Temperature measuring module

Abstract

To obtain a temperature measuring module with which it is possible to reduce a deviation between a contact position and a measurement object and suppress occurrence of a variation in measurement results.SOLUTION: A temperature measuring module 10 comprises: a measurement unit 12 that accommodates a specific substance H1 that becomes gaseous in at least a measurement temperature range; a contact unit 20 having a first side face 21 provided in at least a section of outer surface 12A of the measurement unit 12 and in contact with a measurement object P, and a second side face 22 provided in at least a section of inside face 12B of the measurement unit 12 and which the heat of the measurement object P is conveyed to, via the first side face 21; an adsorption unit 30 provided to the second side face 22, for adsorbing the specific substance H1 at lower than a specific temperature in the temperature measurement range and desorbing the specific substance H1 at the specific temperature or above; and a temperature sensor unit 40 for detecting the temperature of the measurement object P on the basis of the pressure in the measurement unit 12.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a temperature measurement module. [Background technology]

[0002] Patent document 1 describes a technology in which both metal wires of a thermoelectric element made of two different types of metal are arranged along a contact plate from both ends of the contact plate that contacts the heated body, and are joined near the center of the contact plate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 7-198504 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the technology described in Patent Document 1, since the thermoelectric element (thermocouple) is linear, there are significant restrictions on the shape of the contact plate that comes into contact with the object to be measured. As a result, there is a risk of variation in the measurement results due to misalignment of the contact position between the contact plate and the object to be measured.

[0005] In consideration of the above-mentioned problems, the present invention aims to provide a temperature measurement module that can reduce deviation in the contact position with the measurement object and suppress variation in measurement results. [Means for solving the problem]

[0006] The temperature measurement module described in claim 1 comprises a measurement section containing a specific substance that becomes a gas at least within the measurement temperature range; a contact section having a first side provided on at least a part of the outer surface of the measurement section and in contact with the measurement object; and a second side provided on at least a part of the inner surface of the measurement section and through which heat of the measurement object is transferred via the first side; an adsorption section provided on the second side and adsorbing the specific substance below a specific temperature within the measurement temperature range and desorbing the specific substance at or above the specific temperature; and a temperature sensor section that detects the temperature of the measurement object based on the pressure within the measurement section.

[0007] The temperature measurement module described in claim 1 includes a measurement unit containing a specific substance that becomes gaseous in a measurement temperature range, and a contact unit provided in the measurement unit. The contact unit has a first side surface provided on at least a part of the outer surface of the measurement unit and contacts the measurement object. The contact unit also has a second side surface provided on at least a part of the inner surface of the measurement unit, and is configured so that heat from the measurement object is transferred to the second side surface via the first side surface.

[0008] Here, an adsorption unit is provided on the second side surface. The adsorption unit is configured to adsorb a specific substance below a specific temperature in the measurement temperature range and desorb the specific substance above the specific temperature. Therefore, for example, when the adsorption unit reaches a specific temperature or higher due to heat transferred from the measurement object via the first and second sides, the specific substance is desorbed from the adsorption unit, and the pressure inside the measurement unit increases. The temperature sensor unit included in the temperature measurement module detects the temperature of the measurement object based on the pressure inside the measurement unit, taking advantage of the fact that the pressure inside the measurement unit changes depending on the temperature of the measurement object.

[0009] This temperature measurement module measures temperature based on pressure changes caused by the adsorption and desorption of a specific substance within the measurement unit, so there are fewer restrictions on the shape of the contact surface with the measurement object than with conventional thermocouples. This makes it possible to design the contact surface according to the measurement object, thereby reducing the deviation of the contact position with the measurement object and suppressing variations in measurement results.

[0010] A temperature measurement module according to a second aspect of the present invention is the temperature measurement module according to the first aspect, wherein the adsorption section is made up of a plurality of types of adsorbents whose specific temperatures are different from one another.

[0011] In the temperature measurement module according to claim 2, the adsorption section is made up of a plurality of types of adsorbents that have different specific temperatures and are capable of adsorbing specific substances, thereby enabling stepwise temperature detection.

[0012] The temperature measurement module described in claim 3 is configured as described in claim 2, wherein the adsorption section has at least one first row section in which multiple types of adsorbents are arranged in ascending order of the specific temperature along a first direction, and at least one second row section in which multiple types of adsorbents are arranged in descending order of the specific temperature along the first direction, and the first row section and the second row section are arranged alternately on the second side along a second direction different from the first direction.

[0013] In the temperature measurement module described in claim 3, the adsorption unit has a first row section and a second row section arranged along a first direction, and the first row section and the second row section are arranged alternately along a second direction different from the first direction on a second side surface of the contact unit. Here, the first row section is configured by arranging multiple types of adsorbents in ascending order of a specific temperature along the first direction. Furthermore, the second row section is configured by arranging multiple types of adsorbents in descending order of a specific temperature along the first direction. In other words, since the adsorption unit is configured by alternating rows in which multiple types of adsorbents are arranged in ascending and descending order, the multiple types of adsorbents can be arranged approximately evenly on the second side surface of the contact unit. Therefore, even if there is a deviation in the contact position between the measurement target and the contact unit, variations in measurement results are suppressed.

[0014] The temperature measurement module described in claim 4 has the configuration described in claim 2, wherein the temperature sensor unit is provided within the measurement unit and includes a piezoelectric element that converts the pressure within the measurement unit into a voltage, and a calculation unit that calculates the temperature of the measurement object based on the voltage output from the piezoelectric element, and the amount of the multiple types of adsorbents in the adsorption unit is adjusted for each type so that the relationship between the temperature within the measurement unit and the voltage output from the piezoelectric element is linear.

[0015] The temperature measurement module described in claim 4 includes a piezoelectric element that converts the pressure in the measurement unit into a voltage, and a calculation unit that calculates the temperature of the object to be measured based on the voltage output from the piezoelectric element. When using multiple types of adsorbents for stepwise temperature detection, the adsorption amount per unit amount of each adsorbent may differ, or the specific temperatures at which a specific substance desorbs may not necessarily be at equal intervals but may be discontinuous. In such cases, if an equal amount of each adsorbent is used, the relationship between the output from the piezoelectric element (i.e., the pressure in the measurement unit) and the temperature in the measurement unit (i.e., the temperature of the object to be measured) may not be ideally linear, which may reduce the sensor accuracy of the temperature sensor. Furthermore, if the temperature of the object to be measured is calculated taking into account the differences in the adsorption amount of each adsorbent type and the discontinuity of the specific temperatures, the processing in the calculation unit becomes complex.

[0016] In contrast, in the temperature measurement module described in claim 4, the amount of each type of adsorbent in the adsorption section is adjusted so that the relationship between the temperature in the measurement section and the voltage output from the piezoelectric element is linear. This makes it possible to improve the sensor accuracy of the temperature sensor section without performing complex processing.

[0017] The temperature measurement module described in claim 5 has the configuration described in claim 2, wherein the adsorption portion is arranged such that the adsorbent having the lowest specific temperature among the plurality of types of adsorbents is arranged in the area with the fastest heat transfer rate, depending on the variation in heat transfer rate that occurs on the second side surface when the contact portion is in contact with the measurement object.

