Inductor component

Abstract

To provide an inductor component which can suppress iron loss so as to prevent degradation in Q-value even if it is used at high frequencies.SOLUTION: An inductor component 1 for high frequencies comprises: an element assembly 10; a coil 20 provided inside the element assembly; and a first external electrode 30 and a second external electrode 40 which are provided on the element assembly and are electrically connected to the coil. An axis of the coil is parallel to a bottom surface 17, and the coil has a helical structure which is wound around along the axis. The element assembly has an insulating layer, an internal magnetic member 63, a first external magnetic member 61, and a second external magnetic member 62. The internal magnetic member is located inside of the coil in an axial direction of the coil. The first external magnetic member and the second external magnetic member are located outside of the coil in the axial direction.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] The present invention relates to an inductor component. [Background technology]

[0002] A conventional inductor component is described in Japanese Patent Laid-Open Publication No. 2015-15297 (Patent Document 1). This inductor component has an element body, a coil provided within the element body, a first external electrode, and a second external electrode. The coil is formed by forming a coil conductor layer on an insulating paste layer, laminating such insulating paste, and then firing it. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2015-015297 Summary of the Invention [Problem to be solved by the invention]

[0004] In the inductor components described above, iron loss occurs when used at high frequencies, which can result in a deterioration in the Q value. Therefore, an object of the present invention is to provide an inductor component that can suppress iron loss and deterioration of the Q value even when used at high frequencies. [Means for solving the problem]

[0005] In order to solve the above problems, a high-frequency inductor component according to one aspect of the present disclosure comprises: The base body and a coil provided within the element body; a first external electrode and a second external electrode provided on the element body and electrically connected to the coil; An inductor component comprising: the element body includes a first end face and a second end face facing each other, a third end face and a fourth end face facing each other, a bottom face connected between the first end face and the second end face and between the third end face and the fourth end face, and a top face facing the bottom face; the first external electrode is formed from the first end surface to the bottom surface, the second external electrode is formed from the second end surface to the bottom surface, the coil has a helical structure in which the axis of the coil is parallel to the bottom surface and is wound along the axis so as to intersect the third end surface and the fourth end surface; the element body has an insulating layer, an internal magnetic member, a first external magnetic member, and a second external magnetic member; the internal magnetic member is located inside the coil in the axial direction, the first external magnetic member and the second external magnetic member are located outside the coil in the axial direction, the coil comprises Ag; the insulating layer includes glass; the internal magnetic member, the first external magnetic member, and the second external magnetic member include a magnetic material; The size of the inductor component in a direction parallel to the bottom surface and perpendicular to the axis is less than 0.7 mm; The size of the inductor component in a direction parallel to the axis is less than 0.4 mm; The inductance value is 100nH or less. the internal magnetic member, the first external magnetic member, and the second external magnetic member are sintered bodies containing microparticles, The microparticles have an irregular shape.

[0006] In the inductor component of the present disclosure, the internal magnetic member, first external magnetic member, and second external magnetic member are sintered bodies containing microparticles, so that when used at high frequencies, they can ensure long-term reliability without degradation in life tests. Because the microparticles have small particle diameters and irregular shapes, no iron loss occurs even at high frequencies, and the Q value of the inductor component does not deteriorate.

[0007] In one embodiment of the high frequency inductor component, the magnetic material includes at least one of Co-based ferrite, hexagonal ferrite, and metal magnetic powder having a particle size of 1 μm or less.

[0008] According to the above embodiment, since the loss is small up to high frequencies compared to when a magnetic material such as a general Ni-Zn ferrite is used, the Q value of the inductor component can be improved while maintaining high frequency characteristics.

[0009] Moreover, in one embodiment of the high frequency inductor component, the first external electrode and the second external electrode are embedded in the element body, The coil has a plurality of coil wires stacked along the axis, In a cross section perpendicular to the axis and including the coil wiring, the first external electrode, and the second external electrode, the area of ​​the insulating layer is larger than the total area of ​​the coil wiring, the first external electrode, and the second external electrode.

[0010] According to the embodiment, the areas of the coil and the external electrodes can be reduced, so that a decrease in the Q value and a decrease in the self-resonant frequency (SRF) at high frequencies due to magnetic loss can be suppressed.

[0011] In one embodiment of the high frequency inductor component, when the element body and the coil are projected onto the third end surface along the axial direction, The shortest distance between the outer circumferential surface of the internal magnetic member and the inner circumferential surface of the coil is 10 μm or more and 20 μm or less.

[0012] According to the above embodiment, by ensuring a gap between the coil and the internal magnetic material, short circuits and current leakage can be suppressed.

