Extendable waterproof cover and processing device

Abstract

To improve the discharge performance of liquid and reduce the required cleaning frequency.SOLUTION: An extendable waterproof cover includes an extendable body and is extendable along an extension direction perpendicular to a width direction. The extendable body includes a plurality of valley portions arranged along the extension direction. A bottom of each valley portion has an inclined portion that inclines downward toward one of two end portions of the extendable body in the width direction. Preferably, the extendable body includes a crest portion that sandwiches a first valley portion, which is one of the plurality of valley portions, from a front and rear side in the extension direction. The crest portion has a first ridge line, a second ridge line that, together with the first ridge line, sandwiches the first valley portion, and a first connecting portion connecting the first ridge line and the second ridge line.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a stretchable waterproof cover that can stretch while covering and protecting an object to be protected, and a processing device equipped with this stretchable waterproof cover. [Background technology]

[0002] The device chip manufacturing process uses a disk-shaped wafer on which devices such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are formed in multiple regions defined by multiple intersecting division lines (streets). The wafer is ground from the backside to thin it and then divided along the division lines to obtain multiple device chips, each equipped with a device. The device chips are installed in various electronic devices, such as mobile phones and personal computers.

[0003] The division of a wafer is performed in a cutting device using, for example, a cutting blade equipped with an annular grinding stone portion. Furthermore, the thinning of a wafer is performed in a grinding device using, for example, a grinding wheel equipped with an annular array of grinding stones. In various processing devices (processing equipment) such as cutting devices and grinding devices, a holding table that holds the workpiece is movable horizontally. That is, the processing device is equipped with a moving mechanism (moving unit) that moves the holding table. Furthermore, the processing device processes the workpiece while supplying a liquid such as pure water to the workpiece held on the holding table.

[0004] The holding table and the moving mechanism are disposed in a water case provided in the processing device (processing equipment), and a drain pipe is connected to the water case. The structure around the holding table is covered with a bellows-shaped elastic waterproof cover, and the moving mechanism and other parts are covered and protected by this elastic waterproof cover (see Patent Document 1).

[0005] The extendable waterproof cover is connected to the holding table and extends and retracts as the holding table moves to prevent gaps from forming that could allow liquid to penetrate the moving mechanism or other objects being protected. Therefore, the objects are always protected by the extendable waterproof cover. Liquid supplied to the workpieces held on the holding table during processing falls onto the extendable waterproof cover, then drops from the cover into the water case and is drained through the drain pipe. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2000-271834 Summary of the Invention [Problem to be solved by the invention]

[0007] Conventionally, stretchable waterproof covers have a so-called bellows structure in which multiple rectangular downward inclined surfaces and multiple rectangular upward inclined surfaces are alternately arranged along the stretch direction. Liquid that falls onto this stretchable waterproof cover falls into a valley formed by two adjacent inclined surfaces. This valley is parallel to the width direction, which is perpendicular to the stretch direction. When water falls into the valley, it moves widthwise along the valley and falls to the outside of the stretchable waterproof cover in the width direction.

[0008] However, the bottom of the valley is horizontal and has a nearly constant height throughout. Therefore, liquids have difficulty flowing through the bottom of the valley, and tend to remain on the stretchable waterproof cover. In other words, conventional stretchable waterproof covers have poor drainage capabilities. In particular, liquids such as water supplied during the processing of workpieces tend to pick up processing debris. When the liquid containing the processing debris remains on the stretchable waterproof cover and dries, the processing debris adheres to the top surface of the stretchable waterproof cover.

[0009] When foreign matter such as processing debris adheres to the telescopic waterproof cover, it impedes the smooth extension and retraction of the telescopic waterproof cover. Furthermore, when the telescopic waterproof cover contracts, the processing debris can become pinched between the two inclined surfaces, which push the debris toward each other and damage the inclined surfaces. This means that the processing equipment (treatment device) must be frequently stopped to remove the processing debris and clean the telescopic waterproof cover. This cleaning work is not only time-consuming, but also reduces the operating efficiency of the processing equipment.

[0010] The present invention has been made in consideration of such problems, and aims to provide a stretchable waterproof cover that has high liquid drainage properties and requires less frequent cleaning, and a processing device equipped with this stretchable waterproof cover. [Means for solving the problem]

[0011] According to one aspect of the present invention, there is provided a stretchable waterproof cover that has a stretchable body and is stretchable along a stretch direction perpendicular to the width direction, wherein the stretchable body has a plurality of valleys aligned along the stretch direction, and the bottom of each valley has an inclined portion that slopes downward toward one of the two ends of the stretchable body in the width direction.

[0012] Preferably, the stretchable body includes peaks sandwiching a first valley, one of the plurality of valleys, from the front and rear in the stretching direction, the peaks having a first ridgeline, a second ridgeline sandwiching the first valley together with the first ridgeline, and a first connecting portion connecting the first ridgeline and the second ridgeline. More preferably, the peaks sandwich a second valley, one of the plurality of valleys and adjacent to the first valley, from the front and rear in the stretching direction, the peaks further having a third ridgeline sandwiching the second valley together with the second ridgeline, and a second connecting portion connecting the second ridgeline and the third ridgeline, and the bottom of the first valley has a first inclined portion sloping downward toward one of the two ends of the stretchable body, and the bottom of the second valley has a second inclined portion sloping downward toward the other of the two ends of the stretchable body. Alternatively, preferably, the peak portion has an outer ridge extending from the first connection portion toward either of the two ends of the stretchable body in the width direction, and the first valley portion and the outer ridge are aligned along the width direction via the first connection portion.

