Laminate structure and method for manufacturing the same

Abstract

To provide a method for manufacturing a laminate structure in which a short circuit between wires can be prevented, and a laminate structure obtained by the manufacturing method.SOLUTION: A method for manufacturing a laminate structure includes: (Step A) of obtaining a first intermediate member by preparing a first member having a first electrode formed in a predetermined pattern, arranging a liquid repellent layer between patterns of the first electrode, arranging conductive particles on the first electrode, and arranging a resin composition on the first member on which the liquid repellent layer and the conductive particles are arranged; (Step B) of obtaining a second intermediate member by preparing a second member having a second electrode formed in a predetermined pattern, and arranging a resin composition on the second member; and (Step C) of bonding the first intermediate member obtained in Step A and the second intermediate member obtained in Step B while allowing surfaces on which electrodes are present to face each other, and electrically connecting the first electrode and the second electrode via the conductive particles.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a laminated structure and a method for manufacturing the same. [Background technology]

[0002] BACKGROUND ART A laminated structure is known in which wiring or electrodes of different members are connected to each other by an anisotropic conductive adhesive (Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent Publication No. 2021-93104 Summary of the Invention [Problem to be solved by the invention]

[0004] In a laminated structure such as that described in Patent Document 1, electrodes of different components are electrically connected to each other using an anisotropic conductive adhesive, but if conductive particles contained in the anisotropic conductive adhesive are present between adjacent wirings, there is a risk of a short circuit between the adjacent wirings.

[0005] An object of the present disclosure is to provide a method for manufacturing a laminated structure that can prevent short circuits between wirings, and a laminated structure obtained by such a manufacturing method. [Means for solving the problem]

[0006] The present disclosure includes the following aspects: [Section 1] A method for manufacturing a laminated structure, comprising: (Process A) providing a first member having a first electrode formed in a predetermined pattern; disposing a liquid-repellent layer between the patterns of the first electrode; disposing conductive particles on the first electrode; disposing a resin composition on the first member on which the liquid-repellent layer and the conductive particles are disposed; to obtain a first intermediate member; (Process B) providing a second member having a second electrode formed in a predetermined pattern; disposing a resin composition on the second member; to obtain a second intermediate member; (Process C) bonding the first intermediate member obtained in step A and the second intermediate member obtained in step B so that their electrode-containing surfaces face each other, and electrically connecting the first electrode and the second electrode via the conductive particles; A method for manufacturing a laminated structure, comprising: [Section 2] Item 1. The manufacturing method according to item 1, wherein the width of the first electrode is 10 μm or more. [Section 3] Item 3. The manufacturing method according to item 1 or 2, wherein the thickness of the first electrode is 1 μm or more. [Section 4] Item 4. The manufacturing method according to any one of items 1 to 3, wherein the distance between adjacent first electrodes is 10 μm to 200 μm. [Section 5] Item 5. The method according to any one of items 1 to 4, wherein the liquid-repellent layer is formed from a liquid-repellent agent containing a fluorine-containing compound. [Section 6] The fluorine-containing compound is represented by the following formula (1) or (2): [C3] TIFF2025167878000002.tif22101[In formula: R F1 are each independently Rf 1 -R F -O q - and; R F2 is -Rf 2 p -R F -O q - and; Rf 1 each independently represents a C optionally substituted by one or more fluorine atoms;1-16 is an alkyl group; Rf 2 C optionally substituted with one or more fluorine atoms 1-6 is an alkylene group; R F are each independently a divalent fluoropolyether group; p is 0 or 1; each q is independently 0 or 1; R Si are each independently a hydroxyl group, a hydrolyzable group, a hydrogen atom, or a monovalent group containing a silicon atom to which a monovalent organic group is bonded; At least one R Si is a monovalent group containing a Si atom to which a hydroxyl group or a hydrolyzable group is bonded; X A are each independently a single bond or a divalent to decavalent organic group; α is an integer from 1 to 9; β is an integer from 1 to 9; Each γ is independently an integer of 1 to 9. or a fluorine-containing compound represented by Equation (3), (4) or (5): [C4] TIFF2025167878000003.tif34164[in formula: R F1 is Rf 1 -R F -O q - and R F2 is -Rf 2 p -R F -O q - and Rf 1 C optionally substituted with one or more fluorine atoms 1-16 is an alkyl group, Rf 2 C optionally substituted with one or more fluorine atoms 1-6 is an alkylene group, R Fare each independently a divalent fluoropolyether group; p is 0 or 1, Each q is independently 0 or 1; X AA are each independently a single bond or a divalent organic group, X B are each independently an (m+1)-valent group, However, in each formula, at least one X B is an (m+1)-valent group containing a hydrolyzable silyl group, R Ac are each independently -X D -X E (-X F -OCO-CR 5 =CH2) m’ and X D is a single bond or a divalent group, X E is a single bond or an (m'+1)-valent group, X F are each independently a single bond or a divalent group, R 5 is a hydrogen atom, a halogen atom, or a monovalent organic group having 1 to 8 carbon atoms, m' is an integer from 1 to 10, m is independently an integer of 0 to 10, R a are each independently an (m3+2)-valent organic group, m3 is an integer from 0 to 4, However, at least one of m and m3 is 1 or more, R g are each independently -NR c CO-R e -, -NR c COO-R e -, or -NR c CONR c -R e -, where these groups are represented by R a binds to Rc are each independently a hydrogen atom, C 1-6 Alkyl group, or C 6-16 is an aryl group, R e are each independently a single bond or a divalent organic group, x is an integer greater than or equal to 1. Item 6. The method according to any one of Items 1 to 5, wherein the fluorine-containing compound is represented by the formula: [Section 7] Item 7. The method according to any one of items 1 to 6, wherein the conductive particles are particles containing a metal. [Section 8] Item 8. The method according to any one of items 1 to 7, wherein the conductive particles have surfaces coated with an insulating layer. [Section 9] Item 9. The manufacturing method according to any one of items 1 to 8, wherein the step of arranging the conductive particles is carried out by applying a resin coating material containing the conductive particles. [Section 10] Item 10. The manufacturing method according to any one of items 1 to 9, wherein the resin coating has a viscosity of 50 cps or less. [Section 11] Item 11. The method according to any one of items 1 to 10, wherein the resin composition contains a bisphenol A type epoxy resin, a bisphenol F type epoxy resin, a novolac type epoxy resin, or a modified epoxy resin thereof. [Section 12] Item 12. The manufacturing method according to any one of items 1 to 11, wherein the resin composition has a viscosity of 50 cps or more. [Section 13] Item 13. The manufacturing method according to any one of items 1 to 12, wherein the first intermediate member and the second intermediate member are joined by thermocompression bonding. [Section 14] A first member; a first electrode formed in a predetermined pattern on the first member; a liquid-repellent layer disposed between the first electrodes; A second member; a second electrode formed in a predetermined pattern on the second member; Conductive particles disposed between the first electrode and the second electrode; a resin layer disposed between the first member and the second member; and the first electrode and the second electrode are electrically connected via the conductive particles. Laminated structure. [Effects of the Invention]

[0007] According to the present disclosure, a method for manufacturing a stacked structure capable of preventing short circuits between wirings is provided. [Brief explanation of the drawings]

[0008] [Figure 1] 1 is a schematic cross-sectional view showing a first member on which a first electrode is arranged in a manufacturing method of a laminated structure according to the present disclosure. [Figure 2] 1 is a schematic cross-sectional view showing a first member on which a liquid-repellent layer is disposed in a method for producing a laminated structure according to the present disclosure. [Figure 3] 1 is a schematic cross-sectional view showing a first member in which conductive particles are arranged, in a manufacturing method of a laminated structure according to the present disclosure. [Figure 4] 1 is a schematic cross-sectional view showing a first member on which a resin composition is disposed in a method for producing a laminate structure according to the present disclosure. [Figure 5] 3 is a schematic cross-sectional view showing a second member on which a second electrode is disposed in the method for manufacturing a laminated structure according to the present disclosure. FIG. [Figure 6] 2 is a schematic cross-sectional view showing a second member on which a resin composition is disposed in the method for producing a laminate structure of the present disclosure. FIG. [Figure 7] 1 is a schematic cross-sectional view illustrating a step of bonding a first intermediate member and a second intermediate member with their electrode surfaces facing each other in a manufacturing method of a laminated structure according to the present disclosure. FIG. [Figure 8] 1 is a schematic cross-sectional view of a laminated structure according to the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0009] Embodiments of the present disclosure will be described below. However, the embodiments described below are intended to embody the technical ideas of the present disclosure, and unless otherwise specified, the invention is not limited to the following. The drawings are schematic illustrations of the embodiments, and for clarity of explanation, the scale, spacing, and positional relationships of each component may be exaggerated, or some components may be omitted, or end views showing only the cut surface may be used as cross-sectional views. The directions shown in each drawing indicate the relative positions between components and are not intended to indicate absolute positions. Note that, in principle, the same names and symbols indicate components that are the same or of the same quality, and detailed descriptions may be omitted as appropriate.

[0010] [Method of manufacturing laminated structure] The method for producing the laminated structure of the present disclosure includes the following steps. (Process A) providing a first member having a first electrode formed in a predetermined pattern; disposing a liquid-repellent layer between the patterns of the first electrode; disposing conductive particles on the first electrode; disposing a resin composition on the first member on which the liquid-repellent layer and the conductive particles are disposed; to obtain a first intermediate member; (Process B) providing a second member having a second electrode formed in a predetermined pattern; disposing a resin composition on the second member; to obtain a second intermediate member; (Process C) The first intermediate member obtained in process A and the second intermediate member obtained in process B are joined together by placing the surfaces on which the electrodes are located facing each other, and the first electrode and the second electrode are electrically connected via the conductive particles.

[0011] Hereinafter, a method for manufacturing a laminated structure according to the present disclosure will be described using a wiring substrate as the laminated structure.

[0012] [Process A] Step A comprises the following steps: (A1) preparing a first member having a first electrode formed in a predetermined pattern; (A2) disposing a liquid-repellent layer between the patterns of the first electrode; (A3) disposing conductive particles on the first electrode; (A4) Placing a resin composition on the first member on which the liquid-repellent layer and the conductive particles are placed. to obtain a first intermediate member.

[0013] [Step A1] Preparing a first member having a first electrode formed in a predetermined pattern First, the first member 11 is prepared.

[0014] The first member 11 is typically a wiring substrate. The first member 11 is not particularly limited as long as the surface on which the first electrode 12 is disposed is insulating, and examples thereof include a resin substrate, a ceramic substrate, and a metal substrate whose surface has been treated for insulation.

[0015] Next, the first electrode 12 is formed in a predetermined pattern on the first member 11 (FIG. 1).

[0016] The method for forming the first electrode 12 is not particularly limited, and may be, for example, photolithography, printing, vapor deposition, etc. Photolithography is preferred because it allows for the formation of finer wiring patterns.

[0017] The material constituting the first electrode 12 is not particularly limited as long as it is conductive, and may be, for example, Au, Al, Pb, Pd, Ag, Sn, Ni, Cu, etc. The material constituting the first electrode 12 may be one type or two or more types.

[0018] The width of the first electrode 12 is preferably 10 μm or more, more preferably 20 μm or more, for example, 25 μm or more or 30 μm or more. The width of the first electrode 12 is preferably 300 μm or less, more preferably 200 μm or less, even more preferably 100 μm or less, for example, 50 μm or less, 40 μm or less, or 30 μm or less. For example, the width of the first electrode 12 is preferably 10 to 300 μm, more preferably 20 to 200 μm, even more preferably 20 to 100 μm, and even more preferably 20 to 50 μm.

[0019] The thickness of the first electrode 12 is preferably 1 μm or more, more preferably 2 μm or more, and even more preferably 3 μm or more, for example, 5 μm or more. By increasing the thickness of the first electrode 12, it is possible to prevent the liquid-repellent agent forming the liquid-repellent layer from overflowing onto the first electrode when the agent is applied. In other words, application of the liquid-repellent agent becomes easier. The thickness of the first electrode 12 is preferably 100 μm or less, more preferably 50 μm or less, and even more preferably 30 μm or less. By reducing the thickness of the first electrode 12, the thickness of the resulting wiring board becomes smaller, making it easier to miniaturize. For example, the thickness of the first electrode 12 is preferably 1 to 100 μm, more preferably 3 to 50 μm, and even more preferably 3 to 30 μm.

[0020] The distance between adjacent first electrodes 12 is preferably 200 μm or less, more preferably 100 μm or less, and even more preferably 80 μm or less, for example, 60 μm or less, 50 μm or less, 40 μm or less, or 30 μm or less. By reducing the distance between adjacent first electrodes 12, higher-density wiring can be formed. The distance between adjacent first electrodes 12 is preferably 10 μm or more, more preferably 20 μm or more, and even more preferably 30 μm or more, for example, 50 μm or more or 60 μm or more. Increasing the distance between adjacent first electrodes 12 facilitates the formation of a liquid-repellent layer between the first electrodes. For example, the distance between adjacent first electrodes 12 is preferably 10 to 200 μm, more preferably 10 to 100 μm, and even more preferably 20 to 100 μm, for example, 20 to 80 μm or 30 to 60 μm. It is sufficient that some of the adjacent first electrodes 12 satisfy the above relationship; it is not necessary for all of them to satisfy the above relationship.

[0021] [Step A2] Placing a liquid-repellent layer between the patterns of the first electrode Next, a liquid-repellent layer 13 is formed between the first electrodes 12 formed on the first member 11 (FIG. 2). By forming the liquid-repellent layer 13 between the first electrodes 12, it is possible to prevent the conductive composition containing the conductive particles 14 from being disposed in the region between the first electrodes 12 in the subsequent process. In other words, it is possible to prevent the conductive particles 14 from being disposed in the region between the first electrodes 12.

[0022] The method for forming the liquid-repellent layer 13 is not particularly limited, and for example, the layer may be formed by coating or vapor deposition of a liquid-repellent agent, or by attaching a separately formed film. Forming the liquid-repellent layer by coating a liquid-repellent agent is preferred because it allows for easy placement between the first electrodes 12. The method for applying the liquid-repellent agent is not particularly limited, and a dispenser, spray, immersion, or the like can be used. When forming the liquid-repellent layer 13, the first electrodes 12 may be masked to prevent the liquid-repellent layer from being formed on them.

[0023] In a preferred embodiment, the liquid-repellent layer 13 is formed from a liquid-repellent agent containing a fluorine-containing compound.

[0024] The fluorine-containing compound is not particularly limited as long as it is a compound that exhibits liquid repellency, and the following fluorine-containing compounds can be used.

[0025] The following formula (1) or (2): [ka] [In formula: R F1 are each independently Rf 1 -R F -O q - and; R F2 is -Rf 2 p -R F -O q - and; Rf 1 each independently represents a C optionally substituted by one or more fluorine atoms; 1-16 is an alkyl group; Rf 2 C optionally substituted with one or more fluorine atoms 1-6 is an alkylene group; R F are each independently a divalent fluoropolyether group; p is 0 or 1; each q is independently 0 or 1; R Si are each independently a hydroxyl group, a hydrolyzable group, a hydrogen atom, or a monovalent group containing a silicon atom to which a monovalent organic group is bonded; At least one R Si is a monovalent group containing a Si atom to which a hydroxyl group or a hydrolyzable group is bonded; X A are each independently a single bond or a divalent to decavalent organic group; α is an integer from 1 to 9; β is an integer from 1 to 9; Each γ is independently an integer of 1 to 9. A fluorine-containing compound represented by the formula:

[0026] Formula (3), (4), or (5): [ka] [In formula: R F1 is Rf 1 -R F -O q - and R F2 is -Rf 2 p -R F -O q - and Rf 1 C optionally substituted with one or more fluorine atoms 1-16 is an alkyl group, Rf 2 C optionally substituted with one or more fluorine atoms 1-6 is an alkylene group, R F are each independently a divalent fluoropolyether group; p is 0 or 1, Each q is independently 0 or 1; X AA are each independently a single bond or a divalent organic group, X B are each independently an (m+1)-valent group, However, in each formula, at least one X B is an (m+1)-valent group containing a hydrolyzable silyl group, R Ac are each independently -X D -X E (-X F -OCO-CR 5 =CH2) m’ and X D is a single bond or a divalent group, X E is a single bond or an (m'+1)-valent group, X Fare each independently a single bond or a divalent group, R 5 is a hydrogen atom, a halogen atom, or a monovalent organic group having 1 to 8 carbon atoms, m' is an integer from 1 to 10, m is independently an integer of 0 to 10, R a are each independently an (m3+2)-valent organic group, m3 is an integer from 0 to 4, However, at least one of m and m3 is 1 or more, R g are each independently -NR c CO-R e -, -NR c COO-R e -, or -NR c CONR c -R e -, where these groups are represented by R a binds to R c are each independently a hydrogen atom, C 1-6 Alkyl group, or C 6-16 is an aryl group, R e are each independently a single bond or a divalent organic group, x is an integer greater than or equal to 1. A fluorine-containing compound represented by the formula:

[0027] As used herein, the term "monovalent organic group" refers to a monovalent group containing carbon. The monovalent organic group may be, but is not limited to, a hydrocarbon group or a derivative thereof. A hydrocarbon group derivative refers to a group having one or more N, O, S, Si, amide, sulfonyl, siloxane, carbonyl, carbonyloxy, or the like at the end or in the molecular chain of the hydrocarbon group. The term "organic group" simply refers to a monovalent organic group. Furthermore, the term "divalent to decavalent organic group" refers to a divalent to decavalent group containing carbon. Examples of such divalent to decavalent organic groups include, but are not limited to, divalent to decavalent groups in which one to nine hydrogen atoms have been eliminated from an organic group. For example, the divalent organic group may be, but is not limited to, a divalent group in which one hydrogen atom has been eliminated from an organic group.

[0028] As used herein, the term "hydrocarbon group" refers to a group containing carbon and hydrogen, which is a hydrocarbon group from which one hydrogen atom has been removed. Such hydrocarbon groups include, but are not limited to, C 1-20 Examples of hydrocarbon groups include aliphatic hydrocarbon groups and aromatic hydrocarbon groups. The "aliphatic hydrocarbon group" may be linear, branched, or cyclic, and may be saturated or unsaturated. The hydrocarbon group may also contain one or more ring structures.

[0029] As used herein, the substituent of the "hydrocarbon group" is not particularly limited, but examples thereof include a halogen atom, a C 1-6 Alkyl group, C 2-6 Alkenyl group, C 2-6 Alkynyl group, C 3-10 Cycloalkyl groups, C 3-10 Unsaturated cycloalkyl groups, 5-10 membered heterocyclyl groups, 5-10 membered unsaturated heterocyclyl groups, C 6-10 Examples include one or more groups selected from aryl groups and 5- to 10-membered heteroaryl groups.

[0030] As used herein, the term "hydrolyzable group" refers to a group that can undergo a hydrolysis reaction, i.e., a group that can be removed from the main skeleton of a compound by a hydrolysis reaction. Examples of hydrolyzable groups include -OR j , -OCOR j , -ON=CR j 2, -NR j 2, -NHR j , —NCO, halogen (wherein R j is a substituted or unsubstituted C 1-4 (representing an alkyl group) and the like.