[0018] The heat transfer rate between objects can vary depending on the contact state. Therefore, the heat transfer rate on the second side of the contact area can vary even within the same surface, depending on the contact state between the first side of the contact area and the measurement object. Therefore, for example, if an adsorbent with a lower specific temperature than other adsorbents is placed in an area with a slower heat transfer rate, it will take time for the second side of the contact area to reach the specific temperature at which the adsorbent is desorbed, and the pressure increase in the measurement area will be delayed. In this case, the responsiveness to temperature changes in the low-temperature area will be reduced.

[0019] In the temperature measurement module described in claim 5, the adsorption section is configured such that, in accordance with the variation in heat transfer rate that occurs on the second side surface when the contact section is in contact with the measurement target, an adsorbent with a lower specific temperature among the plurality of types of adsorbents is disposed in a portion with a faster heat transfer rate. This makes it possible to suppress delays in the pressure increase in the measurement section due to temperature changes in the low-temperature region, and improves responsiveness to temperature changes in the low-temperature region.

[0020] The temperature measurement module described in claim 6 is configured as described in claim 2, wherein the measurement unit has a partition unit that divides the internal space into multiple rooms, and the adsorption unit is provided in each room of the measurement unit and is configured by arranging different types of adsorbents so that the specific temperatures are different for each room.

[0021] In the temperature measurement module according to claim 6, the measurement unit includes a partition that divides the internal space into a plurality of chambers, and an adsorption unit is provided in each chamber. However, if a plurality of types of adsorbents with different specific temperatures are placed in one space within the measurement unit, there is a risk that a specific substance desorbed from an adsorbent with a low specific temperature will be adsorbed by another type of adsorbent with a high specific temperature. In such a case, the linear relationship between the pressure change within the measurement unit and the temperature of the object to be measured cannot be maintained, and the sensor accuracy may be reduced.

[0022] In the temperature measurement module according to claim 6, the adsorption unit is configured by arranging different types of adsorbents so that the specific temperatures of the chambers are different from each other. Therefore, the specific substance is prevented from moving between different types of adsorbents. As a result, it is possible to prevent a decrease in sensor accuracy caused by the specific substance desorbed from an adsorbent with a low specific temperature being adsorbed by another type of adsorbent with a high specific temperature.

[0023] A temperature measurement module according to a seventh aspect of the present invention is the temperature measurement module according to the second aspect of the present invention, wherein the plurality of types of adsorbents are configured so that the adsorption amounts of the specific substance per unit amount are the same.

[0024] In the temperature measurement module described in claim 7, the multiple types of adsorbents are configured so that the adsorption amount of the specific substance per unit amount is the same. Therefore, for example, if the differences in the specific temperatures of the multiple types of adsorbents are equally spaced, a linear relationship can be established between the pressure change in the measurement unit and the temperature of the object to be measured by making the amount of each adsorbent equal. Furthermore, even if the differences in the specific temperatures of the multiple types of adsorbents are not equally spaced, it is easy to derive a configuration that maintains the linear relationship between the pressure change in the measurement unit and the temperature of the object to be measured, making manufacturing easier.

[0025] The temperature measurement module described in claim 8 is configured as described in claim 1 or claim 2, wherein the measurement unit has a partition unit that divides the internal space into multiple rooms, the adsorption unit is provided in each room, and the temperature sensor unit is configured to detect the temperature of the measurement object for each room.

[0026] In the temperature measurement module described in claim 8, the measurement unit includes a partitioning section that divides the internal space into a plurality of rooms, and an adsorption section is provided in each room. However, if one adsorption section is provided in one space within the measurement unit, it will be impossible to measure variations in the surface temperature of the measurement object or local temperature increases.

[0027] In contrast, in the temperature measurement module described in claim 8, the suction parts are provided in each room, and the temperature sensor parts are configured to detect the temperature of the measurement object for each room. Therefore, the temperature distribution of the second side surface of the contact part can be measured by the suction parts provided for each of the multiple rooms, making it possible to measure the surface temperature distribution of the measurement object, local temperature rise, etc.

[0028] A temperature measurement module described in claim 9 is the configuration described in claim 1 or claim 2, wherein the adsorption section is made of an adsorbent containing a metal organic framework capable of adsorbing the specific substance.

[0029] In the temperature measurement module described in claim 9, the adsorbent constituting the adsorption part contains a metal organic framework capable of adsorbing and desorbing microparticles. This makes it possible to measure minute temperature changes, and the temperature measurement module has a wide range of applications.

[0030] The temperature measurement module described in claim 10 has the configuration described in claim 2, wherein the adsorption unit includes a plurality of types of adsorbents having different specific temperatures, and the plurality of types of adsorbents are configured to include metal-organic frameworks in which metal ions crosslinked by organic ligands are of different metal species.

[0031] In the temperature measurement module described in claim 10, each of the plurality of types of adsorbents includes a plurality of types of metal organic frameworks in which the metal species of the metal ions crosslinked by the organic ligands are different, thereby enabling stepwise temperature detection. [Effects of the Invention]

[0032] As described above, the temperature measurement module according to the present invention has the effect of reducing deviation in the contact position with the measurement object and suppressing variations in the measurement results. [Brief explanation of the drawings]

[0033] [Figure 1]FIG. 2 is a cross-sectional view showing a temperature measurement module according to the present embodiment. [Figure 2] FIG. 1 is a schematic diagram illustrating a lattice structure of a metal-organic framework. [Figure 3] FIG. 2 is a plan view of an adsorption section of the temperature measurement module according to the present embodiment, and schematically shows a state in which the adsorption section has adsorbed a specific substance. [Figure 4] (A) is a diagram showing the adsorption characteristics of multiple types of adsorbents that make up the adsorption section of this embodiment, showing the adsorption amount of a specific substance per unit amount, and (B) shows the relationship between the pressure inside the measurement section and the temperature of the measurement object calculated by the temperature sensor section of this embodiment. [Figure 5] FIG. 2 is a block diagram showing the configuration of a temperature sensor unit of the temperature measurement module of the present embodiment. [Figure 6] 10A and 10B are diagrams for explaining an adsorption portion according to a first variant of this embodiment, in which (A) is a thermograph showing an example of the temperature distribution on the second side of the contact portion, and (B) is a plan view of the adsorption portion corresponding to the thermal conductivity of the second side shown in (A), and schematically shows the state in which the adsorption portion has adsorbed a specific substance. [Figure 7] FIG. 10 is a cross-sectional view of a temperature measurement module according to a second modification of the present embodiment. [Figure 8] FIG. 10 is a cross-sectional view of a temperature measurement module according to a fourth modification of the present embodiment. [Figure 9] 10 shows a fifth modified example of the present embodiment, in which the nonlinear relationship between the pressure inside the measurement unit and the temperature of the measurement object is shown by a two-dot chain line, and an approximation curve of the two-dot chain line is shown by a solid line. [Figure 10] FIG. 13 is a cross-sectional view of a temperature measurement module according to a seventh modified example of the present embodiment. [Figure 11] FIG. 13 is a plan view of an adsorption unit according to a seventh modified example, and schematically shows a state in which the adsorption unit has adsorbed a specific substance. [Figure 12] FIG. 13 is a block diagram showing the configuration of a temperature sensor unit according to a seventh modified example. [Figure 13] 13 is a flowchart showing an example of processing executed by a temperature sensor unit according to a seventh modified example. DETAILED DESCRIPTION OF THE INVENTION

[0034] An embodiment of a temperature measurement module according to the present invention will be described below with reference to Figures 1 to 5. The temperature measurement module according to the present invention is configured so that the surface of a measurement unit is brought into contact with the surface of an object to be measured, and the pressure inside the measurement unit can be changed by heat transferred from the object. Then, the surface temperature of the object to be measured is calculated based on the pressure inside the measurement unit.