[0013] Preferably, the elastic body is provided with ridges sandwiching each of the plurality of valleys from the front and rear in the stretching direction, the ridges having zigzag ridges connecting the two ends of the elastic body in the stretching direction, with the odd-numbered valleys lined up in one region of the elastic body separated by the ridge line and the even-numbered valleys lined up in the other region of the elastic body separated by the ridge line.

[0014] Preferably, the bottom of each of the valleys further has a horizontal portion between either of the two ends of the stretchable body in the width direction and the inclined portion.

[0015] Preferably, the stretchable body has a mountain portion including a plurality of ridge lines arranged between the plurality of valley portions and aligned along the stretching direction, and the position of the bottom of each of the plurality of valley portions in the stretching direction is constant throughout the entire area, and the position of each of the plurality of ridge lines in the stretching direction is not constant throughout the entire area.

[0016] According to another aspect of the present invention, there is provided a processing apparatus that uses a liquid when processing a workpiece, comprising: a holding table that holds the workpiece; a moving unit that is arranged below the holding table and moves the holding table in a processing feed direction; a processing unit that processes the workpiece held by the holding table; a liquid supply unit that supplies the liquid to the workpiece from above the holding table; and the above-mentioned stretchable waterproof cover that is arranged above the moving unit with its extension direction oriented along the processing feed direction, and that stretches and contracts to cover the moving unit in accordance with the holding table moved by the moving unit. [Effects of the Invention]

[0017] A stretchable waterproof cover according to one aspect of the present invention includes a stretchable body that is stretchable along a stretch direction perpendicular to the width direction, and the stretchable body includes a plurality of valleys aligned along the stretch direction, and the bottom of each valley has an inclined portion that slopes downward toward one of the two widthwise ends of the stretchable body.

[0018] In this case, when a liquid such as water falls onto the stretchable waterproof cover, the liquid flows down the valley along the slope. Therefore, the liquid quickly moves toward the end of the stretchable body and falls from this end to the outside of the stretchable waterproof cover. In other words, the stretchable waterproof cover according to one aspect of the present invention has high liquid drainage properties and is less likely to leave liquid containing processing debris, so it can be used for a long period of time without frequent cleaning. By incorporating this stretchable waterproof cover into a processing device, the processing device can be operated stably for a long period of time with less cleaning, thereby improving the processing efficiency of the processing device.

[0019] Therefore, one aspect of the present invention provides a stretchable waterproof cover that has high liquid drainage properties and requires less frequent cleaning, and a processing device that includes this stretchable waterproof cover. [Brief explanation of the drawings]

[0020] [Figure 1] FIG. 2 is a perspective view schematically showing a processing apparatus. [Figure 2] FIG. 2 is a perspective view schematically showing a processing unit and an object to be processed. [Figure 3] FIG. 2 is a perspective view schematically showing a stretchable waterproof cover. [Figure 4] FIG. 4(A) is a cross-sectional view that schematically shows a cross section of the stretchable waterproof cover, and FIG. 4(B) is a cross-sectional view that schematically shows another cross section of the stretchable waterproof cover. [Figure 5] FIG. 2 is a plan view schematically showing the stretchable waterproof cover observed from above. DETAILED DESCRIPTION OF THE INVENTION

[0021] Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings. First, a workpiece to be treated by a treatment device suitable for use with a stretchable waterproof cover according to this embodiment will be described. FIG. 2 is a perspective view showing a workpiece 1 and a treatment unit (cutting unit 24). FIG. 2 shows the workpiece 1 being treated (cut) by the treatment unit (cutting unit 24).

[0022] The workpiece 1 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon, and has a front surface 1a and a back surface 1b that are generally parallel to each other. A plurality of planned dividing lines 3 are set on the front surface 1a of the workpiece 1, and are arranged in a grid pattern so as to intersect with each other. Devices 5, such as ICs and LSIs, are formed in each of the regions defined by the planned dividing lines 3 on the front surface 1a of the workpiece 1.

[0023] The workpiece 1 is ground from the back surface 1b side to thin the workpiece 1, and dividing grooves 3a are formed along the planned dividing lines 3 to divide the workpiece 1, thereby producing a plurality of thin chips (device chips) each equipped with a device 5. The produced device chips are mounted in various electronic devices such as mobile phones and personal computers.

[0024] However, there are no limitations on the material, structure, size, etc. of the workpiece 1. For example, the workpiece 1 may be a substrate made of a semiconductor other than silicon (GaAs, InP, GaN, SiC, etc.), sapphire, glass (quartz glass, borosilicate glass, etc.), etc. The workpiece 1 does not have to be disk-shaped and may be a rectangular substrate. Furthermore, there are no limitations on the type, number, shape, structure, size, arrangement, etc. of the devices 5, and the workpiece 1 may not have any devices 5 formed thereon.

[0025] When the workpiece 1 is carried into various processing devices, it is sometimes integrated with an annular frame 7 having an opening with a diameter larger than that of the workpiece 1, and tape 9 attached to the annular frame 7 so as to close the opening of the annular frame 7. When the workpiece 1, tape 9, and annular frame 7 are integrated to form a frame unit 11, the workpiece 1 can be handled via the annular frame 7, making it easier to handle the workpiece 1. The tape 9 is attached to the back surface 1b or front surface 1a of the workpiece 1.

[0026] The workpiece 1 is divided using processing equipment such as a cutting device equipped with an annular cutting blade or a laser processing device equipped with a laser processing unit that irradiates a laser beam onto the workpiece 1. In addition, various processing equipment such as a film forming device, an exposure device, an etching device, a polishing device, a grinding device, and a cleaning device are used in the process from forming the device 5 on the workpiece 1 to completing the device chip.

