Contact probe

Abstract

To provide a contact probe securing stable electrical conduction.SOLUTION: A contact probe includes a first terminal part, a second terminal part, and a spring part, and is constituted by bending a continuous wire. The spring part has a winding part, a first end part, and a second end part. The winding part has a first winding part in which a wire is wound with a first diameter, a second winding part in which a wire is wound with a second diameter, and a third winding part provided between the first and second winding parts, continuing to the first and second winding parts at both ends, and wound with a third diameter larger than the first and second winding diameters. The first terminal part has a first bend part and a first extension part. The second terminal part has a second bend part and a second extension part. The first extension part and the second extension part are in contact with the third winding part.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a contact probe. [Background technology]

[0002] Conventionally, when conducting a continuity test or an operating characteristic test of a test object such as a semiconductor integrated circuit or a liquid crystal display device, a conductive contact probe is used to establish an electrical connection between the test object and a signal processing device having a circuit board that outputs a test signal (see, for example, Patent Document 1). The contact probe described in Patent Document 1 includes first and second portions that extend in a flat plate shape, and a third portion that extends in a zigzag shape and connects the first and second portions, and when in use, is folded to bring the first portion and the third portion, and the second portion and the third portion, into contact with each other, thereby shortening the conduction path. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 2020-502513 Summary of the Invention [Problem to be solved by the invention]

[0004] However, when the contact probe described in Patent Document 1 is folded to conduct signals, the planar structure causes large friction and large load hysteresis, which may result in unstable electrical signal conduction in a contact probe having the configuration described in Patent Document 1.

[0005] The present invention has been made in view of the above, and has an object to provide a contact probe that can ensure stable electrical conduction. [Means for solving the problem]

[0006] In order to solve the above-mentioned problems and achieve the object, a contact probe according to the present invention is a contact probe that comes into contact with a contact object at both ends in a longitudinal direction, and includes a first terminal portion that comes into contact with one of the contact objects, a second terminal portion that comes into contact with the other contact object, and a spring portion that is provided between the first and second terminal portions and connects the first and second terminal portions so that they can move back and forth. The contact probe is formed by bending a continuous wire, and the spring portion has a winding portion that is wound at a predetermined interval, a first end that is an end of the winding portion on the first terminal portion side, and a second end that is an end of the winding portion on the second terminal portion side. The winding portion includes a first winding portion around which the wire is wound with a first diameter, and a second winding portion around which the wire is wound with a second diameter, and a spring portion that is provided between the first and second winding portions and is connected to the first and second winding portions at both ends, respectively. and a third winding portion wound with a third diameter larger than the first and second diameters, wherein the first terminal portion has a first bent portion extending along the axial direction of the contact probe from the first end toward the opposite side to the second end and then folded back toward the spring portion, and a first extending portion which is an end of the first bent portion opposite to the side connected to the first end and extends along the axial direction toward the second terminal portion, wherein the second terminal portion has a second bent portion extending along the axial direction from the second end toward the opposite side to the first end and then folded back toward the spring portion, and a second extending portion which is an end of the second bent portion and extends along the axial direction from the end opposite to the side connected to the second end toward the first terminal portion, and the first and second extending portions each come into contact with the third winding portion.

[0007] Moreover, in the contact probe according to the present invention, the first extension portion contacts the first end portion, and the second extension portion contacts the second end portion.

[0008] Moreover, in the contact probe according to the present invention, the first and / or second bent portion is arc-shaped.

[0009] Moreover, in the contact probe according to the present invention, in the above invention, the first and / or second bent portion has a top portion that forms a sharp tip.

[0010] Moreover, in the contact probe according to the present invention, the first and / or second bent portion has a flat top portion.

