Table device

Abstract

To provide a table device which can achieve reduction of a height of a cross section of the device while achieving smooth movement and swinging of a table part.SOLUTION: A table device includes a first base part, a first linear motion mechanism, a first movement part, a first drive part, a second linear motion mechanism, a second movement part, a third movement part, a third linear motion mechanism, a fourth movement part, a fourth linear motion mechanism, a fifth linear motion mechanism, a sixth linear motion mechanism, a seventh linear motion mechanism, an eighth linear motion mechanism, a first swinging part, a second swinging part, an intermediate part, a table part, a third drive part, and a fourth drive part. The intermediate part allows movement of the table part in a first direction and a second direction. The table part is movable in any direction out of a direction along a first base surface, a direction orthogonal to the first base surface, and a direction inclined with respect to the first base surface by driving at least one of the first drive part, the second drive part, the third drive part, and the fourth drive part.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a table device. [Background technology]

[0002] A table device including a table that is movable in the horizontal direction and in the vertical direction has been disclosed (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Special Publication No. 2017-501898 Summary of the Invention [Problem to be solved by the invention]

[0004] In table devices, there are cases where it is necessary to move the table in the height direction, i.e., the Z direction perpendicular to the XY plane, while moving the table in the horizontal direction, i.e., the X direction and the Y direction perpendicular to the X direction within the same plane. There are also cases where it is necessary to tilt the table at a predetermined angle, i.e., to oscillate it. In such cases, it is necessary to achieve smooth movement and oscillation of the table. Furthermore, from the perspective of space saving, a low cross-section of the device is required.

[0005] Therefore, one of the objects is to provide a table device that can achieve smooth movement and swing of the table portion while also achieving a low cross section of the device. [Means for solving the problem]

[0006] A table device according to the present disclosure includes a first base portion including a first portion having a first base surface and a second portion having a second base surface extending in a direction intersecting the first base surface; a first linear motion mechanism including a first rail attached to the first base surface and extending in a first direction, and a first slider attached to the first rail and movable in the first direction; a first moving portion having a first inclined surface inclined with respect to the first base surface and attached to the first slider; a first driving unit for linearly reciprocating the first moving portion in the first direction; and a second driving unit for linearly reciprocating the first moving portion in a second direction intersecting the first direction in a plane parallel to the first base surface. The present invention also includes a second linear motion mechanism including a second rail attached to the first base surface alongside the first linear motion mechanism and extending in a first direction, and a second slider attached to the second rail and movable in the first direction; a second moving unit having a second inclined surface inclined with respect to the first base surface and attached to the second slider; a second driving unit for linearly reciprocating the second moving unit in the first direction; a third moving unit having a third inclined surface extending along the first inclined surface, a first flat surface along the first base surface, and a second flat surface facing the second base surface; and a third rail attached to the third inclined surface and extending in the direction of inclination of the third inclined surface. a fourth moving part having a fourth inclined surface extending along the second inclined surface, a third flat surface along the first base surface, and a fourth flat surface facing the second base surface; a fourth rail attached to the fourth inclined surface and extending in the direction in which the fourth inclined surface is inclined; a fourth linear motion mechanism including a fourth slider attached to the fourth inclined surface and the fourth rail and movable in the direction in which the fourth inclined surface is inclined; a fifth rail attached to the second base surface and extending in a direction perpendicular to the first base surface; a fifth linear motion mechanism including a fifth slider attached to the second flat surface and the fifth rail, and movable in a direction perpendicular to the first base surface; a sixth rail attached to the second base surface alongside the fifth linear motion mechanism in the second direction, extending in a direction perpendicular to the first base surface, and a sixth slider attached to the fourth flat surface and the sixth rail, and movable in a direction perpendicular to the first base surface; a seventh linear motion mechanism including a seventh rail extending in the second direction, and a seventh slider attached to the third flat surface and the seventh rail, and movable in the second direction when viewed from the direction perpendicular to the first base surface;an eighth linear motion mechanism including an eighth rail extending in the second direction and an eighth slider attached to the eighth rail and the third plane, aligned with the seventh linear motion mechanism in the first direction, and movable in the second direction when viewed from a direction perpendicular to the first base surface; a first oscillating unit including a first rotating shaft extending in the first direction and a first support part supporting the first rotating shaft, and to which the seventh rail and the eighth rail are attached; a second oscillating unit arranged alongside the first oscillating unit in the second direction, including a second rotating shaft extending in the first direction and a second support part supporting the second rotating shaft, the second support part being attached to the fourth plane; The device comprises an intermediate section spaced apart from the first section in a direction perpendicular to the first base surface and attached to the first support section and the second support section, a table section disposed on the intermediate section in a direction perpendicular to the first base surface and attached to the intermediate section, a third drive section spaced apart from the first drive section and the second drive section in a direction perpendicular to the first base surface and configured to linearly reciprocate the table section in a first direction, and a fourth drive section spaced apart from the first drive section and the second drive section in a direction perpendicular to the first base surface and configured to linearly reciprocate the table section in a second direction. The intermediate section allows movement of the table section in the first direction and in the second direction. The table section can be moved in any of a direction along the first base surface, a direction perpendicular to the first base surface, and a direction inclined relative to the first base surface by driving at least one of the first drive section, the second drive section, the third drive section, and the fourth drive section. [Effects of the Invention]