[0031] [Compound represented by formula (1) or (2)] [ka]

[0032] In the above formula (1), R F1 independently in each occurrence, Rf 1 -R F -O q -It is.

[0033] In the above formula (2), R F2 is -Rf 2 p -R F -O q -It is.

[0034] In the above formula, Rf 1 each occurrence independently represents C optionally substituted by one or more fluorine atoms; 1-16 It is an alkyl group.

[0035] C optionally substituted with one or more fluorine atoms 1-16 "C" in alkyl group 1-16 The "alkyl group" may be a straight chain or a branched chain, and is preferably a straight chain or branched chain C 1-6 Alkyl groups, especially C 1-3alkyl group, more preferably a straight-chain C 1-6 Alkyl groups, especially C 1-3 It is an alkyl group.

[0036] Above Rf 1 is preferably C substituted by one or more fluorine atoms 1-16 alkyl group, more preferably CF2H-C 1-15 A perfluoroalkylene group, more preferably C 1-16 It is a perfluoroalkyl group.

[0037] Above C 1-16 The perfluoroalkyl group may be a straight or branched chain, and is preferably a straight or branched C 1-6 Perfluoroalkyl groups, especially C 1-3 A perfluoroalkyl group, more preferably a linear C 1-6 Perfluoroalkyl groups, especially C 1-3 A perfluoroalkyl group, specifically -CF3, -CF2CF3, or -CF2CF2CF3.

[0038] In the above formula, Rf 2 C optionally substituted with one or more fluorine atoms 1-6 It is an alkylene group.

[0039] C optionally substituted with one or more fluorine atoms 1-6 "C" in the alkylene group 1-6 The "alkylene group" may be a straight chain or a branched chain, and is preferably a straight chain or branched chain C 1-3 It is preferably a linear alkylene group. 1-3 It is an alkylene group.

[0040] Above Rf 2 is preferably C substituted by one or more fluorine atoms 1-6 is an alkylene group, more preferably C 1-6 A perfluoroalkylene group, more preferably C1-3 It is a perfluoroalkylene group.

[0041] Above C 1-6 The perfluoroalkylene group may be a straight chain or a branched chain, and is preferably a straight chain or branched C 1-3 A perfluoroalkylene group, more preferably a linear C 1-3 A perfluoroalkylene group, specifically, -CF2-, -CF2CF2-, or -CF2CF2CF2-.

[0042] In the above formula, p is 0 or 1. In one embodiment, p is 0. In another embodiment, p is 1.

[0043] In the above formula, q is, independently at each occurrence, 0 or 1. In one embodiment, q is 0. In another embodiment, q is 1.

[0044] In the above formulas (1) and (2), R F is independently in each occurrence a divalent fluoropolyether group.

[0045] R F is preferably: -(OC h1 R Fa 2h1 ) h3 -(OC h2 R Fa 2h2-2 ) h4 - [In formula: R Fa is independently in each occurrence a hydrogen atom, a fluorine atom, or a chlorine atom; h1 is an integer from 1 to 6, h2 is an integer from 4 to 8, h3 is an integer equal to or greater than 0, h4 is an integer equal to or greater than 0, However, the number of repeating units of h3 and h4 is 1 or more, preferably 2 or more, and more preferably 5 or more, and the order of the repeating units enclosed in parentheses with h3 and h4 is arbitrary in the formula.] It may contain a group represented by:

[0046] In one embodiment, R F R can be linear or branched. F is preferably of the formula: -(OC6F 12 ) a -(OC5F 10 ) b -(OC4F8) c -(OC3R Fa 6) d -(OC2F4) e -(OCF2) f - [In formula: R Fa is independently in each occurrence a hydrogen atom, a fluorine atom, or a chlorine atom; a, b, c, d, e, and f each independently represent an integer of 0 to 200, and the sum of a, b, c, d, e, and f is 1 or more. The order of the repeating units enclosed in parentheses with a, b, c, d, e, or f is arbitrary in the formula. However, all R Fa is a hydrogen atom or a chlorine atom, at least one of a, b, c, e, and f is 1 or greater.] It is a group represented by the formula:

[0047] R Fa is preferably a hydrogen atom or a fluorine atom, more preferably a fluorine atom. Fa is a hydrogen atom or a chlorine atom, at least one of a, b, c, e and f is 1 or greater.

[0048] Preferably, a, b, c, d, e and f may each independently be an integer of 0 to 100.

[0049] The sum of a, b, c, d, e, and f is preferably 5 or more, more preferably 10 or more, and may be, for example, 15 or more or 20 or more. The sum of a, b, c, d, e, and f is preferably 200 or less, more preferably 100 or less, and even more preferably 60 or less, and may be, for example, 50 or less or 30 or less.

[0050] These repeating units may be linear or branched. For example, -(OCF 12 )- may be -(OCF2CF2CF2CF2CF2CF2CF2)-, -(OCF(CF3)CF2CF2CF2CF2)-, -(OCF2CF(CF3)CF2CF2CF2)-, -(OCF2CF2CF(CF3)CF2CF2)-, -(OCF2CF2CF2CF(CF3)CF2)-, -(OCF2CF2CF2CF2CF(CF3)CF2)-, -(OCF2CF2CF2CF2CF(CF3))-, etc. 10 )- may be -(OCF2CF2CF2CF2CF2)-, -(OCF(CF3)CF2CF2CF2)-, -(OCF2CF(CF3)CF2CF2)-, -(OCF2CF2CF(CF3)CF2)-, -(OCF2CF2CF2CF(CF3)CF2)-, -(OCF2CF2CF2CF(CF3))-, etc. -(OC4F8)- may be -(OCF2CF2CF2CF2)-, -(OCF(CF3)CF2CF2)-, -(OCF2CF(CF3)CF2)-, -(OC(CF3)2CF2)-, -(OCF2C(CF3)2)-, -(OCF(CF3)CF(CF3))-, -(OCF(C2F5)CF2)-, and -(OCF2CF(C2F5))-. -(OC3F6)- (i.e., in the above formula, R Fa is a fluorine atom) may be any of -(OCFCFCF)-, -(OCF(CF)CF)-, and -(OCFCF(CF))-. -(OCF)- may be any of -(OCFCF)- and -(OCF(CF))-.

[0051] In one embodiment, the repeating unit is linear.

[0052] In one embodiment, the repeat unit is branched.

[0053] In one embodiment, R F may contain a ring structure.

[0054] The ring structure may be a three-, four-, five-, or six-membered ring as shown below. [ka] [In the formula, * indicates the bonding position.]

[0055] The ring structure may be preferably a four-membered ring, a five-membered ring, or a six-membered ring, more preferably a four-membered ring or a six-membered ring.

[0056] The repeating unit having a ring structure may preferably be the following unit. [ka] [In the formula, * indicates the bonding position.]

[0057] In one embodiment, R F is each independently a group represented by any one of the following formulas (f1) to (f6) in each occurrence. -(OC3F6) d -(OC2F4) e - (f1) [In the formula, d is an integer of 1 to 200, and e is 0 or 1.] -(OC4F8) c -(OC3F6) d -(OC2F4) e -(OCF2) f - (f2) [In the formula, c and d each independently represent an integer of 0 or more and 30 or less, and e and f each independently represent an integer of 1 or more and 200 or less, the sum of c, d, e, and f is 2 or more; The order of occurrence of each repeating unit enclosed in parentheses with the subscript c, d, e, or f is arbitrary in the formula.]; -(R6 -R 7 ) g -R 9 - (f3) [In the formula, R 6 is OCF2 or OC2F4, R 7 are OC2F4, OC3F6, OC4F8, OC5F 10 and OC6F 12 or a combination of two or three groups independently selected from these groups; R 9 is a single bond or OCF2, OC2F4, OC3F6, OC4F8, OC5F 10 and OC6F 12 or a combination of two or three groups selected from these groups, g is an integer from 2 to 100; -(R 6 -R 7 ) g -R r -(R 7’ -R 6’ ) g’ - (f4) [In the formula, R 6 is OCF2 or OC2F4, R 7 are OC2F4, OC3F6, OC4F8, OC5F 10 and OC6F 12 or a combination of two or three groups independently selected from these groups; R 6’ is OCF2 or OC2F4, R 7’ are OC2F4, OC3F6, OC4F8, OC5F 10 and OC6F 12 or a combination of two or three groups independently selected from these groups; g is an integer from 2 to 100, g' is an integer from 2 to 100, R r teeth, [ka] (In the formula, * indicates the bonding position.) ]; -(OC6F 12 ) a -(OC5F 10 ) b -(OC4F8) c -(OC3F6) d -(OC2F4) e -(OCF2) f - (f5) [In the formula, e is an integer of 1 or more and 200 or less, a, b, c, d, and f are each independently an integer of 0 or more and 200 or less, and the order of the repeating units enclosed in parentheses with a, b, c, d, e, or f is arbitrary in the formula.] -(OC6F 12 ) a -(OC5F 10 ) b -(OC4F8) c -(OC3F6) d -(OC2F4) e -(OCF2) f - (f6) [In the formula, f is an integer of 1 or more and 200 or less, a, b, c, d, and e are each independently an integer of 0 or more and 200 or less, and the order of the repeating units enclosed in parentheses with a, b, c, d, e, or f is arbitrary in the formula.]

[0058] In the above formula (f1), d is preferably an integer of 5 to 200, more preferably 10 to 100, even more preferably 15 to 50, for example, an integer of 25 to 35. OC3F6 in the above formula (f1) is preferably (OCF2CF2CF2), (OCF(CF3)CF2) or (OCF2CF(CF3)), more preferably (OCF2CF2CF2). In one embodiment, e is 0. In another embodiment, e is 1. (OC2F4) in the above formula (f1) is preferably (OCF2CF2) or (OCF(CF3)), more preferably (OCF2CF2).

[0059] In the formula (f2), e and f are each independently an integer of preferably 5 to 200, more preferably 10 to 200. The sum of c, d, e and f is preferably 5 or more, more preferably 10 or more, and may be, for example, 15 or more or 20 or more. In one embodiment, the formula (f2) is preferably -(OCF2CF2CF2CF2) c -(OCF2CF2CF2) d -(OCF2CF2) e -(OCF2) f In another embodiment, formula (f2) is a group represented by -(OC2F4) e -(OCF2) f It may also be a group represented by the formula -.

[0060] In the above formula (f3), R 6 is preferably OC2F4. In the above (f3), R 7is preferably a group selected from OC2F4, OC3F6 and OC4F8, or a combination of two or three groups independently selected from these groups, more preferably a group selected from OC3F6 and OC4F8. The combination of two or three groups independently selected from OC2F4, OC3F6 and OC4F8 is not particularly limited, and examples thereof include -OC2F4OC3F6-, -OC2F4OC4F8-, -OC3F6OC2F4-, -OC3F6OC3F6-, -OC3F6OC4F8-, -OC4F8OC4F8-, -OC4F8OC3F6-, -OC4F8OC2F4-, -OC Examples include 2F4OC2F4OC3F6-, -OC2F4OC2F4OC4F8-, -OC2F4OC3F6OC2F4-, -OC2F4OC3F6OC3F6-, -OC2F4OC4F8OC2F4-, -OC3F6OC2F4OC2F4-, -OC3F6OC2F4OC2F4-, -OC3F6OC2F4OC3F6-, -OC3F6OC3F6OC2F4-, and -OC4F8OC2F4OC2F4-. In the above formula (f3), g is preferably an integer of 3 or more, more preferably 5 or more. The above g is preferably an integer of 50 or less. In the above formula (f3), OC2F4, OC3F6, OC4F8, OC5F 10 and OC6F 12 may be either a straight chain or a branched chain, and is preferably a straight chain. In this embodiment, the above formula (f3) is preferably -(OC2F4-OC3F6) g -or-(OC2F4-OC4F8) g In one embodiment, R 9 is a single bond. 9 are OCF2, OC2F4, OC3F6, OC4F8, OC5F 10 and OC6F 12 or a combination of two or three groups selected from these groups. 9 is preferably a group selected from OCF2, OC2F4, OC3F6, and OC4F8, or a combination of two or three groups selected from these groups, and more preferably -OC2F4OC3F6-.

[0061] In the above formula (f4), R 6 , R 7 and g have the same meanings as those in the formula (f3) above, and have the same embodiments. 6’ , R 7’ and g' are R 6 , R 7 and g have the same meaning and similar aspects. r is preferably [ka] [In the formula, * indicates the bonding position.] and more preferably [ka] [In the formula, * indicates the bonding position.] is.

[0062] In the above formula (f5), e is preferably an integer of 1 or more and 100 or less, more preferably an integer of 5 or more and 100 or less. The sum of a, b, c, d, e, and f is preferably 5 or more, more preferably 10 or more, for example, 10 or more and 100 or less.

[0063] In the above formula (f6), f is preferably an integer of 1 or more and 100 or less, more preferably 5 or more and 100 or less. The sum of a, b, c, d, e, and f is preferably 5 or more, more preferably 10 or more, for example, 10 or more and 100 or less.

[0064] In one embodiment, the R F is a group represented by the above formula (f1).

[0065] In one embodiment, the R F is a group represented by the above formula (f2).

[0066] In one embodiment, the R F is a group represented by the above formula (f3).

[0067] In one embodiment, the R F is a group represented by the above formula (f4).

[0068] In one embodiment, the R F is a group represented by the above formula (f5).

[0069] In one embodiment, the R F is a group represented by the above formula (f6).

[0070] Above R F In the formula, the ratio of e to f (hereinafter referred to as "e / f ratio") is 0.1 to 10, preferably 0.2 to 5, more preferably 0.2 to 2, even more preferably 0.2 to 1.5, and still more preferably 0.2 to 0.85.

[0071] In the above fluorine-containing compound, R F1 and R F2 The number average molecular weight of the R moiety is not particularly limited, but is, for example, 500 to 30,000, preferably 1,500 to 30,000, and more preferably 2,000 to 10,000. F1 and R F2 The number average molecular weight of 19 The value is measured by F-NMR.

[0072] In another embodiment, R F1 and R F2 The number average molecular weight of the moiety may be from 500 to 30,000, preferably from 1,000 to 20,000, more preferably from 2,000 to 15,000, even more preferably from 2,000 to 10,000, for example from 3,000 to 6,000.

[0073] In another embodiment, R F1 and R F2 The number average molecular weight of the moiety can be from 4,000 to 30,000, preferably from 5,000 to 10,000, and more preferably from 6,000 to 10,000.

[0074] In the above formulas (1) and (2), RSi is independently in each occurrence a hydroxyl group, a hydrolyzable group, a monovalent group containing a silicon atom to which a hydrogen atom or a monovalent organic group is bonded, and at least one R Si is a monovalent group containing a Si atom to which a hydroxyl group or a hydrolyzable group is bonded.

[0075] In a preferred embodiment, R Si is a monovalent group containing a Si atom to which a hydroxyl group or a hydrolyzable group is bonded.

[0076] In a preferred embodiment, R Si is the following formula (S1), (S2), (S3), (S4), or (S5): [ka] It is a group represented by the formula:

[0077] In the above formula, R 11 is independently in each occurrence a hydroxyl group or a hydrolyzable group.

[0078] R 11 is preferably, independently at each occurrence, a hydrolyzable group.

[0079] R 11 is preferably, independently at each occurrence, -OR j , -OCOR j , -ON=CR j 2, -NR j 2, -NHR j , —NCO, or halogen (wherein R j is a substituted or unsubstituted C 1-4 alkyl group), and more preferably -OR j (i.e., an alkoxy group). jExamples of R include unsubstituted alkyl groups such as methyl, ethyl, propyl, isopropyl, n-butyl, and isobutyl; and substituted alkyl groups such as chloromethyl. Among these, alkyl groups, particularly unsubstituted alkyl groups, are preferred, with methyl or ethyl groups being more preferred. In one embodiment, R j is a methyl group, and in another embodiment, R j is an ethyl group.

[0080] In the above formula, R 12 is independently a hydrogen atom or a monovalent organic group in each occurrence. Such monovalent organic groups are monovalent organic groups excluding the above-mentioned hydrolyzable groups.

[0081] R 12 In the formula, the monovalent organic group is preferably C 1-20 alkyl group, more preferably C 1-6 It is preferably an alkyl group, more preferably a methyl group.

[0082] In the above formula, n1 is (SiR 11 n1 R 12 3-n1 ) units are each independently an integer of 0 to 3, provided that R Si is a group represented by formula (S1) or (S2), R at the end of formula (1) and formula (2) Si In the moiety (hereinafter also simply referred to as the "terminal moiety" of formula (1) and formula (2)), n1 is 1 to 3 (SiR 11 n1 R 12 3-n1 ) unit is present. That is, in such a terminal portion, all n1s do not simultaneously become 0. In other words, in the terminal portion of formula (1) and formula (2), there is at least one Si atom to which a hydroxyl group or a hydrolyzable group is bonded.

[0083] n1 is (SiR 11 n1 R 12 3-n1) units are each independently an integer of preferably 1 to 3, more preferably 2 to 3, and even more preferably 3.

[0084] In the above formula, X 11 is independently in each occurrence a single bond or a divalent organic group. Such a divalent organic group is preferably -R 28 -O x -R 29 -(In the formula, R 28 and R 29 is, in each occurrence, independently a single bond or C 1-20 is an alkylene group, and x is 0 or 1. 1-20 The alkylene group may be straight-chain or branched, but is preferably straight-chain. 1-20 The alkylene group is preferably C 1-10 Alkylene groups, more preferably C 1-6 Alkylene groups, more preferably C 1-3 It is an alkylene group.

[0085] In one embodiment, X 11 independently in each occurrence -C 1-6 Alkylene-OC 1-6 Alkylene- or -OC 1-6 It is alkylene.

[0086] In a preferred embodiment, X 11 each occurrence independently represents a single bond or a straight-chain C 1-6 Alkylene group, preferably a single bond or a straight chain C 1-3 Alkylene group, more preferably a single bond or a straight chain C 1-2 It is preferably a linear C alkylene group. 1-2 It is an alkylene group.

[0087] In the above formula, R 13 is independently in each occurrence a hydrogen atom or a monovalent organic group. Such a monovalent organic group is preferably C 1-20 It is an alkyl group. 1-20The alkyl group may be straight-chain or branched, but is preferably straight-chain.

[0088] In a preferred embodiment, R 13 each occurrence independently represents a hydrogen atom or a straight-chain C 1-6 is an alkyl group, preferably a hydrogen atom or a straight-chain C 1-3 It is an alkyl group, preferably a hydrogen atom or a methyl group.

[0089] In the above formula, t is independently an integer of 2 or greater in each occurrence.

[0090] In a preferred embodiment, t is independently an integer of 2 to 10, preferably an integer of 2 to 6, in each occurrence.

[0091] In the above formula, R 14 each occurrence independently represents a hydrogen atom, a halogen atom, or -X 11 -SiR 11 n1 R 12 3-n1 Such a halogen atom is preferably an iodine atom, a chlorine atom, or a fluorine atom, more preferably a fluorine atom. In a preferred embodiment, R 14 is a hydrogen atom.

