Method for producing joined body and method for producing ceramic circuit board

Abstract

To provide a method for producing a joined body in which a titanium nitride layer contains a predetermined amount of oxygen, and to provide a method for producing a ceramic circuit board.SOLUTION: A method for producing a joined body comprises the steps of: preparing an active metal brazing material; preparing an active metal brazing paste; forming an active metal brazing material layer; producing a laminated body; and performing heating and joining. An oxygen amount in nitrogen gas supplied to a heating and joining zone of a continuous furnace is 10 to 1,000 vol ppm. A joining layer formed from the active metal brazing material layer includes a titanium nitride layer and a brazing material layer. The titanium nitride layer includes a portion having an oxygen amount of 1 at% or more. An average value of oxygen amounts in any five measurement regions of the titanium nitride layer is 1 to 10 at%, and an average value of nitrogen amounts is 50 to 65 at%. The brazing material layer includes a Ti-rich region containing 30 at% or more of Ti. The nitrogen amount in the Ti-rich region is 1 to 15 at%.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The embodiments described below generally relate to a method for manufacturing a bonded body and a method for manufacturing a ceramic circuit board. [Background technology]

[0002] In recent years, ceramic circuit boards with excellent heat dissipation and thermal cycle test (TCT) characteristics have been developed. For example, Japanese Patent No. 6789955 (Patent Document 1) discloses a ceramic circuit board in which a ceramic substrate and a copper plate are bonded via a bonding layer. Patent Document 1 also discloses silicon nitride substrates, aluminum nitride substrates, and aluminum oxide substrates. Silicon nitride substrates and aluminum nitride substrates are called nitride-based ceramic substrates. Silicon nitride substrates have high strength, with a three-point bending strength of 500 MPa or more. Aluminum nitride substrates also have high thermal conductivity, with a thermal conductivity of 160 W / m·K or more. Nitride-based ceramic substrates have superior performance compared to oxide-based ceramic substrates.

[0003] In Patent Document 1, an active metal brazing filler metal is used to bond a nitride ceramic substrate and a copper plate. The active metal brazing filler metal is a brazing filler metal containing titanium, an active metal. A bonded body is obtained by applying the active metal brazing filler metal between a nitride ceramic substrate and a copper plate and bonding them by heating. By bonding them by heating, the active metal brazing filler metal layer becomes a bonding layer. The active metal brazing filler metal containing titanium reacts with the nitride ceramic substrate to form a titanium nitride layer. By forming a titanium nitride layer on the surface of the nitride ceramic substrate as part of the bonding layer, the bonding strength can be improved. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 6789955 [Patent Document 2] Patent No. 4077888 [Patent Document 3] Japanese Patent Application Laid-Open No. 2013-211546 [Patent Document 4] International Publication No. 2021 / 015122 [Patent Document 5] International Publication No. 2022 / 244769 Summary of the Invention [Problem to be solved by the invention]

[0005] In Patent Document 1, the bonding layer has a protruding portion that protrudes beyond the edge of the copper plate. The TCT characteristics were improved by controlling the size and hardness of the protruding portion. However, no further performance improvement was observed. Investigation into the cause of this revealed that it was due to the oxygen content in the titanium nitride layer. The titanium nitride layer is a hard material. For example, in Patent Document 2, the Vickers hardness (HV) of the titanium nitride layer is high, at 1100 or more. In Patent Document 2, the titanium nitride layer contains Cu and Al to harden it, thereby improving the TCT characteristics. Cu is a component contained in the brazing filler metal, and Al is a component contained in the aluminum nitride substrate. It was difficult to uniformly disperse these components. Variations in the dispersion state within the titanium nitride layer caused partial variations in the physical properties of the titanium nitride layer.

[0006] Conventionally, the oxygen content in titanium nitride layers has been very low. For example, Figure 2 of JP 2013-211546 A (Patent Document 3) shows the results of a line analysis of a ceramic circuit board in the cross-sectional direction using an electron probe microanalyzer (EPMA). The relative intensity (%) of the oxygen content in the titanium nitride layer was low. The results in Patent Document 3 are significantly affected by background noise, making it impossible to determine the exact oxygen content. Furthermore, Table 1 of WO 2021 / 015122 (Patent Document 4) shows that the oxygen content in the titanium nitride layer (interface layer 121, nanoparticle layer 131) was 0 at%.

[0007] The present invention aims to overcome these problems by providing a method for manufacturing a bonded body in which a predetermined amount of oxygen is contained in the titanium nitride layer, and a method for manufacturing a ceramic circuit board. [Means for solving the problem]

[0008] A method for manufacturing a bonded body according to an embodiment includes the steps of preparing an active metal brazing filler metal containing 1% by mass to 15% by mass of Ti or TiH2, 15% by mass to 85% by mass of Cu, 0% by mass to 70% by mass of Ag, and 1% by mass to 50% by mass of one or more selected from Sn and In. The method also includes the steps of preparing an active metal brazing filler metal paste by adding an organic binder to the active metal brazing filler metal. The method also includes the steps of forming an active metal brazing filler metal layer by applying the active metal brazing filler metal paste onto a nitride-based ceramic member. The method also includes the steps of placing a copper plate on the active metal brazing filler metal layer to fabricate a laminate in which the active metal brazing filler metal layer and the copper plate are placed on the nitride-based ceramic member. The method also includes the steps of thermally bonding the laminate using a continuous furnace. The continuous furnace includes a thermal bonding zone for thermally bonding the laminate. In the thermal bonding step, the oxygen content of the nitrogen gas supplied to the thermal bonding zone is 10 volppm or more and 1000 volppm or less. The thermal bonding forms a bonding layer from the active metal brazing material layer, and a bonded body is produced. The bonding layer includes a titanium nitride layer located at the interface between the nitride ceramic member and the bonding layer, the titanium nitride layer having a total titanium and nitrogen content of 70 at% or more, and a brazing material layer located between the titanium nitride layer and the copper plate. The titanium nitride layer includes a portion where the oxygen content is 1 at% or more. A measurement area of ​​20 nm × 20 nm in the titanium nitride layer was analyzed by TEM-EDX. When the total of the constituent elements other than carbon is taken as 100 at%, the average oxygen content in any five of the measurement regions is within the range of 1 at% to 10 at%. The average nitrogen content in the five measurement regions is within the range of 50 at% to 65 at%. The brazing material layer includes a Ti-rich region containing 30 at% or more of Ti. The nitrogen content in the Ti-rich region is within the range of 1 at% to 15 at%. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a side view showing an example of a bonded body according to an embodiment. [Figure 2] FIG. 2 is a cross-sectional view showing an example of a measurement area of ​​a titanium nitride layer. [Figure 3] FIG. 1 is a side view showing an example of a ceramic circuit substrate according to an embodiment. [Figure 4] FIG. 1 is a side view showing an example of a semiconductor device according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] A method for manufacturing a bonded body according to an embodiment includes the steps of preparing an active metal brazing filler metal containing 1% by mass to 15% by mass of Ti or TiH2, 15% by mass to 85% by mass of Cu, 0% by mass to 70% by mass of Ag, and 1% by mass to 50% by mass of one or more selected from Sn and In. The method also includes the steps of preparing an active metal brazing filler metal paste by adding an organic binder to the active metal brazing filler metal. The method also includes the steps of forming an active metal brazing filler metal layer by applying the active metal brazing filler metal paste onto a nitride-based ceramic member. The method also includes the steps of placing a copper plate on the active metal brazing filler metal layer to fabricate a laminate in which the active metal brazing filler metal layer and the copper plate are placed on the nitride-based ceramic member. The method also includes the steps of thermally bonding the laminate using a continuous furnace. The continuous furnace includes a thermal bonding zone for thermally bonding the laminate. In the thermal bonding step, the oxygen content of the nitrogen gas supplied to the thermal bonding zone is 10 volppm or more and 1000 volppm or less. The thermal bonding forms a bonding layer from the active metal brazing material layer, and a bonded body is produced. The bonding layer includes a titanium nitride layer located at the interface between the nitride ceramic member and the bonding layer, the titanium nitride layer having a total titanium and nitrogen content of 70 at% or more, and a brazing material layer located between the titanium nitride layer and the copper plate. The titanium nitride layer includes a portion where the oxygen content is 1 at% or more. A measurement area of ​​20 nm × 20 nm in the titanium nitride layer was analyzed by TEM-EDX. When the total of the constituent elements other than carbon is taken as 100 at%, the average oxygen content in any five of the measurement regions is within the range of 1 at% to 10 at%. The average nitrogen content in the five measurement regions is within the range of 50 at% to 65 at%. The brazing material layer includes a Ti-rich region containing 30 at% or more of Ti. The nitrogen content in the Ti-rich region is within the range of 1 at% to 15 at%.

