Power conversion system

The power conversion system addresses uneven plating and slow response issues by integrating AC-DC and DC-DC circuits with voltage step and polarity conversion, providing ripple-free bipolar voltage for semiconductor wafer plating.

JP2025169168APending Publication Date: 2025-11-12DELTA ELECTRONICS INC(CN)
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Patent Information

Application Number
JP2025061820
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-09-09
Filing Date
2025-04-03
Publication Date
2025-11-12

AI Technical Summary

Technical Problem

Existing power conversion systems fail to provide ripple-free bipolar voltage necessary for semiconductor wafer plating, leading to uneven plating and inadequate voltage step changes due to slow dynamic response.

Method used

A power conversion system incorporating a three-phase AC-DC conversion circuit, multiple DC-DC conversion circuits, a voltage step change circuit, and a voltage polarity conversion circuit to generate and adjust DC voltages with precise step changes and polarity conversions.

Benefits of technology

The system generates output voltages with controlled step changes and polarity conversions, ensuring high-quality bipolar voltage supply for semiconductor wafer plating by eliminating output ripple and enhancing dynamic response.

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Abstract

To provide a power conversion system with voltage step change and voltage polarity conversion functions.SOLUTION: A power conversion system includes a three-phase AC-DC conversion circuit that receives a three-phase power source and converts the three-phase power source into a DC power source, a plurality of DC-DC conversion circuits that receive a DC power source and convert the DC power source to generate a DC voltage, a first voltage, and a second voltage, respectively, a voltage step change circuit that receives the DC voltage, the first voltage, and the second voltage and adds the first voltage to the DC voltage or subtracts the second voltage from the DC voltage to supply a step-change DC voltage, and a voltage polarity conversion circuit that receives the step-change DC voltage and converts the polarity of the step-change DC voltage to supply a DC output voltage.SELECTED DRAWING: Figure 1
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Description

[Technical Field]

[0001] The present invention relates to a power conversion system, and more particularly to a power conversion system having voltage step change and voltage polarity conversion functions. [Background technology]

[0002] A power supply with bipolar voltage is necessary and important for semiconductor wafer plating. Ripple-free power supplies are especially important for providing high-quality bipolar voltage. Therefore, if the output ripple component is not completely removed, plating unevenness will occur on the wafer surface. Furthermore, if the output dynamic response is not fast enough, voltage step changes cannot be realized. Summary of the Invention [Problem to be solved by the invention]

[0003] Therefore, in order to solve the problems and technical bottlenecks of the prior art, how to design a power conversion system with voltage step change and voltage polarity conversion functions is an important issue that has been considered by the inventors of the present application.

[0004] The present invention has been made to solve the above-mentioned problems, and has an object to provide a power conversion system having a voltage step change and voltage polarity conversion function. [Means for solving the problem]

[0005] In order to achieve the above object, a power conversion system according to the present invention includes: a three-phase AC-DC conversion circuit that receives a three-phase power source and converts the three-phase power source into a DC power source; a plurality of DC-DC conversion circuits that receive the DC power source and convert the DC power source to generate a DC voltage, a first voltage, and a second voltage, respectively; a voltage step change circuit that receives the DC voltage, the first voltage, and the second voltage, and adds the first voltage to the DC voltage or subtracts the second voltage from the DC voltage to supply a step-change DC voltage; and a voltage polarity conversion circuit that receives the step-change DC voltage, converts the polarity of the step-change DC voltage, and supplies a DC output voltage.

[0006] In order to achieve the above object, a power conversion system according to the present invention includes: a three-phase AC-DC conversion circuit that receives a three-phase power source and converts the three-phase power source into a DC power source; a plurality of DC-DC conversion circuits that receive the DC power source and convert the DC power source to generate a DC voltage and a DC voltage, respectively; a second voltage polarity conversion circuit that receives the voltage and converts the polarity of the voltage to supply an regulated voltage; a voltage step change circuit that receives the DC voltage and the regulated voltage and adds the regulated voltage to the DC voltage to supply a step-change DC voltage; and a first voltage polarity conversion circuit that receives the step-change DC voltage and converts the polarity of the step-change DC voltage to supply a DC output voltage.

[0007] In order to achieve the above object, the power conversion system according to the present invention includes a three-phase AC-DC conversion circuit that receives a three-phase power source and converts the three-phase power source into a DC power source; a plurality of DC-DC conversion circuits that receive the DC power source and convert the DC power source to generate a DC voltage and a DC voltage, respectively; a first voltage polarity conversion circuit that receives the DC voltage and converts the polarity of the DC voltage to supply a polarity-converted DC voltage; a second voltage polarity conversion circuit that receives the voltage and converts the polarity of the voltage to supply an regulated voltage; and a voltage step change circuit that receives the polarity-converted DC voltage and the regulated voltage, and adds the regulated voltage to the polarity-converted DC voltage to supply a DC output voltage. [Effects of the Invention]

[0008] Therefore, the power conversion system provided by the present invention can generate an output voltage with voltage step change and voltage polarity conversion functions.

