Dynamic interface for providing symmetric radio frequency return path

Abstract

To provide a substrate processing system and processing method to be used for efficiently managing a substrate in a cluster tool environment.SOLUTION: A processing chamber system 700 includes: a liner 715 positioned atop a chamber body 705, the liner including first quick disconnect members 770d; and a substrate support 725 disposed within the chamber body, the substrate support including a support plate 730 including a heater 735. The support plate includes second quick disconnect members 770c. The substrate support includes a shaft 750 coupled with the support plate and a dynamic plate 760 disposed about the shaft. The dynamic plate comprises inner disconnect members 770a and outer quick disconnect members 770b. The inner disconnect members are engageable with the second quick disconnect members at a transfer position; and the outer disconnect members are engageable with the first quick disconnect members at a process position.SELECTED DRAWING: Figure 7A

Description

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims the benefit of and priority to U.S. Non-Provisional Application No. 17 / 072,750, filed October 16, 2020, entitled "DYNAMIC INTERFACE FOR PROVIDING A SYMMETRIC RADIO FREQUENCY RETURN PATH," the contents of which are incorporated herein by reference in their entirety for all purposes. [Technical Field]

[0002] The present technology relates to semiconductor processes and equipment, and more particularly to substrate processing systems and components. [Background technology]

[0003] Semiconductor processing systems often utilize cluster tools to integrate several processing chambers. This configuration can facilitate the performance of multiple sequential processing steps without removing the substrate from a controlled processing environment, or can perform similar processes on multiple substrates at once in varying chambers. These chambers can include, for example, degas chambers, pre-processing chambers, transfer chambers, chemical vapor deposition chambers, physical deposition chambers, etch chambers, metrology chambers, and other chambers. The combination of chambers within a cluster tool, as well as the operating conditions and parameters under which these chambers operate, are selected to produce a specific structure using a specific process recipe and processing flow.

[0004] Cluster tools often process several substrates by passing them sequentially through a series of chambers and processing steps. The process recipe and sequence are typically programmed into a microprocessor controller that directs, controls, and monitors the processing of each substrate through the cluster tool. Once an entire cassette of wafers has been successfully processed through the cluster tool, the cassette may be passed to yet another cluster tool or to a stand-alone tool, such as a chemical-mechanical polisher, for further processing.

[0005] Robots are typically used to transfer wafers through the various processing and holding chambers. The amount of time required for each process and handling operation directly impacts the throughput of substrates per unit time. Substrate throughput within a cluster tool can be directly related to the speed of a substrate handling robot located within the transfer chamber. As processing chamber configurations become more advanced, traditional wafer transfer systems may become insufficient. Additionally, as cluster tools grow in size, the component configurations may no longer adequately support processing or maintenance steps.

[0006] Therefore, there is a need for improved systems and methods that can be used to efficiently manage substrates within a cluster tool environment. The above needs and others are addressed by the present technique. Summary of the Invention

[0007] An exemplary substrate processing system may include a chamber body defining a processing region. The system may include a liner disposed on the chamber body. A bottom surface of the liner may include a first plurality of quick disconnect members. The system may include a faceplate disposed on the liner. The system may include a support disposed within the chamber body. The substrate support may include a support plate including a heater. A bottom surface of the support plate may include a second plurality of quick disconnect members. The substrate support may include a shaft coupled to a bottom of the support plate. The substrate support may include a dynamic plate disposed around the shaft and spaced a distance below the support plate. The substrate support may include a plurality of metal straps coupling the bottom of the support plate to the dynamic plate. A top surface of the dynamic plate may include an inner plurality of quick disconnect members and an outer plurality of quick disconnect members. Each of the inner plurality of quick disconnect members can be engagable with a respective one of the second plurality of quick disconnect members when the substrate support is in the transfer position, and each of the outer plurality of quick disconnect members can be engagable with a respective one of the first plurality of quick disconnect members when the substrate support is in the processing position.

[0008] In some embodiments, each of the outer plurality of quick disconnect members can be decoupled from a respective one of the first plurality of quick disconnect members when the substrate support is in the transfer position. Each of the inner plurality of quick disconnect members can be decoupled from a respective one of the second plurality of quick disconnect members when the substrate support is in the processing position. The substrate support can be proximate to the faceplate when in the processing position. The substrate support can be proximate to the base of the chamber body when in the transfer position. An outer peripheral edge of the dynamic plate can extend radially beyond an outer peripheral edge of the support plate. Each of the outer plurality of quick disconnect members can include a guide pin. Each of the first plurality of quick disconnect members can define a receptacle including a spring-loaded catch sized to receive and secure a respective one of the guide pins. A top surface of each of the guide pins can be at a height lower than a top surface of the heater. The support plate may also include an isolator coupled to the heater and a ground plate coupled to a bottom of the isolator. A second plurality of quick disconnect members may be disposed on the ground plate. Each of the plurality of metal straps may be coated with a precursor-resistant material. The system may include a radio frequency source coupled to the substrate support. At the processing position, a closed radio frequency circuit may be formed between the radio frequency source, the substrate support, the plurality of metal straps, the liner, and the face plate.

[0009] Some embodiments of the present technology may also include a substrate processing system. The system may include a chamber body defining a processing region. The system may include a liner disposed on the chamber body. The system may include a faceplate disposed on the liner. The system may include a substrate support disposed within the chamber body. The substrate support may include a support plate including a heater. The substrate support may include a shaft coupled to a bottom of the support plate. The substrate support may include a dynamic plate disposed around the shaft and spaced a distance below the support plate. The substrate support may include a plurality of metal straps coupling a bottom of the support plate to the dynamic plate. The system may include a plurality of quick disconnect members coupling the liner to the dynamic plate when the substrate support is in the processing position and coupling the support plate to the dynamic plate when the substrate support is in the transfer position.

[0010] In some embodiments, the multiple quick disconnect members may include an outer multiple quick disconnect members on the dynamic plate that engage with a first multiple quick disconnect members on the liner and an inner multiple quick disconnect members on the dynamic plate that engage with a second multiple quick disconnect members on the support plate. Each of the outer multiple quick disconnect members may be disengaged from a respective one of the first multiple quick disconnect members when the substrate support is in the transfer position. Each of the inner multiple quick disconnect members may be disengaged from a respective one of the second multiple quick disconnect members when the substrate support is in the processing position. The multiple quick disconnect members may include a first subset of quick disconnect members and a second subset of quick disconnect members. Each of the first subset of quick disconnect members may include a guide pin. Each of the quick disconnect members of the second subset may define a receptacle including a spring-loaded catch sized to receive and secure a respective one of the guide pins. A top surface of each of the guide pins may be at a height lower than a top surface of the heater. The support plate may include an isolator coupled to the heater and a ground plate coupled to a bottom of the isolator. At least some of the multiple quick disconnect members may be disposed on the ground plate. The system may include a radio frequency source connected to the substrate support. At the processing position, a closed radio frequency circuit may be formed between the radio frequency source, the substrate support, the multiple metal straps, the liner, and the face plate. The substrate support may be vertically movable between a transfer position and a processing position.

[0011] Some embodiments of the present disclosure may also include a method of processing a substrate. The method includes moving a substrate support upward from a transfer position to a processing position within a semiconductor processing chamber to disengage a first plurality of quick disconnect members and engage a second plurality of quick disconnect members. When engaged, the first plurality of disconnect members may couple a support plate of the substrate support with a dynamic plate of the substrate support. When engaged, the second plurality of disconnect members may couple a liner of the semiconductor processing chamber with the dynamic plate. The support plate may include a heater. The method may include delivering one or more precursors to the semiconductor processing chamber. The method may include providing a radio frequency current to the heater via a radio frequency source.

[0012] In some embodiments, the substrate support can include a plurality of metal straps that couple the bottom of the support plate to the dynamic plate, and in the processing position, a closed radio frequency circuit can be formed between the radio frequency source, the substrate support, the plurality of metal straps, the liner, and the face plate.

[0013] Such techniques may offer numerous advantages over conventional systems and techniques. For example, the processing system may provide multi-substrate processing capabilities that may be scaled far beyond conventional designs. Additionally, each chamber system may include dynamic radio frequency circuitry that closes when the heater is in the processing position and opens when the heater is in the transfer position. These and other embodiments, along with their many advantages and features, are described in more detail below and in the accompanying drawings.

