18 and the second shock absorbing sliding parts 27, 28 slide in the rod axial direction (Z-axis direction) relative to "the crimping head main body and the rod." By employing an ultra-low friction bearing and an ultra-low friction cylinder for the first shock absorbing sliding parts 17, 18 and the second shock absorbing sliding parts 27, 28, respectively, sliding resistance can be made substantially zero, and overshooting of the shock load can be prevented.

[0033] According to this embodiment, the provision of parallelism adjustment mechanisms 7, 8, and 41 (parallelism copying mechanisms) improves the parallel flatness of the tip and prevents excessive loads. Specifically, to adjust the parallelism of the tip jig workpiece contact surface relative to the reference surface, fine adjustments of, for example, 5 μm in the roll direction are possible using the roll direction parallelism adjustment mechanism 41, which uses tapered wedges 45 and 46. Furthermore, adjustments can be made in 1 μm increments using a pressing mechanism using micrometers 37 and 38. Moreover, the provision of a high-speed, high-precision rotation mechanism reduces the occurrence of defective products, enables the pressure operation by the crimping head to be speeded up, and enables highly efficient crimping of the workpiece to be bonded.

[0034] (Experimental Data 1) This embodiment of the present invention is compared with Comparative Example 1 and Comparative Example 2. Experimental data are shown in FIG. The present embodiment was compared with Comparative Example 1 and Comparative Example 2 in terms of the transition of the load detected by the load cell tester during the time from the contact approach to the workpiece to the completion of crimping. In Comparative Example 1, as shown by the dashed-dotted line, the impact load continued to increase rapidly after contact, resulting in overshoot. In Comparative Example 2, as shown by the two-dot dashed line, the load continued to increase slowly after contact and then reached the target applied load. It took a long time to reach the target load.

[0035] In this embodiment, after contact, the load exceeded the lower load limit 64 in a short period of time, reached near the target load, and then remained stable near the target load without exceeding the upper load limit 65. According to Experimental Data 1, it was found that the time required for the crimping operation could be shortened and the possibility of damage caused by impact loads could be reduced. It was also found that the crimping operation could be speeded up and high efficiency of the equipment could be achieved.

[0036] According to this embodiment, an element is attracted to the tip of the crimping head body relative to a substrate as a workpiece, and the head is moved at high speed. After the element is seated on the top surface of the substrate, the load is not exceeded at the beginning of load application, as shown in Fig. 7. The initial load is applied in a short period of time, and after the target load is reached, the period from the start of seating of the element on the substrate to the end of crimping can be shortened.

[0037] (Other embodiments) Although the present embodiment has been described as an example of a process in which elements are attracted by one system, the present invention may also be embodied in a process in which elements are attracted by two systems. The form of the object to be bonded in the present invention is not limited to the form described above.

[0038] In the present embodiment, a clothespin-type tip tool is used for the configuration of the tip of the crimping head so that it can accommodate a plurality of elements having different sizes. The configuration of the crimping head in the present invention is not limited to the above-described embodiment.

[0039] The above-described allowable range of the applied load explained in this embodiment is one example, and in the present invention, the limit allowable range of the set load is not limited to the load value shown above. In one embodiment, a micrometer is used as the screw for pushing the wedge, but in other embodiments of the present invention, a configuration with another feed screw mechanism may be used. Of course, embodiments that do not use a micrometer or feed screw mechanism are also applicable to the present invention. Although an embodiment has been described in which the tilt of the crimping head body can be adjusted by adjusting the position of the wedge, the present invention is not limited to using a wedge.

[0040] The crimping head device of the present invention may comprise a plate (15) connected to the rod on the side opposite to the crimping head body, and the second shock absorbing sliding portion provided on the plate. In the crimping head device of the present invention, the second shock absorbing sliding portion may be a low-friction cylinder. In the crimping head device of the present invention, the second shock absorbing sliding portion may be provided on the plate via a cam follower (30).

[0041] In the crimping head device of the present invention, the first shock absorbing sliding portion may be a low-friction bearing. The crimping head device of the present invention may include a θ-axis rotary motor (10) for driving the rod in a forward and reverse direction around the axis of the rod as a central axis. The crimping head device of the present invention may be provided with a parallelism adjustment mechanism (7, 8) for adjusting the tilt angle in the pitch direction.

[0042] The crimping head device of the present invention may be provided with a wedge mechanism (41, 45, 46) for adjusting the inclination angle in the roll direction. In the crimping head device of the present invention, the crimping head body may have an air vent (55) at the tip for sucking in the workpieces.

[0043] As described above, the present invention is not limited to the above-described embodiment, and can be implemented in various forms without departing from the spirit and scope of the present invention. [Explanation of symbols]

[0044] 1 Pressure Head Device 2 Z-axis rotation motor (drive unit) 5 frames 6 Crimping head body 7, 8 Pitch direction parallelism adjustment mechanism (parallelism adjustment mechanism) 9 Rod 10 θ-axis rotation motor 15 plates 17, 18 Air bearing (first shock absorbing sliding part) 20 Foundation 24 Ball Spline 27, 28 Air Pel Cylinder (Second shock absorbing sliding part) 41 Roll direction parallelism adjustment mechanism (wedge mechanism) 44 Ball screw spline 50 Workpieces (objects) 59 Object to be joined

Claims

1. a base (20) on which a workpiece can be placed; a crimping head body (6) capable of crimping an object to be joined to a workpiece in the direction of the workpiece and separating the object from the workpiece; a rod (9) axially connected to the crimping head body; a first shock absorbing sliding portion (17, 18) capable of absorbing an axial shock of the crimping head body; a second shock absorbing sliding portion (27, 28) capable of absorbing an axial shock to the rod; and a drive unit (2) that drives the rod so that it can reciprocate in the axial direction.

2. a plate (15) connected to the rod on the side opposite to the crimping head body; The crimping head device according to claim 1 , further comprising: the second shock absorbing sliding portion provided on the plate.

3. 3. The crimping head device according to claim 1, wherein the second shock absorbing sliding portion is a low-friction cylinder.

4. 3. The crimping head device according to claim 2, wherein the second shock absorbing sliding portion is provided on the plate via a cam follower (30).

5. 2. The crimping head device according to claim 1, wherein the first shock absorbing sliding portion is a low-friction bearing.

6. 2. The crimping head device according to claim 1, further comprising a θ-axis rotation motor (10) for driving said rod in a forward and reverse direction about the axis of said rod.

7. 3. A crimping head device according to claim 1, further comprising a parallelism adjusting mechanism (7, 8) for adjusting the inclination angle in the pitch direction.

8. 3. A crimping head device according to claim 1, further comprising a wedge mechanism (41, 45, 46) for adjusting the inclination angle in the roll direction.

9. 2. A crimping head device according to claim 1, wherein the crimping head body has an air vent (55) at the tip for sucking in the workpiece.

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