[0011] Moreover, in the contact probe according to the present invention, in the above invention, the first and / or second bent portion has a zigzag shape having a plurality of tapered peaks. [Effects of the Invention]

[0012] According to the present invention, it is possible to ensure stable electrical conduction. [Brief explanation of the drawings]

[0013] [Figure 1] FIG. 1 is a perspective view showing the configuration of a contact probe according to one embodiment of the present invention. [Figure 2] FIG. 2 is a plan view showing the configuration of a contact probe according to one embodiment of the present invention. [Figure 3] FIG. 3 is a diagram for explaining a conduction path of the contact probe. [Figure 4] FIG. 4 is a diagram illustrating the configuration of the tip end of the contact probe according to the first modification. [Figure 5] FIG. 5 is a diagram illustrating the configuration of the tip end of a contact probe according to the second modification. [Figure 6] FIG. 6 is a diagram illustrating the configuration of the tip end of a contact probe according to the third modification. DETAILED DESCRIPTION OF THE INVENTION

[0014] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to the following embodiments. Furthermore, the drawings referred to in the following description merely show the shape, size, and positional relationship of the components to the extent that the contents of the present invention can be understood. In other words, the present invention is not limited to only the shape, size, and positional relationship exemplified in each drawing.

[0015] (Embodiment) FIG. 1 is a perspective view showing the configuration of a contact probe according to an embodiment of the present invention. FIG. 2 is a plan view showing the configuration of a contact probe according to an embodiment of the present invention. FIG. 2 is a view of the contact probe viewed from a different direction than FIG. 1. Contact probe 1 is used, for example, when conducting an electrical characteristic test on a semiconductor integrated circuit, which is an object to be tested, and electrically connects the semiconductor integrated circuit to a circuit board that outputs a test signal to the semiconductor integrated circuit. Contact probe 1 is, for example, housed in a probe holder or the like when in use. Hereinafter, contact probe 1 will be simply referred to as probe 1.

[0016] The probe 1 is made by bending a wire made of a conductive material. This wire may be made of a single material, or may be made by connecting parts made of different materials or with different properties, as long as it is a continuous wire.

[0017] Probe 1 includes first terminal 11, which contacts an electrode of a semiconductor integrated circuit when testing the semiconductor integrated circuit; second terminal 12, which contacts an electrode of a circuit board equipped with a test circuit; and spring 13, which is provided between first terminal 11 and second terminal 12 and connects first terminal 11 and second terminal 12 so that they can move back and forth. In FIGS. 1 and 2, first terminal 11, second terminal 12, and spring 13 constituting probe 1 share the same axis. That is, the central axes of first terminal 11, second terminal 12, and spring 13 are aligned on the same straight line N. Hereinafter, this straight line N may be referred to as the "axis N." Note that the "same axis" includes deviations due to distortion of individual components, manufacturing errors, and the like. When probe 1 contacts a semiconductor integrated circuit, spring 13 expands and contracts in the axial direction, thereby cushioning impact on the electrode of the semiconductor integrated circuit and applying a load to the semiconductor integrated circuit and the circuit board.

[0018] The first terminal 11 is formed by folding one end 101 of the wire back in a U-shape. The bent portion of the first terminal 11 formed by folding back has an arc shape, and this bent portion comes into contact with an electrode of the semiconductor integrated circuit.

[0019] The second terminal 12 is formed by folding back the other end 102 of the wire in a U-shape. The bent portion of the second terminal 12 formed by folding back has an arc shape, and this bent portion comes into contact with an electrode on the circuit board.

[0020] The spring portion 13 has a winding portion 130 wound at a predetermined interval, a first end portion 131 which is the end portion of the winding portion 130 on the first terminal portion 11 side, and a second end portion 132 which is the end portion of the winding portion 130 on the second terminal portion 12 side.

[0021] The winding section 130 is formed by winding a wire in a spiral shape around the axis N. The winding section 130 includes a first winding section 130a in which the wire is wound with a first diameter, a second winding section 130b in which the wire is wound with a second diameter, and a third winding section 130c, which is provided between the first winding section 130a and the second winding section 130b, is connected to the first winding section 130a and the second winding section 130b at both ends, and is wound with a third diameter. In the example shown in FIGS. 1 and 2, the first diameter and the second diameter are the same, and the third diameter is larger than the first and second diameters. However, the first and second diameters may be different from each other as long as the third diameter is the largest. In this case, "same" includes manufacturing errors and the like.