[0027] In these treatment devices, various liquids such as pure water and acidic solutions are supplied to the workpiece 1 and used. The stretchable waterproof cover according to this embodiment is widely applicable to various treatment devices that use liquids. Next, a treatment device incorporating the stretchable waterproof cover will be described using an example in which the treatment device is a cutting device that cuts the workpiece 1, but the treatment device is not limited to cutting devices.

[0028] FIG. 1 is a perspective view that schematically shows a cutting device (processing device) 2. The cutting device 2 has a base 4 that supports each of the components. An opening 4a is formed in the front corner of the base 4, and within this opening 4a is provided a cassette support table 8 that is raised and lowered by a lifting mechanism (not shown). On the upper surface of the cassette support table 8 are mounted cassettes 10 that house multiple workpieces 1 that are each part of a frame unit 11. For ease of explanation, only the outline of the cassette 10 is shown in FIG. 1.

[0029] A rectangular opening 4b is formed on the side of the cassette support base 8 so that its longitudinal direction is along the X-axis direction (processing feed direction, extension / contraction direction). A ball screw type X-axis movement mechanism (movement unit) (not shown), a table cover 14 that covers the top of the X-axis movement mechanism, and an extendable waterproof cover 16 according to this embodiment are arranged inside the opening 4b.

[0030] This extendable waterproof cover 16 is disposed above the X-axis movement mechanism (movement unit) and extends and retracts while covering the X-axis movement mechanism, following the movement of a holding table 18, which is described below and is moved by the X-axis movement mechanism. The extendable waterproof cover 16 will be described in detail later. The X-axis movement mechanism has an X-axis movement table (not shown) covered by a table cover 14, and moves this X-axis movement table in the X-axis direction.

[0031] A holding table 18 is disposed on the upper surface of the X-axis moving table so as to be exposed from the table cover 14. The holding table 18 has the function of suction-holding the workpiece 1 placed on the holding surface 18a exposed upward. The holding table 18 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis that is roughly parallel to the Z-axis direction (vertical direction).

[0032] The holding table 18 includes a porous member 18c having the same diameter as the workpiece 1, and a frame that covers the porous member 18c. A suction path (not shown) is formed inside the holding table 18, one end of which is connected to a suction source (not shown) such as an ejector provided outside the holding table 18. The other end of the suction path reaches the porous member 18c.

[0033] The upper surface of the porous member 18c is exposed on the holding surface 18a of the holding table 18. The upper surface of the porous member 18c has the same diameter as the workpiece 1 and is formed to be approximately parallel to the X-axis and Y-axis directions. Furthermore, a plurality of clamps 18b are provided around the periphery of the holding table 18 to fix the annular frame 7 that supports the workpiece 1.

[0034] When the workpiece 1 is held by the holding table 18, first, the frame unit 11 including the workpiece 1 is placed on the holding surface 18a of the holding table 18. Then, the suction source is connected to the porous member 18c via the suction path, and negative pressure is applied to the workpiece 1 via the tape attached to the back surface 1b of the workpiece 1.

[0035] The cutting device 2 is provided with a transport unit (not shown) in an area adjacent to the opening 4b that transports the workpiece 1 to the holding table 18 or the like. A temporary placement mechanism for temporarily placing the workpiece 1 is provided in a position close to the side of the cassette support base 8. The temporary placement mechanism includes, for example, a pair of guide rails 12 that move toward and away from each other while maintaining a parallel state in the Y-axis direction (indexing feed direction, width direction). The pair of guide rails 12 sandwich the workpiece 1 pulled out of the cassette 10 by the transport unit along the X-axis direction and align it to a predetermined position.

[0036] The workpiece 1 aligned to a predetermined position is lifted up by the transport unit and transported to the holding table 18. At this time, the pair of guide rails 12 are moved away from each other, and the workpiece 1 is passed between the pair of guide rails 12.

[0037] A first cutting unit (processing unit) 24a and a second cutting unit (processing unit) 24b are provided above the holding table 18, and these cut (process) the workpiece 1 held by the holding table 18. A gate-shaped support structure 20 for supporting the first cutting unit 24a and the second cutting unit 24b is disposed on the upper surface of the base 4 so as to straddle the opening 4b.

[0038] A moving unit 22a that moves the first cutting unit 24a in the Y-axis and Z-axis directions, and a moving unit 22b that moves the second cutting unit 24b in the Y-axis and Z-axis directions are provided on the upper front surface of the support structure 20. The moving unit 22a includes a Y-axis moving plate 28a, and the moving unit 22b includes a Y-axis moving plate 28b. The two Y-axis moving plates 28a, 28b are slidably mounted on a pair of Y-axis guide rails 26 that are arranged on the front surface of the support structure 20 along the Y-axis direction.

[0039] Nuts (not shown) are provided on the back side (rear side) of Y-axis moving plates 28a, 28b, and Y-axis ball screws 30a, 30b, which are generally parallel to Y-axis guide rail 26, are threadedly engaged with these nuts. Y-axis pulse motors 32a (one not shown) are connected to one end of Y-axis ball screws 30a, 30b, respectively. By rotating Y-axis ball screws 30a, 30b by Y-axis pulse motor 32a, Y-axis moving plates 28a, 28b move in the Y-axis direction along Y-axis guide rail 26.

[0040] A pair of Z-axis guide rails 34a, 34b are provided along the Z-axis direction on the surface (front) side of Y-axis moving plates 28a, 28b, respectively. Furthermore, Z-axis moving plates 36a, 36b are slidably attached to the pair of Z-axis guide rails 34a, 34b, respectively.

