Transport device and end effector

Abstract

To reduce footprint of the whole system including a transport device.SOLUTION: A transport device for simultaneously or individually transporting a wafer and a circular consumable component comprises an end effector, an arm, and a controller. The consumable component can be disposed in a wafer processing module and an external diameter of the consumable component is larger than an external diameter of the wafer. The end effector is configured to simultaneously or individually mount the wafer and the consumable component. The arm is configured to move the end effector. When transporting the consumable component, the controller controls the arm so that the consumable component is mounted on the end effector so that the center of gravity of the consumable component agrees with a first position. When transporting the wafer, the controller controls the arm so that the wafer is mounted on the end effector so that the center of gravity of the wafer agrees with a second position between the first position and a tip of the end effector.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] Various aspects and embodiments of the present disclosure relate to transport devices, transport systems, and end effectors. [Background technology]

[0002] For example, Patent Document 1 below discloses a transfer device that transfers not only wafers but also consumable parts within a processing device. This allows consumable parts to be replaced without opening the chamber of the processing device to the atmosphere, thereby shortening the downtime of the processing device that performs processing at low pressure. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2020-96149 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a transport device, a transport system, and an end effector that can reduce the footprint of the entire system including the transport device. [Means for solving the problem]

[0005] One aspect of the present disclosure provides a transport device for simultaneously or separately transporting a wafer and a consumable part having a circular outer shape, the transport device comprising an end effector, an arm, and a control device. The consumable part is positionable within a wafer processing module, and the outer diameter of the consumable part is larger than the outer diameter of the wafer. The end effector is configured to simultaneously or separately load the wafer and the consumable part. The arm is configured to move the end effector. When transporting the consumable part, the control device controls the arm to place the consumable part on the end effector so that the center of gravity of the consumable part coincides with a first position. When transporting a wafer, the control device controls the arm to place the wafer on the end effector so that the center of gravity of the wafer coincides with a second position between the first position and the tip of the end effector. [Effects of the Invention]

[0006] According to various aspects and embodiments of the present disclosure, the footprint of the entire system, including the transport device, can be reduced. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a plan view illustrating an example of a processing system according to an embodiment. [Figure 2] FIG. 2 is a schematic cross-sectional view showing an example of a processing module. [Figure 3] FIG. 3 is a diagram illustrating an example of an ashing module. [Figure 4] FIG. 4 is a plan view showing an example of the end effector according to the first embodiment. [Figure 5] FIG. 5 is a side view illustrating an example of the end effector according to the first embodiment. [Figure 6] FIG. 6 is a plan view showing an example of the positional relationship between the wafer and the edge ring when they are placed on the end effector in the vacuum transfer module. [Figure 7] FIG. 7 is a plan view showing an example of the end effector when transferring a wafer in the first embodiment. [Figure 8] FIG. 8 is a side view showing an example of the end effector when transferring a wafer in the first embodiment. [Figure 9] FIG. 9 is a diagram showing an example of the positional relationship between the end effector and the ashing module when a wafer is carried into the ashing module in the comparative example. [Figure 10] FIG. 10 is a diagram showing an example of the positional relationship between the end effector and the ashing module when a wafer is carried into the ashing module in this embodiment. [Figure 11] FIG. 11 is a plan view showing an example of the end effector when transporting the edge ring in the first embodiment. [Figure 12] FIG. 12 is a side view showing an example of the end effector when transporting the edge ring in the first embodiment. [Figure 13] FIG. 13 is a flowchart showing an example of a transport method according to the first embodiment. [Figure 14] FIG. 14 is a plan view showing an example of the positional relationship between the wafer and the edge ring when they are placed on the end effector in the atmospheric transfer module. [Figure 15] FIG. 15 is a side view showing another example of the end effector according to the second embodiment. [Figure 16] FIG. 16 is a side view showing an example of the end effector when simultaneously transporting a wafer and an edge ring in the second embodiment. [Figure 17] FIG. 17 is a plan view showing an example of the positional relationship between a wafer and an edge ring when the wafer and the edge ring are simultaneously transported in the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, embodiments of a conveying device, a conveying system, and an end effector will be described in detail with reference to the drawings. Note that the following embodiments do not limit the disclosed conveying device, conveying system, and end effector.

[0009] When wafers or consumable parts are transported, they are placed on an end effector provided at the tip of a robot arm so that their center of gravity is at a predetermined position on the end effector. If the consumable part is a ring-shaped part larger than the wafer, such as an edge ring, placing the consumable part too close to the tip of the end effector may cause the consumable part to fall off the end effector as the end effector moves. Therefore, it is necessary to avoid placing the consumable part too close to the tip of the end effector. This allows the consumable part to be placed on the end effector so that its center of gravity is away from the tip of the end effector.

[0010] On the other hand, when transporting a wafer that has an outer size smaller than the consumable part, if the wafer is placed on the end effector so that the center of gravity of the consumable part and the center of gravity of the wafer are aligned when transporting the consumable part, the tip of the end effector will extend beyond the area below the wafer. If a large portion of the end effector extends beyond the area below the wafer, the end effector will get in the way when transporting the wafer into equipment that does not have space to accommodate consumable parts, making it difficult to transport the wafer to a predetermined position within the equipment.

[0011] To allow the end effector to move the wafer to a predetermined position within the equipment without getting in the way, it is possible to expand the space within the equipment that does not have space for accommodating consumable parts, but this would increase the footprint of such an equipment and therefore the footprint of the entire system.

[0012] Therefore, the present disclosure provides a technique that can reduce the footprint of the entire system including the transport device.

