Carry-out device and cutting device

Abstract

To save space of a carry-out device that pushes out a workpiece from a cassette in a depth direction of the cassette.SOLUTION: A carry-out device carries out a plate-shaped workpiece accommodated in a cassette from the cassette. The carrying-out device includes: a bendable elongated member in which the elongated member has high rigidity in a longitudinal direction of a linear region as compared with an intersecting direction intersecting a longitudinal direction with respect to an external force along the longitudinal direction when a part of the elongated member is formed in a linear shape, and having high flexibility in the intersecting direction of the linear region as compared with the longitudinal direction with respect to an external force along the intersecting direction, and being capable of advancing and retreating along a depth direction of the cassette, and capable of pushing out a workpiece accommodated in the cassette; a guide part that changes the direction in which the elongated member advances and retreats from a predetermined direction intersecting the depth direction of the cassette to the depth direction; and a drive part that is in contact with the elongated member and advances and retreats the elongated member via the guide part.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a workpiece carrying-out device that carries out a plate-shaped workpiece stored in a cassette from the cassette, and to a cutting machine that includes the carrying-out device. [Background technology]

[0002] A package device such as a QFN (Quad Flat Non-lead package) is manufactured by, for example, dividing a rectangular plate-shaped workpiece (i.e., a strip substrate) into device chip units using a cutting device.

[0003] The strip substrate is formed by electrically connecting a plurality of device chips, each of which has an integrated circuit such as an IC (Integrated Circuit), to a semiconductor package substrate and then sealing the chips with resin.

[0004] A cutting device for cutting a strip substrate has a mounting table on which a cassette is placed. A carrying-out device for carrying out the strip substrate from the cassette is provided near the mounting table. The carrying-out device has a pusher unit and a pull unit (see, for example, Patent Document 1).

[0005] When a cassette containing a plurality of strip substrates is placed on the mounting table, a pusher unit pushes out one end of one strip substrate along the depth direction from the rear to the front of the cassette, and a pull unit clamps the other end of the pushed-out strip substrate.

[0006] The pull unit then transports the strip substrate by pulling out the substrate while sandwiching it. In other words, the pusher unit performs an auxiliary operation to assist the pull unit in pulling out the strip substrate.

[0007] Generally, a strip substrate has a warp, and it may be difficult to reliably carry the strip substrate out of the cassette using only a pull unit, so a pusher unit and a pull unit are used in combination.

[0008] The pusher unit has a rod-shaped arm and an actuator for moving the arm from the rear to the front of the cassette. The arm has a pusher at its tip that comes into contact with the strip substrate.

[0009] The actuator moves the pusher from a standby position at the rear of the cassette into the interior of the cassette, causing the pusher to push out the strip substrate. Therefore, the cutting device requires a space behind the cassette in the depth direction of the cassette to place the pusher at the standby position. In other words, a relatively large space is required in the direction of movement of the pusher. [Prior art documents] [Patent documents]

[0010] [Patent Document 1] Special Publication No. 2010-506422 Summary of the Invention [Problem to be solved by the invention]

[0011] The present invention has been made in view of the above problems, and has as its object to reduce the space required for a carry-out device that pushes out workpieces from a cassette in the depth direction of the cassette. [Means for solving the problem]

[0012] According to one aspect of the present invention, there is provided an unloading device for unloading plate-shaped workpieces stored in a cassette from the cassette, the unloading device comprising: a bendable elongated member that, when a portion of the elongated member is straightened, has higher rigidity in the longitudinal direction of the linear region against external forces along the longitudinal direction than in a transverse direction intersecting the longitudinal direction, but has higher flexibility in the transverse direction of the linear region against external forces along the transverse direction than in the longitudinal direction, and is capable of advancing and retreating along the depth direction of the cassette, and is capable of pushing out the workpieces stored in the cassette; a guide section that changes the direction in which the elongated member advances and retreats from a predetermined direction intersecting the depth direction of the cassette to the depth direction; and a drive section that is in contact with the elongated member and advances and retreats the elongated member via the guide section.

[0013] Preferably, the elongated member is a thin plate that is convexly curved from both sides to the center when viewed in a cross section perpendicular to the longitudinal direction of the elongated member.

[0014] Preferably, the elongated member has a plurality of plate portions arranged along the longitudinal direction and a plurality of pins for connecting the plurality of plate portions in a chain-like manner, and the plurality of plate portions connected in a chain-like manner can be bent in one direction along the intersecting direction, but cannot be bent in another direction along the intersecting direction that is opposite to the one direction.

[0015] Preferably, the elongated member has a first chain in which the plurality of plate portions connected in a chain shape can be bent in the one direction but cannot be bent in the other direction, and a second chain in which the plurality of plate portions connected in a chain shape can be bent in the other direction but cannot be bent in the one direction, the respective tip ends of the first chain and the second chain are fixed to each other, and a first tip region including the tip end of the first chain and a second tip region including the tip end of the second chain are arranged in parallel along the depth direction.

[0016] Preferably, the workpiece is a rectangular substrate, a plurality of planned division lines are arranged in a grid pattern on the surface of the rectangular substrate, a device is provided in each rectangular area partitioned by the plurality of planned division lines, and each device is covered with a molded resin layer.

[0017] Preferably, the elongated member has a pusher that sandwiches the front and back surfaces of the workpiece and contacts the side portions of the workpiece at a leading position when the elongated member moves along the depth direction.

[0018] According to another aspect of the present invention, there is provided a cutting device comprising the above-mentioned discharge device, a holding table that suction-holds the workpiece discharged by the discharge device, and a cutting unit having a spindle that cuts the workpiece held by the holding table with a cutting blade attached to the tip of the spindle. [Effects of the Invention]

[0019] A discharge device according to one aspect of the present invention includes a bendable elongated member, which, while being bendable, has relatively high rigidity in a longitudinal direction of a linear region and relatively high flexibility in a transverse direction intersecting the longitudinal direction.

[0020] The unloading device has a guide section that changes the direction of travel of the elongated member, and the guide section changes the direction of travel of the elongated member from a predetermined direction intersecting the depth direction of the cassette to the depth direction of the cassette. That is, the elongated member is bent so as to have a first linear region along the predetermined direction and a second linear region along the depth direction of the cassette.

[0021] For example, the elongated member is bent to have a first linear region along the height direction of the cassette and a second linear region along the depth direction of the cassette, thereby ensuring the rigidity of the elongated member in each of the first and second linear regions, while realizing space savings in the depth direction of the cassette compared to when a rod-shaped arm is disposed along the depth direction of the cassette. [Brief explanation of the drawings]

[0022] [Figure 1] FIG. [Figure 2] FIG. [Figure 3] FIG. 3(A) is a perspective view of a convex rule type elongated member, and FIG. 3(B) is a cross-sectional view taken along line AA of FIG. 3(A). [Figure 4] FIG. 4(A) is a perspective view showing an example of a pusher, and FIG. 4(B) is a perspective view showing another example of a pusher. [Figure 5] Figure 5(A) is a perspective view of the elongated member when the pusher is in the retracted position, Figure 5(B) is a perspective view of the elongated member when the pusher is in the first extrusion position, Figure 5(C) is a perspective view of the elongated member when the pusher is in the second extrusion position, Figure 5(D) is a perspective view of the elongated member of Figure 5(A) from a different angle, Figure 5(E) is a perspective view of the elongated member of Figure 5(B) from a different angle, and Figure 5(F) is a perspective view of the elongated member of Figure 5(C) from a different angle. [Figure 6] Figure 6(A) is an oblique view of a cassette, Figure 6(B) is an oblique view of a cassette containing multiple strip substrates, Figure 6(C) is an oblique view showing one strip substrate being removed from the cassette, and Figure 6(D) is an oblique view of the cassette after one strip substrate has been removed from the cassette. [Figure 7] Figure 7(A) is a side view of a unit of a chain-like elongated member according to the second embodiment, Figure 7(B) is a top view of the unit, Figure 7(C) is a bottom view of the unit, Figure 7(D) is a side view of the elongated member arranged in a straight line, and Figure 7(E) is a side view of the elongated member when bent. [Figure 8] FIG. 10 is a side view showing the elongated member moving forward and backward. [Figure 9] FIG. 9(A) is a side view of the elongated member when the wire is not tensioned, and FIG. 9(B) is a diagram showing how the rigidity of the second linear region is reinforced by tensioning the wire. [Figure 10]Figure 10(A) is a side view of a unit of a chain-like elongated member according to the third embodiment, Figure 10(B) is a top view of the unit, Figure 10(C) is a bottom view of the unit, Figure 10(D) is a side view of the elongated member arranged in a straight line, and Figure 10(E) is a side view of the elongated member when folded. [Figure 11] FIG. 10 is a side view showing the elongated member moving forward and backward. [Figure 12] FIG. 12(A) is a side view of the elongated member when no wire is tensioned, and FIG. 12(B) is a diagram showing how the rigidity of the second linear region is reinforced by tensioning the wire. [Figure 13] FIG. 10 is a top view of a chain-like elongated member according to a fourth embodiment. [Figure 14] FIG. 10 is a side view showing the elongated member moving forward and backward. DETAILED DESCRIPTION OF THE INVENTION

