Ultrasonic nozzle

Abstract

To prepare many types of ultrasonic nozzles in order to obtain ultrasonic waves of more kinds of characteristics.SOLUTION: An ultrasonic nozzle 10 comprises: an introduction unit 20; a cavity 30; and a lead-out unit 40. The introduction unit 20 includes a flow-in path 21 through which a gas supplied from a gas supply source can flow. The cavity 30 includes a resonance chamber 31 communicating with the flow-in path 21 to make the flowing-in gas to resonate. The lead-out unit 40 includes a flow-out path 43 which is connected to the resonance chamber 31 at a place different from that of the flow-in path 21 and through which the gas flowing in from the resonance chamber 31 can be discharged. The cavity 30 can be attachable to / detachable from one or more of the introduction and lead-out units 20 and 40.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to an ultrasonic nozzle. [Background technology]

[0002] The ultrasonic nozzle described in Patent Document 1 has a flow passage through which gas such as air can flow. The flow passage has an inlet passage through which the gas flows, an outlet passage through which the gas is discharged, and a resonance chamber located between the inlet and outlet passages. The maximum flow passage width of the resonance chamber is wider than the flow passage width at the end of the inlet passage connected to the resonance chamber. The maximum flow passage width of the resonance chamber is also wider than the flow passage width at the end of the outlet passage connected to the resonance chamber. When the flowing gas vibrates within the flow passage, ultrasonic waves having specific frequency characteristics are emitted from the nozzle. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Patent No. 3766535 Summary of the Invention [Problem to be solved by the invention]

[0004] In ultrasonic nozzles such as those described in Patent Document 1, it is sometimes desirable to change the characteristics of the ultrasonic waves, such as frequency, depending on the target to which the ultrasonic waves are radiated. However, the characteristics of the ultrasonic waves radiated from an ultrasonic nozzle are determined by the shape of the ultrasonic nozzle's resonance chamber, etc. In other words, only specific ultrasonic characteristics can be obtained with one type of ultrasonic nozzle. For these reasons, the only way to obtain ultrasonic waves with a wider variety of characteristics is to prepare a wide variety of ultrasonic nozzles corresponding to those characteristics. [Means for solving the problem]

[0005] In order to solve the above problems, the present invention provides an ultrasonic nozzle that is detachable from one or more of the inlet and outlet sections, and that has an inlet passage through which the gas supplied from a gas supply source can flow, a cavity section that is connected to the inlet passage and has a resonance chamber through which the inlet gas resonates, and an outlet section that is connected to the resonance chamber at a location separate from the inlet passage and has an outlet passage through which the gas that has flowed in from the resonance chamber can be discharged, and the cavity section is an ultrasonic nozzle that is detachable from one or more of the inlet and outlet sections. [Effects of the Invention]

[0006] By combining parts, ultrasonic waves with a wide variety of characteristics can be obtained. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a perspective view of an ultrasonic nozzle according to a first embodiment. [Figure 2] FIG. 2 is a side view of the ultrasonic nozzle according to the first embodiment. [Figure 3] FIG. 3 is a cross-sectional view taken along line 3-3 in FIG. [Figure 4] FIG. 4 is a cross-sectional view of the ultrasonic nozzle according to the second embodiment. [Figure 5] FIG. 5 is a cross-sectional view of an ultrasonic nozzle according to a modified example. DETAILED DESCRIPTION OF THE INVENTION

[0008] The first and second embodiments of the ultrasonic nozzle will be described below. Note that the drawings are schematic diagrams for ease of understanding, and some components may be enlarged or omitted. Therefore, the dimensional ratios of the components may differ from those of the actual components.

[0009] <First embodiment of ultrasonic nozzle> (Overall structure) As shown in Figure 1, the ultrasonic nozzle 10 includes an inlet section 20, a cavity section 30, and an outlet section 40. The ultrasonic nozzle 10 has an overall substantially cylindrical outer shape. That is, the inlet section 20, the cavity section 30, and the outlet section 40 all have substantially the same diameter and have a substantially cylindrical outer shape. In the following, a specific direction parallel to the central axis CA of the ultrasonic nozzle 10 is referred to as the positive direction PD. Of the directions parallel to the central axis CA, the direction opposite to the positive direction PD is referred to as the negative direction ND.

