Transport method, transport device, processing method, and processing device

Abstract

To provide a transport method and a transport device capable of correcting the angle of a transported object to an ideal angle before transporting it to a guide rail, and preventing damage to an annular frame and the guide rail, and further preventing the generation of foreign matter (metal powder) from the annular frame and the guide rail due to scratches.SOLUTION: In a transport method, a transport device (first transport mechanism 61) transports a transport object (frame unit U) along a pair of guide rails 51 extending in the Y-axis direction, the transport device includes a contact portion 61m extending in the X-axis direction perpendicular to the Y-axis direction, the transport method includes an angle determination step of pressing against a first end face Fa of the transport object by the contact portion and determines an angle such that the first end face is parallel to the X-axis direction, and a carry-out step of pulling the transport object by the transport device in the Y-axis direction and placing it on the pair of guide rails after the angle determination step.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to a method for transporting an object including a workpiece. [Background technology]

[0002] Conventionally, as disclosed in Patent Document 1, for example, a processing device has been known in which a semiconductor wafer, which is a workpiece, and an annular frame are integrated by adhering them to tape to form a frame unit, the frame unit is handled as a transported object, and the semiconductor wafer is divided into chips by cutting along a planned division line.

[0003] In this type of processing equipment, one frame unit is pulled out horizontally from a cassette that contains multiple frame units, placed on a temporary placement mechanism equipped with a pair of guide rails, and centered (centered), and then the frame unit is transported to a holding table. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2021-178389 Summary of the Invention [Problem to be solved by the invention]

[0005] The cassette has multiple shelves, and a frame unit is placed on each shelf. However, depending on the angle of the frame unit, when the frame unit is pulled out and transferred to the guide rail, the side of the annular frame may interfere with the guide rail or may scratch and scrape the guide surface of the guide rail.

[0006] This defect may cause damage to the annular frame and guide rails, and may even cause foreign matter (metal powder) to be generated from the annular frame and guide rails due to scratches. The foreign matter in particular can be a major source of contamination, as it can adhere to the surface of semiconductor wafers and damage devices, or it can remain attached to the annular frame and be stored in a cassette and carried on to subsequent processes.

[0007] Furthermore, another issue is that if the angle of the annular frame unit placed on the shelf inside the cassette is tilted, the side of the frame may interfere with and scratch the inner wall surface of the cassette, which may damage the cassette.

[0008] In view of the above problems, the present invention provides a novel technique for transporting an object to a pair of guide rails. [Means for solving the problem]

[0009] The problem to be solved by the present invention is as described above, and the mechanism for solving this problem will now be described.

[0010] According to one aspect of the present invention, there is provided a conveying method for conveying an object to be conveyed by a conveying device along a pair of guide rails extending in a first direction, the conveying device having a contact portion extending in a second direction perpendicular to the first direction, the conveying method including an angle determination step in which the contact portion presses against a first end face of the object to determine an angle so that the first end face is parallel to the second direction, and a conveying step in which, after the angle determination step, the conveying device pulls out the object to be conveyed in the first direction and places it on the pair of guide rails.

[0011] According to one aspect of the present invention, the method further includes a pre-pulling step of pulling out the object in the first direction by the conveying device before the angle defining step.

[0012] According to one aspect of the present invention, there is provided a conveying device for conveying an object to be conveyed in a first direction relative to a pair of guide rails extending in a first direction, the conveying device having a contact portion extending in a second direction perpendicular to the first direction, a clamping mechanism for clamping the object to be conveyed, and a moving mechanism for moving the clamping mechanism in the first direction, and the conveying device performs an angle determination step in which the contact portion presses a first end face of the object to be conveyed and determines an angle so that the first end face is parallel to the second direction, and after the angle determination step, the clamping mechanism holds the object to be conveyed, and the moving mechanism pulls the object in the first direction and places it on the pair of guide rails, thereby performing a conveying step.