[0009] For a better understanding of the techniques, means and advantages adopted to achieve the objects of the present invention, the objects and features of the present invention should be referred to the following detailed description and the accompanying drawings, which are for reference and explanation purposes only and are not to be construed as limiting the present invention. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a block diagram of a first embodiment of a power conversion system according to the present invention. [Figure 2] FIG. 4 is a block diagram of a second embodiment of a power conversion system according to the present invention. [Figure 3] FIG. 10 is a block diagram of a third embodiment of a power conversion system according to the present invention. [Figure 4] 1 is a block diagram of a DC-DC conversion circuit according to the present invention; [Figure 5] 1 is a circuit block diagram of an active linear filter unit according to the present invention; [Figure 6] 1 is a circuit diagram of a three-phase AC-DC converter circuit and a DC-DC converter circuit according to the present invention. [Figure 7A] 1 is a circuit diagram of a first embodiment of a voltage step change circuit according to the present invention. [Figure 7B] 7B is a schematic waveform diagram of an input voltage and an output voltage in the voltage step change circuit shown in FIG. 7A. [Figure 8A] FIG. 4 is a circuit diagram of a second embodiment of a voltage step change circuit according to the present invention. [Figure 8B] 8B is a schematic waveform diagram of the input voltage and the output voltage in the voltage step change circuit shown in FIG. 8A. [Figure 9A] 1 is a circuit diagram of a voltage polarity conversion circuit according to the present invention; [Figure 9B]9B is a schematic waveform diagram of an input voltage and an output voltage in the voltage polarity conversion circuit shown in FIG. 9A, and a schematic waveform diagram of a control signal for a bridge arm switch. [Figure 10] FIG. 2 is a block diagram of a power conversion system using two sets of the power conversion architectures in FIG. 1. [Figure 11] FIG. 3 is a block diagram of a power conversion system using two sets of the power conversion architectures in FIG. 2. [Figure 12] FIG. 4 is a block diagram of a power conversion system using two sets of the power conversion architectures in FIG. 3. [Figure 13] 3 is a schematic waveform diagram of a DC output voltage of the power conversion system according to the present invention. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0011] The technical contents and detailed description of the present invention will be described below with reference to the drawings.

[0012] 1, there is shown a block diagram of a first embodiment of a power conversion system according to the present invention. The power conversion system (hereinafter simply referred to as the power conversion system) includes a three-phase AC-DC conversion circuit 100, a plurality of DC-DC conversion circuits 201, 202, 203, a voltage step change circuit 300, and a voltage polarity conversion circuit 400. In this embodiment, the number of the plurality of DC-DC conversion circuits 201, 202, 203 is shown as three, i.e., the plurality of DC-DC conversion circuits 201, 202, 203 includes a first DC-DC conversion circuit 201, a second DC-DC conversion circuit 202, and a third DC-DC conversion circuit 203.

[0013] The three-phase AC-DC conversion circuit 100 receives a three-phase power supply Vac (particularly a three-phase AC power supply) and converts the three-phase power supply Vac into a DC power supply Vdc. Multiple DC-DC conversion circuits, i.e., three DC-DC conversion circuits 201, 202, and 203, receive a DC power supply Vdc and convert the DC power supply Vdc to generate a DC voltage V1, a first voltage Vp1, and a second voltage Vn1, respectively. In this embodiment, the first DC-DC conversion circuit 201 receives the DC power supply Vdc and converts it to generate the DC voltage V1. The second DC-DC conversion circuit 202 receives the DC power supply Vdc and converts it to generate the first voltage Vp1. The third DC-DC conversion circuit 203 receives the DC power supply Vdc and converts it to generate the second voltage Vn1.

[0014] The voltage step change circuit 300 receives a DC voltage V1, a first voltage Vp1, and a second voltage Vn1. The voltage step change circuit 300 adds the first voltage Vp1 to the DC voltage V1 or subtracts the second voltage Vn1 from the DC voltage V1 to supply a DC voltage that changes in steps (hereinafter referred to as a step change DC voltage Vx). The operation of the voltage step change circuit 300 will be described in detail later.

[0015] The voltage polarity conversion circuit 400 receives the step-change DC voltage Vx, converts the polarity of the step-change DC voltage Vx, and supplies the DC output voltage Vo1. The operation of the voltage polarity conversion circuit 400 will be described in detail later.

[0016] Referring to FIG. 4, a block diagram of a DC-DC conversion circuit according to the present invention is shown. Here, the DC-DC conversion circuit is any one of the DC-DC conversion circuits 201, 202, and 203 shown in FIG. 1, and is therefore referred to as a DC-DC conversion circuit 200. The DC-DC conversion circuit 200 includes an isolated DC-DC conversion unit 21, an interleaved step-down conversion unit 22, and an active linear filter unit 23. The isolated DC-DC conversion unit 21 receives a DC power supply Vdc and converts the DC power supply Vdc into an isolated DC voltage Viso. The interleaved step-down conversion unit 22 receives the isolated DC voltage Viso and converts the isolated DC voltage Viso into a step-down voltage Vbuk. The active linear filter unit 23 receives the step-down voltage Vbuk and converts the step-down voltage Vbuk into a DC voltage V1, a first voltage Vp1, or a second voltage Vn1.

[0017] 1 , the isolated DC-DC conversion unit 21, the interleaved step-down conversion unit 22, and the active linear filter unit 23 of the first DC-DC conversion circuit 201 convert the DC power supply Vdc into a DC voltage V1. Similarly, the isolated DC-DC conversion unit 21, the interleaved step-down conversion unit 22, and the active linear filter unit 23 of the second DC-DC conversion circuit 202 convert the DC power supply Vdc into a first voltage Vp1. Similarly, the isolated DC-DC conversion unit 21, the interleaved step-down conversion unit 22, and the active linear filter unit 23 of the third DC-DC conversion circuit 203 convert the DC power supply Vdc into a second voltage Vn1.

