Workpiece machining apparatus and method for manufacturing the same

Abstract

To provide a workpiece machining apparatus capable of accurately machining a peripheral part of a workpiece into a target shape, and a method for manufacturing the same.SOLUTION: A target track of a rotary-driving unit 4 with respect to a support 2 during machining of a workpiece W is determined on the basis of a target machining size of the workpiece W and outer diameters of grindstones 3a and 3b stored in a storage device. The grindstones 3a and 3b are rotated by the rotary-driving unit 4 while moving the support 2 and the rotary-driving unit 4 relative to each other along the target track by a moving device 5. A peripheral part of the workpiece W is machined by outer peripheral parts of the grindstones 3a and 3b; measurement values of the outer diameters of the grindstones 3a and 3b are calculated on the basis of the size and the target machining size of the machined workpiece W measured by a measurement unit 6; and the outer diameters of the grindstones 3a and 3b stored in the storage device are updated to the calculated measurement values of the outer diameters of the grindstones 3a and 3b.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a workpiece machining device and a method for manufacturing a workpiece machining device. [Background technology]

[0002] Plate-shaped workpieces such as semiconductor device wafers are sometimes chamfered to a predetermined shape by grinding their peripheral edges with a grinding wheel. In this chamfering process, in order to accurately machine the peripheral edge of the workpiece into a target shape, a technique has been proposed in which the outer diameter and the shape of the peripheral edge of a test-machined workpiece are measured, the relative position of the grinding wheel with respect to the workpiece is corrected based on the measurement results, and then the workpiece is ground to the target outer diameter and the target peripheral shape (see, for example, Patent Document 1 listed below). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2014-117782 Summary of the Invention [Problem to be solved by the invention]

[0004] However, if the outer diameter of the grinding wheel stored in the workpiece processing device differs from the actual outer diameter, and the relative position of the grinding wheel to the workpiece is corrected based on the measurement results of a trial-processed workpiece, it becomes difficult to accurately control the contact position between the grinding wheel and the workpiece, for example, when processing the peripheral edge of the workpiece into an arc shape.

[0005] The applicant discovered that when a workpiece is continuously ground with a grinding wheel, not only does the outer diameter of the grinding wheel decrease due to wear, but the grinding wheel also increases in diameter as it absorbs grinding fluid. In other words, the applicant discovered that it is important to obtain the accurate outer diameter of the grinding wheel and determine the relative movement trajectory of the grinding wheel with respect to the workpiece based on the obtained outer diameter of the grinding wheel not only when the cumulative value of the time the grinding wheel has been grinding the workpiece is large but also when that cumulative value is small. [Means for solving the problem]

[0006] The present invention includes the embodiments shown below.

[0007] [1] A method for grinding a peripheral portion of a workpiece, comprising: a support unit for supporting a plate-shaped workpiece; a disk-shaped grinding wheel for grinding the peripheral portion of the workpiece; a rotation drive unit for rotating the grinding wheel while supporting it; a moving device for relatively moving the support unit and the rotation drive unit; a measuring unit for measuring the dimensions of the machined workpiece; a storage device for storing the target machining dimensions of the workpiece and the outer diameter of the grinding wheel; and a control unit for controlling the rotation drive unit and the moving device, wherein the control unit determines the position of the workpiece relative to the support unit during machining based on the target machining dimensions of the workpiece and the outer diameter of the grinding wheel stored in the storage device. a processing process in which the rotational drive unit rotates the grinding wheel while the moving device moves the support unit and the rotational drive unit relatively along the target trajectory, and the peripheral portion of the workpiece is processed by the outer periphery of the grinding wheel; an outer diameter calculation process in which the outer diameter of the grinding wheel is calculated based on the dimensions of the processed workpiece measured by the measuring unit and the target processing dimensions; and an update process in which the outer diameter of the grinding wheel stored in the storage device is updated to the outer diameter of the grinding wheel calculated by the outer diameter calculation process.

[0008] [2] The workpiece processing device described in [1] above, wherein the outer diameter calculation process calculates the outer diameter of the grinding wheel based on the outer diameter of the processed workpiece measured by the measuring unit and the target processing dimension of the outer diameter of the workpiece.

[0009] [3] The workpiece processing device described in [1] above, wherein the processing process processes the peripheral portion of the workpiece using the outer periphery of the grinding wheel to form an arc-shaped curved surface on the peripheral portion of the workpiece that becomes thinner as it approaches the periphery of the workpiece, and the outer diameter calculation process calculates the outer diameter of the grinding wheel based on the radius of curvature of the arc surface of the processed workpiece measured by the measuring unit and the target processing dimension of the radius of curvature of the arc surface.

[0010] [4] The grinding wheel includes a first grinding wheel that grinds a peripheral portion of one side of the workpiece to form a first arc-shaped curved surface that becomes thinner as it approaches the peripheral edge of the workpiece, and a second grinding wheel that grinds a peripheral portion of the other side of the workpiece to form a second arc-shaped curved surface that becomes thinner as it approaches the peripheral edge of the workpiece, and the outer diameter calculation process includes calculating a target machining dimension of the curvature radius of the first arc-shaped surface and a predetermined value based on the curvature radius of the first arc-shaped surface of the machined workpiece measured by the measuring unit. The workpiece machining device described in [3] above, wherein the outer diameter of the first grinding wheel is calculated, and the outer diameter of the second grinding wheel is calculated based on the target machining dimension of the radius of curvature of the second arc surface and the radius of curvature of the second arc surface of the machined workpiece measured by the measuring unit, and the update process updates the outer diameter of the first grinding wheel stored in the storage device to the outer diameter of the first grinding wheel calculated by the outer diameter calculation process, and updates the outer diameter of the second grinding wheel stored in the storage device to the outer diameter of the second grinding wheel calculated by the outer diameter calculation process.

[0011] [5] A workpiece machining device described in any one of [1] to [4] above, wherein, when the outer diameter of the grinding wheel calculated by the outer diameter calculation process is larger than the outer diameter of the grinding wheel stored in the memory device, the update process updates the outer diameter of the grinding wheel stored in the memory device to the outer diameter of the grinding wheel calculated by the outer diameter calculation process.