[0013] According to another aspect of the present invention, a pre-pulling step of pulling out the transported object in the first direction by the transport device is performed before the angle determination step.

[0014] According to one aspect of the present invention, the processing method includes a preparation step of preparing a conveying device having a contact portion extending in a second direction perpendicular to the first direction and a conveyed object having a first end face; an angle determination step of pressing the first end face of the conveyed object with the contact portion to set an angle so that the first end face is parallel to the second direction; a carry-out step of pulling the conveyed object in the first direction with the conveying device after the angle determination step and placing it on a pair of guide rails; a transport step of transporting the conveyed object from the pair of guide rails to a holding table; and a processing step of processing the conveyed object held on the holding table.

[0015] According to one aspect of the present invention, a pre-pulling step of pulling out the transported object in the first direction by the transport device is performed before the angle defining step.

[0016] According to one aspect of the present invention, there is provided a cassette mounting table on which a cassette containing a plurality of transported objects is placed, the cassette mounting table being configured to position the transported objects at the same height as a pair of guide rails; a temporary placement mechanism having the pair of guide rails and abutting the pair of guide rails against a second end surface of the transported object to adjust the transported object to a specified angle; a transport device that carries out the transported object to the temporary placement mechanism so that the transported object is placed on the pair of guide rails, and transports the transported object, the angle of which has been adjusted by the temporary placement mechanism, onto a holding table; and a processing unit that processes the transported object held on the holding table. and a controller, wherein the transport device has a contact portion extending in a second direction perpendicular to the first direction, a clamping mechanism for clamping the transported object, and a moving mechanism for moving the clamping mechanism in the first direction, and the controller performs an angle determination step of pressing a first end face of the transported object with the contact portion and determining an angle so that the first end face is parallel to the second direction, and after the angle determination step, performs a carry-out step of clamping the transported object with the clamping mechanism and pulling the transported object in the first direction with the moving mechanism and placing it on a pair of guide rails.

[0017] According to another aspect of the present invention, the controller performs a pre-pulling step of pulling out the object in the first direction using the conveying device before the angle defining step. [Effects of the Invention]

[0018] According to one aspect of the present invention, the angle of the transported object can be corrected to an ideal angle before it is transported onto the guide rail, preventing damage to the annular frame or guide rail, and further preventing the generation of foreign matter (metal powder) from the annular frame or guide rail due to scratches.

[0019] In addition, according to one aspect of the present invention, by performing a pre-pulling step, the transported object is pulled out from the cassette a predetermined distance in advance, so that the transported object can be more reliably corrected to an ideal angle during the angle determination step. [Brief explanation of the drawings]

[0020] [Figure 1] FIG. 1 is a diagram illustrating an embodiment of a processing device. [Figure 2] FIG. [Figure 3] 1A is a plan view showing a frame unit in a cassette, FIG. 1B is a side view showing a frame unit in a cassette, and FIG. 1C is a diagram for explaining a clamping mechanism. [Figure 4] (A) is a diagram showing the state before the frame unit is pulled out, (B) is a diagram showing the state after the frame unit has been carried out onto the guide rail, and (C) is a diagram showing centering of the frame unit in the X-axis direction. [Figure 5] (A) is a diagram showing the state when the frame unit is carried out onto the guide rail, and (B) is a diagram showing the centering of the frame unit in the X-axis direction. [Figure 6] 1 is a flowchart showing steps constituting a processing method. [Figure 7] (A) is a diagram showing the preparation step, (B) is a diagram showing the angle regulation step, and (C) is a diagram showing the state in which the frame unit has been carried out onto the guide rail. [Figure 8] 1A is a diagram illustrating the clamping mechanism, FIG. 1B is a diagram illustrating how the first end face is pressed by the contact portion, and FIG. 1C is a diagram illustrating how the annular frame is clamped and pulled out. [Figure 9] FIG. 10 is a diagram showing an example in which carrying out is performed without performing the angle defining step. [Figure 10] 1A is a diagram illustrating the pre-extension step, FIG. 1B is a diagram illustrating the pre-extension step, and FIG. 1C is a diagram illustrating the angle determination step. DETAILED DESCRIPTION OF THE INVENTION