[0013] In one embodiment of the high frequency inductor component, the internal magnetic member is present only on the inner diameter side of the coil.

[0014] According to the above embodiment, since there is no internal magnetic member between the coil and the external electrode, a decrease in SRF can be suppressed. In addition, since the exterior of the coil can be integrally formed with an insulating layer, the strength of the inductor component is increased. Moreover, since there is no internal magnetic member outside the coil, the diameter of the coil can be increased.

[0015] In one embodiment of the high-frequency inductor component, the first external magnetic member constitutes the third end face, and the second external magnetic member constitutes the fourth end face.

[0016] According to the above embodiment, it is not necessary to provide other members on the magnetic member, and the size of the element can be reduced.

[0017] In one embodiment of the high frequency inductor component, the size of the inductor component in a direction perpendicular to the bottom surface is larger than the size of the inductor component in a direction parallel to the axis.

[0018] According to the embodiment, the diameter of the coil can be increased.

[0019] In addition, in one embodiment of the high-frequency inductor component, the first external magnetic member or the second external magnetic member extends on the insulating layer on at least one of the bottom surface, the top surface, the first end surface, and the second end surface.

[0020] According to the embodiment, the degree of adhesion between the external magnetic member and the element body is increased.

[0021] In addition, in one embodiment of a high-frequency inductor component, when the base body and the coil are projected onto the third end surface along the axial direction, the outer surface of the internal magnetic member at the inner diameter side of the coil has a shape corresponding to the inner surface of the coil.

[0022] According to the above embodiment, the internal magnetic member can be made larger.

[0023] In one embodiment of the high frequency inductor component, the self-resonant frequency is 1 GHz or higher. [Effects of the Invention]

[0024] According to the present invention, it is possible to provide an inductor component that can suppress iron loss and deterioration of the Q value even when used at high frequencies. [Brief explanation of the drawings]

[0025] [Figure 1] 1 is a perspective view showing a first embodiment of an inductor component of the present invention. [Figure 2] FIG. 2 is a bottom view of the inductor component. [Figure 3] FIG. 2 is a top view of the inductor component. [Figure 4] FIG. 2 is a front view of the inductor component. [Figure 5] FIG. 2 is a side view of the inductor component. [Figure 6] XX cross-sectional view of the inductor component. [Figure 7] FIG. 2 is a perspective view of an inductor component. [Figure 8] FIG. 2 is an exploded view of the inductor component. [Figure 9] FIG. 2 is a perspective front view of the inductor component. [Figure 10] FIG. 4 is a cross-sectional view showing a second embodiment of the inductor component of the present invention. [Figure 11A] 10A to 10C are explanatory views illustrating a part of a method for manufacturing the inductor component according to the second embodiment. [Figure 11B] 10A to 10C are explanatory views illustrating a part of a method for manufacturing the inductor component according to the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0026] Hereinafter, an inductor component according to one aspect of the present disclosure will be described in detail with reference to the illustrated embodiments. Note that the drawings include some schematic views and may not reflect actual dimensions or proportions.

[0027] (First embodiment) FIG. 1 is a perspective view showing a first embodiment of an inductor component. FIG. 2 is a bottom view of the inductor component 1. FIG. 3 is a top view of the inductor component 1. FIG. 4 is a front view of the inductor component 1. FIG. 5 is a side view of the inductor component 1. FIG. 6 is a cross-sectional view of the inductor component 1 taken along line XX. FIG. 7 is a perspective view of the inductor component 1. FIG. 8 is an exploded view of the inductor component 1.

[0028] As shown in Figures 1 to 8, the inductor component 1 has an element body 10, a coil 20 provided on the element body 10, and a first external electrode 30 and a second external electrode 40 provided on the element body 10 and electrically connected to the coil.

[0029] The inductor component 1 is electrically connected to wiring on a circuit board (not shown) via first and second external electrodes 30, 40. The inductor component 1 is used, for example, as an impedance matching coil (matching coil) for high-frequency circuits, and is used in electronic devices such as personal computers, DVD players, digital cameras, TVs, mobile phones, car electronics, and medical and industrial machinery. However, the uses of the inductor component 1 are not limited to this, and it can also be used, for example, in tuning circuits, filter circuits, rectifying and smoothing circuits, and the like.

[0030] The element body 10 is formed by stacking multiple insulating layers 11. The insulating layers 11 include glass. More specifically, the insulating layers 11 are made of sintered glass. Examples of glass include borosilicate glass. The insulating layers 11 may further include non-magnetic ferrite, alumina, resin, etc. The multiple insulating layers 11 are stacked in the W direction. The insulating layers 11 are layered in the LT plane perpendicular to the stacking direction in the W direction. Note that the interface between two adjacent insulating layers 11 may not be clear due to firing or other reasons.