[0023] (First embodiment) An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a plan view of a cutting device 2. The X-axis (axis parallel to the machining feed direction), Y-axis (axis parallel to the indexing feed direction), and Z-axis (axis parallel to the vertical direction) shown in Fig. 1 are perpendicular to one another.

[0024] The +X direction and the -X direction are both parallel to the X axis but are opposite directions to each other. Similarly, the +Y direction and the -Y direction are both parallel to the Y axis but are opposite directions to each other, and the +Z direction and the -Z direction are both parallel to the Z axis but are opposite directions to each other. In this specification, the +X direction and the -X direction are collectively referred to as the X-axis direction, the +Y direction and the -Y direction are collectively referred to as the Y-axis direction, and the +Z direction and the -Z direction are collectively referred to as the Z-axis direction.

[0025] The cutting device 2 is a processing device that sequentially cuts a plurality of rectangular strip substrates (workpieces) 11. The strip substrates 11 have a non-circular plate shape, and are rectangular substrates as shown in FIG.

[0026] The strip substrate 11 has a front surface 11a and a back surface 11b that are substantially the same rectangular shape (see FIGS. 6(B) and 6(C)). The thickness of the strip substrate 11 (i.e., the distance from the front surface 11a to the back surface 11b) is, for example, 1.0 mm.

[0027] A plurality of rectangular device regions 13a (three in the example shown in FIG. 1) are provided on the surface 11a of the strip substrate 11. A plurality of planned division lines 15 are arranged in a grid pattern in each device region 13a.

[0028] The plurality of planned division lines 15 includes a first group of planned division lines 15 extending along the long sides of the strip substrate 11, and a second group of planned division lines 15 extending along the short sides of the strip substrate 11. A device 17 is provided in each rectangular area defined by the plurality of planned division lines 15.

[0029] 1, one device 17 provided in one rectangular area is indicated by a dashed line. Each device 17 is covered with a molding resin layer 19 and is disposed inside the strip substrate 11, and is not exposed on the surface 11a.

[0030] By dividing the strip substrate 11 into units of devices 17, the strip substrate 11 is divided into package devices such as QFNs and CSPs (Chip Size Packages). As described above, the strip substrate 11 may have a predetermined amount of warping (for example, up to about 1.0 mm) due to the thermal history during resin molding.

[0031] The cutting device 2 has a flat cassette mounting table 4. The cassette mounting table 4 is configured to be movable along the Z-axis direction by an actuator (not shown). A rectangular parallelepiped cassette 6 containing a plurality of strip substrates 11 is mounted on the cassette mounting table 4.

[0032] In a plan view, the cassette 6 has long sides extending in a depth direction 6c1 from the rear end 6a to the front end 6b of the cassette 6, and short sides extending in a width direction 6c2 perpendicular to the depth direction 6c1. In this embodiment, the length of the cassette 6 in the height direction 6c3 is longer than the length of the cassette 6 in the width direction 6c2. The height direction 6c3 is a direction along a predetermined direction perpendicular to (i.e., intersecting with) the depth direction 6c1 and the width direction 6c2 of the cassette 6.

[0033] An opening is formed at each of the rear end 6a and the front end 6b of the cassette 6 (see Fig. 2, Fig. 6(A) to Fig. 6(D), etc.). The strip substrate 11 is pushed out through the opening at the rear end 6a by the elongated member 12 (described later) and is removed from the cassette 6 through the opening at the front end 6b.

[0034] 1, the depth direction 6c1 is arranged substantially parallel to the Y-axis direction, the width direction 6c2 is arranged substantially parallel to the X-axis direction, and therefore the height direction 6c3 is arranged substantially parallel to the Z-axis direction.

[0035] The cassette 6 is hollow, and a pair of inner surfaces spaced apart in the width direction 6c2 are provided with a plurality of storage shelves 6d along the height direction 6c3 (see FIGS. 2 and 6(A) to 6(D)). A pair of storage shelves 6d, each located at the same height in the height direction 6c3, supports one strip substrate 11 (see FIGS. 6(B) to 6(D)).

[0036] Each strip substrate 11 is carried out from the cassette 6 to a pair of support stands 32 by the carry-out device 8. The carry-out device 8 has a pusher unit 10. Here, the pusher unit 10 will be described with reference to Figs. 2 to 6(D).

[0037] 2 is an enlarged perspective view of the vicinity of the cassette mounting table 4. The pusher unit 10 of this embodiment includes a long member 12. The long member 12 has a trough-shaped cross section, excellent uprightness, and has substantially the same shape and properties as a convex rule (also called steel tape), which is a bendable tape measure.

[0038] Unlike a normal convex rule, the elongated member 12 of this embodiment is a thin plate that does not have a measuring scale. However, the elongated member 12 may have a scale like a normal convex rule.

[0039] Fig. 3(A) is a perspective view of a convex rule type elongated member 12 in the first embodiment. In Fig. 3(A), a part of the elongated member 12 is omitted and indicated by a broken line. Fig. 3(B) is a cross-sectional view taken along the line AA in Fig. 3(A).

[0040] As shown in Figure 3(A), the elongated member 12 has a first linear region 12a whose longitudinal direction is arranged approximately parallel to the height direction 6c3 of the cassette 6, and a second linear region 12b whose longitudinal direction is arranged approximately parallel to the depth direction 6c1 of the cassette 6.

[0041] As shown in FIG. 3B, in a cross-sectional view perpendicular to the longitudinal direction (i.e., the depth direction 6c1) of the elongated member 12 at the position AA in the second linear region 12b, the elongated member 12 has both side portions 12b X1 From central part 12b X2 It is curved so that it is convex downwards.

[0042] Similarly, in a cross-sectional view perpendicular to the longitudinal direction (i.e., the height direction 6c3) of the elongated member 12 in the first linear region 12a, the elongated member 12 has both side portions 12b X1 The central part 12b X2 6c1. The curved portion 6c1 is convex and protrudes in the depth direction 6c1 compared to the curved portion 6c1.

[0043] Because the elongated member 12 has a convex cross section, even when stretched into a beam shape, it has the characteristic of being less likely to bend in the direction of gravity than an elongated member made of the same material but having a flat ribbon shape.

[0044] The first linear region 12a and the second linear region 12b are each a part of the elongated member 12. The bent region 12c connecting the first linear region 12a and the second linear region 12b is housed in a rectangular parallelepiped guide portion 16 (see FIG. 2). The position of the guide portion 16 in the cutting device 2 is fixed.

[0045] The first linear regions 12a have high rigidity against external forces along the height direction 6c3 (i.e., the longitudinal direction of the first linear regions 12a). More specifically, the first linear regions 12a have higher rigidity in the height direction 6c3 than in the depth direction 6c1 (i.e., the transverse direction).