[0021] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following explanation, an XYZ Cartesian coordinate system is set as shown in Figure 1, and the positional relationship of each part will be explained with reference to this XYZ Cartesian coordinate system. One end direction in a horizontal plane is defined as the X-axis direction, the direction perpendicular to the X-axis direction in the horizontal plane is defined as the Y-axis direction, and the direction perpendicular to both the X-axis and Y-axis directions is defined as the Z-axis direction. The X-Y plane, which includes the X-axis and Y-axis, is parallel to the horizontal plane. The Z-axis direction, which is perpendicular to the X-Y plane, is the vertical direction.

[0022] The cutting device 1 shown in FIG. 1 is a processing device that cuts a workpiece W. The workpiece W is not particularly limited, but may be any of various processing materials, such as a semiconductor wafer, an optical device wafer, an inorganic material substrate, or a ductile resin material substrate. The workpiece W and an annular frame F are attached to a tape T and handled as a frame unit U. The frame unit U is a transported object that is carried out from a cassette 10, and is formed by integrating the workpiece W with a separate annular frame F. However, the workpiece may not be fixed to a separate annular frame or the like, and may instead be housed in the cassette 10 and transported as a transported object.

[0023] As shown in Figure 1, the cutting device 1 includes a device main body 2, a cassette mounting table 3, a first portal column 4, and a second portal column 5. The device main body 2 is formed in a rectangular parallelepiped shape. The cassette mounting table 3 is disposed in a rectangular shape on the upper surface of the device main body 2. The first portal column 4 and the second portal column 5 are disposed on the upper surface of the device main body 2 so as to be parallel to each other with a gap between them.

[0024] The cassette 10 placed on the cassette table 3 accommodates a plurality of workpieces W before and after processing, and is placed on the ascending and descending cassette table 3. The cassette 10 has an opening 10b (FIG. 2) formed on the side facing the transport device 60.

[0025] The cutting device 1 includes a holding table 20, a processing unit 30, a cleaning / drying mechanism 40, a temporary placement mechanism 50, a transport device 60, an X-axis movement mechanism (not shown), a Y-axis movement mechanism 80, and a Z-axis movement mechanism 90.

[0026] The holding table 20 has a holding surface 21 that suction-holds the workpiece W. The holding table 20 is moved for processing in the X-axis direction relative to the device body 2 by an X-axis movement mechanism (not shown). The holding surface 21 of the holding table 20 is positioned at a load / unload position where the workpiece W is loaded / unloaded, and at a processing start position where the workpiece W is processed by the processing unit 30. The holding table 20 is provided rotatably around an axis parallel to the Z-axis direction relative to the device body 2.

[0027] The processing unit 30 processes the workpiece W held on the holding table 20. Two processing units 30 are arranged at an interval in the Y-axis direction, sandwiching the holding table 20. The processing unit 30 is moved along a movement path parallel to the Y-axis direction by a Y-axis movement mechanism 80, and moved along a movement path parallel to the Z-axis direction by a Z-axis movement mechanism 90.

[0028] The machining unit 30 includes a cutting blade 31a, a spindle 31b, and a housing 31c. The cutting blade 31a is a cutting grindstone formed in an extremely thin, disc-like, annular shape. The spindle 31b detachably mounts the cutting blade 31a. The housing 31c has a drive source such as a motor and supports the spindle 31b rotatably about an axis parallel to the Y-axis direction. The housing 31c is supported by the second portal column 5 so as to be movable parallel to the Y-axis direction and parallel to the Z-axis direction. The housing 31c positions the cutting blade 31a at a machining start position where cutting is performed on the workpiece W and at a retracted position before and after cutting the workpiece W.