[0010] As shown in FIG. 2, the introduction section 20 is located at the end of the ultrasonic nozzle 10 on the negative direction ND side. The cavity section 30 is connected to the end of the introduction section 20 on the positive direction PD side. The outlet section 40 is connected to the cavity section 30 on the positive direction PD side. The introduction section 20, cavity section 30, and outlet section 40 are fixed in a mutually positioned state. This positioning structure will be described later. The introduction section 20, cavity section 30, and outlet section 40 are all made of metal such as aluminum alloy or stainless steel.

[0011] 3, the introduction section 20 has an inlet channel 21. The inlet channel 21 is a through-hole that penetrates the introduction section 20 along the central axis CA. That is, one end of the inlet channel 21 opens at an end face of the introduction section 20 on the negative direction ND side. The other end of the inlet channel 21 opens at an end face of the introduction section 20 on the positive direction PD side. The center line of the inlet channel 21 substantially coincides with the central axis CA of the ultrasonic nozzle 10.

[0012] Gas supplied from a gas supply source, such as a pump (not shown), attached to the ultrasonic nozzle 10 on the negative direction ND side of the introduction section 20 can flow through the inflow channel 21. In this embodiment, a portion of the inflow channel 21, including the end on the negative direction ND side, is a threaded hole. That is, a portion of the inner circumferential surface of the inflow channel 21, including the end on the negative direction ND side, has a helical thread groove. Therefore, a hose or the like extending from a gas supply source can be attached and detached to and from the introduction section 20 using the threaded hole. Furthermore, the flow path width of the portion of the inflow channel 21 on the positive direction PD side of the threaded hole is smaller than the width of the threaded hole and is substantially constant throughout. Note that the flow path width is the dimension of the flow path in a direction perpendicular to the central axis CA.

[0013] As shown in FIG. 3, the cavity 30 has a resonance chamber 31. The resonance chamber 31 is a through-hole that penetrates the cavity 30 along the central axis CA. That is, one end of the resonance chamber 31 opens at the end face of the cavity 30 on the negative direction ND side. The other end of the resonance chamber 31 opens at the end face of the cavity 30 on the positive direction PD side. The center line of the resonance chamber 31 substantially coincides with the central axis CA of the ultrasonic nozzle 10. The width dimension W of the resonance chamber 31 is substantially constant throughout. The width dimension W is the dimension of the resonance chamber 31 in a direction perpendicular to the central axis CA.

[0014] The resonance chamber 31 is connected to the inlet channel 21. That is, the gas that has flowed through the inlet channel 21 flows into the resonance chamber 31 from the negative direction ND of the resonance chamber 31. The resonance chamber 31 is a cavity in which the flowing gas resonates. Specifically, the maximum value of the width dimension W of the resonance chamber 31 is greater than the width of the opening of the inlet channel 21 at the end that communicates with the cavity portion 30. The inner surface of the resonance chamber 31 is smooth. With this structure, when gas flows from the inlet channel 21 into the resonance chamber 31, the gas expands. Then, the gas vibrates within the resonance chamber 31, generating ultrasonic waves with a frequency that depends on the size of the resonance chamber 31, etc.

[0015] 3, the outlet portion 40 has a substantially disk-shaped outlet portion main body 41 and a discharge port 42 that protrudes in the positive direction PD along a central axis CA from the center of the outlet portion main body 41. The outlet portion 40 has an outflow path 43.

[0016] The outflow path 43 is a through-hole that penetrates the outlet main body 41 and the discharge port 42 along the central axis CA. That is, one end of the outflow path 43 opens at the end face of the outlet main body 41 on the negative direction ND side. The other end of the outflow path 43 opens at the tip of the discharge port 42 of the outlet portion 40. The center line of the outflow path 43 substantially coincides with the central axis CA of the ultrasonic nozzle 10. Furthermore, the flow path width of the outflow path 43 is substantially constant throughout.

[0017] The outflow path 43 communicates with the resonance chamber 31 at a location separate from the inflow path 21. Therefore, the outlet portion 40 can discharge the gas that flows in from the resonance chamber 31. Specifically, the outflow path 43 communicates with an opening on the positive direction PD side of the resonance chamber 31. That is, the gas that has flowed through the resonance chamber 31 flows into the outflow path 43 from an opening on the negative direction ND side of the outflow path 43. The gas that has flowed through the outflow path 43 is discharged from the discharge port 42. Note that the flow path width of the end of the outflow path 43 that communicates with the cavity portion 30 is smaller than the maximum width dimension W of the resonance chamber 31. Therefore, the gas that has vibrated in the resonance chamber 31 is compressed in the outflow path 43 and discharged from the discharge port 42.

