Sensor

Abstract

To provide a technique that enables release of a target substance captured by a molecularly imprinted polymer.SOLUTION: A sensor for detecting a target substance is provided, the sensor comprising a detection unit including a membrane having a space for the target substance to enter and containing a molecularly imprinted polymer for capturing the target substance entering the space, and a release mechanism for releasing the target substance captured by the molecularly imprinted polymer from the molecularly imprinted polymer, where the release mechanism heats or cools the membrane.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to sensors. [Background technology]

[0002] Several proposals have been made to detect target substances using molecularly imprinted polymers. For example, Patent Document 1 discloses a field-effect transistor having a detection electrode on the surface of which a film of a molecularly imprinted polymer is formed. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2023-061890 Summary of the Invention [Problem to be solved by the invention]

[0004] In order to repeatedly use a sensor that uses a molecularly imprinted polymer, it is necessary to desorb the target substance captured by the molecularly imprinted polymer. In Patent Document 1, in the process of preparing a template for the target substance during the production of the molecularly imprinted polymer, a cyclic voltammetry technique is used to scan the potential applied between the working electrode and the counter electrode relative to the potential of the reference electrode, and the target substance is removed by reaching a potential at which the chemical bond is broken. However, if such a method is used as a desorption method for repeated use of the sensor, there is a risk that the molecularly imprinted polymer will deteriorate due to electron exchange. Therefore, there is a need for another technique that can desorb the target substance captured by the molecularly imprinted polymer. [Means for solving the problem]

[0005] The present disclosure can be realized in the following forms.

[0006] (1) According to one aspect of the present disclosure, a sensor is provided. The sensor detects a target substance and includes: a detection unit having a space for the target substance to enter and a membrane containing a molecular imprinted polymer that captures the target substance that has entered the space; and a desorption mechanism for desorbing the target substance captured by the molecular imprinted polymer from the molecular imprinted polymer, the desorption mechanism heating or cooling the membrane. This aspect of the sensor includes a desorption mechanism that heats or cools the membrane, thereby changing the structure of the captured target substance by heating or cooling, thereby reducing the interaction between the captured target substance and the molecular imprinted polymer. As a result, the target substance captured by the molecular imprinted polymer can be desorbed.

[0007] (2) In the sensor described in (1) above, the target substance may be at least one selected from the group consisting of a virus, a bacterium, a microorganism, and a protein. With this type of sensor, the three-dimensional structure of the captured target substance can be changed by applying heat or cooling, thereby changing the surface structure of the target substance, and therefore the target substance can be easily released from the molecularly imprinted polymer.

[0008] (3) In the sensor described in (1) or (2), the desorption mechanism may be a heater. With this type of sensor, the structure of the captured target substance can be changed by heat, thereby reducing the interaction between the captured target substance and the molecularly imprinted polymer, and the target substance captured by the molecularly imprinted polymer can be easily desorbed.

[0009] (4) In the sensor described in (3) above, the heater may be a microheater including a diaphragm, the membrane may be formed on the diaphragm, and the area of ​​the diaphragm may be larger than that of the membrane. In this sensor, the membrane is formed on the diaphragm, and the area of ​​the diaphragm is larger than that of the membrane. This prevents the heat from the microheater from diffusing, and as a result, the target substance captured by the molecularly imprinted polymer can be efficiently desorbed.

[0010] (5) The sensor according to any one of (1) to (4) above may be a field-effect transistor type sensor. According to this type of sensor, since it is a field-effect transistor type sensor, it is possible to suppress a decrease in detection sensitivity.