[0046] Therefore, when the first linear region 12a is pushed downward along the height direction 6c3, the first linear region 12a moves downward without bending except at the guide portion 16. When the first linear region 12a is pulled upward along the height direction 6c3, the first linear region 12a moves upward without bending except at the guide portion 16.

[0047] However, the first linear region 12a has high flexibility in the depth direction 6c1 (i.e., the cross direction) against an external force along the depth direction 6c1. More specifically, the first linear region 12a has high flexibility in the depth direction 6c1 compared to the height direction 6c3 (i.e., the longitudinal direction).

[0048] Therefore, the first linear region 12a can be easily bent by applying an external force along the depth direction 6c1. The first linear region 12a is bent by the external force along the depth direction 6c1 at the guide portion 16, and the bent first linear region 12a becomes the second linear region 12b.

[0049] The second linear regions 12b have high rigidity against external forces along the depth direction 6c1 (i.e., the longitudinal direction of the second linear regions 12b). More specifically, the second linear regions 12b have higher rigidity in the depth direction 6c1 than in the height direction 6c3 (i.e., the cross direction).

[0050] Therefore, when the second linear region 12b is pushed or pulled along the depth direction 6c1, the second linear region 12b moves forward or backward along the depth direction 6c1 without bending at any point other than the guide portion 16.

[0051] However, the second linear region 12b has high flexibility in the height direction 6c3 (i.e., the transverse direction) against an external force along the height direction 6c3. More specifically, the second linear region 12b has high flexibility in the height direction 6c3 compared to the depth direction 6c1 (i.e., the longitudinal direction).

[0052] Therefore, the second linear region 12b can be easily bent upward by applying an upward external force along the height direction 6c3. The second linear region 12b is bent by the external force along the height direction 6c3 at the guide portion 16, and the bent second linear region 12b becomes the first linear region 12a.

[0053] Therefore, when the first linear region 12a is pushed or pulled along the height direction 6c3, the second linear region 12b moves forward or backward along the depth direction 6c1. That is, the elongated member 12 can move forward or backward along the depth direction 6c1 of the cassette 6.

[0054] A pusher 14 is fixed to the tip of the second linear region 12b, and comes into contact with the side of the strip substrate 11. In other words, the pusher 14 is provided at the leading position when the elongated member 12 moves along the depth direction 6c1.

[0055] 4(A) is a perspective view showing an example of the pusher 14. The pusher 14 has claws 14a and 14b for clamping the front surface 11a and the back surface 11b of the strip substrate 11 in the height direction 6c3 of the cassette 6. A recessed area 14c is formed by the claws 14a and 14b.

[0056] By having the recessed region 14c, the pusher 14 can more securely grasp the strip substrate 11 and more securely push the strip substrate 11 in the depth direction 6c1 than if the pusher 14 did not have the recessed region 14c.

[0057] The pusher 14 is integrally formed, for example, from resin, and its outer surface is covered with a conductive material such as metal. The size of the pusher 14 in a plan view is, for example, 10 mm in the depth direction 6c1 of the cassette 6 and 10 mm in the width direction 6c2 of the cassette 6.

[0058] The thickness of the pusher 14 (i.e., the length of the pusher 14 in the height direction 6c3) is, for example, 2.0 mm. In addition, in the depth direction 6c1 of the cassette 6, the distance from the tip ends of the claws 14a and 14b to the rear end of the recessed region 14c is, for example, 3.0 mm.

[0059] Fig. 4(B) is a perspective view showing another example of the pusher 14. In the pusher 14 shown in Fig. 4(B), the distance between the inner surfaces of the claw portions 14a and 14b is slightly larger than the thickness of the strip substrate 11, so that the warped strip substrate 11 can be sandwiched therebetween.

[0060] In the example of FIG. 4(B), the claws 14a do not necessarily have to contact the front surface 11a of the strip substrate 11, and the claws 14b do not necessarily have to contact the back surface 11b of the strip substrate 11.

[0061] The pusher 14 shown in Figure 4(B), like the example shown in Figure 4(A), can push out the strip substrate 11 by clamping the front surface 11a and back surface 11b of the strip substrate 11 stored in the cassette 6 with the claw portions 14a, 14b and contacting the side portions of the strip substrate 11.

[0062] Fig. 5(A) is a perspective view of the elongated member 12 when the pusher 14 is in the retracted position P0, and Fig. 5(D) is a perspective view of the elongated member 12 of Fig. 5(A) viewed from a different angle. For example, when the pusher 14 is in the retracted position P0, the pusher 14 is located outside the cassette 6.

[0063] The bending region 12c of the elongated member 12 is disposed within a rectangular parallelepiped guide portion 16. The guide portion 16 has an upper opening 16a on its upper surface, into which the first linear region 12a is inserted. The guide portion 16 also has a side opening 16b on its side surface facing the rear end portion 6a of the cassette 6, into which the second linear region 12b is inserted.

[0064] A pair of rollers 18 are arranged within the guide portion 16. The longitudinal portions of the pair of rollers 18 are arranged along the width direction 6c2. The pair of rollers 18 are spaced apart in the height direction 6c3 by a distance substantially equal to the thickness of the elongated member 12.

[0065] One roller 18 located above the height direction 6c3 has a cylindrical barrel shape with a larger diameter at the center than at both ends, while the other roller 18 located below the height direction 6c3 has a hyperboloidal shape with a larger diameter at both ends than at the center.

[0066] Therefore, the pair of rollers 18 can contact both surfaces of the second linear region 12b in the height direction 6c3 without bending the second linear region 12b in the height direction 6c3.

[0067] The pair of rollers 18 and the upper opening 16a, together with a moving block 20, an actuator 22, etc., which will be described later, function to change the direction in which the elongated member 12 advances and retreats.

[0068] In addition, instead of a pair of rollers 18, a roller 18 located on the upper side in the height direction 6c3 and a resin guide member (not shown) located below the roller 18 and receiving the second linear region 12b may be provided.

[0069] The guide member has a concave shape in a cross section viewed in a plane parallel to the width direction 6c2 and the height direction 6c3, and guides the second linear region 12b so as to slide. Similarly, the rollers 18, the guide member, and the upper opening 16a have the function of changing the direction in which the elongated member 12 advances and retreats.

[0070] In this embodiment, a moving block 20 is in contact with the upper end of the first linear region 12a. The moving block 20 is fixed to the elongated member 12 by a fixing member (not shown) such as a bolt. The moving block 20 is moved along the height direction 6c3 by a ball screw type actuator (drive unit) 22 (see FIG. 5(A)).

[0071] 5(B) to 5(F), the actuator 22 is omitted. The actuator 22 has a pair of guide rails 24 arranged along the height direction 6c3. A moving block 20 is fixed to the pair of guide rails 24 so as to be slidable along the height direction 6c3.

[0072] A screw shaft 26 is provided between the pair of guide rails 24 and arranged along the height direction 6c3. The screw shaft 26 is rotatably connected to a nut portion (not shown) provided on the moving block 20 via a plurality of balls (not shown). A drive source 28 such as a servo motor or a stepping motor is connected to the upper end of the screw shaft 26.

[0073] When the driving source 28 is rotated, the moving block 20 moves along the height direction 6c3. That is, the actuator 22 moves the moving block 20, thereby advancing and retreating the elongated member 12 via the guide portion 16.

[0074] For example, when the actuator 22 moves the first linear region 12a downward, the first linear region 12a passes through the upper opening 16a and is inserted between the pair of rollers 18, and then comes out from the side opening 16b as the second linear region 12b. In this way, the direction in which the elongated member 12 advances and retreats is changed from downward along the height direction 6c3 to the depth direction 6c1.