[0013] (First embodiment) [Configuration of Processing System 1] Fig. 1 is a plan view showing an example of the configuration of a processing system 1 according to an embodiment. For convenience, Fig. 1 shows some of the internal components of the device in a transparent manner. The processing system 1 includes a device main body 10 and a control device 100 that controls the device main body 10.

[0014] The apparatus main body 10 includes a vacuum transfer module 11, a plurality of processing modules 12, a plurality of ashing modules 13, a plurality of load lock modules 14, and an atmospheric transfer module 15. The plurality of processing modules 12 are connected to the sidewall of the vacuum transfer module 11 via gate valves G1. The processing modules 12 are an example of a processing apparatus. In the example of FIG. 1, eight processing modules 12 are connected to the vacuum transfer module 11, but the number of processing modules 12 connected to the vacuum transfer module 11 may be seven or less, or nine or more. Each processing module 12 is an example of a first wafer processing module.

[0015] Each processing module 12 performs processing such as etching and film formation on a wafer W to be processed. Fig. 2 is a schematic cross-sectional view showing an example of the processing module 12. The processing module 12 includes a chamber 120, an RF (Radio Frequency) power supply unit 123, a gas supply unit 124, and an exhaust system 125.

[0016] An opening is formed in a sidewall of the chamber 120, and the opening is opened and closed by a gate valve G1. The chamber 120 has a support 121 and an upper showerhead assembly 122. The support 121 is disposed in a lower region of a processing space 120S in the chamber 120. The upper showerhead assembly 122 is disposed above the support 121 and can function as part of a top plate of the chamber 120.

[0017] The support 121 is configured to support the wafer W in the processing space 120S. In this embodiment, the support 121 includes an edge ring ER, an electrostatic chuck 121a, and a lower electrode 121b. The electrostatic chuck 121a is disposed on the lower electrode 121b and is configured to support the wafer W on the upper surface of the electrostatic chuck 121a. In this embodiment, the electrostatic chuck 121a has a circular outer shape. The electrostatic chuck 121a is an example of a consumable part. The edge ring ER is formed in an annular shape and is provided on the upper peripheral surface of the lower electrode 121b. The edge ring ER is disposed on the upper peripheral surface of the lower electrode 121b so as to surround the electrostatic chuck 121a and the wafer W. In this embodiment, the edge ring ER has a circular outer shape. The edge ring ER is an example of a consumable part and an example of an annular part.

[0018] The upper showerhead assembly 122 is configured to supply one or more gases from the gas supply unit 124 into the processing space 120S. A cover member 122d is detachably provided on the lower surface of the upper showerhead assembly 122. In this embodiment, the cover member 122d has a circular outer shape. The cover member 122d is an example of a consumable part. In this embodiment, the upper showerhead assembly 122 has a gas inlet 122a and a gas diffusion chamber 122b. The upper showerhead assembly 122 has multiple gas outlets 122c formed therein, and the gas diffusion chamber 122b and the processing space 120S are fluidly connected via the multiple gas outlets 122c. In this embodiment, the upper showerhead assembly 122 is configured to supply one or more gases from the gas inlet 122a into the processing space 120S via the gas diffusion chamber 122b and the multiple gas outlets 122c.

[0019] The gas supply unit 124 includes a gas source 124a and a flow controller 124b. The gas source 124a supplies process gases such as etching gases and deposition gases. The flow controller 124b may include, for example, a mass flow controller or a pressure-controlled flow controller. The gas supply unit 124 may also include one or more flow modulation devices that modulate or pulse the flow rates of one or more process gases.

[0020] The RF power supply unit 123 is configured to supply one or more RF powers to one or more electrodes, such as the lower electrode 121b, the upper showerhead assembly 122, or both the lower electrode 121b and the upper showerhead assembly 122. In this embodiment, the RF power supply unit 123 includes two RF generators 123a and 123b and two matchers 123c and 123d. The RF power supply unit 123 in this embodiment is configured to supply a first RF power from the RF generator 123a to the lower electrode 121b via the matcher 123c. The RF spectrum encompasses a portion of the electromagnetic spectrum ranging from 3 Hz to 3000 GHz. For electronic material processes such as semiconductor processes, the frequency of the RF spectrum used for plasma generation is preferably within the range of 100 kHz to 3 GHz, more preferably 200 kHz to 150 MHz. For example, the frequency of the first RF power may be within the range of 27 [MHz] to 100 [MHz].

[0021] Furthermore, RF power supply unit 123 in this embodiment is configured to supply second RF power from RF generating unit 123b to lower electrode 121b via matching unit 123d. For example, the frequency of the second RF power may be within a range of 400 kHz to 13.56 MHz. Alternatively, RF power supply unit 123 may have a DC (Direct Current) pulse generating unit instead of RF generating unit 123b.

[0022] Furthermore, although not shown, other embodiments are contemplated herein. For example, in an alternative embodiment of the RF power supply 123, an RF generator may be configured to supply a first RF power to the lower electrode 121b, and another RF generator may be configured to supply a second RF power to the lower electrode 121b. Yet another RF generator may be configured to supply a third RF power to the upper showerhead assembly 122. Additionally, in other alternative embodiments, a DC voltage may be applied to the upper showerhead assembly 122. Furthermore, in various embodiments, the amplitude of one or more RF powers (i.e., the first RF power, the second RF power, etc.) may be pulsed or modulated. Amplitude modulation may include pulsing the amplitude of the RF power between an on state and an off state or between multiple different on states. Furthermore, phase matching of the RF powers may be controlled, and the phase matching of the amplitude modulation of multiple RF powers may be synchronized or asynchronous.

[0023] The exhaust system 125 is connected to, for example, an exhaust port 120e provided at the bottom of the chamber 120. The exhaust system 125 may include a pressure valve, a vacuum pump such as a turbomolecular pump, a roughing pump, or a combination thereof.