[0018] (About attaching and detaching each part) 3, the cavity portion 30 is detachable from one or more of the introduction portion 20 and the outlet portion 40. In this embodiment, the cavity portion 30 is detachable from both the introduction portion 20 and the outlet portion 40. However, "detachable" means that it can be attached and detached without irreversible destruction or deformation.

[0019] 1, the ultrasonic nozzle 10 has a positioning structure that can position the inlet channel 21, the resonance chamber 31, and the outlet channel 43 relative to one another. Specifically, the ultrasonic nozzle 10 has, as the positioning structure, an insertion hole and a fastener 50 that is inserted into the insertion hole. Specifically, the ultrasonic nozzle 10 has a first insertion hole H1 and a second insertion hole H2 that penetrate the introduction portion 20, the cavity portion 30, and the outlet portion 40 along the central axis CA.

[0020] As shown in FIG. 3 , the first insertion hole H1 is composed of a first through hole TH1, a second through hole TH2, and a first screw hole SH1. The first through hole TH1 is a through hole that penetrates the lead-out portion main body 41. The first through hole TH1 is located in the lead-out portion main body 41 between the discharge port 42 and the outer edge of the lead-out portion main body 41. The first through hole TH1 opens at an end face on the positive direction PD side and an end face on the negative direction side of the lead-out portion main body 41. The second through hole TH2 is a through hole that penetrates a portion of the cavity portion 30 other than the resonance chamber 31. The second through hole TH2 opens at an end face on the positive direction PD side and an end face on the negative direction side of the cavity portion 30. When the lead-out portion 40 is attached to the cavity portion 30, the second through hole TH2 communicates with the first through hole TH1. The first screw hole SH1 is a screw hole that opens at an end face on the positive direction PD side of the introduction portion 20. The inner peripheral surface of the first screw hole SH1 has a helical thread groove. When the cavity portion 30 is attached to the introduction portion 20, the first screw hole SH1 communicates with the second through hole TH2. Therefore, when the introduction portion 20, the cavity portion 30, and the outlet portion 40 are attached, the first through hole TH1, the second through hole TH2, and the first screw hole SH1 communicate in the direction along the central axis CA.

[0021] The second insertion hole H2 is composed of a third through hole TH3, a fourth through hole TH4, and a second screw hole SH2. The third through hole TH3 is a through hole that penetrates the lead-out portion main body 41. The third through hole TH3 is located at a position of the lead-out portion main body 41 that is line-symmetrical to the first through hole TH1 with respect to the central axis CA. The third through hole TH3 opens at an end face on the positive direction PD side and an end face on the negative direction side of the lead-out portion main body 41. The fourth through hole TH4 is a through hole that penetrates the cavity portion 30 at a position that is line-symmetrical to the second through hole TH2 with respect to the central axis CA. The fourth through hole TH4 opens at an end face on the positive direction PD side and an end face on the negative direction side of the cavity portion 30. When the lead-out portion 40 is attached to the cavity portion 30, the fourth through hole TH4 communicates with the third through hole TH3. The second screw hole SH2 is a screw hole that opens at the end face of the introduction portion 20 on the positive direction PD side. The inner surface of the second screw hole SH2 has a helical thread groove. The second screw hole SH2 is located at a position that is symmetrical to the first screw hole SH1 with respect to the central axis CA. When the cavity portion 30 is attached to the introduction portion 20, the second screw hole SH2 communicates with the fourth through hole TH4. Therefore, when the introduction portion 20, the cavity portion 30, and the lead-out portion 40 are attached, the third through hole TH3, the fourth through hole TH4, and the second screw hole SH2 communicate in the direction along the central axis CA.

