Resin molding apparatus and method for manufacturing resin molded products

Abstract

To reduce the number of drive actuators used in the mechanism for sliding the upper mold and lower mold in a resin molding apparatus that slides the upper mold and lower mold in a sliding direction intersecting the mold clamping direction.SOLUTION: A resin molding apparatus is provided with a mold clamping mechanism 10 that clamps an upper mold 51 and a lower mold 52 via base members 2 to 4, and a mold slide mechanism 20 that slides the upper mold 51 and lower mold 52 in a slide direction intersecting the mold clamping direction. The mold slide mechanism 20 comprises an upper mold support frame 201 that supports the upper mold 51, a lower mold support frame 202 that supports the lower mold 52, and a frame drive unit 203 that moves the upper mold support frame 201 and the lower mold support frame 202 in the slide direction, and the frame drive unit 203 comprises a slider 210 movable in the sliding direction relative to base members 2 to 4, a drive actuator 211 for moving the slider 210 in the sliding direction, and a switching mechanism 212 for selectively connecting the slider 210 to either the upper mold support frame 201 or the lower mold support frame 202.SELECTED DRAWING: Figure 9

Description

[Technical Field]

[0001] The present invention relates to a resin molding apparatus and a method for manufacturing a resin molded product. [Background technology]

[0002] Conventionally, as shown in Patent Document 1, a compression molding apparatus has been considered in which a fixed mold (lower mold) supported by a fixed platen is movable between a mold clamping position and an ejection position outside the mold. In this compression molding apparatus, a slide plate supporting the fixed mold (lower mold) slides on a guide plate provided on the fixed platen. Specifically, a screw shaft is fitted into a nut portion provided on the slide plate, and the screw shaft is rotated and driven by a slide motor, causing the slide plate to slide on the guide plate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2003-165134 Summary of the Invention [Problem to be solved by the invention]

[0004] In a resin molding apparatus in which an upper mold and a lower mold are clamped together, if the upper mold is configured to slide in addition to the lower mold, a mechanism for sliding the upper mold must be provided in addition to a mechanism for sliding the lower mold. Specifically, a drive actuator such as a servo motor for sliding the lower mold and a drive actuator such as a servo motor for sliding the upper mold must be provided.

[0005] However, a configuration in which a drive actuator is provided for each of the upper and lower dies not only leads to an increase in the size of the resin molding apparatus, but also increases the cost of the resin molding apparatus.

[0006] Therefore, the present invention has been made to solve the above problems, and its main objective is to reduce the number of drive actuators used in the mechanism that slides the upper and lower molds in a resin molding device that slides the upper and lower molds in a sliding direction that intersects the mold clamping direction. [Means for solving the problem]

[0007] That is, the resin molding apparatus of the present invention comprises a mold clamping mechanism that clamps an upper mold and a lower mold via a base member, and a molding mold slide mechanism that slides the upper mold and the lower mold in a slide direction that intersects the mold clamping direction, the molding mold slide mechanism having an upper mold support frame that supports the upper mold, a lower mold support frame that supports the lower mold, and a frame drive unit that moves the upper mold support frame and the lower mold support frame in the slide direction, and the frame drive unit has a slider that is movable in the slide direction relative to the base member, a drive actuator that moves the slider in the slide direction, and a switching mechanism that switches between connecting the slider to the upper mold support frame and the lower mold support frame. [Effects of the Invention]

[0008] According to the present invention configured in this manner, in a resin molding device in which the upper and lower molds are slid in a sliding direction that intersects the mold clamping direction, the number of drive actuators used in the mechanism for sliding the upper and lower molds can be reduced. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a plan view schematically showing the configuration of a resin molding apparatus according to a first embodiment of the present invention. [Figure 2] 1 is a front view schematically showing the configuration of a resin molding apparatus according to a first embodiment. [Figure 3] 1 is a side view schematically showing the configuration of a resin molding apparatus according to a first embodiment. [Figure 4]FIG. 2 is a diagram showing a schematic configuration of a molding die according to the first embodiment. [Figure 5] FIG. 3 is an enlarged cross-sectional view schematically showing the peripheral structure of the side wall member of the first embodiment. [Figure 6] FIG. 2 is an enlarged view schematically showing a pantograph mechanism according to the first embodiment. [Figure 7] FIG. 3 is an enlarged cross-sectional view schematically showing the peripheral structure of the elastic member of the first embodiment. [Figure 8] 5A to 5C are cross-sectional views schematically illustrating the operation of the elastic member of the first embodiment. [Figure 9] FIG. 2 is a side view mainly showing the forming die slide mechanism and the distance changing mechanism of the first embodiment. [Figure 10] 1A is a plan view mainly showing an upper mold support frame and a frame driving unit, and FIG. 1B is a plan view mainly showing a lower mold support frame and a frame driving unit in the first embodiment. [Figure 11] FIG. 4 is a side view showing a state in which the upper die has been moved to an ejection position in the first embodiment. [Figure 12] FIG. 4 is a side view showing a state in which the lower mold has been moved to a protruding position in the first embodiment. [Figure 13] 3A is a schematic diagram showing a state in which an upper die support frame is connected to a slider, and FIG. 3B is a schematic diagram showing a state in which a lower die support frame is connected to a slider in the first embodiment. [Figure 14] 1A is a side view schematically showing a change in the distance between the upper mold and the base member, and FIG. 1B is a side view schematically showing a change in the distance between the lower mold and the base member in the first embodiment. [Figure 15] FIG. 10 is a front view schematically showing the configuration of a resin molding apparatus according to a second embodiment. [Figure 16] FIG. 10 is a side view schematically showing the configuration of a resin molding apparatus according to a second embodiment. [Figure 17] FIG. 10 is a front view schematically showing the configuration of a resin molding apparatus according to a modified embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] Next, the technology according to the present invention will be described in more detail with reference to examples, although the present invention is not limited to the following technology.

[0011] A resin molding apparatus according to Technology 1 of the present invention includes a mold clamping mechanism that clamps an upper mold and a lower mold together via a base member, and a mold slide mechanism that slides the upper mold and the lower mold in a slide direction that intersects with the mold clamping direction, the mold slide mechanism having an upper mold support frame that supports the upper mold, a lower mold support frame that supports the lower mold, and a frame drive unit that moves the upper mold support frame and the lower mold support frame in the slide direction, and the frame drive unit has a slider that is movable in the slide direction relative to the base member, a drive actuator that moves the slider in the slide direction, and a switch mechanism that switches between connecting the upper mold support frame and the lower mold support frame to the slider.

[0012] In this resin molding apparatus, the slider, which is moved in the sliding direction by the drive actuator, is selectively connected to the upper mold support frame that supports the upper mold and the lower mold support frame that supports the lower mold, so that the upper and lower molds can be slid between the mold clamping position and the ejection position using a common drive actuator. This reduces the number of drive actuators used in the mold slide mechanism. As a result, the resin molding apparatus can be made smaller and less expensive, and the control equipment for the drive actuators can be made more compact. In addition, with the resin molding device of the present technology 1, by moving the upper mold and the lower mold to the ejection position, the object to be conveyed can be conveyed to the upper mold and the lower mold at the ejection position. As a result, there is no need to increase the gap between the upper mold and the lower mold when the molds are opened, and the height of the resin molding device can be reduced.

[0013] In addition to the configuration of the above-mentioned Technology 1, the resin molding apparatus of Technology 2 according to the present invention desirably has the switching mechanism having a first switching unit that switches the slider and the upper die support frame between a connected state and a disconnected state, and a second switching unit that switches the slider and the lower die support frame between a connected state and a disconnected state. With this configuration, the upper die support frame and the lower die support frame can be independently connected or disconnected from the slider. Also, by dividing the switching unit into the first and second switching units, the degree of freedom in installing each switching unit on the slider and each support frame can be improved.

[0014] As a specific embodiment of the first switching unit and the second switching unit, in addition to the configuration of the above-mentioned technology 2, the resin molding device of technology 3 according to the present invention desirably has the following features: the first switching unit engages or disengages a first engaging portion provided on one of the slider or the upper mold support frame with a first engaged portion provided on the other of the slider or the upper mold support frame; and the second switching unit engages or disengages a second engaging portion provided on the other of the slider or the lower mold support frame with a second engaged portion provided on the other of the slider or the lower mold support frame. With this configuration, the upper mold support frame can be connected or disconnected from the slider simply by engaging or disengaging the first engaging portion with the first engaged portion, and the lower mold support frame can be connected or disconnected from the slider simply by engaging or disengaging the second engaging portion with the second engaged portion.