[0011] Fig. 1 is a side view showing an example of a bonded body according to an embodiment. Fig. 2 is a cross-sectional view showing an example of a measurement region of a titanium nitride layer. In Fig. 1 and Fig. 2, reference numeral 1 denotes the bonded body, reference numeral 2 denotes a nitride-based ceramic member, reference numeral 3 denotes a metal member, reference numeral 4 denotes a bonding layer, reference numeral 5 denotes a titanium nitride layer, reference numeral 6 denotes a measurement region, reference numeral 7 denotes a brazing material layer, and reference numeral 9 denotes a Ti-rich region.

[0012] The metal member 3 is bonded to the nitride ceramic member 2 via a bonding layer 4. FIG. 1 shows an example in which the metal members 3 are bonded to both sides of the nitride ceramic member 2. The metal member 3 may be bonded to only one side of the nitride ceramic member 2. The number of metal members 3 bonded to one side of the nitride ceramic member 2 is not limited to one, and may be two or more.

[0013] Nitride-based ceramic members are ceramic sintered bodies containing nitrogen as a constituent element. Examples of nitride-based ceramic members include silicon nitride sintered bodies (including sialon sintered bodies) and aluminum nitride sintered bodies. If necessary, a sintering aid may be added. Examples of sintering aids include one or more compounds selected from rare earth elements, magnesium, titanium, and hafnium. Compounds added as sintering aids include oxides, nitrides, oxynitrides, and silicides. Examples of rare earth elements include yttrium and lanthanoid elements.

[0014] When the nitride-based ceramic member 2 is used in a ceramic circuit board, which will be described later, it is in the form of a substrate. A substrate-shaped nitride-based ceramic member is called a nitride-based ceramic substrate. The thickness of the nitride-based ceramic substrate is preferably in the range of 0.1 mm to 3 mm. If the thickness is less than 0.1 mm, the strength of the nitride-based ceramic substrate may be insufficient. If the thickness exceeds 3 mm, the heat dissipation properties of the nitride-based ceramic substrate may be adversely affected.

[0015] A substrate made of sintered silicon nitride is called a silicon nitride substrate. The three-point bending strength of a silicon nitride substrate is preferably 500 MPa or more, more preferably 600 MPa or more. By increasing the strength, the required durability can be obtained even if the substrate is made thin, between 0.1 mm and 4 mm. Furthermore, the thermal conductivity of a silicon nitride substrate is preferably 50 W / m·K or more, more preferably 80 W / m·K or more. By increasing the thermal conductivity, heat dissipation can be improved. The fracture toughness value of a silicon nitride substrate is 5.5 MPa·m 1 / 2 It is preferable that this is equal to or greater than this.

[0016] A substrate made of an aluminum nitride sintered body is called an aluminum nitride substrate. The thermal conductivity of an aluminum nitride substrate is preferably 160 W / m·K or higher. The three-point bending strength of an aluminum nitride substrate is preferably 300 MPa or higher. Although aluminum nitride substrates have higher thermal conductivity than silicon nitride substrates, aluminum nitride substrates with strengths of less than 500 MPa are mainstream. Therefore, aluminum nitride substrates are not suitable for thinning substrates. From the perspective of thinning substrates, silicon nitride substrates are preferred.

[0017] Three-point bending strength is measured using a method conforming to JIS-R-1601 (2008). Thermal conductivity is measured using the flash method. Fracture toughness is calculated using the Niihara formula using a measurement method conforming to the IF method of JIS-R-1607 (2015). JIS-R-1601 corresponds to ISO14704. JIS-R-1607 corresponds to ISO15732.

[0018] The metal member 3 is an aluminum member or a copper member. The aluminum member is made of aluminum, an aluminum alloy, or the like. The copper member is made of pure copper, a copper alloy, or the like. An example of pure copper is oxygen-free copper. Oxygen-free copper is specified in JIS-H-3100. JIS-H-3100 corresponds to ISO1337, etc. Here, a copper member having a plate shape is called a copper plate. When used in a ceramic circuit board, the thickness of the copper plate is preferably within the range of 0.1 mm to 5 mm.

[0019] In the bonded body 1, a nitride ceramic member 2 and a copper member are bonded via a bonding layer 4. A titanium nitride layer 5 containing titanium nitride as a main component is formed at the interface between the nitride ceramic member 2 and the bonding layer 4.

[0020] The bonding layer 4 is formed by thermally bonding an active metal brazing material. The active metal brazing material contains titanium (Ti), an active metal. During the thermal bonding process, the titanium in the active metal reacts with nitrogen in the nitride ceramic member to form a titanium nitride layer 5. As a result, a titanium nitride layer 5 is formed at the interface between the nitride ceramic member 2 and the bonding layer 4.

[0021] The titanium nitride layer 5 refers to a region where the total content of titanium and nitrogen is 70 at% or more. The total content of titanium and nitrogen in the titanium nitride layer 5 is preferably in the range of 90 at% or more and 100 at% or less. The titanium nitride layer 5 also refers to a region where the total content of titanium and nitrogen is 70 at% or more and 100 at% or less and is connected over a length of 5 μm or more in the surface direction of the nitride ceramic member 2.

[0022] As will be described later, the oxygen content in the titanium nitride layer 5 is measured in a region where the total of titanium and nitrogen is 70 at % or more and 100 at % or less. The titanium nitride layer 5 is preferably in contact with the nitride-based ceramic member 2.

[0023] The oxygen content in the titanium nitride layer 5 is measured in two stages using TEM-EDX area analysis. The first area analysis is performed to identify the titanium nitride layer 5 in the bonding layer 4. The second area analysis is performed to measure the oxygen content in a small region in the titanium nitride layer 5.

[0024] First, we will explain the measurement method using TEM-EDX. TEM stands for Transmission Electron Microscopy. EDX stands for Energy Dispersive X-ray Spectroscopy. EDX is sometimes called EDS. TEM-EDX analysis is sometimes simply called EDX analysis.

[0025] An arbitrary cross section of the bonded structure 1 is used as a sample for EDX analysis. A sample is taken from the arbitrary cross section by focused ion beam (FIB) processing or ion milling processing. The thickness of the sample is preferably in the range of 0.05 μm to 0.1 μm (50 nm to 100 nm). To prevent surface oxidation of the sample, it is desirable to prepare and store the sample in a vacuum or in an inert gas atmosphere.

[0026] The EDX instrument used is a JEOL JED-2300T or an instrument with equivalent or better performance. The TEM used is a JEOL JEM-200CX (accelerating voltage 200 kV) or an instrument with equivalent or better performance. The recommended conditions for EDX analysis are an accelerating voltage of 200 kV and a spot diameter of 1 nm during analysis. The recommended analysis time is 10 to 15 seconds, and the recommended sample tilt angles are X = 0°, Y = 0°. The sample orientation is arbitrary as long as a measurement area of ​​20 nm x 20 nm can be secured.

[0027] TEM-EDX is suitable for analyzing minute areas. The measurement area 6 is selected from a location at least 0.5 mm away from the edge of the bonded layer. Areas within 0.5 mm of the edge may be affected by external contamination during storage. The edge is the outer edge of the bonded layer of the bonded body, and is the area that is in direct contact with the outside air.

[0028] In the first area analysis, the size of the measurement area in the surface direction of the nitride ceramic member 2 is set to 5 μm or more. The first area analysis is used to observe the distribution of titanium and nitrogen over a wide range of the bonding layer 4. From the distribution of titanium and nitrogen, an area where the total of titanium and nitrogen is 70 at% or more and which is connected for 5 μm or more in the surface direction of the nitride ceramic member 2 is identified as the titanium nitride layer 5.

[0029] In the second area analysis, a 20 nm x 20 nm area is selected from the area identified as the titanium nitride layer 5 in the first area analysis and designated as the measurement area 6. Five areas separated from each other are selected as measurement areas. The average of the proportions of each element obtained in the five area analyses is calculated. The average value is calculated assuming that the total of the constituent elements other than carbon is 100 at%. Carbon is excluded to eliminate the effect of carbonization of the titanium nitride layer 5 due to reaction with the atmosphere caused by electron beam irradiation during analysis. When the total of the constituent elements other than carbon is 100 at%, it is preferable that the average oxygen content in the five measurement areas is 1 at% or more, and the average nitrogen content in the five measurement areas is 20 at% or more.