[0018] Specifically, please refer to Fig. 6, which is a circuit diagram of a three-phase AC-DC converter circuit and a DC-DC converter circuit according to the present invention. In Fig. 6, two sets of DC-DC converter circuits 200 are provided, which constitute a dual-channel output architecture.

[0019] FIG. 5 is a circuit block diagram of an active linear filter unit. As shown in FIG. 4, the active linear filter unit 23 receives a step-down voltage Vbuk and converts the step-down voltage Vbuk into a DC voltage V1, a first voltage Vp1, or a second voltage Vn1. As shown in FIG. 5, the active linear filter unit 23 includes a transistor 231, a driver 232, a controller 233, and an adder / subtractor 234. The transistor 231 receives an input voltage Vin containing a switching ripple component. Corresponding to FIG. 4, the step-down voltage Vbuk corresponds to the input voltage Vin of the active linear filter unit 23. The switching ripple component here refers to a high-frequency ripple component generated by switching a power switch when a power conversion circuit in a preceding stage performs power conversion. Therefore, by using the active linear filter unit 23 instead of a conventional high-frequency filter, the ripple component can be filtered, improving the conversion efficiency of the entire circuit. In this embodiment, the transistor 231 is a BJT (Bipolar Junction Transistor), but is not limited to this, and a MOSFET (Metal-Oxide-Semiconductor Field-Effect Transistor) or an IGBT (Insulated Gate Bipolar Transistor) can also be used.

[0020] The driver 232 is connected to the transistor 231. In this embodiment, the driver 232 is connected to the base and emitter of an npn-type bipolar junction transistor (BJT). The adder-subtractor 234 receives the reference voltage Vref and the output voltage Vout of the active linear filter unit 23. Referring to FIG. 4, the DC voltage V1, the first voltage Vp1, or the second voltage Vn1 corresponds to the output voltage Vout of the active linear filter unit 23. The adder-subtractor 234 calculates an error voltage Verr between the reference voltage Vref and the DC voltage V1, the first voltage Vp1, or the second voltage Vn1. In this embodiment, the adder-subtractor 234 calculates the error voltage Verr by subtracting the output voltage Vout from the reference voltage Vref. Therefore, when the reference voltage Vref, which is a target voltage, is greater than the output voltage Vout, the error voltage Verr is positive. Conversely, when the reference voltage Vref is smaller than the output voltage Vout, the error voltage Verr is negative.

[0021] The controller 233 receives the error voltage Verr, generates a filter control signal Scf to control the driver 232, and generates a drive signal Sd to control the transistor 231, thereby preventing ripple components from being included in the DC voltage V1, the first voltage Vp1, and the second voltage Vn1. In this embodiment, the controller 233 is a proportional-integral (PI) controller, but is not limited to this. A proportional-integral-derivative (PID) controller or a proportional-derivative (PD) controller can also be used. Thus, the controller 233 adjusts the control reference based on the error voltage Verr, controls the driver 232 using the generated filter control signal Scf, and drives the transistor 231 on / off, thereby preventing ripple components from being included in the output voltage Vout (i.e., the DC voltage V1, the first voltage Vp1, or the second voltage Vn1) of the active linear filter unit 23. This filters (removes) the ripple components from the input voltage Vin, thereby obtaining a ripple-free output voltage Vout. Note that any circuits or components that can be used to realize an active filtering function are within the scope of the present invention.

[0022] Thus, by accurately determining the direct current offset (DC offset), it is possible not only to operate the transistor 231 in a linear region but also to minimize the power consumption of the transistor 231. In other words, the DC offset is approximately equal to the collector-emitter voltage of the transistor 231. Therefore, if the value of the DC offset is set to a minimum and the transistor 231 can be kept operating in a linear region, the active linear filter unit 23 can remove the switching ripple component and minimize the power consumption.

[0023] Compared to conventional linear regulators, which can only provide a fixed DC voltage (and cannot provide a dynamic ramp voltage) and generally consume more power, the active linear filter unit 23 is therefore more efficient and offers greater design flexibility than conventional linear regulators.

[0024] Referring to FIG. 7A, a circuit diagram of a first embodiment of a voltage step change circuit according to the present invention is shown. Also referring to FIG. 1, a voltage step change circuit 300A supplies an output voltage Vo by adding a first voltage Vp1 to a DC voltage V1 or subtracting a second voltage Vn1 from a DC voltage V1. Corresponding to FIG. 1, a step change DC voltage Vx corresponds to the output voltage Vo of the voltage step change circuit 300A. Also referring to FIG. 7B, a schematic waveform diagram of the input and output voltages of the voltage step change circuit shown in FIG. 7A is shown, which will be described in detail below.

[0025] As shown in FIG. 7A, the voltage step change circuit 300A includes a first switch group and a second switch group. The first switch group includes a first switch Sa and a second switch Sb, and the first switch group is connected to a first voltage Vp1. The second switch group includes a third switch Sc and a fourth switch Sd, and the second switch group is connected to a second voltage Vn1. Specifically, a first terminal of the first switch Sa is connected to the positive terminal of the first voltage Vp1, and a first terminal of the second switch Sb is connected to the negative terminal of the first voltage Vp1 and also to a DC voltage V1. A second terminal of the first switch Sa is connected to the second terminal of the second switch Sb and supplies the positive voltage terminal of the step change DC voltage Vx (which, with reference to FIG. 1, corresponds to the output voltage Vo in FIG. 7A).

[0026] A first terminal of the third switch Sc is connected to the negative terminal of the second voltage Vn1, a first terminal of the fourth switch Sd is connected to the positive terminal of the second voltage Vn1 and also to the ground terminal, and a second terminal of the third switch Sc is connected to the second terminal of the fourth switch Sd and supplies the negative voltage terminal of the step-change DC voltage Vx.