[0015] As a specific embodiment of the drive actuator, in addition to the configuration of any one of the above-mentioned techniques 1 to 3, the resin molding device of technique 4 according to the present invention preferably has the drive actuator including a ball screw mechanism connected to the slider and a motor that rotates the ball screw mechanism.

[0016] In addition to the configuration of any one of the above-mentioned techniques 1 to 4, the resin molding apparatus of technique 5 according to the present invention preferably further includes a spacing change mechanism that changes the spacing between the opposing surfaces of the base member and the upper mold or the lower mold when the molding mold slide mechanism slides the upper mold or the lower mold between the mold clamping position and the ejection position. With this configuration, the opposing surfaces of the base member and the upper or lower mold can be separated from each other when sliding, thereby reducing wear caused by sliding of the upper or lower mold.

[0017] In addition to the configuration of the above-mentioned technique 5, the resin molding device of technique 6 according to the present invention is preferably configured such that the distance changing mechanism is configured using a drive actuator for the molding die slide mechanism. With this configuration, the configuration of the resin molding device having the mold slide mechanism and the distance change mechanism can be simplified.

[0018] A resin molding apparatus according to a seventh aspect of the present invention may have the same configuration as any one of the first to sixth aspects, wherein the base member has a fixed platen, a movable platen that can be raised and lowered by the clamping mechanism, and an intermediate plate disposed between the fixed platen and the movable platen, and the upper mold and the lower mold are disposed between the fixed platen and the intermediate plate, and between the intermediate plate and the movable platen, respectively. In other words, the resin molding apparatus has a configuration having a plurality of sets of upper molds and lower molds. The resin molding apparatus of Technology 7 further includes a pair of side wall members arranged on both lateral sides of the movable platen and the intermediate plate, a lifting slide mechanism that slides the intermediate plate in the up and down direction relative to the pair of side wall members, and a lifting interlocking mechanism that links the lifting and lowering of the intermediate plate with the lifting and lowering of the movable platen, and it is desirable that the lifting and lowering interlocking mechanism has a pantograph mechanism having one end fixed to the side wall members and the other end that moves together with the movable platen and expands and contracts as the movable platen rises and falls, and a connecting mechanism that connects the cross link portion of the pantograph mechanism and the intermediate plate. With this configuration, the number of molding dies can be increased, improving the productivity of resin molded products. Furthermore, since the multiple intermediate plates are linked to the elevation and lowering of the movable platen by a pantograph mechanism, even if a molding die is provided between each of the multiple intermediate plates, it is possible to prevent the individual components from becoming larger, and the overall size of the device is also kept down, and highly rigid components can be eliminated.

[0019] It is desirable that the resin molding apparatus of Technology 8 according to the present invention further includes a molding object transport mechanism that transports molding objects to the upper mold in addition to the configuration of any one of the above Technologies 1 to 7. In the resin molding apparatus of Technology 8, it is desirable that the molding object transport mechanism includes a molding object supply unit that supplies the molding object to the molding mold at the ejection position, and a molding object receiving unit that receives the molding object molded from the molding mold at the ejection position.

[0020] The resin molding apparatus of Technology 9 according to the present invention preferably further includes a resin material conveying mechanism that conveys resin material to the lower mold in addition to the configuration of any one of the above-mentioned Technologies 1 to 8. In the resin molding apparatus of Technology 9, it is preferable that the resin material conveying mechanism has a resin material supplying unit that supplies the resin material to the molding mold in the ejection position, and a film collecting unit that collects used release film from the molding mold in the ejection position.

[0021] Another aspect of the present invention is a method for manufacturing a resin molded product using a resin molding apparatus according to any one of the above techniques 1 to 9, the method including a transport step of transporting an object to be molded to a mold including the upper mold and the lower mold, a resin molding step of clamping the mold and molding resin into the object to be molded, and a removal step of removing the resin-molded object from the mold.

[0022] <1. First embodiment of the present invention> A first embodiment of a resin molding apparatus according to the present invention will be described below with reference to the drawings. In addition, in all of the drawings shown below, for the sake of clarity, some parts are omitted or exaggerated as appropriate, and the same components are denoted by the same reference numerals, and the description thereof will be omitted as appropriate.

[0023] <1-1. Overall configuration of resin molding equipment> The resin molding apparatus 100 of this embodiment manufactures a resin molded product P by resin-sealing an electronic component Wx fixed to a substrate W, which is a molding object, with a resin material J through resin molding.

[0024] Here, examples of the substrate W include a metal substrate, a resin substrate, a glass substrate, a ceramic substrate, a circuit board, a semiconductor substrate, a lead frame, a silicon wafer, a glass wafer, etc. Alternatively, the substrate W may be a carrier without wiring. Examples of the resin material J include powdered or granular resin (including granular resin), liquid resin, etc. Examples of the electronic component Wx include electronic elements such as semiconductor chips, resistor elements, capacitor elements, etc., or electronic components in which at least one of these electronic elements is resin-encapsulated.

[0025] 1, this resin molding apparatus 100 includes, as its components, a substrate supply / storage module A, two resin molding modules B, and a resin material supply module C. Each component (each of modules A to C) is detachable and replaceable relative to the other components.

[0026] The substrate supply / storage module A has a substrate receiving section 11 that receives pre-molded substrates W from the outside, a substrate storage section 12 that stores molded substrates W (resin molded products P), a substrate transport mechanism 13 that transports the pre-molded substrates W and the resin molded products P, and a transfer mechanism 14, such as a transport robot, that transports, i.e., transfers, the pre-molded substrates W and the resin molded products P to the substrate transport mechanism 13.

[0027] The substrate transport mechanism 13 transports the pre-molding substrate W from the substrate supply / storage module A to the resin molding module B, and supplies the pre-molding substrate W to the molding dies 5a, 5b in the resin molding module B. After the pre-molding substrate W has been resin molded, the substrate transport mechanism 13 receives a resin molded product P, which is the molded substrate W after resin molding, from the molding dies 5a, 5b in the resin molding module B, and transports it to the substrate supply / storage module A. In addition, the delivery mechanism 14 delivers the pre-molding substrate W from the substrate receiving unit 11 to the substrate transport mechanism 13, and delivers the resin molded product P from the substrate transport mechanism 13 to the substrate storage unit 12.

[0028] Each resin molding module B has an upper mold 51, which is a first mold that holds the substrate W, and a lower mold 52, which is a second mold in which a cavity 52C is formed, and by clamping these molds together, the electronic components Wx fixed to the substrate W are resin-sealed by resin molding using a resin material J. The specific configuration of the resin molding module B will be described later.

[0029] The resin material supply module C has a moving table 15, a resin material accommodation unit 16 placed on the moving table 15, a resin material supply mechanism 17 that measures and supplies resin material J to the resin material accommodation unit 16, and a resin material transport mechanism 18 that transports the resin material accommodation unit 16 and supplies resin material J to the cavity 52C of the lower mold 52. Here, the resin material accommodation unit 16 is configured using a holding frame that holds a release film F, and the resin material J is supplied by the resin material supply mechanism 17 onto the release film F held in the holding frame.

[0030] Within the resin material supply module C, the moving table 15 moves between a resin charging position where the resin material supply mechanism 17 charges the resin and a transfer position where the resin material accommodation section 16 is handed over to the resin material transfer mechanism 18. The resin material transfer mechanism 18 also transfers the resin material accommodation section 16, which contains the resin material J, from the resin material supply module C to the resin molding module B, where it supplies the release film F and the resin material J to the molding dies 5a and 5b. The resin material transfer mechanism 18 then transfers the resin material accommodation section 16, after the resin material J has been supplied, from the resin molding module B to the resin material supply module C.

[0031] <1-2. Specific configuration of resin molded module B> As shown in Figures 2 and 3, the resin molding module B comprises a fixed platen 2, a movable platen 3 that can be raised and lowered by a mold clamping mechanism 10, an intermediate plate 4 arranged between the fixed platen 2 and the movable platen 3, a first molding die 5a and a second molding die 5b including an upper die 51 and a lower die 52 arranged between the fixed platen 2 and the intermediate plate 4 and between the intermediate plate 4 and the movable platen 3, a pair of side wall members 61, 62 arranged on both lateral sides (here, both left and right sides) of the movable platen 3 and the intermediate plate 4, a lifting and lowering slide mechanism 7 that slides the intermediate plate 4 in the vertical direction relative to the pair of side wall members 61, 62, and a lifting and lowering interlocking mechanism 8 that interlocks the lifting and lowering of the intermediate plate 4 with the lifting and lowering of the movable platen 3.