[0011] The present disclosure can be realized in various forms, for example, a method for manufacturing a sensor, a method for monitoring a target substance using a sensor, and the like. [Brief explanation of the drawings]

[0012] [Figure 1] FIG. 2 is a cross-sectional view schematically illustrating the general configuration of a sensor. [Figure 2] FIG. 1 is an explanatory diagram showing how a target substance is desorbed from a molecularly imprinted polymer by heating. [Figure 3] FIG. 10 is a cross-sectional view schematically showing the general configuration of a sensor according to a second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0013] A. First embodiment FIG. 1 is a cross-sectional view showing a schematic configuration of a sensor 100 according to an embodiment of the present disclosure. For convenience of illustration, FIG. 1 shows only the configuration of the main parts of the sensor 100. The sensor 100 detects a target substance contained in a sample. The sample is not particularly limited, but examples thereof include gases such as air and exhaled breath, and liquids such as water. The sensor 100 of this embodiment is a resistance-type sensor. The sensor 100 includes a detection unit 10 and a detachment mechanism 20.

[0014] The detection unit 10 has a membrane 12 containing a molecularly imprinted polymer (MIP). A space 14 into which a target substance enters is formed in this molecularly imprinted polymer. This space 14 is formed according to the size and surface structure of the target substance by a method described below. The molecularly imprinted polymer chemically interacts with the target substance in this space 14, thereby capturing the target substance that has entered the space 14. The chemical interaction is not particularly limited, but examples thereof include hydrogen bonding.

[0015] The molecularly imprinted polymer is not particularly limited, but preferably has a non-covalent functional group in the main chain or branched chain. Examples of the non-covalent functional group include, but are not particularly limited to, an OH group. Examples of the molecularly imprinted polymer include, but are not particularly limited to, polypyrrole, polyaniline, acrylic polymers, photocurable polymers, and photosolubilizable polymers. The monomer for forming the molecularly imprinted polymer is not particularly limited, but preferably has a double bond for polymerization. The double bond may be present in the molecular chain or may be a double bond of an aromatic ring. Furthermore, from the viewpoint of the polymerization reaction, a monomer having an amino group is preferred. Therefore, the monomer for forming the molecularly imprinted polymer is preferably a compound having a double bond, an OH group, and an amino group.

[0016] Although one type of monomer may be used as the monomer for forming the molecularly imprinted polymer, it is preferable to use two or more types of monomers. When two or more types of monomers are used, a monomer without a non-covalent functional group may be included. The monomer for forming the molecularly imprinted polymer may be either water-soluble or water-insoluble, but a water-soluble monomer is preferable from the viewpoint of ease of handling. Specific examples of the monomer for forming the molecularly imprinted polymer include pyrrole, aniline, ortho-phenylenediamine, acrylamide, N,N'-methylenebisacrylamide, aminophenylboronic acid, aminophenol, aminobenzoic acid, and dopamine.

[0017] The target substance is not particularly limited and may be, for example, a substance with a three-dimensional structure, a chemical substance, or a fine particle. However, from the viewpoint of efficient desorption by the desorption mechanism 20, a substance with a three-dimensional structure is preferable. The substance with a three-dimensional structure is not particularly limited and may be, for example, at least one selected from the group consisting of a virus, a fungus, a microorganism, and a protein. The fungus may be, for example, not particularly limited, a bacterium, a fungus, or an archaea. The virus or fungus may be pathogenic to animals such as humans. The microorganism may be, for example, not particularly limited, a yeast or algae. The protein may be, for example, not particularly limited, a disease-related protein, an antibody, or an antigen. The antigen may contain a polysaccharide, a peptide, a nucleic acid, or may be a protein-free substance such as lipopolysaccharide. The chemical substance may be, for example, not particularly limited, a drug or a hormone. The fine particle may be, for example, not particularly limited, a pollen, PM2.5, yellow sand, aerosol, or the like.

[0018] The target substance may be one or more types, but is preferably one type from the viewpoint of preventing a decrease in detection accuracy. In an embodiment in which two or more types of target substances are detected, two or more types of spaces 14 are formed in the molecular imprinted polymer according to the target substances.

[0019] The detection unit 10 of this embodiment further includes a pair of detection electrodes 18. When a target substance is captured in the space 14 formed in the molecularly imprinted polymer, the value of the current flowing between the pair of detection electrodes 18 changes, and the target substance can be detected based on this value. The detection electrodes 18 are not particularly limited as long as they are conductive, and may be formed from, for example, metal, conductive carbon, conductive polymer, etc. The metal is not particularly limited, and examples thereof include gold, silver, copper, aluminum, and indium tin oxide (ITO).