[0092] In the above formula, R 15 is each independently in each occurrence a single bond, an oxygen atom, an alkylene group having 1 to 6 carbon atoms, or an alkyleneoxy group having 1 to 6 carbon atoms.

[0093] In one embodiment, R 15 is independently in each occurrence an oxygen atom, an alkylene group having 1 to 6 carbon atoms, or an alkyleneoxy group having 1 to 6 carbon atoms.

[0094] In a preferred embodiment, R 15 is a single bond.

[0095] In one embodiment, formula (S1) is formula (S1-a) below. [ka] [In the formula, R 11 , R 12 , R 13 , X 11 and n1 are defined as in formula (S1) above; t1 and t2, in each occurrence, are each independently an integer of 1 or greater, preferably an integer of 1 to 10, more preferably an integer of 2 to 10, for example, an integer of 1 to 5 or an integer of 2 to 5; The repeating units enclosed in parentheses with t1 and t2 may occur in any order in the formula.]

[0096] In a preferred embodiment, formula (S1) is formula (S1-b) below. [ka] [In the formula, R 11 , R 12 , R 13 , X 11 , n1 and t are defined as in formula (S1) above.

[0097] In the above formula, R a1 independently in each occurrence -Z 1 -SiR 21 p1 R 22 q1 R 23 r1 is.

[0098] Above Z 1 In each occurrence, each independently represents an oxygen atom or a divalent organic group. 1 The structure written as 21 p1 R 22 q1 R 23 r1 )

[0099] In a preferred embodiment, Z 1 is a divalent organic group.

[0100] In a preferred embodiment, Z 1 is Z 1 Preferably, in formula (S3), (Si-Z) does not include a compound that forms a siloxane bond with the Si atom to which (Si-Z) is bonded. 1 —Si) does not contain a siloxane bond.

[0101] Above Z 1 is preferably C 1-6 Alkylene group, -(CH2) z1 -O-(CH2) z2 - (wherein z1 is an integer of 0 to 6, for example, an integer of 1 to 6, and z2 is an integer of 0 to 6, for example, an integer of 1 to 6), or -(CH2) z3 -phenylene-(CH2) z4 - (wherein z3 is an integer of 0 to 6, for example, an integer of 1 to 6, and z4 is an integer of 0 to 6, for example, an integer of 1 to 6). 1-6 The alkylene group may be straight-chain or branched, but is preferably straight-chain. These groups may contain, for example, fluorine atoms, C 1-6 Alkyl group, C 2-6 Alkenyl groups, and C 2-6 It may be substituted by one or more substituents selected from alkynyl groups, but is preferably unsubstituted.

[0102] In a preferred embodiment, Z 1 is C 1-6 Alkylene group or -(CH2) z3 -phenylene-(CH2) z4 -, preferably -phenylene-(CH2) z4 -It is. Z 1 is such a group, the light resistance, particularly the ultraviolet resistance, can be improved.

[0103] In another preferred embodiment, the Z 1 is C 1-3 In one embodiment, Z is an alkylene group.1 can be -CH2CH2CH2-. In another embodiment, Z 1 can be -CH2CH2-.

[0104] Above R 21 independently in each occurrence -Z 1’ -SiR 21’ p1’ R 22’ q1’ R 23’ r1’ is.

[0105] Above Z 1’ In each occurrence, each independently represents an oxygen atom or a divalent organic group. 1’ The structure written as 21’ p1’ R 22’ q1’ R 23’ r1’ )

[0106] In a preferred embodiment, Z 1’ is a divalent organic group.

[0107] In a preferred embodiment, Z 1’ is Z 1’ Preferably, in formula (S3), (Si-Z) does not include a compound that forms a siloxane bond with the Si atom to which (Si-Z) is bonded. 1’ —Si) does not contain a siloxane bond.

[0108] Above Z 1’ is preferably C 1-6 Alkylene group, -(CH2) z1’ -O-(CH2) z2’ - (wherein z1' is an integer of 0 to 6, for example, an integer of 1 to 6, and z2' is an integer of 0 to 6, for example, an integer of 1 to 6), or -(CH2) z3’ -phenylene-(CH2) z4’ - (wherein z3' is an integer of 0 to 6, for example, an integer of 1 to 6, and z4' is an integer of 0 to 6, for example, an integer of 1 to 6). 1-6The alkylene group may be straight-chain or branched, but is preferably straight-chain. These groups may contain, for example, fluorine atoms, C 1-6 Alkyl group, C 2-6 Alkenyl groups, and C 2-6 It may be substituted by one or more substituents selected from alkynyl groups, but is preferably unsubstituted.

[0109] In a preferred embodiment, Z 1’ is C 1-6 Alkylene group or -(CH2) z3’ -phenylene-(CH2) z4’ -, preferably -phenylene-(CH2) z4’ -It is. Z 1’ is such a group, the light resistance, particularly the ultraviolet resistance, can be improved.

[0110] In another preferred embodiment, the Z 1’ is C 1-3 In one embodiment, Z is an alkylene group. 1’ can be -CH2CH2CH2-. In another embodiment, Z 1’ can be -CH2CH2-.

[0111] Above R 21’ independently in each occurrence -Z 1” -SiR 22” q1” R 23” r1” is.

[0112] Above Z 1” In each occurrence, each independently represents an oxygen atom or a divalent organic group. 1” The structure written as 22” q1” R 23” r1” )

[0113] In a preferred embodiment, Z 1” is a divalent organic group.

[0114] In a preferred embodiment, Z 1” is Z 1” Preferably, in formula (S3), (Si-Z) does not include a compound that forms a siloxane bond with the Si atom to which (Si-Z) is bonded. 1” —Si) does not contain a siloxane bond.

[0115] Above Z 1” is preferably C 1-6 Alkylene group, -(CH2) z1” -O-(CH2) z2” - (wherein z1" is an integer of 0 to 6, for example, an integer of 1 to 6, and z2" is an integer of 0 to 6, for example, an integer of 1 to 6), or -(CH2) z3” -phenylene-(CH2) z4” - (wherein z3" is an integer of 0 to 6, for example, an integer of 1 to 6, and z4" is an integer of 0 to 6, for example, an integer of 1 to 6). 1-6 The alkylene group may be straight-chain or branched, but is preferably straight-chain. These groups may contain, for example, fluorine atoms, C 1-6 Alkyl group, C 2-6 Alkenyl groups, and C 2-6 It may be substituted by one or more substituents selected from alkynyl groups, but is preferably unsubstituted.

[0116] In a preferred embodiment, Z 1” is C 1-6 Alkylene group or -(CH2) z3” -phenylene-(CH2) z4” -, preferably -phenylene-(CH2) z4” -It is. Z 1” is such a group, the light resistance, particularly the ultraviolet resistance, can be improved.

[0117] In another preferred embodiment, the Z 1” is C 1-3 In one embodiment, Z is an alkylene group. 1” can be -CH2CH2CH2-. In another embodiment, Z 1” can be -CH2CH2-.

[0118] Above R 22” is independently in each occurrence a hydroxyl group or a hydrolyzable group.

[0119] Above R 22” is preferably, independently at each occurrence, a hydrolyzable group.

[0120] Above R 22” is preferably, independently at each occurrence, -OR j , -OCOR j , -ON=CR j 2, -NR j 2, -NHR j , —NCO, or halogen (wherein R j is a substituted or unsubstituted C 1-4 alkyl group), and more preferably -OR j (i.e., an alkoxy group). j Examples of R include unsubstituted alkyl groups such as methyl, ethyl, propyl, isopropyl, n-butyl, and isobutyl; and substituted alkyl groups such as chloromethyl. Among these, alkyl groups, particularly unsubstituted alkyl groups, are preferred, with methyl or ethyl groups being more preferred. In one embodiment, R j is a methyl group, and in another embodiment, R j is an ethyl group.

[0121] Above R 23” is independently a hydrogen atom or a monovalent organic group in each occurrence. Such monovalent organic groups are monovalent organic groups excluding the above-mentioned hydrolyzable groups.

[0122] Above R 23” In the formula, the monovalent organic group is preferably C 1-20 alkyl group, more preferably C 1-6 It is preferably an alkyl group, more preferably a methyl group.

[0123] The above q1" is independently an integer of 0 to 3 in each occurrence, and the above r1" is independently an integer of 0 to 3 in each occurrence. The sum of q1" and r1" is (SiR 22” q1” R 23” r1” ) units, it is 3.

[0124] The above q1" is (SiR 22” q1” R 23” r1” ) units are each independently an integer of preferably 1 to 3, more preferably 2 to 3, and even more preferably 3.

[0125] Above R 22’ is independently in each occurrence a hydroxyl group or a hydrolyzable group.

[0126] R 22’ is preferably, independently at each occurrence, a hydrolyzable group.

[0127] R 22’ is preferably, independently at each occurrence, -OR j , -OCOR j , -ON=CR j 2, -NR j 2, -NHR j , —NCO, or halogen (wherein R j is a substituted or unsubstituted C 1-4 alkyl group), and more preferably -OR j (i.e., an alkoxy group). j Examples of R include unsubstituted alkyl groups such as methyl, ethyl, propyl, isopropyl, n-butyl, and isobutyl; and substituted alkyl groups such as chloromethyl. Among these, alkyl groups, particularly unsubstituted alkyl groups, are preferred, with methyl or ethyl groups being more preferred. In one embodiment, R j is a methyl group, and in another embodiment, R j is an ethyl group.

[0128] Above R 23’ is independently a hydrogen atom or a monovalent organic group in each occurrence. Such monovalent organic groups are monovalent organic groups excluding the above-mentioned hydrolyzable groups.

[0129] R 23’ In the formula, the monovalent organic group is preferably C 1-20 alkyl group, more preferably C 1-6 It is preferably an alkyl group, more preferably a methyl group.

[0130] The above p1' is independently an integer of 0 to 3 in each occurrence, q1' is independently an integer of 0 to 3 in each occurrence, and r1' is independently an integer of 0 to 3 in each occurrence. The sum of p', q1', and r1' is (SiR 21’ p1’ R 22’ q1’ R 23’ r1’ ) units, it is 3.

[0131] In one embodiment, p1' is 0.

[0132] In one embodiment, p1′ is (SiR 21’ p1’ R 22’ q1’ R 23’ r1’ ) units may each independently be an integer of 1 to 3, an integer of 2 to 3, or 3. In a preferred embodiment, p1' is 3.

[0133] In one embodiment, q1′ is (SiR 21’ p1’ R 22’ q1’ R 23’ r1’ ) units are each independently an integer of 1 to 3, preferably an integer of 2 or 3, and more preferably 3.

[0134] In one embodiment, p1' is 0 and q1' is (SiR 21’p1’ R 22’ q1’ R 23’ r1’ ) units are each independently an integer of 1 to 3, preferably an integer of 2 to 3, and more preferably 3.

[0135] Above R 22 is independently in each occurrence a hydroxyl group or a hydrolyzable group.

[0136] R 22 is preferably, independently at each occurrence, a hydrolyzable group.

[0137] R 22 is preferably, independently at each occurrence, -OR j , -OCOR j , -ON=CR j 2, -NR j 2, -NHR j , —NCO, or halogen (wherein R j is a substituted or unsubstituted C 1-4 alkyl group), and more preferably -OR j (i.e., an alkoxy group). j Examples of R include unsubstituted alkyl groups such as methyl, ethyl, propyl, isopropyl, n-butyl, and isobutyl; and substituted alkyl groups such as chloromethyl. Among these, alkyl groups, particularly unsubstituted alkyl groups, are preferred, with methyl or ethyl groups being more preferred. In one embodiment, R j is a methyl group, and in another embodiment, R j is an ethyl group.

[0138] Above R 23 is independently a hydrogen atom or a monovalent organic group in each occurrence. Such monovalent organic groups are monovalent organic groups excluding the above-mentioned hydrolyzable groups.

[0139] R 23 In the formula, the monovalent organic group is preferably C 1-20 alkyl group, more preferably C1-6 It is preferably an alkyl group, more preferably a methyl group.

[0140] The above p1 is independently an integer of 0 to 3 in each occurrence, q1 is independently an integer of 0 to 3 in each occurrence, and r1 is independently an integer of 0 to 3 in each occurrence. The sum of p1, q1, and r1 is (SiR 21 p1 R 22 q1 R 23 r1 ) units, it is 3.

[0141] In one embodiment, p1 is 0.

[0142] In one embodiment, p1 is (SiR 21 p1 R 22 q1 R 23 r1 ) units may each independently be an integer of 1 to 3, an integer of 2 to 3, or 3. In a preferred embodiment, p1 is 3.

[0143] In one embodiment, q1 is (SiR 21 p1 R 22 q1 R 23 r1 ) units are each independently an integer of 1 to 3, preferably an integer of 2 or 3, and more preferably 3.

[0144] In one embodiment, p1 is 0 and q1 is (SiR 21 p1 R 22 q1 R 23 r1 ) units are each independently an integer of 1 to 3, preferably an integer of 2 to 3, and more preferably 3.

[0145] In the above formula, R b1 is independently in each occurrence a hydroxyl group or a hydrolyzable group.

[0146] Above R b1 is preferably, independently at each occurrence, a hydrolyzable group.

[0147] Above R b1 is preferably, independently at each occurrence, -OR j , -OCOR j , -ON=CR j 2, -NR j 2, -NHR j , —NCO, or halogen (wherein R j is a substituted or unsubstituted C 1-4 alkyl group), and more preferably -OR j (i.e., an alkoxy group). j Examples of R include unsubstituted alkyl groups such as methyl, ethyl, propyl, isopropyl, n-butyl, and isobutyl; and substituted alkyl groups such as chloromethyl. Among these, alkyl groups, particularly unsubstituted alkyl groups, are preferred, with methyl or ethyl groups being more preferred. In one embodiment, R j is a methyl group, and in another embodiment, R j is an ethyl group.

[0148] In the above formula, R c1 is independently a hydrogen atom or a monovalent organic group in each occurrence. Such monovalent organic groups are monovalent organic groups excluding the above-mentioned hydrolyzable groups.

[0149] Above R c1 In the formula, the monovalent organic group is preferably C 1-20 alkyl group, more preferably C 1-6 It is preferably an alkyl group, more preferably a methyl group.

[0150] The above k1 is independently an integer of 0 to 3 in each occurrence, l1 is independently an integer of 0 to 3 in each occurrence, and m1 is independently an integer of 0 to 3 in each occurrence. The sum of k1, l1, and m1 is (SiR a1k1 R b1 l1 R c1 m1 ) units, it is 3.

[0151] In one embodiment, k1 is (SiR a1 k1 R b1 l1 R c1 m1 ) units are each independently an integer of 1 to 3, preferably 2 or 3, more preferably 3. In a preferred embodiment, k1 is 3.

[0152] In the above formulas (1) and (2), R Si When is a group represented by formula (S3), preferably, at least two Si atoms having hydroxyl groups or hydrolyzable groups bonded thereto are present in the terminal portions of formula (1) and formula (2).

[0153] In a preferred embodiment, the group represented by formula (S3) is -Z 1 -SiR 22 q1 R 23 r1 (wherein q1 is an integer of 1 to 3, preferably 2 or 3, more preferably 3, and r1 is an integer of 0 to 2), -Z 1’ -SiR 22’ q1’ R 23’ r1’ (wherein q1' is an integer of 1 to 3, preferably 2 or 3, more preferably 3, and r1' is an integer of 0 to 2), or -Z 1” -SiR 22” q1” R 23” r1” (wherein q1″ is an integer of 1 to 3, preferably 2 or 3, more preferably 3, and r1″ is an integer of 0 to 2). Z 1 , Z 1’ , Z 1” , R 22 , R 23 , R 22’ , R 23’, R 22” , and R 23” has the same meaning as above.

[0154] In a preferred embodiment, in formula (S3), R 21’ When present, at least one, preferably all, R 21’ In the formula, q1″ is an integer of 1 to 3, preferably 2 or 3, and more preferably 3.

[0155] In a preferred embodiment, in formula (S3), R 21 When present, at least one, preferably all, R 21 In the formula (I), p1' is 0, and q1' is an integer of 1 to 3, preferably 2 or 3, and more preferably 3.

[0156] In a preferred embodiment, in formula (S3), R a1 When present, at least one, preferably all, R a1 In the formula (I), p1 is 0, and q1 is an integer of 1 to 3, preferably 2 or 3, and more preferably 3.

[0157] In a preferred embodiment, in formula (S3), k1 is 2 or 3, preferably 3; p1 is 0; and q1 is 2 or 3, preferably 3.

[0158] R d1 independently in each occurrence -Z 2 -CR 31 p2 R 32 q2 R 33 r2 is.

[0159] Z 2 In each occurrence, each independently represents a single bond, an oxygen atom, or a divalent organic group. 2 The structure written as (CR 31 p2 R 32 q2 R 33r2 )

[0160] In a preferred embodiment, Z 2 is a divalent organic group.

[0161] Above Z 2 is preferably C 1-6 Alkylene group, -(CH2) z5 -O-(CH2) z6 - (wherein z5 is an integer of 0 to 6, for example, an integer of 1 to 6, and z6 is an integer of 0 to 6, for example, an integer of 1 to 6), or -(CH2) z7 -phenylene-(CH2) z8 - (wherein z7 is an integer of 0 to 6, for example, an integer of 1 to 6, and z8 is an integer of 0 to 6, for example, an integer of 1 to 6). 1-6 The alkylene group may be straight-chain or branched, but is preferably straight-chain. These groups may contain, for example, fluorine atoms, C 1-6 Alkyl group, C 2-6 Alkenyl groups, and C 2-6 It may be substituted by one or more substituents selected from alkynyl groups, but is preferably unsubstituted.

[0162] In a preferred embodiment, Z 2 is C 1-6 Alkylene group or -(CH2) z7 -phenylene-(CH2) z8 -, preferably -phenylene-(CH2) z8 -It is. Z 2 is such a group, the light resistance, particularly the ultraviolet resistance, can be improved.

[0163] In another preferred embodiment, the Z 2 is C 1-3 In one embodiment, Z is an alkylene group. 2 can be -CH2CH2CH2-. In another embodiment, Z 2 can be -CH2CH2-.

[0164] R31 independently in each occurrence -Z 2’ -CR 32’ q2’ R 33’ r2’ is.

[0165] Z 2’ In each occurrence, each independently represents a single bond, an oxygen atom, or a divalent organic group. 2’ The structure written as (CR 32’ q2’ R 33’ r2’ )

[0166] Above Z 2’ is preferably C 1-6 Alkylene group, -(CH2) z5’ -O-(CH2) z6’ - (wherein z5' is an integer of 0 to 6, for example, an integer of 1 to 6, and z6' is an integer of 0 to 6, for example, an integer of 1 to 6), or -(CH2) z7’ -phenylene-(CH2) z8’ - (wherein z7' is an integer of 0 to 6, for example, an integer of 1 to 6, and z8' is an integer of 0 to 6, for example, an integer of 1 to 6). 1-6 The alkylene group may be straight-chain or branched, but is preferably straight-chain. These groups may contain, for example, fluorine atoms, C 1-6 Alkyl group, C 2-6 Alkenyl groups, and C 2-6 It may be substituted by one or more substituents selected from alkynyl groups, but is preferably unsubstituted.