[0035] A temperature measurement module 10 according to one embodiment will be described in detail below. Note that unless otherwise specified in the specification, each element is not limited to one, and multiple elements may exist. Furthermore, in the drawings, substantially identical elements are denoted by the same reference numerals, and redundant explanations in the specification will be omitted.

[0036] Fig. 1 is a cross-sectional view showing a temperature measurement module 10. As shown in Fig. 1, the temperature measurement module 10 includes a measurement unit 12 having an internal space, a contact unit 20 provided in the measurement unit 12, and an adsorption unit 30 provided on the surface of the contact unit 20 inside the measurement unit 12. The temperature measurement module 10 also includes a temperature sensor unit 40 that detects the temperature of the measurement object P based on the pressure in the internal space of the measurement unit 12.

[0037] (Measurement section) The measurement unit 12 is formed in a box shape with an internal space, and constitutes the housing (outer shell) of the temperature measurement module 10. The measurement unit 12 is formed from a resin material and has a flat rectangular box shape. A specific substance that becomes gaseous at least within the measurement temperature range is contained inside the measurement unit 12. In this embodiment, a specific substance H1 that becomes gaseous within the temperature measurement range is contained inside the measurement unit 12. The specific substance H1 is, for example, water (water molecules). A bottom surface 14 of the measurement unit 12 is placed on the top surface of the object P that is the measurement target.

[0038] The shape and material of the measuring unit 12 are not limited to the example of this embodiment, and any shape and material can be used. The type of specific substance is not limited to the example of this embodiment, and any substance can be used as long as it can be adsorbed by the adsorption unit 30 described later.

[0039] (contact part) The contact portion 20 constitutes at least a part of the outer shell of the temperature measurement module 10 and is integrated with the measurement portion 12. As an example, the contact portion 20 is formed of a material with high thermal conductivity, such as a metal plate, and is preferably formed of a material with higher thermal conductivity than the measurement portion 12. In this embodiment, the rectangular plate-shaped contact portion 20 constitutes a part of the bottom surface 14 of the measurement portion 12.

[0040] The contact portion 20 has a first side surface 21 and a second side surface 22 as side surfaces on one side and the other side in the plate thickness direction. The first side surface 21 forms part of the outer surface 12A of the measurement portion 12 and is in contact with the surface of the measurement object P. The second side surface 22 forms part of the inner surface 12B of the measurement portion 12. The second side surface 22 is configured so that heat from the measurement object P is transferred to it via the first side surface 21.

[0041] (Adsorption part) The adsorption unit 30 is provided inside the measurement unit 12 on the second side surface 22 of the contact unit 20. The adsorption unit 30 acts to adsorb the specific substance H1 below a predetermined specific temperature included in the measurement temperature range, and to desorb the specific substance H1 at a temperature equal to or higher than the predetermined specific temperature. When the specific substance H1 is desorbed from the adsorption unit 30, the pressure inside the measurement unit 12 increases compared to before desorption. Note that the "specific temperature" referred to here is not limited to a single value, but is a broad concept that also includes a predetermined temperature range.

[0042] Here, the adsorption unit 30 is composed of multiple types of adsorbents having different specific temperatures. In this embodiment, the adsorption unit 30 is composed of three types of adsorbents 32 (32A, 32B, 32C) arranged on the second side surface 22 of the contact unit 20.

[0043] As the adsorbent 32, an adsorbent containing as a main component a material having the ability to adsorb the specific substance H1, such as silica gel or a metal-organic framework, can be used. In one example of this embodiment, the three types of adsorbents 32 are composed of adsorbents containing a powdery metal-organic framework 500 as a main component.

[0044] FIG. 2 is a schematic diagram showing the lattice structure of a metal-organic framework (MOF) 500. As shown in FIG. 2, the metal-organic framework 500 is a material formed of metal ions 501 and organic ligands 502 and has a highly regular lattice structure. The metal-organic framework 500 can occlude (adsorb) microparticles such as water (water molecules) within its lattice structure, as with the specific substance H1 of this embodiment, and can desorb them under predetermined conditions. Examples of metal ions that can be used include those extracted from inorganic metal compounds such as metal oxides and metal salts of zinc (Zn), copper (Cu), cobalt (Co), zirconium (Zr), etc. Examples of organic ligands that can be used include those having a functional group capable of coordinating with a metal atom, such as a carboxyl group, an imidazole group, or an amide group.

[0045] 1, the adsorption unit 30 has three types of adsorbents 32: a first adsorbent 32A, a second adsorbent 32B, and a third adsorbent 32C. The first adsorbent 32A, the second adsorbent 32B, and the third adsorbent 32C are fixed to the second side surface 22 of the contact unit 20 via, for example, an adhesive.

[0046] The first adsorbent 32A, the second adsorbent 32B, and the third adsorbent 32C are each mainly composed of a metal-organic structure 500 in which the metal species of the metal ions 501 crosslinked by the organic ligand 502 are different from each other, so that the specific temperatures are different from each other. In the present embodiment, the specific temperature of the first adsorbent 32A is set to the first specific temperature T1 [°C]. Further, the specific temperature of the second adsorbent 32B is set to the second specific temperature T2 [°C]. Furthermore, the specific temperature of the third adsorbent 32C is set to the third specific temperature T3 [°C]. These specific temperatures have the relationship of T1 [°C] < T2 [°C] < T3 [°C]. Also, the difference Δt1 between the first specific temperature T1 [°C] and the second specific temperature T2 [°C], and the difference Δt2 between the second specific temperature T2 [°C] and the third specific temperature T3 [°C] are set to be the same.

[0047] Note that the plurality of types of adsorbents may be configured such that the specific temperatures are different from each other by mainly including metal-organic structures 500 having different lattice structures. Also, the specific temperatures of the plurality of adsorbents do not have to be set at equal intervals within the measurement temperature range, and may be set discontinuously (unequally spaced).

[0048] In the adsorption unit 30, when the surface of the second side surface 22 of the contact unit 20 is less than the first specific temperature T1 [°C], all the adsorbents 32 (32A, 32B, 32C) are in a state of adsorbing the specific substance H1. Then, when the surface of the second side surface 22 of the contact unit 20 becomes equal to or higher than the first specific temperature T1 [°C], the specific substance H1 desorbs from the first adsorbent 32A and raises the pressure in the measurement unit 12. Further, when the surface of the second side surface 22 of the contact unit 20 becomes equal to or higher than the second specific temperature T2 [°C], the specific substance H1 desorbs from the second adsorbent 32B, and when the surface of the second side surface 22 of the contact unit 20 becomes equal to or higher than the third specific temperature T3 [°C], the specific substance H1 desorbs from the third adsorbent 32C. In this way, the measurement unit 12 is configured such that when the surface temperature of the second side surface 22 of the contact unit 20 rises, the internal pressure rises step by step with each specific temperature as a threshold value.