[0007] According to the table device, the table portion can be smoothly moved and swung, while the cross section of the device can be reduced. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a schematic perspective view showing a table device according to the first embodiment of the present disclosure. [Figure 2] FIG. 2 is a schematic left side view of the table device shown in FIG. [Figure 3] 3 is a schematic right side view of the table device shown in FIG. [Figure 4] FIG. 4 is a schematic front view of the table device shown in FIG. [Figure 5] FIG. 5 is a schematic rear view of the table device shown in FIG. [Figure 6] FIG. 6 is a schematic plan view of the table device shown in FIG. [Figure 7] FIG. 7 is a schematic bottom view of the table device shown in FIG. [Figure 8] Figure 8 is a schematic perspective view showing the table device shown in Figure 1 with the seventh linear motion mechanism, the eighth linear motion mechanism, the first oscillating unit, the second oscillating unit, the intermediate unit, the table unit, the third drive unit, and the fourth drive unit removed. [Figure 9] Figure 9 is a schematic oblique view showing the table device shown in Figure 1 with the first base unit, first linear motion mechanism, second linear motion mechanism, third linear motion mechanism, fourth linear motion mechanism, fifth linear motion mechanism, sixth linear motion mechanism, first drive unit, second drive unit, first moving unit, second moving unit, third moving unit, fourth moving unit, intermediate unit, table unit, third drive unit and fourth drive unit removed. [Figure 10] FIG. 10 is a schematic cross-sectional view of the member shown in FIG. 9 taken along the XZ plane including the seventh linear motion mechanism, the eighth linear motion mechanism, and the first swinging portion. [Figure 11] Figure 11 is a schematic perspective view showing the table device shown in Figure 1 with the first base unit, first linear motion mechanism, second linear motion mechanism, third linear motion mechanism, fourth linear motion mechanism, fifth linear motion mechanism, sixth linear motion mechanism, first drive unit, second drive unit, first moving unit, second moving unit, third moving unit and fourth moving unit removed. [Figure 12] FIG. 12 is a schematic perspective view of the table device when the table portion is tilted. [Figure 13] 13 is a schematic left side view of the table device shown in FIG. [Figure 14] 14 is a schematic right side view of the table device shown in FIG. [Figure 15] FIG. 15 is a schematic front view of the table device shown in FIG. [Figure 16]FIG. 16 is a schematic rear view of the table device shown in FIG. [Figure 17] FIG. 17 is a schematic perspective view showing a table device according to the second embodiment of the present disclosure. [Figure 18] 18 is a schematic perspective view showing the second base unit, the rotation mechanism, and the fifth drive unit of the table device shown in FIG. [Figure 19] FIG. 19 is a schematic plan view of the rotation mechanism and the fifth driving unit in a state where a support base shown in FIG. 18, which will be described later, has been removed. [Figure 20] 20 is a schematic plan view showing a state in which the turntable is rotated in the rotation mechanism and the fifth driving unit shown in FIG. 19. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0009] [Outline of the embodiment] The table device of the present disclosure includes a first base portion including a first portion having a first base surface and a second portion having a second base surface extending in a direction intersecting the first base surface, a first linear motion mechanism including a first rail attached to the first base surface and extending in a first direction, and a first slider attached to the first rail and movable in the first direction, a first moving portion having a first inclined surface inclined with respect to the first base surface and attached to the first slider, a first driving unit that linearly reciprocates the first moving portion in the first direction, and a second driving unit that linearly reciprocates the first moving portion in a second direction intersecting the first direction within a plane parallel to the first base surface. a second linear motion mechanism including a second rail attached to the first base surface alongside the first linear motion mechanism and extending in a first direction, and a second slider attached to the second rail and movable in the first direction; a second moving unit having a second inclined surface inclined with respect to the first base surface and attached to the second slider; a second driving unit for linearly reciprocating the second moving unit in the first direction; a third moving unit having a third inclined surface extending along the first inclined surface, a first flat surface along the first base surface, and a second flat surface facing the second base surface; a fourth moving part having a fourth inclined surface extending along the second inclined surface, a third flat surface along the first base surface, and a fourth flat surface facing the second base surface; a fourth rail attached to the fourth inclined surface and extending in the direction in which the fourth inclined surface is inclined; a fourth linear motion mechanism including a fourth slider attached to the fourth inclined surface and the fourth rail and movable in the direction in which the fourth inclined surface is inclined; a fifth rail attached to the second base surface and extending in a direction perpendicular to the first base surface; a fifth linear motion mechanism including a fifth slider attached to the second flat surface and the fifth rail, and movable in a direction perpendicular to the first base surface; a sixth rail attached to the second base surface alongside the fifth linear motion mechanism in the second direction, extending in a direction perpendicular to the first base surface, and a sixth slider attached to the fourth flat surface and the sixth rail, and movable in a direction perpendicular to the first base surface; a seventh linear motion mechanism including a seventh rail extending in the second direction, and a seventh slider attached to the third flat surface and the seventh rail, and movable in the second direction when viewed from the direction perpendicular to the first base surface;an eighth linear motion mechanism including an eighth rail extending in the second direction and an eighth slider attached to the eighth rail and the third plane, aligned with the seventh linear motion mechanism in the first direction, and movable in the second direction when viewed from a direction perpendicular to the first base surface; a first oscillating unit including a first rotating shaft extending in the first direction and a first support part supporting the first rotating shaft, and to which the seventh rail and the eighth rail are attached; a second oscillating unit arranged alongside the first oscillating unit in the second direction, including a second rotating shaft extending in the first direction and a second support part supporting the second rotating shaft, the second support part being attached to the fourth plane; The device comprises an intermediate section spaced apart from the first section in a direction perpendicular to the first base surface and attached to the first support section and the second support section, a table section disposed on the intermediate section in a direction perpendicular to the first base surface and attached to the intermediate section, a third drive section spaced apart from the first drive section and the second drive section in a direction perpendicular to the first base surface and configured to linearly reciprocate the table section in a first direction, and a fourth drive section spaced apart from the first drive section and the second drive section in a direction perpendicular to the first base surface and configured to linearly reciprocate the table section in a second direction. The intermediate section allows movement of the table section in the first direction and in the second direction. The table section can be moved in any of a direction along the first base surface, a direction perpendicular to the first base surface, and a direction inclined relative to the first base surface by driving at least one of the first drive section, the second drive section, the third drive section, and the fourth drive section.

[0010] According to the table device of the present disclosure, the first moving unit is caused to perform a linear reciprocating motion in a first direction relative to the first portion of the first base unit by the first driving unit. The first moving unit is provided with a first inclined surface, and the third moving unit is provided with a third inclined surface extending along the first inclined surface. Therefore, the linear reciprocating motion in the first direction by the first moving unit moves the third moving unit along the first inclined surface via the third linear motion mechanism, thereby moving the table unit placed thereon in the height direction. Similarly, the second moving unit is caused to perform a linear reciprocating motion in the first direction relative to the first portion of the first base unit by the second driving unit. The second moving unit is provided with a second inclined surface, and the fourth moving unit is provided with a fourth inclined surface extending along the second inclined surface. Therefore, the linear reciprocating motion in the first direction by the second moving unit moves the fourth moving unit along the second inclined surface via the fourth linear motion mechanism, thereby moving the table unit placed thereon in the height direction. The third and fourth moving units can be smoothly moved in the height direction by the fifth and sixth linear motion mechanisms, respectively. In this case, the first driving unit is arranged side by side with the second driving unit, allowing the driving units to be arranged without stacking. This allows for a low cross-section of the device. The wiring extending from the first and second driving units can be prevented from interfering with each other. The first and second moving units are arranged side by side in a second direction intersecting the first direction, and the first and second swinging units are provided. By varying the amount of linear reciprocation of the first moving unit and the second moving unit, the table unit can be tilted and swung at a predetermined angle. In this case, the first swinging unit is attached to the third moving unit via the seventh and eighth linear motion mechanisms, allowing the first swinging unit to move in the second direction in response to the tilt, allowing for smooth tilting of the table unit to a predetermined angle. The third drive unit can cause the table portion to move back and forth linearly in a first direction, and the fourth drive unit can cause the table portion to move back and forth linearly in a second direction, so that the table portion can be moved horizontally by the third drive unit and the fourth drive unit.Since the third drive unit and the fourth drive unit are disposed at positions different from the first drive unit and the second drive unit in the direction perpendicular to the first base surface, it is possible to reduce the risk of the wiring extending from the third drive unit and the fourth drive unit interfering with the wiring extending from the first drive unit and the second drive unit. As a result, with the table device configured as described above, it is possible to achieve smooth movement and oscillation of the table unit while reducing the cross-section of the device.

[0011] In the table device, the second direction may be a direction perpendicular to the first direction, thereby enabling the table unit to be moved appropriately and smoothly in the horizontal direction, i.e., the so-called vertical and horizontal directions.

[0012] In the table device, at least one of the first drive unit, the second drive unit, the third drive unit, and the fourth drive unit may include a ball screw having a screw shaft and a nut, and a motor that rotates the screw shaft. In this manner, the screw shaft can be rotated by the motor to move the moving unit. Therefore, the movement of the moving unit by the motor can be controlled with high precision, thereby improving the positioning accuracy when moving the table unit.

[0013] In the table device, at least one of the first moving unit, the second moving unit, the third moving unit, and the fourth moving unit may have a wedge shape. This allows at least one of the first moving unit, the second moving unit, the third moving unit, and the fourth moving unit to have a compact configuration while at least one of the first inclined surface, the second inclined surface, the third inclined surface, and the fourth inclined surface can be appropriately provided on each moving unit. This makes it easier to make the device more compact.

[0014] In the table device, at least one of the first drive unit and the second drive unit may be fixed to the second part, thereby ensuring more stable movement of the table unit.

[0015] In the above table device, the intermediate section may include a second block section provided with a second guide section extending in the second direction, and a first block section provided with a second attachment section extending in the second direction and attached along the second guide section, and a first guide section extending in the first direction. The table section may include a first attachment section extending in the first direction and attached along the first guide section. This allows the table section to be moved reliably and smoothly in the first direction and the second direction while maintaining a compact configuration, thereby allowing the table section to be moved with greater precision.

[0016] The table device may further include a rotation mechanism that rotatably supports the first base unit around an axis extending perpendicular to the first base surface, a second base unit that supports the rotation mechanism, and a fifth drive unit that drives the rotation mechanism to rotate the first base unit relative to the second base unit. This allows the table unit to rotate using the rotation mechanism and the fifth drive unit, in addition to the horizontal movement, vertical movement, and swinging motion of the table unit. This further improves convenience.