[0031] The element body 10 is formed in a substantially rectangular parallelepiped shape. The element body 10 includes a first end face 13 and a second end face 14 that face each other, a third end face 15 and a fourth end face 16 that face each other, a bottom face 17 connected between the first end face 13 and the second end face 14 and between the third end face 15 and the fourth end face 16, and a top face 18 that faces the bottom face 17. That is, the outer surface of the element body 10 is composed of the first end face 13, the second end face 14 that faces the first end face 13, the third end face 15 that faces the first end face 13 and the second end face 14, the fourth end face 16 that faces the third end face 15, the bottom face 17 that faces the third end face 15 and the fourth end face 16, and the top face 18 that faces the bottom face 17. As shown in the figure, the L direction is a direction perpendicular to the first end face 13 and the second end face 14, the W direction is a direction perpendicular to the third end face 15 and the fourth end face 16, and the T direction is a direction perpendicular to the bottom face 17 and the top face 18. The L direction, W direction, and T direction are perpendicular to each other.

[0032] Coil 20 has a helical structure in which the axis of the coil is parallel to the bottom surface 17 of element body 10 and is wound along the axis of the coil so as to intersect the third end surface 15 and the fourth end surface 16 of element body 10.

[0033] The coil 20 is formed in a substantially rectangular shape when viewed in the axial direction, but is not limited to this shape. The shape of the coil 20 may be, for example, a circle, an ellipse, a rectangle, or another polygon. The axial direction of the coil 20 refers to a direction parallel to the central axis of the spiral around which the coil 20 is wound. The axial direction of the coil 20 and the lamination direction of the insulating layer 11 are the same direction. In this application, "parallel" is not limited to a strict parallel relationship, but also includes a substantial parallel relationship, taking into account the range of realistic variations.

[0034] The coil 20 includes coil wiring 21 wound along a plane. The multiple coil wirings 21 are stacked along the axial direction. The coil wiring 21 is wound on a main surface (LT plane) of the insulating layer 11 that is perpendicular to the axial direction. Adjacent coil wirings 21 in the stacking direction are electrically connected in series through via wirings 26 that penetrate the insulating layer 11 in the thickness direction (W direction). That is, the coil 20 includes coil wiring 21 and via wirings 26. In this manner, the multiple coil wirings 21 are electrically connected in series to each other and form a spiral. Specifically, the coil 20 has a configuration in which multiple coil wirings 21 are electrically connected in series to each other and are stacked, each with less than one turn. The coil wiring 21 is composed of one coil conductor layer. Note that the coil wiring 21 may be composed of multiple coil conductor layers stacked in surface contact with each other. In this case, the coil wiring 21 can have a high aspect ratio and a high degree of rectangularity. The coil wiring 21 may also have a spiral shape with one or more turns.

[0035] The coil 20 contains Ag. The coil 20 may contain a conductive material other than Ag (for example, Cu, Au, etc.) and glass.

[0036] The first external electrode 30 is L-shaped and extends from the first end face 13 to the bottom face 17. The second external electrode 40 is L-shaped and extends from the second end face 14 to the bottom face 17. That is, the first and second external electrodes 30, 40 are both exposed at the bottom face 17. The first external electrode 30 is connected to a first end of the coil 20, and the second external electrode 40 is connected to a second end of the coil 20. The first external electrode 30 is made up of two layers: a base electrode layer 31 and a plating film layer 32. The second external electrode 40 is made up of two layers: a base electrode layer 41 and a plating film layer . The base electrode layer 31 is composed of multiple external electrode conductor layers 33 stacked in surface contact with each other. The base electrode layer 41 is composed of multiple external electrode conductor layers 43 stacked in surface contact with each other. The base electrode layers 31, 41 may be composed of a conductive material such as Ag, Cu, or Au, and glass particles, or may be formed from the same material as the coil 20. The external electrode conductor layers 33 and 43 may be embedded in the element body 10, or may be formed on the outer surface of the element body 10. The plating film layers 32 and 42 are formed by, for example, plating of Ni, Sn, Au, Cu, or the like, and more specifically, by plating of Ni and Sn.

[0037] The element body 10 further includes a first external magnetic member 61 , a second external magnetic member 62 , and an internal magnetic member 63 .