[0075] Furthermore, for example, when the actuator 22 moves the first linear region 12a upward, the second linear region 12b is inserted between the pair of rollers 18 through the side opening 16b and emerges as the first linear region 12a from the upper opening 16a. In this way, the direction in which the elongated member 12 advances and retreats is changed from the front direction along the depth direction 6c1 to the height direction 6c3.

[0076] FIG. 5(B) is a perspective view of the elongated member 12 when the pusher 14 is at the first extrusion position P1, and FIG. 5(E) is a perspective view of the elongated member 12 of FIG. 5(B) viewed from a different angle.

[0077] FIG. 5(C) is a perspective view of the elongated member 12 when the pusher 14 is at the second extrusion position P2, and FIG. 5(F) is a perspective view of the elongated member 12 of FIG. 5(C) seen from a different angle.

[0078] The mechanism for advancing and retracting the elongated member 12 is not limited to the actuator 22. For example, the elongated member 12 may be advanced and retracted by the pair of rollers 18 by connecting an output shaft of a drive source (not shown) such as a servo motor or a stepping motor to at least one of the pair of rollers 18.

[0079] In this case, the moving block 20 is not connected to the screw shaft 26, but is slidably fixed to the pair of guide rails 24. Therefore, the moving block 20 follows the movement of the elongated member 12 moved by the rollers 18.

[0080] Fig. 6(A) is a perspective view of cassette 6, and Fig. 6(B) is a perspective view of cassette 6 containing a plurality of strip substrates 11. Strip substrates 11 in cassette 6 are sequentially pushed out by moving elongated member 12 with actuator 22 to move pusher 14 in the depth direction 6c1.

[0081] Figure 6(C) is a perspective view showing one strip substrate 11 being unloaded from the cassette 6, and Figure 6(D) is a perspective view of the cassette 6 after one strip substrate 11 has been unloaded from the cassette 6.

[0082] Returning now to Fig. 1, the carry-out device 8 has a pull unit 30 in addition to the pusher unit 10. The pull unit 30 has a pair of flat plates 30a that sandwich the strip substrate 11 in the height direction 6c3.

[0083] The pair of flat plates 30a are moved closer to and farther apart by an actuator (not shown). The pair of flat plates 30a are fixed to the tip ends of beam-shaped arm portions 30b. The base ends of the arm portions 30b are connected to a ball screw type movement mechanism (not shown), and the arm portions 30b are movable along the Y-axis direction (depth direction 6c1).

[0084] When one strip substrate 11 is removed from the cassette 6, first, the height position of the upper surface of the cassette mounting table 4 is adjusted so that the position of the back surface 11b of the strip substrate 11 in the Z-axis direction is at the same height as the upper surfaces of the pair of support tables 32.

[0085] Then, the second linear region 12b of the elongated member 12 is advanced into the cassette 6 along the depth direction 6c1, thereby pushing out one strip substrate 11 with the pusher 14. The strip substrate 11 pushed out by the pusher 14 is pulled out onto the upper surfaces of the pair of support bases 32 while being sandwiched between the pull units 30.

[0086] As described above, the elongated member 12 of this embodiment is bent so as to have a first linear region 12a extending along the height direction 6c3 of the cassette 6 and a second linear region 12b extending along the depth direction 6c1 of the cassette 6.

[0087] This ensures the rigidity of the elongated member 12 in each of the first linear region 12a and the second linear region 12b, while also realizing space savings for the discharge device 8 in the depth direction 6c1 compared to when a rod-shaped arm with a pusher 14 fixed to its tip is arranged along the depth direction 6c1 of the cassette 6.

[0088] Each of the pair of support bases 32 has a substantially transparent rectangular support surface 32a that is capable of transmitting visible light. Each support surface 32a is disposed substantially parallel to the XY plane. A light source (not shown), such as an LED (Light Emitting Diode) that emits visible light, a light diffusion plate (not shown), and the like are provided below each support surface 32a. Light emitted from the light source illuminates substantially the entire support surface 32a.

[0089] An imaging unit 34 for capturing an image of the strip substrate 11 using visible light is provided above the pair of support bases 32. The imaging unit 34 has a lens, a solid-state imaging element, etc., and captures an entire image of the front surface 11a side of the strip substrate 11.

[0090] The image of the strip substrate 11 obtained by the imaging unit 34 is used to adjust the orientation of the strip substrate 11 in the XY plane. The orientation of the strip substrate 11 in the XY plane is adjusted, for example, by an alignment unit (not shown) clamping the strip substrate 11 in the width direction 6c2, but may also be adjusted manually by an operator.

[0091] A transport arm 36 is provided above the pair of support stages 32 in a manner that does not interfere with the imaging unit 34. The transport arm 36 has an arm portion 36a that is movable along the Y-axis direction. A suction pad 36b having approximately the same shape and size as the strip substrate 11 is provided at the tip of the arm portion 36a.

[0092] The suction pad 36b is movable along the Z-axis direction. The lower surface of the suction pad 36b serves as a suction surface to which negative pressure is transmitted from a vacuum device (not shown). The strip substrate 11, which is suction-held by the suction pad 36b, is transported from the pair of support bases 32 to a chuck table (holding table) 38.

[0093] The chuck table 38 is a rectangular plate-like member, and has a rectangular holding surface 38a that can support the entire back surface 11b of the strip substrate 11. A plurality of relief grooves (not shown), each having a predetermined depth, are provided in a grid pattern on the holding surface 38a.

[0094] By providing the relief grooves, it is possible to prevent the cutting blade 56, which will be described later, from cutting the holding surface 38a when the cutting blade 56 cuts into the strip substrate 11. One or more suction holes (not shown) are provided in each rectangular area defined by the relief grooves. Negative pressure is transmitted to each suction hole from a vacuum device (not shown).

[0095] The strip substrate 11 carried out by the carry-out device 8 onto the pair of support tables 32 is suction-held by the holding surface 38a of the chuck table 38. The chuck table 38 is configured to be rotatable around a rotation axis 38b that is disposed substantially parallel to the Z-axis direction.

[0096] The chuck table 38 is configured to be movable along the X-axis direction by a movement mechanism (not shown) including a ball screw. After receiving the strip substrate 11 from the transfer arm 36 with its longitudinal direction aligned with the Y-axis direction, the chuck table 38 rotates, for example, approximately 90 degrees.

[0097] The cutting unit 40 then moves downward below the pair of cutting units 40. The pair of cutting units 40 are arranged in mirror symmetry with respect to the XZ plane. Each cutting unit 40 has a spindle housing 52. A Y-axis direction movement mechanism (indexing feed mechanism) and a Z-axis direction movement mechanism (cutting feed mechanism) are connected to the spindle housing 52 (neither of which are shown).

[0098] A cutting fluid supply nozzle (not shown) for supplying cutting fluid such as pure water to the machining point is fixed to the spindle housing 52. A cylindrical spindle 54 is partially housed in the spindle housing 52 so that it can rotate via an air bearing. The tip of the spindle 54 protrudes from the spindle housing 52.

[0099] A disk-shaped receiving flange 54a is fixed to the tip of the spindle 54. The receiving flange 54a has a boss in the radial center. A through-hole formed in the radial center of the base of the hub-shaped cutting blade 56 is inserted into the boss of the receiving flange 54a.

[0100] With the through-hole of the cutting blade 56 inserted into the boss portion of the receiving flange portion 54a, the female thread formed on the inner peripheral side surface of the annular fixing nut 54b is fastened to the male thread formed on the tip of the boss portion. This attaches the cutting blade 56 to the tip of the spindle 54.

[0101] A controller (not shown) controls the operation of the cutting device 2. The controller is configured by a computer including, for example, a processor (processing device) represented by a CPU (Central Processing Unit) and a memory (storage device).

[0102] The memory includes a main storage device such as a dynamic random access memory (DRAM) and an auxiliary storage device such as a flash memory. The auxiliary storage device stores software including a predetermined program. The functions of the controller are realized by operating a processor or the like in accordance with this software.