[0017] In the table device, the second base unit may include a plurality of first base units, first linear motion mechanisms, first moving units, first drive units, second linear motion mechanisms, second moving units, second drive units, third moving units, third linear motion mechanisms, fourth moving units, fourth linear motion mechanisms, fifth linear motion mechanisms, sixth linear motion mechanisms, seventh linear motion mechanisms, eighth linear motion mechanisms, first swing units, second swing units, intermediate units, table units, third drive units, and fourth drive units. This allows the plurality of table units to be rotated on the second base surface while being moved horizontally, vertically, and inclined relative to the first base surface. This allows the table units to be used in a manner more suited to user needs.

[0018] [Specific example of embodiment] Next, an example of a specific embodiment of the table device of the present disclosure will be described with reference to the drawings. In the following drawings, the same or corresponding parts are designated by the same reference numerals, and description thereof will not be repeated.

[0019] (Embodiment 1) First, a first embodiment of the present disclosure will be described. FIG. 1 is a schematic perspective view showing a table device according to the first embodiment of the present disclosure. Note that cables extending from a motor, which will be described later, are not shown. In FIG. 1, the direction indicated by arrow X is the front-rear direction (vertical direction), the direction indicated by arrow Y is the left-right direction (horizontal direction), and the direction indicated by arrow Z is the up-down direction (height direction). Arrow X indicates the direction from the rear of the table device to the front, arrow Y indicates the direction from the right side to the left side of the table device, and arrow Z indicates the direction pointing upward from the bottom of the table device. In this embodiment, the direction opposite to arrow Z is the vertical direction of the table device. The X and Y directions are horizontal directions. This also applies to the following drawings. In this embodiment, the first direction is the direction indicated by arrow X. The second direction is the direction indicated by arrow Y. The third direction is the direction indicated by arrow Z. The first, second, and third directions are perpendicular to each other.

[0020] 2 is a schematic left side view of the table apparatus shown in FIG. 1. FIG. 2 is a view of the table apparatus shown in FIG. 1 as viewed in the direction indicated by arrow II. FIG. 3 is a schematic right side view of the table apparatus shown in FIG. 1. FIG. 3 is a view of the table apparatus shown in FIG. 1 as viewed in the direction indicated by arrow III. FIG. 4 is a schematic front view of the table apparatus shown in FIG. 1. FIG. 4 is a view of the table apparatus shown in FIG. 1 as viewed in the direction indicated by arrow IV. FIG. 5 is a schematic rear view of the table apparatus shown in FIG. 1. FIG. 5 is a view of the table apparatus shown in FIG. 1 as viewed in the direction indicated by arrow V. FIG. 6 is a schematic plan view of the table apparatus shown in FIG. 1. FIG. 6 is a view of the table apparatus shown in FIG. 1 as viewed in the direction indicated by arrow VI. FIG. 7 is a schematic bottom view of the table apparatus shown in FIG. 1. FIG. 7 is a view of the table apparatus shown in FIG. 1 as viewed in the direction indicated by arrow VII.

[0021] 1, 2, 3, 4, 5, 6, and 7, table device 10a according to the first embodiment of the present disclosure includes a first base portion 11a. First base portion 11a includes a first base plate 12a, a pair of first portions 13a and 13b, and a pair of second portions 14a and 14b. First base plate 12a is flat. First base plate 12a is rectangular when viewed in the Z direction, which is the thickness direction of first base plate 12a. First base plate 12a has a surface 15a located on one side of first base plate 12a in the thickness direction and a surface 15b located on the other side of first base plate 12a in the thickness direction. Table device 10a is placed so that surface 15b located on the other side of first base plate 12a in the thickness direction faces downward in the height direction.

[0022] The pair of first portions 13a, 13b are arranged side by side in the Y direction. The pair of first portions 13a, 13b each have a first base surface 16a, 16b. The pair of first portions 13a, 13b each have a flat rectangular shape with the length in the X direction longer than the length in the Y direction when viewed in the thickness direction. One surface of each first portion 13a, 13b in the thickness direction serves as the first base surface 16a, 16b. The first portions 13a, 13b are attached and fixed such that the other surfaces 17a, 17b of each first portion 13a, 13b in the thickness direction overlap the surface 15a located on one side of the first base plate 12a in the thickness direction. The pair of second portions 14a, 14b are arranged side by side in the Y direction. The pair of second portions 14a, 14b each have a second base surface 18a, 18b. The second base surfaces 18a and 18b extend in a direction intersecting the first base surfaces 16a and 16b, respectively. In this embodiment, the direction in which the second base surfaces 18a and 18b extend is perpendicular to the first base surfaces 16a and 16b. The pair of second portions 14a and 14b are each flat and rectangular in shape, with the length in the Z direction longer than the length in the Y direction when viewed in the thickness direction. The second portions 14a and 14b are attached and fixed to the first base plate 12a so that the surface 15a located on one side of the thickness direction of the first base plate 12a faces the side surfaces of the second portions 14a and 14b perpendicular to the thickness direction. That is, the pair of second portions 14a and 14b are attached so as to extend in the Z direction. On the first base plate 12a, one first portion 13a and one second portion 14a, and the other first portion 13b and the other second portion 14b are arranged adjacent to each other in the first direction (X direction).

[0023] The table device 10a includes a first drive unit 31a, a second drive unit 32a, a third drive unit 33a, and a fourth drive unit 34a. The table device 10a includes a first movement unit 36a, a second movement unit 37a, a third movement unit 38a, a fourth movement unit 39a, a first swing unit 21a, a second swing unit 22a, an intermediate unit 23a, and a table unit 24a. The table device 10a includes a first linear motion mechanism 41a, a second linear motion mechanism 42a, a third linear motion mechanism 43a, a fourth linear motion mechanism 44a, a fifth linear motion mechanism 45a, a sixth linear motion mechanism 46a, a seventh linear motion mechanism 47a, and an eighth linear motion mechanism 48a.

[0024] First, the configuration for moving the table unit in the height direction will be described. FIG. 8 is a schematic perspective view showing the table device 10a shown in FIG. 1 with the seventh linear motion mechanism 47a, the eighth linear motion mechanism 48a, the first oscillating unit 21a, the second oscillating unit 22a, the intermediate unit 23a, the table unit 24a, the third driving unit 33a, and the fourth driving unit 34a removed. Also referring to FIG. 8, the first driving unit 31a is fixed to one of the second parts 14a. The first driving unit 31a includes a ball screw (first ball screw) 31d having a screw shaft (first screw shaft) 31b and a nut (first nut) 31c, and a motor (first motor) 31e that rotates the screw shaft 31b. The screw shaft 31b is provided to extend along the first direction (X direction). A power supply cable (not shown) extends from the motor 31e.

[0025] The first moving part 36a is block-shaped and has a wedge shape. The first moving part 36a is arranged so that the pointed tip of the wedge shape faces the direction indicated by the arrow X. That is, the first moving part 36a is arranged so that the pointed tip faces the first driving part 31a. The first moving part 36a is attached to a nut 31c included in the ball screw 31d. The first moving part 36a has a first inclined surface 36b that is inclined with respect to the first base surface 16a. The inclination angle of the first inclined surface 36b is such that the length in the Z direction is 1 to the length in the X direction is 5 (length in the Z direction: length in the X direction = 1:5).

[0026] The first linear motion mechanism 41a includes a first rail 41b, a first slider 41c, and multiple rollers (not shown) serving as rolling elements. The first rail 41b is attached to the first base surface 16a so as to extend in a first direction (X direction). The first slider 41c is attached to the first rail 41b and is movable in the first direction. The first moving unit 36a is attached to the first slider 41c. The first driving unit 31a causes the first moving unit 36a to perform linear reciprocating motion in the first direction. Specifically, the motor 31e rotates the screw shaft 31b, thereby causing the first moving unit 36a to perform linear reciprocating motion along the first direction together with the nut 31c attached to the screw shaft 31b. At this time, the first moving unit 36a is guided along the first direction by the first linear motion mechanism 41a, which includes multiple rollers, ensuring smooth linear reciprocating motion.