[0038] The first external magnetic member 61 and the second external magnetic member 62 are located outside the coil 20 in the axial direction of the coil 20. The first external magnetic member 61 constitutes the third end surface 15 of the element body 10, and the second external magnetic member 62 constitutes the fourth end surface 16 of the element body 10. The first external magnetic member 61 and the second external magnetic member 62 contain a magnetic material. In this specification, the term "magnetic member" refers to a member containing a magnetic material and does not necessarily contain resin, but may be a composite body of resin and a magnetic material. For the purpose of insulation and protection, other members such as insulating layers made of resin or inorganic material may be laminated (coated) on the outer surfaces of the first and second external magnetic members 61 and 62. In other words, providing other members can prevent peeling and cracking of the first and second external magnetic members 61 and 62, as well as short circuits and current leakage between the first and second external electrodes 30 and 40.

[0039] The internal magnetic member 63 is connected to the first external magnetic member 61 and the second external magnetic member 62. The internal magnetic member 63 is located inside the coil 20 in the axial direction of the coil 20. The internal magnetic member 63 includes a magnetic material. The internal magnetic member 63 may be made of the same material as the first external magnetic member 61 and the second external magnetic member 62.

[0040] The first external magnetic member 61, the second external magnetic member 62, and the internal magnetic member 63 are sintered bodies containing microparticles. Microparticles are, for example, particles with an average particle size D50 of 1 μm or less. The inclusion of microparticles ensures long-term reliability when used at high frequencies. The lower limit of the average particle size D50 of the microparticles is not particularly limited, but is, for example, 1 nm or more. The average particle size D50 can be measured by a general measurement method using images obtained with a scanning electron microscope (SEM).

[0041] The microparticles have an irregular shape. An irregular shape refers to a shape that is not a perfect sphere, such as a needle, flat, star, square, or approximately elliptical shape. The irregular shape reduces iron loss even at high frequencies, and suppresses deterioration of the Q value of the inductor component.

[0042] In this specification, a true sphere refers to a particle having a circularity δ of 1.0, as described below. δ=d HA / D e =d HB / D p D p is the longest diameter of the microparticle in the particle image, and D s is the shortest diameter of the microparticle in the particle image, and D e is the area S of the microparticle in the particle image p and the ratio λ(=D s / D p ) is the major axis of an ellipse with an area and length ratio equal to d. HA is the area S of the microparticle in the particle image p is the diameter of a circle with an area equal to , and d is the Heywood diameter. HB is the long diameter D of the microparticle in the particle image p and minor axis D s is the diameter of a circle with an area equal to that of an ellipse with major and minor axes equal to . Particle images can be obtained from images obtained with an SEM using electrospray spectroscopy.

[0043] The circularity δ of the microparticles is preferably less than 0.8. The circularity δ may be, for example, 0.6 or more and less than 0.8, 0.5 or more and less than 0.8, 0.5 or more and less than 0.7, 0.4 or more and less than 0.8, 0.2 or more and less than 0.4, or 0.2 or more and less than 0.5. The circularity δ is not particularly limited, but may be 0.3 or more.

[0044] The size of inductor component 1 is less than 0.7 mm in a direction parallel to bottom surface 17 and perpendicular to the axis of coil 20, and less than 0.4 mm in a direction parallel to the axis of coil 20. For example, the size of inductor component 1 (L direction × W direction × T direction) is 0.6 mm × 0.3 mm × 0.3 mm, 0.4 mm × 0.2 mm × 0.2 mm, 0.2 mm × 0.1 mm × 0.1 mm, etc. Furthermore, the lengths in the W direction and T direction do not have to be equal, and may be, for example, 0.4 mm × 0.2 mm × 0.3 mm. The inductor component 1 is a high-frequency inductor component with an L value of 100 nH or less. Here, "high-frequency" means that the SRF of the inductor component 1 is 500 MHz or higher. Preferably, the SRF of the inductor component 1 is 1 GHz or higher, which allows the inductor component 1 to be used in a variety of high-frequency circuits.

[0045] As shown in FIG. 8, the magnetic material in the first and second external magnetic members 61 and 62 and the internal magnetic member 63 preferably includes at least one of Co-based ferrite, hexagonal ferrite, and a metal magnetic powder having an average particle size D50 of 1 μm or less. The use of such a magnetic material results in lower magnetic loss up to high frequencies compared to common magnetic materials such as Ni-Zn ferrite, improving the Q value of the inductor component while maintaining its high-frequency characteristics. The magnetic material may be present in a sintered compact. The average particle size D50 can be measured using a SEM.