[0032] An upper mold 51 of the first molding die 5a is provided on the lower surface of the stationary platen 2 directly or via another member. A pair of side wall members 61, 62 are connected to both the left and right sides of the stationary platen 2. The pair of side wall members 61, 62 may be formed integrally with the stationary platen 2. The stationary platen 2 of this embodiment has a generally rectangular flat plate shape in a plan view.

[0033] A lower mold 52 of the second molding die 5b is provided on the upper surface of the movable platen 3 directly or via another member. The movable platen 3 is moved up and down by a mold clamping mechanism 10 provided below the movable platen 3. The movable platen 3 in this embodiment has a generally rectangular flat plate shape in a plan view. A fixing member 31 is connected to the movable platen 3, and a lower end portion (lower end link portion 813) of a pantograph mechanism 81, which will be described later, is fixed to the fixing member 31.

[0034] The mold clamping mechanism 10 of this embodiment is a linear motion type that raises and lowers a movable platen using a ball screw mechanism that converts the rotation of a servo motor or the like into linear movement, but it may also be a link type that transmits a power source such as a servo motor to the movable platen using a link mechanism such as a toggle link.

[0035] A lower mold 52 of a first molding die 5a is provided on the upper surface of the intermediate plate 4 directly or via another member. An upper mold 51 of a second molding die 5b is provided on the lower surface of the intermediate plate 4 directly or via another member. The intermediate plate 4 of this embodiment has a generally rectangular flat plate shape in a plan view.

[0036] Here, the first molding die 5a and the second molding die 5b will be described with reference to FIG. The upper mold 51 of each of the forming molds 5a, 5b sucks and holds the back surface of the substrate W. A suction port (not shown) is formed in the lower surface of the upper mold 51, and a suction flow path (not shown) connected to the suction port is formed inside the upper mold 51. This suction flow path is connected to an external suction device (not shown).

[0037] The lower mold 52 of each of the molding dies 5a and 5b has a cavity 52C that accommodates the electronic components Wx fixed to the substrate W and the resin material J. Specifically, the lower mold 52 has a bottom member 521 that forms the bottom surface of the cavity 52C and a side member 522 that surrounds the bottom member 521. The upper surface of the bottom member 521 and the inner peripheral surface of the side member 522 form the cavity 52C. The side member 522 is provided so as to be movable up and down relative to the bottom member 521. Specifically, the side member 522 is supported on a base plate 523 of the lower mold 52 by a plurality of elastic members 524 such as coil springs. Furthermore, the lower mold 52 of this embodiment is covered with a release film F to improve the releasability of the resin molded product P. An air vent (not shown) for discharging air or gas may be provided on the upper surface of the side member 522 (the surface where the side member 522 abuts against the substrate W). Additionally, around the upper mold 51 and the lower mold 52, there is provided a sealing structure 50 (not shown in Figures 2 and 5) consisting of side walls and sealing members such as O-rings for evacuating the area around the molding dies 5a and 5b during resin molding.

[0038] 2 and 3, the pair of sidewall members 61, 62 fix the stationary platen 2 at a predetermined height relative to the base 101 and slidably support the intermediate plate 4. Here, the upper end of each of the sidewall members 61, 62 is connected to the stationary platen 2, and the lower end of the sidewall members 61, 62 is connected to the base 101. Note that each of the sidewall members 61, 62 in this embodiment has a vertically elongated flat plate shape extending in the up-down direction.

[0039] The lifting and sliding mechanism 7 linearly moves the intermediate plate 4 in the up and down direction relative to the pair of side wall members 61, 62. Specifically, the lifting and sliding mechanism 7 has a linearly extending linear rail 71 and a linear motion block 72 that slides on the linear motion rail 71.

[0040] In this embodiment, flat side plates 41 are connected to both the left and right sides of the intermediate plate 4, and linear blocks 72 are provided on the side plates 41, and linear rails 71 are provided on the inner surfaces of the side wall members 61, 62 along the up and down direction (vertical direction).

[0041] 5, two linear motion rails 71 are provided in parallel in the front and rear on the inner surface of each side wall member 61, 62, and two rows of linear motion blocks 72 are provided in the front and rear of each side plate 41 corresponding to the two linear motion rails 71. Here, each row of linear motion blocks 72 provided on each side plate 41 is composed of two linear motion blocks 72 (see FIG. 2). In other words, a total of four linear motion blocks 72 are provided on each side plate 41.

[0042] Specifically, as shown in FIGS. 2 and 5 , two linear rails 71 are provided on the inner surfaces of the side wall members 61, 62. The two linear rails 71 extend in the up-down direction (vertical direction). The two linear rails 71 are arranged side by side in the front-to-rear direction. Meanwhile, linear blocks 72 are provided on each side plate 41. The linear blocks 72 are arranged in two rows in the front-to-rear direction on each side plate 41 to correspond to the two linear rails 71. Two linear blocks 72 are arranged in each row in the up-down direction (vertical direction) on each side plate 41. In other words, a total of four linear blocks 72 are provided on each side plate 41. Note that, for example, in FIG. 2 , one linear block 72 may be added to each side plate 41 in a portion hidden by a connecting member 822 (described later) for a total of six linear blocks 72.

[0043] 2, 3, and 5 to 7, the lifting / lowering interlocking mechanism 8 synchronizes the clamping and opening of the first forming mold 5a and the second forming mold 5b by interlocking the lifting / lowering of the intermediate plate 4 with the lifting / lowering of the movable platen 3. In other words, the lifting / lowering interlocking mechanism 8 makes the clamping speed of the first forming mold 5a and the clamping speed of the second forming mold 5b the same, allowing them to be clamped simultaneously.

[0044] Specifically, the lifting / lowering interlocking mechanism 8 includes a pantograph mechanism 81 that expands and contracts as the movable platen 3 moves up and down, and a connecting mechanism 82 that connects a cross link portion 811 of the pantograph mechanism 81 and the intermediate plate 4.

[0045] 2, the pantograph mechanisms 81 are provided on the left and right outer sides of the pair of side wall members 61, 62. In other words, the movable platen 3 and the intermediate plate 4 are raised and lowered in conjunction with each other by the two left and right pantograph mechanisms 81. The left and right pantograph mechanisms 81 have the same configuration.

[0046] 3 and 6, each pantograph mechanism 81 is composed of one cross link portion 811, an upper end link portion 812, and a lower end link portion 813. The cross link portion 811 is formed by crossing a first link 81a and a second link 81b at their central portions and rotatably connecting the crossing portion via a rotation shaft 81c. The upper end link portion 812 is formed by rotatably connecting the lower ends of a third link 81d and a fourth link 81e to the upper ends of the first link 81a and the second link 81b via a rotation shaft 81f, and rotatably connecting the upper ends of the third link 81d and the fourth link 81e to each other via a rotation shaft 81g. Furthermore, the lower end link portion 813 is formed by rotatably connecting the upper ends of the fifth link 81h and the sixth link 81i to the lower ends of the first link 81a and the second link 81b by a rotation shaft 81j, and rotatably connecting the lower ends of the fifth link 81h and the sixth link 81i to each other by a rotation shaft 81k.

[0047] An upper end (upper end link portion 812) of the pantograph mechanism 81 is fixed to the upper ends of the side wall members 61, 62, and a lower end (lower end link portion 813) of the pantograph mechanism 81 is fixed to a fixing member 31 that moves together with the movable platen 3. Therefore, the lower end (lower end link portion 813) of the pantograph mechanism 81 is connected to the movable platen 3 via the fixing member 31 and moves together with the movement of the movable platen 3. In this embodiment, as shown in FIG. 6 , the rotation shaft 81c of the cross link portion 811 of the pantograph mechanism 81, the rotation shaft 81g of the upper end link portion 812, and the rotation shaft 81k of the lower end link portion 813 are arranged in the up-down direction (vertical direction) and are positioned at the center of the width direction of the side wall members 61, 62 in a side view.