[0027] The second drive unit 32a is fixed to the other second part 14b. The second drive unit 32a includes a ball screw (second ball screw) 32d having a screw shaft (first screw shaft) 32b and a nut (second nut) 32c, and a motor (second motor) 32e that rotates the screw shaft 32b. The screw shaft 32b is provided to extend along the first direction (X direction). A cable (not shown) for supplying power extends from the motor 32e.

[0028] The second moving part 37a is block-shaped and has a wedge shape. The second moving part 37a is arranged so that the pointed tip of the wedge shape faces the direction indicated by the arrow X. That is, the second moving part 37a is arranged so that the pointed tip faces the second driving part 32a. The second moving part 37a is attached to a nut 32c included in the ball screw 32d. The second moving part 37a has a second inclined surface 37b that is inclined with respect to the first base surface 16b. The inclination angle of the second inclined surface 37b is such that the length in the Z direction is 1 to the length in the X direction is 5 (length in the Z direction: length in the X direction = 1:5). That is, the inclination angle of the second inclined surface 37b is the same as the inclination angle of the first inclined surface 36b.

[0029] The second linear motion mechanism 42a includes a second rail 42b, a second slider 42c, and a plurality of rollers (not shown) serving as rolling elements. The second rail 42b is attached to the first base surface 16b so as to extend in a first direction (X direction). The second rail 42b is disposed parallel to and spaced apart from the first rail 41b in the Y direction. The second slider 42c is attached to the second rail 42b and is movable in the first direction. The second moving unit 37a is attached to the second slider 42c. The second driving unit 32a causes the second moving unit 37a to linearly reciprocate in the first direction. Specifically, by rotating the screw shaft 32b using the motor 32e, the second moving unit 37a is linearly reciprocated along the first direction together with the nut 32c attached to the screw shaft 32b. At this time, the second moving part 37a is guided along the first direction by the second linear motion mechanism 42a including a plurality of rollers, so that smooth linear reciprocating motion can be ensured.

[0030] The third moving unit 38a is block-shaped and has a wedge shape. The third moving unit 38a is arranged so that the pointed tip of the wedge shape faces in the opposite direction to the direction indicated by arrow X. That is, the third moving unit 38a is arranged so that the pointed tip faces away from the first driving unit 31a. The third moving unit 38a has a third inclined surface 38b extending along the first inclined surface 36b, a first flat surface 38c along the first base surface 16a, and a second flat surface 38d along the second base surface 18a.

[0031] The third linear motion mechanism 43a includes a third rail 43b, a third slider 43c, and a plurality of rollers (not shown) serving as rolling elements. The third slider 43c is attached to the first inclined surface 36b of the first moving portion 36a. The third rail 43b is attached to the third inclined surface 38b. The third rail 43b is attached so as to extend in the direction in which the third inclined surface 38b is inclined. The third slider 43c is attached to the third rail 43b. The third slider 43c is movable together with the first moving portion 36a in the direction in which the first inclined surface 36b, which is the direction in which the third rail 43b extends, is inclined.

[0032] The fourth moving unit 39a is block-shaped and has a wedge shape. The fourth moving unit 39a is arranged so that the pointed tip of the wedge shape faces in the direction opposite to the direction indicated by the arrow X. That is, the fourth moving unit 39a is arranged so that the pointed tip faces away from the second driving unit 32a. The fourth moving unit 39a has a fourth inclined surface 39b extending along the second inclined surface 37b, a third flat surface 39c along the first base surface 16b, and a fourth flat surface 39d along the second base surface 18b.

[0033] The fourth linear motion mechanism 44a includes a fourth rail 44b, a fourth slider 44c, and a plurality of rollers (not shown) serving as rolling elements. The fourth slider 44c is attached to the second inclined surface 37b of the second moving portion 37a. The fourth rail 44b is attached to the fourth inclined surface 39b. The fourth rail 44b is attached so as to extend in the direction in which the fourth inclined surface 39b is inclined. The fourth slider 44c is attached to the fourth rail 44b. The fourth slider 44c is movable together with the second moving portion 37a in the direction in which the fourth inclined surface 39b, which is the direction in which the fourth rail 44b extends, is inclined.

[0034] The fifth linear motion mechanism 45a includes a fifth rail 45b, a fifth slider 45c, and a plurality of rollers (not shown) as rolling elements. The fifth rail 45b is attached to the second base surface 18a of one of the second portions 14a. The fifth rail 45b is attached so as to extend in the Z direction. The fifth slider is attached to the second flat surface 38d of the third moving unit 38a. The fifth slider 45c is attached to the fifth rail 45b. The fifth slider 45c is movable in the Z direction. In other words, the third moving unit 38a is configured to be movable in the Z direction together with the attached fifth slider 45c.

[0035] The sixth linear motion mechanism 46a includes a sixth rail 46b, a sixth slider 46c, and a plurality of rollers (not shown) as rolling elements. The sixth rail 46b is attached to the second base surface 18b of the other second portion 14b. The sixth rail 46b is attached so as to extend in the Z direction. The sixth slider 46c is attached to the fourth flat surface 39d of the fourth moving part 39a. The sixth slider 46c is also attached to the sixth rail 46b. The sixth slider 46c is movable in the Z direction. In other words, the fourth moving part 39a is configured to be movable in the Z direction together with the sixth slider 46c attached thereto.

[0036] Next, a configuration for tilting the table unit 24a will be described. Fig. 9 is a schematic perspective view illustrating the table device 10a shown in Fig. 1, with the first base unit 11a, first linear motion mechanism 41a, second linear motion mechanism 42a, third linear motion mechanism 43a, fourth linear motion mechanism 44a, fifth linear motion mechanism 45a, sixth linear motion mechanism 46a, first drive unit 31a, second drive unit 32a, first moving unit 36a, second moving unit 37a, third moving unit 38a, fourth moving unit 39a, intermediate unit 23a, table unit 24a, third driving unit 33a, and fourth driving unit 34a removed. Fig. 10 is a schematic cross-sectional view of the members shown in Fig. 9 cut along the XZ plane including the seventh linear motion mechanism 47a, eighth linear motion mechanism 48a, and first swing unit 21a. 9 and 10, the seventh linear motion mechanism 47a includes a seventh rail 47b, a seventh slider 47c, and a plurality of rollers (not shown) as rolling elements. The seventh slider 47c is attached to the first flat surface 38c of the third moving part 38a. The seventh slider 47c is attached to the seventh rail 47b.

[0037] The eighth linear motion mechanism 48a is arranged alongside the seventh linear motion mechanism 47a in the first direction (X direction). In this embodiment, the eighth linear motion mechanism 48a is arranged adjacent to the seventh linear motion mechanism 47a on the side opposite to the side on which the second portion 14a is located in the first direction. The eighth linear motion mechanism 48a includes an eighth rail 48b, an eighth slider 48c, and a plurality of rollers (not shown) as rolling elements. The eighth slider 48c is attached to the first flat surface 38c of the third moving part 38a. The eighth slider 48c is attached to the eighth rail 48b.

[0038] The first oscillating portion 21a includes a first rotating shaft 21b and a first support portion 21c that supports the first rotating shaft 21b. The first rotating shaft 21b is a round bar and is provided to extend in a first direction. The first support portion 21c includes a first bearing 21d that supports the first rotating shaft 21b. A pair of first bearings 21d are provided on both ends of the first rotating shaft 21b in the longitudinal direction. The first oscillating portion 21a has a first mounting surface 21e that faces the second flat surface 38d. The seventh rail 47b and the eighth rail 48b are attached to the first mounting surface 21e.