[0024] Returning to FIG. 1 , the explanation will be continued. A plurality of ashing modules 13 are connected to another side wall of the vacuum transfer module 11 via gate valve G2. Each ashing module 13 is an example of a second wafer processing module. The ashing module 13 removes, by ashing, a mask remaining on the wafer W after processing by the processing module 12. As shown in FIG. 3 , for example, a stage 130 on which the wafer W is placed is provided within the ashing module 13. The center of gravity of the stage 130 is at position P0. When the wafer W is loaded into the ashing module 13, the wafer W is placed on the stage 130 so that the center of gravity of the wafer W is located at position P0 of the stage 130. Note that, although two ashing modules 13 are connected to the vacuum transfer module 11 in the example of FIG. 1 , the number of ashing modules 13 connected to the vacuum transfer module 11 may be one or three or more.

[0025] A plurality of load lock modules 14 are connected to the other side wall of the vacuum transfer module 11 via gate valve G3. In the example of Fig. 1, two load lock modules 14 are connected to the vacuum transfer module 11, but the number of load lock modules 14 connected to the vacuum transfer module 11 may be one, or three or more. At least one of the two load lock modules 14 is capable of accommodating a wafer W and an edge ring ER.

[0026] A transfer robot 20a is disposed within the vacuum transfer module 11. The transfer robot 20a has an end effector 21a and an arm 22a. A wafer W and an edge ring ER are placed on the end effector 21a. The arm 22a moves the end effector 21a. The transfer robot 20a moves within the vacuum transfer module 11 along guide rails 110 provided within the vacuum transfer module 11, and transfers the wafer W between the processing module 12, the ashing module 13, and the load lock module 14. The transfer robot 20a may be fixed at a predetermined position within the vacuum transfer module 11 and may not move within the vacuum transfer module 11. The transfer robot 20a is an example of a transfer device and a vacuum transfer robot. The interior of the vacuum transfer module 11 is maintained at a pressure lower than atmospheric pressure.

[0027] One sidewall of each load lock module 14 is connected to the vacuum transfer module 11 via a gate valve G3, and the other sidewall is connected to the atmospheric transfer module 15 via a gate valve G4. When a wafer W is transferred from the atmospheric transfer module 15 into the load lock module 14 via the gate valve G4, the gate valve G4 is closed and the pressure inside the load lock module 14 is reduced from atmospheric pressure to a predetermined pressure. Then, the gate valve G3 is opened and the wafer W inside the load lock module 14 is transferred into the vacuum transfer module 11 by the transfer robot 20a.

[0028] Furthermore, with the pressure inside the load lock module 14 lower than atmospheric pressure, the transfer robot 20a transfers the wafer W from the vacuum transfer module 11 into the load lock module 14 via the gate valve G3, and the gate valve G3 is closed. Then, the pressure inside the load lock module 14 is increased to atmospheric pressure. Then, the gate valve G4 is opened, and the wafer W inside the load lock module 14 is transferred into the atmospheric transfer module 15. The same applies to the transfer of the edge ring ER.

[0029] A plurality of load ports 16 are provided on the side wall of the atmospheric transfer module 15 opposite to the side wall on which the gate valve G4 is provided. A container such as a FOUP (Front Opening Unified Pod) capable of accommodating a plurality of wafers W is connected to each load port 16. The atmospheric transfer module 15 may also be provided with an aligner module or the like that changes the orientation of the wafers W. A container capable of accommodating an edge ring ER is connected to one of the plurality of load ports 16.

[0030] A transfer robot 20b is provided within the atmospheric transfer module 15, and the transfer robot 20b has an end effector 21b and an arm 22b. The transfer robot 20b is an example of an atmospheric transfer robot, and the end effector 21b provided by the transfer robot 20b is an example of an additional end effector. The pressure within the atmospheric transfer module 15 is atmospheric pressure. The transfer robot 20b within the atmospheric transfer module 15 moves within the atmospheric transfer module 15 along a guide rail 150 and transfers wafers W or edge rings ER between the load lock module 14 and a container connected to the load port 16. Note that the transfer robot 20b may be fixed at a predetermined position within the atmospheric transfer module 15 and may not move within the atmospheric transfer module 15. An FFU (Fan Filter Unit) or the like is provided above the atmospheric transfer module 15, and air from which particles and the like have been removed is supplied from above into the atmospheric transfer module 15, forming a downflow within the atmospheric transfer module 15. In this embodiment, the atmosphere inside the atmospheric transfer module 15 is atmospheric pressure, but in another embodiment, the pressure inside the atmospheric transfer module 15 may be controlled to be positive pressure. This makes it possible to prevent particles and the like from entering the atmospheric transfer module 15 from the outside.

[0031] The control device 100 has a memory, a processor, and an input / output interface. Data such as recipes, programs, etc. are stored in the memory. The memory is, for example, a random access memory (RAM), a read-only memory (ROM), a hard disk drive (HDD), or a solid state drive (SSD). The processor executes a program read from the memory to control each part of the device main body 10 via the input / output interface based on data such as recipes stored in the memory. The processor is, for example, a central processing unit (CPU) or a digital signal processor (DSP).

[0032] [Details of end effector 21a] FIG. 4 is a plan view showing an example of the end effector 21a in the first embodiment. While FIG. 4 illustrates the end effector 21a of the transfer robot 20a, the end effector 21b of the transfer robot 20b has a similar configuration. The end effector 21a includes a main body 210 having an upper surface, a plurality of first holders 211a to 211c disposed on the upper surface of the main body 210, and a plurality of second holders 212a to 212c disposed on the upper surface of the main body 210. Each of the first holders 211a to 211c is formed of an elastic material such as rubber and holds an edge ring ER. Each of the second holders 212a to 212c is formed of an elastic material such as rubber and holds a wafer W. Each of the first holders 211a to 211c is an example of a consumable part support pad. Each of the plurality of second holding portions 212a to 212c is an example of a wafer support pad.