[0048] 2, 3, 5, and 7, the coupling mechanism 82 couples the cross link portion 811 of the pantograph mechanism 81 to the intermediate plate 4. Specifically, the coupling mechanism 82 has a connection member 821 connected to the cross link portion 811, a coupling member 822 that couples the connection member 821 to the intermediate plate 4, and elastic members 823a and 823b interposed between the connection member 821 and the coupling member 822. The left and right coupling mechanisms 82 have the same configuration.

[0049] 3, 5, and 6, the connecting member 821 is connected to the cross link portion 811 without interfering with the expansion and contraction of the pantograph mechanism 81. Specifically, the connecting member 821 has a long rectangular shape, and a central portion thereof is connected to the rotation shaft 81c of the cross link portion 811. The connecting member 821 is provided to extend in the front-rear direction (horizontal direction).

[0050] The coupling members 822 connect the connection members 821 to the intermediate plate 4, and in this embodiment, are connected to the side plates 41 connected to both lateral sides (here, both left and right sides) of the intermediate plate 4 (see FIG. 2). The coupling members 822 extend outward from the front and rear of the side wall members 61, 62 (see FIG. 5).

[0051] The elastic members 823a and 823b are intended to absorb variations in the thickness of the substrate W, and are provided between the linking member 822 and the connecting member 821. The elastic members 823a and 823b are provided on the outer sides of the side wall members 61 and 62.

[0052] 2, 3, 5, and 7, the elastic members 823a and 823b include an upper elastic member 823a that absorbs upward displacement of the intermediate plate 4 relative to the connecting member 821, and a lower elastic member 823b that absorbs downward displacement. These elastic members 823a and 823b constitute displacement absorbing mechanisms 83a and 83b provided on the linking member 822, as shown in FIG.

[0053] The displacement absorbing mechanisms 83a and 83b are provided on the linking member 822 above and below the connecting member 821, respectively. The upper displacement absorbing mechanism 83a has an upper contact portion 831 that contacts the upper surface of the connecting member 821, an upper elastic member 823a that applies (biases) force to the upper contact portion 831 toward the upper surface of the connecting member 821, and an upper support portion 832 that supports the upper contact portion 831 so that it can move upward. The lower displacement absorbing mechanism 83b has a lower contact portion 833 that contacts the lower surface of the connecting member 821, a lower elastic member 823b that applies (biases) force to the lower contact portion 833 toward the lower surface of the connecting member 821, and a lower support portion 834 that supports the lower contact portion 833 so that it can move downward. The upper support portion 832 and the lower support portion 834 are fixed to the linking member 822.

[0054] Here, upper contact portion 831 is formed with upper stopper 831a that protrudes outward to limit downward movement so as to be able to come into contact with the upper surface of upper support portion 832. Lower contact portion 833 is formed with lower stopper 833a that protrudes outward to limit upward movement so as to be able to come into contact with the lower surface of lower support portion 834.

[0055] The connecting member 822 has an upper protrusion 822a that protrudes so as to form an opposing surface above the upper end surface of the upper contact portion 831, and a lower protrusion 822b that protrudes so as to form an opposing surface below the lower end surface of the lower contact portion 833. A gap is provided between the upper end surface of the upper contact portion 831 and the lower surface of the upper protrusion 822a of the connecting member 822 (the surface opposing the upper end surface of the upper contact portion 831) to a degree that prevents contact due to the operation of displacement absorbing mechanisms 83a and 83b, which will be described later. A gap is also provided between the lower end surface of the lower contact portion 833 and the upper surface of the lower protrusion 822b of the connecting member 822 (the surface opposing the lower end surface of the lower contact portion 833) to a degree that prevents contact due to the operation of displacement absorbing mechanisms 83a and 83b.

[0056] Next, the basic operation of the displacement absorbing mechanisms 83a and 83b will be described. In the initial state of the displacement absorbing mechanisms 83a and 83b (see FIG. 7), the elastic member 823a is in a non-stretched state, with its upper end in contact with the lower surface of the upper protruding portion 822a of the connecting member 822 (the surface opposite the upper end surface of the upper contact portion 831) and its lower end in contact with the upper surface of the upper stopper 831a of the upper contact portion 831. Also, in the initial state of the displacement absorbing mechanisms 83a and 83b, the elastic member 823b is in a non-stretched state, with its upper end in contact with the lower surface of the lower stopper 833a of the lower contact portion 833 and its lower end in contact with the upper surface of the lower protruding portion 822b of the connecting member 822 (the surface opposite the lower end surface of the lower contact portion 833).

[0057] 8(a), when the intermediate plate 4 is displaced downward relative to the connecting member 821, the linking member 822 connected to the intermediate plate 4 is displaced downward relative to the connecting member 821. Then, with the connecting member 821 and the upper contact portion 831 stationary, the upper support portion 832 and the upper protrusion 822a of the linking member 822 are also displaced downward relatively, causing the upper elastic member 823a to contract. In other words, the connecting member 821 and the upper contact portion 831 move upward relative to the upper protrusion 822a of the linking member 822, causing the upper elastic member 823a to contract. This absorbs the downward relative displacement of the intermediate plate 4 with respect to the connecting member 821.

[0058] On the other hand, when the intermediate plate 4 is displaced upward relative to the connecting member 821, the linking member 822 connected to the intermediate plate 4 is displaced upward relative to the connecting member 821, as shown in FIG. 8(b). Then, with the connecting member 821 and the lower contact portion 833 stationary, the lower support portion 834 and the lower protrusion 822b of the linking member 822 are also displaced upward relatively, causing the lower elastic member 823b to contract. In other words, the connecting member 821 and the lower contact portion 833 move downward relative to the lower protrusion 822b of the linking member 822, causing the lower elastic member 823b to contract. This absorbs the upward relative displacement of the intermediate plate 4 with respect to the connecting member 821.

[0059] 2, 5, and 7, the resin molding apparatus 100 of this embodiment further includes a guide mechanism 84 interposed between the connection member 821 and the linking member 822. The guide mechanism 84 guides the movement of the connection member 821 and the linking member 822 when they move relative to each other.

[0060] This guide mechanism 84 guides the movement of the connecting member 821 in the up and down direction, and is provided between the opposing surfaces of the connecting member 821 and the linking member 822. Specifically, the guide mechanism 84 has a linear motion rail 841 provided on one of the connecting member 821 or the linking member 822, and a linear motion block 842 provided on the other of the connecting member 821 or the linking member 822. In this embodiment, the linking member 822 is provided with the linear motion rail 841, and the connecting member 821 is provided with the linear motion block 842.

[0061] <1-3. Specific Configuration of Resin Molding Apparatus 100> 9 to 14, the resin molding apparatus 100 of this embodiment further includes a mold slide mechanism 20 that slides the opened molding dies 5a, 5b in a slide direction that intersects the mold clamping direction, and a distance change mechanism 30 that changes the distance between the opposing surfaces of the base member and molding dies 5a, 5b (surfaces that face each other in the mold clamping direction) when the molding dies 5a, 5b are slid by the mold slide mechanism 20. Note that the mold slide mechanism 20 and distance change mechanism 30 are not shown in FIGS. 1 to 6.

[0062] Here, the mold clamping direction is the up-down direction (vertical direction), and the sliding direction is the front-rear direction (direction perpendicular to the up-down direction and the left-right direction). In addition, the base members in this embodiment are the fixed platen 2, the movable platen 3, and the intermediate plate 4.

[0063] 9 to 12, forming mold slide mechanisms 20 are provided corresponding to forming molds 5a, 5b, respectively. Forming mold slide mechanisms 20 slide upper mold 51 and lower mold 52 between mold clamping position Q where the molds are clamped and ejection position R located outside base members 2 to 4 in the sliding direction.

[0064] Specifically, the forming mold slide mechanism 20 has an upper mold support frame 201 that supports the upper mold 51, a lower mold support frame 202 that supports the lower mold 52, and a frame drive unit 203 that moves the upper mold support frame 201 and the lower mold support frame 202 in the sliding direction.

[0065] The upper die support frame 201 has a rectangular frame shape in a plan view, and is configured to support the upper die 51 at its opening. The upper die support frame 201 supports the upper die 51 so that it can move in the die clamping direction, and has stopper portions 204 on which the edges of the upper die 51 rest. These stopper portions 204 are provided corresponding to the four corners of the upper die 51 (see FIG. 10).