[0029] The cleaning and drying mechanism 40 cleans and dries the workpiece W after processing. The cleaning and drying mechanism 40 sprays a cleaning liquid such as pure water toward the workpiece W held on the cleaning table 41 to clean it, and sprays clean air (compressed air) toward the workpiece W to dry it. The cleaning table 41 holds the workpiece W by suction, similar to the holding table 20.

[0030] The temporary placement mechanism 50 temporarily places the frame unit U (workpiece W) carried out from the cassette 10 placed on the cassette placement table 3. The temporary placement mechanism 50 has a pair of guide rails 51 that support the frame unit U carried out from the cassette 10, and the distance between the guide rails 51 in the X-axis direction is adjusted by a drive mechanism (not shown).

[0031] Specifically, the pair of guide rails 51 are positioned at a temporary placement position, a centering position, and a spaced position. The temporary placement position is the position of the guide rail 51 when the frame unit U is temporarily placed. The centering position is a position of the guide rails 51 when the frame unit U is centered, and the distance between the guide rails 51 is narrower in the X-axis direction than at the temporary placement position. The separated position is a position of the guide rails 51 where the distance between the guide rails 51 in the X-axis direction is wider than that set at the temporary placement position, and where the frame unit U passes between the pair of guide rails 51.

[0032] The transport device 60 includes a first transport mechanism 61 and a second transport mechanism 62 for transporting the frame unit U, which is the object to be transported.

[0033] The first transport mechanism 61 is configured to be movable in the Y-axis direction and the Z-axis direction, and transports the frame unit U between the cassette 10, the temporary placement mechanism 50, the holding table 20, and the cleaning table 41 of the cleaning and drying mechanism 40. Specifically, the first transport mechanism 61 moves the frame unit U in the cassette 10 to the temporary placement mechanism 50. The first transport mechanism 61 also moves the frame unit U temporarily placed in the temporary placement mechanism 50 to the holding table 20. The first transport mechanism 61 also moves the frame unit U on the cleaning table 41 of the cleaning and drying mechanism 40 to the temporary placement mechanism 50. The first transport mechanism 61 also moves the frame unit U moved from the cleaning table 41 to the temporary placement mechanism 50 into the cassette 10.

[0034] The second transport mechanism 62 transports the frame unit U between the holding table 20 and the cleaning table 41 of the cleaning and drying mechanism 40. The second transport mechanism 62 is configured to be movable in the Y-axis direction and the Z-axis direction, and transports the frame unit U out of the holding table 20 and into the cleaning table of the cleaning and drying mechanism 40.

[0035] The Y-axis movement mechanism 80 moves the processing unit 30 relatively in parallel to the Y-axis direction (corresponding to the indexing feed direction) with respect to the apparatus main body 2. The Y-axis movement mechanism 80 is composed of a linear motion mechanism including a ball screw, a pulse motor, a guide rail, etc. The Y-axis movement mechanism 80 is equipped with a Y-axis movable base 81 that is supported on the second portal column 5 so as to be movable in parallel to the Y-axis direction.

[0036] The Z-axis movement mechanism 90 moves the machining unit 30 relatively in parallel to the Z-axis direction (corresponding to the cutting feed direction) with respect to the device main body 2. The Z-axis movement mechanism 90 is composed of a linear motion mechanism similar to the Y-axis movement mechanism 80, including a ball screw, a pulse motor, a guide rail, etc. The Z-axis movement mechanism 90 is equipped with a Z-axis movable base 91 that is supported so as to be movable in parallel to the Z-axis direction with respect to the Y-axis movable base 81. The machining unit 30 is provided at the lower end of the Z-axis movable base 91 in the Z-axis direction, and by moving the Z-axis movable base 91 in parallel to the Z-axis direction, the machining unit 30 moves in parallel to the Z-axis direction.