[0020] The desorption mechanism 20 desorbs the target substance captured in the molecularly imprinted polymer from the molecularly imprinted polymer by heating or cooling the film 12. In this embodiment, the desorption mechanism 20 is a heater 40, and more specifically, is formed by a micro-heater 40 including a diaphragm 48. In this embodiment, the micro-heater 40 has a substrate 42, a heater electrode 44, and a contact pad 46.

[0021] In this embodiment, the substrate 42 is formed of a semiconductor on which an insulating film is formed. Examples of semiconductors include, but are not limited to, silicon, silicon carbide, and gallium nitride. Examples of insulating films include, but are not limited to, silicon oxide and silicon nitride. A cavity 49 is formed in the substrate 42 by removing a portion of the substrate 42. The thin-film portion of the substrate 42 formed by the cavity 49 corresponds to the diaphragm 48. The heater electrode 44 is embedded in a region including the diaphragm 48. In this embodiment, the heater electrode 44 is formed in a generally rectangular spiral shape when viewed from above. However, the shape is not limited to a spiral shape and may be patterned into any shape. The microheater 40 may have multiple heater electrodes 44. In this embodiment, the heater electrode 44 is formed to include a heating element made of platinum. However, the heating element may be formed of a nickel-chromium alloy, platinum alloy, nickel alloy, chromium alloy, or the like, without being limited to platinum. The contact pad 46 is electrically connected to the end of the heater electrode 44, and generates heat by passing a current through it. The contact pad 46 is not particularly limited as long as it is conductive, and may be made of, for example, a metal, conductive carbon, or a conductive polymer. The metal is not particularly limited, and examples thereof include gold, silver, copper, aluminum, and indium tin oxide.

[0022] In the sensor 100 of this embodiment, the detection unit 10 is provided on the diaphragm 48. That is, the membrane 12 containing the molecularly imprinted polymer is formed on the diaphragm 48. In addition, in this embodiment, the area of ​​the diaphragm 48 is larger than the area of ​​the membrane 12. This configuration can suppress the diffusion of heat from the heater electrode 44, and as a result, the target substance captured by the molecularly imprinted polymer can be efficiently desorbed. In this disclosure, the areas of the diaphragm 48 and the membrane 12 refer to the areas in a plane perpendicular to the stacking direction of the diaphragm 48 and the membrane 12.

[0023] The timing at which the microheater 40 generates heat is not particularly limited, and for example, the microheater 40 may generate heat at regular intervals, but it is preferable that the microheater 40 generate heat after the target substance is captured by the detection unit 10. As a method for generating heat after the target substance is captured, for example, when a signal resulting from the capture of the target substance is detected in the detection unit 10, a voltage is applied to the contact pad 46 to raise the temperature of the heater electrode 44 to a predetermined temperature.

[0024] FIG. 2 is an explanatory diagram showing how a target substance 90 is desorbed from a molecularly imprinted polymer film 12 by heating. In FIG. 2, the left side of the page shows the target substance 90 trapped in a space 14 formed in the molecularly imprinted polymer, and the right side of the page shows how the target substance 90 is desorbed by heating or cooling. For ease of explanation, FIG. 2 also shows a schematic illustration of a functional group 13 in the molecularly imprinted polymer as an example of a group that interacts with the target substance 90. When the film 12 containing the molecularly imprinted polymer is heated by the heat of a microheater 40 serving as a desorption mechanism 20, the structure of the target substance 90 changes due to the heat. As a result, the surface structure of the target substance 90 changes, reducing its interaction with the functional group 13 of the molecularly imprinted polymer and allowing it to desorb.