[0039] The second oscillating portion 22a is arranged alongside the first oscillating portion 21a in the second direction (Y direction). The second oscillating portion 22a includes a second rotating shaft 22b and a second support portion 22c that supports the second rotating shaft 22b. The second rotating shaft 22b is a round bar and extends in the second direction. The second support portion 22c includes a second bearing (not shown) that supports the second rotating shaft 22b. The second bearing has a configuration similar to that of the first bearing 21d, and a pair of second bearings are provided on both ends of the second rotating shaft 22b in the longitudinal direction. The second oscillating portion 22a has a second mounting surface 22e that faces the first flat surface 38c. The second oscillating portion 22a is attached to the fourth moving portion 39a so that the second mounting surface 22e is in direct contact with the fourth flat surface 39d. That is, the second support portion 22c of the second swinging portion 22a is configured to be longer in height than the first swinging portion 21a by the length of the seventh linear motion mechanism 47a and the eighth linear motion mechanism 48a.

[0040] Next, a configuration for moving the table unit 24a in the horizontal direction will be described. FIG. 11 is a schematic perspective view illustrating the table device 10a shown in FIG. 1, with the first base unit 11a, first linear motion mechanism 41a, second linear motion mechanism 42a, third linear motion mechanism 43a, fourth linear motion mechanism 44a, fifth linear motion mechanism 45a, sixth linear motion mechanism 46a, first drive unit 31a, second drive unit 32a, first moving unit 36a, second moving unit 37a, third moving unit 38a, and fourth moving unit 39a removed. Also referring to FIG. 11, the intermediate unit 23a is disposed above the first oscillating unit 21a and the second oscillating unit 22a in a direction perpendicular to the first base surfaces 16a and 16b. The intermediate unit 23a includes an intermediate base plate 25a, a first block unit 26a, and a second block unit 27a. The intermediate base plate 25a is flat and rectangular when viewed in a direction perpendicular to the first base surfaces 16a and 16b. The first swinging portion 21a and the second swinging portion 22a are attached to the intermediate base plate 25a. In this embodiment, the second block portion 27a is disposed on the intermediate base plate 25a in the direction perpendicular to the first base surfaces 16a and 16b, and the first block portion 26a is disposed on the second block portion 27a. That is, in the direction perpendicular to the first base surfaces 16a and 16b, the second block portion 27a is located closer to the first base portion 11a than the first block portion 26a. The intermediate base plate 25a and the second block portion 27a may be integrally formed.

[0041] Both first block portion 26a and second block portion 27a are rectangular when viewed from a direction perpendicular to first base surfaces 16a and 16b. Second block portion 27a is provided with second guide portion 27b extending in a second direction. First block portion 26a is provided with second mounting portion 27c extending in the second direction and mounted along second guide portion 27b, and first guide portion 26b extending in the first direction. Second guide portion 27b and second mounting portion 27c allow first block portion 26a to move in the second direction relative to second block portion 27a.

[0042] The table portion 24a is flat and rectangular when viewed in a direction perpendicular to the first base surfaces 16a and 16b. The table portion 24a includes a placement surface 24b, which is located on one side in the thickness direction, which is perpendicular to the first base surfaces 16a and 16b, and on which an object can be placed or attached, and an attachment surface 24c, which is located on the other side in the thickness direction. The placement surface 24b has multiple recesses spaced apart in the first and second directions, which are effectively used when placing an object. The table portion 24a is provided with a first attachment portion 26c, which extends in the first direction and is attached along the first guide portion 26b. The first attachment portion 26c is provided on the attachment surface 24c side. The first guide portion 26b and the first attachment portion 26c allow the table portion 24a to move in the first direction relative to the first block portion 26a.

[0043] The third drive unit 33a and the fourth drive unit 34a are disposed at intervals from the first drive unit 31a and the second drive unit 32a in a direction perpendicular to the first base surfaces 16a and 16b, respectively. The third drive unit 33a and the fourth drive unit 34a are attached to the first block unit 26a. The third drive unit 33a is provided to protrude from the first block unit 26a in a first direction, specifically, the direction indicated by arrow X. The fourth drive unit 34a is provided to protrude from the first block unit 26a in a second direction, specifically, the direction indicated by arrow Y.

[0044] The third drive unit 33a linearly reciprocates the table unit 24a in a first direction. The third drive unit 33a includes a ball screw (third ball screw) 33d having a screw shaft (third screw shaft) 33b and a nut (third nut) (not shown), and a motor (third motor) 33e that rotates the screw shaft 33b. The screw shaft 33b is provided to extend along the first direction (X direction). A cable (not shown) for supplying power extends from the motor 33e. The third nut is attached and fixed to the attachment surface 24c of the table unit 24a.

[0045] The fourth drive unit 34a linearly reciprocates the table unit 24a in the second direction. The fourth drive unit 34a includes a ball screw (fourth ball screw) 34d having a screw shaft (fourth screw shaft) (not shown) and a nut (fourth nut) (not shown), and a motor (fourth motor) 34e that rotates the fourth screw shaft. The fourth screw shaft is arranged to extend along the second direction (Y direction). A cable (not shown) for supplying power extends from the motor 34e. The fourth nut is attached and fixed to the second block unit 27a.

[0046] Next, the operation of the table device 10a configured as described above will be described. First, the operation of moving the table portion 24a in the second direction will be described. When moving the table portion 24a in the second direction, the fourth drive portion 34a is driven to rotate the fourth screw shaft. Then, because the fourth nut is fixed to the second block portion 27a, the table portion 24a moves in the second direction together with the first block portion 26a, the third drive portion 33a, and the fourth drive portion 34a. At this time, the first block portion 26a moves in the second direction while being guided by the second guide portion 27b and the second mounting portion 27c.

[0047] Next, the movement of the table portion 24a in the first direction will be described. When moving the table portion 24a in the first direction, the third drive portion 33a is driven to rotate the screw shaft 33b. Then, because the third nut is fixed to the table portion 24a, the table portion 24a moves in the first direction together with the movement of the third nut in the first direction. At this time, the table portion 24a moves in the first direction while being guided by the first guide portion 26b and the first mounting portion 26c.

[0048] Next, we will explain the movement of the table unit 24a in the vertical direction, which is perpendicular to the first base surfaces 16a and 16b. To move the table unit 24a in the vertical direction, the first drive unit 31a and the second drive unit 32a are driven. Specifically, the first drive unit 31a is driven to rotate the screw shaft 31b. Then, because the nut 31c is attached to the first moving unit 36a, the first moving unit 36a moves in the first direction together with the nut 31c. At this time, the first linear motion mechanism 41a allows the first moving unit 36a to move smoothly in the first direction. A third slider 43c of the third linear motion mechanism 43a is attached to the first inclined surface 36b of the first moving unit 36a. Furthermore, a third rail 43b of the third linear motion mechanism 43a is attached to the third inclined surface 38b of the third moving unit 38a. The fifth slider 45c of the fifth linear motion mechanism 45a is attached to the second flat surface 38d of the third moving part 38a, restricting movement in the first and second directions. Therefore, the third moving part 38a moves in the height direction along the inclination of the first inclined surface 36b and the third inclined surface 38b. Specifically, when the screw shaft 31b is rotated to move the nut 31c in the direction indicated by the arrow X, the first moving part 36a also moves in the direction indicated by the arrow X together with the nut 31c. Consequently, the third moving part 38a rises in the direction indicated by the arrow Z along the inclination of the first inclined surface 36b and the third inclined surface 38b.

[0049] The second drive unit 32a operates in the same manner as the first drive unit 31a. That is, the second drive unit 32a is driven to rotate the screw shaft 32b. Since the nut 32c is attached to the second moving unit 37a, the second moving unit 37a moves in the first direction together with the nut 32c. At this time, the second linear motion mechanism 42a allows the second moving unit 37a to move smoothly in the first direction. A fourth slider 44c of the fourth linear motion mechanism 44a is attached to the second inclined surface 37b of the second moving unit 37a. A fourth rail 44b of the fourth linear motion mechanism 44a is attached to the fourth inclined surface 39b of the fourth moving unit 39a. A sixth slider 46c of the sixth linear motion mechanism 46a is attached to the fourth flat surface 39d of the fourth moving unit 39a, restricting movement in the first and second directions. Therefore, the fourth moving part 39a moves in the height direction along the inclination of the second inclined surface 37b and the fourth inclined surface 39b. Specifically, when the screw shaft 32b is rotated to move the nut 32c in the direction indicated by the arrow X, the second moving part 37a also moves together with the nut 32c in the direction indicated by the arrow X, and the fourth moving part 39a rises in the direction indicated by the arrow Z along the inclination of the second inclined surface 37b and the fourth inclined surface 39b.