[0103] When cutting the strip substrate 11, the cutting blade 56 is rotated at high speed, and the Z-axis direction movement mechanism positions the lower end of the cutting blade 56 between the back surface 11b of the strip substrate 11 and the bottom of the clearance groove in the Z-axis direction.

[0104] In addition, the Y-axis movement mechanism adjusts the position of the cutting blade 56 in the Y-axis direction, and positions it on the XY plane on an extension of the planned division line 15. Then, while cutting fluid is supplied from a cutting fluid supply nozzle (not shown) to the contact point between the cutting blade 56 and the strip substrate 11, the chuck table 38 is moved along the X-axis for processing.

[0105] After cutting the strip substrate 11 along the first group of division lines 15 along the long sides of the strip substrate 11, the chuck table 38 is rotated approximately 90 degrees. Then, the strip substrate 11 is cut along the second group of division lines 15 along the short sides of the strip substrate 11.

[0106] This separates the strip substrate 11 into a plurality of package devices. There is no particular limitation as to which of the first and second groups of planned division lines 15 is cut first. Furthermore, the cutting blade 56 is not limited to a hub type, and may be a hubless type (washer type).

[0107] (Second embodiment) Next, with reference to Figures 7(A) to 8, a description will be given of a long member 62 (see Figures 7(D) and 7(E)) of a second embodiment. The long member (first chain) 62 is not a convex rule type, but is a chain-like member in which a plurality of units 64 are connected to form a row. However, the action and function of the long member 62 are substantially the same as those of the long member 12 in the first embodiment.

[0108] Fig. 7(A) is a side view of a unit 64 of a chain-like elongated member 62 according to the second embodiment, Fig. 7(B) is a top view of the unit 64, and Fig. 7(C) is a bottom view of the unit 64. For ease of explanation, Figs. 7(A) to 7(C) also show the longitudinal direction 60c1, width direction 60c2, and thickness direction 60c3 of the unit 64.

[0109] The unit 64 has a rectangular plate-shaped main body 66. The plate 66 has a long, narrow front protrusion 66a at its tip in the longitudinal direction 60c1. A through-hole 66b is formed at the tip of the front protrusion 66a along the width direction 60c2.

[0110] A cylindrical pin 66f of the immediately preceding unit 64 is inserted into the through hole 66b. The pin 66f functions as a rotation axis of the front protrusion 66a.

[0111] Pressing portions 66c that are thinner than the plate portion 66 in the thickness direction 60c3 are provided nearer the base end of the front protrusion 66a than the through hole 66b in the depth direction 60c1 and on both sides of the front protrusion 66a in the width direction 60c2.

[0112] The pressing portion 66c has a thickness that is approximately half the thickness of the plate portion 66. The top surface of the pressing portion 66c is flush with the top surface of the front protrusion 66a, but the bottom surface of the pressing portion 66c is located at a position that is approximately half the thickness of the plate portion 66. Each pressing portion 66c corresponds to a recess in the plate portion 66 provided on both sides near the base end of the front protrusion 66a.

[0113] When two or more basic units 64 are arranged in a straight line, the bottom surface of the pressing portion 66c comes into contact with the receiving portion 66g of the immediately preceding basic unit 64. This contact restricts the rotation of one basic unit 64 around the pin 66f of the other basic unit 64 immediately preceding the one basic unit 64 among the multiple basic units 64 connected in a chain.

[0114] The plate portion 66 has a pair of elongated rear projections 66d at the rear end in the longitudinal direction 60c1, the pair of rear projections 66d being spaced apart in the width direction 60c2 by a distance substantially equal to the width of the front projections 66a.

[0115] A through-hole 66e is provided in the width direction 60c2 near the base end of each rear protrusion 66d. A pin 66f is inserted into this through-hole 66e. A through-hole 66b of another unit 64 located immediately behind one unit 64 among the multiple units 64 connected in a chain is inserted into this pin 66f. In other words, the multiple plate portions 66 are connected in a chain by the pins 66f.

[0116] Each rear projection 66d has a receiving portion 66g, which is thinner than the plate portion 66, on the rear end side of the through hole 66e. The receiving portion 66g has a thickness that is approximately half the thickness of the plate portion 66. The bottom surface of the receiving portion 66g is flush with the bottom surface of the plate portion 66, but the top surface of the receiving portion 66g is located at a position approximately half the thickness of the plate portion 66.

[0117] That is, the rear projection 66d has a step between the receiving portion 66g and a thick portion located closer to the through-hole 66e than the receiving portion 66g. A chamfered portion 66h is formed at the convex corner of this step. The chamfered portion 66h facilitates rotation of another unit 64 located immediately behind one unit 64 around the pin 66f among the multiple unit units 64 connected in a chain.

[0118] The chamfered portion 66h is formed over the entire width direction 60c2 of each rear protrusion 66d. Note that a chamfered portion 66i is also formed over the entire width direction 60c2 of the rear protrusion 66d at a corner near the bottom surface of the rear end of the rear protrusion 66d.

[0119] 7(D) is a side view of the elongated member 62 in which a plurality of units 64 are arranged linearly along the longitudinal direction 60c1. As shown in FIG. 7(D), the elongated member 62 has a plurality of plate portions 66 and a plurality of pins 66f arranged along the longitudinal direction of the elongated member 62.

[0120] A rectangular plate-shaped tip member 68 is fixed to the front protrusion 66a of the unit 64 located at the very tip, and further, the above-mentioned pusher 14 is fixed to the tip of the tip member 68.

[0121] Fig. 7(E) is a side view of the elongated member 62 when it is bent. As shown in Fig. 7(E), among the multiple basic units 64 connected in a chain, the basic unit 64 located immediately behind one basic unit 64 cannot rotate downward (counterclockwise in Fig. 7(E)) around the pin 66f as the rotation axis due to the functions of the pressing portion 66c and the receiving portion 66g, but can rotate upward (clockwise in Fig. 7(E)).

[0122] Therefore, as shown in Figure 7(E), the elongated member 62 can be bent upward along the height direction 6c3 (one direction along the intersecting direction) with the tip member 68 as the reference, but cannot be bent downward along the height direction 6c3 (the other direction along the intersecting direction and opposite to the one direction).

[0123] 8 is a side view showing how the elongated member 62 advances and retreats through the guide section 70. The guide section 70 in the second embodiment is provided with a pair of rollers 72, similar to the above-described guide section 16. Each roller 72 has a cylindrical shape with approximately the same diameter at the center and end in the longitudinal direction.

[0124] The guide portion 70 has a rear opening 70a and a front opening 70b arranged along the depth direction 6c1, unlike the above-described guide portion 16. The first linear region 62a of the elongated member 62 is arranged outside the guide portion 70.

[0125] In addition, in a long member 62 in which multiple unit units 64 are connected in a chain-like manner, a linear region means a region in which two or more unit units 64 are connected in a chain-like manner and arranged straight in the depth direction 6c1 or height direction 6c3.

[0126] 8, a portion of the second linear region 62b of the elongated member 62 is disposed within the guide portion 70, and the bent region 62c of the elongated member 62 is disposed outside the guide portion 70. The entire first linear region 62a of the elongated member 62 is disposed outside the guide portion 70.

[0127] One side of the first linear region 62a corresponds to the bottom surface of the second linear region 62b and is in contact with one side 74a of a support pillar 74 having a prismatic (e.g., quadrangular) shape arranged approximately parallel to the height direction 6c3.

[0128] The first linear region 62a has a relatively high rigidity in the height direction 6c3 due to its structure, but by being in contact with the one side surface 74a, the rigidity of the first linear region 62a is also ensured in the depth direction 6c1.

[0129] A recess 74b is provided on one side surface 74a of the support column 74 to allow rotational movement of the rear protrusion 66d around the pin 66f in the unit 64 located in the bending region 62c.

[0130] In the second embodiment, the above-mentioned moving block 20 is also provided in contact with the upper end of the first linear region 62a (not shown in Figure 8), and the moving block 20 is fixed by a fixing member such as a bolt (not shown).