[0014] A better understanding of the nature and advantages of the disclosed technology may be realized by reference to the remaining portions of the specification and the drawings. [Brief explanation of the drawings]

[0015] [Figure 1] 1 shows a schematic top view of an exemplary processing system according to some embodiments of the present technique; [Figure 2]1 shows a schematic isometric view of a transfer region of an exemplary chamber system in accordance with some embodiments of the present technique; [Figure 3] 1 shows a schematic isometric view of a transfer region of an exemplary chamber system in accordance with some embodiments of the present technique; [Figure 4] 1 shows a schematic isometric view of a transfer region of an exemplary chamber system, in accordance with some embodiments of the present technique; [Figure 5] 1 shows a schematic partial isometric view of an exemplary chamber system according to some embodiments of the present technique; [Figure 6] 1 shows a schematic partial cross-sectional view of an exemplary chamber system according to some embodiments of the present technique; [Figure 7A] 1 shows a schematic partial cross-sectional view of an exemplary chamber system according to some embodiments of the present technique; [Figure 7B] 1 shows a schematic partial cross-sectional view of an exemplary chamber system according to some embodiments of the present technique; [Figure 8A-B] 15A-15D show schematic partial cross-sectional views of exemplary quick disconnect members in accordance with some embodiments of the present technology. [Figure 9] 1 shows a schematic partial cross-sectional view of an exemplary chamber system according to some embodiments of the present technique; [Figure 10] 1 shows a schematic partial cross-sectional view of an exemplary chamber system according to some embodiments of the present technique; [Figure 11] 1 illustrates exemplary method steps for processing a substrate, in accordance with some embodiments of the present technique. DETAILED DESCRIPTION OF THE INVENTION

[0016] Some of the figures are included as schematic diagrams. It is understood that the drawings are for illustrative purposes and are not to be considered to scale or to ratio unless expressly stated to be to scale or to ratio. Furthermore, as schematic diagrams, the drawings are provided to aid in understanding and may not include all aspects or information compared to realistic depictions and may include material that is emphasized for illustrative purposes.

[0017] In the accompanying figures, similar components and / or features may have the same reference numerals. Furthermore, various components of the same type may be distinguished by adding a letter following the reference numeral that distinguishes between the similar components. When only a first reference numeral is used in this specification, the description may apply to any similar component having the same first reference numeral, whatever its letter.

[0018] Substrate processing can involve time-consuming steps to add, remove, or otherwise modify material on a wafer or semiconductor substrate. Efficient substrate movement can reduce wait times and increase substrate throughput. To improve the number of substrates processed within a cluster tool, additional chambers can be incorporated onto the mainframe. Extending the tool allows for the successive addition of transfer robots and processing chambers, but this can become spatially inefficient as the footprint of the cluster tool increases. Correspondingly, the present technology can include cluster tools with increased numbers of processing chambers within a defined footprint. To accommodate the limited footprint around the transfer robot, the technology can increase the number of processing chambers laterally outward from the robot. For example, some conventional cluster tools may place one or two processing chambers around a centrally located section of the transfer robot to maximize the number of processing chambers radially around the robot. The present technology can expand on this concept by incorporating additional chambers laterally outward as another row or group of chambers. For example, the techniques may be applied to cluster tools that include three, four, five, six, or more processing chambers accessible at each of one or more robot access locations.

[0019] However, as additional processing locations are added, accessing these access locations from a central robot may no longer be feasible unless additional transfer capabilities are provided at each location. Some prior art techniques may include wafer carriers on which substrates remain seated during transfer. However, wafer carriers may contribute to thermal non-uniformities and particle contamination on the substrate. The present technology overcomes these issues by incorporating a transport section vertically aligned with the processing chamber region and a carousel or transfer device that can operate in coordination with the central robot to access additional wafer locations. In some embodiments, the present technology may not require the use of conventional wafer carriers and can transfer a specific wafer from one substrate support to another within the transfer region.

[0020] As the wafer node shrinks, the number of variables that contribute to across-wafer performance increases. Variables that contribute to across-wafer radial uniformity can include control of the RF current for the pedestal heater, and some of these variables are the design of the supply / return paths for the RF current. Separating the RF supply and return paths in a processing system with multiple chambers and dedicated heaters for each chamber is crucial to preventing crosstalk between chambers and improving across-wafer performance for each chamber, for example, by individually adjusting the plasma impedance by controlling the RF supply / return current of each individual chamber. In addition, providing a symmetrical RF return path can eliminate and / or minimize the impact of RF on across-wafer radial uniformity.

[0021] In conventional processing systems, a symmetrical RF return path can be achieved by arranging the components in the RF return path as concentric cylinders so that the RF return current can return uniformly and symmetrically from the faceplate to the RF source. The RF path can be dynamic to allow for transfer of wafers to and from a transfer device. For example, a dynamic path can open or close the RF circuit based on the heater position. When the heater is in the processing position, the RF circuit can be closed, allowing the RF return current to return to the RF source. When the heater is in the transfer position, the RF circuit can be left open, and no RF current can flow.

[0022] Some conventional processing systems utilize contact between a liner and a flexible baffle to open and close a high-frequency circuit. The baffle can be coupled to a heater such that when the heater is in the processing position, the baffle moves to an upper position and contacts the chamber liner. The contact between the liner and the baffle connects the liner and the heater, closing the high-frequency circuit. When the heater is lowered to the transfer position, the baffle is lowered, releasing the contact with the liner and opening the high-frequency circuit. While this baffle solution creates a dynamic high-frequency path, the use of the baffle presents several problems. For example, the relatively large surface area of ​​the dynamic interface between the baffle and the liner can release residual particles remaining on the liner plate from a previous deposition process when the liner and baffle come into contact with each other. While these particles may be downstream of the heater, they can still deposit on the wafer, potentially leading to reduced wafer performance. For example, many deposition processes may include supplying a purge gas to the chamber from below. The flow of purge gas can carry particles with it and carry them to the surface of the wafer.

[0023] Further problems can arise with conventional bellows designs. For example, conventional bellows can be made from stainless steel materials that can react with various precursors, such as nitrogen trifluoride, to form additional particles. Additionally, typical bellows are quite heavy, often weighing approximately 8 kg, and pre-assembled installation kits can weigh up to 18 kg. This makes installation and maintenance difficult, often requiring multiple technicians.

[0024] To address these and other concerns, embodiments of the present technology replace the baffles with several relatively small quick-disconnect members that engage a dynamic plate with the liner, connecting the heater to the liner. This connection provides a dynamic high-frequency circuit similar to that provided by the baffles, while reducing the dynamic contact area that can contribute to particle generation. Additionally, the quick-disconnect members can be significantly lighter than bellows, allowing them to be installed and maintained by a single technician.

[0025] While the remainder of the disclosure will routinely identify particular structures, such as a four-position chamber system, in which the present structures and methods may be utilized, it will be readily apparent that the present systems and methods are equally applicable to any number of structures and devices that may benefit from the described structural capabilities. Correspondingly, the present technology should not be considered limited to use with any particular structure. Furthermore, while an exemplary tool system is described to provide a foundation for the present technology, it should be understood that the present technology may be incorporated into any number of semiconductor processing chambers and tools that may benefit from some or all of the described processes and systems.

[0026] 1 illustrates a top view of one embodiment of a substrate processing tool or processing system 100 with deposition, etch, bake, and cure chambers in accordance with some embodiments of the present technology. In the figure, a set of front-opening unified pods 102 supplies substrates of various sizes, which are received by robotic arms 104a and 104b within a factory interface 103, placed into a load lock or low-pressure holding area 106, and then transferred to one of substrate processing regions 108 arranged within chamber systems or quad sections 109a-c, each of which can be a substrate processing system having a transfer region fluidly coupled to multiple processing regions 108. While a quad system is illustrated, it should be understood that standalone chambers, twin chambers, and platforms incorporating other multiple chamber systems are also encompassed by the present technology. A second robot arm 110 housed within a transfer chamber 112 can be utilized to transfer substrate wafers from the holding area 106 to the quad section 109 and back from the quad section 109 to the holding area 106, and the second robot arm 110 can be housed within a transfer chamber to which each of the quad sections or processing systems can be connected. Each substrate processing region 108 can be equipped to perform several substrate processing steps, including cyclical layer deposition, atomic layer deposition, chemical vapor deposition, physical vapor deposition, as well as any number of deposition processes including etching, pre-cleaning, annealing, plasma treatment, degassing, orientation, and other substrate treatments.

[0027] Each quad section 109 may include a transfer region capable of receiving substrates from and transferring substrates to the second robot arm 110. The transfer region of the chamber system may be aligned with a transfer chamber having the second robot arm 110. In some embodiments, the transfer region may be laterally accessible to the robot. In subsequent steps, components of the transfer section may vertically move the substrate into the overlying processing region 108. Similarly, the transfer region may also be operable to rotate the substrate between positions within each transfer region. The substrate processing region 108 may include any number of system components for depositing, annealing, curing, and / or etching a material film on a substrate or wafer. In one configuration, two sets of processing regions, such as the processing regions in quad sections 109a and 109b, may be used to deposit material on the substrate, and a third set of processing chambers, such as the processing chambers or processing region in quad section 109c, may be used to cure, anneal, or otherwise process the deposited film. In other configurations, all three sets of chambers, such as the twelve chambers shown, can be configured to both deposit a film on a substrate and / or cure a film on a substrate.