[0167] In a preferred embodiment, Z 2’ is C 1-6 Alkylene group or -(CH2) z7’ -phenylene-(CH2) z8’ -, preferably -phenylene-(CH2) z8’ -It is. Z 2’ is such a group, the light resistance, particularly the ultraviolet resistance, can be improved.

[0168] In another preferred embodiment, the Z 2’ is C 1-3 In one embodiment, Z is an alkylene group. 2’ can be -CH2CH2CH2-. In another embodiment, Z 2’ can be -CH2CH2-.

[0169] Above R 32’ independently in each occurrence -Z 3 -SiR 34 n2 R 35 3-n2 is.

[0170] Above Z 3 In each occurrence, each independently represents a single bond, an oxygen atom, or a divalent organic group. 3 The structure written as 34 n2 R 35 3-n2 )

[0171] In one embodiment, Z 3 is an oxygen atom.

[0172] In one embodiment, Z 3 is a divalent organic group.

[0173] Above Z 3 is preferably C 1-6 Alkylene group, -(CH2) z5” -O-(CH2) z6” - (wherein z5" is an integer of 0 to 6, for example, an integer of 1 to 6, and z6" is an integer of 0 to 6, for example, an integer of 1 to 6), or -(CH2) z7” -phenylene-(CH2) z8” - (wherein z7" is an integer of 0 to 6, for example, an integer of 1 to 6, and z8" is an integer of 0 to 6, for example, an integer of 1 to 6). 1-6 The alkylene group may be straight-chain or branched, but is preferably straight-chain. These groups may contain, for example, fluorine atoms, C1-6 Alkyl group, C 2-6 Alkenyl groups, and C 2-6 It may be substituted by one or more substituents selected from alkynyl groups, but is preferably unsubstituted.

[0174] In a preferred embodiment, Z 3 is C 1-6 Alkylene group or -(CH2) z7” -phenylene-(CH2) z8” -, preferably -phenylene-(CH2) z8” -It is. Z 3 is such a group, the light resistance, particularly the ultraviolet resistance, can be improved.

[0175] In another preferred embodiment, the Z 3 is C 1-3 In one embodiment, Z is an alkylene group. 3 can be -CH2CH2CH2-. In another embodiment, Z 3 can be -CH2CH2-.

[0176] Above R 34 is independently in each occurrence a hydroxyl group or a hydrolyzable group.

[0177] R 34 is preferably, independently at each occurrence, a hydrolyzable group.

[0178] R 34 is preferably, independently at each occurrence, -OR j , -OCOR j , -ON=CR j 2, -NR j 2, -NHR j , —NCO, or halogen (wherein R j is a substituted or unsubstituted C 1-4 alkyl group), and more preferably -OR j (i.e., an alkoxy group). jExamples of R include unsubstituted alkyl groups such as methyl, ethyl, propyl, isopropyl, n-butyl, and isobutyl; and substituted alkyl groups such as chloromethyl. Among these, alkyl groups, particularly unsubstituted alkyl groups, are preferred, with methyl or ethyl groups being more preferred. In one embodiment, R j is a methyl group, and in another embodiment, R j is an ethyl group.

[0179] Above R 35 is independently a hydrogen atom or a monovalent organic group in each occurrence. Such monovalent organic groups are monovalent organic groups excluding the above-mentioned hydrolyzable groups.

[0180] Above R 35 In the formula, the monovalent organic group is preferably C 1-20 alkyl group, more preferably C 1-6 It is preferably an alkyl group, more preferably a methyl group.

[0181] In the above formula, n2 is (SiR 34 n2 R 35 3-n2 ) units are each independently an integer of 0 to 3, provided that R Si is a group represented by formula (S4), n2 is 1 to 3 in the terminal portion of formula (1) and formula (2) (SiR 34 n2 R 35 3-n2 ) unit is present. That is, in such a terminal portion, all n2s do not simultaneously become 0. In other words, in the terminal portion of formula (1) and formula (2), there is at least one Si atom to which a hydroxyl group or a hydrolyzable group is bonded.

[0182] n2 is (SiR 34 n2 R 35 3-n2 ) units are each independently an integer of preferably 1 to 3, more preferably 2 to 3, and even more preferably 3.

[0183] Above R 33’ is independently a hydrogen atom, a hydroxyl group, or a monovalent organic group in each occurrence. Such monovalent organic groups are monovalent organic groups excluding the above-mentioned hydrolyzable groups.

[0184] Above R 33’ In the formula, the monovalent organic group is preferably C 1-20 Alkyl group or -(C s H 2s ) t1 -(OC s H 2s ) t2 (wherein s is an integer of 1 to 6, preferably an integer of 2 to 4; t1 is 1 or 0, preferably 0; and t2 is an integer of 1 to 20, preferably an integer of 2 to 10, more preferably an integer of 2 to 6), and more preferably C 1-20 alkyl group, more preferably C 1-6 An alkyl group, particularly preferably a methyl group.

[0185] In one embodiment, R 33’ is a hydroxyl group.

[0186] In another embodiment, R 33’ is a monovalent organic group, preferably C 1-20 alkyl group, more preferably C 1-6 It is an alkyl group.

[0187] The above q2' is independently an integer of 0 to 3 in each occurrence, and the above r2' is independently an integer of 0 to 3 in each occurrence. The sum of q2' and r2' is (CR 32’ q2’ R 33’ r2’ ) units, it is 3.

[0188] q2' is (CR 32’ q2’ R 33’ r2’ ) units are each independently an integer of preferably 1 to 3, more preferably 2 to 3, and even more preferably 3.

[0189] R 32 independently in each occurrence -Z 3 -SiR 34 n2 R 35 3-n2 It takes -Z 3 -SiR 34 n2 R 35 3-n2 is the above R 32’ This has the same meaning as the description in

[0190] Above R 33 is independently a hydrogen atom, a hydroxyl group, or a monovalent organic group in each occurrence. Such monovalent organic groups are monovalent organic groups excluding the above-mentioned hydrolyzable groups.

[0191] Above R 33 In the formula, the monovalent organic group is preferably C 1-20 Alkyl group or -(C s H 2s ) t1 -(OC s H 2s ) t2 (wherein s is an integer of 1 to 6, preferably an integer of 2 to 4; t1 is 1 or 0, preferably 0; and t2 is an integer of 1 to 20, preferably an integer of 2 to 10, more preferably an integer of 2 to 6), and more preferably C 1-20 alkyl group, more preferably C 1-6 An alkyl group, particularly preferably a methyl group.

[0192] In one embodiment, R 33 is a hydroxyl group.

[0193] In another embodiment, R 33 is a monovalent organic group, preferably C 1-20 alkyl group, more preferably C 1-6 It is an alkyl group.

[0194] The above p2 is independently an integer of 0 to 3 in each occurrence, q2 is independently an integer of 0 to 3 in each occurrence, and r2 is independently an integer of 0 to 3 in each occurrence. The sum of p2, q2, and r2 is (CR 31 p2 R 32 q2 R 33 r2 ) units, it is 3.

[0195] In one embodiment, p2 is 0.

[0196] In one embodiment, p2 is (CR 31 p2 R 32 q2 R 33 r2 ) units may each independently be an integer of 1 to 3, an integer of 2 to 3, or 3. In a preferred embodiment, p2 is 3.

[0197] In one embodiment, q2 is (CR 31 p2 R 32 q2 R 33 r2 ) units are each independently an integer of 1 to 3, preferably an integer of 2 or 3, and more preferably 3.

[0198] In one embodiment, p2 is 0 and q2 is (CR 31 p2 R 32 q2 R 33 r2 ) units are each independently an integer of 1 to 3, preferably an integer of 2 to 3, and more preferably 3.

[0199] Above R e1 independently in each occurrence -Z 3 -SiR 34 n2 R 35 3-n2 It takes -Z 3-SiR 34 n2 R 35 3-n2 is the above R 32’ This has the same meaning as the description in

[0200] Above R f1 is independently a hydrogen atom, a hydroxyl group, or a monovalent organic group in each occurrence. Such monovalent organic groups are monovalent organic groups excluding the above-mentioned hydrolyzable groups.

[0201] Above R f1 In the formula, the monovalent organic group is preferably C 1-20 Alkyl group or -(C s H 2s ) t1 -(OC s H 2s ) t2 (wherein s is an integer of 1 to 6, preferably an integer of 2 to 4; t1 is 1 or 0, preferably 0; and t2 is an integer of 1 to 20, preferably an integer of 2 to 10, more preferably an integer of 2 to 6), and more preferably C 1-20 alkyl group, more preferably C 1-6 An alkyl group, particularly preferably a methyl group.

[0202] In one embodiment, R f1 is a hydroxyl group.

[0203] In another embodiment, R f1 is a monovalent organic group, preferably C 1-20 alkyl group, more preferably C 1-6 It is an alkyl group.

[0204] The above k2 is independently an integer of 0 to 3 in each occurrence, l2 is independently an integer of 0 to 3 in each occurrence, and m2 is independently an integer of 0 to 3 in each occurrence. The sum of k2, l2, and m2 is (CR d1 k2 R e1 l2 R f1 m2) units, it is 3.

[0205] In the above formulas (1) and (2), R Si When is a group represented by formula (S4), preferably, at least two Si atoms having hydroxyl groups or hydrolyzable groups bonded thereto are present in the terminal portions of formula (1) and formula (2).

[0206] In one embodiment, R Si is a group represented by formula (S4), n2 is 1 to 3, preferably 2 or 3, and more preferably 3 (SiR 34 n2 R 35 3-n2 ) units are present at each terminal portion of formula (1) and formula (2) by two or more, for example, 2 to 27, preferably 2 to 9, more preferably 2 to 6, even more preferably 2 to 3, and particularly preferably 3.

[0207] In a preferred embodiment, in formula (S4), R 32’ When present, at least one, preferably all, R 32’ In the formula, n2 is an integer of 1 to 3, preferably 2 or 3, and more preferably 3.

[0208] In a preferred embodiment, in formula (S4), R 32 When present, at least one, preferably all, R 32 In the formula, n2 is an integer of 1 to 3, preferably 2 or 3, and more preferably 3.

[0209] In a preferred embodiment, in formula (S4), R e1 When present, at least one, preferably all, R a1 In the formula, n2 is an integer of 1 to 3, preferably 2 or 3, and more preferably 3.

[0210] In a preferred embodiment, in formula (S4), k2 is 0, l2 is 2 or 3, preferably 3, and n2 is 2 or 3, preferably 3.

[0211] Above R g1 and R h1 independently in each occurrence -Z 4 -SiR 11 n1 R 12 3-n1 , -Z 4 -SiR a1 k1 R b1 l1 R c1 m1 , -Z 4 -CR d1 k2 R e1 l2 R f1 m2 Here, R 11 , R 12 , R a1 , R b2 , R c1 , R d1 , R e1 , R f1 , n1, k1, l1, m1, k2, l2, and m2 have the same meanings as above.

[0212] In a preferred embodiment, R g1 and R h1 are each independently -Z 4 -SiR 11 n1 R 12 3-n1 is.

[0213] Above Z 4 In each occurrence, each independently represents a single bond, an oxygen atom, or a divalent organic group. 4 The structure written as 11 n1 R 12 3-n1 )

[0214] In one embodiment, Z 4 is an oxygen atom.

[0215] In one embodiment, Z 4is a divalent organic group.

[0216] Above Z 4 is preferably C 1-6 Alkylene group, -(CH2) z5” -O-(CH2) z6” - (wherein z5" is an integer of 0 to 6, for example, an integer of 1 to 6, and z6" is an integer of 0 to 6, for example, an integer of 1 to 6), or -(CH2) z7” -phenylene-(CH2) z8” - (wherein z7" is an integer of 0 to 6, for example, an integer of 1 to 6, and z8" is an integer of 0 to 6, for example, an integer of 1 to 6). 1-6 The alkylene group may be straight-chain or branched, but is preferably straight-chain. These groups may contain, for example, fluorine atoms, C 1-6 Alkyl group, C 2-6 Alkenyl groups, and C 2-6 It may be substituted by one or more substituents selected from alkynyl groups, but is preferably unsubstituted.

[0217] In a preferred embodiment, Z 4 is C 1-6 Alkylene group or -(CH2) z7” -phenylene-(CH2) z8” -, preferably -phenylene-(CH2) z8” -It is. Z 3 is such a group, the light resistance, particularly the ultraviolet resistance, can be improved.

[0218] In another preferred embodiment, the Z 4 is C 1-3 In one embodiment, Z is an alkylene group. 4 can be -CH2CH2CH2-. In another embodiment, Z 4 can be -CH2CH2-.

[0219] In one embodiment, R Siis a group represented by formula (S2), (S3), (S4) or (S5). These compounds can form a liquid-repellent layer with high surface slip properties.

[0220] In one embodiment, R Si is a group represented by formula (S3), (S4), or (S5). These compounds have multiple hydrolyzable groups at one end, and therefore can form a liquid-repellent layer that adheres strongly to the substrate and has high abrasion resistance.

[0221] In one embodiment, R Si is a group represented by formula (S3) or (S4). These compounds can have multiple hydrolyzable groups branched from one Si atom or C atom at one end, and can therefore form a liquid-repellent layer with even higher abrasion resistance.

[0222] In one embodiment, R Si is a group represented by formula (S1).

[0223] In one embodiment, R Si is a group represented by formula (S2).

[0224] In one embodiment, R Si is a group represented by formula (S3).

[0225] In one embodiment, R Si is a group represented by formula (S4).

[0226] In one embodiment, R Si is a group represented by formula (S5).

[0227] In the above formulas (1) and (2), X A The fluoropolyether moiety (R) mainly provides water repellency and surface slipperiness. F1 and R F2 ) and the substrate. Si ) and the linker. Amay be a single bond or any other group as long as the compounds represented by formulas (1) and (2) can exist stably.

[0228] In the above formula (1), α is an integer of 1 to 9, and β is an integer of 1 to 9. These α and β are determined by X A The sum of α and β can vary depending on the valence of X A For example, X A When X is a decavalent organic group, the sum of α and β is 10, and for example, α can be 9 and β can be 1, α can be 5 and β can be 5, or α can be 1 and β can be 9. A When is a divalent organic group, α and β are 1.

[0229] In the above formula (2), γ is an integer of 1 to 9. γ is X A That is, γ can vary depending on the valence of X A is the valence of the element minus 1.

[0230] X A are each independently a single bond or a divalent to decavalent organic group;

[0231] Above X A The divalent to decavalent organic group in the formula (I) is preferably a divalent to octavalent organic group. In one embodiment, the divalent to decavalent organic group is preferably a divalent to tetravalent organic group, more preferably a divalent organic group. In another embodiment, the divalent to decavalent organic group is preferably a trivalent to octavalent organic group, more preferably a trivalent to hexavalent organic group.

[0232] In one embodiment, X A is a single bond or a divalent organic group, α is 1, and β is 1.

[0233] In one embodiment, X A is a single bond or a divalent organic group, and γ is 1.

[0234] In one embodiment, X Ais a trivalent to hexavalent organic group, α is 1, and β is 2 to 5.

[0235] In one embodiment, X A is a trivalent to hexavalent organic group, and γ is 2 to 5.

[0236] In one embodiment, X A is a trivalent organic group, α is 1, and β is 2.

[0237] In one embodiment, X A is a trivalent organic group and γ is 2.

[0238] X A When is a single bond or a divalent organic group, formulas (1) and (2) are represented by the following formulas (1') and (2'). [ka]

[0239] In one embodiment, X A is a single bond.

[0240] In another embodiment, X A is a divalent organic group.

[0241] In one embodiment, X A Examples of the group include a single bond and the group represented by the following formula: -(R 51 ) p5 -(X 51 ) q5 - [In formula: R 51 is a single bond, -(CH2) s5 - or an o-, m- or p-phenylene group, preferably -(CH2) s5 - and s5 is an integer of 1 to 20, preferably an integer of 1 to 6, more preferably an integer of 1 to 3, and even more preferably 1 or 2; X 51 is -(X 52 ) l5- represents X 52 each occurrence independently represents an -O-, -S-, o-, m-, or p-phenylene group, -C(O)O-, -Si(R 53 )2-, -(Si(R 53 )2O) m5 -Si(R 53 )2-, -CONR 54 -, -O-CONR 54 -, -NR 54 - and -(CH2) n5 represents a group selected from the group consisting of - R 53 independently in each occurrence a phenyl group, C 1-6 Alkyl group or C 1-6 represents an alkoxy group, preferably a phenyl group or C 1-6 is an alkyl group, more preferably a methyl group; R 54 are each independently in each occurrence a hydrogen atom, a phenyl group or C 1-6 represents an alkyl group (preferably a methyl group), m5 in each occurrence is independently an integer of 1 to 100, preferably an integer of 1 to 20; n5, in each occurrence, is independently an integer from 1 to 20, preferably an integer from 1 to 6, more preferably an integer from 1 to 3; l5 is an integer of 1 to 10, preferably an integer of 1 to 5, more preferably an integer of 1 to 3, p5 is 0 or 1, q5 is 0 or 1, wherein at least one of p5 and q5 is 1, and the repeating units enclosed in parentheses with p5 or q5 may be present in any order. Here, X is a divalent organic group represented by the formula: A (Typically X A hydrogen atoms) are fluorine atoms, C 1-3 Alkyl groups and C 1-3 In a preferred embodiment, X Ais not substituted with these groups.

[0242] In a preferred embodiment, the X A are each independently -(R 51 ) p5 -(X 51 ) q5 -R 52 -R 52 is a single bond, -(CH2) t5 - or an o-, m- or p-phenylene group, preferably -(CH2) t5 t5 is an integer of 1 to 20, preferably an integer of 2 to 6, more preferably an integer of 2 to 3. Here, R 52 (typically R 52 hydrogen atoms) are fluorine atoms, C 1-3 Alkyl groups and C 1-3 In a preferred embodiment, R 56 is not substituted with these groups.

[0243] Preferably, the above X A are each independently single bond, C 1-20 an alkylene group, -R 51 -X 53 -R 52 -,or -X 54 -R 5 - [In the formula, R 51 and R 52 has the same meaning as above, X 53 teeth, -O-, -S-, -C(O)O-, -CONR 54 -, -O-CONR 54 -, -Si(R 53 )2-, -(Si(R 53 )2O)m5 -Si(R 53 )2-, -O-(CH2) u5 -(Si(R 53 )2O) m5 -Si(R 53 )2-, -O-(CH2) u5 -Si(R 53 )2-O-Si(R 53 )2-CH2CH2-Si(R 53 )2-O-Si(R 53 )2-, -O-(CH2) u5 -Si(OCH3)2OSi(OCH3)2-, -CONR 54 -(CH2) u5 -(Si(R 53 )2O) m5 -Si(R 53 )2-, -CONR 54 -(CH2) u5 -N(R 54 )-,or -CONR 54 -(o-, m- or p-phenylene)-Si(R 53 )2- (In the formula, R 53 , R 54 and m5 have the same meaning as above, u5 represents an integer of 1 to 20, preferably an integer of 2 to 6, more preferably an integer of 2 or 3; X 54 teeth, -S-, -C(O)O-, -CONR 54 -, -O-CONR 54 -, -CONR 54 -(CH2) u5 -(Si(R 54 )2O) m5 -Si(R 54 )2-, -CONR 54 -(CH2) u5 -N(R 54 )-,or -CONR 54 -(o-, m- or p-phenylene)-Si(R 54 )2- (In the formula, each symbol has the same meaning as above.) represents.] It could be.