[0066] The lower mold support frame 202 has a rectangular frame shape in a plan view, and is configured to support the lower mold 52 at its opening. The lower mold support frame 202 supports the lower mold 52 so that it can move in the mold clamping direction, and has elastic bodies 205 that support the edges of the lower mold 52. The elastic bodies 205 are provided corresponding to the four corners of the lower mold 52 (see FIG. 10), and support the lower mold 52 via contact portions 206 that come into contact with the lower mold 52. The contact portions 206 are provided on the lower mold support frame 202 so that they can move up and down.

[0067] The upper mold support frame 201 and the lower mold support frame 202 are each guided by a first guide portion 207 in their movement along the sliding direction relative to the base members 2 to 4. As shown in FIGS. 9 to 12, the first guide portion 207 is provided between the fixed member 40, which is fixed to the base members 2 to 4, and each of the support frames 201 and 202. Specifically, the first guide portion 207 is configured using a linear guide, and has a linear rail 207a that is provided on either the fixed member 40 or one of the support frames 201 and 202 and extends linearly along the sliding direction, and a linear block 207b that is provided on the other of the fixed member 40 or one of the support frames 201 and 202 and slides on the linear rail 207a.

[0068] In this embodiment, the upper mold 51 of the first molding mold 5a provided on the lower surface of the stationary platen 2 is configured to slide by the upper mold support frame 201 via a fixing member 40 fixed to the stationary platen 2. The lower mold 52 of the first molding mold 5a provided on the upper surface of the intermediate plate 4 is configured to slide by the lower mold support frame 202 via a fixing member 40 fixed to the intermediate plate 4. Furthermore, the upper mold 51 of the second molding mold 5b provided on the lower surface of the intermediate plate 4 is configured to slide by the upper mold support frame 201 via a fixing member 40 fixed to the intermediate plate 4. In other words, the lower mold support frame 202 of the lower mold 52 of the first molding mold 5a and the upper mold support frame 201 of the upper mold 51 of the second molding mold 5b are configured to slide via a common fixing member 40. Furthermore, the lower mold 52 of the second molding mold 5b provided on the upper surface of the movable platen 3 is configured to slide by the lower mold support frame 202 via a fixing member 40 fixed to the movable platen 3.

[0069] 9 to 12, the frame driving unit 203 moves the upper die support frame 201 and the lower die support frame 202 along the first guide unit 207. The frame driving unit 203 moves the upper die 51 and the lower die 52 between a die clamping position Q and an ejection position R.

[0070] A frame driving unit 203 that drives each of the support frames 201, 202 that support the upper mold 51 and the lower mold 52 of the first molding die 5a is provided on a fixed member 40 that is fixed to the intermediate plate 4. In addition, a frame driving unit 203 that drives each of the support frames 201, 202 that support the upper mold 51 and the lower mold 52 of the second molding die 5b is provided on a fixed member 40 that is fixed to the movable platen 3.

[0071] Here, the substrate W and the resin molded product P are transported by the substrate transport mechanism 13 to the upper mold 51 which is at the ejection position R. As shown in FIG. 1 , the substrate transport mechanism 13 has a substrate supply unit 131 which supplies the substrate W to the upper mold 51 which is at the ejection position R, and a substrate receiving unit 132 which receives the resin molded product P from the upper mold 51 which is at the ejection position R. The substrate supply unit 131 and the substrate receiving unit 132 are provided corresponding to each upper mold 51, and are provided side by side in the left-right direction. The substrate transport mechanism 13 successively performs a receiving operation of the substrate receiving unit 132 and a supply operation of the substrate supply unit 131 for the upper mold 51 which is at the ejection position R.

[0072] Furthermore, the resin material conveying mechanism 18 conveys the resin material J and the release film F to the lower mold 52 at the ejection position R. As shown in FIG. 1 , the resin material conveying mechanism 18 has a resin material supplying section 181 that supplies the resin material J and the unused release film F to the lower mold 52 at the ejection position R, and a film collecting section 182 that collects the used release film F from the lower mold 52 at the ejection position R. The resin material supplying section 181 and the film collecting section 182 are provided corresponding to each lower mold 52, and are arranged side by side in the left-right direction. The resin material conveying mechanism 18 successively performs the collecting operation of the film collecting section 182 and the supply operation of the resin material supplying section 181 to the lower mold 52 at the ejection position R.

[0073] Specifically, as shown in Figures 9 to 13, the frame driving unit 203 has a slider 210 that is movable in the sliding direction relative to the base members 2 to 4, a driving actuator 211 that moves the slider 210 in the sliding direction, and a switching mechanism 212 that switches between connecting the slider 210 to the upper mold support frame 201 and the lower mold support frame 202.

[0074] The slider 210 is guided in its movement along the sliding direction relative to the base members 2 to 4 by a second guide portion 213. As shown in FIGS. 9 to 12, this second guide portion 213 is provided between the slider 210 and a fixed member 40 fixed to the base members 2 to 4. Specifically, the second guide portion 213 is configured using a linear guide, and has a linear rail 213a that is provided on either the fixed member 40 or the slider 210 and extends linearly along the sliding direction, and a linear block 213b that is provided on the other of the fixed member 40 or the slider 210 and slides on the linear rail 213a.

[0075] The drive actuator 211 moves the slider 210 along the second guide portion 213. Specifically, the drive actuator 211 has a ball screw mechanism 211a connected to the slider 210, and a motor 211b, such as a servo motor, that rotates the ball screw mechanism 211a.

[0076] The ball screw mechanism 211a has a screw shaft 211a1, which is a rotating member provided on the fixed member 40, and a nut 211a2, which is a linear motion member that screws onto the screw shaft 211a1. The screw shaft 211a1 is provided along the sliding direction. The nut 211a2 moves along the screw shaft 211a1 as the screw shaft 211a1 rotates, and the slider 210 is connected to the nut 211a2.

[0077] The drive actuator 211 is not limited to the configuration using the ball screw mechanism 211a described above, but may be one using a rack and pinion, an air cylinder, or the like.

[0078] The switching mechanism 212 selectively switches the support frame connected to the slider 210 between the upper mold support frame 201 and the lower mold support frame 202. Specifically, the switching mechanism 212 has a first switching unit 212a that switches the slider 210 and the upper mold support frame 201 between a connected state and a disconnected state, and a second switching unit 212b that switches the slider 210 and the lower mold support frame 202 between a connected state and a disconnected state.

[0079] The first switching unit 212a engages or disengages a first engaging unit 212a2 provided on either the slider 210 or the upper-die support frame 201 with a first engaged unit 212a1 provided on either the slider 210 or the upper-die support frame 201. In this embodiment, the first switching unit 212a has a first engaged unit 212a1 formed on the slider 210 and a first engaging unit 212a2 provided on the upper-die support frame 201. The first engaged unit 212a1 is a through-hole or a recess formed in the slider 210. The first engaging unit 212a2 is provided on the upper-die support frame 201 and has a pin that is inserted into and engages with the first engaged unit 212a1 and an actuator that drives the pin. An air cylinder, for example, can be used as the first engaging unit 212a2.

[0080] The second switching unit 212b engages or disengages a second engaging unit 212b2 provided on either the slider 210 or the lower die support frame 202 with a second engaged unit 212b1 provided on the other of the slider 210 or the lower die support frame 202. The second switching unit 212b in this embodiment has a second engaged unit 212b1 formed on the slider 210 and a second engaging unit 212b2 provided on the lower die support frame 202. The second engaged unit 212b1 is a through-hole, a recess, or the like formed in the slider 210. The second engaging unit 212b2 is provided on the lower die support frame 202 and has a pin that is inserted into and engages with the second engaged unit 212b1 and an actuator that drives the pin. An air cylinder, for example, can be used as the second engaging unit 212b2.

[0081] 13(a), the switching mechanism 212 inserts and engages the first engaging portion 212a2 of the first switching portion 212a with the first engaged portion 212a1, thereby connecting the upper mold support frame 201 to the slider 210. At this time, the second engaging portion 212b2 of the second switching portion 212b is not inserted into the second engaged portion 212b1. In this state, when the slider 210 is moved by the drive actuator 211, the upper mold support frame 201 connected to the slider 210 moves along the first guide portion 207, as shown in FIG.

[0082] 13(b), the switching mechanism 212 inserts and engages the second engaging portion 212b2 of the second switching portion 212b with the second engaged portion 212b1, thereby connecting the lower mold support frame 202 to the slider 210. At this time, the first engaging portion 212a2 of the first switching portion 212a is not inserted into the first engaged portion 212a1. In this state, when the slider 210 is moved by the drive actuator 211, the lower mold support frame 202 connected to the slider 210 moves along the first guide portion 207, as shown in FIG.