[0028] As shown, the second robot arm 110 may include two arms for simultaneously transferring and / or retrieving multiple substrates. For example, each quad section 109 may include two accesses 107 along a surface of the transfer region housing, which may be laterally aligned with the second robot arm. The accesses may be defined along a surface adjacent to the transfer chamber 112. In some embodiments, as shown, a first access may be aligned with a first substrate support of the quad section's plurality of substrate supports. Additionally, a second access may be aligned with a second substrate support of the quad section's plurality of substrate supports. The first substrate support may be adjacent to the second substrate support, and in some embodiments, the two substrate supports may define a first row of substrate supports. As the illustrated configuration shows, the second row of substrate supports may be positioned laterally outward from the transfer chamber 112 and aft of the first row of substrate supports. The two arms of the second robot arm 110 may be spaced apart so that the two arms can simultaneously enter a quad section or chamber system to transfer or retrieve one or two substrates to or from a substrate support in the transfer region.

[0029] Any one or more of the transfer regions described may incorporate additional chambers separate from the fabrication systems shown in the various embodiments. It will be understood that additional configurations of deposition chambers, etch chambers, anneal chambers, and curing chambers for dielectric films are contemplated by system 100. Additionally, any number of other processing systems may be utilized with the present techniques, and such other processing systems may incorporate transfer systems for performing any of the specific steps, such as transferring substrates. In some embodiments, a processing system that may provide access to multiple processing chamber regions while maintaining a vacuum environment in various sections, such as the holding and transfer regions described above, may enable steps to be performed in multiple chambers while maintaining a specific vacuum environment between separate processes.

[0030] As previously mentioned, processing system 100, and more specifically, a quad section or chamber system incorporated into processing system 100 or other processing systems, may include a transfer section disposed below the illustrated processing chamber region. FIG. 2 illustrates a schematic isometric view of a transfer section of an exemplary chamber system 200 according to some embodiments of the present technology. FIG. 2 may illustrate additional aspects or variations of aspects of the transfer region described above, and may include any of the described components or features. The illustrated system may include a transfer region housing 205, which may be a chamber body, as further described below, defining a transfer region that may include several components. The transfer region may further be defined, at least in part, from above by a processing chamber or region fluidly coupled to the transfer region, such as the processing chamber region 108 illustrated in quad section 109 of FIG. 1. Sidewalls of the transfer region housing may define one or more access locations 207 through which substrates may be transferred and retrieved, for example, by the second robot arm 110 described above. The access locations 207 may be slit valves or other sealable access locations, and in some embodiments include doors or other sealing mechanisms to provide a sealed environment within the transfer region housing 205. While two such access locations 207 are shown, it is understood that in some embodiments only a single access location 207 may be included, as well as access locations on multiple sides of the transfer region housing. Furthermore, it is understood that the illustrated transfer section may be sized to accommodate any substrate size, including 200 mm, 300 mm, 450 mm, or larger or smaller substrates, including substrates featuring any number of profiles or shapes.

[0031] Within the transfer region housing 205, there may be multiple substrate supports 210 arranged around the transfer region space. While four substrate supports are shown, it should be understood that any number of substrate supports is equally encompassed by embodiments of the present technology. For example, three, four, five, six, eight, or more substrate supports 210 may be housed within the transfer region according to embodiments of the present technology. The second robot arm 110 may transfer a substrate to one or both of the substrate supports 210a or 210b via the access portion 207. Similarly, the second robot arm 110 may retrieve a substrate from these locations. Lift pins 212 may protrude from the substrate support 210, allowing the robot access underneath the substrate. The lift pins may be fixed on the substrate support or may be fixed in a position that allows the substrate support to retract downward, or in some embodiments, the lift pins may additionally be raised and lowered via the substrate support. The substrate support 210 may be vertically movable and, in some embodiments, may extend upward to a processing chamber region of a substrate processing system, such as processing chamber region 108 disposed above the transfer region housing 205 .

[0032] The transfer region housing 205 can provide access 215 for an alignment system that can include an aligner that can pass through an opening in the transfer region housing as shown and can operate in conjunction with a laser, camera, or other monitoring device projecting or transmitting through an adjacent opening to further determine whether a moving substrate is properly aligned. The transfer region housing 205 can also include a transfer apparatus 220 that can operate in several ways to position and move substrates between various substrate supports. In one example, the transfer apparatus 220 can move substrates on substrate supports 210a and 210b to substrate supports 210c and 210d, allowing additional substrates to be transferred into the transfer chamber. Additional transfer steps can include rotating the substrate between the substrate supports for additional processing in the overlying processing region.

[0033] The transfer apparatus 220 can include a central hub 225, which can include one or more shafts extending into the transfer chamber. The shafts can have end effectors 235 coupled thereto. The end effectors 235 can include multiple arms 237 extending radially or laterally outward from the central hub. While arms extending from a central body are shown, in various embodiments, the end effectors can additionally include separate arms, each coupled to a shaft or central hub. Embodiments of the present technology can include any number of arms. In some embodiments, the number of arms 237 can be similar to or equal to the number of substrate supports 210 included in the chamber. Thus, as shown, if there are four substrate supports, the transfer apparatus 220 can have four arms extending from the end effector. The arms can feature any number of shapes and profiles, such as straight or arcuate profiles, including any number of terminal profiles including hooks, rings, forks, or other designs for supporting the substrate and / or providing access to the substrate, for example, for alignment or engagement.

[0034] The end effector 235, or components or portions of the end effector, may be used to contact the substrate during transfer or movement. These components and end effectors may be made from or include several materials, including conductive and / or insulating materials. In some embodiments, the materials may be coated or plated to withstand contact with precursors or other chemicals that may pass into the transfer chamber from the overlying processing chambers.

[0035] Additionally, materials may be provided or selected to withstand other environmental characteristics, such as temperature. In some embodiments, the substrate support may be operable to heat a substrate placed thereon. The substrate support may be configured to raise the temperature of the surface or substrate to or above about 100°C, about 200°C, about 300°C, about 400°C, about 500°C, about 600°C, about 700°C, or about 800°C. Any of these temperatures may be maintained during operation, and thus components of the transfer apparatus 220 may be exposed to any of the temperatures listed or included above. Accordingly, in some embodiments, any of the above materials may be selected to accommodate these temperature conditions and may include materials characterized by relatively low coefficients of thermal expansion or other beneficial properties, such as ceramics and metals.

[0036] The component connections may also be adapted for operation in high-temperature and / or corrosive environments. For example, if the end effector and tip are each ceramic, the connection may include press fits, snap fits, or other joints, such as bolts, that do not include additional materials that may expand or contract with temperature and crack the ceramic. In some embodiments, the tip may be continuous with the end effector or may be integrally formed therewith. Any number of other materials that may facilitate processing or promote durability during processing may be utilized and are similarly encompassed by the present technology. The transfer device 220 may include several components and configurations that may facilitate movement of the end effector in multiple directions, such as rotational, vertical, or lateral movement, in one or more ways using drive system components to which the end effector may be coupled.

[0037] 3 shows a schematic isometric view of a transfer region of an exemplary chamber system 300 according to some embodiments of the present technology. Chamber system 300 may be similar to the transfer region of chamber system 200 described above and may include similar components, including any of the components, features, or configurations described above. FIG. 3, along with the following figures, may also illustrate certain component combinations encompassed by the present technology.

[0038] The chamber system 300 may include a chamber body 305 or housing that defines a transfer region. Within the defined space, there may be multiple substrate supports 310 distributed around the chamber body, as described above. As described further below, each substrate support 310 may be vertically movable along a central axis of the substrate support between a first position, as shown, and a second position where substrate processing may be performed. The chamber body 305 may also define one or more accesses 307 therethrough. A transfer apparatus 335 may be disposed within the transfer region and may be configured to engage and rotate substrates between the substrate supports 310 within the transfer region, as described above. For example, the transfer apparatus 335 may be rotatable about its central axis to reposition the substrate. The transfer apparatus 335 may also be laterally movable in some embodiments to further facilitate repositioning of substrates on each substrate support.