[0030] In the first area analysis, the titanium and nitrogen contents are measured at each point over a wide range. In the second area analysis, the content of each element is measured over the entire 20 nm x 20 nm measurement area. The resolution of the first and second area analyses is different. Therefore, even in an area identified as titanium nitride layer 5 in the first area analysis, the total titanium and nitrogen content may be less than 70 at% when the second area analysis is performed. In this case, the measurement area where the total titanium and nitrogen content is less than 70 at% is not selected as an area for measuring the nitrogen or oxygen content.

[0031] In the titanium nitride layer 5, it is preferable that the number of regions where the total of titanium and nitrogen is measured to be less than 70 at% in the second area analysis be small. If there are any regions where the total of titanium and nitrogen is measured to be less than 70 at% in the second area analysis, the area ratio is preferably 10% or less, and more preferably 5% or less. The "area ratio" is expressed as the ratio of the number of regions where the total of titanium and nitrogen is measured to be less than 70 at% to the number of 20 nm × 20 nm measurement regions where the second area analysis was performed. For example, if the second area analysis was performed on 20 measurement regions and the total of titanium and nitrogen was less than 70 at% in one of the measurement regions, the area ratio would be 5%.

[0032] The constituent elements other than carbon mentioned above refer to all elements other than carbon detected by TEM-EDX, including components of the nitride ceramic member, components of the active metal brazing material, oxygen, and nitrogen.

[0033] For example, when the nitride-based ceramic member is a silicon nitride sintered body, the constituent elements are Si (silicon), N (nitrogen), and a sintering aid. When the nitride-based ceramic member is an aluminum nitride sintered body, the constituent elements are Al (aluminum), N (nitrogen), and a sintering aid. When yttrium oxide and magnesium oxide are used as sintering aids, the constituent elements derived from the sintering aid are Y (yttrium), Mg (magnesium), and O (oxygen). When an active metal brazing filler metal containing Ti (titanium), Ag (silver), Cu (copper), and Sn (tin) is used, the constituent elements derived from the active metal brazing filler metal are Ti, Ag, Cu, and Sn. Even if the components of the nitride-based ceramic member or the active metal brazing filler metal are components that are not detected by TEM-EDX (below the detection limit), some components may not be detected by TEM-EDX (below the detection limit).

[0034] When the total of the constituent elements other than carbon is taken as 100 at%, it is preferable that the average oxygen content is 1 at% or more and the average nitrogen content is 20 at% or more in any five measurement regions. The titanium nitride layer 5 is a region where the total of titanium and nitrogen is 70 at% or more. Therefore, the proportion of constituent elements other than titanium and nitrogen in the titanium nitride layer 5 is less than 30 at%.

[0035] The oxygen content in the titanium nitride layer 5 is 1 at % or more. In a minute measurement area of ​​20 nm x 20 nm in the titanium nitride layer 5, the oxygen content is 1 at % or more. This can improve the TCT characteristics.

[0036] The titanium nitride layer 5 is primarily formed by a reaction between the titanium in the brazing filler metal and the nitrogen in the nitride ceramic. When a continuous furnace is used for the joining process, nitrogen from the nitrogen atmosphere may be incorporated to form the titanium nitride layer 5. The titanium nitride constituting the titanium nitride layer 5 is preferably a crystalline compound. Amorphous titanium nitride may also be present in the titanium nitride layer 5. The titanium nitride layer 5 may also be an aggregate of titanium nitride particles. The oxygen present in the titanium nitride layer 5 is solid-dissolved in the titanium nitride crystal. The solid solution of oxygen in the titanium nitride crystal is either substitutional or interstitial. In either case, there is an upper limit to the amount of solid solution. In other words, once the titanium nitride crystal has a certain amount of solid solution, it becomes difficult for oxygen to dissolve further in the titanium nitride crystal. Oxygen may also be present at the grain boundaries of the titanium nitride crystal. The presence of a certain amount of oxygen in the titanium nitride layer 5 can improve its properties.

[0037] As a result of the area analysis, it is more preferable that the average nitrogen content in any five measurement areas is within the range of 50 at% to 65 at% and the average oxygen content is within the range of 1 at% to 10 at%. TiN is a compound with an atomic ratio of Ti to N of 1:1. The fact that the nitrogen content in the titanium nitride layer 5 is 50 at% or more indicates that the titanium nitride layer 5 contains more nitrogen than TiN.

[0038] If the average nitrogen content is less than 20 at%, the reaction between the nitride ceramic member and Ti (Ti in the active metal brazing material) may be insufficient. This insufficient reaction may result in reduced bonding strength. If the average nitrogen content exceeds 65 at%, the titanium nitride layer 5 may become unstable due to excessive nitrogen, resulting in reduced bonding strength. If the titanium nitride layer 5 becomes unstable, it may become difficult to maintain stable TiN crystals or Ti-NO compounds. Furthermore, the reaction between the nitride ceramic member and Ti may not proceed properly. Therefore, the average nitrogen content is preferably within the range of 50 at% to 65 at%, and more preferably within the range of 51 at% to 62 at%. Furthermore, if the average oxygen content exceeds 10 at%, the titanium nitride layer 5 may become unstable and the bonding strength may decrease. Therefore, the average oxygen content is preferably within the range of 1 at% to 10 at%, and more preferably within the range of 1.5 at% to 7 at%.

[0039] As a result of the area analysis, it is preferable that the nitrogen content be in the range of 50 at% to 65 at% and the oxygen content be in the range of 1 at% to 10 at% in any of the five measurement regions. In other words, in regions where the total of titanium and nitrogen in the titanium nitride layer 5 is 70 at% or more, it is preferable that the oxygen content be in the range of 1 at% to 10 at% in any of the 20 nm x 20 nm measurement regions. This indicates that titanium nitride containing dissolved oxygen is present in each of the microregions. The presence of oxygen in each of the 20 nm x 20 nm microregions can further improve the characteristics.

[0040] The titanium nitride layer 5 preferably contains a Ti-NO compound. The Ti-NO compound is preferably a solid solution of titanium nitride and oxygen. The presence or absence of the Ti-NO compound can be measured by the above-mentioned TEM-EDX. The atomic ratio of Ti, N, and O in the Ti-NO compound is arbitrary. An example of the Ti-NO compound is TiN. 0.5 O 0.5 TiN such as x O(1-x) , 0.2≦x≦1.0. Of the Ti-NO compounds contained in titanium nitride layer 5, it is preferable that 90 atomic % or more of the Ti-NO compounds satisfy the above chemical formula. Furthermore, the Ti-NO compounds may contain components other than Ti, N, and O as constituent elements, such as Ti-NO-Si.

[0041] The detection of Ti-NO compounds is thought to indicate that the distribution of oxygen content has been made more uniform. Furthermore, the formation of Ti-NO compounds can suppress deterioration of the titanium nitride layer 5 due to oxidation. In other words, the presence of Ti-NO compounds in advance can suppress further oxidation of the titanium nitride layer. Note that oxygen that does not constitute Ti-NO compounds may also be present in the titanium nitride layer 5.

[0042] Furthermore, the material constituting the titanium nitride layer 5 preferably has a space group Fm-3m structure (e.g., TiN: JCPDS Card 00-038-1420 or Ti-NO: JCPDS Card 00-049-1325) with a sodium chloride structure as a base, with oxygen dissolved therein. The interplanar spacing of the oxygen-dissolved titanium nitride, as measured by TEM electron diffraction, is preferably greater than the interplanar spacing measured on the card. For example, in the case of the (111) plane of the 00-038-1420 TiN phase, the interplanar spacing is preferably 0.00001 / nm or greater, and more preferably 0.001 / nm or greater.

[0043] The thickness of the titanium nitride layer 5 is preferably in the range of 0.1 μm or more and 2 μm or less. If the thickness of the titanium nitride layer 5 is less than 0.1 μm, the bonding strength may be insufficient. If the titanium nitride layer 5 is thicker than 2 μm, further effects may not be obtained. For this reason, the thickness of the titanium nitride layer 5 is preferably in the range of 0.1 μm or more and 2 μm or less, and more preferably in the range of 0.2 μm or more and 1 μm or less. The thickness of the titanium nitride layer 5 is the thickness in a straight line from the nitride ceramic substrate to the copper plate.