[0049] 3 is a plan view of the adsorption unit 30 viewed from above the second side surface 22 of the contact unit 20. As shown in FIG. 3, multiple types of adsorbents 32 are arranged on the second side surface 22 of the contact unit 20 in a predetermined pattern.

[0050] Specifically, the adsorption section 30 has at least one first row section 30R1 in which multiple types of adsorbents 32 are arranged in ascending order of specific temperatures along the first direction W1, and at least one second row section 30R2 in which multiple types of adsorbents are arranged in descending order of specific temperatures along the first direction W1.

[0051] In this embodiment, the first row section 30R1 is configured so that the first adsorbent 32A, the second adsorbent 32B, and the third adsorbent 32C are arranged in this order along the first direction W1. The second row section 30R2 is configured so that the third adsorbent 32C, the second adsorbent 32B, and the first adsorbent 32A are arranged in this order along the first direction W1.

[0052] In this embodiment, the suction portion 30 includes a plurality of first rows 30R1 and a plurality of second rows 30R2. The plurality of first rows 30R1 and the plurality of second rows 30R2 are alternately arranged along a second direction W2 that is different from the first direction W1. In this embodiment, the second direction W2 is set to a direction perpendicular to the first direction W1. However, the second direction W2 is not limited to this and can be changed appropriately to match the surface shape of the second side surface 22.

[0053] 4(A) is an example showing the adsorption characteristics of three types of adsorbents 32, with the vertical axis representing the amount of specific substance H1 adsorbed per unit quantity. As shown in this figure, the first adsorbent 32A has an adsorption amount of specific substance H1 per unit quantity that is approximately half that of the other adsorbents. On the other hand, the second adsorbent 32B and the third adsorbent 32C have approximately the same amount of specific substance H1 adsorbed per unit quantity, approximately twice that of the first adsorbent 32A.

[0054] Here, the amounts of the three types of adsorbents 32 in the adsorption unit 30 are adjusted for each type so that the relationship between the temperature of the measurement object P and the voltage output from a piezoelectric element 42 (described later) is the linear relationship shown in FIG. 4(B). FIG. 4(B) shows the relationship between the pressure inside the measurement unit and the temperature of the measurement object P (i.e., the temperature of the second side surface 22), with the vertical axis representing pressure P [Pa] and the horizontal axis representing the temperature of the measurement object P. For this reason, in this embodiment, the amount of the first adsorbent 32A is set to approximately twice the amount of the other adsorbents, and the amounts of the second adsorbent 32B and the third adsorbent 32C are set to approximately the same (see FIG. 3). As a result, the temperature of the measurement object P can be calculated by substituting the voltage value output from the piezoelectric element 42 into a simple linear equation (first-order equation).

[0055] (Temperature sensor part) The temperature sensor unit 40 is provided within the measurement unit 12 and includes a piezoelectric element 42 that converts the pressure within the measurement unit 12 into a voltage, and a calculation unit 50 that calculates the temperature of the object to be measured P based on the voltage output from the piezoelectric element 42.

[0056] The piezoelectric element 42 is made up of a known piezoelectric element (piezoelectric device), and is a device that generates a voltage when force (pressure) is applied due to the piezoelectric effect. As an example, the piezoelectric element 42 is attached to the ceiling surface 16 of the measurement unit 12 facing the suction unit 30.

[0057] 5 is a block diagram showing the configuration of the calculation unit 50. As shown in this figure, the calculation unit 50 is a device configured with, for example, a control IC or the like, and has, as its hardware configuration, a CPU (Central Processing Unit) 51, a ROM (Read Only Memory) 52, a RAM (Random Access Memory) 53, a storage 54, and an input / output I / F 56. Each component is connected to each other via a bus 57 so as to be able to communicate with each other.

[0058] The CPU 51 is a central processing unit that reads a program from the ROM 52 or storage 54 and executes the program using the RAM 53 as a work area. The input / output I / F 56 is an interface for connecting to an external device. The piezoelectric element 42 is connected to the input / output I / F 56. The input / output I / F 56 is also connected to an output device 44 that outputs the temperature of the measurement object P calculated based on the voltage output from the piezoelectric element 42. The output device 44 is, for example, a terminal such as a display device or a tablet. At least one of the piezoelectric element 42 and the output device 44 may be configured to be connected to the calculation unit 50 via a network.

[0059] The CPU 51 of the calculation unit 50 uses the above hardware configuration to execute various functions of the calculation unit 50. The calculation unit 50 includes, as functional components, a voltage measurement unit 51A and a temperature calculation unit 51B. Each functional component is realized by the CPU 51 reading and executing a program stored in the ROM 52 or storage 54.

[0060] Voltage measurement unit 51A measures the voltage value generated by piezoelectric element 42. Temperature calculation unit 51B calculates the temperature of measurement object P based on the voltage measured by voltage measurement unit 51A. Temperature calculation unit 51B refers to a data table stored in advance in storage 54 and calculates the pressure P [Pa] inside measurement unit 12 based on the voltage value V [v] measured by voltage measurement unit 51A. Then, it refers to the data table in which the pressure P [Pa] inside measurement unit 12 is associated with the temperature of measurement object P, and identifies the temperature T [°C] of measurement object P. The data table is created based on a linear equation that shows a linear relationship between the pressure P [Pa] and the temperature T [°C] of measurement object P (see FIG. 4(B)).

[0061] As described above, in this embodiment, the adsorption unit 30 is configured with three types of adsorbents 32 each having a different specific temperature. Therefore, the calculation unit 50 can calculate the temperature of the measurement object P in three stages using the specific temperature of each adsorbent 32 as a threshold value.

[0062] (Action and effect) As described above, the temperature measurement module 10 according to this embodiment includes the measurement unit 12 containing the specific substance H1 (specific substance) that becomes a gas within the measurement temperature range, and the contact unit 20 provided in the measurement unit 12. The first side surface 21 of the contact unit 20 is provided on at least a part of the outer surface 12A of the measurement unit 12, and contacts the measurement object P. The second side surface 22 of the contact unit 20 is provided on at least a part of the inner surface 12B of the measurement unit 12, and is configured so that heat from the measurement object P is transferred to the second side surface 22 via the first side surface 21.

[0063] Here, an adsorption unit 30 is provided on the second side surface 22. The adsorption unit 30 is configured to adsorb the specific substance H1 below a specific temperature in the measurement temperature range and to desorb the specific substance H1 above the specific temperature. For this reason, for example, when the temperature of the adsorption unit 30 rises above a specific temperature due to heat transferred from the measurement object P via the first side surface 21 and the second side surface 22, the specific substance H1 is desorbed from the adsorption unit 30, and the pressure inside the measurement unit 12 increases. The temperature sensor unit 40 included in the temperature measurement module 10 is configured to detect the temperature of the measurement object P based on the pressure inside the measurement unit 12, taking advantage of the fact that the pressure inside the measurement unit 12 changes depending on the temperature of the measurement object P.

[0064] According to the temperature measurement module 10, temperature is measured from pressure changes caused by the adsorption and desorption of the specific substance H1 inside the measurement unit 12, and therefore there are fewer restrictions on the shape of the contact surface with the measurement object P than with conventional thermocouples. This makes it possible to design the contact surface according to the measurement object P, and as a result, it is possible to reduce deviation in the contact position with the measurement object P and suppress variation in the measurement results.