[0046] As shown in FIG. 8, when the first and second external electrodes 30, 40 are embedded in the base body 10, the area of ​​the insulating layer 11 is preferably larger than the total area of ​​the coil 20, the first external electrode 30, and the second external electrode 40 in a cross section perpendicular to the axis of the coil 20 and in which the coil wiring 21 and the first and second external electrodes 30, 40 are present. By adopting this configuration, the total area of ​​the coil 20 and the first and second external electrodes 30 and 40 in that cross section, i.e., the area of ​​the conductor portion, can be reduced, thereby suppressing a decrease in Q at high frequencies due to eddy current loss generated when magnetic flux enters the conductor, and a decrease in SRF. Note that the area of ​​the insulating layer 11 does not need to be larger than the above total area in all cross sections, as long as it is larger in at least one cross section.

[0047] 9 is a perspective front view of the inductor component 1 excluding the first and second external magnetic members 61 and 62 and the plating film layers 32 and 42. In this disclosure, a "front view" refers to a view of the inductor component 1 viewed from the stacking direction (W direction). In FIG. 9, the coil wirings 21 overlap each other and surround a portion of the insulating layer and the internal magnetic member 63. "Overlapping each other" also includes cases where slight stacking misalignment occurs in the coil wirings 21 due to manufacturing variations or the like. 9 , when element body 10 and coil 20 are projected onto third end face 15 along the axial direction of coil 20, the shortest distance x between the outer circumferential surface of internal magnetic member 63 and the inner circumferential surface of coil 20 is 10 μm or more and 20 μm or less. Note that, at this time, part of insulating layer 11 exists between the outer circumferential surface of internal magnetic member 63 and the inner circumferential surface of coil 20. According to the embodiment, since the shortest distance x is 20 μm or less, the area of ​​the internal magnetic member 63 can be increased, thereby further increasing the Q value. Furthermore, since the shortest distance x is 10 μm or more, a sufficient gap can be secured between the coil 20 and the internal magnetic member 63, thereby suppressing short circuits and current leakage via the internal magnetic member 63. Furthermore, since the shortest distance x is 10 μm or more, the influence of high-frequency magnetic loss in the internal magnetic member 63 can be reduced, thereby further improving the Q value.

[0048] Preferably, the internal magnetic member 63 is present only on the inner diameter side of the coil 20 . According to the above embodiment, the internal magnetic member 63 is not present between the coil 20 and the first external electrode 30 and the second external electrode 40, making it possible to suppress a decrease in SRF. Furthermore, the exterior of the coil 20 can be integrally formed with the insulating layer 11, thereby increasing the strength of the inductor component 1. Moreover, since the internal magnetic member 63 is not present outside the coil 20, the diameter of the coil 20 can be increased.

[0049] Preferably, the size of inductor component 1 in a direction perpendicular to bottom surface 17 of element body 10 (T direction) is larger than the size of inductor component 1 in a direction parallel to the axis of coil 20 (W direction). By adopting this configuration, the inner diameter of coil 20 can be increased. The size of the inductor component 1 in a direction parallel to the axis of the coil 20 (W direction) may be larger than the size of the inductor component 1 in a direction perpendicular to the bottom surface 17 of the element body 10 (T direction). By adopting such an embodiment, the number of turns of the coil 20 (in other words, the number of coil wires 21) can be increased.

[0050] Preferably, when the element body 10 and the coil 20 are projected onto the third end face 15 along the axial direction of the coil 20, the outer peripheral surface of the portion of the internal magnetic member 63 on the inner diameter side of the coil 20 has a shape that corresponds to the inner peripheral surface of the coil 20. For example, the inner peripheral surface of the coil has an uneven shape, and the outer peripheral surface of the magnetic member has a shape that follows the uneven shape. This uneven shape may be formed by the end of the coil wiring 21, i.e., by a via pad. By adopting the above-described embodiment, the internal magnetic member 63 can be made larger.

[0051] (Method of manufacturing inductor component 1) Next, a description will be given of an example of a method for manufacturing the inductor component 1. Note that the method for manufacturing the inductor component 1 is not limited to the following method, and other manufacturing methods may also be used.

[0052] First, prepare an insulating paste whose main component is borosilicate glass and a conductive paste whose main component is Ag. The insulating paste will become an insulating layer after firing, which will be described later. The conductive paste will become coil wiring, via wiring, or a base electrode layer depending on the application position after firing, which will be described later.

[0053] Next, an insulating paste is applied by screen printing to form an insulating layer. A required amount of conductive paste is applied onto the applied insulating paste by screen printing, and the coil wiring and the underlying electrode layer are formed by a patterning process using photolithography.

[0054] Next, a required amount of insulating paste is applied by screen printing onto the insulating paste that has already been applied and patterned with the conductive paste, and openings are then formed in the insulating paste by a patterning process using photolithography.