[0044] The thickness of the bonding layer 4 is preferably in the range of 5 μm to 40 μm. If the thickness of the bonding layer 4 is less than 5 μm, the bonding strength may be insufficient. If the bonding layer 4 is thicker than 40 μm, further effects may not be obtained. For this reason, the thickness of the bonding layer 4 is preferably in the range of 5 μm to 40 μm, and more preferably in the range of 10 μm to 30 μm.

[0045] The titanium nitride layer 5 may contain titanium nitride particles having an average particle size of 100 nm or less. The titanium nitride particles may be Ti-NO compound particles. The presence of titanium nitride particles makes it easier to control the oxygen content distribution. For this reason, the average particle size of the titanium nitride particles is preferably 100 nm or less, more preferably 20 nm or less. The lower limit of the average particle size of the titanium nitride particles is not particularly limited, but is preferably 5 nm or more. If the average particle size is less than 5 nm, the thickness of the titanium nitride layer may be insufficient. For this reason, the average particle size of the titanium nitride particles is preferably in the range of 5 nm to 100 nm, more preferably 10 nm to 20 nm. The average particle size of the titanium nitride particles is measured by TEM observation. The long diameter of the titanium nitride particles is measured by TEM observation, and the average value of the long diameters of 20 random particles is taken as the average particle size.

[0046] The bonding layer 4 preferably contains Ti, at least one element selected from the group consisting of Cu and Ag, and at least one element selected from the group consisting of Sn, In, and C. The bonding layer 4 includes a titanium nitride layer 5. The titanium nitride layer 5 is a region where the total content of titanium and nitrogen is 70 at% or more. A region where the total content of titanium and nitrogen is less than 70 at% is formed between the titanium nitride layer 5 and the copper member. The region where the total content of titanium and nitrogen is less than 70 at% preferably contains at least one element selected from the group consisting of Cu and Ag, and at least one element selected from the group consisting of Sn, In, and C. These elements contribute to improving the bonding strength with the copper member. Furthermore, the region of the bonding layer 4 containing these elements can also be used as a protruding portion of the bonding layer when the bonded body is used in a ceramic circuit substrate. Forming a protruding portion of the bonding layer can improve the TCT characteristics.

[0047] It is preferable that Ti, at least one selected from the group consisting of Cu and Ag, and at least one selected from the group consisting of Sn, In, and C are added as components of the active metal brazing material. By using an active metal brazing material containing these elements, a bonding layer 4 containing Ti, at least one selected from the group consisting of Cu and Ag, and at least one selected from the group consisting of Sn, In, and C can be obtained.

[0048] The active metal brazing material may contain 1 to 15% by mass of Ti (titanium) or TiH2 (titanium hydride), 15 to 85% by mass of Cu (copper), and 0 to 70% by mass of Ag (silver). It may contain 1 to 50% by mass of one or more elements selected from Sn (tin) and In (indium), and 0.1 to 2% by mass of C (carbon).

[0049] Ti (titanium) is a component that reacts with the nitride ceramic member to form the titanium nitride layer 5. Ti may be added as TiH2 (titanium hydride). The content of Ti or TiH2 is preferably within the range of 5 mass% to 15 mass%. By increasing the Ti content to 5 mass% or more, oxygen is more easily incorporated into the titanium nitride layer.

[0050] Cu and Ag are the main components of the bonding layer 4. When both Ag and Cu are used, the Ag content is preferably in the range of 20% by mass to 60% by mass, and the Cu content is preferably in the range of 15% by mass to 40% by mass. The active metal brazing material does not necessarily contain Ag.

[0051] Sn and In have the effect of lowering the melting point of the brazing filler metal. Furthermore, Sn and In have the effect of improving the TCT characteristics when alloyed with Cu. Carbon is an ingredient that controls the fluidity of the brazing filler metal. Controlling the fluidity of the brazing filler metal is effective in uniformly dispersing the brazing filler metal components.

[0052] The active metal brazing material may contain at least one selected from tungsten (W), molybdenum (Mo), and rhenium (Re) in an amount of 0.1% by mass to 10% by mass. The addition of at least one of carbon, tungsten, molybdenum, and rhenium can control the fluidity of the active metal brazing material. Magnesium (Mg) may also be added to the active metal brazing material.

[0053] The content of the brazing filler metal components is calculated assuming the total of the components constituting the brazing filler metal to be 100 mass %. Binders and solvents used to prepare the brazing filler metal paste are not included in the content of the brazing filler metal components.

[0054] By using the active metal brazing material, as shown in FIG. 2, a titanium nitride layer 5 and a brazing material layer 7 are formed on the bonding layer 4. The brazing material layer 7 is a region of the bonding layer 4 where the total content of titanium and nitrogen is less than 70 at %, and is located between the titanium nitride layer 5 and the metal member 3. The brazing material layer 7 may have a Ti-rich region 9. The main component of the brazing material layer 7 is the component of the active metal brazing material. Therefore, a titanium component is also distributed in the brazing material layer 7. The titanium component in the brazing material layer 7 is titanium that did not become the titanium nitride layer 5.

[0055] The bonding layer 4 has a titanium nitride layer 5 and a brazing filler metal layer 7, and when the brazing filler metal layer 7 is analyzed, it is found to include a Ti-rich region 9 containing 30 at% or more of Ti. The amount of nitrogen in the Ti-rich region 9 is preferably within a range of 1 at% or more and 15 at% or less. The brazing filler metal layer 7 may include a region other than the Ti-rich region 9. For example, the brazing filler metal layer 7 may include a Ti-poor region containing 0 at% or more and less than 30 at% of Ti.

[0056] The brazing filler metal layer 7 can be analyzed by TEM-EDX. Specifically, first, the brazing filler metal layer 7 is subjected to area analysis by EDX. From the results of the area analysis, a region containing 30 at% or more of Ti is identified as a Ti-rich region 9. A measurement region is set within the identified Ti-rich region 9, and the content of elements contained in the Ti-rich region 9 can be measured by analyzing the measurement region by TEM-EDX. The size of the measurement region is set to, for example, 20 nm x 20 nm.

[0057] The amount of nitrogen in the Ti-rich region 9 of the brazing material layer 7 is less than the amount of nitrogen in the titanium nitride layer 5. This can improve the TCT characteristics. Furthermore, the amount of oxygen in the Ti-rich region 9 is preferably within a range of 0 at% to 3 at%. By reducing the amount of oxygen in the Ti-rich region 9, the amount of oxygen in the titanium nitride layer 5 can be controlled within a predetermined range. In other words, by keeping the amount of oxygen in the titanium nitride layer 5 within a predetermined range, the amount of oxygen in the Ti-rich region 9 can be reduced.

[0058] The Ti-rich region 9 is composed of Ti and active metal brazing material components other than Ti. For example, when a CuSnTi-based brazing material is used as the active metal brazing material, the Ti-rich region 9 may contain one or both of Cu and Sn. The upper limit of the Ti content in the Ti-rich region 9 is not particularly limited, but is preferably 50 at% or less. If the Ti content exceeds 50 at%, the proportion of components other than Ti in the active metal brazing material decreases. Therefore, the Ti content in the Ti-rich region 9 is preferably within a range of 30 at% to 50 at%, and more preferably within a range of 33 at% to 46 at%.

[0059] The Ti-rich region 9 preferably contains one selected from Sn or In in a range of 20 at% to 40 at%. The Ti-rich region 9 also preferably contains Cu in a range of 0 at% to 20 at%. In the Ti-rich region, when the sum of the contents of Ti, Sn, Cu, N, and O is taken as 100 at%, the Ti content is preferably 30 at% to 50 at%; the Sn content is 20 at% to 40 at%; the Cu content is 0 at% to 20 at%; the nitrogen content is 1 at% to 15 at%; and the oxygen content is 0 at% to 3 at%. The fact that the Ti-rich region 9 satisfies these composition ranges indicates that the main component of the Ti-rich region 9 is a SnTi alloy phase. In other words, nitrogen is present in the SnTi alloy phase. When In is used instead of Sn, Sn is replaced with In. In other words, the main component of the Ti-rich region 9 is an InTi alloy phase.

[0060] The area ratio of the Ti-rich region 9 is preferably within a range of 5% to 30% of the bonding layer 4. The area ratio of the Ti-rich region 9 is measured using SEM-EDX. A field emission SEM (FE-SEM) may be used as the SEM. The FE-SEM used may be a JEOL JSM-7200F or an apparatus with equivalent performance. The EDX used may be a JEOL EX-74600U4L2Q or an apparatus with equivalent performance.