[0065] 1, the adsorption unit 30 is configured with three types of adsorbents 32 (first adsorbent 32A, second adsorbent 32B, and third adsorbent 32C) that have different specific temperatures and are capable of adsorbing specific substances, thereby enabling temperature detection in stages.

[0066] Furthermore, as shown in FIG. 3 , the adsorption unit 30 has a first row portion 30R1 and a second row portion 30R2 arranged along the first direction W1. The first row portion 30R1 and the second row portion 30R2 are alternately arranged along the second direction W2, which is different from the first direction W1, on the second side surface 22 of the contact unit 20. Here, the first row portion 30R1 is configured by arranging three types of adsorbents 32 in ascending order of a specific temperature along the first direction W1. The second row portion 30R2 is configured by arranging three types of adsorbents 32 in descending order of a specific temperature along the first direction W1. In other words, the adsorption unit 30 is configured by alternating rows in which the three types of adsorbents 32 are arranged in ascending and descending order. This allows the three types of adsorbents 32 to be arranged approximately evenly on the second side surface 22 of the contact unit 20. Therefore, even if there is a deviation in the contact position between the measurement target P and the contact unit 20, variation in measurement results is suppressed.

[0067] Furthermore, the three types of adsorbents 32 are configured to include multiple types of metal-organic frameworks 500 in which the metal ions crosslinked by the organic ligands are of different metal species. The inclusion of a metal-organic framework capable of adsorbing and desorbing microparticles in the adsorbent enables stepwise temperature measurement even for minute temperature changes. This allows the temperature measurement module 10 to also measure minute temperature changes, providing a wide range of applications.

[0068] Although the temperature measurement module 10 according to this embodiment has been described above, the present invention is not limited to this. Modifications of this embodiment are listed below. Each modification basically follows the configuration of the temperature measurement module 10 according to the above embodiment, and therefore can achieve the same functions and effects.

[0069] (First Modification) A first modified example of this embodiment will be described with reference to Figures 6(A) and 6(B). The adsorption unit 60 according to the first modified example is characterized in that, in accordance with the variation in heat transfer rate that occurs on the second side surface 22 when the contact unit 20 is in contact with the measurement target P (not shown), the adsorbent with the lowest specific temperature among the multiple types of adsorbents is arranged in the area with the highest heat transfer rate. Since the other configuration is the same as in the above embodiment, the same reference numerals are used for the similar configuration and the description thereof will be omitted.

[0070] 6(A) is a thermograph showing an example of the temperature distribution on the second side surface 22 of the contact portion 20 when the temperature measurement module 10 and the measurement target P are in contact for a predetermined time. In the example shown in FIG. 6(A), the surface temperature is highest in the first region X1 that constitutes the central region of the second side surface 22, and it can be seen that the first region X1 is the region with the fastest heat transfer rate. Furthermore, the surface temperatures decrease in the second region X2 and the third region X3 that surround the first region X1 from the outside, in that order, as one moves toward the outer periphery of the second side surface 22. Therefore, it can be seen that the third region X3 of the second side surface 22 is the region with the slowest heat transfer rate.

[0071] As such, the heat transfer rate between objects may differ depending on the contact state. Therefore, the heat transfer rate of the second side surface 22 of the contact portion 20 may vary even within the same plane depending on the contact state between the first side surface 21 of the contact portion 20 and the measurement object P. Therefore, for example, if an adsorbent with a lower specific temperature than other adsorbents is placed in an area with a slow heat transfer rate, it takes time for the second side surface 22 of the contact portion 20 to reach the specific temperature at which the adsorbent 32 is desorbed, and the pressure increase in the measurement portion 12 is delayed. In this case, the responsiveness of the low-temperature area to temperature changes decreases.

[0072] 6(B) is a plan view of the adsorption unit 60 according to the first modification, showing the state in which the specific substance H1 has been adsorbed. As shown in this figure, in the adsorption unit 60, a first adsorbent 32A having the lowest specific temperature (T1 [°C]) is disposed in a central region of the second side surface 22 corresponding to the first region X1. A second adsorbent 32B having a specific temperature set to T2 [°C] (>T1 [°C]) is disposed so as to surround the region in which the first adsorbent 32A is disposed from the outside, and a third adsorbent 32C having a specific temperature set to T3 [°C] (>T2 [°C]) is disposed outside the second adsorbent 32B. In other words, the adsorbents having lower specific temperatures are disposed closer to the center of the second side surface 22, where the heat transfer rate is faster.

[0073] According to the configuration of the first modified example, the first adsorbent 32A, whose specific temperature is set to the lowest T1 [°C], is disposed in the portion of the second side surface 22 where the heat transfer rate is the fastest. This minimizes the timing at which the specific substance H1 desorbs from the first adsorbent 32A during temperature changes in the low-temperature region. As a result, it is possible to suppress delays in the pressure increase within the measurement unit 12, and improve responsiveness to temperature changes in the low-temperature region.

[0074] (Second Modification) A second modification of this embodiment will be described with reference to FIG. 7. FIG. 7 is a cross-sectional view of a temperature measurement module 70 according to the second modification. In the temperature measurement module 70 according to the second modification, the measurement unit 72 is characterized in that it includes a partitioning unit 74 that divides the internal space into a plurality of rooms. The adsorption unit 80 is provided in each room of the measurement unit 72 and is configured by disposing different types of adsorbents so that the specific temperatures of the rooms differ from one another. Since the other configurations are the same as those of the above embodiment, the same reference numerals are used for similar configurations and descriptions thereof will be omitted.

[0075] 7, a plurality of partitions 74 extending in the height direction of the measuring section 72 are provided inside the measuring section 72. The partitions 74 are made up of a first partition 74A, a second partition 74B, a third partition 74C, and a fourth partition 74D, which form vertical walls extending in the height direction inside the measuring section 72. The plurality of partitions 74 may be molded integrally with the measuring section 72, or may be separate bodies.

[0076] The interior of the measurement unit 72 is divided into three rooms facing the contact unit 20. A piezoelectric element 42 is provided on the ceiling surface 76 of each room.

[0077] In the first chamber S1, a first adsorbent 32A is disposed on the second side surface 22 of the contact portion 20. Therefore, the piezoelectric element 42 in the first chamber S1 detects a change in pressure in the first chamber S1 due to adsorption or desorption of the specific substance H1 from the first adsorbent 32A.

[0078] In the second chamber S2, a second adsorbent 32B is disposed on the second side surface 22 of the contact portion 20. Therefore, the piezoelectric element 42 in the second chamber S2 detects a change in pressure in the second chamber S2 caused by the specific substance H1 being adsorbed or desorbed from the second adsorbent 32B.

[0079] In the third chamber S3, a third adsorbent 32C is disposed on the second side surface 22 of the contact portion 20. Therefore, the piezoelectric element 42 in the third chamber S3 detects a change in pressure in the third chamber S3 caused by the specific substance H1 being adsorbed or desorbed from the third adsorbent 32C.

[0080] In the temperature sensor unit 40, the voltage generated by the piezoelectric elements 42 arranged in each room is measured by the calculation unit 50, and based on these voltages, the temperature of the measurement object P is calculated. That is, the temperature of the measurement object P is calculated based on the pressure in each room within the measurement unit 72.