[0041] A nut portion (not shown) is provided on the back surface (rear surface) of each of the Z-axis moving plates 36a, 36b, and Z-axis ball screws 38a, 38b, which are provided in a direction generally parallel to the Z-axis guide rails 34a, 34b, are threadedly engaged with the nut portions. Z-axis pulse motors 40a, 40b are connected to one ends of the Z-axis ball screws 38a, 38b, and by rotating the Z-axis ball screw 38a with the Z-axis pulse motors 40a, 40b, the Z-axis moving plates 36a, 36b move in the Z-axis direction along the Z-axis guide rails 34a, 34b.

[0042] A first cutting unit (processing unit) 24a is provided below Z-axis moving plate 36a. A second cutting unit (processing unit) 24b is provided below Z-axis moving plate 36b. A camera unit 42a (camera unit 42b) for photographing the workpiece 1 held by suction on holding table 18 is provided adjacent to first cutting unit 24a (second cutting unit 24b).

[0043] The positions of the first cutting unit 24a and the camera unit 42a in the Y-axis direction and the Z-axis direction are controlled by the moving unit 22a, and the positions of the second cutting unit 24b and the camera unit 42b in the Y-axis direction and the Z-axis direction are controlled by the moving unit 22b. The positions of the first cutting unit 24a and the second cutting unit 24b are controlled independently. Note that the cutting device 2 does not need to include two cutting units 24a and 24b, and may include a single cutting unit.

[0044] An opening 4c is formed at a position opposite to the opening 4a with respect to the opening 4b. A cleaning unit 44 for cleaning the workpiece 1 is disposed in the opening 4c, and the workpiece 1 that has been cut on the holding table 18 is cleaned by the cleaning unit 44.

[0045] In the cutting device (processing device) 2, the workpiece 1, which has been carried out from the cassette 10 and whose position has been adjusted by the guide rails 12, is placed on the holding table 18 by the transport unit, and the workpiece 1 is suction-held by the holding table 18. Then, the position of the area to be cut on the workpiece 1 is confirmed by the camera units 42a and 42b.

[0046] Then, while moving the holding table 18, the moving units 22a and 22b are operated to cause the rotating cutting blade 50 to cut into the workpiece 1. When the workpiece 1 is divided along the planned division lines 3, device chips are formed. Thereafter, the workpiece 1 is carried out from the holding table 18, washed in the washing unit 44, and stored in the cassette 10. This completes the processing of the workpiece 1 by the cutting device (processing device) 2.

[0047] Here, the cutting units (processing units) 24a and 24b will be described in more detail. The two cutting units (processing units) 24a and 24b have the same configuration. FIG. 4 is a cross-sectional view schematically showing the workpiece 1 to be cut by the cutting unit 24. The cutting unit 24 includes a spindle (not shown) along the Y-axis direction and a rotation drive source (not shown) such as a motor connected to the base end of the spindle. The base end of the spindle is housed in a spindle housing 46.

[0048] An annular cutting blade 50 is fixed to the tip of the spindle. The cutting blade 50 is a so-called hub-type cutting blade that has an annular base made of a material such as aluminum with a through-hole formed in the center and a cutting blade fixed to the outer periphery of the base. However, the cutting blade 50 is not limited to the hub-type.

[0049] The cutting edge contains countless abrasive grains and a bond that disperses and fixes the abrasive grains. For example, the abrasive grains are made of materials such as diamond or cubic boron nitride (cBN), and the bond is a nickel-plated layer.

[0050] The cutting unit (processing unit) 24 includes a blade cover 48 that covers and protects a cutting blade 50 fixed to the tip of the spindle, and a pair of liquid supply nozzles 52b arranged to sandwich the lower part of the cutting blade 50. The blade cover 48 has a liquid guide path (not shown) whose tip communicates with the liquid supply nozzles 52b, and the base end of the liquid guide path communicates with a connection part 52a protruding from the upper surface of the blade cover 48. A supply source of liquid such as pure water is connected to this connection part 52a via a tube.

[0051] The cutting blade 50 can be rotated by operating the rotary drive source to rotate the spindle, and the rotating cutting blade 50 can be made to cut into the workpiece 1 held by suction on the holding table 18, thereby cutting the workpiece 1. At this time, processing chips and frictional heat are generated from the workpiece 1 and the cutting edge of the cutting blade 50. Therefore, liquid such as pure water is sprayed from the liquid supply nozzle 52b onto the workpiece 1 and the cutting blade 50, and the processing chips and frictional heat generated by cutting are removed by the liquid.

[0052] That is, the cutting device (processing device) 2 is provided with a liquid supply unit that supplies liquid to the workpiece 1, etc. from above the holding table 18. The liquid supply unit is composed of a liquid supply source, a liquid guide path, a liquid supply nozzle 52b, etc. The liquid supply unit supplies liquid from the liquid supply source to the workpiece 1, etc. through the cutting unit (processing unit) 24.

[0053] The liquid supplied to the workpiece 1 being cut (processed) and picking up processing debris and the like flows down from the workpiece 1 to the outside of the holding table 18 and reaches the extendable waterproof cover 16. It then flows down from the end of the extendable waterproof cover 16. A water case (not shown) is arranged around the extendable waterproof cover 16, and the liquid is discharged to the outside of the cutting device (processing device) 2 through a drainage pipe connected to the water case.

[0054] Conventional stretchable waterproof covers have a so-called bellows structure, in which multiple rectangular downward inclined surfaces and multiple rectangular upward inclined surfaces are alternately arranged along the stretch direction. Liquid that falls onto this stretchable waterproof cover falls into a valley formed by two adjacent inclined surfaces. This valley is parallel to the width direction, which is perpendicular to the stretch direction. When water falls into the bottom of the valley, it moves widthwise along the valley and falls to the outside of the stretchable waterproof cover in the width direction.

