Industrial robot and conveyance system

Abstract

To provide an industrial robot and a conveyance system where a movable receiving member interlocked with movement speed of a hand mounting a wafer, the movable receiving member being capable of always receiving liquid dropping from the wafer.SOLUTION: An industrial robot comprises a conveyance unit 6 including: a hand 10 on which a wafer 2 is mounted; a first multi-joint arm 20 and a first motor for driving the first multi-joint arm; a movable receiving member 40 and a fixed receiving member 50 that are arranged below the hand 10; and a second multi-joint arm 60 having an end to which the movable receiving member 40 is combined and a second motor for driving the second multi-joint arm. The first multi-joint arm 20 makes the hand 10 reciprocally move along a linear first movement path P1 on the basis of rotation of the first motor. The second multi-joint arm 60 makes the movable receiving member 40 reciprocally move along a linear second movement path P2 vertically overlapped with the first movement path P1 on the basis of rotation of the second motor so as to be interlocked with movement speed of the hand 10.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to an industrial robot and a transport system. [Background technology]

[0002] Patent Document 1 describes an industrial robot used in a semiconductor manufacturing system. The industrial robot described in Patent Document 1 uses an articulated arm to load and unload semiconductor wafers into and from a processing device. The semiconductor wafer is held by a hand attached to the tip of the articulated arm. The articulated arm moves the hand, which is facing in a fixed direction, back and forth in a linear manner.

[0003] The industrial robot in Patent Document 1 is equipped with a rectangular parallelepiped movable cover with openings on the front and rear, and a hand movement mechanism that moves the movable cover in the direction of reciprocating movement of the hand. The bottom plate of the movable cover functions as a liquid receiving member below the semiconductor wafer held by the hand to receive organic solvent spilled from the upper surface of the semiconductor wafer.

[0004] When a semiconductor wafer is carried into the opening of the processing equipment, the hand movement mechanism is driven to advance the movable cover until its front end reaches the opening, and then the articulated arm is driven to advance the hand carrying the semiconductor wafer into the opening. When the semiconductor wafer is carried out of the opening, the hand and movable cover are retracted in the reverse order. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Patent Publication No. 2021-027210 Summary of the Invention [Problem to be solved by the invention]

[0006] In Patent Document 1, the hand movement mechanism for moving the movable liquid receiving cover back and forth uses an air cylinder as the drive source. However, when using an air cylinder, there are many restrictions on the movement control of the movable cover. For example, it is not possible to set multiple stop positions, and it is not possible to respond to changes in the stop position of the movable cover. In addition, it is not possible to change the movement speed midway through the movement. Furthermore, it is difficult to control the movement in coordination with the movement of the arm.

[0007] In view of the above, the object of the present invention is to reduce the constraints on the operation control of a receiving member in an industrial robot that is equipped with an arm for moving a hand that carries an object to be transported and a receiving member that receives liquid or the like that falls from the object to be transported. [Means for solving the problem]

[0008] In order to solve the above-described problems, one aspect of the industrial robot according to the present invention is an industrial robot that transports an object to be transported, the industrial robot having: a hand on which the object to be transported is placed; a first multi-joint arm to which the hand is connected at its tip; a first motor that drives the first multi-joint arm; a movable receiving member that is arranged below the hand; a fixed receiving member that is arranged below the movable receiving member; a second multi-joint arm to which the movable receiving member is connected at its tip; a second motor that drives the second multi-joint arm; and an arm support that supports the fixed receiving member, the first multi-joint arm, and the second multi-joint arm, wherein the first multi-joint arm reciprocates the hand along a linear first movement path that extends in a first direction that intersects with a vertical direction based on rotation of the first motor, and the second multi-joint arm moves in a linear second movement path that vertically overlaps with the first movement path based on rotation of the second motor. The movable receiving member is reciprocated in the first direction along a path.

[0009] Furthermore, one aspect of the conveying system according to the present invention is a conveying system comprising the above-mentioned industrial robot and a control device that controls the industrial robot, wherein the control device controls the first motor to move the hand in the first direction and controls the second motor to move the movable support member in the first direction, and when the control device moves the hand and the movable support member in the first direction, it controls the position of the movable support member in the first direction in accordance with the position of the hand in the first direction. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is a side view of an industrial robot. [Figure 2] FIG. 2 is a front view of the industrial robot. [Figure 3] FIG. 3 is a perspective view of the transport unit. [Figure 4] FIG. 4 is an exploded perspective view of the transport unit. [Figure 5] FIG. 5 is an explanatory diagram of the operation of the transport unit. DETAILED DESCRIPTION OF THE INVENTION

[0011] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of an industrial robot and a transport system to which the present invention is applied will be described below with reference to the drawings.