[0083] 9, 11, 12, and 14, the casting mold slide mechanism 20 has positioning parts 208 that come into contact with the side surfaces of the upper mold 51 and the lower mold 52 that move to the mold clamping position Q, and position the upper mold 51 and the lower mold 52 at the mold clamping position Q. The positioning parts 208 position the upper mold 51 and the lower mold 52 in the horizontal direction (front-rear and left-right directions) relative to the base members 2 to 4.

[0084] The mold slide mechanism 20 may not have the above-mentioned positioning unit 208, and may be configured to position the upper mold 51 and the lower mold 52 at the mold clamping position Q by position control of the drive actuator 211 in the frame drive unit 203 in addition to the above-mentioned positioning unit 208.

[0085] 9 to 12 and 14, gap change mechanisms 30 are provided in forming dies 5a, 5b corresponding to upper die 51 and lower die 52, respectively. When forming dies slide mechanism 20 slides upper die 51 and lower die 52 between die clamping position Q and ejection position R, gap change mechanisms 30 change the gap between the opposing surfaces of base members 2 to 4 and upper die 51 and lower die 52.

[0086] The gap changing mechanism 30 provided corresponding to the upper die 51 of the first forming mold 5a changes the gap between the lower surface of the fixed platen 2 on which the upper die 51 is attached and the upper surface of the upper die 51 of the first forming mold 5a attached to the fixed platen 2. The gap changing mechanism 30 provided corresponding to the lower die 52 of the first forming mold 5a changes the gap between the upper surface of the intermediate plate 4 on which the lower die 52 is attached and the lower surface of the lower die 52 of the first forming mold 5a attached to the intermediate plate 4. The gap changing mechanism 30 provided corresponding to the upper die 51 of the second forming mold 5b changes the gap between the lower surface of the intermediate plate 4 on which the upper die 51 is attached and the upper surface of the upper die 51 of the second forming mold 5b attached to the intermediate plate 4. The gap changing mechanism 30 provided corresponding to the lower die 52 of the second forming mold 5b changes the gap between the upper surface of the movable platen 3 on which the lower die 52 is attached and the lower surface of the lower die 52 of the second forming mold 5b attached to the movable platen 3.

[0087] Specifically, distance change mechanism 30 is configured using drive actuator 211 (frame drive unit 203) of forming mold slide mechanism 20. Distance change mechanism 30 also has cam mechanism 301 interposed between upper mold 51 and lower mold 52 and base members 2 to 4. In distance change mechanism 30, as drive actuator 211 moves each support frame 201, 202, cam mechanism 301 changes the distance between the opposing surfaces of upper mold 51 and lower mold 52 and base members 2 to 4.

[0088] The cam mechanism 301 of this embodiment includes a first cam portion 302 having a contact surface provided on the upper mold 51 and the lower mold 52, and a second cam portion 303 fixed to the base members 2 to 4 and contacting the contact surface of the first cam portion 302. Here, as shown in "Configuration of First Cam Portion" in FIG. 9, the contact surface has an inclined surface 302a for narrowing or widening the gap between the opposing surfaces of the upper mold 51 and the lower mold 52 and the base members 2 to 4, and a flat surface 302b for maintaining the narrowed gap. Furthermore, two first cam portions 302 are provided on both sides of the upper mold 51 and the lower mold 52, and two second cam portions 303 are provided on both sides of the base members 2 to 4 corresponding to the first cam portions 302. Note that the second cam portion 303 may be formed of a roller member, a rolling element (bearing), a bushing, or the like.

[0089] <1-3-1. Mechanism for changing the gap between the upper die 51 and the base members 2 and 4> Specifically, the cam mechanism 301 corresponding to the upper mold support frame 201 is configured to lift the upper mold 51 placed on the stopper portion 204 of the upper mold support frame 201 from the stopper portion 204, and the inclined surface 302a of the first cam portion 302 is a downward surface that has an upward slope from the ejection position R toward the mold clamping position Q, as shown in ``Configuration (a) of the first cam portion'' in Figure 9.

[0090] 14(a), when the upper mold 51 slides from the ejection position R to the mold clamping position Q, the inclined surface 302a of the first cam portion 302 comes into contact with and rides up on the corresponding second cam portion 303, the upper mold 51 is lifted from the stopper portion 204, and the upper surface of the upper mold 51 approaches the lower surfaces of the base members 2 and 4, reducing the distance therebetween. Note that at the mold clamping position Q, the flat surface 302b of the first cam portion 302 is in contact with the second cam portion 303.

[0091] On the other hand, when the upper mold 51 slides from the mold clamping position Q to the protruding position R, the first cam portion 302 of the upper mold 51 separates from the corresponding second cam portion 303, the upper mold 51 moves under its own weight and is placed on the stopper portion 204, and the upper surface of the upper mold 51 separates from the lower surfaces of the base members 2 and 4, increasing the distance between them.

[0092] <1-3-2. Mechanism for changing the distance between the lower die 52 and the base members 3 and 4> Specifically, the cam mechanism 301 corresponding to the lower mold support frame 202 is configured to push the lower mold 52 supported by the elastic body 205 and contact portion 206 of the lower mold support frame 202 toward the elastic body 205 (base members 2 to 4), and the inclined surface 302a of the first cam portion 302 is an upward surface that has a downward slope from the ejection position R toward the mold clamping position Q, as shown in ``Configuration of the first cam portion (b)'' in Figure 9.

[0093] 14(b), when the lower mold 52 slides from the protruding position R to the mold clamping position Q, the inclined surface 302a of the first cam portion 302 of the lower mold 52 comes into contact with the corresponding second cam portion 303, the lower mold 52 is pressed toward the elastic body 205, and the lower surface of the lower mold 52 approaches the upper surfaces of the base members 3 and 4, thereby reducing the distance therebetween. Note that at the mold clamping position Q, the flat surface 302b of the first cam portion 302 is in contact with the second cam portion 303.

[0094] On the other hand, when the lower mold 52 slides from the mold clamping position Q to the protruding position R, the first cam portion 302 of the lower mold 52 separates from the corresponding second cam portion 303, the lower mold 52 moves upward due to the force applied from the elastic body 205, and the lower surface of the lower mold 52 separates from the upper surfaces of the base members 3 and 4, increasing the distance between them.

[0095] Here, the cam mechanism 301 of the distance change mechanism 30 keeps the opposing surfaces of the upper mold 51 and the lower mold 52 from contacting the opposing surfaces of the base members 2 to 4 at the mold clamping position Q, leaving a slight gap between them. Then, when the mold clamping mechanism 10 clamps the forming molds 5a and 5b, the opposing surfaces of the upper mold 51 and the lower mold 52 from contacting the opposing surfaces of the base members 2 to 4. At this time, the upper mold 51 and the lower mold 52 are in close contact with the base members 2 to 4, so the first cam portion 302 and the second cam portion 303 provided on the upper mold 51 and the lower mold 52 are separated, and the cam mechanism 301 is not damaged by mold clamping. Note that the cam mechanism 301 may be configured to bring the opposing surfaces of the upper mold 51 and the lower mold 52 from contacting the opposing surfaces of the base members 2 to 4 at the mold clamping position Q.

[0096] <1-5. Example of operation of resin molding apparatus 100> Next, an example of the operation of the resin molding apparatus 100 will be described with reference to Figures 1, 2, 4, 8, 9, 11, and 12. The operation described below is performed by a control unit COM provided in, for example, the substrate supply / storage module A, controlling each unit of the resin molding apparatus 100. The control unit COM is a dedicated or general-purpose computer having a CPU, internal memory, an input / output interface, an AD converter, etc.

[0097] First, with each forming mold 5a, 5b opened by lifting interlocking mechanism 8 (see FIG. 2), upper mold support frame 201 is slid by frame driving unit 203 to move upper mold 51 to protruding position R (see FIG. 11). Then, substrate supply unit 131 of substrate transport mechanism 13 supplies and holds substrate W to upper mold 51 of each forming mold 5a, 5b. Thereafter, frame driving unit 203 slides upper mold support frame 201 to move upper mold 51 to mold clamping position Q (see FIG. 9).