[0022] The first end 131 extends and curves around the axis N so as to have a diameter larger than the diameter of the wire in the wound portion .

[0023] The second end 132 extends and curves around the axis N so as to have a diameter larger than the diameter of the wire in the wound portion 130. In addition, in this embodiment 1, an example is described in which the first end 131 and the second end 132 have a larger diameter than the diameter of the wire in the winding portion 130, but they may also have the same diameter as the diameter of the wire in the winding portion 130.

[0024] The diameters of the wire at the first end 131 and the second end 132 may be the same or different. Furthermore, it is preferable that the diameter of the wire at first end 131 and second end 132 is equal to the diameter (third diameter) of third winding portion 130c. In the following description, it is assumed that the diameter of the wire at first end 131 and second end 132 is equal to the diameter (third diameter) of third winding portion 130c.

[0025] Here, the first terminal portion 11 has a first bent portion 111 which is an end portion of the first end portion 131, extending from an end opposite to the side connected to the winding portion 130 along the direction of the axis N and then folding back toward the spring portion 13, and a first extending portion 112 which is an end portion of the first bent portion 111, extending from an end opposite to the side connected to the first end portion 131 along the direction of the axis N toward the second terminal portion 12. Although FIGS. 1 and 2 show an example in which the first extending portion 112 extends along the direction of the axis N to a position beyond the third winding portion 130c, the position of the one end portion 101 is not limited to the position shown in the figures, as long as the first extending portion 112 exceeds the third winding portion 130c at least during inspection.

[0026] The second terminal 12 has a second bent portion 121, which is an end of the second end 132, extending from an end opposite to the end connected to the winding portion 130 along the direction of the axis N and then folding back toward the spring portion 13, and a second extending portion 122, which is an end of the second bent portion 121, extending from an end opposite to the end connected to the second end 132 along the direction of the axis N toward the first terminal 11. Although FIGS. 1 and 2 show an example in which the second extending portion 122 extends along the direction of the axis N to a position beyond the third winding portion 130c, the position of the other end 102 is not limited to the position shown in the figures, as long as the second extending portion 122 exceeds the third winding portion 130c at least during inspection.

[0027] In the probe 1, the first extending portion 112 comes into contact with the first end portion 131 and the third winding portion 130c. At this time, the contact point between the first extending portion 112 and the first end portion 131 is referred to as a contact point P C 1, and the contact point between the first extending portion 112 and the third winding portion 130c is contact point P C Let's say it's 2.

[0028] In addition, in the probe 1, the second extending portion 122 contacts the second end portion 132 and the third winding portion 130c. At this time, the contact point between the second extending portion 122 and the second end portion 132 is referred to as a contact point P C 3, and the contact point between the second extending portion 122 and the third winding portion 130c is contact point P C Let's say it's 4. The diameters, angles, etc. of the first end 131 and the second end 132, and the first extension 112 and the second extension 122 are adjusted so that they are in point contact regardless of the expansion and contraction of the spring portion 13.

[0029] When a load is applied to the first terminal portion 11 and the second terminal portion 12 in the direction of the axis N in a direction that brings them closer to each other in the probe 1 (see FIGS. 1 and 2), the first terminal portion 11 and the second terminal portion 12 move in the direction that brings them closer to each other. At this time, the load from the first terminal portion 11 and the second terminal portion 12 causes the first end portion 131 and the second end portion 132 of the spring portion 13 to move in the direction that brings them closer to each other in the direction of the axis N, and the winding portion 130 is compressed in the direction of the axis N in accordance with this movement.

[0030] When testing the semiconductor integrated circuit, the contact load from the semiconductor integrated circuit and the circuit board causes the spring portion 13 to be compressed along the direction of the axis N. During testing, a test signal supplied from the circuit board to the semiconductor integrated circuit travels from the electrode on the circuit board through the probe 1 to the electrode on the semiconductor integrated circuit.