[0012] (Overall composition) FIG. 1 is a side view of the industrial robot 1. FIG. 2 is a front view of the industrial robot 1. In this specification, the three directions of the X direction, Y direction, and Z direction are perpendicular to each other. The Z direction is the vertical direction (up and down direction). One side of the X direction is the X1 direction, and the other side of the X direction is the X2 direction. One side of the Y direction is the Y1 direction, and the other side of the Y direction is the Y2 direction. One side of the Z direction is the Z1 direction, and the other side of the Z direction is the Z2 direction. The Z1 direction is downward. The Z2 direction is upward.

[0013] The industrial robot 1 is used in a semiconductor manufacturing system. The semiconductor manufacturing system includes a processing device 3 for processing semiconductor wafers 2 (hereinafter referred to as "wafers 2"), the industrial robot 1, and a control device 4 for controlling the industrial robot 1. As shown in Fig. 1, the industrial robot 1 and the control device 4 constitute a transfer system 5 that transfers the wafers 2 into and out of the processing device 3.

[0014] For example, the semiconductor manufacturing system stores and moves wafers 2, which are objects to be processed, in a cassette case (not shown). The transport system 5 carries out an operation of unloading the wafers 2 from the cassette case and loading the wafers 2 into the processing equipment 3. The transport system 5 also carries out an operation of unloading the wafers 2 from the processing equipment 3 and loading them into the cassette case.

[0015] The industrial robot 1 includes a transfer unit 6 that transfers a wafer 2, which is an object to be transferred, and a support mechanism 7 that supports the transfer unit 6. FIGS. 1 and 2 show an example in which multiple transfer units 6 are supported by the support mechanism 7 in a vertically stacked position. The number of transfer units 6 supported by the support mechanism 7 may be one or more.

[0016] The support mechanism 7 includes an elevation mechanism (not shown) for raising and lowering each of the plurality of transport units 6. The support mechanism 7 also includes a rotation mechanism (not shown) for rotating each of the plurality of transport units 6 about a rotation axis L extending in the vertical direction. Alternatively, the industrial robot may include a base that supports the support mechanism 7, and a rotation mechanism (not shown) for rotating the support mechanism 7 about the rotation axis L extending in the vertical direction relative to the base. Furthermore, a movement mechanism (not shown) for moving the support mechanism 7 in the horizontal direction relative to the base may be included. The device may also include:

[0017] The transport system 5 controls the industrial robot 1 using the control device 4, and combines the transport operation of moving the wafer 2 back and forth in one direction along the XY plane using the transport unit 6, the lifting and lowering operation of the transport unit 6 using the lifting mechanism, and the rotating operation of the transport unit 6 or the support mechanism 7 using the rotating mechanism.

[0018] FIG. 1 is a diagram illustrating the case where an industrial robot 1 performs operations of loading and unloading a wafer 2 into and from a processing device 3 located in the X1 direction. In the example shown in FIG. 1, the X direction is the first direction. The first direction is the wafer transport direction. As shown in FIG. 1, an opening 80 for loading and unloading the wafer 2 is provided in a housing 8 of the processing device 3. The transport system 5 performs an operation of raising and lowering the transport unit 6 using an elevation mechanism according to the height of the opening 80. Thereafter, the transport unit 6 transports the wafer 2 in the X1 direction and the X2 direction to load and unload the wafer 2 into and from the processing device 3. The X1 direction is the direction in which the wafer 2 is loaded into the opening 80. The X2 direction is the direction in which the wafer 2 is unloaded from the opening 80.

[0019] By rotating the transport unit 6 or the support mechanism 7 using the rotation mechanism, the industrial robot 1 can transport the wafer 2 to and from a cassette case or other processing equipment located in a direction different from the X1 direction.

[0020] (Transport unit) Fig. 3 is a perspective view of the transfer unit 6. Fig. 4 is an exploded perspective view of the transfer unit 6. The transfer unit 6 includes a hand 10 on which the wafer 2 is placed, a first articulated arm 20, and an arm support section 30. The hand 10 is connected to the tip end of the first articulated arm 20. The base end of the first articulated arm 20 is connected to the arm support section 30 so as to be rotatable about a rotation axis L1 extending in the Z-axis direction.