[0039] The chamber body 305 can include a top surface 306, which can provide support for overlying components of the system. The top surface 306 can define a gasket groove 308, which can provide a seat for a gasket to provide an airtight seal for overlying components for vacuum processing. Unlike some conventional systems, the chamber system 300 and other chamber systems according to some embodiments of the present technology can include an open transfer region within the processing chamber, where the processing region can be formed above the transfer region. Because the transfer apparatus 335 creates an area of ​​sweep for the substrate, no support or structure may be available to separate the processing region. Thus, the present technology can utilize an overlying lid structure, as described below, to form an isolated processing region above the open transfer region. Thus, in some embodiments, sealing between the chamber body and the overlying components can occur only around the outer walls of the chamber body that define the transfer region, and in some embodiments, no internal bonding may exist. The chamber body 305 can also define an opening 315, which can facilitate exhaust flow from the processing region of the overlying structure. The top surface 306 of the chamber body 305 can also define one or more gasket grooves around the opening 315 for sealing with the overlying component. Additionally, the opening can provide a positioning feature that can facilitate stacking of components in some embodiments.

[0040] 4 shows a schematic isometric view of structures above a chamber system 300, in accordance with some embodiments of the present technology. For example, in some embodiments, a first lid plate 405 can be seated on the chamber body 305. The first lid plate 405 can feature a first surface 407 and a second surface 409 opposite the first surface 407. The first surface 407 of the first lid plate 405 contacts the chamber body 305 and can cooperate with the groove 308 described above to define a companion groove to create a gasket channel between components. The first lid plate 405 can also define an opening 410, which can provide isolation of the area above the transfer chamber to form a processing region for substrate processing.

[0041] The openings 410 may be defined through the first lid plate 405 and may be at least partially aligned with substrate supports in the transfer region. In some embodiments, the number of openings 410 may be equal to the number of substrate supports in the transfer region, and each opening 410 may be axially aligned with a substrate support of the plurality of substrate supports. As described further below, the processing region may be at least partially defined by the substrate supports when vertically elevated to a second position in the chamber system. The substrate supports may pass through the openings 410 in the first lid plate 405. Correspondingly, in some embodiments, the openings 410 in the first lid plate 405 may be characterized by a diameter larger than the diameter of the associated substrate support. Depending on the size of the gap, the diameter may be about 25% less than or about 25% more than the diameter of the substrate support, in some embodiments about 20% less than or about 20% more, about 15% less than or about 15% more, about 10% less than or about 10% more, about 9% less than or about 9% more, about 8% less than or about 8% more, about 7% less than or about 7% more, about 6% less than or about 6% more, about 5% less than or about 5% more, about 4% less than or about 4% more, about 3% less than or about 3% more, about 2% less than or about 2% more, about 1% or about 1% more, or even smaller proportions larger, which can provide a minimum gap distance between the substrate support and the opening 410.

[0042] The first lid plate 405 may also include a second surface 409 opposite the first surface 407. The second surface 409 may define a stepped ledge 415, which may create an annular recessed shelf through the second surface 409 of the first lid plate 405. In some embodiments, the stepped ledge 415 may be defined around each opening of the plurality of openings 410. The recessed shelf may provide support for lid stack components, as described further below. Additionally, the first lid plate 405 may define a second opening 420, which may at least partially define a pumping channel from an overlying component, as described below. The second opening 420 may be axially aligned with the opening 315 of the chamber body 305, described above.

[0043] 5 shows a schematic partial isometric view of a chamber system 300 according to some embodiments of the present technology. The view may show a partial cross section through two processing regions and a portion of the transfer region of the chamber system. For example, the chamber system 300 may be a quad section of the processing system 100 described above and may include any of the components or systems described above.

[0044] The chamber system 300, as illustrated throughout the figures, may include a chamber body 305 defining a transfer region 502 including a substrate support 310, which may extend into the chamber body 305 and be vertically movable, as previously described. A first lid plate 405 may be seated on the chamber body 305 and may define openings 410 that create access for a processing region 504 formed by additional chamber system components. A lid stack 505 may be seated at least partially around or within each opening, and the chamber system 300 may include multiple lid stacks 505, where a number of lid stacks is included equal to the number of openings 410 in the plurality of openings. Each lid stack 505 may be seated on the first lid plate 405 and may rest on a shelf created by a step ledge through a second surface of the first lid plate. The lid stacks 505 may at least partially define the processing region 504 of the chamber system 300.

[0045] As shown, the processing region 504 may be vertically offset from the transfer region 502 but may be fluidly coupled thereto. Additionally, the processing region may be isolated from other processing regions. A processing region may be fluidly coupled to other processing regions from below through the transfer region, but may be fluidly isolated from each other processing region from above. Each lid stack 505 may also be aligned with a substrate support in some embodiments. For example, as shown, lid stack 505a may be aligned over substrate support 310a, and lid stack 505b may be aligned over substrate support 310b. When raised to an operating position, such as the second position, the substrate supports may transfer substrates for individual processing in the separate processing regions. When in this operating position, each processing region 504 may be at least partially defined from below by the associated substrate support in the second position, as described further below.

[0046] FIG. 5 also illustrates embodiments in which a second lid plate 510 may be included for the chamber system. The second lid plate 510 may be coupled to each of the lid stacks, which may be disposed between the first lid plate 405 and the second lid plate 510 in some embodiments. As described below, the second lid plate 510 may facilitate access to components of the lid stack 505. The second lid plate 510 may define a plurality of openings 512 therethrough. Each opening of the plurality of openings may be defined to provide fluid access to a particular lid stack 505 or processing region 504. In some embodiments, a remote plasma unit 515 may optionally be included in the chamber system 300 and may be supported on the second lid plate 510. In some embodiments, the remote plasma unit 515 may be fluidly coupled to each opening 512 of the plurality of openings through the second lid plate 510. Isolation valves 520 can be included along each fluid line to provide fluid control to each individual processing region 504. For example, as shown, opening 512a can provide fluid access to lid stack 505a. Opening 512a can also be axially aligned with one of the lid stack components, and in some embodiments, with substrate support 310a, thereby allowing axial alignment of components associated with individual processing regions, e.g., along a central axis passing through the substrate support or one of the components associated with a particular processing region 504. Similarly, opening 512b can provide fluid access to lid stack 505b and in some embodiments can be aligned (including axially aligned) with the lid stack components and substrate support 310b.

[0047] FIG. 6 shows a schematic cross-sectional view of one embodiment of a chamber system 300 according to some embodiments of the present technique. FIG. 6 may illustrate the cross-sectional view previously shown in FIG. 5 and may further show system components. This view may include any of the components of the systems shown and previously described, and may further illustrate additional aspects of any of the systems previously described. It should be understood that this view may also show example components as viewed through any two adjacent processing regions 108 within any of the quad sections 109 previously described. The elevation view may show the configuration of one or more processing regions 504 and the transfer region 502, or the fluid coupling between one or more processing regions 504 and the transfer region 502. For example, a continuous transfer region 502 may be defined by the chamber body 305. The housing may define an open interior space in which several substrate supports 310 may be disposed. For example, as shown in FIG. 1, an example processing system may include four or more substrate supports 310, including multiple substrate supports 310 distributed within the chamber body around the transfer region. The substrate support may be a pedestal as shown, although several other configurations may be used. In some embodiments, the pedestal may be vertically movable between the transfer region 502 and a processing region 504 above the transfer region. The substrate support may be vertically movable along a central axis of the substrate support along a path between a first position and a second position within the chamber system. Correspondingly, in some embodiments, each substrate support 310 may be axially aligned with an overlying processing region 504 defined by one or more chamber components.

[0048] The open transfer region can provide the ability for a transfer device 635, such as a carousel, to engage a substrate and move the substrate, for example, rotationally, between various substrate supports. The transfer device 635 can be rotatable about a central axis, which can allow the substrate to be positioned for processing in any of the processing regions 504 within the processing system. The transfer device 635 can include one or more end effectors that can engage the substrate from above, below, or at the outer edge of the substrate for movement around the substrate support. The transfer device can receive a substrate from a transfer chamber robot, such as robot 110 described above. The transfer device can then rotate the substrate to an alternate substrate support to facilitate the transfer of additional substrates.

[0049] Once positioned and awaiting processing, the transfer apparatus can position an end effector or arm between the substrate supports, allowing the substrate supports to rise above the transfer apparatus 635 and transfer the substrate into the processing region 504, which may be vertically displaceable from the transfer region 502. For example, as shown, substrate support 310a can transfer the substrate into processing region 504a, and substrate support 310b can transfer the substrate into processing region 504b. This can also be done with the other two substrate supports and processing regions, as well as with additional substrate supports and processing regions in embodiments in which additional processing regions are included. In this configuration, when the substrate supports are operatively engaged to process a substrate, for example in the second position, they can at least partially define the processing region 504 from below, and the processing region can be axially aligned with the associated substrate support. The processing regions can be defined from above by components of the lid stack 505, and each processing region can include one or more of the illustrated components. In some embodiments, each processing region may have a separate lid stack component, while in some embodiments, a component may house multiple processing regions 504. Based on this configuration, in some embodiments, each processing region 504 may be fluidly coupled to the transfer region but fluidly isolated from above from each other processing region within the chamber system or quad section.