[0055] Next, a required amount of conductive paste is applied by screen printing onto the insulating paste with the openings. At this time, the openings are filled with the conductive paste to form the via wiring and the underlying electrode layer. Then, as described above, a patterning process is performed using photolithography to form the coil wiring and the underlying electrode layer.

[0056] Next, through holes for providing internal magnetic members are formed on the inner diameter side of the coil wiring of the mother laminate using a laser, sandblasting, etc. Note that the method for forming the through holes may be a method of opening them by photolithography, or a method of forming a dummy conductor on the inner diameter side and opening it by metal etching. Next, the mother laminate is cut into a plurality of unfired laminates by dicing, etc. In the step of cutting the mother laminate, the portions that will become the base electrode layers are exposed from the laminate on the cut surfaces formed by cutting.

[0057] Next, the through holes are filled with magnetic paste to form the internal magnetic members, and further, the end faces of the laminate are coated with magnetic paste to form the external magnetic members.

[0058] Next, the unsintered laminate is fired under predetermined conditions to obtain coil wiring, via wiring, and base electrode layers from the conductive paste, insulating layers from the insulating paste, and internal and external magnetic members from the magnetic paste, thus obtaining an element body having insulating layers, internal and external magnetic members.

[0059] The element body is then subjected to barrel processing, and then a plating film layer is formed by barrel plating on the exposed portion of the base electrode layer, forming Ni plating having a thickness of 2 μm to 10 μm and Sn plating having a thickness of 2 μm to 10 μm. Through these steps, the inductor component 1 is completed.

[0060] In the above, the unsintered laminate was fired. Alternatively, through holes may be formed in the mother laminate, followed by firing, and then the through holes may be filled with magnetic paste to form the internal magnetic members. In this case, after filling with the magnetic paste, the laminate is cut by dancing or the like. In this case, the internal and external magnetic members can be formed by thermally curing the magnetic paste.

[0061] (Second embodiment) FIG. 10 is a cross-sectional view of an inductor component 1A of the second embodiment taken along the WT direction. The inductor component 1A differs from the inductor component 1 of the first embodiment in the shapes of the first and second external magnetic members. This difference will be explained below. The other configurations are the same as those of the first embodiment, and the same reference numerals as those of the first embodiment are used, and the explanation thereof will be omitted.

[0062] In the inductor component 1A, the first external magnetic member 61 extends onto the insulating layers 11 on the bottom surface 17 and the top surface 18 of the element body 10. That is, the extending portions 64 of the first external magnetic member 61 are located on the third end face 15 side of the bottom surface 17 and the top surface 18. The second external magnetic member 62 extends onto the insulating layers 11 on the bottom surface 17 and the top surface 18 of the element body 10. That is, the extending portions 64 of the second external magnetic member 62 are located on the fourth end face 16 side of the bottom surface 17 and the top surface 18. By adopting the above-described embodiment, the degree of adhesion between the first and second external magnetic members 61, 62 and the element body 10 increases. In addition, the first external magnetic member 61 may extend onto the insulating layer 11 on at least one of the bottom surface 17, top surface 18, first end surface 13, and second end surface 14 of the base body 10, and the second external magnetic member 62 may extend onto the insulating layer 11 on at least one of the bottom surface 17, top surface 18, first end surface 13, and second end surface 14 of the base body 10.

[0063] (Manufacturing method of inductor component 1A) Next, an example of a method for manufacturing the inductor component 1A will be described. Note that the method for manufacturing the inductor component 1A is not limited to the following method, and other manufacturing methods may also be used.

[0064] The inductor component 1A is manufactured in the same manner as the inductor component 1 up to the formation of the mother laminate.

[0065] Next, through holes 600 for providing internal magnetic members are formed on the inner diameter side of the coil wiring of the mother laminate using a laser, sandblasting, or the like. Next, the mother laminate is cut by dicing or the like into a plurality of unfired laminates 100. In the step of cutting the mother laminate, the portions that will become the base electrode layers are exposed from the laminate 100 on the cut surfaces formed by cutting.

[0066] Next, the through holes are filled with magnetic paste, as will be described below with reference to Figures 11A and 11B. 11A is an explanatory diagram illustrating a method for filling magnetic paste 610 into through holes 600 of inductor component 1A after a cutting process and providing extension portions 640 that will become extension portions 64. FIG. 11B is an explanatory diagram illustrating a state in which through holes 600 have been filled with magnetic paste 610 and the above-mentioned extension portions 640 have been provided. Note that in FIGS. 11A and 11B, laminate 100 is depicted as a schematic cross-sectional view in the WT direction. Note that laminate 100 has coil portion 200, element body portion 110, and through holes 600, and coil portion 200 and element body portion 110 become coil 20 and element body 10, respectively, after firing. As shown in FIG. 11A, magnetic paste 610 is placed on both end surfaces of laminate 100, and is sandwiched and pressed from both sides by a pair of dies 700. As shown in Figure 11B, by pressing, a portion of the magnetic paste 610 is filled into the through hole 600 to form an internal magnetic member, and further, a portion of the magnetic paste 610 is left on the end surface of the laminate to form an external magnetic member, and further, a portion of the magnetic paste 610 is inserted into the opening side of the gap between adjacent laminates 100 to form an extension portion 640.