[0021] The hand 10 includes a wafer placement section 11 on which the wafer 2 is placed, and a hand base 12 connected to the tip of the first articulated arm 20. The tip of the wafer placement section 11 in the X1 direction is bifurcated. A gripping mechanism (not shown) that grips the wafer 2 between the base end of the wafer placement section 11 and an abutment member (not shown) provided at the tip of the wafer placement section 11 is provided.

[0022] The first multi-joint arm 20 includes a first arm 21 and a second arm 22. The hand 10 is connected to the tip end of the second arm 22. The base end of the second arm 22 is connected to the tip end of the first arm 21. The base end of the first arm 21 is connected to the arm support part 30. The first multi-joint arm 20 is configured so that when the first arm 21 rotates about the rotation axis L1, the second arm 22 rotates in conjunction with the first arm 21, and as a whole, they form a link mechanism that expands and contracts in the X direction. When the first multi-joint arm 20 expands and contracts in the X direction, the hand 10 moves on a first movement path P1 that extends linearly in the X direction, while maintaining an orientation in which the tip end faces the X1 direction.

[0023] FIG. 5 is an explanatory diagram of the operation of the transfer unit 6. When transferring a wafer 2 into or out of the processing apparatus 3, the transfer unit 6 moves the hand 10 between a first hand position 10A shown in the upper diagram of FIG. 5 and a second hand position 10B shown in the lower diagram of FIG. 5. The first hand position 10A and the second hand position 10B are located on a first movement path P1. As shown in FIG. 5, the first hand position 10A is a position overlapping with the arm support part 30 when viewed from above. The second hand position 10B is a position where the hand 10 moves in the X1 direction from the first hand position 10A and enters the inside of the opening 80 of the processing apparatus 3.

[0024] At the first hand position 10A, the first articulated arm 20 is retracted in the X direction, so the radius of rotation of the transport unit 6 around the rotation axis L is small. Therefore, when the industrial robot 1 performs a pivoting operation of the transport unit 6, it first returns the hand 10 to the first hand position 10A. At the second hand position 10B, the wafer 2 is transferred between the hand 10 and the processing device 3.

[0025] (Drive control of the first articulated arm) The transport unit 6 includes a first motor 25 and a first drive force transmission mechanism 26 that transmits the rotation of the first motor 25 to the first articulated arm 20. The first motor 25 and the first drive force transmission mechanism 26 are disposed, for example, on the arm support section 30. The transport unit 6 outputs a detection signal obtained by detecting the rotation of the first motor 25 using an encoder (not shown) to the control device 4. The control device 4 performs feedback control to control the rotation direction, rotation position, and rotation speed of the first motor 25 based on the detection signal from the encoder. In this way, the operation of the first articulated arm 20 is controlled to move the hand 10 to a preset first hand position 10A and a preset second hand position 10B.

[0026] The control device 4 controls the stop position of the hand 10. For example, it is possible to set a plurality of stop positions for the hand 10 and select one of the plurality of stop positions to drive the first articulated arm 20. For example, it is possible to select one of a plurality of second hand positions 10B that are different in the X direction to carry the wafer 2 into and out of the processing device 3. This makes it possible to respond to a case where, for example, the positional relationship between the processing device 3 and the industrial robot 1 changes, causing a change in the distance between the transport unit 6 and the opening 80.

[0027] The control device 4 controls the movement speed of the hand 10. For example, the hand 10 is moved at a constant movement speed. In this case, it is possible to set multiple movement speeds for the hand 10, select one from the multiple movement speeds, and move the hand 10 at the selected movement speed. Alternatively, it is possible to set a speed pattern in which the movement speed of the hand 10 changes as it moves from the first hand position 10A to the second hand position 10B, and move the hand 10 at the set speed pattern. By setting multiple speed patterns, it is possible to move the hand 10 at the optimal speed pattern depending on the situation.

[0028] In this embodiment, a flammable liquid organic solvent is used in at least one of the processing steps of the wafer 2 in the processing apparatus 3 and the pre-processing steps before the wafer 2 is loaded into the processing apparatus 3. Therefore, the wafer 2 is transported with the liquid (organic solvent) on its upper surface during at least one of the unloading step of unloading the wafer 2 from the processing apparatus 3 and the loading step of loading the wafer 2 into the processing apparatus 3. This may result in the liquid (organic solvent) spilling from the wafer 2. As described above, the control device 4 can control the movement speed and speed pattern when moving the hand 10. Therefore, it is possible to move the hand 10 using a speed pattern that makes it less likely for the liquid to spill from the wafer 2. For example, it is possible to set a speed pattern in which the hand 10 is gradually accelerated when it starts to move from a stopped state and gradually decelerated when it stops.