[0037] The operations of the various mechanisms constituting the cutting device 1 described above are controlled by a controller 100, and the transport of the frame unit, cutting processing, and the like are performed automatically.

[0038] 2 is a diagram showing the cassette mounting mechanism 32 that supports the cassette mounting table 3 so that it can be raised and lowered. The cassette mounting mechanism 32 includes an elevation mechanism 35 for moving the cassette mounting table 3 up and down. The elevation mechanism 35 is controlled by the controller 100.

[0039] The cassette mounting table 3 is made of a plate-like member on which the cassette 10 is placed, and is provided horizontally on the upper end of the support table 36.

[0040] The lower end of the support base 36 is provided with a guided portion 36a that is guided by a guide rail 35a that is provided vertically along the side wall 2b of the device body 2, and a nut portion 36b into which a ball screw 35b that is provided vertically is inserted. When the ball screw 35b is driven to rotate by the pulse motor 35c, the support base 36 moves vertically along the guide rail 35a. The support base 36 and the lifting mechanism 35 are housed in the internal space 2a of the device body 2 (FIG. 1).

[0041] The cassette placing table 3 moves up and down together with the support table 36, and the cassette 10 placed on the cassette placing table 3 also moves up and down.

[0042] The cassette 10 is provided with a plurality of stages of placement shelves 10a on which the frame units U are placed, and the frame units U are slid onto and taken out of the placement shelves 10a through openings 10b.

[0043] 3(A) is a plan view showing a frame unit U housed in a cassette 10, with an annular frame F placed on a pair of mounting shelves 10a. The outer periphery of the annular frame F is configured to have a pair of first end faces Fa, Fa that are parallel to each other, and second end faces Fb, Fb that are perpendicular to the first end faces Fa, Fa in a plan view.

[0044] In the example of Figures 3(A) and (B), the second end faces Fb, Fb of the annular frame F are placed on the loading shelves 10a, 10a, respectively, and one of the first end faces Fa is located on the opening 10b side of the cassette 10, and the first end face Fa is clamped (held) by the clamping mechanism 61a of the first conveying mechanism 61.

[0045] As shown in FIG. 3A, the annular frame F is a member having a circular outer periphery indicated by the imaginary line K, and is provided with first end faces Fa, Fa and second end faces Fb, Fb. The distance between the first end faces Fa, Fa and the distance between the second end faces Fb, Fb are shorter than the diameter of the annular frame F. Ideally, the frame unit U is accommodated in the cassette 10 at an angle such that the second end faces Fb, Fb are parallel to the Y-axis direction (second direction). The frame unit U is designed to be pulled out toward the guide rail 51 ( FIG. 4A ) at this ideal angle so that the annular frame F does not interfere with the guide rail 51 or the cassette 10. The annular frame F is not limited to the configuration of this embodiment and may be a rectangular frame.

[0046] 3(C), the clamping mechanism 61a includes a pair of claws 61b, 61c and an actuator 61d that changes the distance between the pair of claws 61b, 61c. For example, the position of the lower claw 61c is fixed, and the upper claw 61b is moved up and down by the actuator 61d to clamp or release the annular frame F. A vertical wall surface between the pair of claws 61b, 61c of the actuator 61d functions as a contact portion 61m that comes into contact with the first end face Fa of the annular frame F, as will be described in detail later.

[0047] 4 and 5, a temporary placement mechanism 50 is disposed to the side of the cassette mounting table 3 in the Y-axis direction. The temporary placement mechanism 50 has a pair of guide rails 51 that are long in the Y-axis direction, and the pair of guide rails 51 are disposed with a gap therebetween in the X-axis direction. The gap Xw between the guide rails 51 in the X-axis direction is adjusted by a drive mechanism 52.