[0244] More preferably, the above X A are each independently single bond, C 1-20 an alkylene group, -(CH2) s5 -X 53 -, -(CH2) s5 -X 53 -(CH2) t5 - -X 54 -,or -X 54 -(CH2) t5 - [In the formula, X 53 , X 54 , s5 and t5 have the same meanings as above.] is.

[0245] More preferably, the above X A are each independently single bond, C 1-20 an alkylene group, -(CH2) s5 -X 53 -(CH2) t5 -,or -X 54 -(CH2) t5 - [In the formula, each symbol has the same meaning as above.] It could be.

[0246] In a preferred embodiment, the X A are each independently Single bond C 1-20 an alkylene group, -(CH2) s5 -X53 -,or -(CH2) s5 -X 53 -(CH2) t5 - [In the formula, X 53 -O-, -CONR 54 -, or -O-CONR 54 - and R 54 are each independently in each occurrence a hydrogen atom, a phenyl group or C 1-6 represents an alkyl group, s5 is an integer from 1 to 20, t5 is an integer from 1 to 20. It could be.

[0247] In a preferred embodiment, the X A are each independently -(CH2) s5 -O-(CH2) t5 - -CONR 54 -(CH2) t5 - [In the formula, R 54 are each independently in each occurrence a hydrogen atom, a phenyl group or C 1-6 represents an alkyl group, s5 is an integer from 1 to 20, t5 is an integer from 1 to 20. It could be.

[0248] In one embodiment, the X A are each independently single bond, C 1-20 an alkylene group, -(CH2) s5 -O-(CH2) t5 -, -(CH2) s5 -(Si(R 53 )2O) m5 -Si(R 53 )2-(CH2) t5 -, -(CH2) s5 -O-(CH2) u5 -(Si(R 53 )2O) m5 -Si(R 53 )2-(CH2) t5 -,or -(CH2) s5 -O-(CH2) t5 -Si(R 53 )2-(CH2) u5 -Si(R 53 )2-(C v H 2v )- [In the formula, R 53 , m5, s5, t5 and u5 are as defined above, and v5 is an integer of 1 to 20, preferably an integer of 2 to 6, more preferably an integer of 2 to 3.] is.

[0249] In the above formula, -(C v H 2v )- can be straight or branched chain, for example, -CH2CH2-, -CH2CH2CH2-, -CH(CH3)-, or -CH(CH3)CH2-.

[0250] Above X A are each independently a fluorine atom, C 1-3 Alkyl groups and C 1-3 Fluoroalkyl groups (preferably C 1-3 In one embodiment, X may be substituted with one or more substituents selected from the group consisting of fluoroalkyl groups, perfluoroalkyl groups, and the like. A is non-substituted.

[0251] Furthermore, the above X A The left side of each equation is R F1 or R F2 and the right side is R Si Combine with.

[0252] In one embodiment, X A are each independently -OC 1-6 It may be other than an alkylene group.

[0253] In another embodiment, X A Examples of the group include the following: [ka] [ka] [In the formula, R 41 are each independently a hydrogen atom, a phenyl group, an alkyl group having 1 to 6 carbon atoms, or C 1-6 an alkoxy group, preferably a methyl group; D is -CH2O(CH2)2-, -CH2O(CH2)3-, -CF2O(CH2)3-, -(CH2)2-, -(CH2)3-, -(CH2)4-, -CONH-(CH2)3-, -CON(CH3)-(CH2)3-, -CON(Ph)-(CH2)3- (wherein Ph means phenyl), and [ka] (In the formula, R 42 are each independently a hydrogen atom, C 1-6 alkyl group or C 1-6 represents an alkoxy group, preferably a methyl group or a methoxy group, more preferably a methyl group. is a group selected from E is -(CH2) n - (n is an integer from 2 to 6), D is the R of the molecular main chain F1 or R F2 E is bonded to R Si Binds to.]

[0254] Above X A Specific examples include: single bond, -CH2OCH2-, -CH2O(CH2)2-、 -CH2O(CH2)3-、 -CH2O(CH2)4-、 -CH2O(CH2)5-、 -CH2O(CH2)6-、 -CH2O(CH2)3Si(CH3)2OSi(CH3)2(CH2)2-、 -CH2O(CH2)3Si(CH3)2OSi(CH3)2OSi(CH3)2(CH2)2-、 -CH2O(CH2)3Si(CH3)2O(Si(CH3)2O)2Si(CH3)2(CH2)2-、 -CH2O(CH2)3Si(CH3)2O(Si(CH3)2O)3Si(CH3)2(CH2)2-、 -CH2O(CH2)3Si(CH3)2O(Si(CH3)2O) 10 Si(CH3)2(CH2)2- -CH2O(CH2)3Si(CH3)2O(Si(CH3)2O) 20 Si(CH3)2(CH2)2- -CH2OCF2CHFOCF2-、 -CH2OCF2CHFOCF2CF2-、 -CH2OCF2CHFOCF2CF2CF2-、 -CH2OCH2CF2CF2OCF2-、 -CH2OCH2CF2CF2OCF2CF2-、 -CH2OCH2CF2CF2OCF2CF2CF2-、 -CH2OCH2CF2CF2OCF(CF3)CF2OCF2-、 -CH2OCH2CF2CF2OCF(CF3)CF2OCF2CF2-、 -CH2OCH2CF2CF2OCF(CF3)CF2OCF2CF2CF2-、 -CH2OCH2CHFCF2OCF2-、 -CH2OCH2CHFCF2OCF2CF2-、 -CH2OCH2CHFCF2OCF2CF2CF2-、 -CH2OCH2CHFCF2OCF(CF3)CF2OCF2-、 -CH2OCH2CHFCF2OCF(CF3)CF2OCF2CF2-、 -CH2OCH2CHFCF2OCF(CF3)CF2OCF2CF2CF2-、 -CH2OCF2CHFOCF2CF2CF2-C(O)NH-CH2-、 -CH2OCH2(CH2)7CH2Si(OCH3)2OSi(OCH3)2(CH2)2Si(OCH3)2OSi(OCH3)2(CH2)2-、 -CH2OCH2CH2CH2Si(OCH3)2OSi(OCH3)2(CH2)3-、 -CH2OCH2CH2CH2Si(OCH2CH3)2OSi(OCH2CH3)2(CH2)3-、 -CH2OCH2CH2CH2Si(OCH3)2OSi(OCH3)2(CH2)2-、 -CH2OCH2CH2CH2Si(OCH2CH3)2OSi(OCH2CH3)2(CH2)2-、 -(CH2)2-Si(CH3)2-(CH2)2-、 -CH2-、 -(CH2)2-、 -(CH2)3-、 -(CH2)4-、 -(CH2)5-、 -(CH2)6-、 -CO-、 -CONH-、 -CONH-CH2-、 -CONH-(CH2)2-、 -CONH-(CH2)3-、 -CONH-(CH2)4-、 -CONH-(CH2)5-、 -CONH-(CH2)6-、 -CON(CH3)-CH2-、 -CON(CH3)-(CH2)2-、 -CON(CH3)-(CH2)3-、 -CON(CH3)-(CH2)4-、 -CON(CH3)-(CH2)5-、 -CON(CH3)-(CH2)6-、 -CON(Ph)-CH- (wherein Ph means phenyl), -CON(Ph)-(CH)- (wherein Ph means phenyl), -CON(Ph)-(CH2)3- (wherein Ph means phenyl), -CON(Ph)-(CH2)4- (wherein Ph means phenyl), -CON(Ph)-(CH2)5- (wherein Ph means phenyl), -CON(Ph)-(CH2)6- (wherein Ph means phenyl), -CONH-(CH2)2NH(CH2)3-, -CONH-(CH2)6NH(CH2)3-, -CH2O-CONH-(CH2)3-, -CH2O-CONH-(CH2)6-, -S-(CH2)3-, -(CH2)2S(CH2)3-, -CONH-(CH2)3Si(CH3)2OSi(CH3)2(CH2)2-, -CONH-(CH2)3Si(CH3)2OSi(CH3)2OSi(CH3)2(CH2)2-, -CONH-(CH2)3Si(CH3)2O(Si(CH3)2O)2Si(CH3)2(CH2)2-, -CONH-(CH2)3Si(CH3)2O(Si(CH3)2O)3Si(CH3)2(CH2)2-, -CONH-(CH2)3Si(CH3)2O(Si(CH3)2O) 10 Si(CH3)2(CH2)2-, -CONH-(CH2)3Si(CH3)2O(Si(CH3)2O) 20 Si(CH3)2(CH2)2-, -C(O)O-(CH2)3-, -C(O)O-(CH2)6-, -CH2-O-(CH2)3-Si(CH3)2-(CH2)2-Si(CH3)2-(CH2)2-, -CH2-O-(CH2)3-Si(CH3)2-(CH2)2-Si(CH3)2-CH(CH3)-, -CH2-O-(CH2)3-Si(CH3)2-(CH2)2-Si(CH3)2-(CH2)3-, -CH2-O-(CH2)3-Si(CH3)2-(CH2)2-Si(CH3)2-CH(CH3)-CH2-, -OCH2-, -O(CH2)3-, -OCFHCF2-, [ka] Examples include:

[0255] In yet another embodiment, X A are each independently a group of the formula: -(R 16 ) x1 -(CFR 17 ) y1 -(CH2) z1 In the formula, x1, y1, and z1 each independently represent an integer of 0 to 10, the sum of x1, y1, and z1 is 1 or more, and the order of the repeating units enclosed in parentheses in the formula is arbitrary.

[0256] In the above formula, R 16 each occurrence independently represents an oxygen atom, phenylene, carbazolylene, -NR 18 -(In the formula, R 18 represents a hydrogen atom or an organic group) or a divalent organic group. 18 is an oxygen atom or a divalent polar group.

[0257] The "divalent polar group" is not particularly limited, but examples thereof include -C(O)-, -C(=NR 19 )- and -C(O)NR 19 -(wherein R 19represents a hydrogen atom or a lower alkyl group). The "lower alkyl group" is, for example, an alkyl group having 1 to 6 carbon atoms, such as methyl, ethyl, or n-propyl, which may be substituted with one or more fluorine atoms.

[0258] In the above formula, R 17 are each independently a hydrogen atom, a fluorine atom, or a lower fluoroalkyl group, preferably a fluorine atom, in each occurrence. The "lower fluoroalkyl group" is, for example, a fluoroalkyl group having 1 to 6 carbon atoms, preferably a fluoroalkyl group having 1 to 3 carbon atoms, preferably a perfluoroalkyl group having 1 to 3 carbon atoms, more preferably a trifluoromethyl group or a pentafluoroethyl group, and even more preferably a trifluoromethyl group.

[0259] In yet another embodiment, X A Examples of include the following groups: [ka] [In the formula, R 41 are each independently a hydrogen atom, a phenyl group, an alkyl group having 1 to 6 carbon atoms, or C 1-6 The alkoxy group is preferably a methyl group; each X A In the group, any number of T's may be R's in the molecular main chain. F1 or R F2 The following groups are attached to: -CH2O(CH2)2-, -CH2O(CH2)3-, -CF2O(CH2)3-, -(CH2)2-, -(CH2)3-, -(CH2)4-, -CONH-(CH2)3-, -CON(CH3)-(CH2)3-, -CON(Ph)-(CH2)3- (wherein Ph means phenyl), or [ka] [In the formula, R 42 are each independently a hydrogen atom, C 1-6 alkyl group or C 1-6 represents an alkoxy group, preferably a methyl group or a methoxy group, more preferably a methyl group.] and some of the other Ts are Rs in the molecular backbone. Si and if present, the remaining Ts are each independently a methyl group, a phenyl group, or a C 1-6 It is an alkoxy group, a radical scavenger group, or an ultraviolet absorbing group.

[0260] The radical scavenging group is not particularly limited as long as it can capture radicals generated by light irradiation, and examples thereof include residues of benzophenones, benzotriazoles, benzoic acid esters, phenyl salicylates, crotonic acids, malonic acid esters, organoacrylates, hindered amines, hindered phenols, and triazines.

[0261] The ultraviolet absorbing group is not particularly limited as long as it can absorb ultraviolet light, and examples thereof include residues of benzotriazoles, hydroxybenzophenones, esters of substituted and unsubstituted benzoic acid or salicylic acid compounds, acrylates or alkoxycinnamates, oxamides, oxanilides, benzoxazinones, and benzoxazoles.

[0262] In a preferred embodiment, preferred radical scavenging groups or ultraviolet absorbing groups include: [ka] Examples include:

[0263] In this embodiment, X A may each independently be a trivalent to decavalent organic group.

[0264] In yet another embodiment, X A Examples of include the following groups: [ka] [In the formula, R 25 , R 26 and R 27 are each independently a divalent to hexavalent organic group, R 25 is at least one R F1 Binds to R 26 and R 27 Each has at least one R Si Binds to.]

[0265] In one embodiment, the R 25 is a single bond, C 1-20 Alkylene group, C 3-20 Cycloalkylene group, C 5-20 Arylene group, -R 57 -X 58 -R 59 -, -X 58 -R 59 -, or -R 57 -X 58 -. Above, R 57 and R 59 are each independently a single bond, C 1-20 Alkylene group, C 3-20 Cycloalkylene group, or C 5-20 The above X is an arylene group. 58 is -O-, -S-, -CO-, -O-CO- or -COO-.

[0266] In one embodiment, the R 26 and R 27 are each independently a hydrocarbon or a group having at least one atom selected from N, O and S at the end or in the main chain of the hydrocarbon, and preferably C 1-6 Alkyl group, -R 36 -R 37 -R 36 -, -R 36 -CHR 38 2-, etc. Here, R 36 are each independently a single bond or an alkyl group having 1 to 6 carbon atoms, preferably an alkyl group having 1 to 6 carbon atoms. 37is N, O or S, preferably N or O. 38 -R 45 -R 46 -R 45 -, -R 46 -R 45 -or-R 45 -R 46 -. Here, R 45 are each independently an alkyl group having 1 to 6 carbon atoms. 46 is N, O or S, preferably O.

[0267] In this embodiment, X A may each independently be a trivalent to decavalent organic group.

[0268] In yet another embodiment, X A For example, the following: [ka] [In the formula, X a is a single bond or a divalent organic group. Examples of the group include groups represented by the formula:

[0269] Above X a is a single bond or a divalent linking group directly bonded to the isocyanuric ring. a is preferably a single bond, an alkylene group, or a divalent group containing at least one bond selected from the group consisting of an ether bond, an ester bond, an amide bond, and a sulfide bond, and more preferably a single bond, an alkylene group having 1 to 10 carbon atoms, or a divalent hydrocarbon group having 1 to 10 carbon atoms and containing at least one bond selected from the group consisting of an ether bond, an ester bond, an amide bond, and a sulfide bond.

[0270] X a The formula is as follows: -(CX 121 X 122 ) x1 -(X a1 ) y1 -(CX 123 X 124 )z1 - (In the formula, X 121 ~X 124 are each independently H, F, OH, or -OSi(OR 121 ) 3 (wherein three R 121 are each independently an alkyl group having 1 to 4 carbon atoms, Above X a1 is -C(=O)NH-, -NHC(=O)-, -O-, -C(=O)O-, -OC(=O)-, -OC(=O)O-, or -NHC(=O)NH- (the left side of each bond is CX 121 X 122 ), x1 is an integer of 0 to 10, y1 is 0 or 1, and z1 is an integer of 1 to 10. A group represented by the following formula is more preferred.

[0271] Above X a1 is preferably —O— or —C(═O)O—.

[0272] Above X a The formula is as follows: -(CF2) m11 -(CH2) m12 -O-(CH2) m13 - (In the formula, m11 is an integer of 1 to 3, m12 is an integer of 1 to 3, and m13 is an integer of 1 to 3.) a group represented by -(CF2) m14 -(CH2) m15 -O-CH2CH(OH)-(CH2) m16 - (In the formula, m14 is an integer of 1 to 3, m15 is an integer of 1 to 3, and m16 is an integer of 1 to 3.) a group represented by -(CF2) m17 -(CH2) m18 - (In the formula, m17 is an integer of 1 to 3, and m18 is an integer of 1 to 3.) a group represented by -(CF2) m19 -(CH2)m20 -O-CH2CH(OSi(OCH3)3)-(CH2) m21 - (In the formula, m19 is an integer of 1 to 3, m20 is an integer of 1 to 3, and m21 is an integer of 1 to 3.) or a group represented by -(CH2) m22 - (In the formula, m22 is an integer of 1 to 3.) A group represented by the following formula is particularly preferred.

[0273] Above X a Although not particularly limited, specific examples include: -CH2-, -C2H4-, -C3H6-, -C4H8-, -C4H8-O-CH2-, -CO-O-CH2-CH(OH)-CH2-, -(CF2) n5 -(n5 is an integer from 0 to 4), -(CF2) n5 -(CH2) m5 -(n5 and m5 each independently represent an integer of 0 to 4), -CF2CF2CH2OCH2CH(OH)CH2-, -CF2CF2CH2OCH2CH(OSi(OCH3)3)CH2- etc.

[0274] In this embodiment, X A may each independently be a divalent or trivalent organic group.

[0275] The fluorine-containing compound represented by the above formula (1) or (2) is not particularly limited, but may be 5×10 2 ~1×10 5 Within this range, it is preferable from the viewpoint of abrasion resistance that the average molecular weight is 2,000 to 32,000, more preferably 2,500 to 12,000. Note that the "average molecular weight" refers to a number average molecular weight, and the "average molecular weight" is 19 The value is measured by F-NMR.

[0276] In one embodiment, the fluorine-containing compound in the liquid repellent agent of the present disclosure is a compound represented by formula (1).

[0277] In another embodiment, in the liquid repellent agent of the present disclosure, the fluorine-containing compound is a compound represented by formula (2).

[0278] In another embodiment, the fluorine-containing compounds in the liquid repellent agent of the present disclosure are a compound represented by formula (1) and a compound represented by formula (2).

[0279] In the liquid repellent agent of the present disclosure, the content of the compound represented by formula (2) relative to the total of the compound represented by formula (1) and the compound represented by formula (2) is preferably 0.1 mol% or more and 35 mol% or less. The lower limit of the content of the compound represented by formula (2) relative to the total of the compound represented by formula (1) and the compound represented by formula (2) is preferably 0.1 mol%, more preferably 0.2 mol%, even more preferably 0.5 mol%, even more preferably 1 mol%, particularly preferably 2 mol%, and especially 5 mol%. The upper limit of the content of the compound represented by formula (2) relative to the total of the compound represented by formula (1) and the compound represented by formula (2) is preferably 35 mol%, more preferably 30 mol%, even more preferably 20 mol%, even more preferably 15 mol% or 10 mol%. The compound represented by formula (2) is preferably 0.1 mol% or more and 30 mol% or less, more preferably 0.1 mol% or more and 20 mol% or less, even more preferably 0.2 mol% or more and 10 mol% or less, still more preferably 0.5 mol% or more and 10 mol% or less, particularly preferably 1 mol% or more and 10 mol% or less, for example, 2 mol% or more and 10 mol% or less, or 5 mol% or more and 10 mol% or less. By setting the compound represented by formula (2) in this range, wear resistance can be further improved.