[0033] The main body 210 has regions R1, R2, and R3. Regions R1 and R2 overlap each other when viewed from direction D shown in FIG. 4. The first retaining portion 211a and the second retaining portion 212a are disposed within region R1, the first retaining portion 211b and the second retaining portion 212b are disposed within region R2, and the first retaining portion 211c and the second retaining portion 212c are disposed within region R3. Region R1 is an example of a first leading edge region, region R2 is an example of a second leading edge region, and region R3 is an example of a rear edge region. Distance d is an example of a first direction. The first retaining portion 211a is an example of a first consumable part support pad, the first retaining portion 211b is an example of a second consumable part support pad, and the first retaining portion 211c is an example of a third consumable part support pad. Also, second holding portion 212a is an example of a first wafer support pad, second holding portion 212b is an example of a second wafer support pad, and second holding portion 212c is an example of a third wafer support pad.

[0034] In the transfer robot 20b provided in the atmospheric transfer module 15, each of the first holders 211a to 211c and the second holders 212a to 212c may be a vacuum pad that sucks air to hold a member.

[0035] Fig. 5 is a side view showing an example of the end effector 21a in the first embodiment. Fig. 5 illustrates the end effector 21a possessed by the transport robot 20a, but the end effector 21b possessed by the transport robot 20b has a similar configuration. The height of the first holders 211a to 211c from the top surface of the main body 210 is h2, and the height of the second holders 212a to 212c from the top surface of the main body 210 is h1. In this embodiment, h1 is higher than h2. h1 is an example of the first height, and h2 is an example of the second height.

[0036] When the edge ring ER is transported, reaction by-products (so-called deposits) may be attached to the transported edge ring ER. Therefore, when the edge ring ER with deposits attached thereto is transported, the deposits attached to the edge ring ER may become particles and fall onto the first holders 211a to 211c, the end effector 21a, etc.

[0037] If the wafer W is held by the first holding parts 211a to 211c with particles adhering to the first holding parts 211a to 211c, the wafer W may be contaminated by particles that have fallen onto the first holding parts 211. In contrast, in this embodiment, the wafer W is not held by the first holding parts 211a to 211c that hold the edge ring ER, and therefore contamination of the wafer W can be suppressed.

[0038] Furthermore, if the height h1 of the second holding units 212a to 212c is equal to or lower than the height h2 of the first holding units 211a to 211c, particles that have fallen from the edge ring ER onto the first holding units 211a to 211c or the end effector 21a may re-adhere to the wafer W during transport of the wafer W. In contrast, in this embodiment, the height h1 of the second holding units 212a to 212c that hold the wafer W is higher than the height h2 of the first holding units 211a to 211c that hold the edge ring ER, and therefore it is possible to prevent particles on the first holding units 211a to 211c or the end effector 21a from re-adhering to the wafer W.

[0039] FIG. 6 is a plan view showing an example of the positional relationship between the wafer W and the edge ring ER when they are placed on the end effector 21a in the vacuum transfer module 11. When the edge ring ER is placed on the end effector 21a, the position of the outline of the edge ring ER is, for example, as shown by circle C1 in FIG. 6. The center of gravity of circle C1 is position P1. That is, when the edge ring ER is placed on the end effector 21a, the edge ring ER is placed on the end effector 21a so that the center of gravity of the edge ring ER is at position P1. Position P1 is an example of a first position.

[0040] When the wafer W is placed on the end effector 21a, the outer shape of the wafer W is positioned as shown in, for example, circle C2 in FIG. 6. The center of gravity of circle C2 is position P2. That is, when the wafer W is placed on the end effector 21a, the wafer W is placed on the end effector 21a so that the center of gravity of the wafer W is at position P2. Position P2 is an example of a second position. Also, as illustrated in FIG. 6, the dimension by which a portion of the wafer W protrudes from the tip of the end effector 21a is the same as the dimension by which a portion of the edge ring ER protrudes from the tip of the end effector 21a.

[0041] In this embodiment, the distance d1 from the tip of the end effector 21a to position P1 is longer than the distance d2 from the tip of the end effector 21a to position P2. That is, when an edge ring ER is transported, the edge ring ER is placed on the end effector 21a so that the center of gravity of the edge ring ER coincides with position P1. Also, when a wafer W is transported, the wafer W is placed on the end effector 21a so that the center of gravity of the wafer W coincides with position P2 between position P1 and the tip of the end effector 21a.

[0042] When the wafer W is transported, the wafer W is placed on the end effector 21a as shown in, for example, FIGS. 7 and 8. FIG. 7 is a plan view showing an example of the end effector 21a when transporting the wafer W in the first embodiment, and FIG. 8 is a side view showing an example of the end effector 21a when transporting the wafer W in the first embodiment. For example, as shown in FIG. 7, the width of the end effector 21a is smaller than the outer shape of the wafer W. When the wafer W is transported, the wafer W is placed on the end effector 21a so that the edge of the wafer W in the width direction of the end effector 21a is located outside the area of ​​the end effector 21a. In the example of FIG. 6, the edge of the wafer W is placed on the end effector 21a so that the edge of the wafer W in the width direction of the end effector 21a protrudes a distance d3 from the area of ​​the end effector 21a.