[0098] Furthermore, with each of the molding dies 5a, 5b opened by the lifting interlocking mechanism 8 (see FIG. 2), the frame driving unit 203 slides the lower die support frame 202 to move the lower die 52 to the protruding position R (see FIG. 12). Then, the resin material supply unit 181 of the resin material transport mechanism 18 supplies the release film F and the resin material J into the cavity 52C of the lower die 52 of each of the molding dies 5a, 5b. Thereafter, the frame driving unit 203 slides the lower die support frame 202 to move the lower die 52 to the clamping position Q (see FIG. 9). In this way, the substrate W, which is the object to be molded, the release film F, and the resin material J are supplied to each of the molding dies 5a, 5b.

[0099] Next, movable platen 3 is raised by mold clamping mechanism 10. As movable platen 3 rises, pantograph mechanism 81 contracts, and intermediate plate 4 connected to rotation shaft 81c of cross link portion 811 of pantograph mechanism 81 rises. As movable platen 3 rises, the area around forming molds 5a, 5b is sealed by sealing structure 50 shown in FIG. 4, and a vacuum is drawn around forming molds 5a, 5b by a vacuum pump (not shown).

[0100] Then, the upper surface of the lower mold 52 of each molding die 5a, 5b (specifically, the upper surface of the side surface member 522, or the release film F if present) comes into contact with the substrate W held by suction on the upper mold 51. At this time, if the timing at which the lower molds 52 of the first molding die 5a and the second molding die 5b come into contact with the upper mold 51 is different, the upper elastic member 823a or the lower elastic member 823b will deform before the elastic member 524 of the lower mold 52. In other words, the spring constants of the upper elastic member 823a and the lower elastic member 823b are smaller than the spring constant of the elastic member 524 of the lower mold 52.

[0101] For example, when the lower mold 52 on the intermediate plate 4 (the lower mold 52 of the first molding mold 5a) comes into contact with the substrate W held by suction on the corresponding upper mold 51 before the lower mold 52 on the movable platen 3 (the lower mold 52 of the second molding mold 5b), the intermediate plate 4 is displaced downward relative to the connecting member 821 and the upper elastic member 823a contracts (see Figure 8(a)).

[0102] On the other hand, when the lower mold 52 (lower mold 52 of the second molding mold 5b) on the movable platen 3 comes into contact with the substrate W adsorbed and held by the corresponding upper mold 51 before the lower mold 52 (lower mold 52 of the first molding mold 5a) on the intermediate plate 4, the intermediate plate 4 is displaced upward relative to the connecting member 821 and the lower elastic member 823b contracts (see Figure 7(b)).

[0103] As a result, the mold clamping operation is performed while eliminating differences in the timing at which the lower mold 52 of the first molding mold 5a and the second molding mold 5b contact the upper mold 51. Furthermore, the upper elastic member 823a and the lower elastic member 823b absorb not only variations in the thickness of the substrate W, but also variations in the amount of resin material J accommodated in the cavity 52C, variations in the volume of the electronic components Wx fixed to the substrate W, and the like.

[0104] Thereafter, the mold clamping mechanism 10 further raises the movable platen 3, thereby completing the clamping of the first molding die 5a and the second molding die 5b, and by maintaining this state for a predetermined time (for example, the curing time of the resin material J), the resin molding is completed. In this manner, the molding dies 5a, 5b are clamped using the lifting and lowering interlocking mechanism 8, and resin molding is performed. Thereafter, the mold clamping mechanism 10 lowers the movable platen 3, and the molding dies 5a, 5b are opened.

[0105] After the forming dies 5a, 5b have been opened by the lifting interlocking mechanism 8 (see FIG. 2), the frame driving unit 203 slides the upper die support frame 201 to move the upper die 51 to the protruding position R (see FIG. 11). Then, the substrate receiving unit 132 of the substrate transport mechanism 13 receives the resin molded product P from the upper die 51 of each forming dies 5a, 5b. Furthermore, the substrate supply unit 131 of the substrate transport mechanism 13 supplies and holds a substrate W to the upper die 51 of each forming dies 5a, 5b. Thereafter, the frame driving unit 203 slides the upper die support frame to move the upper die 51 to the mold clamping position (see FIG. 9). After receiving the resin molded product P, the substrate transport mechanism 13 stores the resin molded product P in the substrate storage unit 12 (see FIG. 1).

[0106] Furthermore, with the forming dies 5a, 5b opened by the lifting interlocking mechanism 8 (see FIG. 2), the frame driving unit 203 slides the lower die support frame 202 to move the lower die 52 to the protruding position R (see FIG. 12). Then, the film recovery unit 182 of the resin material conveying mechanism 18 recovers the used release film F from the lower die 52 of each of the forming dies 5a, 5b. The resin material supply unit 181 of the resin material conveying mechanism 18 supplies the release film F and resin material J into the cavity 52C of the lower die 52 of each of the forming dies 5a, 5b. Thereafter, the frame driving unit 203 slides the lower die support frame 202 to move the lower die 52 to the mold clamping position Q (see FIG. 9). After recovering the used release film F, the resin material conveying mechanism 18 discards the used release film F in a disposal box (not shown).

[0107] In this way, the resin molded product P is received, the used release film F is collected, and the substrate W, the release film F, and the resin material J are supplied. Then, the elevating and lowering interlocking mechanism 8 is used to clamp the molding dies 5a, 5b, thereby carrying out the next resin molding.

[0108] <1-6. Effects of the First Embodiment> According to resin molding apparatus 100 of this embodiment, slider 210, which is moved in the sliding direction by drive actuator 211, is selectively connected to upper die support frame 201, which supports upper die 51, and lower die support frame 202, which supports lower die 52, so that a common drive actuator 211 can be used to slide upper die 51 and lower die 52 between mold clamping position Q and ejection position R. This makes it possible to reduce the number of drive actuators 211 used in mold slide mechanism 20. As a result, it is possible to reduce the size and cost of resin molding apparatus 100, and also to save space for the control device for drive actuator 211. Additionally, with the resin molding apparatus 100 of this embodiment, by moving the upper mold 51 and the lower mold 52 to the ejection position R, the object to be conveyed can be conveyed to the upper mold 51 and the lower mold 52 at the ejection position R. As a result, there is no need to increase the distance between the upper mold 51 and the lower mold 52 when the molds are opened, and the resin molding apparatus 100 can be made low-profile.

[0109] <2. Second embodiment of the present invention> Next, a second embodiment of the present invention will be described. Note that, in the following, only the parts that are different from the first embodiment will be described, and the same members will be denoted by the same reference numerals.

[0110] Unlike the first embodiment (which has two sets of molding dies using one intermediate plate 4), the resin molding apparatus 100 of the second embodiment has a configuration in which it has multiple sets of molding dies using multiple intermediate plates 4. For example, it may have three sets of molding dies using two intermediate plates 4, four sets of molding dies using three intermediate plates 4, five sets of molding dies using four intermediate plates 4, or six or more sets of molding dies using five or more intermediate plates 4.

[0111] Specifically, in the resin molding apparatus 100, as shown in Fig. 15, a plurality of intermediate plates 4 are arranged in the vertical direction between a fixed platen 2 and a movable platen 3. Furthermore, molding dies 5b, 5c each including an upper die 51 and a lower die 52 are provided between the plurality of intermediate plates 4. Note that Fig. 15 shows the configuration from the fixed platen 2 to the three intermediate plates 4, and does not show the portion below them.

[0112] As in the first embodiment, each of the intermediate plates 4 is connected to each of the cross link portions 811 of the pantograph mechanism 81 via a connecting mechanism 82. As a result, the intermediate plates 4 move up and down in conjunction with the movement of the movable platen 3.

[0113] As shown in FIG. 16 , the pantograph mechanism 81 includes a plurality of cross link portions 811, the number of which corresponds to the number of intermediate plates 4, an upper end link portion 812, and a lower end link portion 813. The plurality of cross link portions 811 are connected in series. Specifically, between adjacent cross link portions 811, an upper end portion of a first link 81a of one cross link portion 811 is rotatably connected to an upper end portion of a second link 81b of the other cross link portion 811 by a rotation shaft 811, and an upper end portion of the second link 81b of one cross link portion 811 is rotatably connected to an upper end portion of the first link 81a of the other cross link portion 811 by a rotation shaft 81m. The configurations of the upper end link portion 812 and the lower end link portion 813 are the same as those in the first embodiment.