[0131] The moving block 20 is moved by a ball screw type actuator (drive unit) (not shown). When the actuator moves the moving block 20, the elongated member 62 advances and retreats via the guide unit .

[0132] However, instead of this, an output shaft of a drive source (not shown) may be coupled to at least one of the pair of rollers 72. In this case, the moving block 20 is not connected to the screw shaft 26, but is slidably fixed to the pair of guide rails 24.

[0133] In this embodiment, by moving the first linear region 62a downward, the elongated member 62 is inserted between the pair of rollers 72 through the rear opening 70a and emerges from the front opening 70b as the second linear region 62b. In this way, the direction in which the elongated member 62 advances and retreats is changed from downward along the height direction 6c3 to the depth direction 6c1.

[0134] Furthermore, by moving the first linear region 62a upward, the second linear region 62b is inserted between the pair of rollers 72 through the front opening 70b and emerges from the rear opening 70a. The second linear region 62b emerging from the rear opening 70a sequentially becomes the bent region 62c and the first linear region 62a. In this manner, the direction in which the elongated member 62 advances and retreats is changed from the front direction along the depth direction 6c1 to the height direction 6c3.

[0135] The first linear region 62a has high rigidity against external forces along the height direction 6c3 of the first linear region 62a (i.e., the longitudinal direction of the first linear region 62a). More specifically, the first linear region 62a has higher rigidity in the height direction 6c3 than in the depth direction 6c1 (i.e., the transverse direction).

[0136] Therefore, when the first linear region 62a is pushed or pulled along the height direction 6c3, the first linear region 62a moves forward or backward along the height direction 6c3 without bending except in the vicinity of the guide portion .

[0137] However, the first linear region 62a has high flexibility in the depth direction 6c1 (i.e., the cross direction) against an external force along the depth direction 6c1. More specifically, the first linear region 62a has high flexibility in the depth direction 6c1 compared to the height direction 6c3 (i.e., the longitudinal direction).

[0138] Therefore, by applying an external force along the depth direction 6c1, the first linear region 62a can be easily bent at the recess 74b of the support column 74. The first linear region 62a is bent via the guide portion 70, and the bent first linear region 62a becomes the second linear region 62b.

[0139] The second linear region 62b has high rigidity against external forces acting along the depth direction 6c1 (i.e., the longitudinal direction) of the second linear region 62b. More specifically, the second linear region 62b has higher rigidity in the depth direction 6c1 than in the height direction 6c3 (i.e., the transverse direction).

[0140] Therefore, when the second linear region 62b is pushed or pulled along the depth direction 6c1, the second linear region 62b moves forward or backward along the depth direction 6c1 without bending in the region further than the guide portion 70 in the depth direction 6c1.

[0141] However, the second linear region 62b has high flexibility in the height direction 6c3 (i.e., the transverse direction) against an external force along the height direction 6c3. More specifically, the second linear region 62b has high flexibility in the height direction 6c3 compared to the depth direction 6c1 (i.e., the longitudinal direction).

[0142] Therefore, by applying an external force upward in the height direction 6c3, the second linear region 62b can be easily bent upward along the height direction 6c3. The second linear region 62b is bent via the guide portion 70, and the bent second linear region 62b becomes the first linear region 62a.

[0143] Therefore, when the first linear region 62a is pushed or pulled along the height direction 6c3, the second linear region 62b moves forward or backward along the depth direction 6c1. That is, the elongated member 62 can move forward or backward along the depth direction 6c1 of the cassette 6.

[0144] In the second embodiment, while ensuring the rigidity of the elongated member 62, it is possible to achieve space saving for the unloading device 8 in the depth direction 6c1 of the cassette 6 compared to when a rod-shaped arm is arranged along the depth direction 6c1 of the cassette 6.

[0145] (Modification) A modification of the second embodiment will be described with reference to Figures 9(A) and 9(B). Figure 9(A) is a side view of the elongated member 62 when the wire 76 attached to the distal end member 68 is not tensioned.

[0146] 9(B) is a diagram showing how the rigidity of the second linear region 62b is reinforced by tensioning a wire 76. One end of the wire 76 is attached to the tip member 68, while the other end of the wire 76 is fixed to a winding machine (not shown).

[0147] By applying tension (i.e., a tension) to the wire 76 to the extent that it allows movement of the elongated member 62 in the depth direction 6c1 and suppresses the bouncing up of the tip member 68 shown in Figure 9(A), the rigidity of the second linear region 62b in the depth direction 6c1 can be increased compared to when the wire 76 is not used.

[0148] (Third embodiment) Next, a long member 82 (see Fig. 10(D) and Fig. 10(E)) of a third embodiment will be described with reference to Fig. 10(A) to Fig. 11. The long member (second chain) 82 is also a chain-like member in which a plurality of unit units 84 are connected together.

[0149] However, unlike the elongated member 62 in the second embodiment, the second linear region 82b (see Figure 11) of the elongated member 82 cannot bend upward along the height direction 6c3, but can only bend downward, based on the tip member 88 described later (see Figures 10(E) and 11).

[0150] Fig. 10(A) is a side view of a unit 84 of a chain-like elongated member 82 according to the third embodiment, Fig. 10(B) is a top view of the unit 84, and Fig. 10(C) is a bottom view of the unit 84. For ease of explanation, Figs. 10(A) to 10(C) also show the longitudinal direction 60c1, width direction 60c2, and thickness direction 60c3 of the unit 84.

[0151] The unit 84 has a rectangular plate-shaped main body 86. The plate 86 has a long, narrow front protrusion 86a at its tip in the longitudinal direction 60c1. A through-hole 86b is formed at the tip of the front protrusion 86a along the width direction 60c2.

[0152] A cylindrical pin 86f of the immediately preceding unit 84 is inserted into the through hole 86b. The pin 86f functions as a rotation axis of the front protrusion 86a.

[0153] Receiving portions 86c thinner than the plate portion 86 in the thickness direction 60c3 are provided nearer the base end of the front protrusion 86a than the through hole 86b in the longitudinal direction 60c1 and on both sides of the front protrusion 86a in the width direction 60c2.

[0154] The receiving portion 86c has a thickness that is approximately half the thickness of the plate portion 86. The bottom surface of the receiving portion 86c is flush with the bottom surface of the plate portion 86, but the top surface of the receiving portion 86c is located at a position that is approximately half the thickness of the plate portion 86. In other words, the front protrusion 86a has steps on both sides in the width direction 60c2.

[0155] When two or more basic units 84 are arranged in a straight line, the top surface of the receiving portion 86c comes into contact with the pressing portion 86g of the immediately preceding basic unit 84. This restricts the rotation of one basic unit 84 around the pin 86f of another basic unit 84 immediately preceding the one basic unit 84 among the multiple basic units 84 connected in a chain.

[0156] The plate portion 86 has a pair of elongated rear projections 86d at the rear end in the longitudinal direction 60c1, the pair of rear projections 86d being spaced apart in the width direction 60c2 by a distance substantially equal to the width of the front projections 86a.

[0157] A through-hole 86e is provided in the width direction 60c2 near the base end of each rear protrusion 86d. A pin 86f is inserted into this through-hole 86e. In the plurality of units 84 connected in a chain, a through-hole 86b of another unit 84 located immediately behind one unit 84 is inserted into this pin 86f. In other words, each pin 86f connects the plurality of plate portions 86 in a chain.

[0158] Each rear projection 86d has a pressing portion 86g, which is thinner than the plate portion 86, on the rear end side of the through-hole 86e. The pressing portion 86g has a thickness that is approximately half the thickness of the plate portion 86. The top surface of the pressing portion 86g is flush with the top surface of the plate portion 86, but the bottom surface of the pressing portion 86g is located at a position approximately half the thickness of the plate portion 86.