[0081] As described above, in the temperature measurement module 70 according to the second modified example, the measurement section 72 includes the partition section 74 that partitions the internal space into a plurality of chambers, and the adsorption section 80 is provided in each chamber.

[0082] However, if multiple types of adsorbents with different specific temperatures are placed in one space within the measurement unit 72, there is a risk that the specific substance H1 desorbed from the adsorbent with a low specific temperature will be adsorbed by another type of adsorbent with a high specific temperature. In such a case, the linear relationship between the pressure change within the measurement unit 72 and the temperature of the measurement target cannot be maintained, and there is a risk that the sensor accuracy will decrease.

[0083] Therefore, in the second modified example, the adsorption unit 80 has different types of adsorbents 32 (first adsorbent 32A, second adsorbent 32B, third adsorbent 32C) arranged in each chamber so that the specific temperatures are different from one another. Specifically, the first adsorbent 32A, whose specific temperature is T1 [°C], is arranged in the first chamber S1. The second adsorbent 32B, whose specific temperature is T2 [°C], is arranged in the second chamber S2. The third adsorbent 32C, whose specific temperature is T3 [°C], is arranged in the third chamber S3.

[0084] This prevents the specific substance H1 from moving between different types of adsorbents in the space inside the measurement unit 72. As a result, it is possible to prevent a decrease in sensor accuracy caused by a specific substance desorbed from an adsorbent with a low specific temperature being adsorbed by another type of adsorbent with a high specific temperature.

[0085] In the second modified example, the form of the partitions in the measurement unit 72 is merely an example and is not limited to this. For example, the partitions provided in the measurement unit may be in a grid shape or a concentric circle shape in a plan view.

[0086] (Third Modification) Furthermore, although not shown, the multiple types of adsorbents disposed on the second side surface 22 of the contactor 20 as the adsorption unit may be configured to have the same adsorption amount of the specific substance H1 (specific substance) per unit amount. In this case, as in the adsorbent 32 of the above embodiment, if the difference Δt1 between the specific temperature T1 [°C] of the first adsorbent 32A and the specific temperature T2 [°C] of the second adsorbent 32B and the difference Δt2 between the specific temperature T2 [°C] of the second adsorbent 32B and the specific temperature T3 [°C] of the third adsorbent 32C are equally spaced, a linear relationship between the pressure change in the measurement unit 12 and the temperature of the measurement target P can be easily established by equalizing the amount of each adsorbent. Furthermore, even if the differences in the specific temperatures of the multiple types of adsorbents are not equally spaced, it is easy to derive a configuration that maintains a linear relationship between the pressure change in the measurement unit and the temperature of the measurement target P, thereby facilitating manufacturing.

[0087] (Fourth Modification) A fourth modified example of this embodiment will be described with reference to FIG. 8. FIG. 8 is a cross-sectional view of a temperature measurement module 90 according to the fourth modified example. In the temperature measurement module 90 according to the fourth modified example, the measurement unit 92 is characterized in that it includes a partitioning unit 94 that divides the internal space into multiple rooms. The adsorption unit 30 is provided in each room of the measurement unit 92 and is configured by disposing different types of adsorbents so that the specific temperatures of the rooms differ from one another. Since the other configurations are the same as those of the above embodiment, the same reference numerals are used for similar configurations and descriptions thereof will be omitted.

[0088] As shown in Fig. 8, the interior of the measuring unit 92 is provided with a plurality of partitions 94 extending in the height direction of the measuring unit 92. The partitions 94 are composed of a first partition 94A, a second partition 94B, and a third partition 94C, which form vertical walls extending in the height direction within the measuring unit 92. This divides the interior of the measuring unit 92 into a first chamber S1, a second chamber S2, a third chamber S3, and a fourth chamber S4. The plurality of partitions 94 may be molded integrally with the measuring unit 92 or may be separate bodies.

[0089] A second side surface 22 (not shown) of the contact portion 20 is disposed facing four chambers (S1 to S4) within the measurement portion 92. Four suction portions 30 are disposed on the second side surface 22 of the contact portion 20, one for each chamber. Furthermore, four piezoelectric elements 42 that generate voltage based on the pressure in each chamber are disposed on the ceiling surface 96 of each chamber.

[0090] The temperature sensor unit 40 measures the voltage generated by the piezoelectric elements 42 arranged in each room (S1 to S4) using the calculation unit 50, and calculates the temperature of the measurement object P for each room based on these voltages. This makes it possible to measure the surface temperature of the parts of the measurement unit 92 corresponding to each room, and the temperature distribution on the surface of the measurement object P can be determined.

[0091] In the temperature measurement module 70 according to the second modified example, the measurement unit 72 includes a partitioning section 74 that partitions the internal space into a plurality of chambers (S1 to S3), and each chamber is provided with an adsorption section 80. However, if one adsorption section 80 is provided in one space within the measurement unit 92, it will be impossible to measure variations in the surface temperature of the measurement object P, local temperature increases, and the like.

[0092] In contrast to this, in the temperature measurement module 90 according to the fourth modification, the adsorption units 30 are provided in each room, and the temperature sensor units 40 are configured to detect the temperature of the measurement object P for each room. Therefore, the temperature distribution of the second side surface 22 of the contact unit 20 can be measured by the adsorption units 30 provided for each of the multiple rooms, making it possible to measure the surface temperature distribution of the measurement object, local temperature rise, etc.

[0093] (Fifth Modification) In the above embodiment, the amounts of the first adsorbent 32A, the second adsorbent 32B, and the third adsorbent 32C as the adsorbents are varied depending on the amount of a specific substance adsorbed per unit amount. However, this is not limiting. For example, the amounts of the first adsorbent 32A, the second adsorbent 32B, and the third adsorbent 32C may be equal. In this case, as shown by the two-dot chain line in FIG. 9 , the proportional coefficient between the temperature T [°C] of the measurement object P and the pressure P [Pa] in the measurement unit 72 based on the voltage V [v] output from the piezoelectric element 42 differs depending on the temperature range, and therefore is not linear. Therefore, the calculation unit 50 may calculate the temperature of the measurement object P based on an approximation curve C1 that indicates the linear relationship between the temperature of the measurement object P and the voltage output from the piezoelectric element 42, as shown by the solid line in FIG. 9 .

[0094] Alternatively, the calculation unit 50 may calculate the temperature of the object to be measured P by changing the proportionality coefficient between the temperature T [°C] of the object to be measured P and the pressure P [Pa] within the measurement unit 72 based on the voltage V [v] output from the piezoelectric element 42, depending on the temperature range between specific temperatures (T1, T2, T3).

[0095] (Sixth Modification) Although not shown, in the above embodiment and each modified example, the adsorption unit 30 may be made of an adsorbent containing at least one metal-organic framework that changes color upon desorption of the specific substance H1. In this case, for example, the measurement unit 12 serving as a housing may be formed from a transparent material, making it possible to observe the surface of the adsorption unit 30. As a result, the adsorption unit 30 changes color at the location where the specific substance H1 is desorbed from the adsorbent, making it easier to visually grasp the temperature change on the surface of the measurement target P.

[0096] In the above embodiment and modified example, water (water molecules) is used as an example of the specific substance H1, but the specific substance H1 is not limited to this. For example, gas molecules such as hydrogen and oxygen may also be used.