[0027] As a result, when the first switch Sa and the fourth switch Sd are on and the second switch Sb and the third switch Sc are off, the magnitude of the step-change DC voltage Vx is equal to the DC voltage V1 plus the first voltage Vp1. On the other hand, when the second switch Sb and the third switch Sc are on and the first switch Sa and the fourth switch Sd are off, the magnitude of the step-change DC voltage Vx is equal to the DC voltage V1 minus the second voltage Vn1. Therefore, as shown in the waveform of FIG. 7B, it is possible to realize control of a step increase (i.e., V1+Vp1) or step decrease (i.e., V1-Vn1) of the DC voltage V1.

[0028] Referring to FIG. 9A, a circuit diagram of a voltage polarity converter circuit according to the present invention is shown. The voltage polarity converter circuit is the voltage polarity converter circuit 400 shown in FIG. 1 (or either the first voltage polarity converter circuit 401 or the second voltage polarity converter circuit 402 shown in FIGS. 2 and 3). The voltage polarity converter circuit 400 includes a first bridge arm and a second bridge arm, where the first bridge arm is connected in parallel with the second bridge arm. The first bridge arm includes a first upper switching element Q1 and a first lower switching element Q2 connected in series. The second bridge arm includes a second upper switching element Q3 and a second lower switching element Q4 connected in series. Here, the first upper switching element Q1 and the second lower switching element Q4 are simultaneously turned on or off, and the first lower switching element Q2 and the second upper switching element Q3 are simultaneously turned on or off.

[0029] 9B also shows schematic waveforms of the input and output voltages in the voltage polarity conversion circuit of FIG. 9A, as well as schematic waveforms of the switching control signals of the bridge arms. These will be described in detail below. Corresponding to FIG. 1, the input voltage Vih is the step-change DC voltage Vx of the voltage step change circuit 300, and the output voltage Voh is the DC output voltage Vo1. As shown in FIG. 9B, the voltage polarity conversion circuit 400 converts the polarity of the input voltage Vih from a positive value to a negative value between time t1 and time t3. Meanwhile, the polarity of the input voltage Vih remains positive between time t0 and time t1 and after time t3. Therefore, between time t0 and time t1 and after time t3, the first upper switching element Q1 and the second lower switching element Q4 are turned on, and the first lower switching element Q2 and the second upper switching element Q3 are turned off. Furthermore, from time t1 to time t3, the first high-side switching element Q1 and the second low-side switching element Q4 are turned off, and the first low-side switching element Q2 and the second high-side switching element Q3 are turned on, thereby inverting the polarities of the output voltage Voh and the input voltage Vih from time t1 to time t3.

[0030] 2, there is shown a block diagram of a second embodiment of a power conversion system according to the present invention. The power conversion system includes a three-phase AC-DC conversion circuit 100, a plurality of DC-DC conversion circuits 201, 202, a second voltage polarity conversion circuit 402, a voltage step change circuit 300, and a first voltage polarity conversion circuit 401. In this embodiment, the number of the plurality of DC-DC conversion circuits 201, 202 is two, i.e., the plurality of DC-DC conversion circuits 201, 202 includes a first DC-DC conversion circuit 201 and a second DC-DC conversion circuit 202.

[0031] The three-phase AC-DC conversion circuit 100 receives a three-phase power supply Vac and converts it into a DC power supply Vdc. Two DC-DC conversion circuits 201 and 202 receive a DC power supply Vdc and convert it to generate DC voltages V1 and Vp1, respectively. In this embodiment, the first DC-DC conversion circuit 201 receives the DC power supply Vdc and converts it to generate DC voltage V1. The second DC-DC conversion circuit 202 receives the DC power supply Vdc and converts it to generate voltage Vp1.

[0032] The second voltage polarity conversion circuit 402 receives the voltage Vp1, converts the polarity of the voltage Vp1, and supplies the adjusted voltage Vstep1. The voltage step change circuit 300 receives the DC voltage V1 and the adjusted voltage Vstep1, adds the adjusted voltage Vstep1 to the DC voltage V1, and supplies the step-change DC voltage Vx. The operation of the voltage step change circuit 300 will be described in detail later.

[0033] The first voltage polarity change circuit 401 receives the step-change DC voltage Vx, changes the polarity of the step-change DC voltage Vx, and supplies a DC output voltage Vo1.

[0034] For detailed explanations of the first DC-DC conversion circuit 201, the second DC-DC conversion circuit 202, the first voltage polarity conversion circuit 401, and the second voltage polarity conversion circuit 402 in this embodiment, please refer to the above explanations and they will not be repeated here.

[0035] Referring to Figure 8A, a circuit diagram of a second embodiment of a voltage step change circuit according to the present invention is shown. Also referring to Figure 2, a voltage step change circuit 300B receives a DC voltage V1 and a regulated voltage Vstep1, adds the regulated voltage Vstep1 to the DC voltage V1, and outputs an output voltage Vo (i.e., a step change DC voltage Vx). Also referring to Figure 8B, a schematic waveform diagram of the input and output voltages of the voltage step change circuit shown in Figure 8A is shown, which will be described in detail below.