[0012] [6] A machine tool comprising: a support part for supporting a plate-shaped workpiece; a disk-shaped grinding wheel for grinding the peripheral portion of the workpiece; a rotational drive part for rotating the grinding wheel while supporting it; a moving device for relatively moving the support part and the rotational drive part; a storage device for storing the target machining dimensions of the workpiece and the outer diameter of the grinding wheel; and a control part for controlling the rotational drive part and the moving device, wherein the control part performs a position determination process for determining a target trajectory of the rotational drive part relative to the support part when machining the workpiece, based on the target machining dimensions of the workpiece and the outer diameter of the grinding wheel stored in the storage device; and a processing process for rotating the grinding wheel by the rotational drive part while moving the support part and the rotational drive part relatively along the target trajectory using the moving device, and machining the peripheral portion of the workpiece with the outer periphery of the grinding wheel. a measurement step of measuring the radius of curvature of the arcuate surface formed in the temporary machining step; an outer diameter calculation step of calculating the outer diameter of the grinding wheel based on the measurement value of the radius of curvature of the arcuate surface measured in the measurement step and the temporary machining dimension of the radius of curvature of the arcuate surface; and an adjustment step of adjusting the position of at least one of the support part and the rotational drive part based on the outer diameter of the grinding wheel calculated in the outer diameter calculation step. [Effects of the Invention]

[0013] According to the present invention, the peripheral edge of the workpiece can be machined into a desired shape with high precision. [Brief explanation of the drawings]

[0014] [Figure 1] FIG. 1 is a plan view showing a schematic configuration of a workpiece machining device according to an embodiment of the present invention; [Figure 2]FIG. 1 is a side view showing a schematic configuration of a support unit, a rotation drive unit, and a moving device in a workpiece processing device. [Figure 3] Block diagram showing the configuration of the workpiece processing device [Figure 4] Cross-section of the workpiece edge after chamfering [Figure 5] A side view showing a workpiece and a grinding wheel supported by a support portion during chamfering. [Figure 6] A plan view of the support unit and rotation drive unit showing the workpiece in contact with the grinding wheel. [Figure 7] Flow diagram showing the operation of the workpiece processing device of FIG. DETAILED DESCRIPTION OF THE INVENTION

[0015] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0016] (1) Configuration of workpiece processing device 1 The configuration of a workpiece processing apparatus 1 according to this embodiment will be described with reference to Figures 1 to 3. The workpiece processing apparatus 1 is an apparatus that chamfers the peripheral edge of a plate-shaped workpiece W, such as a semiconductor device wafer, into a predetermined shape using grindstones 3a and 3b.

[0017] In this embodiment, the workpiece processing device 1 grinds the peripheral portion of the workpiece W using grinding wheels 3a and 3b, thereby forming, on the peripheral portion of the workpiece W, an upper inclined surface Wa1 inclined at an angle θ1 with respect to the upper plane W1 of the workpiece W, a peripheral end surface Wb that forms the end face of the peripheral portion of the workpiece W and is perpendicular to the upper plane W1 and the lower plane W2, an upper arcuate surface Wc1 that smoothly connects between the upper inclined surface Wa1 and the peripheral end surface Wb, a lower inclined surface Wa2 inclined at an angle θ2 with respect to the lower plane W2, and an arcuate surface Wc2 that smoothly connects between the lower inclined surface Wa2 and the peripheral end surface Wb, as illustrated in Figure 4.

[0018] The workpiece processing device 1 comprises a support part 2 that supports the workpiece W, grinding wheels 3a, 3b that grind the peripheral part of the workpiece W, a rotational drive part 4 that rotates the grinding wheels 3a, 3b while supporting them, a moving device 5 that moves the support part 2 and the rotational drive part 4 relatively, a measuring part 6 that measures the dimensions of the workpiece W, and a control device 7 that controls the operation of the workpiece processing device 1, and performs chamfering on the unmachined workpiece W that has been loaded into the support part 2 by a loading device 15, and the processed workpiece W is loaded out of the support part 2 by a loading device 16.

[0019] Specifically, the support unit 2 includes a stage 21 on which an unmachined workpiece W is placed, a suction device 22 (see FIG. 3) that vacuum-sucks the workpiece W placed on the stage 21, and a rotation device 23 that rotates the workpiece W together with the stage 21. In the support unit 2, the unmachined workpiece W before its peripheral edge is ground is transported to the stage 21 by a carry-in device 15.

[0020] 1, the loading device 15 is provided with a holder 15a that suction-holds the unmachined workpiece W, and an alignment sensor 15b. The alignment sensor 15b detects the outer diameter of the unmachined workpiece W held by the holder 15a, the center position of the workpiece W, and the positions of the orientation flat and notch.

[0021] Based on the detection results of the alignment sensor 15b, the loading device 15 rotates the unmachined workpiece W so that the orientation flat and notch of the workpiece W are located at a predetermined position around the circumference of the workpiece W, and then centers the workpiece W so that its center coincides with the center of rotation of the stage 21, and places the workpiece W on the upper surface of the stage 21.

[0022] In this embodiment, the alignment sensor 15b is provided in the carry-in device 15, but the alignment sensor may be provided separately from the carry-in device 15, for example, by providing the alignment sensor on an alignment table provided separately from the support unit 2.

[0023] When an alignment table such as the one described above is provided, the unmachined workpiece W is loaded onto the alignment table before being loaded into the support unit 2, and the workpiece W is rotated together with the alignment table while being held by suction on the alignment table. The alignment sensor then measures the distance from the center of rotation of the alignment table to the edge of the workpiece W as it rotates, thereby obtaining information such as the amount and direction of eccentricity of the workpiece W, as well as the orientation of the orientation flat and notch. Based on this information, the loading device 15 transfers the workpiece W from the alignment table to the support unit 2 so that the center of the workpiece W coincides with the center of rotation of the stage 21.

[0024] The stage 21 is formed with a smaller diameter than the workpiece W, and when the workpiece W is centered and placed on the stage 21, the peripheral edge of the workpiece W protrudes outward beyond the stage 21. The workpiece W placed on the stage 21 is vacuum-adsorbed by a suction device 22 and fixed onto the stage 21.

[0025] The rotation device 23 rotates the workpiece W, which is vacuum-adsorbed onto the stage 21, together with the stage 21 around an axis extending in the vertical direction during chamfering of the workpiece W. This allows the grinding wheels 3a, 3b to chamfer the entire peripheral edge of the workpiece W placed on the stage 21.

[0026] In the workpiece processing device 1 of this embodiment, a thickness sensor 15c may be provided in the carry-in device 15 to detect the thickness of the unmachined workpiece W held by the holding part 15a, or a thickness sensor may be provided in the support part 2 to detect the thickness of the unmachined workpiece W held by the support part 2. Furthermore, when an alignment table as described above is provided, the thickness sensor provided in the alignment table may detect the thickness of the workpiece W held on the alignment table.

[0027] The grinding wheels 3a, 3b are made of disc-shaped resin-bonded grinding wheels, vitrified-bonded grinding wheels, or the like. As shown in FIGS. 1 and 2, in this embodiment, the pair of grinding wheels 3a, 3b are arranged so that their disk surfaces are close to each other and face each other. The pair of grinding wheels 3a, 3b are connected to rotation shafts 42a, 42a of a pair of spindle motors 41a, 41b, respectively. In this embodiment, the pair of grinding wheels 3a, 3b are arranged so that their disk surfaces are close to each other and face each other, while being offset by a predetermined angle φ1, φ2 (e.g., 0° to 0.6°) in the circumferential direction of the workpiece W with respect to the direction in which the stage 21 moves (see FIG. 6).