[0048] As shown in Figure 5(A), the guide rail 51 is approximately L-shaped in a cross section perpendicular to the longitudinal direction, and is composed of a mounting portion 51b on which the annular frame F is placed, and a guide surface 51a that rises from the mounting portion 51b and contacts the second end face Fb of the annular frame F.

[0049] As shown in Figures 4(B) and 5(A), the distance between the guide rails 51 in the X-axis direction is adjusted by the drive mechanism 52, and when the frame unit U is pulled out from the cassette and placed on the guide rails 51, each guide rail 51 is placed in a standby position, and the distance between the guide rails 51 in the X-axis direction is set wide.

[0050] 4(C) and 5(B), when the frame unit U is placed on the guide rails 51, if the drive mechanism 52 narrows the gap between the guide rails 51 in the X-axis direction, the second end faces Fb, Fb of the annular frame F come into contact with the guide surfaces 51a, 51a of the guide rails 51, 51, respectively, and the angle of the annular frame F is set to a specified angle. In other words, the angle is set so that the second end faces Fb, Fb of the annular frame F are parallel to the Y-axis direction. At this time, the center of the annular frame F (frame unit U) in the X-axis direction is also aligned.

[0051] Next, a processing method using the apparatus configured as above and performed according to the procedure shown in FIG. 6 will be described.

[0052] <Preparation steps> As shown in Figures 7(A) and 8(A), this is a step of preparing a conveying device (first conveying mechanism 61) having a contact portion 61m extending in a second direction (X-axis direction) perpendicular to the first direction (Y-axis direction), and a conveyed object (frame unit U) having a first end face Fa.

[0053] 8(C), the clamping mechanism 61a of the first conveying mechanism 61 includes an actuator 61d, and a vertical wall surface of the actuator 61d located between the pair of claws 61b, 61c defines a contact portion 61m that comes into contact with the first end face Fa of the annular frame F. The contact portion 61m is configured to form a surface parallel to the second direction (X-axis direction) in a plan view. Note that the contact portion 61m may be defined by the vertical wall surface of the actuator 61d, or may be defined by the vertical wall surface of another member attached to the clamping mechanism 61a.

[0054] Also, as shown in Figure 2, in the preparation step, the cassette loading table 3 is raised and lowered so that the height of the transported object (frame unit U) to be pulled out (height of the loading shelf 10a) matches the height of the loading portion 51b of the guide rail 51 (Figure 4(A)).

[0055] <Angle regulation step> As shown in Figures 7(B) and 8(B), this is a step in which the contact portion 61m presses the first end face Fa to set an angle so that the first end face Fa is parallel to the second direction (X-axis direction).

[0056] Specifically, as shown in Fig. 8(B), the clamp mechanism 61a is moved to bring the contact portion 61m into contact with the first end face Fa of the annular frame F, and by further pressing, the annular frame F is pushed deeper into the cassette 10, as shown in Fig. 7(B). At this time, if the angle of the first end face Fa of the annular frame F is misaligned with the angle of the contact portion 61m (X-axis direction), the annular frame F rotates so that the angle of the first end face Fa is aligned with the angle of the contact portion 61m, and the first end face Fa is set parallel to the second direction (X-axis direction).

[0057] Then, as the first end face Fa of the annular frame F becomes parallel to the second direction (X-axis direction), the second end faces Fb, Fb of the annular frame F become parallel to the first direction (Y-axis direction). In other words, the angle of the annular frame F (frame unit U) that was tilted and housed in the cassette 10 is corrected to an ideal angle.

[0058] <Export step> As shown in Figures 7(C) and 8(C), after the angle determination step, the conveying device (first conveying mechanism 61) pulls out the object to be conveyed (frame unit U) in the first direction (Y-axis direction) and places it on a pair of guide rails 51, 51.