[0036] The voltage step change circuit 300B includes a group of switches. The group of switches includes a first switch Sa and a second switch Sb, and the group of switches is connected to the regulated voltage Vstep1. Specifically, a first terminal of the first switch Sa is connected to the positive terminal of the regulated voltage Vstep1, and a first terminal of the second switch Sb is connected to the negative terminal of the regulated voltage Vstep1 and also to the DC voltage V1. A second terminal of the first switch Sa is connected to the second terminal of the second switch Sb, and supplies the positive voltage terminal of the output voltage Vo (i.e., the step change DC voltage Vx) to the ground terminal.

[0037] As a result, when the first switch Sa is turned on and the second switch Sb is turned off, the magnitude of the output voltage Vo (i.e., the step-change DC voltage Vx) becomes equal to the value obtained by adding the adjustment voltage Vstep1 to the DC voltage V1. On the other hand, when the first switch Sa is turned off and the second switch Sb is turned on, the magnitude of the output voltage Vo (i.e., the step-change DC voltage Vx) becomes equal to the DC voltage V1. Therefore, as shown in the waveform of FIG. 8B, it is possible to achieve control of a step increase of the DC voltage V1 (i.e., V1+Vstep1) when the adjustment voltage Vstep1 is a positive value, or a step decrease (i.e., V1+Vstep1) when the adjustment voltage Vstep1 is a negative value.

[0038] 3, there is shown a block diagram of a third embodiment of a power conversion system according to the present invention. The power conversion system includes a three-phase AC-DC conversion circuit 100, a plurality of DC-DC conversion circuits 201, 202, a first voltage polarity conversion circuit 401, a second voltage polarity conversion circuit 402, and a voltage step change circuit 300. In this embodiment, the number of the plurality of DC-DC conversion circuits 201, 202 is two, i.e., the plurality of DC-DC conversion circuits 201, 202 includes a first DC-DC conversion circuit 201 and a second DC-DC conversion circuit 202.

[0039] The three-phase AC-DC conversion circuit 100 receives a three-phase power supply Vac and converts it into a DC power supply Vdc. Two DC-DC conversion circuits 201 and 202 receive the DC power supply Vdc and convert it to generate DC voltages V1 and Vp1, respectively. In this embodiment, the first DC-DC conversion circuit 201 receives the DC power supply Vdc and converts it to generate the DC voltage V1. The second DC-DC conversion circuit 202 receives the DC power supply Vdc and converts it to generate the voltage Vp1.

[0040] The first voltage polarity conversion circuit 401 receives the DC voltage V1, converts the polarity of the DC voltage V1, and supplies the polarity-converted DC voltage V1'. The second voltage polarity conversion circuit 402 receives the voltage Vp1, converts the polarity of the voltage Vp1, and supplies the adjusted voltage Vstep1. The voltage step change circuit 300 receives the polarity-converted DC voltage V1' and the adjusted voltage Vstep1, and adds the adjusted voltage Vstep1 to the polarity-converted DC voltage V1' to supply the DC output voltage Vo1.

[0041] The operation of the voltage step change circuit 300 is similar to that of the second embodiment, but referring also to Figures 8A and 8B, the main difference is that the DC voltage V1 in Figure 8A corresponds to the DC voltage V1 in Figure 2, and corresponds to the polarity-changed DC voltage V1' in Figure 3. This makes it possible to control the polarity-changed DC voltage V1' to step up (i.e., V1' + Vstep1) when the regulated voltage Vstep1 is a positive value, or to control the polarity-changed DC voltage V1' to step down (i.e., V1' + Vstep1) when the regulated voltage Vstep1 is a negative value.

[0042] Please refer to the above description for detailed explanations of the first DC-DC conversion circuit 201, the second DC-DC conversion circuit 202, the first voltage polarity conversion circuit 401, and the second voltage polarity conversion circuit 402 in this embodiment, and detailed explanations will be omitted here.

[0043] FIG. 10 shows a block diagram of a power conversion system using two sets of the power conversion architecture shown in FIG. 1. When viewed in conjunction with FIG. 1, the biggest difference between FIG. 10 and FIG. 1 is that FIG. 10 shares the same three-phase AC-DC conversion circuit 100 while including two sets of the power conversion architecture shown in FIG. 1, i.e., FIG. 10 has a dual-channel output architecture. However, the number of sets is not limited to two. A first set of three DC-DC conversion circuits 201-1, 202-1, and 203-1 receive a DC power source Vdc and convert the DC power source Vdc to generate a first set of DC voltages V1, a first voltage Vp1, and a second voltage Vn1. Similarly, a second set of three DC-DC conversion circuits 201-2, 202-2, and 203-2 receive a DC power source Vdc and convert the DC power source Vdc to generate a second set of DC voltages V2, a first voltage Vp2, and a second voltage Vn2.

[0044] The first set of voltage step change circuits 300-1 receives a first set of DC voltages V1, Vp1, and Vn1. The voltage step change circuit 300-1 adds the first voltage Vp1 to the DC voltage V1 or subtracts the second voltage Vn1 from the DC voltage V1 to provide the first set of step-change DC voltages Vx1. Similarly, the second set of voltage step change circuits 300-2 receives a second set of DC voltages V2, Vp2, and Vn2. The voltage step change circuit 300-2 adds the first voltage Vp2 to the DC voltage V2 or subtracts the second voltage Vn2 from the DC voltage V2 to provide the second set of step-change DC voltages Vx2.

[0045] The first set of voltage polarity conversion circuits 400-1 receives the step-change DC voltage Vx1, converts the polarity of the step-change DC voltage Vx1, and supplies the first set of DC output voltage Vo1. Similarly, the second set of voltage polarity conversion circuits 400-2 receives the step-change DC voltage Vx2, converts the polarity of the step-change DC voltage Vx2, and supplies the second set of DC output voltage Vo2.