[0022] As shown in FIG. 1 , the fasteners 50 of this embodiment are a first pin P1 and a second pin P2. The outer peripheral surfaces of the first pin P1 and the second pin P2 have threaded grooves. Note that this type of pin is also referred to as a bolt, a screw, or the like. Each fastener 50 fastens the introduction portion 20, the cavity portion 30, and the outlet portion 40 so that the resonance chamber 31 and the outlet path 43 are positioned at specific positions relative to the inlet path 21. Specifically, the first pin P1 is inserted through the first insertion hole H1. The first pin P1 is fastened to the first screw hole SH1 of the first insertion hole H1. The second pin P2 is inserted through the second insertion hole H2. The second pin P2 is fastened to the second screw hole SH2 of the second insertion hole H2. Note that the first pin P1 and the second pin P2 are detachable, so the cavity portion 30 is detachable from both the introduction portion 20 and the outlet portion 40. In addition, the first pin P1 and the second pin P2 are not shown in FIG.

[0023] (Effects of the first embodiment) (1-1) In the first embodiment, the cavity 30 is detachable from one or more of the inlet 20 and outlet 40. This allows the shape of the gas flow path to be changed by changing the combination of the inlet 20, cavity 30, and outlet 40. In other words, even if it is desired to obtain ultrasonic waves with a wider variety of characteristics, it is not necessary to prepare ultrasonic nozzles for each characteristic.

[0024] Furthermore, for example, if the introduction section 20 is detachable from the cavity section 30, multiple types of cavity sections 30 can be prepared for one introduction section 20. For example, one introduction section 20 and one outlet section 40 can be reused for multiple types of cavity sections 30. This makes it possible to suppress increases in costs associated with manufacturing the ultrasonic nozzle 10, even when ultrasonic waves with various characteristics are desired.

[0025] (1-2) In the first embodiment, the cavity portion 30 is detachable from both the inlet portion 20 and the outlet portion 40. For example, assume that 10 types of cavity portions 30, 2 types of inlet portions 20, and 5 types of outlet portions 40 are selected and combined, one type each. If the inlet portions 20 and outlet portions 40 were not separable from the cavity portion 30, 100 types of ultrasonic nozzles 10 would be required to obtain frequency characteristics for all combinations. On the other hand, with this configuration, frequency characteristics for all combinations can be obtained by rearranging a total of 17 types of parts. Therefore, more frequency characteristics can be obtained without increasing the number of ultrasonic nozzles 10 themselves.

[0026] (1-3) In the first embodiment, the ultrasonic nozzle 10 has a fastener 50 that fastens the inlet portion 20, the cavity portion 30, and the outlet portion 40 together so that the resonance chamber 31 and the outlet portion 43 are positioned at specific positions relative to the inlet portion 21. Because all parts are fixed with a single fastener 50, misalignment between the flow paths is less likely to occur than, for example, when the inlet portion 20 and the cavity portion 30, and the cavity portion 30 and the outlet portion 40 are positioned separately.

[0027] <Second embodiment of ultrasonic nozzle> Next, a second embodiment of the ultrasonic nozzle will be described. The ultrasonic nozzle 100 according to the second embodiment differs from the ultrasonic nozzle 100 according to the first embodiment mainly in the configuration of the cavity portion 130. In the following, the same components of the ultrasonic nozzle 100 according to the second embodiment as those according to the first embodiment will be assigned the same reference numerals and will not be described again.

[0028] (Regarding the cavity configuration) As shown in FIG. 4, in the second embodiment, the cavity portion 130 includes a first cavity portion 130A, a second cavity portion 130B, and a third cavity portion 130C.

[0029] The first cavity 130A is the portion of the cavity 130 located closest to the negative direction ND. The first cavity 130A has a first resonance chamber 131A that is a part of the resonance chamber 131. The first resonance chamber 131A opens at an end face of the first cavity 130A on the negative direction ND side and an end face of the first cavity 130A on the positive direction PD side. The center line of the first resonance chamber 131A substantially coincides with the central axis CA of the ultrasonic nozzle 100. The first width dimension W1 of the first resonance chamber 131A is substantially constant throughout. The first width dimension W1 is the dimension of the first resonance chamber 131A in a direction perpendicular to the central axis CA.