[0055] However, the bottom of this valley was horizontal and had a nearly constant height throughout. This made it difficult for liquid to flow through the bottom of the valley, and liquid was likely to remain on the stretchable waterproof cover. In other words, conventional stretchable waterproof covers had poor drainage. As a result, liquid that had absorbed processing debris was likely to remain on the stretchable waterproof cover, and as the liquid dried, the processing debris would adhere to the top surface of the stretchable waterproof cover.

[0056] When foreign matter such as processing debris adheres to the telescopic waterproof cover, it impedes the cover's smooth extension and retraction. Furthermore, when the telescopic waterproof cover contracts, the processing debris can become trapped between the two inclined surfaces, which push the debris toward each other and damage the inclined surfaces. This required frequent shutdowns of the processing equipment to remove the processing debris and clean the telescopic waterproof cover. This cleaning process not only required significant effort, but also reduced the processing equipment's operating efficiency.

[0057] Therefore, the stretchable waterproof cover 16 according to this embodiment has improved liquid drainage properties, reducing the frequency of cleaning required. The stretchable waterproof cover 16 according to this embodiment will be described in detail below. Fig. 3 is a perspective view schematically showing the stretchable waterproof cover 16 according to this embodiment. Fig. 4(A) is a cross-sectional view schematically showing a cross section of the stretchable waterproof cover 16, and Fig. 4(B) is a cross-sectional view schematically showing another cross section of the stretchable waterproof cover 16. Fig. 5 is a plan view schematically showing the stretchable waterproof cover 16 observed from above.

[0058] The stretchable waterproof cover 16 according to this embodiment is manufactured by making mountain folds and valley folds at predetermined positions in a rectangular thin plate made of, for example, a metal such as a stainless steel plate or a resin. Each area of ​​the thin plate separated by the folds becomes an inclined surface, and the angle between two adjacent inclined surfaces separated by the fold can be changed. Alternatively, hinges can be provided at each fold position, and the stretchable waterproof cover 16 is made up of multiple inclined surfaces connected by the hinges, and the angle of each hinge can be changed.

[0059] When the angle between two adjacent inclined surfaces is reduced, the distance between the valleys formed by these inclined surfaces becomes narrower, causing the stretchable waterproof cover 16 to shrink. Conversely, when this angle is increased, the distance between the valleys becomes wider, causing the stretchable waterproof cover 16 to stretch. Therefore, the stretchable waterproof cover 16 is stretchable and can be said to have a stretchable body 54. More specifically, the stretchable waterproof cover 16 is stretchable along a linear stretching direction, and the direction perpendicular to this stretching direction is the width direction.

[0060] For example, when the extendable waterproof cover 16 is incorporated into the cutting device (processing device) 2 shown in Fig. 1, the extendable waterproof cover 16 is connected to a holding table 18 that moves along the X-axis direction (processing feed direction) at the opening 4b of the base 4 and is placed at the opening 4b. The extendable waterproof cover 16 expands and contracts in accordance with the movement of the holding table 18, thereby continuously closing the opening 4b so as not to create any gaps in the opening 4b.

[0061] When the stretchable waterproof cover 16 is incorporated into the cutting device (processing device) 2, the orientation of the stretchable waterproof cover 16 is determined so that the stretching direction matches the X-axis direction (processing feed direction) and the width direction matches the Y-axis direction (indexing feed direction).

[0062] For example, in the cutting device (processing device) 2, expandable waterproof covers 16 are disposed at the opening 4b on both the front and rear sides of the holding table 18 in the X-axis direction. One end of each expandable waterproof cover 16 in the expansion / contraction direction is connected to the holding table 18, and the other end in the expansion / contraction direction is connected to the base 4 at the end of the opening 4b in the X-axis direction.

[0063] 3, the stretchable body 54, which is the main body of the stretchable waterproof cover 16, has multiple valleys 56a, 56b aligned along the stretching direction (X-axis direction). Here, the valleys 56a, 56b refer to concave structures formed between two adjacent inclined surfaces facing each other, and when liquid falls on the stretchable waterproof cover 16, the liquid flows along the inclined surfaces and collects in the valleys 56a, 56b.

[0064] 4(A) and 4(B), in the stretchable waterproof cover 16 according to this embodiment, the bottoms 58 of the valleys 56a, 56b each have an inclined portion 64. The inclined portion 64 is inclined downward toward one of the two ends 60a, 60b in the width direction (Y-axis direction) of the stretchable body 54. Therefore, liquid that falls into the valleys 56a, 56b does not remain there but flows along the inclined portion 64, reaches the ends 60a, 60b, and falls into the water case.

[0065] In this case, liquid is less likely to remain in the stretchable waterproof cover 16, and the amount of liquid that remains is extremely small. Therefore, even if processing debris contained in the liquid adheres to the stretchable waterproof cover 16 as the liquid dries, the amount of such debris is relatively small, making it less likely that damage to the stretchable waterproof cover 16 will occur due to the adhered processing debris.

[0066] Furthermore, the stretchable body 54 of the stretchable waterproof cover 16 according to this embodiment includes ridges 68 that sandwich each of the multiple valleys 56a, 56b from the front and rear in the stretching direction (X-axis direction). Here, the ridges 68 refer to convex structures formed between two adjacent inclined surfaces that are back-to-back. The ridges 68 are higher than their surroundings, so that when liquid falls on the stretchable waterproof cover 16, the liquid flows along the inclined surfaces and away from the ridges 68.

[0067] The peak portion 68 has zigzag ridges 70a, 70b, and 70c that connect two ends 80a and 80b in the expansion and contraction direction (X-axis direction) of the expandable body 54. In a typical accordion-shaped expandable waterproof cover, the peak portion is made up of multiple ridges that are parallel to the width direction, and the ridges are separated from each other and are not connected in the expansion and contraction direction.