[0025] The temperature of the film 12 when heated is preferably lower than the glass transition temperature of the molecularly imprinted polymer in order to suppress structural changes of the molecularly imprinted polymer. The temperature of the film 12 when heated is also preferably a temperature that can efficiently change the structure of the target substance 90. The temperature of the film 12 when heated is, for example, preferably 50°C or higher and 180°C or lower, more preferably 60°C or higher and 120°C or lower, and even more preferably 70°C or higher and 100°C or lower.

[0026] The desorption mechanism 20 is not limited to the heater 40 that heats the film 12, but may have any configuration capable of heating the film 12. For example, the desorption mechanism 20 may be configured to include a dielectric heating device, a microwave generating substance, a combination of a photothermal conversion material and a light generating device, or the like. Examples of microwave generating substances include, but are not limited to, magnetrons, klystrons, and gyrotrons. Furthermore, the desorption mechanism 20 may be a mechanism for cooling the film 12 instead of a mechanism for heating the film 12. Examples of mechanisms for cooling the film 12 include, but are not limited to, mechanisms including Peltier elements. Similar to heating, cooling can also change the structure of the captured target substance 90, which is thought to reduce the interaction between the captured target substance 90 and the molecularly imprinted polymer.

[0027] The temperature of the film 12 when cooled is preferably a temperature that can efficiently change the structure of the target substance 90. The temperature of the film 12 when cooled is preferably, for example, 0°C or higher and 10°C or lower, and more preferably 0°C or higher and 5°C or lower. In an embodiment in which the target substance 90 is desorbed by cooling the film 12, from the viewpoint of efficient desorption, it is more preferable that the target substance 90 is a substance that is denatured at a relatively low temperature, such as a temperature above 0°C. Substances that are denatured at a relatively low temperature include, but are not limited to, yeast frataxin, for example.

[0028] The desorption mechanism 20 reduces the chemical interaction between the target substance 90 and the molecularly imprinted polymer by heating or cooling the membrane 12, thereby suppressing deterioration of the molecularly imprinted polymer. Therefore, compared to an embodiment in which the target substance is removed by, for example, using cyclic voltammetry, scanning the potential between the working electrode and the counter electrode relative to the potential of a reference electrode until the potential reaches a potential at which the chemical bond is broken, deterioration of the molecularly imprinted polymer due to electron exchange can be suppressed. As a result, a decrease in the detection accuracy of the sensor 100 can be suppressed. This allows the sensor 100 to be used repeatedly and prevents a shortened lifespan of the sensor 100. Furthermore, compared to an embodiment in which the target substance 90 is removed using an organic solvent such as acetonitrile or a base such as sodium hydroxide, the use of an organic solvent or base can be omitted, thereby suppressing deterioration of the molecularly imprinted polymer. Furthermore, compared to an embodiment in which the target substance 90 is removed using an organic solvent, the environmental impact can be reduced. Furthermore, compared to an embodiment in which the target substance 90 is removed using an organic solvent, the sensor 100 is not limited to locations where organic solvents can be used, thereby expanding the range of use of the sensor 100.

[0029] The uses of the sensor 100 of this embodiment are not particularly limited, but may be applied to, for example, virus and bacteria monitoring, air quality monitoring, water quality management, food hygiene management, health management of humans, animals and plants, high sensitivity sensors, etc.

[0030] The method for manufacturing the sensor 100 of this embodiment is not particularly limited, but it can be manufactured, for example, by the following method: First, a MEMS substrate is prepared, then a molecularly imprinted polymer is formed, and then the target substance used for forming the template is removed.