[0030] The second cavity 130B is the portion of the cavity 130 located closest to the positive direction PD. The second cavity 130B has a second resonance chamber 131B, which is a portion of the resonance chamber 131 that is different from the first resonance chamber 131A. The second resonance chamber 131B opens at an end face of the second cavity 130B on the negative direction ND side and an end face on the positive direction PD side. The center line of the second resonance chamber 131B substantially coincides with the central axis CA of the ultrasonic nozzle 100. The second width dimension W2 of the second resonance chamber 131B is substantially constant throughout. The second width dimension W2 is the dimension of the second resonance chamber 131B in a direction perpendicular to the central axis CA.

[0031] The third cavity portion 130C is a portion of the cavity portion 130 that is located between the first cavity portion 130A and the second cavity portion 130B. The third cavity portion 130C has a third resonance chamber 131C. The third resonance chamber 131C is a portion of the resonance chamber 131 that connects the first resonance chamber 131A and the second resonance chamber 131B.

[0032] The third resonance chamber 131C opens at the end face on the negative direction ND side and the end face on the positive direction PD side of the third cavity portion 130C. The center line of the third resonance chamber 131C substantially coincides with the central axis CA of the ultrasonic nozzle 100. The width dimension of the third resonance chamber 131C is substantially constant throughout. A first opening width OW1 on the negative direction ND side of the third resonance chamber 131C is smaller than the maximum value of the first width dimension W1 of the first resonance chamber 131A. A second opening width OW2 on the positive direction PD side of the third resonance chamber 131C is smaller than the maximum value of the second width dimension W2 of the second resonance chamber 131B. The opening width refers to the dimension of the opening of the third resonance chamber 131C in a direction perpendicular to the central axis CA.

[0033] Due to the above positional relationship, the first resonance chamber 131A, the second resonance chamber 131B, and the third resonance chamber 131C are in communication with each other along the central axis CA. Furthermore, the first cavity portion 130A is detachable from the second cavity portion 130B. Specifically, the first cavity portion 130A, the second cavity portion 130B, and the third cavity portion 130C are attachable to and detachable from one another. Note that the fastener 50 and the insertion holes are not shown in Figure 4.

[0034] (Effects of the second embodiment) (2-1) In the second embodiment, the cavity portion 130 includes a first cavity portion 130A and a second cavity portion 130B. The first cavity portion 130A is detachable from the second cavity portion 130B. In other words, the cavity portions 130 can be combined in two or more stages. This increases the number of combinations of each part, making it possible to obtain a greater variety of frequency characteristics.

[0035] (2-2) In the second embodiment, the ultrasonic nozzle 100 includes a third cavity 130C between the first cavity 130A and the second cavity 130B. The third resonance chamber 131C of the third cavity 130C has a narrower flow path width than the first resonance chamber 131A and the second resonance chamber 131B. This allows the resonance chamber 131 to have a more complex shape, which can generate ultrasonic waves with a wider variety of frequency characteristics.

[0036] <Example of change> The above-described first and second embodiments can be modified and implemented as follows: The above-described embodiments and the following modifications can be implemented in combination with each other within the scope of technical compatibility.

[0037] The external shape of the ultrasonic nozzle 10 is not limited to the examples in each embodiment. The ultrasonic nozzle 10 may be configured to include the introduction portion 20, the cavity portion 30, and the outlet portion 40. The lead-out portion 40 only needs to have an outlet for gas that can emit ultrasonic waves. For example, it may be configured with only the lead-out portion main body 41 without having the discharge port 42.

[0038] The shapes of the inlet channel 21, the resonance chamber 31, and the outlet channel 43 are not limited to those shown in the examples of the respective embodiments. For example, the inlet channel 21 may be bent midway, or may have portions with narrow and wide flow path widths. Furthermore, as shown in FIG. 5, the resonance chamber 31 may have a tapered shape with a width W that increases from the negative direction ND to the positive direction PD.

[0039] The cavity portion 30 may be detachable from at least one of the introduction portion 20 and the outlet portion 40. That is, the cavity portion 30 and the introduction portion 20 may be an integral, non-detachable body, and the outlet portion 40 may be detachable from the cavity portion 30. Note that "non-detachable" means that it cannot be attached or removed without irreversible destruction or deformation. Alternatively, the cavity portion 30 and the introduction portion 20 may be an integral, non-detachable body, and the introduction portion 20 may be detachable from the cavity portion 30.