[0028] One grinding wheel (first grinding wheel) 3a performs chamfering by grinding the upper side of the thickness center C of the peripheral edge of the workpiece W, that is, the upper slope Wa1, the upper arcuate surface Wc1, and the upper part of the thickness center C of the peripheral end face Wb of the workpiece W. The other grinding wheel (second grinding wheel) 3b performs chamfering by grinding the lower side of the thickness center C of the peripheral edge of the workpiece W, that is, the lower slope Wa2, the arcuate surface Wc2, and the lower part of the thickness center C of the peripheral end face Wb of the workpiece W.

[0029] 2 denotes a supply nozzle that supplies grinding fluid to the grinding wheels 3a and 3b. At least while the grinding wheels 3a and 3b are grinding the peripheral portion of the workpiece W, the grinding fluid is supplied from the supply nozzle 31 to the grinding wheels 3a and 3b.

[0030] The pair of spindle motors 41a, 41b constitute the rotation drive unit 4, and the rotation shafts 42a, 42b are arranged in the horizontal direction. The pair of spindle motors 41a, 41b rotate the pair of grinding wheels 3a, 3b in opposite directions around the rotation shafts 42a, 42b extending in the horizontal direction. The pair of grinding wheels 3a, 3b rotating around the rotation shafts 42a, 42b are pressed against the peripheral edge of the workpiece W rotating together with the stage 21, and chamfer the entire peripheral edge of the workpiece W placed on the stage 21.

[0031] The moving device 5 includes a stage moving device 51 that moves the stage 21 of the support unit 2 toward and away from the rotation drive unit 4, and a grindstone moving device 52 that moves the rotation drive unit 4 up and down.

[0032] The stage moving device 51 is composed of a rail or a ball screw, etc., and moves the workpiece W placed on the stage 21 together with the stage 21 in a predetermined direction X, moving it closer to or away from the grinding wheels 3a, 3b provided on the rotation drive unit 4.

[0033] The grindstone moving device 52 moves the entire rotation drive unit 4 in the vertical direction Z. Specifically, it includes a first grindstone moving device 53 that moves the pair of spindle motors 41a, 41b in the vertical direction Z in synchronization with each other, and a pair of second grindstone moving devices 54a, 54b that separately move the pair of spindle motors 41a, 41b that make up the rotation drive unit 4 in the vertical direction Z. Note that the first grindstone moving device 53 may not be provided, and the grindstone moving device 52 may be formed from the pair of second grindstone moving devices 54a, 54b.

[0034] The moving device 5 moves the support part 2 and the rotation shafts 42a, 42b of the spindle motors 41a, 41b (i.e., the rotation shafts of the grinding wheels 3a, 3b) relatively along a first target trajectory and a second target trajectory, which will be described later. As shown in Fig. 5, the moving device 5 arranges a pair of grinding wheels 3a, 3b at different heights so as to sandwich the peripheral edge of the workpiece W from above and below, with the first grinding wheel 3a chamfering the peripheral edge on the upper flat surface W1 side and the second grinding wheel 3b chamfering the peripheral edge on the lower flat surface W2 side.

[0035] The measuring unit 6 measures various dimensions of the processed workpiece W, the peripheral portion of which has been ground by the grinding wheels 3a and 3b. Specifically, the measuring unit 6 includes an outer diameter measuring unit 61 that measures the outer diameter of the processed workpiece W, and a cross-section measuring unit 62 that measures the cross-sectional shape of the peripheral portion of the workpiece W at any position.

[0036] The outer diameter measuring unit 61 is composed of, for example, a projection image measuring device that includes a light-emitting unit arranged above or below the workpiece W and a light-receiving unit arranged on the other side. The outer diameter measuring unit 61 measures the outer diameter of the workpiece W at any position on the periphery of the workpiece W, that is, the length of a straight line connecting two points on the peripheral end surface Wb that passes through the center of the workpiece W, by detecting using the light-receiving unit whether or not the laser light irradiated from the light-emitting unit is blocked by the workpiece W. In addition to the projection image measuring device described above, the outer diameter measuring unit 61 may also be a linear cage that detects the outer diameter of the workpiece W by contacting the workpiece W so as to sandwich it and detecting the presence or absence of the workpiece W, or the outer diameter of the workpiece may be obtained by various sensors.

[0037] The cross-section measuring unit 62 is composed of an edge / notch shape measuring device that includes an illumination unit 62a that irradiates the peripheral edge of the workpiece W with parallel light that is parallel to the upper plane W1 and the lower plane W2 of the workpiece W, and an imaging unit 62b that images the light irradiated from the illumination unit 62a at a position ahead of the workpiece W in the direction of travel of the light. The cross-section measuring unit 62 measures the cross-sectional shape at an arbitrary position on the peripheral edge of the workpiece W by having the imaging unit 62b image the light that has passed through the workpiece W without being blocked by the workpiece W, out of the parallel light irradiated onto the peripheral edge of the workpiece W from the illumination unit 62a. In addition to the edge / notch shape measuring device described above, the cross-section measuring unit 62 may measure the cross-sectional shape at an arbitrary position on the peripheral edge of the workpiece W using various sensors.

[0038] The measuring unit 6 outputs the measurement results from the outer diameter measuring unit 61 and the cross section measuring unit 62 to the control device 7. The measuring unit 6 and the control device 7 may be connected wirelessly or by wire.

[0039] In this embodiment, the carrying-out device 16 that carries out the chamfered workpiece W from the stage 21 is provided with the measuring unit 6, the cleaning device 10, and the drying device 11 as described above.

[0040] After the workpiece W has been chamfered, the cleaning device 10 sprays cleaning liquid onto the workpiece W and the stage 21 with the carry-out device 16 positioned above the support part 2 to clean the workpiece W and the stage 21. The drying device 11 dries the cleaned workpiece W and the stage 21 by blowing air onto them with the cleaning liquid. After the cleaning device 10 and the drying device 11 have cleaned and dried the workpiece W and the stage 21, the carry-out device 16 carries the machined workpiece W out of the support part 2.

[0041] The measuring unit 6, the cleaning device 10, and the drying device 11 may be provided separately from the carrying-out device 16.

[0042] 3, the control device 7 has a processing device 71 such as a computer, and a storage device 72 such as a memory. The processing device 71 reads and executes a control program stored in the storage device 72, whereby the control device 7 controls the operations of the support unit 2, the rotation drive unit 4, the moving device 5, the measuring unit 6, the carry-in device 15, and the carry-out device 16, and also functions as a position determination processing unit 73, an outer diameter calculation processing unit 74, and an update processing unit 75.

[0043] The measurement unit 6 may be configured as a computer independent of the control unit 7. When the measurement unit 6 is configured as a computer separate from the control unit 7, the measurement results of the measurement unit 6 may be transmitted to the control unit 7 via communication, or the user may manually input the measurement results of the measurement unit 6 into the control unit 7.