[0031] At this time, the signal supplied to the first terminal portion 11 passes from the first bent portion 111 through the first extending portion 112 to the contact P C 2. The signal is then transmitted to the third winding 130c and reaches the contact P C 4, the light is transmitted to the second extending portion 122, and reaches the second bending portion 121.

[0032] When a signal is supplied to the second terminal portion 12, the signal is transmitted from the second bent portion 121 to the contact P via the second extending portion 122. C 4. The signal is then transmitted to the third winding 130c and reaches the contact P C 2, the light is transmitted to the first extending portion 112, and reaches the first bending portion 111.

[0033] In this way, in the probe 2, the contact P C 1~P C4. The signal is transmitted to the other terminal via the third winding portion 130c. Therefore, a conductive path that does not pass through the winding portion 130 around which the wire is wound, which has high resistance for high-frequency signals, is selected as the signal path, and the signal is transmitted via a path that is shorter than the overall length of the wire of the probe 2.

[0034] According to the above-described embodiment, in probe 2, the terminal portion and spring portion 13 (here, third winding portion 130c) are in point contact, which differs from the surface contact with relatively high friction as in Patent Document 1, and this reduces friction, and even when the probe is deformed by a load, the contact position simply moves, maintaining the point contact. At this time, a signal supplied to one terminal portion is transmitted via a path that is shorter than the overall length of the wire via the point contact, thereby reducing friction at the contact portion and reducing load hysteresis, thereby ensuring stable electrical conduction.

[0035] Furthermore, according to this embodiment, in the probe 2, the first terminal portion 11 (first extension portion 112) and the second terminal portion 12 (second extension portion 122) are in contact with the first end portion 131 and the second end portion 132, respectively, so that tilting of the first terminal portion 11 (first bend portion 111) and the second terminal portion 12 (second bend portion 121) with respect to the axis N can be suppressed.

[0036] In the above-described embodiment, a configuration has been described in which the first extension portion 112 and the second extension portion 122 are in contact with the first end portion 131 and the second end portion 132, respectively, but a configuration in which one of them is not in contact, or a configuration in which both are not in contact, may also be used.

[0037] (Variation 1) Next, a first modification of the embodiment of the present invention will be described with reference to Fig. 4. Fig. 4 is a diagram illustrating the tip configuration of a contact probe according to the first modification. The first modification has a first terminal portion 11A instead of the first terminal portion 11 of the probe 1 according to the first embodiment described above. Note that the components of the probe according to the first modification, other than the first terminal portion 11A, are the same as those of the probe 1 according to the first embodiment described above, and therefore description thereof will be omitted.

[0038] The first terminal 11A is formed by folding one end of a wire in a V-shape. Therefore, the first terminal 11A has a sharp top portion. The top portion of the first terminal 11A comes into contact with an electrode of the semiconductor integrated circuit.

[0039] According to the present modified example 1, stable electrical conduction can be ensured, similarly to the above-described embodiment.

[0040] Furthermore, in this modification 1, the first terminal portion 11A is tapered, so that even if an oxide film is formed on the surface of the connection electrode, the oxide film can be broken through and the first terminal portion 11A can be brought into direct contact with the connection electrode.

[0041] (Variation 2) Next, a second modification of the embodiment of the present invention will be described with reference to Fig. 5. Fig. 5 is a diagram illustrating the tip configuration of a contact probe according to the second modification. The second modification has a first terminal portion 11B instead of the first terminal portion 11 of the probe 1 according to the first embodiment described above. Note that the components of the probe according to the second modification, other than the first terminal portion 11B, are the same as those of the probe 1 according to the first embodiment described above, and therefore description thereof will be omitted.

[0042] The first terminal 11B is formed by folding one end of the wire back into a trapezoidal shape. Therefore, the first terminal 11B has a flat top. The top or a corner of the first terminal 11B comes into contact with an electrode of the semiconductor integrated circuit.

[0043] According to the present modified example 2, stable electrical conduction can be ensured, similarly to the above-described embodiment.

[0044] Furthermore, in this second modification, when contacting a flat electrode, for example, the electrode and the flat portion of the top of the head come into line contact, thereby preventing the probe from tilting when contacting.