[0046] Since the second set of power conversion architectures have the same circuit elements, structural connections, and operation as the first set of power conversion architectures, the power conversion system in Fig. 10 can provide more sets of power outputs, and detailed descriptions thereof will be omitted here.

[0047] Referring to FIG. 11, a block diagram of a power conversion system using two sets of the power conversion architecture in FIG. 2 is shown. When referring to FIG. 2 in conjunction with FIG. 2, the biggest difference between FIG. 11 and FIG. 2 is that FIG. 11 shares the three-phase AC-DC conversion circuit 100 while including two sets of the power conversion architecture in FIG. 2, i.e., FIG. 11 has a dual-channel output architecture. However, the number of sets is not limited to two. A first set of two DC-DC conversion circuits 201-1 and 202-1 receives a DC power source Vdc and converts it to generate a first set of DC voltages V1 and Vp1. Similarly, a second set of two DC-DC conversion circuits 201-2 and 202-2 receives a DC power source Vdc and converts it to generate a second set of DC voltages V2 and Vp2.

[0048] The first set of second voltage polarity conversion circuits 402-1 receives the voltage Vp1, converts the polarity of the voltage Vp1, and supplies the adjusted voltage Vstep1. Similarly, the second set of second voltage polarity conversion circuits 402-2 receives the voltage Vp2, converts the polarity of the voltage Vp2, and supplies the adjusted voltage Vstep2.

[0049] The first set of voltage step change circuits 300-1 receives the DC voltage V1 and the regulated voltage Vstep1 and adds the regulated voltage Vstep1 to the DC voltage V1 to provide the first set of step change DC voltages Vx1. Similarly, the second set of voltage step change circuits 300-2 receives the DC voltage V2 and the regulated voltage Vstep2 and adds the regulated voltage Vstep2 to the DC voltage V2 to provide the second set of step change DC voltages Vx2.

[0050] The first voltage polarity conversion circuit 401-1 of the first set receives the step-change DC voltage Vx1, converts the polarity of the step-change DC voltage Vx1, and supplies the first set of DC output voltage Vo1. Similarly, the second voltage polarity conversion circuit 401-2 receives the step-change DC voltage Vx2, converts the polarity of the step-change DC voltage Vx2, and supplies the second set of DC output voltage Vo2.

[0051] Since the second set of power conversion architectures have the same circuit elements, structural connections, and operations as the first set of power conversion architectures, the power conversion system in Fig. 11 can provide more sets of power outputs, and detailed descriptions thereof will be omitted here.

[0052] FIG. 12 shows a block diagram of a power conversion system using two sets of the power conversion architecture in FIG. 3. When referring to FIG. 3 in conjunction with FIG. 3, the biggest difference between FIG. 12 and FIG. 3 is that FIG. 12 shares the three-phase AC-DC conversion circuit 100, but includes two sets of the power conversion architecture in FIG. 3, resulting in a dual-channel output architecture. However, the present invention is not limited to two sets. A first set of two DC-DC conversion circuits 201-1 and 202-1 receives a DC power source Vdc and converts it to generate a first set of DC voltages V1 and Vp1. Similarly, a second set of two DC-DC conversion circuits 201-2 and 202-2 also receives a DC power source Vdc and converts it to generate a second set of DC voltages V2 and Vp2.

[0053] The first voltage polarity conversion circuit 401-1 of the first set receives the DC voltage V1, converts the polarity of the DC voltage V1, and supplies the first set of polarity-converted DC voltages V1'. Similarly, the second voltage polarity conversion circuit 401-2 receives the DC voltage V2, converts the polarity of the DC voltage V2, and supplies the second set of polarity-converted DC voltages V2'.

[0054] The first set of second voltage polarity conversion circuits 402-1 receives the voltage Vp1, converts the polarity of the voltage Vp1, and supplies the first set of regulated voltages Vstep1. Similarly, the second set of second voltage polarity conversion circuits 402-2 receives the voltage Vp2, converts the polarity of the voltage Vp2, and supplies the second set of regulated voltages Vstep2.

[0055] The first set of voltage step change circuits 300-1 receives the polarity-inverted DC voltage V1' and the regulated voltage Vstep1, and adds the regulated voltage Vstep1 to the polarity-inverted DC voltage V1' to supply the first set of DC output voltage Vo1. Similarly, the second set of voltage step change circuits 300-2 receives the polarity-inverted DC voltage V2' and the regulated voltage Vstep2, and adds the regulated voltage Vstep2 to the polarity-inverted DC voltage V2' to supply the second set of DC output voltage Vo2.

[0056] Since the second set of power conversion architectures have the same circuit elements, structural connections, and operations as the first set of power conversion architectures, the power conversion system in Fig. 12 can provide more sets of power outputs, and therefore, redundant description will be omitted here.

[0057] 13 shows a schematic waveform diagram of the DC output voltage of the power conversion system according to the present invention. In the time period from time t1 to time t2, the DC output voltage Vo1 (and / or the DC output voltage Vo2) is increased by controlling the isolated DC-DC conversion unit 21 and the interleaved step-down conversion unit 22 of the DC-DC conversion circuit 200. Similarly, in the time period between time t2 and time t3, the DC output voltage Vo1 (and / or the DC output voltage Vo2) can be decreased by controlling the isolated DC-DC conversion unit 21 and the interleaved step-down conversion unit 22 of the DC-DC conversion circuit 200.