[0059] Specifically, as shown in Fig. 8(C), the first end face Fa of the annular frame F is clamped by a pair of claws 61b, 61c of the clamping mechanism 61a, and the frame unit U is pulled out from the cassette 10. At this time, as shown in Fig. 7(C), the angle defining step causes the second end faces Fb, Fb of the annular frame F to be parallel to the first direction (Y-axis direction) and also to the guide rails 51, so that the second end face Fb of the annular frame F can be prevented from interfering with the guide surface 51a of the guide rail 51 or from scratching and scraping the guide surface 51a. This also prevents damage to the annular frame F and the guide rail 51, and the generation of foreign matter (metal powder) due to scratching.

[0060] 9 shows an example of the case where removal is performed without performing the angle regulation step, and illustrates how, when the angle of the annular frame F is left bent and the frame unit U is pulled out without being corrected, the annular frame F and the guide rails 51 interfere with each other at position P. Such interference can cause damage to the annular frame F and the guide rails 51, and can cause scratches that can generate foreign matter (metal powder).

[0061] <Export step> As shown in FIG. 1, this is a step in which workpiece W, which is a transported object (frame unit U) held by holding table 20, is machined.

[0062] Specifically, in the processing apparatus 1 shown in Fig. 1, the processing unit 30 cuts the workpiece W held on the holding table 20 along the planned division line. In the cutting process, the cutting blade 31a of the processing unit 30 is rotated at high speed while being positioned at a predetermined cutting height, and the holding table 20 is fed for processing, thereby forming a cutting groove. Note that although the processing apparatus 1 in Fig. 1 performs cutting, the present invention can also be applied to a laser processing apparatus that performs laser processing.

[0063] <Pre-withdrawal steps> As shown in FIGS. 10(A) to 10(C), this is a step before the angle regulation step in which the transport device (first transport mechanism 61) pulls out the transported object (frame unit U) in the first direction (Y-axis direction).

[0064] 10(A), for example, when the frame unit U is housed in a recessed position close to the inner wall surface 10c of the cassette 10 in the first direction (Y-axis direction), that is, the inner wall surface 10c on the opposite side of the opening 10b, there is a concern that by performing this pre-pulling step, when the frame unit U is pressed in the angle regulating step, a sufficient movement distance of the frame unit U cannot be secured, causing the frame unit U to not rotate sufficiently and not be corrected to an ideal angle. In other words, there is a concern that the frame unit U may hit the inner wall surface 10c and be unable to rotate.

[0065] 10(A) and 10(B), the first end face Fa of the annular frame F, whose angle has not been corrected, is clamped by the clamping mechanism 61a and pulled out a predetermined distance in the first direction (Y-axis direction) to move the frame unit U away from the inner wall surface 10c. Next, as in the angle specifying step, as shown in FIG. 10(C), with the clamping by the clamping mechanism 61a released, the frame unit U is pushed toward the inner wall surface 10c, and the frame unit U is rotated to correct the angle.

[0066] The predetermined distance when pulled out in the pre-pulling step is set to, for example, half the diameter of the annular frame F.

[0067] According to the embodiment described above, as shown in Figures 7(A) to (C), the angle of the transported object (frame unit U) can be corrected to an ideal angle before being transported to the guide rail 51, thereby preventing damage to the annular frame F and guide rail 51, and further preventing the generation of foreign matter (metal powder) from the annular frame F and guide rail 51 due to scratches.

[0068] In addition, damage to the cassette can be prevented by suppressing interference between the inner wall surface 10d of the cassette 10, which is parallel to the mounting shelf 10a, and the annular frame F. The inner wall surface 10d of the cassette 10 is assumed to be parallel to the first direction (Y-axis direction).

[0069] Furthermore, by performing the pre-pulling step, the transported object (frame unit U) is pulled out from the cassette 10 by a predetermined distance in advance, so that the transported object (frame unit U) can be more reliably corrected to the ideal angle during the angle determination step.