[0043] Furthermore, when the wafer W is transported, the wafer W is placed on the end effector 21a so that an edge of the wafer W in a direction intersecting the width direction of the end effector 21a is positioned outside the area of ​​the end effector 21a. That is, the wafer W is placed on the end effector 21a so that a portion of the wafer W protrudes from the tip of the end effector 21a. In the example of Fig. 7, the wafer W is placed on the end effector 21a so that an edge of the wafer W is spaced a distance d4 from the tip of the end effector 21a in a direction intersecting the width direction of the end effector 21a (for example, the vertical direction in Fig. 7).

[0044] Consider a comparative example in which the wafer W is placed on the end effector 21a so that the center of gravity of the wafer W coincides with position P1, the same position as the center of gravity of the edge ring ER when the edge ring ER is placed on the end effector 21a. In this case, as shown in FIG. 9, for example, the tip 210e of the end effector 21a abuts the sidewall of the ashing module 13, making it difficult to load the wafer W into the ashing module 13 so that the center of gravity of the wafer W coincides with the center position P0 of the stage 130. In addition to the ashing module 13, even in a container such as a load lock module 14 that only contains wafers W, the tip 210e of the end effector 21a gets in the way, making it difficult to load the wafer W to a predetermined position within the container. Incidentally, when the end effector 21b of the transfer robot 20b loads the wafer W into a FOUP, the tip 210e of the end effector 21b also gets in the way, making it difficult to load the wafer W to a predetermined position within the FOUP.

[0045] In contrast, in this embodiment, the wafer W is placed on the end effector 21a so that the center of gravity of the wafer W is at position P2, which is between position P1 and the tip of the end effector 21a, rather than position P1, which is the position of the center of gravity of the edge ring ER when the edge ring ER is transported. This allows the wafer W to be loaded into the ashing module 13 so that the center of gravity of the wafer W is aligned with the center position P0 of the stage 130, as shown in FIG. 10 . In addition to the ashing module 13, the wafer W can also be loaded to a predetermined position in a container such as a load lock module 14 that accommodates only the wafer W. In this embodiment, the wafer W can also be loaded to a predetermined position in a FOUP when the end effector 21b of the transport robot 20b is used to load the wafer W into the FOUP.

[0046] When the edge ring ER is transported, the edge ring ER is placed on the end effector 21a, for example, as shown in FIGS. 11 and 12 . FIG. 11 is a plan view illustrating an example of the end effector 21a when transporting the edge ring ER in the first embodiment. FIG. 12 is a side view illustrating an example of the end effector 21a when transporting the edge ring ER in the first embodiment. While FIGS. 11 and 12 illustrate the end effector 21a of the transport robot 20a, the same applies to the end effector 21b of the transport robot 20b. For example, as shown in FIGS. 11 and 12 , when the edge ring ER is placed on the end effector 21a, a portion of the edge ring ER protrudes from the tip of the end effector 21a. In this embodiment, the edge ring ER is an annular member, and therefore it is difficult to place it on the tip side of the processing module 12. Therefore, in this embodiment, the edge ring ER is placed on the end effector 21a so that the center of gravity of the edge ring ER is at position P1, which is farther from the tip of the end effector 21a than position P2, which is the position of the center of gravity of the wafer W when the wafer W is being transported. This allows the end effector 21a to transport the edge ring ER stably.

[0047] [Transportation method] Fig. 13 is a flowchart showing an example of a transfer method in the first embodiment. The processing illustrated in the flowchart of Fig. 13 is realized, for example, by the control device 100 controlling each part of the apparatus main body 10. The following description will be given taking the operation of the transfer robot 20a in the vacuum transfer module 11 as an example, but the operation of the transfer robot 20b in the atmospheric transfer module 15 is similar.

[0048] First, the control device 100 determines whether or not to transport the edge ring ER (S10). If the edge ring ER is to be transported (S10: Yes), the control device 100 places the edge ring ER on the end effector 21a so that the center of gravity of the edge ring ER coincides with position P1 (S11). For example, the control device 100 controls the arm 22a of the transport robot 20a so that the edge ring ER is placed on the end effector 21a so that the center of gravity of the edge ring ER coincides with position P1. Step S11 is an example of step a). Then, the control device 100 executes the process shown in step S14.

[0049] On the other hand, if the edge ring ER is not to be transferred (S10: No), the control device 100 determines whether or not to transfer the wafer W (S12). If the wafer W is not to be transferred (S12: No), the control device 100 executes the process shown in step S14.

[0050] On the other hand, if the wafer W is to be transferred (S12: Yes), the control device 100 places the wafer W on the end effector 21a so that the center of gravity of the wafer W coincides with position P2 (S13). For example, the control device 100 controls the arm 22a of the transfer robot 20a so that the wafer W is placed on the end effector 21a so that the center of gravity of the wafer W coincides with position P2. Step S13 is an example of process b).

[0051] Then, the control device 100 determines whether or not the processing of the predetermined number of wafers W has been completed (S14). If the processing of the predetermined number of wafers W has not been completed (S14: No), the processing shown in step S10 is executed again. On the other hand, if the processing of the predetermined number of wafers W has been completed (S14: Yes), the transfer method shown in this flowchart ends.

[0052] In the above-described embodiment, the wafer W and the edge ring ER are mainly placed on the end effector 21a. However, the disclosed technology is not limited to this. The wafer W and the edge ring ER may also be placed on the end effector 21b. FIG. 14 is a plan view showing an example of the positional relationship between the wafer W and the edge ring ER when they are placed on the end effector 21b in the atmospheric transfer module 15. When the edge ring ER is placed on the end effector 21b, the outer shape of the edge ring ER is positioned as shown in, for example, circle C3 in FIG. 14. The center of gravity of circle C3 is position P3. That is, when the edge ring ER is placed on the end effector 21b, the edge ring ER is placed on the end effector 21b so that the center of gravity of the edge ring ER is at position P3. Position P3 is an example of a third position.