[0097] In addition, in the above-described embodiment and each modified example, the adsorbent includes a metal-organic framework, but the present invention is not limited to this. The adsorbent can be changed appropriately depending on the type of specific substance, and may be composed of, for example, silica gel.

[0098] (Seventh Modification) A seventh modified example of this embodiment will be described with reference to Fig. 10 to Fig. 13. Fig. 10 is a cross-sectional view of a temperature measurement module 100 according to the seventh modified example. Fig. 11 is a plan view of the adsorption section 200 of the temperature measurement module 100 according to the seventh modified example, and schematically shows a state in which the adsorption section 200 has adsorbed a specific substance.

[0099] As shown in these figures, the temperature measurement module 100 according to the seventh modification is characterized in that the measurement unit 102 includes a partitioning unit 104 that partitions the internal space into a plurality of rooms, similar to the temperature measurement module 90 according to the fourth modification. The adsorption unit 200 is provided in each room of the measurement unit 102, and is configured by arranging different types of adsorbents so that the specific temperatures of the rooms are different from each other.

[0100] Furthermore, this seventh modified example is characterized in that an inspection heater 300 is provided on the side of the contact part 20 so as to straddle the areas corresponding to each chamber of the measurement part 102, and abnormalities in the temperature measurement module are diagnosed by simultaneously heating each chamber with the heater 300. Since the other configurations are the same as those in the above embodiment, the same reference numerals are used for similar configurations and their description will be omitted.

[0101] A plurality of partitions 104 extending in the height direction of the measuring unit 102 are provided inside the measuring unit 102. The partitions 104 are made up of a first partition 104A, a second partition 104B, a third partition 104C, and a fourth partition 104D, which form vertical walls extending in the height direction within the measuring unit 102. The plurality of partitions 104 may be molded integrally with the measuring unit 102, or may be separate bodies.

[0102] The interior of the measurement unit 102 is divided into three rooms along the first direction W1 by the above-mentioned multiple partitions. The three rooms are provided facing the contact unit 20. A piezoelectric element 42 is provided on the ceiling surface 106 of each room.

[0103] In the first chamber S1, a first adsorbent 32A is disposed on the second side surface 22 of the contact portion 20. Therefore, the piezoelectric element 42 in the first chamber S1 detects a change in pressure in the first chamber S1 due to adsorption or desorption of the specific substance H1 from the first adsorbent 32A.

[0104] In the second chamber S2, a second adsorbent 32B is disposed on the second side surface 22 of the contact portion 20. Therefore, the piezoelectric element 42 in the second chamber S2 detects a change in pressure in the second chamber S2 caused by the specific substance H1 being adsorbed or desorbed from the second adsorbent 32B.

[0105] In the third chamber S3, a third adsorbent 32C is disposed on the second side surface 22 of the contact portion 20. Therefore, the piezoelectric element 42 in the third chamber S3 detects a change in pressure in the third chamber S3 caused by the specific substance H1 being adsorbed or desorbed from the third adsorbent 32C.

[0106] The heater 300 includes, for example, an electric heating wire that heats when energized as a heat source, and is provided along an end portion extending in the first direction W1 on one side in the second direction W2 of the plate-shaped contact portion 20. That is, the heater 300 is disposed so as to straddle the regions corresponding to the respective chambers of the measurement unit 102 via the contact portion 20. Therefore, by heating the heater 300, the adsorbents contained in the respective chambers can be heated simultaneously.

[0107] In the temperature sensor unit 40, the voltage generated by the piezoelectric elements 42 arranged in each room is measured by the calculation unit 50, and based on these voltages, the temperature of the measurement object P is calculated. That is, the temperature of the measurement object P is calculated based on the pressure in each room in the measurement unit 102.

[0108] 12 is a block diagram of the temperature sensor unit 40 according to the seventh modification. As shown in FIG. 12, in this seventh modification, a heater switch 310 is connected to the input / output I / F 56 of the calculation unit 50. The heater switch 310 is a switch that turns the heater 300 on and off, and is operated under the control of the calculation unit 50.

[0109] The calculation unit 50 also includes, as functional components, a voltage measurement unit 51A, a temperature calculation unit 51B, and an abnormality determination unit 51C. Each functional component is realized by the CPU 51 reading and executing a program stored in the ROM 52 or the storage 54.

[0110] The functions of the voltage measurement unit 51A and the temperature calculation unit 51B are the same as those in the above embodiment, and therefore detailed description thereof will be omitted. The abnormality determination unit 51C has a function of diagnosing an abnormality in the temperature measurement module 100 by simultaneously heating each room with the heater 300. Specifically, the abnormality determination unit 51C executes a self-diagnosis process described below to determine whether or not an abnormality exists in the temperature measurement module 100.

[0111] <Self-diagnosis processing> An example of the self-diagnosis processing executed based on the function of the abnormality determination unit 51C will be described below with reference to Fig. 13. This self-diagnosis processing is performed by the CPU 51 reading a program from the ROM 52 or the storage 54, expanding the program in the RAM 53, and executing it. The CPU 51 is an example of a processor.

[0112] First, the CPU 51 turns on the heater switch 310 to simultaneously heat the rooms (first room S1 to third room S3) of the measurement unit 102 (step S1), and starts a timer (step S2).

[0113] Next, CPU 51 sequentially performs self-diagnosis on each room of measurement unit 102. In step S3, it determines whether the room to be first self-diagnosed is first room S1, and if diagnosis of first room S1 is to be performed, it determines whether the internal pressure of first room S1 has reached a predetermined test pressure based on the voltage value measured by voltage measurement unit 51A (step S4).

[0114] Here, the predetermined inspection pressure is a threshold value registered in advance as a pressure that is expected when the specific temperature (T1 to T3) of the adsorbent 32 (32A to 32CPU) contained in the corresponding room is exceeded.

[0115] If the pressure in the first room S1 has reached the test pressure, it is determined whether the difference Δt1 [s] between the time elapsed from the start of the timer until the test pressure is reached and the standard time is greater than or equal to a predetermined threshold (step S5).

[0116] Here, the standard time is a time that is registered in advance as the time required for the test pressure to be reached by heating with the heater 300 when the corresponding room is in a normal state.

[0117] If the difference Δt1 [s] from the standard time is equal to or greater than a predetermined threshold, it is determined that an abnormality has occurred in the first room S1, and the output device 44 is notified of the abnormality (step S7), and the process proceeds to step S17. On the other hand, if the difference Δt1 [s] from the standard time is less than the predetermined threshold, it is determined that the state is normal, and the process proceeds to step S17 without notifying of the abnormality.

[0118] On the other hand, if it is determined in step S4 that the test pressure has not been reached, the process proceeds to step S6, where the CPU 51 determines whether a predetermined time has elapsed since the timer started. The predetermined time is longer than the standard time, and is a time during which it is expected that some kind of abnormality is likely to have occurred. If the CPU 51 determines that the predetermined time has not elapsed, it returns to the process of step S4. If the CPU 51 determines that the predetermined time has elapsed, it proceeds to step S7, where it notifies the abnormality.