[0050] The lid stack 505 can include several components that can facilitate the flow of precursors through the chamber system and can be at least partially contained between the first lid plate 405 and the second lid plate 510. A liner 605 can sit directly on the shelf formed by each step ledge in the first lid plate 405. For example, the liner 605 can define a lip or flange such that the liner 605 extends from the shelf of the first lid plate 405. In some embodiments, the liner 605 can extend vertically below the first surface of the first lid plate 405 and at least partially into the open transfer region 502. The liner 605 can be made of a material similar to or different from that of the chamber body and can be or include a material that limits the deposition or retention of material on the surface of the liner 605. The liner 605 can define the access diameter of the substrate support 310 and can be characterized by any of the gap amounts described above for the clearance between the substrate support 310 and the liner 605 when included.

[0051] A pumping liner 610 may be seated on the liner 605, and the pumping liner 610 may extend at least partially within a recess or along a step ledge defined in the second surface of the first lid plate 405. In some embodiments, the pumping liner 610 may rest on the liner 605 on a shelf formed by the step ledge. The pumping liner 610 may be an annular component and may at least partially define the processing region 504 radially or laterally according to the shape of the space. The pumping liner may define an exhaust plenum within the liner and may define a plurality of openings on the annular inner surface of the pumping liner that provide access to the exhaust plenum. The exhaust plenum may extend at least partially vertically above the height of the first lid plate 405, which may facilitate transmission of exhaust materials through exhaust channels formed through the first lid plate and the chamber body, as described above. A portion of the pumping liner can extend at least partially across the second surface of the first lid plate 405 to complete an exhaust channel between the exhaust plenum of the pumping liner and the channel formed through the chamber body and the first lid plate.

[0052] A face plate 615 may sit on the pumping liner 610 and may define a plurality of openings therethrough for delivering precursors into the processing region 504. The face plate 615 may at least partially define an associated processing region 504 from above, and the face plate 615 may cooperate at least partially with the pumping liner and the substrate support in the raised position to generally define the processing region. The face plate 615 may function as an electrode of the system for generating a localized plasma in the processing region 504, and thus in some embodiments, the face plate 615 may be connected to an electrical source or grounded. In some embodiments, the substrate support 310 may operate as a companion electrode for generating a capacitively coupled plasma between the face plate and the substrate support.

[0053] A blocker plate 620 may be seated on the face plate 615 and may further distribute the processing fluid or precursor to generate a more uniform flow distribution to the substrate. The blocker plate 620 may also define several openings therethrough. In some embodiments, the blocker plate 620 may feature a diameter smaller than the diameter of the face plate, as shown, thereby providing an annular access on the surface of the face plate radially outward from the blocker plate 620. In some embodiments, a face plate heater 625 may be seated on the annular access and may contact the face plate 615 to heat components during processing or other steps. In some embodiments, the blocker plate 620 and face plate heater 625 may be jointly characterized as having an outer radial diameter equal to or substantially equal to the outer radial diameter of the face plate 615. Similarly, face plate heater 625, in some embodiments, may be characterized as having an outer radial diameter that is equal to or substantially equal to the outer radial diameter of face plate 615. Face plate heater 625 may extend around blocker plate 620 and may or may not directly contact blocker plate 620 at the outer radial edge of blocker plate 620.

[0054] A gas box 630 may be positioned above the blocker plate 620, and the gas box 630 of each lid stack 505 may at least partially support the second lid plate 510. The gas box 630 may define a central opening aligned with an associated opening 512 of the plurality of openings defined through the second lid plate 510. The second lid plate 510, in some embodiments, may support a remote plasma unit 515, which may include piping to each opening 512 and into each processing region 504. An adapter may be positioned through the opening 512 to couple the piping of the remote plasma unit to the gas box 630. Additionally, a shut-off valve 520 may be positioned in the piping to meter flow to each individual processing region 504, in some embodiments.

[0055] O-rings or gaskets may be seated between each component of the lid stack 505, which may facilitate vacuum processing within the chamber system 300 in some embodiments. The specific component connections between the first lid plate 405 and the second lid plate 510 may be made in any number of ways that may facilitate access to system components. For example, a first set of connections may be incorporated between the first lid plate 405 and the second lid plate 510, which may facilitate removal of both lid plates and each lid stack 505, which may provide access to a substrate support or transfer device in a transfer region of the chamber system. The connections may include any number of physical, removable connections extending between the two lid plates, which may be separable from the chamber body 405 as a whole. For example, a drive motor on a mainframe that includes the chamber system 300 may be removably coupled to the second lid plate 510, but may lift the component away from the chamber body 305.

[0056] When the bond between the first lid plate 405 and the second lid plate 510 is released, the second lid plate 510 is removed, but the first lid plate 405 can remain on the chamber body 305, which may facilitate access to one or more components of the lid stack 505. The cut in the lid stack 505 may occur between any two of the components described above, some of which may be bonded to the first lid plate 405 and some of which may be bonded to the second lid plate 510. For example, in some embodiments, each of the gas boxes 630 may be bonded to the second lid plate 510. Thus, when the second lid plate is lifted from the chamber system, the gas boxes may be removed, providing access to the blocker plate and face plate. Continuing with this example, the blocker plate 620 and face plate 615 may or may not be bonded to the first lid plate 405. For example, mechanical coupling may be included, but components may also be separated and sit floating on the first lid plate 405, such as with positioning features that maintain proper alignment of the components. It should be understood that this example is non-limiting and is intended to illustrate any number of disconnect configurations between any two components of the lid stack when the second lid plate 510 is separated from the first lid plate 405. Thus, following the coupling between the first and second lid plates, the entire lid stack and both lid plates may be removed to provide access to a transfer area, or the second lid plate may be removed to provide access to the lid stack components.

[0057] 7A and 7B show schematic cross-sectional elevation views of an exemplary processing chamber system 700 according to some embodiments of the present technology. FIGS. 7A and 7B may illustrate additional details regarding components within systems 100, 200, and 300. It should be understood that system 700 may, in some embodiments, include any feature or aspect of systems 100, 200, and / or 300 previously described. System 700 may be used to perform semiconductor processing steps, such as deposition, removal, and cleaning steps. System 700 may show a partial view of chamber components that may be incorporated into the semiconductor processing system being discussed. Any aspect of system 700 may be incorporated into other processing chambers or systems, as will be readily apparent to those skilled in the art.

[0058] The system 700 may include a chamber body 705, which may define a transfer region and a processing region. A lid plate 710 may seat on the chamber body 705 and may support a liner 715. For example, an edge of the liner 715 may seat directly on a shelf formed by a stepped ledge of the lid plate 710. For example, the liner 715 may define a lip or flange, which may cause the liner 715 to extend from the shelf of the lid plate 710. In some embodiments, the liner 715 may extend vertically below the first lid plate 710 and may extend at least partially into the chamber body 705. A face plate 720 may be disposed on the liner 715. In some embodiments, one or more intervening components, such as a pump liner, may be disposed between the face plate 720 and the liner 715.

[0059] A substrate support 725 may be disposed within the chamber body 705. The substrate support 725 may be vertically movable within the chamber body 705 between the transfer region and the processing region. The substrate support 725 may include a support plate 730, which may include a heater 735, an isolator 740, and a ground plate 745. The substrate support 725 may also include a shaft 750, which may extend through the bottom of the chamber body 705 and be connected to a radio frequency source 755. The substrate support may also include a dynamic plate 760, which is disposed around the shaft 750 and vertically spaced from the bottom of the support plate 730. In some embodiments, a gap may be maintained between the shaft 750 and an inner end surface of the dynamic plate 760, allowing purge gas to be supplied to the processing region from a purge gas source disposed below the chamber body 705. The dynamic plate 760 can be annular in shape and have a larger radius than the support plate 730, such that the outer periphery of the dynamic plate 760 extends radially outward from the outer periphery of the support plate 730. In some embodiments, the dynamic plate 760 and / or the heater 735 can be formed of a material that is resistant to precursors such as nitrogen trifluoride. For example, the dynamic plate 760 and / or the heater 735 can be formed of an aluminum material such as aluminum nitride. Several straps 765 can extend between the top surface of the dynamic plate 760 and the bottom surface of the support plate 730 to connect the top surface of the dynamic plate 760 to the bottom surface of the support plate 730. For example, the straps 765 can be connected to the bottom surface of the ground plate 745. The straps 765 can provide high frequency continuity between the support plate 725 and the dynamic plate 760. Each strap 765 can be formed from a thin, flexible sheet of metal or other conductive material that allows the strap 765 to repeatedly flex between a compressed or folded state and an extended state. For example, each strap 765 can be formed from stainless steel, aluminum, and / or other metallic materials. In some embodiments, the straps 765 can be coated with a precursor-resistant material.For example, the strap 765 may be coated with an aluminum material such as aluminum nitride.

