Method for monitoring, position-determining, and positioning pin-lifting system
JP2025163147APending Publication Date: 2025-10-28VAT HOLDING AG
Patent Information
- Application Number
- JP2025128992
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2019-11-21
- Filing Date
- 2025-07-31
- Publication Date
- 2025-10-28
Smart Images
Figure 2025163147000001_ABST
Abstract
To provide a method, program, and pin-lifting system for monitoring information on whether or not a support pin performs receiving, contacting, moving, supporting and / or positioning and the like of a work piece or a substrate, as intended.SOLUTION: A pin-lifting device 10 being designed to move and position a substrate in a process atmosphere zone P comprises a coupling member 18 and a drive unit 12 having an electric motor. The drive unit 12 is designed in such a way that the coupling member 18 can be moved from a lowered normal position to an individual working position and back, and interacts with the coupling member 18. A method for monitoring comprises the steps of continuously obtaining present motor current information regarding motor current applied to the electric motor, comparing the present motor current information with target current information, and deriving state information on the basis of the comparison.SELECTED DRAWING: Figure 2
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Citation Information
Patent Citations
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