[0029] (liquid receiving mechanism) The transport unit 6 is equipped with a liquid receiving mechanism 9 for receiving liquid (organic solvent) spilled from the wafer 2 placed on the hand 10. The liquid receiving mechanism 9 includes a movable receiving member 40 and a fixed receiving member 50 for receiving liquid below the hand 10, and a second articulated arm 60 for moving the movable receiving member 40 in the X direction. The liquid receiving mechanism 9 is configured so that liquid spilled from the wafer 2 placed on the hand 10 passes through the movable receiving member 40 and accumulates in the fixed receiving member 50. The liquid receiving mechanism 9 is equipped with a suction mechanism (not shown) that sucks and discharges the liquid accumulated in the fixed receiving member 50 together with air.

[0030] As shown in Figures 1, 2, and 3, the movable receiving member 40 is disposed below the hand 10. The movable receiving member 40 is connected to the tip end of the second multi-joint arm 60. The base end of the second multi-joint arm 60 is rotatably connected to the arm support part 30 around a rotation axis L2 extending in the Z-axis direction. The fixed receiving member 50 is disposed below the movable receiving member 40. The fixed receiving member 50 is fixed to two arms 31 protruding upward from the arm support part 30.

[0031] 4, the fixed receiving member 50 includes a rectangular bottom plate 51 parallel to the XY plane, and an edge portion 52 protruding upward from the outer periphery of the bottom plate 51. The edge portion 52 is provided around the entire outer periphery of the bottom plate 51. Therefore, liquid spilled onto the fixed receiving member 50 does not flow out from the fixed receiving member 50. The width of the fixed receiving member 50 in the Y direction is greater than that of the movable receiving member 40.

[0032] The movable receiving member 40 includes a bottom plate 41 parallel to the XY plane and an edge portion 42 protruding upward from the outer periphery of the bottom plate 41. The bottom plate 41 has a shape in which both corners in the Y direction at the end in the X1 direction are cut out obliquely. The end in the X2 direction of the movable receiving member 40 does not have an edge portion 42. Therefore, the end in the X2 direction of the movable receiving member 40 serves as an outflow portion 49 that allows liquid that has spilled onto the bottom plate 41 to flow downward. The planar shape of the movable receiving member 40 when viewed from above is larger than that of the wafer 2.

[0033] The second articulated arm 60 includes a third arm 61 and a fourth arm 62. The movable receiving member 40 is connected to the tip of the fourth arm 62 via an arm connector 63 extending in the Y direction below the X2-direction end of the bottom plate 41. The base end of the fourth arm 62 is connected to the tip of the third arm 61. The base end of the third arm 61 is connected to the arm support 30. The second articulated arm 60 is configured so that when the third arm 61 rotates about the rotation axis L2, the fourth arm 62 rotates in conjunction with the third arm 61, thereby forming a link mechanism that expands and contracts in the X direction as a whole. When the second articulated arm 60 expands and contracts in the X direction, the movable receiving member 40 moves on a second movement path P2 extending in the X direction while maintaining an orientation in which the outlet portion 49 faces the X2 direction. As shown in FIG. 5, the second movement path P2 overlaps with the first movement path P1 when viewed from above.

[0034] When loading and unloading a wafer 2 into and from the processing apparatus 3, the liquid receiving mechanism 9 moves the movable receiving member 40 between a first receiving position 40A shown in the upper diagram of FIG. 5 and a second receiving position 40B shown in the lower diagram of FIG. 5. As shown in FIG. 5, the first receiving position 40A is a position where the wafer 2 placed on the hand 10 positioned at the first hand position 10A does not extend outside the movable receiving member 40 when viewed from above. The second receiving position 40B is located in the X1 direction of the first receiving position 40A. The second receiving position 40B is a position where the tip end of the movable receiving member 40 in the X1 direction is inserted inside the opening 80 of the processing apparatus 3.

[0035] 5, the movable receiving member 40 is disposed in the center of the fixed receiving member 50 in the Y direction when viewed from above. As described above, the width of the movable receiving member 40 in the Y direction is smaller than the width of the fixed receiving member 50 in the Y direction, and therefore the movable receiving member 40 does not extend beyond either side of the fixed receiving member 50 in the Y direction. The liquid receiving mechanism 9 moves the movable receiving member 40 within a range in which the outflow portion 49 provided at the end of the movable receiving member 40 in the X2 direction overlaps with the fixed receiving member 50 in the vertical direction.