[0040] The fastener 50 is not limited to the example in the first embodiment. For example, it may be fixed with one pin, or the ultrasonic nozzle 10 may have three or more pins as the fastener 50. Also, for example, each part may be positioned with tape, or the introduction portion 20 may have a female thread on the edge on the positive direction PD side, and the cavity portion 30 may have a male thread on the edge on the negative direction ND side, and the introduction portion 20 and the cavity portion 30 may be connected by a screw joint.

[0041] In the second embodiment, the cavity 130 may include a fourth cavity. That is, the cavity 130 may be composed of four or more parts that are detachable from one another. Similarly, the introduction section 20 and the discharge section 40 may be detachable from two or more parts.

[0042] <Additional Notes> The technical ideas that can be understood from the above-described embodiment and modified examples will be described. [1] An ultrasonic nozzle comprising: an inlet section having an inlet passage through which the gas supplied from a gas supply source can flow; a cavity section that is connected to the inlet passage and has a resonance chamber through which the inlet gas resonates; and an outlet section that is connected to the resonance chamber at a location separate from the inlet passage and has an outlet passage through which the gas that has flowed in from the resonance chamber can be discharged, wherein the cavity section is detachable from one or more of the inlet section and the outlet section.

[0043] [2] The ultrasonic nozzle according to [1], wherein the cavity portion is detachable from both the introduction portion and the discharge portion. [3] An ultrasonic nozzle as described in [1] or [2], having fasteners that fasten the inlet portion, the cavity portion, and the outlet portion so that the resonance chamber and the outlet path are positioned at specific positions relative to the inlet path.

[0044] [4] An ultrasonic nozzle according to any one of [1] to [3], wherein the cavity portion comprises a first cavity portion having a first resonance chamber that is a part of the resonance chamber, and a second cavity portion having a second resonance chamber that is a part of the resonance chamber that is different from the first resonance chamber, and the first cavity portion is detachable from the second cavity portion.

[0045] [5] The ultrasonic nozzle described in [4], wherein the cavity portion is located between the first cavity portion and the second cavity portion and includes a third cavity portion having a third resonance chamber that is a portion of the resonance chamber that connects the first resonance chamber and the second resonance chamber, and the opening width of the third resonance chamber on the first cavity portion side is smaller than the maximum width dimension of the first resonance chamber, and the opening width of the third resonance chamber on the second cavity portion side is smaller than the maximum width dimension of the second resonance chamber. [Explanation of symbols]

[0046] 10...Ultrasonic nozzle CA…Central axis line 20...Introduction 21...Inflow channel 30...cavity part 31...Resonance chamber 40…Derivation part 42...Outflow channel 50...Fastener 100...Ultrasonic nozzle 130...cavity part 131...Resonance chamber 131A…1st resonance chamber 131B…Second resonance chamber 131C…Third resonance chamber W1: First width dimension W2: Second width dimension OW1…1st opening width OW2: Second opening width

Claims

1. an introduction section having an inlet passage through which the gas supplied from a gas supply source can flow; a cavity portion communicating with the inflow path and having a resonance chamber for the inflowing gas to resonate; an outlet portion connected to the resonance chamber at a location separate from the inflow path and having an outflow path through which the gas flowing in from the resonance chamber can be discharged; Equipped with The cavity portion is detachable from one or more of the introduction portion and the discharge portion. Ultrasonic nozzle.

2. The cavity portion is detachable from both the introduction portion and the discharge portion. The ultrasonic nozzle of claim 1 .

3. The resonance chamber and the outlet passage are positioned at specific positions relative to the inlet passage. A fastener is provided to fasten the introduction portion, the cavity portion, and the discharge portion. The ultrasonic nozzle of claim 1 .

4. The cavity portion includes: a first cavity portion having a first resonance chamber that is a part of the resonance chamber; a second cavity portion having a second resonance chamber that is a portion of the resonance chamber different from the first resonance chamber; Equipped with The first cavity portion is detachable from the second cavity portion. The ultrasonic nozzle of claim 1 .

5. the cavity portion includes a third cavity portion located between the first cavity portion and the second cavity portion and having a third resonance chamber that is a portion of the resonance chamber that connects the first resonance chamber and the second resonance chamber, an opening width of the third resonance chamber on the first cavity side is smaller than a maximum width dimension of the first resonance chamber; The opening width of the third resonance chamber on the second cavity side is smaller than the maximum width of the second resonance chamber. The ultrasonic nozzle of claim 4.

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