[0031] To fabricate a MEMS substrate, for example, a 4-inch silicon wafer with a thickness of 400 μm is cleaned with a cleaning solution, and then an insulating film is formed on both sides of the wafer. To form the insulating film, for example, a 100-nm-thick silicon oxide film is formed over the entire surface by thermal oxidation, a 200-nm-thick silicon nitride film is formed by low-pressure CVD, and a 100-nm-thick silicon oxide film is formed by plasma CVD. On one side of the wafer with the insulating film formed, for example, a 20-nm-thick tantalum oxide film is formed as an adhesion layer by RF sputtering, and then a 110-nm-thick platinum film is formed as a heating element by RF sputtering on top of that. The adhesion layer and heating element are then patterned into the desired shape on the deposition surface by photolithography to form a heater electrode. Specifically, for example, a photoresist ink is spin-coated onto the deposition surface, forming a film and drying it to form a resist. This is then exposed and developed through a glass mask, and excess portions are removed by wet etching. The heater electrode may be formed, for example, in a rectangular spiral shape with an outer periphery of 0.5 mm square and an L / S of 20 μm / 20 μm. The heater electrode is then covered with an insulating film. Specifically, for example, a silicon oxide film with a thickness of 100 nm is formed by plasma CVD on the surface where the heater electrode is patterned, and a silicon nitride film with a thickness of 200 nm is formed by low-pressure CVD. Contact pads are then formed. Specifically, for example, both ends of the heater electrode buried in the insulating film are exposed by photolithography and reactive ion etching. After that, a gold film with a thickness of 1 μm is formed by DC sputtering, and then contact pads are formed at two locations on both ends of the exposed heater electrode by photolithography and wet etching. When forming the contact pads connected to the heater electrode, a pair of detection electrodes of the detection unit may also be formed in the same way. Then, a diaphragm is formed. Specifically, silicon is removed from the surface opposite the surface where the heater electrode is formed, for example, within a 1 mm square area. Silicon is removed by, for example, removing the insulating film by photolithography and reactive ion etching, and then removing the exposed silicon by wet etching.By doing so, it is possible to form a thin film portion including the insulating film and the heater electrode, with the square spiral heater pattern being formed at the center.

[0032] An example of a method for producing a molecularly imprinted polymer when the target substance 90 is Escherichia coli will be described below. First, the MEMS substrate including the diaphragm formed as described above is washed with ethanol and ultrapure water, and then the potential is scanned from -0.7 V to +0.7 V five times in a solution containing 0.1 M LiClO4 and 50 mM pyrrole, to perform electropolymerization of pyrrole. Then, 1 × 10 4 After adding CFU / mL of E. coli to the electropolymerization cell, molecularly imprinted polymers were synthesized by scanning the potential at a scan rate of 100 mV / s for five more cycles. This was followed by ultrasonic cleaning in water for 5 minutes or by 1 × 10 -3 The sensor 100 can be fabricated by removing the templated E. coli from the molecularly imprinted polymer by incubation in M ​​detergent.

[0033] B. Second embodiment FIG. 3 is an explanatory diagram schematically illustrating the general configuration of a sensor 100a according to a second embodiment. FIG. 3 shows a cross-sectional view similar to FIG. 1. The sensor 100a according to the second embodiment differs from the sensor 100 according to the first embodiment in that it is a FET sensor including a field effect transistor (FET sensor). Since the other configurations are similar to those of the first embodiment, the same reference numerals are used for similar configurations, and detailed description thereof will be omitted. Note that the sensor 100a according to the second embodiment is a so-called extended gate FET sensor, but is not limited to this, and may be any FET sensor such as a bottom contact type or a top contact type.

[0034] The sensor 100a includes a substrate 61, a gate electrode 62, a gate insulating film 63, a source electrode 64, a drain electrode 65, a bank 66, a semiconductor thin film 67, a sealing film 68, a detection unit 10a, and a desorption mechanism 20a.