[0036] At the first receiving position 40A, most of the movable receiving member 40 overlaps with the fixed receiving member 50, and the outflow portion 49 is located near the end of the fixed receiving member 50 in the X2 direction. At the second receiving position 40B, most of the movable receiving member 40 protrudes further in the X1 direction than the fixed receiving member 50, and the outflow portion 49 is located near the end of the fixed receiving member 50 in the X1 direction.

[0037] (Drive control of the second articulated arm) The liquid receiving mechanism 9 includes a second motor 65 and a second drive force transmission mechanism 66 that transmits the rotation of the second motor 65 to the second articulated arm 60. The second motor 65 and the second drive force transmission mechanism 66 are disposed, for example, on the arm support section 30. The transport unit 6 outputs a detection signal obtained by detecting the rotation of the second motor 65 using an encoder (not shown) to the control device 4. The control device 4 performs feedback control to control the rotation direction and rotation position of the second motor 65 based on the detection signal from the encoder. In this way, the operation of the second articulated arm 60 is controlled to move the movable receiving member 40 to the preset first receiving position 40A and second receiving position 40B.

[0038] The control device 4 controls the wafer 2 loading and unloading operations by the hand 10 in conjunction with the operation of the movable receiving member 40 of the liquid receiving mechanism 9. The control device 4 also controls the position of the movable receiving member 40 according to the position of the hand 10. This ensures that the movable receiving member 40 is always able to receive liquid even if it spills from the wafer 2 placed on the hand 10. For example, when carrying the wafer 2 into the processing device 3, the hand 10 and the movable receiving member 40 are moved simultaneously in the X1 direction, or the movable receiving member 40 is moved in the X1 direction before the hand 10. The movable receiving member 40 is stopped at the second receiving position 40B. The hand 10 is stopped at the second hand position 10B.

[0039] When the wafer 2 is to be carried out from the processing device 3, the hand 10 is moved in the X2 direction from the second hand position 10B while the movable receiving member 40 is stopped at the second receiving position 40B. The hand 10 is moved to the first hand position 10A over the movable receiving member 40 and stopped there. The movable receiving member 40 is moved in the X2 direction simultaneously with the hand 10, or moved in the X2 direction after the hand 10 and stopped at the first receiving position 40A.

[0040] The control device 4 can set multiple stop positions for the movable receiving member 40 and select one of the multiple stop positions to drive the second articulated arm 60. For example, it can select one of multiple second receiving positions 40B that are different in position in the X direction to move the movable receiving member 40. This makes it possible to deal with cases where the positional relationship between the processing device 3 and the industrial robot 1 changes and the distance between the transport unit 6 and the opening 80 changes.

[0041] The control device 4 controls the movement speed of the movable support member 40. For example, the movement speed of the movable support member 40 is controlled so as to be linked to the movement speed of the hand 10. Specifically, the movable support member 40 is moved at a constant movement speed, similar to the hand 10. Alternatively, a speed pattern linked to the speed pattern of the hand 10 is set, and the movable support member 40 is moved according to the set speed pattern. A plurality of movement speeds and speed patterns are set, and the movable support member 40 is moved according to the optimum speed pattern depending on the situation.

[0042] In this way, the control device 4 can be configured to have a plurality of operation modes in which at least one of the stop position for stopping the hand 10 and the stop position for stopping the movable receiving member 40 is different. Also, the control device 4 can be configured to have a plurality of operation modes in which at least one of the speed pattern for moving the hand 10 and the speed pattern for moving the movable receiving member 40 is different. This makes it possible to respond to changes in the positions of the transfer destination and transfer destination of the wafer 2, as described above. Also, the hand 10 and the movable receiving member 40 can be moved at the optimum speed pattern depending on the situation.

[0043] For example, as described above, by moving the movable receiving member 40 in conjunction with the hand 10, the liquid spilled from the wafer 2 can be collected by the liquid receiving mechanism 9. Also, as described above, by moving the hand 10 at a speed pattern that makes it difficult for the liquid on the wafer 2 to spill, Alternatively, when the wafer 2 is not placed on the hand 10, the hand 10 can be moved at a speed pattern different from that when the wafer 2 is placed on the hand 10. For example, when the wafer 2 is not placed on the hand 10, the transfer speed can be increased. This allows the manufacturing time to be reduced.