[0058] During the time period between time t5 and time t6, the polarity of the output voltage can be switched from positive to negative by controlling the first upper switching element Q1 and the second lower switching element Q4, and the first lower switching element Q2 and the second upper switching element Q3 in the H-bridge circuit of the voltage polarity conversion circuit 400. At time t6, the output voltage is stepped up from a negative voltage to zero, or at time t7, the output voltage is stepped up from a positive voltage. These voltage step-ups are mainly performed by the voltage step change circuit 300. Similarly, at time t3, the voltage can be stepped down by the voltage step change circuit 300. Therefore, the power conversion system provided by the present invention is capable of generating an output voltage with a voltage step change and voltage polarity conversion.

[0059] Although the preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings, the present invention is not limited to these examples. The technical scope of the present invention is based on the following claims, and any changes or modifications within that scope are also included in the technical scope of the present invention. Furthermore, any variations or modifications that can be easily conceived by a person skilled in the art within the technical scope of the present invention are also included in the scope of the claims. [Explanation of symbols]

[0060] 100 Three-phase AC-DC conversion circuit 200 DC-DC conversion circuit 201, 201-1, 201-2 First DC-DC conversion circuit 202, 202-1, 202-2 Second DC-DC conversion circuit 203, 203-1, 203-2 Third DC-DC conversion circuit 300, 300A, 300B, 300-1, 300-2 Voltage step change circuit 400 Voltage polarity conversion circuit 401, 401-1, 401-2 First voltage polarity conversion circuit 402, 402-1, 402-2 Second voltage polarity conversion circuit 21 Isolated DC-DC conversion unit 22 Interleaved Step-Down Conversion Unit 23 Active Linear Filter Unit 231 Transistor 232 Driver 233 Controller 234 Adder / Subtractor Sa 1st Switch Sb Second switch Sc 3rd switch Sd 4th switch Q1 First upper switching element Q2 First lower switching element Q3 Second upper switching element Q4 Second lower switching element Vref Reference voltage Verr error voltage Scf filter control signal Sd drive signal Vac three phase power supply Vdc DC power supply V1, V2 DC voltage V1', V2' polarity conversion DC voltage Vp1, Vp2 First voltage, voltage Vn1, Vn2 Second voltage Vx, Vx1, Vx2 step change DC voltage Vstep1, Vstep2 adjustment voltage Vo1, Vo2 DC output voltage Viso Isolated DC Voltage Vbuk Buck voltage Vin Input voltage Vout Output voltage Vo output voltage Vih Input voltage Voh Output voltage t0~t7 time

Claims

1. a three-phase AC-DC conversion circuit that receives a three-phase power source and converts the three-phase power source into a DC power source; a plurality of DC-DC converter circuits that receive the DC power source and convert the DC power source to generate a DC voltage, a first voltage, and a second voltage, respectively; a voltage step change circuit that receives the DC voltage, the first voltage, and the second voltage, and adds the first voltage to the DC voltage or subtracts the second voltage from the DC voltage to provide a step change DC voltage; a voltage polarity conversion circuit that receives the step-change DC voltage, converts the polarity of the step-change DC voltage, and supplies a DC output voltage. Power conversion systems.

2. Any one of the plurality of DC-DC conversion circuits an isolated DC-DC conversion unit that receives the DC power source and converts the DC power source into an isolated DC voltage; an interleaved step-down conversion unit that receives the isolated DC voltage and converts the isolated DC voltage into a step-down voltage; an active linear filter unit that receives the stepped-down voltage and converts the stepped-down voltage into the DC voltage, the first voltage, or the second voltage.

3. The active linear filter unit comprises: a transistor receiving the step-down voltage including a ripple component; a driver connected to the transistor; an adder / subtractor that receives a reference voltage and the DC voltage, the first voltage, or the second voltage of the active linear filter unit, and calculates an error voltage between the reference voltage and the DC voltage, the first voltage, or the second voltage; a controller that receives the error voltage and generates a filter control signal to control the driver, and that generates a drive signal to control the transistor so that the DC voltage, the first voltage, or the second voltage does not include the ripple component.

4. The voltage step change circuit a first group of switches including a first switch and a second switch connected to the first voltage; a second switch group including a third switch and a fourth switch connected to the second voltage; 2. The power conversion system of claim 1, wherein when the first switch and the fourth switch are turned on and the second switch and the third switch are turned off, a magnitude of the step-change DC voltage is equal to a value obtained by adding the first voltage to the DC voltage, and when the second switch and the third switch are turned on and the first switch and the fourth switch are turned off, a magnitude of the step-change DC voltage is equal to a value obtained by subtracting the second voltage from the DC voltage.

5. a first terminal of the first switch connected to the positive terminal of the first voltage, a first terminal of the second switch connected to the negative terminal of the first voltage and to the DC voltage, and a second terminal of the first switch connected to the second terminal of the second switch to provide the positive voltage terminal of the step-change DC voltage; 5. The power conversion system of claim 4, wherein a first terminal of the third switch is connected to the negative terminal of the second voltage, a first terminal of the fourth switch is connected to the positive terminal of the second voltage and a ground terminal, and a second terminal of the third switch is connected to the second terminal of the fourth switch to supply the negative voltage terminal of the step-varying DC voltage.

6. The voltage polarity conversion circuit a first bridge arm including a first upper switching element and a first lower switching element connected in series; a second bridge arm connected in parallel to the first bridge arm and including a second upper switching element and a second lower switching element connected in series; the first high-side switching element and the second low-side switching element are simultaneously turned on or off, The power conversion system according to claim 1 , wherein the first low-side switching element and the second high-side switching element are simultaneously turned on or off.