[0050] In this way, the seventh linear motion mechanism 47a and the eighth linear motion mechanism 48a attached to the third moving unit 38a and the second swinging unit 22a attached to the fourth moving unit 39a move in the height direction together with the first swinging unit 21a, the intermediate unit 23a, and the table unit 24a. Note that by matching the amount of movement of the first moving unit 36a in the first driving unit 31a with the amount of movement of the second moving unit 37a in the second driving unit 32a, the placement surface 24b of the table unit 24a can be moved in the height direction while remaining parallel to the first base surfaces 16a, 16b.

[0051] Next, the operation of swinging the table portion 24a, i.e., tilting it to a predetermined angle, will be described. FIG. 12 is a schematic perspective view of the table device 10a when the table portion 24a is tilted. FIG. 13 is a schematic left side view of the table device 10a shown in FIG. 12. FIG. 13 is a view of the table device 10a shown in FIG. 12 as seen in the direction indicated by arrow XIII. FIG. 14 is a schematic right side view of the table device 10a shown in FIG. 12. FIG. 14 is a view of the table device 10a shown in FIG. 12 as seen in the direction indicated by arrow XIV. FIG. 15 is a schematic front view of the table device 10a shown in FIG. 12. FIG. 15 is a view of the table device 10a shown in FIG. 12 as seen in the direction indicated by arrow XV. FIG. 16 is a schematic rear view of the table device 10a shown in FIG. 12. FIG. 16 is a view of the table device 10a shown in FIG. 12 as seen in the direction indicated by arrow XVI.

[0052] 12, 13, 14, 15, and 16, when tilting the table 24a by a predetermined angle, the movement amount of the first moving unit 36a of the first driving unit 31a is set to be different from the movement amount of the second moving unit 37a of the second driving unit 32a. That is, the height of the first plane 38c of the third moving unit 38a is set to be different from the height of the third plane 39c of the fourth moving unit 39a. Specifically, the movement amount of the first moving unit 36a in the direction indicated by arrow X is set to be greater than the movement amount of the second moving unit 37a in the direction indicated by arrow X. As a result, the first plane 38c is higher than the third plane 39c. Here, the first oscillating unit 21a rotates around the first rotating shaft 21b as a rotational center axis (see particularly FIGS. 15 and 16). Similarly, the second oscillating unit 22a rotates around the second rotating shaft 22b as a rotational center axis. Then, the members on the first oscillating unit 21a and the second oscillating unit 22a, i.e., the intermediate unit 23a including the table unit 24a, the third drive unit 33a, and the fourth drive unit 34a, are tilted at a predetermined angle. Here, the seventh linear motion mechanism 47a and the eighth linear motion mechanism 48a are provided, and the seventh rail 47b of the seventh linear motion mechanism 47a and the eighth rail 48b of the eighth linear motion mechanism 48a are attached to the first oscillating unit 21a, so that movement of the first oscillating unit 21a in the second direction due to the tilt can be permitted.

[0053] As described above, in the table device 10a, the first moving unit 36a is driven by the first driving unit 31a to perform linear reciprocating motion in a first direction relative to the first portions 13a and 13b of the first base unit 11a. The first moving unit 36a is provided with a first inclined surface 36b, and the third moving unit 38a is provided with a third inclined surface 38b extending along the first inclined surface 36b. Therefore, the linear reciprocating motion of the first moving unit 36a in the first direction moves the third moving unit 38a along the first inclined surface 36b via the third linear motion mechanism 43a, thereby moving the table unit 24a disposed thereon in the vertical direction. Similarly, the second moving unit 37a is driven by the second driving unit 32a to perform linear reciprocating motion in the first direction relative to the first portions 13a and 13b of the first base unit 11a. The second moving unit 37a has a second inclined surface 37b, and the fourth moving unit 39a has a fourth inclined surface 39b extending along the second inclined surface 37b. Therefore, linear reciprocation in the first direction by the second moving unit 37a moves the fourth moving unit 39a along the second inclined surface 37b via the fourth linear motion mechanism 44a, thereby vertically moving the table unit 24a disposed thereon. Furthermore, the third moving unit 38a and the fourth moving unit 39a can be smoothly moved vertically by the fifth linear motion mechanism 45a and the sixth linear motion mechanism 46a, respectively. In this case, the first driving unit 31a is arranged side by side with the second driving unit 32a, so the driving units can be arranged without stacking them. This allows for a low-profile device. Furthermore, the risk of interference between the wiring extending from the first driving unit 31a and the second driving unit 32a can be reduced. The first moving unit 36a and the second moving unit 37a are arranged side by side in a second direction perpendicular to the first direction, and the first oscillating unit 21a and the second oscillating unit 22a are provided, so that the table unit 24a can be tilted and oscillated at a predetermined angle by making the amount of linear reciprocation of the first moving unit 36a different from the amount of linear reciprocation of the second moving unit 37a. In this case, the first oscillating unit 21a is attached to the third moving unit 38a via the seventh linear motion mechanism 47a and the eighth linear motion mechanism 48a, so that movement of the first oscillating unit 21a in the second direction due to the tilt can be permitted, and the table unit 24a can be smoothly tilted to the predetermined angle.The third drive unit 33a can linearly reciprocate the table unit 24a in a first direction, and the fourth drive unit 34a can linearly reciprocate the table unit 24a in a second direction, so that the third drive unit 33a and the fourth drive unit 34a can move the table unit 24a horizontally. The third drive unit 33a and the fourth drive unit 34a are positioned differently from the first drive unit 31a and the second drive unit 32a in the direction perpendicular to the first base surfaces 16a and 16b, respectively. This reduces the risk of the wiring extending from the third drive unit 33a and the fourth drive unit 34a interfering with the wiring extending from the first drive unit 31a and the second drive unit 32a, respectively. As described above, the table device 10a configured as described above can achieve smooth movement and oscillation of the table unit 24a while reducing the cross-section of the device.

[0054] In this embodiment, the second direction is a direction perpendicular to the first direction, so that the table portion 24a can be moved appropriately and smoothly in the horizontal direction, that is, in the so-called vertical and horizontal directions.

[0055] In this embodiment, the first drive unit 31a, the second drive unit 32a, the third drive unit 33a, and the fourth drive unit 34a each include ball screws 31d, 32d, 33d, and 34d having screw shafts 31b, 32b, and 33b, fourth screw shafts and nuts 31c, 32c, third nuts, and fourth nuts, respectively, and motors 31e, 32e, 33e, and 34e that rotate the screw shafts 31b, 32b, and 33b and the fourth screw shafts. Therefore, the screw shafts 31b, 32b, and 33b and the fourth screw shafts can be rotated by the motors 31e, 32e, 33e, and 34e to move the moving unit. Therefore, the movement of the moving unit by the motors 31e, 32e, 33e, and 34e can be controlled with high precision, thereby improving the positioning accuracy when moving the table unit 24a.

[0056] In this embodiment, the first moving section 36a, the second moving section 37a, the third moving section 38a, and the fourth moving section 39a each have a wedge shape. This allows the first moving section 36a, the second moving section 37a, the third moving section 38a, and the fourth moving section 39a to have a compact configuration, while the first inclined surface 36b, the second inclined surface 37b, the third inclined surface 38b, and the fourth inclined surface 39b can be appropriately provided on each moving section. This makes it easy to make the device more compact.

[0057] In this embodiment, the first driving section 31a and the second driving section 32a are fixed to the second portions 14a and 14b, respectively, thereby ensuring more stable movement of the table section 24a.