[0061] Here, we will explain an example of a bonded structure using a copper member as the metal member 3 and a nitride-based ceramic substrate as the nitride-based ceramic member 2. Using FE-SEM, an arbitrary cross section of the bonding layer 4 is observed. The cross section is a plane parallel to the thickness direction. The thickness direction is perpendicular to the surface of the nitride-based ceramic substrate and parallel to the direction connecting the nitride-based ceramic substrate and the copper member. The FE-SEM measurement conditions are set to an acceleration voltage of 15 kV and a magnification of 3000x. The field of view area is set to the thickness of the bonding layer × 40 μm in the width direction. For example, if the thickness of the bonding layer 4 is 30 μm, the field of view area is set to 30 μm in the thickness direction × 40 μm in the width direction. The width direction is parallel to the surface of the nitride-based ceramic substrate and perpendicular to the thickness direction.

[0062] The EDX measurement conditions are set to 50 scans and a dwell time of 0.2 ms. Dwell time is the measurement speed per pixel. When performing EDX area analysis, the capture pixel count is set to 256 pixels horizontally x 198 pixels vertically, the detection count is set to 3700-4100 cps (counts per second), and the quantitative map is set to 5 x 5 bits / point. Point analysis is an analysis using the results of a single detection count measurement (one location). Area analysis is an analysis using the results of multiple detection count measurements. Area analysis is sometimes called surface analysis.

[0063] EDX analysis may be performed after identifying the elements constituting the bonding layer 4 in advance. For example, if Cu (copper), Sn (tin), Ti (titanium), Si (silicon), O (oxygen), and N (nitrogen) are detected as the elements constituting the bonding layer 4, these elements are set as the specific elements. The results of the area analysis are used to map the specific elements. For example, the titanium nitride layer 5 in the bonding layer 4 is identified from the results of mapping Ti and N. As described above, the titanium nitride layer 5 is identified as a region where the total content of titanium and nitrogen is 70 at% or more and 100 at% or less and is connected by 5 μm or more in the surface direction of the nitride-based ceramic member 2. The region of the bonding layer 4 other than the titanium nitride layer 5 is the brazing filler metal layer 7. The Ti mapping results in the brazing filler metal layer 7 identify the Ti-rich region 9. The area ratio of the Ti-rich region 9 can be calculated by measuring the area of ​​the bonding layer 4 and the area of ​​the Ti-rich region 9. SEM-EDX mapping is performed using a function attached to the SEM-EDX. If the device does not have a mapping function, use image software for mapping.

[0064] The area ratio is calculated by analyzing the three regions with EDX and using the average value. The area of ​​one region (field of view area) is the thickness of the bonding layer x 40 μm in the width direction. The measurement field of view is aligned with the bonding layer 4. Three adjacent regions are arbitrarily selected from the cross section of the bonding layer 4, and each of the three regions is analyzed. The bonding layer 4 extends from the boundary between the nitride ceramic substrate and the bonding layer 4 to the boundary between the bonding layer 4 and the copper member.

[0065] The boundary between the nitride ceramic substrate and the bonding layer 4 is the bonding interface between the surface of the nitride ceramic substrate and the titanium nitride layer 5. For example, when a silicon nitride substrate is used, the bonding interface between the silicon nitride substrate and the titanium nitride layer is the boundary between the nitride ceramic substrate and the bonding layer 4. The boundary between the bonding layer 4 and the copper member is defined based on the Ti content. Near the boundary between the bonding layer 4 and the copper member, the Ti content decreases from the bonding layer 4 toward the surface of the copper member. The boundary is defined based on the location where a region with a Ti content of 1 atomic % or less is formed continuously for 50 μm in the width direction. If there are multiple such locations, the boundary between the bonding layer 4 and the copper member is defined based on the location closest to the bonding layer 4 (nitride ceramic substrate) among the multiple locations.

[0066] In the bonded body, copper plates may be bonded to both sides of the nitride ceramic member via bonding layers. When copper plates are bonded to both sides, it is preferable that the titanium nitride layers 5 on both sides have the above-mentioned properties.

[0067] The bonded body according to the embodiment can be used for a ceramic circuit board. Fig. 3 is a side view showing an example of a ceramic circuit board according to the embodiment. In Fig. 3, reference numeral 10 denotes a ceramic circuit board, reference numeral 11 denotes a circuit portion (front copper plate), and reference numeral 12 denotes a heat sink (back copper plate). The circuit portion 11 is obtained by imparting a circuit shape to a metal member. Alternatively, the ceramic circuit board 10 may be obtained by bonding a metal member processed into a circuit shape to a nitride-based ceramic member 2.

[0068] The ceramic circuit board 10 illustrated in FIG. 3 includes two circuit portions 11. Three or more circuit portions 11 may be provided on the nitride ceramic member 2. In the example illustrated in FIG. 3, the circuit portion 11 is provided on the front surface of the nitride ceramic member 2, and the heat sink 12 is provided on the back surface. This example is not limiting, and the circuit portion 11 may be provided on both surfaces of the nitride ceramic member 2. If necessary, the side surfaces of the circuit portion 11 and the heat sink 12 may be formed with an inclined shape. If necessary, the bonding layer 4 may have a protruding portion that protrudes from the end of the circuit portion 11 or the end of the heat sink 12.

[0069] Fig. 4 is a side view showing an example of a semiconductor device according to an embodiment. In Fig. 4, reference numeral 10 denotes a ceramic circuit substrate, reference numeral 14 denotes a semiconductor element, and reference numeral 20 denotes a semiconductor device. The semiconductor device 20 is obtained by mounting the semiconductor element 14 on the circuit section 11. When manufacturing the semiconductor device 20, metal terminals, wire bonding, or resin sealing may be provided as necessary.

[0070] The ceramic circuit substrate 10 according to the embodiment has good TCT characteristics. In recent years, the junction temperature has been increasing along with the improvement in performance of the semiconductor element 14. In the case of a SiC element, the junction temperature is said to be around 200°C.

[0071] The bonded body 1 according to the embodiment suppresses deterioration of the titanium nitride layer 5 due to further oxidation. Oxidation is likely to occur in high-temperature or high-humidity environments. According to the embodiment, oxidation of the titanium nitride layer 5 due to high temperatures or humidity can be suppressed. For example, semiconductor devices used in automobiles or industrial equipment are often used in humid environments in addition to the heat generated by the semiconductor elements. Therefore, deterioration due to further oxidation is more likely to occur. According to the embodiment, deterioration due to oxidation of the titanium nitride layer is suppressed, and therefore the bonded body can be used in a variety of environments.

[0072] Next, a method for manufacturing the bonded body according to the embodiment will be described. The method for manufacturing the bonded body according to the embodiment is not particularly limited as long as it has the above-described configuration. Here, an example of a method for obtaining the bonded body according to the embodiment with a high yield will be described.

[0073] First, a nitride ceramic member is prepared. The nitride ceramic member is preferably a silicon nitride substrate or an aluminum nitride substrate. A copper plate is also prepared as the metal member. The copper plate is preferably an oxygen-free copper plate or a copper alloy plate.

[0074] Next, an active metal brazing material is prepared. The active metal brazing material preferably contains Ti, at least one element selected from the group consisting of Cu and Ag, and at least one element selected from the group consisting of Sn, In, and C. As Ti, simple Ti or TiH2 (titanium hydride) may be added. The mixing ratio of each element in the active metal brazing material is as described above. After mixing the brazing material components, a binder or the like is added to the mixture to prepare an active metal brazing material paste. The binder is, for example, an organic binder.

[0075] An active metal brazing material layer is formed by applying an active metal brazing material paste onto a nitride ceramic member. A copper plate is placed on top of the active metal brazing material layer. When joining copper plates to both sides of a nitride ceramic member, an active metal brazing material layer is also formed on the other side, and a copper plate is placed on top of that. The active metal brazing material layer and copper plate placed on top of the nitride ceramic member is called a laminate.

[0076] A step of heat-bonding the laminated body is carried out. By heat-bonding the laminated body, a bonded body is produced. Furthermore, by heat-bonding, the active metal brazing material layer becomes a bonding layer. It is preferable to use a continuous furnace for the heat-bonding step. A continuous furnace is a furnace that heats an object to be heated while transporting it. For example, International Publication No. 2022 / 244769 (Patent Document 5) discloses a method for manufacturing a bonded body using a continuous furnace. According to the invention described in Patent Document 5, by controlling the temperature rise rate and temperature fall rate, a bonded body can be obtained with a good yield.