[0067] Next, after removing the die 700, the unfired laminate 100 is fired under predetermined conditions, and then the extension portion 640 is divided into two to separate the adjacent laminates. At this time, the two divided parts of the extension portion 640 each form an extension section 64. In this manner, an element body 10 having an insulating layer 11, an internal magnetic member 63, and first and second external magnetic members 61, 62 is obtained.

[0068] Next, in the same manner as in the first embodiment, element body 10 is subjected to barrel processing, and plated film layers 32 and 42 are provided by barrel plating, thereby completing inductor component 1A.

[0069] The present invention is not limited to the first and second embodiments described above, and design modifications are possible without departing from the gist of the present invention.

[0070] The materials are not limited to those exemplified above, and known materials can be used.

[0071] The through holes may be filled with magnetic paste before the mother laminate is cut by dicing, etc. Alternatively, the mother laminate may be partially cut and filled with magnetic paste, and then the mother laminate may be completely separated.

[0072] In the above-described embodiment, the first and second external electrodes 30, 40 are L-shaped, but may be five-sided electrodes, for example. That is, the first external electrode 30 may be provided on the entire second end face 14 and on parts of the third end face 15, the fourth end face 16, the bottom face 17, and the top face 18, and the second external electrode 40 may be provided on the entire first end face 13 and on parts of the third end face 15, the fourth end face 16, the bottom face 17, and the top face 18.

[0073] The present disclosure includes the following aspects. <1> The base body and a coil provided within the element body; a first external electrode and a second external electrode provided on the element body and electrically connected to the coil; An inductor component comprising: the element body includes a first end face and a second end face facing each other, a third end face and a fourth end face facing each other, a bottom face connected between the first end face and the second end face and between the third end face and the fourth end face, and a top face facing the bottom face; the first external electrode is formed from the first end surface to the bottom surface, the second external electrode is formed from the second end surface to the bottom surface, the coil has a helical structure in which the axis of the coil is parallel to the bottom surface and is wound along the axis so as to intersect the third end surface and the fourth end surface; the element body has an insulating layer, an internal magnetic member, a first external magnetic member, and a second external magnetic member; the internal magnetic member is located inside the coil in the axial direction, the first external magnetic member and the second external magnetic member are located outside the coil in the axial direction, the coil comprises Ag; the insulating layer includes glass; the internal magnetic member, the first external magnetic member, and the second external magnetic member include a magnetic material; The size of the inductor component in a direction parallel to the bottom surface and perpendicular to the axis is less than 0.7 mm; The size of the inductor component in a direction parallel to the axis is less than 0.4 mm; The inductance value is 100nH or less. the internal magnetic member, the first external magnetic member, and the second external magnetic member are sintered bodies containing microparticles, The microparticles are irregularly shaped. High frequency inductor components. <2> The magnetic material includes at least one of Co-based ferrite, hexagonal ferrite, and metal magnetic powder having a particle size of 1 μm or less. <1> 2. A high-frequency inductor component according to claim 1. <3> the first external electrode and the second external electrode are embedded in the element body, The coil has a plurality of coil wires stacked along the axis, In a cross section perpendicular to the axis and including the coil wiring, the first external electrode, and the second external electrode, the area of ​​the insulating layer is larger than the total area of ​​the coil wiring, the first external electrode, and the second external electrode. <1> or <2> 2. A high-frequency inductor component according to claim 1. <4> When the element body and the coil are projected onto the third end surface along the axial direction, The shortest distance between the outer circumferential surface of the internal magnetic member and the inner circumferential surface of the coil is 10 μm or more and 20 μm or less. <3> 2. A high-frequency inductor component according to claim 1. <5> The internal magnetic member is present only on the inner diameter side of the coil. <1> from <4> 10. A high-frequency inductor component according to any one of claims 1 to 9. <6> the first external magnetic member constitutes the third end surface, the second external magnetic member constitutes the fourth end surface; <1> from <5> 10. A high-frequency inductor component according to any one of claims 1 to 9. <7> a size of the inductor component in a direction perpendicular to the bottom surface is larger than a size of the inductor component in a direction parallel to the axis; <1> from <6> 10. A high-frequency inductor component according to any one of claims 1 to 9. <8> the first external magnetic member or the second external magnetic member extends on the insulating layer on at least one of the bottom surface, the top surface, the first end surface, and the second end surface; <1> from <7> 10. A high-frequency inductor component according to any one of claims 1 to 9. <9> when the element body and the coil are projected onto the third end surface along the axial direction, an outer peripheral surface of the internal magnetic member at a portion on an inner diameter side of the coil has a shape corresponding to the inner peripheral surface of the coil; <1> from <8> 10. A high-frequency inductor component according to any one of claims 1 to 9. <10> The self-resonant frequency is 1 GHz or higher. <1> from <9> 10. A high-frequency inductor component according to any one of claims 1 to 9. [Explanation of symbols]