[0058] In this embodiment, intermediate portion 23a includes second block portion 27a provided with second guide portion 27b extending in the second direction, and first block portion 26a provided with second mounting portion 27c extending in the second direction and attached along second guide portion 27b, and first guide portion 26b extending in the first direction. Table portion 24a includes first mounting portion 26c extending in the first direction and attached along first guide portion 26b. Therefore, while maintaining a compact configuration, table portion 24a can be reliably and smoothly moved in the first direction and in the second direction, allowing table portion 24a to be moved more accurately.

[0059] (Embodiment 2) Next, another embodiment, embodiment 2, will be described. FIG. 17 is a schematic perspective view showing table device 10b according to embodiment 2 of the present disclosure. FIG. 18 is a schematic perspective view showing a second base unit, a rotation mechanism, and a fifth drive unit of table device 10b shown in FIG. 17. FIG. 19 is a schematic plan view of the rotation mechanism and fifth drive unit with a support base, described later, shown in FIG. 18 removed. FIG. 20 is a schematic plan view showing a state in which the rotation base is rotated in the rotation mechanism and fifth drive unit shown in FIG. 19. Table device 10b according to embodiment 2 basically has the same configuration as in embodiment 1 and achieves the same effects. However, table device 10b according to embodiment 2 differs from embodiment 1 in that it includes a plurality of table devices 10a shown in embodiment 1 and includes a second base unit, a rotation mechanism, and a fifth drive unit.

[0060] 17, 18, 19, and 20, table device 10b in embodiment 2 includes a rotation mechanism 51a, a second base unit 52a, and a fifth drive unit 53a. Table device 10b in embodiment 2 also includes a plurality of table devices 10a shown in embodiment 1, four in this embodiment. The four table devices 10a are arranged on the second base unit. That is, on the second base portion of the table device 10b, there are arranged four first base portions 11a, first linear motion mechanism 41a, first moving portion 36a, first driving portion 31a, second linear motion mechanism 42a, second moving portion 37a, second driving portion 32a, third moving portion 38a, third linear motion mechanism 43a, fourth moving portion 39a, fourth linear motion mechanism 44a, fifth linear motion mechanism 45a, sixth linear motion mechanism 46a, seventh linear motion mechanism 47a, eighth linear motion mechanism 48a, first swinging portion 21a, second swinging portion 22a, intermediate portion 23a, table portion 24a, third driving portion 33a, and fourth driving portion 34a. The four table devices 10a are arranged side by side, two in each of the first and second directions. In this case, the fourth drive portions 34a of the table devices 10a are arranged so that they protrude in different directions.

[0061] The second base portion 52a includes a second base plate 54a and a support plate 55a. The second base plate 54a and the support plate 55a are each rectangular when viewed from a direction perpendicular to the first base surfaces 16a and 16b. In this embodiment, the second base plate 54a and the support plate 55a have the same shape. The support plate 55a is disposed above the second base plate 54a. Four table devices 10a are disposed on the support plate 55a. The four table devices 10a are attached so that a surface located on one side in the thickness direction of each of the first base plates 12a faces one surface 56a in the thickness direction of the support plate 55a.

[0062] The rotation mechanism 51a includes a disk-shaped rotary table 61a and a support base 62a that rotatably supports the rotary table 61a. The support base 62a is attached and fixed to one surface in the thickness direction of the second base plate 54a. The support base 62a has a solid cylindrical protrusion 63a that protrudes in the thickness direction of the second base plate 54a. The rotary table 61a has a notch 64a that cuts out a portion of its outer circumferential surface. The notch 64a is provided with a connecting portion 58a that connects to a nut included in the fifth drive unit 53a (described later). A round hole 65a is formed in the center of the rotary table 61a. The rotary table 61a is attached so that the round hole 65a fits into the protrusion 63a. The rotary table 61a is attached to the support plate 55a. The rotary table 61a and the support plate 55a are rotatably supported relative to the support base 62a. The rotation mechanism 51a is disposed between the second base plate 54a and the support plate 55a in the thickness direction of the second base plate 54a.

[0063] The rotation mechanism 51a also includes four support mechanisms 66a, 67a, 68a, and 69a arranged near the four corners of the rectangular second base plate 54a. The support mechanism 66a includes two linear motion mechanisms 71a and 72a, each including a rail and a slider linearly attached to the rail, and a rotation support unit 73a. The two linear motion mechanisms 71a and 72a are arranged so as to overlap in the Z direction via the rotation support unit 73a. In this embodiment, the rotation support unit 73a includes a cross roller bearing. The rail of one linear motion mechanism 71a is fixed on the second base plate 54a. The rail is attached to the second base plate 54a so as to extend in the Y direction. The other linear motion mechanism 72a is arranged so that its rail extends in the X direction when not rotated by the rotation mechanism 51a (as shown in FIG. 19 ). The rotation support unit 73a includes a disk portion (not shown) attached to the slider included in one linear motion mechanism 71a, an annular portion 74a formed on the outer periphery of the disk portion, and a flat portion (not shown) fixed to the annular portion 74a and attached to the slider of the other linear motion mechanism 72a. The disk portion of the rotation support unit 73a constitutes the inner ring of a cross roller bearing, and the annular portion 74a constitutes the outer ring of the cross roller bearing. The slider of the other linear motion mechanism 72a is fixed to the flat portion. The annular portion 74a is rotatably supported relative to the disk portion, so that the flat portion and the other linear motion mechanism 72a, together with the annular portion 74a, can rotate relative to the disk portion. The rail of the other linear motion mechanism 72a is attached to the back surface of the support plate 55a (the surface opposite the surface 56a in the thickness direction). The support mechanism 69a has the same configuration as the support mechanism 66a, except for its attachment position. The other support mechanisms 67a and 68a also have the same configuration as support mechanism 66a, except that the direction in which the rails included in one of the linear motion mechanisms are attached is perpendicular to that of support mechanism 66a and the attachment positions are different.

[0064] The fifth driving unit 53a is disposed on a side surface of the rotary table 61a, specifically, a surface that faces horizontally the side surface of the rotary table 61a on which the notch 64a is formed. The fifth driving unit 53a includes a motor 57a, a ball screw (not shown) including a screw shaft (not shown) and a nut (not shown), and a connecting unit 58a attached to the nut. When the motor 57a rotates the screw shaft, the connecting unit 58a causes the nut to move linearly in the X direction. The connecting unit 58a extending from the notch 64a of the rotary table 61a is connected to the nut. By rotating the motor 57a of the fifth driving unit 53a and linearly moving the nut in the direction indicated by the arrow X, the rotary table 61a and further the support plate 55a attached to the rotary table 61a can be oscillated or rotated around the center of the circular hole 65a via the connecting unit 58a connected to the nut. In this case, the four corner areas of the support plate 55a are rotatably supported by the support mechanisms 66a, 67a, 68a, and 69a, so that the support plate 55a can maintain a stable posture.

[0065] This allows the table portion 24a to move horizontally, vertically, and oscillate, and also rotates using the rotation mechanism 51a and the fifth drive unit 53a, thereby further improving convenience.

[0066] In this embodiment, the second base unit includes a first base unit, a first linear motion mechanism, a first moving unit, a first drive unit, a second linear motion mechanism, a second moving unit, a second drive unit, a third moving unit, a third linear motion mechanism, a fourth moving unit, a fourth linear motion mechanism, a fifth linear motion mechanism, a sixth linear motion mechanism, a seventh linear motion mechanism, an eighth linear motion mechanism, a first swing unit, a second swing unit, an intermediate unit, a table unit, a third drive unit, and a fourth drive unit. This allows the table units to be rotated on the second base unit while being moved horizontally, vertically, and inclined relative to the first base unit. This allows the table units to be used in a way that better suits the user's needs.

[0067] (Other embodiments) In the above embodiment, the second direction is a direction perpendicular to the first direction, but this is not limited to this. For example, the second direction may be a direction that intersects the first direction at an angle of 60 degrees or 30 degrees.

[0068] In the above-described embodiment, at least one of the first, second, third, and fourth drive units may include a ball screw having a screw shaft and a nut, and a motor for rotating the screw shaft. This makes it easier to more precisely control the linear reciprocating motion of at least one of the first moving units, etc. Therefore, precise positioning of the table unit can be more easily achieved.