[0280] In one embodiment, the liquid repellent agent of the present disclosure contains two or more fluorine-containing compounds represented by formula (1) or (2).

[0281] In one embodiment, the liquid repellent of the present disclosure is R Siis a group selected from the formulae (S1), (S2), (S3), (S4) and (S5), and is a group different from each other, and includes two or more fluorine-containing compounds represented by formula (1) or (2).

[0282] In one embodiment, the liquid repellent of the present disclosure is R Si is a group represented by formula (S1), and a fluorine-containing compound represented by formula (1) or (2), Si is a group selected from the formulas (S3), (S4) and (S5).

[0283] In one embodiment, the liquid repellent of the present disclosure is R Si is a group represented by formula (S1), and a fluorine-containing compound represented by formula (1) or (2), Si is a group selected from formulas (S3) and (S4).

[0284] In one embodiment, the liquid repellent of the present disclosure is R Si is a group represented by formula (S1), and a fluorine-containing compound represented by formula (1) or (2), Si is a group represented by formula (S3).

[0285] In one embodiment, the liquid repellent of the present disclosure is R Si is a group represented by formula (S1), and a fluorine-containing compound represented by formula (1) or (2), Si is a group represented by formula (S4).

[0286] The compounds represented by the above formula (1) or (2) can be obtained, for example, by methods known per se, such as those described in International Publication No. 97 / 07155, JP-A-2008-534696, JP-A-2014-218639, JP-A-2017-82194, etc.

[0287] The content of the compound represented by formula (1) or (2) is preferably 0.01 to 50.0% by mass, more preferably 0.1 to 30.0% by mass, even more preferably 1.0 to 25.0% by mass, and particularly preferably 5.0 to 20.0% by mass, based on the total mass of the liquid repellent. By setting the content of the fluorine-containing compound within the above range, higher water and oil repellency can be obtained.

[0288] [Compound represented by formula (3), (4) or (5)] [ka]

[0289] R F1 and R F2 is the R for equations (1) and (2). F1 and R F2 It has the same meaning as:

[0290] In the above formulas (3) to (5), R Ac are each independently -X D -X E (-X F -OCO-CR 5 =CH2) m’ is.

[0291] Above X D is a single bond or a divalent group, for example a divalent organic group.

[0292] X D is preferably —O—, —CO—, —COO—, —OCO—, —CONH—, —NHCO—, —OCONH—, —NHCOO—, —NH—CO—NH—, —CHCH(OH)CH—, —CH(CHOH)CH—, —(OSiR 14 2) d5 -, [ka] [In the formula, * and ** indicate bonding positions, * indicates X B , and ** is X E Binds to.] and R 14 is C 1-6 Alkyl group, or C 6-16 is an aryl group, d5 is an integer from 1 to 10. These groups are B Combine with.

[0293] X D is more preferably -CONH-, -CH2CH(OH)CH2-, or -CH(CH2OH)CH2-, more preferably -CONH-.

[0294] Above X E is a single bond or an (m'+1)-valent group.

[0295] In one embodiment, X E is a single bond.

[0296] In one embodiment, X E teeth, -X G -X H [In formula: X G teeth, single bond, C 1-6 an alkylene group, -(CH2) z9 -O-(CH2) z10 - (wherein z9 is an integer of 0 to 6, for example, an integer of 1 to 6, and z10 is an integer of 0 to 6, for example, an integer of 1 to 6), or -(CH2) z11 -phenylene-(CH2) z12 - (wherein z11 is an integer of 0 to 6, for example, an integer of 1 to 6, and z12 is an integer of 0 to 6, for example, an integer of 1 to 6) and X H is as follows: [ka] and R 8 is a hydrogen atom or C1-6 is an alkyl group. It is a tri- or tetravalent group represented by the formula:

[0297] Above C 1-6 The alkylene group may be straight-chain or branched, but is preferably straight-chain.

[0298] In a preferred embodiment, the above C 1-6 The alkylene group is C 2-4 It is an alkylene group.

[0299] Above C 1-6 The alkyl group is preferably C 1-3 It is preferably an alkyl group, more preferably a methyl group.

[0300] Above X F are each independently a single bond or a divalent group, for example, a divalent organic group (preferably a divalent organic group having 1 to 10 carbon atoms).

[0301] In one embodiment, X F teeth, single bond, C 1-6 an alkylene group, -(CH2) z5 -O-(CH2) z6 - (wherein z5 is an integer of 0 to 6, for example, an integer of 1 to 6, and z6 is an integer of 0 to 6, for example, an integer of 1 to 6), or -(CH2) z7 -phenylene-(CH2) z8 - (wherein z7 is an integer of 0 to 6, for example, an integer of 1 to 6, and z8 is an integer of 0 to 6, for example, an integer of 1 to 6) These groups include, for example, fluorine atoms, C 1-6 Alkyl group, C 2-6 Alkenyl groups, and C 2-6 The alkynyl group may be substituted, but is preferably unsubstituted, by one or more substituents selected from the group consisting of alkynyl groups. B Combine with.

[0302] Above C 1-6 The alkylene group may be straight-chain or branched, but is preferably straight-chain.

[0303] In a preferred embodiment, X F is C 1-6 Alkylene group, preferably C 2-4 It is an alkylene group.

[0304] In one embodiment, X D , X E , and X F is a single bond.

[0305] Above R 5 is a hydrogen atom, a halogen atom, or a monovalent organic group having 1 to 8 carbon atoms.

[0306] The monovalent organic group is preferably C 1-8 Alkyl group, C 3-8 Cycloalkyl group, or C 5-8 is an aryl group, more preferably C 1-6 is an alkyl group or a phenyl group, more preferably C 1-3 It is an alkyl group, and particularly preferably a methyl group.

[0307] In one embodiment, R 5 is a hydrogen atom.

[0308] In one embodiment, R 5 is a methyl group.

[0309] The above m' is an integer of 1 to 10, preferably an integer of 1 to 3, and more preferably 1.

[0310] In the above formulas (3) to (5), X AA are each independently a single bond or a divalent organic group.

[0311] In one embodiment, X AAare each independently a single bond or a divalent organic group that does not contain a urethane bond, a polyisocyanate structure, or a siloxane bond.

[0312] In a preferred embodiment, X AA are each independently a single bond, or -(C α R 11 2α ) s1 -R 12 t1 - [In formula: R 11 are each independently a hydrogen atom or a fluorine atom, Each a is independently an integer from 1 to 10, R 12 are each independently -O-, -CO-, -CONH-, -NHCO-, -COO-, -OCO-, or -OCONH-; s1 is an integer from 0 to 3, t1 is an integer from 0 to 3, The sum of s1 and t1 is greater than or equal to 1, The repeating units enclosed in parentheses with s1 or t1 may occur in any order in the formula.] In the formula, the left side is R F2 Combine with.

[0313] In one embodiment, X AA is a single bond.

[0314] In one embodiment, X AA are each independently the above-(C α R 11 2α ) s1 -R 12 t1 -It is.

[0315] Above R 11 is preferably a hydrogen atom.

[0316] The above α's are each independently preferably an integer of 1 to 6, more preferably an integer of 1 to 4, and even more preferably an integer of 2 to 4.

[0317] Above R 12 are each independently preferably -O-, -CO-, or -NR 10 -, -CONH-, or -COO-, more preferably -CONH-.

[0318] Above R 10 is a hydrogen atom or C 1-6 It is an alkyl group, preferably a hydrogen atom.

[0319] The above s1 is preferably an integer of 1 to 3, more preferably 1 or 2, and even more preferably 1.

[0320] The above t1 is preferably an integer of 0 to 2, more preferably 1 or 2, and even more preferably 1.

[0321] In a preferred embodiment, R 11 is a hydrogen atom, α is an integer from 2 to 4, R 12 -O-, -CO-, -NR 10 -, -CONH-, or -COO-, R 10 is a hydrogen atom or C 1-6 is an alkyl group, s1 is 1 or 2, t1 is 0 or 1.

[0322] In a more preferred embodiment, X AA -CONR 10 -C α1 H 2α1 -, -(C α2 H 2α2 )-OCONR 10 -, -(C α3 H 2α3 )-, or -(C α4 H 2α4 )-O-(Cα5 H 2α5 ) and R 10 is a hydrogen atom or C 1-6 is an alkyl group, α1 is an integer from 1 to 10, α2 is an integer from 1 to 10, α3 is an integer from 1 to 10, α4 is an integer from 0 to 6, α5 is an integer from 0 to 6. Such a group has a structure in which the left side is R F2 Combine with.

[0323] X AA is preferably -CONH-C α H 2α -. Such groups are those where the left side is R F2 Combine with.

[0324] Above C α1 H 2α1 is preferably (CH2) α1 is.

[0325] Above C α2 H 2α2 is preferably (CH2) α2 is.

[0326] Above C α3 H 2α3 is preferably (CH2) α3 is.

[0327] Above C α4 H 2α4 is preferably (CH2) α4 is.

[0328] Above C α5 H 2α5 is preferably (CH2) α5 is.

[0329] In the above formulas (3) to (5), X B are each independently a (m+1)-valent group, provided that in each formula, at least one X Bis an (m+1)-valent group containing a hydrolyzable silyl group.

[0330] In one embodiment, X B are each independently an (m+1)-valent group containing a hydrolyzable silyl group.

[0331] In one embodiment, X B are each independently SiR 1 nb R sb 4-nb [In formula: R 1 is a hydroxyl group or a hydrolyzable group, R sb is a single bond, nb is 1 or 2.] or a group containing a group represented by X Ba (R S ) na [In formula: X Ba are each independently a (m+n a+1)-valent group, R S are each independently -X C -SiR 1 n’ R 2 3-n’ and X C is a divalent organic group having 1 to 10 carbon atoms, R 1 are each independently a hydroxyl group or a hydrolyzable group, R 2 are each independently a hydrogen atom or a monovalent organic group, n' is an integer from 1 to 3, na is an integer from 1 to 10. It is a group represented by the formula:

[0332] In one embodiment, X B are each independently, X Ba (R S )na [In formula: X Ba are each independently a (m+n a+1)-valent group, R S are each independently -X C -SiR 1 n’ R 2 3-n’ and X C is a divalent organic group having 1 to 10 carbon atoms, R 1 are each independently a hydroxyl group or a hydrolyzable group, R 2 are each independently a hydrogen atom or a monovalent organic group, n' is an integer from 1 to 3, na is an integer from 1 to 10. It is a group represented by the formula:

[0333] In such an embodiment, formulas (3) and (4) may be represented by the following formulas (3-a) and (4-a): [ka] [In the formula, each symbol has the same meaning as above.] It is expressed as:

[0334] Above R S are each independently -X C -SiR 1 n’ R 2 3-n’ is.

[0335] Above X C is a divalent organic group having 1 to 10 carbon atoms.

[0336] In one embodiment, X C teeth, C 1-6 an alkylene group, -(CH2) z1 -O-(CH2) z2- (wherein z1 is an integer of 0 to 6, for example, an integer of 1 to 6, and z2 is an integer of 0 to 6, for example, an integer of 1 to 6), -(CH2) z3 -phenylene-(CH2) z4 - (wherein z3 is an integer of 0 to 6, for example, an integer of 1 to 6, and z4 is an integer of 0 to 6, for example, an integer of 1 to 6), or -(CH2) z13 -OCONH-(CH2) z14 - (wherein z13 is an integer of 0 to 6, and z14 is an integer of 0 to 6) These groups include, for example, fluorine atoms, C 1-6 Alkyl group, C 2-6 Alkenyl groups, and C 2-6 The alkynyl group may be substituted, but is preferably unsubstituted, by one or more substituents selected from the group consisting of alkynyl groups. B Combine with.

[0337] Above C 1-6 The alkylene group may be straight-chain or branched, but is preferably straight-chain.

[0338] In a preferred embodiment, X C is C 1-6 Alkylene group, preferably C 2-4 It is an alkylene group.

[0339] Above R 1 are each independently a hydroxyl group or a hydrolyzable group.

[0340] R 1 are preferably each independently a hydrolyzable group.

[0341] R 1 are preferably each independently -OR h , -OCOR h , -ON=CR h 2, -NR h 2, -NHR h , —NCO, or halogen (wherein Rh is a substituted or unsubstituted C 1-4 alkyl group), and more preferably -OR h (i.e., an alkoxy group). h Examples of R include unsubstituted alkyl groups such as methyl, ethyl, propyl, isopropyl, n-butyl, and isobutyl; and substituted alkyl groups such as chloromethyl. Among these, alkyl groups, particularly unsubstituted alkyl groups, are preferred, with methyl or ethyl groups being more preferred. In one embodiment, R h is a methyl group, and in another embodiment, R h is an ethyl group.

[0342] Above R 2 are each independently a hydrogen atom or a monovalent organic group. Such monovalent organic groups are monovalent organic groups excluding the above-mentioned hydrolyzable groups.

[0343] R 2 In the formula, the monovalent organic group is preferably C 1-20 alkyl group, more preferably C 1-6 It is preferably an alkyl group, more preferably a methyl group.

[0344] In the above formula, n' is (SiR 1 n’ R 2 3-n’ ) units are each independently an integer of 1 to 3, preferably 2 or 3, and more preferably 3.

[0345] The above na is preferably an integer of 1 to 6, more preferably an integer of 1 to 3, and particularly preferably 1.

[0346] In one embodiment, the X Ba is a trivalent group, preferably [ka] In one embodiment, the —C(—O—)— is O is R SIn another embodiment, -C(-O-)- means that O is R Ac Combine with.

[0347] In a preferred embodiment, X Ba is N, where m is 1 and n is 1.

[0348] In another embodiment, X B are each independently SiR 1 nb R sb 4-nb [In formula: R 1 is a hydroxyl group or a hydrolyzable group, R sb is a single bond, nb is 1 or 2.] Preferably, a group containing a group represented by -X Bb -SiR 1 nb R sb 4-nb [In formula: X Bb is a single bond or a divalent group, R 1 is a hydroxyl group or a hydrolyzable group, R sb is a single bond, nb is 1 or 2.] It is a group represented by the formula:

[0349] In the above formulas (3) to (5), each m is independently an integer of 0 to 10, and each n is independently an integer of 1 to 10.

[0350] m is preferably an integer of 1 to 10, more preferably an integer of 1 to 6, even more preferably an integer of 1 to 3, and even more preferably 1.

[0351] n is preferably an integer of 1 to 6, more preferably an integer of 1 to 3, and particularly preferably 1.

[0352] In a preferred embodiment, m is 1 and n is 1.

[0353] In the above (A2), R a are each independently an (m3+2)-valent organic group.

[0354] In one embodiment, R a is expressed by the following formula: -R 9 -(R a’ -R 9 ) k - [In formula: R 9 are each independently 1-6 is an alkylene group, R a’ are each independently a trivalent group, for example a trivalent organic group; and k is an integer from 1 to 4. In this group, the -C(-O-)- means that O is R Ac Combine with.

[0355] R 9 is preferably C 1-4 is an alkylene group, more preferably C 2-4 It is an alkylene group.

[0356] In one embodiment, k is 0.

[0357] In another embodiment, k is an integer from 1 to 4.

[0358] In a preferred embodiment, k is an integer of 1-2.

[0359] In one embodiment, k is 1.

[0360] In one embodiment, k is 2.

[0361] In one embodiment, R a’ are each independently a trivalent group containing a N atom or an O atom.

[0362] In a preferred embodiment, R a’ are each independently a trivalent group which may contain N, -C(-O-)-, or an amino bond, an amide bond, a urethane bond, a urea bond, an ether bond, or an ester bond between carbon atoms.

[0363] In one embodiment, R a’ are each independently one of the following groups: [ka] is.

[0364] In one embodiment, R a’ is N.

[0365] In one embodiment, R a’ is -C(-O-)-.

[0366] In the above formula (5), m3 is an integer of 0 to 4.

[0367] m3 is preferably an integer of 1 to 4, more preferably 1 or 2.

[0368] In one embodiment, m3 is 1.

[0369] In one embodiment, m3 is 2.

[0370] In the above formula (5), R g are each independently -NR c CO-R e -, -NR c COO-R e -, or -NR c CONR c -R e -, where these groups are R a Combine with.

[0371] Above R g is preferably -NRc CO-R e -It is.

[0372] Above R c are each independently a hydrogen atom, C 1-6 Alkyl group, or C 6-16 It is an aryl group.

[0373] Above C 1-6 The alkyl group is preferably C 1-3 C is an alkyl group, and particularly preferably a methyl group. 1-6 The alkyl group may be straight or branched.

[0374] Above C 6-16 The aryl group is preferably C 6-10 An aryl group is preferred, and a phenyl group is more preferred.

[0375] In one embodiment, R c is a hydrogen atom.

[0376] In one embodiment, R c is a methyl group.

[0377] In the above formula, R e are each independently a single bond or a divalent organic group.

[0378] In one embodiment, R e is a single bond.

[0379] In one embodiment, R e are each independently a divalent organic group.

[0380] The divalent organic group is preferably —R 43 -O x2 -R 44 -(In the formula, R 43 and R 44 are each independently a single bond or C 1-20 is an alkylene group, and x2 is 0 or 1. 1-20The alkylene group may be straight-chain or branched, but is preferably straight-chain. 1-20 The alkylene group is preferably C 1-10 Alkylene groups, more preferably C 1-6 Alkylene groups, more preferably C 1-3 It is an alkylene group.

[0381] In the above formula (5), x is an integer of 1 or more.

[0382] In one embodiment, x is preferably an integer of 1 or more and 100 or less, more preferably an integer of 1 or more and 10 or less, even more preferably an integer of 1 or more and 5 or less, for example, an integer of 2 or more and 10 or less, even more preferably an integer of 2 or more and 5 or less.

[0383] In a preferred embodiment, formula (5) is represented by the following formula (5-a): [ka] [In the formula, R b are each independently R S , R Ac , or R c and However, R b At least one of the S and R j are each independently -CO-R d -, -OR d -, or -NR c -R d -, where these groups are R F2 binds to R d are each independently a single bond or a divalent organic group, R F2 , R a , R c , R Ac , m3, and x are as defined above.] is.

[0384] In the above formula (5-a), R b are each independently R S , R Ac , or R c is.

[0385] In the above formula (5-a), at least one R b is R S is.

[0386] In a preferred embodiment, R bonded to the N atom at each end of formula (5-a) b At least one of S is.

[0387] In one embodiment, R bonded to the N atom at each end of formula (5-a) b One of them is R S and the other is R c is.

[0388] In another embodiment, R bonded to the N atom at each end of formula (5-a) b One of them is R S and the other is R Ac is.