[0077] To control the amount of oxygen in the titanium nitride layer, it is effective to control the amount of oxygen in the atmosphere during the thermal bonding process. A continuous furnace is used for the thermal bonding process. The continuous furnace is controlled to a nitrogen atmosphere. The oxygen concentration in the nitrogen atmosphere is preferably in the range of 10 volppm to 1000 volppm. By controlling the amount of oxygen in the nitrogen atmosphere, oxygen is incorporated into the titanium nitride layer formed in the heating process. If the oxygen concentration is less than 10 volppm, there is a possibility that the amount of oxygen in the titanium nitride layer will be insufficient. Furthermore, if the oxygen concentration exceeds 1000 volppm, a region where the total amount of titanium and nitrogen is less than 70 at% is likely to be formed. Therefore, the amount of oxygen in the nitrogen atmosphere is preferably in the range of 10 volppm to 1000 volppm, and more preferably in the range of 50 volppm to 200 volppm. To control the amount of oxygen in the nitrogen atmosphere, oxygen gas may be supplied in addition to nitrogen gas, as necessary.

[0078] The concentration of carbon monoxide (CO) in the nitrogen atmosphere is preferably 1000 vol ppm (0.1 vol%) or less. CO has reducing properties, and therefore CO may inhibit oxygen from being incorporated into titanium nitride. The concentration of CO is preferably 1000 vol ppm or less, and more preferably 100 vol ppm or less.

[0079] As mentioned above, an organic binder is added to the active metal brazing paste. During the thermal bonding process, CO gas may be generated as the organic binder disappears. A continuous furnace is suitable for mass production because it can process the objects to be bonded continuously. It is effective to evacuate the space inside the continuous furnace so that the CO gas generated from the objects to be bonded does not remain.

[0080] When the thermal bonding zone of the continuous furnace is sufficiently evacuated, the amount of oxygen in the nitrogen atmosphere is substantially equal to the amount of oxygen contained in the nitrogen gas supplied to the thermal bonding zone. Similarly, the amount of CO in the nitrogen atmosphere is substantially equal to the amount of CO contained in the nitrogen gas supplied to the thermal bonding zone. Therefore, it is preferable that the oxygen amount of the nitrogen gas supplied to the thermal bonding zone is in the range of 10 volppm to 1000 volppm, and the CO amount of the nitrogen gas is 1000 volppm or less.

[0081] The continuous furnace heat-bonds the laminate while transporting it. The interior of the continuous furnace is divided into multiple processing zones according to temperature range. For example, multiple processing zones are provided, such as a room temperature zone, a temperature-raising zone, a heat-bonding zone, and a temperature-reducing zone. The room temperature zone is the area where the laminate begins to be transported into the continuous furnace. In the temperature-raising zone, the temperature of the laminate is gradually increased to the bonding temperature. In the heat-bonding zone, the temperature of the laminate is maintained at the heating temperature. In the temperature-reducing zone, the temperature of the laminate is gradually decreased. In the temperature-raising zone, the average rate of temperature increase from 200°C to the bonding temperature is preferably in the range of 15°C / min to 200°C / min. In the temperature-reducing zone, the average rate of temperature decrease from the bonding temperature to 200°C is preferably in the range of 15°C / min to 200°C / min.

[0082] For example, when the bonding temperature is in the range of 650°C to 980°C, the temperature of the laminate in the heat bonding zone is maintained in the range of 650°C to 980°C. In this case, it is effective to supply nitrogen gas with a controlled oxygen content to the heat bonding zone. The oxygen content of the nitrogen gas supplied to the heating zone may also be controlled. During heating in the continuous furnace, gas is generated when the binder is removed from the brazing material layer. By supplying nitrogen gas with a controlled oxygen content while evacuating the heating zone, the effect of the gas generated from the brazing material layer on the oxygen concentration in the titanium nitride layer 5 can be reduced.

[0083] In the thermal bonding zone, the nitrogen gas flow rate is preferably 2 liters / minute or more. During thermal bonding, gases such as CO and hydrocarbons (CH-based) are generated from the brazing material layer. By controlling the nitrogen gas flow rate, the gases generated from the brazing material layer can be removed without stagnation. For this reason, the nitrogen gas flow rate is preferably 2 liters / minute or more, and more preferably 30 liters / minute or more. There is no particular upper limit to the nitrogen gas flow rate, but it is preferably 400 liters / minute or less. If the flow rate exceeds 400 liters / minute, the air volume will be too strong, which may cause the laminate being transported to become misaligned. For this reason, the nitrogen gas flow rate is preferably in the range of 2 liters / minute to 400 liters / minute, and more preferably in the range of 30 liters / minute to 300 liters / minute.

[0084] It is preferable to control the flow rate of nitrogen gas supplied to the temperature-raising zone in the same way. This is because the organic binder may volatilize in the temperature-raising zone, generating gases such as CO and hydrocarbons. It is also preferable to control the flow rate of nitrogen gas in the temperature-lowering zone in the same way. Immediately after the thermal bonding zone, the titanium nitride layer 5 may be affected by gases such as CO and hydrocarbons generated by the volatilization of the organic binder.

[0085] It is preferable to control the conveying speed of the laminate in the temperature-reducing zone. The conveying speed in the temperature-reducing zone from 650°C to 400°C is preferably in the range of 1 cm / min to 15 cm / min. For example, the conveying speed in the temperature-reducing zone from 400°C to 200°C may be in the range of 15 cm / min to 100 cm / min. That is, in the temperature-reducing zone, the conveying speed in a predetermined temperature range is slower than the conveying speed in other temperature ranges. In the temperature-reducing zone, the conveying speed may be increased because temperatures below 400°C have little effect on the bonded body. Note that the conveying speed may be slowed, but this increases the total processing time, which is not considered to be good for productivity.

[0086] In the joining process using active metal brazing material, the active metal brazing material melts in the heating zone. As it melts, a reaction occurs between the active metal brazing material and the nitride-based ceramic component, forming a titanium nitride layer. In the cooling zone, the joining layer, including the titanium nitride layer, solidifies. Slowing the conveying speed during the solidifying process of the titanium nitride layer makes it easier for oxygen to be absorbed into the titanium nitride layer. As mentioned above, oxygen is absorbed into the titanium nitride layer during the thermal joining process. If too much oxygen is absorbed in the heating zone, it may have a negative impact on the joining. In the cooling zone, the joining layer is solidifying, so excessive oxygen absorption can be suppressed. Note that a conveying speed of less than 1 cm / min (including 0 cm / min) is too slow, which may result in a long period of contact with oxygen in the nitrogen atmosphere.

[0087] Furthermore, as long as the temperature of the laminate can be controlled, the conveying speed outside the temperature-lowering zone is arbitrary. The conveying speed may be in the range of 1 cm / min to 15 cm / min, or may exceed 15 cm / min. There is no particular upper limit to the conveying speed, but a conveying speed of 30 cm / min or less is preferred. If the conveying speed exceeds 30 cm / min, it may be necessary to lengthen the temperature-raising zone and the heat-bonding zone. This is undesirable because it will increase the size of the continuous furnace.

[0088] The amount of oxygen in the titanium nitride layer can be controlled by the amount of oxygen in the nitrogen atmosphere, the amount of carbon monoxide in the nitrogen atmosphere, the flow rate of the nitrogen gas, the transport speed, etc. Any one of these conditions may be used alone, or a combination of several conditions may be used. By combining several conditions, the amount of oxygen in the titanium nitride layer can be more easily controlled.

[0089] A bonded body can be obtained by the above steps. Thereafter, a circuit shape is imparted to the copper plate of the bonded body to obtain a ceramic circuit board. The step of imparting the circuit shape is preferably an etching step. Alternatively, a laminate may be produced using copper plates to which a circuit shape has been previously imparted. The etching step is also effective when imparting an inclined shape to the side surface of the copper plate or when forming an overhang portion in the bonding layer. From the viewpoints of imparting an inclined shape and forming an overhang portion, the step of imparting the circuit shape is preferably an etching step.

[0090] (Example) (Examples 1 to 6, Comparative Examples 1 to 4) Silicon nitride substrates and aluminum nitride substrates were prepared as nitride ceramic components. The thermal conductivity of the silicon nitride substrate was 90 W / m·K. The three-point bending strength was 600 MPa. The dimensions were 200 mm long x 150 mm wide x 0.32 mm thick. The thermal conductivity of the aluminum nitride substrate was 170 W / m·K. The three-point bending strength was 400 MPa. The dimensions were 150 mm long x 100 mm wide x 0.635 mm thick. Oxygen-free copper plates were used for the copper plates. The thickness of the copper plates is as shown in Table 1. The active metal brazing filler metals shown in Table 2 were also prepared.