[0044] The memory device 72 stores, together with the control program, target processing dimensions, which are various dimensions of the target shape to be formed on the periphery of the workpiece W by chamfering, outer diameter dimensions DTa and DTb of the grinding wheels 3a and 3b, and an inter-axis distance L in the X direction from the rotation center of the stage 21 to the rotation axes 42a and 42b of the spindle motors 41a and 41b (see FIG. 2).

[0045] Referring to Figures 4 and 5, examples of dimensions stored in the memory device 72 as target machining dimensions include the outer diameter DW of the workpiece W, the width (radial length) A1 of the chamfering area on the peripheral edge of the upper flat surface W1 of the workpiece W, the width (radial length) A2 of the chamfering area on the peripheral edge of the lower flat surface W2 of the workpiece W, the inclination angle θ1 of the acute side of the upper slope Wa1 relative to the upper flat surface W1, the inclination angle θ2 of the acute side of the lower slope Wa2 relative to the lower flat surface W2, the radius of curvature R1 of the upper arcuate surface Wc1, the radius of curvature R2 of the arcuate surface Wc2, the length B of the peripheral end surface Wb in the vertical direction Z, and the thickness T of the workpiece W.

[0046] The position determination processing unit 73 determines the target trajectory of the rotation drive unit 4 relative to the support unit 2 when processing the workpiece W based on the target processing dimensions stored in the memory device 72, the outer diameter dimensions DTa and DTb of the grinding wheels 3a and 3b, and the center distance L.

[0047] Specifically, the position determination processing unit 73 determines the target shape of the peripheral portion of the workpiece W based on the target processing dimensions stored in the memory device 72, sets a target trajectory for the first grinding wheel 3a (hereinafter, this target trajectory may also be referred to as the first target trajectory) at a position that is half the outer diameter of the first grinding wheel 3a away from the upper side of the thickness center C of the target shape, and sets a target trajectory for the second grinding wheel 3b (hereinafter, this target trajectory may also be referred to as the second target trajectory) at a position that is half the outer diameter of the second grinding wheel 3b away from the lower side of the thickness center C of the target shape.

[0048] The outer diameter calculation processing unit 74 obtains the measured value DTam of the outer diameter of the first grinding wheel 3a based on the measured value R1m of the radius of curvature R1 of the upper arc surface Wc1 of the machined workpiece W measured by the measuring unit 6, the target processing dimension R1s of the radius of curvature R1 of the upper arc surface Wc1 stored in the memory device 72, and the outer diameter dimension DTa of the first grinding wheel 3a stored in the memory device 72.

[0049] In addition, the outer diameter calculation processing unit 74 acquires the measurement value DTbm of the outer diameter of the second grinding wheel 3b based on the measurement value R2m of the radius of curvature R2 of the lower arc surface Wc2 of the machined workpiece W measured by the measuring unit 6, the target processing dimension R2s of the radius of curvature R2 of the lower arc surface Wc2 stored in the memory device 72, and the outer diameter dimension DTb of the second grinding wheel 3b stored in the memory device 72.

[0050] When the outer diameter calculation processing unit 74 acquires the measured outer diameter values ​​DTam, DTbm of the grinding wheels 3a, 3b, the update processing unit 75 updates the outer diameter dimensions DTa, DTb of the grinding wheels 3a, 3b stored in the memory device 72 to the measured values ​​DTam, DTbm calculated by the outer diameter calculation processing unit 74, and stores the measured outer diameter values ​​DTam, DTbm of the grinding wheels 3a, 3b in the memory device 72 as the new outer diameter dimensions DTa, DTb of the grinding wheels 3a, 3b.

[0051] When the outer diameter dimensions DTa, DTb of the grinding wheels 3a, 3b are updated to the measured outer diameter values ​​DTam, DTbm of the grinding wheels 3a, 3b calculated by the outer diameter calculation processing unit 74, the position determination processing unit 73 determines a first modified target trajectory obtained by modifying the first target trajectory and a second modified target trajectory obtained by modifying the second target trajectory based on the updated outer diameter dimensions DTam, DTbm of the grinding wheels 3a, 3b and the target machining dimensions of the workpiece W stored in the memory device 72.

[0052] Then, the update processing unit 75 updates the first target trajectory and the second target trajectory stored in the memory device 72 to the first corrected target trajectory and the second corrected target trajectory determined by the position determination processing unit 73, and stores the first corrected target trajectory and the second corrected target trajectory in the memory device 72 as new first target trajectory and second target trajectory.

[0053] (2) Operation of the workpiece processing device 1 Next, a method for chamfering a workpiece W using the workpiece processing apparatus 1 will be described mainly with reference to the flow chart of Fig. 7. The following operations of the workpiece processing apparatus 1 are controlled by the control device 7.

[0054] First, in step S1, the carrying-in device 15 has the holding unit 15a hold the unmachined workpiece W, and the alignment sensor 15b detects the outer diameter of the unmachined workpiece W, the center position of the workpiece W, and the positions of the orientation flat and notch. Then, based on the detection results of the alignment sensor 15b, the carrying-in device 15 rotates the workpiece W so that the orientation flat and notch of the unmachined workpiece W are in desired positions, and centers the workpiece W before placing it on the upper surface of the stage 21.

[0055] Next, in step S2, the workpiece processing device 1 chamfers the peripheral edge of the unprocessed workpiece W placed on the stage 21 of the support part 2 using the grindstones 3a and 3b.

[0056] Specifically, the grinding wheels 3a and 3b are rotated by spindle motors 41a and 41b that constitute the rotation drive unit 4. After the suction device 22 vacuum-sucks the unmachined workpiece W placed on the upper surface of the stage 21, the rotation device 23 rotates the workpiece W together with the stage 21.

[0057] Then, the stage moving device 51 and grindstone moving device 52 that constitute the moving device 5 move the support part 2 and the rotation shaft 42a of the spindle motor 41a relatively along a first target trajectory, and the peripheral part of the rotating first grindstone 3a grinds the peripheral part of the upper flat surface side of the workpiece W to perform chamfering. Also, the support part 2 and the rotation shaft 42b of the spindle motor 41b move relatively along a second target trajectory, and the peripheral part of the rotating second grindstone 3b grinds the peripheral part of the lower flat surface side of the workpiece W to perform chamfering.

[0058] When the chamfering is completed, the unloading device 16 holds the workpiece W after the chamfering, and the cleaning device 10 and drying device 11 clean and dry the workpiece W and stage 21. Then, in step S3, the outer diameter measuring unit 61 and cross-section measuring unit 62 of the measuring unit 6 measure the outer diameter DW of the workpiece W, the radius of curvature R1 of the upper arcuate surface Wc1, the radius of curvature R2 of the lower arcuate surface Wc2, the chamfered widths A1 and A2, the inclination angles θ1 and θ2, and the vertical length B of the peripheral end surface Wb of the workpiece W after the chamfering.