[0035] The substrate 61 is not particularly limited and may be formed from an inorganic or organic material. Examples of inorganic materials include, but are not limited to, glass, ceramics, and metals. Examples of organic materials include, but are not limited to, resins and paper. The gate electrode 62 is not particularly limited and may be formed from, but is not limited to, aluminum, silver, gold, copper, titanium, ITO, poly(3,4-ethylenedioxythiophene), polystyrene sulfonate, conductive carbon nanotubes, graphene, conductive organic-inorganic composite materials, and the like. The gate insulating film 63 is not particularly limited and may be formed from, but is not particularly limited to, silica (silicon oxide), alumina (aluminum oxide), self-assembled monolayers, polystyrene, polyvinylphenol, polyvinyl alcohol, polymethyl methacrylate, polydimethylsiloxane, polysilsesquioxane, ionic liquids, polytetrafluoroethylene, and the like. The substrate 61 and the gate electrode 62 may be integrally formed, and for example, a metal substrate or a Si substrate may be used. The Si substrate is preferably doped to improve conductivity, and when the semiconductor thin film is p-type, it is preferable to use an n-type doped substrate, and when the semiconductor thin film is n-type, it is preferable to use a p-type doped substrate. SiO2 formed by oxidizing the surface of the Si substrate may also be used as the gate insulating film 63.

[0036] The source electrode 64 and the drain electrode 65 may be formed of, but are not limited to, a metal, a conductive polymer, conductive carbon, a conductive organic-inorganic composite material, or the like. Examples of metals include, but are not limited to, gold, silver, copper, platinum, and aluminum. Examples of conductive polymers include, but are not limited to, PEDOT and PSS. Examples of conductive carbon include, but are not limited to, conductive carbon nanotubes and graphene. The substrate 61, the gate electrode 62, the gate insulating film 63, the source electrode 64, and the drain electrode 65 may be subjected to a surface treatment, and for example, a self-assembled monolayer may be formed on the surface to adjust the liquid repellency.

[0037] The bank 66 may be formed of, for example, polytetrafluoroethylene, and the sealing film 68 may be formed of, for example, polytetrafluoroethylene, polyparaxylylene, etc. The semiconductor thin film 67 is not particularly limited, but if it is an organic semiconductor of P type, it may be formed of pentacene, dinaphthothienothiophene, benzothienobenzothiophene (Cn-BTBT), TIPS pentacene, TES-ADT, rubrene, P3HT, PBTTT, etc., and if it is an organic semiconductor of N type, it may be formed of fullerene, etc.

[0038] The detection unit 10a has an extended gate electrode 71 and a counter electrode 72. The detection unit 10a is placed in an aqueous solution 73 containing a target substance.

[0039] The extended gate electrode 71 is electrically connected to the gate electrode 62 via a conductive wire 69. A film 12 containing a molecularly imprinted polymer is provided on the surface of the extended gate electrode 71. The extended gate electrode 71 may be formed, for example, from the same material as the gate electrode 62 described above. A metal thin film, a conductive inorganic material thin film, or a conductive organic material thin film having a thickness of, for example, 10 nm to 1000 μm may be formed on the surface of the extended gate electrode 71. Examples of metals include, but are not limited to, gold. Examples of conductive inorganic materials include, but are not limited to, carbon nanotubes and graphene. Furthermore, a metal oxide film having a thickness of 1 nm to 1000 nm, preferably 1 nm to 50 nm, may be formed on the surface of the extended gate electrode 71. Examples of metal oxides include, but are not limited to, SiO2. In the present disclosure, the term "surface of the extended gate electrode 71" includes both an embodiment in which the material of the extended gate electrode 71 itself is the surface and an embodiment in which a metal thin film or a metal oxide film is formed on the surface.

[0040] The counter electrode 72 is not particularly limited as long as it is conductive, and may be formed of, for example, a metal electrode or a carbon electrode. The counter electrode 72 may be formed by forming a conductive film on a substrate. Furthermore, the counter electrode 72 may be formed by forming a film made of the same material as or a different material from the film 12 containing the molecularly imprinted polymer. Furthermore, a reference electrode made of Ag / AgCl or the like may be used as the counter electrode 72.

[0041] Measurement using the sensor 100a is performed, for example, with the detection unit 10a immersed in an aqueous solution containing a target substance. When a target substance is captured in the space 14 formed in the molecularly imprinted polymer, the value of the threshold voltage changes depending on the concentration of the target substance. Therefore, for example, a relationship curve between the concentration of the target substance and the threshold voltage is created in advance, and then the threshold voltage of the aqueous solution containing the target substance to be measured is measured, thereby allowing the concentration of the target substance to be calculated based on the relationship curve. Alternatively, measurement may be performed using a current value instead of the threshold voltage.