[0044] The control device 4 can simultaneously control multiple transport units 6 to carry multiple wafers 2 in and out of the processing device 3 in parallel. In addition, the operation of the hand 10 and the operation of the movable receiving member 40 can be performed in conjunction with the rotation of the transport unit 6 by the rotation mechanism or the lifting and lowering of the transport unit 6 by the lifting mechanism. This can shorten the manufacturing time.

[0045] (Action and effect) As described above, the industrial robot 1 of this embodiment includes the hand 10 on which the wafer 2 is placed, the first articulated arm 20 to which the hand 10 is connected at its tip, and the first motor 25 that drives the first articulated arm 20. The industrial robot 1 also includes the movable receiving member 40 located below the hand 10, the fixed receiving member 50 located below the movable receiving member 40, the second articulated arm 60 to which the movable receiving member 40 is connected at its tip, and a liquid receiving mechanism 9 that includes the second motor 65 that drives the second articulated arm 60. The industrial robot 1 also includes an arm support unit 30 that supports the fixed receiving member 50, the first articulated arm 20, and the second articulated arm 60. The first articulated arm 20 reciprocates the hand 10 based on the rotation of the first motor 25 along a linear first movement path P1 that extends in the X direction intersecting the up-down direction. The second articulated arm 60, based on the rotation of the second motor 65, reciprocates the movable receiving member 40 in the X direction along a linear second movement path P2 that vertically overlaps the first movement path P1.

[0046] As described above, the industrial robot of this embodiment has a liquid receiving mechanism 9 including a movable receiving member 40 and a fixed receiving member 50 that are disposed below the hand 10, and the movable receiving member 40 moves along a second movement path P2 that vertically overlaps with a first movement path P1, which is the movement path of the hand 10. Therefore, the movable receiving member 40 can collect liquid that spills from the upper surface of the wafer 2 placed on the hand 10, thereby preventing the spilled liquid from spreading. The movable receiving member 40 is also driven by a second motor 65 and a second articulated arm 60. Using a motor as a drive source allows for a wider range of control over the movement speed and stopping position of the movable receiving member 40.

[0047] The transfer system 5 of this embodiment includes an industrial robot 1 and a control device 4 that controls the industrial robot 1. The control device 4 controls the first motor 25 to move the hand 10 in the X direction, and controls the second motor 65 to move the movable receiving member 40 in the X direction. When moving the hand 10 and the movable receiving member 40 in the X direction, the control device 4 controls the position of the movable receiving member 40 in the X direction according to the position of the hand 10 in the X direction. This allows the movable receiving member 40 to be moved to a position where liquid spilling from the top surface of the wafer 2 placed on the hand 10 can be collected.

[0048] The control device 4 controls the first motor 25 to control the position where the hand 10 is stopped, and controls the second motor 65 to control the position where the movable receiving member 40 is stopped. The control device 4 has a plurality of operation modes. Each of the plurality of operation modes can have a different position where the movable receiving member 40 is stopped. This makes it possible to deal with a case where the positional relationship between the processing device 3 and the industrial robot 1 changes, resulting in a change in the distance between the transport unit 6 and the opening 80 provided in the housing 8 of the processing device 3.

[0049] The control device 4 controls the first motor 25 to control the speed pattern of the hand 10. The control device 4 can also control the second motor 65 to control the speed pattern of the movable receiving member 40. The control device 4 has a plurality of operation modes. The plurality of operation modes can include an operation mode having a speed pattern in which the moving speed of the movable receiving member 40 changes. This makes it possible to move the hand 10 and the movable receiving member 40 at an optimum speed pattern depending on the situation. For example, when the hand 10 is moved at a speed pattern that prevents the liquid on the wafer 2 from spilling, the movable receiving member 40 can be moved at the same speed pattern.

[0050] In this embodiment, the movable receiving member 40 has a planar shape larger than that of the wafer 2 when viewed from above. Therefore, by disposing the movable receiving member 40 below the hand 10, it is possible to recover liquid spilled from the wafer 2. Furthermore, the fixed receiving member 50 has a width larger than that of the movable receiving member 40 in the Y direction, which intersects the up-down direction and the X direction in which the wafer 2 is transported. When viewed from above, the fixed receiving member 50 is disposed in a position where both ends of the Y direction of the fixed receiving member 50 extend beyond both sides of the movable receiving member 40 in the Y direction. In this way, even if liquid spills from the movable receiving member 40 in the X direction while the movable receiving member 40 is moving in the X direction, the spilled liquid can be received by the fixed receiving member 50. Therefore, diffusion of the liquid can be suppressed.