[0091] [Table 1]

[0092] [Table 2]

[0093] An active metal braze paste was prepared by adding a binder to the active metal braze. The active metal braze paste was applied to both sides of a silicon nitride substrate to form active metal braze layers. A copper plate was placed on each active metal braze layer. A laminate was prepared by these steps. The laminate included a silicon nitride substrate, active metal braze layers formed on both sides of the silicon nitride substrate, and copper plates placed on each active metal braze layer. The laminate combinations are shown in Table 3.

[0094] [Table 3]

[0095] Next, in Examples 1 to 6 and Comparative Examples 1 and 3, the laminates were heated and bonded using a continuous furnace to obtain a bonded body. In Comparative Examples 2 and 4, the laminates were heated and bonded using a vacuum furnace (batch furnace) to obtain a bonded body.

[0096] In the continuous furnace, the bonding temperature in the heat bonding zone was set within the range of 750°C to 980°C. The temperature increase rate from 200°C to the bonding temperature was set at 20°C / min. The temperature decrease rate from the bonding temperature to 200°C was set at 20°C / min. The characteristics of the nitrogen gas supplied to the heat bonding zone are as shown in Table 4. In the examples, the nitrogen gas flow rates in the heat-up zone, heat bonding zone, and temperature-decrease zone were set within the range of 30 liters / min to 300 liters / min. In the examples, the conveying speed in the temperature-decrease zone was set within the range of 1 cm / min to 15 cm / min. In Comparative Examples 1 and 3, the nitrogen gas flow rates in the heat-up zone, heat bonding zone, and temperature-decrease zone were set at 1 liter / min. In Comparative Examples 1 and 3, the conveying speed in the temperature-decrease zone was set at 35 cm / min. In Comparative Examples 2 and 4, a batch furnace was used, and the bonding temperature was 850°C, and the temperature was increased in a vacuum (10 -3 The bonding was performed at a temperature of 100 Pa or less.

[0097] [Table 4]

[0098] The bonded bodies according to the examples and comparative examples were obtained through the above steps. Next, the cross sections of the bonded bodies were analyzed by TEM-EDX. In both the bonded bodies according to the examples and comparative examples, a titanium nitride layer containing titanium nitride as the main component was observed. That is, a region in which the total of titanium and nitrogen was 70 at% or more and which was connected to each other for 5 μm or more in the surface direction of the nitride ceramic substrate was observed.

[0099] Next, for each of the examples and comparative examples, five mutually separated measurement areas of 20 nm × 20 nm were randomly selected from the titanium nitride layer. Each selected measurement area was subjected to area analysis using TEM-EDX. For each example and comparative example, the average nitrogen content in the five measurement areas, the average oxygen content in the five measurement areas, and the minimum and maximum oxygen content among the five measurement areas were obtained. The oxygen and nitrogen contents were calculated assuming the total of the constituent elements other than carbon to be 100 at%. The thickness of the titanium nitride layer and the presence or absence of Ti-NO compounds were also measured. The results are shown in Table 5.

[0100] [Table 5]

[0101] As can be seen from Table 5, in the examples, the average nitrogen content was in the range of 50 at% or more and 65 at% or less. Furthermore, the average oxygen content was in the range of 1 at% or more and 10 at% or less. Furthermore, the minimum and maximum oxygen content in the five measurement regions were all in the range of 1 at% or more and 10 at% or less. These results demonstrate that oxygen is distributed in the titanium nitride layer in the examples.

[0102] In contrast, in Comparative Example 1, the average value of the oxygen content was less than 1 at%. Furthermore, the minimum value of the oxygen content in the five measurement regions was less than 0.1 at%. That is, in Comparative Example 1, there were portions in the titanium nitride layer where the oxygen content was less than 1 at%. In Comparative Example 2, no oxygen content was detected in the titanium nitride layer. This is because a vacuum furnace (batch furnace) was used. In the batch furnace, the temperature was raised in a vacuum (10 -3 Because the treatment is carried out at a temperature of 1000 Pa or less, oxygen is not incorporated into the titanium nitride layer.

[0103] In addition, in the examples, a Ti-rich region was confirmed in the brazing material layer. In the Ti-rich region, the Ti content was in the range of 30 at% to 50 at% inclusive, the nitrogen content was in the range of 1 at% to 15 at% inclusive, the oxygen content was in the range of 0 at% to 3 at% inclusive, the Sn content was in the range of 20 at% to 40 at% inclusive, and the Cu content was in the range of 0 at% to 20 at% inclusive. These proportions were calculated assuming that the sum of the contents of Ti, Sn, Cu, N, and O was 100 at%. Furthermore, the area ratio of the Ti-rich region in the bonding layer was in the range of 5% to 30% inclusive. In contrast, no Ti-rich region was observed in the comparative examples. The analysis method for the Ti-rich region was as described above.

[0104] Next, the bonded body was subjected to an etching treatment to produce a ceramic circuit board. The shapes of the circuit part and the protruding part of the bonding layer were the same in the examples and comparative examples. The obtained ceramic circuit board was subjected to a TCT test.

[0105] The tests were conducted under a variety of conditions. The ceramic circuit boards using silicon nitride substrates in Examples 1 to 4 and Comparative Examples 1 and 2 were subjected to First Test A. The ceramic circuit boards using aluminum nitride substrates in Examples 5 and 6 and Comparative Examples 3 and 4 were subjected to First Test B. In First Test A, one cycle consisted of holding at -40°C for 30 minutes, holding at room temperature for 10 minutes, holding at 200°C for 30 minutes, and holding at room temperature for 10 minutes, and the presence or absence of defects in the ceramic circuit boards after 3,000 cycles was measured. In First Test B, one cycle consisted of holding at -20°C for 30 minutes, holding at room temperature for 10 minutes, holding at 125°C for 30 minutes, and holding at room temperature for 10 minutes, and the presence or absence of defects in the ceramic circuit boards after 1,500 cycles was measured.

[0106] Furthermore, a second test was conducted on each of the ceramic circuit boards of the examples and comparative examples. In the second test, the samples before the TCT test were left in an environment of a temperature of 85°C and a humidity of 85% for 20 hours, and then the TCT test was conducted. The conditions for the TCT test were the same as those for the first test. That is, the ceramic circuit boards of Examples 1 to 4 and Comparative Examples 1 and 2 were subjected to the first test A. The ceramic circuit boards of Examples 5 and 6 and Comparative Examples 3 and 4 were subjected to the first test B.

[0107] The presence or absence of defects in the ceramic circuit board was evaluated by measuring the area of ​​cracks occurring between the ceramic substrate and the metal plate. An ultrasonic flaw detector (Scanning Acoustic Tomograph: SAT) was used to measure the area of ​​cracks. The results are shown in Table 6. In Table 6, the index eta (η) indicates the ratio of the area of ​​cracks occurring to the bonding area between the ceramic substrate and the metal plate. For example, an eta (η) of 100% indicates that no cracks have occurred, and an eta (η) of 0% indicates that cracks have occurred all over the surface.

[0108] [Table 6]

[0109] As can be seen from Table 6, in the first test, no defects were found in either the Examples or the Comparative Examples. In the second test, no defects were found in the Examples. In contrast, in the Comparative Examples, η decreased compared to the results of the first test, and defects were found. This is thought to be due to the progress of oxidation of the titanium nitride layer while the ceramic circuit board was left in a high-temperature, high-humidity environment. These test results show that the ceramic circuit boards according to the Examples are ceramic circuit boards that are resistant to environments that are prone to oxidation, such as high temperatures and high humidity. Therefore, the ceramic circuit boards according to the Examples are effective for semiconductor devices used in high-temperature or high-humidity environments.