[0060] As described above, the substrate support 725 is movable within the chamber body 705 between a lower transfer region and an upper processing region. During a processing step, the substrate support 725 is moved to a processing position within the processing region. A high frequency current can be applied to the heater to help maintain the substrate at a desired temperature and assist in producing a uniform film on the substrate. Once deposition and / or other processing steps are completed, the substrate support 725 can be lowered to a transfer position within the transfer region. The processed substrate can be removed from the substrate support 725 and a new substrate can be placed on the substrate support 725. During the transfer process, no high frequency current is supplied to the heater 735.

[0061] Features of the chamber system 700 can create a closed RF circuit that allows RF current to flow from the RF source 755 to the heater 735 and back from the heater 735 when the substrate support 725 is in the processing position, and opens the circuit to prevent RF current from flowing when the substrate support 725 is in the transfer position. For example, some quick disconnect members 770 can be used to couple the liner 715 to the dynamic plate 760 only when the substrate support 725 is in the processing position, and some quick disconnect members 770 can be used to couple the support plate 725 to the dynamic plate 760 only when the substrate support 725 is in the transfer position. The dynamic plate 760 can include two sets of quick disconnect members 770. For example, several inner quick disconnect members 770a may be positioned on the upper surface of the dynamic plate 760 directly below a portion of the support plate 730, and several outer quick disconnect members 770b may be positioned on the dynamic plate 760 radially outward from the periphery of the support plate 725 and in vertical alignment with at least a portion of the liner 715.

[0062] Several quick disconnect members 770c may be provided on the bottom surface of the support plate 725. For example, the quick disconnect members 770c may be formed in and / or coupled to the ground plate 745. Each of the quick disconnect members 770c may be vertically aligned with a respective one of the inner quick disconnect members 770a, thereby allowing the quick disconnect members 770c to engage with the inner quick disconnect members 770a when the substrate support 725 is in the transfer position. Several quick disconnect members 770d may be provided on the bottom surface of the liner 715, where each of the quick disconnect members 770d is vertically aligned with a respective one of the outer quick disconnect members 770b. This allows the quick disconnect member 770d to engage with the outer quick disconnect member 770b when the substrate support 725 is in the processing position.

[0063] The quick disconnect members 770 may be arranged in any configuration around the various chamber components, including symmetrical and asymmetrical patterns. For example, the quick disconnect members 770 may be arranged in a symmetrical annular configuration around each of the liner 715, the support plate 725, and / or the dynamic plate 760. Any number of quick disconnect members 770 may be provided. For example, each of quick disconnect members 770a, 770b, 770c, and / or 770d may include approximately two or more quick disconnect members, approximately three or more quick disconnect members, approximately four or more quick disconnect members, approximately five or more quick disconnect members, approximately six or more quick disconnect members, seven or more quick disconnect members, approximately eight or more quick disconnect members, approximately nine or more quick disconnect members, approximately ten or more quick disconnect members, approximately twelve or more quick disconnect members, approximately fourteen or more quick disconnect members, approximately sixteen or more quick disconnect members, approximately eighteen or more quick disconnect members, approximately twenty or more quick disconnect members, or more quick disconnect members. It will be appreciated that in some embodiments, each group of quick disconnect members 770a, 770b, 770c, and 770d can have the same number of quick disconnect members, while in other embodiments, at least one group of quick disconnect members 770a, 770b, 770c, and 770d has a different number of quick disconnect members than at least one other group.

[0064] In some embodiments, each quick disconnect member 770 can include a male and / or female portion that engages with a corresponding portion of another quick disconnect member 770. For example, inner quick disconnect member 770a and / or outer quick disconnect member 770b can have a male portion, such as a guide pin, and quick disconnect members 770c and 770d can include a female portion, such as a receptacle, that receives and secures the corresponding male portion of the inner quick disconnect member 770a and / or outer quick disconnect member 770b. In some embodiments, the receptacles can include additional mating mechanisms. For example, each receptacle can include a spring-loaded ball catch that engages with a notch in one of the guide pins to secure the guide pin within the receptacle. It will be appreciated that in various embodiments, the positions of the male and female portions may be reversed, with inner quick disconnect member 770a and / or outer quick disconnect member 770b having female portions and quick disconnect members 770c and 770d having male portions. In some embodiments, particular groups of quick disconnect members 770a, 770b, 770c, and / or 770d may include both male and female portions. In embodiments in which outer quick disconnect member 770b includes male guide pins, the top surface of each guide pin may no longer be higher than the top surface of support plate 725. This ensures that the pins do not interfere with the removal and placement of substrates on support plate 725 during substrate transfer.

[0065] 7A shows the substrate support 725 in the transfer position with the support plate 730 close to the bottom of the chamber body 705. In the transfer position, the inner quick disconnect member 770a and the quick disconnect member 770c on the support plate 725 are engaged with each other and the strap 765 is in compression. The outer quick disconnect member 770b is spaced apart from the quick disconnect member 770d on the liner 715, which opens the RF circuit and prevents RF current from flowing through the heater 735 when in the transfer position.

[0066] 7B , the substrate support 725 can be raised upward into the processing region, with the support plate 730 positioned close to the face plate 720. As the substrate support 725 rises, the engagement of the inner quick-disconnect member 770a with the quick-disconnect member 770c pulls the dynamic plate 760 upward along with the substrate support 725 until the outer quick-disconnect member 770b contacts and engages the quick-disconnect member 770d of the liner 715. The engagement of the outer quick-disconnect member 770b with the quick-disconnect member 770d provides high frequency conduction between the liner 715 and the dynamic plate 760 and also acts as a hard stop preventing further upward movement of the dynamic plate 760. As the substrate support 725 moves further upward to the processing position, the inner quick-disconnect members 770a and 770c are withdrawn from engagement with each other, while the straps 765 maintain RF continuity between the dynamic plate 760 and the support plate 725. In this processing position, a closed RF circuit is provided that allows RF current to flow from the RF source 755 to the heater 735, as indicated by arrow 775, and allows return current to flow back to the RF source 755, as indicated by arrow 780. For example, the closed RF circuit may be formed by the RF source 755, the substrate support 725 (including the dynamic plate 760, the support plate 730, the shaft 750, and the straps 765), the liner 715, and the face plate 720. It will be understood that the high frequency circuit may also include other components, such as components between the liner 715 and the faceplate (such as the pump liner and / or lid plate 710) and the plasma formed between the heater 735 and the faceplate 720.

[0067] The use of quick disconnect members 770 and straps 765 to create the dynamic radio frequency interface described herein creates a closed radio frequency circuit when the substrate support is in the processing position and opens the circuit when the substrate support is in the transfer position. Furthermore, given the small size of the quick disconnect members 770, there is less surface area between components that dynamically contact each other than in conventional designs, which reduces particle generation from previous processing steps and results in higher quality substrates. Additionally, the use of quick disconnect members 770 rather than a baffle-based design significantly reduces the weight of the chamber and allows a single technician to more easily service the radio frequency circuit components.

[0068] 8A and 8B show cross-sectional elevation views of an exemplary quick disconnect member 800 according to some embodiments of the present technology. The quick disconnect member 800 can be similar to the quick disconnect member 770 described herein and can be used in any of the systems described herein, including systems 100, 200, 300, and / or 700. Each quick disconnect member 800 can include a male portion or a female portion. For example, the female quick disconnect member 800a can include a receptacle 805, which can be formed in and / or coupled to a substrate (such as a liner, a support plate, and / or a dynamic plate). Each receptacle can include one or more retention members. For example, one or more detents 810 can be included within each receptacle 805. Each detent 810 can be coupled to one end of a spring 815, with the other end of the spring coupled to a ball 820 or other object. This configuration provides a spring-loaded ball catch within each receptacle 805 that receives and secures a corresponding male quick-disconnect member 800b. For example, each male quick-disconnect member 800b can be in the form of a guide pin 825. The guide pin 825 can include an elongated body having a distal end 830, an intermediate portion 835, and a proximal end 840. The proximal end 840 can be coupled to a substrate (such as a liner, support plate, and / or dynamic plate) and can be formed as part of the substrate. The intermediate portion 835 can define a notch 845 sized to receive a portion of the ball 820. The distal end 830 of the guide pin 825 can be inserted into the receptacle 805 to engage the quick-disconnect members 800. Distal end 830 can push spring-loaded ball 820 into detent 810 until notch 845 aligns with ball 820, as shown in FIG. 8B. The force of the spring can push ball 820 into detent 810, securing guide pin 825 within receptacle 805. To remove guide pin 825 from receptacle 805, this process can be reversed, where a predetermined force is required to pull distal end 830 past spring-loaded ball 820.