[0051] The hand 10 of this embodiment moves in the X direction between a first hand position 10A, where at least a portion of the wafer 2 placed on the hand 10 vertically overlaps the fixed receiving member 50, and a second hand position 10B, where the wafer 2 placed on the hand 10 does not vertically overlap the fixed receiving member 50. The movable receiving member 40 moves in the X direction between the first receiving position 40A, where the wafer 2 placed on the hand 10 at the first hand position 10A vertically overlaps the entire wafer 2, and a second receiving position 40B, which is on the same side of the first receiving position 40A as the second hand position 10B in the X direction. An outflow portion 49 is provided at the end of the movable receiving member 40 in the X2 direction, i.e., the end of the movable receiving member 40 on the first receiving position 40A side, through which liquid that has flowed down onto the movable receiving member 40 flows out. At the second receiving position 40B, the outflow portion 49 vertically overlaps the fixed receiving member 50. This arrangement and shape allow the movable receiving member 40 to receive spilled liquid. Furthermore, when the movable receiving member 40 is moved in the movement direction of the hand 10, the outflow portion 49 of the movable receiving member 40 can be kept overlapping with the fixed receiving member 50. Therefore, the liquid received by the movable receiving member 40 can be collected in the fixed receiving member 50.

[0052] (Variation) In the above-described form of the industrial robot 1, the movable receiving member 40 and the fixed receiving member 50 have edges on the outer periphery of the bottom plate parallel to the XY plane, but the two members are not limited to this form and may be any member capable of receiving liquid.

[0053] (Other embodiments) (1) The transfer system 5 in the above embodiment performs a process of transferring the wafer 2 between the processing device 3 and the cassette case, but the transfer system 5 can be used in any process of transferring the wafer 2. In addition, the object to be transferred is not limited to the wafer 2.

[0054] (2) The liquid placed on the top surface of the wafer 2 being transported out of the processing apparatus 3 or on the top surface of the wafer 2 being transported into the processing apparatus 3 may not be an organic solvent, but may be a non-volatile liquid or a liquid with low volatility.

[0055] (summary) A summary of this disclosure is provided below. (1) An industrial robot that transports an object to be transported, a hand on which the object to be transported is placed; a first articulated arm having the hand connected to a tip thereof, and a first motor that drives the first articulated arm; a movable receiving member disposed below the hand, and a fixed receiving member disposed below the movable receiving member; a second articulated arm having a tip connected to the movable receiving member, and a second motor that drives the second articulated arm; an arm support portion that supports the fixed receiving member, the first multi-joint arm, and the second multi-joint arm, the first articulated arm reciprocates the hand along a linear first movement path extending in a first direction intersecting with an up-down direction based on rotation of the first motor; The second articulated arm reciprocates the movable support member in the first direction along a linear second movement path that vertically overlaps the first movement path based on the rotation of the second motor.

[0056] (2) the movable receiving member has a planar shape larger than the object to be conveyed when viewed from above, The industrial robot described in (1) above is characterized in that the fixed receiving member has a width in a second direction that intersects the vertical direction and the first direction, which is larger than that of the movable receiving member, and is arranged in a position where both ends of the fixed receiving member in the second direction extend beyond both sides of the movable receiving member in the second direction when viewed from above.

[0057] (3) the hand moves in the first direction between a first hand position where at least a portion of the object to be transported placed on the hand overlaps the fixed receiving member in the vertical direction and a second hand position where the object to be transported placed on the hand does not overlap the fixed receiving member in the vertical direction; the movable receiving member moves in the first direction between a first receiving position that vertically overlaps the entirety of the transport object placed on the hand that is positioned at the first hand position, and a second receiving position that is on the same side as the second hand position in the first direction with respect to the first receiving position, an outflow portion for allowing liquid that has flowed down onto the movable receiving member to flow out is provided at an end of the movable receiving member on the first receiving position side, The industrial robot according to (1) or (2) above, wherein, at the second receiving position, the outlet portion overlaps the fixed receiving member in the vertical direction.

[0058] (4) A transport system comprising the industrial robot according to any one of (1) to (3) above and a control device that controls the industrial robot, the control device controls the first motor to move the hand in the first direction and controls the second motor to move the movable receiving member in the first direction; The control device is characterized in that, when moving the hand and the movable support member in the first direction, the control device controls the position of the movable support member in the first direction in accordance with the position of the hand in the first direction.