[0068] Here, the ridge lines 70a, 70b, and 70c refer to lines connecting points that are higher than the surrounding area in the peak portion 68. In the stretchable waterproof cover 16 according to this embodiment, the stretchable body 54 is divided into two regions by the zigzag ridge lines 70a, 70b, and 70c that connect the two end portions 80a and 80b of the stretchable body 54.

[0069] The odd-numbered valleys 56a are arranged in one region divided by the ridgelines 70a, 70b, and 70c of the stretchable body 54, and the even-numbered valleys 56b are arranged in the other region divided by the ridgelines 70a, 70b, and 70c of the stretchable body 54. Here, the inclined portions 64 of the bottoms 58 of the odd-numbered valleys 56a are inclined downward toward one end 60a in the width direction (Y-axis direction) of the stretchable waterproof cover 16 (stretchable body 54). The inclined portions 64 of the bottoms 58 of the even-numbered valleys 56b are inclined downward toward the other end 60b in the width direction of the stretchable waterproof cover 16 (stretchable body 54).

[0070] A stretchable body 54 with this structure has inclined portions 64 at the bottom of each valley portion 56a, 56b, can stretch smoothly in the stretching direction, and can be manufactured by forming creases at predetermined positions in a rectangular thin plate. Therefore, a stretchable waterproof cover 16 that uses a stretchable body 54 with this structure is easy to manufacture and liquid is less likely to remain on the upper surface.

[0071] The stretchable body 54 of the stretchable waterproof cover 16 according to this embodiment will now be described from another perspective. The peaks 68 of the stretchable body 54 sandwich a first valley 66a, one of the valleys, from the front and rear in the stretching direction (X-axis direction). The peaks 68 have a first ridge 70a, a second ridge 70b that sandwiches the first valley 66a together with the first ridge 70a, and a first connecting portion 72a that connects the first ridge 70a and the second ridge 70b.

[0072] Furthermore, the peaks 68 sandwich a second valley 66b, which is one of the multiple valleys and is adjacent to the first valley 66a, from the front and rear in the extension / contraction direction (X-axis direction). The peaks 68 further include a third ridge 70c that sandwiches the second valley 66b together with the second ridge 70b, and a second connection portion 72b that connects the second ridge 70b and the third ridge 70c.

[0073] Here, the bottom 58 of the first valley portion 66a has a first inclined portion 74a that slopes downward toward one of the two ends 60a, 60b (end 60a) of the stretchable body 54, and the bottom 58 of the second valley portion 66b has a second inclined portion 74b that slopes downward toward the other of the two ends 60a, 60b (end 60b) of the stretchable body 54.

[0074] It should be noted that not only the valleys 66a, 66b but also the peaks 68 may be connected to the ends 60a, 60b in the width direction (Y-axis direction) of the stretchable body 54. That is, the peaks 68 have outer ridges 76 that extend from the first connecting portion 72a toward one of the two ends 60a, 60b (e.g., end 60b) in the width direction (Y-axis direction) of the stretchable body 54. The first valleys 66a and the outer ridges 76 are aligned along the width direction (Y-axis direction) via the first connecting portion 72a.

[0075] Furthermore, the peak portion 68 has an outer ridge line 76 that extends from the second connection portion 72b toward one of the two ends 60a, 60b (for example, end portion 60a) in the width direction (Y-axis direction) of the stretchable body 54. The second valley portion 66b and the outer ridge line 76 are aligned along the width direction (Y-axis direction) via the second connection portion 72b.

[0076] Even in the stretchable body 54 having such a structure, the sloped portions 74a, 74b are provided at the bottom of each valley portion 66a, 66b, and the stretchable body 54 can smoothly stretch in the stretching direction (X-axis direction), and can be manufactured by forming creases at predetermined positions in a rectangular thin plate. Therefore, even in the stretchable waterproof cover 16 employing the stretchable body 54 having such a structure, liquid is less likely to remain on the upper surface, and the stretchable waterproof cover 16 is easy to manufacture.

[0077] Here, in the stretchable body 54 of the stretchable waterproof cover 16 according to one aspect of the present embodiment, the bottom 58 of each valley portion 56a, 56b, 66a, 66b does not have to be composed of only the inclined portions 64, 74a, 74b. That is, the bottom 58 may have a horizontal portion 78 in addition to the inclined portions 64, 74a, 74b, as shown in Figures 4(A) and 4(B). That is, the bottom 58 of the valley portions 56a, 56b, 66a, 66b may further have a horizontal portion 78 between either of the two end portions 60a, 60b in the width direction (Y-axis direction) of the stretchable body 54 and the inclined portion 64, 74a, 74b.

[0078] Even when the stretchable body 54 has horizontal portions 78 at the bottom 58 of each valley portion 56a, 56b, 66a, 66b, liquid is less likely to remain in the stretchable waterproof cover 16 according to this embodiment, compared to conventional stretchable waterproof covers in which the entire bottom of the valley is horizontal. Furthermore, compared to when the entire bottom 58 is made up of inclined portions 64, 74a, 74b, when only a portion of the bottom 58 is horizontal portion 78, the length of the inclined portions 64, 74a, 74b is shortened by that amount while the gradient is steeper, so the stretchable waterproof cover 16 has sufficiently high liquid drainage properties.

[0079] The features of the stretchable waterproof cover 16 according to this embodiment will be described from yet another perspective. The peaks 68 of the stretchable body 54 of the stretchable waterproof cover 16 according to this embodiment can also be considered to include a plurality of ridges 70a, 70b, 70c arranged in a zigzag pattern. That is, the peaks 68 include a plurality of ridges 70a, 70b, 70c that are arranged between the plurality of valleys 56a, 56b, 66a, 66b and aligned along the stretching direction (X-axis direction).