[0389] In a preferred embodiment, R Ac -CONH-X F -OCO-CR 5 =CH2.

[0390] Above R j are each independently -CO-R d -, -OR d -, or -NR c -R d -, where these groups are R F2 Combine with.

[0391] In one embodiment, R j are each independently -CO-R d -It is.

[0392] Above R dare each independently a single bond or a divalent organic group.

[0393] In one embodiment, R d is a single bond.

[0394] In another embodiment, R d is a divalent organic group.

[0395] R d The divalent organic group in C 1-10 Alkylene group, preferably C 2-6 an alkylene group, -(CH2) z13 -O-(CH2) z14 - (wherein z13 is an integer of 0 to 6, for example, an integer of 1 to 6, and z14 is an integer of 0 to 6, for example, an integer of 1 to 6), -(CH2) z15 -phenylene-(CH2) z16 - (wherein z15 is an integer of 0 to 6, for example, an integer of 1 to 6, and z16 is an integer of 0 to 6, for example, an integer of 1 to 6), or -(CH2) z17 -NR 10 -(CH2) z18 -(In the formula, R 10 is a hydrogen atom or C 1-6 an alkyl group, z17 is an integer of 0 to 6, and z18 is an integer of 0 to 6), These groups include, for example, fluorine atoms, C 1-6 Alkyl group, C 2-6 Alkenyl groups, and C 2-6 It may be substituted, but is preferably unsubstituted, by one or more substituents selected from alkynyl groups, which are attached at the left side to CO.

[0396] R d The divalent organic group in is preferably —(CH) z17 -NR 10 -(CH2) z18 -(In the formula, R 10 is a hydrogen atom or C 1-6alkyl group, z17 is an integer of 0 to 6, and z18 is an integer of 0 to 6), more preferably —NR 10 -(CH2) z18 -(In the formula, R 10 is a hydrogen atom or C 1-6 and z18 is an integer of 1 to 6.

[0397] Above C 1-10 The alkylene group may be straight-chain or branched, but is preferably straight-chain.

[0398] In a preferred embodiment, formula (5) is represented by formula (5-b): [ka] [In the formula, R F2 , R a , R b , R c , R d , R Ac , m3, and x are as defined above.] is.

[0399] The fluoropolyether group-containing compounds represented by the above formulas (3) to (5) are not particularly limited, but may be 5×10 2 ~2×10 5 Within this range, the number average molecular weight may be 2×10 3 ~1×10 5 , more preferably 3 × 10 3 ~2×10 4 From the viewpoint of abrasion resistance, it is preferable that the polymer has a number average molecular weight of 19 The value is measured by F-NMR.

[0400] The compounds represented by the above formulas (3) to (5) can be obtained, for example, by a method known per se, such as the methods described in WO 2023 / 074416 and WO 2023 / 074410.

[0401] The liquid repellent may contain a solvent, a (non-reactive) fluoropolyether compound that can be understood as a fluorine-containing oil, preferably a perfluoro(poly)ether compound (hereinafter collectively referred to as "fluorine-containing oil"), a (non-reactive) silicone compound that can be understood as a silicone oil (hereinafter referred to as "silicone oil"), alcohols, a compatibilizer, a catalyst, a surfactant, a polymerization inhibitor, a sensitizer, a crosslinking agent, a radical polymerization initiator, etc.

[0402] Examples of the solvent include aliphatic hydrocarbons such as hexane, cyclohexane, heptane, octane, nonane, decane, undecane, dodecane, and mineral spirits; aromatic hydrocarbons such as benzene, toluene, xylene, naphthalene, and solvent naphtha; methyl acetate, ethyl acetate, propyl acetate, n-butyl acetate, isopropyl acetate, isobutyl acetate, cellosolve acetate, propylene glycol methyl ether acetate, carbitol acetate, diethyl oxalate, ethyl pyruvate, and ethyl 2-hydroxybutyrate. Esters such as ethyl acetoacetate, amyl acetate, methyl lactate, ethyl lactate, methyl 3-methoxypropionate, ethyl 3-methoxypropionate, methyl 2-hydroxyisobutyrate, ethyl 2-hydroxyisobutyrate; ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone, 2-hexanone, cyclohexanone, methyl amino ketone, 2-heptanone; ethyl cellosolve, methyl cellosolve acetate, ethyl cellosolve acetate, propylene glycol monomethyl ether ... Glycol ethers such as ethylene glycol monoethyl ether, propylene glycol monobutyl ether, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, propylene glycol monobutyl ether acetate, dipropylene glycol dimethyl ether, and ethylene glycol monoalkyl ether; alcohols such as methanol, ethanol, isopropanol, n-butanol, isobutanol, tert-butanol, sec-butanol, 3-pentanol, octyl alcohol, 3-methyl-3-methoxybutanol, and tert-amyl alcohol; glycols such as ethylene glycol and propylene glycol; cyclic ethers such as tetrahydrofuran, tetrahydropyran, and dioxane; amides such as N,N-dimethylformamide and N,N-dimethylacetamide; ether alcohols such as methyl cellosolve, cellosolve, isopropyl cellosolve, butyl cellosolve, and diethylene glycol monomethyl ether; and diethylene glycol monoethyl ether acetate.Examples of the solvent include fluorine-containing solvents such as 1,1,2-trichloro-1,2,2-trifluoroethane, 1,2-dichloro-1,1,2,2-tetrafluoroethane, dimethyl sulfoxide, 1,1-dichloro-1,2,2,3,3-pentafluoropropane (HCFC225), Zeorora H, HFE7100, HFE7200, and HFE7300. Alternatively, examples include mixed solvents of two or more of these solvents.

[0403] The fluorine-containing oil is not particularly limited, but examples thereof include compounds represented by the following general formula (3) (perfluoro(poly)ether compounds). Rf 5 -(OC4F8) a’ -(OC3F6) b’ -(OC2F4) c’ -(OCF2) d’ -Rf 6 ···(3) In the formula, Rf 5 is an alkyl group having 1 to 16 carbon atoms which may be substituted with one or more fluorine atoms (preferably, C 1―16 Rf represents a perfluoroalkyl group 6 is an alkyl group having 1 to 16 carbon atoms which may be substituted with one or more fluorine atoms (preferably, C 1-16 perfluoroalkyl group), a fluorine atom or a hydrogen atom, and Rf 5 and Rf 6 More preferably, each independently represents C 1-3 It is a perfluoroalkyl group. a', b', c', and d' respectively represent the number of four types of repeating units of the perfluoro(poly)ether constituting the main skeleton of the polymer, and are each independently an integer of 0 to 300, and the sum of a', b', c', and d' is at least 1, preferably 1 to 300, and more preferably 20 to 300. The order of occurrence of each repeating unit enclosed in parentheses with the subscript a', b', c', or d' is arbitrary in the formula. Of these repeating units, -(OC4F8)- may be any of -(OCF2CF2CF2CF2)-, -(OCF(CF3)CF2CF2)-, -(OCF2CF(CF3)CF2)-, -(OCF2CF2CF(CF3))-, -(OCF2CF2CF(CF3))-, -(OC(CF3)2CF2)-, -(OCF2C(CF3)2)-, -(OCF(CF3)CF(CF3))-, -(OCF(C2F5)CF2)-, and (OCF2CF(C2F5))-, but is preferably -(OCF2CF2CF2CF2)-. -(OC3F6)- may be any of -(OCF2CF2CF2)-, -(OCF(CF3)CF2)-, and (OCF2CF(CF3))-, but is preferably -(OCF2CF2CF2)-. -(OC2F4)- may be either -(OCF2CF2)- or (OCF(CF3))-, but is preferably -(OCF2CF2)-.

[0404] Examples of the perfluoro(poly)ether compound represented by the above general formula (3) include compounds represented by either of the following general formulas (3a) and (3b) (which may be one type or a mixture of two or more types): Rf 5 -(OCF2CF2CF2) b” -Rf 6 (3a) Rf 5 -(OCF2CF2CF2CF2) a” -(OCF2CF2CF2) b” -(OCF2CF2) c” -(OCF2) d” -Rf 6 (3b) In these formulas, Rf 5 and Rf 6is as defined above; in formula (3a), b" is an integer of 1 or more and 100 or less; in formula (3b), a" and b" are each independently an integer of 0 or more and 30 or less, and c" and d" are each independently an integer of 1 or more and 300 or less. The order of occurrence of each repeating unit enclosed in parentheses with the subscripts a", b", c", and d" is arbitrary in the formula.

[0405] From another perspective, fluorine-containing oils are those represented by the general formula Rf 3 -F(where Rf 3 is C 5-16 It may be a compound represented by the formula: wherein R is a perfluoroalkyl group.) It may also be a chlorotrifluoroethylene oligomer.

[0406] The fluorine-containing oil may have an average molecular weight of 500 to 10000. The molecular weight of the fluorine-containing oil can be measured using GPC.

[0407] The fluorine-containing oil can be contained in an amount of, for example, 0.01 to 50 mass %, preferably 0.1 to 30 mass %, for example, 1 to 15 mass %, relative to the liquid repellent agent.

[0408] In one embodiment, the liquid repellent is substantially free of fluorine-containing oil. "Substantially free of fluorine-containing oil" means that the liquid repellent does not contain any fluorine-containing oil, or may contain a trace amount of fluorine-containing oil.

[0409] In one embodiment, the average molecular weight of the fluorinated oil may be larger than the average molecular weight of the fluorinated compound.

[0410] In one embodiment, the average molecular weight of the fluorinated oil may be smaller than the average molecular weight of the fluorinated compound.

[0411] The silicone oil may be, for example, a linear or cyclic silicone oil having 2,000 or less siloxane bonds. The linear silicone oil may be a so-called straight silicone oil or a modified silicone oil. Examples of straight silicone oils include dimethyl silicone oil, methylphenyl silicone oil, and methylhydrogen silicone oil. Examples of modified silicone oils include straight silicone oils modified with alkyl, aralkyl, polyether, higher fatty acid ester, fluoroalkyl, amino, epoxy, carboxyl, alcohol, etc. Examples of cyclic silicone oils include cyclic dimethylsiloxane oil.

[0412] The liquid repellent agent may contain such silicone oil in an amount of, for example, 0 to 300 parts by mass, preferably 50 to 200 parts by mass, relative to a total of 100 parts by mass of the above fluorine-containing compounds (the total of these if there are two or more types, the same applies below).

[0413] Examples of the alcohols include non-fluorine-containing alcohols having 1 to 6 carbon atoms, such as methanol, ethanol, iso-propanol, tert-butanol, etc. Adding these alcohols to the liquid repellent agent improves the stability of the liquid repellent agent and also improves the compatibility of the fluorine-containing compound with the solvent.

[0414] Examples of the compatibilizer include fluorine-substituted alcohols such as 2,2,2-trifluoroethanol, 2,2,3,3,3-pentafluoro-1-propanol, and 2,2,3,3,4,4,5,5-octafluoro-1-pentanol, preferably fluorine-substituted alcohols having a CF2H terminal; fluorine-substituted aryls such as 1,3-bis(trifluoromethyl)benzene, preferably fluorine-substituted benzene; and the like.

[0415] The catalyst is not particularly limited, but may be, for example, an acid (e.g., acetic acid, trifluoroacetic acid, etc.), a base (e.g., ammonia, triethylamine, diethylamine, etc.), a transition metal (e.g., Ti, Ni, Sn, etc.), a metal complex such as a tin-based catalyst, a titanium-based catalyst, a zirconia-based catalyst, a bismuth-based catalyst, or an organic amine-based catalyst.

[0416] The tin catalyst includes di-n-butyltin(IV) dilaurate. Examples of the titanium catalyst include titanium diisopropoxybis(ethylacetoacetate), titanium tetra-n-butoxide, titanium tetra-2-ethylhexoxide, and titanium tetraacetylacetonate. Examples of the zirconia catalyst include zirconium tetraacetylacetonate, zirconium tetra-n-butoxide, and zirconium dibutoxybis(ethylacetoacetate). The bismuth-based catalyst includes bismuth tris(2-ethylhexanoate). An example of the organic amine catalyst is diazabicycloundecene.

[0417] The catalyst may be added to the liquid repellent immediately before use, depending on the method of use.

[0418] The crosslinking agent is not particularly limited, but may be, for example, an alkoxysilane compound.

[0419] In a preferred embodiment, the crosslinker preferably has the formula: (R g1 -O) δ -Si-R g2 4-δ [In formula; R g1 is independently in each occurrence a hydrogen atom or a monovalent organic group; R g2 are each independently a monovalent organic group; δ is an integer from 2 to 4. It is a compound represented by the formula:

[0420] R g1 are each independently preferably a monovalent organic group, more preferably C 1-6 It may be an alkyl group, more preferably a methyl or ethyl group.

[0421] R g2 are each independently preferably C 1-16 Alkyl group, C 3-16 Cycloalkyl groups, C 6-16 Aryl group, or C 1-16 Alkenyl groups, more preferably C 1-16 alkyl group, more preferably C 1-10 alkyl groups, even more preferably C 1-3 It may be an alkyl group.

[0422] R g2 Examples of the alkyl group include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, isobutyl, tert-butyl, pentyl, neopentyl, hexyl, heptyl, octyl, nonyl, and decyl; cycloalkyl groups such as cyclopentyl, cyclohexyl, and cycloheptyl; aryl groups such as phenyl, tolyl, xylyl, and naphthyl; aralkyl groups such as benzyl, phenylethyl, and phenylpropyl; and alkenyl groups such as vinyl, allyl, propenyl, and butenyl.

[0423] δ is preferably 3 or 4. In one embodiment, δ is 3. In another embodiment, δ is 4.

[0424] The crosslinking agent is preferably tetraethoxysilane, tetramethoxysilane, methyltriethoxysilane, methyltrimethoxysilane, dimethyldimethoxysilane, dimethyltrimethoxysilane, aminopropyltriethoxysilane, aminopropyltrimethoxysilane, tridecafluoro-n-octyltriethoxysilane, or tridecafluoro-n-octyltrimethoxysilane.

[0425] The radical polymerization initiator may preferably be a radical photopolymerization initiator. Examples of the radical photopolymerization initiator include diketones such as benzyl and diacetyl, acyloins such as benzoin, acyloin ethers such as benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether, thioxanthones such as thioxanthone, 2,4-diethylthioxanthone, and thioxanthone-4-sulfonic acid, benzophenones such as 4,4'-bis(dimethylamino)benzophenone and 4,4'-bis(diethylamino)benzophenone, acetophenone, 2-(4-toluenesulfonyloxy)-2-phenylacetophenone, p-dimethylaminoacetophenone, 2,2'-dimethoxy-2-phenylacetophenone, and p-methoxyacetophenone. acetophenones such as cetophenone, 2-methyl[4-(methylthio)phenyl]-2-morpholino-1-propanone, 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl)-butan-1-one; quinones such as anthraquinone and 1,4-naphthoquinone; aminobenzoic acids such as ethyl 2-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, (n-butoxy)ethyl 4-dimethylaminobenzoate, isoamyl 4-dimethylaminobenzoate, and 2-ethylhexyl 4-dimethylaminobenzoate; halogen compounds such as phenacyl chloride and trihalomethylphenyl sulfone; acylphosphine oxides; and peroxides such as di-t-butyl peroxide.

[0426] In a preferred embodiment, the radical polymerization initiator is selected from the group consisting of benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, thioxanthone, 2,4-diethylthioxanthone, thioxanthone-4-sulfonic acid, benzophenone, 4,4'-bis(dimethylamino)benzophenone, 4,4'-bis(diethylamino)benzophenone, acetophenone, 2-(4-toluenesulfonyloxy)-2-phenylacetophenone, p-dimethylaminoacetophenone, and 2,2'-dimethoxy-2-phenyl Acetophenone, p-methoxyacetophenone, 2-methyl[4-(methylthio)phenyl]-2-morpholino-1-propanone, 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl)-butan-1-one, anthraquinone, 1,4-naphthoquinone, ethyl 2-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, (n-butoxy)ethyl 4-dimethylaminobenzoate, isoamyl 4-dimethylaminobenzoate, 2-ethylhexyl 4-dimethylaminobenzoate, phenacyl chloride, trihalomethylpheny sulfone, acylphosphine oxide, or di-t-butyl peroxide, methyl benzoyl formate, 1-hydroxy-cyclohexyl-phenyl-ketone, 1-[4-(2-hydroxyethoxy)-phenyl]-2-hydroxy-2-methyl-1-propan-1-one, 2-hydroxy-1-{4-[4-(2-hydroxy-2-methyl-propionyl)-benzyl]phenyl}-2-methyl-propan-1-one, 2-methyl-1-(4-methylthiophenyl)-2-morpholinopropan-1-one, 2-benzyl-2- Dimethylamino-1-(4-morpholinophenyl)-1-butanone, 2-(dimethylamino)-2-[(4-methylphenyl)methyl]-1-[4-(4-morpholinyl)phenyl]-1-butanone, bis(2,4,6-trimethylbenzoyl)-phenylphosphine oxide, bis(η5-2,4-cyclopentadien-1-yl)-bis(2,6-difluoro-3-(1H-pyrrol-1-yl)-phenyl)titanium, 1,2-octanedione, 1-[4-(phenylthio)-, 2-(O-benzoyloxime)], ethanone,1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]-, 1-(0-acetyloxime), 2-hydroxy-2-methyl-1-phenyl-propan-1-one, 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide, t-butyl hydroperoxide, cumene hydroperoxide, diisopropylbenzene hydroperoxide, permentha hydroperoxide, or t-methylbutyl hydroperoxide.

[0427] Examples of commercially available radical photopolymerization initiators include the following. OMNIRAD 651: 2,2-dimethoxy-1,2-diphenylethan-1-one, OMNIRAD 184: 1-hydroxy-cyclohexyl-phenyl-ketone, OMNIRAD 2959: 1-[4-(2-hydroxyethoxy)-phenyl]-2-hydroxy-2-methyl-1-propan-1-one, OMNIRAD 127: 2-hydroxy-1-{4-[4-(2-hydroxy-2-methyl-propionyl)-benzyl]phenyl}-2-methyl-propan-1-one, OMNIRAD 907: 2-methyl-1-(4-methylthiophenyl)-2-morpholinopropan-1-one, OMNIRAD 369: 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl)-butanone-1, OMNIRAD 379: 2-(dimethylamino)-2-[(4-methylphenyl)methyl]-1-[4-(4-morpholinyl)phenyl]-1-butanone, OMNIRAD 819: bis(2,4,6-trimethylbenzoyl)-phenylphosphine oxide, OMNIRAD 784: bis(η5-2,4-cyclopentadien-1-yl)-bis(2,6-difluoro-3-(1H-pyrrol-1-yl)-phenyl)titanium, OMNIRAD OXE 01: 1,2-octanedione, 1-[4-(phenylthio)-, 2-(O-benzoyloxime)], OMNIRAD OXE 02: ethanone, 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]-, 1-(0-acetyloxime), OMNIRAD261, OMNIRAD369, OMNIRAD500, DAROCUR 1173: 2-hydroxy-2-methyl-1-phenyl-propan-1-one, DAROCUR TPO: 2,4,6-trimethylbenzoyl-diphenyl-phosphine oxide, DAROCUR1116, DAROCUR2959, DAROCUR1664, DAROCUR4043, OMNIRAD 754 Oxyphenylacetic acid: Mixture of 2-[2-oxo-2-phenylacetoxyethoxy]ethyl ester and oxyphenylacetic acid, 2-(2-hydroxyethoxy)ethyl ester; OMNIRAD 500: A mixture of OMNIRAD 184 and benzophenone (1 :1), OMNIRAD 1300: a mixture of OMNIRAD 369 and OMNIRAD 651 (3:7), OMNIRAD 1800: a mixture of CGI403 and OMNIRAD 184 (1:3), OMNIRAD 1870: a mixture of CGI403 and OMNIRAD 184 (7:3), DAROCUR 4265: A mixture of DAROCUR TPO and DAROCUR 1173 (1:1). OMNIRAD is manufactured by BASF, and DAROCUR is manufactured by Merck Japan.