[0069] FIG. 9 shows a schematic cross-sectional elevation view of an exemplary processing chamber system 900 according to some embodiments of the present technology. FIG. 9 may illustrate additional details regarding components within systems 100, 200, 300, and 700. It should be understood that system 900 may, in some embodiments, include any feature or aspect of systems 100, 200, 300, and / or 700 previously described. System 900 may be used to perform semiconductor processing steps, such as deposition, removal, and cleaning steps. System 900 may show a partial view of chamber components that may be incorporated into the semiconductor processing system being discussed. Any aspect of system 900 may be incorporated into other processing chambers or systems, as will be readily apparent to one skilled in the art.

[0070] The system 900 may include a chamber body 905, which may define a transfer region and a processing region. A lid plate 910 may seat on the chamber body 905 and may support a liner 915. A face plate 920 may be disposed on the liner 915. In some embodiments, one or more intervening components, such as a pump liner, may be disposed between the face plate 920 and the liner 915. A substrate support 925 may be disposed within the chamber body 905 and may include a substrate support plate 930. The substrate support 925 may be vertically movable within the chamber body 905 between the transfer region and the processing region and may include a shaft 950 that extends through the bottom of the chamber body 905 and may be coupled to a radio frequency source 955. The substrate support may also include a dynamic plate 960, which is disposed around the shaft 950 and vertically spaced from the bottom of the support plate 930. The dynamic plate 960 may be annular in shape and may have a larger radius than the support plate 930, such that the outer periphery of the dynamic plate 960 extends radially outward from the outer periphery of the support plate 930. In some embodiments, an RF gasket 977 may be disposed on the top surface of the outer periphery of the dynamic plate 960. The RF gasket 977 may help provide a more consistent and repeatable RF return path by ensuring proper contact between the dynamic plate 960 and the liner 915 when the dynamic plate 960 is raised to bring the RF gasket 977 into contact with the liner 915. Several straps 965 may extend between the top surface of the dynamic plate 960 and the bottom surface of the support plate 930 to couple the top surface of the dynamic plate 960 and the bottom surface of the support plate 930. In some embodiments, in addition to or instead of the straps 965, flexible bellows can be disposed between the support plate 925 and the dynamic plate 960 to maintain high frequency conduction between the support plate 925 and the dynamic plate 960. For example, the bellows can be compressed when the substrate support 925 is in the transfer position and can be extended when the substrate support 925 is in the processing position.In a similar manner as described with respect to Figures 7A-7C, several quick disconnect members 970 may be provided to couple the support plate 930 to the dynamic plate 960 in the transfer position and / or to couple the liner 915 to the dynamic plate 960 in the processing position.

[0071] The system 900 can include one or more springs 980 that can be disposed between a bottom surface of the dynamic plate 960 and an upper surface of the bottom of the chamber body 905. For example, each spring 980 can be disposed on one or more guide pins 985 that extend between the bottom surface of the dynamic plate 960 and the upper surface of the bottom of the chamber body 905. In some embodiments, the upper end of each spring 980 can be disposed within or below an isolator 990 that can isolate the spring 980 from RF currents and ensure that the RF circuit returns through the substrate support 925 rather than down through the spring 980. Each spring 980 can provide a spring force that pushes upward against the bottom surface of the dynamic plate 960. When the substrate support 925 is in the lowered and / or transfer position, at least some of the quick disconnect members 970 can exert a downward force on the dynamic plate 960 that is greater than the spring force, causing the dynamic plate 960 to lower and further compress the springs 980. As the substrate support 925 moves upward, the springs 980 can begin to expand and push the dynamic plate 960 upward, where at least some of the quick disconnect members 970 prevent the dynamic plate 960 from contacting the support plate 930. The springs 980 can provide sufficient force to raise the dynamic plate 960 to a height where the dynamic plate 960 and / or RF gasket 977 contact the bottom surface of the liner 915, completing the RF circuit described above.

[0072] FIG. 10 shows a schematic cross-sectional elevation view of an exemplary processing chamber system 1000 according to some embodiments of the present technology. FIG. 10 may illustrate additional details regarding components within systems 100, 200, 300, 700, and 900. It should be understood that system 1000 may include any feature or aspect of systems 100, 200, 300, 700, and / or 900 described above in some embodiments. System 1000 may be used to perform semiconductor processing steps, such as deposition, removal, and cleaning steps. System 1000 may show a partial view of chamber components that may be incorporated into the semiconductor processing system being discussed. Any aspect of system 1000 may be incorporated into other processing chambers or systems, as will be readily apparent to those skilled in the art.

[0073] The system 1000 may include a chamber body 1005, which may define a transfer region and a processing region. A lid plate 1010 may seat on the chamber body 1005 and may support a liner 1015. A face plate 1020 may be disposed on the liner 1015. In some embodiments, one or more intervening components, such as a pump liner, may be disposed between the face plate 1020 and the liner 1015. A substrate support 1025 may be disposed within the chamber body 1005 and may include a substrate support plate 1030. The substrate support 1025 may be vertically movable within the chamber body 1005 between the transfer region and the processing region and may include a shaft 1050 that extends through the bottom of the chamber body 1005 and may be coupled to a radio frequency source 1055. The substrate support may also include a dynamic plate 1060, which is disposed about the shaft 1050 and vertically spaced from the bottom of the support plate 1030. The dynamic plate 1060 may be annular in shape and may have a larger radius than the support plate 1030, such that the outer periphery of the dynamic plate 1060 extends radially outward from the outer periphery of the support plate 1030. In some embodiments, an RF gasket 1077 may be disposed on an upper surface of the outer periphery 1065 of the dynamic plate 1060. The RF gasket 1077 may help provide a more consistent and repeatable RF return path by ensuring proper contact between the dynamic plate 1060 and the liner 1015 when the dynamic plate 1060 is raised to bring the RF gasket 1077 into contact with the liner 1015. A number of straps 1065 may extend between the top surface of the dynamic plate 1060 and the bottom surface of the support plate 1030 to couple the top surface of the dynamic plate 1060 to the bottom surface of the support plate 1030. In some embodiments, in addition to or instead of the straps 1070, flexible bellows may be disposed between the support plate 1025 and the dynamic plate 1060 to maintain high frequency conduction between the support plate 1025 and the dynamic plate 1060. For example, the bellows may be compressed when the substrate support 1025 is in the transfer position and may be extended when the substrate support 1025 is in the processing position.In a similar manner as described with respect to Figures 7A-7C, several quick disconnect members 1070 may be provided to couple the liner 1015 with the dynamic plate 1060 in the processing position.

[0074] The system 1000 can include a linear actuator 1080, such as a pneumatic and / or electromechanical lift, that can be used to raise and lower the dynamic plate 1060 between the processing position and the transfer position. For example, the linear actuator 1080 can be disposed between a bottom surface of the dynamic plate 1060 and an upper surface of the bottom of the chamber body 1005. While the support plate 1030 is raised and lowered, the linear actuator 1080 can cause a corresponding movement of the dynamic plate 1060, thereby allowing the dynamic plate 1060 and / or the RF gasket 1077 to contact the liner 1015 when the support plate 1030 is in the processing position and not contact the liner 1015 when the support plate 1030 is in the transfer position. In the processing position, the quick disconnect members 1070 can engage with each other to couple the liner 1015 to the dynamic plate 1060 and close the RF circuit, which allows high frequency current to flow from the high frequency source 1055 to the support plate 1030 and allows return current to flow back to the high frequency source 1055.

[0075] 11 illustrates steps of an exemplary method 1100 for substrate processing in accordance with some embodiments of the present technique. The method may be performed in various processing chambers comprising the above-described processing systems 100, 200, 300, 700, 900, and 1000, which may include dynamic radio frequency circuits in accordance with some embodiments of the present technique. Method 1100 may include several optional steps, which may or may not be specifically related to some embodiments of the method in accordance with the present technique.