[0159] That is, the rear projection 86d has a step between the pressing portion 86g and a thick portion located closer to the through-hole 86e than the pressing portion 86g. A chamfered portion 86h is formed at the convex corner of this step. The chamfered portion 86h facilitates rotation of another unit 84 located immediately behind one unit 84 around the pin 86f among the multiple unit units 84 connected in a chain.

[0160] The chamfered portion 86h is formed over the entire width direction 60c2 of each rear protrusion 86d. Further, a chamfered portion 86i is formed over the entire width direction 60c2 of the rear protrusion 86d near the top surface of the rear end portion of the rear protrusion 86d.

[0161] 10(D) is a side view of the elongated member 82 in which a plurality of units 84 are arranged linearly along the longitudinal direction 60c1. As shown in FIG. 10(D), the elongated member 82 has a plurality of plate portions 86 and a plurality of pins 86f arranged along the longitudinal direction of the elongated member 82.

[0162] The rear end of a rectangular plate-shaped tip member 88 is fixed to the front protrusion 86a of the unit 84 located at the very tip, and the above-mentioned pusher 14 is further fixed to the tip of the tip member 88.

[0163] Figure 10(E) is a side view of the elongated member 82 when it is bent. As shown in Figure 10(E), among a plurality of basic units 84 connected in a chain, the basic unit 84 located immediately behind one basic unit 84 cannot rotate upward (clockwise in Figure 10(E)) around the pin 86f as a rotation axis due to the functions of the receiving portion 86c and the pressing portion 86g, but can rotate downward (counterclockwise in Figure 10(E)).

[0164] Therefore, the elongated member 82 can be bent downward along the height direction 6c3 (one direction along the intersecting direction) using the tip member 88 as a reference, as shown in Figure 10(E), but cannot be bent upward along the height direction 6c3 (the other direction along the intersecting direction and opposite to the one direction).

[0165] 11 is a side view showing the elongated member 82 moving forward and backward through the guide portion 70. The guide portion 70 is the same as that in the second embodiment. One side surface of the first linear region 82a corresponding to the top surface of the second linear region 82b contacts one side surface 74a of the support pillar 74 described above.

[0166] This ensures the rigidity of the first linear region 82a not only in the height direction 6c3 but also in the depth direction 6c1. However, one side surface 74a of the support pillar 74 is provided with a recess 74c to allow rotational movement of the rear protrusion 86d around the pin 86f in the bent region 82c.

[0167] In the third embodiment, the above-mentioned moving block 20 is provided in contact with the lower end of the first linear region 82a, and the moving block 20 is fixed by a fixing member (not shown) such as a bolt.

[0168] This moving block 20 is also moved by a ball screw type actuator (drive unit) (not shown). When the actuator moves the moving block 20, the elongated member 82 advances and retreats via the guide unit 70. Of course, instead of an actuator, an output shaft of a drive source (not shown) may be coupled to at least one of the pair of rollers 72.

[0169] In this embodiment, by moving the first linear region 82a upward, the elongated member 82 is inserted between the pair of rollers 72 through the rear opening 70a and emerges from the front opening 70b as the second linear region 82b. In this way, the direction in which the elongated member 82 advances and retreats is changed from the height direction 6c3 to the depth direction 6c1.

[0170] Furthermore, for example, by moving the first linear region 82a downward along the height direction 6c3, the second linear region 82b is inserted between the pair of rollers 72 through the front opening 70b and comes out from the rear opening 70a.

[0171] The second linear region 82b coming out from the rear opening 70a sequentially becomes a bent region 82c and the first linear region 82a. In this way, the direction in which the elongated member 82 advances and retreats is changed from the front along the depth direction 6c1 to the downward direction along the height direction 6c3.

[0172] The first linear region 82a has high rigidity against external forces along the height direction 6c3 of the first linear region 82a (i.e., the longitudinal direction of the first linear region 82a). More specifically, the first linear region 82a has higher rigidity in the height direction 6c3 than in the depth direction 6c1 (i.e., the transverse direction).

[0173] Therefore, when the first linear region 82a is pushed or pulled upward along the height direction 6c3, the first linear region 82a moves forward or backward along the height direction 6c3 without bending except near the guide portion .

[0174] However, the first linear region 82a has high flexibility in the depth direction 6c1 (i.e., the cross direction) against an external force along the depth direction 6c1. More specifically, the first linear region 82a has high flexibility in the depth direction 6c1 compared to the height direction 6c3 (i.e., the longitudinal direction).

[0175] Therefore, by applying an external force along the depth direction 6c1, the first linear region 82a can be easily bent at the recess 74c of the support column 74. The first linear region 82a is bent via the guide portion 70, and the bent first linear region 82a becomes the second linear region 82b.

[0176] The second linear region 82b has high rigidity against external forces acting along the depth direction 6c1 (i.e., the longitudinal direction) of the second linear region 82b. More specifically, the second linear region 82b has higher rigidity in the depth direction 6c1 than in the height direction 6c3 (i.e., the transverse direction).

[0177] Therefore, when the second linear region 82b is pushed or pulled along the depth direction 6c1, the second linear region 82b moves forward or backward along the depth direction 6c1 without bending in the region further than the guide portion 70 in the depth direction 6c1.

[0178] However, the second linear region 82b has high flexibility in the height direction 6c3 (i.e., the cross direction) against a downward external force along the height direction 6c3. More specifically, the second linear region 82b has high flexibility downward along the height direction 6c3 compared to the depth direction 6c1 (i.e., the longitudinal direction).

[0179] Therefore, the second linear region 82b can be easily bent downward by applying a downward external force along the height direction 6c3. The second linear region 82b is bent via the guide portion 70, and the bent second linear region 82b becomes the first linear region 82a.

[0180] Therefore, when the first linear region 82a is pushed or pulled along the height direction 6c3, the second linear region 82b moves forward or backward along the depth direction 6c1. That is, the elongated member 62 can move forward or backward along the depth direction 6c1 of the cassette 6.

[0181] In the third embodiment, while ensuring the rigidity of the elongated member 82, it is possible to achieve space saving for the unloading device 8 in the depth direction 6c1 of the cassette 6 compared to when the rod-shaped arm is arranged only along the depth direction 6c1 of the cassette 6.

[0182] (Modification) A modification of the third embodiment will be described with reference to Figures 12(A) and 12(B). Figure 12(A) is a side view of the elongated member 62 when the wire 90 attached to the tip member 88 is not tensioned, and Figure 12(B) is a diagram showing how the rigidity of the second linear region 82b is reinforced by tensioning the wire 90.

[0183] One end of the wire 90 is attached to the tip member 88, while the other end of the wire 90 is fixed to a winding machine (not shown). By applying tension to the wire 90 to the extent that movement of the elongated member 82 in the depth direction 6c1 is permitted and that the tip member 88 shown in Fig. 12(A) is prevented from sagging, the rigidity of the second linear region 82b in the depth direction 6c1 can be increased compared to when the wire 90 is not used.

[0184] (Fourth embodiment) Next, a long member 92 according to a fourth embodiment will be described with reference to Figures 13 and 14. Figure 13 is a top view of a chain-like long member 92 according to the fourth embodiment.

[0185] The elongated member 92 includes the elongated member (first chain) 62 of the second embodiment and the elongated member (second chain) 82 of the third embodiment. The elongated members 62, 82 do not overlap with each other in a plan view and are arranged slightly spaced apart from each other along the width direction 6c2.

[0186] In this embodiment, the length in the width direction 6c2 of the long member 62, which can utilize its own weight when extruding the strip substrate 11, is made relatively large, while the length in the width direction 6c2 of the long member 82, whose own weight becomes a load on the extruding operation, is made relatively small. This makes it possible to reduce the difference in external force required for each operation of the long members 62, 82 compared to when the lengths in the width direction 6c2 of the long members 62, 82 are the same.

[0187] A part of a tip member 98 corresponding to the tip member 68 described above is fixed to the tip end of the elongated member 62, and another part of a tip member 98 corresponding to the tip member 88 described above is fixed to the tip end of the elongated member 82.