[0042] The detachment mechanism 20a is stacked on the extended gate electrode 71 of the detection unit 10a. The detachment mechanism 20a of this embodiment is formed by a microheater 40a. As in the first embodiment, the microheater 40a has a substrate 42, a heater electrode 44, and a contact pad 46. Note that although the diaphragm is omitted in the sensor 100a shown in FIG. 3, it may be configured to include a diaphragm such as that included in the detachment mechanism 20 of the first embodiment.

[0043] C. Variations The configuration of the sensors 100, 100a in the above-described embodiments is merely an example and can be modified in various ways. For example, the sensors 100, 100a are not limited to resistive sensors or FET sensors, but may be any type of sensor, such as an impedance sensor or a QCM (quartz crystal microbalance) sensor. Although the area of ​​the diaphragm 48 is larger than that of the membrane 12 in the above-described embodiments, the area of ​​the diaphragm 48 may be the same as or smaller than that of the membrane 12. Although the microheater 40 includes the diaphragm 48, the diaphragm 48 may be omitted. The location of the desorption mechanism 20, 20a is not limited as long as it can heat or cool the membrane 12. Furthermore, the desorption mechanism 20, 20a may be used in combination with a desorption mechanism having another mechanism for desorbing a target substance captured by a molecularly imprinted polymer. The desorption mechanism having another mechanism is not particularly limited, but examples thereof include a mechanism that desorbs by releasing a stimulant, a mechanism that desorbs by light irradiation, a mechanism that desorbs by vibration, and a mechanism that desorbs by electrostatic repulsion of the surface potential. The desorption mechanism having another mechanism is preferably a mechanism that desorbs by electrostatic repulsion of the surface potential. The stimulant may be, for example, at least one selected from the group consisting of ozone, hydroxyl radicals, and superoxide.

[0044] The present invention is not limited to the above-described embodiments and can be realized in various configurations without departing from the spirit of the present invention. For example, the technical features in the embodiments and examples corresponding to the technical features in each aspect described in the Summary of the Invention section can be appropriately replaced or combined to solve some or all of the above-described problems or achieve some or all of the above-described effects. Furthermore, if a technical feature is not described as essential in this specification, it can be deleted as appropriate. [Explanation of symbols]

[0045] 10, 10a...detection portion, 12...membrane, 13...functional group, 14...space, 18...detection electrode, 20, 20a...detachment mechanism, 40, 40a...microheater (heater), 42...substrate, 44...heater electrode, 46...contact pad, 48...diaphragm, 49...cavity, 61...substrate, 62...gate electrode, 63...gate insulating film, 64...source electrode, 65...drain electrode, 66...bank, 67...semiconductor thin film, 68...sealing film, 69...conductor, 71...extension gate electrode, 72...counter electrode, 73...aqueous solution, 90...target substance, 100, 100a...sensor

Claims

1. A sensor for detecting a target substance, a detection unit having a space into which the target substance enters and a membrane containing a molecular imprinted polymer that captures the target substance that has entered the space; a desorption mechanism for desorbing the target substance captured by the molecular imprinted polymer from the molecular imprinted polymer; Equipped with the detachment mechanism heats or cools the film; A sensor characterized by:

2. 2. The sensor of claim 1, The target substance is at least one selected from the group consisting of a virus, a bacterium, a microorganism, and a protein. A sensor characterized by:

3. 3. The sensor according to claim 1, The desorption mechanism is a heater. A sensor characterized by:

4. 4. The sensor according to claim 3, the heater is a micro-heater including a diaphragm, the membrane is formed on the diaphragm; The area of ​​the diaphragm is greater than the area of ​​the membrane. A sensor characterized by:

5. 3. The sensor according to claim 1, It is a field effect transistor type sensor, A sensor characterized by:

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