[0076] Method 1100 may include optional steps before method 1100 begins, or the method may include additional steps. For example, method 1100 may include steps performed in a different order than those illustrated. In some embodiments, method 1100 may include, in step 1105, moving a substrate support having a heater upward from a transfer position to a processing position within a semiconductor processing chamber, disengaging a first number of quick disconnect members, and engaging a second number of quick disconnect members to close a radio frequency circuit. For example, the first number of quick disconnect members may couple a support plate of the substrate support with a dynamic plate of the substrate support. While the substrate support is elevated, engagement between the first number of quick disconnect members causes the dynamic plate to be pulled upward along with the substrate support until a second set of quick disconnect members contact and engage each other. For example, the second number of quick disconnect members may couple a liner of the semiconductor processing chamber with the dynamic plate. The engagement of the second several quick disconnect members with each other provides RF continuity between the liner and the dynamic plate, closing the RF circuit of the processing chamber and acting as a hard stop to prevent further upward movement of the dynamic plate. As the substrate support moves further upward to the processing position, the first several quick disconnect members are withdrawn from engagement with each other and the several straps maintain RF continuity between the dynamic plate and the support plate.

[0077] In step 1110, one or more precursors, such as, but not limited to, a silicon-containing precursor, may be delivered to the semiconductor processing chamber. In step 1115, a radio frequency current may be supplied to the faceplate, heater, or some other component via a radio frequency source. For example, the radio frequency may be used to generate a capacitively coupled plasma between the faceplate and heater to perform a deposition process within the processing region of the chamber. A quick disconnect member engaged with the liner may create a symmetrical ground path that serves as a radio frequency return path through the pedestal. By utilizing several quick disconnects connecting components within the chamber, plasma uniformity may be maintained while creating a symmetrical ground path through the dynamic plate and flexible straps and accommodating the separation of the support plate from the dynamic plate during movement of the pedestal within the system.

[0078] In the foregoing description, for purposes of explanation, numerous details are set forth in order to provide an understanding of various embodiments of the present technology. However, it will be apparent to one skilled in the art that particular embodiments may be practiced without some of these details or with additional details.

[0079] Although several embodiments have been disclosed, those skilled in the art will recognize that various modifications, alternative structures, and equivalents may be used without departing from the spirit of the above embodiments. In addition, in order to avoid unnecessarily obscuring the present technology, some well-known processes and elements have not been described. Therefore, the foregoing description should not be interpreted as limiting the scope of the present technology.

[0080] Where a range of values ​​is given, unless the context clearly indicates otherwise, it is understood that each intervening value between the upper and lower limit of that range is specifically disclosed, to the smallest unit of the lower limit. Any narrower range between any stated or unstated intervening value in a stated range and any other stated or intervening value within that stated range is encompassed. The upper and lower limits of these narrower ranges may individually be included or excluded within the range, and each range where one or both limits are included or neither are included within the narrower range is also encompassed within the technology, subject to any specifically excluded limits in the stated range. When a stated range includes one or both limits, ranges excluding one or both of those included limits are also included.

[0081] As used in this specification and the appended claims, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. Thus, for example, a reference to "a heater" includes a plurality of such heaters, a reference to "the aperture" includes a reference to one or more apertures and equivalents thereof known to those skilled in the art, and so forth.

[0082] Additionally, the words "comprise(s)", "comprising", "contain(s)", "containing", "include(s)", and "including", when used in this specification and claims, are intended to specify the presence of stated features, integers, components, or steps, but do not exclude the presence or addition of one or more other features, integers, components, steps, operations, or groups.

Claims

1. 1. A substrate processing system, comprising: a chamber body defining a processing region; a liner disposed over the chamber body, the bottom surface of the liner including a first plurality of quick disconnect members; a face plate disposed on the liner; a substrate support disposed within the chamber body; wherein the substrate support comprises: a support plate including a heater, the bottom surface of the support plate including a second plurality of quick disconnect members; a shaft coupled to the bottom of the support plate; a dynamic plate disposed about the shaft and spaced a distance below the support plate; a plurality of metal straps connecting the bottom of the support plate to the dynamic plate; an upper surface of the dynamic plate including a plurality of inner quick disconnect members and a plurality of outer quick disconnect members; each of the inner plurality of quick disconnect members is engageable with a respective one of the second plurality of quick disconnect members when the substrate support is in a transfer position; A substrate processing system, wherein each of the outer plurality of quick disconnect members is engageable with a respective one of the first plurality of quick disconnect members when the substrate support is in a processing position.

2. each of the outer plurality of quick disconnect members is decoupled from the respective one of the first plurality of quick disconnect members when the substrate support is in the transfer position; 2. The substrate processing system of claim 1, wherein each of the inner plurality of quick disconnect members is decoupled from the respective one of the second plurality of quick disconnect members when the substrate support is in the processing position.

3. 10. The substrate processing system of claim 1, wherein the substrate support is proximate to the faceplate when in the processing position, and the substrate support is proximate to the base of the chamber body when in the transfer position.

4. The substrate processing system of claim 1 , wherein an outer periphery of the dynamic plate extends radially beyond an outer periphery of the support plate.

5. 2. The substrate processing system of claim 1, wherein each of the outer plurality of quick disconnect members includes a guide pin, and each of the first plurality of quick disconnect members defines a receptacle including a spring-loaded catch sized to receive and secure a respective one of the guide pins.

6. The substrate processing system of claim 5 , wherein an upper surface of each of the guide pins is at a height lower than an upper surface of the heater.

7. the support plate further includes an isolator coupled to the heater and a ground plate coupled to a bottom of the isolator; The substrate processing system of claim 1 , wherein the second plurality of quick disconnect members are disposed on the ground plate.

8. The substrate processing system of claim 1 , wherein each of the plurality of metal straps is coated with a precursor-resistant material.

9. 10. The substrate processing system of claim 1, further comprising a radio frequency source connected to the substrate support, wherein a closed radio frequency circuit is formed between the radio frequency source, the substrate support, the plurality of metal straps, the liner, and the face plate at the processing position.

10. 1. A substrate processing system, comprising: a chamber body defining a processing region; a liner disposed on the chamber body; a face plate disposed on the liner; a substrate support disposed within the chamber body, a support plate including a heater; a shaft coupled to the bottom of the support plate; a dynamic plate disposed about the shaft and spaced a distance below the support plate; and a substrate support including a plurality of metal straps connecting the bottom of the support plate to the dynamic plate; a plurality of quick disconnect members that couple the liner to the dynamic plate when the substrate support is in a processing position and couple the support plate to the dynamic plate when the substrate support is in a transfer position; A substrate processing system comprising:

11. The plurality of quick disconnect members are an outer plurality of quick disconnect members on the dynamic plate that engage with a first plurality of quick disconnect members on the liner; an inner plurality of quick disconnect members on the dynamic plate that engage with a second plurality of quick disconnect members on the support plate; The substrate processing system of claim 10 , comprising:

12. each of the outer plurality of quick disconnect members is decoupled from the respective one of the first plurality of quick disconnect members when the substrate support is in the transfer position; 12. The substrate processing system of claim 11, wherein each of the inner plurality of quick disconnect members is decoupled from the respective one of the second plurality of quick disconnect members when the substrate support is in the processing position.

13. the plurality of quick disconnect members includes a first subset of quick disconnect members and a second subset of quick disconnect members; each of the quick disconnect members of the first subset includes a guide pin; The substrate processing system of claim 10 , wherein each of the quick disconnect members of the second subset defines a receptacle including a spring-loaded catch sized to receive and secure a respective one of the guide pins.

14. The substrate processing system of claim 13 , wherein a top surface of each of the guide pins is at a lower elevation than a top surface of the heater.

15. the support plate further includes an isolator coupled to the heater and a ground plate coupled to a bottom of the isolator; The substrate processing system of claim 10 , wherein at least some of the plurality of quick disconnect members are disposed on the ground plate.

16. 11. The substrate processing system of claim 10, further comprising a radio frequency source connected to the substrate support, wherein a closed radio frequency circuit is formed between the radio frequency source, the substrate support, the plurality of metal straps, the liner, and the face plate at the processing position.

17. The substrate processing system of claim 10 , wherein the substrate support is vertically movable between the transfer position and the processing position.

18. A processing method comprising: moving the substrate support upwardly within the semiconductor processing chamber from a transfer position to a processing position to disengage the first plurality of quick disconnect members and engage the second plurality of quick disconnect members; when engaged, the first plurality of quick disconnect members couple a support plate of the substrate support with a dynamic plate of the substrate support; when engaged, the second plurality of quick disconnect members couple a liner of the semiconductor processing chamber with the dynamic plate; the support plate includes a heater, and the processing method further comprises: delivering one or more precursors to the semiconductor processing chamber; supplying a high frequency current to the heater via a high frequency source; A processing method comprising:

19. 20. The processing method of claim 18, wherein the substrate support further comprises a plurality of metal straps connecting a bottom of the support plate to the dynamic plate.

20. 20. The processing method of claim 19, wherein a closed radio frequency circuit is formed between the radio frequency source, the substrate support, the plurality of metal straps, the liner, and a face plate at the processing position.

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