7. a three-phase AC-DC conversion circuit that receives a three-phase power source and converts the three-phase power source into a DC power source; a plurality of DC-DC converter circuits that receive the DC power source and convert the DC power source to generate DC voltages and voltages, respectively; a second voltage polarity conversion circuit that receives the voltage, converts the polarity of the voltage, and supplies a regulated voltage; a voltage step change circuit that receives the DC voltage and the regulated voltage and adds the regulated voltage to the DC voltage to provide a step change DC voltage; a first voltage polarity conversion circuit that receives the step-change DC voltage and converts the polarity of the step-change DC voltage to provide a DC output voltage; Power conversion systems.

8. Any one of the plurality of DC-DC conversion circuits an isolated DC-DC conversion unit that receives the DC power source and converts the DC power source into an isolated DC voltage; an interleaved step-down conversion unit that receives the isolated DC voltage and converts the isolated DC voltage into a step-down voltage; 8. The power conversion system of claim 7, further comprising: an active linear filter unit that receives the stepped-down voltage and converts the stepped-down voltage to the DC voltage or to the DC voltage.

9. The active linear filter unit comprises: a transistor receiving the step-down voltage including a ripple component; a driver connected to the transistor; an adder / subtractor that receives a reference voltage and the DC voltage or the voltage of the active linear filter unit and calculates an error voltage between the reference voltage and the DC voltage or the voltage; a controller that receives the error voltage and generates a filter control signal to control the driver, and that generates a drive signal to control the transistor so that the DC voltage or the voltage does not include the ripple component.

10. 8. The power conversion system of claim 7, wherein the voltage step change circuit includes a group of switches including a first switch and a second switch, wherein when the first switch connected to the regulated voltage is on and the second switch is off, a magnitude of the step change DC voltage is equal to a value of the DC voltage plus the regulated voltage, and when the first switch is off and the second switch is on, a magnitude of the step change DC voltage is equal to the DC voltage.

11. 11. The power conversion system of claim 10, wherein a first terminal of the first switch is connected to the positive terminal of the regulated voltage, a first terminal of the second switch is connected to the negative terminal of the regulated voltage and to the DC voltage, and a second terminal of the first switch is connected to the second terminal of the second switch to supply the positive voltage terminal of the step-varying DC voltage to a ground terminal.

12. One of the first voltage polarity conversion circuit and the second voltage polarity conversion circuit is a first bridge arm including a first upper switching element and a first lower switching element connected in series; a second bridge arm connected in parallel to the first bridge arm and including a second upper switching element and a second lower switching element connected in series; the first high-side switching element and the second low-side switching element are simultaneously turned on or off, The power conversion system according to claim 7 , wherein the first low-side switching element and the second high-side switching element are simultaneously turned on or off.

13. a three-phase AC-DC conversion circuit that receives a three-phase power source and converts the three-phase power source into a DC power source; a plurality of DC-DC converter circuits that receive the DC power source and convert the DC power source to generate DC voltages and voltages, respectively; a first voltage polarity conversion circuit that receives the DC voltage, converts the polarity of the DC voltage, and supplies a polarity-converted DC voltage; a second voltage polarity conversion circuit that receives the voltage, converts the polarity of the voltage, and supplies a regulated voltage; a voltage step change circuit that receives the polarity-reversed DC voltage and the regulated voltage, and adds the regulated voltage to the polarity-reversed DC voltage to output a DC output voltage; Including, Power conversion systems.

14. Any one of the plurality of DC-DC conversion circuits an isolated DC-DC conversion unit that receives the DC power source and converts the DC power source into an isolated DC voltage; an interleaved step-down conversion unit that receives the isolated DC voltage and converts the isolated DC voltage into a step-down voltage; 14. The power conversion system of claim 13, comprising: an active linear filter unit that receives the stepped-down voltage and converts the stepped-down voltage to the DC voltage or to the voltage.

15. The active linear filter unit comprises: a transistor receiving the step-down voltage including a ripple component; a driver connected to the transistor; an adder / subtractor that receives a reference voltage and the DC voltage or the voltage of the active linear filter unit and calculates an error voltage between the reference voltage and the DC voltage or the voltage; a controller that receives the error voltage and generates a filter control signal to control the driver, and that generates a drive signal to control the transistor so that the DC voltage or the voltage does not include the ripple component.

16. 14. The power conversion system of claim 13, wherein the voltage step change circuit includes a group of switches including a first switch and a second switch, the group of switches connected to the regulated voltage, when the first switch is on and the second switch is off, a magnitude of the DC output voltage is equal to the polarity-inverted DC voltage plus the regulated voltage, and when the first switch is off and the second switch is on, a magnitude of the DC output voltage is equal to the polarity-inverted DC voltage.

17. 17. The power conversion system of claim 16, wherein a first terminal of the first switch is connected to a positive terminal of the regulated voltage, a first terminal of the second switch is connected to a negative terminal of the regulated voltage and to the DC voltage, and a second terminal of the first switch is connected to a second terminal of the second switch to supply a positive voltage terminal of the DC output voltage to a ground terminal.

18. One of the first voltage polarity conversion circuit and the second voltage polarity conversion circuit is a first bridge arm including a first upper switching element and a first lower switching element connected in series; a second bridge arm connected in parallel to the first bridge arm and including a second upper switching element and a second lower switching element connected in series; the first high-side switching element and the second low-side switching element are simultaneously turned on or off, The power conversion system of claim 13 , wherein the first low-side switching element and the second high-side switching element are turned on or off simultaneously.

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