[0059] (5) the control device controls the first motor to control a position where the hand is stopped, and controls the second motor to control a position where the movable receiving member is stopped, the control device has a plurality of operating modes; The conveying system according to (4) above, wherein the plurality of operation modes each have a different position at which the movable receiving member is stopped.

[0060] (6) the control device controls the first motor to control a speed pattern of the hand, and controls the second motor to control a speed pattern of the movable receiving member; the control device has a plurality of operating modes; The conveying system according to (4) or (5) above, wherein the plurality of operation modes includes a speed pattern in which the moving speed of the movable receiving member changes. [Explanation of symbols]

[0061] 1...industrial robot, 2...wafer, semiconductor wafer, 3...processing device, 4...control device, 5...transport system, 6...transport unit, 7...support mechanism, 8...casing, 9...liquid receiving mechanism, 10...hand, 10A...first hand position, 10B...second hand position, 11...wafer placement section, 12...hand base, 20...first articulated arm, 21...first arm, 22...second arm, 25...first motor, 26...first drive force transmission mechanism, 30...arm support Holding portion, 31...arm portion, 40A...first receiving position, 40B...second receiving position, 40...movable receiving member, 41...bottom plate, 42...edge portion, 49...outflow portion, 50...fixed receiving member, 51...bottom plate, 52...edge portion, 60...second articulated arm, 61...third arm, 62...fourth arm, 63...arm connecting portion, 65...second motor, 66...second driving force transmission mechanism, 80...opening, L, L1, L2...first rotation axis, P1...first movement path, P2...second movement path

Claims

1. An industrial robot that transports an object to be transported, a hand on which the object to be transported is placed; a first articulated arm having a tip connected to the hand, and a first motor that drives the first articulated arm; a movable receiving member disposed below the hand, and a fixed receiving member disposed below the movable receiving member; a second articulated arm having a tip connected to the movable receiving member, and a second motor that drives the second articulated arm; an arm support portion that supports the fixed receiving member, the first multi-joint arm, and the second multi-joint arm, the first articulated arm reciprocates the hand along a linear first movement path extending in a first direction intersecting with an up-down direction based on rotation of the first motor; The second articulated arm reciprocates the movable support member in the first direction along a linear second movement path that vertically overlaps the first movement path based on the rotation of the second motor.

2. the movable receiving member has a planar shape larger than the object to be conveyed when viewed from above, 2. The industrial robot according to claim 1, wherein the fixed receiving member has a width in a second direction that intersects the up-down direction and the first direction that is larger than that of the movable receiving member, and is positioned such that, when viewed from above, both ends of the fixed receiving member in the second direction extend beyond both sides of the movable receiving member in the second direction.

3. the hand moves in the first direction between a first hand position where at least a portion of the object to be transported placed on the hand overlaps the fixed receiving member in the vertical direction and a second hand position where the object to be transported placed on the hand does not overlap the fixed receiving member in the vertical direction, the movable receiving member moves in the first direction between a first receiving position where the movable receiving member overlaps the entire object to be transported placed on the hand located at the first hand position, and a second receiving position on the same side as the second hand position in the first direction with respect to the first receiving position, an outflow portion for allowing liquid that has flowed down onto the movable receiving member to flow out is provided at an end of the movable receiving member on the first receiving position side, 3. The industrial robot according to claim 2, wherein, at the second receiving position, the outlet portion overlaps the fixed receiving member in a vertical direction.

4. A transport system comprising the industrial robot according to any one of claims 1 to 3 and a control device that controls the industrial robot, the control device controls the first motor to move the hand in the first direction and controls the second motor to move the movable receiving member in the first direction; The control device controls the position of the movable support member in the first direction in accordance with the position of the hand in the first direction when moving the hand and the movable support member in the first direction.

5. the control device controls the first motor to control a position where the hand is stopped, and controls the second motor to control a position where the movable receiving member is stopped; the control device has a plurality of operating modes; 5. The transport system according to claim 4, wherein the positions at which the movable receiving member is stopped differ from one another in each of the plurality of operation modes.

6. The control device controls the first motor to control a speed pattern of the hand. and controlling the second motor to control the speed pattern of the movable receiving member. the control device has a plurality of operating modes; 5. The transport system according to claim 4, wherein the plurality of operation modes includes an operation mode having a speed pattern in which the moving speed of the movable receiving member changes.

Images