[0053] When the wafer W is placed on the end effector 21b, the outer shape of the wafer W is positioned as shown in, for example, circle C4 in Figure 14. The center of gravity of circle C4 is position P4. That is, when the wafer W is placed on the end effector 21b, the wafer W is placed on the end effector 21b so that the center of gravity of the wafer W is at position P4. Position P4 is an example of a fourth position.

[0054] Furthermore, a distance d5 from the tip of the end effector 21b to position P3 is longer than a distance d6 from the tip of the end effector 21b to position P4. That is, when an edge ring ER is transported, the edge ring ER is placed on the end effector 21b so that the center of gravity of the edge ring ER coincides with position P3. Furthermore, when a wafer W is transported, the wafer W is placed on the end effector 21b so that the center of gravity of the wafer W coincides with position P4 between position P3 and the tip of the end effector 21b.

[0055] The embodiment has been described above. As described above, the transfer robot 20 in this embodiment transfers a wafer W and an edge ring ER, which is an example of a consumable part having a circular outer shape. The transfer robot 20 includes an end effector 21, an arm 22, and a control device 100. The edge ring ER can be placed in the processing module 12, and the outer diameter of the edge ring ER is larger than the outer diameter of the wafer W. The end effector 21 is configured to mount the wafer W and the edge ring ER. The arm 22 is configured to move the end effector 21. When transferring the edge ring ER, the control device 100 controls the arm 22 so that the edge ring ER is placed on the end effector 21 so that the center of gravity of the edge ring ER coincides with position P1. When transferring the wafer W, the control device 100 controls the arm 22 so that the wafer W is placed on the end effector 21 so that the center of gravity of the wafer W coincides with position P2, which is between position P1 and the tip of the end effector 21. This allows the wafer W to be loaded into the ashing module 13 or the like that does not have a space to accommodate the edge ring ER, thereby making it possible to reduce the size of the ashing module 13, etc. This allows the footprint of the entire processing system 1 to be reduced.

[0056] In the above embodiment, the width of the end effector 21 is smaller than the outer shape of the wafer W. When the wafer W is transported, the wafer W is placed on the end effector 21 so that a portion of the wafer W protrudes from the tip of the end effector 21. This allows the end effector 21 to transport the wafer W into an ashing module 13 or the like that does not have space to accommodate an edge ring ER.

[0057] Furthermore, in the above-described embodiment, when the edge ring ER is transported, the edge ring ER is placed on the end effector 21 so that a part of the edge ring ER protrudes from the tip of the end effector 21. This reduces the depth of the processing module 12 into which the edge ring ER is carried.

[0058] In the above embodiment, the dimension by which a portion of the wafer W protrudes from the tip of the end effector 21 is the same as the dimension by which a portion of the edge ring ER protrudes from the tip of the end effector 21.

[0059] In the above-described embodiment, the edge ring ER, which is an example of a consumable part, is an annular member. The end effector 21 includes a main body 210 having an upper surface, and a plurality of first holding portions 211a-211c and second holding portions 212a-212c disposed on the upper surface of the main body 210. The height h1 of the second holding portions 212a-212c from the upper surface of the main body 210 is greater than the height h2 of the first holding portions 211a-211c from the upper surface of the main body 210. This prevents particles adhering to the first holding portions 211a-211c or the end effector 21 from adhering again to the wafer W.

[0060] The processing system 1 in the above-described embodiment includes a vacuum transfer module 11, at least one processing module 12, at least one ashing module 13, and a transfer robot 20a. The processing module 12 and the ashing module 13 are connected to the vacuum transfer module 11. The transfer robot 20a is disposed within the vacuum transfer module 11 and transports a wafer W and an edge ring ER, which is an example of a consumable part having a circular outer shape, under a vacuum atmosphere. The edge ring ER can be disposed within at least one processing module 12. The outer diameter of the edge ring ER is larger than the outer diameter of the wafer W. The transfer robot 20a includes an end effector 21a configured to mount the wafer W and the edge ring ER. The end effector 21a is configured to mount the edge ring ER on the end effector 21a so that the center of gravity of the edge ring ER coincides with position P1. Furthermore, the end effector 21a is configured to place the wafer W on the end effector 21a so that the center of gravity of the wafer W coincides with position P2 between position P1 and the tip 210e of the end effector 21a. This allows the wafer W to be carried into the ashing module 13 or the like that does not have space to accommodate the edge ring ER, thereby making it possible to miniaturize the ashing module 13 or the like. This allows the footprint of the entire processing system 1 to be reduced.

[0061] In the above embodiment, the edge ring ER is an annular component. The end effector 21a includes a main body 210 and a plurality of first holding portions 211a-211c and second holding portions 212a-212c. The main body 210 has an upper surface having regions R1, R2, and R3. Regions R1 and R2 overlap each other at a distance d. The second holding portion 212a is disposed within region R1, the second holding portion 212b is disposed within region R2, and the second holding portion 212c is disposed within region R3. The height of the second holding portions 212a-212c is h1. The first holding portion 211a is disposed within region R1 between the second holding portion 212a and the tip 210e of the end effector 21a, the first holding portion 211b is disposed within region R2 between the second holding portion 212b and the tip 210e of the end effector 21a, and the first holding portion 211c is disposed within region R3 between the second holding portion 212c and the rear end of the end effector 21a. The heights of the first holding portions 211a to 211c are h2, which is lower than h1. This prevents particles adhering to the first holding portions 211a to 211c or the end effector 21a from adhering again to the wafer W.