[0110] Embodiments of the invention include the following features. (Feature 1) a nitride ceramic member; a metal member joined to the nitride-based ceramic member via a joining layer; A joint comprising: a titanium nitride layer containing titanium nitride as a main component is formed at the interface between the nitride ceramic member and the bonding layer; A bonded body, wherein the titanium nitride layer includes a portion where the oxygen content is 1 at % or more. (Feature 2) 2. The bonded body according to Feature 1, wherein the amount of nitrogen in the portion of the titanium nitride layer is 20 at % or more. (Feature 3) A measurement area of ​​20 nm × 20 nm in the titanium nitride layer was analyzed by TEM-EDX, and when the total of the constituent elements other than carbon was taken as 100 at%, The average value of the oxygen amount in any five of the measurement regions is 1 at% or more, 3. The bonded body according to Feature 1 or Feature 2, wherein the average amount of nitrogen in the five measurement regions is 20 at % or more. (Feature 4) the average value of the oxygen content is in the range of 1 at% to 10 at%; 4. The bonded body according to Feature 3, wherein the average value of the nitrogen content is in the range of 50 at % to 65 at %. (Feature 5) 5. The bonded body according to Feature 4, wherein the nitrogen content is in the range of 50 at % to 65 at % and the oxygen content is in the range of 1 at % to 10 at % in any of the five measurement regions. (Feature 6) The bonding layer is Ti and At least one selected from the group consisting of Cu and Ag; At least one selected from the group consisting of Sn, In, and C; 6. The conjugate according to any one of Features 1 to 5, comprising: (Feature 7) The bonding layer is the titanium nitride layer, and a brazing material layer positioned between the titanium nitride layer and the metal member; Including, the brazing filler metal layer includes a Ti-rich region containing 30 at% or more of Ti, 7. The joined body according to any one of Features 1 to 6, wherein the amount of nitrogen in the Ti-rich region is within a range of 1 at % to 15 at %. (Feature 8) 8. The joined body according to Feature 7, wherein when a measurement area of ​​20 nm x 20 nm in the brazing material layer is analyzed by TEM-EDX, the measurement area includes the Ti-rich region. (Feature 9) 9. The bonded body according to Feature 7 or Feature 8, wherein when observing the bonding layer at any cross section, the area ratio of the Ti-rich region in the bonding layer is within a range of 5% to 30%. (Feature 10) 10. The bonded body according to any one of Features 1 to 9, wherein the thickness of the titanium nitride layer is in the range of 0.1 μm to 2 μm. (Feature 11) 11. The joined body according to any one of Features 1 to 10, wherein the metal members are joined to both sides of the nitride ceramic member via the joining layers, respectively. (Feature 12) A conjugate according to any one of Features 1 to 11, the nitride-based ceramic member has a substrate shape, The ceramic circuit board, wherein the metal member has a circuit shape. (Feature 13) a nitride ceramic member; a metal member joined to the nitride-based ceramic member via a joining layer; A joint comprising: the bonding layer includes a Ti-rich region, In the Ti-rich region, when the sum of the Ti content, the Sn content, the Cu content, the nitrogen content, and the oxygen content is taken as 100 at%, the Ti content is 30 at% or more and 50 at% or less, the Sn content is 20 at% or more and 40 at% or less, the Cu content is 0 at% or more and 20 at% or less, the nitrogen content is 1 at% or more and 15 at% or less, and the oxygen content is 0 at% or more and 3 at% or less, A joined body, wherein the area ratio of the Ti-rich region is within a range of 5% to 30%.

[0111] Although several embodiments of the present invention have been described above, these embodiments are presented by way of example only and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, modifications, etc. can be made without departing from the spirit of the invention. Modifications of these embodiments are included within the scope and spirit of the invention, as well as within the scope of the invention and its equivalents as set forth in the claims. Furthermore, the above-described embodiments can be implemented in combination with each other. [Explanation of symbols]

[0112] 1...Zygote 2...Nitride ceramic substrate 3...Copper material 4...Joining layer 5...Titanium nitride layer 6…Measurement area 7...Brazing layer 9...Ti-rich region 10...Ceramic circuit board 11...Circuit board 12...Heat sink 14...Semiconductor element 20...Semiconductor device

Claims

1. 1 mass % or more and 15 mass % or less of Ti or TiH ２ preparing an active metal brazing filler metal containing 15% by mass or more and 85% by mass or less of Cu, 0% by mass or more and 70% by mass or less of Ag, and 1% by mass or more and 50% by mass or less of one or more selected from Sn and In; a step of adding an organic binder to the active metal brazing material to prepare an active metal brazing material paste; applying the active metal brazing material paste onto a nitride ceramic member to form an active metal brazing material layer; a step of disposing a copper plate on the active metal brazing material layer to prepare a laminate in which the active metal brazing material layer and the copper plate are disposed on the nitride-based ceramic member; and heat-bonding the laminate using a continuous furnace, the continuous furnace includes a heat bonding zone for heat bonding the laminate; In the heat bonding step, the oxygen amount of the nitrogen gas supplied to the heat bonding zone is 10 vol ppm or more and 1000 vol ppm or less, By the heat bonding, a bonding layer is formed from the active metal brazing material layer and a bonded body is produced; The bonding layer is a titanium nitride layer located at the interface between the nitride ceramic member and the bonding layer, the titanium nitride layer containing 70 at % or more in total of titanium and nitrogen; a brazing material layer positioned between the titanium nitride layer and the copper plate; Including, the titanium nitride layer includes a portion where the oxygen content is 1 at % or more, A measurement region of 20 nm x 20 nm in the titanium nitride layer was analyzed by TEM-EDX, and when the total of the constituent elements other than carbon was taken as 100 at%, the average value of the oxygen amount in any five of the measurement regions is within a range of 1 at% or more and 10 at% or less, the average value of the nitrogen content in the five measurement regions is within a range of 50 at% or more and 65 at% or less; the brazing material layer includes a Ti-rich region containing 30 at% or more of Ti, The method for producing a joined body, wherein the amount of nitrogen in the Ti-rich region is within a range of 1 at % to 15 at %.

2. 2. The method for producing a bonded body according to claim 1, wherein the amount of CO in the nitrogen gas supplied to the heat bonding zone is 1000 vol ppm or less.

3. the heated bonding zone is evacuated and controlled to a nitrogen atmosphere; 3. The method for producing a bonded body according to claim 1, wherein the amount of oxygen in the nitrogen atmosphere is 10 vol ppm or more and 1000 vol ppm or less, and the amount of CO is 1000 vol ppm or less.

4. 3. The method for manufacturing a bonded body according to claim 1, wherein the flow rate of the nitrogen gas supplied to the heat bonding zone is in the range of 2 liters / minute to 400 liters / minute.

5. 4. The method for manufacturing a bonded body according to claim 3, wherein the flow rate of the nitrogen gas supplied to the heat bonding zone is in the range of 2 liters / minute to 400 liters / minute.

6. 3. The method for manufacturing a bonded body according to claim 1, wherein the bonding temperature in the heated bonding zone is in the range of 650°C or higher and 980°C or lower.

7. The method for manufacturing a bonded body according to claim 5, wherein the bonding temperature in the heated bonding zone is in the range of 650°C or more and 980°C or less.

8. the continuous furnace has a temperature-raising zone, the heat-bonding zone, and a temperature-lowering zone; In the temperature-raising zone, the average temperature-raising rate from 200° C. to the bonding temperature is in the range of 15° C. / min or more and 200° C. / min or less; 7. The method for manufacturing a bonded body according to claim 6, wherein an average rate of temperature drop from the bonding temperature to 200°C in the temperature drop zone is in the range of 15°C / min to 200°C / min.

9. the continuous furnace has a temperature-raising zone, the heat-bonding zone, and a temperature-lowering zone; In the temperature-raising zone, the average temperature-raising rate from 200° C. to the bonding temperature is in the range of 15° C. / min or more and 200° C. / min or less; 8. The method for manufacturing a bonded body according to claim 7, wherein an average rate of temperature drop from the bonding temperature to 200°C in the temperature drop zone is in the range of 15°C / min to 200°C / min.

10. 10. The method for manufacturing a bonded body according to claim 9, wherein the bonding layer has a nitrogen content in the range of 50 at % or more and 65 at % or less and an oxygen content in the range of 1 at % or more and 10 at % or less in any of the five measurement regions.

11. The bonding layer is Ti and At least one selected from the group consisting of Cu and Ag; At least one selected from the group consisting of Sn, In, and C; The method for producing a bonded body according to claim 10, comprising:

12. The method for manufacturing a bonded body according to claim 11, wherein the thickness of the titanium nitride layer is in the range of 0.1 μm to 2 μm.

13. 3. The method for manufacturing a joined body according to claim 1, wherein the nitride ceramic member is a silicon nitride sintered member.

14. The method for manufacturing a joined body according to claim 11, wherein the nitride ceramic member is a silicon nitride sintered member.

15. Implementing the method for producing a bonded body according to claim 1 or 2, The method for manufacturing a ceramic circuit board further comprises subjecting the copper plate of the resulting bonded body to an etching process.

16. Implementing the method for producing a bonded body according to claim 14, The method for manufacturing a ceramic circuit board further comprises subjecting the copper plate of the resulting bonded body to an etching process.

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