[0074] 1. Inductor components 10 Base 13 First end surface 14 Second end face 15 Third end face 16 4th end face 17 Bottom 18 Top 20 coils 21 Coil wiring 26 Via wiring 30 1st external electrode 40 2nd external electrode 31,41 Base electrode layer 32,42 Plating film layer 61 First external magnetic member 62 second external magnetic member 63 Internal magnetic components 64 Extension 100 laminate 110 Body 200 Coil section 600 through holes 610 Magnetic Paste 640 Extension part 700 Dies

Claims

1. The base body and a coil provided within the element body; a first external electrode and a second external electrode provided on the element body and electrically connected to the coil; An inductor component comprising: the element body includes a first end face and a second end face facing each other, a third end face and a fourth end face facing each other, a bottom face connected between the first end face and the second end face and between the third end face and the fourth end face, and a top face facing the bottom face, the first external electrode is formed from the first end surface to the bottom surface, the second external electrode is formed from the second end surface to the bottom surface, the coil has a helical structure in which the axis of the coil is parallel to the bottom surface and is wound along the axis so as to intersect the third end surface and the fourth end surface, the element body has an insulating layer, an internal magnetic member, a first external magnetic member, and a second external magnetic member; the internal magnetic member is located inside the coil in the axial direction, the first external magnetic member and the second external magnetic member are located outside the coil in the axial direction, the coil comprises Ag; the insulating layer includes glass; the internal magnetic member, the first external magnetic member, and the second external magnetic member include a magnetic material; The size of the inductor component in a direction parallel to the bottom surface and perpendicular to the axis is less than 0.7 mm; The size of the inductor component in a direction parallel to the axis is less than 0.4 mm; The inductance value is 100 nH or less, the internal magnetic member, the first external magnetic member, and the second external magnetic member are sintered bodies containing microparticles, The microparticles are irregularly shaped. High frequency inductor components.

2. 2. The high frequency inductor component according to claim 1, wherein the magnetic material includes at least one of Co-based ferrite, hexagonal ferrite, and metal magnetic powder having a particle size of 1 [mu]m or less.

3. the first external electrode and the second external electrode are embedded in the element body, The coil has a plurality of coil wires stacked along the axis, 3. A high-frequency inductor component as described in claim 1 or 2, wherein in a cross section perpendicular to the axis and in which the coil wiring, the first external electrode, and the second external electrode are present, the area of ​​the insulating layer is larger than the total area of ​​the coil wiring, the first external electrode, and the second external electrode.

4. When the element body and the coil are projected onto the third end surface along the axial direction, 4. The high frequency inductor component according to claim 3, wherein the shortest distance between the outer peripheral surface of the internal magnetic member and the inner peripheral surface of the coil is 10 [mu]m or more and 20 [mu]m or less.

5. 3. The high frequency inductor component according to claim 1, wherein the internal magnetic member is present only on the inner diameter side of the coil.

6. the first external magnetic member constitutes the third end surface, 3. The high frequency inductor component according to claim 1, wherein the second external magnetic member forms the fourth end surface.

7. 3. The high frequency inductor component according to claim 1, wherein the size of the inductor component in a direction perpendicular to the bottom surface is larger than the size of the inductor component in a direction parallel to the axis.

8. the first external magnetic member or the second external magnetic member extends on the insulating layer on at least one of the bottom surface, the top surface, the first end surface, and the second end surface; 3. The high frequency inductor component according to claim 1.

9. 3. The high-frequency inductor component according to claim 1, wherein when the base body and the coil are projected onto the third end surface along the axial direction, the outer peripheral surface of the internal magnetic member at the inner diameter side of the coil has a shape corresponding to the inner peripheral surface of the coil.

10. 3. The high frequency inductor component according to claim 1, wherein the self-resonant frequency is 1 GHz or higher.

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