[0059] It is preferable that the dimensions of the machined workpiece W be measured at a plurality of locations spaced apart in the circumferential direction of the workpiece W.

[0060] Next, in step S4, the outer diameter calculation processing unit 74 calculates the measured outer diameter values ​​DTam and DTbm of the grinding wheels 3a and 3b based on the dimensions of the machined workpiece W measured by the measuring unit 6 and the target machining dimensions using the following equations (1) and (2).

[0061] DTam=DTa+2×(R1s-R1m) Equation (1) DTbm=DTb+2×(R2s-R2m) Equation (2) In the above equations (1) and (2), DTa is the outer diameter of the first grinding wheel 3a stored in the memory device 72, DTb is the outer diameter of the second grinding wheel 3b stored in the memory device 72, R1m is the measured value of the radius of curvature R1 of the upper arc surface Wc1 provided on the machined workpiece W, R2m is the measured value of the radius of curvature R2 of the lower arc surface Wc2 provided on the machined workpiece W, R1s is the target machining dimension of the radius of curvature R1 of the upper arc surface Wc1 of the workpiece W stored in the memory device 72, and R2s is the target machining dimension of the radius of curvature R2 of the lower arc surface Wc2 of the workpiece W stored in the memory device 72.

[0062] In addition, in step S3, if the radius of curvature R1 of the upper arcuate surface Wc1 and the radius of curvature R2 of the lower arcuate surface Wc2 are measured at multiple locations on the workpiece W, the average value of the multiple measurement results may be used as the measured value R1m of the radius of curvature R1 of the upper arcuate surface Wc1 and the measured value R2m of the radius of curvature R2 of the lower arcuate surface Wc2.

[0063] Next, in step S5, the update processing unit 75 updates the outer diameter DTa of the first grinding wheel 3a stored in the memory device 72 to the measured value DTam of the outer diameter of the first grinding wheel 3a calculated by the outer diameter calculation processing unit 74, updates the outer diameter DTb of the second grinding wheel 3b stored in the memory device 72 to the measured value DTbm of the outer diameter of the second grinding wheel 3b calculated by the outer diameter calculation processing unit 74, and stores the measured values ​​DTam and DTbm in the memory device 72 as the new outer diameters of the grinding wheels 3a and 3b.

[0064] In other words, if the measured outer diameters DTam, DTbm of the grinding wheels 3a, 3b calculated by the outer diameter calculation processing unit 74 are larger than the outer diameters DTa, DTb of the grinding wheels 3a, 3b stored in the memory device 72, the grinding wheels 3a, 3b have expanded due to the inclusion of grinding fluid, so in step S5, the update processing unit 75 updates the outer diameters DTa, DTb of the grinding wheels 3a, 3b stored in the memory device 72 to the measured outer diameters DTam, DTbm of the grinding wheels 3a, 3b calculated by the outer diameter calculation processing unit 74.

[0065] Furthermore, if the measured outer diameters DTam, DTbm of the grinding wheels 3a, 3b calculated by the outer diameter calculation processing unit 74 are smaller than the outer diameters DTa, DTb of the grinding wheels 3a, 3b stored in the memory device 72, this means that the grinding wheels 3a, 3b have become smaller due to wear, so in step S5, the update processing unit 75 updates the outer diameters DTa, DTb of the grinding wheels 3a, 3b stored in the memory device 72 to the measured outer diameters DTam, DTbm of the grinding wheels 3a, 3b calculated by the outer diameter calculation processing unit 74, and stores the measured values ​​DTam, DTbm in the memory device 72 as the new outer diameters DTa, DTb of the grinding wheels 3a, 3b.

[0066] Next, in step S6, the position determination processing unit 73 determines a first modified target trajectory obtained by modifying the first target trajectory and a second modified target trajectory obtained by modifying the second target trajectory based on the outer diameters DTa and DTb of the grinding wheels 3a and 3b updated to the measurement values ​​DTam and DTbm, and the target machining dimensions of the outer diameter of the workpiece W stored in the memory device 72.

[0067] Next, in step S7, the update processing unit 75 updates the first target trajectory and the second target trajectory stored in the memory device 72 to the first modified target trajectory and the second modified target trajectory determined by the position determination processing unit 73, stores the first modified target trajectory and the second modified target trajectory in the memory device 72 as new first target trajectory and second target trajectory, and then terminates the current processing.

[0068] As a result, when the workpiece W is next chamfered, the workpiece W is ground by moving the support part 2 and the rotation drive part 4 relatively along the first modified target trajectory and the second modified target trajectory stored in the memory device 72 as new first target trajectory and second target trajectory.

[0069] The series of processes from step S1 to step S7 described above may be performed every time after the workpiece W is chamfered, or may be performed every time a predetermined number of workpieces W are chamfered.

[0070] (3) Manufacturing method of workpiece processing device 1 Next, a method for manufacturing the above-mentioned workpiece machining device 1 will be described.

[0071] To manufacture the workpiece processing device 1, first, as shown in Figure 1, the support unit 2, grinding wheels 3a, 3b, rotation drive unit 4, moving device 5, measuring unit 6, loading device 15 and unloading device 16 are provided, and the support unit 2, rotation drive unit 4, moving device 5, measuring unit 6, loading device 15 and unloading device 16 are controllably connected to the control device 7 to assemble the workpiece processing device 1. After that, the workpiece processing device 1 is completed by sequentially performing a temporary processing process, a measurement process, an outer diameter calculation process and an adjustment process.

[0072] In the preliminary machining process, the peripheral edge of the unmachined workpiece W, which has been centered and placed on the upper surface of the stage 21 of the support part 2, is chamfered using grinding wheels 3a and 3b, forming an arc-shaped curved surface on the peripheral edge of the workpiece W.

[0073] Specifically, the position determination processing unit 73 determines a target trajectory for provisional machining based on the target machining dimensions (provisional machining dimensions) for provisional machining, the initial setting values ​​DTa0 and DTb0 of the outer diameters of the grinding wheels 3a and 3b, and the initial value L0 of the inter-axis distance L in the X direction from the rotation center of the stage 21 to the rotation axes 42a and 42b of the spindle motors 41a and 41b.

[0074] Then, the support part 2 and the rotary drive part 4 are moved relative to each other by the moving device 5 along the determined target trajectory for temporary processing, while the rotary drive part 4 rotates the grinding wheels 3a and 3b, so that the first grinding wheel 3a forms an upper arc-shaped surface Wc1 on the periphery of the upper flat surface W1 of the workpiece W, and the second grinding wheel 3b forms a lower arc-shaped surface Wc2 on the periphery of the lower flat surface W2 of the workpiece W.

[0075] The shape formed on the peripheral edge of the workpiece W in the preliminary machining step can be any shape as long as it has an arcuate surface that curves in an arc shape, and may be the same shape as the shape formed on the peripheral edge of the workpiece W by the workpiece machining device 1 after completion of the device 1. In this embodiment, the shape has an upper inclined surface Wa1, an upper arcuate surface Wc1, a lower inclined surface Wa2, a lower arcuate surface Wc2, and a peripheral end surface Wb, as shown in FIG.