[0080] The bottom 58 of each of the multiple valleys 56a, 56b, 66a, and 66b has a constant position in the extension / contraction direction (X-axis direction) throughout the entire area. That is, the bottom 58 of each of the multiple valleys 56a, 56b, 66a, and 66b is generally parallel to the width direction (Y-axis direction) when the inclination of the inclined portions 64, 74a, and 74b is ignored. In other words, when the extendable waterproof cover 16 (extendable body 54) is viewed from above and below (Z-axis direction), the bottom 58 of each of the valleys 56a, 56b, 66a, and 66b is parallel to the width direction (Y-axis direction).

[0081] However, the entire stretchable body 54 of the stretchable waterproof cover 16 does not always stretch smoothly and uniformly, and there is variation in the way the stretchable body 54 is displaced at each point. Therefore, the fact that the position of each bottom 58 in the stretching direction is constant over the entire area does not mean that the position in the stretching direction is always strictly constant over the entire area. It is sufficient if such a state can occur even temporarily, and for example, it means that the stretchable waterproof cover 16 (stretchable body 54) is designed so that the position of each bottom 58 in the stretching direction is constant over the entire area.

[0082] Furthermore, the position of each of the multiple ridgelines 70a, 70b, and 70c of the mountain portion 68 in the expansion / contraction direction (X-axis direction) is not constant throughout the entire area. That is, each of the multiple ridgelines 70a, 70b, and 70c is not parallel to the width direction (Y-axis direction) but is inclined at a predetermined angle from the width direction.

[0083] However, because there is variation in the way the stretchable body 54 is displaced at each point, the fact that the positions of the ridgelines 70a, 70b, and 70c in the stretching direction are not constant over the entire area does not mean that the positions in the stretching direction are not always strictly constant over the entire area. In other words, it does not mean that the positions in the stretching direction must not be constant over the entire area, even temporarily. For example, this means that the stretchable waterproof cover 16 (stretchable body 54) is designed so that the ridgelines 70a, 70b, and 70c are each tilted at a certain angle from the stretching direction.

[0084] Up to this point, the features of the stretchable waterproof cover 16 have been described from multiple perspectives, but the stretchable waterproof cover 16 according to this embodiment does not need to satisfy all of the above-mentioned features. Furthermore, the features can be combined as appropriate as long as they do not contradict each other. If at least the bottoms 58 of the valleys 56a, 56b, 66a, 66b of the stretchable body 54 have the inclined portions 64, 74a, 74b, the liquid drainage ability of the stretchable waterproof cover 16 will be higher than conventional ones.

[0085] As described above, the expandable waterproof cover 16 is incorporated into the processing device (cutting device 2) for use. This processing device uses a liquid when processing the workpiece 1, and includes a holding table 18 that holds the workpiece 1, and a movement unit (X-axis movement mechanism, not shown) that is disposed below the holding table 18 and moves the holding table 18 in the processing feed direction (X-axis direction).

[0086] The processing device includes processing units (cutting units 24a, 24b) that process the workpiece 1 held by the holding table 18, and a liquid supply unit (liquid supply nozzle 52b, etc.) that supplies liquid to the workpiece 1 from above the holding table 18. The processing device also includes the above-mentioned expandable waterproof cover 16. The expandable waterproof cover 16 is disposed above the moving unit with its expansion and contraction direction aligned with the processing feed direction, and expands and contracts while covering the moving unit in response to the holding table 18 that is moved by the moving unit.

[0087] In this case, when liquid falls onto the extendable waterproof cover 16, the liquid quickly falls to the outside of the extendable waterproof cover 16. Therefore, liquid containing processing debris and the like is less likely to remain on the extendable waterproof cover 16. In other words, there is no need to stop the operation of the processing device (cutting device 2) for frequent cleaning, and the processing device can be operated stably for a long period of time with minimal cleaning, improving the processing efficiency of the processing device.

[0088] In the above embodiment, a case has been described in which processing debris is trapped in the liquid that falls onto and is received by the stretchable waterproof cover 16, and when the liquid dries on the stretchable waterproof cover 16, the processing debris adheres to the stretchable waterproof cover 16. However, one aspect of the present invention is not limited to this. Even when liquid that does not trap processing debris falls onto the stretchable waterproof cover 16, residual liquid may cause stains on the stretchable waterproof cover 16, or the growth of bacteria due to the residual liquid may become a problem. The stretchable waterproof cover 16 according to one aspect of the present invention is effective in addressing such problems and may also solve other problems.

[0089] In the above embodiment, the stretchable body 54 of the stretchable waterproof cover 16 has been mainly described, but the stretchable waterproof cover 16 according to one aspect of the present invention may include other components. For example, as shown in Figures 3, 4(A), and 4(B), the stretchable waterproof cover 16 may include two side cover portions 62 that hang down from the respective ends 60a, 60b of the stretchable body 54.

[0090] The side cover portions 62 are fixed to the ends 60a, 60b of the stretchable body 54, have folds corresponding to the arrangement of the peaks 68 and valleys 56a, 56b, 66a, 66b of the stretchable body 54, and are stretchable together with the stretchable body 54. The side cover portions 62 protect the space below the stretchable body 54 from the lateral direction (Y-axis direction), making it difficult for liquid to enter this space.

[0091] Furthermore, in the above embodiment, the ridges 70a, 70b, 70c, 76 of the peak portion 68 of the stretchable body 54 are connected and integrated by the connecting portions 72a, 72b, but the stretchable waterproof cover 16 according to one aspect of the present invention is not limited to this. That is, the ridges 70a, 70b, 70c, 76 of the peak portion 68 do not have to be connected to each other, and may include multiple ridges 70a, 70b, 70c, 76 that are separate from each other.