[0062] The processing system 1 in the above-described embodiment further includes at least one load lock module 14, an atmospheric transfer module 15, and a transfer robot 20b. The load lock module 14 is connected to the vacuum transfer module 11, and the atmospheric transfer module 15 is connected to the load lock module 14. The transfer robot 20b is disposed in the atmospheric transfer module 15 and transfers a wafer W and an edge ring ER, which is an example of a consumable part, under atmospheric pressure. The transfer robot 20b includes an end effector 21b configured to place the wafer W and the edge ring ER on the end effector 21b. The end effector 21b is configured to place the edge ring ER on the end effector 21b so that the center of gravity of the edge ring ER coincides with position P3. The end effector 21b is also configured to place the wafer W on the end effector 21b so that the center of gravity of the wafer W coincides with position P4 between position P3 and the tip of the end effector 21b. This allows the wafer W to be carried into a container such as a FOUP that does not have a space for accommodating the edge ring ER.

[0063] The end effector 21a in the above-described embodiment mounts the wafer W and an edge ring ER, which is an example of a consumable part having a circular outer shape. The outer diameter of the edge ring ER is larger than the outer diameter of the wafer W. The end effector 21a includes a main body 210 and a plurality of first holders 211a-211c and second holders 212a-212c. The main body 210 has an upper surface having regions R1, R2, and R3. Regions R1 and R2 overlap each other from the perspective of a distance d. The second holder 212a is disposed within region R1, the second holder 212b is disposed within region R2, and the second holder 212c is disposed within region R3. The height of the second holders 212a-212c is h1. The first holding unit 211a is disposed within region R1 between the second holding unit 212a and the tip 210e of the end effector 21a, the first holding unit 211b is disposed within region R2 between the second holding unit 212b and the tip 210e of the end effector 21a, and the first holding unit 211c is disposed within region R3 between the second holding unit 212c and the rear end of the end effector 21a. The height h1 of the second holding units 212a to 212c is different from the height h2 of the first holding units 211a to 211c. When transporting the edge ring ER, the end effector 21a is configured to place the edge ring ER on the end effector 21a so that the center of gravity of the edge ring ER coincides with position P1. Furthermore, when the wafer W is transported, the wafer W is placed on the end effector 21a so that the center of gravity of the wafer W coincides with position P2 between position P1 and the tip 210e of the end effector 21a. This makes it possible to prevent particles adhering to the first holders 211a to 211c or the end effector 21a from adhering again to the wafer W.

[0064] In the above embodiment, the edge ring ER is an annular component, and the height h1 of the second holding portions 212a to 212c is greater than the height h2 of the first holding portions 211a to 211c. This makes it possible to prevent particles adhering to the first holding portions 211a to 211c or the end effector 21a from adhering again to the wafer W.

[0065] (Second embodiment) The transfer robot 20a and the transfer robot 20b of the first embodiment separately transfer the wafer W and the edge ring ER, which is an example of a consumable part. In contrast, the transfer robot 20a and the transfer robot 20b of the present embodiment can simultaneously transfer the wafer W and the edge ring ER. The following description will focus on the differences from the first embodiment.

[0066] FIG. 15 is a side view showing another example of the end effector 21a in the second embodiment. While FIG. 15 illustrates the end effector 21a of the transfer robot 20a, the end effector 21b of the transfer robot 20b has a similar configuration. In this embodiment, the height h1 of the second holders 212a-212c from the top surface of the main body 210 is lower than the height h2 of the first holders 211a-211c from the top surface of the main body 210, as shown in FIG. 15, for example. This allows non-annular (non-hollow) consumable parts, such as the cover member 122d of the chamber 120 and the electrostatic chuck 121a, and the wafer W to be simultaneously placed on the end effector 21a without interfering with each other, as shown in FIG. 16, for example. The end effector 21a in this embodiment can also simultaneously transport annular consumable parts, such as an edge ring ER, and the wafer W.

[0067] 17, for example, in the end effector 21a of this embodiment, the first holders 211a and 211b that support the consumable parts are disposed outside the circle C2 that indicates the outline position of the wafer W. This allows the end effector 21a to simultaneously place the wafer W and the consumable parts without interference between the first holders 211a and 211b and the wafer W.

[0068] [others] The technology disclosed in this application is not limited to the above-described embodiment, and various modifications are possible within the scope of the gist thereof.

[0069] For example, in each of the above-described embodiments, the outer shape of the consumable parts is circular, but the disclosed technology is not limited to this, and the outer shape of the consumable parts may be a shape other than circular, such as rectangular, polygonal, or partially arc-shaped.

[0070] It should be noted that the disclosed embodiments are illustrative in all respects and should not be considered limiting. Indeed, the above-described embodiments may be embodied in various forms. Furthermore, the above-described embodiments may be omitted, substituted, or modified in various forms without departing from the scope and spirit of the appended claims. [Explanation of symbols]

[0071] ER Edge Ring W wafer 1 Processing System 100 control device 11 Vacuum Transfer Module 12 Processing Module 120 Chamber 121 Support part 121a Electrostatic Chuck 121b Lower electrode 122 Upper shower head assembly 123 RF power supply section 124 Gas Supply Unit 125 exhaust system 13 Ashing Module 130 stages 14 Load Lock Module 15 Atmospheric Transfer Module 16 Loading Port 20 Transport robot 21 End Effector 211 First holding part 212 Second holding part 22 Arm