[0069] The present invention is intended to cover a wide range of applications, including those related to the present invention, including those related to the present invention. [Explanation of symbols]

[0070] 10a, 10b table device, 11a first base portion, 12a first base plate, 13a, 13b first portion, 14a, 14b second portion, 15a, 15b, 17a, 17b surface, 16a, 16b first base surface, 18a, 18b second base surface, 21a first swing portion, 21b first rotating shaft, 21c first support portion, 21d first bearing, 21e first mounting surface, 22a second swing portion, 22b second rotating shaft, 22c second support portion, 22e second mounting surface, 23a intermediate portion, 24a table portion, 24b placement surface, 24c mounting surface, 25a intermediate base plate, 26a first block portion, 26b first guide portion, 26c first mounting portion, 27a second block portion, 27b second guide portion, 27c Second mounting portion, 31a First drive portion, 31b, 32b, 33b Screw shaft, 31c, 32c Nut, 31d, 32d, 33d, 34d Ball screw, 31e, 32e, 33e, 34e Nut, 32a Second drive portion, 33a Third drive portion, 34a Fourth drive portion, 36a First moving portion, 36b First inclined surface, 37a Second moving portion, 37b Second inclined surface, 38a Third moving portion, 38b Third inclined surface, 38c First flat surface, 38d Second flat surface, 39a Fourth moving portion, 39b Fourth inclined surface, 39c Third flat surface, 39d Fourth flat surface, 41a First linear motion mechanism, 41b First rail, 41c First slider, 42a Second linear motion mechanism, 42b Second rail, 42c Second slider, 43a Third linear motion mechanism, 43b Third rail, 43c Third slider, 44a Fourth linear motion mechanism, 44b Fourth rail, 44c Fourth slider, 45a Fifth linear motion mechanism, 45b Fifth rail, 45c Fifth slider, 46a Sixth linear motion mechanism, 46b Sixth rail, 46c Sixth slider, 47a Seventh linear motion mechanism, 47b Seventh rail, 47c Seventh slider, 48a Eighth linear motion mechanism, 48b Eighth rail, 48c Eighth slider, 51a Rotation mechanism, 52a Second base portion, 53a Fifth drive portion, 54a Second base plate, 55a Support plate, 56a Surface, 57a Motor, 58a Connecting portion, 61a Rotating table, 62a Support base, 63a Protrusion, 64a Notch, 65a Round hole, 66a, 67a, 68a, 69a support mechanism, 71a, 72a linear motion mechanism, 73a rotation support portion, 74a annular portion.

Claims

1. a first base portion including a first portion having a first base surface and a second portion having a second base surface extending in a direction intersecting the first base surface; a first linear motion mechanism including a first rail attached to the first base surface and extending in a first direction, and a first slider attached to the first rail and movable in the first direction; a first moving part having a first inclined surface inclined with respect to the first base surface and attached to the first slider; a first drive unit that causes the first moving unit to linearly reciprocate in the first direction; a second linear motion mechanism attached to the first base surface alongside the first linear motion mechanism in a second direction intersecting the first direction within a plane parallel to the first base surface, the second linear motion mechanism including a second rail extending in the first direction and a second slider attached to the second rail and movable in the first direction; a second moving portion having a second inclined surface inclined with respect to the first base surface and attached to the second slider; a second drive unit that causes the second moving unit to linearly reciprocate in the first direction; a third moving portion having a third inclined surface extending along the first inclined surface, a first flat surface along the first base surface, and a second flat surface facing the second base surface; a third linear motion mechanism including a third rail attached to the third inclined surface and extending in the inclined direction of the third inclined surface, and a third slider attached to the first inclined surface and the third rail and movable in the inclined direction of the third inclined surface; a fourth moving portion having a fourth inclined surface extending along the second inclined surface, a third flat surface along the first base surface, and a fourth flat surface facing the second base surface; a fourth linear motion mechanism including a fourth rail attached to the fourth inclined surface and extending in the inclined direction of the fourth inclined surface, and a fourth slider attached to the fourth inclined surface and the fourth rail and movable in the inclined direction of the fourth inclined surface; a fifth linear motion mechanism including a fifth rail attached to the second base surface and extending in a direction perpendicular to the first base surface, and a fifth slider attached to the second plane and the fifth rail and movable in a direction perpendicular to the first base surface; a sixth linear motion mechanism including a sixth rail attached to the second base surface alongside the fifth linear motion mechanism in the second direction and extending in a direction perpendicular to the first base surface, and a sixth slider attached to the fourth plane and the sixth rail and movable in a direction perpendicular to the first base surface; a seventh linear motion mechanism including a seventh rail extending in the second direction and a seventh slider attached to the third plane and the seventh rail and movable in the second direction when viewed from a direction perpendicular to the first base surface; an eighth linear motion mechanism including an eighth rail extending in the second direction and an eighth slider attached to the eighth rail and the third plane in line with the seventh linear motion mechanism in the first direction, and movable in the second direction as viewed from a direction perpendicular to the first base surface; a first swinging unit including a first rotation shaft extending in the first direction and a first support unit supporting the first rotation shaft, the first swinging unit having the seventh rail and the eighth rail attached thereto; a second swinging portion disposed next to the first swinging portion in the second direction, including a second rotation shaft extending in the first direction and a second support portion supporting the second rotation shaft, the second support portion being attached to the fourth plane; an intermediate portion disposed at a distance from the first portion in a direction perpendicular to the first base surface and attached to the first support portion and the second support portion; a table portion disposed on the intermediate portion in a direction perpendicular to the first base surface and attached to the intermediate portion; a third drive unit that is disposed at an interval from the first drive unit and the second drive unit in a direction perpendicular to the first base surface and that linearly reciprocates the table unit in the first direction; a fourth drive unit that is disposed at an interval from the first drive unit and the second drive unit in a direction perpendicular to the first base surface and that linearly reciprocates the table unit in the second direction; the intermediate portion allows the table portion to move in the first direction and the second direction; A table device wherein the table portion is movable in any of a direction along the first base surface, a direction perpendicular to the first base surface, and a direction inclined relative to the first base surface by driving at least one of the first driving portion, the second driving portion, the third driving portion, and the fourth driving portion.

2. The table apparatus according to claim 1 , wherein the second direction is a direction perpendicular to the first direction.

3. At least one of the first driving unit, the second driving unit, the third driving unit, and the fourth driving unit, a ball screw having a screw shaft and a nut; The table device according to claim 1 or 2, further comprising: a motor that rotates the screw shaft.

4. 3. The table device according to claim 1, wherein at least one of the first moving section, the second moving section, the third moving section, and the fourth moving section has a wedge shape.

5. 3. The table device according to claim 1, wherein at least one of the first drive unit and the second drive unit is fixed to the second portion.

6. The intermediate portion is a second block portion provided with a second guide portion extending in the second direction; a first block portion provided with a second mounting portion that extends in the second direction and is mounted along the second guide portion, and a first guide portion that extends in the first direction; 3. The table device according to claim 1, wherein the table portion includes a first attachment portion that extends in the first direction and is attached along the first guide portion.

7. a rotation mechanism that supports the first base portion rotatably around an axis that extends in a direction perpendicular to the first base surface; a second base portion that supports the rotation mechanism; 3. The table device according to claim 1, further comprising: a fifth drive unit that drives the rotation mechanism to rotate the first base portion relative to the second base portion.

8. 8. The table device according to claim 7, wherein a plurality of each of the first base portion, the first linear motion mechanism, the first moving portion, the first drive portion, the second linear motion mechanism, the second moving portion, the second drive portion, the third moving portion, the third linear motion mechanism, the fourth moving portion, the fourth linear motion mechanism, the fifth linear motion mechanism, the sixth linear motion mechanism, the seventh linear motion mechanism, the eighth linear motion mechanism, the first oscillating portion, the second oscillating portion, the intermediate portion, the table portion, the third drive portion, and the fourth drive portion are arranged on the second base portion.

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