[0114] Furthermore, the side plates 41 connected to each of the multiple intermediate plates 4 are arranged with a horizontal offset so as not to interfere with each other. Specifically, as shown in Fig. 15, the side plates 41 of intermediate plates 4 adjacent to each other in the vertical direction are arranged with a left-right (horizontal) offset so as to be alternately arranged.

[0115] For example, the side plate 41a of the first intermediate plate 4 from the top is positioned on the inside, and the side plate 41b of the second intermediate plate 4 from the top is positioned on the outside. Also, the side plate 41b of the second intermediate plate 4 from the top is positioned on the outside, and the side plate 41c of the third intermediate plate 4 from the top is positioned on the inside. Here, the side plate 41b of the second intermediate plate 4 from the top has a through hole or a notch or the like (not shown) formed over the movement range of the linear motion block 842 so as not to impede the movement of the linear motion block 842 arranged on the side plates 41a and 41c (first and third from the top) located on the inside.

[0116] <2-1. Effects of the Second Embodiment> In addition to the effects of the first embodiment, the resin molding apparatus 100 of this embodiment can mold resin using three or more molding dies 5a to 5c, thereby improving the productivity of the resin molded products P. Furthermore, since the side plates 41 of the multiple intermediate plates 4 are arranged offset in the horizontal direction so as not to interfere with each other, the height dimension of the resin molding apparatus 100 can be reduced.

[0117] <3. Other Modified Embodiments> The present invention is not limited to the above-described embodiment.

[0118] For example, in the configurations of Figures 2 and 3, a separate base member may be provided between the fixed platen 2 and the upper die 51 of the forming die 5a, between the intermediate plate 4 and the lower die 52 of the forming die 5a, between the intermediate plate 4 and the upper die 51 of the forming die 5b, or between the movable platen 3 and the lower die 52 of the forming die 5b.

[0119] The multiple molds used in the first and second embodiments may be the same molds or different molds. Here, "multiple molds that are different from one another" may mean that the upper molds are different from one another, or the lower molds are different from one another.

[0120] In the above embodiment, the first molding die 5a and the second molding die 5b are each provided with a molding die slide mechanism 20, but the upper mold 51 and the lower mold 52 of the first molding die 5a and the second molding die 5b may be slid by one molding die slide mechanism 20. In this case, the switching mechanism 212 of the molding die slide mechanism 20 is configured to switch between connecting a plurality of upper mold support frames 201 and a plurality of lower mold support frames 202 to the slider 210.

[0121] In the above embodiment, the linear rails 71 of the lifting slide mechanism 7 are provided on the side wall members 61 and 62, and the linear block 72 is provided on the side plate 41. However, the linear rails 71 of the lifting slide mechanism 7 may also be provided on the side plate 41, and the linear block 72 may also be provided on the side wall members 61 and 62.

[0122] In the above embodiment, a pantograph mechanism 81 was used to link multiple forming molds 5a, 5b, but other types of lifting and lowering linkage mechanisms 8 such as a lever mechanism (Patent Publication No. 2019-77144) or a rack and pinion mechanism (Patent Publication No. 2010-094931) may also be used.

[0123] 17(a), a lifting / lowering interlocking mechanism 8 using a lever mechanism has an arm 60 that rotates around a fulcrum 60a at one end, and the movable platen 3 and intermediate plate 4 are connected to the arm 60 via connecting members 70a and 70b at different positions on the arm 60. When the movable platen 3 is driven by the mold clamping mechanism 10, the arm 60 rotates around the fulcrum 60a, and the intermediate plate 4 connected to the arm 60 moves up and down in conjunction with the movable platen 3.

[0124] 17(b), the lifting interlocking mechanism 8 using a rack and pinion mechanism has a pair of rack gears 80a, 80b and a pinion gear 80c that meshes with the rack gears 80a, 80b, with one rack gear 80a provided on the side wall members 61, 62 and the other rack gear 80b provided on the movable platen 3 side. The pinion gear 80c that meshes with the pair of rack gears 80a, 80b is provided on the intermediate plate 4 side. By rotating the pinion gear 80c forward or backward by a motor (not shown), the movable platen 3 and the intermediate plate 4 move up and down in unison.

[0125] Although the mold in the above embodiment has multiple sets of upper molds 51 and lower molds 52, it may have a configuration with a single set of upper molds 51 and lower molds 52. In this case, the base members are the stationary platen 2 and the movable platen 3. The upper mold 51 slides relative to the stationary platen 2 in a sliding direction that intersects with the mold clamping direction by the mold sliding mechanism 20. The lower mold 52 slides relative to the movable platen 3 in a sliding direction that intersects with the mold clamping direction by the mold sliding mechanism 20.

[0126] Furthermore, the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications are possible without departing from the spirit of the present invention. [Explanation of symbols]

[0127] 100...Resin molding equipment W: Molding object P···Resin molded products (molded objects made from resin) J...Resin material F···Release film 2. Fixed platen (base member) 3. Movable platen (base member) 4. Intermediate plate (base member) 51...upper mold 52...Lower mold 61, 62: Pair of side wall members 7. Lifting and sliding mechanism 81 Pantograph mechanism 82...Connection mechanism 10. Mold clamping mechanism 20. Mold slide mechanism 201 Upper die support frame 202 Lower die support frame 203 Frame drive unit 210···Slider 211 Drive actuator 211a...Ball screw mechanism 211b···Motor 212...Switching mechanism 212a···First switching unit 212a1...First engaged part 212a2...First engaging part 212b... Second switching unit 212b1...Second engaged part 212b2...Second engagement part 30. Spacing change mechanism

Claims

1. a mold clamping mechanism that clamps the upper mold and the lower mold together via a base member; a mold slide mechanism that slides the upper mold and the lower mold in a slide direction that intersects with a mold clamping direction, The forming mold slide mechanism is an upper mold support frame for supporting the upper mold; a lower die support frame for supporting the lower die; a frame driving unit that moves the upper die support frame and the lower die support frame in the slide direction; The frame driving unit is a slider provided so as to be movable in the sliding direction relative to the base member; a drive actuator that moves the slider in the sliding direction; a switching mechanism that switches between connecting the upper die support frame and the lower die support frame to the slider;

2. The switching mechanism is a first switching unit that switches the slider and the upper die support frame between a connected state and a disconnected state; The resin molding apparatus according to claim 1 , further comprising a second switching unit that switches the slider and the lower die support frame between a connected state and a disconnected state.

3. The first switching unit is a first engaging portion provided on one of the slider or the upper mold support frame is engaged with or disengaged from a first engaged portion provided on the other of the slider or the upper mold support frame, The second switching unit is 3. The resin molding apparatus according to claim 2, wherein a second engaging portion provided on one of the slider or the lower mold support frame is engaged with or disengaged from a second engaged portion provided on the other of the slider or the lower mold support frame.

4. The drive actuator is a ball screw mechanism connected to the slider; The resin molding apparatus according to claim 1 , further comprising: a motor that rotates the ball screw mechanism.

5. 5. The resin molding apparatus according to claim 1, further comprising a spacing change mechanism that changes the spacing between the opposing surfaces of the base member and the upper mold or the lower mold when the upper mold or the lower mold is slid by the mold slide mechanism.

6. 6. The resin molding apparatus according to claim 5, wherein the distance changing mechanism is configured using a drive actuator for the mold slide mechanism.

7. The base member is A fixed platen; a movable platen that can be raised and lowered by the mold clamping mechanism; an intermediate plate disposed between the fixed platen and the movable platen; The resin molding apparatus according to claim 1 , wherein the upper mold and the lower mold are provided between the fixed platen and the intermediate plate, and between the intermediate plate and the movable platen, respectively.

8. a pair of sidewall members disposed on both sides of the movable platen and the intermediate plate; an elevation slide mechanism that slides the intermediate plate in the up-down direction relative to the pair of side wall members; a lifting / lowering interlocking mechanism that causes the intermediate plate to lift up and down in response to the lifting / lowering of the movable platen, The lifting and lowering interlocking mechanism is a pantograph mechanism having one end fixed to the side wall member and the other end moving together with the movable platen and extending and retracting as the movable platen rises and falls; The resin molding apparatus according to claim 7 , further comprising a connecting mechanism that connects the cross link portion of the pantograph mechanism and the intermediate plate.

9. A method for manufacturing a resin molded product using the resin molding apparatus according to any one of claims 1 to 8, a conveying step of conveying a molding object to a molding die including the upper die and the lower die; a resin molding step of clamping the mold to mold a resin into the molding object; and removing the resin-molded object from the mold.

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