[0119] Similarly, if the target of self-diagnosis is not the first room S1 in step S3, a determination is made as to whether it is the second room S2 (step S8), and if a diagnosis is to be made on the second room S2, a determination is made as to whether the internal pressure of the second room S2 has reached a predetermined test pressure based on the voltage value measured by the voltage measurement unit 51A (step S9).

[0120] If the pressure in the second room S2 has reached the test pressure, it is determined whether the difference Δt2 [s] between the time elapsed from the start of the timer until the test pressure is reached and the standard time is greater than or equal to a predetermined threshold (step S10).

[0121] If the difference Δt2 [s] from the standard time is equal to or greater than a predetermined threshold, it is determined that an abnormality has occurred in the second room S2, and the abnormality is notified to the output device 44 (step S12). On the other hand, if the difference Δt2 [s] from the standard time is less than the predetermined threshold, it is determined that the room is in a normal state, and the process proceeds to step S17 without notifying of the abnormality.

[0122] On the other hand, if it is determined in step S9 that the test pressure has not been reached, the process proceeds to step S11, where the CPU 51 determines whether a predetermined time has elapsed since the timer started. The predetermined time is longer than the standard time, and is a time during which it is expected that some kind of abnormality is likely to have occurred. If the CPU 51 determines that the predetermined time has not elapsed, the process returns to step S9. If the CPU 51 determines that the predetermined time has elapsed, the process proceeds to step S12, where it notifies the abnormality.

[0123] If the target of self-diagnosis is not the second room S2 in step S7, it is automatically determined that it is the third room S3, and the process proceeds to step S13. Then, in step S13, it is determined whether the internal pressure of the third room S3 has reached a predetermined inspection pressure based on the voltage value measured by the voltage measurement unit 51A.

[0124] If the pressure in the third chamber S3 has reached the test pressure, it is determined whether the difference Δt3 [s] between the time elapsed from the start of the timer until the test pressure is reached and the standard time is greater than or equal to a predetermined threshold value (step S14).

[0125] If the difference Δt3 [s] from the standard time is equal to or greater than a predetermined threshold, it is determined that an abnormality has occurred in the third room S3, and the abnormality is notified to the output device 44 (step S16). If the difference Δt3 [s] from the standard time is less than the predetermined threshold, it is determined that the room is in a normal state, and the process proceeds to step S17 without notifying of the abnormality.

[0126] On the other hand, if it is determined in step S13 that the test pressure has not been reached, the process proceeds to step S15, where the CPU 51 determines whether a predetermined time has elapsed since the timer started. The predetermined time is longer than the standard time, and is a time during which it is expected that some kind of abnormality is likely to have occurred. If the CPU 51 determines that the predetermined time has not elapsed, the process returns to step S13. If the CPU 51 determines that the predetermined time has elapsed, the process proceeds to step S16, where it notifies the user of the abnormality.

[0127] In step S17, it is determined whether self-diagnosis has been completed for all rooms. If diagnosis has been completed for all rooms, the heater switch 310 is turned OFF and the self-diagnosis process ends (step S18). On the other hand, if there is a room for which self-diagnosis process has not been completed, the process returns to the determination in step S3.

[0128] As described above, the temperature measurement module 100 according to the seventh modification is configured to diagnose abnormalities in the temperature measurement module by simultaneously heating each room with the heater 300, and to notify the room in which an abnormality has occurred. Specifically, it is determined that an abnormality has occurred when the difference between the time elapsed from the start of heating by the heater 300 until each room reaches the test pressure and the corresponding standard time is equal to or greater than a predetermined threshold. This makes it possible to detect abnormalities such as a leak of the adsorbent 32 in a specific room due to partial damage to the measurement unit 102, or an abnormality such as a large temperature difference between the rooms. [Explanation of symbols]

[0129] 10 Temperature Measurement Module 12 Measurement section 20 Contact area 21 First aspect 22 Second aspect 30 Adsorption part 30R1 First arrangement section 30R2 Second arrangement section 32 Adsorbents 40 Temperature sensor section 42 Piezoelectric element 50 Calculation Unit 60 Adsorption part 70 Temperature Measurement Module 72 Measurement section 74 Compartment 80 Adsorption part 90 Temperature Measurement Module 92 Measurement section 94 Compartment 100 Temperature Measurement Module 102 Measurement section 104 Partition 200 Adsorption part 300 heater 310 Heater switch S1 Room 1 S2 Second Room S3 Third Room S4 Fourth Room H1 Specified substances W1 1st direction W2 Second direction

Claims

1. a measuring unit containing a specific substance that becomes gaseous at least within a measurement temperature range; a contact portion having a first side surface provided on at least a portion of an outer surface of the measurement portion and in contact with a measurement object, and a second side surface provided on at least a portion of an inner surface of the measurement portion and through which heat of the measurement object is transferred via the first side surface; an adsorption section provided on the second side surface, which adsorbs the specific substance at a temperature below a specific temperature in the measurement temperature range and desorbs the specific substance at a temperature equal to or higher than the specific temperature; a temperature sensor unit that detects the temperature of the measurement object based on the pressure inside the measurement unit, Temperature measurement module.

2. the adsorption unit is composed of a plurality of types of adsorbents whose specific temperatures are different from one another; The temperature measurement module according to claim 1 .

3. the adsorption section has at least one first row section in which a plurality of types of the adsorbents are arranged in ascending order of the specific temperature along a first direction, and at least one second row section in which a plurality of types of the adsorbents are arranged in descending order of the specific temperature along the first direction, On the second side surface, the first row portions and the second row portions are alternately arranged along a second direction different from the first direction. The temperature measurement module according to claim 2 .

4. The temperature sensor unit a piezoelectric element provided in the measurement unit and configured to convert the pressure in the measurement unit into a voltage; a calculation unit that calculates the temperature of the measurement object based on the voltage output from the piezoelectric element, the amount of each of the plurality of types of adsorbents in the adsorption unit is adjusted for each type so that the relationship between the temperature of the measurement object and the voltage output from the piezoelectric element is linear. The temperature measurement module according to claim 2 .

5. the adsorption unit is configured such that an adsorbent having a lower specific temperature among the plurality of types of adsorbents is arranged in a portion having a higher heat transfer rate in accordance with a variation in heat transfer rate occurring on the second side surface when the contact portion is in contact with the measurement object. The temperature measurement module according to claim 2 .

6. the measurement unit includes a partition unit that partitions the internal space into multiple rooms, The adsorption unit is provided in each room of the measurement unit, and is configured by arranging different types of adsorbents in each room so that the specific temperatures are different from each other. The temperature measurement module according to claim 2 .

7. The plurality of types of adsorbents are configured so that the adsorption amounts of the specific substance per unit amount are the same. The temperature measurement module according to claim 2 .

8. the measurement unit includes a partition unit that partitions the internal space into multiple rooms, The adsorption unit is provided in each room, The temperature sensor unit is configured to detect the temperature of the measurement object for each of the rooms. The temperature measurement module according to claim 1 or 2.

9. the adsorption section is composed of an adsorbent including a metal organic framework capable of adsorbing the specific substance. The temperature measurement module according to claim 1 or 2.

10. the adsorption unit includes a plurality of types of adsorbents having different specific temperatures, and the plurality of types of adsorbents are configured to contain metal organic frameworks in which metal species of metal ions crosslinked by organic ligands are different from each other. The temperature measurement module according to claim 2 .

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