[0076] In the measurement step, the outer diameter DW of the workpiece W formed in the temporary machining step, the radius of curvature R1 of the upper arcuate surface Wc1, and the radius of curvature R2 of the lower arcuate surface Wc2 are measured. The radii of curvature R1 and R2 may be measured by a measuring unit 6 provided in the workpiece machining device 1, or may be measured by a measuring unit provided separately from the workpiece machining device 1.

[0077] In the outer diameter calculation process, the measured values ​​DTam and DTbm of the outer diameters of the grinding wheels 3a and 3b are calculated using the following equations (3) and (4) based on the measured values ​​of the radii of curvature R1 and R2 of the arcuate surfaces Wc1 and Wc2 measured in the measurement process and the provisional machining dimensions of the radii of curvature R1 and R2 of the arcuate surfaces Wc1 and Wc2.

[0078] DTam=DTa0+2×(R1p-R1m) Equation (3) DTbm=DTb0+2×(R2p-R2m) Equation (4) In the above equations (3) and (4), DTa0 is the initial setting value of the outer diameter of the first grinding wheel 3a, DTb0 is the initial setting value of the outer diameter of the second grinding wheel 3b, R1m is the measured value of the radius of curvature R1 of the upper arcuate surface Wc1 obtained in the measurement process, R2m is the measured value of the radius of curvature R2 of the lower arcuate surface Wc2 obtained in the measurement process, R1p is the provisional machining dimension of the radius of curvature of the upper arcuate surface Wc1, and R2p is the provisional machining dimension of the radius of curvature of the lower arcuate surface Wc2.

[0079] In the outer diameter calculation process, after calculating the measured values ​​DTam and DTbm of the outer diameters of the grinding wheels 3a and 3b, the initial value DTa0 of the outer diameter of the first grinding wheel 3a stored in the memory device 72 is updated to the measured value DTa, the initial value DTb0 of the outer diameter of the second grinding wheel 3b is updated to the measured value DTb, and the measured values ​​DTa and DTb are stored in the memory device 72.

[0080] In the adjustment step, the position of at least one of the support part 2 and the rotation drive part 4 is adjusted based on the measurement values ​​DTa and DTb of the outer diameters of the grinding wheels 3a and 3b updated in the outer diameter calculation step.

[0081] For example, in the adjustment process, a correction value ΔL of the inter-axial distance L in the X direction from the rotation center of the stage 21 to the rotation axes 42a and 42b of the spindle motors 41a and 41b is calculated based on the following equation (5). TIFF2025158421000002.tif14127

[0082] In the above formula (5), L0 is the initial value of the inter-axis distance in the X direction from the rotation center of the stage 21 to the rotation axes 42a, 42b of the spindle motors 41a, 41b, DWm is the outer diameter of the temporarily machined workpiece W measured in the measurement process, DTam is the outer diameter of the first grinding wheel 3a calculated in the outer diameter calculation process, and φ1 is the circumferential angle of the workpiece W at the position where the first grinding wheel 3a contacts the workpiece W relative to the X direction in which the stage moving device 51 moves the stage 21.

[0083] After calculating the correction value ΔL of the initial value L0 of the center-to-center distance L, the initial value L0 of the center-to-center distance L is adjusted based on this correction value ΔL. Then, the adjusted center-to-center distance L is stored in the storage device 72, and the manufacture of the workpiece processing device 1 is completed.

[0084] After the adjustment process is performed as described above, a provisional machining process, a measurement process, an outer diameter calculation process, and an adjustment process may be performed based on the adjusted center-to-center distance L, and the provisional machining process through the adjustment process may be repeatedly performed until the adjusted center-to-center distance L satisfies a predetermined condition.

[0085] (4) Effects In this embodiment, the outer diameters DTa, DTb of the grinding wheels 3a, 3b stored in the memory device 72 are updated to the measured outer diameter values ​​DTam, DTbm of the grinding wheels 3a, 3b calculated by the outer diameter calculation processing unit 74, and the first target trajectory and the second target trajectory are corrected based on the measured outer diameter values ​​DTam, DTbm of the grinding wheels 3a, 3b, so that the peripheral portion of the workpiece can be machined into the desired shape with high precision.

[0086] In this embodiment, if the measured values ​​DTam, DTbm of the outer diameters of the grinding wheels 3a, 3b are larger than the outer diameters DTa, DTb of the grinding wheels 3a, 3b stored in the memory device 72, the update processing unit 75 updates the outer diameters DTa, DTb of the grinding wheels 3a, 3b stored in the memory device 72 to the measured values ​​DTam, DTbm of the outer diameters of the grinding wheels 3a, 3b calculated by the outer diameter calculation processing unit 74, so that even if the grinding wheels 3a, 3b expand, the peripheral portion of the workpiece can be accurately machined into the desired shape.

[0087] In this embodiment, the measured values ​​DTam and DTbm of the outer diameters of the grinding wheels 3a and 3b are obtained based on the measured values ​​R1m and R2m of the radii of curvature of the arc surfaces Wc1 and Wc2 provided on the machined workpiece W, so that the measured values ​​DTam and DTbm of the outer diameters of the grinding wheels 3a and 3b can be obtained accurately.

[0088] In other words, the radii of curvature of the arcuate surfaces Wc1, Wc2 formed by the grinding wheels 3a, 3b change due to the influence of changes in the outer diameters of the grinding wheels 3a, 3b, but are not affected by errors in the relative positions of the support unit 2 and the rotation drive unit 4 (i.e., errors in the inter-axial distance from the rotation center of the stage 21 of the support unit 2 to the rotation axes of the grinding wheels 3a, 3b). Therefore, by obtaining the outer diameters of the grinding wheels 3a, 3b based on the measured values ​​of the radii of curvature of the arcuate surfaces Wc1, Wc2 formed by the grinding wheels 3a, 3b, the outer diameters of the grinding wheels 3a, 3b can be obtained with high precision, and as a result, the peripheral edge of the workpiece can be machined into the desired shape with high precision.

[0089] In this embodiment, the outer diameter of the first grinding wheel 3a that grinds the peripheral portion of the upper flat surface W1 of the workpiece W and the outer diameter of the second grinding wheel 3b that grinds the peripheral portion of the lower flat surface W2 are obtained separately, and the target trajectories of the first grinding wheel 3a and the second grinding wheel 3b are corrected based on the obtained outer diameters, so that the upper flat surface W1 and the lower flat surface W2 can be precisely machined into the desired shape.