[0070] The processing device to which the present invention is applied is not limited to a cutting device as long as it has a cassette table and guide rails, and may be, for example, a laser processing device or a water jet processing device. [Explanation of symbols]

[0071] 1 Cutting equipment 2. Device body 3 Cassette stand 10 cassettes 10a Storage shelf 10b opening 10c Inner wall surface 20 Holding table 30 processing units 32 Cassette placement mechanism 35 Lifting mechanism 36 Support stand 40 Cleaning and drying mechanism 50 Temporary placement mechanism 51 Guide rail 51a Guide surface 51b Placement part 52 Drive mechanism 60 Conveyor mechanism 61 First conveying mechanism 61a Clamping mechanism 61b Claw part 61c Claw part 61d Actuator 62 Second conveying mechanism 100 Controllers Front annular frame Fa end face T-tape U Frame Unit W Workpiece

Claims

1. A conveying method for conveying an object to be conveyed by a conveying device along a pair of guide rails extending in a first direction, the conveying device has a contact portion extending in the second direction perpendicular to the first direction, and an angle determination step of pressing a first end surface of the conveyed object with the contact portion and determining an angle so that the first end surface is parallel to the second direction; and a carrying-out step of pulling out the object to be transported in the first direction by the transport device and placing it on the pair of guide rails after the angle specifying step.

2. The method further includes a pre-pulling step of pulling the object in the first direction by the conveying device before the angle defining step.

2. The method of claim 1.

3. A conveying device for conveying an object in a first direction relative to a pair of guide rails extending in a first direction, The conveying device includes a contact portion extending in the second direction perpendicular to the first direction; a clamping mechanism that clamps the transported object; a moving mechanism that moves the clamping mechanism in the first direction, an angle setting step of pressing a first end surface of the object with the contact portion and setting an angle of the first end surface so that the first end surface is parallel to the second direction; After the angle determination step, the conveying device performs a carry-out step of clamping the conveyed object with the clamping mechanism and pulling it out in the first direction with the moving mechanism to place it on the pair of guide rails.

4. a pre-pulling step of pulling the object in the first direction by the conveying device before the angle defining step; 4. The conveying device according to claim 3.

5. a preparation step of preparing a conveying device having a contact portion extending in a second direction perpendicular to the first direction, and a conveyed object having a first end surface; an angle determination step of pressing the first end surface of the object with the contact portion to determine an angle so that the first end surface is parallel to the second direction; a carrying-out step of pulling out the object in the first direction by the conveying device after the angle determination step and placing the object on a pair of guide rails; a conveying step of conveying the conveyed object from the pair of guide rails to a holding table; a processing step of processing the transported object held by the holding table.

6. a pre-pulling step of pulling the object in the first direction by the conveying device before the angle defining step; The processing method according to claim 5 .

7. a cassette placement table on which a cassette containing a plurality of transported objects is placed, the cassette placement table being configured to position the transported objects at the same height as the pair of guide rails; a temporary placement mechanism having the pair of guide rails and abutting the pair of guide rails against a second end surface of the transported object to adjust the transported object to a specified angle; a conveying device that carries out the transported object to the temporary placement mechanism so as to place the transported object on the pair of guide rails, and transports the transported object, whose angle has been adjusted by the temporary placement mechanism, onto a holding table; a processing unit that processes the transported object held by the holding table; A controller; A processing device having: The conveying device includes a contact portion extending in the second direction perpendicular to the first direction; a clamping mechanism that clamps the transported object; a moving mechanism that moves the clamping mechanism in the first direction, The controller an angle setting step of pressing a first end surface of the object with the contact portion and setting an angle of the first end surface so that the first end surface is parallel to the second direction; After the angle determination step, a carrying-out step is performed in which the object to be conveyed is clamped by the clamping mechanism, and the object is pulled out in the first direction by the moving mechanism and placed on a pair of guide rails. Processing equipment.

8. The controller a pre-pulling step of pulling the object in the first direction by the conveying device before the angle defining step; 8. The processing device according to claim 7.

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