[0092] 5 depicts a plurality of first connection portions 72a aligned along the stretching direction (X-axis direction) and a plurality of second connection portions 72b aligned along the stretching direction. However, the stretchable body 54 may be cut along two cutting lines parallel to the stretching direction and set in a region sandwiched between the plurality of first connection portions 72a and the plurality of second connection portions 72b in the width direction, with the portions outside the cutting lines removed.

[0093] In this case, the stretchable body 54 includes multiple valleys 56a, 56b aligned along the stretching direction and multiple peaks 68 aligned along the stretching direction and disposed between the valleys 56a, 56b, but does not include connecting portions 72a, 72b. The bottoms 58 of the valleys 56a, 56b have inclined portions 64, which are generally parallel to one another. The ridges 70a, 70b, 70c of the peaks 68 are oriented in a direction inclined at a predetermined angle from the width direction. The ridges 70a, 70b, 70c are generally uniform in height throughout the entire area.

[0094] Even in this case, the stretchable waterproof cover 16 has an inclined portion 64 on the stretchable body 54, so it has high liquid drainage properties and requires less frequent cleaning. In addition, it can be manufactured by forming creases in a rectangular thin plate, making it easy to manufacture.

[0095] The structures, methods, etc. according to the above-described embodiments can be modified as appropriate without departing from the scope of the object of the present invention. [Explanation of symbols]

[0096] 1. Material to be processed 1a surface 1b back side 3 Planned division line 3a split groove 5 Devices 7 Annular Frame 9 Tape 11 Frame Unit 2 Cutting equipment 4 Foundation 4a,4b,4c opening 8 Cassette support stand 10 cassettes 12 Guide rail 14 Table Cover 16 Stretchable waterproof cover 18 Holding table 18a Holding surface 18b clamp 18c Porous material 20 Support structure 22a, 22b Mobile unit 24, 24a, 24b Cutting unit 26, 34a, 34b Guide rails 28a, 28b, 36a, 36b Moving plates 30a, 30b, 38a, 38b ball screws 32a, 40a, 40b Pulse motor 42a, 42b Camera unit 44 Cleaning Unit 46 Spindle housing 48 Blade Cover 50 cutting blades 52a Connection 52b Liquid supply nozzle 54 Stretch body 56a,56b,66a,66b Tanibe 58 bottom 60a, 60b Ends 62 Side cover part 64,74a,74b Slope 68 Yamabe 70a, 70b, 70c ridgeline 72a, 72b Connection 76 Outer Ridge 78 Horizontal section 80a,80b end

Claims

1. A stretchable waterproof cover having a stretchable body and capable of stretching along a stretching direction perpendicular to the width direction, The stretchable body has a plurality of valleys aligned along the stretching direction, A stretchable waterproof cover characterized in that the bottom of each of the valley portions has an inclined portion that slopes downward toward either of the two ends in the width direction of the stretchable body.

2. The stretchable body includes ridge portions that sandwich a first valley portion, which is one of the plurality of valley portions, from the front and rear in the stretching direction, The peak portion has a first ridge line, a second ridge line sandwiching the first valley portion together with the first ridge line, and a first connection portion connecting the first ridge line and the second ridge line.

2. The stretchable waterproof cover according to claim 1.

3. The peak portion sandwiches a second valley portion, which is one of the plurality of valley portions and is adjacent to the first valley portion, from the front and rear in the stretching direction, the peak portion further includes a third ridge line sandwiching the second valley portion together with the second ridge line, and a second connection portion connecting the second ridge line and the third ridge line, a bottom of the first valley portion having a first inclined portion inclined downward toward one of the two ends of the elastic body; The bottom of the second valley portion has a second inclined portion inclined downward toward the other of the two ends of the elastic body.

3. The stretchable waterproof cover according to claim 2.

4. The peak portion has an outer ridge line extending from the first connection portion toward either of two ends of the stretchable body in the width direction, The first valley portion and the outer ridge line are aligned along the width direction via the first connection portion.

3. The stretchable waterproof cover according to claim 2.

5. mountain portions sandwiching each of the plurality of valley portions from the front and rear in the extension / contraction direction, The peak portion has a zigzag ridgeline connecting two ends of the stretchable body in the stretching direction, the odd-numbered valley portions are arranged in one region of the stretchable body separated by the ridge line, The even-numbered valley portions are aligned in the other region of the stretchable body separated by the ridge line.

2. The stretchable waterproof cover according to claim 1.

6. The bottom of each of the valleys further has a horizontal portion between either of the two ends of the stretchable body in the width direction and the inclined portion.

2. The stretchable waterproof cover according to claim 1.

7. The stretchable body includes mountain portions each including a plurality of ridge lines arranged along the stretching direction and each of the mountain portions being respectively disposed between the plurality of valley portions, The position of the bottom of each of the plurality of valley portions in the extension / contraction direction is constant throughout the entire area, The position of each of the plurality of ridge lines in the stretching direction is not constant throughout the entire area.

2. The stretchable waterproof cover according to claim 1.

8. A treatment device that uses a liquid when treating an object to be treated, a holding table for holding the object to be processed; a moving unit disposed below the holding table and configured to move the holding table in a processing feed direction; a processing unit that processes the object held by the holding table; a liquid supply unit that supplies the liquid to the object to be processed from above the holding table; and the stretchable waterproof cover according to any one of claims 1 to 7, which is disposed above the moving unit with the stretchable direction aligned with the processing feed direction, and which stretches and contracts while covering the moving unit in accordance with the holding table moved by the moving unit. A processing device characterized by:

Images