[0428] In addition to the above, other components include, for example, tetraethoxysilane, methyltrimethoxysilane, 3-aminopropyltrimethoxysilane, 3-glycidoxypropyltrimethoxysilane, and methyltriacetoxysilane.

[0429] The viscosity of the liquid repellent agent is preferably 0.1 cps or more, more preferably 0.5 cps or more, even more preferably 1.0 cps or more, and even more preferably 10 cps or more, for example, 50 cps or more, 100 cps or more, 300 cps or more, or 500 cps or more. The viscosity of the liquid repellent agent is preferably 10,000 cps or less, more preferably 8,000 cps or less, and even more preferably 6,000 cps or less. For example, the viscosity of the liquid repellent agent is preferably 0.1 to 10,000 cps, more preferably 0.5 to 6,000 cps, for example, 10 to 8,000 cps, 100 to 6,000 cps, or 500,000 cps.

[0430] [Step A3] Placing conductive particles on the first electrode Next, conductive particles 14 are disposed on the first electrode 12 (FIG. 3). The conductive particles 14 will later electrically connect the first electrode 12 and the second electrode 22.

[0431] The conductive particles 14 are preferably arranged by applying a resin paint containing the conductive particles 14 .

[0432] The conductive particles 14 may preferably be particles containing a metal. The particles containing a metal may be particles made entirely of metal, or may be particles in which a core material (e.g., a resin core material) is coated with a metal.

[0433] The metal is not particularly limited, but examples thereof include Ni, Au, Ag, Cu, Fe, Al, Zn, Co, Pd, Pb, and Cr. The metal may also be solder. Examples of the solder that can be used include Sn-Pb, Pb-Sn-Sb, Sn-Sb, Sn-Pb-Bi, Bi-Sn, Sn-Cu, Sn-Pb-Cu, Sn-In, Sn-Ag, Sn-Pb-Ag, and Pb-Ag solders, as defined in JIS Z3282-1999. Only one type of such metal may be used, or two or more types may be used in combination.

[0434] The conductive particles 14 may be metal-coated resin particles. Examples of resin particles that can be used include epoxy resin, phenol resin, acrylic resin, acrylonitrile-styrene (AS) resin, benzoguanamine resin, divinylbenzene resin, styrene resin, styrene-divinylbenzene copolymer, benzoguanamine resin, cross-linked polystyrene resin, and styrene-silica composite resin.

[0435] The average particle diameter of the conductive particles 14 is not particularly limited, but may be, for example, 0.1 to 50 μm, and preferably 1 to 30 μm. The average particle diameter of the conductive particles 14 can be determined by measuring several or several tens, for example, 10 conductive particles 14 within a predetermined range using, for example, a particle size distribution analyzer or a scanning electron microscope (SEM) and averaging the measured values.

[0436] The shape of the conductive particles 14 is not particularly limited, and may be spherical, flaky, or the like.

[0437] The surfaces of the conductive particles 14 may be coated with an insulating layer, which may be made of, for example, the same resin as the resin particles.

[0438] The resin in the resin paint may preferably be an epoxy paint, an acrylic paint, a melamine paint, a urethane paint, or a silicone paint.

[0439] The conductive particles 14 in the resin coating preferably have a solids concentration of 1 to 50% by volume, more preferably 10 to 40% by volume, even more preferably 20 to 40% by volume, and even more preferably 25 to 35% by volume.

[0440] The resin paint containing the conductive particles 14 may preferably have a viscosity of 100 cps or less, more preferably 80 cps or less, even more preferably 60 cps or less, and even more preferably 50 cps or less. By lowering the viscosity of the resin paint, it is possible to prevent the paint from remaining on the liquid-repellent layer. The resin paint containing the conductive particles 14 may have a viscosity of, for example, 1 cps or more, 5 cps or more, 10 cps or more, or 20 cps or more.

[0441] The method for applying the resin coating containing the conductive particles 14 is not particularly limited, and methods such as dispenser application, spray application, brush application, flow coating, curtain coating, and immersion can be used.

[0442] [Step A4] Placing a resin composition on the first member on which the liquid-repellent layer and conductive particles are placed Next, a resin composition 15 is placed on the first member 11 on which the liquid-repellent layer 13 and the conductive particles 14 are placed (FIG. 4).

[0443] The resin composition 15 is preferably disposed to the same height as the conductive particles 14 .

[0444] The resin composition 15 may include a thermosetting resin or a photocurable resin, such as an epoxy resin or an acrylic resin.

[0445] Examples of the epoxy resin include bisphenol A epoxy resin, bisphenol F epoxy resin, novolac epoxy resin, modified epoxy resins thereof, etc. These resins may be used alone or in combination of two or more.

[0446] Examples of the acrylic resin include methyl (meth)acrylate, ethyl (meth)acrylate, isopropyl (meth)acrylate, isobutyl (meth)acrylate, phosphate group-containing (meth)acrylate, ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, trimethylolpropane tri(meth)acrylate, dimethyloltricyclodecane di(meth)acrylate, tetramethylene glycol tetra(meth)acrylate, 2-hydroxy-1,3-diacryloxypropane, 2,2-bis[4-(acryloxymethoxy)phenyl]propane, 2,2-bis[4-(acryloxyethoxy)phenyl]propane, dicyclopentenyl (meth)acrylate, tricyclodecanyl (meth)acrylate, tris(acryloxyethyl)isocyanurate, urethane (meth)acrylate, and epoxy (meth)acrylate. The term "(meth)acrylate" encompasses acrylate and methacrylate, and these resins may be used alone or in combination of two or more.

[0447] The resin composition 15 may further contain a cationic curing agent, a radical curing agent, or a silane coupling agent.

[0448] Examples of the cationic curing agent include sulfonium salts and onium salts. The cationic curing agent is preferably an aromatic sulfonium salt.

[0449] Examples of the silane coupling agent include an epoxy-based silane coupling agent, an acrylic-based silane coupling agent, a thiol-based silane coupling agent, and an amine-based silane coupling agent.

[0450] The resin composition 15 preferably has a viscosity of 50 cps or more, more preferably 80 cps or more, even more preferably 100 cps or more, and even more preferably 200 cps or more. The upper limit of the viscosity of the resin composition 15 is not particularly limited as long as it is a viscosity that allows application, and can be, for example, 10,000 cps or less.

[0451] The method for applying the resin composition 15 is not particularly limited, and a dispenser, a sprayer, or the like can be used.

[0452] As a result of the above, the first intermediate member 10 is obtained.

[0453] [Process B] Step B comprises the following steps: (B1) preparing a second member having a second electrode formed in a predetermined pattern; (B2) placing a resin composition on the second member; to obtain the second intermediate member.

[0454] [Step B1] Preparing a second member having a second electrode formed in a predetermined pattern First, the second member 21 is prepared.

[0455] The second member 21 is typically a wiring substrate, and can be the same as the above-described first member 11. The first member 11 and the second member 21 may be made of the same material or different materials, but are preferably made of the same material.

[0456] Next, the second electrode 22 is formed in a predetermined pattern on the second member 21 (FIG. 5).

[0457] The material constituting the second electrode 22 can be the same as the material constituting the first electrode 12. The first electrode 12 and the second electrode 22 may be made of the same material or different materials, but are preferably made of the same material.

[0458] The second electrode 22 can be formed by the same method as the first electrode 12, and photolithography is preferred.

[0459] The second electrode 22 is preferably disposed at a position corresponding to the first electrode 12. That is, when the first intermediate member 10 and the second intermediate member 20 are stacked with the first electrode 12 and the second electrode 22 facing each other, the second electrode 22 is disposed at a position corresponding to the first electrode 12. The first electrode 12 and the second electrode 22 do not need to be in positions corresponding to each other perfectly, but only need to correspond over a certain area, for example, 50% or more, preferably 60% or more, for example, 70% or more or 80% or more.

[0460] The wiring pattern of the second electrodes 22 may be the same as that of the first electrodes 12. That is, the second electrodes 22 may have the same width, thickness, and spacing as the first electrodes 12.

[0461] [Step B2] Placing a resin composition on the second member Next, a resin composition 23 is placed on the second member 21 (FIG. 6).

[0462] The resin composition 23 is preferably disposed to the same height as the second electrode 21 or higher, and preferably to substantially the same height.

[0463] The resin composition 23 may be the same as the above-described resin composition 15. Preferably, the resin composition 15 and the resin composition 23 are the same resin composition.

[0464] In this way, the second intermediate member 20 is obtained.

[0465] [Process C] Step C includes joining the first intermediate member obtained in step A and the second intermediate member obtained in step B with their electrode surfaces facing each other, and electrically connecting the first electrode and the second electrode via conductive particles (Figure 7).

[0466] The first intermediate member 10 and the second intermediate member 20 are preferably bonded together by thermocompression. By thermocompression, the first intermediate member 10 and the second intermediate member 20 are bonded together, and further, the first electrode 12 and the second electrode 22 are electrically connected together. If the conductive particles 14 are coated with an insulating layer, the coating is destroyed during thermocompression, exposing the internal conductive material, thereby electrically connecting the first electrode 12 and the second electrode 22 together.

[0467] The temperature during thermocompression bonding may be preferably 50 to 300°C, more preferably 120 to 200°C.

[0468] The pressure during thermocompression bonding can be, for example, 0.01 to 5 MPa, and preferably 0.1 to 3 MPa.

[0469] In this manner, the laminated structure 1 can be obtained.

[0470] The present disclosure provides a laminated structure 1 having the above-described structure.

[0471] That is, the present disclosure provides a method for manufacturing a semiconductor device comprising: a first member; a first electrode 12 formed in a predetermined pattern on a first member 11; a liquid-repellent layer 13 disposed between the first electrodes 12; A second member 21; a second electrode 22 formed in a predetermined pattern on the second member 21; Conductive particles 14 disposed between the first electrode 12 and the second electrode 22; a resin layer 30 disposed between the first member 11 and the second member 12; and The first electrode 12 and the second electrode 22 are electrically connected via conductive particles 14. A laminate structure is provided.

[0472] The first member 11, the first electrode 12, the liquid-repellent layer 13, the conductive particles 14, the second member 21, and the second electrode 22 are as described in the method for manufacturing the laminated structure. The resin layer 30 corresponds to a bond between the resin composition 15 and the resin composition 23. [Example]

[0473] Example 1 A fluoropolyether group-containing silane compound (A) was applied between interdigitated electrodes, consisting of 100 μm-wide, 3 μm-high copper electrodes wired at a 100 μm pitch on a 1.6 mm-thick glass epoxy substrate, using a dispenser (Engineer Lab). The substrate was then left at room temperature for 24 hours. Next, a conductive paint consisting of 100 g of epoxy resin (EPOFIX-Resin) with 5 g of conductive particles (Micropearl AU203) and diluted with 80 g of methyl isobutyl ketone was applied to the electrodes with a brush to a thickness of 2–3 μm to create Substrate A. Next, a paint consisting of 100 g of epoxy resin (EPOFIX-Resin) and 80 g of methyl isobutyl ketone was applied between the other interdigitated electrode to create Electrode B. Electrodes A and B were then dried at 100°C for 5 minutes and then pressed together at 180°C for 30 seconds under 0.5 MPa to create a laminated substrate.

[0474] Compound (A) (CH3O)2CH3SiCH2CH2CH2N(X)CH2CH2NHCOCF2O(CF2CF2O) 12 (CF2O)12CF2CONHCH2CH2N(X)CH2CH2CH2SiCH3(OCH3)2 X=-CONHCH2CH2OCOCH=CH2

[0475] Example 2 A fluoropolyether group-containing silane compound (B) was applied between interdigitated electrodes, consisting of 100 μm-wide, 3 μm-high copper electrodes wired at a 100 μm pitch on a 1.6 mm-thick glass epoxy substrate, using a dispenser (Engineer Lab). The substrate was then left at room temperature for 24 hours. Next, a conductive paint consisting of 100 g of epoxy resin (EPOFIX-Resin) with 5 g of conductive particles (Micropearl AU203) diluted with 80 g of methyl isobutyl ketone was applied to the electrodes with a brush to a thickness of 2–3 μm to create Substrate A. Next, a paint consisting of 100 g of epoxy resin (EPOFIX-Resin) and 80 g of methyl isobutyl ketone was applied between the other interdigitated electrodes to create Electrode B. Electrodes A and B were then dried at 100°C for 5 minutes and then pressed together at 180°C for 30 seconds under 0.5 MPa to create a laminated substrate.

[0476] Compound (B) TIFF2025167878000033.tif20105n≒20, t=1~6, average is about 3

[0477] (evaluation) A continuity test was performed using a probe tester on the lead wires of the laminated substrates of Examples 1 and 2, and no defects were found at any of the 200 measurement points. In other words, it was confirmed that the substrates were laminated without any short circuits. [Explanation of symbols]

[0478] 1...Laminated structure, 10...First intermediate member, 11...First member, 12...First electrode, 13...liquid-repellent layer, 14...conductive particles, 15...resin composition, 20...second intermediate member, 21... second member, 22... second electrode, 23... resin composition, 30... resin layer,

Claims

1. A method for manufacturing a laminated structure, comprising: (Process A) providing a first member having a first electrode formed in a predetermined pattern; disposing a liquid-repellent layer between the patterns of the first electrode; disposing conductive particles on the first electrode; disposing a resin composition on the first member on which the liquid-repellent layer and the conductive particles are disposed; to obtain a first intermediate member; (Process B) providing a second member having a second electrode formed in a predetermined pattern; disposing a resin composition on the second member; to obtain a second intermediate member; (Process C) bonding the first intermediate member obtained in step A and the second intermediate member obtained in step B so that their electrode-containing surfaces face each other, and electrically connecting the first electrode and the second electrode via the conductive particles; A method for manufacturing a laminated structure, comprising:

2. The manufacturing method according to claim 1 , wherein the first electrode has a width of 10 μm or more.

3. The manufacturing method according to claim 1 , wherein the first electrode has a thickness of 1 μm or more.

4. The manufacturing method according to claim 1 , wherein the distance between adjacent first electrodes is 10 μm to 200 μm.

5. The manufacturing method according to claim 1 , wherein the liquid-repellent layer is formed from a liquid-repellent agent containing a fluorine-containing compound.

6. The fluorine-containing compound is represented by the following formula (1) or (2): 【Chemistry 1】 [In the formula: R Ｆ１ are each independently Rf １ -R Ｆ -O ｑ - and; R Ｆ２ is -Rf ２ ｐ -R Ｆ -O ｑ - and; Rf １ each independently represents a C optionally substituted by one or more fluorine atoms; １－１６ is an alkyl group; Rf ２ is a C optionally substituted by one or more fluorine atoms; １－６ an alkylene group; R Ｆ are each independently a divalent fluoropolyether group; p is 0 or 1; Each q is independently 0 or 1; R Ｓｉ are each independently a hydroxyl group, a hydrolyzable group, a hydrogen atom, or a monovalent group containing a Si atom bonded to a monovalent organic group; At least one R Ｓｉ is a monovalent group containing a Si atom to which a hydroxyl group or a hydrolyzable group is bonded; X Ａ are each independently a single bond or a divalent to decavalent organic group; α is an integer from 1 to 9; β is an integer from 1 to 9; Each γ is independently an integer from 1 to 9. or a fluorine-containing compound represented by Formula (3), (4) or (5): 【Chemistry 2】 [In the formula: R Ｆ１ is Rf １ -R Ｆ -O ｑ - and R Ｆ２ is -Rf ２ ｐ -R Ｆ -O ｑ - and Rf １ is a C optionally substituted by one or more fluorine atoms; １－１６ is an alkyl group, Rf ２ is a C optionally substituted by one or more fluorine atoms; １－６ is an alkylene group, R Ｆ are each independently a divalent fluoropolyether group; p is 0 or 1; Each q is independently 0 or 1; X ＡＡ are each independently a single bond or a divalent organic group, X Ｂ are each independently an (m+1)-valent group, However, in each formula, at least one X Ｂ is an (m+1)-valent group containing a hydrolyzable silyl group, R Ａｃ are each independently -X Ｄ -X Ｅ (-X Ｆ -OCO-CR ５ =CH ２ ) ｍ’ and X Ｄ is a single bond or a divalent group, X Ｅ is a single bond or an (m'+1)-valent group, X Ｆ are each independently a single bond or a divalent group, R ５ is a hydrogen atom, a halogen atom, or a monovalent organic group having 1 to 8 carbon atoms, m' is an integer from 1 to 10, m is independently an integer from 0 to 10; R ａ are each independently an (m+2)-valent organic group, m3 is an integer from 0 to 4, However, at least one of m and m3 is 1 or more, R ｇ are each independently -NR ｃ CO-R ｅ -, -NR ｃ COO-R ｅ - or -NR ｃ CONR ｃ -R ｅ -, where these groups are represented by R ａ binds to R ｃ are each independently a hydrogen atom, C １－６ alkyl group, or C ６－１６ is an aryl group, R ｅ are each independently a single bond or a divalent organic group, x is an integer of 1 or more. The method according to claim 1, wherein the fluorine-containing compound is represented by the formula:

7. The manufacturing method according to claim 1 , wherein the conductive particles are particles containing a metal.

8. The manufacturing method according to claim 1 , wherein the conductive particles have surfaces coated with an insulating layer.

9. The manufacturing method according to claim 1 , wherein the step of arranging the conductive particles is carried out by applying a resin coating material containing the conductive particles.

10. The manufacturing method according to claim 1 , wherein the resin coating has a viscosity of 50 cps or less.

11. The method according to claim 1 , wherein the resin composition contains a bisphenol A type epoxy resin, a bisphenol F type epoxy resin, a novolac type epoxy resin, or a modified epoxy resin thereof.

12. The manufacturing method according to claim 1 , wherein the resin composition has a viscosity of 50 cps or more.

13. The manufacturing method according to claim 1 , wherein the first intermediate member and the second intermediate member are joined together by thermocompression bonding.

14. A first member; a first electrode formed in a predetermined pattern on the first member; a liquid-repellent layer disposed between the first electrodes; A second member; a second electrode formed in a predetermined pattern on the second member; Conductive particles disposed between the first electrode and the second electrode; a resin layer disposed between the first member and the second member; and the first electrode and the second electrode are electrically connected via the conductive particles. Laminated structure.

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