[0188] That is, the tip member 98 includes the tip member 68 and the tip member 88 that are in contact with each other in the width direction 6c2. The tip member 98 fixes the tip portions of the elongated member 62 and the elongated member 82 to each other.

[0189] A first tip region 92a including a unit 64 located at the tip of the elongated member 62 and a second tip region 92b including a unit 84 located at the tip of the elongated member 82 are arranged in parallel along the depth direction 6c1, and the elongated members 62, 82 can move forward and backward together along the depth direction 6c1.

[0190] 14 is a side view showing how the elongated member 92 advances and retreats through the guide portion 70. The support pillar 74 has a recess 74b (see FIG. 8) and a recess 74c (see FIG. 11), which enable the formation of the bending region 62c of the elongated member 62 and the bending region 82c of the elongated member 82.

[0191] In the second linear regions 62b, 82b of this embodiment, the property of the second linear region 62b of the elongated member 62 to bend relatively easily in response to an external force directed upward from the tip member 98 (i.e., in one direction along the height direction 6c3) and the property of the second linear region 82b of the elongated member 82 to bend relatively easily in response to an external force directed downward from the tip member 98 (i.e., in the opposite direction) are roughly offset.

[0192] This makes it possible to further increase the rigidity of the second linear regions 62b, 82b compared to the case of the elongated member 62 alone (see FIG. 8) and the case of the elongated member 82 alone (see FIG. 11).

[0193] In the examples shown in Figures 13 and 14, the elongated members 62, 82 do not overlap each other in a planar view and are arranged slightly apart along the width direction 6c2, but the elongated members 62, 82 may also be arranged overlapping in the height direction 6c3.

[0194] In the fourth embodiment, a pair of elongated members 62 and 82 is used, but the present invention is not limited to this, and the elongated members 62 and 82 may be arranged alternately along the width direction 6c2.

[0195] For example, one elongated member 82 is arranged so as to be sandwiched between two elongated members 62 along the width direction 6c2. One elongated member 62 may also be arranged so as to be sandwiched between two elongated members 82 along the width direction 6c2.

[0196] Further, for example, a total of four elongated members may be arranged along the width direction 6c2 as elongated members 62, 82, 62, 82, and along the width direction 6c2 as elongated members 82, 62, 82, 62. A total of five or more elongated members may be appropriately arranged along the width direction 6c2.

[0197] In addition, the structures, methods, etc. according to the above-described embodiments can be modified as appropriate without departing from the scope of the present invention. For example, instead of the elongated member 92 of the fourth embodiment, an interlocking chain (not shown) in which a pair of chains interlock like a zipper can be used as the elongated member.

[0198] When interlocking chains (not shown) are used, one of the pair of chains may be moved by an actuator, or alternatively, the other of the pair of chains may be moved by an actuator, or each of the pair of chains may be moved synchronously by an actuator.

[0199] The drive unit for moving the elongated members 12, 62, 82, 92 is not limited to the ball screw actuator 22, and an air cylinder may be used. Also, instead of moving the moving block 20, the elongated member 12 may be moved by a pair of rollers 18, 72, or the elongated members 62, 82, 92 may be moved by a pair of rollers 72. [Explanation of symbols]

[0200] 2: Cutting device, 4: Cassette mounting table 6: cassette, 6a: rear end, 6b: front end 6c1: depth direction, 6c2: width direction, 6c3: height direction, 6d: storage shelf 8: Unloading device 10: Pusher unit 11: Strip substrate (workpiece) 11a: front surface, 11b: back surface, 13a: device region 12: Long members 12a: first linear region, 12b: second linear region 12b X1 : Both sides, 12b X2 :Central part 12c: bending area 14: pusher, 14a, 14b: claw portions, 14c: recessed area 15: Dividing line, 17: Device, 19: Molding resin layer 16: guide portion, 16a: upper opening, 16b: side opening, 18: roller 20: Moving block, 22: Actuator, 24: Guide rail, 26: Screw shaft 28: Power source 30: pull unit, 30a: flat plate, 30b: arm portion 32: Support stand, 32a: Support surface 34: Imaging unit 36: transport arm, 36a: arm portion, 36b: suction pad 38: chuck table (holding table), 38a: holding surface, 38b: rotation axis 40: Cutting unit 52: Spindle housing 54: Spindle, 54a: Receiving flange, 54b: Fixing nut 56: Cutting blade 60c1: longitudinal direction, 60c2: width direction, 60c3: thickness direction 62: Long member (first chain) 62a: First linear region, 62b: Second linear region, 62c: Bent region 64: Unit, 66: Plate 66a: front protrusion, 66b: through hole, 66c: pressing portion 66d: rear projection, 66e: through hole, 66f: pin 66g: Receiving part, 66h, 66i: Chamfered part 68: Tip member 70: guide portion, 70a: rear opening, 70b: front opening, 72: roller 74: Support pillar, 74a: One side surface, 74b, 74c: Recesses 76: Wire 82: Long member (second chain) 82a: First linear region, 82b: Second linear region, 82c: Bent region 84: Unit, 86: Plate 86a: front protrusion, 86b: through hole, 86c: receiving portion 86d: rear projection, 86e: through hole, 86f: pin 86g: Presser foot, 86h, 86i: Chamfered part 88: Tip member 90: Wire 92: Long member, 92a: First tip region, 92b: Second tip region 98: Tip member P0: retracted position, P1: first extrusion position, P2: second extrusion position

Claims

1. A carrying-out device that carries out a plate-shaped workpiece stored in a cassette from the cassette, a bendable elongated member, wherein when a portion of the elongated member is straightened, the elongated member has higher rigidity in the longitudinal direction of a straight region against an external force along the longitudinal direction than in a transverse direction intersecting the longitudinal direction, but has higher flexibility in the transverse direction of the straight region against an external force along the transverse direction than in the longitudinal direction, the elongated member being capable of advancing and retreating along the depth direction of the cassette and capable of pushing out the workpiece accommodated in the cassette; a guide portion that changes the direction in which the elongated member advances and retreats from a predetermined direction that intersects with the depth direction of the cassette to the depth direction; a drive unit that is in contact with the elongated member and moves the elongated member forward and backward via the guide unit; A carrying-out device comprising:

2. 2. The carrying-out device according to claim 1, wherein the elongated member is a thin plate that is convexly curved from both sides to a center when viewed in a cross section perpendicular to the longitudinal direction of the elongated member.

3. The elongated member is a plurality of plate portions arranged along the longitudinal direction; a plurality of pins for respectively connecting the plurality of plate portions in a chain shape; and The conveying device according to claim 1, characterized in that the plurality of plate portions connected in a chain shape can be bent in one direction along the intersecting direction, but cannot be bent in another direction along the intersecting direction and opposite to the one direction.

4. The elongated member is a first chain in which the plurality of plate portions connected in a chain shape are bendable in the one direction but not in the other direction; a second chain in which the plurality of plate portions connected in a chain shape can bend in the other direction but cannot bend in the one direction; and The tip ends of the first chain and the second chain are fixed to each other, The conveying device according to claim 3, wherein a first tip region including the tip of the first chain and a second tip region including the tip of the second chain are arranged in parallel along the depth direction.

5. the workpiece is a rectangular substrate, a plurality of planned division lines are arranged in a grid pattern on the surface of the rectangular substrate; a device is provided in each rectangular area partitioned by the plurality of planned division lines; 2. The ejection apparatus according to claim 1, wherein each device is covered with a molded resin layer.

6. The conveying device according to any one of claims 1 to 5, characterized in that the elongated member has a pusher that pinches the front and back surfaces of the workpiece and contacts the side of the workpiece at the leading position when moving along the depth direction.

7. The carry-out device according to claim 1 ; a holding table that suction-holds the workpiece carried out by the carrying-out device; a cutting unit having a spindle for cutting the workpiece held by the holding table with a cutting blade attached to a tip of the spindle; A cutting device comprising:

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