Claims

1. 1. A transport apparatus for transporting a wafer and a consumable part having a circular outer diameter, either simultaneously or separately, the consumable part being positionable within a wafer processing module, the consumable part having an outer diameter greater than an outer diameter of the wafer, the transport apparatus comprising: an end effector configured to place the wafer and the consumable part simultaneously or separately; an arm configured to move the end effector; a controller configured to control the arm; Equipped with The control device When transporting the consumable part, controlling the arm so that the consumable part is placed on the end effector so that the center of gravity of the consumable part coincides with a first position; a control unit configured to control the arm so that, when transporting the wafer, the wafer is placed on the end effector such that the center of gravity of the wafer coincides with a second position between the first position and the tip of the end effector; When the wafer is transported, the wafer is placed on the end effector so that a portion of the wafer protrudes from the tip of the end effector; When the consumable part is transported, the consumable part is placed on the end effector so that a part of the consumable part protrudes from a tip end of the end effector; A transport device, wherein the dimension by which the portion of the wafer protrudes from the tip of the end effector is the same as the dimension by which the portion of the consumable part protrudes from the tip of the end effector.

2. The transfer device according to claim 1 , wherein the width of the end effector is smaller than the outer shape of the wafer.

3. 1. A transport apparatus for transporting a wafer and a consumable part having a circular outer diameter, either simultaneously or separately, the consumable part being positionable within a wafer processing module, the consumable part having an outer diameter greater than an outer diameter of the wafer, the transport apparatus comprising: an end effector configured to place the wafer and the consumable part simultaneously or separately; an arm configured to move the end effector; a controller configured to control the arm; Equipped with The control device When transporting the consumable part, controlling the arm so that the consumable part is placed on the end effector so that the center of gravity of the consumable part coincides with a first position; a control unit configured to control the arm so that, when transporting the wafer, the wafer is placed on the end effector such that the center of gravity of the wafer coincides with a second position between the first position and the tip of the end effector; the consumable part is a cover member provided at a lower part of the showerhead or an electrostatic chuck, The end effector a body having an upper surface; a plurality of wafer support pads disposed on an upper surface of the body; a plurality of consumable part support pads disposed on an upper surface of the body; Including, A transport device, wherein the height of the wafer support pad from the upper surface of the main body is lower than the height of the consumable part support pad from the upper surface of the main body.

4. The transfer device according to claim 3 , wherein the width of the end effector is smaller than the outer shape of the wafer.

5. 5. The transfer device according to claim 3, wherein when the wafer is transferred, the wafer is placed on the end effector so that a part of the wafer protrudes from the tip of the end effector.

6. The transport device according to claim 5 , wherein when the consumable part is transported, the consumable part is placed on the end effector so that a portion of the consumable part protrudes from a tip of the end effector.

7. The transfer device according to claim 6 , wherein a dimension by which the portion of the wafer protrudes from the tip of the end effector is the same as a dimension by which the portion of the consumable part protrudes from the tip of the end effector.

8. 1. An end effector for simultaneously or separately mounting a wafer and a consumable part having a circular outer diameter, the consumable part having an outer diameter greater than an outer diameter of the wafer, the end effector comprising: a body having an upper surface with a first distal region, a second distal region, and a rearward region, the first distal region and the second distal region overlapping each other when viewed in a first direction; a first wafer support pad disposed within the first tip region and having a first height; a second wafer support pad disposed within the second tip region and having the first height; a third wafer support pad disposed within the trailing end region and having the first height; a first consumable part support pad disposed within the first tip region between the first wafer support pad and the tip of the end effector, the first consumable part support pad having a second height different from the first height; a second consumable support pad disposed within the second tip region between the second wafer support pad and the tip of the end effector, the second consumable support pad having the second height; a third consumable part support pad disposed within the trailing end region between the third wafer support pad and the trailing end of the end effector, the third consumable part support pad having the second height; Including, When transporting the consumable part, the consumable part is configured to be placed on the end effector so that the center of gravity of the consumable part coincides with a first position, and when transporting the wafer, the wafer is configured to be placed on the end effector so that the center of gravity of the wafer coincides with a second position between the first position and the tip of the end effector, the consumable part is a cover member provided at a lower part of the showerhead or an electrostatic chuck, The first height is less than the second height of the end effector.

9. 1. An end effector for simultaneously or separately mounting a wafer and a consumable part having a circular outer diameter, the consumable part having an outer diameter greater than an outer diameter of the wafer, the end effector comprising: a body having an upper surface with a first distal region, a second distal region, and a rearward region, the first distal region and the second distal region overlapping each other when viewed in a first direction; a first wafer support pad disposed within the first tip region and having a first height; a second wafer support pad disposed within the second tip region and having the first height; a third wafer support pad disposed within the trailing end region and having the first height; a first consumable part support pad disposed within the first tip region between the first wafer support pad and the tip of the end effector, the first consumable part support pad having a second height different from the first height; a second consumable support pad disposed within the second tip region between the second wafer support pad and the tip of the end effector, the second consumable support pad having the second height; a third consumable part support pad disposed within the trailing end region between the third wafer support pad and the trailing end of the end effector, the third consumable part support pad having the second height; Including, When transporting the consumable part, the consumable part is configured to be placed on the end effector so that the center of gravity of the consumable part coincides with a first position, and when transporting the wafer, the wafer is configured to be placed on the end effector so that the center of gravity of the wafer coincides with a second position between the first position and the tip of the end effector, When the wafer is transported, the wafer is placed on the end effector so that a portion of the wafer protrudes from the tip of the end effector; When the consumable part is transported, the consumable part is placed on the end effector so that a part of the consumable part protrudes from a tip end of the end effector; An end effector, wherein a dimension by which a portion of the wafer protrudes from the tip of the end effector is the same as a dimension by which a portion of the consumable part protrudes from the tip of the end effector.

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