[0045] (Variation 3) Next, a third modification of the embodiment of the present invention will be described with reference to Fig. 6. Fig. 6 is a diagram illustrating the tip configuration of a contact probe according to the third modification. The third modification includes a first terminal portion 11C instead of the first terminal portion 11 of the probe 1 according to the first embodiment described above. Note that the components of the probe according to the third modification, other than the first terminal portion 11C, are the same as those of the probe 1 according to the first embodiment described above, and therefore description thereof will be omitted.

[0046] The first terminal 11C is formed by folding back one end of a wire, and the bent portion forms a zigzag shape. Therefore, the first terminal 11C has a plurality of tapered peaks. The peaks or corners of the first terminal 11C come into contact with the electrodes of the semiconductor integrated circuit. Note that while FIG. 6 shows an example in which the first terminal 11C forms a zigzag shape with folding positions (heights) that vary, it may also be a zigzag shape with folding positions that are the same height.

[0047] According to the third modification, stable electrical conduction can be ensured, similarly to the above-described embodiment.

[0048] In addition, in the present modification 3, since the first terminal 11C has multiple tapered apexes, even if an oxide film is formed on the surface of the connection electrode, contact with any of the apexes can break through the oxide film and bring the first terminal 11C into direct contact with the connection electrode. Furthermore, when the first terminal 11A comes into contact with a hemispherical electrode, the first terminal 11A can make stable contact.

[0049] The terminal portion according to the first embodiment can combine the shapes of the modifications 1 to 3. In this case, the first terminal portion and the second terminal portion may have the same shape or different shapes.

[0050] Although the embodiments for carrying out the present invention have been described above, the present invention should not be limited to only the above-described embodiments.

[0051] As described above, the contact probe according to the present invention is useful for ensuring stable electrical conduction. [Explanation of symbols]

[0052] 1 Contact probe (probe) 11, 11A~11C 1st terminal section 12 2nd terminal section 13 Spring section 111 1st bending part 112 1st extension part 121 2nd bending part 122 Second extension part 130 Winding section 130a Volume 1 130b Volume 2 130c Volume 3 131 First end 132 Second end

Claims

1. A contact probe that contacts a contact object at both ends in the longitudinal direction, a first terminal portion that contacts one of the contact objects; a second terminal portion that contacts the other contact object; a spring portion provided between the first and second terminal portions and connecting the first and second terminal portions so as to be movable forward and backward; Equipped with The contact probe is made by bending a continuous wire rod, The spring portion is a winding portion wound at predetermined intervals; a first end portion which is an end portion of the winding portion on the first terminal portion side; a second end portion which is an end portion of the winding portion on the second terminal portion side; and The winding portion is a first winding portion in which the wire is wound with a first diameter; a second winding portion in which the wire is wound with a second diameter; a third winding portion provided between the first and second winding portions, connected to the first and second winding portions at both ends, and wound with a third diameter larger than the first and second diameters; and The first terminal portion is a first bent portion that extends from the first end toward an opposite side to the second end along the axial direction of the contact probe and then bends back toward the spring portion; a first extending portion that is an end of the first bent portion and extends from an end opposite to a side connected to the first end portion toward the second terminal portion along the axial direction; and The second terminal portion is a second bent portion extending from the second end toward an opposite side to the first end along the axial direction and then folded back toward the spring portion; a second extending portion that is an end of the second bent portion and extends from an end opposite to a side connected to the second end portion toward the first terminal portion along the axial direction; and the first and second extending portions each contact the third winding portion; A contact probe characterized by:

2. the first extension portion contacts the first end portion; The second extension portion contacts the second end portion. The contact probe according to claim 1 .

3. The first and / or second bent portion is arc-shaped. The contact probe according to claim 1 .

4. The first and / or second bent portion has a top portion having a sharp tip shape. The contact probe according to claim 1 .

5. The first and / or second bent portion has a flat top portion. The contact probe according to claim 1 .

6. The first and / or second bent portion has a zigzag shape having a plurality of tapered peaks. The contact probe according to claim 1 .

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