[0090] Furthermore, in this embodiment, when manufacturing the workpiece machining apparatus 1, after assembling the workpiece machining apparatus 1, the above-described provisional machining process, measurement process, outer diameter calculation process, and adjustment process are sequentially performed. This allows the center-to-center distance L stored in the memory device 72 to approach the true value from the center of rotation of the stage 21 to the rotation axes 42a, 42b of the spindle motors 41a, 41b. Since device setting values ​​such as the center-to-center distance L change very little over time compared to the outer diameters of the grinding wheels 3a, 3b, by approximating the center-to-center distance L to its true value in advance, it is ensured that errors occurring during subsequent machining are due to changes in the grinding wheel diameter. Therefore, the workpiece machining apparatus 1 manufactured by the manufacturing method of this embodiment allows the positions of the support unit 2 and the rotation driver 4 to be adjusted with high precision based on the outer diameters of the grinding wheels 3a, 3b.

[0091] (5) Example of change Although the embodiments of the present invention have been described above, these embodiments are presented as examples and are not intended to limit the scope of the invention. These embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are within the scope and spirit of the invention, as well as the scope of the invention and its equivalents as set forth in the claims. Modifications are described below. Note that any one of the multiple modification examples described below may be applied to the above embodiment, or any two or more of the modification examples described below may be applied in combination. Note that various modifications other than the following modification examples are possible.

[0092] (5-1) Change example 1 In the above embodiment, the measured values ​​DTam and DTbm of the outer diameters of the grinding wheels 3a and 3b were obtained based on the measured values ​​R1m and R2m of the radii of curvature of the arc surfaces Wc1 and Wc2 provided on the machined workpiece W, but the measured values ​​DTam and DTbm of the outer diameters of the grinding wheels 3a and 3b may also be obtained based on the outer diameter of the machined workpiece W.

[0093] For example, the outer diameter calculation processing unit 74 calculates the actual measured values ​​DTam and DTbm of the outer diameters of the grinding wheels 3a and 3b from the outer diameters DTa and DTb of the grinding wheels 3a and 3b stored in the memory device 72, the actual measured value DWm of the outer diameter of the machined workpiece W measured by the measuring unit 6, and the target machining dimension DWs of the outer diameter of the workpiece W stored in the memory device 72, for example, using the following equations (6) and (7).

[0094] DTam=DTa+(DWs-DWm) Equation (1) DTbm=DTb+(DWs-DWm) Equation (2) In this modified example 1, the measured values ​​DTam and DTbm of the outer diameters of the grinding wheels 3a and 3b can be obtained based on the outer diameter of the machined workpiece W, which is easy to measure, so that the workpiece machining device 1 can be manufactured with a simple configuration.

[0095] (5-2) Change example 2 When the dimensions of the machined workpiece W are measured at multiple locations spaced apart around the circumference of the workpiece W, if the deviation between the multiple measurement results is less than a predetermined value, the outer diameter of the grinding wheels 3a, 3b may be calculated using the dimensions of the machined workpiece W, and if the deviation between the multiple measurement results is greater than the predetermined value, the outer diameter of the grinding wheels 3a, 3b may not be calculated and an abnormality may be reported.

[0096] In this modified example, abnormalities other than changes in the outer diameter of the grinding wheels 3a, 3b can be detected, such as when the deviation between multiple measurement results is greater than a predetermined value or when the center of the workpiece W is misaligned with the center of rotation of the stage 21.

[0097] (5-3) Change example 3 During the period from the start of chamfering processing of the workpiece W until a predetermined number of workpieces W have been processed, or during the period from the start of chamfering processing of the workpiece W until a predetermined time (e.g., 24 hours) has elapsed, if the measurement values ​​DTam, DTbm of the outer diameters of the grinding wheels 3a, 3b calculated by the outer diameter calculation processing unit 74 are larger than the outer diameters DTa, DTb of the grinding wheels 3a, 3b stored in the memory device 72, the update processing unit 75 may update the outer diameters DTa, DTb of the grinding wheels 3a, 3b stored in the memory device 72 to the measurement values ​​DTam, DTbm of the outer diameters of the grinding wheels 3a, 3b calculated by the outer diameter calculation processing unit 74.

[0098] Furthermore, if the measurement values ​​DTam and DTbm are smaller than the outer diameters DTa and DTb of the grinding wheels 3a and 3b stored in the memory device 72 during the period from the start of chamfering of the workpiece W until a predetermined number of workpieces W have been processed, or during the period from the start of chamfering of the workpiece W until a predetermined time (e.g., 24 hours) has elapsed, then it is not necessary to update the outer diameters DTa and DTb of the grinding wheels 3a and 3b stored in the memory device 72.

[0099] For a while after the start of chamfering of the workpiece W, the grinding wheels 3a, 3b are more likely to expand due to the absorption of grinding fluid than due to the influence of wear. In this modified example, if the measured outer diameters DTam, DTbm of the grinding wheels 3a, 3b are larger than the outer diameters DTa, DTb of the grinding wheels 3a, 3b stored in the storage device 72 for a while after the start of chamfering of the workpiece W, the outer diameters DTa, DTb of the grinding wheels 3a, 3b may be updated. Also, if the measured outer diameters DTam, DTbm of the grinding wheels 3a, 3b are smaller than the outer diameters DTa, DTb of the grinding wheels 3a, 3b, it is possible to consider that the cause is something other than the change in the outer diameter of the grinding wheels 3a, 3b, such as the relative positions of the support unit 2 and the rotation drive unit 4, and the outer diameters DTa, DTb of the grinding wheels 3a, 3b do not need to be updated.

[0100] (5-4) Change example 4 After a predetermined number of workpieces W have been processed since the start of chamfering processing of the workpiece W, or after a predetermined time has elapsed since the start of chamfering processing of the workpiece W, if the measured outer diameters DTam, DTbm of the grinding wheels 3a, 3b calculated by the outer diameter calculation processing unit 74 are smaller than the outer diameters DTa, DTb of the grinding wheels 3a, 3b stored in the memory device 72, the update processing unit 75 updates the outer diameters DTa, DTb of the grinding wheels 3a, 3b stored in the memory device 72 to the measured outer diameters DTam, DTbm of the grinding wheels 3a, 3b calculated by the outer diameter calculation processing unit 74.

[0101] Furthermore, after a predetermined number of workpieces W have been processed since the start of chamfering processing of the workpiece W, or after a predetermined time has elapsed since the start of chamfering processing of the workpiece W, if the measured values ​​DTam and DTbm are larger than the outer diameters DTa and DTb of the grinding wheels 3a and 3b stored in the memory device 72, it is not necessary to update the outer diameters DTa and DTb of the grinding wheels 3a and 3b stored in the memory device 72.

[0102] As the time required to chamfer the workpiece W increases, the effect of wear becomes greater than the expansion of the grinding wheels 3a, 3b. In this modified example, after a predetermined number of workpieces W have been chamfered or a predetermined time has passed since the start of chamfering, if the measured values ​​DTam, DTbm of the outer diameters of the grinding wheels 3a, 3b are smaller than the outer diameters DTa, DTb of the grinding wheels 3a, 3b stored in the storage device 72, the outer diameters of the grinding wheels 3a, 3b are updated. Furthermore, if the measured values ​​DTam, DTbm of the outer diameters of the grinding wheels 3a, 3b are larger than the outer diameters DTa, DTb of the grinding wheels 3a, 3b, it is possible to assume that the cause is something other than the change in the outer diameter of the grinding wheels 3a, 3b, such as the relative positions of the support unit 2 and the rotation drive unit 4, and therefore the outer diameters DTa, DTb of the grinding wheels 3a, 3b do not need to be updated.

[0103] (5-5) Change example 5 In the above embodiment, the manufacturing method of the workpiece processing device 1 equipped with the measuring unit 6 has been described, but the above manufacturing method may also be applied to a workpiece processing device not equipped with the measuring unit 6. [Explanation of symbols]

[0104] 1...workpiece machining device, 2...support unit, 3...grinding wheel, 4...rotation drive unit, 5...moving device, 6...measuring unit, 7...control unit, 15...loading device, 15a...holding unit, 15b...alignment sensor, 16...unloading device, 21...stage, 22...suction device, 23...rotating device, 41a...spindle motor, 41b...spindle motor, 42a...rotating axis, 42b...rotating axis, 51...stage moving device, 52...grinding wheel moving device, 53...first grinding wheel moving device, 54a...second grinding wheel moving device, 54b...second grinding wheel moving device, 61...diameter measuring unit, 62...cross-section measuring unit, 71...processing device, 72...storage device, 73...position determination processing unit, 74...outer diameter calculation processing unit, 75...updating processing unit

Claims

1. a support portion that supports a plate-shaped workpiece; a disc-shaped grinding wheel for grinding the peripheral portion of the workpiece; a rotation drive unit that rotates the grinding wheel while supporting it; a moving device that moves the support unit and the rotation drive unit relatively; a measuring unit that measures the dimensions of the processed workpiece; a storage device that stores the target machining dimensions of the workpiece and the outer diameter of the grinding wheel; a control unit that controls the rotation drive unit and the movement device, The control unit a position determination process for determining a target trajectory of the rotation drive unit relative to the support unit during machining of the workpiece, based on the target machining dimensions of the workpiece and the outer diameter of the grinding wheel stored in the storage device; a processing process in which the support unit and the rotation drive unit are moved relatively along the target trajectory by the moving device while the rotation drive unit is caused to rotate the grinding wheel, and the peripheral portion of the workpiece is processed by the outer periphery of the grinding wheel; an outer diameter calculation process for calculating an outer diameter of the grinding wheel based on the dimensions of the machined workpiece measured by the measuring unit and the target machining dimensions; an update process for updating the outer diameter of the grinding wheel stored in the storage device to the outer diameter of the grinding wheel calculated by the outer diameter calculation process.

2. 2. The workpiece machining device according to claim 1, wherein the outer diameter calculation process calculates the outer diameter of the grinding wheel based on the outer diameter of the machined workpiece measured by the measuring unit and the target machining dimension of the outer diameter of the workpiece.

3. The processing step includes processing the peripheral portion of the workpiece with the outer periphery of the grindstone to form an arc-shaped curved surface on the peripheral portion of the workpiece, the thickness of which becomes thinner as it approaches the peripheral portion of the workpiece; 2. The workpiece machining device according to claim 1, wherein the outer diameter calculation process calculates the outer diameter of the grinding wheel based on the radius of curvature of the arcuate surface of the machined workpiece measured by the measuring unit and the target machining dimension of the radius of curvature of the arcuate surface.

4. The grinding wheels include a first grinding wheel that grinds the peripheral portion of one surface of the workpiece to form a first arc-shaped surface that curves in an arc shape and whose thickness becomes thinner as it approaches the peripheral edge of the workpiece, and a second grinding wheel that grinds the peripheral portion of the other surface of the workpiece to form a second arc-shaped surface that curves in an arc shape and whose thickness becomes thinner as it approaches the peripheral edge of the workpiece, The outer diameter calculation process includes: calculating an outer diameter of the first grinding wheel based on the target machining dimension of the radius of curvature of the first arcuate surface and the radius of curvature of the first arcuate surface of the machined workpiece measured by the measuring unit; calculating an outer diameter of the second grinding wheel based on the target machining dimension of the radius of curvature of the second arcuate surface and the radius of curvature of the second arcuate surface of the machined workpiece measured by the measuring unit; The update process includes: updating the outer diameter of the first grinding wheel stored in the storage device to the outer diameter of the first grinding wheel calculated by the outer diameter calculation process; updating the outer diameter of the second grinding wheel stored in the storage device to the outer diameter of the second grinding wheel calculated in the outer diameter calculation process; The workpiece machining device according to claim 3.

5. A workpiece processing device described in any one of claims 1 to 4, wherein, when the outer diameter of the grinding wheel calculated by the outer diameter calculation process is larger than the outer diameter of the grinding wheel stored in the memory device, the update process updates the outer diameter of the grinding wheel stored in the memory device to the outer diameter of the grinding wheel calculated by the outer diameter calculation process.

6. a support portion that supports a plate-shaped workpiece; a disc-shaped grinding wheel for grinding the peripheral portion of the workpiece; a rotation drive unit that rotates the grinding wheel while supporting it; a moving device that moves the support unit and the rotation drive unit relatively; a storage device that stores the target machining dimensions of the workpiece and the outer diameter of the grinding wheel; a control unit that controls the rotation drive unit and the movement device, The control unit a position determination process for determining a target trajectory of the rotation drive unit relative to the support unit during machining of the workpiece, based on the target machining dimensions of the workpiece and the outer diameter of the grinding wheel stored in the storage device; a processing process in which the support unit and the rotation drive unit are moved relatively along the target trajectory by the moving device while the rotation drive unit is caused to rotate the grinding wheel, and the peripheral portion of the workpiece is processed by the outer periphery of the grinding wheel; A method for manufacturing a workpiece processing device that performs the above steps, a temporary machining process in which a target trajectory for temporary machining is determined based on a temporary machining dimension, which is a target machining dimension for temporary machining, and an initial setting value of the outer diameter of the grinding wheel, and the support unit and the rotation drive unit are moved relatively by the moving device along the determined target trajectory for temporary machining while the rotation drive unit rotates the grinding wheel, thereby forming an arc-shaped curved surface on the peripheral edge of the workpiece; a measuring step of measuring a radius of curvature of the arcuate surface formed in the temporary machining step; an outer diameter calculation step of calculating an outer diameter of the grinding wheel based on the measured value of the radius of curvature of the arcuate surface measured in the measurement step and the provisional machining dimension of the radius of curvature of the arcuate surface; an adjustment step of adjusting the position of at least one of the support unit and the rotation drive unit based on the outer diameter of the grindstone calculated in the outer diameter calculation step; A method for manufacturing a workpiece processing device comprising:

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